Spectroscopic analysis device and spectroscopic analysis method

Abstract

To acquire both of molecular information and element information from the same portion of a measurement sample with a single analysis device.SOLUTION: A spectroscopic analysis device for spectroscopic analysis of light that is generated by irradiating a measurement sample with laser light, comprises: a first laser light source to emit a continuous wave laser beam; a second laser light source to emit a pulse laser beam; a radiation optical system for guiding the laser beam emitted from the respective laser light sources to the measurement sample to irradiate the measurement sample therewith; a spectroscopic detection optical system for spectrally decomposing the light generated at the measurement sample irradiated with the laser beam and detecting a spectrum; a spectrum analysis unit for analyzing the spectrum on the basis of the detected spectrum; and an analysis mode switching unit which switches the radiation optical system between the first laser light source and the second laser light source, thus switching between a first analysis mode in which Raman scattered light which is generated by irradiating the measurement sample with the continuous wave laser beam is spectrally analyzed, and a second analysis mode in which emitted light from plasma which is generated by irradiating the measurement sample with the pulse laser beam is spectrally analyzed.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a spectroscopic analyzer and a spectroscopic analysis method for analyzing a measurement sample by irradiating the measurement sample with laser light, splitting the generated light, and analyzing the spectrum thereof.

Background Art

[0002] Conventionally, as such a spectroscopic analyzer, a laser light source that emits laser light, an irradiation optical system that guides the laser light emitted from the laser light source to a measurement sample placed at a predetermined position and irradiates it, and a spectroscopic detection optical system that splits Raman scattered light generated in the measurement sample irradiated with the laser light and detects the spectrum are provided. A Raman spectroscopic analyzer that analyzes the detected spectroscopic spectrum (Raman spectrum) to analyze the measurement sample is known. Since the wavelength of the Raman scattered light is caused by the energy of the molecular vibration of the substance contained in the measurement sample, the molecular structure and the like of the substance contained in the measurement sample can be specified by analyzing this Raman scattered light.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] By the way, when using the above-described Raman spectroscopic analyzer, molecular information of substances contained in a measurement sample can be obtained, but elemental information (elemental composition, etc.) of the substance cannot be obtained. Therefore, when it is desired to obtain both molecular information and elemental information for an unknown measurement sample, molecular information is acquired using a Raman spectroscopic analyzer, and elemental information is acquired using an X-ray analyzer such as SEM-EDX, for example. In this case, since it is necessary to analyze the measurement sample using two different analyzers, the analysis becomes time-consuming. Also, since two different analyzers are used, there is a problem that both molecular information and elemental information cannot be acquired from the same location of the measurement sample.

[0005] The present invention has been made to solve the above-described problems, and the main object thereof is to enable obtaining both molecular information and elemental information from the same location of a measurement sample using a single analyzer.

Means for Solving the Problems

[0006] In order to solve the above problems, the present inventor focused on a spectroscopic analyzer using laser-induced breakdown spectroscopy (hereinafter also referred to as LIBS). Laser-induced breakdown spectroscopy is a technique for elemental analysis of a measurement sample by irradiating a high-energy pulsed laser onto the measurement sample, plasmaizing (atomizing and exciting) the irradiated site, and analyzing the spectral spectrum (LIBS spectrum) of the emitted light generated during the process in which the generated plasma cools and stabilizes. As a result of intensive studies, the present inventor noticed that the irradiation optical system and the spectroscopic detection optical system, which are physical configurations of a Raman spectroscopic analyzer, can function as an optical system for LIBS analysis although they are different from the original configurations, and thus arrived at the present invention.

[0007] That is, the spectroscopic analyzer according to the present invention analyzes the measurement sample by spectroscopically analyzing the light generated by irradiating the measurement sample with a laser beam, and includes a first laser light source that emits a continuous-wave laser beam, a second laser light source that emits a pulsed laser beam, an irradiation optical system that guides the laser beam emitted from each laser light source to the measurement sample for irradiation, a spectroscopic detection optical system that spectroscopically analyzes the light generated in the measurement sample irradiated with the laser beam to detect a spectrum, a spectrum analysis unit that analyzes the measurement sample based on the detected spectrum, and a light source that introduces the laser beam into the irradiation optical system is switched between the first laser light source and the second laser light source, so that a first analysis mode for spectroscopically analyzing Raman scattered light generated by irradiating the measurement sample with a continuous-wave laser beam and a second analysis mode for spectroscopically analyzing the emission light from the plasma generated by irradiating the measurement sample with a pulsed laser beam are switched. It is characterized by comprising an analysis mode switching unit.

[0008] With such a configuration, by switching the light source that introduces the laser beam into the irradiation optical system between the first laser light source that emits a continuous-wave laser beam and the second laser light source that emits a pulsed laser beam, it is configured to be able to take two analysis modes: a first analysis mode for performing analysis based on the Raman spectrum and a second analysis mode for performing analysis based on the LIBS spectrum. Therefore, both molecular information and elemental information can be obtained by a single spectroscopic analyzer. Moreover, since each laser beam emitted from each laser light source can be irradiated onto the measurement sample by a single irradiation optical system, it is possible to obtain molecular information and elemental information from the same location of the measurement sample.

[0009] As a specific embodiment for obtaining molecular information and elemental information from the same location of the measurement sample, there is an example in which the continuous-wave laser beam emitted from the first laser light source and the pulsed laser beam emitted from the second laser light source are guided to the measurement sample through a common optical path in the irradiation optical system. In this way, since the continuous-wave laser light from the first laser light source and the pulsed laser light from the second laser light source can be coaxially irradiated onto the measurement sample, molecular information and elemental information can be acquired from the same location of the measurement sample.

[0010] It is preferable that some or all of the plurality of optical devices constituting the irradiation optical system are shared in the first analysis mode and the second analysis mode. In this way, the number of optical devices constituting the irradiation optical system can be reduced and the configuration can be made simple.

[0011] Further, in the spectroscopic analyzer, it is preferable that some or all of the plurality of optical devices constituting the spectroscopic detection optical system are shared in the first analysis mode and the second analysis mode. In this way, the number of optical devices constituting the spectroscopic detection optical system can be reduced and the configuration can be made simple.

[0012] Further, in the spectroscopic analyzer, it is preferable that the spectroscopic detection optical system includes a Rayleigh light cut filter as the optical device shared in the first analysis mode and the second analysis mode. In this way, not only can weak Raman scattered light be analyzed in the first analysis mode, but also in the second analysis mode, the emission line spectrum of the incident wavelength can be eliminated from the detected spectrum, and the spectrum near the incident wavelength can be analyzed.

[0013] As a specific embodiment for the spectroscopic analyzer to perform each analysis mode, the spectroscopic detection optical system includes a spectroscope that spectroscopes the light generated in the measurement sample and a photodetector that detects the spectrum of the light spectroscoped by the spectroscope. In the first analysis mode, a continuous-wave laser light is emitted from the first laser light source with the photodetector exposed to detect the spectrum. In the second analysis mode, each time a pulsed laser light is emitted from the second laser light source, the photodetector is exposed for a certain period of time to detect the spectrum.

[0014] Also, as described above, in LIBS measurement, a pulsed laser is irradiated onto a measurement sample to form a plasma, and the emitted light generated during the process of cooling and stabilizing the generated plasma is analyzed. Therefore, if the laser light is spectroscopically detected up to the plasma light generated initially by irradiating the laser light, this becomes a noise component, and the accuracy of the obtained elemental information deteriorates. Therefore, in the second analysis mode, it is preferable that the spectroscopic analyzer starts the exposure of the photodetector after a predetermined time has elapsed from the timing when the second laser light source emits pulsed laser light. In this way, since the photodetector is exposed after a predetermined delay time has elapsed from the timing when the second laser light source emits pulsed laser light, it becomes possible to detect only the emitted light during the cooling and stabilizing process without detecting the initial plasma light that becomes a noise component, and elemental analysis can be performed with high accuracy.

[0015] The spectroscopic analysis method of the present invention is a spectroscopic analysis method using a spectroscopic analyzer including a laser light source, an irradiation optical system that guides and irradiates the laser light emitted from the laser light source onto a measurement sample, a spectroscopic detection optical system that spectroscopically detects the light generated in the measurement sample irradiated with the laser light to detect a spectrum, and a spectrum analysis unit that analyzes the measurement sample based on the detected spectrum. The laser light source includes a first laser light source that emits continuous-wave laser light and a second laser light source that emits pulsed laser light. By switching the light source that introduces the laser light into the irradiation optical system between the first laser light source and the second laser light source, a first analysis mode for spectroscopically analyzing the Raman scattered light generated by irradiating the measurement sample with continuous-wave laser light and a second analysis mode for spectroscopically analyzing the emitted light from the plasma generated by irradiating the measurement sample with pulsed laser light are switched.

[0016] With such a spectroscopic analysis method, the same operational effects as those of the spectroscopic analyzer of the present invention described above can be obtained.

[0017] Moreover, it is preferable that the spectroscopic analysis method alternately repeats the first analysis mode and the second analysis mode to analyze the measurement sample. In the second analysis mode in which the measurement sample is irradiated with pulsed laser light to generate plasma, the portion irradiated with the pulsed laser is physically scraped by being melted and atomized. Therefore, by alternately repeating the first analysis mode for analyzing the surface of the measurement sample and the second analysis mode for physically scraping the surface of the measurement sample, the analysis surface is gradually dug deeper, and molecular information and elemental information in the depth direction of the measurement sample can be obtained. Note that "alternately repeating the first analysis mode and the second analysis mode" means alternately performing the analysis by the first analysis mode and the analysis by the second analysis mode three or more times in total.

Advantages of the Invention

[0018] According to the present invention described above, it becomes possible to obtain both molecular information and elemental information from the same location of the measurement sample with one analyzer.

Brief Description of the Drawings

[0019]

Figure 1

Figure 2

Figure 3

Figure 4

Embodiments for Carrying Out the Invention

[0020] Hereinafter, a spectroscopic analyzer 100 according to an embodiment of the present invention will be described with reference to the drawings.

[0021] The spectroscopic analyzer 100 of this embodiment quantitatively analyzes and / or qualitatively analyzes the measurement sample W by spectroscopically analyzing the light generated by irradiating the unknown measurement sample W with a laser beam.

[0022] Specifically, as shown in FIG. 1, this spectroscopic analyzer 100 includes a light source unit 1 that emits a laser beam, an irradiation optical system 2A that guides and irradiates the laser beam emitted from the light source unit 1 onto the measurement sample W placed on the sample stage 4, and a spectroscopic detection optical system 2B that spectroscopically analyzes the light generated in the measurement sample W irradiated with the laser beam to detect a spectrum. In this embodiment, the light source unit 1 emits a laser beam of 532 nm, but it is not limited to this.

[0023] The irradiation optical system 2A includes a band-pass filter 21, a Rayleigh light cut filter (specifically, an edge filter) 22, and an objective lens 23. The laser beam emitted from the light source unit 1 passes through the band-pass filter 21 and is then reflected by the Rayleigh light cut filter 22 toward the sample stage 4 side. Then, the laser beam passes through the objective lens 23 and irradiates the measurement sample W on the sample stage 4.

[0024] The band-pass filter 21 transmits only a predetermined wavelength component of the laser beam emitted from the light source unit 1. The Rayleigh light cut filter 22 is a long-pass filter that transmits wavelengths longer than a specific wavelength (532 nm in this embodiment) and reflects wavelengths shorter than that.

[0025] The spectroscopic detection optical system 2B includes an objective lens 23, a Rayleigh light cut filter 22, a condenser lens 24, a spectroscope 25, and a photodetector 26. The light generated in the measurement sample W by irradiating the laser beam passes through the objective lens 23, the Rayleigh light cut filter 22, and the condenser lens 24 in this order, and then is spectroscopically analyzed by the spectroscope 25, and the spectroscopic spectrum is detected by the photodetector 26.

[0026] The spectroscope 25 has a spectral resolution for decomposing the light generated in the measurement sample W for each frequency, and is configured with a grating. In this embodiment, a Czerny-Turner spectroscope is used as the spectroscope 25, but it is not limited thereto.

[0027] The photodetector 26 is capable of simultaneously detecting multi-wavelength light spectrally decomposed by the spectroscope 25, and is a two-dimensional detector configured by arranging array elements. In this embodiment, a CCD (charge-coupled device) is used as the photodetector 26, but it is not limited thereto.

[0028] The information processing device 3 is a computer having a CPU, a memory, an A / D converter, a D / A converter, various input / output devices, etc. Based on a predetermined program stored in the memory, the CPU and peripheral devices cooperate, and as shown in FIG. 2, it functions as a spectral analysis unit 31 for analyzing the measurement sample W based on at least the spectral spectrum detected by the photodetector 26.

[0029] The spectroscopic analyzer 100 of this embodiment includes, as the light source unit 1, a first laser light source 11 that emits continuous-wave laser light and a second laser light source 12 that emits pulsed laser light. By switching the light source for introducing the laser light into the above-described irradiation optical system 2A between the first laser light source 11 and the second laser light source 12, Raman scattered light generated by irradiating the measurement sample W with continuous-wave laser light is spectroscopically analyzed (that is, analyzed by Raman spectroscopy), and a first analysis mode, and a second analysis mode for spectroscopically analyzing the emission light from the plasma generated by irradiating the measurement sample W with pulsed laser light (that is, analyzing by laser-induced breakdown spectroscopy) can be switched.

[0030] The first laser light source 11 functions as an excitation light source for generating Raman scattered light by irradiating the measurement sample W with laser light for excitation. This first laser light source 11 is a CW laser configured to continuously oscillate laser light with a constant output. The wavelength of the laser light emitted from the first laser light source 11 may be arbitrarily set, and in this embodiment, it is 532 nm.

[0031] The second laser light source 12 functions as an excitation light source that irradiates the measurement sample W with laser light to plasmaize (atomize and excite) the irradiated portion and generate plasma light. This second laser light source 12 is a pulsed laser configured to repeatedly oscillate laser light with a pulsed output at a constant frequency. More specifically, the second laser light source 12 of the present embodiment is a nanosecond pulsed laser having a pulse width of about 2 to 3.5 ns and a frequency of 1 kHz or less, but is not limited thereto. The wavelength of the laser light emitted from the second laser light source 12 may be arbitrarily set, and is 532 nm in the present embodiment. A collimating lens 12a is provided in front of the light emission direction of the second laser light source 12.

[0032] In the present embodiment, the first laser light source 11 and the second laser light source 12 are each constituted by an independent semiconductor laser. The first laser light source 11 and the second laser light source 12 are arranged such that the respective laser lights emitted therefrom are coaxially introduced into the irradiation optical system 2A using a half mirror 13 or the like. Then, the laser light introduced from each laser light source into the irradiation optical system 2A is guided by a common optical device constituting the irradiation optical system 2A and is coaxially irradiated onto the measurement sample W. That is, the irradiation optical system 2A and each constituent device (band-pass filter 21, Rayleigh light cut-off filter 22, and objective lens 23) are shared by the first laser light source 11 and the second laser light source 12.

[0033] Then, the light generated by irradiating the measurement sample W with the laser light emitted from each laser light source is spectroscopically analyzed by a common optical device (specifically, the objective lens 23, Rayleigh light cut-off filter 22, condenser lens 24, spectroscope 25, and photodetector 26) constituting the spectroscopic detection optical system 2B, and its spectrum is detected.

[0034] That is, the spectroscopic analyzer 100 of the present embodiment is configured to perform analysis in a first analysis mode using Raman spectroscopy and analysis in a second analysis mode using laser-induced breakdown spectroscopy (LIBS) using a common irradiation optical system 2A and spectroscopic detection optical system 2B.

[0035] And in the spectroscopic analyzer 100 of the present embodiment, in order to be able to switch between the first analysis mode and the second analysis mode using a common optical system, the information processing device 3 further functions as an analysis mode switching unit 32, a light source control unit 33, and a photodetector control unit 34. Hereinafter, the functions of each unit will be described together with the operation of the spectroscopic analyzer 100.

[0036] The analysis mode switching unit 32 receives an input of a mode designation signal that designates whether to perform analysis in the first analysis mode or the second analysis mode from the user, and outputs the mode designation signal to the light source control unit 33, the photodetector control unit 34, and the spectrum analysis unit 31. The light source control unit 33, the photodetector control unit 34, and the spectrum analysis unit 31 perform operations according to each analysis mode indicated by the received mode designation signal.

[0037] The light source control unit 33 controls which laser light from the first laser light source 11 and the second laser light source 12 is introduced into the irradiation optical system 2A. In the present embodiment, the output of the laser light emitted from each laser light source is controlled by controlling the drive current input to each laser light source. Specifically, in the first analysis mode, the light source control unit 33 inputs a constant drive current only to the first laser light source 11 and emits continuous wave laser light with a constant output for a predetermined time. On the other hand, in the second analysis mode, the light source control unit 33 inputs a pulse-controlled drive current only to the second laser light source 12 and repeatedly outputs pulsed laser light having a predetermined pulse width at a constant period.

[0038] The photodetector control unit 34 controls the exposure time and the start timing of the exposure of the photodetector 26. In the first analysis mode, the photodetector control unit 34 controls the photodetector 26 to be in a state of continuous exposure. That is, in this first analysis mode, the Raman light, which is the light generated from the measurement sample W, is always detected by the photodetector 26.

[0039] On the other hand, in the second analysis mode, the photodetector control unit 34 does not keep the photodetector 26 in a state of continuous exposure, but exposes the photodetector 26 for a certain period of time each time a pulsed laser light is emitted from the second laser light source 12. Specifically, the photodetector control unit 34 is configured to perform exposure control in synchronization with the output timing of the drive current to the second laser light source 12 by the light source control unit 33 (that is, the emission timing of the pulsed laser light). More specifically, as shown in FIG. 3, the exposure of the photodetector 26 is started after a predetermined time (delay time) has elapsed from the timing when the second laser light source 12 emits a pulsed laser light, and the exposure is ended before the next pulsed laser light is emitted. This delay time is set so that the exposure is started at the timing when the intensity of the emission light from the plasma generated from the measurement sample W decreases to about 10% of the peak intensity. In this embodiment, the delay time is about 0.1 μs to about 100 μs, but it is not limited thereto.

[0040] The spectrum analysis unit 31 performs qualitative analysis or quantitative analysis on the measurement sample W based on the spectrum of the light obtained based on the output signal of the photodetector 26. The spectrum analysis unit 31 is also configured to output the analysis result to a display.

[0041] In the first analysis mode, the spectral analysis unit 31 analyzes the measurement sample W based on the spectral spectrum (Raman spectrum) of the Raman scattered light obtained from the photodetector 26, and calculates information on chemical bonds, molecular structure, crystallinity, or information on stress / strain. For example, the spectral analysis unit 31 has various information on the unique peaks in the Raman spectra of known molecules and compounds as a database, and collates the peaks appearing in the measured Raman spectrum with the database to qualitatively and quantitatively analyze the molecules or compounds contained in the measurement sample W.

[0042] On the other hand, in the second analysis mode, the spectral analysis unit 31 analyzes the measurement sample W based on the spectral spectrum (LIBS spectrum) of the emission light from the plasma obtained from the photodetector 26, and calculates the contained elements and their concentrations in the measurement sample W. For example, the spectral analysis unit 31 has various information on the unique peaks in the LIBS spectra of known elements and compounds as a database, and collates the peaks appearing in the measured LIBS spectrum with the database to qualitatively and quantitatively analyze the elements or compounds contained in the measurement sample W.

[0043] According to the spectroscopic analysis apparatus 100 of the present embodiment configured as described above, by switching the light source for introducing the laser light into the irradiation optical system 2A between a first laser light source 11 that emits continuous-wave laser light and a second laser light source 12 that emits pulsed laser light, it is configured to be able to take two analysis modes: a first analysis mode for performing analysis based on the Raman spectrum and a second analysis mode for performing analysis based on the LIBS spectrum. Therefore, both molecular information and elemental information can be acquired by a single spectroscopic analysis apparatus 100. Moreover, since each laser light emitted from each laser light source can be irradiated onto the measurement sample W by a single irradiation optical system 2A, it becomes possible to acquire molecular information and elemental information from the same location of the measurement sample W.

[0044] Note that the present invention is not limited to the above-described embodiment. For example, in the above-described embodiment, the first laser light source 11 and the second laser light source 12 were configured by individual semiconductor lasers independent of each other, but it is not limited thereto. In other embodiments, as shown in FIG. 4, the first laser light source 11 and the second laser light source 12 may be configured by a common semiconductor laser. Then, by controlling the drive current input to the semiconductor laser by the light source control unit 33, the semiconductor laser may function as the first laser light source 11 and the second laser light source 12. For example, in the first analysis mode, a constant-value drive current is input to the semiconductor laser to cause continuous wave oscillation, thereby serving as the first laser light source 11. In the second analysis mode, a drive current may be pulse-input to the semiconductor laser to cause pulse oscillation, thereby serving as the second laser light source 12.

[0045] Also, in the above-described embodiment, as the second laser light source 12, pulse laser light was output by the so-called direct modulation method of pulse-controlling the drive current input to the semiconductor laser, but it is not limited thereto. In other embodiments, as the second laser light source 12, a modulator may be provided in front of the light emission of the semiconductor laser oscillating in continuous wave, and the beam output of the semiconductor laser may be turned on / off by the modulator, and pulse laser light may be output by the so-called external modulation method.

[0046] In other embodiments, the first laser light source 11 and the second laser light source 12 are not limited to semiconductor lasers, and may be configured using any type of laser such as a solid-state laser or a gas laser.

[0047] Furthermore, in the above-described embodiment, the first laser light source 11 and the second laser light source 12 emitted laser light of the same wavelength, but it is not limited thereto. In other embodiments, the first laser light source 11 and the second laser light source 12 may emit laser light of different wavelengths from each other. Also, the first laser light source 11 may have a plurality of laser light sources with different wavelengths from each other. Similarly, the second laser light source 12 may have a plurality of laser light sources with different wavelengths from each other.

[0048] In another embodiment, the spectroscopic analyzer 100 may be provided with a plurality of types of edge filters having different wavelength ranges to be transmitted, so that the Rayleigh light cut filter 22 can be switched. In this way, when a plurality of laser light sources having different wavelengths are provided, the Rayleigh scattered light can be cut by switching the edge filter to an appropriate one in accordance with the switching of the laser light source.

[0049] In another embodiment, the spectroscopic analyzer 100 may be provided with a plurality of objective lenses having different magnifications so that the objective lens 23 can be switched.

[0050] In the second analysis mode of the above embodiment, although the analysis by laser-induced breakdown spectroscopy (LIBS) was performed, it is not limited to this. In the second analysis mode of another embodiment, the analysis by fluorescence lifetime microscopy (FLIM) may be performed.

[0051] In the spectroscopic analysis method using the spectroscopic analyzer 100 described above, the measurement sample W may be analyzed by performing the analysis in the second analysis mode after performing the analysis in the first analysis mode, or the measurement sample W may be analyzed by performing the analysis in the first analysis mode after performing the analysis in the second analysis mode. Further, the spectroscopic analysis method using the spectroscopic analyzer 100 described above is not limited to this, and the analysis in the first analysis mode and the analysis in the second analysis mode may be alternately repeated to analyze the measurement sample W. Specifically, the analysis in the first analysis mode and the analysis in the second analysis mode may be alternately performed a total of three or more times to analyze the measurement sample W.

[0052] In addition, various modifications and combinations of embodiments may be made as long as they do not depart from the spirit of the present invention.

Explanation of Reference Numerals

[0053] 100 ··· Spectroscopic analyzer 11 ··· First laser light source (continuous oscillation laser) 12 ··· Second laser light source (pulse oscillation laser) 2A ··· Irradiation optical system 2B ··· Spectroscopic detection optical system 31 ··· Spectrum analysis unit W ··· Measurement sample

Claims

1. A spectroscopic analyzer for analyzing a measurement sample by spectroscopically analyzing light generated by irradiating the measurement sample with a laser beam, comprising: a first laser light source that emits continuous-wave laser light; a second laser light source that emits pulsed laser light; an irradiation optical system that guides the laser light emitted from each of the laser light sources to the measurement sample for irradiation; a spectroscopic detection optical system that spectrally analyzes the light generated in the measurement sample irradiated with the laser light to detect a spectrum; a spectrum analysis unit that analyzes the measurement sample based on the detected spectrum; an analysis mode switching unit that switches the light source for introducing the laser light into the irradiation optical system between the first laser light source and the second laser light source, thereby switching between a first analysis mode in which Raman scattered light generated by irradiating the measurement sample with continuous-wave laser light is spectroscopically analyzed and a second analysis mode in which emission light from plasma generated by irradiating the measurement sample with pulsed laser light is spectroscopically analyzed.

2. The spectroscopic analyzer according to claim 1, wherein the continuous-wave laser light emitted from the first laser light source and the pulsed laser light emitted from the second laser light source are guided to the measurement sample through a common optical path in the irradiation optical system.

3. The spectroscopic analyzer according to claim 2, wherein some or all of the plurality of optical devices constituting the irradiation optical system are shared in the first analysis mode and the second analysis mode.

4. The spectroscopic analyzer according to any one of claims 1 to 3, wherein some or all of the plurality of optical devices constituting the spectroscopic detection optical system are shared in the first analysis mode and the second analysis mode.

5. The spectroscopic analyzer according to claim 4, wherein the spectroscopic detection optical system includes a Rayleigh light cut filter as the optical device shared in the first analysis mode and the second analysis mode.

6. The spectroscopic detection optical system includes a spectroscope that spectrally analyzes the light generated in the measurement sample and a photodetector that detects the spectrum of the light spectrally analyzed by the spectroscope. In the first analysis mode, a spectrum is detected by emitting continuous-wave laser light from the first laser light source with the photodetector exposed. In the second analysis mode, each time pulsed laser light is emitted from the second laser light source, the photodetector is exposed for a certain period of time to detect a spectrum. The spectroscopic analyzer according to any one of claims 1 to 5.

7. The spectroscopic analysis apparatus according to claim 6, wherein in the second analysis mode, exposure of the photodetector is started after a predetermined time has elapsed from the timing when the second laser light source emits pulsed laser light.

8. A spectroscopic analysis method using a spectroscopic analysis apparatus including a laser light source, an irradiation optical system that guides the laser light emitted from the laser light source to a measurement sample for irradiation, a spectroscopic detection optical system that disperses the light generated in the measurement sample irradiated with the laser light to detect a spectrum, and a spectrum analysis unit that analyzes the measurement sample based on the detected spectrum, wherein the laser light source is provided with a first laser light source that emits continuous-wave laser light and a second laser light source that emits pulsed laser light, and a spectroscopic analysis method for switching between a first analysis mode in which Raman scattered light generated by irradiating the measurement sample with continuous-wave laser light is spectroscopically analyzed and a second analysis mode in which emission light from plasma generated by irradiating the measurement sample with pulsed laser light is spectroscopically analyzed by switching the light source for introducing laser light into the irradiation optical system between the first laser light source and the second laser light source.

9. The spectroscopic analysis method according to claim 8, wherein the measurement sample is analyzed by alternately repeating the first analysis mode and the second analysis mode.

Images