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113 results about "Pulsed laser irradiation" patented technology

Apparatus and method for testing far-field beam quality of laser device

PCT designated stageWO2025166809A1Testing optical propertiesLight spotControl cell
An apparatus and method for testing the far-field beam quality of a laser device. The apparatus comprises a target (1), a laser device (2), a four-quadrant photodetection unit (4), a near-infrared camera (5), a data processing unit (6), and a control unit; the laser device (2) is arranged on a two-dimensional turntable (3), and pulse laser emitted by the laser device (2) irradiates the target (1); the four-quadrant photodetection unit (4) receives a laser echo pulse diffusely reflected by a light spot on the target (1); the near-infrared camera (5) images the light spot formed on the target (1); the data processing unit (6) is connected to the four-quadrant photodetection unit (4) and the near-infrared camera (5); and the control unit is connected to the data processing unit (6), and is used for controlling the two-dimensional turntable (3) and controlling the near-infrared camera (5). Light spot position information is acquired by means of the four-quadrant photodetection unit (4), the orientation of the laser device (2) is adjusted, and the four-quadrant photodetection unit (4) and the near-infrared camera (5) are cooperatively used, thereby accurately acquiring a far-field unsaturated light spot of a far-field light spot, and performing quality evaluation on the far-field unsaturated light spot.
Owner:INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI

Simulation method and system for temperature field and stress field of short pulse laser irradiation material

The invention belongs to the technical field of laser and substance interaction, and relates to a simulation method and system for a temperature field and a stress field of a short-pulse laser irradiation material. The simulation method comprises the following steps: determining simulation parameters including short pulse laser irradiation parameters and material attribute parameters; constructing a thermal-mechanical coupling transient model of the material, and determining boundary conditions of a heat transfer physical field and a solid mechanics physical field of the model; meshing division is carried out on the thermal coupling transient model, and solver parameters are configured; the method specifically comprises the following steps: inputting a short pulse laser pulse width and a short pulse laser frequency into a pre-trained linear neural network model, and calculating to obtain solver parameters; and solving the thermal coupling transient model by applying a solver to obtain temperature field and stress field distribution conditions of the material at different irradiation moments. According to the simulation method, the complex transient physical process of the material under the action of the short pulse laser can be comprehensively and accurately captured.
Owner:PLA PEOPLES LIBERATION ARMY OF CHINA STRATEGIC SUPPORT FORCE AEROSPACE ENG UNIV

Method for improving oxidation resistance of nickel-based superalloy

The invention discloses a method for improving the oxidation resistance of nickel-based superalloy, and belongs to the technical field of metal material surface modification. Based on the high-energy transient effect of laser shock waves, the method mainly comprises the key steps of alloy surface pretreatment, laser shock peening process implementation, post-treatment and the like. Specifically, firstly, the surface of the nickel-based single crystal alloy is subjected to pretreatment such as polishing and cleaning, surface defects and pollutants are removed, and the treatment quality is guaranteed; then, according to the material characteristics and performance requirements of the nickel-based single crystal alloy, laser parameters such as laser energy, pulse width and light spot diameter are accurately set, and proper restraint layer and absorption layer materials are selected; then, high-energy pulse laser is utilized to irradiate the absorption layer, high-temperature and high-pressure plasma is induced to be generated, the plasma expands and explodes to generate strong shock waves, the shock waves act on the alloy surface, the surface material is subjected to severe plastic deformation, a residual compressive stress layer with the depth capable of reaching hundreds of micrometers is formed, meanwhile, surface grains are refined, and the microstructure is optimized; and after the strengthening treatment is completed, simple cleaning and performance detection post-treatment are carried out. Through laser shock strengthening, a special organization structure with high density and low defect density is formed on the surface of the nickel-based single crystal alloy, diffusion and invasion of oxygen atoms are effectively hindered, and the oxidation resistance of the alloy is remarkably improved. According to the method, the controllability of technological parameters is high, the strengthening effect can be accurately regulated and controlled, the treatment process is free of pollution and high in efficiency, the obtained strengthened nickel-based single crystal alloy can be widely applied to the fields such as aerospace engine hot end parts and nuclear energy equipment which have strict requirements for high-temperature oxidation resistance, the reliability of related parts is greatly improved, and the service life of the related parts is greatly prolonged.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA +1

Stainless steel and manufacturing method for stainless steel

To provide a stainless steel and the like excellently bondable to a non-metal material.SOLUTION: A stainless steel (1) has an irradiation part (2) irradiated with pulse laser (PL) at least in part on a surface (10). The irradiation part (2) includes a plurality of recesses and a plurality of protrusions adjacent to the recesses. The recesses and the protrusions are in indeterminate forms respectively. The protrusions have a width of 0.1 μm or more and 200 μm or less in a planar view, a gap between the protrusions located with the recesses in between is not beyond 300 μm, and a surface expansion ratio in the irradiation part is 1.1 or larger.SELECTED DRAWING: Figure 1
Owner:NIPPON STEEL CORPORATION

Pulse laser irradiation wide bandgap power device

The present invention discloses an experimental apparatus and a test method for a pulse laser irradiation wide bandgap power device. The apparatus includes an optical path coupling system, a circuit test system, a temperature control system, and an interaction control system. According to the present invention, irradiation sensitive region locating, irradiation transient current tests, irradiation sensitive condition tests, and irradiation degradation tests for the wide bandgap power device are implemented, and advantages of convenience in experiments, simple operation, automated tests, comprehensive and accurate test results, and the like are achieved.
Owner:NANJING UNIV

Perovskite solar cell with cysteine-silver cluster target implanted perovskite active layer

The invention belongs to the technical field of solar cells, and particularly relates to a perovskite solar cell with cysteine-silver clusters implanted into a perovskite active layer in a targeted mode, a cysteine-silver cluster colloidal solution is prepared by adopting a liquid-phase pulse laser irradiation technology, the cysteine-silver clusters serve as an additive and are implanted into the perovskite solution, and the perovskite active layer is prepared. And sequentially spin-coating a hole transport layer, a perovskite layer and an electron transport layer, and finally evaporating a metal electrode to prepare the perovskite solar cell with the cysteine-silver cluster target implanted perovskite active layer. The cysteine-silver cluster is implanted into the perovskite solution, and the smaller critical dimension of the cysteine-silver cluster can be used as a nucleation site, so that the growth of perovskite crystals is regulated and controlled, the defects of the perovskite thin film are passivated, the residual stress of the thin film is released, the formation of gradient energy levels of the perovskite layer and the electron transport layer is promoted, and the extraction and transmission of electrons are improved; the perovskite solar cell with higher efficiency is obtained, the implantation mode is convenient, and the preparation process is simple.
Owner:NORTHWESTERN POLYTECHNICAL UNIV

Pulse laser irradiation experimental device

The invention relates to a pulse laser irradiation experimental device. Comprising an optical parameter measurement platform, an optical path coupling module, a photoelectric test module, an electrical test platform, a first control system and a second control system, the first control system is used for fitting the elliptic polarization state change parameters with a scanning model to obtain the refractive index and the extinction coefficient of the single-layer film; the second control system is used for inputting the refractive index, the extinction coefficient, the reflectivity and the transmissivity of the thin film into a device incidence model to calculate effective pulse laser energy when pulse laser with different wavelengths penetrates through each layer of thin film to reach an active region in the to-be-measured wide bandgap power device, and obtaining an equivalent heavy ion LET value according to the effective pulse laser energy; and the light path coupling module, the photoelectric test module and the electrical test platform are controlled to carry out closed-loop adjustment on pulse laser energy. According to the invention, accurate control and adjustment of pulse laser energy are realized.
Owner:NANJING UNIV

Preparation method of organic-inorganic composite microcapsule, obtained product and application

The invention discloses a preparation method of an organic-inorganic composite microcapsule as well as an obtained product and application of the organic-inorganic composite microcapsule. The preparation method comprises the following steps: firstly, preparing a MoS2-metal composite material by adopting pulse laser irradiation, mixing the MoS2-metal composite material, PAO5 oil, polysulfone and an organic solvent to obtain an organic phase, and dissolving lauryl sodium sulfate and polyvinyl alcohol in water to obtain a water phase; and mixing the organic phase and the water phase, and obtaining the microcapsule by adopting a solvent evaporation method. The method disclosed by the invention is simple to operate and low in cost, and the obtained microcapsule can automatically store a lubricant and has excellent tribological performance in the friction process.
Owner:QILU UNIVERSITY OF TECHNOLOGY (SHANDONG ACADEMY OF SCIENCES)

Method of pulsed laser irradiation with reduced thermal damage

Optical energy for example, ultra-short laser beam pulses are delivered to a substrate by applying a temporal group 17 of optical pulses 16 to a region of the substrate 24. The temporal group 17 which
Owner:UNIV OF SOUTHAMPTON

Pulse width extension system, laser apparatus, and method for manufacturing electronic device

A pulse width extension system, a laser apparatus, and a method of manufacturing an electronic device are provided. A pulse width expansion system according to one aspect of the present disclosure expands the pulse width of an incident pulse laser beam and emits the pulse laser beam, the pulse width expansion system comprising: a pulse width expansion optical system configured to include a beam splitter and a plurality of mirrors; a housing that houses the pulse width expansion optical system; at least one target configured so as to be able to discriminate a portion irradiated with the pulsed laser light; and a target movement mechanism capable of disposing the at least one target on an optical path of the pulse laser light including the pulse width expansion optical system and retracting the at least one target from the optical path.
Owner:AURORA ADVANCED LASER CO LTD

Extreme ultraviolet light generation system and electronic device manufacturing method

An extreme ultraviolet light generation system, generating plasma by irradiating a target with pulse laser light and generate extreme ultraviolet light, includes a chamber, a target supply unit supplying the target into the chamber, a target passage detection device detecting the target passing through a predetermined region, a laser device radiating the pulse laser light toward the target having passed through the predetermined region, and a processor. The target passage detection device includes a light source irradiating the predetermined region with light, and a sensor receiving the light and outputting a signal corresponding to a received light amount of the light. The processor acquires, from the signal, a passage timing at which the target is detected and a time width during which the target is detected, and determines irradiation timing of the laser device for irradiating with the pulse laser light based on the passage timing and the time width.
Owner:GIGAPHOTON INC

Electrolysis method for efficiently recovering copper from electroplating waste liquid / waste mud

The invention relates to the technical field of metallurgy and chemical engineering, and particularly discloses an electrolysis method for efficiently recovering copper from electroplating waste liquid / waste mud, which specifically comprises the following steps: copper leaching, purification and acid regulation, complexing iron removal, electrodeposition copper deposition and photocatalytic air flotation treatment. Wherein in the electrodeposition copper deposition stage, through the synergistic effect of a pulse power supply, pulse laser irradiation and a rotating cathode, the rotating cathode continuously conveys high-concentration copper ions to a cathode interface through the convection effect; the pulsed power supply reduces an electric crystallization nucleation energy barrier in cooperation with laser irradiation while increasing the deposition rate, and improves the copper deposition compactness. And high-speed and high-efficiency deposition of copper and high density and high purity of a cathode product are realized through cooperation of the three components. And in the photocatalytic air flotation treatment stage, a trace amount of residual copper in the copper-poor liquid is efficiently enriched through a bismuth tungstate photocatalytic reduction and new copper reagent selective complexing air flotation separation technology, and the total recovery rate of copper is increased.
Owner:WENZHOU KERUI ENVIRONMENTAL RESOURCES UTILIZATION CO LTD

A pulsed laser irradiation experimental device

The present invention relates to a pulsed laser irradiation experimental device. It comprises an optical parameter measurement platform, an optical coupling module, an optoelectronic test module, an electrical test platform, and a first control system and a second control system. The first control system is used to fit the ellipsometric state change parameters with a scanning model to obtain the refractive index and extinction coefficient of a single-layer thin film. The second control system is used to input the refractive index, extinction coefficient, reflectivity, and transmittance of the thin film into a device incident model to calculate the effective pulsed laser energy of pulsed lasers of different wavelengths when they pass through each layer of thin film and reach the active region in a wide bandgap power device to be tested. The equivalent heavy ion LET value is obtained based on the effective pulsed laser energy, and the optical coupling module, optoelectronic test module, and electrical test platform are controlled to perform closed-loop regulation of the pulsed laser energy. The present invention achieves accurate control and regulation of pulsed laser energy.
Owner:NANJING UNIV

Method and device for measuring medical specimen through infrared femtosecond pulse laser

The invention discloses a method and a device for measuring a medical specimen by using infrared femtosecond pulse laser, relates to a medical specimen detection technology and an infrared femtosecond pulse laser technology, and aims to solve the problems of large error and low detection accuracy of the existing medical specimen detection technology. The method comprises the following steps: irradiating a medical specimen by using wavelength-tunable long-wave infrared femtosecond pulse laser; transmitting light of the medical specimen is collected through a detector; and a measurement result of the medical specimen is given according to an output signal of the detector. The device comprises a sample pool used for placing a medical specimen, and a long-wave infrared femtosecond pulse laser used for outputting long-wave infrared femtosecond pulse laser with tunable wavelength and irradiating the long-wave infrared femtosecond pulse laser on the medical specimen; the detector is used for receiving an optical signal transmitted by the medical specimen; and the calculation module is used for processing the signal output by the detector so as to obtain a measurement result of the medical specimen. Compared with the prior art, the method is higher in detection precision.
Owner:XINJIANG TECH INST OF PHYSICS & CHEM CHINESE ACAD OF SCI

Method for loading small-size precious metal on molybdenum carbide carrier

The invention discloses a liquid-phase laser preparation method of a molybdenum carbide carrier loaded metal composite material, which comprises the following steps: firstly, based on a liquid-phase pulse laser corrosion technology, corroding an elemental Ag or Au target material in acetone to obtain uniformly dispersed Ag or Au nanoparticles coated with 1-2 carbon layers, and in the process, the size distribution of the metal nanoparticles is uniform and adjustable; and performing in-situ carbonization on the oxide MoO3 powder in a high-carbon reduction liquid phase environment (acetone) by using a pulse laser irradiation technology to convert the oxide MoO3 powder into MoC nanoparticles. And finally, irradiating the mixed solution of the metal nanoparticles and MoC by using laser with the wavelength of 355 nm to prepare a series of composite materials such as Ag-coated MoC or Au-coated MoC and the like. According to the method, the traditional metal-doped molybdenum carbide process is improved, no other chemical reagents such as surfactants and stabilizers need to be added, and generation of other impurity products is avoided. The method is simple to operate, green, efficient and high in universality.
Owner:HEFEI INSTITUTE OF PHYSICAL SCIENCE CHINESE ACADEMY OF SCIENCES

Time-resolved laser-induced fluorescence spectroscopy systems and uses thereof

To provide systems for characterizing a biological sample by analyzing emission of fluorescent light from the biological sample upon excitation and methods for using the same.SOLUTION: A biological sample 101 is projected with pulsed laser of an excitation source 100. A fluorescence signal from the biological sample is relayed through a collection fiber CF to a demultiplexer and resolved into a number of narrow spectral bands, each with a distinct central wavelength. Further, spectral bands time-delayed by a delay device 105 arrive at multi-channel plate photomultiplier tubes (MCP-PMTs) 106 at different time points, allowing detection of a decay profile of each spectral band.SELECTED DRAWING: Figure 1A
Owner:CEDARS SINAI MEDICAL CENT

EUV light generation apparatus and electronic device manufacturing method

An EUV light generation apparatus includes a chamber; a target supply device configured to supply a target into the chamber; a first pulse laser device configured to irradiate the target with first pulse laser light in a plasma generation region in the chamber; an EUV light concentrating mirror arranged in the chamber and configured to reflect EUV light, radiated from the plasma generation region, toward an external apparatus; and a second pulse laser device configured to irradiate a diffusion matter, diffused by the irradiation with the first pulse laser light, with second pulse laser light having an irradiation spot diameter larger than an irradiation spot diameter of the first pulse laser light. An intensity of the EUV light generated by the irradiation with the second pulse laser light is smaller than an intensity of the EUV light generated by the irradiation with the first pulse laser light.
Owner:GIGAPHOTON INC

A simulation method and system for the temperature field and stress field of a material irradiated by short-pulse laser

The present invention belongs to the technical field of the interaction between laser and matter, and relates to a simulation method and system for the temperature field and stress field of a material irradiated by short-pulse laser. The simulation method includes: determining simulation parameters, including short-pulse laser irradiation parameters and material property parameters; constructing a thermo-mechanical coupling transient model of the material, and determining the boundary conditions of the heat transfer physical field and the solid mechanics physical field of the model; performing grid division on the thermo-mechanical coupling transient model, and configuring solver parameters; specifically: inputting the short-pulse laser pulse width and the short-pulse laser frequency into a pre-trained linear neural network model, and calculating to obtain the solver parameters; applying the solver to solve the thermo-mechanical coupling transient model to obtain the temperature field and stress field distribution of the material at different irradiation times. The simulation method of the present invention can comprehensively and accurately capture the complex transient physical process of the material under the action of short-pulse laser.
Owner:PLA PEOPLES LIBERATION ARMY OF CHINA STRATEGIC SUPPORT FORCE AEROSPACE ENG UNIV

Laser processing method and circuit board manufacturing method

A laser processing method according to a viewpoint of the present disclosure includes radiating ultraviolet pulse laser light onto a workpiece having a stacked structure in which a conductor layer, an insulating layer, and a sacrificial layer are stacked on each other in the presented order, the pulse laser light radiated from the side facing the sacrificial layer, to change a laser ablation processing mode in the sacrificial layer and form a through hole in the sacrificial layer, radiating the pulse laser light onto the insulating layer through the through hole to form an opening in the insulating layer, and removing the sacrificial layer after the formation of the opening.
Owner:GIGAPHOTON INC

A special-shaped porous biomass-based nano-activated carbon-graphene composite adsorption material

The present invention discloses a special-shaped porous biomass-based nano-activated carbon-graphene composite adsorption material. A carbonized and activated biomass carbon source and graphene oxide are dispersed in a solvent to obtain a mixed solution, and a binder is added thereto. The mixed solution is used as a liquid target and subjected to pulsed laser irradiation under continuous stirring to ablate the liquid target. After the ablation, the material is centrifuged and washed to obtain a special-shaped porous biomass-based nano-activated carbon-graphene composite adsorption material. The preparation process of the present invention is simple, and only laser irradiation / ablation technology is required to obtain a graphene and activated carbon composite adsorption material with good performance; and in the prepared special-shaped porous biomass-based nano-activated carbon-graphene composite adsorption material, the activated carbon and graphene are tightly combined and uniformly dispersed on the graphene, and the morphology and size of the activated carbon can be controlled.
Owner:JINAN GUOKE MEDICAL TECH DEV CO LTD

Chip irradiation damage identification system and method based on pulse laser cooperative scanning

The invention provides a chip irradiation damage identification system and method based on pulse laser cooperative scanning. The system comprises a pulse laser output module and a cooperative control module. The pulse laser output module is used for coupling laser light paths output by the multiple paths of pulse laser light sources into a single laser light path; the system comprises a pulse laser irradiation state and a damage identification state, the cooperative control module is used for switching the working state of the system, when the working state is switched to the pulse laser irradiation state, the pulse laser output module is started, and the displacement table is controlled to drive the sample table for placing the chip to move, so that the chip moves within a set scanning range at set scanning precision; and when the damage identification state is switched to, the electromagnetic shielding cover and the high-sensitivity CCD camera are started, bias voltage is applied to the chip, the light emitting condition of the chip is identified, and the irradiation sensitive points of the chip are recorded. According to the invention, the damage distribution condition of the chip before and after pulse laser irradiation can be efficiently obtained.
Owner:NANJING UNIV +1

Watch parts, watches, methods for decorating watch parts

To provide watch parts with a natural, textured surface created by laser processing. [Solution] The watch component is formed by irradiating the substrate with a pulsed laser to form a plurality of processing marks on the processed surface of the substrate, wherein the processed surface includes a textured region in which textured processing marks are formed and a plurality of regions that are not the textured region, and one of the plurality of regions is a first region in which a first linear pattern is formed by a plurality of straight lines consisting of processing marks extending in a first direction, and a second region is a region of the plurality of regions different from the first region in which a second linear pattern is formed by a plurality of straight lines consisting of processing marks extending in a second direction different from the first direction.
Owner:SEIKO EPSON CORP

Acceleration measurement device based on particle image velocimetry

The application relates to an acceleration measuring device based on a particle image velocimetry, which comprises at least two CCD cameras, the center points of the mirrors of the two CCD cameras are located on a straight line through a limiting device; a tracer particle generator is used for emitting tracer particles along the direction vertical to the normal of the mirror of the CCD camera; a four-pulse laser is used for sequentially emitting four pulse laser beams along the direction vertical to the direction of the particle flow to illuminate the tracer particles; a control device is connected with the CCD camera and the four-pulse laser respectively, and is used for synchronously controlling the CCD camera and the four-pulse laser, so that the CCD camera acquires the tracer particle images under the irradiation of different pulse lasers in a double-exposure mode, and the speed and acceleration of the particles are acquired based on the tracer particle images. Since the four-pulse laser capable of sending four high-energy pulse lasers at a time is adopted, at least four particle images with a very short time interval are acquired by using two CCD cameras, and then the particle acceleration can be acquired.
Owner:CHINA AERODYNAMICS RES & DEV CENT

Performance recovery method of EUV light generation system, EUV light generation system, and processor

To provide a performance recovery method of an EUV light generation system which generates EUV light by irradiating a target with a pulse laser beam.SOLUTION: A performance recovery method of an EUV light generation system executes a first evaluation step of evaluating performance of EUV light while generating the EUV light at constant repetition frequency during a first period, executes an adjustment step of adjusting the performance when an evaluation result by the first evaluation step is not within a normal range, then executes the first evaluation step as a confirmation step, executes a second evaluation step of evaluating the performance of the EUV light while generating the EUV light at the repetition frequency during a second period longer than the first period, when the evaluation result by the confirmation step is within a normal range, ends the processing when the evaluation result by the confirmation step is not within the normal range, and evaluates an index related to a position where a target is irradiated with a pulse laser beam in the first evaluation step and the second evaluation step.SELECTED DRAWING: Figure 6
Owner:GIGAPHOTON INC

Spectroscopic analysis device and spectroscopic analysis method

To acquire both of molecular information and element information from the same portion of a measurement sample with a single analysis device.SOLUTION: A spectroscopic analysis device for spectroscopic analysis of light that is generated by irradiating a measurement sample with laser light, comprises: a first laser light source to emit a continuous wave laser beam; a second laser light source to emit a pulse laser beam; a radiation optical system for guiding the laser beam emitted from the respective laser light sources to the measurement sample to irradiate the measurement sample therewith; a spectroscopic detection optical system for spectrally decomposing the light generated at the measurement sample irradiated with the laser beam and detecting a spectrum; a spectrum analysis unit for analyzing the spectrum on the basis of the detected spectrum; and an analysis mode switching unit which switches the radiation optical system between the first laser light source and the second laser light source, thus switching between a first analysis mode in which Raman scattered light which is generated by irradiating the measurement sample with the continuous wave laser beam is spectrally analyzed, and a second analysis mode in which emitted light from plasma which is generated by irradiating the measurement sample with the pulse laser beam is spectrally analyzed.SELECTED DRAWING: Figure 1
Owner:HORIBA LTD

Preparation method of silicon solar cell with coplanar electrode

PendingCN120583771AEtchingElectrical battery
The invention discloses a preparation method of a silicon solar cell with a coplanar electrode, which comprises the following steps of: epitaxially growing an N-type silicon buffer layer, a P-type SiGe absorption layer with gradually reduced Si component and a P-type Si covering layer on an N-type silicon substrate through an MOCVD (Metal Organic Chemical Vapor Deposition) technology, then evaporating a layer of Zn metal film on the surface of a sample, and carrying out P-type heavy doping on the Si covering layer through pulse laser irradiation, evaporating a Ti / Al metal layer on the surface of the sample to form P-type electrode metal; the preparation method comprises the following steps: preparing a silicon substrate, forming a finger electrode region through photoetching, etching to the silicon substrate region by adopting ICP (Inductively Coupled Plasma), evaporating a Ti / Al metal layer to form N-type electrode metal, and annealing in a nitrogen atmosphere to form P-type ohmic contact and N-type ohmic contact to obtain the silicon solar cell. The silicon solar cell prepared by the invention has the advantages of low series resistance, low heating, high absorption efficiency and the like.
Owner:FUZHOU UNIV

Method for finding the optimal focus position for laser ablation and cutting with minimal cutting width and good edge quality

Method for controlling the distance (14) between the workpiece (9) and the processing optics (8) during cutting, drilling, and ablation of various materials with minimal side effects on non-irradiated areas, wherein the workpiece (9) is irradiated by a pulsed laser (7) with an intensity that generates plasma emission, wherein the strength of the plasma emission is detected, stored, and evaluated in such a way that the distance (14) of the processing optics to the workpiece surface is varied (15) until a local minimum (3) is reached near the maximum intensity of the plasma emission (target position) and sharp cuts and ablation channels are produced, characterized in that the detection of the strength of the plasma emission is carried out by means of a detection system (10) consisting of filters and photodetectors, wherein a spectrometer can also be used instead of a filter.
Owner:NOVANTA EURO GMBH

Substrate processing method and substrate processing system

To appropriately transfer a device layer formed on a surface of a second substrate onto a first substrate in a laminated substrate in which the first substrate and the second substrate are bonded together.SOLUTION: In a method for transferring a device layer formed on a second substrate onto a first substrate in a laminated substrate in which the first substrate and the second substrate are bonded together, a first surface film is formed on the first substrate; a laser absorption layer, a Si film, a second device layer, and a second surface film are formed on the second substrate in this order from the surface side; and the first surface film of the first substrate and the second surface film of the second substrate are bonded to each other. The method includes irradiating the laser absorption layer with pulsed laser light from the back side of the second substrate so that the laser absorption layer absorbs the laser light, and peeling off the second substrate from the first substrate between the laser absorption layer and the second substrate to transfer the second device layer and the second surface film onto the first substrate.SELECTED DRAWING: Figure 1
Owner:TOKYO ELECTRON LTD

Laser welding method

A laser welding method includes a preparation process and a welding process. In the preparation process, the sides of the longitudinal ends of the conductors (91) of two flat lines (90) are joined together. In the welding process, a laser is irradiated onto an area including the boundary between the end surfaces of the conductors (91) of the two flat lines (90) to weld the flat lines (90) together. The laser is irradiated onto the end surfaces of the flat lines (90) after passing through a transmission optical system. The transmission optical system is rotatable, and the irradiation position of the laser toward the end surfaces changes in a first direction according to the rotational phase of the transmission optical system. In the welding process, the first direction is made parallel to the long side of the end surface of the flat line (90), and a pulsed laser is irradiated onto an area including the boundary between the end surfaces of the conductors (91) of the flat lines (90) to weld the flat lines (90) together.
Owner:KAWASAKI JUKOGYO KK

Photovoltaic battery charging method and system

The present invention provides a photovoltaic battery charging method and system, which belongs to the field of wireless energy transmission technology, including charging the photovoltaic battery panel by irradiating the photovoltaic battery panel with pulsed laser; setting the steady-state temperature that the photovoltaic battery panel needs to reach according to the required laser irradiation intensity and the heat transfer coefficient of the photovoltaic battery panel; and setting the peak and trough time of the transient pulse laser according to the steady-state temperature, so that the photovoltaic battery panel is cooled down during the trough time period to achieve dynamic control of the temperature of the photovoltaic battery panel. This method can realize dynamic control of the temperature of the photovoltaic cell during unlimited energy transmission, and solves the problem that when the surface temperature of the photovoltaic cell exceeds a certain range, the power output characteristics of the photovoltaic cell are greatly reduced, and the battery is in danger of melting and damage.
Owner:NORTHWESTERN POLYTECHNICAL UNIV