19 results about "Pulsed laser radiation" patented technology

An additive manufacturing method includes applying a layer of building material on a support or a layer of building material that has been previously selectively solidified, selectively solidifying the layer of building material by supplying laser radiation to positions in the layer that are assigned to a cross-section of the object in this layer in that these positions are scanned with a laser beam along a number of trajectories in order to melt the building material along these trajectories, and repeating the two steps of applying a layer and solidifying said layer until the cross-sections of the object that are to be manufactured by additive manufacturing have all been selectively solidified. Pulsed laser radiation is used for melting the building material and the laser beam can be moved across the layer of building material with a speed exceeding 1000 mm / s.

The disclosure relates to an optical system comprising a laser source (1) which generates pulsed laser radiation consisting of a temporal sequence of laser pulses in an input laser beam (EL), a splitting element (2) which follows the laser source (1) in the course of the beam and splits each of the laser pulses into laser pulse replicas separated spatially and / or temporally from one another, a combination element (4) which follows the splitting element (2) in the course of the beam and superimposes the laser pulse replicas in a respective laser pulse in an output laser beam. It is the task of the disclosure to provide an improved optical system compared to the prior art. It should be possible to generate particularly short and thus spectrally broadband laser pulses of high power with the optical system. The disclosure proposes that at least one multipass cell (3) is arranged in the beam path between the splitting element (2) and the combination element (4), through which the laser pulse replicas propagate, wherein the multipass cell (3) contains a medium in which the laser pulse replicas undergo nonlinear spectral broadening.

The invention relates to a method for producing a hollow structure (28) in a workpiece (25) in the form of a substrate for a mirror, in particular for an EUV mirror (M4), by material removal using pulsed laser radiation (35), comprising: illuminating the workpiece (25), which is made of a material transparent to the pulsed laser radiation (35), from a radiation entry side (27), focusing the pulsed laser radiation (35) in a focus area (39), forming a removal front (46) for the planar removal of material from the workpiece (25) by moving the focus area (39) along a movement pattern (41), and producing the hollow structure (28) by moving the removal front (46) within the workpiece (25), wherein a removal front (46) is formed at least temporarily during the production of the hollow structure (28).which is not oriented perpendicular to an incident direction (Z) of the pulsed laser radiation (35) on the radiation entry side (27) of the workpiece (25), and wherein the hollow structure is created in the form of a channel through which a fluid can flow. The invention also relates to a mirror, in particular an EUV mirror, and an EUV lithography system.

A method for producing a composite material of metal and plastic to form a plastic-metal hybrid component, in which macroscopic undercuts with microscopic undercuts having stochastically random roughness shapes and depths are introduced into the metal surface by means of short-pulse laser radiation to improve the adhesion between the metal surface and at least one plastic component, wherein the shapes and depths of the laser structuring of the metal surface are produced by changing the guidance and / or speed of the laser beam movement and simultaneously adjusting the power and / or the repetition rate of the short-pulse laser radiation, and the stochastically random roughness shapes are each at least partially filled with the at least one plastic component in an injection molding process such that the latter is gripped in the macroscopic and / or microscopic undercuts.wherein, following the roughening of the metal surface prior to the injection molding process of the at least one plastic component, at least the roughened surface of the metal is heated to a temperature which, in the processing range from room temperature to 100°C, is above the processing temperature of the at least one plastic component.

A laser system (1) comprises a laser radiation source (7) for providing a pulsed laser radiation (9), wherein the pulsed laser radiation comprises laser pulses (11) having a pulse energy in the range of 1 mJ to 100 J or in the range of 10 mJ to 1 J and a pulse duration in the range of 10 fs to 5 ps or in the range of 500 fs to 1.5 ps. The laser system (1) further comprises an optical system (3) for spectral broadening of the pulsed laser radiation (9). The optical system (3) comprises: - a first polarization setting optics (19) setting a circular polarization state (17B) of the pulsed laser radiation (9), and - a multi-pass cell (5) having at least two mirrors (25A, 25B) through which the pulsed laser radiation (9) passes forming a plurality of intermediate focus regions (29), wherein the multi-pass cell (5) is filled with a filling gas (5A) having an optical nonlinearity, wherein the filling gas (5A) enables spectral broadening of the pulsed laser radiation (9) in the intermediate focus regions (29). Further, a pressure of the filling gas (5A) is set in a pressure range in which there is an ionization behavior of the filling gas (5A) in the regime of multiphoton ionization, and a focus diameter (d) of the intermediate focus regions (29) is set such that the pulsed laser radiation (9) passes through the multi-pass cell (5) without ionization of the filling gas (5).

A system for characterizing chiral molecules including an interaction zone arranged to receive a sample of chiral molecules; a laser source arranged to emit pulsed laser radiation, the laser radiation being suitable for interacting with the molecules in the interaction zone; a polarization modulator arranged to elliptically polarize the laser radiation; an optical cavity configured to redirect the pulsed laser radiation into the interaction zone several times; a detector arranged to measure a chiroptical signal produced by the interaction between the molecules and the laser radiation; and a determiner arranged and / or programmed to determine at least the chirality of the molecules from the detected chiroptical signal.

The invention relates to a method for producing a hollow structure (3) in a substrate (2), in particular a glass substrate, of a workpiece (1), wherein the hollow structure (3) to be produced has inner walls (4). The method comprises selecting a pulsed laser radiation (12) for which the material of the substrate (2) is at least partially transparent. Furthermore, the method comprises irradiating the pulsed laser radiation (12) into the substrate (2), focusing the pulsed laser radiation (12) in a focus area (15), and moving the focus area (15) along a desired geometry (17) of the hollow structure (3) to be produced. The pulsed laser radiation (12) modifies at least partially the material of the substrate (2) along the desired geometry (17) of the hollow structure (3) to be produced. Specifically, the pulsed laser radiation (12) modifies at least the material of the substrate (2) that borders the inner walls (4) of the hollow structure (3) to be produced.After the material has been modified by pulsed laser radiation (12), the modified material (2a) is thermally and / or mechanically processed in such a way that the material in the hollow structure (3) to be produced detaches from the substrate (2).

A system for material-ablative laser processing of workpieces in liquid is provided witha laser beam source for generating pulsed laser radiation;a focusing unit for focusing the laser radiation onto a workpiece;and a process chamber for receiving a workpiece. The process chamber includesa first side having a transparent process window for letting pass laser radiation;a second side arranged opposite the first side;a chamber wall surrounding an interior of the process chamber; anda flow generator for generating a flow within the interior of the process chamber. The flow generator includes a first flow generator unit for generating a first flow along a first flow axis and a second flow generator unit for generating a second flow along a second flow axis; anda positioning unit for adjusting the position of the laser radiation on the workpiece.

The invention relates to an optical system comprising a laser source (1) generating pulsed laser radiation consisting of a temporal sequence of laser pulses and at least one pulse compression device (3) located in the beam path and having a nonlinear medium (7), wherein the laser pulses undergo a nonlinear spectral broadening during the propagation through the medium (7) and a chirp is applied to the laser pulses. The object of the invention is to provide an optical system which makes it possible to generate nonlinearly compressed laser pulses with an improved temporal pulse contrast or with an improved pulse quality. According to the invention, a group delay dispersion which varies along the beam path and at least partially compensates the chirp is applied to the laser pulses by the pulse compression device (3).

The invention relates to a laser machining device (10), comprising - a laser beam source (12) for generating pulsed laser radiation (14); - a focusing unit (18) for focusing the laser radiation (14) onto a workpiece (22) to be machined; - a flow generator unit (24) for providing a flow on the surface of the workpiece (22), wherein the flow generator unit (24) has an inlet channel (26) and a flow generator for generating a flow and for providing a liquid (23) into the inlet channel (26); and - a holding unit (34) which is designed to receive the workpiece (22) to be machined, and wherein the holding unit (34) - has a first holding element (36) which is designed to receive a workpiece (22); - has a second holding element (38) which is designed to receive an annular fastening element (39), wherein the second holding element (38) annularly surrounds the first holding element (36); - a third holding element (40), which annularly surrounds the second holding element (38), wherein the third holding element (40) has a first end (42) which adjoins the second holding element (38) and has a second, distal end (44), and an outer region (46) which comprises the distal end (44), wherein the third holding element (40) has a greater height at its second end (44) than at its first end (42).

A pulse compressor (14) for time-compressing pulsed laser radiation according to a chirped pulse amplification, CPA, scheme, the pulse compressor comprising a first compressor element (14a), and a second compressor element (14b). The first compressor element (14a) is configured to receive as input the pulsed laser radiation and to produce as output first compressed radiation having a first pulse duration. The second compressor element (14b) is configured to receive as input the first compressed radiation and to produce as output second compressed radiation having a second pulse duration. The second pulse duration is shorter than the first pulse duration. The first compressor element (14a) is configured to time-compress the pulse of the pulsed laser radiation of a first compression factor. The second compressor element (14b) is configured to time-compress the pulse of the first compressed radiation of a second compression factor. The first compression factor is larger than the second compression factor.

The present invention relates to a method and a device for shape correction of an optical component using pulsed laser radiation. For this purpose, the component is measured, and excess material is determined by comparison with a target geometry. This excess material is then at least partially removed by processing with at least one pulsed laser beam with pulse durations of > 1 µs in order to approximate the actual geometry to the target geometry. During processing, the component is rotated about an axis of rotation at a certain speed, whereby the distance of the laser beam to the axis of rotation is changed at least temporarily. The rotational speed, the diameter of the laser beam on the component, and the temporal interval between the laser pulses are selected such that the material areas of the component removed by successive laser pulses do not overlap, as illustrated by way of example in Figure 3.

A laser system includes a laser radiation source for providing pulsed laser radiation, and an optical system that includes a first polarization setting optical unit configured to set a circular polarization state of the pulsed laser radiation and a multipass cell having at least two mirrors. The pulsed laser radiation passes through the multipass cell with formation of a plurality of intermediate focus zones. The multipass cell is filled with a filling gas that has an optical nonlinearity and causes a spectral broadening of the pulsed laser radiation in the intermediate focus zones. A pressure of the filling gas is set in a pressure range so that there is an ionization behavior of the filling gas in a form of multiphoton ionization. Focus diameters of the intermediate focus zones are set such that the pulsed laser radiation passes through the multipass cell without ionization of the filling gas.

Provided is an examination device comprising: a laser irradiation unit that irradiates an eye being examined with a pulsed laser beam; and a fluorescence detection unit that is provided with a detector for detecting autofluorescence which is from floating cells in the eye being examined and which occurs due to irradiation of the eye being examined with the pulsed laser beam, wherein the radiant exposure of the pulsed laser beam with which the floating cells in the eye being examined are irradiated is not more than 10 J / cm2. Also provided is a slit lamp microscope comprising the examination device.

The invention relates to a device for generating a sequence of laser pulses consisting of pulse bursts. The object of the invention is to provide a possibility of generating laser pulses for material processing in the burst mode at a high quality based on the principle of beam combination. To that end, the invention proposes a device, comprising:at least one laser (1, 14, 15) which generates pulsed laser radiation in the form of a sequence of temporally equidistant individual pulses,a combination element (4) which superimposes the laser radiation supplied to the combination element (4) via at least two spatially separate input beam paths of different length, into pulse bursts in an output beam path (9),a coupling optics (10) arranged in the output beam path (9),an optical waveguide (11), wherein the coupling optics (10) couples the laser radiation superimposed in the output beam path (9) into the optical waveguide (11) at the input side thereof, and wherein the optical waveguide (11) guides the laser radiation primarily in a fundamental mode, anda decoupling optics (12) which couples out the laser radiation from the optical waveguide (11) at the output side thereof. Furthermore, the invention relates to a corresponding method.

Device for material processing by means of laser radiation, comprising a laser radiation source (S) suitable for emitting pulsed laser radiation (3) for interaction with the material (5), optics (6) focusing the pulsed processing laser radiation (3) into the material (5), namely cornea, onto an interaction center (7), a scanning device (10) adjusting the position of the interaction center in the material (5), wherein each processing laser pulse interacts with the material (5) in a zone (8) surrounding its associated interaction center (7), such that material (5) is separated in the interaction zones (8), and a control device (17) which controls the scanning device (10) and the laser radiation source (S) in such a way that a cut surface (9) is created in the material (5) by a plurality of interaction zones (8), characterized in thatthat the control device (17) defines the cutting surface (9) comprising an anterior (F) and a posterior section (L), wherein the cutting surface (9) as a whole circumscribes a partial volume (T) in the cornea, and controls the scanning device (10) and the laser radiation source (S) such that the interaction zones (8) in the posterior section (L) are generated along an outward-to-inward spiral and the interaction zones (8) are subsequently generated in the anterior section (F) along an outward-toward spiral following the posterior section (L).

The invention relates to a laser processing device (10), with - a laser beam source (12) for generating pulsed laser radiation (14); - a focusing unit (18) for focusing the laser radiation (14) onto a workpiece (22) to be processed; - a flow generator unit (24) for providing a flow on the surface of the workpiece (22), wherein the flow generator unit (24) has an inlet channel (26) and a flow generator for generating a flow and providing a liquid (23) into the inlet channel (26); and - a holding unit (34) designed to receive the workpiece (22) to be machined, wherein the holding unit (34) - has a first holding element (36) designed to accommodate a workpiece (22); - has a second retaining element (38) designed to accommodate an annular fastening element (39), wherein the second retaining element (38) surrounds the first retaining element (36) in an annular manner; - a third retaining element (40) that surrounds the second retaining element (38) in a ring shape, wherein the third retaining element (40) has a first end (42) that adjoins the second retaining element (38) and has a second, distal end (44) and an outer area (46) that encompasses the distal end (44), wherein the third retaining element (40) has a greater height at its second end (44) than at its first end (42).

Disclosed are a method and a device for cutting a foil which contains at least one layer of metal. The laser for cutting the foil is controlled such that pulsed laser radiation cuts through at least one layer of metal of the foil such that the metal of the foil is mostly sublimated and scarcely melts. The resulting laser-cut foil does not have, or has very small sized, bead structures and / or metal splashes of solidified metal. When the foil is used in a battery, the electric performance and durability of the battery are greater and the risk of a short circuit is lower.

The invention relates to a laser processing system (10) for the laser processing of a workpiece (36) with: - a laser beam source (12) for generating pulsed laser radiation (14); - a focusing unit (18) for focusing the pulsed laser radiation (14) onto the workpiece (36) to be processed; - a holding unit (38) designed to accommodate the workpiece (36) to be machined; - a processing unit (20) arranged between the holding unit (38) and the laser beam source (12), the processing unit (20) comprising the following: - a first side with a first opening (22) designed to allow the laser radiation (14) into the processing unit (20); - a second side (24) arranged opposite the first side with a second opening designed to allow the laser radiation (14) to escape from the processing unit (20); - a chamber wall (26) that surrounds an interior space of the processing unit (28); and - a transparent window (48); - a flow generator (30) for generating a flow on a surface of the workpiece (36); - a movable positioning unit (40) designed to accommodate the holding unit (38) and to adjust the position of the holding unit (38); - a cleaning unit (42) comprising at least one first nozzle (44) wherein the nozzle is designed to provide a fluid jet on the transparent window (48).