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In-vivo laser damage automatic and quick detection device for optical element

A technology for optical components and laser damage, which is applied in the direction of testing optical performance, etc., to achieve the effects of improving accuracy, suppressing the influence of surface scattered light, and reducing judgment errors

Active Publication Date: 2013-09-04
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Claims
  • Application Information

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Problems solved by technology

Analyzing the above four methods, plasma flash, photothermal method and photoacoustic method can only be applied to the judgment of surface damage
In vivo damage can only be determined by the scattering method

Method used

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  • In-vivo laser damage automatic and quick detection device for optical element

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Embodiment Construction

[0018] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.

[0019] refer to figure 1 , figure 1 It is a block diagram of the automatic detection device for optical component damage in the present invention. It can be seen from the figure that the automatic detection device for laser damage in the optical component body of the present invention includes a Nd:YAG pulsed laser 1, a first HeNe laser 3 and a second HeNe laser 5. Along the output direction of the Nd:YAG laser are the first focusing lens 2 and the optical element 7 to be tested in sequence, along the output direction of the first HeNe laser 3 are the second focusing lens 4 and the optical element 7 to be measured in sequence, along the second HeNe laser 5 The output direction is the third focusing lens 6 and the optical element to be tested 7 in turn, and the HeNe laser a...

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Abstract

The invention discloses an in-vivo laser damage automatic and quick detection device for an optical element. The in-vivo laser damage automatic and quick detection device comprises the optical element to be detected arranged on a mobile platform, a pulse laser radiation system consisting of an Nd:YAG laser device and a first focusing lens which are sequentially arranged, an HeNe laser lighting system consisting of a first HeNe continuous laser device, a second focusing lens, a second HeNe laser device and a third focusing lens, and a damage detection system consisting of an aperture diaphragm, a scattered light collection lens group, a visual field diaphragm and a photoelectric detector which are coaxial sequentially, wherein the output end of the photoelectric detector is connected with the input end of a computer; and the output end of the computer is connected with the control ends of the Nd:YAG laser device and the mobile platform through a data output card. The in-vivo laser damage automatic and quick detection device is suitable for automatic and quick detection and judgment for in-vivo damages of optical elements of various types.

Description

technical field [0001] The invention relates to laser damage detection, in particular to an automatic and rapid detection device for laser damage in an optical element body. Background technique [0002] With the improvement of laser flux and the deepening of ultraviolet laser research, the anti-destructive ability of optical components restricts the development of lasers and research in the ultraviolet field. The occurrence and growth of laser damage will lead to a decrease in beam quality and luminous flux, and will also cause damage to subsequent components. Therefore, an important indicator for judging the quality of components in high-power laser systems is the laser damage threshold of components. [0003] Laser damage to optical components can occur on the anterior or posterior surface or in vivo. For example, the damage of components such as laser thin film and fused silica glass first occurs on the surface; the damage of KDP / DKDP crystal first occurs in the body. ...

Claims

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Application Information

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IPC IPC(8): G01M11/02
Inventor 胡国行赵元安易葵李大伟刘晓凤柯立松
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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