Thin sacrificial masking films for protecting semiconductors from pulsed laser process

Abstract

The present disclosure is directed to systems and methods for protecting a semiconductor product or material from harmful effects of pulsed laser irradiation. In some embodiments, a thin sacrificial protective mask layer that expires after one laser processing operation is applied to the surface of the product or material to be laser-treated. The thin protective mask layer reflects, absorbs, or otherwise protects the underlying product or material from the energy of the laser.

Description

technical field [0001] The following disclosure relates to the use of masks to protect semiconductor product circuits and components from laser light, including the pulsed laser light used in doping the semiconductor. Background technique [0002] Semiconductor devices, assemblies and components, including optical and light detecting varieties, are beginning to find their way into a wider and wider range of home, laboratory, commercial, industrial, scientific, medical, communications and military applications. Applications using light-detecting semiconductors extend from missile defense to children's toys. The basic P-N junction and PIN diode have been adapted and extended to enable the realization of semiconductor-based photodiodes, photodetectors, photoconductors, charge-coupled devices, photomultipliers, etc., given that many of these devices can detect photons The activities of these devices are collectively referred to as photodetection semiconductor devices in the pre...

AI Technical Summary

Problems solved by technology

Masks of this type are expensive, and mask designs cannot be changed quickly due to the manufacturing complexity of the dielectric stack reflectors that typically sit on top of the substrate

This problem is especially prominent in the case of large production

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