Thickness measurement device, method for measuring thickness, and thickness measurement program

Abstract

To provide a thickness measurement device, a method for measuring a thickness, and a thickness measurement program for measuring the thickness of a member.SOLUTION: The thickness measurement device includes: an acquisition unit for acquiring first transmission X-ray image information based on an X-ray having passed through a plurality of members including a measurement target member and second transmission X-ray image information based on an X-ray having passed through a plurality of members not including the measurement target member; and a calculation unit for calculating the thickness of the measurement target member on the basis of a first luminance of an image recorded in the first transmission X-ray image information, a second luminance of an image recorded in the second transmission X-ray image information, and an X-ray absorption coefficient of the measurement target member.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure relates to a thickness measuring device, a thickness measuring method, and a thickness measuring program.

Background Art

[0002] Conventional thickness measurement methods acquire a cross-sectional image generated by imaging the cross-section of a structure with a scanning electron microscope, and obtain the brightness of the image from the cross-sectional image. The thickness measurement method determines the interface position of different layers of the structure as the position where the change rate of the acquired brightness becomes an extreme value, and obtains the thickness of the layer based on the interface position (see Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the thickness measurement method described in Patent Document 1, it is necessary to cut the structure to create a cross-section. However, when it is required to measure the thickness of a member non-destructively, the thickness measurement method described in Patent Document 1 cannot be used.

[0005] The present disclosure provides a thickness measuring device, a thickness measuring method, and a thickness measuring program for measuring the thickness of a member.

Means for Solving the Problems

[0006] A thickness measurement device according to one aspect includes an acquisition unit that acquires first transmitted X-ray image information based on X-rays that have passed through a plurality of members including a member to be measured, and second transmitted X-ray image information based on X-rays that have passed through members not including the member to be measured, and a calculation unit that calculates the thickness of the member to be measured based on a first luminance of an image recorded in the first transmitted X-ray image information, a second luminance of an image recorded in the second transmitted X-ray image information, and an X-ray absorption coefficient of the member to be measured.

Advantages of the Invention

[0007] The thickness measurement device, thickness measurement method, and thickness measurement program of the present disclosure can measure the thickness of a member.

Brief Description of the Drawings

[0008]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Modes for Carrying Out the Invention

[0009] Hereinafter, an embodiment will be described.

[0010] [Outline of Thickness Measurement Device 1] First, the outline of a thickness measurement device 1 according to an embodiment will be described. FIG. 1 is a diagram for explaining a thickness measurement device 1 according to an embodiment.

[0011] The thickness measuring device 1 irradiates electromagnetic waves to a plurality of members 201 and 202 (laminated body 20) including a member (member to be measured 201) whose thickness is to be measured, for example, and a member 202 (laminated body 20) that does not include the member (member to be measured 201) whose thickness is to be measured, and uses the luminance of the image generated in each case to measure the thickness t 2 of the member to be measured 201. The thickness measuring device 1 is not limited to the device of the above-described example, and may be configured as various devices or the like.

[0012] The thickness measuring device 1 includes an X-ray source 2, an X-ray detection unit (detection unit) 3, and a processing unit 10.

[0013] The X-ray source 2 is an X-ray generating device that generates X-rays to be irradiated to the object (laminated body 20). The X-ray source 2 includes, for example, a fixed anode X-ray tube. For example, metals such as tungsten and molybdenum are used as the anode of the X-ray tube as a target. The X-ray source 2 can change at least one of the tube voltage, tube current, and irradiation time when irradiating X-rays, and changes the intensity or irradiation time (energy amount) of the irradiated X-rays by changing at least one of the tube voltage, tube current, and irradiation time. For the X-ray source 2, for example, a known irradiation device for X-rays may be used. The members 201 and 202 constituting the laminated body 20 may be members made of various materials such as metals and resins.

[0014] The detection unit 3 detects, for example, the X-rays that have passed through the laminated body 20 after being irradiated from the X-ray source 2. The detection unit 3 detects, for example, the intensity of the transmitted X-rays that have passed through the laminated body 20. For the detection unit 3, for example, a known detection device for X-rays may be used. Note that the detection unit 3 may be an imaging device or the like capable of imaging using X-rays, for example. In this case, the detection unit 3 (imaging device) may generate image information (X-ray image information) when performing imaging. When the laminated body 20 exists between the X-ray source 2 and the detection unit 3, the detection unit 3 (imaging device) may generate an image of the X-rays that have passed through the laminated body 20 (transmitted X-ray image information).

[0015] The processing unit 10 may transmit and receive information to and from, for example, the X-ray source 2 and the X-ray detection unit 3 respectively. The processing unit 10 may be, for example, a computer (information processing device) such as a server, a desktop, and a laptop.

[0016] The processing unit 10 controls the X-ray source 2 to irradiate the laminate 20 with X-rays. The processing unit 10 may control the X-ray source 2 to irradiate a plurality of members 201, 202 (laminate 20 (first laminate 21)) (see FIG. 3) including a member (member 201 to be measured for thickness) to be measured for thickness, and a plurality of members 202 (laminate 20 (second laminate 22)) (see FIG. 3) not including the member (member 201 to be measured for thickness) to be measured for thickness, respectively, with X-rays. Further, the processing unit 10 acquires transmission X-ray image information generated based on detecting, by the detection unit 3, the X-rays (transmission X-rays) that have passed through the laminate 20. The processing unit 10 acquires a first transmission X-ray image generated by the detection unit 3 based on the X-rays that have passed through the first laminate 21, and second transmission X-ray image information generated by the detection unit 3 based on the X-rays that have passed through the second laminate 22.

[0017] The image information (first transmission X-ray image information and second transmission X-ray image information) includes information on the luminance of the X-rays that have passed through the laminate 20. The processing unit 10 determines the first luminance C of the image recorded in the first transmission X-ray image information 1 and the second luminance C of the image recorded in the second transmission X-ray image information 2 and the X-ray absorption coefficient μ of the member 201 to be measured 2 and based on these, calculates the thickness t of the member 201 to be measured (see FIG. 3). 2

[0018] [Details of the thickness measurement device 1] Next, the thickness measurement device 1 according to an embodiment will be described in detail. Here, in particular, the processing unit 10 will be described in detail. FIG. 2 is a block diagram for explaining the thickness measurement device 1 according to an embodiment. FIG. 3 is a diagram for explaining the laminate 20. FIG. 3(A) is a diagram for explaining the first laminate 21, and FIG. 3(B) is a diagram for explaining the second laminate 22.

[0019] As shown in FIG. 2, the thickness measuring device 1 (processing unit 10) includes, for example, a communication unit 121, a storage unit 122, a display unit 123, a control unit 110, and the like. The communication unit 121, the storage unit 122, and the display unit 123 may be an embodiment of the output unit. The control unit 110 includes, for example, an X-ray source control unit 111, an acquisition unit 112, a calculation unit 113, an output control unit 114, and the like. The control unit 110 may be configured by, for example, an arithmetic processing device of the thickness measuring device 1. The control unit 110 (for example, an arithmetic processing device or the like) may realize the functions of each unit (for example, the X-ray source control unit 111, the acquisition unit 112, the calculation unit 113, the output control unit 114, and the like) by appropriately reading and executing various programs and the like stored in the storage unit 122 and the like.

[0020] The communication unit 121 is, for example, a communication interface capable of transmitting and receiving various information to and from a device (external device) outside the thickness measuring device 1. The communication unit 121 may communicate with, for example, the X-ray source 2 and the detection unit 3. Further, the communication unit 121 may communicate with, for example, a server and a user terminal (not shown). The user terminal may be, for example, a terminal used by a user of the thickness measuring device 1, and may be a desktop, a laptop, a tablet, a smartphone, or the like.

[0021] The storage unit 122 may store, for example, various information and programs. An example of the storage unit 122 may be a memory, a solid state drive, a hard disk drive, or the like. Note that the storage unit 122 may be, for example, a storage area and a server on the cloud.

[0022] The display unit 123 is, for example, a display capable of displaying various characters, symbols, images, and the like.

[0023] The X-ray source control unit 111 controls the X-ray source 2 via, for example, the communication unit 121. The X-ray source control unit 111 may control the X-ray source 2 to change at least one of the tube voltage, tube current, and irradiation time when irradiating X-rays (change the energy amount of the X-rays) based on information input via, for example, an input unit (not shown) of the thickness measuring device 1. The input unit may be, for example, a keyboard and a mouse or the like.

[0024] The X-ray source 2 irradiates the laminate 20 with X-rays based on the control of the X-ray source control unit 111. The laminate 20 may be, for example, a first laminate 21 and a second laminate 22 or the like. As shown in an example in FIG. 3(A), the first laminate 21 may have a configuration in which a plurality of members 201, 202 and the like including a member (member 201 to be measured) to be measured for thickness are laminated. The member 201 to be measured may be a resin member (for example, an adhesive or the like) or a metal member or the like. Further, the members may be resin members (for example, plastics or the like) or metal members or the like. Also, as shown in an example in FIG. 3(B), the second laminate 22 may have a configuration in which one or a plurality of members 202 that do not include a member (member 201 to be measured) to be measured for thickness are laminated. Note that the laminates 20 shown in FIGS. 3(A) and 3(B) are examples, and the shape of the member 201 and the shape and number of the members 202 are not limited to those illustrated in FIG. 3. One or a plurality of members 202 other than the member 201 to be measured in the first laminate 21 and one or a plurality of members 202 constituting the second laminate 22 may be the same. When irradiating X-rays from the X-ray source 2, the first laminate 21 and the second laminate 22 may be arranged so that their positions with respect to the detection unit 3 (X-ray detection surface) are the same (substantially the same) using a jig.

[0025] The detection unit 3 detects the X-rays transmitted through the first laminate 21 and the second laminate 22 respectively, and generates image information (transmission X-ray image information). The image information records information on luminance with different values (luminance values) according to the intensity of the transmitted X-rays (or the X-rays at the background position).

[0026] The acquisition unit 112 acquires image information (transmission X-ray image information) from the detection unit 3 via the communication unit 121. That is, the acquisition unit 112 acquires first transmission X-ray image information and second transmission X-ray image information. The first transmission X-ray image information may be image information based on X-rays that have passed through a plurality of members 201, 202 (first laminate 21) including the member 201 to be measured. The second transmission X-ray image information may be image information based on X-rays that have passed through a member 202 (second laminate 22) that does not include the member 201 to be measured. The first laminate 21 and the second laminate 22 may have the same other members 202 except for the member 201 to be measured. That is, the other members 202 constituting the first laminate 21 and the second laminate 22 may have the same shape and thickness.

[0027] The calculation unit 113 calculates the thickness t of the member 201 to be measured based on the first luminance C of the image recorded in the first transmission X-ray image information 1 and the second luminance C of the image recorded in the second transmission X-ray image information 2 and the X-ray absorption coefficient μ of the member 201 to be measured. 2 2

[0028] Here, as illustrated in FIG. 3(A), the luminance (first luminance) of the image based on the X-rays that have passed through the laminate 20 (first laminate 21 including the member 201 to be measured) in which a plurality of members 201, 202 are laminated is C 1 , the luminance based on the X-rays that have not passed through the laminate 20 is C 0 , the thicknesses of the respective members 201, 202 are t 1 , t 2 , t 3 …, the X-ray absorption coefficients of the respective members 201, 202 are μ 1 , μ 2 , μ 3 …, then there is the relationship shown in the following formula (1). Here, the thickness of the member 201 to be measured is t 2 , and the X-ray absorption coefficient of the member 201 to be measured is μ 2 .

[0029]

Mathematics

[0030] Equation (1) can be transformed as shown in the following equation (2).

[0031]

Mathematics

[0032] On the other hand, as illustrated in FIG. 3(B), the luminance (second luminance) of the image based on the X-ray that has passed through the second laminate 22 that does not include the member 201 to be measured is defined as C 2 , and using the luminance C 0 , the thickness t 1 , t 3 … of each member 202, and the X-ray absorption coefficient μ 1 , μ 3 … of each member 202, there is a relationship shown in the following equation (3).

[0033]

Mathematics

[0034] Equation (3) can be transformed as shown in the following equation (4).

[0035]

Mathematics

[0036] Substituting the above equation (4) into the above equation (2) and solving for C 1 / C 2 yields the following equation (5).

[0037]

Mathematics

[0038] Solving equation (5) for t 2 yields the following equation (6).

[0039] [Number]

[0040] Incidentally, the X-ray absorption coefficient μ 2 may be the luminance absorption coefficient μ that depends on the thickness of the member 201 to be measured, A or may be an absorption coefficient that does not depend on the thickness of the member 201 to be measured.

[0041] Here, the luminance absorption coefficient μ A changes according to the thickness t of the member, and it has been found by the inventor's experiments etc. that there is a correlation as shown in the following formula (7). Here, a is a coefficient and b is a constant. Formula (7) shows the relationship between the thickness t of the member and the luminance absorption coefficient μ A In other words, it shows the thickness dependence of the luminance absorption coefficient of the member. The luminance absorption coefficient μ A can be obtained, for example, by conducting experiments etc. in advance.

[0042] [Number]

[0043] Therefore, when the calculation unit 113 sets the first luminance as C 1 , the second luminance as C 2 , and the X-ray absorption coefficient of the member 201 to be measured as μ 2 , based on formula (6), it may calculate the thickness t 2 of the member 201 to be measured. As described above, the calculation unit 113 may use, as the X-ray absorption coefficient μ 2 , the luminance absorption coefficient μ that depends on the thickness of the member (member 201 to be measured), A or may use an absorption coefficient that does not depend on the thickness of the member (member 201 to be measured).

[0044] Note that the calculation unit 113 makes the positions of the plurality of laminates 20, that is, the position of the first laminate 21 and the position of the second laminate 22, the same with respect to the detection unit 3 (detection surface) using a jig, so that the thickness t of the measurement target member 201 for each pixel constituting the detection surface of the detection unit 3 2 can be calculated. That is, the calculation unit 113 aligns the positions of the first laminate 21 and the second laminate 22 with respect to the detection unit 3, so that the thickness t of the measurement target member 201 2 can be calculated in terms of a surface (distribution of the thickness t 2 ).

[0045] The output control unit 114 controls the output unit to output the thickness t of the measurement target member 201 calculated by the calculation unit 113. 2 The output unit may be, for example, the communication unit 121, the storage unit 122, the display unit 123, etc. That is, the output control unit 114 controls the communication unit 121 to transmit information regarding the thickness t of the measurement target member 201 calculated by the calculation unit 113 to an external device. The external device here may be a server, a user terminal (not shown), etc. 2 The output control unit 114 may control the storage unit 122 to store information regarding the thickness t of the measurement target member 201 calculated by the calculation unit 113. The output control unit 114 may control the display unit 123 to display the thickness t of the measurement target member 201 calculated by the calculation unit 113. 2 The output control unit 114 may control the storage unit 122 to store information regarding the thickness t of the measurement target member 201 calculated by the calculation unit 113. 2 The output control unit 114 may control the display unit 123 to display the thickness t of the measurement target member 201 calculated by the calculation unit 113.

[0046] [Thickness Measurement Method] Next, a thickness measurement method according to an embodiment will be described. FIG. 4 is a flowchart for explaining a thickness measurement method according to an embodiment.

[0047] ​In step ST101, the acquisition unit 112 acquires first transmission X-ray image information and second transmission X-ray image information. The first transmission X-ray image information may be image information based on X-rays that have passed through a plurality of members 201, 202 (first laminate 21) including the member 201 to be measured. The member 201 to be measured may be a resin member (for example, an adhesive material or the like), or may be a metal member or the like. The second transmission X-ray image information may be image information based on X-rays that have passed through a member 202 (second laminate 22) that does not include the member 201 to be measured.

[0048] In step ST102, the calculation unit 113 calculates the first luminance C of the image recorded in the first transmission X-ray image information 1 and the second luminance C of the image recorded in the second transmission X-ray image information 2 and the X-ray absorption coefficient μ of the member 201 to be measured 2 and based on these, calculates the thickness t of the member 201 to be measured. 2 The calculation unit 113 may calculate the thickness t of the member 201 to be measured based on Equation (6), assuming that the first luminance is C 1 , the second luminance is C 2 , and the X-ray absorption coefficient is μ 2 . The calculation unit 113 may use, as the X-ray absorption coefficient μ 2 , the luminance absorption coefficient μ that depends on the thickness of the member (member 201 to be measured) 2 , or may use an absorption coefficient that does not depend on the thickness of the member (member 201 to be measured). A

[0049] [Experimental Results] Next, the experimental results when obtaining the thickness t of the member 201 to be measured using the method of this embodiment will be described. 2 FIG. 5 is a diagram showing the experimental results of obtaining the distribution of the thickness t of the member 201 to be measured using the method of this embodiment. 2

[0050] In this experiment, using the thickness t calculation method described in the above embodiment, the thickness t of the adhesive as the member 201 to be measured 2 2The distribution of was obtained. As illustrated in FIG. 5, the thickness t of the adhesive (the member 201 to be measured) 2 The distribution was obtained. When the position where the adhesive is disposed in the laminate 20 is changed, that is, regardless of the overlapping state of the plurality of members 202 constituting the laminate 20, the thickness t of the adhesive (the member 201 to be measured) 2 The distribution was confirmed to be obtained.

[0051] [Modification Example] Next, a modification example will be described.

[0052] (Modification Example 1) In the above-described embodiment, an example in which the positions of the first laminate 21 and the second laminate 22 with respect to the detection unit 3 are aligned using a jig has been described, but the alignment is not limited to the example using a jig. That is, the thickness measuring device 1 according to the modification example may align the positions of the first laminate 21 and the second laminate 22 on the image.

[0053] In this case, the calculation unit 113 performs alignment between a plurality of images, that is, the first laminate 21 recorded in the first image based on the first transmission X-ray image information and the second laminate recorded in the second image based on the second transmission X-ray image information. The positions of the 22 may be aligned on the image. As an example, the calculation unit 113 extracts a plurality of portions having a relatively high contrast with a difference in luminance in each of the first image and the second image (portions corresponding to each other in the first laminate 21 and the second laminate 22 (for example, corners of the member 202, etc.)), and the inclination of the image and the position in the plane direction of the image may be aligned so that the plurality of portions coincide with each other. The calculation unit 113 may calculate the thickness t of the member 201 to be measured for each pixel constituting the image using the first image and the second image after alignment. That is, the calculation unit 113 aligns the positions of the first laminate 21 and the second laminate 22 between a plurality of images, thereby obtaining the thickness t of the member 201 to be measured 2 The calculation unit 113 may calculate the thickness t of the member 201 to be measured for each pixel constituting the image using the first image and the second image after alignment. That is, the calculation unit 113 aligns the positions of the first laminate 21 and the second laminate 22 between a plurality of images, thereby obtaining the thickness t of the member 201 to be measured 2 The calculation unit 113 may calculate the thickness t of the member 201 to be measured for each pixel constituting the image using the first image and the second image after alignment. That is, the calculation unit 113 aligns the positions of the first laminate 21 and the second laminate 22 between a plurality of images, thereby obtaining the thickness t of the member 201 to be measured 2It is possible to calculate it by (distribution of). In other words, the calculation unit 113 aligns the position of the first laminate 21 recorded in the first image with the position of the second laminate 22 recorded in the second image, thereby determining the thickness t of the measurement target member 201 that constitutes the first laminate 2 It may be calculated on a plane (a plane in the plane direction along the detection surface of the detection unit 3).

[0054] In this case, the thickness measuring device An acquisition unit that acquires first transmitted X-ray image information based on X-rays that have passed through a plurality of members including the measurement target member, and second transmitted X-ray image information based on X-rays that have passed through members that do not include the measurement target member; Align the positions of the plurality of members recorded in the image of the first transmitted X-ray image information with the positions of the members recorded in the image of the second transmitted X-ray image information. After aligning the positions, based on the first luminance of the image recorded in the first transmitted X-ray image information, the second luminance of the image recorded in the second transmitted X-ray image information, and the X-ray absorption coefficient of the measurement target member, calculate the thickness of the measurement target member on a plane (calculate the distribution of the thickness of the measurement target member). A calculation unit; It may be provided with

[0055] (Modification 2) In the above-described embodiment, an apparatus using X-rays has been described. However, in the thickness measuring device 1 of the present disclosure, not only X-rays may be used, but also electromagnetic waves such as light and radiation of various wavelengths (wavelength ranges) may be used. In this case, the thickness measuring device 1 measures the thickness t of the measurement target member 201 based on, for example, acquiring a transmission image using electromagnetic waves such as light and radiation including infrared light, visible light, and ultraviolet light 2 It may be measured. An example of the measurement target member 201 when acquiring a transmission image using electromagnetic waves of various wavelengths (wavelength ranges) and measuring the thickness t 2 May be a member made of various materials such as metal, semiconductor, semiconductor manufacturing substrate material, glass, and resin

[0056] That is, the thickness measuring device An acquisition unit that acquires first transmission image information based on electromagnetic waves that have passed through a plurality of members including the member to be measured, and second transmission image information based on electromagnetic waves that have passed through members that do not include the member to be measured; A calculation unit that calculates the thickness of the member to be measured based on a first luminance of an image recorded in the first transmission image information, a second luminance of an image recorded in the second transmission image information, and an electromagnetic wave absorption coefficient of the member to be measured; It may be provided.

[0057] [Regarding functions and circuits] Next, the functions and circuits of the thickness measurement device 1 described above will be described. Each part of the thickness measurement device 1 may be realized as a function of an arithmetic processing device of a computer or the like. That is, the X-ray source control unit 111, the acquisition unit 112, the calculation unit 113, and the output control unit 114 (control unit 110) of the thickness measurement device 1 may be realized as an X-ray source control function, an acquisition function, a calculation function, and an output control function (control function) by an arithmetic processing device of a computer or the like, respectively. The thickness measurement program can cause a computer to realize the above-described respective functions. The thickness measurement program may be recorded in a non-transitory computer-readable storage medium such as a memory, a solid state drive, a hard disk drive, or an optical disk. The storage medium may be, for example, rephrased as a non-transitory computer-readable medium that stores the thickness measurement program. Also, as described above, each part of the thickness measurement device 1 may be realized by an arithmetic processing device of a computer or the like. The arithmetic processing device or the like is configured by, for example, an integrated circuit or the like. Therefore, each part of the thickness measurement device 1 may be realized as a circuit that constitutes the arithmetic processing device or the like. That is, the X-ray source control unit 111, the acquisition unit 112, the calculation unit 113, and the output control unit 114 (control unit 110) of the thickness measurement device 1 may be realized as an X-ray source control circuit, an acquisition circuit, a calculation circuit, and an output control circuit (control circuit) that constitute an arithmetic processing device of a computer or the like. Further, the communication unit 121, the storage unit 122, and the display unit 123 (output unit) of the thickness measurement device 1 may be realized as a communication function, a storage function, and a display function (output function) including functions such as an arithmetic processing unit, for example. Further, the communication unit 121, the storage unit 122, and the display unit 123 (output unit) of the thickness measurement device 1 may be realized as a communication circuit, a storage circuit, and a display circuit (output circuit) by being configured by, for example, an integrated circuit or the like. Further, the communication unit 121, the storage unit 122, and the display unit 123 (output unit) of the thickness measurement device 1 may be configured as a communication device, a storage device, and a display device (output device) by being configured by, for example, a plurality of devices.

[0058] The thickness measurement device 1 can combine one or any plurality of the above-described plurality of units. In the present disclosure, the term "information" is used, but the term "information" can be replaced with "data", and the term "data" can be replaced with "information".

[0059] [Aspects and Effects of the Present Embodiment] Next, one aspect of the present embodiment and the effects exhibited by each aspect will be described. Note that each aspect described below is an example at the time of filing, and the present embodiment is not limited to the aspects described below. That is, the present embodiment is not limited to the aspects described below, and may be realized by appropriately combining the above-described units. Further, a lower-level aspect may be cited in any of the higher-level aspects. Further, the effects described below are examples, and the effects exhibited by each aspect are not limited to those described below. Further, each aspect may exhibit, for example, at least one of the effects described below.

[0060] (Aspect 1) A thickness measurement device according to one aspect includes an acquisition unit that acquires first transmitted X-ray image information based on X-rays that have passed through a plurality of members including a member to be measured, and second transmitted X-ray image information based on X-rays that have passed through members that do not include the member to be measured, and a calculation unit that calculates the thickness of the member to be measured based on a first luminance of an image recorded in the first transmitted X-ray image information, a second luminance of an image recorded in the second transmitted X-ray image information, and an X-ray absorption coefficient of the member to be measured. Thereby, the thickness measurement device can calculate the thickness of the member to be measured (one member whose thickness is to be measured) regardless of the shape, thickness, and number of other members excluding the member to be measured that constitute the first laminate and the second laminate.

[0061] (Aspect 2) In a thickness measurement device according to one aspect, the calculation unit may calculate the thickness t of the member to be measured based on Equation (6), where the first luminance is C 1 , the second luminance is C 2 , and the X-ray absorption coefficient is μ 2 . 2 Thereby, the thickness measurement device can calculate the thickness t of one member to be measured that constitutes the laminate regardless of the thickness and X-ray absorption coefficient of other members that constitute the laminate. 2

[0062] (Aspect 3) In a thickness measurement device according to one aspect, the calculation unit may use, as the X-ray absorption coefficient, a luminance absorption coefficient that depends on the thickness of the member or an absorption coefficient that does not depend on the thickness of the member. Thereby, the thickness measurement device can calculate the thickness of the member to be measured using either an X-ray absorption coefficient with thickness dependence (luminance absorption coefficient) or an X-ray absorption coefficient without thickness dependence (absorption coefficient). When the thickness measurement device uses a luminance absorption coefficient with thickness dependence, since it uses an X-ray absorption coefficient that changes according to the thickness of the member to be measured, it can calculate the thickness of the member to be measured more accurately. In addition, when the thickness measurement device uses an absorption coefficient that is independent of thickness, it is possible to calculate the thickness of a relatively simple non-measured target member. As an example, it is considered that the amount of calculation when obtaining the thickness of the member to be measured using the absorption coefficient is less than the amount of calculation when obtaining the thickness of the member to be measured using the luminance absorption coefficient, and the thickness measurement device can reduce the processing load on the control unit.

[0063] (Aspect 4) In one aspect of the thickness measurement device, the plurality of members may be a laminate including the member to be measured. Thereby, even if the member to be measured is one of the plurality of members constituting the laminate, the thickness measurement device can calculate the thickness of the member to be measured.

[0064] (Aspect 5) In one aspect of the thickness measurement device, the member to be measured may be a resin member. Thereby, the thickness measurement device can calculate the thickness even if the member to be measured is a resin member. Similarly, the thickness measurement device can calculate the thickness even if the member to be measured is a metal member.

[0065] (Aspect 6) In one aspect of the thickness measurement method, a computer acquires first transmitted X-ray image information based on X-rays transmitted through a plurality of members including the member to be measured, and second transmitted X-ray image information based on X-rays transmitted through members not including the member to be measured, and calculates the thickness of the member to be measured based on a first luminance of an image recorded in the first transmitted X-ray image information, a second luminance of an image recorded in the second transmitted X-ray image information, and an X-ray absorption coefficient of the member to be measured. Thereby, the thickness measurement method may exhibit the same effect as the thickness measurement device of one aspect described above.

[0066] (Aspect 7) A thickness measurement program of one aspect causes a computer to implement an acquisition function of acquiring first transmitted X-ray image information based on X-rays transmitted through a plurality of members including a member to be measured, and second transmitted X-ray image information based on X-rays transmitted through members not including the member to be measured, and a calculation function of calculating the thickness of the member to be measured based on a first luminance of an image recorded in the first transmitted X-ray image information, a second luminance of an image recorded in the second transmitted X-ray image information, and an X-ray absorption coefficient of the member to be measured. Thereby, the thickness measurement program may achieve the same effect as the thickness measurement device of the above-described one aspect.

Explanation of Signs

[0067] 1 Thickness measurement device 2 X-ray source 3 X-ray detection unit (detection unit) 10 Processing unit 110 Control unit 111 X-ray source control unit 112 Acquisition unit 113 Calculation unit 114 Output control unit 121 Communication unit 122 Storage unit 123 Display unit 20 Object (laminated body) 21 First laminated body 22 Second laminated body 201 Member to be measured 202 Member

Claims

1. An acquisition unit that acquires first transmitted X-ray image information based on X-rays that have passed through a plurality of members including the member to be measured, and second transmitted X-ray image information based on X-rays that have passed through members that do not include the member to be measured; A calculation unit that calculates the thickness of the member to be measured based on a first luminance of an image recorded in the first transmitted X-ray image information, a second luminance of an image recorded in the second transmitted X-ray image information, and an X-ray absorption coefficient of the member to be measured; A thickness measurement device comprising the above.

2. The calculation unit sets the first luminance as C １ , the second luminance as C ２ , and the X-ray absorption coefficient as μ ２ . Then, based on Equation (1), the thickness t ２ of the member to be measured is calculated 【Number 1】 The thickness measurement device according to Claim 1.

3. The calculation unit uses, as the X-ray absorption coefficient, a luminance absorption coefficient that depends on the thickness of the member or an absorption coefficient that does not depend on the thickness of the member. The thickness measurement device according to Claim 1.

4. The plurality of members are a laminate including the member to be measured. The thickness measurement device according to Claim 1.

5. The member to be measured is a resin member. The thickness measurement device according to Claim 1.

6. A computer performs: An acquisition step of acquiring first transmitted X-ray image information based on X-rays that have passed through a plurality of members including the member to be measured, and second transmitted X-ray image information based on X-rays that have passed through members that do not include the member to be measured; A calculation step of calculating the thickness of the member to be measured based on a first luminance of an image recorded in the first transmitted X-ray image information, a second luminance of an image recorded in the second transmitted X-ray image information, and an X-ray absorption coefficient of the member to be measured; A thickness measurement method.

7. A thickness measurement program that causes a computer to realize: An acquisition function of acquiring first transmitted X-ray image information based on X-rays that have passed through a plurality of members including the member to be measured, and second transmitted X-ray image information based on X-rays that have passed through members that do not include the member to be measured; A calculation function of calculating the thickness of the member to be measured based on a first luminance of an image recorded in the first transmitted X-ray image information, a second luminance of an image recorded in the second transmitted X-ray image information, and an X-ray absorption coefficient of the member to be measured. ​

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