Processing system

Abstract

To provide a processing system capable of enhancing the efficiency of operation for replenishing and repairing cassettes in a stocker in which cassettes for a first workpiece and a second workpiece are placed.SOLUTION: A processing system 1 includes a stocker 50, a processing device, a transport path 10, and a transport vehicle 20. The stocker 50 includes a first mounting section 54 for mounting a first cassette 54-2 for accommodating a first workpiece that is not fixed to a frame, a second mounting section 55 for mounting a second cassette 55-2 for accommodating a second workpiece that is fixed to a frame, an opening portion 52 through which a tray 23 moving up and down from the transport vehicle 20 passes, a landing section 53 on which the tray 23 lands, and a transport device 56 that transports the first workpiece between the first cassette 54-2 and the tray 23 that has landed on the landing section 53, and transports the second workpiece between the second cassette 55-2 and the tray 23 that has landed on the landing section 53.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present invention relates to a processing system for processing workpieces.

Background Art

[0002] There is known a processing system in which articles such as workpieces, processing tools, and consumables used for processing are transported by a transport vehicle (automated guided vehicle) to a processing apparatus for processing a plurality of workpieces (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In such a processing system, in a series of processes for processing a workpiece using a plurality of processing apparatuses, the workpiece is processed at timings in each of a state of a first workpiece not fixed to a frame and a state of a second workpiece fixed to the frame via a tape.

[0005] Incidentally, the first workpiece and the second workpiece are each accommodated in a separate dedicated cassette. In a series of processes for processing workpieces, the processing apparatuses used for the first workpiece and the second workpiece are different. Stockers in which cassettes accommodating the first workpiece and the second workpiece are installed are installed near the processing apparatuses used for their respective processes in order to shorten the distance that an operator carries the cassettes from the stockers accommodating them to the processing apparatuses used for their respective processes. Usually, due to layout reasons, the processing apparatuses used for their respective processes are installed separately from each other. Accordingly, the stockers in which the cassettes accommodating them are installed are also installed separately from each other. However, having the stockers accommodating them installed separately in this way has the problem that the work efficiency decreases when an operator replenishes or repairs each cassette to each stocker.

[0006] The present invention has been made in view of such problems, and an object thereof is to provide a processing system capable of improving the work efficiency of replenishing and repairing cassettes to stockers in which cassettes of the first workpiece and the second workpiece are installed.

Means for Solving the Problems

[0007] In order to solve the above problems and achieve the object, a processing system according to the present invention includes a processing device for processing a workpiece, a transport path installed above the processing device, and a transport vehicle having a tray for accommodating the workpiece to be supplied to the processing device and traveling on the transport path. The transport vehicle includes a lifting mechanism for lifting and lowering the tray with respect to the processing device. The processing system includes a stocker in which a first cassette for accommodating a first workpiece not fixed to a frame and a second cassette for accommodating a second workpiece fixed to the frame are installed. The stocker includes a first installation portion for installing the first cassette, a second installation portion for installing the second cassette, an opening through which the tray lifted and lowered from the transport vehicle passes, a landing portion where the tray lands, and a transport device for transporting the first workpiece between the first cassette and the tray landed on the landing portion and for transporting the second workpiece between the second cassette and the tray landed on the landing portion.

[0008] The transport device may include a first transport arm for transporting the first workpiece and a second transport arm for transporting the second workpiece.

[0009] The first installation portion and the second installation portion may be arranged on both sides of the transport device with the transport device therebetween.

[0010] The processing device may include a processing device for processing at least one of the first workpiece and the second workpiece.

Advantages of the Invention

[0011] By adopting a configuration in which a workpiece is conveyed by a conveyance vehicle traveling on a conveyance path installed above, it is possible to eliminate the need to install in proximity a processing apparatus that processes a first workpiece and a stocker having a first installation section where a first cassette for housing the first workpiece is installed. Also, it is possible to eliminate the need to install in proximity a processing apparatus that processes a second workpiece and a stocker having a second installation section where a second cassette for housing the second workpiece is installed. Therefore, it becomes possible to bring close to each other a stocker having a first installation section where a first cassette is installed and a stocker having a second installation section where a second cassette is installed. By bringing them even closer, it is also possible to integrate both into one location. As a result, the present invention can improve the work efficiency of replenishing and repairing cassettes to the stocker in which cassettes for the first workpiece and the second workpiece are installed, respectively.

Brief Description of the Drawings

[0012]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Best Mode for Carrying Out the Invention

[0013] A mode (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the content described in the following embodiments. Further, the constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Also, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[0014] 〔Embodiment〕 The processing system 1 according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram (top view) showing a configuration example of the processing system 1 according to the embodiment. Note that in the drawings, some constituent elements are appropriately omitted or some constituent elements are simply shown by only outlines or the like. As shown in FIG. 1, the processing system 1 according to the embodiment includes a plurality of processing devices 100 that process a workpiece 200, a stocker 50, a conveyance path 10 installed above the plurality of processing devices 100 and the stocker 50, a conveyance vehicle 20 that has a tray 23 (see FIG. 4 etc.) for accommodating the workpiece 200 (see FIGS. 2 and 3) supplied to the plurality of processing devices 100 and travels on the conveyance path 10, and a control unit 30 that comprehensively controls and manages the entire processing system 1.

[0015] Note that in the example of the present embodiment shown in FIG. 1, seven processing devices 100 are installed in the processing system 1, but the present invention is not limited to this. At least, when the workpiece 200 is in the state of the first workpiece 210 (see FIG. 2) not fixed to the frame 206 (see FIG. 3), one or more first processing devices 110 that process it, and when the workpiece 200 is in the state of the second workpiece 220 (see FIG. 3) fixed to the frame 206, one or more second processing devices 120 that process it are included. Any number of them may be installed, and any combination of the types of the processing devices 100 may be used.

[0016] The plurality of processing devices 100 preferably includes a processing device for processing at least one of the first workpiece 210 and the second workpiece 220, and more preferably includes a first processing device for processing the first workpiece 210 and a second processing device for processing the second workpiece 220. In this case, the processing system 1 can more efficiently convey both the first workpiece 210 and the second workpiece 220 and perform processing by the processing devices (the first processing device and the second processing device).

[0017] Also, in the example of the present embodiment shown in FIG. 1, one stocker 50 is installed in the processing system 1, but the present invention is not limited to this, and a plurality of (two or more) stockers may be installed. Further, in the example of the present embodiment shown in FIG. 1, the processing system 1 includes a plurality of (four in the example shown in FIG. 1) transport carts 20, but the present invention is not limited to this, and it may be one to three or five or more.

[0018] FIG. 2 is a perspective view showing an example of a first workpiece 210 which is a state of the workpiece 200 to be processed by the processing system 1 of FIG. 1. FIG. 3 is a perspective view showing an example of a second workpiece 220 which is a state of the workpiece 200 to be processed by the processing system 1 of FIG. 1. The workpiece 200, which is the object to be processed by the processing device 100 included in the processing system 1 and is also an example of the article 250 (see FIG. 7) to be transported by the transport cart 20, will be described.

[0019] In this embodiment, the workpiece 200 is, for example, a wafer such as a disk-shaped semiconductor wafer or an optical device wafer made of silicon, sapphire, silicon carbide (SiC), gallium arsenide, glass, etc. as a base material. On the flat surface 201 of the workpiece 200, chip-shaped devices 203 are formed in respective regions partitioned by a plurality of division planned lines 202 intersecting each other. The workpiece 200 is processed by the processing device 100 of the processing system 1 and divided along the division planned lines 202 to manufacture chips (device chips) of a plurality of devices 203. The device chips manufactured from the workpiece 200 are included in the article 250 to be transported by the transport vehicle 20. Note that the workpiece 200 is not limited to the above wafer in the present invention, and may be a rectangular package substrate having a plurality of devices sealed with resin, a ceramic plate, a glass plate, or the like.

[0020] The first workpiece 210 refers to a state in which the workpiece 200 is not fixed to the frame 206 (see FIG. 3). That is, in this embodiment, as shown in FIG. 2, the first workpiece 210 refers to a state in which only the workpiece 200 is present, or a state in which a protective tape (not shown) having the same size and shape as the workpiece 200 in plan view is attached to the surface 201 of the workpiece 200 or the back surface 204 on the back side of the surface 201. The second workpiece 220 refers to a state in which the workpiece 200 is fixed to the frame 206. In this embodiment, as shown in FIG. 3, the second workpiece 220 refers to a state in which the support tape 205 is attached to the back surface 204 of the workpiece 200 and the annular frame 206 is attached to the outer edge portion of the support tape 205, that is, a state in which the workpiece 200 is supported and fixed via the support tape 205 in the opening of the annular frame 206. In this embodiment, the first workpiece 210 becomes the second workpiece 220 by being supported and fixed via the support tape 205 in the opening of the annular frame 206. Further, the second workpiece 220 becomes the first workpiece 210 when the support tape 205 and the annular frame 206 are removed.

[0021] The articles 250 to be transported by the transport cart 20 include, in addition to the workpieces 200 (including the first workpiece 210 and the second workpiece 220) and the device chips manufactured from the workpieces 200, processing tools used for processing the workpieces 200, consumables used for inspecting the state of the processing tools, cleaning tools for cleaning the processing apparatus 100, maintenance parts for maintaining the processing apparatus 100, and the like. The processing tools used for processing the workpieces 200 and for processing the workpieces 200 are, for example, cutting blades, grinding wheels, and the like. Other consumables used for processing the workpieces 200 are, for example, dressing boards, pre-cut boards, dummy workpieces, dummy workpiece pieces, adhesive tapes, carbon pieces, and the like. The cleaning tools are cleaning supplies such as a cleaning grindstone for cleaning the support surface on which the processing tool is mounted. Further, the maintenance parts are maintenance tools and the like for maintaining any mechanism provided in the other processing apparatus 100. Regarding the articles 250 other than the workpieces 200 and the device chips manufactured from the workpieces 200, in the present embodiment, similar to the second workpiece 220, a support tape 205 (adhesive tape) is adhered to the back surface, and a frame 206 is mounted on the outer edge portion of the support tape 205 (see FIG. 7), but the present invention is not limited thereto, and the frame 206 may not be mounted or the support tape 205 may not be adhered.

[0022] The article 250 is provided with a barcode, ID (Identification), RFID (Radio Frequency Identification) tag, etc. (all not shown) indicating the type of the article 250. Here, the type of the article 250 refers to the variety of the article 250, the specifications of the article 250, and the information for distinguishing each article 250. The variety of the article 250 is, for example, the workpiece 200 (or the device chip manufactured from the workpiece 200), the substrate, the cutting blade, the grinding wheel, the dressing board, the precut board, the dummy workpiece, the dummy workpiece piece, the adhesive tape, the carbon piece, the cleaning tool, the maintenance tool, etc. The specifications of the article 250 are, for example, when the article 250 is the workpiece 200, the diameter, the thickness, the composition and structure of the base material, the type and specifications of the device 203, the interval (index width), width, and number of the division planned lines 202, the material, structure, type, and specifications of the attached support tape 205, the material, structure, type, and specifications of the frame 206, etc. Even when the article 250 is other than the workpiece 200, the specification items of the article 250 are appropriately determined according to the variety of the article 250. The information for distinguishing each article 250 is, for example, the identification number provided for each article 250. Further, the information for distinguishing each article 250 may include the lot number of the workpiece 200 when the article 250 is the workpiece 200.

[0023] FIG. 4 is a side sectional view showing the stocker 50 of the processing system 1 in FIG. 1. FIG. 5 is a perspective view showing the first transfer arm 56-1 of the stocker 50 in FIG. 4. FIG. 6 is a side sectional view showing the second transfer arm 56-2 of the stocker 50 in FIG. 4. As shown in FIG. 4, the stocker 50 includes a housing 51, an opening 52, a landing part 53, a first installation part 54, a second installation part 55, a transfer device 56, a reception unit 57, a transmission unit 58, and a control unit 59.

[0024] As shown in FIG. 4, the housing 51 houses each component of the stocker 50 except for the housing 51, the first installation portion 54, and the second installation portion 55. On the ceiling 51-1 above the housing 51, a plurality of openings 52 are formed with a size and shape that allows the tray 23 of the carrier 20, which moves up and down from the carrier 20 that houses the article 250 (workpiece 200), to pass along the vertical direction (Z-axis direction in FIG. 4). In the example of the present embodiment shown in FIG. 4, the plurality of openings 52 include a first opening 52-1 and a second opening 52-2 formed at different locations on the ceiling 51-1 of the housing 51. Note that the present invention is not limited to the form in which two of these openings 52 are formed, and only one opening 52 may be formed on the ceiling 51-1 of the housing 51, or three or more openings 52 may be formed.

[0025] On any side surface of the housing 51, a first side surface opening 54-1 is formed with a size and shape that allows the first workpiece 210 to pass along the horizontal direction (a direction parallel to the XY plane in FIG. 4). In the present embodiment, the first side surface opening 54-1 is formed with the same size and shape as the first cassette opening 54-3 of the first cassette 54-2, which will be described later. Separately from the first side surface opening 54-1, on any side surface of the housing 51, a second side surface opening 55-1 is formed with a size and shape that allows the second workpiece 220 to pass along the horizontal direction. In the present embodiment, the second side surface opening 55-1 is formed with the same size and shape as the second cassette opening 55-3 of the second cassette 55-2, which will be described later. The first side surface opening 54-1 and the second side surface opening 55-1 are each provided so as to be switchable between an open state and a closed state by an opening / closing door (not shown). In the example of the present embodiment shown in FIG. 4, the first side surface opening 54-1 is formed at a position closer to the first opening 52-1 than the second side surface opening 55-1, and the second side surface opening 55-1 is formed at a position closer to the second opening 52-2 than the first side surface opening 54-1. In the example of the present embodiment shown in FIG. 4, the first side surface opening 54-1 and the second side surface opening 55-1 are formed on a pair of side surfaces that face each other in the X-axis direction parallel to the horizontal direction of the housing 51, but the present invention is not limited to this, and they may be formed on any side surface of the housing 51 or inside the housing 51.

[0026] As shown in FIG. 4, the landing part 53 is a base on which the tray 23 lowered from the transport vehicle 20 by the lifting mechanism 24 lands and is placed. The landing part 53 supports the landed and placed tray 23 upward. In the example of the present embodiment shown in FIG. 4, the landing part 53 has a first landing part 53-1 and a second landing part 53-2. The first landing part 53-1 is a base on which the tray 23 lowered from the transport vehicle 20 through the first opening 52-1 by the lifting mechanism 24 lands and is placed, and is provided at a position below along the vertical direction with respect to the first opening 52-1. The second landing part 53-2 is a base on which the tray 23 lowered from the transport vehicle 20 through the second opening 52-2 by the lifting mechanism 24 lands and is placed, and is provided at a position below along the vertical direction with respect to the second opening 52-2.

[0027] Note that, in the example of the present embodiment shown in FIG. 4, since the landing part 53 has two landing parts 53, namely the first landing part 53-1 and the second landing part 53-2, as will be described later, the first landing part 53-1 for transporting the first workpiece 210 from the first cassette 54-2 and the second landing part 53-2 for transporting the second workpiece 220 from the second cassette 55-2 can perform different functions from each other by the two landing parts 53, which is a preferable form. However, the present invention is not limited to this, and it may have only one landing part 53 or may have three or more landing parts 53.

[0028] As shown in FIG. 4, the first installation part 54 is provided with a first cassette 54-2 which is a container for accommodating the first workpiece 210. The first installation part 54 is provided adjacent to the outside of the housing 51 at a position facing the first side surface opening part 54-1 in a direction orthogonal to the opening surface of the first side surface opening part 54-1 (the X-axis direction in the example shown in FIG. 4). In this embodiment, the first cassette 54-2 is a sealed container called a FOUP (Front Opening Unified Pod) cassette for preventing contamination handled by the device manufacturer. It has a pair of opposing side walls, a bottom plate formed in a flat plate shape and connecting the lower ends of the pair of side walls, a top plate connecting the upper ends of the pair of side walls, and a back plate connecting the ends on one side (the back side) of the pair of side walls, the bottom plate, and the top plate, and is formed in a rectangular box shape. Note that the pair of side walls, the bottom plate, the top plate, and the back plate are all formed in a flat plate shape. The first cassette 54-2 is surrounded by the ends on the other side (the front side) of the pair of side walls, the bottom plate, and the top plate, and a first cassette opening 54-3 having a size and shape through which the first workpiece 210 can pass is formed on the opposite side facing the back plate. The first installation part 54 is provided with the first cassette 54-2 at a position where the first cassette opening 54-3 of the first cassette 54-2 faces and is adjacent to the first side surface opening part 54-1 in a direction orthogonal to the opening surface of the first side surface opening part 54-1.

[0029] A pair of side walls of the first cassette 54-2 has a plurality of guide rails formed on the inner side thereof that extend along the direction in which the back plate and the first cassette opening 54-3 face each other. The mutually paired guide rails (a pair of guide rails) are formed such that one side protrudes convexly from one side wall toward the other side wall, and the other side protrudes convexly from the other side wall toward the one side wall, and are formed at positions with the same height in the vertical direction. The plurality of pairs of guide rails are arranged at equal intervals with a predetermined interval that is sufficiently larger than the thickness of the first workpiece 210 in the vertical direction. The first cassette 54-2 accommodates the first workpiece 210 by placing the end portion of the first workpiece 210 on the pair of guide rails or by placing the end portion of the first workpiece 210 on a support plate installed on the pair of guide rails. The first cassette 54-2 accommodates a plurality of first workpieces 210 having the same number as the number of sets of the pair of guide rails.

[0030] As shown in FIG. 4, the second installation portion 55 is provided with a second cassette 55-2 which is a container for accommodating the second workpiece 220. The second installation portion 55 is provided adjacent to the outside of the housing 51 at a position facing in the direction orthogonal to the opening surface of the second side surface opening 55-1 (the X-axis direction in the example shown in FIG. 4) with respect to the second side surface opening 55-1. In the present embodiment, the second cassette 55-2 is a sealed container called a FOUP cassette for preventing contamination handled by a device manufacturer, similar to the first cassette 54-2. The second cassette 55-2 is surrounded by the other side (front) ends of a pair of side walls, a bottom plate, and a top plate, and a second cassette opening 55-3 having a size and shape through which the second workpiece 220 can pass is formed on the opposite side facing the back plate. The second installation portion 55 is provided with the second cassette 55-2 at a position where the second cassette opening 55-3 of the second cassette 55-2 faces and is adjacent to the second side surface opening 55-1 in the direction orthogonal to the opening surface of the second side surface opening 55-1.

[0031] The pair of side walls of the second cassette 55-2 are paired with each other, and a plurality of guide rails extending along the direction in which the back plate and the second cassette opening 55-3 face each other are formed inside. The mutually paired guide rails (a pair of guide rails) are formed such that one side protrudes convexly from one side wall toward the other side wall, and the other side protrudes convexly from the other side wall toward the one side wall, and are formed at positions with the same vertical height. The plurality of pairs of guide rails are arranged at equal intervals at a predetermined interval that is sufficiently larger than the thickness of the second workpiece 220 in the vertical direction. The second cassette 55-2 accommodates the second workpiece 220 by placing the end portion of the second workpiece 220 (the portion of the mounted frame 206) on a pair of guide rails, or by placing the end portion of the second workpiece 220 (the portion of the mounted frame 206) on a support plate installed on a pair of guide rails. The second cassette 55-2 accommodates a plurality of second workpieces 220 equal in number to the number of sets of the pair of guide rails.

[0032] Note that in this embodiment, both the first cassette 54-2 and the second cassette 55-2 use FOUP cassettes, but the present invention is not limited to this, and instead, an open container (cassette) may be used.

[0033] In this way, the stocker 50 has the first cassette 54-2 installed in the first installation portion 54 and the second cassette 55-2 installed in the second installation portion 55, thereby accommodating the first workpiece 210 not fixed to the frame 206 and the second cassette 55-2 that accommodates the second workpiece 220 fixed to the frame 206 are installed.

[0034] In the example of the present embodiment shown in FIG. 4, the first installation part 54 is formed at a position closer to the first opening 52-1 than the second installation part 55, and the second installation part 55 is formed at a position closer to the second opening 52-2 than the first installation part 54. In the example of the present embodiment shown in FIG. 4, the first installation part 54 and the second installation part 55 are formed outside a pair of side surfaces of the housing 51 that are parallel to the horizontal direction of the housing 51. However, the present invention is not limited to this, and they may be formed outside any side surface of the housing 51. Also, in the example of the present embodiment shown in FIG. 4, both the first installation part 54 and the second installation part 55 are provided at the same height, one each. However, the present invention is not limited to this, and they may be provided at different heights, provided at a plurality of locations at a plurality of heights, provided in the same number as each other, or provided in different numbers from each other.

[0035] In the example of the present embodiment shown in FIG. 4, since the first installation part 54 and the second installation part 55 are arranged on both sides of the transfer device 56 with the transfer device 56 interposed therebetween, the first installation part 54 and the second installation part 55 can be provided at positions where it is easy to install the first cassette 54-2 and the second cassette 55-2 outside the housing 51 of the stocker 50, respectively. At the same time, it is possible to efficiently form the space required for transfer by the transfer device 56 inside the housing 51 of the stocker 50.

[0036] Note that in the present embodiment, instead of the second workpiece 220, the second cassette 55-2 may accommodate an article 250 other than the workpiece 200 and the device chip manufactured from the workpiece 200, with the frame 206 attached thereto.

[0037] In the present embodiment, as shown in FIG. 4, the transfer device 56 includes a first transfer arm 56-1 and a second transfer arm 56-2. The first transfer arm 56-1 transfers the first workpiece 210 between the first cassette 54-2 installed in the first installation part 54 and the tray 23 landed on the first landing part 53-1 of the landing part 53. The second transfer arm 56-2 transfers the second workpiece 220 between the second cassette 55-2 installed in the second installation part 55 and the tray 23 landed on the second landing part 53-2 of the landing part 53.

[0038] As shown in FIG. 5, the first transfer arm 56-1 includes a holding portion 61, a support portion 62, and a drive portion 63. The holding portion 61 holds the first workpiece 210. In this embodiment, the holding portion 61 is formed of a thin plate material and is formed in a U shape branched into two at a tip side at an interval slightly smaller than the diameter of the first workpiece 210, and holds the end portion of the first workpiece 210 from below upward on the upper surface of the tip side of the holding portion 61. The holding portion 61 is attached to the support portion 62 and moves in accordance with the drive of the drive portion 63 via the support portion 62.

[0039] The support portion 62 is connected to the holding portion 61 and the drive portion 63, and supports the holding portion 61 so as to be movable in the horizontal direction and the vertical direction by the drive portion 63. In this embodiment, the support portion 62 is formed of a plurality of arm members arranged in parallel in the horizontal direction and a shaft member extending along the vertical direction. The holding portion 61 is provided at the tip portion of the arm member provided at the tip side, and the drive portion 63 is provided at the base end portion of the shaft member provided between the arm members and at the base end side. In accordance with the drive of the drive portion 63, the shaft member moves in the vertical direction and the horizontal direction, and the plurality of arm members rotate around the vertical direction with respect to the shaft member and the arm member, thereby moving the holding portion 61 in the horizontal direction and the vertical direction. The drive portion 63 is driven in accordance with the control of the control unit 59, and moves each part of the support portion 62, thereby moving the holding portion 61 movably supported by the support portion 62 in the horizontal direction and the vertical direction. In this embodiment, for example, a cylinder, a ball screw mechanism having a ball screw and a guide, or the like is used as the drive portion 63.

[0040] The first transfer arm 56-1 moves the holding part 61 into the first cassette 54-2 installed in the first installation part 54 by the driving part 63, holds the first workpiece 210 accommodated in the first cassette 54-2, moves the holding part 61 into the tray 23 landed on the first landing part 53-1 by the driving part 63, and releases the holding of the first workpiece 210 in the tray 23, thereby transferring the first workpiece 210 accommodated in the first cassette 54-2 installed in the first installation part 54 into the tray 23 landed on the first landing part 53-1. Further, the first transfer arm 56-1 moves the holding part 61 into the tray 23 landed on the first landing part 53-1 by the driving part 63, holds the first workpiece 210 accommodated in the tray 23, moves the holding part 61 into the first cassette 54-2 installed in the first installation part 54 by the driving part 63, and releases the holding of the first workpiece 210 in the first cassette 54-2, thereby transferring the first workpiece 210 accommodated in the tray 23 landed on the first landing part 53-1 into the first cassette 54-2 installed in the first installation part 54.

[0041] As shown in FIG. 6, the second transfer arm 56-2 includes a holding portion 71, a support portion 72, and a moving mechanism 73. The holding portion 71 holds the second workpiece 220. In this embodiment, the holding portion 71 includes a main body portion 74, clamping claws 75, and a sensor 76. The main body portion 74 has a pair of two clamping claws 75 protruding on one side parallel to the horizontal direction. The clamping claws 75 are provided in a pair of two and arranged in the vertical direction on the one side of the main body portion 74, and are provided so as to be movable relative to the main body portion 74 in the vertical direction by a driving mechanism (not shown). The sensor 76 is provided on the main body portion 74 and detects the vertical interval between the pair of two clamping claws 75. The holding portion 71 has one side surface of the main body portion 74 abutting against the end portion of the frame 206 of the second workpiece 220, and while checking the vertical interval between the pair of two clamping claws 75 based on the detection value by the sensor 76, the pair of two clamping claws 75 are moved in the direction of narrowing the vertical interval between the pair of two clamping claws 75 by a driving mechanism (not shown), and the end portion of the frame 206 of the second workpiece 220 is sandwiched and gripped by the pair of two clamping claws 75 to hold it. The holding portion 71 is attached to the support portion 72 on the other side of the main body portion 74, and moves in accordance with the driving of the moving mechanism 73 via the support portion 72.

[0042] The support portion 72 is connected to the holding portion 71 and the moving mechanism 73, and supports the holding portion 71 so as to be movable in the horizontal direction and the vertical direction by the moving mechanism 73. In this embodiment, the support portion 72 is formed of an arm member arranged parallel to the horizontal direction, the holding portion 71 is provided at the tip portion of the support portion 72, the moving mechanism 73 is provided at the base end portion of the support portion 72, and in accordance with the driving of the moving mechanism 73, the support portion 72 moves along the horizontal direction and the vertical direction, thereby moving the holding portion 71 in the horizontal direction and the vertical direction. The moving mechanism 73 is driven in accordance with the control of the control unit 59, and by moving the support portion 72, the holding portion 71 movably supported by the support portion 72 is moved in the horizontal direction and the vertical direction. In this embodiment, for example, a cylinder, a ball screw mechanism having a ball screw and a guide, or the like is used as the moving mechanism 73.

[0043] The second transfer arm 56-2 moves the holding part 71 into the second cassette 55-2 installed in the second installation part 55 by the transfer mechanism 73, holds the second workpiece 220 accommodated in the second cassette 55-2, and moves the holding part 71 into the tray 23 landed on the second landing part 53-2 by the transfer mechanism 73. By releasing the holding of the second workpiece 220 in the tray 23, the second workpiece 220 accommodated in the second cassette 55-2 installed in the second installation part 55 is transferred into the tray 23 landed on the second landing part 53-2. Further, the second transfer arm 56-2 moves the holding part 71 into the tray 23 landed on the second landing part 53-2 by the transfer mechanism 73, holds the second workpiece 220 accommodated in the tray 23, and moves the holding part 71 into the second cassette 55-2 installed in the second installation part 55 by the transfer mechanism 73. By releasing the holding of the second workpiece 220 in the second cassette 55-2, the second workpiece 220 accommodated in the tray 23 landed on the second landing part 53-2 is transferred into the second cassette 55-2 installed in the second installation part 55.

[0044] The transfer device 56 is provided with a reader that, when each of the first transfer arm 56-1 and the second transfer arm 56-2 takes out the article 250 (workpiece 200) from the first cassette 54-2, the second cassette 55-2, and the tray 23, and when loading them into the first cassette 54-2, the second cassette 55-2, and the tray 23, reads the barcode or ID of the article 250 (workpiece 200), thereby obtaining information on the type of the article 250 (workpiece 200) and outputting it to the control unit 59.

[0045] In this way, the stocker 50 has the first cassette 54-2 and the second cassette 55-2 placed on the first installation part 54 and the second installation part 55 respectively. The first workpiece 210 is conveyed between the first cassette 54-2 and the tray 23 landed on the first landing part 53-1 by the first transfer arm 56-1, and the second workpiece 220 is conveyed between the second cassette 55-2 and the tray 23 landed on the second landing part 53-2 by the second transfer arm 56-2. Thus, the article 250 (workpiece 200) is carried out from and carried into the transfer cart 20 from the first cassette 54-2 and the second cassette 55-2 through the openings 52 (first opening 52-1, second opening 52-2) of the ceiling 51-1 above the housing 51.

[0046] In this embodiment, the driving part 63 of the first transfer arm 56-1 and the moving mechanism 73 of the second transfer arm 56-2 of the transfer device 56 are provided separately from each other. However, the present invention is not limited to this. At least one of the mechanism for moving along the vertical direction in the driving part 63 and the mechanism for moving along the vertical direction and the horizontal directions (X, Y) in the moving mechanism 73 may be common. In this case, more efficient transfer can be realized.

[0047] The receiving unit 57 is connected to the control unit 30 of the processing system 1 in an information communicable manner, receives the information transmitted from the control unit 30, and outputs the received information to the control unit 59. In this embodiment, the receiving unit 57 is connected to the control unit 30 in a wireless information communicable manner. However, the present invention is not limited to this, and it may be connected to the control unit 30 in a wired information communicable manner. The information received by the receiving unit 57 from the control unit 30 is, in this embodiment, for example, command information on operations related to the transfer process (carrying-out process and carrying-in process) of the stocker 50, the transfer status and transfer history of the articles 250 (workpieces 200) in the stocker 50, and request information for prompting the transmission of information such as the position information of the articles 250 (workpieces 200).

[0048] The transmission unit 58 is communicably connected to the control unit 30 and transmits the information output from the control unit 59 to the control unit 30. In this embodiment, the transmission unit 58 is wirelessly communicably connected to the control unit 30, but the present invention is not limited thereto, and it may be communicably connected to the control unit 30 by wire. The information transmitted by the transmission unit 58 to the control unit 30 is, for example, information such as the conveyance status and conveyance history of the article 250 (workpiece 200) in the stocker 50 and the information on the position of the article 250 (workpiece 200) in this embodiment.

[0049] The control unit 59 controls the operations of the respective components of the stocker 50 to cause the stocker 50 to perform various conveyance processing operations on the article 250 (workpiece 200). The control unit 59 controls opening and closing doors (not shown) provided in the first side opening 54-1 and the second side opening 55-1, respectively, to switch the first side opening 54-1 and the second side opening 55-1 between an open state and a closed state. The control unit 59 controls the first transfer arm 56-1 to control the transfer of the first workpiece 210 between the first cassette 54-2 installed in the first installation part 54 by the first transfer arm 56-1 and the tray 23 landed on the first landing part 53-1 of the landing part 53, and obtains information such as the transfer status and transfer history of the first workpiece 210 and the position information of the first workpiece 210 by the first transfer arm 56-1. The control unit 59 controls the second transfer arm 56-2 to control the transfer of the second workpiece 220 (article 250) between the second cassette 55-2 installed in the second installation part 55 by the second transfer arm 56-2 and the tray 23 landed on the second landing part 53-2 of the landing part 53, and obtains information such as the transfer status and transfer history of the second workpiece 220 (article 250) and the position information of the second workpiece 220 (article 250) by the second transfer arm 56-2. In this way, the control unit 59 obtains information such as the transfer status and transfer history of the article 250 (workpiece 200) in the stocker 50 and the position information of the article 250 (workpiece 200) from the first transfer arm 56-1 and the second transfer arm 56-2.

[0050] The control unit 59 acquires the information received by the receiving unit 57 from the control unit 30 and outputs the information to be transmitted to the control unit 30 to the transmitting unit 58. The control unit 59 causes the stocker 50 to perform an operation according to the command information received by the receiving unit 57 from the control unit 30. The control unit 59 causes the transmitting unit 58 to transmit to the control unit 30 information such as the conveyance status and conveyance history of the article 250 (workpiece 200) in the stocker 50 and the position of the article 250 (workpiece 200) according to the request information received by the receiving unit 57 from the control unit 30. Even when the control unit 59 has not received the request information from the control unit 30, the control unit 59 can also cause the transmitting unit 58 to transmit to the control unit 30 information such as the conveyance status and conveyance history of the article 250 (workpiece 200) in the stocker 50, the processing status and processing history, and the position of the article 250 (workpiece 200) spontaneously.

[0051] Here, the conveyance status and conveyance history of the article 250 (workpiece 200) acquired from the first conveyance arm 56-1 and the second conveyance arm 56-2 and the information on the position of the article 250 (workpiece 200) are associated with the type of the article 250 (workpiece 200) and the type of the stocker 50 into and out of which the article 250 (workpiece 200) of the type is carried in and out, and the date and time (time) when it is carried in and out of the stocker 50. Note that the type of the stocker 50 refers to information for distinguishing each stocker 50, and is, for example, the type of processing performed by the stocker 50 or the identification number provided for each stocker 50.

[0052] In this embodiment, the control unit 59 includes a computer system. The computer system included in the control unit 59 is a computer having an arithmetic processing unit with a microprocessor such as a CPU (Central Processing Unit), a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The arithmetic processing unit of the control unit 59 performs arithmetic processing according to a computer program stored in the storage device of the control unit 59, and outputs a control signal for controlling the stocker 50 to each component of the stocker 50 via the input / output interface device of the control unit 59.

[0053] FIG. 7 is a perspective view showing a part of the processing system 1 of FIG. 1. FIG. 7 shows a second processing device 120 which is an example of the processing device 100 of the processing system 1 of FIG. 1, a part of the conveyance path 10, and some of the carrier vehicles 20. As shown in FIG. 7, the processing device 100 of the processing system 1 includes a housing 310, a landing part 320, a conveyance unit 330, a processing unit 340, a reception unit 350, a transmission unit 360, and a control unit 370.

[0054] In the second processing device 120, the first processing device 110 is obtained by appropriately changing each component in response to the change of the object to be conveyed and processed to the first workpiece 210 among the workpieces 200, and the other configurations are the same as those of the second processing device 120 described below. In this specification, hereinafter, for the components and matters that are the same (generally common) between the first processing device 110 and the second processing device 120, the second processing device 120 shown in FIG. 7 will be described as an example of the components and matters of the processing device 100.

[0055] As shown in FIG. 7, the housing 310 houses each component of the processing apparatus 100 excluding the housing 310. An opening 312 having a size and shape through which the tray 23 of the carrier 20 that moves up and down from the carrier 20 for accommodating the article 250 (workpiece 200) can pass vertically is formed in the ceiling 311 above the housing 310. The landing part 320 is a table on which the tray 23 that descends from the carrier 20 by the elevating mechanism 24 lands and is placed. The landing part 320 supports the landed tray 23 upward.

[0056] As shown in FIG. 7, the conveying unit 330 is installed adjacent to the landing part 320. The conveying unit 330 unloads the article 250 (workpiece 200) accommodated in the tray 23 landed on the landing part 320 and places it at a predetermined position related to the processing unit 340, and also conveys the article 250 (workpiece 200) placed at a predetermined position around the processing unit 340 into the tray 23 landed on the landing part 320. Here, in the example of the present embodiment shown in FIG. 7, the predetermined position related to the processing unit 340 is on the holding table (chuck table) around the processing unit 340-1 (cutting processing unit) and the processing unit 340-3 (imaging unit, inspection unit), or on the spinner table of the processing unit 340-2 (cleaning unit).

[0057] In this embodiment, the transfer unit 330 includes, for example, a transfer arm 331, a transfer arm 332, and a pair of rails 333. The transfer arm 331 transfers the article 250 (workpiece 200) between the inside of the tray 23 that has landed on the landing part 320 and the pair of rails 333. The transfer arm 332 transfers the article 250 (workpiece 200) between the pair of rails 333 and a predetermined position around the processing unit 340. The pair of rails 333 can approach or separate while maintaining a parallel state with each other, and the article 250 (workpiece 200) can be held via the frame 206 between the pair of rails 333. Further, when the transfer unit 330 unloads the article 250 (workpiece 200) from the tray 23 and loads it into the tray 23, it is provided with a reader that reads the barcode or ID of the article 250 (workpiece 200) to obtain information on the type of the article 250 (workpiece 200) and outputs it to the control unit 370.

[0058] The processing unit 340 processes the workpiece 200. In this embodiment, the processing unit 340 is, for example, a processing unit that performs a processing operation on the workpiece 200, a cleaning unit that performs a cleaning operation on the workpiece 200, an imaging unit that performs an imaging operation on the workpiece 200, an inspection unit that performs an inspection operation on the workpiece 200, a tape sticking unit that sticks or peels off a support tape 205 or the like to the workpiece 200, a film forming unit that forms a film on the workpiece 200, and the like. That is, the processing apparatus 100 including the processing unit 340 can perform at least any one of processing, cleaning, inspection, imaging, sticking of the support tape 205 or the like, peeling of the support tape 205 or the like, and film formation on the workpiece 200.

[0059] When the processing unit 340 is a processing unit, for example, it includes a spindle to which a cutting blade is rotatably attached, and is a cutting processing unit that performs cutting processing on the workpiece 200 with the cutting blade, or includes a spindle to which a grinding wheel with an abrasive wheel disposed thereon is rotatably attached, and is a grinding processing unit that performs grinding processing on the workpiece 200 with the abrasive wheel, or includes a spindle to which a mounter with a polishing pad fixed thereto is rotatably attached, and is a polishing processing unit that performs polishing processing on the workpiece 200 with the polishing pad fixed to the mounter, or includes a spindle to which a mounter with a tool bit fixed thereto is rotatably attached, and is a tool bit cutting processing unit that performs tool bit cutting processing on the workpiece 200 with the tool bit fixed to the mounter, or includes a laser beam irradiator that irradiates the workpiece 200 with a laser beam, and is a laser processing unit that performs laser processing on the workpiece 200 with the laser beam, or is a plasma processing unit that supplies a gas converted into plasma to the workpiece 200 for etching, or includes an ultraviolet irradiator that irradiates the workpiece 200 with ultraviolet rays, and is an ultraviolet processing unit that performs ultraviolet irradiation processing on the workpiece 200, or is a tape expansion unit that expands the support tape 205 attached to the workpiece 200, manufactures device chips by dividing the workpiece 200 based on a division starting point, and widens the interval between the device chips, or performs a tape expansion process of widening the interval between the device chips manufactured by dividing the workpiece 200, etc. When the processing unit 340 is a processing unit, the processing apparatus 100 is a processing apparatus that performs processing on the workpiece 200.

[0060] When the processing unit 340 is a cleaning unit, it includes a nozzle that supplies a cleaning liquid, a cleaning gas, etc. to the workpiece 200, and cleans the workpiece 200. When the processing unit 340 is a cleaning unit, the processing apparatus 100 is a cleaning apparatus that performs cleaning processing on the workpiece 200.

[0061] When the processing unit 340 is an imaging unit, it includes an imager that images the workpiece 200, and a workpiece mover that moves the workpiece 200 to change and adjust the position and orientation of the workpiece 200 with respect to the imager, and performs imaging processing on the workpiece 200. When the processing unit 340 is an imaging unit, the processing apparatus 100 is an imaging apparatus that performs imaging processing on the workpiece 200.

[0062] When the processing unit 340 is an inspection unit, it includes a laser beam irradiator that irradiates the workpiece 200 with a laser beam for inspection, an electromagnetic wave irradiator that irradiates the workpiece 200 with an electromagnetic wave for inspection, an ultraviolet irradiator that irradiates the workpiece 200 with ultraviolet rays for inspection, an imager that images an inspection image of the workpiece 200, and an inspection determination unit that determines the inspection of the workpiece 200 based on the results of irradiation and imaging, and performs inspection processing on the workpiece 200. When the processing unit 340 is an inspection unit, the processing apparatus 100 is an inspection apparatus that performs inspection processing on the workpiece 200.

[0063] When the processing unit 340 is a tape sticking unit, it includes a support tape etc. supply unit that supplies a support tape 205 etc. to the workpiece 200, an attachment unit that attaches the supplied support tape 205 etc. to the workpiece 200, and a peeling unit that peels the support tape 205 etc. attached to the workpiece 200, and performs attachment processing or peeling processing on the workpiece 200. When the processing unit 340 is a tape sticking unit, the processing apparatus 100 is a tape sticking apparatus that performs attachment processing or peeling processing on the workpiece 200.

[0064] When the processing unit 340 is a film forming unit, it includes a film forming unit that forms a film on the workpiece 200, and performs film forming processing on the workpiece 200. When the processing unit 340 is a film forming unit, the processing apparatus 100 is a film forming apparatus that performs film forming processing on the workpiece 200.

[0065] In the processing device 100 (second processing device 120) shown in FIG. 7, the processing unit 340 includes a processing unit 340-1, a processing unit 340-2, and a processing unit 340-3. The processing device 100 (second processing device 120) shown in FIG. 7 is a processing device (cutting device) in which one processing unit 340-1 of the processing unit 340 is a cutting processing unit, and can perform cutting processing on the workpiece 200 (second workpiece 220). The processing device 100 (second processing device 120) shown in FIG. 7 is also a cleaning device in which one processing unit 340-3 of the processing unit 340 is a cleaning unit, and can perform cleaning processing on the workpiece 200 (second workpiece 220). The processing device 100 (second processing device 120) shown in FIG. 7 is also an imaging device in which one processing unit 340-2 of the processing unit 340 is an imaging unit, and can perform imaging processing on the workpiece 200 (second workpiece 220). Since the processing unit 340-2 of the processing device 100 (second processing device 120) shown in FIG. 7 can have a function as an imager and the control unit 370 can have a function as an inspection determination unit, it is also an inspection device substantially equipped with an inspection unit, and can perform inspection processing such as a so-called kerf check to automatically confirm whether the cutting processing on the workpiece 200 (second workpiece 220) has been executed within a normal range.

[0066] The processing device 100 may include an exchange unit (not shown) corresponding to the processing unit 340. The exchange unit performs an exchange process for exchanging articles 250 other than the workpiece 200, such as consumables including processing tools used for processing the workpiece 200, cleaning tools for cleaning the processing device 100, and maintenance parts for maintaining the processing device 100, in the processing unit 340. The exchange unit performs the exchange process by collecting used processing tools, consumables, etc. from the processing unit 340 and replenishing and mounting new processing tools, consumables, etc. to the processing unit 340.

[0067] After the exchange unit performs the exchange process, the used processing tools, consumables, etc. recovered from the processing unit 340 land on the tray 23 placed on the landing part 320 from the exchange unit, are collected, and are carried out of the processing apparatus 100 through the opening 312. New processing tools, consumables, etc. are carried in from outside the processing apparatus 100 through the opening 312, land on the landing part 320, and are replenished to the exchange unit from the tray 23 placed thereon. The exchange unit is, for example, a cutting blade exchange unit that exchanges the cutting blade attached to the processing unit 340, which is a cutting unit, in the processing apparatus 100 (second processing apparatus 120) shown in FIG. 7.

[0068] The receiving unit 350 is connected to the control unit 30 of the processing system 1 so as to be able to communicate information, receives the information transmitted from the control unit 30, and outputs the received information to the control unit 370. In the present embodiment, the receiving unit 350 is connected to the control unit 30 so as to be able to communicate information wirelessly, but the present invention is not limited to this, and it may be connected to the control unit 30 so as to be able to communicate information wired. The information received by the receiving unit 350 from the control unit 30 is, for example, in the present embodiment, operation command information regarding the processing of the processing apparatus 100, the conveyance status and conveyance history of the article 250 (workpiece 200) in the processing apparatus 100, the processing status and processing history, and request information for prompting the transmission of information such as the position information of the article 250 (workpiece 200).

[0069] The transmitting unit 360 is connected to the control unit 30 so as to be able to communicate information, and transmits the information output from the control unit 370 to the control unit 30. In the present embodiment, the transmitting unit 360 is connected to the control unit 30 so as to be able to communicate information wirelessly, but the present invention is not limited to this, and it may be connected to the control unit 30 so as to be able to communicate information wired. The information transmitted by the transmitting unit 360 to the control unit 30 is, for example, in the present embodiment, the conveyance status and conveyance history of the article 250 (workpiece 200) in the processing apparatus 100, the processing status and processing history, and the position information of the article 250 (workpiece 200).

[0070] The control unit 370 controls the operations of the respective components of the processing device 100 to cause the processing device 100 to perform various processing operations on the article 250 (workpiece 200). The control unit 370 controls the transport unit 330 to control the transport of the article 250 (workpiece 200) between the tray 23 placed on the landing part 320 and a predetermined position of the processing unit 340, and acquires information such as the transport status and transport history of the article 250 (workpiece 200) and the position information of the article 250 (workpiece 200) from the transport unit 330. The control unit 370 controls the processing unit 340 to control the processing of the article 250 (workpiece 200) by the processing unit 340, and acquires information such as the processing status and processing history of the article 250 (workpiece 200) and the position information of the article 250 (workpiece 200) from the processing unit 340. In this way, the control unit 370 acquires information such as the transport status and transport history of the article 250 (workpiece 200) in the processing device 100, the processing status and processing history, and the position information of the article 250 (workpiece 200) from the transport unit 330 and the processing unit 340.

[0071] The control unit 370 acquires the information received by the reception unit 350 from the control unit 30 and outputs the information to be transmitted to the control unit 30 to the transmission unit 360. The control unit 370 causes the processing device 100 to perform an operation according to the command information received by the reception unit 350 from the control unit 30. The control unit 370 causes the transmission unit 360 to transmit information such as the transport status and transport history of the article 250 (workpiece 200) in the processing device 100, the processing status and processing history, and the position information of the article 250 (workpiece 200) to the control unit 30 according to the request information received by the reception unit 350 from the control unit 30. Even when the control unit 370 has not received the request information from the control unit 30, it can also cause the transmission unit 360 to transmit information such as the transport status and transport history of the article 250 (workpiece 200) in the processing device 100, the processing status and processing history, and the position information of the article 250 (workpiece 200) to the control unit 30 spontaneously.

[0072] Here, the conveyance status, conveyance history, and position information of the article 250 (workpiece 200) obtained from the conveyance unit 330 are associated with the type of the article 250 (workpiece 200), the type of the processing apparatus 100 into and out of which the article 250 (workpiece 200) of that type is carried, and the date and time (time) when it is carried into and out of the processing apparatus 100. Note that the type of the processing apparatus 100 refers to information for distinguishing each processing apparatus 100, and is, for example, the type of processing performed by the processing apparatus 100 or an identification number provided for each processing apparatus 100.

[0073] Further, the processing status of the processing apparatus 100 includes, for example, the type of the processing apparatus 100 during processing, the article 250 (workpiece 200) carried into the housing 310 of the processing apparatus 100, the conveyance status including the position information of the article 250 (workpiece 200) in the housing 310 of the processing apparatus 100, the processing status by the processing unit 340 for the workpiece 200, the error status regarding errors occurring in the processing unit 340 during processing and in the workpiece 200 during and after processing, the replacement processing status by the replacement unit, and the like.

[0074] Further, the processing history of the processing apparatus 100 is for each article 250 (workpiece 200) carried into the housing 310 of the processing apparatus 100, and is the type of the processing apparatus 100, the conveyance history, processing history, error history, and replacement processing history of the article 250 (workpiece 200) performed in the housing 310 of the processing apparatus 100. Specifically, for each article 250 (workpiece 200), information indicating that conveyance processing has been performed in the housing 310 of the processing apparatus 100, the history of position information during the conveyance processing, information indicating that processing has been performed, the processing conditions at the time of processing, and the history of processing data obtained during processing, the error history regarding errors occurring in the processing unit 340 during processing and in the workpiece 200 during and after processing, information indicating that replacement processing has been performed, the replacement processing conditions at the time of replacement processing, and the history of replacement processing data obtained during replacement processing are associated with the date and time (time) when those processes are performed and the type of the article 250 (workpiece 200).

[0075] In this embodiment, the control unit 370 includes a computer system similar to the aforementioned control unit 59. The arithmetic processing unit of the control unit 370 performs arithmetic processing according to the computer program stored in the storage device of the control unit 370, and outputs a control signal for controlling the processing device 100 to each component of the processing device 100 via the input / output interface device of the control unit 370.

[0076] As shown in FIG. 7, the conveyance path 10 of the processing system 1 includes a passage area 11, a handover area 12, and a guide part 13. The passage area 11 is disposed so as to straddle above the housing 51 of the stocker 50 and above the housings 310 of the plurality of processing devices 100. The handover area 12 is disposed at two locations (two locations in the example shown in FIG. 4) adjacent to the passage area 11 above the housing 51 for each stocker 50, and at one location (one location in the example shown in FIG. 7) adjacent to the passage area 11 above the housing 310 for each processing device 100. In the passage area 11 and the handover area 12, vertical and horizontal lines (not shown) detectable by the sensors 21-3 and 21-4 of the carrier vehicle 20 described later are provided.

[0077] As shown in FIG. 4, in the handover area 12 disposed for each stocker 50, openings 14 are formed directly above the openings 52 (the first opening 52-1 and the second opening 52-2) of the housing 51, which are of such a size and shape that the vehicle body 21 of the carrier vehicle 20 cannot pass through, while the tray 23 of the carrier vehicle 20 can pass through. As shown in FIG. 7, in the handover area 12 disposed for each processing device 100, an opening 14 is formed directly above the opening 312 of the housing 310, which is of such a size and shape that the vehicle body 21 of the carrier vehicle 20 cannot pass through, while the tray 23 of the carrier vehicle 20 can pass through.

[0078] The guide part 13 is disposed at both side ends in the width direction of the passage area 11 and the handover area 12. The guide part 13 is formed higher than the wheels 22 of the carrier vehicle 20, thereby preventing the carrier vehicle 20 from climbing over the guide part 13 and falling off from the passage area 11 and the handover area 12.

[0079] FIG. 8 is a perspective view showing the carrier 20 of the processing system 1 in FIG. 1. FIG. 9 is a side sectional view showing the elevating mechanism 24 of the carrier 20 in FIG. 8. The carrier 20 is an Automated Guided Vehicle (AGV) that travels unmanned. As shown in FIG. 8, it has a vehicle body 21, wheels 22, a tray 23, an elevating mechanism 24, a receiving unit 27, a transmitting unit 28, and a control unit 29.

[0080] The vehicle body 21 includes a flat plate-shaped first frame 21-1 and a flat plate-shaped second frame 21-2 disposed above the first frame 21-1 with a space therebetween. The carrier 20 is provided with sensors 21-3 (only the rear end is shown in FIG. 8) at the front end (the end on the left rear side in FIG. 8) and the rear end (the end on the right front side in FIG. 8) of the first frame 21-1, respectively, and a pair of sensors 21-4 (only the left end is shown in FIG. 8) at both side ends of the first frame 21-1. The sensors 21-3 and 21-4 are respectively mounted so as to face the passage area 11 and the transfer area 12 of the transfer path 10 on which the carrier 20 travels, and detect vertical and horizontal lines (not shown) provided in the passage area 11 and the transfer area 12. The sensors 21-3 and 21-4 output the detection results to the control unit 29.

[0081] In addition, the carrier 20 is provided with a collision sensor 21-5 at the front end of the first frame 21-1 for detecting that the carrier 20 has collided with an obstacle. As the collision sensor 21-5, for example, a push-button type switch is used. When the front end of the carrier 20 collides with an obstacle, the collision sensor 21-5 detects the collision of the carrier 20 and outputs the detection result to the control unit 29.

[0082] Further, a cover 21-6 is provided on the lower surface of the rear end portion of the first frame 21-1 of the carrier vehicle 20. When the tray 23 is positioned at the storage position between the front wheels 22 and the rear wheels 22 on the lower surface side of the first frame 21-1, the cover 21-6 covers the opening 23-1 of the tray 23. By covering the opening 23-1, the cover 21-6 prevents foreign matter from entering the tray 23 during the running of the carrier vehicle 20, prevents foreign matter from adhering to the article 250 (workpiece 200), and prevents the article 250 (workpiece 200) from falling out of the tray 23.

[0083] The wheels 22 include a pair of front wheels 22 provided at both side ends on the front side of the lower surface of the first frame 21-1 and a pair of rear wheels 22 provided at both side ends on the rear side of the lower surface of the first frame 21-1. The wheels 22 are provided rotatably independently of each other around the axis, and the directions and rotation directions of the rotation axes are controlled independently of each other. The outer peripheral surface of the wheels 22 contacts the passage area 11 or the transfer area 12 of the conveyance path 10. The wheels 22 are each connected to a motor 22-1, and a rotational operation around the axis is applied by the motor 22-1, so that the wheels run on the passage area 11 or the transfer area 12 of the conveyance path 10. The motor 22-1 is connected to a battery 22-2, and is driven by the power supplied by the battery 22-2. In this embodiment, for example, mecanum wheels having a plurality of inclined barrel-shaped (cylindrical) rotating bodies attached to the outer peripheral surface are used as the wheels 22.

[0084] The tray 23 accommodates at least one of the workpiece 200 or the article 250 used in the processing apparatus 100. The tray 23 is provided on the lower surface side of the first frame 21-1 and is formed in a flat box shape capable of accommodating the article 250 (workpiece 200) inside. The tray 23 is provided with an opening 23-1 at the rear side of the carrier vehicle 20 through which the article 250 (workpiece 200) can be taken in and out. The tray 23 is provided inside with guide rails for holding the end portion of the accommodated article 250 (workpiece 200) or the end portion of the frame 206 that supports the accommodated article 250 (workpiece 200).

[0085] The elevating mechanism 24 raises and lowers the tray 23 with respect to the first frame 21-1 of the vehicle body 21. The elevating mechanism 24 raises and lowers the tray 23 over a storage position positioned between the front wheel 22 and the rear wheel 22 on the lower surface side of the first frame 21-1 and a lowered position positioned below the wheel 22. In the storage position, the lower surface of the tray 23 is positioned above the lower end of the wheel 22 traveling on the conveyance path 10. Therefore, the tray 23 does not contact the conveyance path 10 while the carrier vehicle 20 is traveling on the conveyance path 10.

[0086] For the elevating mechanism 24, each component of the elevating mechanism 24 except for the suspension member 89 whose lower end is attached to and connected to the tray 23 is arranged in the space between the first frame 21-1 and the second frame 21-2. When the carrier vehicle 20 is positioned above the opening 14 of the delivery area 12, the elevating mechanism 24 lowers the tray 23 positioned in the storage position and positions the tray 23 on the landing part 53 of the stocker 50 or on the landing part 320 of the processing device 100. Further, the elevating mechanism 24 raises the tray 23 positioned on the landing part 53 of the stocker 50 or on the landing part 320 of the processing device 100 and positions the tray 23 in the storage position.

[0087] As shown in FIG. 9, the elevating mechanism 24 includes a motor 82 fixed to the upper surface of the first frame 21-1 and having a rotation shaft 81, a first rotation shaft 83 and a second rotation shaft 84 that are rotatably supported on the upper surface of the first frame 21-1 and are parallel to each other, a pulley 86 fixed to one end of the first rotation shaft 83 and around which an endless connecting member 85 such as a belt or a chain is looped between the rotation shaft 81 of the motor 82, pulleys (not shown) fixed to the other ends of the first rotation shaft 83 and the second rotation shaft 84 and around which endless connecting members such as belts or chains are looped around each other, cylindrical reels 87 fixed to both ends of the first rotation shaft 83 and around which the suspension member 89 is wound, cylindrical reels 88 fixed to both ends of the second rotation shaft 84 and around which the suspension member 89 is wound, and the suspension member 89.

[0088] The lifting mechanism 24 rotates the first rotating shaft 83 and the second rotating shaft 84 around their axes by the motor 82, and rotates the reels 87, 88 around their axes, thereby winding up the suspension members 89 on the reels 87, 88 and feeding out the suspension members 89 from the reels 87, 88.

[0089] When the lifting mechanism 24 winds up the suspension members 89 on the reels 87, 88, it positions the tray 23 at the storage position. When the lifting mechanism 24 feeds out the suspension members 89 from the reels 87, 88, it positions the tray 23 at the lowering position.

[0090] In this embodiment, four suspension members 89 are provided. As the suspension members 89, for example, belts having a predetermined width are used. The lower ends of the four suspension members 89 are respectively attached to the upper surface of the tray 23 at intervals from each other. Note that as the suspension members 89, in the present invention, in addition to belts, wire ropes or the like that can be wound up and fed out may be used.

[0091] When the transport vehicle 20 is first set on the transport path 10 of the processing system 1, the set location and the type of the transport vehicle 20 are registered in the control unit 29 and the control unit 30. After the transport vehicle 20 is set, in this embodiment, as described above, the sensors 21-3, 21-4 detect the position of the transport vehicle 20 on the transport path 10. Note that the transport vehicle 20 is not limited to this configuration in the present invention. For example, instead of this configuration, a configuration in which a line sensor detects a mark (not shown), or a configuration in which the position of the transport vehicle 20 is detected by a plurality of sensors installed on the transport path 10 may be used. A configuration in which the transport vehicle 20 is wirelessly connected to a GPS (Global Positioning System) so that information can be communicated, and the position of the transport vehicle 20 is acquired using the GPS may also be used. Any configuration that can acquire the position of the transport vehicle 20 may be used.

[0092] The receiving unit 27 is communicably connected to the control unit 30, receives the information transmitted from the control unit 30, and outputs the received information to the control unit 29. In this embodiment, the receiving unit 27 is wirelessly communicably connected to the control unit 30, but the present invention is not limited thereto, and it may be communicably connected to the control unit 30 by wire. The information received by the receiving unit 27 from the control unit 30 is, for example, command information regarding the operation of the traveling of the carrier vehicle 20 and the raising and lowering of the tray 23, or request information for prompting the transmission of the conveyance status and conveyance history of the carrier vehicle 20 including the position of the carrier vehicle 20 and the position of the tray 23 in this embodiment.

[0093] The transmitting unit 28 is communicably connected to the control unit 30, and transmits the information output from the control unit 29 to the control unit 30. In this embodiment, the transmitting unit 28 is wirelessly communicably connected to the control unit 30, but the present invention is not limited thereto, and it may be communicably connected to the control unit 30 by wire. The information transmitted by the transmitting unit 28 to the control unit 30 is, for example, information on the conveyance status and conveyance history of the carrier vehicle 20 in this embodiment.

[0094] The control unit 29 controls the operations of the respective components of the carrier vehicle 20, and causes the carrier vehicle 20 to perform operations related to the traveling of the carrier vehicle 20 and the raising and lowering of the tray 23. The control unit 29 controls the traveling of the carrier vehicle 20 by controlling the motor 22-1 connected to the wheel 22 and the angle of the wheel 22, etc. The control unit 29 controls the raising and lowering movement of the tray 23 by controlling the motor 82 of the lifting mechanism 24.

[0095] The control unit 29 controls the sensors 21-3 and 21-4 to acquire the position of the carrier vehicle 20 on the conveyance path 10. The control unit 29 generates information on the conveyance status and conveyance history of the carrier vehicle 20 based on the information on the position of the carrier vehicle 20 on the conveyance path 10 and the information on the type of the article 250 (workpiece 200) conveyed by the carrier vehicle 20.

[0096] The control unit 29 acquires the information received by the receiving unit 27 from the control unit 30, and outputs the information to be transmitted to the control unit 30 to the transmitting unit 28. The control unit 29 causes the carrier vehicle 20 to perform an operation according to the command information received by the receiving unit 27 from the control unit 30. The control unit 29 causes the transmitting unit 28 to transmit information on the conveyance status and conveyance history of the carrier vehicle 20 to the control unit 30 according to the request information received by the receiving unit 27 from the control unit 30. Even when the control unit 29 has not received the request information from the control unit 30, the control unit 29 can also cause the transmitting unit 28 to transmit information on the conveyance status and conveyance history of the carrier vehicle 20 to the control unit 30 spontaneously.

[0097] Here, the conveyance status of the carrier vehicle 20 is, for example, the article 250 (workpiece 200) being conveyed, the type of the carrier vehicle 20 being conveyed, the type of the conveyance path 10 on which the carrier vehicle 20 is being conveyed and the position on the conveyance path 10, the conveyance speed, the error status regarding errors occurring in the carrier vehicle 20 being conveyed and the workpiece 200 during and after conveyance, and the like. Further, the conveyance history of the carrier vehicle 20 is associated with the type of the carrier vehicle 20 that conveyed each conveyed article 250 (workpiece 200), the history of the type of the conveyance path 10 that the carrier vehicle 20 conveyed, the passing history of the position on the conveyance path 10, the history of the conveyance speed, the error history regarding errors occurring in the carrier vehicle 20 being conveyed and the workpiece 200 during and after conveyance, at the time when those conveyances were carried out, and the type of the article 250 (workpiece 200).

[0098] In this embodiment, the control unit 29 includes a computer system similar to the control unit 370 described above. The arithmetic processing unit of the control unit 29 performs arithmetic processing according to the computer program stored in the storage device of the control unit 29, and outputs a control signal for controlling the carrier vehicle 20 to each component of the carrier vehicle 20 via the input / output interface device of the control unit 29.

[0099] The control unit 30 comprehensively manages the overall control of the processing system 1. The control unit 30 is communicably connected to the receiving unit 57 and the transmitting unit 58 of the stocker 50, communicably connected to the receiving unit 350 and the transmitting unit 360 of each processing device 100, and communicably connected to the receiving unit 27 and the transmitting unit 28 of each carrier vehicle 20. By transmitting command information to each of the receiving units 57, 350, 27, the control unit 30 can remotely control and operate the stocker 50, each processing device 100, and each carrier vehicle 20 via the respective control units 59, 370, 29.

[0100] Also, the control unit 30 can receive and grasp information such as the conveyance status and conveyance history of the stocker 50, and the position information of the articles 250 (workpieces 200) in the stocker 50 from the transmitting unit 58, and can receive and grasp information such as the conveyance status and conveyance history of the articles 250 (workpieces 200) in each processing device 100, the processing status and processing history of each processing device 100, and the position information of the articles 250 (workpieces 200) in each processing device 100 from the transmitting unit 360, and can receive and grasp information such as the conveyance status and conveyance history of each carrier vehicle 20 from the transmitting unit 28. Thus, the control unit 30 can comprehensively control and operate the stocker 50, each processing device 100, and each carrier vehicle 20, which are components of the processing system 1. Further, the control unit 30 functions as a server that collectively manages various information (data) received from the stocker 50, various information (data) received from each processing device 100, and various information (data) received from each carrier vehicle 20.

[0101] In this embodiment, the control unit 30 includes a computer system similar to the control units 59, 370, 29. The arithmetic processing unit of the control unit 30 performs arithmetic processing according to a computer program stored in the storage device of the control unit 30, and outputs a control signal for controlling the processing system 1 to each component of the processing system 1 via the input / output interface device of the control unit 30.

[0102] The processing system 1 according to the embodiment having the above configuration moves the carrier vehicle 20 onto the stocker 50 under the control of the control unit 30, and the stocker 50 conveys the first workpiece 210 from the first cassette 54-2 to the carrier vehicle 20. By moving the carrier vehicle 20 onto the first processing device 110, the carrier vehicle 20 conveys the first workpiece 210 onto the first processing device 110, loads the first workpiece 210 from the carrier vehicle 20 into the first processing device 110, and the first processing device 110 processes the first workpiece 210. Further, the processing system 1 according to the embodiment moves the carrier vehicle 20 onto the first processing device 110, loads the first workpiece 210 processed by the first processing device 110 from the first processing device 110 into the carrier vehicle 20, and by moving the carrier vehicle 20 onto another first processing device 110, the carrier vehicle 20 conveys the first workpiece 210 after the previous processing onto the another first processing device 110, loads the first workpiece 210 after the previous processing from the carrier vehicle 20 into the another first processing device 110, and the another first processing device 110 further processes the first workpiece 210 after the previous processing. Further, the processing system 1 according to the embodiment moves the carrier vehicle 20 onto the first processing device 110, loads the first workpiece 210 processed by the first processing device 110 from the first processing device 110 into the carrier vehicle 20, and by moving the carrier vehicle 20 onto the stocker 50, the carrier vehicle 20 conveys the first workpiece 210 after the previous processing onto the stocker 50, loads the first workpiece 210 from the carrier vehicle 20 into the stocker 50, and the stocker 50 conveys the first workpiece 210 after the previous processing into the first cassette 54-2.

[0103] Further, the processing system 1 according to the embodiment moves the carrier vehicle 20 onto the stocker 50 under the control of the control unit 30, and the stocker 50 loads the second workpiece 220 from the second cassette 55-2 onto the carrier vehicle 20. By moving the carrier vehicle 20 onto the second processing device 120, the carrier vehicle 20 transports the second workpiece 220 onto the second processing device 120, loads the second workpiece 220 from the carrier vehicle 20 into the second processing device 120, and the second processing device 120 processes the second workpiece 220. Further, the processing system 1 according to the embodiment moves the carrier vehicle 20 onto the second processing device 120, loads the second workpiece 220 processed by the second processing device 120 from the second processing device 120 into the carrier vehicle 20, and by moving the carrier vehicle 20 onto another second processing device 120, the carrier vehicle 20 transports the second workpiece 220 after the previous processing onto the another second processing device 120, loads the second workpiece 220 after the previous processing from the carrier vehicle 20 into the another second processing device 120, and the another second processing device 120 further processes the second workpiece 220 after the previous processing. Further, the processing system 1 according to the embodiment moves the carrier vehicle 20 onto the second processing device 120, loads the second workpiece 220 processed by the second processing device 120 from the second processing device 120 into the carrier vehicle 20, and by moving the carrier vehicle 20 onto the stocker 50, the carrier vehicle 20 transports the second workpiece 220 after the previous processing onto the stocker 50, loads the second workpiece 220 from the carrier vehicle 20 into the stocker 50, and the stocker 50 loads the second workpiece 220 after the previous processing into the second cassette 55-2.

[0104] Conventionally, stockers for installing cassettes for accommodating the first workpiece and the second workpiece respectively are installed near the processing devices used for respective processes in order to shorten the distance that an operator carries the cassettes from the stockers for accommodating them to the processing devices used for respective processes. Therefore, as the processing devices used for respective processes are installed apart from each other, the stockers for installing the cassettes for accommodating them are installed apart from each other, and there has been a problem that the working efficiency when an operator replenishes or repairs each cassette to each stocker is reduced.

[0105] In contrast, the processing system 1 according to the embodiment having the above configuration includes a first installation unit 54 where the stocker 50 installs a first cassette 54-2 that houses the first workpiece 210, and a second installation unit 55 where the stocker 50 installs a second cassette 55-2 that houses the second workpiece 220. The transfer vehicle 20 travels on a transfer path 10 installed above the stocker 50, the first processing device 110 that processes the first workpiece 210, and the second processing device 120 that processes the second workpiece 220, and transfers the first workpiece 210 between the stocker 50 and the first processing device 110, and transfers the second workpiece 220 between the stocker 50 and the second processing device 120. That is, by adopting the configuration of the transfer system that transfers by the transfer vehicle 20 traveling on the transfer path 10 installed above, the processing system 1 according to the embodiment eliminates the need to install the first processing device 110 and the stocker 50 provided with the first installation unit 54 where the first cassette 54-2 that houses the first workpiece 210 is installed in close proximity. Moreover, since the need to install the second processing device 120 and the stocker 50 provided with the second installation unit 55 where the second cassette 55-2 that houses the second workpiece 220 is installed in close proximity can be eliminated, not only is it possible to bring the stocker 50 provided with the first installation unit 54 where the first cassette 54-2 that houses the first workpiece 210 is installed and the stocker 50 provided with the second installation unit 55 where the second cassette 55-2 that houses the second workpiece 220 is installed close to each other, but it is also possible to integrate both into one location. Therefore, the processing system 1 according to the embodiment has the effect of improving the working efficiency of replenishing and repairing the cassettes (the first cassette 54-2 and the second cassette 55-2) to the stocker 50 where the respective cassettes (the first cassette 54-2 and the second cassette 55-2) of the first workpiece 210 and the second workpiece 220 are installed.

[0106] Further, in the processing system 1 according to the embodiment, the transfer device 56 includes a first transfer arm 56-1 that transfers the first workpiece 210 between the first cassette 54-2 installed in the first installation part 54 and the tray 23 landed on the first landing part 53-1 of the landing part 53, and a second transfer arm 56-2 that transfers the second workpiece 220 between the second cassette 55-2 installed in the second installation part 55 and the tray 23 landed on the second landing part 53-2 of the landing part 53. Thus, since the processing system 1 according to the embodiment coexists the first transfer arm 56-1 suitable for transferring the first workpiece 210 and the second transfer arm 56-2 suitable for transferring the second workpiece 220, both the first workpiece 210 and the second workpiece 220 can be suitably transferred.

[0107] Also, in the processing system 1 according to the embodiment, the first installation part 54 and the second installation part 55 are arranged on both sides of the transfer device 56 with the transfer device 56 interposed therebetween. Therefore, the processing system 1 according to the embodiment can provide the first installation part 54 and the second installation part 55 at positions where it is easy to install the first cassette 54-2 and the second cassette 55-2 outside the housing 51 of the stocker 50, respectively, and can efficiently form the space required for transfer by the transfer device 56 inside the housing 51 of the stocker 50.

[0108] In addition, the processing system 1 according to the embodiment includes a plurality of processing devices 100 that include a processing device for processing at least one of the first workpiece 210 and the second workpiece 220, and includes a first processing device for processing the first workpiece 210 and a second processing device for processing the second workpiece 220. Therefore, the processing system 1 according to the embodiment enables both the first workpiece 210 and the second workpiece 220 to be transferred more efficiently and processed by the processing devices (the first processing device and the second processing device).

[0109] Note that the present invention is not limited to the above embodiment. That is, various modifications can be made and implemented without departing from the gist of the present invention.

Explanation of Reference Numerals

[0110] 1 Processing system 10 Conveyor path 20 Conveyor vehicle 23 Tray 24 Lifting mechanism 50 Stocker 52 Opening 52-1 First opening 52-2 Second opening 53 Landing part 53-1 First landing part 53-2 Second landing part 54 First installation part 54-2 First cassette 55 Second installation part 55-2 Second cassette 56 Conveying device 56-1 First conveying arm 56-2 Second conveying arm 100 Processing device 110 First processing device 120 Second processing device 200 Workpiece 210 First workpiece 220 Second workpiece

Claims

1. A processing apparatus for processing a workpiece, A transport path installed above the processing apparatus, A transport vehicle having a tray for accommodating the workpiece supplied to the processing apparatus and traveling on the transport path, A processing system comprising: The transport vehicle includes a lifting mechanism for lifting and lowering the tray with respect to the processing apparatus, The processing system Includes a stocker where a first cassette for accommodating a first workpiece not fixed to the frame and a second cassette for accommodating a second workpiece fixed to the frame are installed, The stocker A first installation part for installing the first cassette, A second installation part for installing the second cassette, An opening through which the tray that moves up and down from the transport vehicle passes, A landing part where the tray lands, A transport device that transports the first workpiece between the first cassette and the tray that has landed on the landing part, and transports the second workpiece between the second cassette and the tray that has landed on the landing part, A processing system comprising.

2. The transport device Includes a first transport arm for transporting the first workpiece, A second transport arm for transporting the second workpiece, The processing system according to Claim 1.

3. The first installation part and the second installation part Are arranged on both sides of the transport device with the transport device interposed therebetween. The processing system according to Claim 1 or 2.

4. The processing apparatus Includes a processing apparatus for processing at least one of the first workpiece and the second workpiece. The processing system according to Claim 1 or 2.

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