Electrode conveyance system

Abstract

To provide an electrode conveyance system that can convey a sheet-like electrode at low cost.SOLUTION: An electrode conveyance system 1 includes an air floating stage 4 that supports a sheet-like electrode 2 in a non-contact manner by floating in the air, and a first planar linear motor 8 and a second planar linear motor 9. For instance, the first planar linear motor 8 is configured to horizontally drive and turningly drive a movable element 11 while magnetically levitating the movable element 11 on a stator 10. The movable element 11 is configured to be able to hold the sheet-like electrode 2.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present invention relates to an electrode transfer system.

Background Art

[0002] Patent Document 1 discloses an electrode transfer device including an oval rail and a plurality of movers capable of traveling on the rail. Each mover includes a transfer plate on which a sheet-like electrode is placed, and a plurality of clamps for holding the sheet-like electrode placed on the transfer plate. Each clamp includes an L-shaped clamp arm, a tension spring that constantly biases the clamp arm, and a roller attached to the clamp arm. With this configuration, the clamp arm is biased by the tension spring, so that the clamp arm presses the sheet-like electrode against the transfer plate. When the roller of each clamp engages with a fixed cam provided on the traveling path of the mover, the clamp arm rotates against the tension spring, and the sheet-like electrode is released from the clamp arm.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] With the configuration of Patent Document 1 above, as the size of the sheet-like electrode increases, the mover also has to be increased in size.

[0005] An object of the present disclosure is to provide a technique for transporting a sheet-like electrode at low cost.

Means for Solving the Problems

[0006] An air levitation stage that supports the sheet-like electrode in a non-contact manner by air levitation, At least one planar linear motor including a stator and a mover, including the at least one planar linear motor is configured to horizontally drive and swivel drive the mover in a state where the mover is magnetically levitated on the stator, the mover is configured to be able to grip the sheet-like electrode, an electrode conveyance system is provided. According to the above configuration, the sheet-like electrode can be conveyed at low cost.

[0007] the at least one planar linear motor includes a first planar linear motor and a second planar linear motor, the first planar linear motor and the second planar linear motor may be arranged so as to sandwich the air levitation stage. According to the above configuration, the sheet-like electrode can be stably conveyed.

[0008] an imaging device that images the sheet-like electrode supported by the air levitation stage, a control device that corrects the position and orientation of the sheet-like electrode by controlling the mover based on the captured image generated by the imaging device, may further be included. According to the above configuration, the position and orientation of the sheet-like electrode can be corrected.

[0009] the air levitation stage is divided in the width direction orthogonal to the conveyance direction of the sheet-like electrode, the air flow rate inside in the width direction may be smaller than the air flow rate outside in the width direction. According to the above configuration, it is possible to suppress the inner side in the width direction of the sheet-like electrode from curving upward.

[0010] the air levitation stage is divided in the conveyance direction of the sheet-like electrode, The air levitation stage may be configured to inject air only in the region where the sheet-like electrode exists, in synchronization with the conveyance of the sheet-like electrode. According to the above configuration, the amount of air used can be reduced.

Effects of the Invention

[0011] According to the present disclosure, the sheet-like electrode can be conveyed at low cost.

Brief Description of the Drawings

[0012]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Modes for Carrying Out the Invention

[0013] Hereinafter, the present invention will be described through embodiments of the invention. However, the invention according to the claims is not limited to the following embodiments. Also, not all of the configurations described in the embodiments are essential as means for solving the problems. For clarity of explanation, the following description and drawings have been appropriately omitted and simplified. In each drawing, the same elements are denoted by the same reference numerals, and duplicate explanations are omitted as necessary.

[0014] FIG. 1 shows a perspective view of the electrode transfer system 1. As shown in FIG. 1, the electrode transfer system 1 is incorporated and used in the manufacturing process of all-solid-state batteries. That is, the electrode transfer system 1 transports the sheet-shaped electrode 2 in order to roll-transfer the positive electrode foil 3 onto the sheet-shaped electrode 2, which is an all-solid-state battery electrode assembly in which a negative electrode composite layer, a solid electrolyte layer, and a positive electrode composite layer are formed on both sides of the negative electrode foil. To roll-transfer the positive electrode foil 3 onto the sheet-shaped electrode 2 means, in short, to attach the positive electrode foil 3 to the sheet-shaped electrode 2. The sheet-shaped electrode 2 is a specific example of the first sheet member. The positive electrode foil 3 is a specific example of the second sheet member. The first sheet member may be a positive electrode body in which a positive electrode composite layer is formed on both sides of the positive electrode foil, and the second sheet member may be used as a separator. The electrode transfer system 1 is also called a sheet transfer system.

[0015] As shown in FIG. 1, the electrode transfer system 1 includes an air levitation stage 4 for air-levitating the sheet-shaped electrode 2, a plurality of planar linear motors 5 for transporting the sheet-shaped electrode 2 air-levitated by the air levitation stage 4, a plurality of cameras 6 (imaging devices) for imaging the sheet-shaped electrode 2, and a control device 7.

[0016] In this embodiment, the sheet-shaped electrode 2 is linearly transported while maintaining a horizontal posture. Therefore, the air levitation stage 4 is formed in an elongated shape along the transport direction of the sheet-shaped electrode 2. Hereinafter, the longitudinal direction of the air levitation stage 4 is simply referred to as the longitudinal direction. The direction orthogonal to the longitudinal direction in a plan view is referred to as the width direction. The direction orthogonal to the longitudinal direction and the width direction is referred to as the vertical direction. The longitudinal direction, the width direction, and the vertical direction are orthogonal to each other.

[0017] The longitudinal direction includes the front and the rear as the transport direction in which the sheet-shaped electrode 2 is transported. The front is also called the transport direction. The vertical direction includes the upper and the lower. The width direction includes the inner width direction as the direction approaching the center of the sheet-shaped electrode 2 in the width direction and the outer width direction as the direction moving away from the center of the sheet-shaped electrode 2 in the width direction.

[0018] The sheet-like electrode 2 is typically rectangular, with dimensions in the longitudinal direction typically ranging from 50 centimeters to 150 centimeters, dimensions in the width direction typically ranging from 80 centimeters to 150 centimeters, and a thickness typically ranging from 0.5 millimeters to 1 millimeter.

[0019] In this embodiment, the plurality of planar linear motors 5 are of the magnetic levitation type and include a first planar linear motor 8 and a second planar linear motor 9. The first planar linear motor 8 and the second planar linear motor 9 are arranged so as to sandwich the air levitation stage 4 in the width direction. The first planar linear motor 8 and the second planar linear motor 9 are controlled by the control device 7. Either one of the first planar linear motor 8 and the second planar linear motor 9 may be omitted.

[0020] The first planar linear motor 8 includes a stator 10 and a plurality of movers 11. Each mover 11 is configured to move in the longitudinal direction and the width direction and to turn under the control of the control device 7. Here, "turn" means turning around the vertical axis, so-called yaw turning. And in this embodiment, the plurality of movers 11 circulate counterclockwise in plan view along a predetermined circulation path 12 defined on the stator 10.

[0021] Similarly, the second planar linear motor 9 includes a stator 13 and a plurality of movers 14. Each mover 14 is configured to move in the longitudinal direction and the width direction and to turn under the control of the control device 7. Here, "turn" means turning around the vertical axis, so-called yaw turning. And in this embodiment, the plurality of movers 14 circulate clockwise in plan view along a predetermined circulation path 15 defined on the stator 13.

[0022] With the above configuration, when the sheet-like electrode 2 is carried into the electrode transfer system 1, the two movers 11 of the first planar linear motor 8 and the two movers 14 of the second planar linear motor 9 clamp the sheet-like electrode 2 that is floating in the air. That is, the sheet-like electrode 2 is clamped by the four movers 11 and 14. The four movers 11 and 14 move forward while clamping the sheet-like electrode 2. At this time, the sheet-like electrode 2 is imaged by the plurality of cameras 6. The control device 7 respectively acquires a plurality of captured images from the plurality of cameras 6, and acquires the position and orientation of the sheet-like electrode 2 in a plan view based on the plurality of captured images. Here, the position of the sheet-like electrode 2 in a plan view typically means the coordinates of the four corners of the sheet-like electrode 2 in a coordinate system defined in a plan view. The orientation of the sheet-like electrode 2 in a plan view typically means the angle formed by any side of the outer peripheral edge of the sheet-like electrode 2 and the longitudinal direction in a plan view. Then, the control device 7 calculates a correction value regarding the position and orientation of the sheet-like electrode 2 by comparing the acquired position and orientation of the sheet-like electrode 2 with the proper position and proper orientation of the sheet-like electrode 2. The control device 7 corrects the position and orientation of the sheet-like electrode 2 by controlling the four movers 11 and 14 based on the calculated correction value. Next, the positive electrode foil 3 is roll-transferred onto the sheet-like electrode 2.

[0023] Here, during roll transfer, if the movers 11 and 14 clamp the sheet-like electrode 2, the positive electrode foil 3 to be roll-transferred at the end of the sheet-like electrode 2 may interfere with the movers 11 and 14. Therefore, during roll transfer, first, the clamping of the movers 11 and 14 in the forward conveyance direction is temporarily released. That is, in the early stage of roll transfer, the clamping of the movers 11 and 14 in the forward conveyance direction is released, and the movers 11 and 14 in the rear conveyance direction continue to clamp the sheet-like electrode 2. In the middle stage of roll transfer, both the movers 11 and 14 in the forward conveyance direction and the movers 11 and 14 in the rear conveyance direction clamp the sheet-like electrode 2. In the later stage of roll transfer, the clamping of the movers 11 and 14 in the rear conveyance direction is temporarily released. That is, in the later stage of roll transfer, the movers 11 and 14 in the forward conveyance direction clamp the sheet-like electrode 2, and the clamping of the movers 11 and 14 in the rear conveyance direction is released. After that, when the roll transfer is completed, again, the movers 11 and 14 in the rear conveyance direction clamp the sheet-like electrode 2. Then, for the unloading of the sheet-like electrode 2, the four movers 11 and 14 unclamp the sheet-like electrode 2. Note that "unclamp" means to release the clamp.

[0024] Briefly speaking, the four movers 11 and 14 clamp the sheet-like electrode 2 carried into the electrode conveyance system 1 and convey the sheet-like electrode 2 forward while clamping it. During conveyance, the position and posture of the sheet-like electrode 2 in a plan view are corrected, and the positive electrode foil 3 is roll-transferred onto the sheet-like electrode 2 after the correction. Then, for the unloading of the sheet-like electrode 2, the four movers 11 and 14 unclamp the sheet-like electrode 2.

[0025] The plurality of movers 11 of the first planar linear motor 8 and the plurality of movers 14 of the second planar linear motor 9 all have the same configuration. Therefore, hereinafter, one mover 11 will be described, and the description of the other movers will be omitted. When describing the mover 11, the longitudinal direction, width direction, and vertical direction defined in FIG. 1 are used as they are. That is, as shown in FIG. 1, since the mover 11 clamps the end portion in the width direction of the sheet-like electrode 2, the posture of the mover 11 in the state where the mover 11 clamps the sheet-like electrode 2 can be expressed using the longitudinal direction, width direction, and vertical direction. However, the mover 11 turns slightly when correcting the posture of the sheet-like electrode 2 in a plan view. Hereinafter, when describing the configuration of the mover 11, the slight turning of the mover 11 for correcting the posture of the sheet-like electrode 2 in a plan view may be ignored for the sake of convenience of explanation.

[0026] FIG. 2 shows a perspective view of the mover 11. FIG. 3 shows a side view of the mover 11. As shown in FIGS. 2 and 3, the mover 11 includes a base 20, two rails 21, a support table 22, a lifting part 23, a clamp arm 24, and two coil springs 25.

[0027] The lifting part 23 is provided with two clamp operation plates 30 which are flat plate-shaped. The two clamp operation plates 30 are provided in a horizontal posture. The two clamp operation plates 30 are arranged apart from each other in the vertical direction. The two clamp operation plates 30 include an upper operation plate 30a and a lower operation plate 30b. The upper operation plate 30a is arranged above the lower operation plate 30b.

[0028] As shown in FIG. 3, the clamp arm 24 is swingably provided at the upper end of the elevating part 23. The swing axis 24a of the clamp arm 24 extends in the longitudinal direction. The clamp arm 24 is configured to be switchable between the clamped state shown in FIG. 3 and an unclamped state (not shown). The clamped state of the clamp arm 24 means the state of the clamp arm 24 when the mover 11 clamps the sheet-like electrode 2. The unclamped state of the clamp arm 24 means the state of the clamp arm 24 when the mover 11 unclamps the sheet-like electrode 2.

[0029] When observed in the longitudinal direction, the clamp arm 24 is configured in an L shape. The clamp arm 24 is biased toward the support table 22 by two coil springs 25. As a result, the sheet-like electrode 2 is sandwiched between the support table 22 and the clamp arm 24, that is, the sheet-like electrode 2 is clamped by the mover 11.

[0030] The elevating part 23 is further provided with a swing stopper 33. The swing stopper 33 defines the swing range on the unclamped side of the clamp arm 24. The clamp arm 24 is rotatably provided with a clamp roller 35 that can engage with a clamp cam 34 fixed to the two rails 21. In the clamped state shown in FIG. 3, when the elevating part 23 descends, the clamp roller 35 engages with the clamp cam 34, causing the clamp arm 24 to swing counterclockwise. Due to this swing, the sheet-like electrode 2 is unclamped. When the elevating part 23 continues to descend, eventually the clamp arm 24 contacts the swing stopper 33, prohibiting further swing of the clamp arm 24.

[0031] Next, the raising and lowering of the elevating unit 23 will be described in detail. As shown in FIG. 3, a clamp opening and closing motor 40 is provided on the air floating stage 4. The clamp opening and closing motor 40 is a specific example of the clamp operating means. The clamp opening and closing motor 40 includes a motor stator 41 and a rotor 42. A crank plate 43 is fixed to the rotor 42. A clamp opening and closing roller 44 as a clamp operating portion is rotatably attached to the crank plate 43. When the crank plate 43 rotates, when observed in the width direction, the clamp opening and closing roller 44 circulates along a circular orbit centered on the rotation axis of the rotor 42. In other words, when the crank plate 43 rotates, the clamp opening and closing roller 44 moves up and down.

[0032] When the mover 11 moves forward and faces the clamp opening and closing motor 40 in the width direction, the clamp opening and closing roller 44 is inserted between the two clamp operating plates 30. In the clamp state shown in FIG. 3, when the clamp opening and closing roller 44 descends due to the rotation of the crank plate 43, the clamp opening and closing roller 44 pushes down the lower operating plate 30b. Then, the elevating unit 23 also descends accordingly, and as a result, the clamp arm 24 switches from the clamped state to the unclamped state. Conversely, when the clamp opening and closing roller 44 ascends due to the rotation of the crank plate 43 in the unclamped state, the clamp opening and closing roller 44 pushes up the upper operating plate 30a. Then, the elevating unit 23 also ascends accordingly, and as a result, the clamp arm 24 switches from the unclamped state to the clamped state.

[0033] Next, with reference to FIGS. 4 and 5, the air floating stage 4 will be described. FIG. 4 shows a plan view of the air floating stage 4. FIG. 5 shows a cross-sectional view taken along line V-V of FIG. 4. As shown in FIGS. 4 and 5, the air floating stage 4 includes a stage main body 50 and a plurality of stage elements 51 mounted on the stage main body 50.

[0034] The plurality of stage elements 51 constitute four element columns 52. Each element column 52 is composed of a plurality of stage elements 51 arranged in the longitudinal direction. The four element columns 52 are arranged apart from each other in the width direction. An air vent groove 53 is formed between two adjacent element columns 52 in the width direction. Each element column 52 extends in the longitudinal direction. Therefore, it can be said that the air floating stage 4 is divided in the width direction.

[0035] The plurality of element columns 52 include a first element column 52A, a second element column 52B, a third element column 52C, and a fourth element column 52D. The first element column 52A, the second element column 52B, the third element column 52C, and the fourth element column 52D are arranged in this order in the width direction. Therefore, the second element column 52B and the third element column 52C are arranged inward in the width direction as compared with the first element column 52A and the fourth element column 52D.

[0036] The air floating stage 4 further includes a compressor 60, a tank 61, a plurality of solenoid valves 62, and a pipe 63.

[0037] The compressor 60 and the tank 61 are connected by a pipe 63. Thus, the compressed air generated by the compressor 60 is stored in the tank 61. The plurality of solenoid valves 62 and the tank 61 are connected by a pipe 63. Thus, compressed air is supplied from the tank 61 to the plurality of solenoid valves 62. Each solenoid valve 62 is connected to a corresponding plurality of stage elements 51 via a pipe 63. Each solenoid valve 62 is opened and closed under the control of the control device 7. Each stage element 51 is provided with a throttle valve 64. Each stage element 51 is configured such that the discharge amount (air flow rate) of the compressed air can be individually adjusted by the throttle valve 64. Specifically, the discharge amount at the stage element 51 belonging to the second element row 52B or the third element row 52C is adjusted to be less than the discharge amount at the stage element 51 belonging to the first element row 52A or the fourth element row 52D. Also, as described above, an air vent groove 53 is formed between two adjacent element rows 52 in the width direction. Therefore, as shown by the two-dot chain line in FIG. 5, the inner side in the width direction of the sheet-like electrode 2 does not curve upward so as to bulge, and it can be supported while maintaining the flat state of the sheet-like electrode 2.

[0038] Returning to Fig. 4, the plurality of solenoid valves 62 include solenoid valve 62a, solenoid valve 62b, solenoid valve 62c, solenoid valve 62d, solenoid valve 62e, solenoid valve 62f, solenoid valve 62g, solenoid valve 62h, solenoid valve 62i, and solenoid valve 62j. The solenoid valves 62a, 62b, 62c, 62d, 62e, 62f, 62g, 62h, 62i, and 62j are arranged in this order of description toward the rear. For example, when the solenoid valve 62a is in the open state, compressed air is injected by the plurality of stage elements 51 connected to the solenoid valve 62a. Here, the stage element 51(X,Y) is defined as the stage element 51 belonging to the X column and corresponding to the solenoid valve Y. For example, the stage element 51(A,a) belongs to the first element column 52A and is the stage element 51 corresponding to the solenoid valve 62a. The stage element 51(C,f) belongs to the third element column 52C and is the stage element 51 corresponding to the solenoid valve 62f. For example, when the solenoid valve 62c is in the open state by the control of the control device 7, compressed air is injected from the stage element 51(A,c), the stage element 51(B,c), the stage element 51(C,c), and the stage element 51(D,c).

[0039] Fig. 6 shows a block diagram of the control device 7. As shown in Fig. 6, a plurality of cameras 6 are connected to the control device 7. A plurality of clamp opening and closing motors 40 are connected to the control device 7. A plurality of solenoid valves 62 are connected to the control device 7. The control device 7 includes a processor 7a and a memory 7b. The processor 7a can access the memory 7b. The processor 7a reads and executes the program stored in the memory 7b. Thereby, the program causes hardware such as the processor 7a and the memory 7b to function as a mover control unit 70 and an air levitation control unit 71.

[0040] The mover control unit 70 conveys the sheet-like electrode 2 by controlling the four movers 11 and 14 that grip the sheet-like electrode 2 supported in a non-contact manner by the air levitation stage 4.

[0041] Further, the mover control unit 70 operates the clamping / unclamping of the movers 11 and 14 by controlling a plurality of clamp opening / closing motors 40.

[0042] Further, as described above, the mover control unit 70 acquires a plurality of captured images from the plurality of cameras 6, and calculates correction values regarding the position and orientation of the sheet-like electrode 2 in a plan view based on the acquired plurality of captured images. Then, the mover control unit 70 corrects the position and orientation of the sheet-like electrode 2 by controlling the four movers 11 and 14 based on the calculated correction values.

[0043] While the sheet-like electrode 2 is being transported, the mover control unit 70 sequentially updates the current location information of the sheet-like electrode 2 stored in the memory 7b.

[0044] The air levitation control unit 71 acquires the current location of the sheet-like electrode 2 by referring to the memory 7b, and controls a plurality of solenoid valves 62 so that the solenoid valves 62 corresponding to the sheet-like electrode 2 are in an open state and the solenoid valves 62 not corresponding to the sheet-like electrode 2 are in a closed state. Specifically, as shown in FIG. 4, when the sheet-like electrode 2 is at positions P and Q, the air levitation control unit 71 opens the solenoid valves 62b, 62c, and 62d corresponding to the sheet-like electrode 2 at position P, opens the solenoid valves 62f, 62g, and 62h corresponding to the sheet-like electrode 2 at position Q, and controls the plurality of solenoid valves 62 so that the other solenoid valves 62 are in a closed state. Then, the air levitation control unit 71 sequentially switches the solenoid valves 62 in an open state and the solenoid valves 62 in a closed state following the transportation of the sheet-like electrode 2. In this way, the air levitation control unit 71 controls the plurality of solenoid valves 62 so that compressed air is injected from the air levitation stage 4 only in the region where the sheet-like electrode 2 exists in synchronization with the transportation of the sheet-like electrode 2. Thereby, the amount of compressed air used can be reduced.

[0045] The preferred embodiments of the present disclosure have been described above. The above embodiments have the following features.

[0046] That is, the electrode transfer system 1 includes an air levitation stage 4 that supports the sheet-like electrode 2 in a non-contact manner by air levitation, a first planar linear motor 8, and a second planar linear motor 9. For example, the first planar linear motor 8 is configured to horizontally drive and swivel-drive the mover 11 while magnetically levitating the mover 11 on the stator 10. The mover 11 is configured to be able to grip the sheet-like electrode 2. According to the above configuration, the sheet-like electrode 2 can be transferred at low cost.

[0047] Also, the first planar linear motor 8 and the second planar linear motor 9 are arranged so as to sandwich the air levitation stage 4. According to the above configuration, the sheet-like electrode 2 can be stably transferred.

[0048] Further, the electrode transfer system 1 further includes a camera 6 (imaging device) that images the sheet-like electrode 2 supported by the air levitation stage 4, and a control device 7 that corrects the position and orientation of the sheet-like electrode 2 by controlling the mover 11 based on the captured image generated by the camera 6. According to the above configuration, the position and orientation of the sheet-like electrode 2 can be corrected.

[0049] Also, the air levitation stage 4 is divided in the width direction orthogonal to the transfer direction of the sheet-like electrode 2. The flow rate of compressed air (air flow rate) inside in the width direction is set to be smaller than the flow rate of compressed air outside in the width direction. According to the above configuration, it is possible to suppress the inner side in the width direction of the sheet-like electrode 2 from curving and bulging.

[0050] Also, the air levitation stage 4 is divided in the transfer direction of the sheet-like electrode 2. The air levitation stage 4 is configured to eject air only in the region where the sheet-like electrode 2 exists in synchronization with the transfer of the sheet-like electrode 2. According to the above configuration, the amount of air used can be reduced.

Explanation of Reference Numerals

[0051] 1 Electrode transfer system 2 Sheet-like electrode 3 Positive electrode foil 4 Air floating stage 5 Planar linear motor 6 Camera 7 Control device 7a Processor 7b Memory 8 First planar linear motor 9 Second planar linear motor 10 Stator 11 Rotor 12 Circulation path 13 Stator 14 Rotor 15 Circulation path 20 Base 21 Rail 22 Support table 23 Lifting part 24 Clamp arm 24a Swing axis 25 Coil spring 30 Clamp operation plate 30a Upper operation plate 30b Lower operation plate 33 Swing stopper 34 Clamp cam 35 Clamp roller 40 Clamp opening / closing motor 41 Motor stator 42 Rotor 43 Crank plate 44 Clamp opening / closing roller 50 Stage body 51 Stage element 52A First element row 52B Second element row 52C Third element row 52D Fourth element row 52 Element row 53 Air vent groove 60 Compressor 61 Tank 62 Solenoid valve 62a Solenoid valve 62b Solenoid valve 62c solenoid valve 62d solenoid valve 62e solenoid valve 62f solenoid valve 62g solenoid valve 62h solenoid valve 62i solenoid valve 62j solenoid valve 63 pipe 64 throttle valve 70 mover control unit 71 air floating control unit P position Q position

Claims

1. An air levitation stage that supports a sheet-shaped electrode in a non-contact manner by air levitation, At least one planar linear motor including a stator and a mover, Including, The at least one planar linear motor is configured to horizontally drive and swivel drive the mover in a state where the mover is magnetically levitated on the stator, The mover is configured to be able to grip the sheet-shaped electrode, An electrode transfer system.

2. The electrode transfer system according to Claim 1, The at least one planar linear motor includes a first planar linear motor and a second planar linear motor, The first planar linear motor and the second planar linear motor are arranged so as to sandwich the air levitation stage, An electrode transfer system.

3. The electrode transfer system according to Claim 1, An imaging device that images the sheet-shaped electrode supported by the air levitation stage, A control device that corrects the position and orientation of the sheet-shaped electrode by controlling the mover based on an imaging image generated by the imaging device, Further including, An electrode transfer system.

4. The electrode transfer system according to Claim 1, The air levitation stage is divided in the width direction orthogonal to the transfer direction of the sheet-shaped electrode, The air flow rate inside in the width direction is smaller than the air flow rate outside in the width direction, An electrode transfer system.

5. The electrode transfer system according to Claim 1, The air levitation stage is divided in the transfer direction of the sheet-shaped electrode, The air levitation stage is configured to inject air only in the region where the sheet-shaped electrode exists in synchronization with the transfer of the sheet-shaped electrode, An electrode transfer system.

Images