Laser ablation system and method
The flow directing structure in laser ablation systems directs high-velocity purge gas away from optical surfaces to create a positive pressure environment, effectively preventing contamination and reducing damage risks, thus enhancing system reliability and efficiency.
Patent Information
- Application Number
- JP2024209506
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-01-24
- Filing Date
- 2024-12-02
- Publication Date
- 2025-08-05
AI Technical Summary
Laser ablation processes generate particles, vapors, and gases that contaminate optical surfaces, leading to potential damage and costly downtime due to the need for expensive optics replacement, while existing methods to prevent contamination either introduce negative pressure or pose collision hazards.
A flow directing structure is positioned opposite the optical assembly to direct high-velocity purge gas away from the optical surface and toward the substrate, creating a positive pressure environment that removes plasma plumes and emissions, thereby protecting the optical surface.
Prevents contamination of optical surfaces by maintaining a clean, positive pressure environment, reducing the risk of damage and minimizing downtime, while being cost-effective and collision-safe.
Smart Images
Figure 2025114468000001_ABST
Abstract
Description
[Technical Field]
[0001] FIELD OF THE DISCLOSURE The present disclosure relates to laser ablation systems and methods. [Background technology]
[0002] Laser ablation can be used as an industrial process to remove surface materials such as paints, coatings, contaminants, or oxides. The laser ablation process generates particles, vapors, and gases (i.e., emissions) that can interfere with the laser process and contaminate exposed optical surfaces in the laser ablation system. Contaminant emissions in the mean path can adversely affect the laser process by scattering or absorbing laser energy. In high concentrations, the absorbed energy on the optical surface can generate enough heat to cause damage, necessitating expensive optics replacement. Furthermore, obtaining replacement optics for such highly specialized systems can take months, resulting in significant downtime for the industrial process. Historically, to prevent backspatter contamination, thin slit apertures (known as "air knives") have been used to protect laser optics by directing a high-pressure laminar gas flow parallel to the beam (just ahead of the laser optics). While this technique can be effective in reducing backspatter, gas flowing across the open aperture can create negative pressure (the Venturi effect) and draw in unfiltered ambient air, which can contaminate the laser optics. Another technique is to install a linear air knife immediately adjacent to the substrate surface to blow fumes and emissions out of the beam path during laser processing. While this approach improves laser process performance, it places cumbersome hardware close to the part surface, posing a collision hazard and risk of part damage in automated manufacturing applications. Summary of the Invention [Means for solving the problem]
[0003] A laser ablation system and method is disclosed.
[0004] The laser ablation system includes a flow guide structure operably coupled to a laser assembly, the flow guide structure being on an opposite side of the laser assembly from the optical assembly with the purge gas jet positioned to guide high-velocity purge gas across the optical surface of the optical assembly. The flow guide structure includes a body operably attached to the laser assembly with respect to the purge gas jet and the optical assembly. The body defines a flow guide structure internal volume, an inlet to the flow guide structure internal volume, and an outlet from the flow guide structure internal volume. The inlet is configured to be positioned toward the optical assembly relative to the outlet. The flow guide structure internal volume and the outlet are configured to direct the high-velocity purge gas away from the optical surface and toward a substrate surface being ablated by the laser ablation system.
[0005] The laser ablation method includes emitting a laser beam through an optical surface of an optical assembly of the laser assembly, directing a high velocity purge gas at the optical surface, confining the purge gas within a body of a flow directing structure to create a positive pressure within the body, expelling a column of the purge gas from the body toward a substrate surface, removing a plasma plume from the path of the laser beam, and dissipating fumes and emissions. [Brief explanation of the drawings]
[0006] [Figure 1] FIG. 1 is a schematic diagram illustrating a laser ablation system according to the present disclosure. [Figure 2] FIG. 1 is an isometric view of an exemplary laser ablation system according to the present disclosure. [Figure 3] FIG. 1 is an isometric view of an exemplary mounting structure for a laser ablation system according to the present disclosure. [Figure 4]FIG. 4 is a cross-sectional view of the exemplary mounting structure of FIG. 3. [Figure 5] 1 is an isometric view of an exemplary flow directing structure, an exemplary purge gas jet, and an exemplary mounting structure according to the present disclosure. FIG. [Figure 6] FIG. 6 is an isometric view of the example flow directing structure of FIG. 5. [Figure 7] 6 is another isometric view of the example flow directing structure of FIG. 5. [Figure 8] FIG. 10 is an isometric view of another exemplary flow directing structure according to the present disclosure. [Figure 9] 9 is another isometric view of the example flow directing structure of FIG. 8. [Figure 10] FIG. 10 is an isometric view of another exemplary flow directing structure according to the present disclosure. [Figure 11] 11 is another isometric view of the example flow directing structure of FIG. 10. [Figure 12] FIG. 10 is an isometric view of another exemplary flow directing structure according to the present disclosure. [Figure 13] 13 is another isometric view of the example flow directing structure of FIG. 12. [Figure 14] 1 is a flow chart that schematically illustrates a laser ablation method according to the present disclosure. DETAILED DESCRIPTION OF THE INVENTION
[0007] FIG. 1 schematically illustrates an exemplary laser ablation system 10 according to the present disclosure. Generally, in FIG. 1, elements that are likely to be included in a given example are shown with solid lines, while elements that are optionally included in a given example are shown with dashed lines. However, elements shown with solid lines are not required for all examples of the present disclosure, and elements shown with solid lines may be omitted from particular examples without departing from the scope of the present disclosure.
[0008] 1 , a laser ablation system 10 typically includes at least a flow directing structure 30 configured to be operably coupled to the laser assembly 12, the flow directing structure 30 being on an opposite side of the laser assembly 12 from the optical assembly 18 relative to the purge gas jet 20, the purge gas jet 20 being positioned to direct high-velocity purge gas 22 across the optical surface 24 of the optical assembly 18. The flow directing structure 30 includes a body 32 configured to be operably mounted to the laser assembly 12 relative to the purge gas jet 20 and the optical assembly 18.
[0009] 1 , the body 32 defines a flow directing structure internal volume 34 and an outlet 38 from the flow directing structure internal volume 34. The outlet 38 is configured to be positioned opposite the optical surface 24. The flow directing structure internal volume 34 and the outlet 38 are configured to direct the high-velocity purge gas 22 away from the optical surface 24 and toward a plasma plume 54 at the substrate surface 16 being ablated by the laser ablation system 10. Thus, the plasma plume 54 and associated fumes 56 and effluents 58 are removed from the path of the laser beam 14, thereby preventing scattering and absorption.
[0010] 1 , when the flow directing structure 30 is operatively installed and during use, the high-velocity purge gas 22 directed at the optical surface 24 of the optical assembly 18 is forced to exit the flow directing structure 30 via the outlet 38 and directed toward the substrate surface 16 being ablated. As a result, the high-velocity purge gas 22 not only serves to blow unwanted effluent away from the optical surface 24, but also creates a region from the optical surface 24 to the substrate surface 16 where the high-velocity purge gas 22 restricts the effluent from traveling toward and contacting the optical surface 24. Furthermore, the body 32 of the flow directing structure 30, even after being blown away from the substrate surface 16 by the high-velocity purge gas 22, functions to shield the optical surface 24 from any effluent that may otherwise travel from the substrate surface 16 generally toward the optical surface 24, such as becoming circumferential and airborne within the environment of the laser ablation system 10 during use.
[0011] The flow directing structure 30 may be provided as an add-on for an existing laser ablation system. Alternatively, a laser ablation system 10 according to the present disclosure may include a laser assembly 12, a purge gas jet 20 operably coupled to the laser assembly 12, and a flow directing structure 30 operably coupled to the laser assembly 12 relative to the purge gas jet 20. An outlet 38 from the flow directing structure interior volume 34 is positioned opposite the optical surface 24 of the optical assembly 18 of the laser assembly 12.
[0012] The flow direction structure 30 may be constructed using a variety of manufacturing techniques, such as machining or additive manufacturing. In some examples, the flow direction structure 30 may be described as monolithic and / or consisting of a single piece. That is, in some examples, the flow direction structure 30 is not an assembly of multiple pieces operatively coupled to one another.
[0013] In some examples of the flow directing structure 30, the flow directing structure interior volume 34 narrows toward the outlet 38. Thus, the flow directing structure 30 may be described as a nozzle or configured to direct the high velocity purge gas 22 away from the optical surface 24 and toward the substrate surface 16. Such a configuration creates a clean, positive pressure environment that prevents the intrusion of foreign matter and unfiltered ambient air into the laser beam 14 or onto the optical surface 24.
[0014] The outlet 38 may be of any suitable shape and size, depending on the desired characteristics of the laser ablation process. By way of example, the outlet 38 may be a circular, polygonal, rectangular, or oval slit, although other shapes may also be utilized.
[0015] In some examples, the outlet 38 is shaped and sized to correspond to the circumference of the laser beam 14 emitted by the laser assembly 12 through the optical assembly 18. In such examples, the air directing structure 30 may be described as providing the largest possible constriction (or narrowest outlet 38) without the body 32 obstructing or otherwise blocking a portion or a significant portion of the laser beam 14. That is, an air directing structure 30 so configured will maximize the velocity of the air that exits the outlet 38 and is directed toward the substrate surface 16.
[0016] Continuing to refer to FIG. 1 , in some examples, the body 32 of the flow directing structure 30 defines one or more channels 44 configured to receive the gas delivery ducts 46 of the purge gas jets 20. In laser ablation systems 10 that also include a purge gas jet 20, the gas delivery ducts 46 of the purge gas jets 20 extend through one or more channels 44. In other words, the air directing structure 30 may be structured to accommodate the gas delivery ducts 46 of the purge gas jets 20. In some examples, the flow directing structure 30 defines at least two channels 44, and in some examples, four channels 44. The channels 44, if present, may be such that the body 32 does not extend completely around each channel 44, or the channels 44 may be closed channels such that the body 32 extends completely around each channel 44. Open channels may facilitate assembly of the flow directing structure 30 with the purge gas jets 20.
[0017] Similarly, the purge gas jet 20 may include one or more gas delivery ducts 46. However, the flow directing structure 30 need not include the exact same number of channels 44 as the number of gas delivery ducts 46 of the corresponding purge gas jet 20. For example, the flow directing structure 30 may include four channels 44 for use with a purge gas jet 20 having only two gas delivery ducts 46. In such an example, the air delivery structure 30 may be capable of being placed in two operating positions relative to the purge gas jet 20, such as at 90 degrees relative to each other. As a result, such an air directing structure 30 may be versatile and capable of being utilized with purge gas jets 20 of various configurations.
[0018] The purge gas jet 20 may have any suitable configuration so as to be configured to operatively direct the high-velocity purge gas 22 at the optical surface 24 of the optical assembly 18 of the laser assembly 12. In some examples, the purge gas jet 20 may be described as or in the form of an air knife. In some examples, the purge gas jet 20 may be described as or in the form of a ring knife, ring-shaped air knife, circular air knife, and / or annular air knife, i.e., an air knife configured to deliver high-velocity purge gas from a circular or other annular outlet. Such a configuration of the purge gas jet 20 is well suited to ensure that the entire optical surface 24 of the optical assembly 18 of the laser assembly 12 is fully impinged by the high-velocity purge gas 22 to prevent contact with undesired emissions.
[0019] In some examples, the flow direction structure 30 may be described as creating a collision barrier between the optical assembly 18 and the substrate surface 16 and / or creating a low-profile collision protection system to avoid both equipment (e.g., laser) damage and component damage. In some examples, the flow direction structure 30 may be fabricated from inexpensive, lightweight materials (e.g., ABS, nylon, or the like) for use in cobots or small payload machines. As a result, if damage occurs to the flow direction structure 30 as a result of a collision, the flow direction structure 30 can be inexpensively replaced.
[0020] In some examples, the flow directing structure 30 is sized to fit directly against the optical assembly 18 and partially block direct and specularly reflected laser radiation that would otherwise potentially pose a hazard to personnel.
[0021] 1 , some laser ablation systems 10 further include a mounting structure 48 configured to operably couple the purge gas jet 20 and the flow directing structure 30 to the laser assembly 12 and with respect to the optical assembly 18. In a fully assembled system, the mounting structure 48 operably couples the purge gas jet 20 and the flow directing structure 30 to the laser assembly 12 and with respect to the optical assembly 18. That is, when provided, the mounting structure 48 facilitates operative positioning of the purge gas jet 20 and the flow directing structure 30 with respect to the optical assembly 18, so that the flow directing structure 30 performs its intended function of directing the high-velocity purge gas 22 toward the substrate surface 16 being ablated.
[0022] 1 , the mounting structure 48 includes a mounting structure interior volume 50 that is contiguous with the flow directing structure interior volume 34 and narrows toward the optical surface 24 when the mounting structure 48 is operably coupled to the laser assembly 12. In other words, in some examples, the mounting structure 48 is configured to direct the high-velocity purge gas 22 from the purge gas jet 20 toward the optical surface 24, effectively maintaining a desired air velocity to ensure protection of the optical surface 24 from emissions.
[0023] In some examples, the mounting structure 48 is in direct contact with the optical surface 24, thereby avoiding air gaps and / or specular leakage.
[0024] In some examples, the flow guide structure 30, mounting structure 48, and purge gas jet 20 can be described as a three-part housing that protects the optical assembly 18, with a single outlet 38 for the laser beam 14 and high-velocity purge gas 22.
[0025] 1, some laser ablation systems 10 further include a robotic manipulator 52 operably coupled to laser assembly 12 and configured to operably position laser assembly 12 for ablating substrate surface 16. A variety of robotic manipulators 52 may be used, including robotic arms, articulated robots, so-called cobots (collaborative robots), delta robots, and other configurations of robots.
[0026] Turning now to Figures 2 through 13, illustrative and non-exclusive examples of laser ablation system 10 and its components are shown. Where necessary, reference numerals from the schematic diagram of Figure 1 are used with one or more prime symbols (') to designate corresponding examples, but the examples of Figures 2 through 13 are non-exclusive and do not limit laser ablation system 10 to the illustrated embodiments of Figures 2 through 13. That is, laser ablation system 10 may incorporate any number of the various aspects, configurations, characteristics, properties, etc. of laser ablation system 10 illustrated and discussed with reference to the schematic diagram of Figure 1 and / or the embodiments of Figures 2 through 13, and variations thereof, but need not include all such aspects, configurations, characteristics, properties, etc. For purposes of brevity, with respect to the examples of Figures 2 through 13, each previously described component, part, portion, aspect, region, etc., or variations thereof may not be discussed, illustrated, and / or labeled again.
[0027] 2 illustrates an exemplary laser ablation system 10' comprising a laser assembly 12', a purge gas jet 20', a flow directing structure 30', and a mounting structure 48' that operably couples the purge gas jet 20' and the flow directing structure 30' to the laser assembly 12'. The exemplary air directing structure 30' has a square outlet 38'.
[0028] 3 and 4 show an exemplary mounting structure 48" that includes a mounting structure interior volume 50" that narrows toward the optical surface of the optical assembly of the laser assembly when operatively mounted relative to the laser assembly.
[0029] FIG. 5 shows an exemplary air directing structure 30′ and purge gas jet 20′ of the exemplary laser ablation system 10′ of FIG. 2, along with an exemplary mounting structure 48′′. FIGS. 6 and 7 show the flow directing structure 30′ itself. The flow directing structure 30′ defines four channels 44′, and the purge gas jet 20′ includes two gas delivery ducts 46′ extending through two of the channels 44′ when the flow directing structure 30′ is operably mounted relative to the purge gas jet 20′, as shown in FIG. 5.
[0030] 8 and 9 show an exemplary flow directing structure 30" having a circular outlet 38" and four channels 44".
[0031] 10 and 11 show an exemplary flow directing structure 30''' having a hexagonal outlet 38''' and four channels 44'''.
[0032] 12 and 13 show an exemplary flow directing structure 30"" having oval slits 38"".
[0033] Figure 14 generally provides a flowchart illustrating an illustrative, non-exclusive example of a method 100 according to the present disclosure. The method and steps illustrated in Figure 14 are not limiting, and as will be understood from the discussion herein, other methods and steps are within the scope of the present disclosure, including methods having more or fewer steps than those illustrated.
[0034] The method 100 may be described as a method 100 for ablating a substrate surface 16. The method 100 typically includes at least emitting 102 a laser beam 14 through an optical surface 24 of an optical assembly 18 of the laser assembly 12, directing 104 a high-velocity purge gas 22 toward the optical surface 24, confining 106 the purge gas 22 within the body 32 of the flow directing structure 30 to create a positive pressure within the body 32, exhausting 108 a column of the purge gas 22 from the body 32 toward the substrate surface 16, removing 110 a plasma plume 54 from a path of the laser beam 14, and dissipating 112 fumes 56 and emissions 58. The method 100 may be performed by a laser ablation system 10 according to the present disclosure.
[0035] The following enumerated paragraphs describe illustrative, non-exclusive examples of inventive subject matter according to the present disclosure.
[0036] A. A laser ablation system (10), comprising: a flow guide structure (30) operably coupled to the laser assembly (12), the flow guide structure (30) being on an opposite side of the optical assembly (18) of the laser assembly (12) from the purge gas jet (20), the purge gas jet (20) being positioned to guide the high-velocity purge gas (22) across the optical surface (24) of the optical assembly (18), and the flow guide structure (30) The laser assembly (12) comprises a body (32) operably mounted relative to the purge gas jet (20) and the optical assembly (18), the body (32) defining a flow directing structure internal volume (34) and an outlet (38) from the flow directing structure internal volume (34), the outlet (38) configured to be positioned opposite the optical surface (24) of the optical assembly (18), the flow directing structure internal volume (34) and the outlet (38) configured to direct the high velocity purge gas (22) away from the optical surface (24) and toward the substrate surface (16) being ablated by the laser ablation system (10). Laser ablation system (10).
[0037] A1. The laser ablation system (10) of paragraph A, wherein the flow directing structure interior volume (34) narrows toward the outlet (38).
[0038] A2. The laser ablation system (10) of any of paragraphs A-A1, wherein the outlet (38) is a circular, polygonal, rectangular, or oval slit.
[0039] A3. The laser ablation system (10) of any of paragraphs A-A2, wherein the outlet (38) is sized to correspond to the perimeter of the laser beam (14) emitted by the laser assembly (12) through the optical assembly (18).
[0040] A4. The laser ablation system (10) of any of paragraphs A-A3, wherein the body (32) defines one or more channels (44) that receive the gas delivery ducts (46) of the purge gas jets (20).
[0041] A4.1. The laser ablation system (10) of paragraph A4, wherein the one or more channels (44) include at least two channels (44), optionally four channels (44).
[0042] A5. Further comprising a mounting structure (48) operatively coupling the purge gas jet (20) and flow directing structure (30) to the laser assembly (12) relative to the optical assembly (18); A laser ablation system (10) according to any of paragraphs A-A4.1.
[0043] A5.1. The laser ablation system (10) of paragraph A5, wherein the mounting structure (48) has a mounting structure interior volume (50) that narrows toward the optical surface (24) when the mounting structure (48) is operably coupled to the laser assembly (12).
[0044] A6. Further comprising a purge gas jet (20); A laser ablation system (10) according to any of paragraphs A-A5.1.
[0045] A7. Laser assembly (12) and and a purge gas jet (20). A laser ablation system (10) according to any of paragraphs A-A5.1.
[0046] A7.1. The laser ablation system (10) of paragraph A7, wherein the flow directing structure (30) and purge gas jet (20) are operatively coupled to the laser assembly (12) to direct high-velocity purge gas (22) across the optical surface (24) and through the outlet (38) toward the substrate surface (16).
[0047] A7.2. Further comprising a mounting structure (48) operatively coupling the purge gas jet (20) and flow directing structure (30) to the laser assembly (12) relative to the optical assembly (18); A laser ablation system (10) according to any of paragraphs A7 to A7.1.
[0048] A7.2.1. The laser ablation system (10) of paragraph A7.2, wherein a mounting structure (48) operatively couples the purge gas jet (20) and the flow directing structure (30) to the laser assembly (12).
[0049] B. A laser ablation system (10) for ablating a substrate surface (16), the laser ablation system (10) comprising: a laser assembly (12) comprising an optical assembly (18) having an optical surface (24); a purge gas jet (20) operatively coupled to the laser assembly (12) and directing a high velocity purge gas (22) across an optical surface (24) of the optical assembly (18); a flow guide structure (30) operatively coupled to the laser assembly (12) relative to the purge gas jet (20), the flow guide structure (30) comprising a body (32) defining a flow guide structure internal volume (34) and an outlet (38) from the flow guide structure internal volume (34), the outlet (38) being positioned opposite the optical surface (24) of the optical assembly (18), the flow guide structure internal volume (34) and the outlet (38) being configured to direct the high-velocity purge gas (22) away from the optical surface (24) and toward the substrate surface (16); Laser ablation system (10).
[0050] B1. The laser ablation system (10) of paragraph B, wherein the flow directing structure interior volume (34) narrows toward the outlet (38).
[0051] B2. The laser ablation system (10) of any of paragraphs B-B1, wherein the exit (38) is a circular, polygonal, rectangular, or oval slit.
[0052] B3. The laser ablation system (10) of any of paragraphs B-B2, wherein the outlet (38) is sized to correspond to the perimeter of the laser beam (14) emitted by the laser assembly (12) through the optical assembly (18).
[0053] B4. The laser ablation system (10) of any of paragraphs B-B3, wherein the purge gas jet (20) comprises one or more gas delivery ducts (46), and the body (32) defines one or more channels (44) through which the one or more gas delivery ducts (46) extend.
[0054] B4.1. The laser ablation system (10) of paragraph B4, wherein the one or more gas delivery ducts (46) include at least two gas delivery ducts (46), optionally four gas delivery ducts (46), and the one or more channels (44) include at least two channels (44), optionally four channels (44).
[0055] B5. Further comprising a mounting structure (48) operatively coupling the purge gas jet (20) and flow directing structure (30) to the laser assembly (12) relative to the optical assembly (18); A laser ablation system (10) according to any of paragraphs B to B4.1.
[0056] B5.1. The laser ablation system (10) of paragraph B5, wherein the mounting structure (48) comprises a mounting structure interior volume (50) that narrows toward the optical surface (24).
[0057] B6. Further comprising a robotic manipulator (52) operatively coupled to the laser assembly (12) and operatively positioning the laser assembly (12) to ablate the substrate surface (16); A laser ablation system (10) according to any of paragraphs B through B5.1.
[0058] C. A method (100) for ablating a substrate surface (16), the method (100) comprising: emitting (102) a laser beam (14) through an optical surface (24) of an optical assembly (18) of a laser assembly (12); directing (104) a high velocity purge gas (22) at the optical surface (24); confining (106) a purge gas (22) within the body (32) of the flow directing structure (30) to create a positive pressure within the body (32); Discharging (108) a column of purge gas (22) from the body (32) toward the substrate surface (16); removing (110) the plasma plume (54) from the path of the laser beam (14); Dissipating (112) the fumes (56) and emissions (58); A method (100) comprising:
[0059] C1. The method (100) described in paragraph C, performed by the laser ablation system (10) of any of paragraphs B to B6.
[0060] D. Use of the laser ablation system of any of paragraphs A through A7.2.1 or B through B6 to ablate a substrate surface.
[0061] As used herein, the terms "adapted" and "configured" mean that an element, component, or other subject matter is designed and / or intended to perform a given function. Thus, the use of the terms "adapted" and "configured" should not be interpreted to mean that a given element, component, or other subject matter is merely "enabled" to perform a given function, but rather that the element, component, and / or other subject matter is specifically selected, created, implemented, utilized, programmed, and / or designed for the purpose of performing the function. It is also within the scope of this disclosure that elements, components, and / or other described subject matter described as being adapted to perform a particular function may additionally or alternatively be described as being configured to perform that function, and vice versa. Similarly, subject matter described as being configured to perform a particular function may additionally or alternatively be described as being operable to perform that function.
[0062] As used herein, the term "and / or" placed between a first entity and a second entity means one of: (1) the first entity, (2) the second entity, or (3) the first entity and the second entity. Multiple entities listed with "and / or" should be construed in the same manner, i.e., "one or more" entities so conjunct. Other entities may optionally be present beyond the entities specifically identified by the "and / or" clause, whether related to those specifically identified entities or not. Thus, as a non-limiting example, the phrase "A and / or B," when used in conjunction with open-ended language such as "comprising," may refer, in one example, to A only (optionally including entities other than B), in another example, to B only (optionally including entities other than A), and in yet another example, to both A and B (optionally including other entities). An entity may refer to an element, an act, a structure, a step, an operation, a value, and the like.
[0063] The various disclosed apparatus elements and method steps disclosed herein are not required for all apparatus and methods according to the present disclosure, and the present disclosure includes all novel and non-obvious combinations and sub-combinations of the various elements and steps disclosed herein. Moreover, one or more of the various elements and steps disclosed herein may define separate and independent inventive subject matter separate from the entirety of the disclosed apparatus or method. Thus, such inventive subject matter need not be associated with the particular apparatus and methods explicitly disclosed herein, and such inventive subject matter may find utility in apparatus and / or methods not explicitly disclosed herein. [Explanation of symbols]
[0064] 10 Laser Ablation System 10' Laser Ablation System 12 Laser Assembly 12' Laser Assembly 14 Laser Beam 16 Substrate surface 18 Optical Assembly 20 Purge Gas Jet 20' Purge Gas Jet 22 High-speed purge gas 24 Optical surface 30 Flow guide structure, air guide structure, air delivery structure 30' Flow guide structure, air guide structure 30'' flow guide structure 30'' flow guide structure 30'' flow guide structure 32 Main Unit 34 Flow guide structure internal volume 38 Exit 38' exit 38'' exit 38''' Exit 38'' slit 44 channels 44' Channel 44'' channel 44'' channel 46 Gas Delivery Duct 46' Gas Delivery Duct 48 Installation structure 48' Installation structure 48'' mounting structure 48''' Installation structure 50 Internal volume of installation structure 50'' Installation structure internal volume 52 Robot Manipulator 54 Plasma Plume 56 Hume 58 Emissions
Claims
1. A laser ablation system (10), comprising: a flow guide structure (30) operably coupled to a laser assembly (12), the flow guide structure (30) being on an opposite side of an optical assembly (18) of the laser assembly (12) with respect to a purge gas jet (20), the purge gas jet (20) being positioned to guide a high velocity purge gas (22) across an optical surface (24) of the optical assembly (18), the flow guide structure (30) comprising: the laser assembly (12) comprises a body (32) operably mounted with respect to the purge gas jet (20) and the optical assembly (18), the body (32) defining a flow guide structure internal volume (34) and an outlet (38) from the flow guide structure internal volume (34), the outlet (38) configured to be positioned opposite the optical surface (24) of the optical assembly (18), the flow guide structure internal volume (34) and the outlet (38) configured to direct the high-velocity purge gas (22) away from the optical surface (24) and toward a substrate surface (16) being ablated by the laser ablation system (10); A laser ablation system (10).
2. The laser ablation system (10) of claim 1, wherein the flow directing structure interior volume (34) narrows toward the outlet (38).
3. The laser ablation system (10) of claim 1, wherein the outlet (38) is a circular, polygonal, rectangular, or oval slit.
4. 2. The laser ablation system of claim 1, wherein the outlet is sized to correspond to a perimeter of a laser beam emitted by the laser assembly through the optical assembly.
5. The laser ablation system (10) of claim 1, wherein the body (32) defines one or more channels (44) that receive gas delivery ducts (46) of the purge gas jet (20).
6. The laser ablation system (10) of claim 5, wherein the one or more channels (44) comprises at least two channels (44).
7. a mounting structure (48) operatively coupling the purge gas jet (20) and the flow directing structure (30) to the laser assembly (12) relative to the optical assembly (18). The laser ablation system (10) of claim 1.
8. 8. The laser ablation system of claim 7, wherein the mounting structure comprises a mounting structure interior volume that narrows toward the optical surface when the mounting structure is operably coupled to the laser assembly.
9. The purge gas jet (20) is further provided. The laser ablation system (10) of claim 1.
10. the laser assembly (12); The purge gas jet (20), The laser ablation system (10) of claim 1.
11. A laser ablation system (10) for ablating a substrate surface (16), said laser ablation system (10) comprising: a laser assembly (12) comprising an optical assembly (18) comprising an optical surface (24); a purge gas jet (20) operatively coupled to the laser assembly (12) and directing a high velocity purge gas (22) across the optical surface (24) of the optical assembly (18); a flow guide structure (30) operatively coupled to the laser assembly (12) with respect to the purge gas jet (20), the flow guide structure (30) comprising a body (32) defining a flow guide structure internal volume (34) and an outlet (38) from the flow guide structure internal volume (34), the outlet (38) being positioned opposite the optical surface of the optical assembly (18), the flow guide structure internal volume (34) and the outlet (38) being configured to direct the high-velocity purge gas (22) away from the optical surface (24) and toward the substrate surface (16); A laser ablation system (10).
12. The laser ablation system (10) of claim 11, wherein the flow directing structure interior volume (34) narrows toward the outlet (38).
13. The laser ablation system (10) of claim 11, wherein the outlet (38) is a circular, polygonal, rectangular, or oval slit.
14. 12. The laser ablation system (10) of claim 11, wherein the outlet (38) is sized to correspond to a perimeter of a laser beam (14) emitted by the laser assembly (12) through the optical assembly (18).
15. 12. The laser ablation system (10) of claim 11, wherein the purge gas jet (20) comprises one or more gas delivery ducts (46), and the body (32) defines one or more channels (44) through which the one or more gas delivery ducts (46) extend.
16. 16. The laser ablation system (10) of claim 15, wherein the one or more gas delivery ducts (46) include at least two gas delivery ducts (46) and the one or more channels (44) include at least two channels (44).
17. 12. The laser ablation system of claim 11, further comprising a mounting structure that operatively couples the purge gas jet and the flow directing structure to the laser assembly with respect to the optical assembly.
18. 18. The laser ablation system (10) of claim 17, wherein the mounting structure (48) comprises a mounting structure interior volume (50) that narrows toward the optical surface (24).
19. 12. The laser ablation system (10) of claim 11, further comprising a robotic manipulator (52) operatively coupled to the laser assembly (12) and operatively positioning the laser assembly (12) to ablate the substrate surface (16).
20. A method (100) for ablating a substrate surface (16), said method (100) comprising: emitting (102) a laser beam (14) through an optical surface (24) of an optical assembly (18) of a laser assembly (12); directing a high velocity purge gas (22) at the optical surface (24); confining (106) the purge gas (22) within a body (32) of a flow directing structure (30) to create a positive pressure within the body (32); Discharging (108) the column of purge gas (22) from the body (32) toward the substrate surface (16); removing (110) the plasma plume (54) from the path of the laser beam (14); Dissipating (112) the fumes (56) and emissions (58); A method (100) comprising: