Screen printing apparatus and support table

Abstract

To provide a screen printing apparatus and a support table capable of performing printing while appropriately applying vibration even on substrates of different types.SOLUTION: A screen printing apparatus comprises: a substrate holding part 30 that holds a substrate; and a substrate positioning mechanism 7 that moves the substrate holding part 30 to align the substrate with a lower surface of a mask. The substrate holding part 30 includes: a substrate support part 37 that supports the substrate from below; and a support table 36 that is positioned between the substrate support part 37 and the substrate positioning mechanism 7 and is provided in contact with the substrate support part 37. The support table 36 includes: a vibrator 31 that generates vibration to be transmitted to the substrate; and a vibration-proof part 41 that suppresses propagation of the vibration generated by the vibrator 31 to the substrate positioning mechanism 7.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present disclosure relates to a screen printing apparatus that prints a paste on a substrate and a support table used in the screen printing apparatus. [Background technology]

[0002] A screen printing apparatus brings a substrate with electrodes formed on its upper surface into contact with the underside of a mask with multiple openings, and then moves a squeegee over the mask to force a paste such as cream solder into the openings and transfer the paste to the substrate. However, when cream solder, a mixture of solder particles and flux, is transferred to a substrate and the substrate is heated to form a solder joint, voids can occur in areas where there are large gaps between the solder particles (see, for example, Patent Document 1). Patent Document 1 discloses a screen printing apparatus that includes a vibrator in the substrate holder that holds the substrate, and that vibrates the substrate when printing the cream solder, thereby reducing the viscosity of the flux and compacting the solder particles, thereby preventing the formation of voids. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2023-63624 Summary of the Invention [Problem to be solved by the invention]

[0004] However, the prior art including Patent Document 1 has the following problem due to the configuration in which a vibrator is provided on a substrate holding part prepared for each type of substrate: That is, it is necessary to provide a vibrator on each substrate holding part and vibration-proof rubber to reduce the transmission of vibrations generated by the vibrator to the main body of the screen printing device, which increases the cost of the substrate holding part.

[0005] Therefore, an object of the present disclosure is to provide a screen printing apparatus and a support table that can print on different types of substrates while applying appropriate vibrations. [Means for solving the problem]

[0006] The screen printing apparatus of the present disclosure comprises a mask having openings for printing a paste, a substrate holding unit that holds a substrate, a substrate positioning mechanism that moves the substrate holding unit to align the substrate held by the substrate holding unit with the underside of the mask, and a print head that prints the paste on the mask onto the substrate through the opening, wherein the substrate holding unit has a substrate support unit that supports the substrate from below, and a support table that is located between the substrate support unit and the substrate positioning mechanism and is provided with at least a portion in contact with the substrate support unit, and the support table has a vibrator that generates vibrations that are transmitted to the substrate, and a vibration-damping unit that is provided on the surface of the support table facing the substrate positioning mechanism and that suppresses propagation of the vibrations generated by the vibrator to the substrate positioning mechanism.

[0007] The support table of the present disclosure is a support table used in a screen printing apparatus comprising: a mask having openings formed therein for printing paste; a substrate holding portion for holding a substrate; a substrate positioning mechanism that moves the substrate holding portion to align the substrate held by the substrate holding portion with the underside of the mask; and a print head that prints the paste on the mask onto the substrate through the opening, wherein the substrate holding portion has a substrate support portion that supports the substrate from below, and the support table that is located between the substrate support portion and the substrate positioning mechanism and is provided with at least a portion in contact with the substrate support portion, and comprises: a vibrator that generates vibrations that are transmitted to the substrate; and a vibration-damping portion that is provided on the surface of the support table facing the substrate positioning mechanism and that suppresses propagation of the vibrations generated by the vibrator to the substrate positioning mechanism. [Effects of the Invention]

[0008] According to the present disclosure, even different types of substrates can be printed while applying appropriate vibrations. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a plan view showing a structure of a main part of a screen printing apparatus according to an embodiment of the present disclosure. [Figure 2] FIG. 1 is a side view showing a structure of a main part of a screen printing apparatus according to an embodiment of the present disclosure. [Figure 3] 1A and 1B are a plan view and a side view showing a structure of a main part of a substrate holding unit provided in a screen printing apparatus according to an embodiment of the present disclosure; [Figure 4] 1A and 1B are a rear view and a front view showing a structure of a support table provided in a screen printing apparatus according to an embodiment of the present disclosure; [Figure 5] 1A and 1B are a plan view and a front cross-sectional view of a plate provided in a screen printing apparatus according to an embodiment of the present disclosure, respectively; [Figure 6] FIG. 10 is an explanatory diagram of a method for positioning a support table on a plate included in a screen printing apparatus according to an embodiment of the present disclosure. [Figure 7] FIG. 1 is a functional explanatory diagram of a print head provided in a screen printing apparatus according to an embodiment of the present disclosure; [Figure 8] FIG. 1 is a block diagram illustrating a configuration of a control system of a screen printing apparatus according to an embodiment of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, with reference to the drawings as appropriate, detailed descriptions of each embodiment that specifically disclose the configuration and operation of a printing device according to the present disclosure will be provided. However, unnecessary detailed descriptions may be omitted. For example, detailed descriptions of well-known matters or redundant descriptions of substantially identical configurations may be omitted. This is to avoid unnecessary redundancy in the following description and to facilitate understanding by those skilled in the art. Note that the accompanying drawings and the following description are provided to enable those skilled in the art to fully understand the present disclosure and are not intended to limit the subject matter recited in the claims.

[0011] An embodiment of the present disclosure will be described in detail below with reference to the drawings. The configurations, shapes, etc. described below are examples for explanation purposes and can be modified as appropriate depending on the specifications of the screen printing apparatus. In the following, corresponding elements in all drawings will be given the same reference numerals, and duplicated explanations will be omitted. In FIG. 1 and in some parts described below, two axes that are orthogonal to each other in a horizontal plane are shown: an X-axis in the substrate transport direction (left-right direction in FIG. 1) and a Y-axis that is orthogonal to the substrate transport direction (up-down direction in FIG. 1). In FIG. 1 and in some parts described below, a Z-axis (up-down direction in FIG. 2) is shown as a height direction that is orthogonal to the horizontal plane.

[0012] First, the structure of a screen printing apparatus 1 will be described with reference to FIGS. 1 and 2. FIG. 1 is a plan view showing the structure of a main part of a screen printing apparatus according to an embodiment of the present disclosure. FIG. 2 is a side view showing the structure of a main part of a screen printing apparatus according to an embodiment of the present disclosure. The screen printing apparatus 1 has a function of printing a paste such as cream solder containing solder particles onto electrodes of a substrate B such as a printed circuit board through openings formed in a mask. The screen printing apparatus 1 is provided with a pair of transport conveyors 3 extending along the X-axis on a base 2. A control device C is provided on the base 2. The transport conveyors 3 are controlled by the control device C to transport the substrate B received from upstream of the screen printing apparatus 1 along the X-axis and carry it out downstream of the screen printing apparatus 1.

[0013] In Figure 2, an XY table 4, a θ table 5, and a substrate lifting mechanism 6 are provided in this order from bottom to top on a base 2 below the transport conveyor 3. The XY table 4 moves the θ table 5 in a horizontal plane (X-axis direction, Y-axis direction). The θ table 5 rotates the substrate lifting mechanism 6 by θ around the Z axis. The substrate lifting mechanism 6 supports the substrate holder 30 from below and raises and lowers it. The XY table 4, the θ table 5, and the substrate lifting mechanism 6 constitute a substrate positioning mechanism 7 that moves the substrate holder 30 to align the substrate B held by the substrate holder 30 with the underside of a mask. The substrate positioning mechanism 7 is controlled by a control device C.

[0014] 1 and 2, the substrate holding unit 30 is provided near the center of the transport conveyor 3 in the X-axis direction. The substrate holding unit 30 is controlled by a control device C. The substrate holding unit 30 receives the substrate B transported by the transport conveyor 3 and holds it at a predetermined clamp position. The substrate holding unit 30 is equipped with a vibrator 31 that applies vibration to the substrate B held by the substrate holding unit 30. The vibrator 31 is driven by a vibration power supply unit 32 (see FIG. 8) controlled by the control device C. The control device C controls the vibration power supply unit 32 to cause the vibrator 31 to start and stop vibration, and to change the frequency and strength (amplitude) of the vibration generated by the vibrator 31.

[0015] The structure of the substrate holding unit 30 will now be described with reference to Figure 3. Figure 3(a) is a plan view of the main parts of the substrate holding unit 30 as seen from above, with the substrate B omitted for convenience. Figure 3(b) is a side view of the main parts of the substrate holding unit 30 as seen from the side. The substrate holding unit 30 has a flat base unit 33 extending in the XY plane that is raised and lowered by a substrate lifting mechanism 6 of the substrate positioning mechanism 7, which will be described later. A plate lifting mechanism 34 is disposed above and near the center of the base unit 33, and supports and raises and lowers a flat plate 35 from below. The plate lifting mechanism 34 is controlled by a control device C.

[0016] A flat support table 36 is placed on the upper surface of the plate 35. A substrate support portion 37 is detachably arranged on the upper surface of the support table 36. In the substrate holding unit 30, the substrate support portion 37 arranged on the support table 36 supports the substrate B transported by the transport conveyor 3 from below. The substrate support portions 37 are prepared in advance with different sizes and different shapes (concave and convex) of the surface that supports the substrate B depending on the type of substrate B to be supported. The support table 36 is then provided with the substrate support portions 37 that correspond to the type of substrate B to be supported. Two transducer mounting portions 38 are provided on the support table 36 at positions that will not interfere even when the largest size of substrate support portion 37 is arranged. The transducer 31 is arranged on the transducer mounting portion 38 at a position that will not interfere with the substrate support portion 37 arranged on the support table 36.

[0017] In this example, a transducer mounting section 38 is provided on each edge of the support table 36 in the X-axis direction, and one transducer 31 is disposed on the outer side of each transducer mounting section 38. Vibrations generated by the transducers 31 are transmitted to the substrate support section 37 via the support table 36. The number and arrangement of the transducers 31 are not limited to the example shown in FIG. 3. For example, the support table 36 may have one transducer 31, or two transducers 31 may be disposed on one transducer mounting section 38. Furthermore, transducers 31 may be disposed on each of orthogonal edges of the support table 36.

[0018] In this way, the vibrator 31 is provided at a position on the support table 36 where it does not interfere with the substrate support portion 37. The support table 36 also has a plurality of vibrators 31. The plurality of vibrators 31 are provided at positions on the support table 36 facing at least two surfaces of the substrate support portion 37 (two opposing edges, two perpendicular edges, etc.).

[0019] 3, clamper support parts 39 extending upward are disposed on the upper part of the base part 33 on both sides in the Y-axis direction of the plate lifting mechanism 34. Clampers 40 extending along the X-axis are disposed on the upper parts of the clamper support parts 39. The clampers 40 are controlled by a control device C.

[0020] Next, with reference to FIG. 3(b), a process will be described in which the substrate holder 30 holds the substrate B, which has been transported by the transport conveyor 3, in the clamping position. While the substrate support members 37 are waiting in a position where the upper surfaces of the substrate support members 37 are lower than the upper surface of the transport conveyor 3, the control device C controls the transport conveyor 3 to transport the substrate B and stop it above the substrate support members 37. Next, the control device C controls the plate lifting mechanism 34 to lift the plate 35 (arrow b1), causing the back surface of the substrate B to be supported on the upper surfaces of the substrate support members 37, and raising the substrate B to the clamping position. Next, the control device C controls the two clampers 40 to move each toward the substrate B (arrow b2), thereby clamping and holding the sides of the substrate B between the clampers 40 (the state of FIG. 3(b)).

[0021] When the control device C controls the vibration power supply unit 32 to start vibration of the vibrator 31, vibration is applied from the vibrator 31 to the substrate B via the support table 36 and the substrate support unit 37. As described above, the substrate holding unit 30 has the substrate support unit 37 that supports the substrate B from below, and the support table 36 that is located between the substrate support unit 37 and the substrate positioning mechanism 7 and is provided with at least a portion in contact with the substrate support unit 37. The support table 36 has the vibrator 31 that generates vibration that is transmitted to the substrate B.

[0022] 1 and 2, a mask 8 having a plurality of openings 8a for printing paste onto a substrate B and a pair of mask-side marks 8m formed therein is installed above the substrate holding part 30. The mask 8 has a rectangular flat plate shape that extends across the XY plane, and its outer periphery is supported by a frame member 8w.

[0023] 2, a camera unit 9 incorporating a camera for substrate recognition and a camera for mask recognition is disposed below the mask 8. The camera unit 9 moves along the Y axis in a horizontal plane (arrow a) by a camera moving mechanism 10 (see FIG. 8) controlled by the control device C.

[0024] 2, an alignment step for aligning the position of the substrate B held by the substrate holding unit 30 with the mask 8 will be described. First, the camera unit 9 moves between the substrate B and the mask 8 and captures an image of a substrate-side mark (not shown) for alignment formed on the substrate B and a mask-side mark 8m for alignment formed on the mask 8. The control device C recognizes the positions of the mask-side mark 8m and the substrate-side mark based on the image captured by the camera unit 9.

[0025] Next, based on the recognition result, the control device C controls the substrate positioning mechanism 7 (XY table 4, θ table 5, substrate lifting mechanism 6) to align the position and orientation so that the multiple openings 8a formed in the mask 8 coincide with the electrodes formed on the substrate B held by the substrate holding part 30. Next, the control device C raises the substrate holding part 30 to bring the substrate B into contact with the underside of the mask 8 from below.

[0026] 1 and 2, a print head 20 is provided above the mask 8, which is moved along the Y-axis by a print head moving mechanism 11 (see FIG. 8). The print head 20 is provided with a moving base 21 that is moved within a horizontal plane by the print head moving mechanism 11. Two squeegee holding units 22 are arranged side by side along the Y-axis on the moving base 21. Each squeegee holding unit 22 holds a squeegee 23 at its lower end, which extends along the X-axis, and is raised and lowered by an elevating mechanism 24 provided on the moving base 21. The print head moving mechanism 11 and print head 20 are controlled by a control device C.

[0027] Next, the configuration of the support table 36 and the plate 35 on which the support table 36 is placed will be described with reference to FIGS. 4 and 5. FIG. 4 illustrates the structure of a support table included in a screen printing apparatus according to an embodiment of the present disclosure, with (a) a rear view and (b) a front view. FIG. 5 illustrates the structure of a positioning unit included in a plate included in a screen printing apparatus according to an embodiment of the present disclosure, with (a) a plan view, (b) a front cross-sectional view along AA, and (c) a front cross-sectional view along BB. In FIG. 4, a plurality of (16 in this example) vibration-isolating units 41 formed of cylindrical vibration-isolating rubber or the like are disposed on the back surface 36a of the support table 36. The vibration-isolating units 41 are fixed to the support table 36 by vibration-isolating unit screws 42 (FIG. 5(c)). The difference in height between the vibration-isolating units 41 is adjusted by inserting a shim ring 43 between the back surface 36a of the support table 36 and the vibration-isolating units 41.

[0028] The vibration-isolating section 41 prevents the vibrations applied to the substrate B by the vibrator 31 from being transmitted to the substrate positioning mechanism 7 via the plate 35, the plate lifting mechanism 34, and the base section 33. In this way, the support table 36 has a plurality of vibration-isolating sections 41 that are provided on the surface (rear surface 36a) of the support table 36 that faces the substrate positioning mechanism 7 and that suppress the transmission of vibrations generated by the vibrator 31 to the substrate positioning mechanism 7.

[0029] 4 and 5, a plurality of (here, two) flat positioning portions 44 are arranged on the plate 35. One vibration-isolating portion positioning hole 44a is formed in the positioning portion 44, penetrating vertically. The vibration-isolating portion positioning hole 44a is a circular hole with a diameter φ2 larger than the diameter φ1 of the vibration-isolating portion 41. In addition, two fastening holes 44b are formed in the positioning portion 44, for fastening the positioning portion 44 to the plate 35 with positioning portion screws 45.

[0030] The fastening hole 44b is partially through in the vertical direction, and the through portion is larger in diameter than the male thread portion of the positioning screw 45, so that the position of the positioning part 44 relative to the plate 35 can be adjusted in the horizontal plane (X-axis direction, Y-axis direction). The support table 36 is formed with a through hole 36b that allows a hex wrench or the like to access the head of the positioning screw 45 that fastens the positioning part 44 to the plate 35 from the top surface of the support table 36.

[0031] Next, a method for positioning the support table 36 on the plate 35 will be described with reference to Fig. 6. Fig. 6 is an explanatory diagram of a method for positioning the support table on a plate included in a screen printing apparatus according to an embodiment of the present disclosure. Two plate-side positioning holes 35a are formed in the plate 35, into which the positioning shafts 46 can be inserted. Furthermore, two support-table-side positioning holes 36c are formed in the support table 36 at positions corresponding to the plate-side positioning holes 35a when the support table 36 is positioned relative to the plate 35 and placed thereon, into which the positioning shafts 46 can be inserted.

[0032] 6, when positioning the support table 36 on the plate 35, first, the positioning screws 45 that fastened the positioning parts 44 to the plate 35 are loosened to make the positioning parts 44 movable in the horizontal direction. Next, the positioning shafts 46 are inserted into the two plate-side positioning holes 35a, respectively, so that the two positioning shafts 46 are installed vertically on the plate 35. Next, the two positioning shafts 46 are inserted into the support-table-side positioning holes 36c, and the support table 36 is placed on the plate 35.

[0033] In this state, the support table 36 is held in the correct position on the plate 35. Furthermore, vibration-isolating units 41 fixed to the back surface 36a of the support table 36 are inserted into the vibration-isolating unit positioning holes 44a of the two positioning units 44, respectively. Next, the two positioning units 44 are each moved outward in the X-axis direction (arrows c1 and c2 in FIG. 5(a)) so that the vibration-isolating units 41 abut against the side walls of the vibration-isolating unit positioning holes 44a. Next, a hex wrench or the like is inserted from above the support table 36 through the through-hole 36b, and the positioning unit screws 45 are tightened (turned) to fasten (fix) the positioning units 44 to the plate 35. Thereafter, the positioning shaft 46 is removed from the support table-side positioning hole 36c and the plate-side positioning hole 35a.

[0034] When changing the setup of the screen printing apparatus, a substrate support part 37 corresponding to the type of substrate B to be printed is fixed to the support table 36 removed from the plate 35 with screws or the like (not shown). Next, the support table 36 is placed on the plate 35 so that the vibration-isolating part 41 is inserted into the vibration-isolating part positioning hole 44a of the positioning part 44 fixed to the plate 35, thereby holding the support table 36 in the correct position on the plate 35. In this way, the plate 35 has the positioning part 44 that positions the support table 36 with respect to the substrate positioning mechanism 7. The positioning part 44 is configured so that the support table 36 is positioned by the vibration-isolating part 41 abutting against a part of the positioning part 44 (the side wall of the vibration-isolating part positioning hole 44a).

[0035] Next, the printing operation by the print head 20 will be described with reference to FIG. 7. FIG. 7 is a functional explanatory diagram of a print head provided in a screen printing apparatus according to an embodiment of the present disclosure. The printing operation is performed with the substrate B held by the substrate holding unit 30 aligned with the mask 8. The control device C controls the lifting mechanism 24 to lower one of the squeegees 23 (arrow d1) so that it abuts against the front side of the area where the multiple openings 8a are formed. Next, the control device C applies vibration from the vibrator 31 to the substrate B held by the substrate holding unit 30. Next, while the vibration is being applied, the control device C controls the print head moving mechanism 11 to move the squeegee 23 rearward along the Y axis (arrow d2). As the squeegee 23 moves over the multiple openings 8a, the paste Pst supplied to the upper surface of the mask 8 is pressed into the multiple openings 8a with a predetermined printing pressure (pressure).

[0036] When the squeegee 23 moves to the outside (rear side) of the area where the multiple openings 8a are formed, the control device C stops vibration and raises one of the squeegees 23. When printing the paste Pst on the next substrate B, the control device C lowers the other squeegee 23, similar to the first squeegee 23, to abut against the mask 8, and then moves it forward along the Y axis while applying vibration to it, thereby forcing the paste Pst into the multiple openings 8a. In this way, the print head 20 uses the squeegee 23 to print the paste Pst from the mask 8 onto the substrate B through the multiple openings 8a. After printing, the control device C controls the lifting mechanism 24 to separate the substrate B held by the substrate holder 30 from the mask 8. At this time, the substrate B may be separated from the mask 8 while applying vibration.

[0037] Next, the configuration of the control system of the screen printing apparatus 1 will be described with reference to Fig. 8. Fig. 8 is a block diagram showing the configuration of the control system of the screen printing apparatus according to one embodiment of the present disclosure. A control device C provided in the screen printing apparatus 1 is connected to the transport conveyor 3, the substrate positioning mechanism 7, the camera unit 9, the camera movement mechanism 10, the print head movement mechanism 11, the touch panel 12, the print head 20, the vibration power supply unit 32, as well as the vibrator 31, the plate lifting mechanism 34, and the clamper 40 provided in the substrate holding unit 30. The touch panel 12 has a display function for displaying the operation screen of the screen printing apparatus 1 on the liquid crystal panel, and an input function for inputting commands and various information by operating the displayed operation screen.

[0038] The control device C includes a memory unit 13 and a printing operation processing unit 14. The memory unit 13 is a storage device that stores, for each type of substrate B, printing conditions under which the print head 20 prints the solder paste Pst on the substrate B, and vibration conditions including the frequency and strength (amplitude) under which the vibration power supply unit 32 drives the vibrator 31. The printing operation processing unit 14 controls each unit of the screen printing device 1, including the print head 20 and the vibration power supply unit 32, based on the printing conditions and vibration conditions stored in the memory unit 13, to perform the printing operation.

[0039] As described above, the screen printing apparatus 1 of this embodiment includes a mask 8 having openings 8a for printing the paste Pst, a substrate holding unit 30 that holds a substrate B, a substrate positioning mechanism 7 that moves the substrate holding unit 30 to align the substrate B held by the substrate holding unit 30 with the underside of the mask 8, and a print head 20 that prints the paste Pst on the mask 8 through the openings 8a onto the substrate B. The substrate holding unit 30 includes a substrate support unit 37 that supports the substrate B from below, and a support table 36 that is located between the substrate support unit 37 and the substrate positioning mechanism 7 and is provided so that at least a portion of the table is in contact with the substrate support unit 37.

[0040] The support table 36 has an oscillator 31 that generates vibrations that are transmitted to the substrate B, and an anti-vibration section 41 that is provided on the surface (rear surface 36a) of the support table 36 that faces the substrate positioning mechanism 7 and that suppresses propagation of vibrations generated by the oscillator 31 to the substrate positioning mechanism 7. This allows the substrate support section 37 to be easily replaced, and even different types of substrates B can be printed while applying appropriate vibrations. Furthermore, because the oscillator 31 is not provided on the substrate support section 37 provided for each substrate B, even when printing the paste Pst on many types of substrates B, it is possible to provide substrate holding sections 30 that are compatible with many types of substrates B at low cost.

[0041] Although various embodiments have been described above with reference to the accompanying drawings, the present disclosure is not limited to such examples. It is clear that those skilled in the art can conceive of various modifications, alterations, substitutions, additions, deletions, and equivalents within the scope of the claims, and it is understood that these also fall within the technical scope of the present disclosure. Furthermore, the components of the various embodiments described above may be combined in any manner without departing from the spirit of the invention. [Industrial Applicability]

[0042] The screen printing apparatus and support table of the present disclosure have the advantage of being able to print on different types of substrates while applying appropriate vibrations, and are useful in the field of mounting components on substrates. [Explanation of symbols]

[0043] 1 Screen printing equipment 8. Mask 8a aperture 7. Board positioning mechanism 20 print heads 30 Board holding part 34 Plate lifting mechanism 35 plates 36 Support Table 37 Substrate support 31 Oscillator 41 Anti-vibration section 44 Positioning part B board PST Paste

Claims

1. a mask having openings for printing the paste; a substrate holder for holding a substrate; a substrate positioning mechanism that moves the substrate holding unit to align the substrate held by the substrate holding unit with the lower surface of the mask; a print head that prints the paste on the mask onto the substrate through the opening, The substrate holder includes: a substrate support portion that supports the substrate from below; a support table located between the substrate support portion and the substrate positioning mechanism, the support table being provided so that at least a portion of the support portion is in contact with the substrate support portion; The support table is an oscillator that generates vibrations that are transmitted to the substrate; a vibration-isolating section provided on a surface of the support table facing the substrate positioning mechanism, the vibration-isolating section suppressing propagation of the vibration generated by the vibrator to the substrate positioning mechanism.

2. The substrate holder includes: a plate on which the support table is placed; Further provided is a plate lifting mechanism that supports the plate from below and lifts and lowers the plate, The screen printing apparatus according to claim 1 , wherein the plate has a positioning portion that positions the support table relative to the substrate positioning mechanism.

3. The screen printing apparatus according to claim 2 , wherein the positioning portion is configured so that the support table is positioned by the vibration-isolating portion abutting against a part of the positioning portion.

4. The screen printing apparatus according to claim 1 , wherein the vibrator is provided at a position on the support table where it does not interfere with the substrate support portion.

5. The screen printing apparatus according to claim 4 , wherein the support table has a plurality of vibrators.

6. The screen printing apparatus according to claim 5 , wherein the plurality of vibrators are provided on the support table at positions facing at least two surfaces of the substrate support portion.

7. a support table for use in a screen printing apparatus, the support table including: a mask having openings for printing a paste; a substrate holding unit for holding a substrate; a substrate positioning mechanism for moving the substrate holding unit to align the substrate held by the substrate holding unit with a lower surface of the mask; and a print head for printing the paste on the mask onto the substrate through the openings, the substrate holding unit includes a substrate support unit that supports the substrate from below, and the support table that is located between the substrate support unit and the substrate positioning mechanism and is provided with at least a portion in contact with the substrate support unit; an oscillator that generates vibrations that are transmitted to the substrate; a vibration-isolating section provided on a surface of the support table facing the substrate positioning mechanism, the vibration-isolating section suppressing propagation of the vibration generated by the vibrator to the substrate positioning mechanism.

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