Sensor apparatus and cutting tool

Abstract

To provide a sensor apparatus and a cutting tool capable of increasing the degree of freedom in the material of a measurement object and efficiently performing dimensional measurement or position measurement.SOLUTION: The sensor apparatus includes: a distance sensor using an eddy current sensor; a contact element at least partially made of a conductive material, the contact element being disposed apart from the distance sensor in a sensor axis direction and provided to be movable along the sensor axis direction so as to be capable of contacting a measurement surface of a measurement object; and an elastic member configured to urge the contact element in a direction away from the distance sensor along the sensor axis direction.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a sensor device and a cutting tool. [Background technology]

[0002] In recent years, cutting tools with various functions have been developed. Patent Document 1 discloses a cutting tool equipped with a distance sensor. By incorporating a distance sensor in the cutting tool, the dimensions of the workpiece can be measured, shortening the time required for measurement and enabling efficient machining. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2022-151686 Summary of the Invention [Problem to be solved by the invention]

[0004] In the cutting tools described above, an eddy current sensor is used as a distance sensor. To perform dimensional or position measurement using an eddy current sensor, the material of the object to be measured must be a conductor. This means that there are limitations on the material of the object to be measured. Furthermore, if the magnetic properties of the object to be measured change depending on the material, etc. of the object, the output from the eddy current sensor changes. Therefore, prior to performing dimensional or position measurement using an eddy current sensor, calibration must be performed every time the material, etc. of the object to be measured changes.

[0005] In view of the above circumstances, one object of the present invention is to provide a sensor device and a cutting tool that can increase the degree of freedom in the material of the object to be measured and can efficiently measure dimensions or positions. [Means for solving the problem]

[0006] One aspect of the sensor device of the present invention is a sensor device used for measuring the dimensions or position of a measurement object, and comprises a distance sensor using an eddy current sensor, a contactor at least a portion of which is made of a conductor and is arranged at a distance from the distance sensor in the sensor axis direction of the distance sensor, and is movable in the sensor axis direction so as to be able to contact the measurement surface of the measurement object, and an elastic member that presses the contactor in a direction away from the distance sensor along the sensor axis direction.

[0007] According to one aspect of the sensor device of the present invention, when a contactor is pressed into contact with a measurement surface of an object, the contactor is displaced in the sensor axis direction according to the position of the measurement surface. The eddy current sensor, which is a distance sensor, detects the distance to the measurement surface according to the position of the contactor in the sensor axis direction. In this way, the distance sensor is used to measure the size or position of the object by detecting the position of the contactor, at least a portion of which is made of a conductor, in the sensor axis direction. Therefore, the size or position of the object can be measured regardless of the material, etc. of the object. Furthermore, even if the material, etc. of the object changes, calibration is not required each time. This increases the degree of freedom in the material of the object and enables efficient size or position measurement.

[0008] In the sensor device, the tip surface of the contactor facing away from the distance sensor in the sensor axis direction may be spherical.

[0009] In this case, since the tip surface of the contactor is spherical, it is possible to measure the size or position of the object even if the measurement surface of the object is concave, etc. Furthermore, it is possible to prevent the tip surface of the contactor from damaging the measurement surface.

[0010] In the sensor device, the contact may be spherical.

[0011] In this case, a contact with a spherical tip surface can be easily manufactured.

[0012] The above sensor device may include a contactor cover having an inner diameter smaller than the outer diameter of the contactor and having an opening that allows a portion of the contactor to protrude away from the distance sensor in the sensor axis direction, a contactor support member that is provided on the distance sensor side of the contactor cover in the sensor axis direction and supports the contactor from the distance sensor side in the sensor axis direction, and a sensor support member that supports the distance sensor, and the elastic member may be arranged between the contactor support member and the sensor support member.

[0013] In this case, the measurement surface is measured by bringing a portion of the contactor protruding from the opening in the contactor cover into contact with the measurement surface of the measurement object. When the contactor is displaced in the sensor axial direction following the measurement surface of the measurement object, the contactor support member is also displaced in the sensor axial direction along with the contactor. When the elastic member is compressed by the contactor support member, the restoring force generated in the elastic member presses the contactor support member and the contactor in a direction away from the distance sensor, i.e., toward the measurement object. This allows the measurement surface to be measured while the contactor is kept in contact with the measurement surface following the measurement surface.

[0014] In the sensor device, the elastic member may be an annular O-ring sandwiched between the contactor support member and the sensor support member and having an inner diameter smaller than an outer diameter of the contactor.

[0015] In this case, since the elastic member is an O-ring, the sensor device can be realized with a simple configuration.

[0016] In the above sensor device, the elastic member has a plurality of spring members positioned outside the contactor as viewed from the sensor axis direction and arranged in a circumferential direction around the sensor axis, and each of the spring members has a spiral shape as viewed from the sensor axis direction, extending from an inner peripheral end connected to the contactor to an outer peripheral end connected to a support portion arranged at a distance outside the contactor as viewed from the sensor axis direction, and the positions of the inner peripheral ends and outer peripheral ends of the plurality of spring members may be different in the circumferential direction.

[0017] In this case, by providing a plurality of spiral spring members as the elastic members, it is possible to press the contacts in a well-balanced manner in the direction of the sensor axis away from the distance sensor.

[0018] In the sensor device, a rear surface of the contactor facing the distance sensor in the sensor axis direction may be made of a conductor, and the rear surface may be flat and intersect with the sensor axis direction.

[0019] In this case, the displacement of the contact can be detected efficiently by using an eddy current sensor as a distance sensor.

[0020] In the sensor device, the surface of the contactor that comes into contact with the object to be measured may have a hardness higher than that of the object to be measured.

[0021] In this case, since the contactor has a higher hardness than the object to be measured, repeated contact with the object to be measured can prevent the contactor from wearing out.

[0022] One embodiment of the cutting tool of the present invention includes a tool body extending along a tool axis and having a seat at its tip, a cutting insert removably attached to the seat, and the sensor device as described above.

[0023] According to one aspect of the cutting tool of the present invention, it is possible to provide a cutting tool equipped with a sensor device that increases the degree of freedom in the material of the object to be measured and can efficiently measure dimensions or positions. [Effects of the Invention]

[0024] According to the sensor device and cutting tool of one aspect of the present invention, the degree of freedom in the material of the measurement object can be increased, and dimensional measurement or position measurement can be performed efficiently. [Brief explanation of the drawings]

[0025] [Figure 1] 1 is a perspective view of a turning tool according to an embodiment of the present invention; [Figure 2] FIG. 1 is a side view of a turning tool according to an embodiment of the present invention. [Figure 3] 1 is a cross-sectional view of a sensor device according to an embodiment of the present invention. [Figure 4] FIG. 10 is a cross-sectional view of a sensor device according to a modified example of an embodiment of the present invention. [Figure 5] FIG. 10 is a cross-sectional view of a sensor device according to another modified example of the embodiment of the present invention. [Figure 6] 6 is a cross-sectional view taken along the line VI-VI in FIG. 5, showing a sensor device according to another modified example of the embodiment of the present invention. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0026] A sensor device according to an embodiment of the present invention and a turning tool (cutting tool) 1, which is an example of a cutting tool, will be described below with reference to the drawings. In the drawings, the scale and number of each structure may differ from the actual structure in order to make each component easier to understand.

[0027] <Turning tools> Fig. 1 is a diagram showing a turning tool 1 according to one embodiment of the present invention, and Fig. 2 is a side view of the turning tool 1 according to one embodiment of the present invention. The turning tool 1 of this embodiment performs turning, such as boring, on a workpiece such as a metal material that is rotated around a spindle of a machine tool (not shown). As shown in Figures 1 and 2, the turning tool 1 includes a tool body 2, a cutting insert 4, and a sensor device 3.

[0028] The tool body 2 is made of metal and extends in an axial direction Dj along the tool axis J. In each drawing, the axial direction Dj, one side Dj1 of the axial direction Dj, and the other side Dj2 are shown as necessary. The tool body 2 has a cylindrical shank portion 21 centered on the tool axis J, and a head portion 22 provided on one side Dj1 of the tool body 2 in the axial direction Dj with respect to the shank portion 21.

[0029] The head portion 22 has a protrusion 23 that protrudes from the outer peripheral surface of the shank portion 21 outward in a radial direction Dr of the tool body 2 that intersects with the axial direction Dj. A base 23d is provided on the protrusion 23. A cartridge 41 is attached to the base 23d. The cartridge 41 holds a cutting insert 4. The base 23d and the cutting insert 4 attached to the cartridge 41 are arranged on a first side Dr1 in the radial direction Dr with respect to the tool axis J in the tool body 2. That is, the cutting insert 4 is detachably attached to the base 23d. The cutting insert 4 may also be directly attached to the base 23d.

[0030] The cutting insert 4 has a diamond shape when viewed in the thickness direction. The cutting insert 4 has a pair of diamond-shaped main surfaces in a plan view facing the thickness direction and side surfaces connecting the pair of main surfaces. A cutting edge 42 is provided on the ridge between the main surfaces and the side surfaces of the cutting insert 4. The cutting edge 42 is provided at the tip portion of one side Dj1 in the axial direction Dj of the tool body 2. A portion of the cutting edge 42 protrudes from the tool body 2 to the one side Dj1 in the axial direction Dj. In addition, the cutting edge 42 protrudes outward in the radial direction Dr of the tool body 2. Therefore, a portion of the cutting edge 42 is located at the forefront of the one side Dj1 in the axial direction Dj of the tool body 2 and at the outermost end in the radial direction Dr.

[0031] According to this embodiment, the cutting insert 4 is fixed to the tool body 2 via the cartridge 41. Therefore, by replacing the cartridge 41, cutting inserts 4 of various shapes can be fixed to the tool body 2, thereby increasing the versatility of the tool body 2.

[0032] The sensor device 3 is provided in the head portion 22. In this embodiment, the sensor device 3 is disposed on the second side Dr2 in the radial direction Dr with respect to the tool axis J in the tool body 2. That is, the sensor device 3 is disposed on the opposite side of the tool axis J from the base 23d and the cutting insert 4 attached to the base 23d in the radial direction Dr of the tool body 2.

[0033] FIG. 3 is a cross-sectional view of a sensor device 3 according to one embodiment of the present invention. As shown in FIG. 3, the sensor device 3 includes a sensor housing 30, a distance sensor 31, a contact 35, a contact support member 36, and an elastic member 38.

[0034] The sensor housing 30 supports the distance sensor 31, the contacts 35, the contact support member 36, and the elastic member 38. As shown in FIGS.

[0035] 1 and 3, the sensor support member 32 is attached to a mounting surface 22f facing the second side Dr2 (outside) in the radial direction Dr of the head portion 22. As shown in Fig. 3, the sensor support member 32 is provided with a sensor holding hole 32h extending in the radial direction Dr.

[0036] The contact cover 33 is disposed on the outer side in the radial direction Dr of the sensor support member 32. As shown in Fig. 1, the contact cover 33 is attached to the sensor support member 32 with a plurality of attachment screws 331.

[0037] 3, the contact cover 33 is provided with an accommodating recess 33d that accommodates contacts 35, a contact support member 36, and an elastic member 38, which will be described later. The accommodating recess 33d is provided so as to be recessed outward in the radial direction Dr from a surface 33f of the contact cover 33 that faces inward in the radial direction Dr.

[0038] The accommodating recess 33d of the contact cover 33 is provided with an opening 33h that allows a portion of the contact 35 (described later) to protrude toward a second side Dr2 in the radial direction Dr. The opening 33h penetrates the contact cover 33 in the radial direction Dr. The opening 33h is tapered so that its inner diameter gradually decreases from the inside toward the outside in the radial direction Dr.

[0039] The distance sensor 31 is held in the sensor holding hole 32h of the sensor support member 32. In this embodiment, the distance sensor 31 measures the distance to the machined surface machined using the cutting insert 4 by detecting the position of the contact 35 in the radial direction Dr. The distance sensor 31 is arranged facing outward in the radial direction Dr from the outer peripheral surface of the tool body 2. The distance sensor 31 measures the distance to a measurement object that is arranged outside the tool body 2 in the radial direction Dr. In other words, the sensor axis direction Ds of the distance sensor 31 is along the radial direction Dr. The distance sensor 31 measures the distance to the machined surface (measurement surface) machined using the cutting insert 4 and facing inward in the radial direction Dr.

[0040] The distance sensor 31 is an eddy current sensor. Eddy current sensors tend to maintain stable measurement accuracy against disturbances such as those in the surrounding environment. Therefore, eddy current sensors are more suitable for distance measurement in a disturbance-prone environment after cutting processing than optical distance sensors, regardless of whether wet processing or dry processing is selected. Distance sensor 31 generates a high-frequency magnetic field by passing a high-frequency current through it. This causes an eddy current to flow on the surface of contactor 35, which is a conductor, and the impedance of the coil inside distance sensor 31 changes. Distance sensor 31 detects the distance to contactor 35 from this change in impedance. Distance sensor 31 outputs a voltage (unit: V) that indicates the change in impedance as an output value.

[0041] The contactor 35 of this embodiment is made of a conductor such as metal. The contactor 35 is made of, for example, a steel material, a cemented carbide alloy, or an aluminum alloy. The contactor 35 may be made of multiple members, in which case, it is sufficient that at least a portion of the members is a conductor. The surface of the contactor 35 that comes into contact with the object to be measured preferably has a higher hardness than the object to be measured. At least the tip surface of the contactor 35 that faces away from the distance sensor 31 (outside the radial direction Dr) in the radial direction Dr (sensor axis direction Ds) is spherical. The contactor 35 of this embodiment is spherical.

[0042] The contactor 35 is arranged on the sensor axis of the distance sensor 31. The contactor 35 is arranged at a distance from the distance sensor 31 outward in the radial direction Dr. The contactor 35 is provided in the accommodating recess 33d so as to be movable in the radial direction Dr (sensor axis direction Ds). An opening 33h provided in the accommodating recess 33d has an inner diameter smaller than the outer diameter of the contactor 35. As a result, a part of the contactor 35 protrudes from the contactor cover 33 through the opening 33h to the outside in the radial direction Dr (the side away from the distance sensor 31 in the sensor axis direction Ds). As a result, the contactor 35 can come into contact with the measurement surface of the object to be measured.

[0043] The contactor support member 36 is provided on the inner side in the radial direction Dr (the distance sensor 31 side in the sensor axis direction Ds) of the contactor cover 33. The contactor support member 36 supports the contactor 35 from the inner side in the radial direction Dr. The contactor support member 36 of this embodiment is disk-shaped when viewed in the radial direction Dr, and has a through-hole 36h at its center that penetrates in the radial direction Dr. The through-hole 36h has an arc-shaped surface whose inner diameter gradually increases from the inside to the outside in the radial direction Dr so as to fit along the surface of the contactor 35.

[0044] The elastic member 38 presses the contactor 35 outward in the radial direction Dr (toward the side away from the distance sensor 31 along the sensor axis direction Ds). The elastic member 38 is disposed between the contactor support member 36 and the sensor support member 32. The elastic member 38 is an annular O-ring made of a rubber-based material and has an inner diameter smaller than the outer diameter of the contactor 35.

[0045] The sensor device 3 is used to measure the machined surface after the turning tool 1 has formed it. When the contactor 35 is pressed into contact with the measurement surface of the object, the contactor 35 is displaced in the sensor axis direction Ds according to the position of the measurement surface. The distance sensor 31, an eddy current sensor, detects the distance to the measurement surface according to the position of the contactor 35 in the sensor axis direction Ds. In this way, the distance sensor 31 measures the distance to the machined surface facing inward in the radial direction Dr machined by the cutting insert 4 by detecting the position of the contactor 35 made of a conductor in the sensor axis direction Ds. The sensor device 3 can measure the outer diameter, inner diameter, roundness, etc. of the surface machined by the cutting insert 4. Here, since the sensor device 3 is provided on the tool body 2, it is possible to measure the machined surface after cutting without temporarily separating the turning tool 1 from the workpiece, thereby shortening the time required to measure the machined surface in turning.

[0046] [Effects of this embodiment] According to the sensor device 3 and turning tool 1 of the present embodiment described above, when the contactor 35 is pressed into contact with the measurement surface of the object, the contactor 35 is displaced in the sensor axis direction Ds according to the position of the measurement surface. The eddy current sensor, which is the distance sensor 31, detects the distance to the measurement surface according to the position of the contactor 35 in the sensor axis direction Ds. In this way, the distance sensor 31 measures the dimension or position of the object by detecting the position of the contactor 35, which is made of a conductor, in the sensor axis direction Ds. Therefore, the dimension or position of the object can be measured regardless of the material, etc. of the object. Furthermore, even if the material, etc. of the object changes, there is no need to perform calibration each time. This increases the degree of freedom in the material of the object and enables efficient dimension or position measurement.

[0047] When using an eddy current sensor to measure the dimensions or position of an object, measurement errors can occur due to a phenomenon known as electrical runout. Electrical runout is thought to be caused by residual magnetism or uneven crystal structure in the steel material that makes up the object. Due to this electrical runout phenomenon, when measuring the diameter of an object after machining, the diameter measured by the eddy current sensor can differ depending on the circumferential position around the object's central axis. In contrast, in this embodiment, the distance sensor 31, which is an eddy current sensor, detects the distance to the measurement surface depending on the position of the contactor 35 in the sensor axis direction Ds, thereby reducing the influence of residual magnetism, uneven crystal structure, etc. of the object to be measured.

[0048] In this embodiment, the tip surface of the contactor 35 facing away from the distance sensor 31 in the sensor axis direction Ds is spherical. This makes it possible to measure the dimensions or position of the object even if the measurement surface of the object is concave, etc. Furthermore, it is possible to prevent the tip surface of the contactor 35 from damaging the measurement surface.

[0049] Furthermore, in this embodiment, the contactor 35 is spherical. This allows for the easy manufacture of contactors 35 with spherical tip surfaces. Furthermore, by making the contactor 35 spherical, the object can be rotated around its central axis while the contactor 35 is in contact with the measurement surface of the object, causing the contactor 35 to roll on the measurement surface of the object. In this case, the measurement surface of the object can be continuously measured without damaging it.

[0050] In this embodiment, the elastic member 38 is disposed between the contactor support member 36 and the sensor support member 32. This allows a portion of the contactor 35 protruding from the opening 33h of the contactor cover 33 to be brought into contact with the measurement surface of the object to be measured, thereby measuring the size or position. When the contactor 35 is displaced in the sensor axis direction Ds along the measurement surface of the object to be measured, the contactor support member 36 is displaced in the sensor axis direction Ds together with the contactor 35. When the elastic member 38 is compressed by the contactor support member 36, a restoring force generated in the elastic member 38 presses the contactor support member 36 and the contactor 35 in a direction away from the distance sensor 31, i.e., toward the object to be measured. This allows the contactor 35 to be kept in contact with the measurement surface along the measurement surface, thereby performing size or position measurement.

[0051] In this embodiment, the elastic member 38 is an annular O-ring that is sandwiched between the contact support member 36 and the sensor support member 32 and has an inner diameter smaller than the outer diameter of the contact 35. This allows the sensor device 3 to be realized with a simple configuration.

[0052] In this embodiment, the surface of the contactor 35 that comes into contact with the object to be measured has a higher hardness than the object to be measured, which prevents the contactor 35 from wearing down due to repeated contact with the object to be measured.

[0053] (Modification of the embodiment) In the above embodiment, the elastic member 38 is disposed between the contact support member 36 and the sensor support member 32. However, as shown in FIG. 4, an elastic member 39 may be provided between the contact support member 36 and the contact cover 33. In this case, an O-ring may be used as the elastic member 39. The elastic member 39 is disposed so as to surround the sensor shaft. By disposing the elastic member 39, it is possible to prevent moisture and the like from entering the interior of the sensor device 3.

[0054] (Other Modifications of the Embodiment) In the above embodiment, the contact 35 is spherical, but is not limited to this. In the above embodiment, an O-ring is used as the elastic member 38, but is not limited to this.

[0055] Fig. 5 is a cross-sectional view of a sensor device 3B according to another modified example of one embodiment of the present invention. Fig. 6 is a cross-sectional view taken along the line VI-VI in Fig. 5, showing a sensor device 3B according to another modified example of one embodiment of the present invention.

[0056] For example, as shown in Fig. 5, the contactor 35B of the sensor device 3B in this modified example has a hemispherical shape. The contactor 35B has a spherical tip surface 35r facing away from the distance sensor 31 (outside the radial direction Dr) in the radial direction Dr (sensor axis direction Ds). The contactor 35B has a rear surface 35b facing inward in the radial direction Dr (toward the distance sensor 31 in the sensor axis direction Ds) that is planar and intersects with the sensor axis direction Ds. The rear surface 35b of the contactor 35B is bonded with an adhesive or the like to a support plate 35P that is disc-shaped when viewed from the radial direction Dr. The support plate 35P is made of a conductive material and has a planar rear surface 35c facing inward in the radial direction Dr (toward the distance sensor 31 in the sensor axis direction Ds).

[0057] As shown in FIGS. 5 and 6, the sensor device 3B of this modification may include, as the elastic member 38B, a plurality of spring members 381A, 381B positioned outside the contactor 35B as viewed in the sensor axis direction Ds and arranged in the circumferential direction around the sensor axis. As shown in FIG. 6, each of the spring members 381A, 381B has a spiral shape extending from an inner peripheral end 381s connected to the contactor 35B toward an outer peripheral end 381t as viewed in the sensor axis direction Ds. The inner peripheral ends 381s of the spring members 381A, 381B are joined to the outer peripheral surface of the support plate 35P. The outer peripheral ends 381t of the spring members 381A, 381B are joined to the inner wall surface of the accommodating recess 33d (support portion) of the contactor cover 33, which is provided outside the contactor 35B and spaced apart as viewed in the sensor axis direction Ds.

[0058] In such a modified example, by providing multiple spiral spring members 381A, 381B as the elastic member 38B, the contactor 35B can be pressed in a balanced manner toward the side away from the distance sensor 31 along the sensor axis direction Ds.

[0059] In the sensor device 3, the rear surface 35b of the contactor 35B is flat and intersects the sensor axis direction Ds. The rear surface 35b of the contactor 35B is made of a conductor. The distance sensor 31 measures the distance to the contactor 35B by generating an eddy current in the rear surface 35b. According to this modification, by making the rear surface 35b flat, the eddy current generated in the rear surface 35b can be stabilized, and the displacement of the contactor 35B can be efficiently detected by the eddy current sensor serving as the distance sensor 31.

[0060] In this modification, the support plate 35P may be regarded as a part of the contactor. In this case, the support plate 35P may be a conductor on which an eddy current from the distance sensor 31, which is an eddy current sensor, acts, and the material of the contactor 35B that comes into contact with the object to be measured may be a material other than a conductor, such as ruby.

[0061] In addition, in the above embodiment, the sensor device 3 is attached to the turning tool 1, but this is not limiting. The sensor device 3 may be provided independently from the turning tool 1. In this case, the sensor device 3 may be provided, for example, on the machine tool side.

[0062] [Other configurations included in the present invention] The present invention is not limited to the above-described embodiments, and the configurations (elements) described in the above-described embodiments, modifications, and notes may be combined within the scope of the present invention, and additions, omissions, substitutions, and other modifications of the configurations are possible. The present invention is not limited to the above-described embodiments, and is limited only by the claims.

[0063] For example, in the above-described embodiment, a turning tool that rotates and cuts a workpiece is used as an example of a cutting tool included in the cutting tool system. However, the cutting tool is not limited to the turning tool of this embodiment as long as it presses a cutting insert against the workpiece to perform cutting. The cutting tool may be a rotating tool that rotates itself, such as a drill, an end mill, or a milling machine.

[0064] In the above-described embodiment, the contactor is made of a single material. However, the contactor may be made of multiple materials. As an example, the surface of the contactor that comes into contact with the object to be measured may be made of a hard mineral (e.g., ruby), and the surface facing the distance sensor may be made of a conductive metal material. [Explanation of symbols]

[0065] 1...Turning tools (cutting tools) 2…Tool body 3, 3B...Sensor device 4...Cutting insert 23d…Pedestal 31...Distance sensor 32...Sensor support member 33...Contact cover 33d...accommodating recess (support portion) 33h…Aperture 35, 35B…Contactor 35b…Rear side 35r…Tip surface 36...Contactor support member 38, 38B...Elastic member 381A, 381B...Spring members 381s…Inner edge 381t...outer edge Ds: Sensor axis direction

Claims

1. A sensor device used for measuring the size or position of a measurement object, a distance sensor using an eddy current sensor; a contactor at least a portion of which is made of a conductor, the contactor being spaced apart from the distance sensor in a sensor axis direction of the distance sensor, and being provided so as to be movable in the sensor axis direction, and being capable of coming into contact with a measurement surface of the measurement object; an elastic member that presses the contactor in a direction away from the distance sensor along the sensor axis direction, Sensor device.

2. a tip end surface of the contactor facing away from the distance sensor in the sensor axis direction is spherical; The sensor device according to claim 1 .

3. The contacts are spherical. The sensor device according to claim 2 .

4. a contact cover having an inner diameter smaller than an outer diameter of the contact and having an opening through which a part of the contact protrudes away from the distance sensor in the sensor axial direction; a contact support member provided on the distance sensor side of the contact cover in the sensor axis direction, and supporting the contact from the distance sensor side in the sensor axis direction; a sensor support member that supports the distance sensor, The elastic member is disposed between the contact support member and the sensor support member. The sensor device according to claim 3 .

5. The elastic member is an annular O-ring sandwiched between the contactor support member and the sensor support member and having an inner diameter smaller than an outer diameter of the contactor. The sensor device according to claim 4 .

6. the elastic member has a plurality of spring members positioned outside the contactor as viewed from the sensor axis direction and provided in a circumferential direction around the sensor axis, each of the spring members has a spiral shape as viewed from the sensor axis direction, extending from an inner peripheral end connected to the contactor toward an outer peripheral end connected to a support portion provided outside the contactor at a distance as viewed from the sensor axis direction; The positions of the inner circumferential ends and the outer circumferential ends of the plurality of spring members are made to differ in the circumferential direction. The sensor device according to claim 1 or 2.

7. a rear surface of the contactor facing the distance sensor in the sensor axis direction is made of a conductor; The rear surface is a plane that intersects with the sensor axis direction. The sensor device according to claim 1 or 2.

8. a surface of the contactor that comes into contact with the object to be measured has a higher hardness than the object to be measured; The sensor device according to claim 1 or 2.

9. a tool body extending along a tool axis and having a base at a tip end thereof; a cutting insert detachably attached to the base; The sensor device according to claim 1 or 2, cutting tools.

Images