Power module

Abstract

To provide a power module capable of appropriately detecting current in a current path.SOLUTION: According to one embodiment, there is provided a power module which includes a power device, a first conductive pattern, a shunt resistor element and a second conductive pattern. One end of the first conductive pattern is connected to the power device. The first conductive pattern extends from the power device in at least a first direction. One end of the shunt resistor element in the first direction is connected to the other end of the first conductive pattern. The second conductive pattern is connected to the other end of the shunt resistor element. The second conductive pattern includes a portion. The portion extends in the first direction along the shunt resistor element and the first conductive pattern from a position separated from the shunt resistor element in a second direction. The second direction intersects the first direction.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present embodiment relates to a power module. [Background technology]

[0002] In power modules equipped with power devices, shunt resistors are sometimes inserted into the power loop that includes the power devices. In power modules, it is desirable to use shunt resistors with small resistance values ​​to properly detect the current in the current path in order to minimize the impact on the circuit. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6245869 [Patent Document 2] Japanese Patent Application Laid-Open No. 2009-250731 [Patent Document 3] Patent No. 7216602 Summary of the Invention [Problem to be solved by the invention]

[0004] An object of one embodiment is to provide a power module that can appropriately detect a current in a current path. [Means for solving the problem]

[0005] According to one embodiment, a power module is provided having a power device, a first conductive pattern, a shunt resistor, and a second conductive pattern. One end of the first conductive pattern is connected to the power device. The first conductive pattern extends from the power device in at least a first direction. One end of the shunt resistor in the first direction is connected to the other end of the first conductive pattern. The second conductive pattern is connected to the other end of the shunt resistor. The second conductive pattern includes a portion. The portion extends in the first direction from a position spaced apart from the shunt resistor in the second direction to run along the shunt resistor and the first conductive pattern. The second direction intersects with the first direction. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 is a plan view showing the configuration of a power module according to a first embodiment. [Figure 2] 1 is a cross-sectional view showing the configuration of a power module according to a first embodiment. [Figure 3] FIG. 1 is a circuit diagram showing a configuration of a power module according to a first embodiment. [Figure 4] FIG. 2 is a perspective view showing a current path near a shunt resistance element in the first embodiment. [Figure 5] FIG. 2 is a plan view showing a current path near a shunt resistance element in the first embodiment. [Figure 6] FIG. 3 is a perspective view showing cancellation of magnetic flux in the first embodiment. [Figure 7] FIG. 10 is a perspective view showing a configuration near a shunt resistor element in a second embodiment. [Figure 8] FIG. 10 is a cross-sectional view showing the configuration of a multilayer substrate according to a second embodiment. [Figure 9] FIG. 10 is a plan view showing a current path near a shunt resistance element in the second embodiment. [Figure 10] FIG. 10 is a cross-sectional view showing a current path near a shunt resistance element in a second embodiment. [Figure 11] FIG. 10 is a cross-sectional view showing cancellation of magnetic flux in the second embodiment. [Figure 12]FIG. 10 is a perspective view showing a configuration in the vicinity of a shunt resistor element according to a third embodiment. [Figure 13] FIG. 10 is a plan view showing a current path near a shunt resistance element in a third embodiment. [Figure 14] FIG. 10 is a cross-sectional view showing a current path near a shunt resistance element according to a third embodiment. [Figure 15] FIG. 10 is a plan view showing a current path near a shunt resistance element in a fourth embodiment. [Figure 16] FIG. 10 is a cross-sectional view showing a current path near a shunt resistance element in a fourth embodiment. [Figure 17] FIG. 11 is a plan view showing a current path near a shunt resistance element in a fifth embodiment. [Figure 18] FIG. 11 is a cross-sectional view showing a current path near a shunt resistance element in a fifth embodiment. [Figure 19] FIG. 13 is a plan view showing a current path near a shunt resistance element in a sixth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, a power module according to an embodiment will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to these embodiments.

[0008] (First embodiment) The power module according to the first embodiment is equipped with a power device and a shunt resistor is inserted in a current path including the power device, and is devised to appropriately detect the current in the current path using the shunt resistor.

[0009] The power module 1 can be configured as shown in Figures 1 and 2. Figure 1 is a plan view showing the configuration of the power module 1. Figure 2 is a cross-sectional view showing the configuration of the power module 1, showing a cross section taken along line AA in Figure 1. In the following, the direction perpendicular to the main surface of the substrate 2 is defined as the Z direction, and two directions perpendicular to each other in a plane perpendicular to the Z direction are defined as the X direction and the Y direction.

[0010] The power module 1 includes a multilayer substrate 2, a shunt resistor element 8, power devices PD1 and PD2, and capacitance devices CD1 to CD3.

[0011] In the multilayer substrate 2, as shown in FIG. 2, an insulating layer DL2, a wiring layer L2, an insulating layer DL1, and a wiring layer L1 are stacked in this order in the Z direction.

[0012] The wiring layer L2 extends in the X and Y directions. The wiring layer L2 includes a conductive pattern 21. The conductive pattern 21 is formed of a conductive material, and may be formed of, for example, a material containing metal as a main component, or may be formed of a semiconductor that has been given conductivity.

[0013] The wiring layer L1 extends in the XY directions. The wiring layer L1 has the conductive patterns 3, 4, 5, and 6 shown in FIG. 1. The shunt resistor element 8 is arranged on the wiring layer L1. The power devices PD1 and PD2 are arranged on the wiring layer L1. The capacitance devices CD1 to CD3 are arranged on the wiring layer L1.

[0014] The power device PD1 is electrically connected between the conductive patterns 5 and 6. The power device PD1 may have a substantially rectangular shape in an XY plan view. The power device PD1 may have a longitudinal direction in the Y direction and a lateral direction in the X direction. One end of the power device PD1 is connected to the conductive pattern 5 and the other end is connected to the conductive pattern 6 in the Y direction.

[0015] The conductive pattern 6 is electrically connected between the power devices PD1 and PD2. The conductive pattern 6 is formed of a conductive material, and may be formed of, for example, a material containing metal as a main component, or may be formed of a semiconductor that has been given conductivity. The conductive pattern 6 extends at least in the Y direction. The conductive pattern 6 may also extend in the X direction. The conductive pattern 6 may have a substantially rectangular shape in the XY plane view. One end of the conductive pattern 6 on the -Y side is electrically connected to the conductive pattern 3 via the power device PD2, and the other end of the conductive pattern 6 on the +Y side is electrically connected to the conductive pattern 5 via the power device PD1.

[0016] The power device PD2 is electrically connected between the conductive pattern 6 and the conductive pattern 3. The power device PD2 may have a substantially rectangular shape in an XY plan view. The power device PD2 may have a longitudinal direction in the X direction and a lateral direction in the Y direction. In the Y direction, one end of the power device PD2 is connected to the conductive pattern 6 and the other end is connected to the conductive pattern 3.

[0017] The conductive pattern 3 is electrically connected between the power device PD2 and the shunt resistor element 8 in the Y direction. The conductive pattern 3 is made of a conductive material, and may be made of, for example, a material containing metal as a main component, or may be made of a semiconductor that has been given conductivity. The conductive pattern 3 extends at least in the Y direction. The conductive pattern 3 may further extend in the X direction. The conductive pattern 3 may have a substantially rectangular shape in the XY plane view. One end of the conductive pattern 3 on the +Y side is connected to the power device PD2, and the other end on the -Y side is connected to one end of the shunt resistor element 8.

[0018] The shunt resistance element 8 is electrically connected between the conductive pattern 3 and the conductive pattern 4 in the Y direction. The shunt resistance element 8 extends at least in the Y direction. The shunt resistance element 8 may also extend in the X direction. One end of the shunt resistance element 8 on the +Y side is connected to the conductive pattern 3, and the other end on the -Y side is connected to one end of the conductive pattern 4.

[0019] The conductive pattern 4 is electrically connected between the shunt resistance element 8 and the capacitive devices CD1 to CD3 in the X and Y directions. The conductive pattern 4 is made of a conductive material, and may be made of, for example, a material containing metal as a main component, or may be made of a semiconductor that has been given conductivity. The conductive pattern 4 includes a portion 4a. The portion 4a extends in the Y direction from a position spaced apart from the shunt resistance element 8 in the X direction along the shunt resistance element 8 and the conductive pattern 3.

[0020] One end of the conductive pattern 4 is connected to the other end of the shunt resistance element 8 in the Y direction. The conductive pattern 4 may be approximately S-shaped in the XY plane. The conductive pattern 4 extends to a position spaced apart in the X direction from the other end of the shunt resistance element 8 (for example, a position spaced apart on the +X side). The conductive pattern 4 bends from that position in the Y direction and extends in the Y direction along the shunt resistance element 8 and the conductive pattern 3. The other end of the conductive pattern 4 is connected to the conductive pattern 5 via the capacitance devices CD1 to CD3. The conductive pattern 4 may have a substantially S-shape in the XY plane. One end of the conductive pattern 4 is arranged on the -Y side and the other end is arranged on the +Y side.

[0021] The capacitor devices CD1 to CD3 are electrically connected between the conductive pattern 5 and the conductive pattern 4. Each of the capacitor devices CD1 to CD3 may have a substantially rectangular shape in the XY plane view. Each of the capacitor devices CD1 to CD3 may have its longitudinal direction in the Y direction and its lateral direction in the X direction. In the Y direction, one end of each of the capacitor devices CD1 to CD3 is connected to the conductive pattern 4 and the other end is connected to the conductive pattern 5.

[0022] The conductive pattern 5 is electrically connected between the power device PD1 and the capacitive devices CD1 to CD3. The conductive pattern 5 is made of a conductive material, and may be made of, for example, a material containing metal as a main component, or may be made of a semiconductor that has been given conductivity. The conductive pattern 5 extends mainly in the X direction. The conductive pattern 5 may have a substantially horizontal I-shape in the XY plan view. The +X and -Y side portions of the conductive pattern 5 are connected to the capacitive devices CD1 to CD3, and the -X and -Y side portions are connected to the power device PD1.

[0023] Accordingly, in the power module 1, as shown by the dotted arrows, a loop current path is formed in the order of conductive pattern 5 → power device PD1 → conductive pattern 6 → power device PD2 → conductive pattern 3 → shunt resistor element 8 → conductive pattern 4 → capacitance devices CD1 to CD3 → conductive pattern 5.

[0024] For example, the equivalent circuit of the power module 1 is as shown in Fig. 3. Fig. 3 is a circuit diagram showing the configuration of the power module 1.

[0025] The power module 1 has power devices PD1 and PD2, a shunt resistor element 8, a power supply PS, and a controller CTR. In the power module 1, a current path is formed as follows: power supply PS and capacitance elements CD1 to CD3 → power device PD1 → power device PD2 → shunt resistor element 8 → power supply PS and capacitance elements CD1 to CD3.

[0026] The power supply PS is a DC power supply that generates DC power. The power supply PS outputs a DC voltage from one end with the other end as the reference. One end of the power supply PS will be called the high-voltage side, and the other end will be called the low-voltage side.

[0027] The power device PD1 is connected in series between the power supply PS, the capacitive elements CD1 to CD3, and the power device PD2. The power device PD1 includes a driver AM1 and a transistor PH. The transistor PH is an N-type transistor and may be an NMOSFET.

[0028] The load LD is connected in parallel to the power device PD1. The load LD may include at least one of a resistive component, a capacitive component, and an inductive component. In FIG. 3, the inductive component L LD The load LD includes, for example:

[0029] The power device PD2 is connected in series between the power device PD1 and the shunt resistance element 8. The power device PD2 includes a driver AM2 and a transistor PL. The transistor PL is an N-type transistor and may be an NMOSFET.

[0030] The shunt resistor element 8 is connected in series between the power device PD2 and the power supply PS and the capacitance elements CD1 to CD3. The shunt resistor element 8 has a resistance component R SNT Contains parasitic induction component L SNTA voltage sensor VS is connected across the shunt resistance element 8. The voltage sensor VS detects the voltage generated across the shunt resistance element 8.

[0031] The controller CTR receives the detection value of the voltage sensor VS and calculates the current flowing through the shunt resistance element 8 according to the detection value of the voltage sensor VS. As a result, the controller CTR detects the current flowing through the shunt resistance element 8. The controller CTR controls the switching of the power devices PD1 and PD2 according to the current flowing through the shunt resistance element 8. The controller CTR may also control the switching of the power devices PD1 and PD2 so that the current flowing through the shunt resistance element 8 approaches a target value. As a result, DC power from the power supply PS can be converted into AC power by the power devices PD1 and PD2 and supplied to the load LD.

[0032] At this time, in order to improve the detection accuracy of the current flowing through the shunt resistance element 8, the parasitic inductive component L SNT is the resistance component R SNT It is desirable that the value be relatively small compared to

[0033] In contrast, in the power module 1, as shown in Figures 4 and 5, the conductive pattern 3, the shunt resistance element 8, and the conductive pattern 4 form a current path that is approximately U-shaped in the XY plane. Figure 4 is a perspective view showing the configuration in the vicinity of the shunt resistance element 8. Figure 5 is an XY plane view showing the current path in the vicinity of the shunt resistance element 8.

[0034] The currents flowing through the conductive pattern 3, the shunt resistance element 8, the portion of the conductive pattern 4 on the -Y side, and the portion 4a of the conductive pattern 4 are denoted as I1, I2, I3, and I4, respectively.

[0035] Current I1 flows mainly in the -Y direction. Current I2 flows mainly in the -Y direction. Current I3 flows mainly in the +X direction. Current I4 flows mainly in the +Y direction. Currents I1 to I4 form a roughly U-shaped current path with the +Y side open. In this current path in the planar direction (XY direction), current I2 and current I4 flow in opposite directions.

[0036] The current I2 is a parasitic inductive component L of the shunt resistor element 8. SNT In response to this, as shown in Figure 6, a clockwise magnetic flux H2 is generated when viewed from the +Y direction. Figure 6 is a perspective view showing the cancellation of the magnetic flux. The current I4 flows in the opposite direction to the current I2, generating a magnetic flux H4 in the opposite direction. The current I4 generates a clockwise magnetic flux H4 when viewed from the -Y direction.

[0037] As a result, the magnetic flux H2 can be canceled by the magnetic flux H4, and therefore, the parasitic inductive component L included in the resistance element 8 is equivalent to SNT As a result, the detection accuracy of the voltage across the shunt resistance element 8 by the voltage sensor VS can be improved, and accordingly, the detection accuracy of the current flowing through the shunt resistance element 8 can be improved.

[0038] As described above, in the power module 1 according to the first embodiment, the conductive pattern 4 includes the portion 4a that extends in the Y direction from a position spaced apart in the X direction from the shunt resistance element 8 along the shunt resistance element 8 and the conductive pattern 3. This allows the current I2 flowing through the shunt resistance element 8 and the current I4 flowing through the portion 4a to flow in opposite directions, and the magnetic flux H2 generated by the current I2 can be canceled out by the magnetic flux H4 generated by the current I4. As a result, the parasitic induction component L included in the resistance element 8 is equivalently SNTThis can weaken the voltage across the shunt resistance element 8, improving the detection accuracy of the voltage across the shunt resistance element 8 by the voltage sensor VS, and accordingly improving the detection accuracy of the current flowing through the shunt resistance element 8. As a result, the controller CTR appropriately controls the switching of the power devices PD1 and PD2 according to the current flowing through the shunt resistance element 8. Therefore, the power module 1 can convert DC power from the power source PS into AC power of an appropriate level using the power devices PD1 and PD2 and supply it to the load LD.

[0039] (Second embodiment) Next, a power module according to a second embodiment will be described, focusing on the differences from the first embodiment.

[0040] In the first embodiment, a configuration is exemplified in which magnetic flux is cancelled out by forming an opposite current in a planar current path, whereas in the second embodiment, a configuration is exemplified in which magnetic flux is cancelled out by forming an opposite current in a three-dimensional current path using two wiring layers.

[0041] For example, in the power module 101, a current path may be formed by combining a plurality of approximate U-shapes three-dimensionally, as shown in Fig. 7. Fig. 7 is a perspective view showing the configuration in the vicinity of the shunt resistance element 8.

[0042] The configuration shown in FIG. 7 is modified from the configuration shown in FIG. 4 in that the conductive pattern 4 is divided into a conductive pattern 104_1 on the −X side and a conductive pattern 104_2 on the +X side, the conductive pattern 104_1 and the conductive pattern 21 are connected by a conductive plug PL1, and the conductive pattern 104_2 and the conductive pattern 21 are connected by a conductive plug PL2.

[0043] The conductive pattern 104_1 is disposed on the -Y side of the shunt resistance element 8. One end of the conductive pattern 104_1 is electrically connected to the other end of the shunt resistance element 8 in the Y direction. The conductive pattern 104_1 extends in the Y direction from the other end of the shunt resistance element 8 to reach the XY position of the conductive plug PL1. The conductive pattern 104_1 may have a substantially rectangular shape in the XY plane view. The other end of the conductive pattern 104_1 is connected to the conductive plug PL1.

[0044] As shown in FIGS. 7 and 8, the conductive plug PL1 is disposed between the conductive pattern 104_1 and the conductive pattern 21 in the Z direction. FIG. 8 is a cross-sectional view showing the configuration of a multilayer substrate. The conductive plug PL1 is electrically connected between the conductive pattern 104_1 and the conductive pattern 21. One end of the conductive plug PL1 on the +Z side is connected to the conductive pattern 104_1, extends in the Z direction, and the other end on the -Z side is connected to the conductive pattern 21. In a YZ cross-sectional view passing through the conductive plug PL1 (see FIG. 8), the structure including the conductive pattern 104_1, the conductive plug PL1, and the conductive pattern 21 forms a substantial U-shape with the +Y side open.

[0045] The conductive pattern 21 shown in FIG. 7 is disposed approximately on the +Y side with respect to the conductive plugs PL1 and PL2. The conductive pattern 21 is electrically connected between the conductive plug PL1 and the conductive plug PL2. The conductive pattern 21 forms a substantially U-shape with the -Y side open in the XY plane view. The conductive pattern 21 extends from the other end of the conductive plug PL1 to a position spaced apart in the Y direction (for example, a position spaced apart on the +Y side). The conductive pattern 21 bends from that position in the X direction and extends to a position spaced apart in the X direction (for example, a position spaced apart on the +X side). The conductive pattern 21 bends from that position in the Y direction and extends to one end of the conductive plug PL2.

[0046] 7, the conductive plug PL2 is disposed between the conductive pattern 104_2 and the conductive pattern 21 in the Z direction. The conductive plug PL2 is electrically connected between the conductive pattern 104_2 and the conductive pattern 21. One end of the conductive plug PL2 on the +Z side is connected to the conductive pattern 104_2, extends in the Z direction, and the other end on the -Z side is connected to the conductive pattern 21. In a YZ cross-sectional view passing through the conductive plug PL2, the structure including the conductive pattern 104_2, the conductive plug PL2, and the conductive pattern 21 forms a substantial U-shape with the +Y side open.

[0047] 7 forms a current path in which three approximate U-shapes are three-dimensionally combined, as indicated by dotted arrows. The three approximate U-shapes include an approximate U-shape whose +Y side is open in a YZ cross-sectional view passing through the conductive plug PL1, a U-shape whose -Y side is open in an XY planar view, and an approximate U-shape whose +Y side is open in a YZ cross-sectional view passing through the conductive plug PL2.

[0048] That is, in the power module 101, as shown in FIGS. 9 and 10, the conductive pattern 3, the shunt resistance element 8, the conductive pattern 104_1, the conductive plug PL1, the conductive pattern 21, the conductive plug PL2, and the conductive pattern 104_2 form a current path in which three approximately U-shaped portions are three-dimensionally combined. FIG. 9 is an XY plan view showing the configuration in the vicinity of the shunt resistance element 8. FIG. 10 is a YZ cross-sectional view showing the current path in the vicinity of the shunt resistance element 8. FIG. 10(a) is a YZ cross-sectional view passing through the shunt resistance element 8, illustrating a cross-section taken along line BB in FIG. 9. FIG. 10(b) is a YZ cross-sectional view not passing through the shunt resistance element 8, illustrating a cross-section taken along line CC in FIG. 9.

[0049] The currents flowing through the conductive pattern 3, the shunt resistor element 8, the conductive pattern 104_1, the −X side portion of the conductive pattern 21, the −Y side portion of the conductive pattern 21, the +X side portion of the conductive pattern 21, and the conductive pattern 104_2 are respectively represented by I 11 ,I 12 ,I 13 ,I 14 ,I 15 ,I 16 ,I17 Let's say.

[0050] current I 11 flows mainly in the -Y direction. Current I 12 flows mainly in the -Y direction. Current I 13 flows mainly in the -Y direction. Current I 14 flows mainly in the +Y direction. Current I 11 ~I 14 This forms a roughly U-shaped vertical (YZ direction) current path with the +Y side open. In this vertical current path, the current I 12 and current I 14 It is facing the opposite direction.

[0051] current I 12 is the parasitic inductive component L of the shunt resistor element 8. SNT As shown in Figure 11, clockwise magnetic flux H 12 FIG. 11 is a cross-sectional view showing the cancellation of the magnetic flux. 14 The direction of flow is the current I 12 and the magnetic flux H 14 Generates a current I 14 is a clockwise magnetic flux H when viewed from the -Y direction. 14 Generates.

[0052] current I 15 flows mainly in the +X direction. Current I 16 flows mainly in the -Y direction. Current I 17 flows mainly in the +Y direction. Current I 11 ~I 17 This forms a three-dimensional current path in which three roughly U-shaped structures are combined. In this three-dimensional current path, the current I 12 and current I 14 In addition to the fact that the current I 12 and current I 17 and are facing in the opposite direction.

[0053] current I 12 is the parasitic inductive component L of the shunt resistor element 8. SNTAccording to this, clockwise magnetic flux H when viewed from the +Y direction 12 Generates a current I 17 The direction of flow is the current I 12 and the magnetic flux H 17 (not shown) generates a current I 17 is a clockwise magnetic flux H when viewed from the -Y direction. 17 Generates.

[0054] This results in a magnetic flux H 12 is the magnetic flux H 14 In addition to being canceled by the magnetic flux H 17 Therefore, the parasitic inductive component L of the shunt resistor element 8 can be equivalently canceled out by SNT can be further weakened.

[0055] As described above, in the second embodiment, the power module 101 generates a plurality of currents in the opposite direction to the current flowing through the shunt resistance element 8 in a three-dimensional current path using two wiring layers, and the magnetic flux due to the current in the shunt resistance element 8 is cancelled out by the magnetic flux due to the plurality of currents in the opposite direction. As a result, the parasitic induction component L of the shunt resistance element 8 is SNT This can further weaken the voltage across the shunt resistance element 8, thereby further improving the accuracy with which the voltage sensor VS detects the voltage across the shunt resistance element 8. Accordingly, the accuracy with which the current flowing through the shunt resistance element 8 is detected can be further improved.

[0056] (Third embodiment) Next, a power module according to a third embodiment will be described, focusing on the differences from the first and second embodiments.

[0057] In the second embodiment, a configuration is exemplified in which magnetic flux is cancelled out by forming a current in an opposite direction in a three-dimensional current path using two wiring layers, whereas in the third embodiment, a configuration is exemplified in which magnetic flux is cancelled out by forming a current in an opposite direction in a three-dimensional current path using multiple wiring layers.

[0058] For example, in the power module 201, a current path may be formed by combining a large number of approximate U-shapes three-dimensionally, as shown in Fig. 12. Fig. 12 is a perspective view showing the configuration in the vicinity of the shunt resistance element 8.

[0059] 7, the following changes are made to the configuration shown in FIG. 12: The conductive pattern 21 is divided into a conductive pattern 221_1 on the −X side and a conductive pattern 221_2 on the +X side. Conductive patterns 231 and 232 of the wiring layer L3 and a conductive pattern 241 of the wiring layer L4 are added. The conductive patterns 221_1 and 231 are connected by a conductive plug PL11 on the +Y side, and the conductive patterns 231 and 241 are connected by a conductive plug PL21 on the −Y side. The conductive patterns 241 and 232 are connected by a conductive plug PL22 on the −Y side, and the conductive patterns 232 and 221_2 are connected by a conductive plug PL12 on the +Y side.

[0060] The conductive pattern 221_1 is disposed between the conductive plug PL1 and the conductive plug PL11 in the Y direction. The conductive pattern 221_1 is electrically connected between the conductive plug PL1 and the conductive plug PL11. One end of the conductive pattern 221_1 on the -Y side is connected to the conductive plug PL1, extends in the Y direction, and the other end on the +Y side is connected to the conductive plug PL11.

[0061] The conductive plug PL11 is disposed between the conductive pattern 221_1 and the conductive pattern 231 in the Z direction. The conductive plug PL11 is electrically connected between the conductive pattern 221_1 and the conductive pattern 231. One end of the conductive plug PL11 on the +Z side is connected to the conductive pattern 221_1, extends in the Z direction, and the other end on the -Z side is connected to the conductive pattern 231. In a YZ cross-sectional view passing through the conductive plug PL11, the conductive pattern 221_1, the conductive plug PL11, and the conductive pattern 231 form a substantial U-shape that is open on the -Y side.

[0062] The conductive pattern 231 is disposed between the conductive plug PL11 and the conductive plug PL21 in the Y direction. The conductive pattern 231 is electrically connected between the conductive plug PL11 and the conductive plug PL21. One end of the conductive pattern 231 on the +Y side is connected to the conductive plug PL11, extends in the Y direction, and the other end on the -Y side is connected to the conductive plug PL21.

[0063] The conductive plug PL21 is disposed between the conductive pattern 231 and the conductive pattern 241 in the Z direction. The conductive plug PL21 is electrically connected between the conductive pattern 231 and the conductive pattern 241. One end of the conductive plug PL21 on the +Z side is connected to the conductive pattern 231, extends in the Z direction, and the other end on the -Z side is connected to the conductive pattern 241. In a YZ cross-sectional view passing through the conductive plug PL21, the conductive pattern 231, the conductive plug PL21, and the conductive pattern 241 form a substantially U-shape that is open on the +Y side.

[0064] The conductive pattern 241 is disposed approximately on the +Y side with respect to the conductive plugs PL21 and PL22. The conductive pattern 241 is electrically connected between the conductive plug PL21 and the conductive plug PL22. The conductive pattern 241 forms a substantially U-shape with the -Y side open in the XY plane view. The conductive pattern 241 extends from the other end of the conductive plug PL21 to a position spaced apart in the Y direction (for example, a position spaced apart on the +Y side). The conductive pattern 241 bends from that position in the X direction and extends to a position spaced apart in the X direction (for example, a position spaced apart on the +X side). The conductive pattern 241 bends from that position in the Y direction and extends to one end of the conductive plug PL22.

[0065] The conductive plug PL22 is disposed between the conductive pattern 232 and the conductive pattern 241 in the Z direction. The conductive plug PL22 is electrically connected between the conductive pattern 232 and the conductive pattern 241. One end of the conductive plug PL22 on the +Z side is connected to the conductive pattern 232, extends in the Z direction, and the other end on the -Z side is connected to the conductive pattern 241. In a YZ cross-sectional view passing through the conductive plug PL22, the conductive pattern 232, the conductive plug PL22, and the conductive pattern 241 form a substantially U-shape that is open on the +Y side.

[0066] The conductive pattern 232 is disposed between the conductive plug PL12 and the conductive plug PL22 in the Y direction. The conductive pattern 232 is electrically connected between the conductive plug PL12 and the conductive plug PL22. One end of the conductive pattern 232 on the +Y side is connected to the conductive plug PL12, extends in the Y direction, and the other end on the -Y side is connected to the conductive plug PL22.

[0067] The conductive plug PL12 is disposed between the conductive pattern 221_2 and the conductive pattern 232 in the Z direction. The conductive plug PL12 is electrically connected between the conductive pattern 221_2 and the conductive pattern 232. One end of the conductive plug PL12 on the +Z side is connected to the conductive pattern 221_2, extends in the Z direction, and the other end on the -Z side is connected to the conductive pattern 232. In a YZ cross-sectional view passing through the conductive plug PL12, the conductive pattern 221_2, the conductive plug PL12, and the conductive pattern 232 form a substantially U-shape that is open on the -Y side.

[0068] The conductive pattern 221_2 is disposed between the conductive plug PL2 and the conductive plug PL12 in the Y direction. The conductive pattern 221_2 is electrically connected between the conductive plug PL2 and the conductive plug PL12. One end of the conductive pattern 221_2 on the −Y side is connected to the conductive plug PL2, extends in the Y direction, and the other end on the +Y side is connected to the conductive plug PL12.

[0069] 12 forms a current path in which seven approximate U-shapes are three-dimensionally combined, as indicated by dotted arrows. The seven approximate U-shapes include a approximate U-shape whose +Y side is open in a YZ cross-sectional view passing through conductive plug PL1, a approximate U-shape whose -Y side is open in a YZ cross-sectional view passing through conductive plug PL11, a approximate U-shape whose +Y side is open in a YZ cross-sectional view passing through conductive plug PL21, a U-shape whose -Y side is open in an XY plane view, a approximate U-shape whose +Y side is open in a YZ cross-sectional view passing through conductive plug PL22, a approximate U-shape whose -Y side is open in a YZ cross-sectional view passing through conductive plug PL12, and a approximate U-shape whose +Y side is open in a YZ cross-sectional view passing through conductive plug PL2.

[0070] That is, in the power module 201, as shown in FIGS. 13 and 14 , a current path is formed by three-dimensionally combining seven approximately U-shaped elements: the conductive pattern 3, the shunt resistance element 8, the conductive pattern 104_1, the conductive plug PL1, the conductive pattern 221_1, the conductive plug PL11, the conductive pattern 231, the conductive plug PL21, the conductive pattern 241, the conductive plug PL22, the conductive pattern 232, the conductive plug PL12, the conductive pattern 221_2, the conductive plug PL2, and the conductive pattern 104_2. FIG. 13 is an XY plan view showing the configuration in the vicinity of the shunt resistance element 8. FIG. 14 is a YZ cross-sectional view showing the current path in the vicinity of the shunt resistance element 8. FIG. 14(a) is a YZ cross-sectional view passing through the shunt resistance element 8, illustrating a cross-section taken along line DD in FIG. 13 . FIG. 14(b) is a YZ cross-sectional view not passing through the shunt resistance element 8, illustrating a cross-section taken along line EE in FIG. 13 .

[0071] The currents flowing through the conductive pattern 3, the shunt resistor element 8, the conductive pattern 104_1, the conductive pattern 221_1, the conductive pattern 231, the −X side portion of the conductive pattern 241, the +Y side portion of the conductive pattern 241, the +X side portion of the conductive pattern 241, the conductive pattern 232, the conductive pattern 221_2, and the conductive pattern 104_2 are respectively represented by I 21 ,I 22 ,I 23 ,I 24 ,I 25 ,I 26 ,I27 ,I 28 ,I 29 ,I 30 ,I 31 Let's say.

[0072] current I 21 flows mainly in the -Y direction. Current I 22 flows mainly in the -Y direction. Current I 23 flows mainly in the -Y direction. Current I 24 flows mainly in the +Y direction. Current I 25 flows mainly in the -Y direction. Current I 26 flows mainly in the +Y direction. Current I 27 flows mainly in the +X direction. Current I 28 flows mainly in the -Y direction. Current I 29 flows mainly in the +Y direction. Current I 30 flows mainly in the -Y direction. Current I 30 flows mainly in the +Y direction. Current I 21 ~I 24 This forms a roughly U-shaped vertical (YZ direction) current path with the +Y side open. In this vertical current path, the current I 22 and current I 24 It is facing the opposite direction.

[0073] current I 22 is the parasitic inductive component L of the shunt resistor element 8. SNT According to this, clockwise magnetic flux H when viewed from the +Y direction 22 Generates a current I 24 The direction of flow is the current I 22 and the magnetic flux H 24 Generates a current I 24 is a clockwise magnetic flux H when viewed from the -Y direction. 17 Generates.

[0074] current I 21 ~I 31 This forms a three-dimensional current path in which seven roughly U-shaped structures are combined. In this three-dimensional current path, the current I 22 and current I 24In addition to the fact that the current I 22 and current I 26 and are in opposite directions, and the current I 22 and current I 29 and are in opposite directions, and the current I 22 and current I 31 and are facing in the opposite direction.

[0075] current I 22 is the parasitic inductive component L of the shunt resistor element 8. SNT According to this, clockwise magnetic flux H when viewed from the +Y direction 22 Generates a current I 26 The direction of flow is the current I 22 and the magnetic flux H 26 Generates a current I 26 is a clockwise magnetic flux H when viewed from the -Y direction. 26 Generates a current I 29 The direction of flow is the current I 22 and the magnetic flux H 29 Generates a current I 29 is a clockwise magnetic flux H when viewed from the -Y direction. 29 Generates a current I 31 The direction of flow is the current I 22 and the magnetic flux H 31 Generates a current I 31 is a clockwise magnetic flux H when viewed from the -Y direction. 31 Generates.

[0076] This results in a magnetic flux H 22 is the magnetic flux H 24 In addition to being canceled by the magnetic flux H 26 , magnetic flux H 29 , magnetic flux H 31 Therefore, the parasitic inductive component L of the shunt resistor element 8 can be equivalently canceled out by SNT can be further weakened.

[0077] As described above, in the third embodiment, the power module 101 generates a large number of currents in the opposite direction to the current flowing through the shunt resistance element 8 in a three-dimensional current path using multiple wiring layers, and the magnetic flux due to the current in the shunt resistance element 8 is canceled out by the magnetic flux due to the large number of currents in the opposite direction. As a result, the parasitic induction component L of the shunt resistance element 8 is SNT This can further weaken the voltage across the shunt resistance element 8, thereby further improving the accuracy with which the voltage sensor VS detects the voltage across the shunt resistance element 8. Accordingly, the accuracy with which the current flowing through the shunt resistance element 8 is detected can be further improved.

[0078] (Fourth embodiment) Next, a power module according to a fourth embodiment will be described, focusing on the differences from the first to third embodiments.

[0079] The first to third embodiments exemplify configurations in which a current in the opposite direction is generated by devising the arrangement of shunt resistance elements 8 relative to a plurality of conductive patterns, while the fourth embodiment exemplifies a configuration in which a current in the opposite direction is generated by devising the implementation of shunt resistance elements 8 relative to the conductive patterns.

[0080] For example, in the power module 301, the conductive pattern 303 and the shunt resistance element 8 may form a current path that is approximately U-shaped in a YZ cross section, as shown in Fig. 15 and Fig. 16. Fig. 15 is an XY plan view showing the current path near the shunt resistance element 8. Fig. 16 is a YZ cross section showing the current path near the shunt resistance element 8, illustrating a cross section taken along line FF in Fig. 15.

[0081] In the power module 301, the wiring layer L1 has a conductive pattern 303 and a conductive pattern 304. A power device PD2 and a shunt resistor element 8 are arranged on the wiring layer L1.

[0082] The power device PD2 and the shunt resistance element 8 are arranged to be spaced apart in the X direction. The Y position of the power device PD2 may include the Y position of the shunt resistance element 8.

[0083] The conductive pattern 303 is connected to an end on the -Y side of the power device PD2 and an end on the -Y side of the shunt resistance element 8. The conductive pattern 303 is electrically connected between the power device PD2 and the shunt resistance element 8. On the -X side, one end on the +Y side of the conductive pattern 303 is connected to the power device PD2, and on the +X side, a portion 303a located slightly toward the -Y side from the one end on the +Y side is connected to one end of the shunt resistance element 8.

[0084] The shunt resistance element 8 is electrically connected in the Y direction between the conductive pattern 303 and the conductive pattern 304. One end of the shunt resistance element 8 on the −Y side is connected to a portion 303a located slightly on the −Y side of the end of the conductive pattern 303 on the +Y side, and the other end on the +Y side is connected to one end of the conductive pattern 304.

[0085] The conductive pattern 304 is electrically connected to the other end of the shunt resistance element 8 in the Y direction. One end of the conductive pattern 304 on the −Y side is connected to the other end of the shunt resistance element 8.

[0086] The current flowing along one end of the conductive pattern 303 on the +X side is I 41 The current flowing from one end of the conductive pattern 303 on the +Y side to the portion 303a is I 42 , the current flowing through the shunt resistor element 8 is I 43 , the current flowing through the conductive pattern 304 is I 44 Let the current I 41 ~I 44 As a result, a current path in the vertical direction (YZ direction) of a substantially U shape is formed.

[0087] current I 41 flows mainly in the +X direction. Current I 42 flows mainly in the -Y direction. Current I 43 flows mainly in the +Y direction. Current I 44 flows mainly in the +Y direction. In this vertical current path, the current I 43 is the current I 42 and is facing the opposite direction.

[0088] current I 43 is the parasitic inductive component L of the shunt resistor element 8. SNT According to this, clockwise magnetic flux H when viewed from the +Y direction 43 Generates a current I 42 The direction of flow is the current I 43 and the magnetic flux H 43 Generates a current I 43 is a clockwise magnetic flux H when viewed from the -Y direction. 43 Generates.

[0089] This results in a magnetic flux H 43 is the magnetic flux H 42 Therefore, the parasitic inductive component L of the shunt resistor element 8 can be equivalently canceled out by SNT can be weakened.

[0090] As described above, in the fourth embodiment, in the power module 301, one end on the -Y side of the shunt resistance element 8 is connected to the portion 303a located slightly on the -Y side of the end on the +Y side of the conductive pattern 303. As a result, in the current path flowing through the conductive pattern 303 and the shunt resistance element 8, a current is formed in the opposite direction to the current flowing through the shunt resistance element 8, and the magnetic flux due to the current in the shunt resistance element 8 is canceled out by the magnetic flux due to the current in the opposite direction. As a result, the parasitic induction component L of the shunt resistance element 8 SNT This can improve the accuracy with which the voltage sensor VS detects the voltage across the shunt resistance element 8. Accordingly, the accuracy with which the current flowing through the shunt resistance element 8 can be detected can be improved.

[0091] (Fifth embodiment) Next, a power module according to a fifth embodiment will be described, focusing on the differences from the first to fourth embodiments.

[0092] The third and fourth embodiments illustrate a configuration in which a single opposite current is generated by ingeniously mounting the shunt resistance element 8 on the conductive pattern, while the fifth embodiment illustrates a configuration in which a plurality of opposite currents are generated by ingeniously mounting the shunt resistance element 8 on the conductive pattern.

[0093] For example, in the power module 401, multiple approximately U-shaped current paths may be formed in a YZ cross section by the conductive patterns 303, 304 and the shunt resistance element 8, as shown in Figures 17 and 18. Figure 17 is an XY plan view showing the current paths near the shunt resistance element 8. Figure 18 is a YZ cross section showing the current paths near the shunt resistance element 8, illustrating a cross section taken along line GG in Figure 17.

[0094] In the power module 401, the wiring layer L1 has a conductive pattern 404 instead of the conductive pattern 304 (see FIG. 15). The wiring layer L2 has a conductive pattern 421. A conductive plug PL401 is disposed between the wiring layer L1 and the wiring layer L2.

[0095] Shunt resistance element 8 is electrically connected between conductive pattern 303 and conductive pattern 404 in the Y direction. One end of shunt resistance element 8 on the -Y side is connected to portion 303a, and the other end on the +Y side is connected to portion 404a. Portion 303a is located slightly on the -Y side of the end of conductive pattern 303 on the +Y side. Portion 404a is located slightly on the +Y side of the end of conductive pattern 404 on the -Y side.

[0096] The conductive pattern 404 is electrically connected to the other end of the shunt resistance element 8 in the Y direction. The conductive pattern 404 is connected between the shunt resistance element 8 and the conductive plug PL401 in the Z direction. A portion 404a of the conductive pattern 404 located slightly toward the +Y side from one end on the -Y side is connected to the other end of the shunt resistance element 8.

[0097] 18, the conductive plug PL401 is disposed between the conductive pattern 404 and the conductive pattern 421 in the Z direction. The conductive plug PL401 is electrically connected between the conductive pattern 404 and the conductive pattern 421. One end of the conductive plug PL401 on the +Z side is connected to one end of the conductive pattern 404 on the -Y side, the conductive plug PL401 extends in the Z direction, and the other end on the -Z side is connected to the conductive pattern 421.

[0098] The other end of the conductive plug PL401 on the −Z side is connected to the conductive pattern 421. The conductive pattern 421 is electrically connected to the conductive pattern 404 via the conductive plug PL401.

[0099] The current flowing along one end of the conductive pattern 303 on the +X side is I 51 The current flowing from one end of the conductive pattern 303 on the +Y side to the portion 303a is I 52 , the current flowing through the shunt resistor element 8 is I 53 , the current flowing through the conductive pattern 404 is I 54 Let the current I 51 ~I 54 As a result, a current path in the vertical direction (YZ direction) of a substantially U shape is formed.

[0100] current I 51 flows mainly in the +X direction. Current I 52 flows mainly in the -Y direction. Current I 53 flows mainly in the +Y direction. Current I 54 flows mainly in the -Y direction. In this vertical current path, the current I 53 is the current I 52 In addition to the fact that the current I 54 and is facing the opposite direction.

[0101] current I 53 is the parasitic inductive component L of the shunt resistor element 8. SNT According to this, clockwise magnetic flux H when viewed from the +Y direction 53 Generates a current I 52 The direction of flow is the current I 53 and the magnetic flux H 52Generates a current I 52 is a clockwise magnetic flux H when viewed from the -Y direction. 52 Generates a current I 54 The direction of flow is the current I 53 and the magnetic flux H 54 Generates a current I 54 is a clockwise magnetic flux H when viewed from the -Y direction. 54 Generates.

[0102] This results in a magnetic flux H 53 is the magnetic flux H 52 ,H 54 Therefore, the parasitic inductive component L of the shunt resistor element 8 can be equivalently canceled out by SNT can be further weakened.

[0103] As described above, in the fifth embodiment, in the power module 401, one end on the -Y side of the shunt resistance element 8 is connected to a portion 303a located slightly on the -Y side of the +Y side end of the conductive pattern 303. The other end on the +Y side of the shunt resistance element 8 is connected to a portion 404a located slightly on the +Y side of the -Y side end of the conductive pattern 404. As a result, in the current path flowing through the conductive pattern 303, the shunt resistance element 8, and the conductive pattern 404, a plurality of currents are formed in the opposite direction to the current flowing through the shunt resistance element 8, and the magnetic flux due to the current in the shunt resistance element 8 is canceled out by the magnetic flux due to the plurality of opposite currents. As a result, the parasitic induction component L of the shunt resistance element 8 SNT This can further weaken the voltage across the shunt resistance element 8, thereby further improving the accuracy with which the voltage sensor VS detects the voltage across the shunt resistance element 8. Accordingly, the accuracy with which the current flowing through the shunt resistance element 8 is detected can be further improved.

[0104] (Sixth embodiment) Next, a power module according to the sixth embodiment will be described, focusing on the differences from the first to fifth embodiments.

[0105] In the fourth and fifth embodiments, a configuration is exemplified in which a current in the opposite direction is generated by devising the implementation of the shunt resistance element 8 on the conductive pattern, while in the sixth embodiment, a configuration is exemplified in which a current in the opposite direction is generated by devising the pattern of the shunt resistance element 508.

[0106] For example, in the power module 501, a current path having an approximately U-shape in XY view may be formed by arranging a plurality of shunt resistance elements and conductive patterns as shown in Fig. 19. Fig. 19 is an XY plan view showing the current path near the shunt resistance elements 508_1 and 508_2.

[0107] In the power module 501, the wiring layer L1 has a conductive pattern 503 and conductive patterns 504 and 509. A power device PD2 and two shunt resistor elements 508_1 and 508_2 are arranged on the wiring layer L1.

[0108] The shunt resistance element 508_1 and the shunt resistance element 508_2 are spaced apart from each other in the X direction. The shunt resistance element 508_1 and the shunt resistance element 508_2 are electrically connected in series via the conductive pattern 509. In the XY plane view, the configuration including the shunt resistance element 508_1, the conductive pattern 509, and the shunt resistance element 508_2 forms a substantially U-shaped current path. The shunt resistance element 508_1 and the shunt resistance element 508_2 function equivalently as a single shunt resistance element having a resistance value obtained by adding together the resistance values ​​of both the shunt resistance elements.

[0109] The shunt resistance element 508_1 is electrically connected between the conductive pattern 503 and the conductive pattern 509 in the Y direction. The shunt resistance element 508_1 may be substantially rectangular in the XY plane view. The longitudinal direction of the shunt resistance element 508_1 may be the X direction. One end of the shunt resistance element 508_1 on the -Y side is connected to the -Y side end of the conductive pattern 503, and the other end on the +Y side is connected to the portion 509a. The portion 509a is located slightly to the -Y side of the ends of the conductive pattern 509 on the -X side and +Y side.

[0110] The shunt resistance element 508_2 is electrically connected between the conductive pattern 504 and the conductive pattern 509 in the Y direction. The shunt resistance element 508_1 may be substantially rectangular in the XY plane view. The longitudinal direction of the shunt resistance element 508_1 may be the X direction. One end of the shunt resistance element 508_1 on the -Y side is connected to the portion 509b, and the other end on the +Y side is connected to the -Y side end of the conductive pattern 504. The portion 509b is located slightly on the -Y side of the ends of the conductive pattern 509 on the -X side and +Y side.

[0111] The conductive pattern 503 is connected to the -Y side end of the power device PD2 and the +Y side of the shunt resistor 508_1. The conductive pattern 503 is electrically connected between the power device PD2 and the shunt resistor 508_1. The conductive pattern 503 is arranged on the -X side of and spaced apart from the conductive pattern 504. The conductive pattern 503 may have a substantially rectangular shape in the XY plane view. One end on the -Y side of the conductive pattern 503 is electrically connected to one end of the shunt resistor 8 in the Y direction.

[0112] The conductive pattern 504 is arranged on the +Y side of the shunt resistance element 508_2 and is arranged spaced apart on the +X side of the conductive pattern 503. The conductive pattern 504 may have a substantially rectangular shape in the XY plane view. One end of the conductive pattern 504 on the -Y side is electrically connected to one end of the shunt resistance element 8 in the Y direction.

[0113] The conductive pattern 509 is disposed substantially on the −Y side of the shunt resistance elements 508_1 and 508_2, and a portion of the conductive pattern 509 is disposed between the shunt resistance elements 508_1 and 508_2. The conductive pattern 509 is electrically connected between the shunt resistance elements 508_1 and 508_2.

[0114] The conductive pattern 509 has a generally U-shape that is open on the -Y side in the XY plane view. The conductive pattern 509 extends in the Y direction from a portion 509a to reach ends on the -X and +Y sides, extends in the X direction from the ends on the -X and +Y sides to reach ends on the +X and +Y sides, and extends in the Y direction from the ends on the +X and +Y sides to reach a portion 509b.

[0115] A portion 509a of the conductive pattern 509 located slightly on the -Y side from the -X side and +Y side ends is connected to the other end of the shunt resistance element 508_1. A portion 509b of the conductive pattern 509 located slightly on the -Y side from the +X side and +Y side ends is connected to one end of the shunt resistance element 508_2.

[0116] The current flowing through the conductive pattern 503 is I 61 , the current flowing through the shunt resistor element 508_1 is I 62 , the current flowing through the portion 509a of the conductive pattern 509 is I 63 The current flowing from the portion 509a of the conductive pattern 509 to the ends on the −X side and +Y side is I 64 The current flowing from the end of the conductive pattern 509 on the −X side and +Y side to the end of the conductive pattern 509 on the +X side and +Y side is I 65 The current flowing from the end of the conductive pattern 509 on the +X side and the +Y side to the portion 509b is I 66 , the current flowing through the portion 509b of the conductive pattern 509 is I 67 , the current flowing through the shunt resistor element 508_2 is I 68 , the current flowing through the conductive pattern 504 is I 69 Let the current I 61 ~I 69 This forms a current path that combines three roughly U-shaped portions.

[0117] current I 61 flows mainly in the -Y direction. Current I 62 flows mainly in the -Y direction. Current I 63 flows mainly in the -Y direction. Current I 64 flows mainly in the +Y direction. Current I 65 flows mainly in the +X direction. Current I 66 flows mainly in the -Y direction. Current I67 flows mainly in the +Y direction. Current I 68 flows mainly in the +Y direction. Current I 69 flows mainly in the +Y direction.

[0118] In the current path that combines three roughly U-shaped currents, the current I 62 is the current I 64 ,I 67 ,I 68 ,I 69 and is facing the opposite direction.

[0119] current I 62 is a clockwise magnetic flux H when viewed from the +Y direction, depending on the parasitic induction component of the shunt resistance element 508_1. 62 Generates a current I 64 The direction of flow is the current I 62 and the magnetic flux H 64 Generates a current I 64 is a clockwise magnetic flux H when viewed from the -Y direction. 64 Generates a current I 67 The direction of flow is the current I 62 and the magnetic flux H 67 Generates a current I 67 is a clockwise magnetic flux H when viewed from the -Y direction. 67 Generates a current I 68 The direction of flow is the current I 62 and the magnetic flux H 68 Generates a current I 68 is a clockwise magnetic flux H when viewed from the -Y direction. 68 Generates a current I 69 The direction of flow is the current I 62 and the magnetic flux H 69 Generates a current I 69 is a clockwise magnetic flux H when viewed from the -Y direction. 69 Generates.

[0120] This results in a magnetic flux H 62 is the magnetic flux H 64 ,H 67 ,H 68 ,H 69Therefore, the parasitic inductive component of the shunt resistor element 508_1 can be further weakened equivalently.

[0121] In the current path that combines three roughly U-shaped currents, the current I 68 is the current I 61 ,I 62 ,I 63 ,I 66 and is facing the opposite direction.

[0122] current I 68 is a clockwise magnetic flux H when viewed from the +Y direction, depending on the parasitic induction component of the shunt resistance element 508_2. 68 Generates a current I 61 The direction of flow is the current I 68 and the magnetic flux H 61 Generates a current I 61 is a clockwise magnetic flux H when viewed from the -Y direction. 61 Generates a current I 62 The direction of flow is the current I 68 and the magnetic flux H 62 Generates a current I 62 is a clockwise magnetic flux H when viewed from the -Y direction. 62 Generates a current I 63 The direction of flow is the current I 68 and the magnetic flux H 63 Generates a current I 63 is a clockwise magnetic flux H when viewed from the -Y direction. 63 Generates a current I 66 The direction of flow is the current I 68 and the magnetic flux H 66 Generates a current I 66 is a clockwise magnetic flux H when viewed from the -Y direction. 66 Generates.

[0123] This results in a magnetic flux H 68 is the magnetic flux H 61 ,H 62 ,H 63 ,H 66Therefore, the parasitic inductive component of the shunt resistor element 508_2 can be further weakened equivalently.

[0124] As described above, in the sixth embodiment, the power module 501 includes a plurality of shunt resistance elements 508_1 and 508_2. In the current path passing through the conductive pattern 503, the shunt resistance element 508_1, the conductive pattern 509, the shunt resistance element 508_2, and the conductive pattern 504, a plurality of currents opposite in direction to the current flowing through the shunt resistance element 508_1 are formed, and a plurality of currents opposite in direction to the current flowing through the shunt resistance element 508_2 are formed. This makes it possible to increase the number of combinations of reverse currents compared to the case where a single shunt resistance element is included, and to efficiently cancel out the magnetic fluxes due to the shunt resistance elements 508_1 and 508_2 with magnetic fluxes due to a greater number of reverse currents. As a result, the parasitic induction component L of the shunt resistance element 508 SNT This can further weaken the voltage across the shunt resistance element 508, thereby further improving the accuracy with which the voltage sensor VS detects the voltage across the shunt resistance element 508. Accordingly, the accuracy with which the current flowing through the shunt resistance element 508 is detected can further improve.

[0125] The observation node of the voltage sensor VS may be both ends of any one of the shunt resistance elements (for example, both ends of the shunt resistance element 508_1 or both ends of the shunt resistance element 508_2), or may be both ends of a series connection of a plurality of shunt resistance elements 508_1 and 508_2. The number of shunt resistance elements is not limited to two, and may be three or more.

[0126] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0127] 1, 101, 201, 301, 401, 501, 601 Power modules, 3 to 7, 21, 104_1, 104_2, 221_1, 221_2, 231, 232, 241, 303, 304, 404, 503, 504, 509 Conductive patterns, 8, 508_1, 508_2, 608 Shunt resistor elements, PL1, PL2, PL11, PL12, PL21, PL22 Conductive plugs.

Claims

1. Power devices and a first conductive pattern having one end connected to the power device and extending from the power device in at least a first direction; a shunt resistor element having one end in the first direction connected to the other end of the first conductive pattern; a second conductive pattern connected to the other end of the shunt resistor element and including a portion extending in the first direction from a position spaced apart from the shunt resistor element in a second direction intersecting the first direction along the shunt resistor element and the first conductive pattern; A power module equipped with

2. The first conductive pattern, the shunt resistor element, and the second conductive pattern form a substantially U-shaped current path. The power module according to claim 1 .

3. The second conductive pattern is connected to the other end of the shunt resistor in the first direction, extends from the other end of the shunt resistor in the second direction to the separated position, bends from the separated position, and extends in the first direction along the shunt resistor and the first conductive pattern. The power module according to claim 2 .

4. The first conductive pattern, the shunt resistor element, and the second conductive pattern form a current path that is a three-dimensional combination of a plurality of substantially U-shaped patterns. The power module according to claim 1 .

5. a third conductive pattern connected to the other end of the shunt resistor element in the first direction; a first conductive plug having one end connected to the third conductive pattern and extending from the third conductive pattern in a third direction intersecting the first direction and the second direction; a fourth conductive pattern, one end of which is connected to the other end of the first conductive plug, and which extends in the first direction so as to be aligned in order with the shunt resistor element and the first conductive pattern; Further equipped The power module according to claim 4.

6. a fifth conductive pattern having one end connected to the other end of the fourth conductive pattern and extending in the first direction so as to be aligned in order with the first conductive pattern and the shunt resistor; a second conductive plug, one end of which is electrically connected to the other end of the fifth conductive pattern, extending from the fifth conductive pattern in the third direction, and the other end of which is electrically connected to the second conductive pattern; Further equipped The power module according to claim 5 .

7. Power devices and a first conductive pattern having one end connected to the power device and extending from the power device in a first direction and a second direction intersecting the first direction; a shunt resistor element having one end in the first direction connected to a portion of the first conductive pattern located inward in the first direction from one end of the first conductive pattern at a position spaced apart from the power device in the second direction; a second conductive pattern connected to the other end of the shunt resistor; A power module equipped with

8. The other end of the shunt resistor element is connected to a portion of the second conductive pattern located inward in the first direction from one end of the second conductive pattern. The power module according to claim 7.

9. Power devices and a first conductive pattern having one end connected to the power device; a second conductive pattern disposed apart from the first conductive pattern in a first direction; a first shunt resistor element having one end in a second direction connected to the first conductive pattern; a second shunt resistor element having one end in the second direction connected to the second conductive pattern; a third conductive pattern disposed between the first shunt resistor element and the second shunt resistor element in the first direction; a fourth conductive pattern connected to the other end of the first shunt resistor; a fifth conductive pattern connected to the other end of the second shunt resistor; A power module equipped with

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