Cleaning device, processing device, and duct line

Abstract

To provide a cleaning device which can efficiently clean a member to be cleaned, a processing device, and a duct line.SOLUTION: A cleaning device 28 is incorporated into a processing device 10 or a duct line to clean a member with a cleaning fluid. The cleaning device 28 includes a cleaning device body 64, a pressure chamber 66, a cleaning fluid supply port, and jet parts 70c, 70d. The jet parts are formed at a wall part 74 of the cleaning device body 64 forming the pressure chamber 66 and respectively have pairs of jet holes 80a, 80b and 84a, 84b which allow an external space (storage space) S of the cleaning device body 64 and the pressure chamber 66 to communicate with each other. The pairs of jet holes are formed so that center lines L1, L2 of the jet holes intersect at one intersection P so as to cause the cleaning fluid K jetted from the jet holes in a columnar form to collide with each other and spread in a fan shape. Jet wall parts 82, 86 formed with the pair of jet holes in the wall part 74 are formed so as to have a certain thickness and expand to the intersection P side.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a cleaning device used to spray a cleaning liquid onto a component to clean it, and to a processing device and a pipeline equipped with the cleaning device. [Background technology]

[0002] The spray nozzle (cleaning device) described in Patent Document 1 includes a cleaning nozzle disposed in the internal space of a tank (container) and a cleaning liquid supply pipe for supplying cleaning liquid to the cleaning nozzle. When this spray nozzle is used to clean an object to be cleaned, cleaning liquid is supplied from the cleaning liquid supply pipe to the cleaning nozzle. The cleaning liquid is then sprayed in a columnar shape from multiple cleaning liquid spray holes formed in the cleaning nozzle and applied in dots to the object to be cleaned.

[0003] However, in a spraying mode in which the cleaning liquid is sprayed in dots on the object to be cleaned, i.e., a dot-like spraying mode, there is a problem that it is difficult to efficiently clean the object to be cleaned because the degree of freedom in design is low. In other words, in order to evenly clean a wide area of ​​the object to be cleaned with a dot-like spraying mode, it is necessary to increase the number of cleaning liquid spray holes and finely adjust the spray direction of the cleaning liquid. In this case, the degree of freedom in design regarding the spraying mode is greatly limited from a cost and technical standpoint, and ultimately, it is not possible to efficiently clean the object to be cleaned.

[0004] Patent Document 2 describes a spray nozzle with a pair of nozzle holes for spraying liquid in a fan shape. However, this spray nozzle is used for spraying agricultural chemical water, and its use for cleaning objects to be cleaned was not considered. Therefore, this spray nozzle and the cleaning nozzle of Patent Document 1 are completely different in shape and size, and it was not easy to combine this spray nozzle with the cleaning nozzle of Patent Document 1. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Patent No. 4606208 [Patent Document 2] Japanese Utility Model Application Publication No. 49-143005 Summary of the Invention

[0006] The present invention has been made to address the above-mentioned problems, and aims to provide a cleaning device, a processing device, and a pipeline that can efficiently clean the components to be cleaned by increasing the design freedom regarding the spray mode of the cleaning liquid.

[0007] In order to achieve the above object, a cleaning device according to the present invention is characterized in that it is a cleaning device for cleaning a component with a cleaning liquid, comprising: a cleaning device main body; a pressure chamber formed inside the cleaning device main body; a cleaning liquid supply port provided in the cleaning device main body to supply cleaning liquid to the pressure chamber; and at least one spray unit provided in the cleaning device main body to spray cleaning liquid toward the component, wherein the spray unit is formed in a wall portion of the cleaning device main body that constitutes the pressure chamber and has a pair of spray holes that connect the pressure chamber with a space outside the cleaning device main body, the pair of spray holes are formed so that their center lines intersect at an intersection so that cleaning liquid sprayed in columns from them collides with each other and spreads out in a fan shape, and the portion of the wall portion where the pair of spray holes are formed is formed so as to have a constant thickness and bulge toward the intersection.

[0008] In this cleaning device, the cleaning liquid sprayed in columns from the pair of injection holes collides with each other and spreads in a fan shape, so by appropriately selecting the position, size, and orientation of each of the pair of injection holes, the spray pattern of the cleaning liquid can be appropriately determined depending on the position and shape of the component. In other words, this cleaning device allows for greater design freedom regarding the spray pattern of the cleaning liquid, allowing for efficient cleaning of the component being cleaned. Furthermore, because each of the pair of injection holes can be formed as a through-hole with a simple shape, the injection holes are easy to process and foreign matter can be prevented from adhering to the injection holes, thereby preventing foreign matter from entering (contaminating) the component.

[0009] In this cleaning device, the portion of the wall where the pair of injection holes are formed has a constant thickness and is formed to bulge toward the intersection, so the length of each of the pair of injection holes can be made longer than if that portion did not bulge toward the intersection. Therefore, the injection state (mainly the injection shape) of the cleaning liquid injected from each of the pair of injection holes can be stabilized, and the component can be cleaned efficiently.

[0010] Another feature of the cleaning device of the present invention is that when an imaginary plane including the center lines of each of the pair of injection holes is defined as a first reference plane, the point where the center lines of each of the pair of injection holes intersect with the imaginary outer surface of the wall portion when it is assumed that the injection holes are not formed is defined as a reference point, and an imaginary plane including the two reference points and extending in the thickness direction of the wall portion is defined as a second reference plane, the first reference plane and the second reference plane intersect.

[0011] When the first reference plane and the second reference plane coincide, the length of each of the pair of injection holes is shortest. In this cleaning device, because the first reference plane and the second reference plane intersect, the length of each of the pair of injection holes can be made longer compared to when the first reference plane and the second reference plane coincide. Therefore, the injection state (mainly the injection shape) of the cleaning liquid injected from each of the pair of injection holes can be stabilized, and components can be cleaned efficiently.

[0012] In order to achieve the above-mentioned object, a feature of the processing device according to the present invention is that it is a processing device comprising a container having a container body having a storage space for storing the object to be processed and any of the cleaning devices described above, and the cleaning device body of the cleaning device is arranged in the storage space.

[0013] This processing apparatus, equipped with the above-described cleaning device, allows for greater design freedom regarding the spraying mode of the cleaning liquid, enabling efficient cleaning of the object to be cleaned. Furthermore, the injection holes are easy to machine, and adhesion of foreign matter to the injection holes can be suppressed, thereby suppressing contamination. Furthermore, the spraying state (mainly the spray shape) of the cleaning liquid sprayed from each of the pair of injection holes can be stabilized, enabling efficient cleaning of the object.

[0014] In order to achieve the above object, a feature of the cleaning device according to the present invention is a cleaning device for cleaning a member with a cleaning liquid, comprising: a cleaning device main body; a pressure chamber formed inside the cleaning device main body; a cleaning liquid supply port provided in the cleaning device main body to supply the cleaning liquid to the pressure chamber; and at least one spray unit provided in the cleaning device main body to spray the cleaning liquid toward the member, the spray unit having a pair of spray holes formed in a wall portion of the cleaning device main body that constitutes the pressure chamber and communicating the pressure chamber with a space outside the cleaning device main body. The pair of injection holes are formed so that their center lines intersect at one intersection point so that the cleaning liquid injected in columns from the injection holes collides with each other and spreads in a fan shape, and when an imaginary plane including the center lines of the pair of injection holes is defined as a first reference plane, a point where each center line of the pair of injection holes intersects with an imaginary outer surface of the wall portion when it is assumed that the injection holes are not formed is defined as a reference point, and an imaginary plane including the two reference points and spreading in the thickness direction of the wall portion is defined as a second reference plane, the first reference plane and the second reference plane intersect.

[0015] In this cleaning device, the cleaning liquid sprayed in columns from the pair of injection holes collides with each other and spreads in a fan shape, so by appropriately selecting the position, size, and orientation of each of the pair of injection holes, the spray pattern of the cleaning liquid can be appropriately determined depending on the position and shape of the component. In other words, this cleaning device allows for greater design freedom regarding the spray pattern of the cleaning liquid, allowing for efficient cleaning of the component being cleaned. Furthermore, because each of the pair of injection holes can be formed as a through-hole with a simple shape, the injection holes are easy to process and foreign matter can be prevented from adhering to the injection holes, thereby preventing foreign matter from entering (contaminating) the component.

[0016] In this cleaning device, since the first and second reference planes intersect, the length of each of the pair of injection holes can be made longer than when they are aligned, which makes it possible to stabilize the injection state (mainly the injection shape) of the cleaning liquid injected from each of the pair of injection holes, thereby enabling efficient cleaning of components.

[0017] Another feature of the cleaning device according to the present invention is that it comprises a plurality of the spraying sections provided on the cleaning device main body, and the first angle at which the first reference plane and the second reference plane intersect in one of the spraying sections is set to be different from the second angle at which the first reference plane and the second reference plane intersect in another of the spraying sections.

[0018] In this cleaning device, it is possible to increase the degree of freedom in designing the spraying mode of the cleaning liquid for each of the multiple sprayers, allowing for efficient cleaning of components. In addition, since the first angle of one sprayer is set to be different from the second angle of another sprayer, it is possible to direct the spray directions of the cleaning liquid from these sprayers in different directions, further increasing the degree of freedom in designing.

[0019] In order to achieve the above-mentioned object, a feature of the processing device according to the present invention is that it is a processing device comprising a container having a container body having a storage space for storing the object to be processed and any of the cleaning devices described above, and the cleaning device body of the cleaning device is arranged in the storage space.

[0020] This processing apparatus, equipped with the above-described cleaning device, allows for greater design freedom regarding the spraying mode of the cleaning liquid, enabling efficient cleaning of the object to be cleaned. Furthermore, the injection holes are easy to machine, and adhesion of foreign matter to the injection holes can be suppressed, thereby suppressing contamination. Furthermore, the spraying state (mainly the spray shape) of the cleaning liquid sprayed from each of the pair of injection holes can be stabilized, enabling efficient cleaning of the object.

[0021] In order to achieve the above object, a pipeline according to the present invention is characterized in that it includes a main pipe, a branch pipe branching off from the wall of the main pipe, and a cleaning device for cleaning the inner surface of the branch pipe with cleaning liquid, wherein the cleaning device includes a tubular cleaning device main body arranged inside the main pipe and extending in the longitudinal direction of the main pipe, a pressure chamber formed inside the cleaning device main body, a cleaning liquid supply port provided in the cleaning device main body to supply cleaning liquid to the pressure chamber, and a spray unit provided in the cleaning device main body to spray cleaning liquid toward the inner surface of the branch pipe, the spray unit having a pair of spray holes formed in a wall portion of the cleaning device main body that constitutes the pressure chamber and connecting a space outside the cleaning device main body with the pressure chamber, the pair of spray holes being formed so that center lines intersect at an intersection so that columnar sprays of cleaning liquid from them collide with each other and spread out in a fan shape, and the portion of the wall portion where the pair of spray holes are formed is formed so as to have a constant thickness and bulge toward the intersection.

[0022] In this pipeline, the cleaning liquid sprayed in columns from the pair of injection holes collides with each other and spreads in a fan shape, so by appropriately selecting the position, size, and orientation of each of the pair of injection holes, the injection mode of the cleaning liquid can be appropriately determined according to the position and shape of the inner surface of the branch pipe. Also, because each of the pair of injection holes can be formed as a through hole with a simple shape, the injection holes can be easily processed and foreign matter can be prevented from adhering to the injection holes, thereby preventing foreign matter from getting mixed in (contamination).

[0023] In this pipeline, the portion of the wall where the pair of injection holes are formed has a constant thickness and is formed to bulge toward the intersection, so the length of each of the pair of injection holes can be made longer than if that portion did not bulge toward the intersection. This makes it possible to stabilize the injection state (mainly the injection shape) of the cleaning liquid injected from each of the pair of injection holes, allowing the inner surface of the branch pipe to be cleaned efficiently.

[0024] Another feature of the pipeline according to the present invention is that the branch pipe is arranged so that its position becomes higher as it moves away from the main pipe, and when an imaginary plane including the center lines of the pair of injection holes is defined as a first reference plane, a point where the center lines of the pair of injection holes intersect with an imaginary outer surface of the wall portion when it is assumed that the injection holes are not formed is defined as a reference point, and an imaginary plane including the two reference points and extending in the thickness direction of the wall portion is defined as a second reference plane, the first reference plane is inclined with respect to the second reference plane so that part of the fan-shaped spreading cleaning liquid is applied to a vertically upper part in the circumferential direction of the inner surface of the branch pipe.

[0025] In this pipeline, the first reference plane is inclined relative to the second reference plane so that a portion of the fan-shaped cleaning liquid hits the vertically upper portion of the inner surface of the branch pipe in the circumferential direction. This allows the length of each of the pair of spray holes to be longer than when the first reference plane is not inclined relative to the second reference plane. This stabilizes the spray state (mainly the spray shape) of the cleaning liquid, allowing components to be cleaned efficiently. Furthermore, because the cleaning liquid is easily applied to the vertically upper portion of the inner surface of the branch pipe in the circumferential direction, the cleaning liquid flowing down from the vertically upper portion can be used to efficiently clean a wide area of ​​the inner surface of the branch pipe. Furthermore, because the branch pipes are positioned higher as they move away from the main pipe, the cleaning liquid that has cleaned the inner surface of the branch pipe can be discharged into the main pipe by gravity.

[0026] In order to achieve the above object, a pipeline according to the present invention is characterized in that it comprises a main pipe, a branch pipe branched off from a wall of the main pipe, and a cleaning device for cleaning the inner surface of the branch pipe with cleaning liquid, wherein the branch pipe is arranged so that its position increases with increasing distance from the main pipe, and the cleaning device comprises a tubular cleaning device main body disposed inside the main pipe and extending in the longitudinal direction of the main pipe, a pressure chamber formed inside the cleaning device main body, a cleaning liquid supply port provided in the cleaning device main body to supply cleaning liquid to the pressure chamber, and a spray unit provided in the cleaning device main body to spray cleaning liquid toward the inner surface of the branch pipe, the spray unit being formed in a wall portion of the cleaning device main body that constitutes the pressure chamber, The cleaning fluid supply pipe has a pair of injection holes that communicate with the space outside the main body and the pressure chamber, and the pair of injection holes are formed so that their center lines intersect at one intersection so that the cleaning fluid injected in a columnar shape from the injection holes collides with each other and spreads in a fan shape. When an imaginary plane including the center lines of the pair of injection holes is defined as a first reference plane, and a reference point is defined as a point where the center lines of the pair of injection holes intersect with an imaginary outer surface of the wall portion when it is assumed that the injection holes are not formed, and an imaginary plane including the two reference points and spreading in the thickness direction of the wall portion is defined as a second reference plane, the first reference plane is inclined with respect to the second reference plane so that part of the fan-shaped spreading cleaning fluid hits the vertically upper part in the circumferential direction of the inner surface of the branch pipe.

[0027] In this pipeline, the cleaning liquid sprayed in columns from the pair of injection holes collides with each other and spreads in a fan shape, so by appropriately selecting the position, size, and orientation of each of the pair of injection holes, the injection mode of the cleaning liquid can be appropriately determined according to the position and shape of the inner surface of the branch pipe. Also, because each of the pair of injection holes can be formed as a through hole with a simple shape, the injection holes can be easily processed and foreign matter can be prevented from adhering to the injection holes, thereby preventing foreign matter from getting mixed in (contamination).

[0028] In this pipeline, the first reference plane is inclined relative to the second reference plane so that a portion of the fan-shaped cleaning liquid hits the vertically upper portion of the inner surface of the branch pipe in the circumferential direction. Therefore, the length of each of the pair of injection holes can be made longer than when the first reference plane is not inclined relative to the second reference plane. This stabilizes the injection state (mainly the injection shape) of the cleaning liquid, enabling efficient cleaning of components. Furthermore, since the cleaning liquid is easily injected into the vertically upper portion of the inner surface of the branch pipe in the circumferential direction, a wide area of ​​the inner surface of the branch pipe can be efficiently cleaned using the cleaning liquid flowing down from the vertically upper portion. Furthermore, the branch pipes are arranged to extend in a direction intersecting the vertical direction so that their positions increase with increasing distance from the main pipe. Therefore, the cleaning liquid that has cleaned the inner surface of the branch pipe can be discharged into the main pipe by gravity. [Brief explanation of the drawings]

[0029] [Figure 1] 1 is a cross-sectional view showing the configuration of a processing apparatus according to a first embodiment. [Figure 2] 1A and 1B are diagrams showing the configuration of a cleaning device according to a first embodiment, in which (A) is an enlarged cross-sectional view showing the mounting structure of the cleaning device, (B) is a perspective view showing the configuration of the cleaning device, and (C) is a cross-sectional view taken along line IIC-IIC in (A). [Figure 3] 2A is an enlarged view of the IIIA portion in FIG. 2A, and FIG. 2B is a cross-sectional view taken along line IIIB-IIIB in FIG. 2A. [Figure 4] 10(A) is a cross-sectional view showing an ejection section according to a first modified example, and FIG. 10(B) is a cross-sectional view showing an ejection section according to a second modified example. [Figure 5] 10(A) is a cross-sectional view showing an injection part according to a third modified example, and FIG. 10(B) is an enlarged view of a VB portion in FIG. [Figure 6] (A) is a perspective view showing the configuration of the cleaning device main body according to the first modified example, (B) is a perspective view showing the configuration of the cleaning device main body according to the second modified example, (C) is a perspective view showing the configuration of the cleaning device main body according to the third modified example, and (D) is a perspective view showing the configuration of the cleaning device main body according to the fourth modified example. [Figure 7] FIG. 10 is a cross-sectional view showing the configuration of a processing apparatus according to a second embodiment. [Figure 8] FIG. 2 is a cross-sectional view showing the configuration of a pipeline according to the first embodiment. [Figure 9] FIG. 10 is a cross-sectional view showing the configuration of a pipeline according to a second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0030] Hereinafter, a cleaning device, a processing device, and a pipeline according to an embodiment of the present invention will be described with reference to the drawings.

[0031] FIG. 1 is a cross-sectional view showing the configuration of a processing apparatus 10 according to a first embodiment. The directions of "front, back, top, and bottom" used in the following description correspond to the directions indicated by arrows in FIG. 1. FIG. 2 shows the configuration of a cleaning apparatus 28 according to the first embodiment, with FIG. 2(A) being an enlarged cross-sectional view showing the mounting structure of the cleaning apparatus 28, FIG. 2(B) being a perspective view showing the configuration of the cleaning apparatus 28, and FIG. 2(C) being a cross-sectional view taken along line IIC-IIC in FIG. 2(A). In FIG. 1, the flow of cleaning liquid K is indicated by black arrows (straight lines).

[0032] (Configuration of the processing apparatus according to the first embodiment) The processing device 10 shown in FIG. 1 is a filtration and drying device used to filter and dry materials to be processed in chemical plants and the like, and is equipped with a vessel body 12, a jacket 14, a filtration section 16, a vibration generator 18, an agitator 20, a first leg 22, a second leg 24, a tilt drive section 26, a cleaning device 28, and a control section 30.

[0033] In this embodiment, a vessel 32 for performing various processes including filtration and drying is configured by the vessel body 12, jacket 14, filtration unit 16, vibration generator 18, agitator 20, and cleaning unit 28. In addition, a support unit 34 for supporting the vessel 32 so that it can tilt is configured by the first leg 22, second leg 24, and tilt driver 26.

[0034] The container body 12 is a member that forms a storage space S for storing the workpiece (not shown), and has a cylindrical peripheral wall portion 12a, a lower wall portion 12b formed to close the lower opening of the peripheral wall portion 12a, and an upper wall portion 12c formed to close the upper opening of the peripheral wall portion 12a. The lower wall portion 12b is formed in a disk shape, and the upper wall portion 12c is formed in a curved shape that bulges upward. The peripheral wall portion 12a, the lower wall portion 12b, and the upper wall portion 12c form a wall portion 36 of the container body 12.

[0035] A discharge port 38 constituting an opening (not shown) is formed in the front part of the lower part of the peripheral wall portion 12a, and an automatic opening and closing lid portion 38a is attached to the discharge port 38. The control unit 30 is electrically connected to the lid portion 38a, and the lid portion 38a opens and closes in response to a control signal given from the control unit 30.

[0036] The upstream end of a discharge pipe 40 is connected to the center of the lower wall portion 12b so as to communicate with the storage space S, and an on-off valve 42 is attached to the discharge pipe 40. The control unit 30 is electrically connected to the on-off valve 42, and the on-off valve 42 is opened and closed in response to a control signal given from the control unit 30.

[0037] As shown in FIG. 1, a cylindrical drive shaft nozzle 44 is formed in the center of the upper wall portion 12c, and a cylindrical input nozzle 46 and a cylindrical cleaning device nozzle 48 are formed on the outer periphery of the upper wall portion 12c. The drive shaft nozzle 44 is a portion that forms an opening (not shown) through which the rotating shaft 54a of the agitator 20 is inserted. The input nozzle 46 is a portion that forms an opening 46a for inputting the workpiece into the storage space S, and a lid 46b is detachably attached to the input nozzle 46. The cleaning device nozzle 48 is a portion that forms an opening 48a through which the cleaning device 28 is inserted.

[0038] The jacket 14 is a heating means for heating the vessel body 12, and has a jacket body 14a provided along the outer peripheral surface of the peripheral wall portion 12a. A heat medium flow path 50 for flowing a heat medium such as steam or hot water is formed between the peripheral wall portion 12a and the jacket body 14a. When the heat medium flows through the heat medium flow path 50, the vessel body 12 is heated by the heat of the heat medium, and thus the workpiece accommodated in the accommodation space S is heated. A pump (not shown) for supplying the heat medium to the jacket 14 is electrically connected to the control unit 30, and the pump is driven or stopped in response to a control signal given by the control unit 30.

[0039] The filtration unit 16 has a filtration plate 16a provided at the bottom of the storage space S so as to fit along the upper surface of the lower wall portion 12b. A flow path 52 is formed between the lower wall portion 12b and the filtration plate 16a to guide the filtrate that has passed through the filtration plate 16a to the discharge pipe 40.

[0040] The vibration generator 18 has a vibration unit 18a attached to the center of the filter plate 16a, a rod-shaped vibration shaft 18b, and a vibration generating unit 18c provided below the container body 12. One end of the vibration shaft 18b is connected to the vibration unit 18a, and the other end of the vibration shaft 18b is connected to the vibration generating unit 18c. When the vibration generating unit 18c generates vibrations, the vibrations are transmitted to the filter plate 16a via the vibration shaft 18b and the vibration unit 18a. A control unit 30 is electrically connected to the vibration generating unit 18c, and the vibration generating unit 18c is driven or stopped in response to a control signal provided by the control unit 30.

[0041] The agitator 20 has an agitator blade 54, a rotation drive device 56, and an elevator device 58. The agitator blade 54 is a member that agitates the material to be processed in the storage space S, and has a rod-shaped rotating shaft 54a and a plurality of blade members 54b attached to the lower end of the rotating shaft 54a. The upper end of the rotating shaft 54a is inserted into an opening (not shown) formed by the drive shaft nozzle 44, and protrudes above the upper wall portion 12c.

[0042] The rotation drive device 56 is a device for applying a rotational force to the agitating blade 54, and has a motor 56a and a power transmission mechanism 56b for transmitting the rotational force of the motor 56a to the agitating blade 54. The control unit 30 is electrically connected to the motor 56a, and the motor 56a is driven or stopped in response to a control signal given from the control unit 30.

[0043] The lifting device 58 is a device for raising or lowering the agitating blade 54, and has a lifting cylinder 58a. Although not shown, the lifting cylinder 58a has a cylinder, a piston that is hydraulically driven inside the cylinder, and a piston rod connected to the piston, and the piston rod is connected to the agitating blade 54.

[0044] The control unit 30 is electrically connected to a valve device (not shown) for supplying hydraulic oil to the lifting cylinder 58a, and the valve device is operated in response to a control signal given from the control unit 30, thereby driving the piston of the lifting cylinder 58a. When the piston is driven and the piston rod is pushed out of the cylinder, the agitating blade 54 is raised. On the other hand, when the piston is driven and the piston rod is retracted into the cylinder, the agitating blade 54 is lowered.

[0045] The first leg 22 is a rod-shaped member that supports the front of the container 32, and is disposed so as to extend in the vertical direction below the front of the container 32. The front of the lower wall 12b that constitutes the container 32 is connected to the upper end of the first leg 22 via a rotation shaft (not shown) that extends in a direction (left-right direction) perpendicular to the vertical and front-rear directions.

[0046] The second leg 24 is a rod-shaped member that supports the rear of the container 32, and is disposed so as to extend vertically behind the container 32. A supported portion 60 is formed at the rear of the peripheral wall 12a that constitutes the container 32 so as to protrude rearward from the peripheral wall 12a. As shown in FIG. 1, when the supported portion 60 is placed on the upper surface of the second leg 24, the upper surface of the lower wall 12b becomes horizontal.

[0047] The tilting drive unit 26 has a tilting cylinder 26a that generates power for tilting the container 32. The tilting cylinder 26a has a cylinder 62a fixed to the second leg 24, a piston (not shown) that is hydraulically driven inside the cylinder 62a, and a piston rod 62b connected to the piston. The cylinder 62a is disposed so as to extend in the vertical direction with the piston rod 62b protruding upward, and the upper end of the piston rod 62b is connected to the supported unit 60.

[0048] A valve device (not shown) for supplying hydraulic oil to the tilting cylinder 26a is electrically connected to the control unit 30, and the valve device is operated in response to a control signal given from the control unit 30, thereby driving the piston of the tilting cylinder 26a. When the piston is driven and the piston rod 62b is pushed out of the cylinder 62a, the supported portion 60 is pushed upward and the rear part of the container body 12 is lifted. On the other hand, when the piston is driven and the piston rod 62b is retracted into the cylinder 62a, the rear part of the container body 12 is lowered.

[0049] 1 is a device for cleaning components with cleaning liquid K. In this embodiment, the inner surface of the container body 12, the drive shaft nozzle 44, and the rotating shaft 54a of the agitating blade 54 are the components to be cleaned. The cleaning device 28 is configured to spray cleaning liquid K onto these components.

[0050] As shown in FIG. 2(A), the cleaning device 28 includes a cleaning device main body 64 arranged in the storage space S, a pressure chamber 66 formed inside the cleaning device main body 64, a cleaning liquid supply port 68 provided in the cleaning device main body 64, at least one (16 in this embodiment) spray section 70a to 70d provided in the cleaning device main body 64, and a connecting pipe 72 connected to the cleaning liquid supply port 68.

[0051] The maximum outer diameter of the cleaning device main body 64 is set to be smaller than the inner diameter of the opening 48a formed by the cleaning device nozzle 48. Therefore, a user can insert the cleaning device 28 into the storage space S through the opening 48a. In the following description, the end of the cleaning device 28 in the insertion direction will be referred to as the "tip end," and the end in the opposite direction will be referred to as the "base end."

[0052] The cleaning device main body 64 is a hollow member having a wall portion 74 that forms the pressure chamber 66, and has a small-diameter cylindrical portion 64a, a flared portion 64b, a large-diameter cylindrical portion 64c, and a tapered portion 64d that continue from the base end to the tip.

[0053] The small-diameter cylindrical portion 64a is formed as a straight tube with a circular cross section, and the large-diameter cylindrical portion 64c is formed as a straight tube with a larger circular cross section than the small-diameter cylindrical portion 64a. The flared portion 64b is formed as a truncated cone that smoothly widens toward the tip without any steps. The tapered portion 64d is formed as a cone that smoothly tapers toward the tip without any steps. The thickness of each of these portions is constant. The base end of the cleaning device main body 64, i.e., the base end of the small-diameter cylindrical portion 64a, is a cleaning liquid supply port 68 for supplying cleaning liquid K (FIG. 1) to the pressure chamber 66. In other words, the base end of the cleaning device main body 64 is provided with the cleaning liquid supply port 68 for supplying cleaning liquid K to the pressure chamber 66.

[0054] Each of the 16 sprayers 70a to 70d is configured to spray cleaning liquid K (FIG. 1) toward a component in a different direction. Specifically, four first sprayers 70a are provided at 90-degree intervals on the diverging portion 64b, and four second sprayers 70b are provided at 90-degree intervals on the large-diameter cylindrical portion 64c. Four third sprayers 70c are provided at 90-degree intervals on the base end of the tapered portion 64d, and four fourth sprayers 70d are provided at 90-degree intervals on the tip end of the tapered portion 64d. Note that four second sprayers 70b are shown in FIG. 2(C).

[0055] As shown in Figure 2(B), when the cleaning device main body 64 is viewed from a direction perpendicular to the central axis M of the cleaning device main body 64, the first jetting section 70a, the second jetting section 70b, the third jetting section 70c, and the fourth jetting section 70d are arranged on an imaginary straight line extending parallel to the central axis M.

[0056] In this embodiment, the first injector 70a, the second injector 70b, and the third injector 70c are configured in substantially the same manner, while the fourth injector 70d is configured in a different manner. Therefore, the following will focus on one third injector 70c and one fourth injector 70d and describe their configurations in detail.

[0057] Fig. 3(A) is an enlarged view of a portion IIIA in Fig. 2(A), and Fig. 3(B) is a cross-sectional view taken along line IIIB-IIIB in Fig. 3(A). Fig. 3(A) shows the third injection part 70c and the fourth injection part 70d, and Fig. 3(B) shows the third injection part 70c.

[0058] 3(A) and 3(B), the third injection section 70c has a pair of injection holes 80a, 80b formed in the wall section 74 of the cleaning device main body 64 that constitutes the pressure chamber 66. Each of the pair of injection holes 80a, 80b is a through-hole with a cylindrical inner surface that connects the pressure chamber 66 with the storage space S, which is the space outside the cleaning device main body 64.

[0059] As shown in Figure 3(B), the pair of injection holes 80a, 80b are formed so that their center lines L1, L2 intersect at an intersection P so that the cleaning liquid K injected from them in a columnar shape collides with each other and spreads in a fan shape (Figure 3(A)). The portion of the wall 74 of the cleaning device main body 64 where the pair of injection holes 80a, 80b are formed, i.e., the injection wall portion 82, is formed to have a constant thickness and bulge out toward the intersection P.

[0060] 3(B), when an imaginary plane including the center lines L1, L2 of the pair of injection holes 80a, 80b is defined as a first reference plane Q1, the points where the center lines L1, L2 of the pair of injection holes 80a, 80b intersect with an imaginary outer surface of the wall portion 74 assuming that the injection holes 80a, 80b are not formed are defined as reference points G1, G2, and an imaginary plane including the two reference points G1, G2 and extending in the thickness direction of the wall portion 74 is defined as a second reference plane Q2, the first reference plane Q1 and the second reference plane Q2 overlap with each other. In other words, the first reference plane Q1 and the second reference plane Q2 coincide with each other.

[0061] 3(A), the fourth injection section 70d has a pair of injection holes 84a, 84b formed in the wall portion 74 of the cleaning device main body 64 that constitutes the pressure chamber 66. Each of the pair of injection holes 84a, 84b is a through-hole with a cylindrical inner surface that connects the pressure chamber 66 with the storage space S, which is the space outside the cleaning device main body 64.

[0062] The pair of injection holes 84a, 84b are formed so that their center lines L1, L2 intersect at an intersection P so that the cleaning liquid K injected from them in a columnar shape collides with each other and spreads in a fan shape. The portion of the wall 74 of the cleaning device main body 64 where the pair of injection holes 84a, 84b are formed, i.e., the injection wall portion 86, is formed to have a certain thickness and bulge out toward the intersection P side.

[0063] When an imaginary plane including the center lines L1, L2 of the pair of injection holes 84a, 84b is defined as a first reference plane Q1, the points where the center lines L1, L2 of the pair of injection holes 84a, 84b intersect with the imaginary outer surface of the wall portion 74 when it is assumed that the injection holes 84a, 84b are not formed are defined as reference points G1, G2, and an imaginary plane including the two reference points G1, G2 and extending in the thickness direction of the wall portion 74 is defined as a second reference plane Q2, the first reference plane Q1 and the second reference plane Q2 intersect. In other words, the first reference plane Q1 and the second reference plane Q2 do not coincide with each other.

[0064] When the bisector that bisects the angle formed by the center lines L1 and L2 is defined as a reference line E, the reference line E of the third jetting part 70c and the reference line E of the fourth jetting part 70d are located in the same plane. The reference line E of the first jetting part 70a and the reference line E of the second jetting part 70b are also located in the same plane. Therefore, the fan-shaped surfaces of the cleaning liquid K sprayed from the jetting parts 70a to 70d are located in the same plane.

[0065] As shown in FIG. 2A, the connecting pipe 72 is a straight pipe member for supporting the cleaning device main body 64 in the accommodation space S. A socket 72a is formed at the tip of the connecting pipe 72, and the cleaning liquid supply port 68 of the cleaning device main body 64 is connected to the socket 72a. A first flange 72b and a second flange 72c are formed at the base end of the connecting pipe 72. The first flange 72b is connected to the open end 48b of the cleaning device nozzle 48 using a first clamp 88, and the second flange 72c is connected to the downstream end 92a of the cleaning liquid supply pipe 92 using a second clamp 90.

[0066] With the first flange 72b connected to the open end 48b of the cleaning device nozzle 48, the spraying portions 70a to 70d of the cleaning device 28 are directed toward the rotation shaft 54a of the agitating blade 54 shown in FIG. 1. That is, the reference lines E (FIG. 3(A)) of the spraying portions 70a to 70d and the rotation shaft 54a are arranged along the same imaginary plane (not shown). Therefore, the fan-shaped surface of the cleaning liquid K sprayed from the spraying portions 70a to 70d and the rotation shaft 54a are arranged along the same imaginary plane, and the cleaning liquid K can be applied linearly to the rotation shaft 54a.

[0067] 1, the cleaning liquid supply pipe 92 is provided with a pump 94 for supplying the cleaning liquid K to the cleaning device 28. The control unit 30 is electrically connected to the pump 94, and the pump 94 is driven or stopped in response to a control signal given from the control unit 30.

[0068] The control unit 30 is a device that controls each electrical device for operating the processing device 10, and is configured by a microcomputer (not shown) that includes a CPU, ROM, RAM, etc. The ROM stores operation programs for each electrical device. Note that in Figure 1, the electrical circuit for executing the cleaning process is shown by dashed lines, and electrical circuits for executing other processes are omitted.

[0069] (Operation of the processing apparatus according to the first embodiment) In the processing device 10 shown in FIG. 1, a filtering step, a drying step, a discharging step, and a washing step are carried out in this order.

[0070] In the filtration step, the user puts the material to be treated into the storage space S through the opening 46a of the charging nozzle 46, and then attaches the lid 46b to the charging nozzle 46. The control unit 30 controls the valve device (not shown) of the lifting cylinder 58a to lift the mixing blade 54. It also controls the valve 42 of the discharge pipe 40 to open. It also controls the valve (not shown) of the gas introduction pipe connected to the container body 12 to open. Then, the liquid contained in the material to be treated is discharged through the filter plate 16a and the discharge pipe 40, and the solid matter contained in the material to be treated is deposited on the surface of the filter plate 16a.

[0071] In the drying step, the control unit 30 controls a pump (not shown) to supply hot water to the jacket 14. It also controls a valve device (not shown) of the lifting cylinder 58a to lower the mixing blades 54. It also controls the rotation drive device 56 to rotate the mixing blades 54. As a result, the material to be treated is heated while being mixed, and is efficiently dried.

[0072] In the discharge step, the control unit 30 controls the lid 38a of the discharge port 38 to open. Also, the control unit 30 controls the valve device (not shown) of the tilting cylinder 26a to lift the rear part of the container body 12. Furthermore, the control unit 30 controls the vibration generating unit 18c of the vibration generating unit 18 to be driven, and controls the rotation driving unit 56 to rotate the stirring blades 54. Then, the processed material (solid matter) obtained through the filtration step and the drying step is discharged from the discharge port 38.

[0073] In the cleaning step, the control unit 30 controls the pump 94 to supply cleaning liquid K to the cleaning device 28. It also controls the rotary drive device 56 to rotate the agitating blade 54. It also controls the on-off valve 42 of the discharge pipe 40 to open. Then, the cleaning liquid K is sprayed from the spray units 70a to 70d of the cleaning device 28 toward the inner surface of the container body 12, the drive shaft nozzle 44, and the rotation shaft 54a of the agitating blade 54, thereby cleaning these. The control unit 30 may control the valve device (not shown) of the lifting cylinder 58a to repeatedly move the agitating blade 54 up and down, or may control the valve device (not shown) of the lifting cylinder 58a to gradually move the agitating blade 54 up and down.

[0074] (Effects of the processing apparatus according to the first embodiment) The processing apparatus 10 and cleaning apparatus 28 of the first embodiment can achieve the following effects through their configuration. Specifically, as shown in FIG. 3A, the cleaning liquid K sprayed in a columnar shape from the pair of injection holes 80a, 80b and 84a, 84b collide with each other and spread out in a fan shape. Therefore, by appropriately selecting the position, size, and orientation of each of the pair of injection holes 80a, 80b and 84a, 84b, the injection pattern of the cleaning liquid K can be appropriately determined according to the position and shape of the component. In other words, the degree of freedom in designing the injection pattern of the cleaning liquid K can be increased, allowing the component to be efficiently cleaned. Furthermore, because each of the pair of injection holes 80a, 80b and 84a, 84b can be formed as a through-hole with a simple shape, the injection holes can be easily machined, foreign matter adhesion can be suppressed, and therefore foreign matter contamination can be suppressed.

[0075] 3(A) and 3(B), the injection wall portion 82 in which the pair of injection holes 80a, 80b is formed and the injection wall portion 86 in which the pair of injection holes 84a, 84b is formed are formed to have a constant thickness and to bulge toward the intersection P, so that the lengths of the pairs of injection holes 80a, 80b and 84a, 84b can be made longer compared to when they do not bulge toward the intersection P. Therefore, the injection state (mainly the injection shape) of the cleaning liquid K injected from each of the pairs of injection holes 80a, 80b and 84a, 84b can be stabilized, and the member can be cleaned efficiently.

[0076] 3A, in the third injection part 70c, the first reference plane Q1 and the second reference plane Q2 coincide with each other, so the length of each of the pair of injection holes 80a, 80b is shortest. In the fourth injection part 70d, the first reference plane Q1 and the second reference plane Q2 intersect with each other, so the length of each of the pair of injection holes 84a, 84b can be made longer than when the first reference plane Q1 and the second reference plane Q2 coincide with each other. Therefore, the injection state (mainly the injection shape) of the cleaning liquid injected from each of the pair of injection holes 84a, 84b can be stabilized, and components can be cleaned efficiently.

[0077] The first angle at which the first reference plane Q1 and the second reference plane Q2 intersect in the third sprayer 70c is 0 degrees, and the second angle at which the first reference plane Q1 and the second reference plane Q2 intersect in the fourth sprayer 70d is 30 degrees. These angles are set to be different. This allows for greater freedom in designing the spray pattern of the cleaning liquid K, enabling components to be cleaned efficiently. The first angle and the second angle may be changed as appropriate.

[0078] 2(B), the tapered portion 64d of the cleaning device main body 64 is formed in a conical shape that tapers smoothly without any steps toward the tip, so that the cleaning liquid K adhering to the surface of the cleaning device main body 64 can be made to flow down the surface of the tapered portion 64d and drop from the tip of the tapered portion 64d. Therefore, even if foreign matter adheres to the surface of the cleaning device main body 64, the foreign matter can be efficiently washed away with the cleaning liquid K.

[0079] As shown in FIG. 2(B), the flared portion 64b of the cleaning device main body 64 is formed in a truncated cone shape that flares smoothly toward the tip without any steps. This makes it possible to increase the surface area of ​​the flared portion 64b and the large-diameter cylindrical portion 64c connected to the flared portion 64b, making it easy to form the first injection portion 70a and the second injection portion 70b.

[0080] In the processing device 10, the rotating shaft 54a, which is formed in an elongated shape, is rotated by the rotation drive device 56 (Figure 1) while being cleaned by the cleaning device 28, so that the rotating shaft 54a can be cleaned evenly even when there is only one cleaning device 28.

[0081] (Variation) The present invention is not limited to the above-described embodiment, and various modifications are possible without departing from the object of the present invention.

[0082] Fig. 4(A) is a cross-sectional view showing an ejection section 96 according to a first modified example, and Fig. 4(B) is a cross-sectional view showing an ejection section 98 according to a second modified example. Fig. 5(A) is a cross-sectional view showing an ejection section 100 according to a third modified example, and Fig. 5(B) is an enlarged view of a VB portion in Fig. 5(A).

[0083] As shown in FIG. 3B, in the third sprayer 70c of the above embodiment, the reference line E, which bisects the angle formed by the center lines L1, L2 of the pair of spray holes 80a, 80b, is disposed so as to extend in the thickness direction of the wall portion 74. However, as in the sprayer 96 of a first modified example shown in FIG. 4A, the reference line E, which bisects the angle formed by the center lines L1, L2 of the pair of spray holes 102a, 102b, may be disposed so as to extend in a direction intersecting the thickness direction of the wall portion 74. In other words, when a line segment (not shown) connecting two reference points G1, G2 is bisected and an imaginary line extending in the thickness direction of the wall portion 74 is defined as a direction line X, the reference line E may be disposed so as to extend in a direction intersecting the direction line X. Even in this case, the entire cleaning liquid K can be sprayed in the direction along the reference line E, so that the spray direction of the cleaning liquid K can be adjusted depending on the position of the member to be cleaned.

[0084] As shown in Fig. 3(B), in the third injection section 70c of the above embodiment, the inner diameters of the pair of injection holes 80a, 80b are set to be the same. However, as in an injection section 98 according to a second modified example shown in Fig. 4(B), the inner diameters of the pair of injection holes 104a, 104b may be set to be different. In this case, the cleaning liquid K injected from the injection hole 104a having a larger inner diameter prevails over the cleaning liquid injected from the injection hole 104b having a smaller inner diameter, and therefore the overall injection direction of the cleaning liquid K is biased toward the injection direction of the injection hole 104a with respect to the reference line E. Therefore, the overall injection direction of the cleaning liquid K can be adjusted by adjusting the inner diameters of the pair of injection holes 104a, 104b.

[0085] As shown in Fig. 3(B), in the third injection section 70c of the above embodiment, the injection wall section 82 in which the pair of injection holes 80a, 80b in the wall section 74 are formed is curved in an arc shape so as to bulge toward the intersection P. However, as in an injection section 100 according to a third modified example shown in Figs. 5(A) and (B), an injection wall section 108 in which the pair of injection holes 106a, 106b in the wall section 74 are formed may be curved so as to bulge toward the intersection P. In the injection section 100 according to the third modified example, one injection hole 106a is formed in the base end of the large-diameter cylindrical section 64c, and the other injection hole 106b is formed in the tip end of the diverging section 64b.

[0086] FIG. 6(A) is a perspective view showing the configuration of a cleaning device main body 110 according to a first modified example, FIG. 6(B) is a perspective view showing the configuration of a cleaning device main body 111 according to a second modified example, FIG. 6(C) is a perspective view showing the configuration of a cleaning device main body 112 according to a third modified example, and FIG. 6(D) is a perspective view showing the configuration of a cleaning device main body 114 according to a fourth modified example.

[0087] As shown in FIG. 2B, the cleaning device body 64 of the above embodiment has a small-diameter cylindrical portion 64a, a diverging portion 64b, a large-diameter cylindrical portion 64c, and a tapered portion 64d. However, the shape of the cleaning device body is not limited to this and may be modified as appropriate. For example, the tapered portion 64d may be omitted as in a cleaning device body 110 according to a first modified example shown in FIG. 6A. Alternatively, the large-diameter cylindrical portion 64c may be omitted, and the diverging portion 64b and the tapered portion 64d may be directly connected as in a cleaning device body 111 according to a second modified example shown in FIG. 6B. Furthermore, the portion excluding the small-diameter cylindrical portion 64a may be replaced with a spherical portion 116 as in a cleaning device body 112 according to a third modified example shown in FIG. 6C. Alternatively, the portion excluding the small-diameter cylindrical portion 64a may be replaced with a rectangular or cubic portion 118 as in a cleaning device body 114 according to a fourth modified example shown in FIG. 6D.

[0088] In the above embodiment, the processing device 10 is configured as a filtration / drying device, but the processing device of the present invention does not necessarily have to be configured as a filtration / drying device, and may be configured as, for example, a filtration device without a drying function, or a drying device without a filtration function, or may be configured as a reaction tank for reactively processing the object to be processed.

[0089] FIG. 7 is a cross-sectional view showing the configuration of a processing apparatus according to a second embodiment. The processing apparatus 120 according to the second embodiment is configured as a reaction tank for reactively processing a material to be processed, and includes a container 128 having a container body 122, an agitator 124, a baffle 126, and the above-described cleaning device 28. The agitator 130 constituting the agitator 124 has a rotating shaft 130a. The baffle 126 is a so-called baffle plate for changing the flow of the material to be processed agitated by the agitator 130, and has a baffle body 126a formed in an elongated linear (including rod-like) shape. The rotating shaft 130a of the agitator 130 and the baffle body 126a of the baffle 126 are arranged parallel to each other with a gap therebetween, and the cleaning device 28 is disposed between them. Therefore, the cleaning solution K sprayed from the cleaning device 28 can efficiently clean the rotating shaft 130a and the baffle body 126a.

[0090] In the above embodiment, the rotating shaft 54a, which is a member (object to be cleaned), is rotated by the rotation drive device 56. However, the member rotated by the rotation drive device 56 is not limited to the rotating shaft 54a. For example, the member may be a cylindrical cover member (not shown) disposed around the rotating shaft 54a to protect the rotating shaft 54a. This cover member, like the rotating shaft 54a, is formed in an elongated shape and rotates together with the rotating shaft 54a. Therefore, the processing device 10 can efficiently clean the cover member with the cleaning device 28.

[0091] (Configuration of the pipeline according to the first embodiment) In the above embodiment, the cleaning device 28 is used in the processing device 10, but the cleaning device of the present invention may also be used in a pipeline. Fig. 8 is a cross-sectional view showing the configuration of a pipeline 132 according to the first embodiment.

[0092] 8 includes a main pipe 136 extending in the vertical direction, a first branch pipe 138 and a second branch pipe 140 branching off from a pipe wall 136a of the main pipe 136, and a cleaning device 142 for cleaning the inner surfaces of the first branch pipe 138 and the second branch pipe 140 with cleaning liquid K. Note that the main pipe 136 may be disposed so as to extend in a direction intersecting the vertical direction.

[0093] The main pipe 136 is a straight pipe-shaped member that defines a space U that communicates with the storage space S. A first flange 136b is formed at the lower end of the main pipe 136, and the first flange 136b is connected to the open end 48b of the cleaning device nozzle 48 using a first clamp 144. A second flange 136c is formed at the upper end of the main pipe 136.

[0094] First branch pipe 138 and second branch pipe 140 are provided so that their positions become higher as they move away from main pipe 136. Ends 138a, 140a of first branch pipe 138 and second branch pipe 140 farther from main pipe 136 are closed, and devices 138b, 140b such as pressure sensors and temperature sensors are provided inside these ends.

[0095] The cleaning device 142 comprises a tubular cleaning device main body 146 arranged inside the main pipe 136 and extending in the longitudinal direction of the main pipe 136, a pressure chamber 148 formed inside the cleaning device main body 146, a cleaning liquid supply port 150 provided in the cleaning device main body 146 so as to supply cleaning liquid K to the pressure chamber 148, and two spraying portions 152, 152 provided in the cleaning device main body 146 so as to spray cleaning liquid K toward the inner surfaces of the first branch pipe 138 and the second branch pipe 140, respectively.

[0096] Each of the jetting parts 152, 152 is basically configured in the same way as the fourth jetting part 70d shown in Fig. 3(A), and therefore a duplicated description will be omitted. However, in each of the jetting parts 152, 152, the inclination angle of the first reference plane Q1 with respect to the second reference plane Q2 is determined so that a part of the fan-shaped spray of cleaning liquid K is applied to the vertically upper part in the circumferential direction of the inner surfaces of the first branch pipe 138 and the second branch pipe 140.

[0097] The lower end of the cleaning device main body 146 is closed, and a first flange 146a and a second flange 146b are formed at the upper end of the cleaning device main body 146. The first flange 146a is connected to a second flange 136c of the main pipe 136 using a second clamp 154, and the second flange 146b is connected to the downstream end 92a of the cleaning liquid supply pipe 92 using a clamp 156.

[0098] In this pipeline 132, each of the spraying units 152, 152 is basically configured in the same manner as the fourth spraying unit 70d shown in Fig. 3(A), and therefore, the same effects as those of the processing device 10 can be achieved. In particular, the spraying manner of the cleaning liquid K sprayed from the cleaning device 142 can be appropriately determined according to the position and shape of the inner surfaces of the first branch pipe 138 and the second branch pipe 140.

[0099] Furthermore, cleaning liquid K can be made to flow down the inner surfaces of first branch pipe 138 and second branch pipe 140, thereby efficiently cleaning the inner surfaces. Furthermore, first branch pipe 138 and second branch pipe 140 are arranged so that their positions become higher as they move away from main pipe 136. Therefore, as shown by the white arrows in Figure 8, cleaning liquid K that has flowed down the inner surfaces of first branch pipe 138 and second branch pipe 140 can be discharged by gravity into internal space U of main pipe 136, and foreign matter adhering to the surface of cleaning device body 146 can be washed away by the cleaning liquid K.

[0100] (Configuration of pipeline according to second embodiment) Fig. 9 is a cross-sectional view showing the configuration of a conduit 134 according to the second embodiment. The conduit 132 shown in Fig. 8 is provided with a cleaning device 142 for cleaning the inner surfaces of the first branch pipe 138 and the second branch pipe 140 with cleaning liquid K. However, as in the conduit 134 shown in Fig. 9, the cleaning device 142 may be combined with the cleaning device 28 shown in Figs. 2(A) and (B). In this case, the lower end of a cleaning device main body 146 constituting the cleaning device 142 may be opened, and the cleaning device main body 64 of the cleaning device 28 may be connected to this lower end. The number of branch pipes is not particularly limited, and may be one, as shown in Fig. 9, or three or more. [Explanation of symbols]

[0101] E...reference line, G1, G2...reference point, K...cleaning liquid, L1, L2...center line, M...center axis, P...intersection, Q1...first reference plane, Q2...second reference plane, S...storage space, U...space, X...directional line, 10...processing device, 12...vessel body, 12a...peripheral wall portion, 12b...lower wall portion, 12c...upper wall portion, 14...jacket, 14a...jacket body, 16...filtration portion, 16a...filtration plate, 18...vibration generator, 18a...vibration portion, 18b...vibration axis, 18c...vibration generator portion, 20...agitator, 22...first leg portion, 24...second leg portion, 26...tilt drive portion, 26a...tilting cylinder, 28...cleaning Apparatus, 30...controller, 32...container, 34...supporting part, 36...wall part, 38...discharge port, 38a...lid part, 40...discharge pipe, 42...opening / closing valve, 44...drive shaft nozzle, 46...adding nozzle, 46a...opening, 46b...lid body, 48...cleaning device nozzle, 48a...opening, 48b...opening end, 50...heat medium flow path, 52...flow path, 54...mixing blade, 54a...rotating shaft, 54b...blade member, 56...rotation drive device, 56a...motor, 56b...power transmission mechanism, 58...lifting device, 58a...lifting cylinder, 60...supported part, 62a...cylinder, 62b...piston rod, 64...cleaning device Main body, 64a...small diameter cylindrical portion, 64b...divergent portion, 64c...large diameter cylindrical portion, 64d...tapered portion, 66...pressure chamber, 68...cleaning liquid supply port, 70a...first jet portion, 70b...second jet portion, 70c...third jet portion, 70d...fourth jet portion, 72...connecting pipe, 72a...receiving port, 72b...first flange, 72c...second flange, 74...wall portion, 80a, 80b...jet hole, 82...jet wall portion, 84a, 84b...jet hole, 86...jet wall portion, 88...first clamp, 90...second clamp, 92...cleaning liquid supply pipe, 92a...downstream end portion, 94...pump, 96, 98, 100...jet portion, 102a, 102b... injection holes, 104a, 104b... injection holes, 106a, 106b... injection holes, 108... injection wall portion, 110, 111, 112, 114... cleaning device main body, 116... spherical portion, 118... rectangular parallelepiped or cubic portion, 120... treatment device, 122... container main body, 124... stirring device, 126... baffle, 126a... baffle main body, 128... container, 130... stirring blade, 130a... rotating shaft, 132, 134... pipe line, 136... main pipe, 136a... pipe wall, 136b... first flange, 136c... second flange, 138a, 140a... end portion, 138b,140b...equipment, 138...first branch pipe, 140...second branch pipe, 142...cleaning device, 144...first clamp, 146a...first flange, 146b...second flange, 146...cleaning device body, 148...pressure chamber, 150...cleaning liquid supply port, 152...jet unit, 154...second clamp, 156...clamp.

Claims

1. A cleaning device for cleaning a member with a cleaning liquid, A cleaning device body, a pressure chamber formed inside the cleaning device body; a cleaning liquid supply port provided in the cleaning device body so as to supply a cleaning liquid to the pressure chamber; at least one spray unit provided on the cleaning device body to spray cleaning liquid toward the member; the injection portion is formed in a wall portion of the cleaning device body that constitutes the pressure chamber, and has a pair of injection holes that communicate between a space outside the cleaning device body and the pressure chamber, the pair of injection holes are formed such that their center lines intersect at one intersection so that the cleaning liquid injected in columns from the injection holes collide with each other and spread in a fan shape; a portion of the wall portion where the pair of injection holes are formed has a constant thickness and is formed so as to bulge out towards the intersection side.

2. 2. The cleaning device according to claim 1, wherein an imaginary plane including the center lines of the pair of injection holes is defined as a first reference plane, a point where the center lines of the pair of injection holes intersect with an imaginary outer surface of the wall portion when it is assumed that the injection holes are not formed is defined as a reference point, and an imaginary plane including the two reference points and extending in a thickness direction of the wall portion is defined as a second reference plane, the first reference plane and the second reference plane intersect.

3. A processing apparatus comprising a container having a container body having a storage space for storing an object to be processed and the cleaning device according to claim 1 or 2, The cleaning device main body of the cleaning device is disposed in the accommodation space.

4. A cleaning device for cleaning a member with a cleaning liquid, A cleaning device body, a pressure chamber formed inside the cleaning device body; a cleaning liquid supply port provided in the cleaning device body so as to supply a cleaning liquid to the pressure chamber; at least one spray unit provided on the cleaning device body to spray cleaning liquid toward the member; the injection portion is formed in a wall portion of the cleaning device body that constitutes the pressure chamber, and has a pair of injection holes that communicate between a space outside the cleaning device body and the pressure chamber, the pair of injection holes are formed such that their center lines intersect at one intersection so that the cleaning liquid injected in columns from the injection holes collide with each other and spread in a fan shape; a cleaning device in which an imaginary plane including the center lines of the pair of injection holes is defined as a first reference plane, a point where the center lines of the pair of injection holes intersect with an imaginary outer surface of the wall portion when it is assumed that the injection holes are not formed is defined as a reference point, and an imaginary plane including the two reference points and extending in the thickness direction of the wall portion is defined as a second reference plane, the first reference plane and the second reference plane intersect.

5. a plurality of the spray units provided on the cleaning device body, 5. The cleaning device according to claim 2, wherein a first angle at which the first reference plane and the second reference plane intersect in one of the ejection sections is determined to be different from a second angle at which the first reference plane and the second reference plane intersect in another of the ejection sections.

6. A processing apparatus including a container having a container body having a storage space for storing an object to be processed and the cleaning device according to claim 4 or 5, The cleaning device main body of the cleaning device is disposed in the accommodation space.

7. A pipeline comprising a main pipe, a branch pipe branched from a wall of the main pipe, and a cleaning device for cleaning the inner surface of the branch pipe with a cleaning liquid, The cleaning device includes a tubular cleaning device main body disposed inside the main pipe and extending in the longitudinal direction of the main pipe, a pressure chamber formed inside the cleaning device main body, a cleaning liquid supply port provided in the cleaning device main body to supply cleaning liquid to the pressure chamber, and an injection unit provided in the cleaning device main body to inject cleaning liquid toward the inner surface of the branch pipe, the injection portion is formed in a wall portion of the cleaning device body that constitutes the pressure chamber, and has a pair of injection holes that communicate between a space outside the cleaning device body and the pressure chamber, the pair of injection holes are formed such that their center lines intersect at one intersection so that the cleaning liquid injected in columns from the injection holes collide with each other and spread in a fan shape; The portion of the wall portion where the pair of injection holes are formed has a constant thickness and is formed so as to bulge out towards the intersection.

8. The branch pipes are arranged so that their positions become higher as they move away from the main pipe, When an imaginary plane including the center lines of the pair of injection holes is defined as a first reference plane, a point where each center line of the pair of injection holes intersects with an imaginary outer surface of the wall portion on the assumption that the injection holes are not formed is defined as a reference point, and an imaginary plane including the two reference points and extending in the thickness direction of the wall portion is defined as a second reference plane, 8. The pipeline according to claim 7, wherein the first reference surface is inclined with respect to the second reference surface so that a portion of the fan-shaped cleaning liquid is applied to a vertically upper portion in the circumferential direction of the inner surface of the branch pipe.

9. A pipeline comprising a main pipe, a branch pipe branched from a wall of the main pipe, and a cleaning device for cleaning the inner surface of the branch pipe with a cleaning liquid, The branch pipes are arranged so that their positions become higher as they move away from the main pipe, The cleaning device includes a tubular cleaning device main body disposed inside the main pipe and extending in the longitudinal direction of the main pipe, a pressure chamber formed inside the cleaning device main body, a cleaning liquid supply port provided in the cleaning device main body to supply cleaning liquid to the pressure chamber, and an injection unit provided in the cleaning device main body to inject cleaning liquid toward the inner surface of the branch pipe, the injection portion is formed in a wall portion of the cleaning device body that constitutes the pressure chamber, and has a pair of injection holes that communicate between a space outside the cleaning device body and the pressure chamber, the pair of injection holes are formed such that their center lines intersect at one intersection so that the cleaning liquid injected in columns from the injection holes collide with each other and spread in a fan shape; When an imaginary plane including the center lines of the pair of injection holes is defined as a first reference plane, a point where the center line of the pair of injection holes intersects with an imaginary outer surface of the wall portion on the assumption that the injection holes are not formed is defined as a reference point, and an imaginary plane including the two reference points and extending in the thickness direction of the wall portion is defined as a second reference plane, The first reference surface is inclined with respect to the second reference surface so that a portion of the fan-shaped cleaning liquid is applied to a vertically upper portion in the circumferential direction of the inner surface of the branch pipe.

Images