Dust removing apparatus

Abstract

To provide a dust removing device capable of properly removing dust without damaging an extremely thin film and without sucking the film.SOLUTION: A first member 1 having a curved convex surface 3 and a second member 2 having a curved concave surface 4 corresponding to the curved convex surface 3 are arranged so that the curved convex surface 3 and the curved concave surface 4 are opposed to each other with a minute gap ε. The dust removing device removes dust on the surface of a film 5 by curving and running the belt-like film 5 along a minute gap ε. The first member 1 and the second member 2 are made of a porous member. Air is discharged from the first member 1 and the second member 2 to the film 5 to bring the film 5 into non-contact with the curved convex surface 3 and the curved concave surface 4.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to a dust removal device. [Background technology]

[0002] Conventionally, a dust removal device as shown in FIG. 6 has been used to clean the surface of a substrate 51 such as plastic. Air is ejected toward the substrate 51 as indicated by arrows 57, 57, and dust is sucked in a direction perpendicular to the substrate 51 as indicated by arrow 58. The substrate 51 is held under a large tension T to prevent it from being sucked in the direction of arrow 58. 51 ,T 51 (See, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 9-38608 Summary of the Invention [Problem to be solved by the invention]

[0004] That is, in FIG. 6 showing a conventional example, a suction port (suction slit) 59 is always present in a dust removal device (cleaner head 52) that uses air as a medium. In order to prevent the substrate 51 from being sucked by the suction port (suction slit) 59 (in the direction of the arrow 58), a (metallic) backup roll 60 is provided as shown in FIG. 6, and a large tension T 51 ,T 51 had to be added.

[0005] However, functional films, such as optical films used to expand the field of view of smartphones and prevent light reflection, are becoming thinner, and products with thicknesses of 10 μm or less are currently being produced. As the film becomes thinner, its strength also decreases, making it impossible to apply a large amount of tension. Furthermore, the film passes through several metal rolls before being wound up, and the rotational resistance and frictional resistance of the metal rolls require additional tension.

[0006] That is, when removing dust from thin films with a thickness of 10 μm or less using conventional dust removal devices, there was a problem that the film would be damaged if the tension was too high, and the film would be sucked in if the tension was too low.

[0007] Therefore, an object of the present invention is to provide a dust remover that can properly remove dust from thin films (e.g., 10 μm thick) without damaging the film or causing the film to be sucked in. In particular, an object of the present invention is to provide a dust remover that can properly remove dust from both sides of the film at curved portions (direction change portions) of the film. [Means for solving the problem]

[0008] The dust remover according to the present invention is a dust remover that includes a first member having a curved convex surface and a second member having a curved concave surface corresponding to the curved convex surface, with the curved convex surface and the curved concave surface facing each other with a small gap between them, and that removes dust from the surface of a strip-shaped film by running the film in a curved manner along the small gap, and the first member and the second member are made of porous members, and air is ejected from the first member and the second member onto the film to move the film in a curved manner away from the curved convex surface and the curved concave surface. The first member has a first discharge slit in the center of the curved convex surface, and the second member has a second discharge slit in the center of the curved concave surface, and air is ejected from the first discharge slit and the second discharge slit in a direction perpendicular to the surface of the film, and there are no suction ports for sucking air on the film running surfaces of the first member and the second member, so that air is discharged into the external space through the minute gap.

[0009] The air discharged from the minute gap is sucked in the width direction of the strip-shaped film. [Effects of the Invention]

[0010] The dust removal device of the present invention can remove dust from a thin film (e.g., 10 μm thick) as a substrate to be removed without damaging the film or causing it to be sucked in. In particular, dust can be removed from both sides of the thin film at the curved portion (direction change portion) of the film. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a front view showing an embodiment of the present invention; [Figure 2] FIG. [Figure 3] FIG. [Figure 4] FIG. 2 is an enlarged view of the cross section AA of FIG. [Figure 5] FIG. [Figure 6] FIG. 10 is a cross-sectional view showing a conventional example. DETAILED DESCRIPTION OF THE INVENTION

[0012] The present invention will be described in detail below based on the illustrated embodiments. 1 to 5 show an embodiment of the present invention. A first member 1 having a curved convex surface 3 and a second member 2 having a curved concave surface 4 corresponding to the curved convex surface 3 are disposed with a minute gap ε between the curved convex surface 3 and the curved concave surface 4. A strip-shaped film 5 (as a substrate to be dust-removed) is curved and travels along the minute gap ε, and dust is removed from the surfaces (both the front and back surfaces) of the film 5.

[0013] The first member 1 and the second member 2 are made of a porous material. This porous material has a large number of interconnected micropores, such as porous ceramic. The micropores have a maximum diameter of, for example, 2 to 3 microns. The front and rear surfaces of each of the first member 1 and the second member 2 are coated with an air leakage sealing coating layer 21 (see FIG. 5). Air is discharged from the first member 1 and the second member 2 onto the film 5 to keep the film 5 out of contact with the curved convex surface 3 and the curved concave surface 4. Because the first member 1 and the second member 2 are porous, the air is discharged evenly, ensuring that the film 5 is kept out of contact with the curved convex surface 3 and the curved concave surface 4.

[0014] The first member 1 has a first discharge slit 7 in the center of the curved convex surface 3, and the second member 2 has a second discharge slit 8 in the center of the curved concave surface 4, and is configured so that air is ejected from the first discharge slit 7 and the second discharge slit 8 in a direction perpendicular to the surface of the film 5 (as a high-speed air stream for dust removal).

[0015] There are no suction ports for sucking air on the film running corresponding surfaces 9 of the first member 1 and the second member 2, and the air is discharged to the external space 10 through the minute gap ε. The air discharged from the minute gap ε is configured to be sucked in the width direction of the strip-shaped film 5.

[0016] The first member 1 and the second member 2 are long bodies and are disposed inside an elongated box body 11. A plurality of air supply ducts 12 are connected to an upper wall 18 and a lower wall 19 of the box body 11. An exhaust duct 13 is connected to a side wall 20 of the box body 11.

[0017] Reference numeral 14 denotes a high-pressure air supply port. A plurality of T-shaped pipe fittings 15 are arranged inside the box body 11. The high-pressure air supply ports 14 and the T-shaped pipe fittings 15 are connected in communication with each other by piping 16. One end of the T-shaped pipe fittings 15 opens to a chamber 17.

[0018] Next, we will explain the air flow. Air is sent from a blower (not shown) to the first discharge slit 7 and the second discharge slit 8, and high-pressure air is sent from a compressor to the first member 1 and the second member 2. Compressed dry air (CDA) is preferably used as the high-pressure air from the compressor to the first member 1 and the second member 2. This configuration allows a sufficient flow rate of air to be supplied to the first discharge slit 7 and the second discharge slit 8, and allows the air (CDA) to be discharged from the first member 1 and the second member 2 to the film 5 at an appropriate pressure.

[0019] Specifically, as shown by arrows Y1 and Y2, air is supplied from the blower through air supply duct 12 to the first discharge slit 7 and second discharge slit 8, and the air is then blown out from the first discharge slit 7 and second discharge slit 8 onto the film 5. Dust is then removed from the surface of the film 5.

[0020] On the other hand, as shown by arrows Y3, Y4, Y5, and Y6, high-pressure air is supplied from the compressor to the first member 1 and the second member 2 via the high-pressure air supply port 14, the pipe 16, the T-shaped pipe joint 15, and the chamber 17, and the air that has passed through the first member 1 and the second member 2 is discharged onto the film 5 as shown by arrow Y7.

[0021] Both the air from the blower and the air from the compressor are exhausted from the minute gap ε to the external space 10 as shown by arrow Y8 (see FIG. 5). Then, as shown by Y9, the air is sucked out of the box 11 through the exhaust duct 13 that communicates with the external space 10 (see FIG. 1).

[0022] The dust particles removed from the surface of the film 5 by the air ejected onto the film 5 from the first discharge slit 7 and the second discharge slit 8 are carried along with the air flow and discharged to the outside through the exhaust duct 13.

[0023] The ultimate pressure of the air (CDA) from the first member 1 and the second member 2 to the film 5 is set to 100 kPa to 700 kPa. When the ultimate pressure is within this range, air can be appropriately discharged from the first member 1 and the second member 2 to the film 5, and the film 5 can be kept out of contact with the first member 1 and the second member 2. When the ultimate pressure is less than 100 kPa, the pressure of the air discharged from the first member 1 and the second member 2 to the film 5 is low, and the film 5 cannot be appropriately kept out of contact with the first member 1 and the second member 2. When the ultimate pressure exceeds 700 kPa, the pressure of the air discharged from the first member 1 and the second member 2 to the film 5 is too high, causing the film 5 to flutter and come into contact with the first member 1 and the second member 2, which may result in damage.

[0024] The present invention is subject to design modifications, and the entire dust removal device may be used in a different orientation from that described above. For example, it may be used by tilting it 90 degrees sideways.

[0025] As described above, the present invention provides a dust removal device that includes a first member 1 having a curved convex surface 3 and a second member 2 having a curved concave surface 4 corresponding to the curved convex surface 3, with the curved convex surface 3 and the curved concave surface 4 facing each other with a minute gap ε between them, and that removes dust from the surface of a strip-shaped film 5 by running the film 5 in a curved manner along the minute gap ε, wherein the first member 1 and the second member 2 are made of porous members, and air is ejected from the first member 1 and the second member 2 onto the film 5 to prevent the film 5 from coming into contact with the curved convex surface 3 and the curved concave surface 4, and However, the curved convex surface 3 has a first discharge slit 7 in the center, and the second member 2 has a second discharge slit 8 in the center of the curved concave surface 4. Air is ejected from the first discharge slit 7 and the second discharge slit 8 in a direction perpendicular to the surface of the film 5. Furthermore, the film running surfaces 9 of the first member 1 and the second member 2 do not have suction ports for sucking air, and the air is discharged into the external space 10 through the minute gap ε. This ensures reliable dust removal without damaging the film 5 or sucking (contacting) the film 5. In particular, dust removal can be performed appropriately and reliably on both sides of the film 5 at curved portions (direction change portions) of the film 5. This method can also be applied to thin films 5 (e.g., 10 μm). Furthermore, because the film 5 runs in a curved manner, the film 5 does not flap when air is ejected, allowing dust removal while the film 5 runs stably.

[0026] Furthermore, the air discharged from the minute gap ε is sucked in the width direction of the strip-shaped film 5, so the film 5 is not sucked in and can be fed with weak tension, thereby reliably preventing damage to the ultra-thin film 5. [Explanation of symbols]

[0027] 1 First member 2 Second member 3 Curved convex surface 4 Curved concave surface 5 Film 7 First discharge slit 8 Second discharge slit 9 Film running surface 10. Exterior Space ε Micro gap

Claims

1. A dust removal device comprising: a first member (1) having a curved convex surface (3); and a second member (2) having a curved concave surface (4) corresponding to the curved convex surface (3), the curved convex surface (3) and the curved concave surface (4) being arranged opposite each other with a minute gap (ε); and a strip-shaped film (5) being made to travel in a curved manner along the minute gap (ε) to remove dust from the surface of the film (5), The first member (1) and the second member (2) are made of porous materials, Air is ejected from the first member (1) and the second member (2) onto the film (5) to keep the film (5) out of contact with the curved convex surface (3) and the curved concave surface (4), The dust removal device is characterized in that the first member (1) has a first discharge slit (7) in the center of the curved convex surface (3), and the second member (2) has a second discharge slit (8) in the center of the curved concave surface (4), and air is ejected from the first discharge slit (7) and the second discharge slit (8) in a direction perpendicular to the surface of the film (5), and there are no suction ports for sucking air in the film running corresponding surfaces (9) of the first member (1) and the second member (2), and the air is discharged to the external space (10) through the minute gap (ε).

2. 2. The dust removal device according to claim 1, wherein the air discharged from the minute gap (ε) is sucked in the width direction of the strip-shaped film (5).

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