On / off switching circuit
The on/off switching circuit with synchronized FETs and bias voltage circuits addresses the challenge of controlling AC power in semiconductor manufacturing, ensuring efficient and reliable switching of large AC voltages.
JP2026011899APending Publication Date: 2026-01-23DAIHEN CORP
Patent Information
- Application Number
- JP2024112872
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2024-07-12
- Publication Date
- 2026-01-23
Smart Images
Figure 2026011899000001_ABST
Abstract
To provide an on / off switching circuit capable of turning on / off the output of AC power by simple control.SOLUTION: A filter circuit 130 between a first circuit 110 having FETs 112, connected in series and turned on / off synchronously and a second circuit 120 applying a bias voltage to the FETs includes a first filter section 131 having an inductor FET111 and a capacitor 131a, and a second filter section 132 having an inductor 131b and a capacitor 132a. 132b. A connection point 131a between the inductor 131b and the capacitor P4 is connected to the second circuit 120 via the inductor 133, a connection point 132a between the inductor 132b and the capacitor P7 is connected to the second circuit 120 via the inductor 134, and the other end of the first filter 131 on the capacitor 131b side and the other end of the second filter 132 on the capacitor 132b side are connected to the reference potential line Lref via the inductor 135.SELECTED DRAWING: Figure 1
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Citation Information
Patent Citations
Switching circuit
JP1994085643A