Bernoulli chuck

Abstract

To provide an excellent Bernoulli chuck SOLUTION: The Bernoulli chuck 12 includes a first flat plate-like portion 181 in which a first annular groove 22 communicating with an air supply port portion and forming a first flow path 24 that is an annular flow path is formed, a second flat plate-like portion 182 in which one or more second flow paths 28 communicating with the first annular groove are formed, and a third flat plate-like portion 183 in which a plurality of discharge grooves 34 communicating with the second flow paths are formed. The third flat plate-like part is stored in a circular recessed part 26 formed in the second flat plate-like part, and the plurality of delivery grooves communicate with a second annular groove 32 formed by the second flat plate-like part and the third flat plate-like part.SELECTED DRAWING: Figure 9

Description

[Technical Field]

[0001] The present disclosure relates to Bernoulli chucks. [Background technology]

[0002] Japanese Patent Application Laid-Open Publication No. 2015-126174 discloses a substrate holding device, which is a Bernoulli chuck, that uses the Bernoulli effect to attract an object to be sucked. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2015-126174 Summary of the Invention [Problem to be solved by the invention]

[0004] Recently, there has been a desire for a better Bernoulli chuck.

[0005] The present disclosure aims to solve the above-mentioned problems. [Means for solving the problem]

[0006] One aspect of the present disclosure is a Bernoulli chuck comprising: a first flat plate portion having an air intake port portion to which compressed air is supplied; and a first annular groove formed in the first flat plate portion, the first annular groove communicating with the air intake port portion and forming a first flow path that is an annular flow path; a second flat plate portion having one or more second flow paths that are through holes communicating with the first annular groove; and a third flat plate portion having a plurality of discharge grooves formed in the second flow path that discharge the compressed air supplied to the air intake port portion radially outward, wherein the second flat plate portion has a surface extending from the first flat plate portion toward the second flat plate portion and a circular recess formed in the surface, the third flat plate portion being accommodated in the recess, and the plurality of discharge grooves communicating with the second annular groove formed by the second flat plate portion and the third flat plate portion. [Effects of the Invention]

[0007] According to the present disclosure, a better Bernoulli chuck is provided. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a perspective view showing a chuck according to an embodiment. [Figure 2] FIG. 2 is an exploded perspective view of the chuck shown in FIG. [Figure 3] FIG. 3 is a perspective view of a Bernoulli chuck provided in the chuck. [Figure 4] FIG. 4 is another perspective view of the Bernoulli chuck. [Figure 5] FIG. 5 is an exploded perspective view of the Bernoulli chuck. [Figure 6] FIG. 6 is another exploded perspective view of the Bernoulli chuck. [Figure 7] FIG. 7 is a plan view of the Bernoulli chuck. [Figure 8] FIG. 8 is a cross-sectional view of a Bernoulli chuck. [Figure 9] FIG. 9 is a partially enlarged view of FIG. [Figure 10] FIG. 10 is a cross-sectional view of a Bernoulli chuck. [Figure 11] FIG. 11 is a bottom view of the chuck. [Figure 12] FIG. 12 is a cross-sectional view of the chuck. [Figure 13] FIG. 13 is an exploded perspective view of a chuck according to the first modification. [Figure 14] FIG. 14 is a diagram illustrating a chuck according to the third modification. [Figure 15] FIG. 15 is an exploded perspective view showing a chuck according to the fourth modification. [Figure 16] FIG. 16 is a top view of a chuck according to the fourth modification. [Figure 17] FIG. 17 is a cross-sectional view of a chuck according to the fourth modification. [Figure 18] FIG. 18 is a cross-sectional view of a chuck according to the fourth modification. DETAILED DESCRIPTION OF THE INVENTION

[0009] The prior art including the one disclosed in JP 2015-126174 A has at least the following problems: That is, there is room for improvement in terms of reducing the thickness, weight, cost, etc. of the Bernoulli chuck.

[0010] Based on the above preliminary explanation, one embodiment will be described below.

[0011] (One embodiment) Fig. 1 is a perspective view showing a chuck 10 according to one embodiment. Fig. 2 is an exploded perspective view of the chuck 10 shown in Fig. 1.

[0012] The chuck (suction chuck, suction system) 10 is a system for holding an object to be sucked (not shown). The chuck 10 is applied, for example, to a non-contact transport device that holds and transports an object to be sucked. The object to be sucked is, for example, a panel, a wafer, etc., but is not limited to these. The panel is, for example, a solar panel (solar cell), but is not limited to these. As shown in FIGS. 1 and 2, the chuck 10 includes a Bernoulli chuck 12 and a suction support device 14.

[0013] Fig. 3 is a perspective view of the Bernoulli chuck 12 provided in the chuck 10. Fig. 4 is another perspective view of the Bernoulli chuck 12. Fig. 5 is an exploded perspective view of the Bernoulli chuck 12. Fig. 6 is another exploded perspective view of the Bernoulli chuck 12. Fig. 7 is a plan view of the Bernoulli chuck 12. The anti-slip portion 16 is omitted in Figs. 3 to 7.

[0014] The Bernoulli chuck 12 includes a plurality of flat plate-shaped portions 18 and an anti-slip portion 16. The plurality of flat plate-shaped portions 18 include a first flat plate-shaped portion 181, a second flat plate-shaped portion 182, and a third flat plate-shaped portion 183. The second flat plate-shaped portion 182 is disposed between the first flat plate-shaped portion 181 and the third flat plate-shaped portion 183. Each of the first flat plate-shaped portion 181, the second flat plate-shaped portion 182, and the third flat plate-shaped portion 183 may be formed by a flat plate-shaped portion. That is, the first flat plate-shaped portion 181, the second flat plate-shaped portion 182, and the third flat plate-shaped portion 183 may be separate from one another. In this case, the first flat plate portion 181, the second flat plate portion 182, and the third flat plate portion 183 are connected by a plurality of fastening members 48. Each of the plurality of fastening members 48 is, for example, a screw, a bolt, or the like.

[0015] The first flat plate portion 181 has a surface S11 and an air intake port 20. The surface S11 is a surface in a first direction D1. The first direction D1 is a direction from the second flat plate portion 182 to the first flat plate portion 181 along the axial direction DA, which is the direction in which the multiple flat plate portions 18 are stacked. In other words, the surface S11 is the surface of the first flat plate portion 181 opposite to the second flat plate portion 182. The air intake port 20 is a port that opens in the surface S11. A supply source (not shown) that supplies compressed air is connected to the air intake port 20. The air intake port 20 may be connected to the supply source via a joint member 501 that connects the air intake port 20 to the supply source.

[0016] The first flat plate-shaped portion 181 further has a surface S12 and a first annular groove 22. The surface S12 is a surface facing the second direction D2. The second direction D2 is opposite to the first direction D1. The surface S12 contacts the second flat plate-shaped portion 182, which will be described later. The first annular groove 22 is a groove formed in the surface S12. In a plan view, the first annular groove 22 is annular (see also FIG. 6). In a plan view, the first annular groove 22 may be located relatively radially outward of the first flat plate-shaped portion 181. The first annular groove 22 faces the second direction D2. In other words, the first annular groove 22 is recessed in the first direction D1. A radial direction DR of the first annular groove 22 and a circumferential direction DC of the first annular groove 22 are each perpendicular to the axial direction DA.

[0017] The air intake port 20 penetrates the first flat plate portion 181 along the axial direction DA from the surface S11 to the first annular groove 22. Therefore, the air intake port 20 and the first annular groove 22 communicate with each other.

[0018] The first flat plate-shaped portion 181 has an annular shape in a plan view. For example, the first flat plate-shaped portion 181 has an annular shape that is concentric with the first annular groove 22. The first flat plate-shaped portion 181 may include one or more connecting portions 52 for connecting to an external device.

[0019] The negative pressure release port 30 is located radially inward of the inner circumferential end of the first flat plate portion 181. The negative pressure release port 30 will be described in more detail later.

[0020] The second flat plate-shaped portion 182 has a disk shape. The radial direction of the second flat plate-shaped portion 182 coincides with the radial direction DR of the first annular groove 22. The circumferential direction of the second flat plate-shaped portion 182 coincides with the circumferential direction DC of the first annular groove 22. The second flat plate-shaped portion 182 also has a surface S21. The surface S21 is a surface facing the first direction D1. The surface S21 is in contact with the surface S12 of the first flat plate-shaped portion 181. The surface S21 also covers the first annular groove 22 formed in the first flat plate-shaped portion 181. This forms a first flow path 24. The first flow path 24 is an annular flow path defined by the first annular groove 22 and the surface S21. Compressed air is supplied to the first flow path 24 via the air supply port 20 described above.

[0021] The second flat plate portion 182 further has a surface S22 and a recess 26. The surface S22 is a surface in the second direction D2. The recess 26 is formed on the surface S22. In a cross-sectional view, the recess 26 is recessed in the first direction D1. In a plan view, the recess 26 has a circular shape. The radial direction of the recess 26 coincides with the radial direction of the second flat plate portion 182. The circumferential direction of the recess 26 coincides with the circumferential direction of the second flat plate portion 182.

[0022] Fig. 8 is a cross-sectional view of the Bernoulli chuck 12. Fig. 8 shows a cross section taken along line VIII-VIII (chain line) in Fig. 7. Fig. 9 is an enlarged view of a portion of Fig. 8.

[0023] The recess 26 has an outer wall portion 26w, a bottom surface 26b, and an inner wall portion 26i. The outer wall portion 26w is a wall portion on the radially outer side of the recess 26. The outer wall portion 26w extends along the axial direction DA. The outer wall portion 26w may extend parallel to the axial direction DA. The bottom surface 26b is preferably a flat surface. In this case, the in-plane direction of the bottom surface 26b is preferably perpendicular to the axial direction DA. In this case, the in-plane direction of the bottom surface 26b may be parallel to the radial direction of the recess 26. The inner wall portion 26i is an annular wall portion surrounding the bottom surface 26b. The inner wall portion 26i has an inclined surface 26s. The inclined surface 26s is inclined from the bottom surface 26b toward the radially outer side of the recess 26. Therefore, the diameter of the recess 26 increases along the second direction D2. That is, the inner diameter of recess 26 increases from bottom surface 26b toward open end 26t of recess 26. It is preferable that the inner diameter of at least the portion of recess 26 that forms second annular groove 32 increases along second direction D2. The second annular groove 32 will be described in more detail below.

[0024] The inclined surface 26s may be a flat surface, but preferably has a curved surface. In other words, the gradient of the inclined surface 26s with respect to the bottom surface 26b may be constant in a cross-sectional view, but preferably gradually changes along the second direction D2. More specifically, as shown in FIG. 9, the inclined surface 26s preferably has a first curved surface 26s1 and a second curved surface 26s2.

[0025] The first curved surface 26s1 extends in the second direction D2 from the bottom surface 26b. The gradient of the first curved surface 26s1 with respect to the bottom surface 26b gradually increases along the second direction D2. In other words, the first curved surface 26s1 curves to form a gentle convex shape in the first direction D1 in a cross-sectional view.

[0026] The second curved surface 26s2 extends in the second direction D2 from an end T26s1 of the first curved surface 26s1 in the second direction D2. The gradient of the second curved surface 26s2 with respect to the bottom surface 26b gradually decreases along the second direction D2. In other words, the second curved surface 26s2 curves to form a gentle convex shape in the second direction D2 in a cross-sectional view.

[0027] The second flat plate-shaped portion 182 further has second flow paths 28 (plurality of second flow paths 28). The second flow paths 28 are through holes. The second flow paths 28 penetrate the second flat plate-shaped portion 182 along the axial direction DA. The second flow paths 28 communicate with the recessed portion 26 and the first flow path 24 described above. Therefore, the compressed air supplied to the first flow path 24 can reach the recessed portion 26 via the second flow paths 28.

[0028] The plurality of second flow paths 28 are arranged, for example, along the circumferential direction of the recess 26. The plurality of second flow paths 28 may be arranged along the circumferential direction based on a predetermined pattern. For example, the plurality of second flow paths 28 may be arranged at equal intervals along the circumferential direction.

[0029] The second flat plate-shaped portion 182 further has a negative pressure release port 30. The negative pressure release port 30 penetrates the second flat plate-shaped portion 182 along the axial direction DA. The negative pressure release port 30 is formed radially inward of the plurality of second flow paths 28.

[0030] The third flat plate-shaped portion 183 has an annular shape. The radial direction of the third flat plate-shaped portion 183 matches the radial direction of the recessed portion 26. The circumferential direction of the third flat plate-shaped portion 183 matches the circumferential direction of the recessed portion 26. The third flat plate-shaped portion 183 is housed in the recessed portion 26 formed in the second flat plate-shaped portion 182. The third flat plate-shaped portion 183, together with the second flat plate-shaped portion 182 (recessed portion 26), forms a second annular groove 32 inside the recessed portion 26.

[0031] The thickness D183 of the third flat plate-shaped portion 183 may be equal to or less than the depth D26 of the recess 26 of the second flat plate-shaped portion 182 (D183≦D26). As shown in FIG. 9, the thickness D183 of the third flat plate-shaped portion 183 and the depth D26 of the recess 26 of the second flat plate-shaped portion 182 may be equal (D183=D26). The thickness D183 of the third flat plate-shaped portion 183 is the dimension of the third flat plate-shaped portion 183 in the axial direction DA. The depth D26 of the recess 26 is the dimension of the recess 26 in the axial direction DA.

[0032] The third flat plate portion 183 accommodated in the recess 26 may be in contact with the bottom surface 26b of the recess 26. In this state, the thickness D183 of the third flat plate portion 183 and the depth D26 of the recess 26 are equal, and therefore the third flat plate portion 183 does not protrude from the recess 26 in the second direction D2.

[0033] The third flat plate portion 183 has a surface S31, an outer circumferential edge 183t1, and a plurality of discharge grooves 34. The surface S31 is a surface facing the first direction D1. The outer circumferential edge 183t1 is an end portion on the radially outer side of the third flat plate portion 183. Each of the plurality of discharge grooves 34 is a groove formed in the surface S31.

[0034] The plurality of discharge grooves 34 are arranged along the circumferential direction of the third flat plate-shaped portion 183. The plurality of discharge grooves 34 communicate with each of the plurality of second flow paths 28. In a plan view, the positions of the plurality of discharge grooves 34 and the positions of the plurality of second flow paths 28 may overlap. This allows the plurality of discharge grooves 34 to communicate with each of the plurality of second flow paths 28.

[0035] Each of the plurality of discharge grooves 34 extends along the radial direction of the third flat plate-shaped portion 183. Each of the plurality of discharge grooves 34 extends to the outer circumferential end 183t1. Each of the plurality of discharge grooves 34 opens at the outer circumferential end 183t1. By opening at the outer circumferential end 183t1, each of the plurality of discharge grooves 34 communicates with the second annular groove 32 described above. As a result, the plurality of second flow paths 28 and the second annular groove 32 communicate with each other via the plurality of discharge grooves 34.

[0036] 10 is a cross-sectional view of the Bernoulli chuck 12. A part of the cross section taken along line XX in FIG. 9 is shown in FIG.

[0037] 10, the shape of the discharge groove 34 when viewed in the radial direction may be an arc. More specifically, the shape of the discharge groove 34 when viewed in the radial direction of the third flat plate-shaped portion 183 may be an arc that curves so as to recess in the second direction D2. The discharge groove 34 and the surface S22 of the second flat plate-shaped portion 182 that covers the discharge groove 34 form a nozzle 36 that discharges compressed air. The plurality of discharge grooves 34 are covered by the surface S22, thereby forming a plurality of nozzles 36.

[0038] Each of the plurality of nozzles 36 can discharge the compressed air supplied to the plurality of second flow paths 28 radially outward from the third flat plate-shaped portion 183. In other words, each of the plurality of nozzles 36 can discharge the compressed air supplied to the plurality of second flow paths 28 into the second annular groove 32. When the compressed air is discharged from the plurality of nozzles 36, a negative pressure due to the Bernoulli effect is generated in the inner region of the recess 26. This negative pressure acts on the object to be suctioned as a suction force that sucks the object in the first direction D1. The inner region of the recess 26 is a spatial region located inward from the recess 26. The inner region of the recess 26 includes a spatial region located further in the second direction D2 than the third flat plate-shaped portion 183.

[0039] The radially inner side of each of the plurality of discharge grooves 34 (plurality of nozzles 36) is closed, so that the compressed air supplied to the plurality of discharge grooves 34 is more reliably discharged radially outward (to the second annular groove 32).

[0040] In the following description, the spatial region where negative pressure is generated by the Bernoulli chuck 12 is also referred to as a negative pressure region VA (see FIG. 8) for convenience. In a plan view, this negative pressure region VA may include the inner region of the recess 26 described above. Therefore, the negative pressure region VA may include the opening region 183i (see FIGS. 4 and 8). In a plan view, the opening region 183i is a region formed by the annular third flat plate portion 183.

[0041] The above-mentioned negative pressure release port 30 is located in the recess 26. In this case, the negative pressure release port 30 may be located radially inward of the outer circumferential end 183t1 of the third flat plate-shaped portion 183 having an annular shape.

[0042] A negative pressure destruction device (vacuum destruction device) (not shown) is connected to the negative pressure destruction port 30. The negative pressure destruction device is provided, for example, on the surface S21. As a result, the negative pressure destruction port 30 is connected to the negative pressure destruction device on the surface S21 side. The negative pressure destruction device may be connected to the negative pressure destruction port 30 via a joint member 502 provided on the surface S21.

[0043] The negative pressure release device is provided with, for example, a valve for controlling the supply and cut-off of air to the negative pressure release port 30. When the valve is opened, air is supplied to the above-mentioned negative pressure area VA via the negative pressure release port 30. This allows the negative pressure to approach atmospheric pressure (for example, standard atmospheric pressure). When the negative pressure approaches atmospheric pressure, the above-mentioned suction force weakens.

[0044] The negative pressure release device, the coupling member 502, or the negative pressure release port 30 may be provided with an air pressure sensor (not shown). The air pressure sensor is a sensor that detects the air pressure inside the negative pressure release port 30. When negative pressure is generated in the negative pressure area VA, the negative pressure is also applied to the negative pressure release port 30. The air pressure sensor can output a detection signal according to the magnitude of the negative pressure applied to the negative pressure release port 30. This makes it possible to detect the presence or absence of an object to be sucked (not shown).

[0045] The Bernoulli chuck 12 may further include a plurality of seal members 38. The plurality of seal members 38 are appropriately provided in the Bernoulli chuck 12 to prevent compressed air from leaking between the first flat plate portion 181 and the second flat plate portion 182. The plurality of seal members 38 include, for example, a first seal member 381 and a second seal member 382. Each of the first seal member 381 and the second seal member 382 is an O-ring (annular packing). The first seal member 381 and the second seal member 382 are provided in the first flat plate portion 181, but may also be provided in the second flat plate portion 182.

[0046] The first seal member 381 surrounds the first flow path 24 (first annular groove 22) in plan view. The first seal member 381 prevents the compressed air supplied to the first flow path 24 from leaking radially outward beyond the first seal member 381. In contrast, the second seal member 382 is surrounded by the first flow path 24 (first annular groove 22) in plan view. The second seal member 382 prevents the compressed air supplied to the first flow path 24 from leaking radially inward beyond the second seal member 382.

[0047] FIG. 11 is a bottom view of the chuck 10.

[0048] The anti-slip portion 16 includes an anti-slip member 40 and a flat plate portion 42. The anti-slip member 40 comes into contact with the object to be sucked by the negative pressure. This prevents the object from being excessively displaced. For example, the anti-slip member 40 prevents the object to be sucked by the negative pressure from sliding or rotating. The anti-slip member 40 may be made of a resin material such as rubber. At least a portion of the anti-slip member 40 (first partial anti-slip member 40a) is provided on the flat plate portion 42. However, a portion of the anti-slip member 40 (second partial anti-slip member 40b) may be provided on the third flat plate portion 183. In other words, the anti-slip member 40 may include the first partial anti-slip member 40a provided on the flat plate portion 42 and the second partial anti-slip member 40b provided on the third flat plate portion 183. The second partial anti-skid member 40b may have an annular or arcuate shape corresponding to the shape (annular) of the third flat plate-shaped portion 183. A plurality of second partial anti-skid members 40b having an arcuate shape may be provided on the third flat plate-shaped portion 183.

[0049] It is preferable that slit portions 44 are formed in the anti-slip member 40 in correspondence with the above-mentioned plurality of discharge grooves 34 (plurality of nozzles 36). This reduces the effect of the anti-slip member 40 on the flow of compressed air discharged from the plurality of discharge grooves 34. As a result, the risk that the anti-slip member 40 will inhibit the manifestation of the above-mentioned Bernoulli effect is reduced.

[0050] The slit section 44 has a plurality of first slits 441. The plurality of first slits 441 are a plurality of slits located radially outward of the plurality of discharge grooves 34, respectively.

[0051] In a plan view, each of the multiple first slits 441 is formed along an imaginary line LV that is an imaginary line extending from the corresponding discharge groove 34 in the longitudinal direction (radial direction DR) of the discharge groove 34. Each of the multiple first slits 441 extends along the radial direction DR to the outer end of the anti-slip member 40. In other words, each of the multiple first slits 441 extends along the radial direction DR from the outer end of the anti-slip member 40 toward the radially inward direction.

[0052] The slit portion 44 may have a second slit 442. In a plan view, the second slit 442 is an annular slit that overlaps with the second annular groove 32. The second slit 442 may be connected to a plurality of the first slits 441.

[0053] The slit portion 44 may further include a third slit 443. The third slit 443 is a slit that connects the second slit 442 with a first communication opening 541, which will be described later. The anti-slip member 40 may have a plurality of third slits 443 formed therein.

[0054] The slit portion 44 may further include a fourth slit 444. The fourth slit 444 is a slit that is formed to extend from a second communication opening 542 (described later) along the radial direction of the second annular groove 32 to the outer end of the anti-slip member 40. The anti-slip member 40 may have a plurality of fourth slits 444 formed therein.

[0055] The anti-slip member 40 further has a plurality of communication openings 54. The plurality of communication openings 54 include a first communication opening 541 and a second communication opening 542. The first communication opening 541 is an opening that communicates with a first opening 461 (described later) and exposes the negative pressure area VA (opening area 183i) in a plan view. The first communication opening 541 has, for example, a circular shape. The second communication opening 542 is an opening that communicates with the second opening 462 and exposes the entire suction unit 14v of the suction assistance device 14. The second opening 462 and the suction assistance device 14 will be described in more detail later. The anti-slip member 40 may have a plurality of second communication openings 542 formed therein, each corresponding to a corresponding one of the plurality of second openings 462.

[0056] The plurality of communication openings 54 may further include a third communication opening 543. The third communication opening 543 is an opening that communicates with a third opening 463, which will be described later. The anti-slip member 40 may be formed with a plurality of third communication openings 543 corresponding to the plurality of third openings 463, respectively.

[0057] The flat plate portion 42 is formed of a rigid member such as sheet metal. In plan view, the flat plate portion 42 is larger than the second flat plate portion 182. The flat plate portion 42 is connected to the first flat plate portion 181 or the second flat plate portion 182, for example, by screw fastening. The flat plate portion 42 has a surface S4 and one or more openings 46 (plurality of openings 46). The surface S4 is a surface facing the second direction D2. The anti-slip member 40 is provided on the surface S4. The plurality of openings 46 includes a first opening 461. In plan view, the first opening 461 is an opening 46 that exposes the third flat plate portion 183. More specifically, in plan view, the first opening 461 exposes the recess 26 formed in the second flat plate portion 182. As a result, the second annular groove 32 is located radially inward of the first opening 461 in plan view.

[0058] The suction assist device (auxiliary chuck, suction assist chuck, suction assist chuck) 14 is a suction device attached to the flat plate portion 42 together with the Bernoulli chuck 12. The suction assist device 14 may be a suction device smaller than the Bernoulli chuck 12. A known Bernoulli chuck 12 separate from the above-described Bernoulli chuck 12 may be used as the suction assist device 14. The configuration of the Bernoulli chuck 12 may be applied to the suction assist device 14.

[0059] One or more suction assist devices 14 may be arranged around the Bernoulli chuck 12. In this embodiment, a case will be described in which a plurality of suction assist devices 14 are arranged around the Bernoulli chuck 12. In this case, the above-described second slit 442 may be located between the plurality of suction assist devices 14 and the Bernoulli chuck 12 in a plan view.

[0060] Each of the plurality of suction assist devices 14 has a suction unit 14v that generates a negative pressure. This allows each of the plurality of suction assist devices 14 to suck the object to be sucked together with the Bernoulli chuck 12. Each of the plurality of suction assist devices 14 assists the Bernoulli chuck 12 by sucking the object to be sucked together with the Bernoulli chuck 12.

[0061] As described above, the flat plate portion 42 has a plurality of openings 46. Openings 46 other than the first opening 461 (described above) may be disposed at positions corresponding to the suction assistance device 14. For example, the plurality of openings 46 may include a second opening 462 that is an opening 46 that exposes the suction unit 14v of the suction assistance device 14 in a plan view.

[0062] In a plan view, the plurality of openings 46 formed in the flat plate portion 42 may include a plurality of third openings 463 surrounding the Bernoulli chuck 12. In a plan view, the plurality of third openings 463 may be disposed between the Bernoulli chuck 12 and the suction assistance device 14. The plurality of third openings 463 may communicate with each of the plurality of second communication openings 542 described above.

[0063] 12 is a cross-sectional view of the chuck 10. The cross section taken along line XII-XII in FIG.

[0064] The first thickness dimension DM1 and the second thickness dimension DM2 are shown in Figure 12. The first thickness dimension DM1 indicates the distance (distance component) in the second direction D2 from the position of the bottom surface 26b of the recess 26 in the second direction D2 to the position of the end surface 40as of the first partial anti-slip member 40a in the second direction D2. In contrast, the second thickness dimension DM2 indicates the distance (distance component) in the second direction D2 from the position of the bottom surface 26b in the second direction D2 to the position of the end surface 40bs of the second partial anti-slip member 40b in the second direction D2. It is preferable that the second thickness dimension DM2 be equal to or less than the first thickness dimension DM1 (DM2 ≤ DM1).

[0065] According to this embodiment, the Bernoulli chuck 12 exhibits the following advantageous effects, for example.

[0066] The first flat plate-shaped portion 181 has an air intake port portion 20 and a first annular groove 22. The configuration of the first flat plate-shaped portion 181 is relatively simple and advantageous for achieving a reduced thickness, weight, and cost. The second flat plate-shaped portion 182 covering the first annular groove 22 has a plurality of second flow paths 28 and a recess 26. The configuration of the second flat plate-shaped portion 182 is also relatively simple and advantageous for achieving a reduced thickness, weight, and cost. The third flat plate-shaped portion 183 housed in the recess 26 has a plurality of discharge grooves 34 connecting the second flow paths 28 and the second annular groove 32. The configuration of the third flat plate-shaped portion 183 is also relatively simple and advantageous for achieving a reduced thickness, weight, and cost. Therefore, according to this embodiment, the Bernoulli chuck 12 as a whole is advantageous for achieving a reduced thickness, weight, and cost. The third flat plate portion 183 has an annular shape, but is not limited to this. The third flat plate portion 183 may have, for example, a disk shape.

[0067] The plurality of discharge grooves 34 extend radially of the third flat plate portion 183 to the outer circumferential edge 183t1 of the third flat plate portion 183. This allows the plurality of second flow paths 28 and the second annular groove 32 to communicate with each other.

[0068] As compressed air is radially released from the plurality of discharge grooves 34, a negative pressure that sucks in the object to be sucked is generated in the inner region of the recess 26. The negative pressure release port 30 is exposed in the inner region (radially inward of the third flat plate portion 183 of the second flat plate portion 182). This allows air to be sent to the region where negative pressure is generated via the negative pressure release port 30. Sending air to the region where negative pressure is generated weakens the negative pressure.

[0069] The first flat plate-shaped portion 181 is annular. The annular first flat plate-shaped portion 181 exposes the negative pressure release port 30, which is located radially inward of the first flat plate-shaped portion 181. Such a first flat plate-shaped portion 181 does not easily obstruct the connection between the negative pressure release port 30 and the negative pressure release device.

[0070] The third flat plate portion 183 contacts the bottom surface 26b of the recess 26. The thickness D183 of the third flat plate portion 183 is preferably equal to or less than the depth D26 of the recess 26. For example, the depth D26 of the recess 26 and the thickness D183 of the third flat plate portion 183 are preferably equal to each other. This allows the Bernoulli effect for generating negative pressure to be effectively exerted. Note that, when the anti-slip portion 16 is provided, the second thickness dimension DM2 is preferably equal to or less than the first thickness dimension DM1. This allows the Bernoulli effect for generating negative pressure to be effectively exerted.

[0071] The air intake port 20 opens at a surface S11. The surface S11 is the surface opposite to the surface S12. The surface S12 is the surface where the first annular groove 22 of the first flat plate portion 181 is provided. The configuration of the first flat plate portion 181 is relatively simple, and is advantageous for achieving a thinner, lighter, and less expensive product.

[0072] The flat plate portion 42 is provided with an anti-slip member 40, which prevents the object to be sucked from being displaced (rotated) excessively. The flat plate portion 42 also has a first opening 461. The first opening 461 prevents the flat plate portion 42 from interfering with the occurrence of the Bernoulli effect.

[0073] The anti-slip member 40 has a slit portion 44 formed therein. The slit portion 44 prevents the anti-slip member 40 from blocking the air flow that generates negative pressure. As a result, the slit portion 44 prevents the anti-slip member 40 from blocking the Bernoulli effect. For example, the slit portion 44 has a plurality of first slits 441 arranged corresponding to the plurality of discharge grooves 34. Each of the plurality of first slits 441 is formed to extend radially inward from the outer end of the anti-slip member 40. Such a plurality of first slits 441 effectively prevents the anti-slip member 40 from blocking the Bernoulli effect. Furthermore, for example, the fourth slit 444 prevents the anti-slip member 40 from blocking the air flow generated by the suction assistance device 14 to suck the object to be suctioned. Note that the configuration of the anti-slip member 16, including the specific configuration of the slit portion 44, is not limited to one embodiment (see also the modified examples described below). By appropriately changing the configuration of the anti-slip portion 16 according to the shape of the object to be sucked, the Bernoulli chuck 12 can effectively suck various objects to be sucked without changing the configuration of the multiple flat plate-shaped portions 18 (181 to 183).

[0074] The suction assistance device 14 assists the Bernoulli chuck 12 in sucking the object to be sucked. This allows the chuck 10 to better suck the object to be sucked. A second opening 462 is formed in the flat plate portion 42. The second opening 462 prevents the flat plate portion 42 from interfering with the suction assistance device 14 sucking the object to be sucked.

[0075] The inner diameter of at least the portion of the recess 26 where the second annular groove 32 is formed increases from the bottom surface 26b of the recess 26 to the open end 26t of the recess 26. In other words, at least the portion of the recess 26 where the second annular groove 32 is formed has a tapered (substantially tapered) shape in cross section (see also FIG. 9). Such a recess 26 does not easily obstruct the flow of compressed air discharged radially outward from the multiple discharge grooves 34 to generate negative pressure. This allows the Bernoulli effect to be more effectively realized. As a result, suction force is more effectively generated.

[0076] The cross-sectional shape of each of the plurality of ejection grooves 34 when viewed in the radial direction is an arc, which can more effectively exhibit the Bernoulli effect, resulting in more effective generation of suction force.

[0077] The anti-slip member 40 is provided on the flat plate portion 42. As a result, even if the anti-slip member 40 is made of a flexible material such as rubber, the flat plate portion 42 prevents the anti-slip member 40 from bending excessively. The flat plate portion 42 is preferably made of a rigid material such as sheet metal. In this case, the flat plate portion 42 more effectively prevents the anti-slip member 40 from bending excessively.

[0078] The inner wall portion 26i of the recess 26 has an inclined surface 26s that widens the diameter of the recess 26 along the first direction D1. The compressed air discharged from the plurality of discharge grooves 34 flows along the inclined surface 26s. The inclined surface 26s that widens the diameter of the recess 26 along the first direction D1 can more effectively exhibit the Bernoulli effect. The inclined surface 26s that can more effectively exhibit the Bernoulli effect has, for example, the first curved surface 26s1 and the second curved surface 26s2 described above.

[0079] The negative pressure generated by the compressed air discharged from the plurality of discharge grooves 34 is also applied to the negative pressure release port 30. Therefore, the air pressure sensor that detects the air pressure inside the negative pressure release port 30 can essentially detect the magnitude of the negative pressure.

[0080] The embodiment may be modified as in the modified examples described below. Note that descriptions that overlap with the embodiment will be omitted as appropriate. Furthermore, among the configurations described below, the same configurations as those described in the embodiment will be assigned the same reference numerals as those in the embodiment.

[0081] (Variation 1) At least one of the suction assistance device 14 and the anti-slip portion 16 may be omitted.

[0082] FIG. 13 is an exploded perspective view of the chuck 10 (101) according to the first modification.

[0083] The chuck 101 includes a Bernoulli chuck 12 (121) according to this modification. The Bernoulli chuck 121 includes a plurality of flat plate-shaped portions 18 (181-183) and an anti-slip portion 16 (anti-slip portion 161) according to this modification. An example of the anti-slip portion 161 is shown in FIG. 13. The configuration of the plurality of flat plate-shaped portions 18 (181-183) may be the same as that of the first embodiment.

[0084] The flat plate portion 42 (flat plate portion 421) provided in the anti-slip portion 161 may not have the second opening 462. The anti-slip member 40 (401) provided in the anti-slip portion 161 may not have the fourth slit 444. Furthermore, at least one of the multiple first slits 441 formed in the anti-slip member 401 may be arranged along a diagonal line of the flat plate portion 421 having a substantially rectangular shape.

[0085] (Variation 2) The area of ​​the nozzles 36 (see also FIG. 10 ) in a radial view may be changed according to the shape of the object to be sucked. This causes the suction force exerted by the Bernoulli chuck 12 to change according to the shape of the object to be sucked. As a result, the Bernoulli chuck 12 can suck the object to be sucked more effectively. For example, the object to be sucked may have a quadrangular shape (such as a square) in a plan view. In this case, the area of ​​each of the multiple (four) nozzles 36 that may be located on a diagonal line of the quadrangular object to be sucked in a plan view may be set larger than the area of ​​the other nozzles 36. This allows the Bernoulli chuck 12 to generate a relatively strong suction force along the diagonal line of the object to be sucked in a plan view. As a result, the Bernoulli chuck 12 can suck the quadrangular object to be sucked more effectively.

[0086] Furthermore, for example, a third flat plate-shaped portion 183 in which a plurality of discharge grooves 34 having a first shape are formed and a third flat plate-shaped portion 183 in which a plurality of discharge grooves 34 having a second shape different from the first shape are formed may be appropriately used depending on the shape of the object to be sucked. This allows the area of ​​the plurality of nozzles 36 as viewed in the radial direction to be changed. As described above, the structure of the Bernoulli chuck 12 is relatively simple, so that a user of the Bernoulli chuck 12 can relatively easily replace the third flat plate-shaped portion 183.

[0087] (Variation 3) 14 is a diagram for explaining the chuck 10 (103) according to Modification 3. A part of the cross section of the chuck 103 is shown in FIG.

[0088] The first flat plate portion 181 and the second flat plate portion 182 may be integrally molded. The first flat plate portion 181, the second flat plate portion 182, and the flat plate portion 42 may be integrally molded. In this case, the first flat plate portion 181, the second flat plate portion 182, and the flat plate portion 42 may be formed in one operation, for example, by casting. This may simplify the manufacturing process of the chuck 103. For example, at least a part of the process of assembling the chuck 103 using the fastening members 48 or the like may be omitted.

[0089] (Variation 4) Fig. 15 is an exploded perspective view showing the chuck 10 (104) according to Modification 4. Fig. 15 is an exploded perspective view of the lower side of the chuck 104.

[0090] The chuck 104 includes a first flat plate portion 181, a second flat plate portion 182, and a flat plate portion 42. The first flat plate portion 181, the second flat plate portion 182, and the flat plate portion 42 may be integrally molded (see also Modification 3).

[0091] 15, the second flow path 28 (284) according to this modification has an annular shape. According to this modification, one second flow path 284 having an annular shape may be formed in the second flat plate-shaped portion 182. In this case, the second flow path 284 may form substantially one annular flow path together with the first flow path 24 (first annular groove 22).

[0092] As shown in FIG. 15 , the multiple fastening members 48 connecting the second flat plate-shaped portion 182 and the third flat plate-shaped portion 183 are preferably positioned outward from the second flow passage 284 in a plan view. This suppresses deflection of the third flat plate-shaped portion 183 in the axial direction DA outward from the second flow passage 284 in a plan view. As a result, the gap between the second flat plate-shaped portion 182 (the bottom surface 26 b of the recess 26) and the third flat plate-shaped portion 183 is effectively closed at a position outward from the second flow passage 284 in a plan view and where the discharge groove 34 is not provided (see also FIG. 17 ). That is, unintended expansion of the gap between the second flat plate-shaped portion 182 (the bottom surface 26 b) and the third flat plate-shaped portion 183 is suppressed at a position outward from the second flow passage 284 in a plan view and where the discharge groove 34 is not provided. As a result, leakage of compressed air from gaps other than the discharge groove 34 is suppressed. The annular second flow path 284 may include a recessed shape that is recessed inward in a plan view. The fastening member 48 that connects the second flat plate portion 182 and the third flat plate portion 183 may be disposed in a region secured outward from the second flow path 284 by the recessed shape.

[0093] Fig. 16 is a top view of a chuck 104 according to Modification 4. Fig. 17 is a cross-sectional view of the chuck 104 according to Modification 4. A cross section taken along line XVII-XVII in Fig. 16 is shown in Fig. 17.

[0094] As shown in FIG. 16 , the air supply port portion 20 (204) according to this modification has a plurality of ports 56. Each of the plurality of ports 56 communicates with the first flow path 24 ( FIG. 17 ). Each of the plurality of ports 56 is opened or closed as needed. For example, if it is sufficient to supply compressed air to one of the plurality of ports 56, the other ports 56 may be closed. In this case, the port 56 to which compressed air is not supplied may be closed with a closing member or the like. On the other hand, if compressed air is supplied to all of the ports 56, for example, all of the ports 56 may be opened. The amount of air supplied to the first annular groove 22 can be adjusted by changing the number of opened ports 56 as needed.

[0095] Fig. 18 is a cross-sectional view of a chuck 104 according to Modification 4. Fig. 18 shows a cross section taken along line XVIII-XVIII in Fig. 16 .

[0096] The flat plate portion 42 may have a recess 42b recessed in the first direction D1. In this case, the flat plate portion 42 may have a protrusion 42a protruding in the first direction D1, and the recess 42b may be formed in a thick portion of the flat plate portion 42 formed by the protrusion 42a.

[0097] A head 481h of a fastening member (screw member) 481 that functions as the suction assistance device 14 (144) according to this modification is placed (accommodated) in the recess 42b. The head 481h is accommodated in the recess 42b, thereby preventing the head 481h from protruding in the second direction D2 from the flat plate portion 42. By intentionally providing the protrusion 42a, which is a thick portion, on the flat plate portion 42, a space is ensured for forming the recess 42b having a depth that can suitably prevent the head 481h from protruding in the second direction D2 from the flat plate portion 42.

[0098] The body portion 481b of the fastening member 481 penetrates the flat plate portion 42 (the protrusion 42a) and protrudes in the first direction D1 from the flat plate portion 42. This allows the body portion 481b to be screwed into the nut portion 58, which is disposed in the first direction D1 relative to the flat plate portion 42.

[0099] As further shown in FIG. 18 , an air passage 60 is formed in the body portion 481b of the fastening member 481. The air passage 60 extends from an end portion 481t of the body portion 481b in the first direction D1 in the axial direction of the body portion 481b. The axial direction of the body portion 481b can coincide with the axial direction DA. Furthermore, an auxiliary discharge groove 481g is formed in the head portion 481h of the fastening member 481. The auxiliary discharge groove 481g is a groove that extends in the width direction (radial direction) of the head portion 481h. The auxiliary discharge groove 481g is formed on the back surface of the head portion 481h. In other words, the auxiliary discharge groove 481g is formed in a portion of the head portion 481h on the body portion 481b side. The air passage 60 and the auxiliary discharge groove 481g communicate with each other. In this case, the shape of the bottom portion 42bb of the recess 42b is appropriately set so that the air passage 60 and the auxiliary discharge groove 481g can communicate with each other. With this fastening member 481, compressed air is supplied to the air passage 60 from the end portion 481t side, and the compressed air is supplied to the support discharge groove 481g. The support discharge groove 481g can also discharge the compressed air supplied via the air passage 60. This can produce the Bernoulli effect in the inner region of the recess 42b. That is, negative pressure is generated in the inner region of the recess 42b. Therefore, according to this modification, the fastening member 481 functions as the suction support device 14 (suction portion 14v). In this case, the recess 42b formed in the flat plate portion 42 functions as the second opening 462 that exposes the suction portion 14v (head portion 481h of the fastening member 481).

[0100] The nut portion 58 and the flat plate portion 42 may be integrally molded. This allows at least a part of the Bernoulli chuck 12 to be easily manufactured by casting or the like. A screw groove (female screw) that can be screwed onto the body portion 481b (male screw) may be formed on the flat plate portion 42 (protruding portion 42a). In this case, the nut portion 58 may be omitted.

[0101] (Combination of multiple modifications) The above-described multiple modifications may be combined as appropriate.

[0102] The following additional notes are provided regarding the above-described embodiment.

[0103] (Appendix 1) The Bernoulli chuck according to the present disclosure includes a first flat plate-shaped portion (181) having formed therein an air inlet port portion (20) to which compressed air is supplied, a first annular groove (22) communicating with the air inlet port portion and forming a first flow path (24) that is an annular flow path, a second flat plate-shaped portion (182) having formed therein one or more second flow paths (28) that are through holes communicating with the first annular groove, and a second flat plate-shaped portion (182) communicating with the second flow path and discharging the compressed air supplied to the air inlet port portion radially outward. and a third flat plate-shaped portion (183) in which a plurality of discharge grooves (34) are formed, the second flat plate-shaped portion having a surface (S22) in a direction from the first flat plate-shaped portion to the second flat plate-shaped portion and a circular recess (26) formed in the surface, the third flat plate-shaped portion being accommodated in the recess, and the plurality of discharge grooves communicating with a second annular groove (32) formed by the second flat plate-shaped portion and the third flat plate-shaped portion. This provides a Bernoulli chuck that is advantageous in terms of thinness, weight, cost, etc.

[0104] (Appendix 2) The Bernoulli chuck according to Supplementary Note 1 may be a Bernoulli chuck in which each of the plurality of discharge grooves extends radially to an outer peripheral end (183t1) of the third flat plate-shaped portion to communicate with the second annular groove, and the radially inner side of each of the plurality of discharge grooves is closed. This allows communication between one or more second flow paths and the second annular groove. Furthermore, because the radially inner side of each of the plurality of discharge grooves is closed, compressed air is more reliably discharged radially outward.

[0105] (Appendix 3) The Bernoulli chuck according to Supplementary Note 1 or 2 may be a Bernoulli chuck in which, by discharging the compressed air from the plurality of discharge grooves, a negative pressure that sucks the object to be sucked is generated in the inner region of the recess, and a negative pressure release port (30) is exposed in the inner region. This allows air to be sent to the region where negative pressure is generated through the negative pressure release port. By sending air to the region where negative pressure is generated, the negative pressure is weakened.

[0106] (Appendix 4) The Bernoulli chuck according to Supplementary Note 3 may be a Bernoulli chuck in which the first flat plate-shaped portion is annular, and the negative pressure release port is located radially inward of the first flat plate-shaped portion. Such a first flat plate-shaped portion is unlikely to obstruct connection of the negative pressure release port and the negative pressure release device.

[0107] (Appendix 5) The Bernoulli chuck according to Supplementary Note 1 or 2 may be a Bernoulli chuck in which the third flat plate portion contacts the bottom surface (26b) of the recess, and the depth (D26) of the recess is equal to the thickness (D183) of the third flat plate portion, thereby enabling the Bernoulli effect for generating negative pressure to be effectively exerted.

[0108] (Appendix 6) The Bernoulli chuck according to Supplementary Note 1 or 2 may be a Bernoulli chuck in which the air supply port portion opens on a surface (S11) of the first flat plate portion opposite to a surface (S12) on which the first annular groove is provided. Such a configuration of the first flat plate portion is relatively simple and is advantageous for reducing thickness, weight, cost, etc.

[0109] (Appendix 7) The Bernoulli chuck according to Supplementary Note 1 or 2 may further include a flat plate portion (42) provided on the first flat plate portion or the second flat plate portion and having at least a part of an anti-slip member (40) for preventing the object from slipping, and the flat plate portion has a first opening (461) for exposing the recess in a plan view. The anti-slip member prevents the object from being excessively displaced (rotated). The first opening prevents the flat plate portion from hindering the occurrence of the Bernoulli effect.

[0110] (Appendix 8) The Bernoulli chuck described in Supplementary Note 7 may be a Bernoulli chuck in which the anti-slip member has a first partial anti-slip member (40a) provided on the flat plate portion and a second partial anti-slip member (40b) provided on the third flat plate portion, and a distance (DM2) in the direction from a bottom surface (26b) of the recess to the second partial anti-slip member is equal to or less than a distance (DM1) in the direction from the bottom surface to the first partial anti-slip member. This allows the Bernoulli effect for generating negative pressure to be effectively exerted.

[0111] (Appendix 9) The Bernoulli chuck according to Supplementary Note 7 may be a Bernoulli chuck in which the second flat plate portion and the flat plate portion are integrally formed. This allows at least a part of the Bernoulli chuck to be easily manufactured by casting or the like.

[0112] (Appendix 10) The Bernoulli chuck according to Supplementary Note 7 may be a Bernoulli chuck in which the anti-slip member has slit portions (44) formed therein corresponding to the plurality of discharge grooves, and the slit portions have a plurality of slits located radially outward from the plurality of discharge grooves. The slit portions prevent the anti-slip member from hindering the manifestation of the Bernoulli effect.

[0113] (Appendix 11) The Bernoulli chuck according to Supplementary Note 8 may be a Bernoulli chuck in which each of the plurality of slits extends radially inward from an outer end of the anti-slip member. The plurality of slits more effectively prevents the anti-slip member from hindering the manifestation of the Bernoulli effect.

[0114] (Appendix 12) The Bernoulli chuck according to Supplementary Note 7 may be a Bernoulli chuck in which a suction assist device having a suction portion (14v) for sucking the object to be sucked can be attached to the flat plate portion, and a second opening (462) for exposing the suction portion is formed in the flat plate portion. The suction assist device assists the Bernoulli chuck so that the object to be sucked can be sucked more effectively. The second opening prevents the flat plate portion from interfering with the suction assist device's suction of the object to be sucked.

[0115] (Appendix 13) The Bernoulli chuck described in Appendix 12 may be a Bernoulli chuck in which the suction assistance device has a screw member (481) arranged on the flat plate portion, an air passage (60) through which the compressed air is supplied is formed in a body portion (481b) of the screw member, and an assistance discharge groove (481g) for discharging the compressed air supplied through the air passage is formed in a head portion (481h) of the screw member, which is the suction portion.

[0116] (Appendix 14) The Bernoulli chuck according to Supplementary Note 1 or 2 may be a Bernoulli chuck in which the inner diameter of at least the portion of the recess where the second annular groove is formed increases from the bottom surface (26b) of the recess to the opening end (26t) of the recess, thereby generating a more effective suction force.

[0117] (Appendix 15) The Bernoulli chuck according to Supplementary Note 1 or 2 may be a Bernoulli chuck in which each of the plurality of discharge grooves has an arc-shaped cross section as viewed in the radial direction, thereby generating a suction force more effectively.

[0118] (Appendix 16) The Bernoulli chuck according to Supplementary Note 1 or 2 may be a Bernoulli chuck in which the area of ​​each of the plurality of discharge grooves is set in accordance with the shape of the object to be sucked, thereby enabling the Bernoulli chuck to suck the object to be sucked more effectively.

[0119] (Appendix 17) The Bernoulli chuck according to Supplementary Note 1 or 2 may be a Bernoulli chuck in which the first flat plate portion and the second flat plate portion are integrally formed. This allows at least a part of the Bernoulli chuck to be easily manufactured by casting or the like.

[0120] (Appendix 18) The Bernoulli chuck according to Supplementary Note 1 or 2 may be a Bernoulli chuck in which the air supply port portion has a plurality of ports (56) that communicate with the first annular groove and that can be opened and closed. The amount of air supplied to the first annular groove can be adjusted by changing the number of ports that are opened as needed.

[0121] (Appendix 19) The Bernoulli chuck according to Supplementary Note 1 or 2 may be a Bernoulli chuck in which the second flow path has an annular shape, and a plurality of fastening members (48) connecting the second flat plate portion and the third flat plate portion are located outward from the second flow path in a plan view. This suppresses deflection of the third flat plate portion outward from the annular second flow path in a plan view. As a result, leakage of compressed air from gaps other than the discharge groove is suppressed.

[0122] The present disclosure is not limited to the above disclosure, and various configurations may be adopted without departing from the gist of the present disclosure. [Explanation of symbols]

[0123] 12, 121...Bernoulli chuck 14...Suction support device 14v…suction part 16, 161...Non-slip part 18…Tabular part 20...Air supply port 22...First annular groove 24...First flow path 26...recess 26b…Bottom surface 26t...Open end 28...Second flow path 30...Negative pressure release port 32...Second annular groove 34…Discharge groove 40, 401...Slip-resistant members 40a...First partial anti-slip member 40b...Second partial anti-skid member 42, 421...flat plate part 44...Slit section 60...Ventilation channel 181...first flat plate portion 182...second flat plate portion 183...Third flat section 183t1…Outer edge 441...First slit 481... Fastening members (screw members) 481b...Torso 481h…Head D183…Thickness D26…depth DM1: First thickness dimension (distance) DM2: Second thickness dimension (distance) S11, S12, S21, S22...surface

Claims

1. a first flat plate portion having an air intake port portion to which compressed air is supplied and a first annular groove communicating with the air intake port portion and forming a first flow path that is an annular flow path; a second flat plate portion having one or more second flow paths formed therein, the second flow paths being through holes communicating with the first annular groove; a third flat plate-shaped portion communicating with the second flow path and having a plurality of discharge grooves formed therein, the discharge grooves discharging the compressed air supplied to the air supply port radially outward; Equipped with the second flat plate portion has a surface extending from the first flat plate portion toward the second flat plate portion, and a circular recess formed on the surface; the third flat plate portion is accommodated in the recess, a second annular groove formed by the second flat plate portion and the third flat plate portion, and the plurality of discharge grooves communicate with the second annular groove.

2. 2. The Bernoulli chuck of claim 1, each of the plurality of ejection grooves extends radially to an outer peripheral end of the third flat plate portion and communicates with the second annular groove; A Bernoulli chuck, wherein the radially inner side of each of the plurality of discharge grooves is closed.

3. 3. The Bernoulli chuck according to claim 1, When the compressed air is discharged from the plurality of discharge grooves, a negative pressure that sucks an object to be sucked is generated in an inner region of the recess, The Bernoulli chuck has a vacuum break port exposed in the inner region.

4. 4. The Bernoulli chuck according to claim 3, the first flat plate portion is annular, the negative pressure release port is located radially inward of the first flat plate portion.

5. 3. The Bernoulli chuck according to claim 1, the third flat plate portion contacts a bottom surface of the recessed portion, a depth of the recess and a thickness of the third flat plate portion.

6. 3. The Bernoulli chuck according to claim 1, the air supply port portion opens on a surface of the first flat plate portion opposite to a surface on which the first annular groove is provided.

7. 3. The Bernoulli chuck according to claim 1, The first flat plate portion or the second flat plate portion further includes a flat plate portion on which at least a part of an anti-slip member that prevents the object to be sucked from slipping is provided, The Bernoulli chuck has a first opening formed in the flat plate portion, the first opening exposing the recess in a plan view.

8. 8. The Bernoulli chuck of claim 7, the anti-slip member includes a first partial anti-slip member provided on the flat plate portion and a second partial anti-slip member provided on the third flat plate portion, a distance in the direction from a bottom surface of the recess to the second partial anti-slip member is equal to or less than a distance in the direction from the bottom surface to the first partial anti-slip member.

9. 8. The Bernoulli chuck of claim 7, The second flat plate portion and the flat plate portion are integrally formed.

10. 8. The Bernoulli chuck of claim 7, The anti-slip member has slits formed therein corresponding to the plurality of ejection grooves, The slit portion has a plurality of slits located radially outward of each of the plurality of ejection grooves.

11. 11. The Bernoulli chuck of claim 10, Each of the plurality of slits extends radially inward from the outer end of the anti-slip member.

12. 8. The Bernoulli chuck of claim 7, a suction assistance device having a suction part that sucks the suction object can be attached to the flat plate part, The Bernoulli chuck has a second opening formed in the flat plate portion, through which the suction portion is exposed.

13. 13. The Bernoulli chuck of claim 12, the suction assistance device has a screw member disposed on the flat plate portion, a body portion of the screw member is formed with an air passage through which the compressed air is supplied, and a support discharge groove that discharges the compressed air supplied through the air passage is formed in the head portion of the screw member, which is the suction portion.

14. 3. The Bernoulli chuck according to claim 1, a Bernoulli chuck, wherein an inner diameter dimension of at least a portion of the recess that forms the second annular groove increases from a bottom surface of the recess to an open end of the recess.

15. 3. The Bernoulli chuck according to claim 1, A Bernoulli chuck, wherein each of the plurality of ejection grooves has an arc-shaped cross section when viewed in the radial direction.

16. 3. The Bernoulli chuck according to claim 1, A Bernoulli chuck, wherein the area of ​​each of the plurality of ejection grooves is set according to the shape of the object to be sucked.

17. 3. The Bernoulli chuck according to claim 1, The first flat plate portion and the second flat plate portion are integrally formed.

18. 3. The Bernoulli chuck according to claim 1, the air supply port portion has a plurality of ports that communicate with the first annular groove and that can be opened and closed.

19. 3. The Bernoulli chuck according to claim 1, the second flow path has an annular shape; a plurality of fastening members connecting the second flat plate portion and the third flat plate portion are positioned outward from the second flow path in a plan view;

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