Pulse Power Supply

Abstract

By standardizing the charger units of pulse power supplies, we aim to simplify management and operation and reduce costs. [Solution] A pulse power supply device 20 includes a charger unit 2 and a pulse generating unit 3. The pulse generating unit 3 includes multiple stages of capacitors C0 to C2, and transmits model information assigned according to the capacitance of the first-stage capacitor C0 to the charger unit 2. The charger unit 2 includes an inverter for charging the first-stage capacitor C0, and sets the ON time of the inverter based on the model information received from the pulse generating unit 3 to adjust the charging time of the first-stage capacitor C0.

Description

[Technical Field]

[0001] The present invention relates to a pulse power supply device used as a power supply for, for example, an excimer laser or an ozonizer. [Background technology]

[0002] The circuit configuration of a pulse power supply device for an excimer laser will be described with reference to Figure 1. This pulse power supply device 1 comprises a charger unit 2 and a pulse generating unit 3, which are separated.

[0003] Charger unit 2 receives commercial power supply (three-phase AC) 4 as input and initially charges first-stage capacitor C0 of pulse generating unit 3. Specifically, rectifier 5 converts AC to DC, inverter 7 converts DC to AC, and step-up transformer Tr1 is used for step-up rectification, after which a constant voltage is charged into first-stage capacitor C0 of pulse generating unit 3.

[0004] The pulse generating unit 3 has an energy recovery circuit 13 that turns on the IGBT 10 and injects pulse energy into a load (load discharge tube) 15 using a magnetic pulse compression circuit 11. This energy recovery circuit 13 has a first-stage pulse generating circuit 12 and a magnetic pulse compression circuit 11. This magnetic pulse compression circuit 11 has a one-stage compression circuit 13 and a two-stage compression circuit 14 (it is not limited to two stages, but may be n stages).

[0005] The first-stage pulse generating circuit 12 supplies a temporary current to the transformer Tr2 through the saturable reactor SI0 of the first-stage capacitor C0, and generates a boosted pulse current on the secondary side of the transformer Tr2.

[0006] This pulse current charges capacitor C1 in the one-stage compression circuit 13, and the pulse is compressed by the saturation operation of saturable reactor ST2. This process is repeated in the two-stage compression circuit 14, charging the two-stage capacitor C2 to high voltage, and the saturation operation of saturable reactor SI3 generates an ultra-short pulse in the load (pulse discharge section) 15.

[0007] When charging the first-stage capacitor C0, the ON time of the inverter 7 (the time during which the DC power of the electrolytic capacitor 6 is converted to AC power and energized through the step-up transformer Tr1) is set using various parameters. In particular, the inverter pulse width (ON time) of the inverter 7 is determined based on the capacitance value of the first-stage capacitor C0 in the pulse generating unit 3, and the charging time of the first-stage capacitor C0 is determined. [Prior art documents] [Patent documents]

[0008] [Patent Document 1] Patent Publication No. 2005-108910 Summary of the Invention [Problem to be solved by the invention]

[0009] The pulse generating unit 3 requires different types of energy, pulse width, etc. depending on the load 15, so multiple models must be prepared.

[0010] However, the capacitance of the first-stage capacitor C0 for charging the energy for the load 15 differs for each pulse generating unit 3. As a result, a charger unit 2 must be prepared for each pulse generating unit 3, which may increase costs and complicate management and operation at the delivery destination.

[0011] The present invention has been made to solve such conventional problems, and aims to reduce costs and simplify management and operation by standardizing the charger unit. [Means for solving the problem]

[0012] (1) One aspect of the present invention is A charger unit; a pulse generating unit; A pulse power supply device comprising: The pulse generating unit comprises: a multi-stage capacitor group charged by the charger unit; Transmitting model information assigned according to the capacitance of the first stage capacitor to the charger unit, The charger unit includes: an inverter for charging the first-stage capacitor; The ON time of the inverter is set based on the model information received from the pulse generating unit, and the charging time of the first stage capacitor is adjusted.

[0013] (2) Another aspect of the present invention is A charger unit; a pulse generating unit; A pulse power supply device comprising: The pulse generating unit comprises: a multi-stage capacitor group charged by the charger unit; transmitting information on the capacitance value of the first stage capacitor to the charger unit; The charger unit includes: an inverter for charging the first-stage capacitor; The ON time of the inverter is set based on the information on the capacitance value received from the pulse generating unit, and the charging time of the first stage capacitor is adjusted.

[0014] (3) The present invention is particularly effective when two or more models of pulse generating units having different capacitance values ​​of the first-stage capacitors are delivered to one delivery location. [Effects of the Invention]

[0015] According to the present invention, by standardizing the charger unit, it is possible to reduce costs and simplify management and operation. [Brief explanation of the drawings]

[0016] [Figure 1] FIG. 1 is a diagram illustrating the configuration of a pulse power supply device. [Figure 2] FIG. 1 is a block diagram of a pulse power supply device according to a first embodiment. [Figure 3] A diagram showing table retention data for the charger unit. DETAILED DESCRIPTION OF THE INVENTION

[0017] A pulse power supply according to an embodiment of the present invention will now be described. This pulse power supply 20 has substantially the same configuration as the pulse power supply 1 shown in FIG.

[0018] That is, it is equipped with a charger unit 2 that receives a commercial power supply (three-phase AC) 4 as input and initially charges a first-stage capacitor C0 of a pulse generating unit 3, and a pulse generating unit 3 that turns on an IGBT 10 and injects pulse energy into a load 15 using a magnetic pulse compression circuit 11. However, it differs from the conventional one in that the charger unit 2 and pulse generating unit 3 perform the control operations of the first and second embodiments. [Example]

[0019] First, the control operation of the first embodiment will be described. As shown in Fig. 2, the charger unit 2 has a charger control unit 30 on a control board within the charger unit 2, and the pulse generating unit 3 has a PPM control unit 40 on a control board within the pulse generating unit 3. In this embodiment, the charger control unit 30 and the PPM control unit 40 are connected so that serial communication can be performed. For example, the two boards are connected by an internal bus or a connector, etc., to construct a transmission path for serial communication.

[0020] Prior to initial charging of the first-stage capacitor C0, the PPM control unit 40 transmits information on the model number of the pulse generating unit 3 to the charger control unit 30 via serial communication. For example, a 3- to 4-digit hexadecimal number is set and transmitted according to the model number.

[0021] When the charger control unit 30 receives the information transmitted from the PPM control unit 40, it performs model identification based on the received model number. At this time, the charger unit 2 is provided with a table 31 that describes the model of the pulse generating unit 3 in correspondence with the model number, as shown in Fig. 2. Here, the charger control unit 30 refers to the table 31 and performs model identification of the pulse generating unit 3 based on the received model number.

[0022] Then, the charger control unit 30 calculates the ON time of the inverter 6 according to the determined model. This determines the charging time of the first-stage capacitor C0, and the energy charged to the first-stage capacitor C0 can be set to a desired value according to the load 15.

[0023] As a result, unless there are issues with the duties of the main circuit of the charger unit 2, it is possible to standardize the charger unit 2 to one type, and there is no need to prepare different types of charger unit 2 for each pulse generating unit 3. By standardizing the charger unit 2 in this way, parts can be standardized, which makes it possible to reduce costs.

[0024] Furthermore, when multiple pulse power supplies 20 are delivered to one location, only one model of charger unit 2 is required, which facilitates the management of the charger units 2 at the delivery destination. In particular, there is no risk of incorrect combination of charger units 2 at the delivery destination, which makes operation at the delivery destination easier and simplifies management and operation. [Example]

[0025] Next, a description will be given of the control operation of the embodiment 2. The PPM control unit 40 of this embodiment executes the following process prior to the initial charging of the first-stage capacitor C0. S01: Detect the capacitance value of the first-stage capacitor C0. (The capacitance value can be calculated using the charging current, charging voltage change, and charging time during the pre-initial charging test.) S02: Convert the capacitance value detected by S01 into a digital value (binary number). S03: The digital value of S03 is transmitted to the charging control unit 30 via serial communication.

[0026] On the other hand, when the charging control unit 30 receives the transmission of S03, it obtains the capacitance value of the first stage capacitor C0 from the digital value contained therein, and determines the model of the pulse generating unit 3 from the range of the obtained capacitance value.

[0027] Here, table 31 describes the range of capacitance values ​​of the first-stage capacitor C0 in correspondence with the model of the pulse generating unit 3. By referring to this table, for example, if the capacitance value range is "1 μF ± 5%", it is identified as model A, and if the capacitance value range is "0.85 μF ± 5%", it is identified as model B.

[0028] In this way, the model of the pulse generating unit 3 is identified and the ON time of the inverter 6 is calculated. This determines the charging time of the first stage capacitor C0, and the energy charged to the first stage capacitor C0 can be set to a desired value according to the load 15. In this regard, unless there is a problem with the duty of the main circuit of the charger unit 2, the charger unit 2 can be standardized and the same effects as in the first embodiment can be obtained.

[0029] The present invention is not limited to the above-described embodiment, and can be modified and implemented within the scope of the claims. For example, the transmission of model number information from the PPM control unit 40 to the charger control unit 30 may be performed using parallel communication instead of serial communication. [Explanation of symbols]

[0030] 20...Pulse power supply 2. Charger unit 3...Pulse generating unit 6...Inverter C0 to C2: Capacitors

Claims

1. A charger unit; a pulse generating unit; A pulse power supply device comprising: The pulse generating unit comprises: a multi-stage capacitor group charged by the charger unit; Transmitting model information assigned according to the capacitance of the first stage capacitor to the charger unit, The charger unit includes: an inverter for charging the first-stage capacitor; The ON time of the inverter is set based on the model information received from the pulse generating unit, and the charging time of the first stage capacitor is adjusted. A pulse power supply device characterized by:

2. A charger unit; a pulse generating unit; A pulse power supply device comprising: The pulse generating unit comprises: a multi-stage capacitor group charged by the charger unit; transmitting information on the capacitance value of the first stage capacitor to the charger unit; The charger unit includes: an inverter for charging the first-stage capacitor; The ON time of the inverter is set based on the information on the capacitance value received from the pulse generating unit, and the charging time of the first stage capacitor is adjusted. A pulse power supply device characterized by:

3. Two or more models of pulse generating units with different capacitance values ​​of the first stage capacitor are delivered to one delivery location.

3. The pulse power supply device according to claim 1 or 2.

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