Adjustment mechanism, optical system, exposure apparatus, and method for manufacturing articles

Abstract

This technology offers advantages in improving the durability of the adjustment mechanism. [Solution] An adjustment mechanism for adjusting at least one of the position and shape of an optical element comprises a deformation part and a drive part that applies force to the optical element via the deformation part, wherein the deformation part includes a first plate having a first part and a second part, a second plate disposed between the first plate and the optical element and having a third part and a fourth part for transmitting force to the optical element, a first connecting part connecting the first part and the third part, and a second connecting part connecting the second part and the fourth part, wherein the distance between the first part and the second part is smaller than the distance between the third part and the fourth part, and the drive part applies force between the first part and the second part on the first plate.

Description

Technical Field

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[0001] The present invention relates to an adjustment mechanism, an optical system, an exposure apparatus, and an article manufacturing method.

Background Art

[0002] In a manufacturing process of a semiconductor device, a display device, or the like, an exposure apparatus including an optical system for projecting a pattern of a reticle onto a substrate can be used. The exposure apparatus includes an adjustment mechanism for adjusting at least one of the position and shape of an optical element incorporated in the optical system, and the adjustment mechanism can improve the aberration of the optical system. Patent Document 1 discloses an adjustment device having a hinge joint between an optical element and a lens barrel, and changing the posture of the optical element by applying a force to the hinge joint using a screw.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In an adjustment mechanism for adjusting at least one of the position and shape of an optical element, stress concentration may occur in a component of a drive mechanism for driving the optical element, and it may not withstand long-term use and may be damaged.

[0005] An object of the present invention is to provide an advantageous technique for improving the durability of the adjustment mechanism.

Means for Solving the Problems

[0006] One aspect of the present invention relates to an adjustment mechanism for adjusting at least one of the position and shape of an optical element, the adjustment mechanism comprising a deformation part and a drive part that applies force to the optical element via the deformation part, the deformation part including a first plate having a first part and a second part, a second plate disposed between the first plate and the optical element and having a third part and a fourth part for transmitting force to the optical element, a first connection part connecting the first part and the third part, and a second connection part connecting the second part and the fourth part, wherein the distance between the first part and the second part is smaller than the distance between the third part and the fourth part, and the drive part applies force between the first part and the second part on the first plate. [Effects of the Invention]

[0007] According to the present invention, an advantageous technique is provided for improving the durability of the adjustment mechanism. [Brief explanation of the drawing]

[0008] [Figure 1] A schematic diagram showing the configuration of the exposure apparatus in the first embodiment. [Figure 2] A schematic diagram showing the configuration of the adjustment mechanism of the comparative example. [Figure 3] A schematic diagram showing the deformation of the deformation part in the adjustment mechanism of the comparative example. [Figure 4] A schematic diagram showing the configuration of the adjustment mechanism of the first embodiment. [Figure 5] A diagram illustrating the configuration of the adjustment mechanism in the first embodiment. [Figure 6] A schematic diagram showing the deformation of the deformation part in the adjustment mechanism of the first embodiment. [Figure 7] A schematic diagram showing the configuration of the adjustment mechanism of the second embodiment. [Figure 8] A schematic diagram showing the configuration of the adjustment mechanism of the third embodiment. [Figure 9] A schematic diagram showing the configuration of the adjustment mechanism of the third embodiment. [Figure 10] A diagram showing the drive flow of the optical element in the first to third embodiments. [Modes for carrying out the invention]

[0009] The embodiments will be described in detail below with reference to the attached drawings. Note that the following embodiments do not limit the invention to the claims. While the embodiments describe multiple features, not all of these features are essential to the invention, and the features may be combined in any way. Furthermore, in the attached drawings, the same or similar configurations are given the same reference numeral, and redundant descriptions are omitted. In this specification and drawings, directions are indicated according to the XYZ coordinate system. In the XYZ coordinate system, the Z axis is parallel to the vertical, and the XY plane is parallel to the horizontal plane.

[0010] Figure 1 schematically shows the configuration of an exposure apparatus 1 according to one embodiment. The exposure apparatus 1 is a projection exposure apparatus that exposes a substrate 16 by projecting the pattern of a master plate (mask, reticle) onto the substrate 16 via a projection optical system 15, for example, using a step-and-repeat method or a step-and-scan method. Although an example of an exposure apparatus is described here, the present invention is applicable to apparatuses that adjust aberrations of optical systems by adjusting the position and shape of optical elements, and is not limited to the following specific embodiments.

[0011] The exposure apparatus 1 may include an illumination optical system 12 for irradiating light, a projection optical system 15 for projecting the pattern of the master plate 13 onto the substrate 16, a master plate stage 14 that can move along the XY plane while holding the master plate 13, and a substrate stage 17 that can move along the XY plane while holding the substrate 16. The exposure apparatus 1 may also include a control unit 11. The master plate 13 has a pattern (e.g., a circuit pattern) to be transferred to the surface of, for example, quartz glass, and the pattern may be formed of, for example, chromium. The substrate 16 is, for example, a single-crystal silicon substrate and has a photosensitive material (resist) coated on its surface. The control unit 11 controls each component of the exposure apparatus 1. The control unit 11 may also constitute part of the adjustment mechanism described later. The control unit 11 may be composed of, for example, a PLD (Programmable Logic Device) such as an FPGA (Field Programmable Gate Array), an ASIC (Application Specific Integrated Circuit), a general-purpose or dedicated computer with a program installed, or a combination of all or part of these.

[0012] In the exposure apparatus 1, exposure light from a light source (not shown) illuminates the master plate 13 held by the master plate stage 14 via the illumination optical system 12. The light transmitted through the master plate 13 is irradiated onto the substrate 16 via the projection optical system 15. Light from the pattern on the master plate 13 is imaged onto the surface of the substrate 16. The exposure apparatus 1 exposes each of the multiple shot regions on the substrate 16.

[0013] Each of the multiple optical elements incorporated into the projection optical system 15 may have altered optical properties due to factors such as heat absorption from exposure light. This can cause aberrations in the projection optical system 15. To improve these aberrations, at least one of the position and shape of at least one optical element of the projection optical system 15 may be adjusted. For example, a force may be applied to the optical element in a direction perpendicular to the optical axis (Z-axis direction) of the projection optical system 15 (a direction along the XY plane).

[0014] Figure 2(a) shows an adjustment mechanism 100' of a comparative example. An optical element 101 is incorporated inside the lens barrel 103 of the projection optical system 15, and the optical element 101 can be held by a retaining part 102. The retaining part 102 can be fixed to the lens barrel 103 via a deformable part 104. Alternatively, without providing a retaining part 102, the optical element 101 may be in contact with the deformable part 104 and fixed to the lens barrel 103 via the deformable part 104. The retaining part 102 may preferably be made of a ring-shaped metal with a low coefficient of thermal expansion, such as Invar. The retaining part 102 has sufficiently high rigidity with respect to the first plate 201 and the second plate 202 in the deformable part 104. There may be a total of four deformable parts 104, one each in the positive and negative directions of the X and Y axes and at positions approximately equal to the optical axis AX or center of the optical element 101. The four deformation sections 104 are shown as 104X+, 104X-, 104Y+, and 104Y-.

[0015] In the example shown in Figure 2(a), the adjustment mechanism 100' for adjusting at least one of the position and shape of the optical element 101 comprises a plurality of deformable parts 104 and a drive unit 105 that applies force to the optical element 101 via one of the plurality of deformable parts 104. However, the adjustment mechanism 100' may also comprise a plurality of deformable parts 104 and two or more drive units 105 that apply force to the optical element 101 via two or more of the plurality of deformable parts 104. Alternatively, the adjustment mechanism 100' may comprise a plurality of deformable parts 104 and a plurality of drive units 105 that apply force to the optical element 101 via the plurality of deformable parts 104. The deformable parts 104, or the deformable parts 104 and the drive units 105, can also be understood as a support mechanism 110 that supports the optical element 101. In other words, the adjustment mechanism 100' comprises a plurality of support mechanisms 110 that support an optical element, each of the plurality of support mechanisms 110 comprises a deformation part 104, and at least one of the plurality of support mechanisms 110 may comprise a drive part 105.

[0016] In the example of FIG. 2(a), the driving unit 105 applies a force in the positive X-axis direction to the deformation unit 104X− under the control of the control unit 11, that is, drives the deformation unit 104 to deform the deformation unit 104. As a result, the optical element 101 connected to the deformation unit 104 moves in the positive X-axis direction. Assuming that the driving unit 105 is repeatedly operated, the driving of the deformation unit 104 by the driving unit 105 can be performed within the elastic deformation range of the deformation unit 104. In one example, when the deformation unit 104 is made of metal, the maximum deformation amount of the deformation unit 104 is 4 to 500 micrometers, and the movement of the optical element 101 is about one-tenth of that. The driving unit 105 can be, for example, a pneumatic actuator or a piezo actuator, but is not limited thereto.

[0017] The adjustment mechanism 100’ may include a position sensor 106 that detects the position of the optical element 101. The position sensor 106 can detect the position of the optical element 101 and provide the result to the control unit 11. The position sensor 106 can be, for example, a non-contact sensor, a capacitance type or a laser interferometer sensor. Alternatively, the position sensor 106 may detect the position of the optical element 101 using a target or the like provided on the holding unit 102. The driving unit 105 and the position sensor 106 may be arranged inside the lens barrel 103 or outside the lens barrel 103.

[0018] FIG. 2(b) is an enlarged view of the region 1000 in FIG. 2(a). The deformation unit 104 may include a first plate 201 having a first portion P1’ and a second portion P2’, and a second plate 202 having a third portion P3’ and a fourth portion P4’. The second plate 202 is disposed between the first plate 201 and the optical element 101 and transmits a force to the optical element 101. The deformation unit 104 may include a first connection portion 211’ that connects the first portion P1’ and the third portion P3’, and a second connection portion 212’ that connects the second portion P2’ and the fourth portion P4’. The first plate 201, the second plate 202, the first connection portion 211’ and the second connection portion 212’ are made of an elastic body. The driving unit 105 applies a force to the position between the first portion P1’ and the second portion P2’ in the first plate 201.

[0019] The first plate 201 and the second plate 202 are arranged parallel to each other. The first connecting portion 211' and the second connecting portion 212' are arranged parallel to each other. The adjustment mechanism 100' includes two first fixing portions 221 for fixing the first plate 201 to the lens barrel 103 which is a member holding the deformation portion 104, and the first portion P1' and the second portion P2' can be arranged between the two first fixing portions 221. Such a configuration enables the first plate 201 to deform while being fixed to the lens barrel 103 by the two first fixing portions 221. The adjustment mechanism 100' includes two second fixing portions 222 for fixing the second plate 202 to the holding portion 102, and the third portion P3' and the fourth portion P4' can be arranged between the two second fixing portions 222. Such a configuration enables the second plate 202 to deform while being fixed to the holding portion 102 by the two second fixing portions 222.

[0020] The first fixing portion 221 and the second fixing portion 222 have sufficiently high rigidity as compared with the first plate 201, the second plate 202, the first connecting portion 211' and the second connecting portion 212'. The deformation portion 104 is preferably formed of a metal such as stainless steel, and is preferably configured as an integral part without welding or the like in order to achieve sufficient durability. The first plate 201, the second plate 202, the first connecting portion 211' and the second connecting portion 212' are preferably about one-tenth the thickness of the first fixing portion 221 and the second fixing portion 222 in order to give elasticity to the deformation portion 104. Also, the first plate 201, the second plate 202, the first connecting portion 211' and the second connecting portion 212' preferably have the same and uniform thickness.

[0021] Figure 3 schematically shows the deformation of the deformation part 104 when force is applied to it by the drive unit 105. As mentioned above, the maximum deformation amount of the deformation part 104 is 400 to 500 micrometers, and the deformation amount is exaggerated in Figure 3. One simple method for deforming the deformation part 104 is to apply force by bringing the movable part 111 of the drive unit 105 into contact with the center of the first plate 201. In this case, in order to improve the reproducibility of contact, it is preferable to make either the movable part 111 or the first plate 201 at the contact point between the movable part 111 and the first plate 201 spherical.

[0022] In the example shown in Figure 3, the tip of the movable part 111 of the drive unit 105 contacts the first plate 201, and the first plate 201 is deformed by applying a force to the first plate 201 in the positive direction of the X axis. In the comparative example, the distance between the first part P1' and the second part P2' is equal to the distance between the third part P3' and the fourth part P4'. Therefore, the stiffness of the portion of the first plate 201 between the first part P1' and the second part P2' is approximately equal to the stiffness of the portion of the second plate 202 between the third part P3' and the fourth part P4'. Consequently, the first plate 201, to which a force is applied by contacting the tip of the movable part 111, can deform much more significantly than the second plate 202. Therefore, stress concentration occurs in the first part P1' and the second part P2' of the first plate 201, making it difficult to achieve high durability (e.g., maintenance-free for 10-20 years). Furthermore, the deformation of the second plate 202 in the positive direction along the X axis is smaller compared to the first plate 201, which leads to the problem of a smaller drive amount for the optical element 101.

[0023] The adjustment mechanism 100 and exposure apparatus 1 of the first embodiment will be described below. Matters not mentioned in the description of the first embodiment may be described in accordance with the above description. Figure 4(a) shows the adjustment mechanism 100 of the first embodiment. The adjustment mechanism 100 of the first embodiment differs from the comparative example in the configuration of the deformation part 104, but is otherwise the same as the comparative example. The adjustment mechanism 100 may include a holding part 102 for holding the optical element 101. If the adjustment mechanism 100 includes a holding part 102, the drive unit 105 can adjust at least one of the position and shape of the optical element 101 via the holding part 102 by applying force to the side surface of the holding part 102. If the adjustment mechanism 100 does not include a holding part 102, the optical element 101 may contact the deformation part 104 and be fixed to the lens barrel 103 via the deformation part 104.

[0024] Figure 4(b) is an enlarged view of region 1000 in Figure 4(a). Figure 5 is a further enlarged view of Figure 4(b). The deformation portion 104 may include a first plate 201 having a first portion P1 and a second portion P2, and a second plate 202 having a third portion P3 and a fourth portion P4. The second plate 202 is positioned between the first plate 201 and the optical element 101 and transmits force to the optical element 101. The deformation portion 104 may include a first connecting portion 211 connecting the first portion P1 and the third portion P3, and a second connecting portion 212 connecting the second portion P2 and the fourth portion P4. The first plate 201, the second plate 202, the first connecting portion 211, and the second connecting portion 212 are made of elastic material. The drive unit 105 applies force to the position between the first portion P1 and the second portion P2 on the first plate 201.

[0025] The first plate 201 and the second plate 202 are arranged parallel to each other. In the first embodiment, the distance D1 between the first portion P1 and the second portion P2 is smaller than the distance D2 between the third portion P3 and the fourth portion P4. The distance D1 between the first portion P1 and the second portion P2 may be, for example, 0.8 times or less, or 0.7 times or less, or 0.6 times or less, the distance D2 between the third portion P3 and the fourth portion P4. The distance D1 between the first portion P1 and the second portion P2 may be, for example, 0.2 times or more, or 0.3 times or more, or 0.4 times or more, the distance D2 between the third portion P3 and the fourth portion P4.

[0026] The adjustment mechanism 100 includes two first fixing parts 221 for fixing the first plate 201 to the lens barrel 103, which is a member that holds the deformable part 104, and the first part P1 and the second part P2 may be positioned between the two first fixing parts 221. Such a configuration allows the first plate 201 to deform while it is fixed to the lens barrel 103 by the two first fixing parts 221. The adjustment mechanism 100 also includes two second fixing parts 222 for fixing the second plate 202 to the holding part 102, and the third part P3 and the fourth part P4 may be positioned between the two second fixing parts 222. Such a configuration allows the second plate 201 to deform while the second plate 202 is fixed to the holding part 102 by the two second fixing parts 222. The first fixing portion 221 and the second fixing portion 222 have sufficiently high rigidity compared to the first plate 201, the second plate 202, the first connecting portion 211, and the second connecting portion 212. The deformable portion 104 is preferably made of a metal such as stainless steel and is preferably constructed as a single, integrated part without welding or other means to ensure sufficient durability. The first plate 201, the second plate 202, the first connecting portion 211, and the second connecting portion 212 are preferably about one-tenth the thickness of the first fixing portion 221 and the second fixing portion 222 in order to give elasticity to the deformable portion 104.

[0027] The first plate 201, the second plate 202, the first connecting portion 211, and the second connecting portion 212 can be arranged symmetrically with respect to a virtual plane VP that includes the position where the first plate 201 is subjected to force by the drive unit 105 and the optical axis AX of the optical element 101. This makes it possible to apply force to the optical element 101 with high reproducibility.

[0028] The thickness T2 of the second plate P2 may be 0.9 times or more and 1.1 times or less, or 0.95 times or more and 1.05 times or less, or 0.97 times or more and 1.03 times or less, the thickness T1 of the first plate P1. In the direction parallel to the optical axis AX of the optical element 101 (depth direction in Figure 5), the dimensions of the second plate 202 may be 0.9 times or more and 1.1 times or less, or 0.95 times or more and 1.05 times or less, or 0.97 times or more and 1.03 times or less, the dimensions of the first plate 201. In the direction perpendicular to the virtual plane VP that includes the position where the first plate 201 is subjected to force by the drive unit 105 and the optical axis AX of the optical element 101, the dimensions L2 of the second plate 202 may be 0.9 times or more and 1.1 times or less, the dimensions of the first plate L1. Alternatively, the dimension L2 of the second plate 202 may be 0.95 times or more and 1.05 times or less the dimension of the first plate L1, or 0.97 times or more and 1.03 times or less.

[0029] The drive unit 105 has a movable part 111 that applies force to the first plate P1, and the width W1 of the movable part 111 in a direction perpendicular to the direction toward the optical axis AX of the optical element 101 from the movable part 111 may be smaller than the distance D1 between the first part P1 and the second part P2. In other words, the movable part 111 has a tip that contacts the first plate 201, and the width W2 of the tip in a direction perpendicular to the direction toward the optical axis AX of the optical element 101 from the movable part 111 may be smaller than the distance D1 between the first part P1 and the second part P2.

[0030] In the example shown in Figure 6, the tip of the movable part 111 of the drive unit 105 contacts the space between the first part P1 and the second part P2 of the first plate 201, and the tip of the movable part 111 applies force to the first plate 201 in the positive direction of the X axis, thereby deforming the first plate 201. In the first embodiment, the distance D1 between the first part P1 and the second part P2 is smaller than the distance D2 between the third part P3 and the fourth part P4. Therefore, the rigidity of the portion of the first plate 201 between the first part P1 and the second part P2 is higher than the rigidity of the portion of the second plate 202 between the third part P3 and the fourth part P4. Consequently, the difference between the amount of deformation of the first plate 201 and the amount of deformation of the second plate 202 when force is applied to the first plate 201 by the tip of the movable part 111 is smaller in the first embodiment compared to the comparative example. As a result, according to the first embodiment, the durability of the deformation part 104 and, furthermore, the durability of the adjustment mechanism 100 are improved compared to the comparative example. Furthermore, according to the first embodiment, the optical element 101 can be driven more efficiently than in the comparative example.

[0031] Figure 7 shows the adjustment mechanism 100 of the second embodiment. The adjustment mechanism 100 of the second embodiment differs from the first embodiment in that all support mechanisms 110 are equipped with drive units 105. Specifically, in the second embodiment, drive units 105X+, 105X-, 105Y+, and 105Y- are provided for the deformation parts 104X+, 104X-, 104Y+, and 104Y-, respectively.

[0032] The following explanation uses the X-axis as an example. This explanation can also be applied to the Y-axis. Each drive unit 105 applies force to the optical element 101 while deforming the deformation unit 104 by contacting the first plate 201 of the corresponding deformation unit 104 and applying force. The drive unit 105X+ applies force to the optical element 101 in the negative direction of the X-axis, and the drive unit 105X- applies force in the positive direction of the X-axis. Therefore, when the optical element 101 is in its initial position, a predetermined force is applied to the deformation unit 104 in advance using the drive units 105X+ and 105X-. Then, when moving the optical element 101 in the positive direction of the X-axis, the force generated by the drive unit 105X+ is weakened while the force generated by the drive unit 105X- is strengthened. Conversely, when moving the optical element 101 in the negative direction of the X-axis, the force generated by the drive unit 105X+ is strengthened while the force generated by the drive unit 105X- is weakened. This allows the optical element 101 to be moved in both directions along the X-axis.

[0033] The force applied when the optical element 101 is in its initial position may be, for example, 1 / 2F + ΔF, where F is the force used to move the optical element 101 by the maximum amount using one of the drive units 105. ΔF is an additional force applied during driving to ensure contact between the drive unit 105 and the deformation unit 104. ΔF is a force necessary to prevent the spring constant of the system from changing during driving. On the other hand, when moving the optical element 101 without deformation, it is preferable to avoid making ΔF unnecessarily large, and to make it about one-fifth of F. For example, when moving the optical element 101 by the maximum amount in the positive direction of the X axis, the force generated by the drive unit 105X+ should be ΔF, and the force generated by the drive unit 105X- should be F + ΔF.

[0034] In the configuration shown in Figure 6, when moving the optical element 101 in any axial direction, friction between the deformable part 104 on the opposite axis to the drive axis and the movable part 111 of the drive unit 105 can cause hysteresis during driving, potentially reducing driving accuracy. Therefore, improving driving accuracy can be expected by using a low-friction material for the tip of the movable part 111 or by applying a lubricant to the tip of the movable part 111.

[0035] Figure 8 shows the adjustment mechanism 100 of the third embodiment. Figure 9 is an enlarged view of region 1000 in Figure 8. Matters not mentioned in the description of the third embodiment may be based on the second or third embodiment. In the third embodiment, one or more pairs of connectors similar to the pair of connectors consisting of the first connector 211 and the second connector 212 are added. In the example shown in Figure 8, three pairs of connectors are arranged between the first plate 201 and the second plate 202 in one deformation section 104.

[0036] Each added pair of connectors includes a third connector 213 and a fourth connector 214. Here, D3 is the distance between the portion where the first plate 201 and the third connector 213 are connected and the portion where the first plate 201 and the fourth connector 214 are connected. Also, D4 is the distance between the portion where the second plate 202 and the third connector 213 are connected and the portion where the second plate 202 and the fourth connector 214 are connected. In each added pair of connectors, it is preferable that D3 is smaller than D4.

[0037] Figure 10 shows the drive flow of the optical element 101 in the first to third embodiments. In step 101, the control unit 11 sets the target position of the optical element 101. Here, data showing the relationship between the exposure recipe and the aberration change of the projection optical system may be acquired in advance, and the drive amount of the optical element 101 may be set in advance for each exposure recipe. Alternatively, the aberration change may be constantly monitored, and the target position may be set when the aberration change reaches a threshold. Alternatively, the target position may be set by other methods.

[0038] Next, in step S102, the control unit 11 changes the command value supplied to the drive unit 105, and the drive unit 105 drives the optical element 101 according to that command value. Here, data showing the relationship between the command value supplied to the drive unit 105 and the amount of movement of the optical element 101 may be acquired in advance, and control (open control) may be employed in which the command value is changed based on that data. Alternatively, the amount of movement or position of the optical element 101 may be detected by the position sensor 106, and control (feedback control) may be employed in which the command value given to the drive unit 105 is adjusted based on the output of the position sensor 106.

[0039] In step S103, the control unit 11 uses the position sensor 106 to confirm that the position of the optical element 101 has entered a statically fixed range relative to the target position. Step S103 may be omitted if the driving accuracy and static stability of the optical element 101 allow it. Also, if open control is used for the control in step S102, the position sensor 106 is not required.

[0040] The first to third embodiments may be applied, for example, to an Albarez lens which is a pair of lenses composed of two optical elements, with a space between the two optical elements. When the Albarez lens has a first optical element and a second optical element, the optical element 101 can be driven by an adjustment mechanism 100 for at least one of the first optical element and the second optical element. This makes it possible to change the aberration caused by the relative displacement between the first optical element and the second optical element.

[0041] The following describes a method for manufacturing articles using the above-described exposure apparatus. The article manufacturing method may include an exposure step of exposing a substrate with the above-described exposure apparatus, and a processing step of obtaining an article by processing the substrate that has undergone the exposure step. The processing step may include, for example, a developing step, and may also include an etching step, a sealing step, a dicing step, and so on.

[0042] This specification and drawings include the following disclosures: (Document Title) Claims (Item 1) An adjustment mechanism for adjusting at least one of the position and shape of an optical element, It comprises a deformation part and a drive part that applies force to the optical element via the deformation part, The aforementioned deformed portion is A first plate having a first part and a second part, A second plate is positioned between the first plate and the optical element, having a third portion and a fourth portion, and transmitting force to the optical element. A first connecting part that connects the first part and the third part, It includes a second connecting portion that connects the second portion and the fourth portion, The distance between the first part and the second part is smaller than the distance between the third part and the fourth part. The drive unit applies force between the first portion and the second portion of the first plate. An adjustment mechanism characterized by the following features. (Item 2) The holding portion for holding the optical element is further provided, The drive unit adjusts at least one of the position and shape of the optical element via the holding portion by applying force to the side surface of the holding portion. The adjustment mechanism described in item 1, characterized by the features described herein. (Item 3) It includes two first fixing parts for fixing the first plate to the member that holds the deformed portion, The first and second portions are positioned between the two first fixing portions. The adjustment mechanism described in item 2, characterized by the features described herein. (Item 4) It includes two second fixing parts for fixing the second plate to the holding part, The third and fourth portions are positioned between the two second fixing portions. The adjustment mechanism described in item 3, characterized by the features described herein. (Item 5) The aforementioned deformed portion is It further includes one or more pairs of connecting parts that connect the first plate and the second plate, and each pair of connecting parts includes a third connecting part and a fourth connecting part. The distance between the portion where the first plate and the third connecting portion are connected and the distance between the portion where the first plate and the fourth connecting portion are connected is smaller than the distance between the portion where the second plate and the third connecting portion are connected and the distance between the second plate and the fourth connecting portion. The adjustment mechanism according to any one of items 1 to 4, characterized in that it is a feature of the adjustment mechanism described in any one of items 1 to 4. (Item 6) The first plate, the second plate, the first connecting portion, and the second connecting portion are arranged symmetrically with respect to a virtual plane that includes the position where the first plate is subjected to force by the drive unit and the optical axis of the optical element. The adjustment mechanism according to any one of items 1 to 5, characterized in that it is a feature of the adjustment mechanism described in any one of items 1 to 5. (Item 7) The thickness of the second plate is 0.9 times or more and 1.1 times or less the thickness of the first plate. The adjustment mechanism according to any one of items 1 to 6, characterized in that it is a feature of the adjustment mechanism described in any one of items 1 to 6. (Item 8) In a direction parallel to the optical axis of the optical element, the dimensions of the second plate are 0.9 times or more and 1.1 times or less the dimensions of the first plate. The adjustment mechanism according to any one of items 1 to 7, characterized in that it is a feature of the adjustment mechanism described in any one of items 1 to 7. (Item 9) In a direction perpendicular to a virtual plane including the position where the first plate is subjected to force by the drive unit and the optical axis of the optical element, the dimensions of the second plate are 0.9 times or more and 1.1 times or less the dimensions of the first plate. The adjustment mechanism according to any one of items 1 to 8, characterized in that it is a mechanism described in any one of items 1 to 8. (Item 10) The interval between the first part and the second part is 0.8 times or less the interval between the third part and the fourth part. The adjustment mechanism according to any one of items 1 to 9, characterized in that it is a feature of the adjustment mechanism described in any one of items 1 to 9. (Item 11) The interval between the first part and the second part is at least 0.2 times the interval between the third part and the fourth part. The adjustment mechanism described in item 10, characterized by the features described herein. (Item 12) The drive unit has a movable part that applies force to the first plate, and in a direction perpendicular to the direction toward the optical axis of the optical element from the movable part, the width of the movable part is smaller than the distance between the first part and the second part. The adjustment mechanism according to any one of items 1 to 11, characterized in that it is a feature of the adjustment mechanism described in any one of items 1 to 11. (Item 13) The drive unit has a movable part that applies force to the first plate, and the movable part has a tip that contacts the first plate. In a direction perpendicular to the direction toward the optical axis of the optical element from the movable part, the width of the tip is smaller than the distance between the first part and the second part. The adjustment mechanism according to any one of items 1 to 11, characterized in that it is a feature of the adjustment mechanism described in any one of items 1 to 11. (Item 14) The drive unit is a pneumatic actuator or a piezo actuator. The adjustment mechanism according to any one of items 1 to 13, characterized in that it is a feature of the adjustment mechanism described in any one of items 1 to 13. (Item 15) The system further includes a sensor for detecting the position of the optical element, The drive unit is controlled based on the output of the sensor. The adjustment mechanism according to any one of items 1 to 14, characterized in that it is a feature of the adjustment mechanism described in any one of items 1 to 14. (Item 16) The aforementioned optical element is one of the lenses that make up the Albarez lens. The adjustment mechanism according to any one of items 1 to 15, characterized in that it is a feature of the adjustment mechanism described in any one of items 1 to 15. (Item 17) A plurality of support mechanisms are provided to support the optical element, each of the plurality of support mechanisms is provided with the deformation part, and at least one of the plurality of support mechanisms is provided with the drive part. The adjustment mechanism according to any one of items 1 to 16, characterized in that it is a mechanism described in any one of items 1 to 16. (Item 18) Optical elements and An adjustment mechanism according to any one of items 1 to 17 for adjusting at least one of the position and shape of the optical element, An optical system characterized by comprising the following features. (Item 19) An exposure apparatus for exposing a substrate, An exposure apparatus characterized by comprising the optical system described in item 1, configured to project the pattern of the original plate onto the substrate. (Item 20) An exposure process in which the substrate is exposed using the exposure apparatus described in item 19, A processing step to obtain an article by processing the substrate that has undergone the exposure step, A method for manufacturing articles, characterized by comprising the following features. (others) The invention is not limited to the embodiments described above, and various modifications and variations are possible without departing from the spirit and scope of the invention. Accordingly, claims are attached to disclose the scope of the invention. [Explanation of Symbols]

[0043] 100: Adjustment mechanism, 101: Optical element, 102: Holding part, 103: Lens barrel, 104: Deformation part, 105: Drive part, 106: Position sensor, 201: First plate, 202: Second plate, 211: First connection part, 212: Second connection part, P1: First part, P2: Second part, P3: Third part, P4: Fourth part

Claims

1. An adjustment mechanism for adjusting at least one of the position and shape of an optical element, The deformed part, The system includes a drive unit that applies force to the optical element via the deformation unit, The aforementioned deformed portion is A first plate having a first part and a second part, A second plate is positioned between the first plate and the optical element, and has a third portion and a fourth portion, which transmits force to the optical element. A first connecting portion that connects the first portion and the third portion, It includes a second connecting portion that connects the second portion and the fourth portion, The distance between the first part and the second part is smaller than the distance between the third part and the fourth part. The drive unit applies force between the first portion and the second portion of the first plate. An adjustment mechanism characterized by the following features.

2. The holding portion for holding the optical element is further provided, The drive unit adjusts at least one of the position and shape of the optical element via the holding portion by applying force to the side surface of the holding portion. The adjustment mechanism according to feature 1.

3. It includes two first fixing parts for fixing the first plate to the member that holds the deformed portion, The first and second portions are positioned between the two first fixing portions. The adjustment mechanism according to feature 2.

4. It includes two second fixing parts for fixing the second plate to the holding part, The third and fourth portions are positioned between the two second fixing portions. The adjustment mechanism according to feature 3.

5. The aforementioned deformed portion is It further includes one or more pairs of connecting parts that connect the first plate and the second plate, and each pair of connecting parts includes a third connecting part and a fourth connecting part. The distance between the portion where the first plate and the third connecting portion are connected and the distance between the portion where the first plate and the fourth connecting portion are connected is smaller than the distance between the portion where the second plate and the third connecting portion are connected and the distance between the second plate and the fourth connecting portion. The adjustment mechanism according to feature 1.

6. The first plate, the second plate, the first connecting portion, and the second connecting portion are arranged symmetrically with respect to a virtual plane that includes the position where the first plate is subjected to force by the drive unit and the optical axis of the optical element. The adjustment mechanism according to feature 1.

7. The thickness of the second plate is 0.9 times or more and 1.1 times or less the thickness of the first plate. The adjustment mechanism according to feature 1.

8. In a direction parallel to the optical axis of the optical element, the dimensions of the second plate are 0.9 times or more and 1.1 times or less the dimensions of the first plate. The adjustment mechanism according to feature 1.

9. In a direction perpendicular to a virtual plane including the position where the first plate is subjected to force by the drive unit and the optical axis of the optical element, the dimensions of the second plate are 0.9 times or more and 1.1 times or less the dimensions of the first plate. The adjustment mechanism according to feature 1.

10. The distance between the first part and the second part is 0.8 times or less the distance between the third part and the fourth part. The adjustment mechanism according to feature 1.

11. The distance between the first part and the second part is at least 0.2 times the distance between the third part and the fourth part. The adjustment mechanism according to feature 10.

12. The drive unit has a movable part that applies force to the first plate, and in a direction perpendicular to the direction toward the optical axis of the optical element from the movable part, the width of the movable part is smaller than the distance between the first part and the second part. The adjustment mechanism according to feature 1.

13. The drive unit has a movable part that applies force to the first plate, and the movable part has a tip that contacts the first plate. In a direction perpendicular to the direction toward the optical axis of the optical element from the movable part, the width of the tip is smaller than the distance between the first part and the second part. The adjustment mechanism according to any one of claims 1 to 11.

14. The drive unit is a pneumatic actuator or a piezo actuator. The adjustment mechanism according to feature 1.

15. The system further includes a sensor for detecting the position of the optical element, The drive unit is controlled based on the output of the sensor. The adjustment mechanism according to feature 1.

16. The aforementioned optical element is one of the lenses that make up the Albarez lens. The adjustment mechanism according to feature 1.

17. A plurality of support mechanisms are provided to support the optical element, each of the plurality of support mechanisms is provided with the deformation part, and at least one of the plurality of support mechanisms is provided with the drive part. The adjustment mechanism according to feature 1.

18. Optical elements and The adjustment mechanism according to claim 1, which adjusts at least one of the position and shape of the optical element, An optical system characterized by comprising the following features.

19. An exposure apparatus for exposing a substrate, An exposure apparatus characterized by comprising the optical system according to claim 18, configured to project the pattern of the original plate onto the substrate.

20. An exposure step of exposing a substrate using the exposure apparatus described in claim 19, A processing step to obtain an article by processing the substrate that has undergone the exposure step, A method for manufacturing articles, characterized by comprising the following features.

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