Phase shifter and phase shifting method

Abstract

The present invention increases the speed of responsiveness of an antenna. This phase shifter comprises: a plurality of transmission paths that are each connected to an antenna element at one end, that each have a gap formed, and that are of different lengths; a plurality of movable electrodes that are each provided in respective gaps of the transmission paths, and that switch between an ON state, in which the movable electrode moves in a direction parallel to a respective transmission path, overlaps with transmission path ends at either end of the gap, and achieves electromagnetic induction coupling with the transmission path ends, and an OFF state in which the moveable electrode moves in a direction parallel to a respective transmission path, does not overlap with at least one of the transmission path ends at either end of the gap, and does not achieve electromagnetic induction coupling with at least one of the transmission path ends; and a plurality of MEMS mechanisms that respectively move the movable electrodes. The MEMS mechanisms change a phase difference by switching the movable electrodes between the ON state and the OFF state and switching the lengths of the transmission paths.

Description

[Technical field]

[0001] The present invention relates to an antenna phase shifter and a phase shifting method thereof. [Background technology]

[0002] A phase shifter that controls the phase using liquid crystal is known (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Special Publication No. 2014-531843 Summary of the Invention [Problem to be solved by the invention]

[0004] In the above phase shifter, the operating speed of the liquid crystal is slow, so there is a risk of the response of the antenna being reduced. An object of the present disclosure is to provide a phase shifter and a phase shifting method thereof that solves the above-mentioned problems. [Means for solving the problem]

[0005] One aspect of the present invention for achieving the above object is to a plurality of transmission lines having different lengths, each of which has a gap formed therein, and one end of each of which is connected to an antenna element; a plurality of movable electrodes respectively provided in gaps of the transmission line, the movable electrodes being switched between an on state in which the movable electrodes move in a direction parallel to the transmission line and overlap with the transmission line ends at both ends of the gap and are electromagnetically inductively coupled to the transmission line ends, and an off state in which the movable electrodes move in a direction parallel to the transmission line and do not overlap with at least one of the transmission line ends at both ends of the gap and are not electromagnetically inductively coupled to at least one of the transmission line ends; A plurality of MEMS mechanisms each moving the movable electrode; Equipped with The MEMS mechanism changes the phase difference by switching the movable electrode between an on state and an off state to switch the length of the transmission line. It is. One aspect of the present invention for achieving the above object is to a pair of fixed electrodes provided at both ends of a gap formed in a transmission line connected to the antenna element; a movable electrode that overlaps with both ends of the pair of fixed electrodes and is electromagnetically inductively coupled with the pair of fixed electrodes and moves in at least one of a direction parallel to and a direction perpendicular to the fixed electrodes; a MEMS mechanism for moving the movable electrode; Equipped with the MEMS mechanism changes the phase difference by at least one of moving the movable electrode in a parallel direction to change an overlapping amount between both ends of the movable electrode and a pair of fixed electrodes, and moving the movable electrode in a vertical direction to change a distance between both ends of the movable electrode and a pair of fixed electrodes. may be also possible. One aspect of the present invention for achieving the above object is to a plurality of transmission lines having different lengths, each of which has a gap formed therein, and one end of each of which is connected to an antenna element; a plurality of first movable electrodes respectively provided in gaps of the transmission line, the first movable electrodes being switched between an on state in which the first movable electrodes move in a direction parallel to the transmission line, overlap with the transmission line ends at both ends of the gap, and are electromagnetically inductively coupled to the transmission line ends, and an off state in which the first movable electrodes move in a direction parallel to the transmission line, do not overlap with at least one of the transmission line ends at both ends of the gap, and are not electromagnetically inductively coupled to at least one of the transmission line ends; A pair of fixed electrodes provided on both ends of the gap of the transmission line; a second movable electrode that overlaps with both ends of the pair of fixed electrodes and is electromagnetically inductively coupled with the pair of fixed electrodes and moves in at least one of a direction parallel to and a direction perpendicular to the pair of fixed electrodes; a plurality of MEMS mechanisms for moving the first and second movable electrodes, respectively; Equipped with the MEMS mechanism changes the phase difference by at least one of switching the first movable electrode between an on state and an off state to switch the length of a transmission line, and changing at least one of an overlap amount and a distance between both ends of the second movable electrode and a pair of fixed electrodes to change a coupling capacitance between the second movable electrode and the fixed electrodes. may be also possible. One aspect of the present invention for achieving the above object is to a plurality of transmission lines having different lengths, each of which has a gap formed therein, and one end of each of which is connected to an antenna element; a plurality of movable electrodes respectively provided in gaps of the transmission line, the movable electrodes being switched between an on state in which the movable electrodes move in a direction parallel to the transmission line and overlap with the transmission line ends at both ends of the gap and are electromagnetically inductively coupled to the transmission line ends, and an off state in which the movable electrodes move in a direction parallel to the transmission line and do not overlap with at least one of the transmission line ends at both ends of the gap and are not electromagnetically inductively coupled to at least one of the transmission line ends; A plurality of MEMS mechanisms each moving the movable electrode; A phase shifting method for a phase shifter comprising: The MEMS mechanism changes the length of the transmission line by switching the movable electrode between an on state and an off state, thereby changing the phase difference. may be also possible. One aspect of the present invention for achieving the above object is to a pair of fixed electrodes provided at both ends of a gap formed in a transmission line connected to the antenna element; a movable electrode that overlaps with both ends of the pair of fixed electrodes and is electromagnetically inductively coupled with the pair of fixed electrodes and moves in at least one of a direction parallel to and a direction perpendicular to the fixed electrodes; a MEMS mechanism for moving the movable electrode; A phase shifting method for a phase shifter comprising: the MEMS mechanism changes the phase difference by at least one of moving the movable electrode in a parallel direction to change an overlapping amount between both ends of the movable electrode and a pair of fixed electrodes, and moving the movable electrode in a vertical direction to change a distance between both ends of the movable electrode and a pair of fixed electrodes. may be also possible. One aspect of the present invention for achieving the above object is to a plurality of transmission lines having different lengths, each of which has a gap formed therein, and one end of each of which is connected to an antenna element; a plurality of first movable electrodes respectively provided in gaps of the transmission line, the first movable electrodes being switched between an on state in which the first movable electrodes move in a direction parallel to the transmission line, overlap with the transmission line ends at both ends of the gap, and are electromagnetically inductively coupled to the transmission line ends, and an off state in which the first movable electrodes move in a direction parallel to the transmission line, do not overlap with at least one of the transmission line ends at both ends of the gap, and are not electromagnetically inductively coupled to at least one of the transmission line ends; a pair of fixed electrodes provided at the ends of the transmission line on both ends of the gap; a second movable electrode that overlaps with both ends of the pair of fixed electrodes and is electromagnetically inductively coupled with the pair of fixed electrodes and moves in at least one of a direction parallel to and a direction perpendicular to the pair of fixed electrodes; a plurality of MEMS mechanisms for moving the first and second movable electrodes, respectively; A phase shifting method for a phase shifter comprising: the MEMS mechanism changes the phase difference by at least one of switching the first movable electrode between an on state and an off state to switch the length of the transmission line, and changing at least one of the amount and distance of overlapping portions between both ends of the second movable electrode and a pair of fixed electrodes to change a coupling capacitance between the second movable electrode and the fixed electrodes. may be also possible. Effect of the Invention

[0006] According to the present disclosure, it is possible to provide a phase shifter and a phase shifting method thereof that solve the above-mentioned problems. [Brief description of the drawings]

[0007] [Figure 1] FIG. 2 is a diagram showing a schematic configuration of a phase shifter according to the present embodiment. [Diagram 2] 5A to 5C are diagrams illustrating the operation of the movable electrode according to the embodiment. [Diagram 3]1 is a block diagram showing a schematic configuration of a phase shifter according to an embodiment of the present invention; [Figure 4] 5A to 5C are diagrams illustrating the operation of the movable electrode according to the embodiment. [Diagram 5] FIG. 2 is a diagram showing a schematic configuration of a phase shifter according to the present embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] EMBODIMENT 1 Hereinafter, an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a diagram showing a schematic configuration of a phase shifter according to this embodiment. The phase shifter 1 according to this embodiment includes a plurality of transmission lines 2 having different lengths, a plurality of movable electrodes 3 provided on each transmission line 2, and a plurality of MEMS mechanisms 4 provided on each movable electrode 3.

[0009] An antenna element 5 is connected to one end of the transmission line 2. The antenna element 5 is, for example, a patch antenna, and has a signal supply window 51 and the like formed therein.

[0010] A gap 21 is provided at a fixed interval in each transmission line 2. For example, a first transmission line 2a, a second transmission line 2b, a third transmission line 2c, and a fourth transmission line 2d are provided from left to right in Fig. 1, and the lengths are set to be longer in this order. The transmission lines 2 are made of a conductive metal material such as copper.

[0011] A movable electrode 3 capable of moving in a direction parallel to each transmission line 2 is provided in the gap 21 of each transmission line 2. The movable electrode 3 is made of a conductive metal material such as copper. Fig. 2 is a diagram showing a schematic diagram of the operation of the movable electrode according to this embodiment. The movable electrode 3 moves in a parallel direction without contacting the transmission line 2 while maintaining a constant distance therefrom.

[0012] The movable electrode 3 moves in a direction parallel to the transmission line 2, overlapping with the ends of the transmission line at both ends of the gap 21 and entering an ON state (left side of FIG. 2) in which it is electromagnetically inductively coupled to the ends of the transmission line. When the movable electrode 3 enters an ON state, the ends of the transmission line at both ends of the gap 21 and both ends of the movable electrode 3 are capacitively coupled and electricity flows between them.

[0013] Furthermore, the movable electrode 3 moves in a direction parallel to the transmission line 2 and does not overlap with at least one of the transmission line ends at both ends of the gap 21, and at least one of the transmission line ends is in an OFF state (right side of FIG. 2) where there is no electromagnetic induction coupling. When the movable electrode 3 is in the OFF state, one of the transmission line ends at both ends of the gap 21 and one of the ends of the movable electrode 3 are not capacitively coupled and no current flows between them. In this way, the movable electrode 3 has a switching function that switches between an ON state and an OFF state by moving in the parallel direction.

[0014] The MEMS mechanism 4 is provided on the movable electrode 3 and moves the movable electrode 3 in a parallel direction. The MEMS mechanism 4 is connected to the movable electrode 3 via an insulator. A MEMS (Micro Electro Mechanical Systems) mechanism is a device with a micron-level structure that integrates mechanical components such as sensors, actuators, and electronic circuits on a semiconductor silicon substrate, glass substrate, organic material, etc. The MEMS mechanism 4 has the characteristic of being able to move the movable electrode 3 minutely and at high speed.

[0015] The MEMS mechanism 4 changes the phase difference by switching each of the movable electrodes 3 between an on state and an off state to switch the length of the transmission line 2. Here, an example of a phase shifting method of the phase shifter 1 will be specifically described.

[0016] 1, the MEMS mechanism 4 switches the movable electrode 3 in the gap 21 of the third transmission line 2c, which is the third longest, to the ON state, and switches the movable electrodes 3 in the gaps 21 of the other first, second and fourth transmission lines 2a, 2b and 2d to the OFF state. The MEMS mechanism 4 also switches the movable electrode 3 in the gap 21 of the longest first transmission line 2a to the ON state, and switches the movable electrodes 3 in the gaps 21 of the other second to fourth transmission lines 2b, 2c and 2d to the OFF state.

[0017] Similarly, the MEMS mechanism 4 switches on the movable electrodes 3 in the gaps 21 of the transmission line 2 of a specific length, and switches off the movable electrodes 3 in the gaps 21 of the other transmission line 2. In this way, by changing the length of the path of the transmission line 2 through which the signal passes, the phase difference can be freely changed.

[0018] 1 are merely examples and are not limited to the above. As long as the length of the transmission path 2 can be switched by switching the movable electrode 3 of the gap 21 between the on state and the off state, the number of the transmission paths 2, the positions of the gaps 21, and the shape of the transmission path 2 may be arbitrary.

[0019] However, in related phase shifters, the operating speed of the liquid crystal is slow, which causes a problem of reduced antenna response.

[0020] In contrast to this, in the phase shifter 1 according to this embodiment, as described above, the MEMS mechanism 4 changes the phase difference by switching the movable electrode 3 between the on state and the off state to switch the length of the transmission line 2. This makes it possible to quickly switch the movable electrode 3 between the on state and the off state by utilizing the characteristics of the high-speed operation of the MEMS mechanism 4, and to quickly change the phase difference, thereby making it possible to speed up the response of the antenna. For example, while the response speed of a liquid crystal type antenna is about several ms to several tens of ms, the response speed of the phase shifter according to this embodiment is about 10 μs to 100 μs, which is very fast.

[0021] In addition, since the MEMS mechanism 4 utilizes electrostatic force, it is less susceptible to temperature fluctuations and has excellent controllability compared to liquid crystal. This allows the phase difference to be controlled with higher precision. Furthermore, since the MEMS mechanism 4 can be formed in a large area, an antenna of a desired size can be manufactured inexpensively. Furthermore, since wires become thinner as the frequency increases, it is advantageous to use the fine MEMS mechanism 4 according to this embodiment.

[0022] A dielectric may be inserted between the movable electrode 3 and the ends of the transmission line on both sides of the gap 21. This produces a wavelength shortening effect, allowing the phase shifter 1 to be made even more compact.

[0023] EMBODIMENT 2 3 is a block diagram showing a schematic configuration of a phase shifter according to this embodiment. A phase shifter 20 according to this embodiment includes a pair of fixed electrodes 22, a movable electrode 3 provided on the pair of fixed electrodes 22, and a MEMS mechanism 4 provided on the movable electrode 3.

[0024] A pair of fixed electrodes 22 are provided at both ends of a gap 21 formed in the transmission line 2, respectively. The fixed electrodes 22 are made of a conductive metal member such as copper. The movable electrode 3 is provided so as to straddle the gap 21 of the transmission line 2. The pair of fixed electrodes 22 and the transmission line ends at both ends of the gap 21 may be integrally formed. An antenna element 5 is connected to one end of the transmission line 2.

[0025] 4 is a diagram showing a schematic diagram of the operation of the movable electrode according to this embodiment. A pair of fixed electrodes 22 are arranged at a constant distance apart. The movable electrode 3 moves in a parallel direction without contacting each of the fixed electrodes 22 while maintaining a constant distance from each of the fixed electrodes 22.

[0026] The pair of fixed electrodes 22 overlap and are electromagnetically inductively coupled to both ends of the movable electrode 3. For example, as shown in Fig. 4, the coupling capacitance between the left fixed electrode 22 and the left end of the movable electrode 3 is C1, and the coupling capacitance between the right fixed electrode 22 and the right end of the movable electrode 3 is C2. Then, when both ends of the movable electrode 3 overlap and are electromagnetically inductively coupled to the pair of fixed electrodes 22 and move in the parallel direction, the series coupling capacitances C1 and C2 change.

[0027] The MEMS mechanism 4 moves the movable electrode 3 in a parallel direction to change the amount of overlap between both ends of the movable electrode 3 and the pair of fixed electrodes 22. This changes the coupling capacitance between the movable electrode 3 and the fixed electrodes 22, and can change the phase difference. The MEMS mechanism 4 is formed in a position where it does not affect the signal.

[0028] 3, one each of the movable electrode 3, the gap 21, and the MEMS mechanism 4 is provided on the transmission line 2, but the present invention is not limited to this. The numbers of the movable electrodes 3, the gaps 21, and the MEMS mechanisms 4 provided on the transmission line 2 may be arbitrary.

[0029] As described above, in the phase shifter 1 according to this embodiment, the MEMS mechanism 4 moves the movable electrode 3 in the parallel direction to change the amount of overlap between the movable electrode 3 and each fixed electrode 22. In this way, by utilizing the high-speed operation characteristics of the MEMS mechanism 4, the amount of overlap between the movable electrode 3 and each fixed electrode 22 can be changed at high speed, and the phase difference can be changed at high speed, thereby making it possible to speed up the response of the antenna.

[0030] Furthermore, the MEMS mechanism 4 can change the amount of overlap between both ends of the movable electrode 3 and the pair of fixed electrodes 22, thereby continuously changing the coupling capacitance between the movable electrode 3 and the fixed electrodes 22. This enables minute adjustment of the phase difference according to the amount of overlap, and allows fine adjustment of the phase difference to be performed at high speed.

[0031] The MEMS mechanism 4 may change the phase difference by moving the movable electrode 3 in the vertical direction to change the distance between both ends of the movable electrode 3 and the pair of fixed electrodes 22, thereby changing the coupling capacitance between the movable electrode 3 and the fixed electrodes 22. As described above, it is more preferable for the MEMS mechanism 4 to move the movable electrode 3 in the parallel direction, in order to maintain strong capacitive coupling.

[0032] Furthermore, the MEMS mechanism 4 may change the phase difference by moving the movable electrode 3 in a parallel direction to change the amount of overlap between both ends of the movable electrode 3 and a pair of fixed electrodes 22, and by moving the movable electrode 3 in a vertical direction to change the distance between both ends of the movable electrode 3 and a pair of fixed electrodes 22.

[0033] EMBODIMENT 3 5 is a diagram showing a schematic configuration of a phase shifter according to this embodiment. A phase shifter 30 according to this embodiment includes a plurality of transmission lines 2 having different lengths, a plurality of first and second movable electrodes 31, 32 provided on each transmission line 2, and a plurality of MEMS mechanisms 4 provided on the first and second movable electrodes 31, 32.

[0034] One end of the transmission line 2 is connected to the antenna element 5. A plurality of gaps 21 are formed in the transmission line 2. Fixed electrodes 22 may be provided at the transmission line ends on both ends of the gap 21. The first movable electrode 31 is provided in the gap 21 of the transmission line 2, moves in a direction parallel to the transmission line 2, and overlaps with the transmission line ends on both ends of the gap 21, entering an ON state in which it is electromagnetically inductively coupled to the transmission line ends.

[0035] Moreover, the first movable electrode 31 moves in a direction parallel to the transmission line 2 so as not to overlap at least one of the transmission line ends at both ends of the gap 21, and is in an OFF state in which at least one of the transmission line ends is not electromagnetically inductively coupled. The first movable electrode 31 has a switching function that switches between an ON state and an OFF state by moving in the parallel direction.

[0036] A pair of fixed electrodes 22 are provided at the ends of the transmission line at both ends of the gap 21. The fixed electrodes 22 may be configured integrally with the ends of the transmission line at both ends of the gap 21. The second movable electrode 32 moves in a direction parallel to the fixed electrodes 22 while overlapping with both ends of the pair of fixed electrodes 22 and being electromagnetically inductively coupled thereto.

[0037] The second movable electrode 32 may overlap both ends of the pair of fixed electrodes 22 to be electromagnetically inductively coupled, and move in a direction perpendicular to the fixed electrode 22. The MEMS mechanism 4 moves the first and second movable electrodes 31, 32, respectively.

[0038] The MEMS mechanism 4 switches the first movable electrode 31 between an on state and an off state to switch the length of the transmission path 2. This enables stepwise adjustment of the phase difference according to the preset length of the transmission path 2, and allows for a wide range of modulation of the phase difference.

[0039] Furthermore, the MEMS mechanism 4 changes the amount of overlap between both ends of the second movable electrode 32 and the pair of fixed electrodes 22, thereby changing the coupling capacitance between the second movable electrode 32 and the fixed electrodes 22. This enables minute adjustment of the phase difference according to the amount of overlap, and allows fine adjustment of the phase difference.

[0040] That is, by switching the first movable electrode 31 between the on state and the off state, the length of the path of the transmission line 2 through which the signal passes can be changed, and the phase difference can be roughly adjusted. Furthermore, by adjusting the overlapping amount of the second movable electrode 32 to change the coupling capacitance between the second movable electrode 32 and the fixed electrode 22, the phase difference can be finely adjusted. This allows for easy and highly accurate phase difference adjustment.

[0041] 5 are merely examples and are not limited to the above. As long as the length of the transmission path 2 can be switched by switching the first movable electrode 31 between an on state and an off state, the number of transmission paths 2, the positions of the gaps 21, and the shape of the transmission path 2 may be arbitrary.

[0042] In addition, as long as the phase difference can be finely adjusted, the number and positions of the second movable electrodes 32 may be arbitrary. For example, a single or multiple gaps 21 may be newly formed in the transmission line 2 shown in FIG.

[0043] Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included in the scope and spirit of the invention, and are included in the scope of the invention and its equivalents described in the claims. This application claims priority based on Japanese Patent Application No. 2021-056222, filed on March 29, 2021, the disclosure of which is incorporated herein in its entirety. [Explanation of symbols]

[0044] 1 phase shifter 2 Transmission Line 3 Movable electrode 4 MEMS mechanism 5 Antenna elements 20 phase shifter 21. Gap 22 Fixed electrode 30 phase shifter 31 1st movable electrode 32 Second movable electrode 51 Signal supply window

Claims

1. a plurality of transmission lines having different lengths, each of which has a gap formed therein, and one end of each of which is connected to an antenna element; a plurality of movable electrodes respectively provided in gaps of the transmission line, the movable electrodes being switched between an on state in which the movable electrodes move in a direction parallel to the transmission line and overlap with the transmission line ends at both ends of the gap and are electromagnetically inductively coupled to the transmission line ends, and an off state in which the movable electrodes move in a direction parallel to the transmission line and do not overlap with at least one of the transmission line ends at both ends of the gap and are not electromagnetically inductively coupled to at least one of the transmission line ends; A plurality of MEMS mechanisms each moving the movable electrode; Equipped with The MEMS mechanism is a phase shifter that changes a phase difference by switching the movable electrode between an on state and an off state to switch the length of a transmission line.

2. a pair of fixed electrodes provided at both ends of a gap formed in a transmission line connected to the antenna element; a movable electrode that overlaps with both ends of the pair of fixed electrodes and is electromagnetically inductively coupled with the pair of fixed electrodes and moves in at least one of a direction parallel to and a direction perpendicular to the fixed electrodes; a MEMS mechanism for moving the movable electrode; Equipped with The MEMS mechanism changes the phase difference by at least one of moving the movable electrode in a parallel direction to change the amount of overlap between both ends of the movable electrode and a pair of fixed electrodes, and moving the movable electrode in a vertical direction to change the distance between the both ends of the movable electrode and a pair of fixed electrodes.

3. a plurality of transmission lines having different lengths, each of which has a gap formed therein, and one end of each of which is connected to an antenna element; a plurality of first movable electrodes respectively provided in gaps of the transmission line, the first movable electrodes being switched between an on state in which the first movable electrodes move in a direction parallel to the transmission line and overlap with the transmission line ends at both ends of the gap and are electromagnetically inductively coupled to the transmission line ends, and an off state in which the first movable electrodes move in a direction parallel to the transmission line and do not overlap with at least one of the transmission line ends at both ends of the gap and are not electromagnetically inductively coupled to at least one of the transmission line ends; A pair of fixed electrodes provided on both ends of the gap of the transmission line; a second movable electrode that overlaps with both ends of the pair of fixed electrodes and is electromagnetically inductively coupled with the pair of fixed electrodes and moves in at least one of a direction parallel to the pair of fixed electrodes and a direction perpendicular to the pair of fixed electrodes; a plurality of MEMS mechanisms for moving the first and second movable electrodes, respectively; Equipped with The MEMS mechanism changes the phase difference by at least one of switching the first movable electrode between an on state and an off state to switch the length of the transmission path, and changing at least one of the amount of overlap and distance between both ends of the second movable electrode and a pair of fixed electrodes to change the coupling capacitance between the second movable electrode and the fixed electrodes.

4. a plurality of transmission lines having different lengths, each of which has a gap formed therein, and one end of each of which is connected to an antenna element; a plurality of movable electrodes respectively provided in gaps of the transmission line, the movable electrodes being switched between an on state in which the movable electrodes move in a direction parallel to the transmission line and overlap with the transmission line ends at both ends of the gap and are electromagnetically inductively coupled to the transmission line ends, and an off state in which the movable electrodes move in a direction parallel to the transmission line and do not overlap with at least one of the transmission line ends at both ends of the gap and are not electromagnetically inductively coupled to at least one of the transmission line ends; A plurality of MEMS mechanisms each moving the movable electrode; A phase shifting method for a phase shifter comprising: The MEMS mechanism changes the length of the transmission line by switching the movable electrode between an on state and an off state, thereby changing the phase difference.

5. a pair of fixed electrodes provided at both ends of a gap formed in a transmission line connected to the antenna element; a movable electrode that overlaps with both ends of the pair of fixed electrodes and is electromagnetically inductively coupled with the pair of fixed electrodes and moves in at least one of a direction parallel to and a direction perpendicular to the fixed electrodes; a MEMS mechanism for moving the movable electrode; A phase shifting method for a phase shifter comprising: The MEMS mechanism changes the phase difference by at least one of moving the movable electrode in a parallel direction to change the amount of overlap between both ends of the movable electrode and a pair of fixed electrodes, and moving the movable electrode in a vertical direction to change the distance between both ends of the movable electrode and a pair of fixed electrodes.

6. a plurality of transmission lines having different lengths, each of which has a gap formed therein, and one end of each of which is connected to an antenna element; a plurality of first movable electrodes respectively provided in gaps of the transmission line, the first movable electrodes being switched between an on state in which the first movable electrodes move in a direction parallel to the transmission line and overlap with the transmission line ends at both ends of the gap and are electromagnetically inductively coupled to the transmission line ends, and an off state in which the first movable electrodes move in a direction parallel to the transmission line and do not overlap with at least one of the transmission line ends at both ends of the gap and are not electromagnetically inductively coupled to at least one of the transmission line ends; a pair of fixed electrodes provided at the ends of the transmission line on both ends of the gap; a second movable electrode that overlaps with both ends of the pair of fixed electrodes and is electromagnetically inductively coupled with the pair of fixed electrodes and moves in at least one of a direction parallel to the pair of fixed electrodes and a direction perpendicular to the pair of fixed electrodes; a plurality of MEMS mechanisms for moving the first and second movable electrodes, respectively; A phase shifting method for a phase shifter comprising: The MEMS mechanism changes the phase difference by at least one of switching the first movable electrode between an on state and an off state to switch the length of the transmission path, and changing at least one of the amount and distance of the overlap between both ends of the second movable electrode and a pair of fixed electrodes to change the coupling capacitance between the second movable electrode and the fixed electrodes.

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