Cutting device and loading plate

Abstract

To enable continuous cutting of a workpiece.SOLUTION: A cutting device 1 includes sub chuck tables 251, 252 each of which is located adjacent to a chuck table 20, disposed at holding means, and holds a dresser board formed in a plate-like shape by bonding abrasive grains. Further, the cutting device 1 includes dresser holding units 61, 62 which hold the dresser board so as to transport the dresser board to the sub chuck table. The dresser holding units include: holding parts 610, 620 which hold the dresser board; and vertical movement means 611, 621 which move the holding parts in a Z axis direction.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a cutting device and a mounting plate. [Background technology]

[0002] A cutting device cuts a workpiece using the cutting edge on the periphery of a cutting blade. Since the workpiece contains copper, there is a problem that copper adheres to the cutting edge of the cutting blade when the workpiece is cut, causing the cutting edge to become clogged and reducing the cutting efficiency.

[0003] Therefore, as disclosed in Patent Documents 1 and 2, the cutting blade is used to cut a precut board (dresser board) in which abrasive grains are formed into a plate shape, thereby restoring the sharpness of the cutting blade. For example, when cutting a soft material that causes cutting chips to adhere to the cutting blade, after a preset distance has been cut, the cutting chips that have adhered to the cutting blade are removed by cutting the dresser board. On the other hand, when cutting hard materials, the abrasive grains on the cutting edge become dulled, reducing the cutting efficiency. Therefore, in the same way as when cutting soft materials, it is necessary to cut the dresser board to remove the dulled abrasive grains and expose new abrasive grains to restore the sharpness of the cutting edge. In this way, when cutting a workpiece that clogs or distorts the cutting blade, after cutting a predetermined distance it is necessary to cut the dresser board to restore the sharpness of the cutting blade. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2014-103341 A [Patent Document 2] Special Express Publication No. 2015-164750 Summary of the Invention [Problem to be solved by the invention]

[0005] In the cutting device, a sub-chuck table that holds a dresser board for dressing the cutting blade is disposed adjacent to the chuck table. As multiple grooves are formed on the surface of the dresser board by dressing, the uncut area on the surface of the dresser board gradually disappears, making it necessary to replace the dresser board. Conventionally, when it became necessary to replace the dresser board, the wafer cutting process was temporarily stopped and the worker was notified of the request to replace the dresser board. Upon receiving the notification, the worker then replaced the dresser board, performed dressing, and resumed cutting process, which was a heavy burden on the worker and was one of the factors that reduced productivity. Therefore, the cutting device has a problem to be solved, which is to reduce the degree of involvement of the worker when replacing the dresser board and to enable dressing so as to perform continuous cutting processing. [Means for solving the problem]

[0006] The present invention comprises a holding means having a chuck table for holding a workpiece on a holding surface, cutting means having a cutting blade rotatably disposed thereon for cutting the workpiece, Z-axis moving means for moving the cutting means in a Z-axis direction perpendicular to the holding surface, X-axis moving means for moving the holding means in an X-axis direction which is the cutting feed direction of the cutting blade, Y-axis moving means for moving the Z-axis moving means in a Y-axis direction perpendicular to the Z-axis direction and the X-axis direction, and a sub-chuck table disposed on the holding means adjacent to the chuck table and for holding a dresser board formed into a plate shape by adhering abrasive grains. a dresser holding unit that holds the dresser board to be transported to the sub-chuck table, a dresser temporary placement section on which the dresser board is temporarily placed, and a control means, wherein the dresser holding unit has a holding section that holds the dresser board and an up-down moving means that moves the holding section in the Z-axis direction, and the control means controls at least the dresser holding unit, the Y-axis moving means, and the X-axis moving means, and transports the dresser board between the dresser temporary placement section and the sub-chuck table. The present invention includes a holding means having a chuck table for holding a workpiece on a holding surface, cutting means having a cutting blade rotatably disposed thereon for cutting the workpiece, Z-axis movement means for moving the cutting means in a Z-axis direction perpendicular to the holding surface, X-axis movement means for moving the holding means in an X-axis direction which is the cutting feed direction of the cutting blade, Y-axis movement means for moving the Z-axis movement means in a Y-axis direction perpendicular to the Z-axis direction and the X-axis direction, a sub-chuck table disposed on the holding means adjacent to the chuck table and holding a dresser board formed into a plate shape by adhering abrasive grains, a cassette stage on which a cassette capable of accommodating a plurality of workpieces is placed, and a workpiece is transported between the cassette placed on the cassette stage and the chuck table. The cutting device is provided with the transport means and the control means, and further includes a mounting plate having a mounting portion on which the dresser board is placed and capable of being stored in the cassette, and a dresser holding unit that holds the dresser board transported from the cassette to the chuck table by the transport means and placed on the mounting portion of the mounting plate held by the holding surface, the dresser holding unit including a holding portion that holds the dresser board, and an up-down moving means that moves the holding portion in the Z-axis direction, and the control means controls the X-axis moving means, the Y-axis moving means, and the dresser holding unit to transport the dresser board between the sub-chuck table and the mounting portion of the mounting plate held on the chuck table. The mounting plate included in the cutting device has at least two mounting sections, and the dresser board is mounted on at least one of the mounting sections, and the control means includes a mounting plate carry-in control section that controls the transport means to carry the mounting plate stored in the cassette placed on the cassette stage into the holding surface, and a control section that controls the X-axis moving means and the Y-axis moving means to carry out the dresser board held by the sub chuck table to the mounting section of the mounting plate held on the holding surface on which the dresser board is not placed. It is preferable that the cutting apparatus be equipped with a dresser ejection control unit that controls the X-axis movement means, the Y-axis movement means, and the dresser holding unit in order to load the dresser board placed on the loading portion of the loading plate held on the holding surface into the sub-chuck table, and a loading plate ejection control unit that controls the transport means in order to eject the loading plate held on the holding surface from the holding surface and store it in the cassette placed on the cassette stage. Effect of the Invention

[0007] In this cutting device, the dresser holding unit transports the dresser board to the sub-chuck table, eliminating the need for an operator to perform most of the work required to replace the dresser board. This reduces the burden on the operator and enables efficient cutting of the workpiece. [Brief description of the drawings]

[0008] [Figure 1] FIG. 2 is a perspective view showing the entire cutting device. [Diagram 2] FIG. 2 is a perspective view showing the inside of a machining area of ​​the cutting device. [Diagram 3] FIG. 4 is a cross-sectional view of a first dresser holding unit. [Figure 4] 11 is a cross-sectional view showing a state in which a dresser board is held by using a first dresser holding unit. FIG. [Diagram 5] FIG. 11 is a plan view showing a state in which a second dresser board is placed on the dresser temporary rest portion. [Figure 6] 13 is a plan view showing a state in which the second dresser board placed on the dresser temporary rest portion is held by the second dresser holding unit 62. FIG. [Figure 7] 11 is a plan view illustrating a state in which the first dresser board held by the sub-chuck table is held by the first dresser holding unit. FIG. [Figure 8] 13 is a plan view illustrating a state in which the second dresser board held by the second dresser holding unit is held on the sub chuck table. FIG. [Figure 9] 11 is a plan view showing a state in which the first dresser board held by the first dresser holding unit is placed on the dresser temporary rest portion. FIG. [Figure 10] 11 is a plan view showing a state in which the first dresser board placed on the dresser temporary rest portion is being removed. FIG. [Figure 11] FIG. 13 is a cross-sectional view of a third dresser holding unit. [Figure 12] 13 is a cross-sectional view showing a state in which a dresser board is held by using a third dresser holding unit. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] 1. Cutting equipment configuration The cutting device 1 shown in FIG. With the workpiece 140 positioned inside the annular frame 141, tape 142 is attached to the lower surface of the frame 141 and the lower surface of the workpiece 140, thereby forming a work unit 14 in which the wafer 140, frame 141, and tape 142 are integrated. A plurality of planned division lines 1402 that are perpendicular to each other are formed on the upper surface 1400 of the workpiece 140, and devices 1401 are arranged in the areas defined by the planned division lines 1402. The configuration of the cutting device 1 will be described below.

[0010] As shown in FIG. 1, the cutting device 1 includes a housing 12 extending in the Y-axis direction. The area on the +X direction side of the cutting device 1 is a transport area 18 where the transport of the work unit 14 and the like is performed, and the area on the -X direction side of the cutting device 1 is a processing area 19 where the cutting processing of the workpiece 140 constituting the work unit 14 is performed. The processing area 19 is covered by a housing cover 13.

[0011] A cassette stage 700 is provided on the -Y direction side of the transfer area 18. A cassette 70 capable of accommodating a plurality of work units 14 can be placed on the cassette stage 700.

[0012] The cassette stage 700 accommodates not only the work unit 14 but also a mounting plate 71 having the same external shape as the work unit 14. The mounting plate 71 has at least two mounting portions for mounting the dresser board 15 having a plate shape with abrasive grains adhered thereto. In this embodiment, the mounting plate 71 has a first mounting portion 711 and a second mounting portion 712. FIG. 1 shows a state in which the dresser board 15 is placed on the first placement portion 711 of the placement plate 71, and the dresser board 15 is not placed on the second placement portion 712.

[0013] A movement path for the chuck table 20 extending in the X-axis direction is provided on the +Y direction side of the cassette stage 700. The movement path for the chuck table 20 is formed so as to straddle between the transfer area 18 and the processing area 19. In Fig. 1, the state in which the chuck table 20 is positioned in the transfer area 18 is shown.

[0014] An inspection table 17 is disposed on the +Y direction side of the movement path of the chuck table 20, and clamps 171 are disposed on all four sides of the inspection table 17. The workpiece 140 after cutting is placed on a holding surface 170, which is the upper surface of the inspection table 17, and the frame 141 is clamped from all four sides using the four clamps 171, so that the work unit 14 can be held on the inspection table 17. An inspection kit (not shown) is arranged around the inspection table 17, and the workpiece 140 held on the inspection table 17 can be inspected using the inspection kit.

[0015] The cutting device 1 is provided with a carry-in / out means 73 for pulling out the work unit 14 etc. from the cassette 70 and for pushing the work unit 14 etc. into the cassette 70. The carrying-in / out means 73 includes a ball screw 730 arranged on the side surface on the +X direction side of the housing cover 13, extending in the Y-axis direction. A motor (not shown) is connected to the ball screw 730. The carrying-in / out means 73 also includes a guide rail 731 arranged parallel to the ball screw 730, and an arm portion 734 having a nut on one side that is screwed into the ball screw 730 and slides against the guide rail 731. The arm portion 734 hangs down in the -Z direction from the ball screw 730. A clamping portion 735 is connected to the end of the arm portion 734 on the -Z direction side. The clamping portion 735 has a clamping mechanism (not shown).

[0016] For example, the frame 141 contained in the cassette 70 can be clamped using the clamping portion 735, and then the ball screw 730 can be rotated using the motor to move the arm portion 734 in the +X direction, thereby transporting the work unit 14 clamped by the clamping portion 735 out of the cassette 70.

[0017] The clamping portion 735 can also pull out the mounting plate 71 housed in the cassette 70 . Two rails 27 on which the mounting plate 71 drawn out from the clamping portion 735 is placed are disposed adjacent to the chuck table 20 and extend in the Y-axis direction. The two rails 27 can move toward and away from each other in the Y-axis direction.

[0018] The mounting plate 71 in the cassette 70 is clamped using the clamping portion 735, and the ball screw 730 is rotated to move the arm portion 734 in the +Y direction, whereby the mounting plate 71 can be placed on the rail 27.

[0019] The cutting device 1 is provided with a transport means 72 for transporting the work unit 14. The transport means 72 is provided with a ball screw 720 arranged on a side surface on the +X direction side, extending in the Y-axis direction. A motor 722 is connected to the ball screw 720. The transport means 72 also includes a guide rail 721 arranged parallel to the ball screw 720, a movable plate 723 having an internal nut screwed onto the ball screw 720 and in sliding contact with the guide rail 721, and a connecting plate 724 connected to the lower end of the movable plate 723. A transport pad 725 is connected to the connecting plate 724. The transport pad 725 includes, for example, four suction cups 7250, which are connected to a suction source (not shown) or the like. When the suction source is activated while the mounting plate 71 is in contact with the suction cups 7250, the mounting plate 71 can be sucked and held by the suction cups 7250.

[0020] With the mounting plate 71 held by suction to the suction cups 7250 of the transport pad 725, when the ball screw 720 is rotated by the motor 722 to move the movable plate 723 in the Y-axis direction, the transport pad 725 connected to the movable plate 723 via a connecting plate 724, and the mounting plate 71 held by the transport pad 725 move integrally in the Y-axis direction. By using the transport means 72, the mounting plate 71 can be moved to the holding surface 210 of the chuck table 20.

[0021] 2, a base 10 extending in the X-axis direction and a gate-shaped column 11 erected on the -X direction side of the base 10 are disposed in the processing area 19 covered by the housing cover 13. The processing area 19 is also provided with a first cutting means 31 and a second cutting means 32 for cutting a workpiece 140 held on the chuck table 20.

[0022] An X-axis moving means 50 for moving the holding means 2 in the X-axis direction is disposed on the base 10.

[0023] The holding means 2 has a chuck table 20. The chuck table 20 is equipped with a disk-shaped suction portion 21 and an annular frame body 22 that supports the suction portion 21. The upper surface of the suction portion 21 is a holding surface 210 on which the workpiece 140 is held. The upper surface 220 of the frame body 22 is formed flush with the holding surface 210.

[0024] Four clamps 23 are disposed adjacent to the chuck table 20 so as to surround the chuck table 20 on all four sides. The workpiece 140 is placed on the holding surface 210, and the frame 141 is clamped from all four sides using the four clamps 23, thereby fixing the work unit 14 to the chuck table 20.

[0025] The chuck table 20 is supported by a rotating means 24. The rotating means 24 is provided with a motor and the like (not shown), and is capable of rotating the chuck table 20.

[0026] X-axis moving means 50 includes a ball screw 500 having an axis in the X-axis direction, a pair of guide rails 501 arranged parallel to ball screw 500, an X-axis motor 502 that rotates ball screw 500, and a movable plate 503 whose bottom nut is screwed onto ball screw 500 and slides against guide rail 501. Movable plate 503 supports rotating means 24. Further, at a position adjacent to the guide rail 501, a scale 504 for identifying the horizontal position of the holding means 2 in the X-axis direction is provided.

[0027] When the ball screw 500 is rotated using the X-axis motor 502, the movable plate 503 moves in the X-axis direction while being guided by the guide rail 501, and the chuck table 20 supported by the movable plate 503 via the rotating means 24 moves in the X-axis direction integrally with the movable plate 503.

[0028] The holding means 2 includes a first sub-chuck table 251 and a second sub-chuck table 252 disposed adjacent to the chuck table 20. Two support columns 26 are provided upright on the movable plate 503, and the first sub-chuck table 251 and the second sub-chuck table 252 are supported on the support columns 26. The first sub-chuck table 251 and the second sub-chuck table 252 have a rectangular shape.

[0029] A first Z-axis moving means 41 is disposed on the +X direction side and the -Y direction side of the gate-shaped column 11 to support the first cutting means 31 so that it can be raised and lowered.

[0030] The first Z-axis moving means 41 includes a ball screw 410 having an axis in the Z-axis direction, a guide rail 411 arranged parallel to the ball screw 410, a Z-axis motor 412 that rotates the ball screw 410, and a lifting plate 413 having a nut on one side that screws onto the ball screw 410 and slides against the guide rail 411. The lifting plate 413 is connected to the spindle housing 311. Furthermore, a scale 414 for recognizing the height position of the lifting plate 413 is disposed at a position adjacent to the guide rail 411. By recognizing the height position of the lifting plate 413, it is possible to recognize the height positions of the first cutting means 31 and the like connected to the lifting plate.

[0031] By rotating the ball screw 410 using the Z-axis motor 412, the lift plate 413 moves in the Z-axis direction while being guided by the guide rail 411, and the spindle housing 311 connected to the lift plate 413 also moves in the Z-axis direction.

[0032] The first cutting means 31 includes a cutting blade 310 and a spindle housing 311. A spindle (not shown) is disposed inside the spindle housing 311, and the cutting blade 310 is attached to the spindle. The spindle is connected to a motor (not shown) or the like. When the spindle is driven to rotate by the motor, the cutting blade 310 connected to the spindle rotates.

[0033] An imaging means 33 is disposed at a position adjacent to the cutting blade 310 of the first cutting means 31. The imaging means 33 is, for example, a camera, and can capture an image of the planned dividing lines 1402 formed in advance on the wafer 140 held on the holding surface 210 of the chuck table 20.

[0034] A second Z-axis moving means 42 is disposed on the +X direction side and the +Y direction side of the gate-shaped column 11 to support the second cutting means 32 so that it can be raised and lowered.

[0035] The second Z-axis moving means 42 is configured similarly to the first Z-axis moving means 41. The second Z-axis moving means 42 includes a ball screw 420 having an axis in the Z-axis direction, a guide rail 421 arranged parallel to the ball screw 420, a Z-axis motor 422 that rotates the ball screw 420, and a lifting plate 423 having a nut on one side that screws into the ball screw 420 and slides against the guide rail 421. The lifting plate 423 is connected to the spindle housing 321. Furthermore, a scale 424 for recognizing the height position of the lifting plate 423 is disposed at a position adjacent to the guide rail 421. By recognizing the height position of the lifting plate 423, it is possible to recognize the height position of the second cutting means 32 connected to the lifting plate.

[0036] When the ball screw 420 is rotated using the Z-axis motor 422, the lifting plate 423 moves in the Z-axis direction while being guided by the guide rail 421, and accordingly, the spindle housing 321 connected to the lifting plate 423 moves in the Z-axis direction.

[0037] The second cutting means 32 is configured similarly to the first cutting means 31. That is, the second cutting means 32 includes a cutting blade 320 and a spindle housing 321. A spindle (not shown) is disposed inside the spindle housing 321, and the cutting blade 320 is rotatably attached to the spindle. The spindle is connected to a motor (not shown) or the like. When the spindle is driven to rotate by the motor, the cutting blade 320 attached to the spindle rotates.

[0038] The gate-type column 11 is provided with a first Y-axis moving means 51 for moving the first cutting means 31 in the Y-axis direction, and a second Y-axis moving means 52 for moving the second cutting means 32 in the Y-axis direction.

[0039] The first Y-axis moving means 51 includes a ball screw 510 having an axis in the Y-axis direction, a Y-axis motor (not shown) that rotates the ball screw 510, a guide rail 511 arranged parallel to the ball screw 510, and a slide plate 513 having a nut on one side that screws into the ball screw 510 and slides against the guide rail 511. The slide plate 513 supports the first Z-axis moving means 41. Further, at a position adjacent to the guide rail 511, a scale 514 is provided for identifying the horizontal positions in the Y-axis direction of the first Z-axis moving means 41 and the second Z-axis moving means.

[0040] When the ball screw 510 is rotated using the Y-axis motor, the slide plate 513 moves in the Y-axis direction, guided by the guide rail 511, and as a result, the first Z-axis moving means 41 supported by the slide plate 513 and the first cutting means 31 supported by the lifting plate 413 of the first Z-axis moving means 41 move integrally in the Y-axis direction.

[0041] The second Y-axis moving means 52 is configured in the same manner as the first Y-axis moving means 51. That is, the second Y-axis moving means 52 includes a ball screw 520 having an axis in the Y-axis direction, a Y-axis motor 522 that rotates the ball screw 520, a guide rail 521 disposed in parallel to the ball screw 520, and a slide plate 523 whose side nut is screwed onto the ball screw 520 and slides against the guide rail 521.

[0042] When the ball screw 520 is rotated using the Y-axis motor 522, the slide plate 523 moves in the Y-axis direction while being guided by the guide rail 521, and accordingly, the second Z-axis moving means 42 supported by the slide plate 523 and the second cutting means 32 supported by the lifting plate 423 of the second Z-axis moving means 42 move integrally in the Y-axis direction.

[0043] A first dresser holding unit 61 is disposed at a position adjacent to the first cutting means 31. The first dresser holding unit 61 includes a first holding part 610 that holds the dresser board 15, and a vertical movement means 611 that moves the first holding part 610 in the Z-axis direction.

[0044] 3, the first holding part 610 is connected to the vertical movement means 611 via a shaft part 616. A suction passage 67 extending in the Z-axis direction is formed inside the shaft part 616 so as to penetrate the upper and lower surfaces of the shaft part 616. Also, a communication passage 68 connected to the suction passage 67 is formed inside the first holding part 610. The communication passage 68 is branched into a plurality of branch passages 680. The lower surface 619 of the first holding portion 610 is provided with suction holes 6190 formed so as to penetrate the multiple branch paths 680 . A suction source 614 is connected to the suction path 67. When the suction source 614 is operated to generate suction force, the generated suction force is transmitted to the suction hole 6190 through the suction path 67, the communication path 68, and the branch path 680.

[0045] Further, an annular seal portion 618 is embedded in the outer periphery of the lower surface 619 of the first holding portion 610 with a part of it protruding from the lower surface 619. The seal portion 618 is, for example, a packing that enables a dresser board having a plurality of grooves formed therein by dressing to be suction-held on the lower surface 619 of the first holding portion 610.

[0046] The up and down moving means 611 is a cylinder mechanism having a cylinder 612 arranged on the +X direction side of the lifting plate 413 of the first Z axis moving means 41 shown in Figure 2 and a piston 613 housed in the cylinder 612, and the first holding part 610 is connected to the lower end of the piston 613. The vertical movement means 611 is connected to, for example, an air source (not shown). By supplying air from the air source to the inside of the cylinder 612, the piston 613 can be protruded from the cylinder 612 in the -Z direction. By controlling the amount of air supplied from the air source to the inside of the cylinder 612 to raise and lower the piston 613 in the Z-axis direction, the first holding part 610 can be raised and lowered.

[0047] When using the first dresser holding unit 61 to hold the dresser board 15, the first holding part 610 is positioned directly below the dresser board 15, and then the first holding part 610 is lowered using the vertical movement means 611 to bring the lower surface 619 of the first holding part 610 into contact with the upper surface of the dresser board 15, as shown in Fig. 4. Then, with the lower surface 619 of the first holding part 610 in contact with the dresser board 15, the suction source 614 is operated to transmit a suction force to the suction hole 6190, whereby the dresser board 15 can be suction-held by the first holding part 610.

[0048] When the lower surface 619 of the first holding portion 610 is brought into contact with the dresser board 15, the lower surface of the seal portion 618 embedded in the first holding portion 610 comes into contact with the upper surface of the dresser board 15, and the seal portion 618 is pressed in the +Z direction from the upper surface of the dresser board 15 and compressed, and the upper surface of the dresser board 15 comes into close contact with the lower surface of the seal portion 618. Therefore, if a cutting groove is formed on the upper surface of the dresser board 15 by dressing, the lower surface of the seal portion 618 comes into close contact with the cutting groove, preventing air leakage.

[0049] As shown in FIG. 2, a second dresser holding unit 62 is disposed on the −Y direction side of the first dresser holding unit 61. The second dresser holding unit 62 is configured similarly to the first dresser holding unit 61. The second dresser holding unit 62 includes a second holding part 620 that holds the dresser board 15, and a vertical movement means 621 that moves the second holding part 620 in the Z-axis direction.

[0050] The up and down moving means 621 is a cylinder mechanism having a cylinder 622 arranged on the +X direction side of the lifting plate 413 of the first Z axis moving means 41 and a piston 623 housed in the cylinder 622, and the second holding part 620 is connected to the lower end of the piston 623. The vertical movement means 621 is connected to, for example, an air source (not shown). By supplying air from the air source to the inside of the cylinder 622, the piston 623 can be protruded from the cylinder 622 in the -Z direction. By controlling the amount of air supplied from the air source to the inside of the cylinder 622 to raise and lower the piston 623 in the Z-axis direction, the second holding part 620 can be raised and lowered.

[0051] A dresser temporary placement part 63 is disposed on the -Y direction side of the second dresser holding unit 62. The dresser temporary placement part 63 is a rectangular temporary placement table for temporarily placing the dresser board 15 on its upper surface 630, and is supported by a support column 631 erected on the base 10 on the -Y direction side.

[0052] 1, a dresser temporary rest part access door 632 is provided on the side surface in the +X direction of the housing cover 13. By opening the dresser temporary rest part access door 632, the inside and outside spaces of the processing area 19 covered by the housing cover 13 are connected, and the dresser board 15 can be placed on the upper surface 630 of the dresser temporary rest part 63.

[0053] The cutting device 1 is provided with a control means 64 that controls various mechanisms of the cutting device 1. The control means 64 is provided with a loading plate loading control section 641 that controls the transport means 72 and the loading / unloading means 73 to load the loading plate 71 stored in the cassette 70 placed on the cassette stage 700 onto the holding surface 210.

[0054] The control means 64 also includes a dresser ejection control unit 642 that controls the X-axis moving means 50, the first Y-axis moving means 51, and the first dresser holding unit 61 to eject the dresser board held on the sub-chuck table 251 or 252 to the loading portion on which the dresser board is not placed, out of the first loading portion 711 and the second loading portion 712 of the loading plate 71 held on the holding surface 210.

[0055] The control means 64 also includes a dresser loading control unit 643 that controls the X-axis moving means 50, the first Y-axis moving means 51, and the first dresser holding unit 61 to load the dresser board placed on the first loading portion 711 or the second loading portion 712 of the loading plate 71 held on the holding surface 210 onto the sub-chuck table 251 or 252.

[0056] The control means 64 is equipped with a plate ejection control unit 644 that controls the transport means 72 and the ejection means 73 to store the plate 71 held on the holding surface 210 into the cassette 70 placed on the cassette stage 700.

[0057] The control means 64 includes a second plate loading control section 651 that controls the transport means to load the loading plate 71 placed on the inspection table 17 onto the holding surface 210 .

[0058] The control means 64 is provided with a second dresser ejection control unit 652 that controls the X-axis moving means 50, the first Y-axis moving means 51, and the first dresser holding unit 61 to eject the dresser board held on the first sub-chuck table 251 from the loading portion on the side of the loading plate 71 held on the holding surface 210 on which the dresser board 15 is not placed.

[0059] The control means 64 is equipped with a second dresser loading control unit 653 that controls the X-axis moving means 50, the first Y-axis moving means 51, and the first dresser holding unit 61 to load the dresser board 15 placed on the loading portions 711, 712 of the loading plate 71 held on the holding surface 210 onto the first sub-chuck table 251.

[0060] The control means 64 is equipped with a second plate ejection control unit 654 that controls the transport means 72 and the ejection / intake means 73 to store the plate 71 held on the holding surface 210 into the cassette 70 placed on the cassette stage 700.

[0061] 2. Operation of the cutting device (Cutting of workpiece) The operation of the cutting device 1 when cutting the workpiece 140 using the cutting device 1 will be described below.

[0062] First, one of the work units 14 stored in the cassette 70 is pulled out using the carry-in / out means 73 shown in Fig. 1 and placed on the rail 27, after which the transport means 72 holds the work unit 14, and after the rail 27 is separated, the work unit 14 is lowered and transported to the chuck table 20, and the workpiece 140 is placed on the holding surface 210. Then, the frame 141 is gripped and fixed using the four clamps 23. In addition, the holding surface 210 is connected to a suction source to hold the tape 142 by suction. As a result, the workpiece 140 is held on the holding surface 210.

[0063] Next, the chuck table 20 is moved in the -X direction using the X-axis moving means 50 shown in Fig. 2, and the work unit 14 is moved from the transfer area 18 to the processing area 19. As a result, the workpiece 140 held on the chuck table 20 is positioned below the imaging means 33.

[0064] After the workpiece 140 is positioned below the imaging means 33, an image of the planned division line 1402 is captured using the imaging means 33. Then, based on the captured image of the planned division line 1402, the first cutting means 31 and the second cutting means 32 are appropriately moved in the Y-axis direction using the first Y-axis moving means 51 and the second Y-axis moving means 52, to align the first cutting means 31 and the second cutting means 32 with the planned division line 1402 in the Y-axis direction.

[0065] Thereafter, the cutting blades 310 and 320 provided on the first cutting means 31 and the second cutting means 32 are rotated, respectively, using a motor (not shown) connected to a spindle (not shown) housed inside the spindle housing 311.

[0066] Then, while the cutting blades 310 and 320 are rotating, the first cutting means 31 is moved in the -Z direction using the first Z-axis moving means 41 and the second Z-axis moving means 42 to bring the rotating cutting blades 310 and 320 into contact with the planned dividing line 1402 of the workpiece 140, and the workpiece 140 held on the chuck table 20 is moved in the -X direction using the X-axis moving means 50. As a result, the workpiece 140 and the cutting blade 310 move relatively in the X-axis direction, and the workpiece 140 is cut along the planned dividing line 1402 of the workpiece 140.

[0067] After cutting one planned division line 1402, the first cutting means 31 and the second cutting means 32 are moved in the Y-axis direction, for example, using the first Y-axis moving means 51 and the second Y-axis moving means 52 by the distance between adjacent planned division lines 1402, and the cutting blade 30 is similarly cut into the planned division line 1402, thereby cutting the adjacent planned division lines 1402.

[0068] In this manner, after all the division lines 1402 formed in the workpiece 140 in the same direction have been cut, the chuck table 20 is rotated, for example, by 90 degrees using the rotating means 24, and then cutting is performed in the same manner, thereby cutting all the division lines 1402 of the workpiece 140. As a result, all the division lines 1402 formed in the workpiece 140 are cut.

[0069] After cutting the workpiece 140, the chuck table 20 is moved in the +X direction using the X-axis moving means 50, and the work unit 14 held by the chuck table 20 is positioned in the transport area 18 shown in Figure 1. Then, the work unit 14 is transported from the chuck table 20 to the inspection table 17 using the transport means 72, and the workpiece 140 is held on the holding surface 170 of the inspection table 17. Then, it is inspected whether the workpiece 140 has been appropriately machined. A camera is disposed above the inspection table 17 to capture an image of the upper surface of the workpiece 140 held on the holding surface 170 .

[0070] After inspecting the workpiece 140, the workpiece 14 is stored in the cassette 70 by the transport means 72 and the carry-in / out means 73. Thereafter, the carry-in / out means 73 is used to pull out the work unit 14 that is stored in the cassette 70 and has not yet been machined, and the workpiece 140 is similarly machined. This allows multiple workpieces 140 to be machined continuously.

[0071] (Cutting blade dressing) As described above, when cutting a plurality of workpieces 140 using the cutting device 1, the cutting edges of the cutting blade 310 of the first cutting means 31 and the cutting blade 320 of the second cutting means shown in Fig. 2 become dull, reducing the cutting efficiency. Therefore, by using the cutting blade to dress the cutting blade by cutting the first dresser board 151 shown in Fig. 5, the dullness occurring in the cutting edge is eliminated and the cutting blade regains its sharpness. Hereinafter, the operation of the cutting device 1 when dressing the cutting blade 310 of the first cutting means 31 provided in the cutting device 1 will be described.

[0072] When dressing the cutting blade 310, first, the cutting blade 310 and the first dresser board 151 are aligned in the Y-axis direction with the first dresser board 151 held on the first sub-chuck table 251. The operation of the cutting device 1 during this alignment is similar to the operation of the cutting device 1 during the alignment of the first cutting means 31 and the workpiece 140 held on the chuck table 20 in the Y-axis direction. That is, the first dresser board 151 held on the first sub-chuck table 251 is imaged using the camera or the like of the imaging means 33, and the first cutting means 31 is moved in the Y-axis direction based on the image thus captured. This positions the cutting blade 310 at a Y axis position to begin dressing the cutting blade 310 . It is not necessary to use the imaging means 33. The position of the first sub-chuck table 251 in the Y-axis direction and the size of the first dresser board 151 are stored, and the first cutting means 31 is moved in the Y-axis direction. Also, the position of the cutting blade 310 in the Y-axis direction at the end of dressing may be stored, and the cutting blade 310 may be positioned at the Y-axis position where the next dressing is to be started.

[0073] Thereafter, while the cutting blade 310 is rotating, the first cutting means 31 is moved in the -Z direction using the first Z-axis moving means 41 to bring the rotating cutting blade 310 into contact with the first dresser board 151, and the first dresser board 151 is moved in the -X direction using the X-axis moving means 50. As a result, the first dresser board 151 and the cutting blade 310 move relatively in the X-axis direction to cut the first dresser board 151 and dress the cutting blade 310.

[0074] The cutting blade 320 of the second cutting means 32 is dressed in a similar manner. The dressing of the cutting blades 310 and 320 is performed, for example, every time a predetermined number of workpieces 140 are cut.

[0075] (Replacing the dresser board) For example, when the cutting blades 310 and 320 are caused to cut into the first dresser board 151 each time a predetermined number of workpieces 140 are cut, multiple grooves are formed on the upper surface of the first dresser board 151, and gradually the uncut areas on the upper surface of the first dresser board 151 disappear. Therefore, for example, after the cutting blade 310 is dressed a predetermined number of times using the first dresser board 151 held on the first sub-chuck table 251, the first dresser board 151 is replaced with an unused second dresser board 152. Hereinafter, the operation of the cutting device 1 when replacing the first dresser board 151 held by the first sub-chuck table 251 with the second dresser board 152 will be described.

[0076] First, the dresser temporary rest section access door 632 shown in Fig. 1 is opened, and the second dresser board 152 is temporarily placed on the upper surface 630 of the dresser temporary rest section 63 as shown in Fig. 5. This operation is performed manually by an operator or the like.

[0077] Thereafter, the movable plate 503 is moved in the -X direction using the X-axis moving means 50 shown in FIG. 2, so that the first sub-chuck table 251 supported by the movable plate 503 is positioned below the movement path of the first dresser holding unit 61 and the second dresser holding unit 62 in the horizontal movement in the Y-axis direction.

[0078] Then, the first Z-axis moving means 41 is moved in the -Y direction by using the first Y-axis moving means 51. As a result, the first dresser holding unit 61 and the second dresser holding unit 62 supported by the first Z-axis moving means 41 move integrally in the -Y direction, and the second holding part 620 of the second dresser holding unit 62 is positioned above the second dresser board 152 temporarily placed on the dresser temporary placement part 63, as shown in FIG.

[0079] With the second holding part 620 of the second dresser holding unit 62 positioned above the second dresser board 152, the second holding part 620 is lowered in the -Z direction using the vertical movement means 621 shown in Fig. 2, so that the lower surface of the second holding part 620 comes into contact with the second dresser board 152. Then, a suction source (not shown) connected to the second holding part 620 is operated, so that the second holding part 620 holds the second dresser board 152. Thereafter, the second holding part 620 is raised in the +Z direction using the vertical movement means 621.

[0080] Next, the first Z-axis moving means 41 is moved in the +Y direction using the first Y-axis moving means 51, and the first holding part 610 of the first dresser holding unit 61 is positioned above the first dresser board 151 held by the first sub-chuck table 251, as shown in Fig. 7. Then, the first holding part 610 is lowered in the -Z direction using the up-down moving means 611 shown in Fig. 2, and the lower surface of the first holding part 610 is brought into contact with the first dresser board 151. Then, a suction source (not shown) connected to the first holding part 610 is operated, and the first dresser board 151 is held by the first holding part 610.

[0081] Furthermore, the first Y-axis moving means 51 is used to move the first Z-axis moving means 41 in the +Y direction, so that the second dresser board 152 held by the second holding portion 620 of the second dresser holding unit 62 is positioned above the first sub-chuck table 251, as shown in FIG. 8.

[0082] Then, the second holding portion 620 is lowered in the -Z direction using the vertical movement means 621 shown in FIG. 2, and the suction force acting on the second holding portion 620 is removed, and the second dresser board 152 is placed on the first sub-chuck table 251 and suction force is applied.

[0083] Thereafter, the first Y-axis moving means 51 is used to move the first Z-axis moving means 41 in the -Y direction to position the first dresser board 151 held by the first dresser holding unit 61 above the dresser temporary placement portion 63, as shown in FIG. 9. Then, the first holding part 610 is lowered in the -Z direction using the vertical movement means 611 shown in FIG. 2, and the suction force acting on the first holding part 610 is removed to temporarily place the first dresser board 151 on the dresser temporary placement part 63.

[0084] Finally, as shown in FIG. 10, the dresser temporary rest section access door 632 is opened, and the first dresser board 151 temporarily placed on the dresser temporary rest section 63 is removed to the outside of the cutting apparatus 1.

[0085] As described above, in replacing the dresser board in the cutting device 1, most of the work for replacing the dresser board does not require an operator, so that dressing of the cutting blades 310 and 320 and continuous processing of the workpiece 140 can be performed. This enables efficient cutting of the workpiece 140.

[0086] Instead of the configuration in which the first dresser board 151 and the second dresser board 152 are transported and replaced between the dresser temporary placement section 63 and the first sub-chuck table 251 as described above, the replacement of the dresser board may be configured in such a way that the mounting plate 71 shown in FIG. 1 is held on the chuck table 20, and the first dresser board 151 and the second dresser board 152 are transported and replaced between the first sub-chuck table 251 and the mounting plate 71 held on the chuck table 20.

[0087] When exchanging the plate, first, the loading plate carrying control unit 641 controls the conveying means 72 and the like to carry the loading plate 71 stored in the cassette 70 onto the holding surface 210 .

[0088] Specifically, the loading plate 71 stored in the cassette 70 is pulled out using the loading / unloading means 73, and placed on the rails 27. It is assumed that the second dresser board 152 is placed on the first loading portion 711 of the loading plate 71.

[0089] After the mounting plate 71 is drawn out onto the rails 27, the rails 27 are separated, and the conveying means 72 is used to move the mounting plate 71 placed on the rails 27 onto the holding surface 210 of the chuck table 20. Then, a suction source (not shown) connected to the chuck table 20 is operated to suck the holding surface 210. As a result, the mounting plate 71 is held on the holding surface 210. The mounting plate 71 is held on the holding surface 210 so that the first mounting portion 711 and the second mounting portion 712 are aligned in the Y-axis direction.

[0090] Next, the dresser ejection control unit 642 controls the X-axis moving means 50, the first Y-axis moving means 51, and the first dresser holding unit 61 shown in FIG. 2 to eject the first dresser board 151 held by the first sub-chuck table 251 to the second mounting portion 712 on which the dresser board of the mounting plate 71 held by the holding surface 210 is not placed.

[0091] Specifically, first, the X-axis moving means 50 and the first Y-axis moving means 51 are controlled to position the first holding part 610 directly above the first dresser board 151 held by the first sub-chuck table 251 . Next, the vertical movement means 611 is controlled to lower the first holding portion 610, and after the first dresser board 151 is held by the first holding portion 610, the first holding portion 610 is raised.

[0092] Furthermore, by controlling the X-axis moving means 50 and the first Y-axis moving means 51, the first holding portion 610 holding the first dresser board 151 is positioned directly above the second mounting portion 712 on the side of the mounting plate 71 on the chuck table 20 on which the dresser board is not placed.

[0093] Then, the vertical movement means 611 is controlled to lower the first holding portion 610 and place the first dresser board 151 held by the first holding portion 610 on the second mounting portion 712. In this manner, the first dresser board 151 is carried out from the first sub-chuck table 251 and placed on the second mounting portion 712 of the mounting plate 71 held by the chuck table 20.

[0094] Next, the dresser loading control unit 643 controls the first Y-axis moving means 51 and the first dresser holding unit 61 to load the second dresser board 152 placed on the first mounting portion 711 of the mounting plate 71 held on the holding surface 210 into the first sub-chuck table 251.

[0095] Specifically, first, the first Y-axis moving means 51 is controlled to position the first holding portion 610 of the first dresser holding unit 61 directly above the second dresser board 152 placed on the first mounting portion 711 of the mounting plate 71 held by the chuck table 20.

[0096] Next, the vertical movement means 611 is controlled to lower the first holding portion 610, hold the second dresser board 152 on the first holding portion 610, and then the first holding portion 610 is raised.

[0097] Furthermore, the first Y-axis moving means 51 is controlled to position the first holding portion 610 holding the second dresser board 152 directly above the first sub-chuck table 251.

[0098] Then, the vertical movement means 611 is controlled to lower the first holding portion 610 and move the second dresser board 152 held by the first holding portion 610 away from the first holding portion 610 and place it on the first sub-chuck table 251.

[0099] As described above, by holding the mounting plate 71 on the holding surface 210 of the chuck table 20 and exchanging the second dresser board 152 placed on the mounting plate 71 with the first dresser board 151 held on the first sub-chuck table 251, it is possible to automate the exchange of the dresser board. This enables continuous machining of the workpiece 140.

[0100] The replacement of the dresser board may be performed by first placing the mounting plate 71 on which the second dresser board 152 is placed on the inspection table 17, transporting it from the inspection table 17 to the holding surface 210 of the chuck table 20, and then transporting the first dresser board 151 and the second dresser board 152 between the first sub-chuck table 251 and the first mounting portion 711 and the second mounting portion 712 of the mounting plate 71 held on the chuck table 20 in the same manner as described above. The upper surface of the second dresser board 152 carried onto the inspection table 17 is imaged by a camera to inspect whether the first dresser board 151 can be dressed or not. In addition, a cleaning nozzle may be provided to clean the upper surface of the second dresser board 152 of the mounting plate 71 held on the holding surface 170 of the inspection table 17, and cleaning water may be sprayed from the cleaning nozzle to clean the second dresser board 152 placed on the mounting plate 71 before the mounting plate 71 is transported onto the holding surface 210 of the chuck table 20. In addition, the first dresser board 151 of the mounting plate 71 carried out from the holding surface 210 of the chuck table 20 and held on the holding surface 170 of the inspection table 17 may be cleaned by spraying cleaning water from a cleaning nozzle.

[0101] In this configuration, first, the loading plate 71 is pulled out from the cassette 70 shown in FIG.

[0102] Then, the second plate carry-in control unit 651 controls the conveying means 72 to carry the plate 71 placed on the inspection table 17 onto the holding surface 210 .

[0103] Next, the second dresser ejection control unit 652 controls the X-axis moving means 50, the first Y-axis moving means 51, and the first dresser holding unit 61 to load the second dresser board 152 placed on the first mounting portion 711 of the mounting plate 71 held on the holding surface 210 into the first sub-chuck table 251.

[0104] Thereafter, the second plate ejection control unit 654 controls the transport means 72 to store the plate 71 held on the holding surface 210 in the cassette 70 placed on the cassette stage 700 .

[0105] The cutting device 1 may include a third dresser holding unit 9 shown in FIG.

[0106] The third dresser holding unit 9 includes a third holding part 91 and a vertical movement means 93 for moving the third holding part 91 in the Z-axis direction. The vertical movement means 93 has a similar configuration to the vertical movement means 611 included in the first dresser holding unit 61 shown in FIG. 2, and therefore a description thereof will be omitted. 11, the third holding part 91 includes a connecting member 911 connected to the vertical movement means 93, a support plate 910 disposed at the lower end of the connecting member 911, and gripping parts 90 disposed at both ends of the support plate 910. The gripping parts 90 are claw-shaped and can freely rotate about a rotation shaft 95. In addition, a weight 94 is disposed on the upper side surface of each gripping part 90.

[0107] When each weight 94 descends substantially downward due to its own weight, the gripping portion 90 rotates about the rotation axis 95 toward the center of the support plate 910 under the load of the weight 94, and the claws 900 of the opposing gripping portions 90 approach each other. When the weights 94 have descended to the lowest position on the upper side surface of the gripping portion 90 due to their own weight, the support plate 910 and the gripping portions 90 are perpendicular to each other.

[0108] In this state, for example, when the third holding part 91 of the third dresser holding unit 9 is positioned above the dresser board 15 held on the dresser temporary placement part 63 and then the third holding part 91 is lowered in the -Z direction using the vertical movement means 93, the tips of the claws 900 are pushed outward by the side of the dresser board 15, and the gripping part 90 rotates slightly around the rotation shaft 95 in a direction away from the center of the support plate 910, as shown in Fig. 11. Then, when the third holding part 91 is raised slightly using the vertical movement means 93 in this state, the dresser board 15 is hooked on the claws 900 of the gripping part 90 and gripped, as shown in Fig. 12. With the dresser board 15 held by the holding portion 90, the third holding portion 91 is raised in the +Z direction by using the vertical movement means 93, whereby the dresser board 15 can be transported.

[0109] The cutting device 1 shown in Figure 2 is configured to be equipped with a first cutting means 31 and a second cutting means 32, and correspondingly a first sub-chuck table 251 and a sub-chuck table 252, but there may be only one cutting means, in which case there may also be only one sub-chuck table.

[0110] In addition, the first dresser holding unit 61 or the second dresser holding unit 62 is configured to move in the Y-axis direction together with the first cutting means 31, but may be configured to move in the Y-axis direction independently from the first cutting means 31 and the second cutting means 32. However, as in this embodiment, a mechanism for moving the first dresser holding unit 61 and the second dresser holding unit 62 in the Y-axis direction also serves as a mechanism for moving any of the cutting means in the Y-axis direction, thereby making the device configuration less complicated. [Explanation of symbols]

[0111] 1: Cutting device 10: Base 11: Gate-type column 12: Housing 13: Housing cover 14: Work Unit 140: Workpiece 140: Wafer 141: Frame 142: Tape 1400: Top surface 1401: Device 1402: Planned division line 15: Dresser board 151: 1st dresser board 152: 2nd dresser board 17: Inspection table 170: Holding surface 171: Clamp 18: Transport area 19: Processing area 2: Holding means 20: Chuck table 21: Suction portion 210: Holding surface 22: Frame body 220: Upper surface of frame 23: Clamp 24: Rotation means 251: First sub-chuck table 252: Second sub-chuck table 26: Support 27: Rail 31: First cutting means 310: Cutting blade 311: Spindle housing 32: Second cutting means 320: Cutting blade 321: Spindle housing 33: Imaging means 41: First Z-axis moving means 410: Ball screw 411: Guide rail 412: Z-axis motor 413: Lift plate 414: Scale 42: Second Z-axis moving means 420: Ball screw 421: Guide rail 422: Z-axis motor 423: Lift plate 424: Scale 50: X-axis moving means 500: Ball screw 501: Guide rail 502: X-axis motor 503: Movable plate 504: Scale 51: First Y-axis moving means 510: Ball screw 511: Guide rail 513: Slide plate 52: Second Y-axis moving means 520: Ball screw 521: Guide rail 522: Y-axis motor 523: Slide plate 524: Scale 61: First dresser holding unit 610: First holding part 611: Vertical movement means 612: Cylinder 613: Piston 614: Suction source 616: Shaft 67: Suction passage 68: Communication passage 680: Branch passage 618: Seal portion 619: Underside 6190: Suction hole 62: Second dresser holding unit 620: Second holding part 621: Vertical movement means 622: Cylinder 623: Piston 63: Dresser temporary placement area 630: Top surface 631: Support column 700: Cassette stage 70: Cassette 71: Mounting plate 710: Upper surface 711: First placement portion 712: Second placement portion 72: Transport means 720: Ball screw 721: Guide rail 722: Motor 723: Movable plate 724: Connecting plate 725: Carrying pad 7250: Suction cup 73: Loading / unloading means 730: Ball screw 731: Guide rail 734: Arm section 735: Pull-out device 9: Third dresser holding unit 91: Third holding part 910: Support plate 911: connecting member 90: gripping portion 900: claw 93: vertical movement means 94: Weight 95: Rotating axis 64: Control means 641: Loading plate carry-in control section 642: Dresser carry-out control section 643: Dresser loading control unit 644: Loading plate unloading control unit 651: Second loading plate carry-in control section 652: Second dresser carry-out control section 653: Second dresser carry-in control section 654: Second mounting plate carry-out control section

Claims

1. a holding means having a chuck table for holding a workpiece on a holding surface thereof; A cutting means having a cutting blade rotatably disposed thereon for cutting a workpiece; Z-axis moving means for moving the cutting means in a Z-axis direction perpendicular to the holding surface; X-axis moving means for moving the holding means in the X-axis direction which is the cutting feed direction of the cutting blade; a Y-axis moving means for moving the Z-axis moving means in a Y-axis direction perpendicular to the Z-axis direction and the X-axis direction; a sub-chuck table disposed on the holding means adjacent to the chuck table and holding a dresser board having a plate shape formed by adhering abrasive grains thereto, a dresser holding unit that holds the dresser board that is transferred to the sub-chuck table; a dresser temporary placement section on which the dresser board is temporarily placed, and a control means; The dresser holding unit includes: a holding portion for holding the dresser board, and a vertical movement means for moving the holding portion in a Z-axis direction, The control means controls at least the dresser holding unit, the Y-axis moving means, and the X-axis moving means, and transports the dresser board between the dresser temporary placement portion and the sub-chuck table.

2. a holding means having a chuck table for holding a workpiece on a holding surface thereof; A cutting means having a cutting blade rotatably disposed thereon for cutting a workpiece; Z-axis moving means for moving the cutting means in a Z-axis direction perpendicular to the holding surface; X-axis moving means for moving the holding means in the X-axis direction which is the cutting feed direction of the cutting blade; a Y-axis moving means for moving the Z-axis moving means in a Y-axis direction perpendicular to the Z-axis direction and the X-axis direction; a sub-chuck table that is disposed on the holding means so as to be adjacent to the chuck table and that holds a dresser board having a plate shape with abrasive grains bonded thereto; a cassette stage on which a cassette capable of accommodating a plurality of workpieces is placed; a conveying means for conveying a workpiece between the cassette placed on the cassette stage and the chuck table; A cutting device comprising: a mounting plate having a mounting portion on which the dresser board is placed and capable of being housed in the cassette; a dresser holding unit that holds the dresser board that is transferred from the cassette to the chuck table by the transfer means and placed on the mounting portion of the mounting plate that is held by the holding surface, The dresser holding unit includes a holding portion that holds the dresser board; and a vertical movement means for moving the holding portion in the Z-axis direction, The control means a cutting apparatus that controls the X-axis moving means, the Y-axis moving means, and the dresser holding unit to transport the dresser board between the sub-chuck table and the mounting portion of the mounting plate held on the chuck table.

3. the mounting plate includes at least two mounting portions, and the dresser board is mounted on at least one of the mounting portions; The control means a plate loading control unit for controlling the transport means to load the plate stored in the cassette placed on the cassette stage onto the holding surface; a dresser carry-out control unit that controls the X-axis moving means, the Y-axis moving means, and the dresser holding unit to carry out the dresser board held by the sub-chuck table to a mounting portion of the mounting plate held on the holding surface on which the dresser board is not placed; a dresser carry-in control unit that controls the X-axis moving means, the Y-axis moving means, and the dresser holding unit to carry the dresser board placed on the mounting portion of the mounting plate held on the holding surface into the sub-chuck table; 3. The cutting device according to claim 2, further comprising a plate ejection control unit that controls the transport means to eject the plate held on the holding surface from the holding surface and store it in the cassette placed on the cassette stage.

Images