Tape application system, tape application method, tape removal system, and tape removal method

Abstract

To provide a tape pasting system that while preventing a substrate such as a wafer from being damaged, is capable of pasting a protection tape for protecting a peripheral part of the substrate to the peripheral part of the substrate.SOLUTION: A tape pasting system 1 comprises a tape pasting device 10. The tape pasting device 10 comprises: a pasting substrate holding unit 21; a side roller 43; a first roller 46; a second roller 47; a roller drive motor 49 coupled to the second roller 47; and a catching mechanism 60 for making the first roller 46 and the second roller 47 catch a peripheral part of a substrate W. The tape pasting device 10 is configured to rotate the substrate W by rotating the second roller 47 using the roller drive motor 49 while catching the peripheral part of the substrate W held by the pasting substrate holding unit 21 using the first roller 46 and the second roller 47.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present invention relates to a tape application system and a tape application method for applying a protective tape that protects a peripheral portion of a substrate such as a wafer, and also to a tape removal system and a tape removal method for removing the protective tape applied to the peripheral portion of a substrate such as a wafer. [Background technology]

[0002] Conventionally, a protective film is applied to the entire surface of a wafer to protect devices formed on the surface of the wafer. Also, a protective film may be applied to the entire back surface of the wafer (the surface opposite to the surface on which devices are formed) to protect the back surface of the wafer from metal contamination by chemicals (e.g., plating solution, cleaning solution). For example, in a plating process, a wafer with a protective film applied to the back surface is immersed in a plating solution, and the wafer is plated in this state.

[0003] However, during wafer processing, the protective film may peel off from the outer periphery and lift up. For example, since the plating solution is heated to a certain processing temperature, the adhesive strength of the protective film weakens, and the outer periphery of the protective film may peel off from the wafer and lift up. When the outer periphery of the protective film peels off, the plating solution penetrates into the gap between the rear surface of the wafer and the protective film. As a result, there is a problem that metal ions contained in the plating solution adhere to the rear surface of the wafer made of silicon and diffuse into the wafer, causing device performance defects. Therefore, recently, there is a demand to protect not only the front and rear surfaces of the wafer, but also the peripheral portion of the wafer with protective tape or the like.

[0004] For example, in the plating process of so-called TAIKO (registered trademark) wafers, in which only the center of the back surface of the wafer is polished (ground) to make it thinner, a protective film is attached to the back surface of the wafer to prevent the plating solution (including cleaning solution) from getting around. However, due to the edge shape of the TAIKO wafer, the protective film is prone to peeling off or lifting up from the outer periphery, causing the plating solution to get into the back surface of the wafer, resulting in a decrease in yield. In order to prevent this plating solution from getting in and to proceed with a stable process, it became necessary to cover the peripheral part of the wafer (bevel part and top and bottom surfaces of the edge, approximately 3 mm) with protective tape (tape width: approximately 6 mm).

[0005] After various processes such as plating and dry etching of the wafer to which the protective tape is attached are completed, the protective tape is peeled off from the wafer. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Patent No. 6340249 Summary of the Invention [Problem to be solved by the invention]

[0007] With the automotive industry undergoing a global shift to electrification, there is a growing demand for a shift to larger wafer diameters. The process of attaching protective tape to the periphery of the wafer and the equipment used to attach the protective tape are also facing challenges in dealing with larger wafer diameters (e.g., 300 mm diameter), and there is an increasing demand for protective tape to be attached without damaging the wafer, even when the wafer diameter increases.

[0008] Recently, from the standpoint of improving throughput and yield, there has been an increasing demand to shorten the time it takes to peel off the protective tape and to prevent some of the adhesive from the protective tape from remaining on the wafer (glue residue) after the protective tape has been peeled off.

[0009] The present invention has been made in consideration of the above-mentioned circumstances, and aims to provide a tape application system and a tape application method that can apply protective tape to the peripheral edge of a substrate, such as a wafer, while preventing damage to the substrate. A further object of the present invention is to provide a tape removal system and a tape removal method that can shorten the time required to remove a protective tape and prevent adhesive residue from being left on the protective tape. [Means for solving the problem]

[0010] In one aspect, a tape application system is provided that includes a tape application device that applies a protective tape to a peripheral portion of a substrate, the tape application device including a substrate application holding part that rotatably holds the substrate, a side roller that presses the protective tape against an outer peripheral side of the substrate, a first roller that folds the protective tape along its longitudinal direction and applies the folded portion of the protective tape to a first surface of the peripheral portion of the substrate, a second roller that folds the protective tape along its longitudinal direction and applies the folded portion of the protective tape to a second surface of the peripheral portion of the substrate, a roller drive motor connected to the second roller, and a clamping mechanism that clamps the peripheral portion of the substrate between the first roller and the second roller, and the tape application device is configured to rotate the substrate by rotating the second roller using the roller drive motor while clamping the peripheral portion of the substrate held by the substrate application holding part with the first roller and the second roller.

[0011] In one embodiment, the second roller is disposed below the first roller. In one embodiment, the first roller and the second roller have a tapered shape in which the cross-sectional area gradually decreases toward their tips, and the first roller and the second roller are arranged at an angle so that the tips face toward the surface of the substrate. In one embodiment, the first roller and the second roller are constructed from rubber. In one embodiment, the tape applying device further includes a tape heating device that heats the protective tape applied to the peripheral edge portion of the substrate. In one embodiment, the tape applying system further comprises a transfer robot that transfers the substrate to the tape applying device, the transfer robot comprising a Bernoulli hand that holds the substrate by utilizing Bernoulli's theorem. In one embodiment, the tape application device is a plurality of tape application devices, and the plurality of tape application devices are arranged side by side in a vertical or horizontal direction. In one embodiment, the tape application system further includes a tape removal device that peels off the protective tape from the peripheral edge of the substrate, the tape removal device including a peeling substrate holding section that holds and rotates the substrate, a tape removal unit that peels the protective tape from the rotating substrate, and a UV irradiation module that irradiates ultraviolet light onto the protective tape applied to the peripheral edge of the substrate. In one embodiment, the tape remover is disposed below the tape application device. In one embodiment, the tape stripping device is a plurality of tape stripping devices, the plurality of tape stripping devices being arranged side by side in a horizontal direction.

[0012] In one aspect, a tape application method for applying protective tape to a peripheral portion of a substrate includes rotatably holding the substrate with a substrate holding portion for application, pressing the protective tape against the outer peripheral side of the substrate, clamping the peripheral portion of the substrate with the first roller and the second roller, rotating the second roller with a roller drive motor connected to the second motor to rotate the substrate, folding the protective tape along its longitudinal direction with the first roller and applying the folded portion of the protective tape to a first surface of the peripheral portion of the substrate, and folding the protective tape along its longitudinal direction with the second roller and applying the folded portion of the protective tape to a second surface of the peripheral portion of the substrate.

[0013] In one embodiment, the tape application method further includes a step of heating the protective tape applied to the peripheral edge portion of the substrate. In one embodiment, the tape application method further includes a step of irradiating the protective tape applied to the peripheral portion with ultraviolet light, and a step of peeling off the protective tape from the peripheral portion of the substrate while rotating the substrate.

[0014] In one aspect, a tape removal system is provided that includes a tape removal device that removes a protective tape from a peripheral portion of a substrate, the tape removal device including a removal substrate holding portion that holds and rotates the substrate, a tape removal unit that removes the protective tape from the rotating substrate, and a UV irradiation module that irradiates ultraviolet light onto the protective tape attached to the peripheral portion of the substrate.

[0015] In one embodiment, the UV irradiation module further includes a UV irradiation device that irradiates ultraviolet rays, a substrate holding part for UV irradiation that holds the substrate, and a cup-shaped light-shielding cover connected to the UV irradiation device, and the light-shielding cover is formed so as to be able to cover the entire substrate. In one embodiment, the substrate holding section for UV irradiation comprises a substrate holding device that holds and rotates the substrate, and a lifting mechanism that moves the substrate holding device up and down, and the light-shielding cover is positioned above the substrate holding device and opens downward. In one embodiment, the tape peeling system further includes a transport robot that transports the substrate to the tape peeling device, the transport robot including a Bernoulli hand that holds the substrate by utilizing Bernoulli's theorem.

[0016] In one aspect, a tape removal method is provided for removing a protective tape from a peripheral portion of a substrate, the tape removal method comprising the steps of irradiating the protective tape attached to the peripheral portion with ultraviolet light, and peeling the protective tape from the peripheral portion of the substrate while rotating the substrate.

[0017] In one aspect, the process of irradiating ultraviolet light onto the protective tape attached to the peripheral portion is a process of irradiating ultraviolet light onto the protective tape attached to the peripheral portion while covering the entire substrate with a light-shielding cover.

[0018] In one aspect, the process of irradiating ultraviolet light onto the protective tape attached to the peripheral portion while covering the entire substrate with the light-shielding cover includes a process of irradiating ultraviolet light onto the protective tape while rotating the substrate. Effect of the Invention

[0019] According to the present invention, the force for rotating the substrate is applied to the peripheral portion of the substrate, so that the distance in the radial direction of the substrate between the place where the force in the substrate rotation direction is applied and the place where the protective tape is pressed can be shortened, thereby reducing the load on the wafer W and preventing damage to the wafer W. In addition, according to the present invention, by irradiating a protective tape having a UV-curable adhesive layer with ultraviolet light, the adhesive layer is cured and the protective tape is easily peeled off. As a result, the time required to peel off the protective tape can be shortened and adhesive residue can be prevented. [Brief description of the drawings]

[0020] [Figure 1] 1(a) and 1(b) are enlarged cross-sectional views for explaining the peripheral portion of a wafer. [Diagram 2] FIG. 2 is an enlarged cross-sectional view of one embodiment of a wafer. [Diagram 3] FIG. 1 is a plan view showing a schematic diagram of one embodiment of a tape application system. [Figure 4] FIG. 4 is a side view showing a schematic diagram of the tape application system of FIG. 3. [Diagram 5] FIG. 2 is a schematic diagram showing a tape application module. [Figure 6] FIG. 6(a) is a side view of the bonding substrate holder, and FIG. 6(b) is a plan view of the bonding substrate holder. [Figure 7] FIG. 11 is a schematic diagram showing another embodiment of the delivery roller. [Figure 8] 8(a) to 8(c) are perspective views showing the process of attaching the starting end of the protective tape to the outer circumferential side surface of the wafer by the tape holding head. [Figure 9] FIG. 2 is a schematic diagram showing a first roller, a second roller, and a clamping mechanism. [Figure 10] 1 is an enlarged view showing a state in which the wafer and the protective tape are sandwiched between a first roller and a second roller. FIG. [Figure 11] FIG. 2 shows a first roller, a second roller, a wafer, a substrate stage, and a shaft rotating. [Figure 12] 12(a) to 12(c) are perspective views showing how the protective tape is attached to the peripheral edge of the wafer. [Figure 13] 1 is a side view showing a state in which a protective tape is attached to a peripheral edge portion of a wafer. [Figure 14] 13 is a diagram showing a terminal end protruding portion of the protective tape cut by a tape cutter. FIG. [Figure 15] FIG. 1 is a schematic diagram of a Bernoulli hand. [Figure 16] FIG. 1 is a schematic plan view of one embodiment of a tape removal system. [Figure 17] FIG. 17 is a side view showing a schematic diagram of the tape peeling system of FIG. 16. [Figure 18] FIG. 2 is a schematic diagram showing a tape peeling module. [Figure 19] FIG. 4 is a side view of the peeling substrate holding portion. [Figure 20] FIG. 2 is a schematic diagram showing a tape separation unit. [Figure 21] 21(a) and 21(b) are diagrams showing how the protective tape is peeled off from the wafer. [Figure 22] FIG. 2 is a schematic diagram showing a UV irradiation module. [Diagram 23] FIG. 4 is a schematic diagram showing a centering mechanism. [Figure 24] FIG. [Diagram 25] 11 is a schematic diagram showing a state in which a wafer is positioned in an internal space of a light-shielding cover. FIG. [Figure 26] FIG. 1 is a schematic diagram illustrating an embodiment of a tape processing system. [Figure 27] FIG. 13 is a schematic diagram showing another embodiment of the tape removal system. [Figure 28] FIG. 13 is a plan view showing a schematic diagram of another embodiment of the tape application system. [Figure 29] FIG. 29 is a schematic side view of the tape application system of FIG. 28. [Diagram 30] FIG. 13 is a side view showing a schematic diagram of another embodiment of the tape application system. [Diagram 31] FIG. 13 is a side view showing a schematic diagram of another embodiment of the tape application system. [Diagram 32] FIG. 13 is a plan view showing a schematic diagram of another embodiment of the tape application system. [Diagram 33] FIG. 33 is a schematic side view of the tape application system of FIG. 32. [Diagram 34]FIG. 13 is a plan view showing a schematic diagram of another embodiment of the tape application system. [Diagram 35] FIG. 35 is a schematic side view of the tape application system of FIG. 34. [Diagram 36] FIG. 13 is a plan view showing a schematic diagram of another embodiment of the tape application system. [Figure 37] FIG. 37 is a schematic side view of the tape application system of FIG. 36. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A tape application system and a tape removal system according to an embodiment of the present invention will be described below with reference to the drawings. The tape application system is a system for applying a protective tape to the peripheral portion of a substrate such as a wafer, and protecting the peripheral portion of the substrate with the protective tape. The tape removal system is a system for removing the protective tape applied to the peripheral portion of a substrate such as a wafer. An example of the protective tape is masking tape. In this specification, the peripheral portion of the substrate is defined as a region including a bevel portion located at the outermost periphery of the substrate, and a top edge portion and a bottom edge portion located radially inward of the bevel portion.

[0022] 1(a) and 1(b) are enlarged cross-sectional views for explaining the peripheral portion of a wafer, which is an example of a substrate. More specifically, FIG. 1(a) is a cross-sectional view of a so-called straight type wafer W, and FIG. 1(b) is a cross-sectional view of a so-called round type wafer W. In the wafer W of FIG. 1(a), the bevel portion is the outermost portion (indicated by the symbol B) composed of an upper inclined portion (upper bevel portion) P, a lower inclined portion (lower bevel portion) Q, and a side portion (apex) R. In the wafer W of FIG. 1(b), the bevel portion is the portion (indicated by the symbol B) that is located at the outermost portion of the wafer W and has a curved cross section. The top edge portion is a flat portion E1 located radially inward from the bevel portion B. The bottom edge portion is a flat portion E2 located on the opposite side to the top edge portion and radially inward from the bevel portion B.

[0023] The bevel portion B, top edge portion E1, and bottom edge portion E2 are collectively referred to as the peripheral portion. The peripheral portion may also include a region in which devices are formed. In the following description, the outer peripheral side surface of the peripheral portion of the wafer W refers to the surface of the bevel portion B, the upper surface of the peripheral portion of the wafer W refers to the surface of the top edge portion E1, and the lower surface of the peripheral portion of the wafer W refers to the surface of the bottom edge portion E2.

[0024] FIG. 2 is an enlarged cross-sectional view showing one embodiment of the wafer W. The wafer W shown in FIG. 2 is a so-called TAIKO (registered trademark) wafer in which the center of the back surface of the wafer W (a region radially inward of the bottom edge portion E2 of the wafer W) is thinner than the peripheral edge portion. In one embodiment, the radial length t1 of the bottom edge portion E2 is 3 mm to 5 mm, and the thickness t2 of the center is 50 μm. In this embodiment, a TAIKO wafer is used as the wafer W, but the wafer W may be drawn in the drawings as a wafer whose center is not ground in order to make the drawings easier to see. The wafer W is not limited to a TAIKO wafer, and may be a wafer other than a TAIKO wafer (a general wafer whose center is not ground as described above).

[0025] Fig. 3 is a plan view showing an embodiment of the tape application system, and Fig. 4 is a side view showing the tape application system of Fig. 3. The tape application system 1 includes a tape application device 10 that applies a protective tape to a peripheral portion of a wafer W, which is an example of a substrate, a transport robot 13 that transports the wafer W to the tape application device 10, a plurality of load ports 5 on which wafer cassettes (substrate cassettes) containing a large number of wafers are placed, and a power supply control unit 3.

[0026] The power supply control unit 3 includes a power supply (not shown) and an operation control unit 4 that controls the operations of the tape application device 10 and the transport robot 13. The tape application device 10 and the transport robot 13 are electrically connected to the operation control unit 4. The operation control unit 4 issues commands to the components of the tape application device 10 and the transport robot 13, and controls the operations of the components of the tape application device 10 and the transport robot 13.

[0027] The operation control unit 4 is composed of at least one computer. The operation control unit 4 includes a storage device 4a in which a program is stored, and a processing device 4b that executes calculations according to instructions included in the program. The storage device 4a includes a main storage device such as a RAM, and an auxiliary storage device such as a hard disk drive (HDD) or a solid state drive (SSD). Examples of the processing device 4b include a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit). However, the specific configuration of the operation control unit 4 is not limited to this example.

[0028] The load port 5 can be equipped with an open cassette, a Standard Manufacturing Interface (SMIF) pod, or a Front Opening Unified Pod (FOUP). The SMIF and FOUP are airtight containers that can store substrate cassettes inside and maintain an environment independent of the external space by covering them with a partition. The transfer robot 13 transfers the wafer W between the load port 5 and the tape application device 10. The transfer robot 13 also transfers the wafer W between a tape application module 20 (described later) and a tape heating device 15.

[0029] 4, the tape application system 1 further includes a partition 6 and a ventilation mechanism 8. The internal space of the partition 6 forms a processing chamber 7. The tape application device 10 and the transfer robot 13 are disposed in the processing chamber 7. The partition 6 is provided with a door (not shown), and the wafer W can be loaded into and unloaded from the processing chamber 7 through this door.

[0030] A clean air intake 6a is formed on the upper part of the partition 6, and a local exhaust device 9 that sucks in and exhausts dust and particles in the space is formed below the tape application device 10 (below the partition 6). A ventilation mechanism 8 is installed on the upper surface of the partition 6. This ventilation mechanism 8 includes a fan 8A and a filter 8B that removes particles and dust in the air sent from the fan 8A. The ventilation mechanism 8 sends clean air into the processing chamber 7 through the clean air intake 6a, and exhausts the gas in the processing chamber 7 from the local exhaust device 9. This forms a downflow of clean air in the processing chamber 7. As a result, the dust and particles in the space are exhausted from the local exhaust device 9. As a result, it is possible to prevent contamination of the surface of the wafer W due to the particles flying up, and adhesion of dust to the peripheral portion of the wafer W.

[0031] The tape application device 10 includes a tape application module 20 that rotates the wafer W to apply a protective tape to the peripheral portion of the wafer W, and a plurality of tape heating devices 15 that heat the protective tape applied to the peripheral portion of the wafer W by the tape application module 20.

[0032] FIG. 5 is a schematic diagram showing the tape application module 20. The tape application module 20 includes an application substrate holding unit 21 that rotatably holds the wafer W, and a tape application unit 28 that applies a protective tape to the peripheral portion of the wafer W while rotating the wafer W. As shown in FIG. 5, the tape application unit 28 applies the protective tape 27 to the peripheral portion of the wafer W while rotating the wafer W held by the substrate stage 22 (shown in FIG. 6) in the direction shown by the arrow in the figure. In this embodiment, a protective film 38 (shown in FIG. 10) is applied to the rear surface (lower surface) of the wafer W, and the protective tape 27 is applied to the peripheral portion of the wafer W so as to cover the outer periphery of the protective film 38 applied to the lower surface of the wafer W and the entire peripheral portion of the wafer W. The outer periphery of the protective film 38 constitutes at least a part of the lower surface of the peripheral portion of the wafer W. In this embodiment, the wafer W includes the protective film 38.

[0033] 6(a) and 6(b) are diagrams showing the bonding substrate holding part 21. More specifically, FIG. 6(a) is a side view of the bonding substrate holding part 21, and FIG. 6(b) is a plan view of the bonding substrate holding part 21. As shown in FIG. 6(a), the bonding substrate holding part 21 includes a substrate stage 22 that holds the wafer W horizontally, a shaft 23 fixed to the center of the lower surface of the substrate stage 22, and a shaft support part 25 that rotatably supports the shaft 23. The substrate stage 22 is connected to a vacuum source (not shown), and the wafer W is held on the upper surface (i.e., the substrate holding surface) of the substrate stage 22 by the vacuum suction force generated by the vacuum source. This makes it possible to prevent the wafer W from shifting or floating up.

[0034] The shaft 23 is configured to rotate about its axis together with the substrate stage 22 when a circumferential force is applied to the substrate stage 22. Specifically, when a force in a rotational direction (for example, a direction indicated by an arrow in FIG. 5) is applied to the wafer W while the wafer W is held by the substrate stage 22, the shaft 23 rotates about its axis together with the substrate stage 22 and the wafer W. In this embodiment, the shaft support unit 25 is a motor, and the shaft support unit 25 has a rotation shaft (not shown). The shaft 23 is connected to the rotation shaft of the shaft support unit 25. The rotation shaft of the shaft support unit 25 is configured to rotate when a force in a rotational direction is applied from the outside while the operation of the shaft support unit 25 is stopped.

[0035] When the shaft support unit 25 is driven, the shaft 23 rotates about its axis, and accordingly, the substrate stage 22 and the wafer W on the substrate stage 22 rotate, but the operation of the shaft support unit 25 is stopped during the bonding process. The shaft support unit 25 is not limited to this embodiment. In one embodiment, the shaft support unit 25 may include a bearing that rotatably supports the shaft 23 instead of a motor.

[0036] As shown in FIG. 6(b), the bonding substrate holder 21 further includes a centering mechanism 26 for centering the wafer W before the wafer W is held on the substrate stage 22 by the vacuum suction force. The centering mechanism 26 is composed of a plurality of centering fingers 32 (three in the illustrated example) arranged at equal intervals along the circumferential direction of the wafer W. The centering fingers 32 have two protruding parts (finger parts) 33 at their tips that can contact the peripheral part of the wafer W. The centering fingers 32 are configured to be able to advance toward the center of the wafer W and retreat from the wafer W by a moving mechanism (e.g., an air cylinder) not shown. When the centering fingers 32 advance toward the center of the wafer W, the protruding parts 33 come into contact with the peripheral part of the wafer W, and the wafer W is pressed toward the center of the wafer W by the protruding parts 33. When the three centering fingers 32 are simultaneously moved toward the center of the wafer W, the peripheral part of the wafer W is pressed toward the center of the wafer W from three directions at the same time. This completes centering of the wafer W. When centering of the wafer W is completed, the center of the shaft 23 and the center of the wafer W are coaxially positioned.

[0037] The bonding substrate holding unit 21 further includes a notch detection mechanism 24 capable of detecting a notch of the wafer W. By detecting the notch of the wafer W using the notch detection mechanism 24, the reference for the rotational position of the wafer W becomes clear, so that the positions at which to start and end bonding of a protective tape, which will be described later, to the wafer can be determined at desired positions. The shaft support unit 25 rotates the shaft 23 in order to detect the notch of the wafer W.

[0038] Returning to FIG. 5, the protective tape 27 supplied to the tape application unit 28 is held by a pay-out roller 30. The protective tape 27 paid out from the pay-out roller 30 passes through a tension unit 31 having a plurality of rollers, during which a desired tension is applied to the protective tape 27 by the tension unit 31. That is, the protective tape 27 is applied to the peripheral portion of the wafer W while being applied with the desired tension. The protective tape 27 that has passed through the tension unit 31 is supplied to the tape application unit 28 via a guide roller 34. The separation film 29 attached to the adhesive surface of the protective tape 27 is peeled off from the protective tape 27 at the same time that the protective tape 27 passes through the guide roller 34, and is taken up by a film take-up roller 35.

[0039] The protective tape 27 includes a flexible base tape and an adhesive layer formed on one side of the base tape. Synthetic resins such as polyolefin (PO), polyethylene (PET), or polyimide can be used as the material for the base tape. The adhesive layer has an adhesive. The thickness of the protective tape 27 is, for example, 60 μm to 80 μm. In one embodiment, the adhesive of the adhesive layer is a UV-curable adhesive. Hereinafter, an adhesive layer having a UV-curable adhesive may be referred to as a UV-curable adhesive layer.

[0040] Further, in one embodiment, the protective tape 27 may be a type of tape that does not have a separation film 29 attached thereto. By eliminating the separation film 29, the overall thickness of the protective tape 27 is reduced, and the radius of the payout roller 30 can be reduced. In addition, the film winding roller 35 is no longer necessary, the tape application device 10 can be simplified, and the cost of the entire tape application system 1 can be reduced. An example of a type of tape that does not have a separation film 29 attached thereto is a tape with a thermosetting adhesive layer. Further, in one embodiment, in order to standardize the tape application device 10 regardless of whether or not the separation film 29 is attached, the tape application module 20 may be provided with a sensor that detects the presence or absence of the separation film 29.

[0041] FIG. 7 is a schematic diagram showing another embodiment of the payout roller 30. The payout roller 30 shown in FIG. 7 includes a core 133 around which the protective tape 27 is wound, and support surfaces 130, 131 provided at both ends of the core 133. The radius of the support surfaces 130, 131 is larger than the radius of the core 133. The support surfaces 130, 131 have flanges 130a, 131a. As the diameter of the wafer increases (for example, a wafer with a diameter of 300 mm), the length of the protective tape 27 held by the payout roller 30 may increase. In such a case, the protective tape 27 may be wound around the payout roller 30 with a deviation in the width direction of the protective tape 27. In this embodiment, the flanges 130a, 131a can prevent the above-mentioned deviation.

[0042] Furthermore, in one embodiment, as shown in Fig. 7, markings representing the respective support surfaces may be provided on the surfaces of support surfaces 130 and 131. Specifically, mark 135 representing support surface 130 is provided on support surface 130, and a mark having a different shape from mark 135 is provided on support surface 131. In the example shown in Fig. 7, the letter A is provided on support surface 130, and the letter B (not shown) is provided on support surface 131. This makes the front and back surfaces of delivery roller 30 clear, and makes it possible to prevent delivery roller 30 from being installed in the wrong orientation.

[0043] Furthermore, in one embodiment, an identification device such as an IC chip having identification information such as a lot number, manufacturing date, expiration date, and manufacturer name may be embedded in the payout roller 30, and the tape application module 20 may be equipped with a reading device that reads the identification information of the IC chip. By reading the identification information with the reading device when the payout roller 30 is installed, it is possible to prevent a payout roller 30 that is not scheduled for use (for example, a payout roller holding a protective tape 27 that is not scheduled for use, or a payout roller that has been used) from being installed.

[0044] Furthermore, in one embodiment, a stocker that houses a plurality of delivery rollers 30 may be provided near the delivery roller 30. This makes it possible to smoothly replace the delivery roller 30.

[0045] Returning to Figure 5, the tape application unit 28 includes a tape holding head 40 that holds the starting end of the protective tape 27 and applies the starting end to the outer peripheral side of the wafer W (see symbol B in Figures 1(a) and 1(b)), a positioning roller 42 as a positioning member that positions the protective tape 27 in a direction perpendicular to the surface of the wafer W, and a side roller 43 that presses the protective tape 27 against the outer peripheral side of the wafer W.

[0046] Furthermore, the tape applying unit 28 has a first roller 46 which folds the protective tape 27 pressed against the outer peripheral side surface of the wafer W along its longitudinal direction and further applies the folded portion of the protective tape 27 to a first surface of the peripheral portion of the wafer W, and a second roller 47 (shown in FIG. 9 ) which folds the protective tape 27 pressed against the outer peripheral side surface of the wafer W along its longitudinal direction and further applies the folded portion of the protective tape 27 to a second surface of the peripheral portion of the wafer W. The first roller 46 and the second roller 47 are disposed adjacent to the side roller 43. In this embodiment, the first surface of the peripheral portion of the wafer W is the upper surface of the peripheral portion of the wafer W, and the second surface of the peripheral portion of the wafer W is the lower surface of the peripheral portion of the wafer W.

[0047] The first roller 46 and the second roller 47 are arranged so as to sandwich the peripheral portion of the wafer W from above and below. In this embodiment, the second roller 47 is arranged below the first roller 46, and the peripheral portion of the wafer W is located between the first roller 46 and the second roller 47. Since the second roller 47 is located below the first roller 46, only the first roller 46 is shown in FIG. 5.

[0048] The tape holding head 40 is connected to an electric cylinder 41 serving as a head actuator, and is configured to be movable by this electric cylinder 41 in a direction approaching and moving away from the peripheral edge of the wafer W. The tape holding head 40 is configured to be able to detachably hold the starting end of the protective tape 27. More specifically, the tape holding head 40 is connected to a vacuum line 39, and is able to hold the starting end of the protective tape 27 by the vacuum suction force generated by this vacuum line 39.

[0049] 8(a) to 8(c) are perspective views showing a process of bonding the starting end of the protective tape 27 to the outer circumferential side surface of the wafer W by the tape holding head 40. A tape holding groove 40a extending parallel to the surface of the wafer W is formed in the front surface of the tape holding head 40. A vacuum suction port 40b is formed in the bottom surface of this tape holding groove 40a, which enables the tape holding head 40 to detachably hold the starting end of the protective tape 27. This vacuum suction port 40b is connected to the vacuum line 39 described above.

[0050] The tape holding head 40 operates as follows. As shown in Fig. 8(a), the starting end of the protective tape 27 is held by the tape holding head 40 through vacuum suction. Next, as shown in Fig. 8(b), the electric cylinder 41 (see Fig. 5) is operated to move the tape holding head 40 toward the outer circumferential side surface of the wafer W until the starting end of the protective tape 27 comes into contact with the outer circumferential side surface of the wafer W. Next, the vacuum suction of the vacuum line 39 is cut off, and the tape holding head 40 is moved away from the peripheral portion of the wafer W. By operating the tape holding head 40 in this manner, the starting end of the protective tape 27 is attached to the outer circumferential side surface of the wafer W, as shown in Fig. 8(c).

[0051] 5, the positioning roller 42 and the side roller 43 are rotatably fixed to a common support table 44. The axes of the positioning roller 42 and the side roller 43 extend in a direction perpendicular to the surface of the wafer W (i.e., the vertical direction). The support table 44 is connected to an air cylinder 45 serving as a roller actuator.

[0052] When the air cylinder 45 is operated, the positioning roller 42 and the side roller 43 simultaneously move toward the outer circumferential side surface of the wafer W. The movement direction of the positioning roller 42 and the side roller 43 is parallel to the surface of the wafer W. The positioning roller 42 and the side roller 43 are disposed at different positions with respect to the movement direction. Therefore, as shown in FIG. 5, the side roller 43 presses the protective tape 27 against the outer circumferential side surface of the wafer W, while the positioning roller 42 only contacts the back surface of the protective tape 27 (i.e., the surface opposite to the adhesive surface) and does not press the protective tape 27 against the outer circumferential side surface of the wafer W. The positioning roller 42 and the side roller 43 may each be connected to a separate air cylinder.

[0053] The tape application unit 28 further includes a clamping mechanism 60 for clamping the peripheral portion of the wafer W between the first roller 46 and the second roller 47. FIG. 9 is a schematic diagram showing the first roller 46, the second roller 47, and the clamping mechanism 60. The first roller 46 and the second roller 47 are fixed to the rotating shaft 36 and the rotating shaft 37, respectively. The rotating shaft 36 and the rotating shaft 37 are rotatably supported by the bearings 57 and 58. The axis of the first roller 46 and the axis of the rotating shaft 36 coincide with each other, and the first roller 46 is configured to be rotatable around the axis of the rotating shaft 36. The axis of the second roller 47 and the axis of the rotating shaft 37 coincide with each other, and the second roller 47 is configured to be rotatable around the axis of the rotating shaft 37.

[0054] The tape application unit 28 further includes a roller drive motor 49 that rotates the second roller 47. The rotating shaft 37 is connected to the roller drive motor 49. The second roller 47 is connected to the roller drive motor 49 via the rotating shaft 37. When the roller drive motor 49 is driven, the rotating shaft 37 rotates, and the second roller 47 rotates accordingly. The first roller 46 is configured to be rotatable, but is not connected to a rotation driver such as a motor.

[0055] The clamping mechanism 60 includes moving mechanisms 61 and 62 for moving the first roller 46 and the second roller 47 in directions approaching and moving away from the peripheral portion of the wafer W, respectively, bridges 63 and 64 connected to the moving mechanisms 61 and 62, respectively, and a spring 66 connecting the moving mechanism 61 and the bridge 63. The first roller 46 and the second roller 47 are connected to the clamping mechanism 60. Specifically, the first roller 46 is connected to the bridge 63 via the rotating shaft 36 and the bearing 57, and the second roller 47 is connected to the bridge 64 via the rotating shaft 37 and the roller drive motor 49. The positions of the moving mechanisms 61 and 62 are fixed.

[0056] The moving mechanisms 61 and 62 are composed of air cylinders and the like. When the moving mechanism 61 is operated, the first roller 46 moves together with the rotating shaft 36, the bearing 57, the bridge 63, and the spring 66 in a direction approaching and moving away from the second roller 47 (i.e., in a direction approaching and moving away from the peripheral portion of the wafer W). When the moving mechanism 62 is operated, the second roller 47 moves together with the rotating shaft 37, the bearing 58, the roller drive motor 49, and the bridge 64 in a direction approaching and moving away from the first roller 46 (i.e., in a direction approaching and moving away from the peripheral portion of the wafer W). The moving direction of the first roller 46 and the second roller 47 is a direction perpendicular to the surface of the wafer W. In one embodiment, the moving mechanisms 61 and 62 may be composed of a combination of a servo motor, a ball screw mechanism, and a motor driver. The moving mechanisms 61 and 62 move the rollers 46 and 47 in a direction approaching the peripheral edge of the wafer W until the rollers 46 and 47 come into contact with the wafer W. As a result, the first roller 46 and the second roller 47 sandwich the peripheral edge of the wafer W.

[0057] When the first roller 46 comes into contact with the wafer W, the first roller 46, the rotating shaft 36, the bearing 57, the spring 66, and the bridge 63 do not move any further downward, but when the moving mechanism 61 is further operated in this state (a downward force is applied to the spring 66), a repulsive force is generated in the spring 66, and the spring 66 applies a downward force (toward the wafer W) equivalent to the repulsive force to the bridge 63. This downward force generated by the spring 66 is transmitted to the first roller 46 via the rotating shaft 36 and the bearing 57. Therefore, the first roller 46 presses the peripheral edge of the wafer W (or presses the protective tape 27 against the peripheral edge of the wafer W) with a pressing force including the downward force.

[0058] With this configuration, the first roller 46 and the second roller 47 can pinch the wafer W from above and below with an appropriate force, and can fold the protective tape 27 along its longitudinal direction and press the folded portion against the upper and lower surfaces of the peripheral edge of the wafer W. The pressing force for pressing the peripheral edge of the wafer W (or pressing the protective tape 27 against the peripheral edge of the wafer W) can be adjusted by adjusting the air pressure of the moving mechanisms 61, 62 composed of, for example, air cylinders.

[0059] 10 is an enlarged view showing a state in which the wafer W and the protective tape 27 are sandwiched between the first roller 46 and the second roller 47. With the wafer W held by the bonding substrate holder 21, the roller drive motor 49 is driven to rotate the second roller 47 while the peripheral portion of the wafer W is sandwiched between the first roller 46 and the second roller 47 (i.e., while the first roller 46 and the second roller 47 press the upper and lower surfaces of the peripheral portion of the wafer W), and the wafer W, the first roller 46, the substrate stage 22, and the shaft 23 rotate in accordance with the rotation of the second roller 47. The first roller 46 and the second roller 47 can sandwich the wafer W from above and below with an appropriate force by the sandwiching mechanism 60, so that the feed force (the force for rotating the wafer W) by the second roller 47 to the peripheral portion of the wafer W is appropriately transmitted. FIG. 11 shows how the first roller 46, the second roller 47, the wafer W, the substrate stage 22, and the shaft 23 rotate.

[0060] As described above, the protective tape 27 is attached to the peripheral portion of the wafer W with a desired tension applied by the tension unit 31. In other words, the protective tape 27 is pulled by the tension unit 31 in the direction opposite to the rotation direction of the wafer W while being pressed against the peripheral portion of the wafer W by the side rollers 43. As a result, a force in the direction opposite to the rotation direction of the wafer W is applied to the position where the protective tape 27 is pressed.

[0061] For example, in a tape application device having a roller equivalent to the second roller that is not connected to a drive source such as a motor, a motor connected to a substrate stage is driven to rotate the substrate stage, thereby rotating the wafer held on the substrate stage, but in this case, the force for rotating the wafer is applied radially inward of the wafer from the position where the protective tape is pressed against it. As a result, the radial distance between the place where the force in the wafer rotation direction is applied and the place where the protective tape is pressed against it becomes large, so a large load is applied to the wafer.

[0062] In such an apparatus, the larger the diameter of the wafer, the greater the distance in the radial direction of the wafer between the place where the force in the rotational direction is applied to the wafer and the place where the protective tape is pressed. Therefore, if the above-mentioned tape application apparatus (tape application apparatus having a roller equivalent to the second roller not connected to a driving source such as a motor) is applied to the protective tape application process of a large-diameter wafer, the wafer may be damaged. For example, if the above-mentioned tape application apparatus (tape application apparatus having a roller equivalent to the second roller not connected to a driving source such as a motor) is applied to a large-diameter TAIKO wafer (e.g., a wafer with a diameter of 300 mm) with the same thickness (50 μm or less) as a TAIKO wafer with a diameter of 200 mm, stress concentration occurs at the boundary between the center and edge of the TAIKO wafer, compromising the mechanical strength of the wafer and increasing the risk of the wafer being damaged.

[0063] According to this embodiment, the force for rotating the wafer W is applied to the peripheral portion of the wafer W, so that the distance in the radial direction of the wafer W between the place where the force in the rotational direction of the wafer W is applied and the place where the protective tape is pressed can be made closer. This reduces the load on the wafer W, and makes it possible to prevent damage to the wafer W. Also, in this embodiment, the rollers 46, 47 are disposed adjacent to the side roller 43, so that the place where the force in the rotational direction of the wafer W is applied and the place where the protective tape is pressed can be made closer. This makes it possible to further reduce the load on the wafer W.

[0064] In this embodiment, the second roller 47 is disposed below the first roller 46, and therefore it is possible to prevent dust generated from the roller drive motor 49 from falling onto the surface of the wafer W and contaminating the surface of the wafer W. In one embodiment, the second roller 47 may be disposed above the first roller 46, and the peripheral portion of the wafer W may be located between the first roller 46 and the second roller 47. In this case, the first surface of the peripheral portion of the wafer W becomes the lower surface of the peripheral portion of the wafer W, and the second surface of the peripheral portion of the wafer W becomes the upper surface of the peripheral portion of the wafer W.

[0065] The first roller 46, the rotating shaft 36, the bearing 57, the second roller 47, the rotating shaft 37, the bearing 58, and the roller drive motor 49 constitute a rotating device 48 that rotates the wafer W.

[0066] As described above, the protective tape 27 is attached to the peripheral portion of the wafer W with a desired tension applied by the tension unit 31. In other words, when the protective tape 27 is pressed against the peripheral portion of the wafer W, the tension unit 31 pulls the protective tape 27 in the tangential direction of the wafer W. In this embodiment, the first roller 46 and the second roller 47 are made of rubber. By using rubber as the material for the first roller 46 and the second roller 47, it is possible to prevent the protective tape 27 from being pulled and shifted. Examples of such rubber include urethane rubber and silicone rubber.

[0067] When viewed from a direction perpendicular to the surface of the wafer W (a direction perpendicular to the substrate holding surface of the substrate stage 22), the axial centers of the rollers 46, 47 and the axial centers of the rotating shafts 36, 37 extend in the radial direction of the wafer W (see FIG. 5), but the axial centers of the rollers 46, 47 and the axial centers of the rotating shafts 36, 37 are arranged at an incline to a direction perpendicular to the surface of the wafer W. Specifically, the rollers 46, 47, the rotating shafts 36, 37, and the roller drive motor 49 are arranged at an incline so that the tips of the rollers 46, 47 face the surface of the wafer W. The first roller 46 and the second roller 47 have a tapered shape in which the cross-sectional area gradually decreases toward the tips. With this configuration, the circumference of the cross section of the rollers 46, 47 becomes shorter toward the inner side in the radial direction of the wafer W. As a result, it is possible to prevent the protective tape 27 from being attached in a twisted manner.

[0068] The positioning roller 42 and the side roller 43 are configured to be rotatable, but are not connected to a rotation driver such as a motor. Therefore, these rollers 42, 43 are rotated by contact with the protective tape 27 that moves as the wafer W rotates.

[0069] Next, the operation of the tape application unit 28 will be described. First, as shown in FIG. 8(a) to FIG. 8(c), the start end of the protective tape 27 is applied to the outer peripheral side surface of the wafer W by the tape holding head 40. Next, the positioning roller 42 and the side roller 43 are moved toward the wafer W until the side roller 43 contacts the outer peripheral side surface of the wafer W. Then, in a state in which the start end of the protective tape 27 is applied to the outer peripheral side surface, the clamping mechanism 60 moves the first roller 46 and the second roller 47 in a direction approaching each other, and the rollers 46 and 47 clamp the wafer W with a desired force. Then, the roller drive motor 49 is driven while the wafer W is being clamped by the rollers 46 and 47. As a result, the wafer W rotates about its axis. As shown in FIG. 12(a), the positioning roller 42 is disposed upstream of the side roller 43 in the traveling direction of the protective tape 27. Therefore, the protective tape 27 is guided by the positioning roller 42 and the side roller 43 in that order.

[0070] The protective tape 27 has its vertical position fixed by the positioning roller 42. That is, the positioning roller 42 has a drum shape with a narrowed center, and the protective tape 27 is guided by this narrowed portion, thereby positioning the protective tape 27 in the vertical direction. After passing the positioning roller 42, the protective tape 27 is pressed against the outer circumferential side surface of the wafer W with a predetermined force by the side roller 43, whereby the protective tape 27 is attached to the outer circumferential side surface of the wafer W.

[0071] The side rollers 43 are made of an elastic material, such as urethane rubber, and when the side rollers 43 press the protective tape 27 against the outer circumferential side surface of the wafer W with a predetermined force, the outer circumferential surface of the side rollers 43 is recessed along the shape of the peripheral portion of the wafer W. As a result, as shown in FIG 12(b), the entire protective tape 27 is deflected radially inward of the wafer W, following the recessed outer circumferential surface of the side rollers 43.

[0072] As the wafer W rotates, the protective tape 27 reaches the first roller 46 and the second roller 47. The protective tape 27 bent by the side roller 43 is sandwiched by the first roller 46 and the second roller 47 with a predetermined force. As shown in FIG. 12(b) and FIG. 13, the first roller 46 bends the upper half of the protective tape 27 along its longitudinal direction and presses it against the upper surface (first surface) of the peripheral portion of the wafer W. At the same time, the second roller 47 bends the lower half of the protective tape 27 along its longitudinal direction and presses it against the lower surface (second surface) of the peripheral portion of the wafer W. In this way, the protective tape 27 is attached to the peripheral portion of the wafer W. In this state, the wafer W is rotated once, so that the protective tape 27 is attached to the entire peripheral portion of the wafer W, as shown in FIG. 12(c).

[0073] 5, the tape applying unit 28 may have a third roller 54 and a fourth roller 55. The third roller 54 is disposed above the fourth roller 55, and the peripheral portion of the wafer W is located between the third roller 54 and the fourth roller 55. Since the fourth roller 55 is located below the third roller 54, only the third roller 54 is shown in FIG.

[0074] The third roller 54 and the fourth roller 55 are configured to be rotatable about their respective axes. The axes of the third roller 54 and the fourth roller 55 extend parallel to the surface of the wafer W and in the radial direction of the wafer W. The third roller 54 and the fourth roller 55 are connected to a moving mechanism 56 constituted by an air cylinder or the like. When the moving mechanism 56 is operated, the third roller 54 and the fourth roller 55 move in directions approaching and separating from each other (i.e., directions approaching and separating from the peripheral portion of the wafer W). The moving direction of the third roller 54 and the fourth roller 55 is perpendicular to the surface of the wafer W.

[0075] With this configuration, the third roller 54 and the fourth roller 55 press the protective tape 27, which has been affixed to the peripheral portion of the wafer W by the first roller 46 and the second roller 47, against the peripheral portion of the wafer W again. Therefore, the third roller 54 and the fourth roller 55 reliably affix the protective tape 27 to the peripheral portion of the wafer W. The pressing force with which the third roller 54 and the fourth roller 55 press the protective tape 27 against the peripheral portion of the wafer W can be adjusted by adjusting the air pressure of the moving mechanism 56, which is constituted by, for example, an air cylinder.

[0076] In one embodiment, the third roller 54 and the fourth roller 55 may have a tapered shape in which the cross-sectional area gradually decreases toward the tip, and the tips of the rollers 54, 55 may be arranged at an angle toward the surface of the wafer W.

[0077] The width of the folded portion of the protective tape 27 is 2 mm to 3 mm. The width of the folded portion of the protective tape 27 attached to the upper surface of the peripheral portion of the wafer W (hereinafter referred to as the upper tape width) may be the same as or different from the width of the folded portion of the protective tape 27 attached to the lower surface of the peripheral portion of the wafer W (hereinafter referred to as the lower tape width). Usually, the wafer W is held on the substrate stage 22 of the attachment substrate holder 21 with the device formed thereon facing upward. In this case, the upper tape width may be larger than the lower tape width. The ratio between the upper tape width and the lower tape width can be adjusted by the vertical position of the positioning roller 42.

[0078] After the tape application process is completed, the protective tape 27 is cut by a tape cutter 50, as shown in Fig. 12(c). After the protective tape 27 is cut, the protective tape 27 is sandwiched between the first roller 46 and the second roller 47 and the wafer W is rotated, whereby a terminal end protruding portion 52, which is the terminal end of the protective tape 27 protruding from the peripheral edge portion of the wafer W, is formed, as shown in Fig. 14.

[0079] 3, the tape heating device 15 includes a heating stage 15a on which the wafer W is placed, and a heater (not shown) for heating the heating stage 15a. The wafer W having the protective tape 27 attached to its peripheral portion is placed on the heating stage 15a, whereby the protective tape 27 is heated. This increases the adhesive strength of the protective tape 27 after attachment.

[0080] In this embodiment, the tape application system 1 includes a plurality of (three in the illustrated example) tape heating devices 15, but the number of tape heating devices 15 is not limited to this embodiment. The tape application system 1 may include one tape heating device 15, or may include four or more tape heating devices 15. By providing a plurality of tape heating devices 15, a plurality of wafers can be heated simultaneously.

[0081] In one embodiment, the tape heating device 15 may be a spot heater arranged so that heat is applied only to the protective tape 27 attached to the peripheral portion of the wafer W. The tape heating device 15 is arranged in a position where heat can be applied only to the protective tape 27, such as in the vicinity of the substrate stage 22, and the wafer W is rotated by the rotation device 48, so that heat can be applied to the entire protective tape 27. Examples of spot heaters include an infrared spot heater that emits infrared rays and an infrared lamp type heater.

[0082] Returning to FIG. 3, the transfer robot 13 includes a Bernoulli hand 16 that holds the wafer W, and a rotation and elevation mechanism (not shown) that rotates and / or elevates the Bernoulli hand 16. FIG. 15 is a schematic diagram of the Bernoulli hand 16. As shown in FIG. 15, the Bernoulli hand 16 includes a base 17 and a plurality of chucks 18 connected to the base 17. The Bernoulli hand 16 is configured to suck the lower surface of the wafer W in a non-contact manner via a fluid. The Bernoulli hand 16 is a mechanism that holds the wafer W by utilizing Bernoulli's theorem.

[0083] Specifically, a fluid (for example, a gas such as clean air or an inert gas, or a liquid such as pure water) is discharged from the outer periphery of the suction surface 18a of the chuck 18 toward the outside, forming a negative pressure in the space between the center of the suction surface 18a and the bottom surface of the wafer W. As a result, the chuck 18 generates a suction force in the center of the suction surface 18a and sucks the wafer W. Since a flow of fluid is formed in the space between the outer periphery of the suction surface 18a and the wafer W, the chuck 18 can suck the wafer W without contact. As a result, the wafer W can be sucked while keeping the bottom surface of the wafer W clean. As a result, the adhesive strength of the protective tape 27 can be maintained without soiling the peripheral portion of the wafer W. In addition, the handling speed can be increased without being affected by the deflection of the center due to the thinning of the center of the wafer W when a TAIKO wafer is used.

[0084] Fig. 16 is a plan view showing a schematic diagram of one embodiment of the tape peeling system, and Fig. 17 is a side view showing a schematic diagram of the tape peeling system of Fig. 16. The tape peeling system 70 includes a tape peeling device 80 which peels off the protective tape 27 from the peripheral portion of the wafer W, a transport robot 73 which transports the wafer W to the tape peeling device 80, a plurality of load ports 75 on which wafer cassettes (substrate cassettes) containing a large number of wafers are placed, and a power supply control unit 71.

[0085] The power supply control unit 71 includes a power supply (not shown) and an operation control unit 74 that controls the operations of the tape peeling device 80 and the transport robot 73. The tape peeling device 80 and the transport robot 73 are electrically connected to the operation control unit 74. The operation control unit 74 issues commands to each component of the tape peeling device 80 and the transport robot 73, and controls the operations of each component of the tape peeling device 80 and the transport robot 73.

[0086] The operation control unit 74 is composed of at least one computer. The operation control unit 74 includes a storage device 74a in which a program is stored, and a processing device 74b that executes calculations according to instructions included in the program. The storage device 74a includes a main storage device such as a RAM, and an auxiliary storage device such as a hard disk drive (HDD) or a solid state drive (SSD). Examples of the processing device 74b include a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit). However, the specific configuration of the operation control unit 74 is not limited to this example.

[0087] An open cassette, a Standard Manufacturing Interface (SMIF) pod, or a Front Opening Unified Pod (FOUP) can be mounted on the load port 75. The transfer robot 73 transfers the wafer W between the load port 75 and a tape peeling device 80. The transfer robot 73 also transfers the wafer W between a tape peeling module 81, which will be described later, and a UV irradiation module 85.

[0088] 17, the tape removal system 70 further includes a partition 76 and a ventilation mechanism 78. The internal space of the partition 76 forms a processing chamber 77. The tape removal device 80 and the transfer robot 73 are disposed in the processing chamber 77. The partition 76 is provided with a door (not shown), and the wafer W can be loaded into and unloaded from the processing chamber 77 through this door.

[0089] A clean air intake 76a is formed on the upper part of the partition 76, and a local exhaust device 79 that sucks in and exhausts dust and particles in the space is formed below the tape peeling device 80 (below the partition 76). A ventilation mechanism 78 is installed on the upper surface of the partition 76. This ventilation mechanism 78 includes a fan 78A and a filter 78B that removes particles and dust in the air sent from the fan 78A. The ventilation mechanism 78 sends clean air into the processing chamber 77 through the clean air intake 76a, and exhausts the gas in the processing chamber 77 from the local exhaust device 79. This forms a downflow of clean air in the processing chamber 77. As a result, the dust and particles in the space are exhausted from the local exhaust device 79. As a result, it is possible to prevent contamination of the surface of the wafer W due to the particles flying up, and adhesion of dust to the peripheral portion of the wafer W.

[0090] The tape peeling device 80 includes a tape peeling module 81 that rotates the wafer W to peel off the protective tape from the peripheral portion of the wafer W, and a UV irradiation module 85 that irradiates ultraviolet rays onto the protective tape 27 attached to the peripheral portion of the wafer W. The transfer robot 73 includes a Bernoulli hand 82 that holds the wafer W, and a rotation and elevation mechanism (not shown) that rotates and / or elevates the Bernoulli hand 82. The Bernoulli hand 82 is configured to suck the lower surface of the wafer W in a non-contact manner via a fluid. The Bernoulli hand 82 is a mechanism that holds the wafer W by utilizing Bernoulli's theorem. The configuration of the Bernoulli hand 82 is the same as that of the Bernoulli hand 16. The Bernoulli hand 82 can suck the wafer W while keeping the lower surface of the wafer W clean.

[0091] 18 is a schematic diagram showing a tape peeling module 81. The tape peeling module 81 includes a peeling substrate holder 83 that holds and rotates the wafer W, and a tape peeling unit 90 that peels the protective tape 27 from the rotating wafer W.

[0092] 19 is a side view of the peeling substrate holding part 83. As shown in FIG. 19, the peeling substrate holding part 83 includes a substrate stage 86 that holds the wafer W horizontally, a shaft 87 fixed to the center of the lower surface of the substrate stage 86, and a stage motor 88 for rotating the shaft 87 and the substrate stage 86. The substrate stage 86 is connected to a vacuum source (not shown), and the wafer W is held on the upper surface (i.e., the substrate holding surface) of the substrate stage 86 by the vacuum suction force generated by this vacuum source. When the stage motor 88 is driven, the shaft 87 rotates in the direction indicated by the arrow in the figure, and accordingly, the substrate stage 86 and the wafer W on the substrate stage 86 rotate.

[0093] 18, the peeling substrate holding unit 83 further includes a centering mechanism 84 that centers the wafer W before the wafer W is held on the substrate stage 86 by vacuum suction force. The centering mechanism 84 is composed of a plurality of centering fingers 92 (three in the illustrated example) that are equally spaced along the circumferential direction of the wafer W. The centering fingers 92 have two protruding portions (finger portions) 94 at their tips that can contact the peripheral portion of the wafer W. The configuration and operation of the centering fingers 92 are similar to those of the centering fingers 32. The peeling substrate holding unit 83 further includes a notch detection mechanism 89 that can detect the notch of the wafer W.

[0094] Fig. 20 is a schematic diagram showing a tape peeling unit 90. As shown in Fig. 20, the tape peeling unit 90 includes a chucking mechanism 93 that grips the end of the protective tape 27 and pulls the protective tape 27 out from the wafer W. The chucking mechanism 93 has a pair of chucking members (e.g., chucking claws) 91, 91 that grip the end protruding portion 52 of the protective tape 27. The chucking mechanism 93 is configured to be able to advance toward the wafer W and retreat from the wafer W.

[0095] The tape peeling unit 90 further includes a pair of tape feed rollers 95, 95 that feed out the protective tape 27 at a speed synchronized with the rotational speed of the wafer W while peeling the protective tape 27 from the wafer W, and a take-up roller 96 that takes up the protective tape 27 fed from the tape feed rollers 95, 95. One of the pair of tape feed rollers 95, 95 is connected to a motor 97, and the take-up roller 96 is connected to a motor 99, and the rollers 95, 96 are rotated at predetermined speeds by the motors 97, 99.

[0096] The operation of the tape peeling unit 90 is as follows. First, as shown in Fig. 20, the wafer W is rotated by the peeling substrate holder 83 until the end protrusion 52 is positioned in front of the chucking mechanism 93. The chucking mechanism 93 moves toward the wafer W and grips the end protrusion 52 with its chucking members 91, 91. Then, as shown in Fig. 21(a), while the chucking members 91, 91 grip the end protrusion 52, the chucking mechanism 93 is retracted while rotating the wafer W. At this time, the retraction speed of the chucking mechanism 93 and the rotation speed of the wafer W are synchronized so that the angle between the protective tape 27 peeled off from the wafer W and the tangent direction of the wafer W becomes 90°.

[0097] When the chucking mechanism 93 has completed its retreat, as shown in FIG. 21(b), the tape feed rollers 95, 95 approach each other and sandwich the peeled protective tape 27 therebetween. The take-up roller 96 is moved until it abuts against the peeled portion of the protective tape 27. In this state, the tape feed rollers 95, 95 rotate and feed the peeled protective tape 27 to the take-up roller 96 at a predetermined speed. At the same time, the take-up roller 96 abutting against the protective tape 27 is rotated, whereby the peeled protective tape 27 is taken up by the take-up roller 96.

[0098] At the same time that winding of the protective tape 27 begins, the chucking mechanism 93 moves toward the winding roller 96. When a certain amount of the protective tape 27 has been wound around the winding roller 96, the chucking members 91, 91 release the end protrusion 52, thereby allowing the winding roller 96 to continue winding the protective tape 27. The tape feed rollers 95, 95 rotate at a rotational speed synchronized with the rotational speed of the wafer W so that the angle between the protective tape 27 peeled off from the wafer W and the tangent direction of the wafer W is 90°.

[0099] The take-up roller 96 and the tape feed rollers 95, 95 continue to rotate until the entire protective tape 27 has been peeled off from the peripheral edge of the wafer W and all of the peeled protective tape 27 has been taken up by the take-up roller 96. Although not shown in FIG. 21(b), the tape feed rollers 95, 95 and the take-up roller 96 are rotated by motors 97, 99, respectively. When the take-up of the protective tape 27 is completed, the take-up roller 96 retreats, and the tape feed rollers 95, 95 move in directions away from each other.

[0100] 22 is a schematic diagram showing a UV irradiation module 85. The UV irradiation module 85 includes a UV irradiation substrate holder 101 that holds a wafer W, a UV irradiation device 110 that irradiates ultraviolet rays onto a protective tape 27 attached to the peripheral portion of the wafer W, and a cup-shaped light-shielding cover 111 that is connected to the UV irradiation device 110.

[0101] The UV irradiation substrate holding unit 101 includes a substrate holding device 104 that holds and rotates the substrate, and a lifting mechanism 107 that moves the substrate holding device 104 up and down. The substrate holding device 104 includes a substrate stage 102 that holds the wafer W horizontally, a shaft 103 fixed to the center of the lower surface of the substrate stage 102, and a stage motor 105 for rotating the shaft 103 and the substrate stage 102. The substrate stage 102 is connected to a vacuum source (not shown), and the wafer W is held on the upper surface (i.e., the substrate holding surface) of the substrate stage 102 by the vacuum suction force generated by this vacuum source. When the stage motor 105 is driven, the shaft 103 rotates in the direction indicated by the arrow in the figure, and the substrate stage 102 and the wafer W on the substrate stage 102 rotate accordingly.

[0102] 23, the UV irradiation substrate holding unit 101 further includes a centering mechanism 116 that centers the wafer W before the wafer W is held on the substrate stage 102 by vacuum suction force. The centering mechanism 116 is composed of a plurality of centering fingers 117 (three in the illustrated example) that are equally spaced along the circumferential direction of the wafer W. The centering fingers 117 have two protruding portions (finger portions) 118 at their tips that can come into contact with the peripheral portion of the wafer W. The configuration of the centering fingers 117 is similar to that of the centering fingers 32.

[0103] 22, the lifting mechanism 107 is connected to the substrate holding device 104. The lifting mechanism 107 includes a moving mechanism 109 formed of an air cylinder or the like, a plurality of guide rods 108a, a plurality of linear guides 108b, and a base 106. A stage motor 105 of the substrate holding device 104 is fixed to the base 106, and each guide rod 108a is connected to the base 106. Each guide rod 108a is supported by each linear guide 108b so as to be able to move up and down freely with low friction.

[0104] The moving mechanism 109 is composed of an air cylinder or the like. When the moving mechanism 109 is operated, the base 106 and the substrate holding device 104 fixed to the base 106 move in the vertical direction. In this embodiment, the substrate holding device 104 can be moved up and down by adjusting the air pressure of the moving mechanism 109 composed of an air cylinder or the like. In one embodiment, the moving mechanism 109 may be composed of a combination of a servo motor, a ball screw mechanism, and a motor driver.

[0105] The UV irradiation device 110 includes a UV generator 115 equipped with a light source that emits ultraviolet rays, a plurality of irradiation heads 113 that radiate (irradiate) the ultraviolet rays generated by the UV generator 115, and a plurality of fiber cables 114 that transmit the ultraviolet rays generated by the UV generator to the irradiation heads 113. One end of each fiber cable 114 is connected to each irradiation head 113, and the other end is connected to the UV generator 115. The irradiation heads 113 are connected to a light-shielding cover 111. By operating the UV generator 115, the UV generator 115 emits ultraviolet rays, which are transmitted to the irradiation heads 113 through the fiber cables 114, and the irradiation heads 113 radiate the ultraviolet rays.

[0106] The light-shielding cover 111 is disposed above the substrate holding device 104 and opens downward. FIG. 24 is a perspective view of the light-shielding cover 111. The inner diameter of the light-shielding cover 111 is equal to or larger than the diameter of the wafer W, and the light-shielding cover 111 is formed so as to be able to cover the entire wafer W. The multiple irradiation heads 113 extend into the internal space 112 of the light-shielding cover 111 through multiple through holes 111a formed in the upper wall 120 of the light-shielding cover 111. With this configuration, the UV irradiation device 110 can irradiate ultraviolet light in the internal space 112. Specifically, the multiple through holes 111a and the multiple irradiation heads 113 are arranged along the circumferential direction of the upper wall 120.

[0107] 25, with the wafer W held by the substrate stage 102, the substrate holding device 104 is raised so that the entire wafer W is positioned in the internal space 112 of the light-shielding cover 111. As a result, the wafer W is covered by the light-shielding cover 111. When the wafer W is located in the internal space 112, the multiple irradiation heads 113 are disposed at positions where the protective tape 27 attached to the wafer W is irradiated with ultraviolet rays.

[0108] With the wafer W positioned in the internal space 112, the protective tape 27 is irradiated with ultraviolet light from the irradiation head 113. That is, the UV irradiation module 85 irradiates the protective tape 27 with ultraviolet light from the irradiation head 113 while covering the entire wafer W with the light-shielding cover 111.

[0109] By irradiating the protective tape 27 having a UV-curable adhesive layer with ultraviolet rays, the adhesive layer is cured, and the protective tape 27 becomes easier to peel off. As a result, it is possible to shorten the time required to peel off the protective tape, and to prevent part of the adhesive of the protective tape from remaining on the wafer (glue residue) after the protective tape is peeled off. In this embodiment, ultraviolet rays are irradiated onto the protective tape 27 from the irradiation head 113 while the entire wafer W is covered with the light-shielding cover 111, so that the ultraviolet rays can be irradiated efficiently and the adhesive layer can be cured in a shorter time.

[0110] In this embodiment, while the wafer W is positioned in the internal space 112, the wafer W is rotated about its axis by the stage motor 105 of the substrate holding device 104. The UV irradiation device 110 irradiates ultraviolet rays onto the protective tape 27 attached to the rotating wafer W. This makes it possible to more efficiently irradiate the protective tape 27 with ultraviolet rays, and to cure the UV-curable adhesive layer in a shorter time.

[0111] In this embodiment, the UV irradiation device 110 includes a plurality of irradiation heads 113, but the number of irradiation heads 113 may be one. Furthermore, in one embodiment, as long as the irradiation head 113 is configured to be able to irradiate ultraviolet light into the internal space 112 through the through hole 111a, the tip of the irradiation head 113 does not have to be disposed in the internal space 112. For example, the irradiation head 113 may be disposed such that the tip of the irradiation head 113 is located within the through hole 111a.

[0112] Furthermore, in one embodiment, the UV irradiation device 110 may be composed of a UV lamp equipped with a light source that emits ultraviolet rays. In this case, the UV irradiation device 110 is disposed in the internal space 112, and is disposed at a position where the protective tape 27 is irradiated with ultraviolet rays when the wafer W to which the protective tape 27 is attached is located in the internal space 112. Furthermore, in one embodiment, the UV irradiation module 85 may include a plurality of UV irradiation devices 110 composed of UV lamps equipped with a light source that emits ultraviolet rays, and the plurality of UV irradiation devices 110 may be arranged in the internal space 112 along the circumferential direction of the upper wall 120.

[0113] Furthermore, in one embodiment, the UV irradiation module 85 may be composed of a UV lamp equipped with a light source that emits ultraviolet light. The UV lamp is disposed in a position where the protective tape 27 can be irradiated with ultraviolet light, such as in the vicinity of the substrate stage 22, and the protective tape 27 is peeled off while being irradiated with ultraviolet light, thereby increasing the speed at which the protective tape 27 is peeled off and preventing adhesive residue.

[0114] Furthermore, in one embodiment, the tape peeling module 81 may include a dryer for heating the protective tape 27. If the adhesive layer of the protective tape 27 has an adhesive property in which the adhesive strength decreases as the temperature increases, the adhesive strength of the adhesive layer decreases by heating the protective tape 27, and the protective tape 27 becomes easier to peel off. By peeling the protective tape 27 while heating it with a dryer, the speed at which the protective tape 27 is peeled off can be increased and adhesive residue can be prevented.

[0115] Fig. 26 is a schematic diagram showing an embodiment of a tape processing system including the tape application system 1 and tape peeling system 70 of the present embodiment. The tape application system 1 and the tape peeling system 70 are installed in a tape processing system 100 as shown in Fig. 26. The tape application system 1 and the tape peeling system 70 are arranged side by side in the horizontal direction.

[0116] Next, an embodiment of the tape application method will be described. In this specification, the tape application method is defined as including a tape application step, a heating step, and a tape peeling step, which will be described later, and the tape peeling step is defined as including a rotation peeling step and a UV irradiation step, which will be described later. First, the tape application step will be described. First, the wafer W is transported from the load port 5 to the tape application module 20 by the transport robot 13, and placed on the substrate stage 22 of the application substrate holding unit 21. The application substrate holding unit 21 holds the wafer W rotatably. Next, as shown in FIG. 8(a) to FIG. 8(c), the tape holding head 40 applies the start end of the protective tape 27 to the outer peripheral side surface of the wafer W. Next, the positioning roller 42 and the side roller 43 are moved toward the wafer W until the side roller 43 contacts the outer peripheral side surface of the wafer W, and the protective tape 27 is pressed against the outer peripheral side surface of the wafer W by the side roller 43 with a predetermined force. Then, with the start end of the protective tape 27 attached to the outer circumferential side surface, the first roller 46 and the second roller 47 are moved toward each other by the clamping mechanism 60, and the wafer W is clamped by the rollers 46, 47 with a desired force. Then, the roller drive motor 49 is driven while the wafer W is being clamped by the rollers 46, 47. As a result, the wafer W rotates about its axis.

[0117] As the wafer W rotates, the protective tape 27 reaches the first roller 46 and the second roller 47. Then, the protective tape 27 bent by the side roller 43 is sandwiched by the first roller 46 and the second roller 47 with a predetermined force. The first roller 46 bends the upper half of the protective tape 27 along its longitudinal direction and presses it against the upper surface (first surface) of the peripheral portion of the wafer W. At the same time, the second roller 47 bends the lower half of the protective tape 27 along its longitudinal direction and presses it against the lower surface (second surface) of the peripheral portion of the wafer W. In this manner, the protective tape 27 is attached to the peripheral portion of the wafer W. In this state, the wafer W is rotated once to attach the protective tape 27 to the entire peripheral portion of the wafer W. Thereafter, the protective tape 27 is cut by the tape cutter 50, and the wafer W is rotated to form the end protrusion 52.

[0118] Next, the wafer W with the protective tape 27 attached thereto is taken out from the attachment substrate holder 21 by the transfer robot 13, and a heating step is performed. The transfer robot 13 transfers the wafer W with the protective tape 27 attached thereto to the tape heating device 15, and places it on the heating stage 15a. As a result, the wafer W is heated by the tape heating device 15.

[0119] After the heating process is completed, the wafer W is removed from the tape heating device 15 and transported to the load port 5. Thereafter, various processes, such as a wet process such as plating and / or a dry process such as dry etching, are performed on the wafer W. After the processes on the wafer W are completed, the wafer W is transported to a tape peeling system 70, where a tape peeling process is performed.

[0120] Next, an embodiment of the tape peeling process will be described. In this embodiment, a peeling process of the protective tape 27 having a UV-curable adhesive layer will be described. First, a UV irradiation process is performed. In the UV irradiation process, the wafer W is first transported from the load port 75 to the UV irradiation module 85 by the transport robot 73 and placed on the substrate stage 102 of the substrate holder 101 for UV irradiation. Then, the moving mechanism 109 is operated to raise the substrate holder 104. When the substrate holder 104 has risen until the wafer W is positioned in the internal space 112 of the light-shielding cover 111, the moving mechanism 109 is stopped.

[0121] With the wafer W positioned in the internal space 112 of the light-shielding cover 111, the UV irradiation device 110 irradiates the wafer W with ultraviolet rays from the irradiation head 113. The UV irradiation device 110 irradiates the protective tape 27 attached to the wafer W with ultraviolet rays while covering the entire wafer W with the light-shielding cover 111. At this time, the wafer W is rotated by the stage motor 105 of the substrate holding device 104. The UV irradiation module 85 irradiates the protective tape 27 with ultraviolet rays while rotating the wafer W and covering the entire wafer W with the light-shielding cover 111.

[0122] After irradiating ultraviolet rays for a predetermined time, the UV irradiation device 110 and the stage motor 105 are stopped. Then, the moving mechanism 109 is operated to lower the substrate holding device 104. Then, the wafer W is taken out from the UV irradiation substrate holding part 101 by the transport robot 73, and the rotation peeling process is performed. The rotation peeling process is a process of peeling the protective tape from the peripheral part of the wafer W while rotating the wafer W. In the rotation peeling process, the wafer W is first transported to the tape peeling module 81 by the transport robot 73, and placed on the substrate stage 86 of the peeling substrate holding part 83. Then, as described with reference to FIG. 20 and FIG. 21, the tape peeling unit 90 and the peeling substrate holding part 83 are operated to peel the protective tape from the wafer W. After the protective tape 27 has been peeled off, the tape peeling unit 90 and the peeling substrate holding part 83 are stopped. Thereafter, the transfer robot 73 removes the substrate from the peeling substrate holder 83 and transfers the wafer W to the load port 75.

[0123] Fig. 27 is a schematic diagram showing another embodiment of the tape peeling system 70. As shown in Fig. 27, a disposal box 121 for disposing of the peeled protective tape 27 may be provided below the tape peeling device 80. By providing such an exhaust box 121, the peeled protective tape 27 can be efficiently disposed of.

[0124] In this embodiment, the tape processing system 100 includes the tape application system 1 and the tape peeling system 70. In one embodiment, the tape application system 1 may include the tape peeling device 80. In this case, the tape application device 10 and the tape peeling device 80 may be arranged side by side in the horizontal direction, and the tape peeling device 80 may be arranged below the tape application device 10. When the tape application system 1 includes the tape peeling device 80, the transport robot 13 transports the wafer W between the tape application device 10 and the tape peeling device 80. The transport robot 13 further transports the wafer W between the tape peeling module 81 and the UV irradiation module 85. By arranging the tape application device 10 above the tape peeling device 80, it is possible to apply the protective tape 27 without contaminating the surface of the wafer W. By arranging the tape peeling device 80 below the tape application device 10, it is easy to dispose of the peeled protective tape 27.

[0125] FIG. 28 is a plan view showing another embodiment of the tape application system 1, and FIG. 29 is a side view showing the tape application system 1 of FIG. 28. Details of this embodiment that are not particularly described are the same as those of the embodiment described with reference to FIG. 3 to FIG. 27, so that the overlapping description will be omitted. As shown in FIG. 28 and FIG. 29, the tape application system 1 of this embodiment further includes a plurality of tape peeling devices 80, a linear guide 14 that movably holds the transport robot 13, a plurality of temporary placement stages 123A, 123B for temporarily placing the wafer W, and a substrate transport system 135 that transports the wafer W between the load port 5 and the temporary placement stages 123A, 123B. The tape application system 1 of this embodiment includes a plurality of tape application devices 10. In this embodiment, the transport robot 13 and the linear guide 14 form a transport device 19. More specifically, the tape application system 1 of this embodiment includes two tape application devices 10 and two tape peeling devices 80.

[0126] The substrate transfer system 135 includes a transfer robot 136 that transfers the wafer W between the load port 5 and the temporary placement stages 123A and 123B, and a linear guide 137 that movably holds the transfer robot 136. An example of the substrate transfer system 135 is an equipment front end module (EFEM). In one embodiment, the transfer robot 136 may include a Bernoulli hand having a configuration similar to that of the Bernoulli hand 16 described with reference to FIG. 15. The tape application device 10, the tape peeling device 80, the transfer robot 13, the linear guide 14, the temporary placement stages 123A and 123B, and the substrate transfer system 135 are disposed inside the partition wall 6.

[0127] Hereinafter, in this specification, the direction in which the multiple load ports 5 are arranged is defined as a first direction, and the direction perpendicular to the first direction when viewed from above is defined as a second direction. Hereinafter, in this specification, the direction perpendicular to both the first and second directions is defined as a vertical direction. Also, in this specification, the first and second directions may be collectively referred to as the horizontal direction. Also, in this specification, the tape application device 10 and the tape peeling device 80 may be collectively referred to as the tape processing device 10, 80.

[0128] The linear guide 137 extends in a first direction, and the transport robot 136 is configured to be movable in the first direction. The linear guide 14 extends in a second direction, and the transport robot 136 is configured to be movable in the second direction.

[0129] In this embodiment, the inside of the partition 6 is divided into a process area 129 and an EMEF area 140. The tape application device 10, the tape removal device 80, the transfer robot 13, the linear guide 14, and the temporary placement stages 123A and 123B are disposed in the process area 129, and the substrate transfer system 135 is disposed in the EMEF area 140. The transfer robot 136 is configured to be accessible to the load port 5 and the temporary placement stages 123A and 123B.

[0130] The transfer robot 13 is disposed in the center of the process area 129 and configured to be accessible to the tape application device 10, the tape removal device 80, and the temporary placement stages 123A and 123B. The transfer robot 13 transfers wafers between the tape application device 10, the tape removal device 80, and the temporary placement stages 123A and 123B.

[0131] The tape application system 1 includes a partition wall 125A that divides the inside of the partition wall 6 into a process area 129 and an EMEF area 140. The partition wall 125A is disposed between the tape processing devices 10, 80 and the substrate transport system 135, and between the temporary placement stages 123A, 123B and the substrate transport system 135. The partition wall 125A extends in a first direction and a vertical direction.

[0132] That is, the process area 129 is an area surrounded by the partition wall 6 and the partition wall 125A, and the EMEF area 140 is an area surrounded by the partition wall 6 and the partition wall 125A. The partition wall 125A is provided with a door (not shown), through which wafers can be loaded onto and unloaded from the temporary placement stages 123A and 123B.

[0133] In this embodiment, the multiple tape application devices 10 are arranged side by side in the horizontal direction (second direction). Similarly, the multiple tape peeling devices 80 are arranged side by side in the horizontal direction (second direction). The multiple tape peeling devices 80 are arranged below the multiple tape application devices 10. More specifically, each tape peeling device 80 is arranged below each tape application device 10. With such an arrangement, it becomes possible to apply the protective tape 27 without soiling the surface of the wafer W, and it becomes easy to dispose of the peeled protective tape 27. In one embodiment, as shown in FIG. 30, multiple disposal boxes 128 for disposing of the peeled protective tape 27 may be provided below the multiple tape peeling devices 80.

[0134] The temporary placement stages 123A and 123B are disposed between the transfer device 19 and the substrate transfer system 135, and the temporary placement stage 123B is disposed below the temporary placement stage 123A. In one embodiment, the temporary placement stage 123A may be dedicated to a wafer to which the protective tape 27 is to be attached, and the temporary placement stage 123B may be dedicated to a wafer to which the protective tape 27 is to be peeled off. In one embodiment, the temporary placement stages 123A and 123B may be disposed side by side in the vertical direction.

[0135] In this embodiment, four load ports 5 are provided. This allows them to be used differently depending on the type of wafer. For example, in the first direction, two load ports 5 on the tape application device 10 side may be dedicated to wafers to which the protective tape 27 is applied, and the other two may be dedicated to wafers to which the protective tape 27 is peeled off. This configuration makes it possible to prevent contamination of the edge portion of the wafer in the cassette (FOUP). In particular, by separating the wafer before the protective tape 27 is applied or before plating from the wafer after plating or after the protective tape 27 is peeled off, metal contamination of the wafer edge portion and the wafer back surface can be prevented.

[0136] The tape application system 1 of this embodiment further includes a partition wall 125B arranged between the temporary placement stages 123A, 123B and the conveying device 19, a partition wall 125C arranged between the tape processing devices 10, 80 arranged horizontally (between a plurality of tape application devices 10 arranged horizontally and between a plurality of tape removal devices 80 arranged horizontally), partition walls 125D arranged between the tape processing devices 10, 80 and the conveying device 19 and between the tape processing devices 10, 80 and the temporary placement stages 123A, 123B, a partition wall 126 arranged between the tape application device 10 and the tape removal device 80, and a partition wall 127 arranged between the temporary placement stage 123A and the temporary placement stage 123B.

[0137] The partition walls 125B and 125C extend in a first direction and a vertical direction, and the partition wall 125D extends in a second direction and a vertical direction. The partition walls 126 and 127 extend in a horizontal direction. The partition wall 125C extends through the partition wall 126.

[0138] The areas in which the tape processing devices 10 and 80 are disposed are defined by the partition walls 125A, 125B, 125C, 125D, and 126. The partition walls 125B and 125D are provided with doors (not shown), through which wafers can be loaded into and unloaded from the tape processing devices 10 and 80.

[0139] In this way, by partitioning the area in which each tape processing device 10, 80 (each tape application device 10 or each tape peeling device 80) is arranged and making the side of the device (partition wall 6) an access surface for the worker, consumables (protective tape, UV lamp, etc.) can be replaced in each tape processing device 10, 80, and each device can be shut down individually in the event of a malfunction. This makes it possible to utilize the tape processing device 10, 80 that is normally operable, and to reduce the downtime of the tape processing device 10, 80. As a result, it becomes possible to continuously perform the tape application process and the tape peeling process without reducing the processing capacity. Furthermore, by providing a partition wall 127 between the temporary placement stage 123A and the temporary placement stage 123B, it is possible to prevent the movement of contamination between the temporary placement stage 123A and the temporary placement stage 123B.

[0140] 31, the tape application system 1 may further include a plurality of local exhaust devices 142. The partition walls 125A, 125B, 125C, 125D, and 126 are formed with intake ports (not shown). In this embodiment, each local exhaust device 142 is installed below each tape processing device 10, 80 (each tape application device 10 or each tape peeling device 80). This makes it possible to prevent contamination of the surface of the wafer W due to flying particles and adhesion of dust to the peripheral portion of the wafer W in each tape processing device 10, 80.

[0141] Furthermore, in one embodiment, the partition wall 125A may completely separate the process area 129 from the EMEF area 140. By completely separating the process area 129 from the EMEF area 140 and creating a negative pressure in the process area 129 with the local exhaust device 142, it is possible to prevent particles generated in the tape application process or tape removal process from moving to the EMEF area 140 or the load port 5. As a result, it is possible to stably prevent dust from adhering to the wafer for a long period of time.

[0142] FIG. 32 is a plan view showing another embodiment of the tape application system 1, and FIG. 33 is a side view showing the tape application system 1 of FIG. 32. Details of this embodiment that are not particularly described are the same as those of the embodiment described with reference to FIG. 28 to FIG. 31, so that the overlapping description will be omitted. As shown in FIG. 32 and FIG. 33, in this embodiment, a plurality of tape application devices 10 are arranged side by side in the first direction. Similarly, a plurality of tape peeling devices 80 are arranged side by side in the first direction. Although only one tape peeling device 80 is illustrated in FIG. 33, in this embodiment, the tape application system 1 includes two tape peeling devices 80, and each tape peeling device 80 is arranged below each tape application device 10. The linear guide 14 extends in the first direction, and the transport robot 13 is configured to be movable in the first direction. The transport device 19 is arranged between the temporary placement stages 123A, 123B and the tape processing devices 10, 80.

[0143] In this embodiment, the partition wall 125A is disposed between the temporary placement stages 123A, 123B and the substrate transport system 135. The partition wall 125C extends in the second direction and the vertical direction. The partition wall 125D is disposed between the tape processing devices 10, 80 and the transport device 19, and extends in the first direction and the vertical direction. The embodiments described with reference to Figures 30 and 31 can also be applied to this embodiment.

[0144] FIG. 34 is a plan view showing another embodiment of the tape application system 1, and FIG. 35 is a side view showing the tape application system 1 of FIG. 34. Details of this embodiment that are not particularly described are the same as those of the embodiment described with reference to FIG. 28 to FIG. 31, so that the overlapping description will be omitted. As shown in FIG. 34 and FIG. 35, the tape application system 1 of this embodiment includes a plurality of tape application devices 10 arranged side by side vertically and horizontally (vertical and horizontal directions). The tape application system 1 of this embodiment does not include a tape peeling device 80. Hereinafter, in this specification, each tape application device 10 may be referred to as the tape application device 10A, the tape application device 10B, the tape application device 10C, or the tape application device 10D. The configurations of the tape application devices 10A, 10B, 10C, and 10D are the same as those of the tape application device 10.

[0145] The tape application devices 10C and 10D are disposed below the tape application devices 10A and 10B. The tape application devices 10A and 10B are disposed side by side in the horizontal direction, and the tape application devices 10C and 10D are disposed side by side in the horizontal direction.

[0146] The partition wall 125C is disposed between the tape application apparatus 10A and the tape application apparatus 10B, and between the tape application apparatus 10C and the tape application apparatus 10D. The partition wall 126 is disposed between the tape application apparatus 10A and the tape application apparatus 10C, and between the tape application apparatus 10B and the tape application apparatus 10D. In one embodiment, the tape application system 1 may include one or more tape peeling devices 80 disposed below the tape application apparatuses 10C and 10D, and a partition wall extending in the horizontal direction may be disposed between the tape application apparatuses 10C and 10D and the tape peeling device 80. Furthermore, in one embodiment, the multiple tape peeling devices 80 disposed below the tape application apparatuses 10C and 10D may be arranged side by side in the same direction (second direction) as the tape application apparatuses 10C and 10D. The embodiment described with reference to FIG. 30 and FIG. 31 can also be applied to this embodiment.

[0147] Fig. 36 is a plan view showing another embodiment of the tape application system 1, and Fig. 37 is a side view showing the tape application system 1 of Fig. 36. Details of this embodiment that are not particularly described are the same as those of the embodiment described with reference to Figs. 28 to 31, so duplicated descriptions will be omitted. As shown in Figs. 36 and 37, the tape application system 1 of this embodiment includes three tape application devices 10A, 10B, and 10C, and one tape peeling device 80.

[0148] The tape application device 10A and the tape application device 10B are arranged side by side in the horizontal direction, and the tape peeling device 80 and the tape application device 10C are arranged side by side in the horizontal direction. The tape application device 10C is arranged below the tape application device 10B, and the tape peeling device 80 is arranged below the tape application device 10A.

[0149] The partition wall 125C is disposed between the tape application apparatus 10A and the tape application apparatus 10B, and between the tape application apparatus 10C and the tape removing apparatus 80. The partition wall 126 is disposed between the tape application apparatus 10B and the tape application apparatus 10C, and between the tape application apparatus 10A and the tape removing apparatus 80. The embodiment described with reference to Figs. 30 and 31 can also be applied to this embodiment.

[0150] The tape application system 1 described with reference to Figures 28 to 37 includes the processing devices 10 and 80 arranged side by side in the vertical and horizontal directions, so that the tape application process and the tape removal process can be performed simultaneously on multiple wafers. As a result, the throughput of the tape application system 1 can be increased. In addition, the transport robot 13 is arranged in the center of the process area 129 and is configured to be accessible to each processing device. With this arrangement, the transport robot 13 can efficiently supply and collect wafers to each tape application device 10 and each tape removal device 80.

[0151] The above-described embodiments have been described for the purpose of enabling a person having ordinary skill in the art to practice the present invention. Various modifications of the above-described embodiments are naturally possible for a person skilled in the art, and the technical idea of ​​the present invention can be applied to other embodiments. Therefore, the present invention is not limited to the described embodiments, but is to be interpreted in the broadest scope according to the technical idea defined by the claims. [Explanation of symbols]

[0152] 1. Tape application system 3 Power supply control unit 4. Operation control section 5. Loading Port 6 Bulkhead 7 Processing Room 8. Ventilation mechanism 9 Local exhaust ventilation system 10 Tape application device 13 Transport robot 14 Linear guide 15 Tape heating device 15a Heating stage 16 Bernoulli Hand 17 Base 18 Chuck 18a Suction surface 19 Conveyor equipment 20 Tape attachment module 21. Substrate holder for attachment 22 Substrate stage 23 Shaft 24 Notch detection mechanism 25 Shaft support 26 Centering mechanism 27 Protective Tape 28 Tape application unit 29 Separation Film 30 Payout roller 31 Tension unit 32 Centering Finger 33 Protruding part (finger part) 34 Guide roller 35 Film take-up roller 36,37 Rotation axis 38 Protective film 39 Vacuum Line 40 Tape holding head 41 Electric Cylinder 42 Positioning roller 43 Side Roller 44 Support stand 45 Air Cylinder 46 First Roller 47 Second Roller 48 Rotating Device 49 Roller drive motor 50 Tape Cutter 52 End protrusion 54 The Third Roller 55 The Fourth Roller 56 Moving mechanism 57,58 Bearings 60 Clamping mechanism 61,62 Moving mechanism 63,64 Bridge 66 Spring 70 Tape Removal System 71 Power supply control unit 73 Transport Robot 74 Motion control section 75 Loading Port 76 Bulkhead 77 Processing Room 78 Ventilation mechanism 79 Local exhaust ventilation system 80 Tape remover 81 Tape Removal Module 82 Bernoulli Hand 83 Peeling board holder 84 Centering Mechanism 85 UV irradiation module 86 Substrate Stage 87 Shaft 88 Stage Motor 89 Notch detection mechanism 90 Tape peeling unit 91 Chucking member 92 Centering Finger 93 Chucking mechanism 94 Protruding part (finger part) 95 Tape feed roller 96 Winding roller 97,99 Motor 100 Tape Processing System 101 Substrate holder for UV irradiation 102 Substrate stage 103 Shaft 104 Substrate holding device 105 Stage Motor 106 Foundation 107 Lifting mechanism 108a Guide rod 108b Linear guide 109 Moving mechanism 110 UV irradiation equipment 111 Blackout cover 111a Through hole 112 Interior Space 113 Irradiation Head 114 Fiber optic cable 115 UV Generator 116 Centering mechanism 117 Centering Finger 118 Protruding part (finger part) 120 Upper Wall 121 Disposal Box 123A, 123B Temporary stage 125A, 125B, 125C, 125D, 126, 127 Partition wall 128 Disposal Box 129 Process Area 130,131 Support surface 133 Core 135 Substrate transport system 136 Transport Robot 137 Linear Guide 140 EFEM Area 142 Local exhaust ventilation system

Claims

1. A tape application device is provided for applying a protective tape to a peripheral portion of the substrate, The tape application device is a substrate holder for rotatably holding the substrate; a side roller for pressing the protective tape against an outer peripheral side surface of the substrate; a first roller that folds the protective tape along a longitudinal direction thereof and attaches the folded portion of the protective tape to a first surface of a peripheral portion of the substrate; a second roller that folds the protective tape along its longitudinal direction and attaches the folded portion of the protective tape to a second surface of the peripheral portion of the substrate; a roller drive motor coupled to the second roller; a clamping mechanism that clamps a peripheral portion of the substrate between the first roller and the second roller, a tape application system configured to rotate the substrate by rotating the second roller using the roller drive motor while the tape application device pinches a peripheral portion of the substrate held by the application substrate holding portion between the first roller and the second roller.

2. 2. The taping system of claim 1, wherein the second roller is disposed below the first roller.

3. the first roller and the second roller have a tapered shape in which a cross-sectional area gradually decreases toward a tip end thereof, 3. The tape application system according to claim 1, wherein the first roller and the second roller are arranged at an incline such that the tip is directed toward the surface of the substrate.

4. 4. The taping system of claim 1, wherein the first roller and the second roller are constructed from rubber.

5. 5. The tape application system according to claim 1, wherein the tape application device further comprises a tape heating device that heats the protective tape applied to the peripheral edge portion of the substrate.

6. a transport robot that transports the substrate to the tape application device, 6. The tape application system according to claim 1, wherein the transfer robot is provided with a Bernoulli hand that holds the substrate by utilizing Bernoulli's theorem.

7. the tape application device is a plurality of tape application devices; 7. The tape applying system according to claim 1, wherein the plurality of tape applying devices are arranged side by side in a vertical or horizontal direction.

8. The method further includes a tape removing device that removes the protective tape from the peripheral edge of the substrate, The tape peeling device is A peeling substrate holder that holds and rotates the substrate; a tape peeling unit that peels off a protective tape from the rotating substrate; The tape application system according to claim 1 , further comprising: a UV irradiation module that irradiates ultraviolet light onto the protective tape applied to the peripheral edge portion of the substrate.

9. The tape application system of claim 8 , wherein the tape remover is disposed below the tape application device.

10. the tape peeling device is a plurality of tape peeling devices, The tape application system according to claim 9 , wherein the plurality of tape removing devices are arranged side by side in a horizontal direction.

11. A tape application method for applying a protective tape to a peripheral portion of a substrate, comprising the steps of: a bonding substrate holder for holding the substrate in a rotatable manner; The protective tape is pressed against the outer peripheral side surface of the substrate; a first roller and a second roller that respectively fold the protective tape along its longitudinal direction and attach the folded portion of the protective tape to a first surface and a second surface of the peripheral portion of the substrate, the peripheral portion of the substrate being sandwiched between the first roller and the second roller, and the second roller is rotated by a roller drive motor connected to the second roller, thereby rotating the substrate; Folding the protective tape along its longitudinal direction by the first roller, and attaching the folded portion of the protective tape to a first surface of the peripheral portion of the substrate; a tape applying method in which the protective tape is folded along its longitudinal direction by the second roller, and the folded portion of the protective tape is applied to a second surface of the peripheral portion of the substrate.

12. The tape application method according to claim 11 , further comprising the step of heating the protective tape applied to the peripheral edge portion of the substrate.

13. irradiating the protective tape attached to the peripheral portion with ultraviolet light; 13. The tape application method according to claim 11, further comprising the step of peeling off the protective tape from the peripheral edge of the substrate while rotating the substrate.

14. A tape removing device is provided for removing the protective tape from the peripheral portion of the substrate, The tape peeling device is A peeling substrate holder that holds and rotates the substrate; a tape peeling unit that peels off a protective tape from the rotating substrate; a UV irradiation module that irradiates ultraviolet light onto the protective tape attached to the peripheral portion of the substrate; The tape peeling unit includes: A pair of chucking members that grip a terminal end protruding portion of the protective tape; a pair of tape feed rollers that feed the protective tape at a speed synchronized with a rotation speed of the substrate while peeling the protective tape from the substrate; a take-up roller that takes up the protective tape fed from the pair of tape feed rollers.

15. The UV irradiation module includes: a UV irradiation device that irradiates ultraviolet rays; a UV irradiation substrate holder for holding the substrate; A cup-shaped light-shielding cover connected to the UV irradiation device, The tape removal system according to claim 14 , wherein the light-shielding cover is formed so as to be able to cover the entire substrate.

16. The UV irradiation substrate holding unit includes: a substrate holding device that holds and rotates the substrate; a lifting mechanism for moving the substrate holding device up and down, The tape peeling system according to claim 15 , wherein the light-shielding cover is disposed above the substrate holding device and opens downward.

17. a transport robot that transports the substrate to the tape peeling device; The tape peeling system according to claim 14 , wherein the transport robot is provided with a Bernoulli hand that holds the substrate by utilizing Bernoulli's principle.

18. The UV irradiation module includes: a substrate stage for holding the substrate; a plurality of irradiation heads for irradiating ultraviolet light onto the protective tape attached to the peripheral portion of the substrate on the substrate stage, The tape removal system according to claim 14 , wherein the plurality of irradiation heads are arranged along a peripheral portion of the substrate on the substrate stage and are disposed perpendicular to a substrate holding surface of the substrate stage.

19. A tape removal method for removing a protective tape from a peripheral portion of a substrate, comprising the steps of: irradiating the protective tape attached to the peripheral portion with ultraviolet light; and peeling the protective tape from the peripheral edge of the substrate while rotating the substrate, The step of peeling off the protective tape from the peripheral edge portion of the substrate includes: a step of gripping a terminal end protrusion of the protective tape with a pair of chucking members; a step of feeding the protective tape by a pair of tape feed rollers at a speed synchronized with a rotation speed of the substrate while peeling the protective tape from the substrate; and winding the protective tape fed from the pair of tape feed rollers by a take-up roller.

20. The tape peeling method according to claim 19, wherein the step of irradiating ultraviolet light onto the protective tape attached to the peripheral portion is a step of irradiating ultraviolet light onto the protective tape attached to the peripheral portion while covering the entire substrate with a light-shielding cover.

21. The tape peeling method according to claim 20, wherein the step of irradiating the protective tape attached to the peripheral portion with ultraviolet light while covering the entire substrate with the light-shielding cover includes the step of irradiating the protective tape with ultraviolet light while rotating the substrate.

22. the step of irradiating the protective tape attached to the peripheral portion with ultraviolet light includes a step of irradiating the protective tape attached to the peripheral portion with ultraviolet light from a plurality of irradiation heads arranged along the peripheral portion of the substrate on a substrate stage; The tape peeling method according to claim 19 , wherein the plurality of irradiation heads are arranged perpendicular to a substrate holding surface of the substrate stage.

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