Substrate Processing Equipment

Abstract

To provide a substrate processing apparatus capable of automatically replacing a brush while preventing particles from adhering to an unused brush.SOLUTION: A substrate processing apparatus 1 comprises: a brush 25 for washing a substrate W held on a holding and rotating unit 3; a brush holding unit 27 for detachably holding the brush 25; an arm 31 having a tip at which the brush holding unit 27 is provided; a brush collection unit 79 for collecting the brush 25 from the brush holding unit 27; a brush fitting unit 81 that stores an unused brush 25B and fits the stored unused brush 25B to the brush holding unit 27; and a brush movement mechanism (a lifting mechanism 35 and a revolving drive part 37) for moving the brush 25 via the arm 31.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a substrate processing apparatus for processing a substrate. Examples of the substrate include a semiconductor substrate, a substrate for a flat panel display (FPD), a glass substrate for a photomask, a substrate for an optical disk, a substrate for a magnetic disk, a ceramic substrate, a substrate for a solar cell, etc. Examples of the FPD include a liquid crystal display device, an organic electroluminescence (EL) display device, etc. [Background technology]

[0002] Substrate processing apparatuses use brushes to clean substrates. The brushes need to be replaced periodically. In general, the brushes are replaced manually by an operator. However, brush replacement poses a problem in that the operating rate of the substrate processing apparatus decreases, resulting in a deterioration in productivity. For this reason, an apparatus capable of automatically replacing brushes has been proposed (see, for example, Patent Document 1).

[0003] Patent Document 1 discloses a scrubber equipped with a brush holding frame that holds a plurality of brushes. The brush holding frame has a plurality of holding grooves formed therein. The scrubber removes a brush from a brush head using an empty holding groove in the brush holding frame. The removed brush is held in the holding groove. The scrubber then moves another brush held in the brush holding frame below the brush head and attaches the other brush to the brush head.

[0004] Patent Documents 2 and 3 disclose a brush cleaning device in which a desired brush from a plurality of brushes arranged side by side in a waiting pot can be selectively held by a brush chuck. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 08-318226 [Patent Document 2] Japanese Patent Application Publication No. 08-010719 [Patent Document 3] Japanese Patent Application Publication No. 10-223584 Summary of the Invention [Problem to be solved by the invention]

[0006] However, conventional devices have the following problems. For example, in Patent Document 1, the removed used brush is held in a brush holding frame. In this case, the used brush and the unused brush are arranged side by side. Also, the holding groove of the brush holding frame may hold an unused brush after holding the removed used brush. Therefore, there is a possibility that particles from the used brush will adhere to the unused brush.

[0007] The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a substrate processing apparatus capable of automatically replacing unused brushes while preventing particles from adhering to the brushes. [Means for solving the problem]

[0008] In order to achieve the above object, the present invention has the following configuration: A substrate processing apparatus according to the present invention is a substrate processing apparatus for cleaning a substrate using a brush, and includes a substrate holding section for holding a substrate in a horizontal position, a brush for cleaning the substrate held by the substrate holding section, a brush holding section for detachably holding the brush, an arm having the brush holding section provided at its tip, a brush collecting section for collecting the brush from the brush holding section, and a brush attaching section for storing unused brushes and attaching the stored unused brushes to the brush holding section. The brush attachment portion includes a brush storage container for storing unused brushes during storage. a brush moving mechanism that moves the brush via the arm between a processing position on the substrate held by the substrate holding unit, the brush collection unit, and the brush attachment unit; A liquid supply unit that supplies liquid to the brush storage container; Equipped with The brush storage container stores unused brushes by immersing them in the stored liquid. It is characterized by the above.

[0009] According to the substrate processing apparatus of the present invention, the brush collecting section and the brush mounting section are separated, so used brushes and unused brushes are not handled in the same area. This allows unused brushes to be handled separately from used brushes that have been removed. Therefore, the unused brushes can be automatically replaced while preventing particles from adhering to the unused brushes. In addition, by providing a brush storage container at the brush attachment section, the brush attachment section and the brush recovery section can be separated, which reliably prevents particles from used brushes from adhering to unused brushes handled at the brush attachment section. Furthermore, when an unused brush dries out during storage, for example, particles may get into small gaps in the unused brush. If particles get into those gaps, it takes a long time to remove the particles. Therefore, after the unused brush is attached to the brush holder, it may take a long time to perform brush cleaning on the substrate to be produced. This reduces the operating rate of the substrate processing apparatus and reduces productivity. However, according to the present invention, the liquid supply unit supplies liquid to the unused brush during storage, so that the unused brush during storage can be prevented from drying out. Therefore, it is possible to prevent particles from getting into small gaps in the unused brush during storage.

[0014] In the above-described substrate processing apparatus, it is preferable that the brush attachment section further includes a horizontal movement section for horizontally moving the brush storage container.

[0015] A plurality of unused brushes can be transported along the movement path in a plan view.

[0016] In the above-described substrate processing apparatus, the brush recovery unit preferably includes a brush recovery container for recovering the removed used brushes.

[0017] By providing the brush collection section with a brush collection container, the brush attachment section and the brush collection section can be separated, which reliably prevents particles from used brushes from adhering to unused brushes handled by the brush attachment section.

[0018] In the above-described substrate processing apparatus, it is preferable that the brush recovery section includes a removal member for removing the brush.

[0019] The used brush can be removed from the brush holder by using the removal member, and the brush can be collected in a brush collection container.

[0020] Also, The present invention Substrate Processing Equipment a substrate processing apparatus for cleaning a substrate using a brush, the apparatus comprising: a substrate holding section for holding a substrate in a horizontal position; a brush for cleaning the substrate held by the substrate holding section; a brush holding section for detachably holding the brush; an arm having the brush holding section provided at its tip; a brush collecting section for collecting the brush from the brush holding section; a brush attachment section for storing unused brushes and attaching the stored unused brushes to the brush holding section; and a brush moving mechanism for moving the brush via the arm between a processing position on the substrate held by the substrate holding section, the brush collecting section, and the brush attachment section; The brush attachment portion is disposed adjacent to the brush collection portion. The present invention is characterized by the following:

[0021] According to the substrate processing apparatus of the present invention, the brush collecting section and the brush mounting section are separated, so used brushes and unused brushes are not handled in the same area. This allows unused brushes to be handled separately from used brushes that have been removed. Therefore, the unused brushes can be automatically replaced while preventing particles from adhering to the unused brushes. Also, The unused brush can be quickly attached after the used brush is removed from the brush collecting section, and the unused brush can be separated from the removed used brush even when the brush attaching section is adjacent to the brush collecting section.

[0022] Also, The present invention Substrate Processing Equipment a substrate processing apparatus for cleaning a substrate using a brush, the apparatus comprising: a substrate holding section for holding a substrate in a horizontal position; a brush for cleaning the substrate held by the substrate holding section; a brush holding section for detachably holding the brush; an arm having the brush holding section at its tip; a brush collecting section for collecting the brush from the brush holding section; a brush attachment section for storing unused brushes and attaching the stored unused brushes to the brush holding section; and a brush moving mechanism for moving the brush via the arm between a processing position on the substrate held by the substrate holding section, the brush collecting section, and the brush attachment section. A separation section that is provided between the brush collection section and the brush attachment section and separates the brush collection section from the brush attachment section. And, What you need The present invention is characterized by the following:

[0023] According to the substrate processing apparatus of the present invention, the brush collecting section and the brush mounting section are separated, so used brushes and unused brushes are not handled in the same area. This allows unused brushes to be handled separately from used brushes that have been removed. Therefore, the unused brushes can be automatically replaced while preventing particles from adhering to the unused brushes. Also, By providing a separator between the brush collecting section and the brush collecting container, the brush attachment section and the brush collecting section can be separated, which makes it possible to prevent particles from used brushes from adhering to unused brushes handled by the brush attachment section.

[0024] Also, The present invention Substrate Processing Equipment a substrate processing apparatus for cleaning a substrate using a brush, the apparatus comprising: a substrate holding section for holding a substrate in a horizontal position; a brush for cleaning the substrate held by the substrate holding section; a brush holding section for detachably holding the brush; an arm having the brush holding section provided at its tip; a brush collecting section for collecting the brush from the brush holding section; a brush attachment section for storing unused brushes and attaching the stored unused brushes to the brush holding section; and a brush moving mechanism for moving the brush via the arm between a processing position on the substrate held by the substrate holding section, the brush collecting section, and the brush attachment section; The brush holder comprises a cylindrical hole formed along a central axis extending vertically, three openings provided on an inner side wall of the hole and arranged around the central axis, three protrusions protruding from the three openings into the hole, respectively, and a biasing portion provided on the outside of the protrusions and biasing the protrusions in the direction of the central axis, and the brush comprises a brush body having a cleaning surface for cleaning the substrate, a brush support portion supporting the brush body from the opposite side of the cleaning surface, a cylindrical portion protruding from the brush support portion to the opposite side of the cleaning surface, and a recess and a longitudinal recess provided on a side wall of the cylindrical portion and around the axis of the cylindrical portion, the longitudinal recess being longitudinally recessed in the circumferential direction, and when the cylindrical portion is inserted into the hole of the brush holder, the recess accommodates one of the three protrusions, and the longitudinal recess accommodates at least one of the remaining two protrusions. The present invention is characterized by the following:

[0025] According to the substrate processing apparatus of the present invention, the brush collecting section and the brush mounting section are separated, so used brushes and unused brushes are not handled in the same area. This allows unused brushes to be handled separately from used brushes that have been removed. Therefore, the unused brushes can be automatically replaced while preventing particles from adhering to the unused brushes. Also, The longitudinal recess is recessed longitudinally in the circumferential direction and can accommodate two of the three protrusions. Therefore, for example, when the cylindrical portion of the brush is inserted into the hole of the brush holder, one of the three protrusions is accommodated in the longitudinal recess. Therefore, it is possible to restrict the upward and downward movement of the brush relative to the brush holder.

[0026] Also, The present invention Substrate Processing Equipment a substrate processing apparatus for cleaning a substrate using a brush, the apparatus comprising: a substrate holding section for holding a substrate in a horizontal position; a brush for cleaning the substrate held by the substrate holding section; a brush holding section for detachably holding the brush; an arm having the brush holding section provided at its tip; a brush collecting section for collecting the brush from the brush holding section; a brush attachment section for storing unused brushes and attaching the stored unused brushes to the brush holding section; and a brush moving mechanism for moving the brush via the arm between a processing position on the substrate held by the substrate holding section, the brush collecting section, and the brush attachment section; In the above-mentioned substrate processing apparatus, the brush comprises a brush body having a cleaning surface for cleaning the substrate, and a brush support part supporting the brush body from the opposite side to the cleaning surface, the brush support part having a guide extending in a preset horizontal direction on the opposite side to the cleaning surface, an opening provided in the guide, a protrusion protruding outward from the opening, a button part provided on the outer circumferential surface of the brush support part, and a protrusion width adjustment mechanism for adjusting a protrusion width of the protrusion depending on an amount of pressing of the button part, the brush holding part comprising a guide holding part for holding the guide so as to be movable in the horizontal direction, and a recess provided in the guide holding part for accommodating the protrusion, wherein when the button part is pressed, the protrusion width adjustment mechanism causes the protrusion to retract inward from the opening, thereby enabling the brush to move in the horizontal direction relative to the brush holding part, and when the button part is not pressed, the protrusion width adjustment mechanism causes the protrusion to protrude outward from the opening, thereby accommodating the protrusion in the recess, thereby enabling the horizontal movement of the brush to be restricted. The present invention is characterized by the following:

[0027] According to the substrate processing apparatus of the present invention, the brush collecting section and the brush mounting section are separated, so used brushes and unused brushes are not handled in the same area. This allows unused brushes to be handled separately from used brushes that have been removed. Therefore, the unused brushes can be automatically replaced while preventing particles from adhering to the unused brushes. Also,The brush includes a guide extending in a preset horizontal direction. The brush holder includes a guide holder that holds the guide so that the guide can move in the horizontal direction. Therefore, the movement of the brush in the vertical direction and the rotational direction relative to the brush holder can be restricted. In addition, the horizontal movement can be restricted by accommodating the protruding portion in the recess. Effect of the Invention

[0028] According to the substrate processing apparatus of the present invention, the brushes can be automatically replaced while preventing particles from adhering to the unused brushes. [Brief description of the drawings]

[0029] [Figure 1] 1 is a side view showing a schematic configuration of a substrate processing apparatus according to a first embodiment. [Diagram 2] 1 is a plan view of a substrate processing apparatus according to a first embodiment. [Diagram 3] FIG. 2A is a vertical cross-sectional view showing a brush and a brush holder, and FIG. [Figure 4] 1A is a cross-sectional view showing the recess and longitudinal recess provided in the cylindrical portion, FIG. 1B is a partial development of the side wall of the cylindrical portion, and FIG. 1C is a cross-sectional view showing three steel balls placed in the recess and longitudinal recess. [Diagram 5] FIG. 11 is a cross-sectional view for explaining the effect of a longitudinal recess. [Figure 6] FIG. 2A is a plan view showing the removal member, and FIG. 2B is a front view showing the removal member. [Figure 7] FIG. 2 is a vertical cross-sectional view showing a schematic configuration of a brush replacement unit. [Figure 8] FIG. 10(a) is a vertical cross-sectional view of a brush replacement part according to a second embodiment, and FIG. [Figure 9] FIG. 10(a) is a side view of a brush and a brush holder according to a third embodiment, and FIG. [Figure 10]1A and 1B are cross-sectional views of a brush and a brush holder. [Figure 11] FIG. 11 is a plan view of a brush replacement part according to a third embodiment. [Figure 12] FIG. 11 is a vertical sectional view showing a schematic configuration of a brush replacement part according to a third embodiment. [Figure 13] 13(a) to 13(c) are vertical cross-sectional views illustrating brush replacement according to a third embodiment. [Figure 14] FIG. 11 is a side view showing a removal member according to a modified example. [Figure 15] FIG. 11 is a vertical cross-sectional view showing a brush and a brush holder according to a modified example. [Figure 16] FIG. 11 is a vertical cross-sectional view showing a brush and a brush holder according to a modified example. [Figure 17] FIG. 11 is a vertical cross-sectional view showing a brush replacement part according to a modified example. [Figure 18] FIG. 13 is a plan view showing a substrate processing apparatus according to a modified example. Example 1

[0030] A first embodiment of the present invention will be described below with reference to the drawings. Fig. 1 is a side view showing a schematic configuration of a substrate processing apparatus 1. Fig. 2 is a plan view of the substrate processing apparatus 1.

[0031] (1) Basic configuration of substrate processing equipment 1 and 2, the substrate processing apparatus 1 cleans a substrate W using a brush 25. The substrate processing apparatus 1 includes a holding / rotating unit 3, a cup 5, a processing liquid supplying unit 7, a brush mechanism 9, and a control unit 101. The holding / rotating unit 3 corresponds to the substrate holding unit of the present invention.

[0032] The holding and rotating unit 3 holds the substrate W in a horizontal position and rotates the substrate W around a vertical axis AX1. The substrate W is formed in a disk shape. The holding and rotating unit 3 includes a spin chuck 11 and a rotation drive unit 13. The rotation drive unit 13 includes an electric motor. The rotation drive unit 13 rotates the spin chuck 11, which holds the substrate W, around the vertical axis AX1.

[0033] As shown in FIG. 2, the spin chuck 11 includes a spin base 15 and three or more (for example, six) holding pins 17. The spin base 15 is formed in a disk shape. A vertical axis AX1 passes through the center of the spin base 15 (i.e., the substrate W). The six holding pins 17 are erected at equal intervals on the periphery of the upper surface of the spin base 15. Furthermore, of the six holding pins 17, for example, three holding pins 17A arranged on one side each rotate around a vertical axis passing through the pin. As a result, the spin chuck 11 holds the substrate W by clamping the periphery of the substrate W with the six holding pins 17. The spin chuck 11 may be not only a mechanical chuck as described here, but also a vacuum chuck or an electrostatic chuck.

[0034] The cup 5 is configured to surround the outer periphery of the horizontally oriented substrate W held by the holding and rotating unit 3. The cup 5 receives, for example, the processing liquid scattered by the rotation of the substrate W. The cup 5 is configured to be capable of being raised and lowered.

[0035] The processing liquid supply unit 7 includes a processing liquid nozzle 19, a processing liquid pipe 21, a processing liquid supply source 23, and an on-off valve V1. The processing liquid nozzle 19 ejects the processing liquid onto the substrate W held by the holding and rotating unit 3. The processing liquid may be, for example, pure water such as deionized water (DIW). The processing liquid pipe 21 connects the processing liquid nozzle 19 to the processing liquid supply source 23. The processing liquid supply source 23 supplies the processing liquid to the processing liquid nozzle 19 through the processing liquid pipe 21. The on-off valve V1 is provided in the processing liquid pipe 21. The on-off valve V1 supplies the processing liquid and stops the supply.

[0036] The brush mechanism 9 includes a brush 25, a brush holder 27, a shaft 29, an arm 31, and an electric motor 33. The brush 25 is for cleaning the substrate W held by the holding / rotating unit 3. The brush holder 27 detachably holds the brush 25. The brush 25 and the brush holder 27 will be described in detail later.

[0037] An upper end of the brush holder 27 is fixed to a lower end of a shaft 29 extending in the vertical direction. An upper portion of the shaft 29 is held by an arm 31 extending in the horizontal direction so as to be rotatable about a vertical axis AX2. The shaft 29 is rotated about the vertical axis AX2 by an electric motor 33 via, for example, a belt or a gear. The brush 25, the brush holder 27, and the shaft 29 are provided at the tip end (tip side) of the arm 31.

[0038] The brush mechanism 9 further includes a lifting mechanism 35 and a swivel drive unit 37. The lifting mechanism 35 lifts and lowers the brush 25, the brush holder 27, the arm 31, etc. The lifting mechanism 35 includes a guide rail 39 and a lifting drive unit 41. The base end of the arm 31 is in sliding contact with the guide rail 39 so that the arm 31 can be lifted and lowered. The guide rail 39 guides the arm 31 in the up and down direction. The lifting drive unit 41 includes, for example, an electric motor and a screw shaft. The lifting drive unit 41 may be an air cylinder.

[0039] The swivel drive unit 37 is provided outside the substrate W held by the holding and rotating unit 3 and the cup 5. The swivel drive unit 37 rotates the brush 25, the brush holding unit 27, the arm 31, the lifting mechanism 35, etc. around the vertical axis AX3. The swivel drive unit 37 includes an electric motor. As shown in FIG. 2, the lifting mechanism 35 and the swivel drive unit 37 move the brush 25 via the arm 31 between a processing position on the substrate W held by the holding and rotating unit 3, the waiting pot 43, and the brush replacement unit 45 (brush collection unit 79 and brush attachment unit 81). The lifting mechanism 35 and the swivel drive unit 37 correspond to the brush moving mechanism of the present invention.

[0040] (2) Structure for attaching and detaching brushes Fig. 3(a) is a vertical cross-sectional view showing brush 25 and brush holder 27. Fig. 3(b) is a perspective view of brush 25. Brush holder 27 includes a cylindrical member 51, a hole 53, three openings 55, three steel balls 57, a ball accommodating portion 59, and a biasing portion 61. Note that steel ball 57 corresponds to the protrusion of the present invention.

[0041] The outer diameter of the upper portion 51A of the cylindrical member 51 is smaller than the outer diameter of the lower portion 51B of the cylindrical member 51. The hole portion 53 is formed in a cylindrical shape along a central axis (i.e., vertical axis AX2) that extends vertically. The lower end portion of the shaft 29 is connected to the upper end of the hole portion 53. In this way, the cylindrical member 51 is fixed to the shaft 29.

[0042] Three ball accommodating portions 59 are formed in the cylindrical member 51. The three ball accommodating portions 59 are arranged at equal intervals (120°) around the vertical axis. The ball accommodating portions 59 have openings 55 in the inner sidewall 53A of the hole portion 53, and the three steel balls 57 accommodated in the three ball accommodating portions 59 are configured so that parts of them protrude from the openings 55.

[0043] In the above-described configuration, the number of ball receiving portions 59 is three, but it may be four or more. Also, the steel balls 57 are made of iron, such as stainless steel, but may be made of other metals or resin. The number of steel balls 57 is three, but it may be four or more.

[0044] The three steel balls 57 housed in the three ball housing portions 59 are supported by a biasing portion 61. The biasing portion 61 is provided so as to surround the outer periphery of the upper portion 51A of the cylindrical member 51. The biasing portion 61 includes a cylindrical case portion 63, a pushing portion 65, and a cylindrical spring member (elastic member) 67. The spring member 67 may have a slit in the vertical direction, and the cross section of the spring member 67 may be C-shaped. The inner wall of the upper end portion of the case portion 63 is formed so as to reach the outer wall of the upper portion 51A of the cylindrical member 51. The lower end of the case portion 63 contacts the upper surface of the lower portion 51B of the cylindrical member 51. The case portion 63 forms a space SP1 in which the spring member 67 is disposed.

[0045] The pushing portion 65 is integrally formed by the contact portion 65A and the restricting portion 65B. The contact portion 65A is a member having an annular shape in a plan view, and has a taper on the inner peripheral surface so that the cross-sectional area of ​​the hollow portion becomes smaller from the lower surface to the upper surface. The contact portion 65A is disposed between the spring member 67 and the cylindrical member 51 in the vertical direction Z. The restricting portion 65B is an annular shape having an outer diameter smaller than that of the contact portion 65A and an inner diameter equal to that of the contact portion 65A in a plan view, and is formed so as to extend from the upper surface of the contact portion 65A. The spring member 67 is formed of a metal such as stainless steel. The spring member 67 is disposed between the case portion 63 and the restricting portion 65B in the horizontal direction. The inner peripheral surface of the contact portion 65A and the spring member 67 push the three steel balls 57 toward the inner peripheral side (the three openings 55 side).

[0046] The brush 25 is detachable from the brush holder 27. As shown in FIG. 3(b), the brush 25 includes a brush body 69, a brush support portion 71, and a cylindrical portion 73. The brush body 69 is, for example, a PVA (polyvinyl alcohol) sponge brush. The brush body 69 is formed in a cylindrical shape. The brush body 69 has a cleaning surface 69A for cleaning the substrate W. The brush support portion 71 supports the brush body 69 from the opposite side of the cleaning surface 69A. The brush support portion 71 is also formed in a cylindrical shape. The cylindrical portion 73 extends from the brush support portion 71 to the opposite side of the cleaning surface 69A. The cylindrical portion 73 is fixed to the brush support portion 71. A recess 75 and a longitudinal recess 77 that is a recess longer in the circumferential direction of the cylindrical portion 73 than the recess 75 are formed on the outer peripheral surface 73A of the cylindrical portion 73.

[0047] Fig. 4(a) is a cross-sectional view showing a recess 75 and a longitudinal recess 77 provided in the cylindrical portion. Fig. 4(b) is a partial development of a side wall (outer peripheral surface) 73A of the cylindrical portion 73. Fig. 4(c) is a cross-sectional view showing a state in which three steel balls 57 are placed in the recess 75 and the longitudinal recess 77.

[0048] The length in the up-down direction Z and the width in the horizontal direction of the recess 75 are formed to be approximately the same as the length (up-down direction Z) and width (horizontal direction) of the approximately hemispherical portion of the steel ball 57 partially protruding from the opening 55. Similarly, the length in the up-down direction Z of the longitudinal recess 77 is also formed to be approximately the same as the length (up-down direction Z) of the approximately hemispherical portion of the steel ball 57 partially protruding from the opening 55.

[0049] As shown in Fig. 4(b), the longitudinal recess 77 is recessed longitudinally in the circumferential direction. As shown in Figs. 4(a) and 4(b), when the cylindrical portion 73 of the brush 25 is inserted into the hole portion 53 of the brush holding portion 27, the recess 75 accommodates the first steel ball 57A of the three steel balls 57. The longitudinal recess 77 also accommodates the remaining two steel balls 57B, 57C at both ends. Note that when the cylindrical portion 73 is hollow (cylindrical), the recess 75 and the longitudinal recess 77 may be through-hole portions.

[0050] The three steel balls 57 are accommodated in the recess 75 and the longitudinal recess 77, thereby restricting the up-down and circumferential movement of the brush 25 relative to the brush holding part 27. The restriction of circumferential movement is achieved not only by the first steel ball 57A being accommodated in the recess 75, but also by the two steel balls 57B and 57C being accommodated in the longitudinal recess 77. In Fig. 4(a), when the steel balls 57B and 57C rotate around the vertical axis AX2, the clockwise rotation of the second steel ball 57B is restricted by the first end 77A of the longitudinal recess 77, and the counterclockwise rotation of the third steel ball 57C is restricted by the second end 77B.

[0051] When inserting the cylindrical portion 73 of the brush 25 into the hole 53 of the brush holding portion 27, each steel ball 57 is pushed toward the outer periphery by the cylindrical portion 73 so that it does not protrude from the opening 55 toward the hole 53. Specifically, the pushing portion 65 is supported by the spring member 67 in a state in which it can move vertically. The contact portion 65A of the pushing portion 65 has a tapered shape on the inner periphery such that the cross-sectional area of ​​the hollow portion becomes smaller from the lower surface to the upper surface in a plan view. Therefore, when the inner periphery is pushed toward the outside by the steel ball 57, the direction of the pushing force (horizontal direction) is converted to the vertical upward direction. Therefore, the pushing portion 65 moves vertically upward, so that the steel ball 57 is accommodated inside the side wall 53A of the cylindrical member 51. Thereafter, when the three openings 55 and the two recesses 75, 77 face each other, the three steel balls 57 partially protrude from the three openings 55 due to the restoring force of the push-in portion 65 and the spring member 67. Specifically, the downward (vertical) force of the push-in portion 65 is converted by the tapered inner peripheral surface into a force (horizontal) directed inward from the inner peripheral surface. As a result, the three steel balls 57 biased by the tapered inner peripheral surface partially protrude from each opening 55, and are accommodated in the recesses 75 and longitudinal recesses 77, and the movement of the brush 25 is restricted.

[0052] 3(a), when removing the brush 25 from the brush holding part 27, the brush 25 is pulled downward. A predetermined pulling force causes the cylindrical part 73 to push the three steel balls 57 outward. As a result, the three steel balls 57 do not protrude from the opening 55 towards the hole 53. Therefore, the brush 25 can be removed from the brush holding part 27.

[0053] Here, the effect of the longitudinal recess 77 will be described with reference to Fig. 5. For example, assume that the longitudinal recess 77 is not provided in the cylindrical portion 73, and that "three recesses 75" corresponding to the three steel balls 57 are arranged around the vertical axis AX4 at intervals of 120°. In this case, it is difficult to fit the three steel balls 57 into the three recesses 75 when attaching the brush 25 to the brush holding portion 27. If the three steel balls 57 are not fitted into the three recesses 75 when the cylindrical portion 73 of the brush 25 is inserted into the hole portion 53 of the brush holding portion 27, the cylindrical portion 73 may come out of the hole portion 53.

[0054] In contrast, the cylindrical portion 73 of this embodiment is provided with a recess 75 and a longitudinal recess 77. As shown in FIG. 5, when the cylindrical portion 73 of the brush 25 is inserted into the hole portion 53 of the brush holding portion 27, at least one steel ball 57 is accommodated in the longitudinal recess 77. This restricts the upward and downward movement of the brush 25. This prevents the cylindrical portion 73 from falling out of the hole portion 53. Thereafter, for example, when the brush 25 rotates around the vertical axis AX2, the brush 25 slides in the circumferential direction relative to the brush holding portion 27, so that the three steel balls 57 are accommodated in the recess 75 and the longitudinal recess 77, and the rotation of the brush 25 is restricted. In addition, the brush 25 can be reliably held.

[0055] (3) Configuration of brush replacement part Please refer to Fig. 2. The brush replacement unit 45 is for replacing the used brush 25A (brush 25) with an unused brush 25B. The unused brush 25B is configured similarly to the brush 25. For example, the brush body 69 of the unused brush 25B is a PVA sponge brush, like the brush body 69 of the brush 25. The waiting pot 43 is disposed outside the cup 5 disposed around the holding and rotating unit 3.

[0056] The brush replacement unit 45 is provided on the opposite side of the waiting pot 43 across the substrate W held by the holding and rotating unit 3 and the cup 5 in plan view. The brush replacement unit 45 is also disposed at a position outside the substrate W held by the holding and rotating unit 3 and the cup 5. The brush replacement unit 45 includes a brush collection unit 79 and a brush attachment unit 81.

[0057] (3-1) Brush collection section In the brush collection part 79, the brush 25 is removed from the brush holding part 27. The brush collection part 79 includes a removal member 83 and a brush collection container 85. The removal member 83 is provided above the brush collection container 85. The removal member 83 is disposed on a path RT of horizontal movement of the brush 25 by the brush mechanism 9 in a plan view.

[0058] Fig. 6(a) is a plan view showing the removal member 83. Fig. 6(b) is a front view showing the removal member 83 as seen from the direction of the arrow AR1 in Fig. 6(a). The removal member 83 is a member for restricting the position (movement) of the brush 25 in the height direction by contacting the upper surface of the brush 25 when removing the brush 25. As shown in Fig. 6(a), the removal member 83 has one base portion 83A and two hook portions 83B, 83C branching off from the base portion 83A, and is configured in a U-shape or a two-pronged fork shape.

[0059] When removing the brush 25 from the brush holding part 27, the brush mechanism 9 first passes the brush holding part 27 between the two hook parts 83B, 83C. Then, the brush mechanism 9 raises the brush holding part 27. As a result, as shown in FIG. 6(b), the brush 25 is prevented from moving upward by the two hook parts 83B, 83C, and the brush holding part 27 is raised while being separated from the brush 25. Therefore, the brush 25 is removed from the brush holding part 27. The removed brush 25 is not held by the removal member 83 (the hook parts 83B, 83C). Therefore, the brush 25 falls from the removal position and is collected in the brush collection container 85.

[0060] 7 is a vertical cross-sectional view showing a schematic configuration of the brush replacement unit 45. The brush collection container 85 collects the used brush 25A at a position lower than the storage position (height) P11 of the unused brush 25B. That is, the inner bottom surface 85A of the brush collection container 85 is provided at a position lower than the storage position P11. The brush collection container 85 is also provided below the two hook portions 83B, 83C of the detachment member 83. The brush collection container 85 is detachable from the base 87 of the substrate processing apparatus 1. Therefore, the brush collection container 85 can be carried while storing the used brush 25A.

[0061] (3-2) Brush attachment part 2, the brush attachment portion 81 attaches an unused brush 25B to the brush holding portion 27. The brush attachment portion 81 is disposed adjacent to the brush collection portion 79. The brush attachment portion 81 is disposed at a position different from the brush collection portion 79.

[0062] 7, the brush attachment portion 81 stores one or more (e.g., three) unused brushes 25B. The brush attachment portion 81 includes a brush storage container 91 and a liquid discharge container 93. The liquid supply portion 89 supplies liquid to the brush storage container 91.

[0063] The liquid supply unit 89 includes a liquid nozzle 95, a liquid pipe 97, a liquid supply source 98, and an on-off valve V2. The liquid nozzle 95 supplies pure water, such as deionized water (DIW), to the brush storage container 91 as a liquid. The pure water from the liquid nozzle 95 may or may not be applied directly to the unused brush 25B. The liquid supply source 98 supplies the pure water to the liquid nozzle 95 through the liquid pipe 97. The on-off valve V2 is provided in the liquid pipe 97. The on-off valve V2 supplies the pure water and stops the supply of the pure water.

[0064] The brush storage container 91 stores the pure water supplied from the liquid nozzle 95 of the liquid supply unit 89. The brush storage container 91 stores three unused brushes 25B while immersing the brush bodies 69 of the three unused brushes 25B in the stored pure water. The brush storage container 91 is formed, for example, in the shape of a shallow tray. When storing the unused brushes 25B, the brush storage container 91 continues to supply pure water from the liquid nozzle 95. This allows the purity of the pure water in which the unused brushes 25B are immersed to be maintained. Note that, among the side walls of the brush collection container 85, the side wall W1 facing the brush attachment portion 81 and the side wall W2 of the brush storage container 91 facing the brush collection portion 79 correspond to the isolating portion in the present invention. According to this configuration, the brush collection portion 79 and the brush attachment portion 81 can be separated from each other. Therefore, particles originating from the used brush 25A can be reliably prevented from adhering to the unused brush 25B handled by the brush attachment portion 81.

[0065] The liquid discharge container 93 accommodates the brush storage container 91. That is, the lateral outer periphery of the brush storage container 91 is surrounded by the inner wall of the liquid discharge container 93. A discharge port 93A is provided at the bottom of the liquid discharge container 93. Therefore, the liquid discharge container 93 receives the pure water that overflows from the upper opening of the brush storage container 91, and discharges the pure water. Note that the side wall W3 of the liquid discharge container 93 that faces the brush recovery section 79 corresponds to the isolating section of the present invention. That is, at least one of the side walls W1, W2, and W3 corresponds to the isolating section of the present invention.

[0066] 2, for example, three unused brushes 25B are arranged, in a plan view, on the movement path RT of the brush holder 27. The brush storage container 91 is provided with a guide, such as a recess, so that each unused brush 25B can be stored in a preset position.

[0067] (4) Control unit of substrate processing apparatus The substrate processing apparatus 1 includes a control unit 101 and a storage unit (not shown). The control unit 101 controls the processing of the substrate W and brush replacement. The control unit 101 includes one or more processors, such as a central processing unit (CPU). The storage unit includes at least one of a read-only memory (ROM), a random-access memory (RAM), and a hard disk, for example. The storage unit stores computer programs required for the control unit 101 to control each component of the substrate processing apparatus 1.

[0068] (5) Operation of the substrate processing device Next, a description will be given of the operation of the substrate processing apparatus 1. As shown in Fig. 2, normally, the brush 25 held by the brush holding portion 27 waits in a waiting pot 43. First, normal brush cleaning of the back surface of the substrate W will be described.

[0069] (5-1) Normal brush cleaning of the back surface of the substrate W A transport robot (not shown) transports the substrate W onto the spin chuck 11 of the holding and rotating unit 3. The device surface (front surface) of the transported substrate W on which an electronic circuit is formed faces downward, and the non-device surface (back surface) of the substrate W faces upward. The holding and rotating unit 3 holds the transported substrate W and rotates the substrate W around a vertical axis AX1. When the opening / closing valve V1 is opened, a processing liquid is discharged from the processing liquid nozzle 19 onto the back surface (i.e., the upper surface) of the substrate W. Thereafter, the brush mechanism 9 rotates the brush 25 around the vertical axis AX2 while oscillating the brush 25 around the vertical axis AX3, and causes the brush 25 to act on the back surface of the substrate W onto which the processing liquid has been discharged, thereby cleaning the back surface of the substrate W.

[0070] After cleaning the back surface of the substrate W, the brush mechanism 9 returns the brush 25 to the standby pot 43 and closes the on-off valve V1 to stop discharging the processing liquid. After stopping the discharging of the processing liquid, the holding and rotating unit 3 rotates the substrate W at high speed to dry the substrate W. Thereafter, the holding and rotating unit 3 stops the rotation of the substrate W and releases the holding of the substrate W. Thereafter, a transport robot (not shown) transports the substrate W cleaned by the brush 25 from the spin chuck 11.

[0071] (5-2) Brush replacement Next, brush replacement will be described. The brush mechanism 9 moves the brush holder 27 holding the brush 25 from the waiting pot 43 to position P1 (see FIG. 7) outside the cup 5. Then, the lifting mechanism 35 of the brush mechanism 9 lowers the brush holder 27 from position P1 to position P2. Then, the turning drive unit 37 of the brush mechanism 9 turns the brush holder 27 about the vertical axis AX3 from position P2 to position P3. As a result, the brush holder 27 is moved between the two hook portions 83B, 83C of the removal member 83 of the brush collection unit 79.

[0072] Thereafter, the lifting mechanism 35 lifts the brush holding part 27 from position P3 to position P4. At this time, the upward movement of the brush 25 is restricted by the two hooks 83B, 83C. Therefore, only the brush holding part 27 is lifted to position P4, while the brush 25 is removed from the brush holding part 27. The removed brush 25 falls from the removal position set by the removal member 83, and is collected in the brush collection container 85 as the used brush 25A.

[0073] Thereafter, the swivel drive unit 37 rotates the brush holder 27 around the vertical axis AX3 from position P4 to position P5. Position P5 is a position above one of the three unused brushes 25B stored in the brush storage container 91. After the brush holder 27 is moved to position P5, the lifting mechanism 35 lowers the brush holder 27. As a result, the cylindrical portion 73 of the unused brush 25B is inserted into the hole 53 of the brush holder 27. In addition, the three steel balls 57 are fitted into the recess 75 and the longitudinal recess 77 provided in the cylindrical portion 73, so that the unused brush 25B is fixed in the up-down direction and the rotational direction (the rotational direction around the vertical axis AX2) relative to the brush holder 27.

[0074] Thereafter, the lifting mechanism 35 raises the brush holder 27 holding the unused brush 25B to position P6. Thereafter, the brush mechanism 9 moves the unused brush 25B from position P6 to, for example, the waiting pot 43. The unused brush 25B performs brush cleaning of the back surface of the substrate W after a process for removing initial contamination has been performed to enhance the degree of cleaning.

[0075] According to this embodiment, since the brush collecting section 79 and the brush mounting section 81 are separated, the used brush 25A and the unused brush 25B are not handled in the same area. This allows the unused brush 25B to be separated from the removed used brush 25A. Therefore, the brush 25 can be automatically replaced while preventing particles from adhering to the unused brush 25B.

[0076] The brush attachment portion 81 also includes a brush storage container 91 for storing unused brushes 25B during storage.

[0077] Providing the brush storage container 91 on the brush attachment part 81 makes it possible to separate the brush attachment part 81 from the brush recovery part 79. Therefore, it is possible to reliably prevent particles originating from the used brush 25A from adhering to the unused brush 25B handled by the brush attachment part 81.

[0078] The brush attachment portion 81 also includes a liquid supply portion 89 that supplies pure water to the unused brush 25B during storage.

[0079] When the unused brush 25B in storage dries, for example, particles may enter small gaps in the unused brush 25B. If particles enter the gaps, it is difficult to remove the particles. Therefore, after the unused brush 25B is attached to the brush holder 27, it may take a long time until the brush cleaning of the substrate W to be the product is performed. This reduces the operating rate of the substrate processing apparatus 1 and reduces productivity. However, according to this embodiment, the liquid supply unit 89 supplies pure water to the unused brush 25B in storage, so that the unused brush 25B in storage can be prevented from drying. Therefore, it is possible to prevent particles from entering small gaps in the unused brush 25B in storage.

[0080] The brush collecting section 79 also includes a brush collecting container 85 for collecting the removed used brush 25A.

[0081] Providing the brush collection portion 79 with the brush collection container 85 allows the brush attachment portion 81 and the brush collection portion 79 to be separated. Therefore, it is possible to reliably prevent particles resulting from the used brush 25A from adhering to the unused brush 25B handled by the brush attachment portion 81.

[0082] The brush collecting section 79 also includes a removal member 83 for removing the brush 25.

[0083] By using the removal member 83, the brush 25 can be removed from the brush holding portion 27 and collected in a brush collection container 85 as a used brush 25A.

[0084] In addition, the brush attachment portion 81 is disposed adjacent to the brush collection portion 79 .

[0085] After removing the used brush 25A in the brush collecting part 79, the unused brush 25B can be quickly attached. In addition, even if the brush attachment part 81 is adjacent to the brush collecting part 79, the unused brush 25B can be separated from the removed used brush 25A.

[0086] Further, between the brush collection part 79 and the brush attachment part 81, there is provided a side wall W1 of the brush collection container 85, a side wall W2 of the brush storage container 91, or a side wall W3 of the liquid discharge container 93, which separates the brush collection part 79 and the brush attachment part 81. With this configuration, the brush collection part 79 and the brush attachment part 81 can be separated. Therefore, it is possible to reliably prevent particles caused by the used brush 25A from adhering to the unused brush 25B handled by the brush attachment part 81.

[0087] Furthermore, the longitudinal recess 77 is recessed longitudinally in the circumferential direction and can accommodate two of the three steel balls 57. Therefore, for example, when the cylindrical portion 73 of the brush 25 is inserted into the hole portion 53 of the brush holding portion 27, one of the three steel balls 57 is accommodated in the longitudinal recess 77. This makes it possible to restrict the upward and downward movement of the brush 25 relative to the brush holding portion 27. This makes it possible to prevent the brush 25 from coming off the brush holding portion 27. Example 2

[0088] Next, a second embodiment of the present invention will be described with reference to the drawings. Note that descriptions overlapping with the first embodiment will be omitted. In the first embodiment, the position of the unused brush 25B to be stored was fixed. That is, the position of the brush storage container 91 that stores the unused brush 25B was fixed. In this regard, the brush storage container 91 may be configured to be moved in the X direction in FIG. 2.

[0089] Fig. 8(a) is a vertical cross-sectional view of the brush replacement part 45 according to the second embodiment. Fig. 8(b) is a plan view of the brush replacement part 45. The brush attachment part 81 further includes a horizontal movement part 111 that horizontally moves the brush storage container 91 in the X direction. The horizontal movement part 111 is attached to the inner wall of the liquid discharge container 93, for example.

[0090] The horizontal movement unit 111 includes a slider 113, a guide rail 115, a screw shaft 117, and an electric motor 119. The slider 113 is fixed to, for example, the lower surface of the brush storage container 91. The guide rail 115 and the screw shaft 117 are each disposed to extend in the X direction. The guide rail 115 penetrates the slider 113. The screw shaft 117 meshes with an internal thread 113A of the slider 113. An output shaft 119A of the electric motor 119 is connected to one end of the screw shaft 117. When the electric motor 119 rotates the screw shaft 117 in the forward direction, the slider 113 and the brush storage container 91 move forward in the +X direction. When the electric motor 119 rotates the screw shaft 117 in the reverse direction, the slider 113 and the brush storage container 91 move backward in the -X direction.

[0091] 8(b), for example, when performing brush replacement using an unused brush 25B indicated by reference numeral 121, the horizontal movement unit 111 moves the brush storage container 91 in the X direction to move the unused brush 25B indicated by reference numeral 121 to a position overlapping with the movement path RT in a plan view. Then, the brush mechanism 9 moves the brush holding unit 27 from which the brush 25 has been removed to above the unused brush 25B indicated by reference numeral 121. Thereafter, the brush mechanism 9 attaches the unused brush 25B to the brush holding unit 27 by lowering the brush holding unit 27.

[0092] According to this embodiment, the brush attachment part 81 further includes a horizontal movement part 111 that horizontally moves the brush storage container 91. Any unused brush 25B can be transported along the movement path RT in a plan view. Therefore, many unused brushes 25B can be stored in the brush storage container 91.

[0093] In this embodiment, the horizontal movement unit 111 horizontally moves the brush storage container 91 without horizontally moving the liquid discharging container 93. In this regard, the horizontal movement unit 111 may horizontally move the brush storage container 91 and the liquid discharging container 93 together. Example 3

[0094] Next, a third embodiment of the present invention will be described with reference to the drawings. Note that descriptions overlapping with the first and second embodiments will be omitted. In the first and second embodiments, the brush replacement was performed by vertically moving the brush holder 27 relative to the brush 25 (unused brush 25B). In this regard, the brush replacement may be performed by horizontally moving the brush holder 127 relative to the brush 125 (unused brush 125B).

[0095] (6) Structure for attaching and detaching brushes Fig. 9(a) is a side view of brush 125 and brush holder 127. Fig. 9(b) is a perspective view of brush holder 127. Figs. 10(a) and 10(b) are cross-sectional views of brush 125 and brush holder 127 as viewed in the direction of arrow B in Fig. 9(a). Fig. 10(a) is a diagram for explaining the operation when button 141 is not pressed. Fig. 10(b) is a diagram for explaining the operation when button 141 is pressed.

[0096] 9(a), the brush 125 is detachable from the brush holder 127. The brush 125 includes a brush body 69, a brush support portion 129, a guide 131, two openings 133, two steel balls 57, a space SP2, a ball receiving portion 135, an elastic member 137, a cam 139, and a button 141.

[0097] The brush support part 129 supports the brush body 69 from the side opposite to the cleaning surface 69A. The guide 131 is provided on the surface (upper surface) of the brush support part 129 opposite to the cleaning surface 69A. The guide 131 is a member that protrudes upward from the upper surface of the brush support part 129. The guide 131 is formed in a longitudinal shape in a preset horizontal direction HD1.

[0098] Refer to Fig. 10(a). The guide 131 has a space SP2 therein. Ball accommodating portions 135 are formed on two side surfaces of the guide 131 that are parallel to the horizontal direction HD1. Furthermore, an opening 133 is formed on a portion of the outer side surface of the guide 131 that faces the ball accommodating portion 135. Two steel balls 57 are accommodated in the two ball accommodating portions 135. The two steel balls 57 accommodated in the two ball accommodating portions 135 are supported by an elastic member 137 via a cam 139. As a result, the two steel balls 57 partially protrude outward from the two openings 133, respectively.

[0099] The button 141 is provided on the outer circumferential surface (outer side wall) of the brush support portion 129. That is, the button 141 is provided so as to protrude from the space SP2 to the outer circumferential surface of the brush support portion 129. The button 141 is also supported by the elastic member 137 via the cam 139. The elastic member 137 is supported by an inner wall 143 on the far side of the space SP2. The elastic member 137 is, for example, a spring.

[0100] Cam 139 is disposed in space SP2, sandwiched between button 141 and elastic member 137. Cam 139 and button 141 are movable along horizontal direction HD1 in which guide 131 extends. Cam 139 has two inclined surfaces 139A. The two inclined surfaces 139A are formed on both side surfaces perpendicular to the moving direction of cam 139 in plan view. The two inclined surfaces 139A are formed such that cam 139 is thicker on the elastic member 137 side in plan view. The two inclined surfaces 139A come into contact with two steel balls 57.

[0101] 9(b). The brush holding portion 127 includes a guide holding portion 145 and two recesses 147. The guide holding portion 145 holds the guide 131 so as to be movable in the horizontal direction HD1 in which the guide 131 extends. A groove portion 149 extending linearly in the horizontal direction is provided on the lower surface of the guide holding portion 145. Two recesses 147 are provided on each of two side walls 149A of the groove portion 149. That is, the two recesses 147 are provided in the guide holding portion 145 and accommodate two steel balls 57. The two recesses 147 are disposed opposite each other. The length in the up-down direction Z and the width in the horizontal direction of the recess 147 are formed in the same manner as the recess 75.

[0102] Groove 149 is configured, for example, like a dovetail groove. Therefore, a width WD1 of a lower end of groove 149 is narrower than a width WD2 of an upper end of groove 149 (width WD1<width WD2). Guide 131 of brush support part 129 is formed to match the shape of groove 149. Therefore, guide 131 can enter groove 149 from both ends in the longitudinal direction.

[0103] When guide 131 is fitted in groove 149, brush 125 (guide 131) is restricted from moving in the vertical and rotational directions relative to brush holding portion 127 (groove 149). However, guide 131 can move along the longitudinal direction of groove 149. Thus, two steel balls 57 fit into two recesses 147 in groove 149, thereby restricting horizontal movement of guide 131 relative to groove 149.

[0104] Next, the operation of the brush 125 will be described. See FIG. 10(b). When the button 141 is pressed, the cam 139 is moved toward the elastic member 137. Therefore, the button 141 elastically deforms the elastic member 137 via the cam 139. In addition, with the movement of the cam 139, the two inclined surfaces 139A are also moved toward the elastic member 137. Therefore, the force pressing the two steel balls 57 outward from the two openings 133 is released. Therefore, the two steel balls 57 can retreat inward (toward the space SP2) from the openings 133. This allows the brush 125 to move in the horizontal direction HD1 relative to the brush holder 127.

[0105] Refer to FIG. 10(a). When the button 141 is not pressed, the cam 139 is moved toward the button 141 by the restoring force of the elastic member 137. With the movement of the cam 139, the two inclined surfaces 139A are also moved toward the button 141. Therefore, the two inclined surfaces 139A push the two steel balls 57 outward from the two openings 133. That is, the restoring force of the elastic member 137 causes the two steel balls 57 to partially protrude outward from the two openings 133. As a result, the two steel balls 57 are accommodated in the two recesses 147, and the movement of the brush 125 in the horizontal direction HD1 can be restricted. In this configuration, the elastic member 137 and the cam 139 correspond to a protrusion width adjustment mechanism in the present invention that adjusts the protrusion width (protrusion amount) of the protrusion portion depending on the amount of depression of the button portion.

[0106] (7) Configuration of brush replacement part Fig. 11 is a plan view of a brush replacement part 45 according to the third embodiment. Fig. 12 is a vertical sectional view showing a schematic configuration of the brush replacement part 45 according to the third embodiment.

[0107] Please refer to Figures 11 and 12. First, commonalities with the first embodiment will be briefly described. The brush replacement unit 45 includes a brush collection unit 79 and a brush attachment unit 81. The brush collection unit 79 includes a brush collection container 85. The brush attachment unit 81 stores one or more (e.g., three) unused brushes 125B. The unused brushes 125B are configured in the same manner as the brush 125. The brush attachment unit 81 includes a liquid supply unit 89, a brush storage container 91, and a liquid discharge container 93.

[0108] Next, a description will be given of differences from the first embodiment. The brush attachment portion 81 includes a brush moving mechanism 151. The brush moving mechanism 151 includes a brush placing portion 153, a pusher 155, a lifting portion 157, and a horizontal moving portion (linear actuator) 159.

[0109] The brush mounting portion 153 is configured to extend in a preset horizontal direction HD2. Three unused brushes 125B are mounted in a row on the brush mounting portion 153 along the horizontal direction HD2. Two side walls 153A extending in the horizontal direction HD2 of the brush mounting portion 153 guide the three unused brushes 125B along the horizontal direction HD2. Each unused brush 125B is disposed such that the longitudinal direction (horizontal direction HD1) of the guide 131 is parallel to the horizontal direction HD2.

[0110] When the tip of the brush mounting portion 153 is located on the movement path RT of the brush 125 in a plan view, the brush mounting portion 153 is disposed so that the horizontal direction HD2 extends in a tangential direction.

[0111] The pusher 155 includes a pushing member 155A and a horizontal moving unit (linear actuator) 155B. The horizontal moving unit 155B includes a rod RD, and further includes an electric motor or an air cylinder. The pushing member 155A is provided at the tip of the rod RD. The horizontal moving unit 155B moves the pushing member 155A forward and backward along the horizontal direction HD2. In this way, the pusher 155 pushes the three unused brushes 125B, thereby moving the leading unused brush 125B to the replacement position P21.

[0112] The lifting unit 157 lifts and lowers the brush mounting unit 153 and the pusher 155. The arm 161 connects the brush mounting unit 153 and the lifting unit 157. This allows the lifting unit 157 to immerse the three unused brushes 125B mounted on the brush mounting unit 153 in the pure water stored in the brush storage container 91 and to lift them up from the pure water. The pusher 155 is provided on the arm 161.

[0113] The horizontal moving unit 159 advances and retreats the brush mounting unit 153, the pusher 155, and the lifting unit 157 along the horizontal direction HD2. The horizontal moving unit 159 positions the tip of the brush mounting unit 153 at a boundary position P23 between the brush collection unit 79 and the brush attachment unit 81. Each of the lifting unit 157 and the horizontal moving unit 159 includes an electric motor or an air cylinder.

[0114] (8) Brush replacement Next, brush replacement will be described with reference to Fig. 13(a). Three unused brushes 125B placed on the brush placement portion 153 are immersed in the pure water stored in the brush storage container 91. The liquid nozzle 95 (see Fig. 12) continues to discharge the pure water into the brush storage container 91.

[0115] Refer to Fig. 13(b). The lifting unit 157 (see Fig. 12) of the brush moving mechanism 151 lifts the brush mounting unit 153 to pull up the three unused brushes 125B from the pure water. Thereafter, the horizontal moving unit 159 of the brush moving mechanism 151 advances the brush mounting unit 153 to position the tip of the brush mounting unit 153 at the boundary position P23.

[0116] Meanwhile, the brush mechanism 9 moves the brush 125 held by the brush holder 127 from the standby pot 43 (see FIG. 2) to next to the leading unused brush 125B. At this time, the brush 125 is positioned so that the guide 131 of the leading unused brush 125B is positioned on an extension line of the guide 131 of the brush 125.

[0117] Thereafter, the brush mechanism 9 presses the button 141 of the brush 125 against the outer circumferential surface of the leading unused brush 125B. This causes the button 141 of the brush 125 to be pressed in, and the two steel balls 57 (see FIG. 10(b)) of the brush 125 to recede to the inside of the two openings 133. As a result, the brush 125 becomes movable along the groove 149 of the brush holder 127. Thereafter, the brush mechanism 9 moves the brush holder 127 horizontally along the guides 131 of the brush 125 and the leading unused brush 125B.

[0118] Refer to FIG. 13(c). When the brush 125 is removed from the groove 149 of the brush holder 127, the brush 125 falls and is collected in the brush collection container 85 as the used brush 125A. When the brush holder 127 moves along the guide 131 of the leading unused brush 125B, the button 141 of the leading unused brush 125B is in contact with the outer circumferential surface of the leading unused brush 125B. However, the button 141 of the leading unused brush 125B is not pressed in. Therefore, the two steel balls 57 of the leading unused brush 125B are accommodated in the two recesses 147 of the brush holder 127, thereby restricting the movement of the leading unused brush 125B in the horizontal direction HD2. That is, the leading unused brush 125B is attached to the brush holder 127. Thereafter, the unused brush 125B attached to the brush holder 127 is subjected to a process for removing the initial contamination, and then the brush 125B performs brush cleaning on the back surface of the substrate W.

[0119] After the leading unused brush 125B is attached to the brush holding portion 127, the unused brush 125B indicated by the arrow AR2 is moved to the replacement position P21 by the pusher 155. When the brush replacement is not performed, the brush moving mechanism 151 immerses the unused brush 125B placed on the brush placement portion 153 in the pure water stored in the brush storage container 91.

[0120] According to this embodiment, the brush 125 includes a guide 131 extending in a preset horizontal direction HD1. The brush holder 127 includes a guide holder 145 that holds the guide 131 movably in the horizontal direction HD1. This makes it possible to restrict movement of the brush 125 in the vertical and rotational directions relative to the brush holder 127. In addition, by accommodating the two steel balls 57 in the two recesses 147, it is also possible to restrict movement in the horizontal direction HD1 described above. This makes it possible to prevent the brush 125 from coming off the brush holder 127.

[0121] In this embodiment, the three unused brushes 125B are arranged in a line in a straight line along the horizontal direction HD2. Alternatively, the three unused brushes 125B may be arranged in an arc shape along the arc-shaped movement path RT in a plan view. In this case, the guide 131 and the groove portion 149 may be formed to extend in an arc shape along the arc-shaped movement path RT in a plan view.

[0122] 13(b), when removing the brush 125 from the brush holding part 127, the button 141 of the brush 125 is pressed against the outer peripheral surface of the leading unused brush 125B. In this regard, as shown in FIG. 14, the brush collecting part 79 may be provided with a removing member 163 for removing the brush 125 above the brush collecting container 85 in order to prevent contact between the used brush 125A (brush 125) and the leading unused brush 125B.

[0123] 14, the brush mechanism 9 presses the button 141 of the brush 125 against the removal member 163 to release the restriction (lock) and slides the brush 125. This removes the brush 125 from the brush holding part 127. Thereafter, the brush mechanism 9 moves the brush holding part 127 to the leading unused brush 125B and attaches the leading unused brush 125B to the brush holding part 127. Note that in this modified example, the horizontal movement part 159 of the brush moving mechanism 151 does not need to be provided.

[0124] In this embodiment, the brush storage container 91 may not be provided, and pure water may be directly sprayed in a mist from the liquid nozzle 95 onto the three unused brushes 125B. In this embodiment, the number of each of the steel balls 57 and the recesses 147 is not limited to two. For example, the number of each of the steel balls 57 and the recesses 147 may be one. For example, one steel ball 57 and one recess 147 may be provided on the upper surface of the guide 131 and on the bottom surface (surface with width WD2) of the groove portion 149 facing the upper surface.

[0125] The present invention is not limited to the above-described embodiment, but can be modified as follows.

[0126] (1) In the above-described first embodiment, the brush holder 27 includes three steel balls 57 and the biasing portion 61, and the brush 25 includes a cylindrical portion 73. In this regard, as shown in Fig. 15, the brush holder 27 may include a cylindrical portion 73 having a recess 75 and a longitudinal recess 77. The brush 25 may include three steel balls 57 and the biasing portion 61, and the like.

[0127] A more specific description will be given. The brush 25 includes a brush body 69 having a cleaning surface 69A for cleaning the substrate W, a brush support part 71 supporting the brush body 69 from the opposite side of the cleaning surface 69A, a cylindrical hole 53 formed along a central axis (vertical axis AX4) extending vertically, three openings 55 provided in an inner side wall 53A of the hole 53 and arranged around the central axis, and three steel balls 57 protruding from the three openings 55 into the hole 53. The three steel balls 57 are supported by a biasing part 61.

[0128] The brush holding portion 27 includes a protruding cylindrical portion 73, and a recess 75 and a longitudinal recess 77 provided on a side wall 73A of the cylindrical portion 73 around the vertical axis AX2 of the cylindrical portion 73. The longitudinal recess 77 is recessed longitudinally in the circumferential direction. When the cylindrical portion 73 is inserted into the hole portion 53 of the brush 25, the recess 75 accommodates one of the three steel balls 57, and the longitudinal recess 77 accommodates the remaining two steel balls 57 at both ends.

[0129] 16, the cylindrical portion 165 of the brush 25 may include three steel balls 57 and a biasing portion 61. The hole portion 53 of the brush holder 27 may include a recess 75 and a longitudinal recess 77. The recess 75 accommodates one of the three steel balls 57, and the longitudinal recess 77 accommodates the remaining two steel balls 57 at both ends thereof.

[0130] The brush 25 may have a hole 53 (having a recess 75 and a longitudinal recess 77) shown in Fig. 16. Alternatively, the brush holder 27 may have a cylindrical portion 165 (having three steel balls 57, a biasing portion 61, etc.) shown in Fig. 16.

[0131] (2) In each of the above-described embodiments and modified example (1), the brush collection portion 79 and the brush attachment portion 81 are arranged side by side. However, the present invention is not limited to this configuration. For example, as shown in FIG. 17, the brush attachment portion 81 may be arranged above the brush collection portion 79. In addition, in a plan view, the brush attachment portion 81 may overlap a part or the entire area of ​​the brush collection portion 79. In this embodiment, the bottom surfaces (bottom walls) and side walls of the brush storage container 91 and the liquid discharge container 93 of the brush attachment portion 81 correspond to the isolating portion in the present invention.

[0132] (3) In each of the above-described embodiments and modifications, the brush mechanism 9 rotates the brush 25 (125) and the brush holder 27 (127) around the vertical axis AX3. In this regard, as shown in FIG. 18, the brush mechanism 9 may include a horizontal movement unit (linear actuator) 179 that moves the brush 25 (125) and the brush holder 27 (127) linearly. The horizontal movement unit 179 includes an electric motor. The brush mechanism 9 may also include two horizontal movement units 179 to move the brush 25 and the like in the XY directions. The horizontal movement unit 179 corresponds to the brush movement mechanism of the present invention.

[0133] (4) In the first embodiment and each of the modified examples described above, the brush storage container 91 is disposed farther from the holding and rotating unit 3 and the cup 5 than the removal member 83. In this regard, the brush storage container 91 may be disposed closer to the holding and rotating unit 3 and the cup 5 than the removal member 83. In other words, the brush storage container 91 and the removal member 83 (brush collection container 85) may be disposed in this order.

[0134] (5) In each of the embodiments and modified examples described above, the brush replacement unit 45 is disposed on the opposite side of the holding and rotating unit 3 from the standby pot 43. In this regard, the brush replacement unit 45 may be disposed on the standby pot 43 side. For example, the standby pot 43 may be disposed between the brush replacement unit 45 and the holding and rotating unit 3.

[0135] (6) In the above-described embodiments and modifications, the steel balls 57 serving as the protrusions are spherical, but are not limited to spherical. For example, they may be hemispheres, cylinders, or polyhedrons.

[0136] (7) In the above-mentioned embodiments and modifications, the brush body 69 is made of a PVA sponge brush, but is not limited to this. The brush body 69 may be a resin body, such as PVA, in which silicon carbide (SiC), cerium oxide (CeO2), silica (SiO2), or diamond abrasive grains are dispersed.

[0137] (8) In each of the embodiments and modified examples described above, the brush attachment part 81 is provided with the liquid supply part 89 to prevent the brush body 69 from drying out. If the supply of liquid (e.g., pure water) is not required, the brush attachment part 81 does not need to be provided with the liquid supply part 89.

[0138] (9) In the above-described embodiments and modifications, the isolating portion of the present invention is, for example, a part of the brush collection container 85. However, the isolating portion is not limited to a part of the container. For example, a partition wall (e.g., a plate-like shape) may be provided as the isolating portion between the brush collection portion 79 and the brush attachment portion 81. In addition, the upper end of at least one of the partition wall and the side walls W1, W2, and W3 may be configured to be higher than the detachment member 83.

[0139] (10) In each of the above-described embodiments and modified examples, the brush attachment portion 81 includes the brush storage container 91 and the liquid discharge container 93. In this regard, if necessary, the brush attachment portion 81 does not need to include the liquid discharge container 93. In this case, for example, the brush storage container 91 may include a discharge port 93A for discharging pure water. [Explanation of symbols]

[0140] 1 ... Substrate processing equipment 3 … Rotating holding part 9 … Brush mechanism 25,125 … Brush 25A, 125A ... Used brushes 25B, 125B … Unused brushes 27,127 … Brush holder 31 ... Arm 35 ... Lifting mechanism 37 ... Swivel drive unit 45 … Brush replacement part 53 … Hole 53A … Side wall 55 … Opening 57 … steel ball 61 ... Pressurizing section 69 … Brush body 69A … Cleaning surface 71,129 … Brush support 73,165 … Cylinder section 73A … Side wall 75,147 … dent 77 ... Longitudinal recess 79 … Brush collection section 81 … Brush attachment part 83,163 … Removable parts 85 … Brush collection container 89…Liquid supply section 91 … Brush container 101 ... Control section 111…Horizontal moving part 131 … Guide 133 … Opening 137 ... Elastic member 141 … Button 145 ... Guide holder 149 ... Groove 149A … Side wall 179 … Horizontal moving part RT … Route AX2: Vertical axis

Claims

1. A substrate processing apparatus that cleans a substrate using a brush, comprising: a substrate holder that holds the substrate in a horizontal position; a brush for cleaning the substrate held by the substrate holder; A brush holder that detachably holds the brush; an arm having the brush holder at its tip; a brush collecting section that collects the brushes from the brush holding section; a brush attachment section for storing unused brushes and attaching the stored unused brushes to the brush holding section, the brush attachment section including a brush storage container for storing unused brushes during storage; a brush moving mechanism that moves the brush via the arm between a processing position on the substrate held by the substrate holding unit, the brush collection unit, and the brush attachment unit; A liquid supply unit that supplies liquid to the brush storage container; Equipped with The substrate processing apparatus is characterized in that the brush storage container stores unused brushes by immersing them in the stored liquid.

2. 2. The substrate processing apparatus according to claim 1, 4. The substrate processing apparatus according to claim 3, wherein the brush attachment section further comprises a horizontal movement section for horizontally moving the brush storage container.

3. 2. The substrate processing apparatus according to claim 1, The substrate processing apparatus according to claim 1, wherein the brush collecting unit includes a brush collecting container for collecting the removed used brushes.

4. 4. The substrate processing apparatus according to claim 1, The substrate processing apparatus according to claim 1, wherein the brush recovery unit includes a removal member for removing the brushes.

5. A substrate processing apparatus for cleaning a substrate using a brush, comprising: a substrate holder that holds the substrate in a horizontal position; a brush for cleaning the substrate held by the substrate holder; A brush holder that detachably holds the brush; an arm having the brush holder at its tip; a brush collecting section that collects the brushes from the brush holding section; a brush attachment section for storing an unused brush and attaching the unused brush to the brush holder; a brush moving mechanism that moves the brush via the arm between a processing position on the substrate held by the substrate holding unit, the brush collection unit, and the brush attachment unit; Equipped with The substrate processing apparatus according to claim 1, wherein the brush attachment section is disposed adjacent to the brush recovery section.

6. A substrate processing apparatus for cleaning a substrate using a brush, comprising: a substrate holder that holds the substrate in a horizontal position; a brush for cleaning the substrate held by the substrate holder; A brush holder that detachably holds the brush; an arm having the brush holder at its tip; a brush collecting section that collects the brushes from the brush holding section; a brush attachment section for storing an unused brush and attaching the unused brush to the brush holder; a brush moving mechanism that moves the brush via the arm between a processing position on the substrate held by the substrate holding unit, the brush collection unit, and the brush attachment unit; a separator provided between the brush collecting portion and the brush mounting portion and separating the brush collecting portion from the brush mounting portion; A substrate processing apparatus comprising:

7. A substrate processing apparatus for cleaning a substrate using a brush, comprising: a substrate holder that holds the substrate in a horizontal position; a brush for cleaning the substrate held by the substrate holder; A brush holder that detachably holds the brush; an arm having the brush holder at its tip; a brush collecting section that collects the brushes from the brush holding section; a brush attachment section for storing an unused brush and attaching the unused brush to the brush holder; a brush moving mechanism that moves the brush via the arm between a processing position on the substrate held by the substrate holding unit, the brush collection unit, and the brush attachment unit; Equipped with The brush holder includes: A cylindrical hole formed along a vertically extending central axis; Three openings are provided on an inner side wall of the hole and are arranged around the central axis; Three protrusions protruding from the three openings to the hole, respectively; a biasing portion provided on an outer side of the protruding portion and biasing the protruding portion in a direction of the central axis; Equipped with The brush is a brush body having a cleaning surface for cleaning the substrate; a brush support portion that supports the brush body from the opposite side of the cleaning surface; a cylindrical portion protruding from the brush support portion to a side opposite to the cleaning surface; a recess and a longitudinal recess provided in a side wall of the cylindrical portion and around an axis of the cylindrical portion, The longitudinal recess is longitudinally recessed in the circumferential direction, A substrate processing apparatus characterized in that, when the cylindrical portion is inserted into the hole portion of the brush holding portion, the recess accommodates one of the three protrusions, and the longitudinal recess accommodates at least one of the remaining two protrusions.

8. A substrate processing apparatus for cleaning a substrate using a brush, comprising: a substrate holder that holds the substrate in a horizontal position; a brush for cleaning the substrate held by the substrate holder; A brush holder that detachably holds the brush; an arm having the brush holder at its tip; a brush collecting section that collects the brushes from the brush holding section; a brush attachment section for storing an unused brush and attaching the unused brush to the brush holder; a brush moving mechanism that moves the brush via the arm between a processing position on the substrate held by the substrate holding unit, the brush collection unit, and the brush attachment unit; Equipped with The brush is a brush body having a cleaning surface for cleaning the substrate; a brush support part that supports the brush body from the opposite side of the cleaning surface, The brush support portion is A guide extending in a predetermined horizontal direction on an opposite side to the cleaning surface; An opening provided in the guide; a protrusion protruding outward from the opening; A button portion provided on an outer circumferential surface of the brush support portion; a protrusion width adjustment mechanism that adjusts a protrusion width of the protrusion according to a pressing amount of the button portion, The brush holder includes: a guide holding portion that holds the guide so as to be movable in the horizontal direction; a recess provided in the guide holding portion to accommodate the protrusion, When the button portion is pressed, the projection width adjustment mechanism retracts the projection from the opening toward the inside, thereby enabling the brush to move in the horizontal direction relative to the brush holding portion, This substrate processing apparatus is characterized in that, when the button portion is not pressed, the protrusion width adjustment mechanism causes the protrusion to protrude outward from the opening, thereby causing the protrusion to be accommodated in the recess and restricting the horizontal movement of the brush.

Images