Lid for substrate storage container and substrate storage container

Abstract

To provide a lid for a substrate storage container and the substrate storage container that can automate attachment / detachment of a top lid and a locking piece without significantly changing the appearance of the top lid.SOLUTION: A freely attachable and detachable top lid 10 for opening and closing an opening upper portion of a substrate storage box is provided. A pair of locking pieces 11 which are fitted and locked to locking fixtures at upper portions of both side walls of an outer box constituting the substrate storage box is integrally molded at both side portions of the top lid 10 in a suspended state, and each locking piece 11 is provided with an automatic opening / closing support member 20 such as a permanent magnet 22 that enables automatic opening / closing of the top lid 10 with respect to the upper portion of the substrate storage box. Since the top lid 10 can be automatically attached and detached, the possibility of contamination of a semiconductor wafer can be eliminated; miniaturization and improvement in cleanliness of a semiconductor device can be expected; and the performance of the semiconductor device can be improved. Further, since the top lid 10 is automatically opened and closed, loads acting on the top lid 10 and its locking piece 11 can be equalized.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a lid for a substrate storage container used for storing and transporting small semiconductor wafers and the like, and to the substrate storage container. [Background technology]

[0002] Semiconductor wafers are classified into small diameter types such as 6 inches (150 mm) and 8 inches (200 mm) and large diameter types such as 12 inches (300 mm), and top-open box type substrate storage containers are used to store and transport the small small diameter types. Although not shown, this type of substrate storage container is configured with a substrate storage box that stores multiple small semiconductor wafers and a top lid that opens and closes the upper opening of the substrate storage box (see Patent Document 1).

[0003] The substrate storage box includes a cylindrical outer box with a bottom, an inner box that is fitted into the outer box to store a number of small semiconductor wafers, and a locking device is integrally formed on each of the side walls of the outer box. The top cover is formed in a generally rectangular shape when viewed from above, and a locking piece is integrally formed on each of the side parts. Each locking piece is elongated horizontally and has a number of holes aligned in the longitudinal direction, some of which are locked by the locking device.

[0004] When small semiconductor wafers are stored in such a substrate storage container and transported, a plurality of semiconductor wafers are aligned and stored in the inner box, the inner box is fitted into the outer box, a top lid is fitted to the upper opening of the outer box, and then a pair of locking pieces of the top lid are locked to the locking devices of the outer box, respectively, so that the small semiconductor wafers can be stored in the substrate storage container and transported. On the other hand, when small semiconductor wafers are removed from the transported substrate storage container and used, the pair of locking pieces of the top lid are detached from the locking devices of the outer box, the top lid is removed from the top of the outer box, the inner box is pulled out from the outer box, and then the plurality of semiconductor wafers are sequentially pulled out from the inner box, so that the small semiconductor wafers can be removed from the transported substrate storage container and used.

[0005] When storing or transporting large, large-diameter semiconductor wafers, substrate storage containers are of the front-open box type, and the attachment / detachment and locking of the lid are automated to contribute to the miniaturization of semiconductor devices (see Patent Document 2). However, when storing or transporting small, small-diameter semiconductor wafers, the attachment / detachment of the top lid and the installation / detachment of the locking piece are still performed manually. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] JP 2009-170591 A [Patent Document 2] Special Publication No. 2018-524809 Summary of the Invention [Problem to be solved by the invention]

[0007] Conventional substrate storage containers are constructed as described above, and when storing or transporting small, small-diameter semiconductor wafers, the top lid is attached and detached and the locking pieces are attached and detached manually.

[0008] However, manual operation makes it difficult to control the force applied, and there is a considerable risk of contamination of the semiconductor wafer, so that miniaturization of semiconductor devices and improvement in cleanliness cannot be expected. Therefore, in order to improve the performance of semiconductor devices, automation is necessary. When automating this, it is preferable to change the appearance of the top cover as little as possible in order to ensure compatibility of the equipment.

[0009] The present invention has been made in consideration of the above, and aims to provide a lid for a substrate storage container and a substrate storage container that can automate the attachment and detachment of the top lid and the installation and detachment of the locking piece without significantly changing the appearance of the top lid. [Means for solving the problem]

[0010] In order to solve the above problems, the present invention provides The top lid that opens and closes the top of the opening of the board storage box is removable. A locking piece is provided to be hooked onto the locking device on the peripheral wall of the board storage box, and an automatic opening and closing support member is attached to the locking piece to enable automatic opening and closing of the top cover relative to the top of the board storage box. The system is established as follows: The automatic opening / closing support member is either a magnet or a magnetic body that is attracted to a magnet, and either the magnet or the magnetic body is provided on the locking piece of the top cover, and the locking piece of the top cover is attracted to the automatic opening / closing device by magnetic force. It is characterized by the following.

[0011] The substrate storage box includes a cylindrical outer box with a bottom, and an inner box which can be removably fitted into the outer box to store multiple substrates each having a width of 200 mm or less in an aligned manner, and it is preferable that the outer box is provided with a locking device with a protrusion on each of the upper side walls. It is also preferable that the top cover be formed into an approximately rectangular shape in plan view so that it can be fitted into the upper opening of the outer box, that approximately plate-shaped locking pieces be formed on both sides of the top cover so that they can swing freely (sway), that each locking piece be formed horizontally with a number of holes lined up in the longitudinal direction, and that some of these holes be able to be fitted into the protrusions of the locking device.

[0012] In order to solve the above problems, the present invention provides a removable top lid for opening and closing the upper opening of a board storage box, the top lid being provided with a locking piece that is hooked onto a locking device on the peripheral wall of the board storage box, and the locking piece is provided with an automatic opening / closing support member that enables the top lid to be automatically opened and closed relative to the top of the board storage box, The circuit board storage box includes a cylindrical outer box with a bottom, and an inner box that is detachably fitted into the outer box and can store a plurality of circuit boards with a width of 200 mm or less in an aligned manner, and a locking device with a protrusion is formed on each of the upper side walls of the outer box, The top cover is formed in a generally rectangular shape in plan view so that it can be fitted to the upper opening of the outer box, and generally plate-shaped locking pieces are formed on both sides of the top cover so as to be able to swing freely, and each locking piece is formed horizontally long with a number of holes arranged in the longitudinal direction, some of which can be fitted to protrusions of a locking tool, The automatic opening / closing support member is made of a substantially flat blocking material that blocks the remaining holes among the multiple holes of the locking piece, and is characterized in that this blocking material is attracted to the attraction member of the automatic opening / closing device.

[0013] In addition, in order to solve the above problems, the present invention provides a packaging device that includes a cylindrical outer box with a bottom, an inner box that is fitted into the outer box to align and store a plurality of substrates, an upper lid that opens and closes an upper opening of the outer box, and a deformable seal member that is interposed between the outer box and the upper lid, According to any one of claims 1 to 4 The present invention is characterized in that it is a lid for a substrate storage container.

[0014] Here, the substrate storage box and the upper lid in the claims may be transparent, opaque, or translucent. The substrate storage box may have openings at the upper and lower parts of the inner box, and a plurality of alignment grooves may be arranged on the inner surface of a plurality of opposing walls of the inner box. A substrate holding retainer may be attached to the inside of the upper lid. The holding retainer includes a frame body that is attached to the inside of the upper lid, and a plurality of flexible elastic pieces protrude from both sides of the frame body. When each elastic piece is brought into contact with the substrate, it is possible to prevent the substrate from being displaced or rattling. The upper lid and the locking piece may be an integral part or may be separate parts. The magnet of the automatic opening / closing support member may be any of a ferrite magnet with excellent versatility, a neodymium magnet with high magnetic properties, a samarium magnet with excellent heat resistance, and an alnico magnet with excellent strength.

[0015] The substrates include at least 6-inch or 8-inch semiconductor wafers, and glass sheets of photomask material of roughly the same size as these (for example, about 200 mm wide) or smaller. The automatic opening and closing device is not particularly limited, but may be configured, for example, with at least a lifting body that can be raised and lowered relative to the top lid, a suction pad supported by the lifting body to suction the top lid, and a swingable opening and closing claw supported by the lifting body to swing the locking piece of the top lid. Furthermore, the substrate storage container may include a substrate storage box that stores multiple small semiconductor wafers, and a top lid that opens and closes the upper opening of the substrate storage box.

[0016] According to the present invention, for example, when the top lid is automatically removed from the substrate storage container and the substrates are taken out of the substrate storage box, the substrate storage container and the automatic opening and closing device are opposed to each other, the automatic opening and closing device is brought into contact with the ceiling of the top lid, the automatic opening and closing device is brought into contact with the locking piece of the top lid so that the locking piece is held by the automatic opening and closing support member, and then the automatic opening and closing device is used to remove the locking piece of the top lid from the locking device of the substrate storage box. After the locking piece of the top lid is removed from the substrate storage box, the automatic opening and closing device is made to hold the top lid and the automatic opening and closing device is raised to remove the top lid from the top of the substrate storage box, and the substrates are taken out from inside the substrate storage box, whereby the top lid can be automatically removed from the substrate storage box and the substrates can be taken out of the substrate storage box. Effect of the Invention

[0017] According to the present invention, an automatic opening / closing support member is provided on the locking piece, which enables the top lid to be automatically opened and closed relative to the top of the board storage box. This has the effect of automating the attachment and detachment of the top lid and the installation and detachment of the locking piece without significantly changing the appearance of the top lid. In addition, either a magnet or a magnetic material is provided on the locking piece of the top cover, and this locking piece of the top cover is attracted to the automatic opening and closing device by magnetic force, so that the locking piece swings due to the magnetic force in response to the movement of the automatic opening and closing device, making it possible to automate the attachment and detachment of the top cover and the installation and detachment of the locking piece.

[0018] According to the invention described in claim 2, by using the inner box, multiple boards each having a width of 200 mm or less can be stored in the outer box at one time, and can be removed from the outer box at one time. In addition, since the upper side walls of the outer box are each formed with a locking device with a protrusion, the top cover can be fitted to the upper opening of the outer box using short locking pieces in the vertical direction, and the box can be tightly closed. According to the invention described in claim 3, by fitting some holes of the locking piece of the top cover to the protrusion of the locking device of the outer box from the outside, the locking piece of the top cover is caught by the locking device of the outer box, and the top cover is firmly fitted to the upper opening of the outer box to prevent it from falling off. In addition, since a plurality of holes are arranged in the longitudinal direction of the locking piece, the flexibility of the locking piece can be improved and the weight can be reduced.

[0019] According to the invention described in claim 4, an automatic opening / closing support member that enables automatic opening and closing of the top cover relative to the top of the board storage box is provided on the locking piece, so that it is possible to automate the attachment and detachment of the top cover and the attachment and detachment of the locking piece without significantly changing the appearance of the top cover. Also, since the blocking material of the automatic opening / closing support member is attracted to the suction member of the automatic opening / closing device, a negative pressure can be generated between the approximately flat blocking material and the suction member, and the locking piece swings in response to the movement of the automatic opening / closing device, making it possible to automate the attachment and detachment of the top cover and the attachment and detachment of the locking piece.

[0020] Claim 5 stated According to the invention, it is possible to obtain a substrate storage container in which the attachment and detachment of the top cover and the attachment and detachment of the locking pieces can be automated without significantly changing the appearance of the top cover. [Brief description of the drawings]

[0021] [Figure 1] 1 is a perspective explanatory view showing a schematic diagram of an embodiment of a lid for a substrate storage container and a substrate storage container according to the present invention; [Diagram 2] 1 is a front view illustrating a schematic diagram of an embodiment of a lid for a substrate storage container and a substrate storage container according to the present invention; [Diagram 3]1 is a perspective explanatory view showing a schematic view of the inside of an upper lid and a locking piece in an embodiment of a lid body for a substrate storage container and a substrate storage container according to the present invention; [Figure 4] FIG. 4 is a perspective view of a main part, showing a schematic view of a portion IV in FIG. [Diagram 5] 1 is a perspective explanatory view showing a schematic view of an upper lid and an unbent locking piece thereof in an embodiment of a lid body for a substrate storage container and a substrate storage container according to the present invention; FIG. [Figure 6] 1 is a perspective explanatory view showing a schematic view of an upper lid and a locking piece bent outwardly above the upper lid in an embodiment of a lid body for a substrate storage container and a substrate storage container according to the present invention; FIG. [Figure 7] 1 is a front view illustrating an example of an upper lid and a locking piece bent outwardly above the upper lid in an embodiment of a substrate storage container lid and a substrate storage container according to the present invention; [Figure 8] 11 is a perspective explanatory view showing a schematic view of an upper lid and its locking piece in a second embodiment of the lid body of a substrate storing container and the substrate storing container according to the present invention. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0022] A preferred embodiment of the present invention will now be described with reference to the drawings. As shown in Figures 1 to 7, the substrate storage container in this embodiment comprises a substrate storage box 1 for storing a plurality of small semiconductor wafers, a top lid 10 for opening and closing the upper opening of the substrate storage box 1, and an endless gasket interposed between the substrate storage box 1 and the top lid 10. The top lid 10 is provided with a plurality of locking pieces 11 that lock with locking devices 3 on the peripheral wall of the substrate storage box 1, and each locking piece 11 is provided with an automatic opening and closing support member 20 that enables automatic opening and closing of the top lid 10 relative to the top of the substrate storage box 1. This contributes to the achievement of Goal 10 of the SDGs (the United Nations' International Goals for Sustainable Development, which consist of 17 global goals and 169 targets (achievement criteria)) adopted at the United Nations Summit.

[0023] Although not shown, the multiple semiconductor wafers are, for example, 8-inch (200 mm) small-diameter silicon wafers, and an orientation flat or notch for alignment is formed in part of the peripheral edge of the silicon wafer. For example, 25 such multiple semiconductor wafers are stored side by side in the substrate storage box 1.

[0024] 1 and 2, the substrate storage box 1 comprises an outer box 2 which is cylindrical and has an open top and a closed bottom, and an inner box which is detachably fitted into the outer box 2 to store a plurality of semiconductor wafers in an aligned manner. The outer box 2 and the inner box are molded from a molding material, and examples of the resin used for the molding material include polycarbonate resin, cycloolefin polymer, polyetherimide resin, polyethersulfone resin, polyetheretherketone resin, polypropylene resin, and polybutylene terephthalate resin. In addition to the above resins, conductive materials such as conductive carbon, conductive fiber, metal fiber, and conductive polymers, antistatic agents, and ultraviolet absorbers are selectively added to the molding material.

[0025] The outer box 2 is molded into a rectangular cylinder with a raised bottom using, for example, inexpensive polypropylene (PP) resin, which has excellent heat resistance, chemical resistance, and mechanical strength, and the upper end of the open top is made thin to fit tightly with a packing. Locking devices 3 with protrusions 4 are integrally formed on the upper part of both side walls, which are the peripheral walls of this outer box 2, and polygonal tapered protrusions 4 are integrally formed on the front and rear of each locking device 3.

[0026] The inner box is molded into a generally rectangular tubular cassette using, for example, inexpensive polypropylene resin (not shown) that has excellent heat resistance, chemical resistance, and mechanical strength, and has upper and lower openings, with the upper opening being wider and the lower opening being narrower than the upper one. A pair of opposing side walls of the inner box gradually curve downward, with the lower parts approaching each other to prevent the semiconductor wafers from falling out. A plurality of alignment grooves extending in the vertical direction are formed in an array on the inner surface of the pair of side walls, and the peripheral parts of the semiconductor wafers are inserted into the alignment grooves to store the semiconductor wafers in an upright aligned state.

[0027] 1 to 7, the top cover 10 is molded into a substantially rectangular tray shape using, for example, polycarbonate (PC) resin, which has excellent impact resistance, heat resistance, weather resistance, and dimensional stability, and has a pressing retainer for semiconductor wafers attached to the inner ceiling, which is detachably fitted to the upper opening of the outer box 2. The molding material of this top cover 10 is not particularly limited, but may be, for example, the same molding material as that of the outer box 2 and the inner box. In addition, although not shown, the pressing retainer has a frame body attached to the center of the ceiling inside the top cover 10, and a plurality of flexible, substantially L-shaped elastic pieces protrude from both the left and right sides of this frame body, and each elastic piece presses against the peripheral portion of the semiconductor wafer to prevent the semiconductor wafer from shifting or rattling.

[0028] On both sides of the top cover 10, flexible, roughly plate-shaped locking pieces 11 are integrally formed in a hanging state so as to be able to swing up and down, and each locking piece 11 is formed horizontally long in the front-to-rear direction so that it can face the locking device 3 of the outer box 2 from the outside when the top cover 10 is fitted to the board storage box 1, and a plurality of holes 12 are drilled in the longitudinal direction of the locking piece 11. These multiple holes 12 are, for example, a fitting elongated hole 13, a horizontally elongated hole 14, and a fitting elongated hole 13 arranged in a line, and some of the holes 12, specifically a pair of the fitting elongated holes 13, are fitted and locked to the protrusions 4 of the locking device 3 from the outside.

[0029] Although not shown, the packing is formed into an elastic frame shape using a specified elastomer, and is interposed between the upper end of the outer box 2 of the substrate storage box 1 and the inner peripheral surface of the upper lid 10, whereby it deforms as a sealing member and functions to improve the airtightness of the substrate storage container. The specified elastomer for this packing is not particularly limited, but examples thereof include silicone rubber, fluororubber, and thermoplastic elastomer.

[0030] 3, 4 and 7, the automatic opening / closing support member 20 is made of a magnet 21 or a ferromagnetic material attracted to the magnet 21, either of which is selectively provided on each locking piece 11 of the top cover 10, and the locking pieces 11 of the top cover 10 are attracted by magnetic force to an automatic opening / closing device that automatically opens and closes the top cover 10 relative to the top of the board storage box 1. The magnet 21 is not particularly limited, but may be, for example, a permanent magnet 22 made of a ferrite magnet, a neodymium magnet, an alnico magnet, or a samarium magnet, or an electromagnet, preferably a permanent magnet 22. When the permanent magnet 22 is used, it is insert-molded in the locking piece 11 of the top cover 10, or formed into a plurality of elongated strips and bonded to the lower inner surface or lower outer surface of the locking piece 11 facing the locking device 3.

[0031] The automatic opening and closing device is not particularly limited, but for example, it may comprise a lifting body that can at least be raised and lowered relative to the top cover 10, a number of suction pads supported by the lifting body for vacuum-adsorbing the ceiling surface of the top cover 10 from above, and a pair of opening and closing claws that are supported by the lifting body and can swing up and down to swing the locking piece 11 of the top cover 10, with the number of suction pads being connected to a vacuum pump or the like, and electromagnets that generate magnetic force when electricity is passed through them are selectively installed on the pair of opening and closing claws, and the locking piece 11 with the permanent magnet 22 of the top cover 10 is attracted to the electromagnets by magnetic force.

[0032] The ferromagnetic material is made of a metal material such as an iron plate, an iron piece, or a nickel piece, and when a permanent magnet 22 is not provided on the locking piece 11 of the top cover 10, the metal material is insert molded into the locking piece 11 of the top cover 10, or the metal material is formed into multiple elongated bands and adhered to the lower inner surface or lower outer surface of the locking piece 11 facing the locking device 3, and the locking piece 11 with this metal material is attracted by magnetic force to the electromagnets of a pair of opening and closing claws of the automatic opening and closing device.

[0033] Such an automatic opening / closing support member 20 does not require any particular type of magnet 21 or ferromagnetic material, but from the standpoint of reliably swinging the locking piece 11 of the top lid 10 and reliably automatically opening and closing the top lid 10, it is desirable that a permanent magnet 22 is provided on the locking piece 11 of the top lid 10 and an electromagnet is installed in the opening / closing claw of the automatic opening / closing device.

[0034] In the above configuration, when small semiconductor wafers are stored in the substrate storage container and the top lid 10 is automatically fitted to the upper opening of the outer box 2 for transport, first, a plurality of semiconductor wafers are aligned and stored in the inner box, and the inner box is fitted into the outer box 2 from above. Before or after this operation, the top lid 10 is vacuum-adsorbed in a state where it is positioned on a plurality of suction pads of the automatic opening / closing device. In addition, each of the locking pieces 11 with the permanent magnets 22 of the top lid 10 is held by magnetic force by the opening / closing claws with electromagnets of the automatic opening / closing device, and maintains a swinging state while bending evenly upward and outward as the opening / closing claws swing upward to open (see FIG. 6).

[0035] Once the inner box is fitted into the outer box 2, the outer box 2 and the lifting body of the automatic opening and closing device are positioned so that they face each other in the vertical direction, and the lifting body of the automatic opening and closing device is lowered to fit the top lid 10, which has been vacuum-sucked into the upper opening of the outer box 2, from above. The pair of opening and closing claws of the lifting body are then closed and swung downward to fit and lock the pair of locking pieces 11 of the top lid 10 into the protrusions 4 of the locking devices 3 of the outer box 2, respectively. This allows the top lid 10 to automatically fit into the upper opening of the outer box 2, and small semiconductor wafers to be stored and transported.

[0036] Next, when the top lid 10 is automatically removed from the outer box 2 and small semiconductor wafers are taken out of the substrate storage container for use, first, the substrate storage container and the lifting body of the automatic opening and closing device are positioned so that they face each other in the vertical direction, the lifting body of the automatic opening and closing device is lowered so that the multiple suction pads come into contact with the ceiling surface of the top lid 10, each of the opening and closing claws of the lifting body is brought into contact with the locking pieces 11 of the top lid 10 from the outside so that the locking pieces 11 are held by the opening and closing claws by magnetic force, and then each of the opening and closing claws is swung open upward to swing the locking pieces 11 upward while bending them (see arrows in Figure 7), thereby removing the pair of locking pieces 11 of the top lid 10 from the locking devices 3 of the outer box 2.

[0037] Once the pair of locking pieces 11 of the top lid 10 have been removed from the locking device 3 of the outer box 2 in this manner, the top lid 10 is vacuum-sucked onto the multiple suction pads of the lifting body, the lifting body is raised to remove the top lid 10 from the top of the outer box 2, the inner box is pulled out from the outer box 2, and then the multiple semiconductor wafers are successively pulled out from the inner box, whereby the top lid 10 can be automatically removed from the outer box 2, and the small semiconductor wafers can be removed from the substrate storage container for use.

[0038] According to the above-mentioned configuration, the top lid 10 of the substrate storage container can be automatically attached and detached, which eliminates the risk of contamination of small semiconductor wafers, and is expected to lead to the miniaturization and improved cleanliness of semiconductor devices, thereby improving the performance of semiconductor devices. In addition, because the top lid 10 is automatically opened and closed, the load acting on the top lid 10 and its locking piece 11 can be made uniform.

[0039] Furthermore, automatic opening and closing instead of manual work reduces friction between the locking device 3 of the outer box 2 and the locking piece 11 of the top cover 10, which is expected to greatly suppress dust generation and prevent contamination of small semiconductor wafers and damage to the substrate storage box 1. In addition, since there is no change in the appearance of the top cover 10, it is possible to ensure compatibility with other devices.

[0040] Also, because the magnetic force brings the opening / closing claw and the locking piece 11 into close contact with each other, and the locking piece 11 swings in conjunction with the movement of the opening / closing claw, even if the opening / closing claw and the locking piece 11 are slightly misaligned, the top cover 10 can be automatically opened and closed. Furthermore, the locking pieces 11 are integrally formed in a hanging state on both sides of the top cover 10, and furthermore, the amount of polycarbonate resin required for molding is reduced by drilling the horizontally elongated through holes 14 in each locking piece 11, thereby improving the flexibility of the locking piece 11 at low cost.

[0041] Next, FIG. 8 shows a second embodiment of the present invention. In this case, the automatic opening / closing support member 20 is a substantially flat blocking material 23 that blocks the remaining horizontally elongated hole 14, which is one of the multiple holes 12 in the locking piece 11, and this blocking material 23 is adapted to be attached to the suction cup of the opening / closing claw of the automatic opening / closing device.

[0042] The locking pieces 11 are hung from the side of the top lid 10 and molded as one piece, and during this integral molding, the oblong holes 14 are blocked flat with polycarbonate resin to expand the planar area, and this blocked polycarbonate resin forms the automatic opening / closing support member 20 as a blocking material 23. The suction cups are molded to be elastically deformable from a rubber material such as nitrile rubber, silicone rubber, or fluororubber, and from the viewpoint of uniformly and reliably swinging the locking pieces 11 of the top lid 10, a plurality of them are attached in a row to the opening / closing claws of the automatic opening / closing device, and are pressed against and deformed by the polycarbonate resin filling the oblong holes 14 of the locking pieces 11, i.e., the flat and smooth surface of the blocking material 23, to be adsorbed.

[0043] In the above configuration, when small semiconductor wafers are stored in the substrate storage container and the top lid 10 is automatically fitted to the upper opening of the outer box 2 for transport, first, multiple semiconductor wafers are aligned and stored in the inner box, and the inner box is fitted into the outer box 2 from above. Before or after this operation, the top lid 10 is vacuum-adsorbed in a state where it is positioned on multiple suction pads of the automatic opening / closing device. In addition, each of the locking pieces 11 of the top lid 10 is held by the opening / closing claws of the automatic opening / closing device due to the negative pressure action of the suction cups, and maintains a swinging state while bending evenly outward as the opening / closing claws swing upward to open.

[0044] Once the inner box is fitted into the outer box 2, the outer box 2 and the lifting body of the automatic opening and closing device are positioned so that they face each other in the vertical direction, and the lifting body of the automatic opening and closing device is lowered to fit the top lid 10, which has been vacuum-sucked into the upper opening of the outer box 2, from above. The pair of opening and closing claws of the lifting body are then closed and swung downward to fit and lock the pair of locking pieces 11 of the top lid 10 into the protrusions 4 of the locking devices 3 of the outer box 2, respectively. This allows the top lid 10 to automatically fit into the upper opening of the outer box 2, and small semiconductor wafers to be stored and transported.

[0045] Next, when the top lid 10 is automatically removed from the outer box 2 and small semiconductor wafers are taken out of the substrate storage container for use, first the substrate storage container and the lifting body of the automatic opening and closing device are positioned so that they face each other in the vertical direction, the lifting body of the automatic opening and closing device is lowered so that the multiple suction pads come into contact with the ceiling surface of the top lid 10, and each opening and closing claw of the lifting body is brought into contact with the locking pieces 11 of the top lid 10 from the outside so that the locking pieces 11 are held by the opening and closing claws by the negative pressure action of the deformed suction cups, and then each opening and closing claw is swung open upward to swing the locking pieces 11 outward while bending them, thereby removing the pair of locking pieces 11 of the top lid 10 from the locking devices 3 of the outer box 2.

[0046] Once the pair of locking pieces 11 of the top lid 10 have been removed from the locking device 3 of the outer box 2 in this way, the top lid 10 is vacuum-sucked onto the multiple suction pads of the lifting body, the lifting body is raised to remove the top lid 10 from the top of the outer box 2, the inner box is pulled out from the outer box 2, and then the multiple semiconductor wafers are pulled out one by one from the inner box, whereby the top lid 10 is automatically removed from the outer box 2, and the small semiconductor wafers can be taken out and used from the substrate storage container. The other parts are the same as those of the above embodiment, so a description thereof will be omitted.

[0047] In this embodiment, the same effects as those of the above embodiment can be expected, and moreover, by merely slightly changing the shape of the locking piece 11 of the top lid 10, the top lid 10 of the substrate storage container can be automatically attached and detached, so that it is expected that the semiconductor devices can be made finer and cleaner, and it is clear that the performance of the semiconductor devices can be improved. In addition, since the top lid 10 is automatically opened and closed, the load acting on the top lid 10 and its locking piece 11 can be made uniform. Furthermore, since there is no need to install an electromagnet in the opening and closing claw of the automatic opening and closing device, it is expected that the configuration of the automatic opening and closing device can be greatly simplified.

[0048] In addition, although it is preferable to automate the insertion and removal of the inner box into and from the outer box 2 in the above embodiment, manual operation is also acceptable if no particular hindrance is caused. Also, the packing may be divided into multiple pieces as necessary. Furthermore, the top lid 10 may be a newly manufactured top lid 10 or an existing product. Also, in the above embodiment, the locking pieces 11 are integrally formed on both sides of the top lid 10, but separate locking pieces 11 may be pivotally supported on both sides of the top lid 10 via pins or the like so as to be able to swing.

[0049] In the above embodiment, the permanent magnet 22 is provided on the lower part of the inner surface of the locking piece 11, but the present invention is not limited to this. For example, the permanent magnet 22 or ferromagnetic material may be provided on both sides of the inner surface of the locking piece 11, or the permanent magnet 22 or ferromagnetic material may be provided on the entire inner surface of the locking piece 11. Furthermore, the blocking material 23 of the locking piece 11 is attracted to the elastically deformable suction cup of the opening and closing claw, but the present invention is not limited to this. For example, a plurality of suction pads, which are suction members, may be arranged on each opening and closing claw, and the blocking material 23 may be vacuum-adsorbed to the plurality of suction pads. [Industrial Applicability]

[0050] The lid for a substrate storage container and the substrate storage container according to the present invention are used in the field of manufacturing semiconductor devices, precision instruments, and the like. [Explanation of symbols]

[0051] 1 PCB storage box 2 Outer box 3. Locking device 4 protrusions 10 Top lid 11 Locking piece 12 holes 13 Fitting slots (some holes) 14 Horizontally elongated hole (remaining hole) 20 Automatic opening and closing support parts 21 Magnet 22 Permanent magnets 23 Occlusion material

Claims

1. A lid for a substrate storage container, comprising a locking piece provided on a removable top lid for opening and closing the top opening of the substrate storage box, the locking piece being adapted to hook onto a locking device on a peripheral wall of the substrate storage box, and an automatic opening / closing support member provided on the locking piece for enabling automatic opening and closing of the top lid relative to the top of the substrate storage box, The automatic opening / closing support member is either a magnet or a magnetic material that is attracted to a magnet, and either the magnet or the magnetic material is provided on a locking piece of the top lid, and the locking piece of the top lid is attracted to the automatic opening / closing device by magnetic force.

2. The substrate storage box includes a cylindrical outer box with a bottom, and an inner box that can be freely attached and detached into the outer box to store multiple substrates each having a width of 200 mm or less in an aligned manner, and a lid for a substrate storage container as described in claim 1, wherein a locking device with a protrusion is formed on the upper part of each side wall of the outer box.

3. A lid for a substrate storage container as described in claim 2, wherein the top lid is formed into an approximately rectangular shape in plan view so as to be able to fit into the upper opening of the outer box, and approximately plate-shaped locking pieces are formed on both sides of the top lid so as to be able to swing freely, and each locking piece is formed horizontally with a plurality of holes arranged in the longitudinal direction, some of which can be fitted into protrusions of the locking device.

4. A lid for a substrate storage container, comprising a removable top lid for opening and closing the top opening of the substrate storage box, a locking piece for engaging a locking device on a peripheral wall of the substrate storage box, and an automatic opening / closing support member for enabling the top lid to be automatically opened and closed relative to the top of the substrate storage box, The substrate storage box includes a cylindrical outer box with a bottom, and an inner box that is removably fitted into the outer box and can store a plurality of substrates having a width of 200 mm or less in an aligned manner, and a locking device with a protrusion is formed on each of the upper side walls of the outer box, The top cover is formed in a generally rectangular shape in plan view so that it can be fitted to the upper opening of the outer box, and generally plate-shaped locking pieces are formed on both sides of the top cover so as to be able to swing freely, and each locking piece is formed horizontally long with a number of holes arranged in the longitudinal direction, some of which can be fitted to protrusions of a locking tool, The automatic opening and closing support member is a substantially flat blocking material that blocks the remaining holes among the multiple holes in the locking piece, and this blocking material is adsorbed by an adsorption member of the automatic opening and closing device.

5. A substrate storage container comprising: a cylindrical outer box with a bottom; an inner box that is fitted into the outer box to store a plurality of substrates in an aligned manner; a top lid that opens and closes the upper opening of the outer box; and a deformable sealing member interposed between the outer box and the top lid, wherein the top lid is a lid body of a substrate storage container described in any one of claims 1 to 4.

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