How to dress cutting blades

Abstract

To provide a cutting blade of which breakage is hard to occur even if a blade tip projection amount is increased.SOLUTION: A cutting blade contains abrasive grains and a binder, and has an annular cutting edge part in which the abrasive grains are fixed by the binder. In the cutting blade, an annular reinforcement member for reinforcing a strength of the cutting edge part is provided integrally with the cutting edge part on each of one face of the cutting edge part and the other face positioned on a side opposite to one face. Preferably, the reinforcement member does not contain abrasive grains, and is formed from a resin bond or a metal bond.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a cutting blade for use in a cutting device. [Background technology]

[0002] When manufacturing device chips from a disk-shaped silicon wafer, a grinding machine, a cutting machine, etc. are used. For example, first, devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) are formed on the front side of the wafer, the back side is thinned using a grinding machine, and then the wafer is divided into multiple device chips using a cutting machine.

[0003] Cutting devices are also used when dividing a package substrate, in which multiple device chips arranged on a base substrate are covered with a sealing material (mold resin) such as resin, into multiple packages (device packages) such as CSPs (chip size packages) and QFNs (quad flat non-leaded packages).

[0004] The cutting device is equipped with a cutting unit including a cylindrical spindle. A rotary drive source such as a motor is connected to one end of the spindle, and a blade mount is fixed to the other end of the spindle (see, for example, Patent Document 1). The blade mount has a cylindrical boss portion, and a receiving flange is provided integrally with the boss portion on the outer periphery of the boss portion.

[0005] An annular cutting blade is disposed on the mount blade. For example, a hubless blade (washer type blade) is used as the cutting blade, which does not have a base and is entirely made of bond and abrasive grains and functions as a cutting edge.

[0006] When the cutting blade is attached to the spindle, the opening of the cutting blade is first inserted into the boss. In this state, the holding flange is inserted into the boss, and a nut is then screwed onto the outer periphery of the boss. As a result, the cutting blade is sandwiched between the receiving flange and the holding flange in the thickness direction.

[0007] The outer diameters of the receiving flange and the pressing flange are substantially the same, and the outer diameter of the cutting blade before use is larger than the outer diameters of the receiving flange and the pressing flange. Therefore, the cutting blade before use protrudes a predetermined length in the radial direction of the cutting blade. The radial protrusion amount of the cutting blade (i.e., the amount of cutting edge exposure) is set to an optimal value depending on the type and thickness of the cutting blade, etc.

[0008] If the blade exposure is too large, the cutting blade will oscillate in the thickness direction when cutting the workpiece, and the cutting edge will be easily damaged. Also, if the blade exposure is too large, the workpiece may have a curved cut (the cut line is misaligned or curved at the entrance and exit), which may reduce the quality of the workpiece.

[0009] In particular, resin blades generally have a small cutting edge exposure because the bond strength is weaker than electroformed bonds, metal bonds, etc. On the other hand, if the cutting edge exposure is too small, the cutting blade quickly wears out and becomes unusable. [Prior art documents] [Patent documents]

[0010] [Patent Document 1] JP 2007-258590 A Summary of the Invention [Problem to be solved by the invention]

[0011] Usually, when a cutting blade is worn down and the amount of cutting edge exposure is reduced, the cutting blade is discarded. Therefore, the amount of cutting edge exposure corresponds to the life of the cutting blade. On the other hand, when the amount of cutting edge exposure is reduced, it is possible to extend the life of the cutting blade by replacing the blade mount and the pressing flange with blade mounts and pressing flanges each having an outer diameter smaller than the outer diameter of the worn cutting blade.

[0012] However, this requires additional work such as replacing the blade mount and receiving flange, and preparation work after the replacement and before restarting cutting, which reduces productivity. The present invention has been made in consideration of the above problems, and has an object to provide a cutting blade that is less likely to be damaged even if the cutting edge exposure amount is increased. [Means for solving the problem]

[0016] According to one aspect of the present invention, the method includes a holding step of holding a dresser board on a chuck table, and a cutting blade protruding step of cutting a dresser board with a cutting blade including an annular cutting edge portion containing abrasive grains and a resin bond binder, the abrasive grains being fixed by the binder, and annular reinforcing members provided integrally with the cutting edge portion on each of one surface of the cutting edge portion and the other surface located opposite to the one surface, to reinforce the strength of the cutting edge portion, and removing a larger outer periphery of the reinforcing member than an outer periphery of the cutting edge portion, thereby causing a radial end of the cutting edge portion to protrude outward beyond the radial end of the reinforcing member. The reinforcing member of the cutting blade is formed of a metal bond. A method for dressing a cutting blade is provided. 。 Effect of the Invention

[0017] A cutting blade according to one aspect of the present invention is a cutting blade including abrasive grains and a binder, the abrasive grains being fixed by the binder, and an annular reinforcing member for reinforcing the strength of the cutting edge portion is provided integrally with the cutting edge portion on each of one side and the other side located opposite to the one side. Therefore, compared to the amount of exposure of the cutting edge of a cutting blade that does not have a reinforcing member, there is an advantage that the cutting blade is less likely to break even if the amount of exposure of the cutting edge is increased.

[0018] In addition, even if the cutting edge portion wears down with use, by dressing the cutting blade, the outer diameter of the reinforcing member can be selectively made smaller than the outer diameter of the cutting edge portion, so that the cutting edge portion can protrude relative to the reinforcing member.

[0019] In this way, even if the cutting edge is extended, the cutting blade is unlikely to break. Furthermore, even if the cutting edge is worn, the cutting edge can be caused to protrude from the reinforcing member by applying dressing to the cutting blade, thereby extending the life of the cutting blade. [Brief description of the drawings]

[0020] [Figure 1] FIG. 1(A) is a perspective view of one surface of a cutting blade, and FIG. 1(B) is a perspective view of the other surface of the cutting blade. [Diagram 2] FIG. 2 is a cross-sectional view of a cutting blade. [Diagram 3] FIG. [Figure 4] FIG. 4(A) is a diagram showing a state in which the cutting edge portion is worn, and FIG. 4(B) is a diagram showing a state in which the cutting edge portion protrudes from the reinforcing member. [Diagram 5] FIG. 13 is a diagram showing how a cutting blade is dressed. [Figure 6] FIG. 2 is a flow diagram of a method for dressing a cutting blade. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] An embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. First, a cutting blade 2 will be described with reference to Fig. 1(A) to Fig. 2. Fig. 1(A) is a perspective view of one surface side of the cutting blade 2, and Fig. 1(B) is a perspective view of the other surface side of the cutting blade 2. Fig. 2 is a cross-sectional view of the cutting blade 2.

[0022] The cutting blade 2 has an annular cutting edge portion 4. The cutting edge portion 4 has one surface 4a and another surface 4b, which are substantially flat, and an opening 4c. For example, the outer diameter of the cutting edge portion 4 is 58 mm, and the diameter of the opening 4c is 40 mm. In addition, the thickness from the one surface 4a to the other surface 4b is a predetermined value (for example, 0.3 mm) that is 0.02 mm or more and 3.00 mm or less.

[0023] The cutting edge portion 4 has abrasive grains 6 such as diamond, cBN (cubic boron nitride), etc., and each abrasive grain 6 is fixed to each other with a bond (binding material) 8 such as a resin bond, an electroformed bond, a metal bond, etc. In this manner, the cutting edge portion 4 is composed only of the abrasive grains 6 and the bond 8. Note that in FIG. 2, the size of the abrasive grains 6 is exaggerated for convenience, but the actual abrasive grains 6 have a size on the order of μm.

[0024] A first reinforcing member 10a having an annular shape is fixed to one surface 4a of the cutting portion 4. Similarly, a second reinforcing member 10b having an annular shape is fixed to the other surface 4b of the cutting portion 4. The first reinforcing member 10a has an opening 10c having the same diameter as the opening 4c, and similarly, the second reinforcing member 10b has an opening 10d having the same diameter as the opening 4c.

[0025] As shown in FIG. 2, the centers of diameters of the cutting edge portion 4, the first reinforcing member 10a, and the second reinforcing member 10b are substantially aligned, and the centers of the openings 4c, 10c, and 10d are also substantially aligned.

[0026] The thickness of each of the first reinforcing member 10a and the second reinforcing member 10b may be approximately the same as that of the cutting edge portion 4, or may be thinner or thicker than the cutting edge portion 4. The thickness of each of the first reinforcing member 10a and the second reinforcing member 10b is a predetermined value not less than 0.01 mm and not more than 5.00 mm (for example, 0.35 mm).

[0027] The first reinforcing member 10a and the second reinforcing member 10b are provided integrally with the cutting edge portion 4, and constitute a reinforcing member 12 for reinforcing the strength of the cutting edge portion 4. The reinforcing member 12 does not have abrasive grains 6, and is formed, for example, of a resin bond (i.e., a sintered resin body) used in the cutting blade 2, but may be formed of a metal bond (i.e., a sintered metal body).

[0028] When the outer circumferential portion 12a of the first reinforcing member 10a and the outer circumferential portion 12b of the second reinforcing member 10b are each removed by a predetermined amount (e.g., 4 mm) in the radial direction 14, the end portion 12c of the reinforcing member 12 in the radial direction 14 is positioned more inward than the end portion 4d of the cutting edge portion 4 in the radial direction 14. As a result, the cutting edge portion 4 protrudes by a predetermined protrusion amount 16 beyond the reinforcing member 12 in the radial direction 14, and the side surface of the tip portion of the cutting edge portion 4 is exposed.

[0029] Here, an example of a manufacturing method of the cutting blade 2 in which the cutting edge portion 4 has abrasive grains and a resin bond, and the reinforcing member 12 is formed of a resin bond, will be described. First, a plurality of abrasive grains 6 and a thermosetting resin are mixed to form a mixture. Next, the mixture is molded into an annular molded body using a die.

[0030] During molding, for example, 200 kgf / cm 2 More than 1000kgf / cm 2 The mixture is pressed with a pressure specified below, and the mold is heated so that the mixture reaches a specified temperature of 100°C or more and 300°C or less.

[0031] Next, the molded body is sintered at a temperature of 100° C. or higher and 300° C. or lower for 20 to 40 hours to form a circular annular sintered body (i.e., the cutting edge portion 4). After that, sintered bodies of thermosetting resin having approximately the same diameter as the cutting edge portion 4 are placed on one surface 4a and the other surface 4b of the cutting edge portion 4, respectively.

[0032] Then, the laminated body, in which the fired body on one surface 4a, the cutting edge portion 4, and the fired body on the other surface 4b are stacked, is pressed with a weight or the like and heat-treated at a predetermined temperature (e.g., 180°C) for a predetermined time (e.g., 8 hours). In this way, the cutting blade 2 in which the cutting edge portion 4 and the reinforcing member 12 are integrated by thermocompression is manufactured.

[0033] Alternatively, a laminate may be formed by disposing annular sintered metal bodies having approximately the same diameter as the cutting edge 4 on each of the side 4a and the other side 4b of the resin-bonded cutting edge 4, and the laminate may be heat-treated at a predetermined temperature for a predetermined time while being pressed. In this case, reinforcing members 12 formed of metal bond are integrally provided on both sides of the resin-bonded cutting edge 4.

[0034] Similarly, a reinforcing member 12 formed with a resin bond or a reinforcing member 12 formed with a metal bond may be integrally provided on both sides of the cutting edge portion 4 having a metal bond. Also, a reinforcing member 12 formed with a resin bond or a reinforcing member 12 formed with a metal bond may be integrally provided on both sides of the cutting edge portion 4 having an electroformed bond.

[0035] The manufacturing method of the cutting blade 2 is not limited to the above example. The pressure, temperature, time, etc. during the heat treatment are appropriately changed depending on the material of the cutting blade 2 and the required characteristics of the cutting blade 2. In the above description of the manufacturing method, the cutting edge portion 4 and the reinforcing member 12 have approximately the same diameter, but the diameter of the cutting edge portion 4 may be larger than the diameter of the reinforcing member 12.

[0036] Next, the cutting unit 20 to which the cutting blade 2 is attached will be described. Fig. 3 is an exploded perspective view of the cutting unit 20. In the following description, the X-axis direction (processing feed direction), the Y-axis direction (indexing feed direction), and the Z-axis direction (cutting feed direction, height direction) are mutually orthogonal.

[0037] The cutting unit 20 has a cylindrical spindle housing 22 having a longitudinal portion in the Y-axis direction. A cylindrical spindle 24 is rotatably accommodated in the spindle housing 22. A rotation drive source such as a motor is connected to one end of the spindle 24.

[0038] A blade mount 26 is attached to the other end (tip) of the spindle 24. The blade mount 26 has a cylindrical boss portion 28 on the opposite side to the mounted portion that is attached to the spindle 24. A male thread 30 is formed on the outer periphery of the tip of the boss portion 28.

[0039] A receiving flange 32 is provided on the outer periphery of the boss portion 28 integrally with the boss portion 28. The receiving flange 32 has an annular support surface 32a that contacts the first reinforcing member 10a or the second reinforcing member 10b of the cutting blade 2. Note that, although the second reinforcing member 10b contacts the support surface 32a in FIG. 3, the first reinforcing member 10a may contact the support surface 32a.

[0040] With the blade mount 26 attached to the tip of the spindle 24 , the bolt 34 is inserted into the boss portion 28 and then fastened to the spindle 24 , whereby the blade mount 26 is fixed to the spindle 24 .

[0041] Thereafter, the openings of the cutting blade 2 (i.e., openings 4c, 10c, 10d) are inserted into the boss portion 28, and then the opening 36a of the annular pressing flange 36 is inserted into the boss portion 28. Then, by fastening the annular nut 38 to the male thread 30, the cutting blade 2 is clamped between the receiving flange 32 and the pressing flange 36.

[0042] The cutting blade 2 of this embodiment has a cutting edge portion 4 and a reinforcing member 12 that are provided integrally with each other. Therefore, compared to the amount of protrusion of the cutting edge of a cutting blade consisting of only the cutting edge portion 4, there is an advantage that the cutting blade 2 is less likely to be damaged even if the amount of protrusion of the cutting edge is increased.

[0043] Here, a description will be given of other components of a cutting device (not shown) in which the cutting unit 20 is disposed. A Y-axis / Z-axis movement mechanism (not shown) for moving the cutting unit 20 along the Y-axis and Z-axis directions is connected to the upper portion of the cutting unit 20.

[0044] A chuck table 40 (see FIG. 5) is disposed below the cutting unit 20. The chuck table 40 has a holding surface (not shown) that suction-holds a workpiece (not shown). A rotation drive source (not shown), such as a motor, that rotates the chuck table 40 around a rotation axis parallel to the Z-axis direction is provided below the chuck table 40.

[0045] The output shaft of the rotary drive source is connected to the lower part of the chuck table 40. A ball screw type X-axis direction moving unit (not shown) is disposed below the rotary drive source. When the X-axis direction moving unit is operated, the chuck table 40 moves along the X-axis direction together with the rotary drive source.

[0046] When cutting the workpiece, first, the workpiece is suction-held via a dicing tape (not shown) on the holding surface of the chuck table 40. Next, while rotating the cutting blade 2 at high speed, the lower end of the cutting blade 2 is positioned at a height between the holding surface and the upper surface of the workpiece.

[0047] Then, by operating the X-axis direction moving unit, the cutting blade 2 and the chuck table 40 are moved relatively along the X-axis direction, and the workpiece is cut. However, while cutting the workpiece, the cutting edge portion 4 may wear and the protrusion amount 16 may become smaller.

[0048] 4(A) is a diagram showing a worn state of the cutting edge portion 4. In this case, by applying dressing to the cutting blade 2 using a dresser board 11, the cutting edge portion 4 can be made to protrude from the reinforcing member 12.

[0049] Fig. 4(B) is a diagram showing a state in which the cutting edge portion 4 protrudes from the reinforcing member 12. Fig. 5 is a diagram showing a state in which the cutting blade 2 is dressed, and Fig. 6 is a flow chart of a method of dressing the cutting blade 2.

[0050] When dressing the cutting blade 2, first, the dresser board 11 is held by the chuck table 40 (holding step S10). The dresser board 11 is a rectangular plate-like member having a thickness of, for example, 3 mm to 5 mm.

[0051] The dresser board 11 is made of a binder such as vitrified or resinoid mixed with abrasive grains such as white alundum (WA) or green carbon (GC). The bond and abrasive grains constituting the dresser board 11 may be appropriately changed depending on the configuration of the cutting blade 2, etc.

[0052] The dresser board 11 is integrated with a metal annular frame 19 via an adhesive tape 17. Specifically, the adhesive tape 17 is attached to one surface of the annular frame 19 so as to cover the opening of the annular frame 19, and the adhesive tape 17 is attached to a lower surface 11b of the dresser board 11 so as to be exposed to the opening.

[0053] In the holding step S10, the side of the adhesive tape 17 opposite to the side to which the dresser board 11 is attached is suction-held by the holding surface of the chuck table 40. Next, the cutting edge portion protruding step S20 is performed.

[0054] In the cutting edge portion protruding step S20, the lower end of the cutting blade 2 is positioned at a height between the holding surface of the chuck table 40 and the upper surface 11a of the dresser board 11 while the cutting blade 2 is rotated at high speed.

[0055] Then, the cutting blade 2 and the chuck table 40 are moved relatively along the X-axis direction to cause the cutting blade 2 to cut into the dresser board 11. The reinforcing member 12 does not have abrasive grains 6, and is therefore easier to remove than the cutting edge portion 4.

[0056] Therefore, the reinforcing member 12 is mainly removed according to the cutting depth, and the end 4d of the cutting edge portion 4 in the radial direction 14 protrudes outward from the end 12c of the reinforcing member 12 in the radial direction 14. In this manner, in the cutting edge portion protruding step S20, by removing more of the outer circumferential portions 12a, 12b of the reinforcing member 12 than the outer circumferential portion 4e of the cutting edge portion 4, it is possible to cause the cutting edge portion 4 to protrude relative to the reinforcing member 12.

[0057] When the reinforcing member 12 is formed by a resin bond, it is easier to obtain a selectivity to the cutting edge portion 4 in the cutting edge portion protruding step S20 compared to when the reinforcing member 12 is formed by a metal bond. Therefore, from the viewpoint of the selectivity, it is preferable to form the reinforcing member 12 by a resin bond.

[0058] In the cutting blade 2 of this embodiment, even if the cutting edge exposure amount is increased, the cutting blade 2 is unlikely to be damaged. Furthermore, even if the cutting edge portion 4 is worn, the cutting blade 2 can be dressed to cause the cutting edge portion 4 to protrude relative to the reinforcing member 12, thereby extending the life of the cutting blade 2.

[0059] In addition, the structures, methods, etc. according to the above-mentioned embodiments can be appropriately modified and implemented without departing from the scope of the purpose of the present invention. For example, in the cutting edge protruding step S20, instead of cutting the dresser board 11, dressing may be performed using a dresser board 11 on which a linear groove having a width narrower than the thickness of the cutting blade 2 and approximately corresponding to the thickness of the cutting edge portion 4 and a predetermined depth is formed.

[0060] Specifically, the lower end of the rotating cutting blade 2 is positioned at a predetermined height, and the cutting blade 2 is passed through a groove in the dresser board 11. This allows only the reinforcing member 12 to be partially removed in the radial direction 14 without removing the cutting edge portion 4. [Explanation of symbols]

[0061] 2: Cutting blade 4: Cutting edge, 4a: One side, 4b: Other side, 4c: Opening, 4d: End, 4e: Outer periphery 6: Abrasive grain, 8: Bond 10a: first reinforcing member, 10b: second reinforcing member, 10c, 10d: openings 11: dresser board, 11a: top surface, 11b: bottom surface 12: Reinforcing member, 12a, 12b: Outer periphery, 12c: End 14: Radial direction 16:Protrusion amount 17: Adhesive tape 19: Circular frame 20: Cutting unit 22: Spindle housing 24: Spindle 26: Blade mount 28: Boss Department 30: Male thread 32: receiving flange, 32a: supporting surface 34: Bolt 36: Pressing flange, 36a: Opening 38: Nut 40: Chuck table

Claims

[Claim 1] A holding step of holding a dresser board with a chuck table; a cutting blade including an annular cutting edge portion containing abrasive grains and a resin bond binder, the abrasive grains being fixed by the binder, and annular reinforcing members provided integrally with the cutting edge portion on each of one side and the other side opposite to the one side for reinforcing the strength of the cutting edge portion, is cut into the dresser board, and a cutting edge portion protruding a radial end portion of the cutting edge portion outward from a radial end portion of the reinforcing member by removing a larger amount of an outer periphery of the reinforcing member compared to an outer periphery of the cutting edge portion; Equipped with A method for dressing a cutting blade, wherein the reinforcing member of the cutting blade is formed of a metal bond.

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