ESD protection circuits, semiconductor devices, electronic devices

Abstract

To provide an ESD protection circuit that achieves both noise resistance during the operation of a circuit to be protected and voltage withstanding performance for ESD voltage.SOLUTION: An ESD protection circuit comprises: a power MOS transistor that is provided between first wiring and second wiring; a clamp circuit that is provided between the first wiring and a first node with which a gate of the power MOS transistor is connected; a first resistance that is provided between the first node and the second wiring; a MOS transistor that is provided between the first node and the second wiring; and third wiring that is supplied with a third potential generated by a constant voltage circuit of a circuit to be protected, and includes a second resistance and a first capacitor that are connected in series between a second node connected with the third wiring and the second wiring. When a connection part of the second resistance and the first capacitor is taken as a third node, a gate of the MOS transistor is connected with the third node.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to an ESD protection circuit, and a semiconductor device and electronic device equipped with the ESD protection circuit. [Background technology]

[0002] There is known a semiconductor device equipped with an ESD protection circuit that absorbs an ESD (Electro-Static Discharge) voltage to prevent the destruction of a protected circuit. For example, FIG. 2A of Patent Document 1 discloses an ESD protection circuit. FIG. 17 shows an ESD protection circuit 90 based on a circuit diagram in the document. Note that a Zener diode is connected in parallel with resistor 113 in FIG. 2A of Patent Document 1, but is omitted in FIG. 17. This is because, as described in the document, if the gate insulating film of power transistor 111 made of a power MOS transistor and resistor 113 have sufficient resistance to the assumed ESD voltage, a Zener diode is not essential.

[0003] According to the ESD protection circuit 90 of FIG. 17, when an ESD voltage is applied to the first wiring 105, which is the power supply wiring on the high potential side of the protected circuit 80, the voltage of the first wiring 105 rises and the gate-drain voltage of the power transistor 111 becomes larger than a predetermined clamp voltage, and the clamp circuit 112 breaks down. At this time, a breakdown current flows through the resistor 113, causing a voltage drop. As a result, the gate-source voltage of the power transistor 111 rises, the power transistor 111 turns on, and the voltage of the first wiring 105 is clamped to near the predetermined clamp voltage, preventing any further voltage rise. This prevents an overvoltage from being applied to the protected circuit 80. The resistor 113 is a pull-down resistor of the power transistor 111. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2015-29251 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, when the resistance value of the pull-down resistor is increased, the clamp voltage can be reduced, but there is a problem that the power transistor 111 is easily turned on unintentionally due to external noise during operation. Conversely, when the resistance value of the pull-down resistor is decreased, the circuit is less responsive to noise including high-frequency signal components, but the clamp voltage increases, and there is a problem that the protected circuit 80 cannot be protected from static electricity when a high ESD voltage is applied because the potential difference between the maximum operating voltage and the breakdown voltage of the protected circuit 80 is small. In other words, the conventional ESD protection circuit 90 has a problem that it is difficult to achieve both noise resistance during operation of the protected circuit 80 and voltage resistance against ESD voltage. [Means for solving the problem]

[0006] The ESD protection circuit according to the present application is an ESD protection circuit provided between a first wiring that supplies a first potential and a second wiring that supplies a second potential different from the first potential, and protects a protected circuit from a surge voltage, the ESD protection circuit having a power MOS transistor provided between the first wiring and the second wiring, a clamp circuit provided between the first wiring and a first node to which a gate of the power MOS transistor is connected, a first resistor provided between the first node and the second wiring, a MOS transistor provided between the first node and the second wiring, and a third wiring to which a third potential generated by a constant voltage circuit of the protected circuit is supplied, and further comprising a second resistor and a first capacitor connected in series between a second node connected to the third wiring and the second wiring, wherein when a connection point between the second resistor and the first capacitor is defined as a third node, a gate of the MOS transistor is connected to the third node, and the third potential is a potential between the first potential and the second potential.

[0007] A semiconductor device including the above ESD protection circuit.

[0008] An electronic device comprising the semiconductor device. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a circuit diagram of an ESD protection circuit according to a first embodiment. [Diagram 2] A graph showing the voltage-current characteristics of an ESD protection circuit. [Diagram 3] Graph showing the simulation results when the pull-down resistance of the ESD protection circuit is set to 2 kΩ. [Figure 4] Graph showing the simulation results when the pull-down resistance of the ESD protection circuit is set to 100 kΩ. [Diagram 5] FIG. 4 is an equivalent circuit diagram of a protected circuit during operation. [Figure 6] FIG. 11 is a circuit diagram of an ESD protection circuit according to a second embodiment. [Figure 7] 1 is a circuit diagram of an ESD protection circuit according to a different embodiment; [Figure 8] 1 is a circuit diagram of an ESD protection circuit according to a different embodiment; [Figure 9] FIG. 11 is a circuit diagram of an ESD protection circuit according to a third embodiment. [Figure 10] 1 is a circuit diagram of an ESD protection circuit according to a different embodiment; [Figure 11] 1 is a circuit diagram of an ESD protection circuit according to a different embodiment; [Figure 12] FIG. 11 is a circuit diagram of an ESD protection circuit according to a fourth embodiment. [Figure 13] FIG. 4 is a circuit diagram of an ESD protection circuit in a comparative example. [Figure 14] 1 is a circuit diagram of an ESD protection circuit according to a different embodiment; [Figure 15] FIG. 13 is a circuit diagram of an ESD protection circuit according to a fifth embodiment. [Figure 16] FIG. 13 is a schematic configuration diagram of an electronic device according to a sixth embodiment. [Figure 17] Schematic diagram of a conventional ESD protection circuit. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] EMBODIMENT 1 ***Basic circuit of ESD protection circuit*** FIG. 1 is a circuit diagram of an ESD protection circuit according to a first embodiment. The ESD protection circuit 200 of this embodiment is a protection circuit that protects the protected circuit 80 from ESD voltage.

[0011] The protected circuit 80 is, for example, a semiconductor device such as an IC (Integrated Circuit), and includes a high-voltage circuit 81 and a constant voltage circuit 82. The protected circuit 80 is electrically connected to a first wiring 105 and a second wiring 106, which are power supply wirings. The first wiring 105 supplies a first potential, and the second wiring 106 supplies a second potential different from the first potential. For example, the second wiring 106 supplies a low potential of 0V as the second potential, and the first wiring 105 supplies a high potential of 45V as the first potential. In addition, the maximum operating voltage of the high-voltage circuit 81 is 45V, and the breakdown voltage of the protected circuit 80 is 55V. The constant voltage circuit 82 is a constant voltage generating circuit including a DC / DC converter, and supplies a potential of, for example, 5V to the third wiring 107 as a third potential that is a potential between the first potential and the second potential. It should be noted that the potentials and voltages are not limited to these, and may be changed as appropriate depending on the rated operating voltage of the protected circuit 80 and the like.

[0012] The ESD protection circuit 200 is provided between the first wiring 105 and the second wiring 106, and is composed of a power transistor 11, a clamp circuit 12, a resistor 13, a transistor 14, a resistor 15, a capacitor 16, a resistor 17, and the like. The power transistor 11 is a field effect type N-channel power MOS (Metal Oxide Semiconductor) transistor. The source of the power transistor 11 is connected to the second wiring 106, and the drain is connected to the first wiring 105. Note that the connection means an electrical connection. The same applies to the following explanation. Note that in FIG. 1, the parasitic capacitance between the gate and drain of the power transistor 11 is illustrated by a dotted line as a capacitor 19.

[0013] The clamp circuit 12 is composed of a plurality of Zener diodes connected in series, with the anode side connected to the gate of the power transistor 11 and the cathode side connected to the first wiring 105. The node between the gate of the power transistor 11 and the clamp circuit 12 is defined as a first node 71. That is, the clamp circuit 12 is provided between the first wiring 105 and the first node 71. The resistor 13 is a first resistor, and is provided between the first node 71 and the second wiring 106.

[0014] The transistor 14 is an N-channel MOS transistor, and is provided between the first node 71 and the second wiring 106. The source of the transistor 14 is connected to the second wiring 106. The resistor 15 is a second resistor, one end of which is connected to the second node 72 of the third wiring 107 and the other end of which is connected to one end of the capacitor 16 . The capacitor 16 is a first capacitor, and the other end is connected to the second wiring 106. That is, the resistor 15 and the capacitor 16 are connected in series between the second node 72 and the second wiring 106 in this order.

[0015] When the connection point between resistor 15 and capacitor 16 is defined as a third node 73 , the gate of transistor 14 is connected to third node 73 . Resistor 17 is a third resistor and is provided between first node 71 and the drain of transistor 14 . According to this circuit configuration, the pull-down resistance value of the power transistor 11 can be changed by switching the transistor 14 depending on whether the protected circuit 80 is in operation or not, as will be described in detail later.

[0016] ***Voltage-current characteristics in ESD protection circuits*** FIG. 2 is a graph showing voltage-current characteristics in an ESD protection circuit. Here, the voltage-current characteristics of the conventional ESD protection circuit 90 in Fig. 17 will be described with reference to Fig. 2. In the graph of Fig. 2, the horizontal axis represents the drain voltage (V) of the power transistor 111, and the vertical axis represents the drain current (A).

[0017] 2 shows the results of a simulation of the voltage-current characteristics when an ESD pulse is applied while changing the resistance value of resistor 113, which is a pull-down resistor of power transistor 111. The simulation is based on a TLP (Transmission Line Pulse) measurement. 2, graph 91 shows the voltage-current characteristics when the pull-down resistance is 2 kΩ. Similarly, graph 92 shows the voltage-current characteristics when the pull-down resistance is 5 kΩ, graph 93 shows the voltage-current characteristics when the pull-down resistance is 10 kΩ, graph 94 shows the voltage-current characteristics when the pull-down resistance is 20 kΩ, and graph 95 shows the voltage-current characteristics when the pull-down resistance is 100 kΩ. Line segment 85 indicates the peak current of 1.33 A when the ESD pulse is 2000 V. Line segment 86 indicates the peak current of 1.93 A when the ESD pulse is 3000 V. Line segment 87 indicates the maximum operating voltage of 45 V of high-voltage circuit 81. Line segment 88 indicates the breakdown voltage of protected circuit 80, 55 V.

[0018] As shown in graph 91, when the pull-down resistance is low at 2 kΩ, almost no drain current flows until the drain voltage reaches approximately 45 V. This indicates that there is high resistance to noise from the first wiring 105 and the second wiring 106, which are the power supply wirings. On the other hand, when an ESD pulse of 3000 V is applied, the drain voltage exceeds line segment 88, which indicates the breakdown voltage of 55 V of the protected circuit 80, and it is understood that the ESD withstand voltage performance is insufficient. In more detail, the intersection of line segment 86, which indicates a peak current of 1.93 A when 3000 V is applied, and graph 91 exceeds line segment 88.

[0019] On the other hand, as shown in graph 95, when the pull-down resistance is as high as 100 kΩ, the drain current increases approximately in proportion to the increase in the drain voltage. This indicates that the resistance to noise from the first wiring 105 and the second wiring 106, which are power supply wirings, is low. If the noise resistance is low, there is a risk that the power transistor 111 may malfunction due to external noise during operation of the protected circuit 80. On the other hand, even when an ESD pulse of 3000 V is applied, the drain voltage does not exceed the line segment 88 indicating the breakdown voltage of the protected circuit 80, which is 55 V, and it is understood that the ESD withstand voltage performance is high. In more detail, the intersection of the line segment 86 indicating the peak current of 1.93 A when 3000 V is applied and the graph 95 does not reach the line segment 88.

[0020] The reason why a drain current flows is as follows: When the drain voltage of the power transistor 111 starts to rise, its high frequency components flow to the resistor 113 through the parasitic capacitor 119, causing a voltage drop, so that the gate-source voltage of the power transistor 111 also starts to rise. Then, the on-resistance of the power transistor 111 starts to decrease, so that a current starts to flow between the source and drain of the power transistor 111.

[0021] ***Simulation results using HBM test method*** FIG. 3 is a graph showing the simulation results according to the HBM test method. As mentioned above, based on the voltage-current characteristics in Figure 2, there is concern that the ESD withstand performance may be insufficient when the pull-down resistance is low, so we also carried out verification by simulation based on the HBM (Human Body Model) test method.

[0022] Fig. 3 shows the simulation results when the pull-down resistance of the ESD protection circuit 90 in Fig. 17 is set to 2 kΩ. The HBM application conditions are as follows: applied voltage is from 500 V to 4000 V in 500 V steps, discharge capacitor is 100 pF, and applied resistance is 1.5 kΩ.

[0023] The horizontal axis in FIG. 3 is time (nsec), the left vertical axis is drain current (A), and the right vertical axis is drain voltage (V). Graph 61i shows the change in drain current when 2000 V is applied, in which the surge current rises sharply at about 10 nsec, reaches a peak current, and then after about 110 nsec, decreases to about half the peak current value. Graph 62i shows the change in surge current when 3000 V is applied, in which the peak current is larger than when 2000 V is applied, but shows approximately the same tendency as graph 61i.

[0024] Graph 61v shows the change in drain voltage when 2000 V is applied, with the surge voltage rising sharply in about 10 nsec, then gradually decreasing after reaching the peak voltage, but even after 400 nsec the voltage remains at 50 V or higher. Graph 62v shows the change in surge voltage when 3000 V is applied, with the peak voltage being several volts higher than when 2000 V is applied, but showing roughly the same trend as graph 61v.

[0025] Line segment 97 is a line indicating the peak voltage of 54 V of graph 61v when 2000 V is applied. As described above, the breakdown voltage of protected circuit 80 is 55 V, so although there is a small margin, protected circuit 80 can be protected. A line segment 98 is a line indicating a peak voltage of 56 V of the graph 62v when 3000 V is applied. Since the peak voltage of 56 V exceeds the breakdown voltage of the protected circuit 80, 55 V, the protected circuit 80 cannot be protected. In this way, the simulation results using the HBM test method in Figure 3 also verified the insufficient ESD withstand voltage performance when the pull-down resistance is low.

[0026] Fig. 4 is a graph showing the simulation results when the pull-down resistance of the ESD protection circuit 90 in Fig. 17 is set to 100 kΩ, and corresponds to Fig. 3. The HBM application conditions are the same as those in Fig. 3. Graph 63i shows the change in drain current when 2000 V is applied, in which the surge current rises sharply at about 10 nsec, reaches a peak current, and then after about 110 nsec, decreases to about half the peak current value. Graph 64i shows the change in surge current when 3000 V is applied, in which the peak current is larger than when 2000 V is applied, but shows roughly the same tendency as graph 63i.

[0027] Graph 63v shows the change in drain voltage when 2000V is applied, with the surge voltage rising sharply in about 10nsec, reaching a peak voltage, and then decreasing to a current value of about half the peak voltage about 170nsec later. Graph 64v shows the change in surge voltage when 3000V is applied, with the peak voltage being about 10V higher than when 2000V is applied, but showing roughly the same tendency as graph 63v.

[0028] Line segment 99 is a line showing a peak voltage of 38V of graph 64v when 3000V is applied. As mentioned above, the breakdown voltage of protected circuit 80 is 55V, so protected circuit 80 can be protected with a large margin. Furthermore, the peak voltage of graph 65v when 4000V is applied is about 47V, which shows that the ESD withstand voltage performance is 4000V or more. In this way, the simulation result using the HBM test method in Figure 4 also verifies the high ESD withstand voltage performance when the pull-down resistance is high.

[0029] As described above, it is clear that in the conventional ESD protection circuit 90 in which the pull-down resistor is composed of a single fixed resistor 113, it is difficult to achieve both noise resistance during operation of the protected circuit 80 and voltage resistance against ESD voltages.

[0030] Return to Figure 1. In contrast, according to the ESD protection circuit 200 of this embodiment, the pull-down resistance value of the power transistor 11 can be changed by switching the transistor 14 depending on whether the protected circuit 80 is in operation or not. In the following, as a suitable example, the resistor 13 is set to 100 kΩ, the resistor 17 to 1 kΩ, the on-resistance of the transistor 14 to 1 kΩ, the resistor 15 to 200 kΩ, and the capacitor 16 to 1 pF will be described. Note that the values ​​are not limited to these values.

[0031] FIG. 5 is an equivalent circuit diagram of the protected circuit during operation. First, when the protected circuit 80 is in operation, 5V is supplied as the third potential from the constant voltage circuit 82 to the third wiring 107. As a result, the gate potential of the transistor 14 becomes 5V via the resistor 15, which is a pull-up resistor connected to the third wiring 107, and the transistor 14 is turned on. FIG. 5 is an equivalent circuit diagram of the ESD protection circuit 200 in this state, and the pull-down resistance of the power transistor 11 is a combined resistance of the resistor 13, the resistor 17, and the on-resistance 14R of the transistor 14. In detail, 100kΩ*(1kΩ+1kΩ) / (100kΩ+(1kΩ+1kΩ))≈1.96kΩ.

[0032] Return to Figure 1. Next, when the protected circuit 80 is not operating, no potential is supplied to the third wiring 107. Since the potential across the capacitor 16 is also 0V, the pull-down resistance of the power transistor 11 is only the resistor 13, which is 100 kΩ.

[0033] ***How ​​to determine the circuit constants*** The circuit constants of the ESD protection circuit 200 of this embodiment are determined as follows. First, in order to achieve both noise resistance during operation of the protected circuit 80 and voltage resistance against ESD voltages, it is sufficient to change the resistance value of the pull-down resistor when the protected circuit 80 is in operation / non-operation. In detail, in Fig. 2, when the protected circuit 80 is in operation, the pull-down resistor is set to 2 kΩ as shown in graph 91, which is resistant to noise, and when the protected circuit 80 is not in operation, the pull-down resistor is set to 100 kΩ, which has high voltage resistance. To satisfy this requirement, resistor 13 is set to 100 kΩ, resistor 17 to 1 kΩ, and the on-resistance of transistor 14 to 1 kΩ. However, this is not limiting and may be set within a range that can ensure both noise resistance and voltage resistance performance, and for example, resistor 13 may have a resistance value higher than the sum of the on-resistances of resistor 17 and transistor 14. The on-resistance of transistor 14 may be 500 Ω or more and 2 kΩ or less.

[0034] 3, the surge current rises quickly and steeply in about 10 nsec, and then decreases to about half the peak current value after about 110 nsec. Taking this into consideration, the constants of resistor 15 and capacitor 16 are determined. More specifically, the time constant of resistor 15 and capacitor 16 should be set to 150 nsec or more. In a preferred embodiment, the time constant is set to 200 nsec, the resistor 15 is set to 200 kΩ, and the capacitor 16 is set to 1 pF.

[0035] As described above, the ESD protection circuit 200 of this embodiment can provide the following effects. The ESD protection circuit 200 is an ESD protection circuit provided between a first wiring 105 that supplies a first potential and a second wiring 106 that supplies a second potential different from the first potential, and protects a protected circuit 80 from a surge voltage, and includes a power transistor 11 provided between the first wiring 105 and the second wiring 106, a clamp circuit 12 provided between the first wiring 105 and a first node 71 to which the gate of the power transistor 11 is connected, a resistor 13 as a first resistor provided between the first node 71 and the second wiring 106, and a clamp circuit 12 provided between the first node 71 and the second wiring 106. The protected circuit 80 includes a transistor 14 provided between the gate of the transistor 14 and a wiring 106, and a third wiring 107 to which a third potential generated by a constant voltage circuit 82 of the protected circuit 80 is supplied. The protected circuit 80 includes a resistor 15 as a second resistor and a capacitor 16 as a first capacitor, which are connected in series between a second node 72 connected to the third wiring 107 and the second wiring 106, and when the connection point between the resistor 15 and the capacitor 16 is defined as a third node 73, the gate of the transistor 14 is connected to the third node 73, and the third potential is a potential between the first potential and the second potential.

[0036] According to this circuit, when the protected circuit 80 is in operation, the transistor 14 is turned on due to the constant potential of the third wiring 107, so the pull-down resistance of the power transistor 11 becomes a combined resistance of the resistor 13, the resistor 17, and the on-resistance of the transistor 14, and becomes low at about 2 kΩ. On the other hand, when the protected circuit 80 is not in operation, the transistor 14 is turned off, so the pull-down resistance becomes only the resistor 13, and becomes high at 100 kΩ. In other words, unlike conventional circuits in which the pull-down resistor has a fixed resistance value, this ESD protection circuit 200 can change the resistance value of the pull-down resistor by switching transistor 14 depending on whether the protected circuit 80 is operating or not. Therefore, the pull-down resistance can be lowered during operation to make the device less susceptible to noise from the power supply, and the pull-down resistance can be increased during non-operation to ensure the required ESD withstand voltage performance, taking into account the breakdown voltage of the protected circuit 80 and the required ESD withstand voltage, even when the potential difference between the maximum operating voltage and the breakdown voltage of the protected circuit 80 is small. Therefore, it is possible to provide the ESD protection circuit 200 that is capable of achieving both noise resistance during operation of the protected circuit and voltage resistance against ESD voltages.

[0037] The on-resistance of the transistor 14 is 500Ω or more and 2 kΩ or less, and in a preferred embodiment is 1 kΩ, which makes it possible to ensure both noise resistance and voltage resistance performance.

[0038] The transistor 14 further includes a resistor 17 as a third resistor provided between the first node 71 and the drain of the transistor 14 . This widens the range over which the resistance value of the pull-down resistor of the power transistor 11 can be adjusted when the protected circuit 80 is in operation, making it possible to set an optimal constant that ensures both noise immunity and voltage resistance performance.

[0039] EMBODIMENT 2 ***Different forms of ESD protection circuits-1*** 6, 7, and 8 are circuit diagrams of the ESD protection circuit according to this embodiment, and correspond to FIG. 1. The ESD protection circuit is not limited to the circuit configuration of FIG. 1, and may be modified as appropriate according to the required specifications. Hereinafter, the same components as those in the first embodiment are denoted by the same reference numbers, and duplicated explanations will be omitted.

[0040] In the ESD protection circuit 201 of FIG. 6, the resistor 17 connected to the drain of the transistor 14 is omitted. The other circuit configurations are the same as those of FIG. 1. In this configuration, by setting the on-resistance of the transistor 14 to 2 kΩ, the combined resistance value with the resistor 13 can be set to about 2 kΩ. In addition, a parasitic diode exists between the source and drain of the transistor 14, and this parasitic diode plays a role similar to that of the Zener diode of Patent Document 1, so that an excessive rise in the gate voltage of the power transistor 11 can be prevented.

[0041] In the ESD protection circuit 202 of FIG. 7, the resistor 17 connected to the drain of the transistor 14 is omitted. In addition, a resistor 18 is provided as a fourth resistor between the first node 71 and the resistor 13. If the node between the resistor 13 and the resistor 18 is a fourth node 74, the drain of the transistor 14 is connected to the fourth node 74. The other circuit configurations are the same as those in FIG. 1. In this configuration, the resistor 13 is 99 kΩ, the resistor 18 is 1 kΩ, and the on-resistance of the transistor 14 is 1 kΩ. This allows the pull-down resistance of the power transistor 11 to be approximately 2 kΩ when the protected circuit 80 is in operation.

[0042] The ESD protection circuit 203 in FIG. 8 uses a power transistor 21, which is a P-channel power MOS transistor, and a transistor 24, which is a P-channel MOS transistor. The constant voltage circuit 82 in the protected circuit 80 is provided with a fourth wiring 108 that supplies a potential that is 5 V lower than the first potential supplied to the first wiring 105 as a third potential. Accordingly, the arrangement of each element is reversed in polarity from that of the circuit in FIG. 1. In comparison with FIG. 1, the resistor 23 corresponds to the resistor 13, the resistor 25 corresponds to the resistor 15, the resistor 27 corresponds to the resistor 17, and the capacitor 26 corresponds to the capacitor 16. Even if the polarities are reversed, the ESD protection circuit 203 functions in the same way as the ESD protection circuit 200 in FIG. 1. Note that the above phrase "the polarity is reversed from that of the circuit in Figure 1" means that in the circuit in Figure 1, the third potential is 5 V higher than the second potential, and in the circuit in Figure 8, the third potential is 5 V lower than the first potential.

[0043] As described above, according to the ESD protection circuit 201, the ESD protection circuit 202, and the ESD protection circuit 203 of this embodiment, in addition to the effects of the first embodiment, the following effects can be obtained. According to the ESD protection circuit 201, it is possible to reduce the circuit size by omitting the resistor 17. Furthermore, the parasitic diode between the source and drain of the transistor 14 can prevent the gate voltage of the power transistor 11 from increasing excessively. Similarly, the circuit size of the ESD protection circuit 202 can be reduced by omitting the resistor 17. Furthermore, according to the ESD protection circuit 203, even if it is configured using a P-channel power MOS transistor, it is possible to obtain the same effects as the ESD protection circuit 200 in FIG.

[0044] EMBODIMENT 3 ***Different aspects of ESD protection circuits-2*** 9, 10, and 11 are circuit diagrams of the ESD protection circuit according to this embodiment, and correspond to FIG. 1. The ESD protection circuit is not limited to the circuit configuration of FIG. 1, and may be modified as appropriate according to the required specifications. Hereinafter, the same components as those in the above embodiment are denoted by the same reference numbers, and duplicated explanations will be omitted.

[0045] In the ESD protection circuit 204 of Fig. 9, a resistor 23 serving as a fifth resistor is provided between the first wiring 105 and the clamp circuit 12. A power transistor 21 serving as a second power MOS transistor having a polarity different from that of the power transistor 11 is provided between the first wiring 105 and the power transistor 11. If the node between the clamp circuit 12 and the resistor 23 is a fifth node 75, the gate of the power transistor 21 is connected to the fifth node 75. The other circuit configurations are the same as those in Fig. 1. The power transistor 21 is a P-channel power MOS transistor.

[0046] According to this configuration, the breakdown voltage of the ESD protection circuit 204 is the sum of the breakdown voltage of the power transistor 11 and the breakdown voltage of the power transistor 21, so that it is possible to reduce the risk of breakdown of the power transistor 11 and the power transistor 21, which are the discharge elements. In addition, in the case of this configuration, either the power transistor 11 or the power transistor 21 may be a medium-voltage MOS transistor.

[0047] 10 has a configuration in which a second N-channel power MOS transistor of opposite polarity is added to the configuration using the P-channel power MOS transistor in FIG. 8, similarly to FIG. In detail, a power transistor 11 serving as a second power MOS transistor having a polarity different from that of the power transistor 21 is provided between the second wiring 106 and the power transistor 21. A resistor 13 serving as a fifth resistor is provided between the second wiring 106 and the clamp circuit 12. The gate of the power transistor 11 is connected to the first node 71. The other circuit configurations are the same as those in FIG. 8. The power transistor 11 is an N-channel power MOS transistor.

[0048] According to this configuration, the breakdown voltage of the ESD protection circuit 205 is the sum of the breakdown voltage of the power transistor 21 and the breakdown voltage of the power transistor 11, so that it is possible to reduce the risk of breakdown of the power transistor 21 and the power transistor 11, which are the discharge elements. In addition, in the case of this configuration, either the power transistor 21 or the power transistor 11 may be a medium-voltage MOS transistor.

[0049] The ESD protection circuit 206 in Fig. 11 is a circuit obtained by merging the ESD protection circuit 200 in Fig. 1 and the ESD protection circuit 203 in Fig. 8, with the clamp circuit 12 in common. In other words, it is a circuit in which a fourth wiring 108 that supplies a potential that is 5 V lower than the first potential supplied to the first wiring 105 as a fourth potential, and an associated pull-down resistor switching circuit are added to the configuration of the ESD protection circuit 204 in Fig. 9. In detail, when the node between the clamp circuit 12 and the resistor 23 is defined as a fifth node 75, the ESD protection circuit 206 has a transistor 24 as a second MOS transistor provided between the fifth node 75 and the first wiring 105, a resistor 27 as a sixth resistor provided between the fifth node 75 and the transistor 24, and a fourth wiring 108 to which a fourth potential different from the third potential is supplied. The ESD protection circuit 206 further includes a sixth node 76 connected to the fourth wiring 108, a resistor 25 as a seventh resistor connected in series between the sixth node 76 and the first wiring 105, and a capacitor 26 as a second capacitor. When the connection point between the resistor 25 and the capacitor 26 is defined as a seventh node 77, the gate of the transistor 24 is connected to the seventh node 77, and the fourth potential is a potential between the first potential and the second potential.

[0050] According to this configuration, the breakdown voltage of the ESD protection circuit 206 is the sum of the breakdown voltage of the power transistor 21 and the breakdown voltage of the power transistor 11, so that it is possible to reduce the risk of breakdown of the power transistor 21, which is a discharge element, and the power transistor 11. Furthermore, during operation of the protected circuit 80, it is possible to increase the noise resistance of the power transistor 21 on the P-channel side in addition to the power transistor 11 on the N-channel side.

[0051] As described above, according to the ESD protection circuit 204, the ESD protection circuit 205, and the ESD protection circuit 206 of this embodiment, in addition to the effects of the first embodiment, the following effects can be obtained. According to the ESD protection circuit 204 and the ESD protection circuit 205, the breakdown voltage of the protection circuit is the sum of the breakdown voltage of the power transistor 11 and the breakdown voltage of the power transistor 21, so that it is possible to reduce the risk of breakdown of the power transistor 11 and the power transistor 21, which are the discharge elements. Furthermore, by using a medium-voltage MOS transistor as either the power transistor 11 or the power transistor 21, it is possible to reduce the circuit size.

[0052] When the node between the clamp circuit 12 and the resistor 23 is defined as a fifth node 75, the ESD protection circuit 206 has a transistor 24 as a second MOS transistor provided between the fifth node 75 and the first wiring 105, a resistor 27 as a sixth resistor provided between the fifth node 75 and the transistor 24, and a fourth wiring 108 to which a fourth potential different from the third potential is supplied, and further includes a sixth node 76 connected to the fourth wiring 108, a resistor 25 as a seventh resistor connected in series between the sixth node 76 and the first wiring 105, and a capacitor 26 as a second capacitor, and when the connection point between the resistor 25 and the capacitor 26 is defined as a seventh node 77, the gate of the transistor 24 is connected to the seventh node 77, and the fourth potential is a potential between the first potential and the second potential.

[0053] According to this configuration, the breakdown voltage of the ESD protection circuit 206 is the sum of the breakdown voltage of the power transistor 21 and the breakdown voltage of the power transistor 11, so that the risk of breakdown of the power transistor 21 and the power transistor 11, which are discharge elements, can be reduced. Furthermore, since both the N-channel power transistor 11 and the P-channel power transistor 21 are provided with a pull-down resistor switching circuit, the pull-down resistor can be lowered during operation of the protected circuit 80, thereby improving noise resistance.

[0054] EMBODIMENT 4 ***Different aspects of ESD protection circuits-3*** Fig. 12 is a circuit diagram of the ESD protection circuit according to this embodiment, and corresponds to Fig. 1. Fig. 13 is a circuit diagram of an ESD protection circuit of a comparative example, and corresponds to Fig. 12. The above-mentioned ESD protection circuit can also be applied to an open drain terminal of a protected circuit. Hereinafter, the same components as those in the above embodiment are given the same reference numbers, and duplicated explanations will be omitted.

[0055] Fig. 13 is a diagram showing an example in which the ESD protection circuit 200 in Fig. 1 is applied to an open drain terminal. The protected circuit 80 has OD terminals 31 and 32 as N-channel open drain terminals. When the ESD protection circuit 200 in Fig. 1 is applied to this open drain terminal, normally, as shown in Fig. 13, the high potential line of the ESD protection circuit 200 is connected to the OD terminal 31. In this configuration, the number of ESD protection circuits 200 required is the same as the number of open drain terminals. For example, in the example of Fig. 13, two ESD protection circuits 200 are required.

[0056] 12, by using a common electrode wiring, even if the protected circuit 80 has multiple open drain terminals, it is possible to protect the multiple open drain terminals with one ESD protection circuit 200. First, the protected circuit 80 has two open drain terminals, OD terminal 31 and OD terminal 32.

[0057] The fifth wiring 109 is a common electrode wiring that supplies a fifth potential that is a potential higher than the second potential of the second wiring 106. The high potential line of the ESD protection circuit 200 is connected to the fifth wiring 109. A first diode 41 is provided in the forward direction between the OD terminal 31 and the fifth wiring 109. A second diode 42 is provided in the forward direction between the second wiring 106 and the OD terminal 31. The first diode 41 and the second diode 42 are provided as a pair for each open drain terminal. Therefore, the first diode 41 and the second diode 42 are similarly connected to the OD terminal 32 as well. In addition, the third diode 43 is disposed between the third wiring 107 and the fifth wiring 109 in the forward direction.

[0058] Note that the above “forward direction” means that the anode and cathode of the first diode 41 are connected to the N-channel open drain terminal and the fifth wiring 109, respectively, the anode and cathode of the second diode 42 are connected to the second wiring 106 and the N-channel open drain terminal, respectively, and the anode and cathode of the third diode 43 are connected to the third wiring 107 and the fifth wiring 109, respectively.

[0059] Fig. 14 is a circuit diagram of an ESD protection circuit according to this embodiment, and corresponds to Fig. 2 and Fig. 12. The ESD protection circuit 208 in Fig. 14 differs from Fig. 12 in that it corresponds to a P-channel open drain terminal of the protected circuit. The protected circuit 80 in Fig. 14 has OD terminals 33 and 34 as P-channel open drain terminals. For the P-channel open drain terminals, an ESD protection circuit 203 including the P-channel power transistor 21 in Fig. 8 is used. More specifically, as in Fig. 12, by using the fifth wiring 109 which is a common electrode wiring, even if the protected circuit 80 has multiple P-channel open drain terminals, it is possible to protect the multiple open drain terminals with one ESD protection circuit 203.

[0060] The fifth wiring 109 is a common electrode wiring that supplies a fifth potential that is a potential lower than the first potential of the first wiring 105. The low potential line of the ESD protection circuit 203 is connected to the fifth wiring 109. A first diode 41 is provided in the forward direction between the fifth wiring 109 and the OD terminal 33. A second diode 42 is provided in the forward direction between the OD terminal 33 and the first wiring 105. The first diode 41 and the second diode 42 are provided as a pair for each open drain terminal. Therefore, the first diode 41 and the second diode 42 are similarly connected in the OD terminal 34 as well. Further, the third diode 43 is disposed in the forward direction between the fifth wiring 109 and the third wiring 107. Note that the above-mentioned "forward direction" means that the anode and cathode of the first diode 41 are connected to the fifth wiring 109 and the OD terminal 33, respectively, the anode and cathode of the second diode 42 are connected to the OD terminal 33 and the first wiring 105, and the anode and cathode of the third diode 43 are connected to the fifth wiring 109 and the third wiring 107, respectively.

[0061] As described above, according to the ESD protection circuit 207 of this embodiment, in addition to the effects of the first embodiment, the following effects can be obtained. The ESD protection circuit 207 includes an ESD protection circuit 200, in which a first diode 41 is arranged in the forward direction between the OD terminal 31 and a fifth wiring 109 that supplies a fifth potential that is a potential higher than the second potential, a second diode 42 is arranged in the forward direction between the second wiring 106 and the OD terminal 31, and a third diode 43 is arranged in the forward direction between the third wiring 107 and the fifth wiring 109.

[0062] This makes it possible to provide an applicable ESD protection circuit 207 even if the protected circuit 80 has a plurality of N-channel open drain terminals. Furthermore, unlike the circuit configuration of FIG. 13 which required the same number of ESD protection circuits 200 as the number of N-channel open drain terminals, even if the number of N-channel open drain terminals increases, only one ESD protection circuit 200 is required, so the circuit size can be reduced. Furthermore, by disposing the first diode 41 between the OD terminal 31 and the fifth wiring 109, the parasitic capacitance connected to the OD terminal 31 is reduced, making it possible to prevent a decrease in response speed during switching and an increase in current consumption. Furthermore, by disposing the third diode 43 between the fifth wiring 109, which is the common electrode wiring, and the third wiring 107, which is the output of the constant voltage circuit 82, it is possible to reduce current consumption when charging and discharging the capacitance parasitic on the fifth wiring 109 due to external noise and negative surge currents during switching operations.

[0063] Furthermore, according to the ESD protection circuit 208 of this embodiment, in addition to the effects of the first embodiment, the following effects can be obtained. The ESD protection circuit 208 includes an ESD protection circuit 203, and a first diode 41 is arranged in the forward direction between a fifth wiring 109 that supplies a fifth potential that is lower than the first potential and the OD terminal 33, a second diode 42 is arranged in the forward direction between the OD terminal 33 and the first wiring 105, and a third diode 43 is arranged in the forward direction between the fifth wiring 109 and the third wiring 107.

[0064] This makes it possible to provide an applicable ESD protection circuit 208 even if the protected circuit 80 has a plurality of P-channel open drain terminals. Furthermore, unlike the circuit configuration of FIG. 13 which required the same number of ESD protection circuits 200 as the number of open drain terminals, even if the number of P-channel open drain terminals increases, only one ESD protection circuit 203 is required, so the circuit size can be reduced. Furthermore, by disposing the first diode 41 between the fifth wiring 109 and the OD terminal 33, the parasitic capacitance connected to the OD terminal 33 is reduced, making it possible to prevent a decrease in response speed during switching and an increase in current consumption. Furthermore, by disposing the third diode 43 between the fifth wiring 109, which is the common electrode wiring, and the third wiring 107, which is the output of the constant voltage circuit 82, it is possible to reduce current consumption when charging and discharging the capacitance parasitic on the fifth wiring 109 due to external noise and negative surge currents during switching operations.

[0065] EMBODIMENT 5 ***Different aspects of ESD protection circuits-4*** FIG. 15 is a circuit diagram of an ESD protection circuit according to this embodiment, and corresponds to FIGS. The above-mentioned ESD protection circuit can also be applied to a transmission gate terminal of a protected circuit. Hereinafter, the same components as those in the above embodiment are given the same reference numbers, and duplicated explanations will be omitted.

[0066] The protected circuit 80 has a first terminal 35 formed by a transmission gate, and a second terminal 36. The fifth wiring 109 is a common electrode wiring that supplies a fifth potential that is higher than the second potential of the second wiring 106. The ESD protection circuit 209 of the present embodiment includes one ESD protection circuit 200, and the high potential line of the ESD protection circuit 200 is connected to the fifth wiring 109.

[0067] The ESD protection circuit 209 further includes a fourth diode 45 arranged in the forward direction between the first terminal 35 and the fifth wiring 109, a fifth diode 46 arranged in the forward direction between the second wiring 106 and the first terminal 35, a sixth diode 47 arranged in the forward direction between the second terminal 36 and the fifth wiring 109, a seventh diode 48 arranged in the forward direction between the second wiring 106 and the second terminal 36, and an eighth diode 49 arranged in the forward direction between the third wiring 107 and the fifth wiring 109.

[0068] In addition, the above-mentioned "forward direction" means that the anode and cathode of the fourth diode 45 are connected to the first terminal 35 and the fifth wiring 109, respectively, the anode and cathode of the fifth diode 46 are connected to the second wiring 106 and the first terminal 35, respectively, the anode and cathode of the sixth diode 47 are connected to the second terminal 36 and the fifth wiring 109, respectively, the anode and cathode of the seventh diode 48 are connected to the second wiring 106 and the second terminal 36, respectively, and the anode and cathode of the eighth diode 49 are connected to the third wiring 107 and the fifth wiring 109, respectively.

[0069] As described above, according to the ESD protection circuit 209 of this embodiment, in addition to the effects of the first embodiment, the following effects can be obtained. The ESD protection circuit 209 includes the ESD protection circuit 200, and further includes a fourth diode 45 arranged in the forward direction between the first terminal 35 and the fifth wiring 109, a fifth diode 46 arranged in the forward direction between the second wiring 106 and the first terminal 35, a sixth diode 47 arranged in the forward direction between the second terminal 36 and the fifth wiring 109, a seventh diode 48 arranged in the forward direction between the second wiring 106 and the second terminal 36, and an eighth diode 49 arranged in the forward direction between the third wiring 107 and the fifth wiring 109.

[0070] This makes it possible to provide an applicable ESD protection circuit 209 even if the protected circuit 80 has a transmission gate terminal. Furthermore, even if the number of transmission gate terminals increases, only one ESD protection circuit 200 is required, so the circuit size can be reduced.

[0071] EMBODIMENT 6 ***Semiconductor equipment, electronic equipment*** FIG. 16 is a schematic diagram of an electronic device according to this embodiment. 16, the electronic device 300 is configured with a CPU 120 as a semiconductor device, an operation unit 130, a ROM 140, a RAM 150, a communication unit 160, a display unit 170, and an audio output unit 180. The CPU 120 is a Central Processing Unit, the ROM 140 is a Read-Only Memory, and the RAM 150 is a Random Access Memory.

[0072] Here, the ESD protection circuit 200 according to the embodiment is mounted on at least some of the CPU 120, ROM 140, RAM 150, communication unit 160, display unit 170, and audio output unit 180. Note that, although the ESD protection circuit 200 is illustrated as a representative in Fig. 16, it is sufficient that any one of the ESD protection circuits 200 to 208 is mounted on the semiconductor device. In other words, the semiconductor device constituting the CPU 120, ROM 140, RAM 150, communication unit 160, display unit 170, and audio output unit 180 corresponds to the protected circuit 80 in the embodiment, and includes any one of the ESD protection circuits 200 to 208 according to the embodiment. Therefore, the semiconductor devices constituting the CPU 120, the operation unit 130, the ROM 140, the RAM 150, the communication unit 160, the display unit 170, and the audio output unit 180 can be protected from static electricity, abnormal signals, etc. Therefore, it is possible to provide the electronic device 300 having excellent noise resistance and high ESD resistance performance.

[0073] 16 may be omitted or modified, or other components may be added to the components shown in FIG. 16. The CPU 120 performs various signal processing and control processing using data and the like supplied from the outside in accordance with a program stored in the ROM 140 or the like. For example, the CPU 120 performs various signal processing in response to an operation signal supplied from the operation unit 130, controls the communication unit 160 to perform data communication with the outside, generates an image signal for displaying various images on the display unit 170, and generates an audio signal for outputting various sounds from the audio output unit 180.

[0074] The operation unit 130 is an input device including, for example, operation keys and button switches, and outputs operation signals according to user operations to the CPU 120. The ROM 140 stores programs and data for the CPU 120 to perform various signal processing and control processing. The RAM 150 is used as a working area for the CPU 120, and temporarily stores programs and data read from the ROM 140, data input using the operation unit 130, or calculation results executed by the CPU 120 according to the programs.

[0075] The communication unit 160 is composed of, for example, an analog circuit and a digital circuit, and performs data communication between the CPU 120 and an external device. The display unit 170 includes, for example, an LCD, and displays various images based on image signals supplied from the CPU 120. LCD stands for Liquid Crystal Display.

[0076] The audio output unit 180 includes, for example, a speaker, and outputs audio based on an audio signal supplied from the CPU 120 .

[0077] Examples of such electronic devices 300 include clocks such as wristwatches and desk clocks, timers, mobile terminals such as mobile phones, digital still cameras, digital movie cameras, televisions, videophones, security television monitors, head mounted displays, smartphones, printers, network devices, multifunction peripherals, in-vehicle devices, calculators, electronic dictionaries, electronic game devices, robots, measuring instruments, medical devices, and the like. [Explanation of symbols]

[0078] 11...power transistor, 12...clamp circuit, 13...resistor, 14...transistor, 15...resistor, 16...capacitor, 17...resistor, 18...resistor, 19...capacitor, 21...power transistor, 23...resistor, 24...transistor, 25...resistor, 26...capacitor, 27...resistor, 31...OD terminal, 32...OD terminal, 33...OD terminal, 34...OD terminal, 35...first terminal, 36...second terminal, 41...first diode, 42...second diode, 43...third diode, 45...fourth diode, 46...fifth diode, 47...sixth diode, 48...seventh diode node, 49...8th diode, 71...1st node, 72...2nd node, 73...3rd node, 74...4th node, 75...5th node, 76...6th node, 77...7th node, 80...protected circuit, 81...high voltage circuit, 82...constant voltage circuit, 85-88...line segment, 90...conventional ESD protection circuit, 91-95...graph, 97-99...line segment, 105...1st wiring, 106...2nd wiring, 107...3rd wiring, 108...4th wiring, 109...5th wiring, 111...power transistor, 113...resistor, 119...capacitor, 200-208...ESD protection circuit, 300...electronic device.

Claims

1. 1. An ESD protection circuit provided between a first wiring that supplies a first potential and a second wiring that supplies a second potential different from the first potential, the ESD protection circuit protecting a protected circuit from a surge voltage, a power MOS transistor provided between the first wiring and the second wiring; a clamp circuit provided between the first wiring and a first node to which a gate of the power MOS transistor is connected; a first resistor provided between the first node and the second wiring; a MOS transistor provided between the first node and the second wiring; a third wiring to which a third potential generated by a constant voltage circuit of the protected circuit is supplied, a second resistor and a first capacitor connected in series between the second wiring and a second node connected to the third wiring; When a connection point between the second resistor and the first capacitor is defined as a third node, a gate of the MOS transistor is connected to the third node, the third potential is a potential between the first potential and the second potential; ESD protection circuit.

2. The on-resistance of the MOS transistor is 500Ω or more and 2 kΩ or less.

2. The ESD protection circuit of claim 1.

3. a third resistor provided between the first node and the drain of the MOS transistor; 2. The ESD protection circuit of claim 1.

4. a fourth resistor is disposed between the first node and the first resistor; When a connection point between the first resistor and the fourth resistor is defined as a fourth node, the MOS transistor is provided between the fourth node and the second wiring, 3. The ESD protection circuit according to claim 1 or 2.

5. When the power MOS transistor is a first power MOS transistor, a second power MOS transistor having a polarity opposite to that of the first power MOS transistor is provided between the first wiring and the first power MOS transistor; a gate of the second power MOS transistor is connected to one end of the clamp circuit at a fifth node; a fifth resistor is provided between the fifth node and the first wiring; 4. An ESD protection circuit according to claim 1.

6. When the MOS transistor is a first MOS transistor, a second MOS transistor provided between the fifth node and the first wiring; a sixth resistor provided between the fifth node and the second MOS transistor; A fourth wiring to which a fourth potential different from the third potential is supplied. a seventh resistor and a second capacitor connected in series between a sixth node connected to the fourth wiring and the first wiring, When a connection point between the seventh resistor and the second capacitor is defined as a seventh node, The gate of the second MOS transistor is connected to the seventh node, the fourth potential is a potential between the first potential and the second potential; 6. The ESD protection circuit of claim 5.

7. the protected circuit has an N-channel open drain terminal; a first diode is disposed between the N-channel open drain terminal and a fifth wiring that supplies a fifth potential that is a potential higher than the second potential, and an anode and a cathode of the first diode are connected to the N-channel open drain terminal and the fifth wiring, respectively; a second diode is disposed between the second wiring and the open drain terminal, an anode and a cathode of the second diode are connected to the second wiring and the N-channel open drain terminal, respectively; a third diode is disposed between the third wiring and the fifth wiring, and an anode and a cathode of the third diode are connected to the third wiring and the fifth wiring, respectively; 4. An ESD protection circuit according to claim 1.

8. the protected circuit has a P-channel open drain terminal; a first diode is disposed between the P-channel open drain terminal and a fifth wiring that supplies a fifth potential that is a potential lower than the first potential, an anode and a cathode of the first diode are connected to the fifth wiring and the P-channel open drain terminal, respectively; a second diode is disposed between the P-channel open drain terminal and the first wiring, and an anode and a cathode of the second diode are connected to the P-channel open drain terminal and the first wiring, respectively; a third diode is disposed between the fifth wiring and the third wiring, and an anode and a cathode of the third diode are connected to the fifth wiring and the third wiring, respectively; 4. An ESD protection circuit according to claim 1.

9. the protected circuit has a first terminal and a second terminal formed by a transmission gate; a fourth diode is disposed between the first terminal and a fifth wiring that supplies a fifth potential that is a potential higher than the second potential, and an anode and a cathode of the fourth diode are connected to the first terminal and the fifth wiring, respectively; a fifth diode is disposed between the second wiring and the first terminal, and an anode and a cathode of the fifth diode are connected to the second wiring and the first terminal, respectively; a sixth diode is disposed between the second terminal and the fifth wiring, an anode and a cathode of the sixth diode are connected to the second terminal and the fifth wiring, respectively; a seventh diode is disposed between the second wiring and the second terminal, and an anode and a cathode of the seventh diode are connected to the second wiring and the second terminal, respectively; an eighth diode is disposed between the third wiring and the fifth wiring, and an anode and a cathode of the eighth diode are connected to the third wiring and the fifth wiring, respectively; 4. An ESD protection circuit according to claim 1.

10. A semiconductor device comprising the ESD protection circuit according to claim 1 .

11. An electronic device comprising the semiconductor device according to claim 10.

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