Expandable mounting device

The telescopic mounting device addresses the bulkiness and transport issues of conventional wafer boxes by using telescopic units to compactly store and precisely position wafers, enhancing transport efficiency and reducing costs.

JP7690233B2Active Publication Date: 2025-06-10DLY TECH INC
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Patent Information

Application Number
JP2024102710
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Priority Date
2022-12-27
Filing Date
2024-06-26
Publication Date
2025-06-10
Estimated Expiration
2043-02-21

AI Technical Summary

Technical Problem

Conventional wafer boxes are bulky due to fixed distances between mounting tables, leading to increased production costs and reduced transport efficiency. Additionally, large wafers can deform during transport, requiring complex fixing equipment to prevent damage.

Method used

A telescopic mounting device with multiple first and second mounting tables and telescopic units that expand and contract, allowing for compact storage and precise positioning of wafers to prevent deformation and damage during transport.

Benefits of technology

The telescopic mounting device facilitates compact storage and efficient transport of wafers by maintaining their position and preventing deformation, thereby reducing production costs and improving transport efficiency.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

To provide an extensible mounting device which can be downsized, can position articles to be loaded, and can contact and support the articles.SOLUTION: An extensible mounting device includes: a plurality of loading tables 20, 30 each of which can load a plate body and which are arranged by turns with a gap in a vertical direction; and an extensible unit changing gaps between the loading tables 20, 30. Each of the loading tables 20 has a contact support member 28 contacting and supporting the plate body on the loading table 30, and each of the loading tables 30 has a contact support member 38 contacting and supporting the plate body on another adjacent loading table 20. The respective contact support members 28, 38 have: contact support side wall parts 283, 383; and insertion openings 287, 387; and a projection block 281. The projection block 281 of the contact support member 28 is configured to be inserted in the insertion opening 387 of the contact support member 38 when gaps between the loading tables 20, 30 become small, and to push and move the contact support side wall part 383 to the plate body 30'.SELECTED DRAWING: Figure 7
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Description

Technical Field

[0001] The present invention relates to a mounting device, and more particularly to a telescopic mounting device.

Background Art

[0002] Conventional wafer boxes have often had a structure for storing a plurality of wafers or display panels in a stacked manner. However, since such wafer boxes store wafers at a fixed distance from each other (for example, the distance between each mounting table in the wafer box is about 10 mm), they still have a certain volume and tend to be bulky. Further, in the case of a mounting table having a mounting portion for mounting a wafer and a hollow portion surrounded by the mounting portion for inserting and removing the wafer by a manipulator, when mounting the wafer by the manipulator, a part of the edge of the wafer may fall into the hollow portion, and the wafer may be mounted in a skewed posture. To avoid this, as a conventional mounting table, one having as wide an area as possible in the region excluding the hollow portion (that is, as small a hollow portion as possible) is adopted. In this case, the weight of each mounting table, and thus the weight of the entire wafer box, increases significantly, resulting in not only an increase in production cost but also a decrease in the transport efficiency of the wafer box. Furthermore, as the area and thickness of wafers increase, when a large wafer is horizontally mounted on a conventional wafer box, since the span is long and the wafer is thin, the wafer may deform such that the central portion sinks due to the influence of gravity. In this case, it is necessary to fix the wafer using separate complex equipment so that the wafer is not damaged by the impact caused by shaking during transport, resulting in an increase in production cost.

Summary of the Invention

Problems to be Solved by the Invention

[0003] The present invention has been made in view of the above problems, and one of its objects is to be able to be made compact by having a telescopic function, and to be able to position an article so that the placed article does not easily shift in position and fall off, and to abut and support the article so that the article does not easily come off or collide and break during transportation. It is to provide a telescopic mounting device.

Means for Solving the Problems

[0004] The telescopic mounting device according to the present invention for achieving the above object is for mounting a plurality of plate bodies, comprising at least two first mounting tables each capable of mounting a first plate body, at least two second mounting tables each capable of mounting a second plate body, and a plurality of telescopic units, Each of the first mounting tables has a first upper surface, a first bottom surface, at least one first upper positioning member protruding upward from the first upper surface, at least one first lower positioning member protruding downward from the first bottom surface, a first abutting support member for abutting and supporting a plate body, and a support member, Each of the second mounting tables is alternately arranged at intervals in the vertical direction with respect to each of the first mounting tables. Each of the second mounting tables has a second upper surface, a second bottom surface, at least one second upper positioning member protruding upward from the second upper surface, at least one second lower positioning member protruding downward from the second bottom surface, a second abutting support member for abutting and supporting a plate body, and a support member, The telescopic unit is provided on the first mounting tables and the second mounting tables, and switches the first mounting tables and the second mounting tables between a deployed state in which the distance between each first mounting table and each second mounting table expands and a contracted state in which the distance between each first mounting table and each second mounting table contracts, The first abutting support member has a first abutting support side wall portion, a first insertion opening, and a first protruding block, The supporting member of the first mounting table is configured such that when the first plate is placed on the first mounting table, a part of it abuts against the bottom surface of the first plate. The second abutting and supporting member has a second abutting and supporting side wall portion, a second insertion opening, and a second protruding block. The supporting member of the second mounting table is configured such that when the second plate is placed on the second mounting table, a part of it abuts against the bottom surface of the second plate. The first abutting and supporting member is configured to abut against and support the second plate placed on the second mounting table when the distance between the mounting tables is reduced due to the expansion and contraction of the telescopic unit. The second abutting and supporting member is characterized in that it is configured to abut against and support the first plate placed on the other adjacent first mounting table when the distance between the mounting tables is reduced due to the expansion and contraction of the telescopic unit.

[0005] Another telescopic mounting device according to the present invention for achieving the above object is for mounting a plurality of plates, comprising at least two first mounting tables each capable of mounting a first plate, at least two second mounting tables each capable of mounting a second plate, and a plurality of telescopic units. Each of the first mounting tables has at least one connecting member and at least one first fixing member. Each of the second mounting tables has at least one connecting member and at least one second fixing member. The telescopic units are provided on the first mounting tables and the second mounting tables, and switch the first mounting tables and the second mounting tables between a deployed state in which the distance between each first mounting table and each second mounting table expands and a contracted state in which the distance between each first mounting table and each second mounting table shrinks. Each of the connecting members is configured to be connected to another connecting member on an adjacent mounting table when these mounting tables are in the contracted state. The first fixing member is configured to be inserted into the second fixing member and fixed to each other when these mounting tables are in the contracted state.

Advantages of the Invention

[0006] According to the above configuration, by expanding each mounting table with the telescopic unit, it is possible to facilitate the insertion and removal of the plate body by the manipulator, and by contracting each mounting table with the telescopic unit, the telescopic mounting device can be made compact and space-saving. Also, since the edge portions of the plate bodies placed on each mounting table are positioned by the positioning members, it is possible to avoid the situation where the plate bodies are placed in an inclined posture due to a part of the edge portions of the plate bodies moving and falling off due to displacement of the mounting positions. Furthermore, the contact support member can prevent the plate body from coming off or colliding with the inner wall of the mounting device and being damaged. Also, by the connecting members being fitted to each other and the fixing members being fixed to each other, it is possible to effectively prevent damage caused by the plate bodies moving and colliding due to the mounting tables shifting due to shaking during transportation.

Brief Description of the Drawings

[0007]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Figure 15

Figure 16

Embodiments for Carrying Out the Invention

[0008] Hereinafter, the technical idea and features of the present invention will be described with reference to the drawings using preferred embodiments. FIG. 1 shows a preferred embodiment of the telescopic mounting device 10 according to the present invention. The telescopic mounting device 10 is for mounting a plurality of plate bodies, and includes at least two first mounting tables 20, at least two second mounting tables 30, and a plurality of telescopic units 40. In the present embodiment, both the first mounting table 20 and the second mounting table 30 can mount plate bodies. Also, the total number of the first mounting tables 20 and the second mounting tables 30 can be, for example, 25, but this is not limiting.

[0009] As shown in FIG. 2, at least two first mounting tables 20 and at least two second mounting tables 30 are alternately arranged at intervals in the vertical direction. Each first mounting table 20 can mount a first plate body 20', and each second mounting table 30 can mount a second plate body 30'. As shown in FIG. 3, each first mounting table 20 includes a first upper surface 21, a first bottom surface 22, a first mounting portion 23 that extends obliquely from the first upper surface 21 toward the virtual center line L for mounting the first plate body 20', a first hollow portion 24 surrounded by the first mounting portion 23 for the first plate body 20' to be inserted and removed by a manipulator (not shown), a plurality of first upper positioning members 25 each protruding upward from the first upper surface 21 and arranged to surround the first mounting portion 23, a plurality of first lower positioning members 26 each protruding downward from the first bottom surface 22 and arranged to surround the first mounting portion 23, a plurality of first accommodation holes 27 each penetrating through both the first upper surface 21 and the first bottom surface 22 and arranged to surround the first mounting portion 23, a first abutting support member 28 provided at the periphery of the first mounting portion 23 for abutting and supporting the second plate body 30' mounted on the second mounting table 30, a plurality of connecting members 29 protruding upward from the first upper surface 21, and a plurality of first fixing members 29' protruding downward from the side of the first mounting table 20. The first mounting table 20 is an integral one manufactured by injection molding, and its material can be, for example, plastic (PVC as an example). In this embodiment, the number of the first abutting support members 28 may be plural, and the plurality of first abutting support members 28 may be arranged at intervals so as to form an arc shape surrounding the first mounting table 20. The connecting member 29 is in the shape of a lid, and the first fixing member 29' is in the shape of a block. In other conceivable embodiments, the number of each of the first upper positioning members 25 and the first lower positioning members 26 can be adjusted as required. However, at least one of each of the first upper positioning members 25 and the first lower positioning members 26 needs to be provided.

[0010] As shown in FIG. 4, each second mounting table 30 includes a second upper surface 31, a second bottom surface 32, a second mounting portion 33 that extends obliquely from the second upper surface 31 toward the virtual center line L for placing the second plate body 30', a second hollow portion 34 surrounded by the second mounting portion 33 for the second plate body 30' to be inserted and removed by a manipulator (not shown), a plurality of second upper positioning members 35 disposed so as to surround the second mounting portion 33 and each protruding upward from the second upper surface 31, a plurality of second lower positioning members 36 disposed so as to surround the second mounting portion 33 and each protruding downward from the second bottom surface 32, a plurality of second receiving holes 37 disposed so as to surround the second mounting portion 33 and each penetrating through both the second upper surface 31 and the second bottom surface 32, a second abutting support member 38 provided at the periphery of the second mounting portion 33 for abutting and supporting the first plate body 20' placed on another adjacent first mounting table 20, a plurality of connecting members 39 protruding upward from the second upper surface 31, and a plurality of second fixing members 39' protruding downward from the side of the second mounting table 30. The second mounting table 30 is an integral one manufactured by injection molding, and its material can be, for example, plastic (such as PVC as an example). In this embodiment, the number of the second abutting support members 38 may be plural, and the plurality of second abutting support members 38 may be arranged at intervals so as to form an arc surrounding the second mounting table 30. The connecting member 39 is in the shape of a lid, and the second fixing member 39' is in the shape of a grooved block. In other conceivable embodiments, the number of each of the second upper positioning members 35 and the second lower positioning members 36 can be adjusted as needed. However, at least one of the second upper positioning members 35 and the second lower positioning members 36 needs to be provided respectively.

[0011] As shown in FIGS. 2 to 5, in the present embodiment, the positions of the respective first lower positioning members 26 and the positions of the respective second upper positioning members 35 do not overlap each other in either the vertical direction or the horizontal direction, and the positions of the respective first upper positioning members 25 and the positions of the respective second lower positioning members 36 do not overlap each other in either the vertical direction or the horizontal direction. Further, the distances from each of the first upper positioning members 25, each of the first lower positioning members 26, and each of the first accommodation holes 27 to the virtual center line L are equal to each other, and the distances from each of the second upper positioning members 35, each of the second lower positioning members 36, and each of the second accommodation holes 37 to the virtual center line L are equal to each other. However, the present invention is not limited to the above-described embodiment. In other conceivable embodiments, for example, the distance between the first lower positioning member 26 and the virtual center line L may be greater than the distance between the second upper positioning member 35 and the virtual center line L. In this case, when observed from the perspective as shown in FIG. 5, the positions of the first lower positioning member 26 and the second upper positioning member 35 may overlap each other in the horizontal direction. Further, as shown in FIG. 6, a concave groove for inserting the first lower positioning member 26 may be recessed in the second upper positioning member 35. In this case, the second accommodation hole 37 of the second mounting table 30 may be omitted. That is, the installation position of the second accommodation hole 37 may be replaced with the second upper positioning member 35. As a result, the positions of the first lower positioning member 26 and the second upper positioning member 35 overlap each other in the vertical direction. Similarly, a concave groove for inserting the second upper positioning member 35 may be recessed in the first lower positioning member 26. In this case, the second accommodation hole 37 of the second mounting table 30 may be omitted. Further, as long as opposing connection is possible, the installation position of the first accommodation hole 27 may be replaced with the first upper positioning member 25 or the second lower positioning member 36.

[0012] The telescopic unit 40 is provided on these first mounting tables 20 and these second mounting tables 30, and switches these first mounting tables 20 and these second mounting tables 30 between a deployed state in which the distance between each first mounting table 20 and each second mounting table 30 expands and a contracted state in which the distance between each first mounting table 20 and each second mounting table 30 shrinks. When these first mounting tables 20 and these second mounting tables 30 are in the contracted state, each first lower positioning member 26 can be inserted into a second receiving hole 37 that is below it and has a corresponding position, and each first upper positioning member 25 can be inserted into a second receiving hole 37 that is above it and has a corresponding position. And each second upper positioning member 35 can be inserted into a first receiving hole 27 that is above it and has a corresponding position, and each second lower positioning member 36 can be inserted into a first receiving hole 27 that is below it and has a corresponding position.

[0013] On the other hand, as shown in FIG. 5, when these first mounting tables 20 and these second mounting tables 30 are in the deployed state, the horizontal position of the bottom edge of each first lower positioning member 26 is lower than the horizontal position of the upper edge of each second upper positioning member 35, and the horizontal position of the upper edge of each first upper positioning member 25 is higher than the horizontal position of the bottom edge of the second lower positioning member 36. In other possible embodiments, the horizontal position of the bottom edge of each first lower positioning member 26 may be at the same height as the horizontal position of the upper edge of each second upper positioning member 35. However, the horizontal position of the bottom edge of each first lower positioning member 26 should not be higher than the horizontal position of the upper edge of each second upper positioning member 35. Similarly, the horizontal position of the upper edge of each first upper positioning member 25 may be at the same height as the horizontal position of the bottom edge of the second lower positioning member 36. However, the horizontal position of the upper edge of each first upper positioning member 25 should not be lower than the horizontal position of the bottom edge of the second lower positioning member 36. In the above configuration, since no vertical gap through which a plate body can pass is formed between these positioning members, it is possible to avoid the situation where the plate body is not accurately positioned when the plate body is placed.

[0014] According to the above configuration provided with the telescopic unit 40, by expanding each first mounting table 20 and each second mounting table 30, it is possible to facilitate the insertion and extraction of the plate body by the manipulator. Also, by contracting each first mounting table 20 and each second mounting table 30, it is possible to reduce the volume of the entire telescopic mounting device 10 and achieve space saving. When placing the plate body on the first mounting table 20 and the second mounting table 30 in the deployed state by the manipulator, the plate body is positioned by the edge thereof hitting the first upper positioning member 25, the first lower positioning member 26, the second upper positioning member 35, and the second lower positioning member 36. Therefore, the situation where a part of the edge of the plate body falls into the first hollow portion 24 or the second hollow portion 34, and the plate body is placed in a skewed and displaced posture is avoided. In this way, since it becomes easy to place the plate body in the correct posture, as the first mounting portion 23 and the second mounting portion 33, those with the area of the portion excluding the first hollow portion 24 and the second hollow portion 34 reduced as much as possible (that is, the regions of the first hollow portion 24 and the second hollow portion 34 made larger) may be adopted. In this case, since the weight of the entire first mounting table 20, second mounting table 30 or telescopic mounting device 10 is significantly reduced, it becomes possible to reduce the production cost and improve the transport efficiency of the telescopic mounting device 10.

[0015] On one hand, when the distance between the first mounting table 20 and the second mounting table 30 is reduced due to the expansion and contraction of the telescopic unit 40 and these mounting tables 20, 30 shift to the contracted state, the first abutting support member 28 pushes the second abutting support side wall portion 383 described later to abut and support the second plate body 30' below, and the second abutting support member 38 pushes the first abutting support side wall portion 283 described later to abut and support the first plate body 20' below. Further, at this time, each connecting member 29 is fitted into another connecting member 39 below, and each first fixing member 29' is inserted into the groove of the second fixing member 39' below (more specifically, the lid-shaped connecting member 29 is fitted into the connecting member 39, and the block-shaped first fixing member 29' is inserted into the groove of the second fixing member 39'), whereby each first mounting table 20 and each second mounting table 30 will overlap each other more stably.

[0016] Hereinafter, with reference to FIGS. 7 to 10, the structures and functions and effects of the first abutting support member 28 and the second abutting support member 38 will be described. The first abutting support member 28 has a first protruding block 281, a first fixed side wall portion 282, a first abutting support side wall portion 283, two first connecting portions 284, 285, a first abutting support opening 286, and a first fitting insertion opening 287. The first protruding block 281 is connected to the first fixed side wall portion 282. The first abutting support side wall portion 283 is connected to the first mounting table 20 via the first connecting portions 284, 285. The first fitting insertion opening 287 is defined by the first abutting support side wall portion 283 and the first fixed side wall portion 282. A first abutting support opening 286 is defined between the first abutting support side wall portion 283 and the first mounting table 20. The first protruding block 281 may be disposed at the central position in the longitudinal direction of the first fixed side wall portion 282 and the first abutting support side wall portion 283. The two first connecting portions 284, 285 may be disposed parallel to the first fixed side wall portion 282 and the first abutting support side wall portion 283. The first abutting support side wall portion 283 has an arcuate concave surface for abutting and supporting the first plate body 20', and the arcuate concave surface faces the first plate body 20'.

[0017] The second abutting support member 38 has substantially the same configuration as the first abutting support member 28, that is, a second protruding block 381, a second fixed side wall portion 382, a second abutting support side wall portion 383, two second connecting portions 384, 385, a second abutting support opening 386, and a second insertion opening 387. The second protruding block 381 is connected to the second fixed side wall portion 382. The second abutting support side wall portion 383 is connected to the second mounting table 30 via the second connecting portions 384, 385. The second insertion opening 387 is defined by the second abutting support side wall portion 383 and the second fixed side wall portion 382. A second abutting support opening 386 is defined between the second abutting support side wall portion 383 and the second mounting table 30. The second protruding block 381 may be disposed at the central position in the longitudinal direction of the second fixed side wall portion 382 and the second abutting support side wall portion 383. The two second connecting portions 384, 385 may be disposed to be parallel to the second fixed side wall portion 382 and the second abutting support side wall portion 383. The second abutting support side wall portion 383 has an arcuate concave surface for abutting and supporting the second plate body 30', and the arcuate concave surface faces the second plate body 30'.

[0018] As shown in FIG. 8, the first protruding block 281 has a protruding block upper surface 281a, a protruding block side surface 281b, and a protruding block bottom surface 281c. The protruding block side surface 281b can be an inclined surface, an arcuate surface, a stepped surface, or a surface in other forms. The width of the protruding block upper surface 281a in a certain direction is smaller than the width of the second insertion opening 387 in the same direction on the second mounting table 30 below, and the width of the protruding block bottom surface 281c in the same direction is larger than the width of the second insertion opening 387 in the same direction on the second mounting table 30 below. With such a configuration, when the first protruding block 281 on the first mounting table 20 is inserted into the second insertion opening 387 in the corresponding second abutting support member 38 on the lower second mounting table 30, the second abutting support side wall portion 383 is pushed by the first protruding block 281 and clamps the second plate body 30' placed on the second mounting table 30. Thereby, the falling off of the second plate body 30' and the damage to the second plate body 30' caused by the collision with the side wall of the mounting table are avoided.

[0019] More specifically, as shown in FIG. 9, when the first mounting table 20 and the second mounting table 30 are in the unfolded state, the second abutting support side wall portion 383 is in the initial position facing the second plate body 30' placed on the second mounting table 30 with the second abutting support opening 386 therebetween. Then, as shown in FIG. 10, when the first mounting table 20 and the second mounting table 30 shift to the contracted state, the first protruding block 281 in the first abutting support member 28 on the first mounting table 20 is inserted into the second insertion opening 387 in the second abutting support member 38 on the lower second mounting table 30. At this time, however, the second abutting support side wall portion 383 moves in the direction in which the second abutting support opening 386 becomes smaller, and eventually abuts against and clamps the second plate body 30'.

[0020] As shown in FIG. 11, a first plate body 20' is placed on the first placing portion 23 of the first placing table 20, and a second plate body 30' is placed on the second placing portion 33 of the second placing table 30. Further, positioning devices 225 and 325 are provided on the first bottom surface 22 of the first placing table 20 and the second bottom surface 32 of the second placing table 30, respectively, for positioning the plate body placed on the lower placing table at a predetermined position (for example, the central position) on the placing table when the distance between the vertically adjacent placing tables is reduced.

[0021] As shown in FIGS. 12 and 13, the first placing table 20 may further have a supporting member 50 for supporting the first plate body 20' from below. In this embodiment, the first placing portion 23 has at least one insertion hole 52, and the supporting member 50 has an insertion member 51 at a position corresponding to the insertion hole 52. The supporting member 50 is connected to the first placing portion 23 when each insertion member 51 is received in each insertion hole 52. Further, as shown in FIGS. 14 to 16, the supporting member 50 has an arcuate cross-sectional shape that is convex toward the first plate body 20'. When the first plate body 20' is placed on the first placing portion 23, a part of the supporting member 50 abuts against the back surface of the first plate body 20', thereby preventing or alleviating the downward deformation of the first plate body 20' due to gravity.

[0022] The telescopic mounting device 10 may have other structures without departing from the gist of the present invention. For example, as shown in FIG. 5, the first receiving hole 27 does not penetrate both the first upper surface 21 and the first bottom surface 22, and may be configured as a concave groove for inserting a part of the second upper positioning member 35 or the second lower positioning member 36. Similarly, the second receiving hole 37 may also be configured as a concave groove. As another form, the first receiving hole 27 and the second receiving hole 37 may be omitted. In this case, the first upper positioning member 25, the first lower positioning member 26, the second upper positioning member 35, or the second lower positioning member 36 is configured as a device such as a spring. When the mounting tables 20 and 30 are in the contracted state, the positioning members 25, 26, 35, and 36 are pressed against the upper surface or the bottom surface of each of the mounting tables 20 and 30 and compressed. On the other hand, when the mounting tables 20 and 30 are in the deployed state, the positioning members 25, 26, 35, and 36 return to the uncompressed state and are used for positioning the plate body. As yet another form, the shape, structure, and connection method of each connecting member 29 and the first fixing member 29' may be changed as needed. Similarly, the shape, structure, and connection method of each connecting member 39 and each second fixing member 39' may be changed as needed, and furthermore, these connecting members 29 and 39 and these fixing members 29' and 39' may be omitted. As yet another form, the insertion hole 52 of the first mounting table and the insertion member 51 of the support member 50 may be replaced, that is, the support member 50 may be provided with an insertion hole and the first mounting portion 23 may be provided with an insertion member. All such easily conceivable structural changes are included in the scope of the claims of the present invention.

[0023] (Summary of Embodiment) The telescopic mounting device of the present invention is a telescopic mounting device for mounting a plurality of plate bodies, comprising at least two first mounting tables each capable of mounting a first plate body, at least two second mounting tables each capable of mounting a second plate body, and a plurality of telescopic units. Each of the first mounting tables has a first upper surface, a first bottom surface, at least one first upper positioning member protruding upward from the first upper surface, and at least one first lower positioning member protruding downward from the first bottom surface. Each of the second mounting tables is alternately arranged at intervals in the vertical direction with respect to each of the first mounting tables. Each of the second mounting tables has a second upper surface, a second bottom surface, at least one second upper positioning member protruding upward from the second upper surface, and at least one second lower positioning member protruding downward from the second bottom surface. The telescopic unit is provided on these first mounting tables and these second mounting tables, and switches these first mounting tables and these second mounting tables between a deployed state in which the distance between each first mounting table and each second mounting table expands and a contracted state in which the distance between each first mounting table and each second mounting table shrinks.

[0024] Each of the first mounting tables further has a first accommodation hole, and each of the second mounting tables further has a second accommodation hole. When these first mounting tables and these second mounting tables are in the contracted state, each first lower positioning member can be inserted into the second accommodation hole located below it and corresponding in position, each first upper positioning member can be inserted into the second accommodation hole located above it and corresponding in position, and each second upper positioning member can be inserted into the first accommodation hole located above it and corresponding in position, and each second lower positioning member can be inserted into the first accommodation hole located below it and corresponding in position, which is preferable.

[0025] It is preferable that the position of each first lower positioning member and the position of each second upper positioning member do not overlap each other in the vertical direction, and the position of each first upper positioning member and the position of each second lower positioning member do not overlap each other in the vertical direction.

[0026] When these first mounting tables and these second mounting tables are in the deployed state, it is preferable that the horizontal position of the bottom edge of each of the first lower positioning members is lower than the horizontal position of the upper edge of each of the second upper positioning members.

[0027] When these first mounting tables and these second mounting tables are in the deployed state, it is preferable that the horizontal position of the upper edge of each of the first upper positioning members is higher than the horizontal position of the bottom edge of the second lower positioning member.

[0028] It is preferable that each of the first receiving holes penetrates through both the first upper surface and the first bottom surface, and each of the second receiving holes penetrates through both the second upper surface and the second bottom surface.

[0029] Each of the first receiving holes is recessed in each of the first upper positioning members or each of the first lower positioning members. It is preferable that each of the second receiving holes is recessed in each of the second upper positioning members or each of the second lower positioning members.

[0030] The telescopic mounting device of the present invention is a telescopic mounting device for mounting a plurality of plate bodies, comprising at least two first mounting tables each capable of mounting a first plate body, at least two second mounting tables each capable of mounting a second plate body, and a plurality of telescopic units. Each of the first mounting tables has a first upper surface, a first bottom surface, and a first abutting support member for abutting and supporting a second plate body placed on the second mounting table. Each of the second mounting tables is alternately arranged at intervals in the vertical direction with respect to each of the first mounting tables. Each of the second mounting tables has a second upper surface, a second bottom surface, and a second abutting support member for abutting and supporting a first plate body placed on another adjacent first mounting table. The telescopic unit connects and telescopes the first mounting table and the second mounting table to change the distance between these mounting tables. The first abutting support member has a first abutting support side wall portion, a first insertion opening, and a first protruding block. The second abutting support member has a second abutting support side wall portion, a second insertion opening, and a second protruding block. When the distance between the first mounting table and the second mounting table is reduced by the expansion and contraction of the plurality of expansion and contraction units, the first protruding block of the first abutting support member is inserted into the second insertion opening and presses the second abutting support side wall portion against the second plate body placed on the second mounting table. Thus, the second plate body is configured to be abutted and supported via the second abutting support side wall portion.

[0031] Preferably, the first protruding block has a first protruding block upper surface, a first protruding block bottom surface, and a first protruding block side surface located between the first protruding block upper surface and the first protruding block bottom surface.

[0032] Preferably, the first protruding block side surface is an inclined surface or an arcuate surface.

[0033] The width of the first protruding block upper surface is smaller than the width of the second insertion opening. Preferably, the width of the first protruding block bottom surface is larger than the width of the second insertion opening.

[0034] The first abutting support member further has a first fixed side wall portion, at least one connecting portion, and a first abutting support opening. The first protruding block is fixed to the first fixed side wall portion. At least one connecting portion connects both sides of the first abutting support side wall portion and the first mounting table, and the first insertion opening is defined by at least one connecting portion and the first fixed side wall portion. Preferably, the first abutting support opening is defined by the first abutting support side wall portion and the first mounting table.

[0035] Preferably, the first protruding block is disposed at a longitudinal center position of the first fixed side wall portion and the first contact support side wall portion.

[0036] Preferably, at least one of the connecting portions is substantially parallel to the first fixed side wall portion and the first contact support side wall portion.

[0037] Preferably, the first contact support side wall portion has an arcuate concave surface for contacting and supporting the first plate body.

[0038] The first mounting table has a first mounting portion adjacent to the first upper surface, The first mounting portion is for mounting the first plate body, Preferably, the first contact support member is installed on the first upper surface.

[0039] Preferably, the first mounting table is an integral one manufactured by injection molding.

[0040] The first bottom surface further has a positioning device, The positioning device is configured to contact the second plate body placed on the second mounting table when the distance between the first mounting table and the second mounting table is reduced due to the expansion and contraction of the plurality of telescopic units, and position the second plate body at the central position of the second mounting table.

[0041] The telescopic mounting device of the present invention is a telescopic mounting device for mounting a plurality of plate bodies, comprising at least two mounting tables each capable of mounting a plate body and a plurality of telescopic units, Each of the mounting tables has a first mounting portion for mounting the plate body and a support member that partially contacts the bottom surface of the plate body when the plate body is placed on the first mounting portion. The telescopic unit is provided on these mounting tables, and switches these mounting tables between a deployed state in which the distance between the mounting tables expands and a contracted state in which the distance between the mounting tables contracts.

[0042] The support member has at least one insertion member. The first mounting portion has at least one insertion hole provided at a position corresponding to the position of each insertion member. It is preferable that the support member is connected to the first mounting portion by inserting the insertion member into the insertion hole.

[0043] The support member has at least one insertion hole. The first mounting portion has at least one insertion member provided at a position corresponding to the position of each insertion hole. It is preferable that the support member is connected to the first mounting portion by inserting the insertion member into the insertion hole.

[0044] The telescopic mounting device of the present invention is a telescopic mounting device for mounting a plurality of plate bodies, comprising at least two mounting tables each capable of mounting a first plate body and a plurality of telescopic units. The telescopic unit is provided on these mounting tables, and switches these mounting tables between a deployed state in which the distance between the mounting tables expands and a contracted state in which the distance between the mounting tables contracts. Each of the mounting tables has at least one connecting member. The connecting member is configured to connect to the connecting member of an adjacent mounting table when these mounting tables are in the contracted state.

[0045] All of the connecting members are in the shape of a lid. It is preferable that the connecting member is configured to be fitted onto another connecting member on an adjacent mounting table when these mounting tables are in the contracted state.

[0046] The telescopic placement device of the present invention is a telescopic placement device for placing a plurality of plate bodies, and comprises at least one first placement table each capable of placing a first plate body, at least one second placement table each capable of placing a second plate body, and a plurality of telescopic units, each of the second placement tables is alternately arranged at intervals in the vertical direction with respect to each of the first placement tables, the telescopic units are provided on these first placement tables and these second placement tables, and switch these first placement tables and these second placement tables between a deployed state in which the distance between each first placement table and each second placement table expands and a contracted state in which the distance between each first placement table and each second placement table shrinks, each of the first placement tables further has at least one first fixing member, and each of the second placement tables further has at least one second fixing member, the first fixing member and the second fixing member are configured to be fixed to each other when these first placement tables and these second placement tables are in the contracted state,

[0047] the first fixing member is in the shape of a block, and the second fixing member is in the shape of a grooved block, it is preferable that the first fixing member is configured to be inserted into the groove of the second fixing member when the first placement table and the second placement table are in the contracted state.

[0048] It is preferable that the plate body is a semiconductor wafer or a display panel.

Explanation of reference numerals

[0049] 10 Telescopic placement device 20 First placement table 21 First upper surface 22 First bottom surface 225 Positioning device 23 First placement portion 24 First hollow portion 25 First upper positioning member 26 First lower positioning member 27 First accommodation hole 28 First abutting support member 281 First protruding block 281a Upper surface of protruding block 281b Side surface of protruding block 281c Bottom surface of protruding block 282 First fixed side wall portion 283 First abutting support side wall portion 284 First connecting portion 285 First connecting portion 286 First abutting support opening 287 First insertion opening 29 Connecting member 29’ First fixing member 20’ First plate body 30 Second mounting table 31 Second upper surface 32 Second bottom surface 325 Positioning device 33 Second mounting portion 34 Second hollow portion 35 Second upper positioning member 36 Second lower positioning member 37 Second accommodation hole 38 Second abutting support member 381 Second protruding block 382 Second fixed side wall portion 383 Second abutting support side wall portion 384 Second connecting portion 385 Second connecting portion 386 Second abutting support opening 387 Second insertion opening 39 Connecting member 39’ Second fixing member 30’ Second plate body 40 Telescopic unit 50 Support member 51 Insertion member 52 Insertion hole L Virtual center line

Claims

1. An expandable loading device for loading a plurality of plate bodies, At least two first mounting tables, each of which can support a first plate body, at least two second mounting tables, each of which can support a second plate body, and a plurality of telescopic units; each of the first mounting tables has a first upper surface, a first bottom surface, and a first contact support member for contacting and supporting a second plate body placed on the second mounting table; the second mounting tables are alternately arranged with respect to the first mounting tables at intervals in the up-down direction, and each of the second mounting tables has a second upper surface, a second bottom surface, and a second abutment support member for abutting and supporting a first plate body placed on another adjacent first mounting table; the extension unit connects the first and second mounting tables and extends and retracts the first and second mounting tables to change the distance between the first and second mounting tables; The first abutment support member has a first abutment support side wall portion, a first insertion opening, and a first protruding block, The second abutment support member has a second abutment support side wall portion, a second insertion opening, and a second protruding block, An extendable mounting device configured such that when the distance between the first mounting base and the second mounting base becomes smaller due to extension and contraction of the multiple extension units, the first protruding block of the first abutment support member is inserted into the second insertion opening to press the second abutment support side wall portion against the second plate body placed on the second mounting base, thereby abutting and supporting the second plate body via the second abutment support side wall portion.

2. 2. The extendable mounting device of claim 1, wherein the first protruding block has a first protruding block top surface, a first protruding block bottom surface, and a first protruding block side surface located between the first protruding block top surface and the first protruding block bottom surface.

3. The extendable mounting device according to claim 2 , wherein the first protruding block side surface is an inclined surface or an arcuate surface.

4. The width of the upper surface of the first protruding block is smaller than the width of the second insertion opening, 3. The extendable mounting device according to claim 2, wherein the width of the bottom surface of the first protruding block is greater than the width of the second insertion opening.

5. The first abutment support member further includes a first fixed side wall portion, at least one connecting portion, and a first abutment support opening; the first protruding block is fixed to the first fixed side wall portion, At least one of the connecting portions connects both sides of the first contact support side wall portion to the first mounting base, and the at least one connecting portion and the first fixed side wall portion define the first insertion opening, The extendable mounting device according to claim 1 , wherein the first abutment support opening is defined by the first abutment support sidewall and the first mounting table.

6. The extendable mounting device according to claim 5 , wherein the first protruding block is disposed at a central position in the longitudinal direction of the first fixed side wall portion and the first contact support side wall portion.

7. The extendable platform device of claim 5 , wherein at least one of the connecting portions is generally parallel to the first fixed sidewall portion and the first abutting support sidewall portion.

8. The extendable mounting device according to claim 5 , wherein the first contact support side wall portion has an arc-shaped concave surface for contacting and supporting the first plate body.

9. the first mounting table has a first mounting portion adjacent to the first upper surface, the first mounting portion is for mounting the first plate body, The extendable mounting device according to claim 1 , wherein the first abutting support member is disposed on the first upper surface.

10. The extendable mounting device according to claim 9 , wherein the first mounting table is a one-piece unit manufactured by injection molding.

11. the first bottom surface further comprises a positioning device; The extendable mounting device of claim 9, wherein the positioning device is configured to abut against the second plate placed on the second mounting table when the distance between the first mounting table and the second mounting table becomes smaller due to extension and contraction of the multiple extension units, thereby positioning the second plate at a central position of the second mounting table.

12. The extendable support device according to claim 1 , wherein the plate is a semiconductor wafer or a display panel.

Citation Information

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