Substrate container

Abstract

To provide a substrate container.SOLUTION: A substrate container comprises: a shell including a front opening and an interior space; a plate configured to be fixed to the shell; a connector including a threaded end having an inner diameter, the connector extending through the shell and the plate and secured via a nut at the threaded end; and a replaceable, field-serviceable inlet or outlet module including a check valve and a nozzle having an end with an outer diameter smaller than the inner diameter of the threaded end of the connector, where the end of the nozzle is located within the inner diameter of the threaded end of the connector.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure relates to connectors and purge modules used in substrate containers such as, for example, a front opening unified pod (FOUP) used in semiconductor manufacturing. More specifically, the present disclosure relates to a screw-type connector between a substrate container shell and a conveyor plate that enables the inflow or outflow of purge gas into the substrate container.

Background Art

[0002] Substrate containers are used to transport wafers at various stages of the semiconductor manufacturing process. Substrate containers include, for example, a front opening unified pod (FOUP) (hereinafter referred to as "FOUP"). An FOUP typically includes a shell that provides an internal space for holding wafers, and a plate used to interface with various conveyors and other devices, for example, to enable the FOUP to move within a processing facility. The shell and the plate are fixed to each other by, for example, welding, connectors, etc.

[0003] During processing, it is necessary to introduce and remove gas from the FOUP, for example, in a purge process. This requires one or more locations where gas can enter and exit the FOUP.

Summary of the Invention

Problems to be Solved by the Invention

[0004] An object of the present invention is to provide an improved substrate container compared to the above-described substrate container.

Means for Solving the Problems

[0005] The present disclosure relates to connectors and purge modules used in substrate containers such as, for example, a front opening unified pod (FOUP) used in semiconductor manufacturing. More specifically, the present disclosure relates to a screw-type connector between a shell of a substrate container and a conveyor plate that enables the inflow or outflow of purge gas into the substrate container.

[0006] The shell of the substrate container and the plate of the substrate container can be coupled by a threaded connector and a seal disposed between the threaded connector, the plate, and the shell. When a nut is attached to and tightened on the threaded connector to fix the plate and the shell, the seal can be compressed. This threaded connector enables a strong connection between the shell and the plate necessary to maintain the dimensions of the substrate container and to facilitate the transportation and handling of the substrate container.

[0007] The connector can be separated from a purge module that controls the flow in and out of the substrate container. Removable and field-repairable components can be used as such a purge module for the substrate container. These removable and field-repairable components can be repaired or replaced without affecting the dimensions of the substrate container. The dimensions of the substrate container are critical, especially for substrate containers used in automatic positioning and other operations during the manufacture of semiconductor wafers. This makes it possible to repair or replace the unit instead of replacing the entire substrate container.

[0008] Using such a connector allows the use of a larger diameter filter, for example, by placing the filter in a removable and field-repairable purge module or attaching it to the end of the connector, which can reduce the resistance to the gas flow in and out of the substrate container.

[0009] In one embodiment, the substrate container includes a container shell having a wall with an opening and an internal space defined by the wall. The container shell includes a shell opening having a first inner diameter. The substrate container also includes a plate configured to be fixed to the shell. The plate includes a surface, a recess, and an opening located within the recess having a second inner diameter. The substrate container further includes a connector. The connector includes a portion having an outer diameter smaller than the first and second inner diameters, a hollow portion having a third inner diameter, a first end having an outer diameter larger than the first inner diameter, and a second end having a thread. The nut is provided with a thread configured to engage with the thread of the second end of the connector. A seal is disposed between the container shell and the plate. The first end of the connector is disposed on the first side of the container shell, and the second end of the connector, the seal, and the plate are disposed on the second side of the container shell opposite the first side of the container shell. The connector passes through the shell opening and the plate opening. When the nut is screwed onto the connector and tightened, the seal contacts each of the container shell, the plate, and the connector.

[0010] In one embodiment, at least one of the thread of the connector and the thread of the nut includes a locking feature. In one embodiment, the seal is an O-ring.

[0011] In one embodiment, the connector further includes a filter membrane disposed at the first end of the connector, a filter grill, and a filter cap configured to mechanically engage with the first end of the connector and fix the filter grill and the filter membrane to the first end of the connector.

[0012] In one embodiment, the substrate container further includes a front purge module including a check valve and a nozzle including an end portion having an outer diameter smaller than a third inner diameter, and the front inlet purge module is arranged such that the end portion of the nozzle is within the hollow portion of the connector. In one embodiment, the front purge module includes a plurality of tabs, and the plate includes a plurality of inclined slots configured to receive the tabs of the front inlet purge module. In one embodiment, each of the plurality of tabs has a recess, and the plate has a plurality of detent ribs configured to engage the recesses.

[0013] In one embodiment, the connector includes an outlet having an opening, and the center of the opening is offset from the center of the inner diameter of the connector. In one embodiment, a diffuser tube is connected to the outlet.

[0014] In one embodiment, when a nut is threaded onto the connector, the nut and the second end portion of the connector are entirely placed within a recess. In one embodiment, a filter membrane is disposed within the recess. In one embodiment, the filter membrane has a diameter larger than the inner diameter of the connector.

[0015] In one embodiment, the substrate container includes a rear inlet purge module, and the rear inlet purge module includes a grommet including a check valve, a filter membrane, a grill configured to support the filter membrane, and a rear inlet purge module body. The rear inlet purge module body has an inner diameter larger than the outer diameter of the grommet and includes a portion configured to receive the grommet and a nozzle having an outer diameter smaller than a third inner diameter. The end of the nozzle is within the connector. In one embodiment, the grommet is an overmolded grommet including a substrate and an elastomeric component, the substrate including at least one of polycarbonate and carbon nanotubes. The elastomeric component is formed of an elastomer and overmolded onto the substrate. In one embodiment, the check valve is a flapper valve. In one embodiment, the filter membrane has a diameter larger than the third inner diameter. In one embodiment, the rear inlet purge module body includes a plurality of tabs, and the plate includes a plurality of inclined slots each configured to receive one of the plurality of tabs. In one embodiment, the rear inlet purge module body includes a plurality of fingers configured to engage with the plate to prevent rotation of the rear inlet purge module when the entirety of the plurality of tabs is within the plurality of slots.

[0016] In one embodiment, the FOUP includes a shell including a front opening and an internal space, a plate configured to be fixed to the shell, a connector including a threaded end having an inner diameter, the connector passing through the shell and the plate and being fixed via a nut at the threaded end, a check valve, and an exchangeable and field-repairable inlet or outlet module including a nozzle having an outer diameter smaller than the inner diameter of the threaded end of the connector. In this embodiment, the exchangeable and field-repairable inlet or outlet module is disposed within the plate, and the end of the nozzle is disposed within the inner diameter of the threaded end of the connector.

[0017] In one embodiment, the replaceable and field-repairable inlet or outlet module is selected from the group consisting of a front inlet purge module that is an umbrella check valve configured to allow inflow into the shell, a front outlet purge module that is a mechanical check valve configured to allow outflow from the shell, and a rear inlet purge module that is an umbrella check valve configured to allow inflow into the shell and further includes a grommet and a filter membrane.

Brief Description of the Drawings

[0018]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8A

Figure 8B

Figure 9

Figure 10

Best Mode for Carrying Out the Invention

[0019] The present disclosure relates to connectors and purge modules used in substrate containers such as, for example, a Front Opening Unified Pod (FOUP) used in semiconductor manufacturing. More specifically, the present disclosure relates to a screw-type connector between a substrate container shell and a conveyor plate that enables the inflow or outflow of purge gas into or from the substrate container.

[0020] A substrate container is a container for carrying such wafers during the transportation and / or processing of semiconductor wafers. The substrate container may be, for example, a FOUP or a FOSB (Front Opening Shipping Box).

[0021] FIG. 1 is an exploded view showing a part of a substrate container 100 according to an embodiment, in which a shell 102 is joined to a plate 104 by a connector 106. A nut 112 is used together with the connector 106 to couple the shell 102 and the plate 104. A seal 120 is disposed between the shell 102 and the plate 104. The seal 120 may be a polymer seal. In one embodiment, the seal 120 is a fluoropolymer seal. In one embodiment, the seal 120 is an elastomer seal. The material of the seal can be selected based on design aspects such as gas emission, particle generation, and low volatility.

[0022] The shell 102 is part of the substrate container 100. The shell 102 can define an internal space where wafers are stored and processed. The internal space of the shell 102 may be open on one side where the wafers are loaded into the shell. The open side of the internal space can be closed by another cover during wafer processing. The shell 102 can include one or more protrusions that support the wafer when the wafer is disposed in the internal space of the shell 102. The shell 102 includes one or more shell openings 110. Each of the shell openings 110 may correspond to a position where the connector 106 couples the plate 104 to the shell 102. The shell openings 110 can be provided near a corner on one side of the shell 102, such as a lower corner of the shell 102, for example. Each of the shell openings 110 may be circular or substantially circular within manufacturing tolerances and position constraints, for example, facing the closed rear end of the internal space away from the open side of the internal space. The shell opening may penetrate from the first side surface 122 of the shell 102 to the second side surface 124 of the shell 102. The first side surface 122 may be a side surface of the shell that defines the internal space. The second side surface 124 may be the plate 104 facing the side surface when the shell 102 and the plate 104 are assembled for the substrate container 100.

[0023] Plate 104 is a plate connected to shell 102. Plate 104 may be a conveyor plate to facilitate the movement and placement of substrate container 100. Plate 104 may include a surface 126 that faces outward from shell 102 when plate 104 and shell 102 are assembled to form substrate container 100. The surface 126 of plate 104 can include one or more alignment recesses used to position and support substrate container 100 relative to one or more wafer processing devices such as a purge device. Plate 104 includes one or more recesses 108. Recesses 108 are recessed from the surface 126 of plate 104 in a direction in which shell 102 is located when shell 102 and plate 104 are assembled to form substrate container 100. Each of recesses 108 may correspond to a location where connector 106 couples plate 104 and shell 102. Each of recesses 108 can include a plate opening 128 through which connector 106 can penetrate plate 104. Each of plate openings 128 may be circular or substantially circular within the range of manufacturing tolerances and position constraints.

[0024] Connector 106 may be used to couple plate 104 and shell 102. Connector 106 has a first end 114 and a second end 116. The first end 114 of connector 106 has a diameter larger than the inner diameter of shell opening 110. The first end 114 may be disposed in the internal space defined by shell 102 when shell 102, plate 104, and connector 106 are assembled such that connector 106 maintains and restricts the movement of shell 102. The second end 116 of connector 106 has an outer diameter smaller than the inner diameters of these openings 110, 128 so as to pass through shell opening 110 and plate opening 128 located in recess 108. A thread configured to engage the thread of nut 112 is formed on the second end 116. In one embodiment, when shell 102, plate 104, and connector 106 are combined, the second end 116 of connector 106 is entirely disposed within recess 108 of plate 104.

[0025] The connector 106 has a passage through which a purge gas (e.g., nitrogen) or a fluid such as a gas purged from the substrate container 100 can enter and exit the internal space defined by the shell 102.

[0026] The nut 112 can be used with the connector 106 to couple the plate 104 and the shell 102. The nut 112 is threaded and can engage the threaded second end 116 of the connector 106. The threads at one or more of the nut 112 and the second end 116 of the connector 106 can include one or more locking features (not shown). The locking features can include, for example, a serrated surface, a ridge, a scallop, or other such features for restricting rotation when the nut 112 is screwed onto the second end 116 of the connector 106. In one embodiment, when the plate 102, the shell 104, and the connector 106 are combined and the nut 112 is screwed onto the second end 116 of the connector 106, the nut 112 is entirely received within the recess 108 of the plate 104. The nut 112 can be, for example, a castle nut and has a plurality of protrusions 118 for engaging a tool (not shown) for rotating the nut 112 relative to the connector 106 when screwing the nut 112 onto the second end 116 of the connector 106.

[0027] The shell 102, the plate 104, the connector 106, and / or the nut 112 can be made of a polymer such as an injection-moldable polymer. In one embodiment, the shell 102, the plate 104, the connector 106, and / or the nut 112 includes one or more types of polyolefin. In one embodiment, the shell 102, the plate 104, the connector 106, and / or the nut 112 includes polycarbonate. In one embodiment, the polymer used for the shell 102, the plate 104, the connector 106, and / or the nut 112 may include carbon fill. In one embodiment, the carbon fill included in the shell 102, the plate 104, the connector 106, and / or the nut 112 can dissipate static electricity. The shell 102, the plate 104, the connector 106, and / or the nut 112 may be made from various thermoplastic polymer materials, more specifically, a thermoplastic polymer designed to minimize particle scattering. A part of the substrate container can be injection-molded.

[0028] The seal 120 is a seal that restricts leakage of fluids such as purge gas and / or reaction gas between the shell 102, the connector 106, and the plate 104. The seal 120 may be, for example, a flat gasket, an overmold seal, or an O-ring. The seal 120 can be arranged to contact each of the shell 102, the connector 106, and the plate 104 when the shell 102, the plate 104, and the connector 106 are combined and the nut 112 is screwed onto and tightened against the second end 116 of the connector 106. In one embodiment, the seal 120 is an O-ring disposed around the connector 106 and between the plate 104 and the shell 102 before the nut 112 is screwed onto the connector 106. In this embodiment, when the nut 112 is tightened, the O-ring is compressed and pressed against each of the shell 102, the plate 104, and the connector 106.

[0029] FIG. 2 is an exploded view of a filter connection portion at an end of the connector 200 within the shell 202 of the substrate container according to one embodiment. The end of the connector 200 may be the first end 114 of a connector such as the connector 106 described above and shown in FIG. 1. The filter 204 can be disposed on a connector such as the connector 106 described above and shown in FIG. 1. The diameter of the filter 204 may be larger than the inner diameter of the connector. The filter 204 may be a filter membrane such as, for example, a porous polymer filter membrane. The filter 204 can be made of one or more types of polymer materials, and non-limiting examples include polyolefin, polyamide, fluoropolymer, and the like. The filter 204 may be of any filter configuration, such as a single layer, multilayer, laminate, woven fabric, and / or non-woven fabric structure. In one embodiment, the filter 204 includes an electrostatic medium. The filter 204 is held in place by mechanical interference between the end of the connector 200 and the filter grill 206. The filter grill 206 can be held in place by the filter cap 208. The filter cap 208 includes a connector 210 configured to engage a tab 212 on the connector 200. The filter cap 208 may further include a retaining rib (not shown) under the spoke 210. The retaining rib on the spoke 210 can engage the filter grill 206 to limit rotation of the filter grill 206 and the filter cap 208 when the filter cap 208 is in position on the connector 200.

[0030] Figure 3 is a cross-sectional view of the end of the filter 302 and the connector 300 according to one embodiment. Figure 3 shows a cross-sectional view along the center line of the assembled filter connection portion as shown in the exploded view of Figure 2. The end of the connector 300 includes a first connector lobe 304, a second connector lobe 306, and a connector recess 308. Each of the first connector lobe 304, the second connector lobe 306, and the connector recess 308 may be annular. The filter grill 310 includes a first filter grill shoulder 312 aligned with the first connector lobe 304, a second connector shoulder 314 aligned with the second connector lobe 306, and a filter grill lobe 316 aligned with the connector recess 308. When the filter grill 310 is fixed to the end of the connector 300, for example, via a filter cap (such as the filter cap 208 shown in Figure 2 described above), the filter 302 is compressed between the first connector lobe 304 and the first filter grill shoulder 312, the connector recess 308 and the filter grill lobe 316, and the second connector lobe 306 and the second filter grill shoulder 314. The first connector lobe 304 and the first filter grill shoulder 312, the connector recess 308 and the filter grill lobe 316, and the second connector lobe 306 and the second filter grill shoulder 314 may be in this order when moving from the center to the periphery of the filter 302. This crimps and compresses the filter 302 and reduces leakage of fluid, such as a purge gas like nitrogen passing through the edge of the filter 302.

[0031] Figure 4 is an exploded view of an inlet purge module 400 according to one embodiment. The inlet purge module 400 includes a nozzle 402 having an end 404 and a flange 406. The flange 406 can include one or more tabs 408 and engagement features 410. The inlet purge module 400 further includes a check valve 412 and a seal 414.

[0032] The inlet purge module 400 can be used to allow a fluid such as a purge gas (e.g., nitrogen) to flow into the substrate container in which the inlet purge module 400 is installed. The inlet purge module 400 may be, for example, a front inlet purge module disposed near the front opening (not shown) of a FOUP.

[0033] The nozzle 402 extends to an end 404. The end 404 of the nozzle 402 is configured to fit within a connector when the inlet purge module 400 is attached to a plate of the substrate container, such as the plate 104 shown in FIG. 1 described above. The nozzle 402 includes a passageway through which a fluid can be directed. When the inlet purge module 400 is attached to the substrate container, the nozzle 402 can extend into a connector, such as the connector 106 shown in FIG. 1 described above. The nozzle 402 can include a retaining feature 416 at the end 404, such as a cylindrical opening for holding a portion of the check valve 412.

[0034] The inlet purge module 400 includes a flange 406 surrounding the nozzle 402. The flange 406 can engage with a plate (such as the plate 104 shown in FIG. 1 above) to hold and position the inlet purge module 400. The flange 406 can include, for example, tabs 408 and an engagement feature 410. The tabs 408 can interface with grooves on the plate (such as inclined grooves), and by rotating when the inlet purge module 400 is inserted into a recess in the plate (such as the recess 108 shown in FIG. 1 above), the inlet purge module 400 can be fixed and positioned, where the inlet purge module 400 is attached and rotates. The engagement feature 410 is part of a mechanical engagement portion that resists rotation of the inlet purge module 400 when the inlet purge module 400 is attached to the plate in its entirety. The engagement feature 410 can be, for example, a recess configured to engage with a corresponding detent rib when the inlet purge module 400 is attached. In one embodiment, the engagement feature 410 can be a detent rib of the inlet purge module 400 configured to engage with a recess in the plate when attached. The flange 406 can further include one or more tool interfaces 418, such as the openings shown in FIG. 4, and a tool (not shown) can fit with the inlet purge module 400 so as to transmit a rotational force to the inlet purge module 400. Thereby, the inlet purge module 400 can be removed without affecting the dimensions of the connector or the substrate container, enabling removal and on-site repair of the inlet purge module 400.

[0035] The check valve 412 is a valve that allows one-way flow from the nozzle 402. The check valve 412 can be, for example, a flapper check valve. The stem 420 of the check valve 412 can include a ball, a protrusion, an inclined portion, or other features that mechanically engage with a retaining feature 416. For example, in the embodiment shown in FIG. 4, the stem 420 of the check valve 412 can include a conical portion that is pulled through an opening, which is the retaining feature 416 of the nozzle 402.

[0036] The seal 414 can be used to prevent gas leakage between the nozzle 402 and a connector such as the connector 106 shown in FIG. 1 above. The seal 414 can be, for example, an O-ring, an overmolded seal, a flat gasket, or other such seal. In the embodiment shown in FIG. 4, the seal 414 is an O-ring disposed in a groove 422 formed on the outer surface of the nozzle 402.

[0037] FIG. 5 is an exploded view of an outlet purge module 500 according to an embodiment. The outlet purge module 500 includes a nozzle 502 having an end 504, a flange 506, and a check valve 508.

[0038] The nozzle 502 extends to the end 504. The nozzle 502 includes an opening. The inner surface of the opening through the nozzle 502 may include one or more check valve engagement features 510. The check valve engagement features provide a mechanical interface, for example, between the inner surface of the nozzle 502 and the check valve 508 to fix and position the check valve 508. The check valve engagement features 510 can include one or more channels for ribs of a cage 514 of the check valve 508 and / or one or more retaining ribs or recesses configured to receive raised features of the cage 514 of the check valve 508.

[0039] The flange 506 can engage with a plate (such as the plate 104 shown in FIG. 1 described above) to hold and position the outlet purge module 500. The flange 506 may include, for example, tabs 520 and engagement features 522. The tabs 502 can interface with a groove on the plate, such as an inclined slot (such as the inclined slot 604 shown in FIG. 6 described below), to allow the outlet purge module 500 to be inserted into and rotated within a recess of the plate (such as the recess 108 shown in FIG. 1 described above), and fix the outlet purge module 500 to the plate in that position. The engagement feature 522 can fix the outlet purge module in its position when the outlet purge module is rotated and positioned within the plate, for example, when the outlet purge module is rotated a full rotation and positioned at a predetermined position within the plate. The engagement feature 522 can include, for example, a recess configured to engage with a corresponding detent rib on the plate when the outlet purge module 500 is attached. In one embodiment, the engagement feature 522 may be a detent rib of the outlet purge module 500 configured to engage with a recess on the plate when attached. The flange 506 may further include one or more tool interfaces 528, such as the openings shown in FIG. 5 where a tool (not shown) can fit with the outlet purge module 500 to rotate the outlet purge module 500. This allows the removal of the outlet purge module 500 without affecting the dimensions of the connector or the substrate container, enabling the removal and on-site maintenance of the outlet purge module 500.

[0040] The check valve 508 is a check valve that allows a fluid, such as a gas purged from a substrate container like a FOUP, to flow in one direction from the internal space of a wafer container (not shown) to the nozzle 502. The check valve 508 may be, for example, a mechanical check valve held in place by a spring 512 and a cage 514 surrounding the spring 512. The cage 514 may be engaged within the nozzle 502 by a check valve engagement feature 510. The check valve 508 may include a check valve seal 516. The check valve seal 516 is a seal configured to prevent leakage of a fluid, such as a purged gas, between the check valve 508 and the inner surface of the nozzle 502. The check valve seal 516 may be, for example, an O-ring, a flat gasket, an overmolded seal, or other such seal. In one embodiment, the check valve seal 516 is an O-ring disposed within a check valve seal groove 518 formed on the outer surface of the check valve.

[0041] The outlet purge module 500 can include a seal 524 for preventing leakage between the inner surface of the connector and the outer surface of the nozzle when the outlet purge module 500 is attached to a substrate container that includes a connector. The seal 524 may be, for example, a flat gasket or an overmolded seal. In one embodiment, the seal 524 may be an O-ring disposed within a groove 526 on the outer surface of the nozzle 502.

[0042] FIG. 6 is a bottom view of a purge module 600 installed in a substrate container on a plate 602 according to an embodiment. The plate 602 includes inclined slots 604. In an embodiment, one or more inclined slots 604 can be used. Each of the inclined slots 604 includes an opening 606 that can receive a tab 608 of the purge module 600 (e.g., tab 408 or tab 520 shown in FIGS. 4 and 5 respectively as described above). When the purge module 600 rotates after the tab 608 is inserted into the opening 606, the plate 602 restricts the movement of the purge module 600 perpendicular to the plane of the plate 602. When the purge module 600 makes a full rotation to a predetermined position, an engaging member (not shown) of the tab (such as engaging member 410 or engaging member 522 shown in FIGS. 4 and 5 respectively as described above) and the slot engage to restrict the rotation of the purge module 600 and fix the position of the purge module 600 relative to the plate 602. The engagement may be, for example, a fitting of a detent rib and a recess, or other such mechanical connection.

[0043] FIG. 7 is a cross-sectional view of an inlet purge module 700 according to an embodiment. The purge module body 702 has a first end 704 and a nozzle 706 extending toward a second end 708. The purge module body 702 is open from the first end 704 to the second end 708 so that a fluid such as a purge gas (e.g., nitrogen) can flow through the purge module body 702. When the inlet purge module 700 is installed in a substrate container such as the substrate container 100 shown in FIG. 1, the second end 708 can extend into a connector such as the connector 106 described above and shown in FIG. 1. The second end 708 can have an outer diameter smaller than the inner diameter of the connector. The nozzle 706 can extend into the connector so that a seal 720 prevents leakage between the connector and the nozzle 706 of the inlet purge module 700. The seal 720 may be disposed on the nozzle 706 toward the second end 708. The seal 720 may be, for example, a flat gasket, an overmolded seal, or an O-ring disposed in a groove 722 on the outer surface of the nozzle 706 as shown in the embodiment of FIG. 7. The opening at the first end 704 of the purge module body 702 has an inner diameter larger than the outer diameter of the grommet 709, so that the grommet 709 can be inserted into the purge module body 702 at the first end 704 as shown.

[0044] The grommet 709 is a grommet sized to fit within the first end 704 of the purge module body 702 and includes a check valve 712. The grommet 709 is retained within the purge module body 702 by a snap-fit relationship with a feature disposed on the purge module body 702. The check valve 712 is a check valve that allows a one-way flow of a fluid such as a purge gas (e.g., nitrogen) in a direction from the first end 704 to the second end 708 of the purge module body 702. The check valve 712 may be, for example, an umbrella check valve.

[0045] The grommet 709 can further limit or prevent leakage between the outer diameter of the grommet 709 and the inner diameter of the first end 704 of the purge module body 702 by forming a seal. The grommet 709 can include, for example, an O-ring disposed in an annular groove surrounding the grommet substrate or another such seal. In the embodiment shown in FIG. 7, the grommet 709 is an overmolded grommet that includes an elastomeric component 710 overmolded onto a substrate 714. In one embodiment, the grommet 709 is made of one or more materials selected to reduce or eliminate particle generation from friction with the purge module body 702. The elastomeric component 710 can be formed from a thermoplastic elastomer, which can include, in one non-limiting example, polybutylene terephthalate. The substrate 714 can be formed from at least one of polycarbonate and carbon nanotubes.

[0046] In some embodiments, the purge module body 702 can include a first annular protrusion 725a that contacts and compresses the elastomeric component 710 of the grommet 709 so that the grommet 709 seals against the purge module body 702. In addition to or alternatively to the first annular protrusion 725a, the purge module body 702 may also include a second annular protrusion 725b. The second annular protrusion 725b compresses and seals a filter element 716 between the elastomeric component 710 of the grommet 709 and the purge module body 702. In some embodiments, a filter grill 718 may be disposed between the grommet 709 and the purge module body 702.

[0047] The filter 716 is a filter such as a polymer filter membrane, for example. The filter 716 can be fixed in a predetermined position by clamping between the grommet 709 and the purge module body 702. In one embodiment, the interface between the grommet 709 and the purge module body 702 where the filter 716 is clamped can include lobes and recesses corresponding to those described above and shown in the figures. The filter 716 can have a diameter larger than the outer diameter of the purge module body 702 at the second end 708. The filter 716 can have a diameter larger than the inner diameter of the connector used in the substrate container where the inlet purge module 700 is installed.

[0048] The purge module body 702 can further include tabs 724 that engage the substrate container when the inlet purge module body 702 is attached to the substrate container. The inlet purge module 700 may include one or more tabs 724. The tabs 724 can engage slots similar to the inclined slots 1004 shown in FIG. 10 described below to position and fix the inlet purge module 700 to a plate of the substrate container such as the plate 1002 shown in FIG. 10 described above.

[0049] FIG. 8A is a top view of the connector 800 when combined with the shell 808 of the substrate container according to one embodiment. The connector 800 includes an outlet 802 having an opening 804. The center of the opening 804 is offset from the center 806 of the connector 800, and the connector 800 passes through the shell 808 and a plate (not shown). The connector 800 can be used as a connector, for example, at the rear of the FOUP on the opposite side of the open end of the internal space of the FOUP.

[0050] FIG. 8B is an exploded view of a diffuser tube assembly 810 for use with a connector 800 according to one embodiment. The diffuser tube assembly 810 includes a diffuser tube 812, a diffuser tube interface 816, and a seal 818. The diffuser tube interface 816 includes an engagement feature 814 that can mechanically interface with the diffuser tube 812 to fix the diffuser tube 812 to the diffuser tube interface 816. The diffuser tube interface 816 can be used to couple the diffuser tube 812 to the outlet 802 to receive the fluid flow from the outlet 804. The engagement feature 814 can be, for example, a barb for providing a friction fit, a tab or flange for providing a snap fit, or other such mechanical engagement. The diffuser tube interface 816 includes a path that allows a fluid such as a purge gas (e.g., nitrogen) to flow from the opening 804 to the diffuser tube 812. The diffuser tube interface 816 has an end opposite the end having the engagement feature 814, and that end can be inserted into the opening 804. The diffuser tube 812 can be joined to the diffuser tube interface 816, for example, by mechanical engagement, such as by friction fitting via a barb on the diffuser tube interface or by snap fitting via a tab or flange. The diffuser tube 812 can be joined to the diffuser tube interface 816 such that the diffuser tube 812 can be manually removed, for example, for replacement or servicing, so that the diffuser tube 812 is field serviceable. The seal 818 can be provided to reduce or prevent leakage between the opening 804 and the diffuser tube interface 816. The seal 818 can be, for example, a flat gasket, an overmolded seal, or in the embodiment shown in FIG. 8B, an O-ring. The diffuser tube 812 distributes fluid throughout the internal space of a substrate container such as a FOUP. One or more diffuser tube engagement features 814 can be, for example, a ridge corresponding to a ridge inside an opening (not shown) of the diffuser tube 812, a thread for a screw, and the like.

[0051] FIG. 9 is a cross-sectional view of a substrate container 900 including the connector 800 shown in FIGS. 8A and 8B and the inlet purge module 700 shown in FIG. 7 according to one embodiment. The substrate container 900 includes a shell 902. The shell 902 defines an internal space and has an inner surface facing the internal space. One or more shelves 916 protruding from the side surface of the inner surface of the shell 902 can be provided inside the shell 902. Each of the shelves can support a wafer 918, for example, during processing of a semiconductor wafer. The internal space may be open on one side, where the wafer 918 can be loaded onto the shelf 916 of the shell. This open side of the shell may be covered, for example, by a door. The shell 902 includes one or more shell openings 920. The shell openings 920 can correspond to positions where the shell 902 is joined to the plate 904 by a connector such as the connector 800. Each of the shell openings 920 may be circular or substantially circular, for example, toward the closed rear end of the internal space away from the open side of the internal space, within manufacturing tolerances and positional constraints.

[0052] The substrate container 900 also includes a plate 904. The plate 904 may be, for example, a conveyor plate such as a FOUP. The plate 904 may include a surface 910 that faces outward from the shell 902 when the shell 902 and the plate 904 are combined. The surface 910 can include one or more alignment recesses used to position and support the substrate container 900, for example, while passing through a facility or during wafer processing. The surface 910 can further include one or more recesses 912 that are recessed inward from the surface 910 toward the shell 902. The recesses 912 may correspond to positions where the connector 800 is used to couple the shell 902 and the plate 904. The plate openings 914 may be disposed in the recesses 912 and allow the connector 800 to extend at least partially through the plate 904. Each of the plate openings 914 may be circular or substantially circular within the range of manufacturing tolerances and positional constraints.

[0053] Connector 800 passes through shell 902 and plate 904, and on the side of plate 904 opposite to the side facing shell 902, nut 906 is screwed onto connector 800 to fix connector 800 in a predetermined position and fix shell 902 to plate 904. When nut 906 is screwed onto connector 800, nut 906 can be disposed entirely within recess 912 from the surface 910 of plate 904. The threading of nut 906 and / or connector 800 can include one or more locking features such as, for example, a serrated surface, a ridge, a scallop, or other such features, which limit rotation when nut 906 and connector 800 are screwed together. The offset of opening 802 from the center of connector 800 enables connector 800 to limit the movement of shell 902 relative to plate 904 when nut 906 is screwed onto the opposite end of connector 800. A portion of connector 800 can have an outer diameter smaller than the inner diameters of shell opening 920 and plate opening 914, such that connector 800 can extend through shell 902 and plate 904 into recess 912 of plate 904. This portion of connector 800 can include the threaded end onto which nut 906 is screwed.

[0054] Seal 908 is disposed between shell 902, plate 904, and connector 800. Seal 908 is a seal configured to prevent leakage between shell opening, plate opening, and connector 800 that allows gas to enter and exit the interior of shell 902. Seal 908 can be, for example, a flat gasket, an overmolded seal, or an O-ring as shown in the embodiment of FIG. 9. In the embodiment shown in FIG. 9, when shell 902, plate 904, and connector 800 are combined and nut 906 is screwed onto and tightened on connector 800, seal 908 is compressed by shell 902 and plate 904 such that seal 908 presses against each of shell 902, plate 904, and connector 800.

[0055] The displacement of the opening 804 of the connector 800 from the center of the connector 800 allows the diffuser tube 812 to extend vertically without interfering with the shelf 916 or the wafer 918 on the shelf 916 during use of the substrate container 900.

[0056] The inlet purge module 700 can be installed on the plate 904, for example, by inserting the tab 724 into a slot (not shown) of the plate 904 and rotating the inlet purge module. A seal 720 can be provided between the outside of the nozzle 706 and the inside of the connector 800 so that a part of the second end 708 and the nozzle 706 can extend into the connector 800.

[0057] FIG. 10 is a bottom view of a purge module 1000 installed on a plate 1002 of a substrate container according to an embodiment. The purge module 1000 may be an inlet purge module such as the inlet purge module 700 shown in FIG. 7 and described above. The plate 1002 can have one or more inclined slots 1004 configured to receive the tab 1006 of the purge module 1000 in a first rotational position and hold the tab 1006 in a second rotational position, as shown. The inclined slot 1004 can include, for example, an enlarged opening 1008 for receiving the tab 1006 and holding the tab 1006 in a constricted portion of the inclined slot 1004. Fingers 1010 can extend from each of the tabs 1006. As shown in FIG. 10, when the purge module 1000 rotates to the second rotational position, the fingers 1010 contact the inside of the enlarged opening 1008 and mechanically interfere with the rotation of the purge module 1000 in a direction that allows removal of the purge module 1000 from the plate 1002 of the purge module. The fingers 1010 are pushed inward by a tool (not shown) to remove this mechanical interference and allow rotation of the purge module 1000, enabling removal of the purge module 1000. This allows the purge module 1000 to be removed and serviced on-site without affecting the connector of the substrate container or the dimensions of the substrate container.

[0058] Aspect: Any of Aspects 1 to 18 can be combined with any of Aspects 19 to 20. Aspect 1. A substrate container, a container shell including a wall and an internal space defined by the wall, the container shell further including a shell opening having a first inner diameter, a plate configured to be fixed to the container shell, the plate including a surface, a recess from the first surface, and a plate opening having a second inner diameter located within the recess, a connector having a portion with an outer diameter smaller than the first and second inner diameters, a hollow portion having a third inner diameter, a first end portion having an outer diameter larger than the first inner diameter, and a second end portion having a thread, a nut having a thread configured to engage with the thread of the connector, and a seal disposed between the container shell and the plate, wherein the first end portion of the connector is located on the first side of the container shell, and the second end portion of the connector, the seal, and the plate are located on the second side of the container shell opposite to the first side of the container shell, the connector passes through the opening of the container shell and the opening of the plate, and when the nut is screwed onto the connector and tightened, the seal contacts the container shell, the plate, and the connector respectively, the substrate container.

[0059] Aspect 2. The substrate container according to Aspect 1, wherein at least one of the thread of the connector and the thread of the nut includes a locking feature. Aspect 3. The substrate container according to Aspect 1 or 2, wherein the seal is an O-ring.

[0060] Aspect 4. The substrate container according to any of Aspects 1 to 3, wherein the connector further includes a filter membrane disposed at the first end portion of the connector, a filter grill, and a filter cap configured to mechanically engage with the first end portion of the connector and fix the filter grill and the filter membrane to the end portion of the connector.

[0061] Aspect 5. The substrate container further includes a front purge module including a check valve and a nozzle including an end portion having an outer diameter smaller than a third inner diameter, and the front inlet purge module is arranged such that the end portion of the nozzle is within the hollow portion of the connector. The substrate container according to any one of Aspects 1 to 4.

[0062] Aspect 6. The front purge module includes a plurality of tabs, and the plate includes a plurality of inclined slots configured to receive the tabs of the front inlet purge module. The substrate container according to Aspect 5.

[0063] Aspect 7. Each of the plurality of tabs has a recess, and the plate has a plurality of retaining ribs configured to engage with the recesses. The substrate container according to Aspect 5 or 6. Aspect 8. The connector has an outlet having an opening, and the center of the opening is offset from the center of the inner diameter of the connector. The substrate container according to any one of Aspects 1 to 7.

[0064] Aspect 9. The diffuser tube is connected to the outlet. The substrate container according to Aspect 8. Aspect 10. When the nut is screwed onto the connector, the entire second end portion of the nut and the connector is located within the recess. The substrate container according to any one of Aspects 1 to 9.

[0065] Aspect 11. The substrate container according to Aspect 10 further includes a filter membrane disposed within the recess. Aspect 12. The filter membrane has a diameter larger than the inner diameter of the connector. The substrate container according to Aspect 11.

[0066] Aspect 13. A rear inlet purge module, A grommet including a check valve, A filter membrane, A grill configured to support the filter membrane, A rear inlet purge module body, including a portion having an inner diameter larger than the outer diameter of the grommet and configured to receive the grommet, and a nozzle having an outer diameter smaller than a third inner diameter, with the end of the nozzle located within the connector, and further comprising a rear inlet purge module including the rear inlet purge module body, for any of the substrate containers of Aspects 1 to 12.

[0067] Aspect 14. The substrate container of Aspect 13, wherein the grommet is an overmolded grommet including a substrate and an elastomeric component. Aspect 15. The substrate container of Aspect 13 or 14, wherein the check valve is an umbrella valve.

[0068] Aspect 16. The substrate container of any of Aspects 13 to 15, wherein the filter membrane has a diameter larger than the third inner diameter. Aspect 17. The substrate container of any of Aspects 13 to 16, wherein the rear inlet purge module body has a plurality of tabs, and the plate has a plurality of inclined slots configured to receive one of the plurality of tabs each.

[0069] Aspect 18. The substrate container of Aspect 17, wherein the rear inlet purge module has a plurality of fingers configured to engage with the plate to prevent rotation of the rear inlet purge module when the entirety of the plurality of tabs is within the plurality of slots.

[0070] Aspect 19. A front-opening and closing integrated pod (FOUP), including a shell having a front opening and an internal space, a plate configured to be fixed to the shell, a connector including a threaded end having an inner diameter, passing through the shell and the plate, and fixed by a nut at the threaded end. A front-opening and closing integrated pod (FOUP) comprising a check valve and an interchangeable and field-repairable inlet or outlet module comprising a nozzle having an end portion with an outer diameter smaller than the inner diameter of the threaded end of the connector, the end portion of the nozzle being located within the inner diameter of the threaded end of the connector.

[0071] Aspect 20. The FOUP of Aspect 19, wherein the interchangeable and field-repairable inlet or outlet module is selected from the group consisting of an inlet purge module configured such that the check valve allows inflow into the shell and an outlet purge module configured such that the check valve allows outflow from the shell.

[0072] Aspect 21. The FOUP of Aspect 19 or 20, wherein a part of the interchangeable and field-repairable inlet or outlet module protrudes from the plate. The examples disclosed in this application should be considered illustrative in all respects and not restrictive. The scope of the present invention is indicated by the appended claims rather than the foregoing description. And all modifications within the scope equivalent to the meaning of the claims are intended to be included in the claims.

Claims

1. A substrate container comprising: a shell including a front opening and an internal space; a plate configured to be fixed to the shell; a connector including a threaded end having an inner diameter, the connector passing through the shell and the plate and being fixed by a nut at the threaded end; a check valve and a nozzle including an end having an outer diameter smaller than the inner diameter of the threaded end of the connector, the nozzle being part of a replaceable and field-repairable inlet or outlet module, the end of the nozzle being located within the inner diameter of the threaded end of the connector; the connector includes an outlet having an opening on the side facing the shell, the center of the opening being offset from the center of the inner diameter of the threaded end of the connector located on the plate side opposite to the side facing the shell, and when the nut is screwed onto the threaded end of the connector, the connector restricts the movement of the shell relative to the plate, the substrate container.

2. The substrate container according to claim 1, wherein the replaceable and field-repairable inlet or outlet module is selected from the group consisting of an inlet purge module configured such that the check valve allows inflow into the shell and an outlet purge module configured such that the check valve allows outflow from the shell.

Images