Sample holder

Abstract

To increase the long-term reliability of a sample holder.SOLUTION: A sample holder comprises: a ceramic body that has a disc shape and has a first surface and a second surface located opposite to the first surface; a heat element that is located on the side of the second surface of the ceramic body; and a first insulating layer that covers the heat element. The ceramic body has a sample holding area in at least part of the first surface. The heat element is located while being divided into a plurality of areas on the side of the second surface. The first insulating layer has, between the two areas where the heat elements are located, a first groove that extends from the center of the second surface toward the outer periphery.SELECTED DRAWING: Figure 6

Description

Technical Field

[0001] The present disclosure relates to a sample holder in a semiconductor manufacturing apparatus used for generating a semiconductor thin film on a wafer, or heating a wafer when drying and baking a resist solution applied on the wafer to form a resist film.

Background Art

[0002] As a sample holder used in a semiconductor manufacturing apparatus, for example, a ceramic heater described in Patent Document 1 is known. The ceramic heater described in Patent Document 1 includes a ceramic substrate that is a disk-shaped member, and an insulating coating layer that is located on the lower surface of the ceramic substrate and has a heating resistor inside. The heating resistor extends in the circumferential direction of the ceramic substrate. The insulating coating layer is located so as to cover the heating resistor.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, when such a ceramic heater is used, when the insulating coating layer thermally expands due to the heat of the heating resistor, thermal stress is generated between the insulating coating layer and the ceramic substrate, and there is a risk that cracks will occur between the insulating coating layer and the ceramic substrate. Recently, sample holders are required to have excellent durability, that is, high long-term reliability.

Means for Solving the Problems

[0005] The sample holder of the present disclosure is disc-shaped and includes a ceramic body having a first surface and a second surface located opposite to the first surface, a heating resistor located on the second surface side of the ceramic body, and a first insulating layer covering the heating resistor. At least a part of the first surface of the ceramic body is a sample holding region. The heating resistor is divided and located in a plurality of regions on the second surface side. The first insulating layer has a first groove extending from the center of the second surface toward the outer periphery between two regions where the heating resistors are respectively located.

Advantages of the Invention

[0006] The sample holder according to one embodiment of the present disclosure has long-term reliability.

Brief Description of the Drawings

[0007]

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BEST MODE FOR CARRYING OUT THE INVENTION

[0008] The sample holder 100 will be described in detail.

[0009] FIG. 1 is a bottom view showing an example of the sample holder 100. FIG. 2 is a cross-sectional view of the sample holder 100 taken along line A-A' in FIG. 1. As shown in FIGS. 1 and 2, the sample holder 100 is disc-shaped and includes a ceramic body 1 having a first surface 11 and a second surface 12 located opposite to the first surface 11, a heating resistor 2 located on the second surface 12 side of the ceramic body 1, and a first insulating layer 3 covering the heating resistor 2. Note that the bottom view is a view seen toward the second surface 12. Also, the bottom surface is based on the fact that the first surface 11, which is the sample holding surface, is regarded as the upper surface. At least a part of the first surface 11 of the ceramic body 1 is a sample holding region. The heating resistor 2 is divided and located in a plurality of regions on the second surface 12 side. The first insulating layer 3 has a first groove 31 extending from the center to the outer periphery of the second surface 12 between two regions where the heating resistors 2 are respectively located.

[0010] The ceramic body 1 is a member for holding a sample in the sample holder 100. In FIG. 2, the surface of the ceramic body 1 in the sample holder 100 is described as the first surface 11, and the surface of the ceramic body 1 in the sample holder 100 is described as the second surface 12. Examples of the material of the ceramic body 1 include aluminum nitride or alumina. The ceramic body 1 may, for example, have an electrode for electrostatic adsorption inside. Examples of the dimensions of the ceramic body 1 are a thickness of 1.0 to 10.0 mm and a diameter of 150 to 500 mm.

[0011] The heating resistor 2 is a member for heating the sample in the sample holder 100. The heating resistor 2 is located on the second surface 12 side of the ceramic body 1. Here, the "second surface 12 side" means the vicinity of the second surface 12 of the ceramic body 1. Therefore, it is not limited to the second surface 12 of the ceramic body 1. The heating resistor 2 may be, for example, a linear member extending in the circumferential direction of the ceramic body 1. And, the heating resistor 2 in the sample holder 100 of the present embodiment is located divided into a plurality of regions. Thereby, the temperature of the heating resistor 2 can be adjusted for each region. Further, for example, the heating resistor 2 may be one in which folding is repeated while following the circumferential direction of the ceramic body 1. In FIGS. 1 and 2, for example, on the second surface 12 of the ceramic body 1, a case where the heating resistor 2 is divided into a plurality of regions, i.e., a first region, a second region, and a third region, is shown.

[0012] The heating resistor 2 may be, for example, a metal material such as silver, copper, gold, palladium, or silver palladium. The heating resistor 2 may contain, for example, a glass component in addition to the above metal material. The heating resistor 2 has, for example, a thickness of 0.001 to 0.1 mm, a width of 0.01 to 10 mm, and a length of 10 to 1000 mm. The heat generated by the heating resistor 2 can be transmitted through the inside of the ceramic body 1 and reach the sample holding surface, thereby heating the sample held on the sample holding surface.

[0013] In FIG. 1, for ease of understanding, the heating resistor 2 is shown by a one-dot chain line passing through the first insulating layer 3.

[0014] The first insulating layer 3 is a member for protecting the heating resistor 2. The first insulating layer 3 is provided so as to cover the heating resistor 2. Examples of the material of the first insulating layer 3 include resin and glass.

[0015] As shown in FIG. 1, the first insulating layer 3 has a first groove 31 extending from the center to the outer periphery of the second surface 12 between two regions where the heating resistors 2 are respectively located. The first insulating layer 3 Since it has the first groove 31, it can expand thermally toward the first groove 31. As a result, when the first insulating layer 3 does not have a groove extending from the center to the outer periphery of the ceramic body 1, cracks are less likely to occur in that region. As a result, the sample holder 100 is excellent in durability and long-term reliability.

[0016] As shown in FIG. 2, the first groove 31 may have a wall surface and a bottom surface. The shape of the first groove 31 may be, for example, such that the bottom surface is rounded when viewed in cross section. Also, the distance between the wall surfaces of the first groove 31 may increase toward the vicinity of the opening. Further, the first groove 31 may be, for example, a tapered shape formed only by the wall surfaces without having a bottom surface. Also, the first groove 31 extends, for example, from the center to the outer periphery of the second surface 12, but does not have to extend to the outer periphery of the ceramic body 1. Further, the first groove 31 only needs to extend at least partially from the center to the outer periphery of the second surface 12 and does not have to extend from the center of the second surface 12. The dimensions of the first groove 31 are, for example, a depth corresponding to the height of the wall surface of 0.010 to 0.100 mm, a width of the bottom surface of 1 to 30 mm, and a length of 30 to 250 mm.

[0017] Also, the first insulating layer 3 may extend to the outer periphery of the ceramic body 1. Specifically, the first insulating layer 3 may be located up to the outer periphery of the ceramic body 1.

[0018] Also, as shown in FIG. 3, in addition to the first groove 31, the first insulating layer 3 may have a concentric second groove 32 between two regions where the heating resistors 2 are respectively located. When the first insulating layer 3 satisfies such a configuration, since it can expand thermally not only toward the first groove 31 but also toward the second groove 32, cracks are even less likely to occur. As a result, the sample holder 100 is excellent in durability. Regarding thermal expansion, having the first groove 31 allows thermal expansion in a direction intersecting the radial direction of the second surface 12, and having the second groove 32 allows thermal expansion in the radial direction of the second surface 12.

[0019] In FIG. 3, for the sake of easy understanding, the heating resistor 2 is shown by a one-dot chain line passing through the first insulating layer 3. In the bottom views after FIG. 3, the heating resistor 2 is omitted.

[0020] Similar to the first groove 31, the second groove 32 may have a wall surface and a bottom surface. When viewed in cross section, for example, the bottom surface of the second groove 32 may be rounded. Also, the distance between the wall surfaces of the second groove 32 may increase toward the vicinity of the opening. Further, the second groove 32 may have, for example, a tapered shape provided only with wall surfaces without a bottom surface. Also, for example, the dimensions of the second groove 32 are such that the height of the wall surface is 0.010 to 1.00 mm, the width of the bottom surface is 1 to 30 mm, the inner peripheral length is 100 to 1000 mm, and the outer peripheral length is 150 to 1500 mm.

[0021] Also, as shown in FIG. 4, the second groove 32 may be located closer to the outer periphery than the center in the distance from the center to the outer periphery on the second surface 12. When the second groove 32 satisfies such a configuration, the area of the region including the outer periphery of the second surface 12 in the first insulating layer 3 becomes smaller, and the absolute value of the dimensional change due to the thermal expansion of this region becomes smaller, so the shape of the target region is easily maintained. As a result, the sample holder 100 is excellent in durability.

[0022] Also, as shown in FIG. 5, there may be a plurality of the first grooves 31 and the second grooves 32 respectively. By having a plurality of grooves, the first insulating layer 3 can thermally expand toward each groove. When such a configuration is satisfied, fewer cracks occur. As a result, the sample holder 100 is excellent in durability.

[0023] The sample holder 100 shown in FIG. 5 has the first grooves 31 and the second grooves 32 alternately. Specifically, from the center to the outer periphery of the second surface 12, the second groove 32, the first groove 31, the second groove 32 They are positioned in the order of . While securing the existence region of the heating resistor 2 in this way, since it has a plurality of grooves, cracks during thermal expansion can be suppressed. Therefore, the sample holder 100 satisfying such a configuration is excellent in durability.

[0024] Also, as shown in FIG. 5, the first groove 31 and the second groove 32 may have continuous portions. Thereby, compared with the case where the first groove 31 and the second groove 32 are separated, the portions of the grooves can be increased. That is, since the region that can thermally expand increases, cracks during thermal expansion are reduced.

[0025] Next, FIG. 6 shows another example in which the first groove 31 and the second groove 32 are alternately provided, and they are positioned in the order of the second groove 32, the first groove 31, the second groove 32, and the first groove 31 from the center to the outer periphery of the second surface 12.

[0026] Also, in the example shown in FIG. 6, the region of the first insulating layer 3 including the outer periphery of the second surface 12 is divided into four by the presence of the first groove 31 compared with the same region in the example shown in FIG. 5. When divided into a plurality in this way, each in the target region has a small area, and since the absolute value of the dimensional change due to thermal expansion is small, the shape of the target region is likely to be maintained. As a result, the sample holder 100 is excellent in durability.

[0027] Next, FIG. 7 shows an example in which the continuous portions of the first groove 31 and the second groove 32 are smoothly continuous in plan view. When satisfying such a configuration, when the first insulating layer 3 thermally expands, cracks are less likely to occur due to stress concentration compared with the case where the continuous portion is a corner portion. As a result, the sample holder 100 is excellent in durability.

[0028] Next, FIG. 8 is a cross-sectional view taken along line B-B' in FIG. 7. The first groove 31 and the second groove 32 each have a wall surface and a bottom surface. At this time, the bottom surfaces of the first groove 31 and the second groove 32 may be the second surface 12 of the ceramic body 1. In other words, the ceramic body 1 may be exposed at a position corresponding to the bottom surfaces of the first groove 31 and the second groove 32. Thus, when the bottom surfaces of the first groove 31 and the second groove 32 are the second surface 12 of the ceramic body 1, in the case where the thickness in the illustrated configuration is the same, the area of the groove in cross-sectional view is larger than when the bottom surface is the first insulating layer 3. And since this increase in area can also be said to be an increase in the thermally expandable region, the sample holder 100 satisfying such a configuration is less likely to crack further. As a result, the sample holder 100 is excellent in durability.

[0029] Next, FIG. 9 is a cross-sectional view taken along the position of line B-B' in FIG. 7 for another example. As shown in FIG. 9, a second insulating layer 4 may be located between the first insulating layer 3 and the second surface 12. Thereby, since the heat generated from the heating resistor 2 is transmitted to the ceramic body 1 through the second insulating layer 4, the thermal expansion of the ceramic body 1 is reduced. Also, since the second insulating layer 4 is located between the heating resistor 2 and the ceramic body 1, the thermal stress generated between the heating resistor 2 and the ceramic body 1 is reduced. As a result, the sample holder 100 is excellent in durability. Further, when the second surface 12 of the ceramic body 1 is covered with the second insulating layer 4, the second surface 12 is protected by the second insulating layer 4.

[0030] The shape of the second insulating layer 4 may be, for example, a disc shape. The second insulating layer 4 is provided so as to cover the ceramic body 1. The second insulating layer 4 may be, for example, a material of resin or glass. The dimensions of the second insulating layer 4 are, for example, when in a disc shape, the diameter is 150 - 500 mm and the thickness is 0.01 - 1.0 mm.

[0031] Also, FIG. 10 is a cross-sectional view taken along the position of line B-B' in FIG. 7 for another example. As shown in FIG. 10, the bottom surfaces in the first groove 31 and the second groove 32 are made of the second insulating layer 4 It may be. When such a configuration is satisfied, since the first insulating layer 3 can dissipate heat from the wall surface of the groove and the second insulating layer 4 can dissipate heat from the exposed surface, cracks are less likely to occur during thermal expansion. As a result, the sample holder 100 is excellent in durability.

[0032] Also, as shown in FIG. 10, all of the first insulating layer 3 may be located on the second insulating layer 4. In other words, in a plan view seen toward the second surface 12 of the ceramic body 1, the first insulating layer 3 may be located within the second insulating layer 4. When such a configuration is satisfied, the thermal stress generated between the first insulating layer 3 and the second insulating layer 4 during thermal expansion is reduced, and cracks are less likely to occur due to the thermal stress. As a result, the sample holder 100 is excellent in durability.

[0033] Also, as shown in FIG. 10, the second insulating layer 4 may be thicker than the first insulating layer 3. Thereby, the distance between the heating resistor 2 and the ceramic body 1 is increased. When the second insulating layer 4 is thicker than the first insulating layer 3, the thermal stress generated during thermal expansion can be more relaxed, so that cracks are less likely to occur due to the thermal stress. As a result, the sample holder 100 is excellent in durability.

[0034] Next, FIG. 11 is a cross-sectional view taken along the position of line B-B' in FIG. 7 for another example. As shown in FIG. 11, the first groove 31 and the second groove 32 each have a wall surface and a bottom surface. At this time, the bottom surfaces of the first groove 31 and the second groove 32 may be the second surface 12 of the ceramic body 1. In other words, the ceramic body 1 may be exposed at a position corresponding to the bottom surfaces of the first groove 31 and the second groove 32. Thus, when the bottom surfaces of the first groove 31 and the second groove 32 are the second surface 12 of the ceramic body 1, in the case where the thickness in the illustrated configuration is the same, the area of the groove in cross-sectional view is larger than when the bottom surface is the first insulating layer 3 or the second insulating layer 4. And this increase in area can also be said to be an increase in the thermally expandable region. Regarding the second insulating layer 4 as well, since it can thermally expand in the radial direction and the direction intersecting the radial direction, a sample holder 100 satisfying such a configuration is less likely to crack even in the second insulating layer 4.

[0035] Next, as shown in FIG. 12, the second groove 32 may have at least one convex portion 331 protruding from a concentric circle. When the first insulating layer 3 has the convex portion 331 in the second groove 32, since it can thermally expand toward the convex portion 331, it is even less likely to crack. As a result, the sample holder 100 is excellent in durability.

[0036] Also, as shown in FIG. 12, for example, the convex portion 331 may have both in the direction toward the center and the direction toward the outer periphery. Note that it may be either one of the direction toward the center and the direction toward the outer periphery. Also, as another example, the convex portion 331 may be one that the first groove 31 has.

[0037] Also, in FIG. 12, a rectangular shape is described as the shape of the convex portion 331, but it is not limited to this. For example, it may be a wedge shape, a semi-circle, or the like.

[0038] Further, as shown in FIG. 13, the convex portion 331 may have a rounded top in plan view. As a result, when the first insulating layer 3 thermally expands, stress is less likely to concentrate on the top of the convex portion 331, so cracks due to this stress concentration are less likely to occur. As a result, the sample holder 100 has excellent durability.

[0039] The first insulating layer 3 can be formed, for example, by the following method. A raw material containing glass of the first insulating layer 3 is screen-printed so as to cover the heating resistor 2 on the lower surface of the ceramic body 1. Next, the raw material of the first insulating layer 3 is dried. Then, the first insulating layer 3 can be formed by heat treatment at 600°C to 1200°C for fusion. The second insulating layer 4 can be formed by the same method except for setting it at a desired position. Also, the first groove 31 and the second groove 32 can be formed, for example, by the following method. The raw material of the first insulating layer 3 is screen-printed in two steps. The first time, it is printed on the entire surface of the ceramic body 1. The second time, it is printed on the portions other than the locations where the grooves are to be provided. Then, the first groove 31 and the second groove 32 can be formed by performing heat treatment.

[0040] As another method, after printing and drying on the entire surface of the ceramic body 1, grooves are provided by cutting, and the first groove 31 and the second groove 32 can be formed by performing heat treatment.

[0041] As another method, after printing on the entire surface of the ceramic body 1, drying and heat treatment are performed, and after masking the portions other than the portions where the first groove 31 and the second groove 32 are to be provided, sandblasting treatment is performed to form the first groove 31 and the second groove 32.

[0042] To make the continuous portion of the first groove 31 and the second groove 32 smooth or to provide the convex portion 331 shown in FIG. 13, the screen printing pattern may be set to a desired shape.

[0043]

Explanation of Reference Numerals

[0044] ​ 1: Ceramic body 11: First surface 12: Second surface 2: Heating resistor 3: First insulating layer 31: First groove 32: Second groove 331: Convex portion 4: Second insulating layer 100: Sample holder

Claims

1. A ceramic body that is disk-shaped and has a first surface and a second surface located opposite to the first surface, A heating resistor located on the second surface side of the ceramic body, And a first insulating layer covering the heating resistor, At least a part of the first surface of the ceramic body is a sample holding region, The heating resistor is located in a plurality of regions on the second surface side, The first insulating layer covers the heating resistor and the ceramic body located within the region, The plurality of regions are partitioned by a first groove extending from the center to the outer periphery of the second surface, a sample holder.

2. The plurality of regions are further partitioned by a concentric second groove, the sample holder according to claim 1.

3. The second groove is located closer to the outer periphery than the center at the distance from the center to the outer periphery on the second surface, the sample holder according to claim 2.

4. The first groove and the second groove have continuous portions, the sample holder according to claim 2 or claim 3.

5. The continuous portion is smoothly continuous in plan view, the sample holder according to claim 4.

6. The first groove and the second groove each have a wall surface and a bottom surface, The bottom surface is the second surface of the ceramic body, the sample holder according to any one of claims 2 to 5.

7. Further comprising a second insulating layer, The second insulating layer is located between the first insulating layer and the second surface, the sample holder according to any one of claims 2 to 6.

8. The first groove and the second groove each have a wall surface and a bottom surface, The sample holder according to claim 7, wherein the bottom surface is the second insulating layer.

9. The sample holder according to claim 7 or 8, wherein the entire first insulating layer is located on the second insulating layer.

10. The sample holder according to any one of claims 7 to 9, wherein the second insulating layer is thicker than the first insulating layer.

11. The sample holder according to any one of claims 2 to 10, wherein the second groove has at least one convex portion protruding from a concentric circle.

12. The sample holder according to claim 11, wherein the top of the convex portion is rounded in plan view.

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