Substrate container protection device

Abstract

To provide a substrate container protection device for specifically protecting a substrate mounted in a substrate container from damages.SOLUTION: A substrate container protection device contains: a container door; a limiter for holding and fixing a substrate; a support member; an elastic connection member that is bonded and fixed with a container body; and an electrostatic protection member. The electrostatic protection member protects the substrate from static electricity by providing an electrostatic dissipation path by means of elastic interference. The substrate container protection device of the present invention, can improve a substrate protection performance of the substrate container, and eliminate hazards to the substrate caused by vibration, dust, static electricity or the like.SELECTED DRAWING: Figure 1B

Description

[Technical Field]

[0001] The present invention relates to a substrate container protection device, and more particularly to a substrate container protection device that protects substrates loaded in a substrate container from damage. [Background technology]

[0002] In the industrial field, flake-like products related to electronic components, such as flake-like substrates such as electronic circuit boards, wafers, trays, and glass, often require containers to store these flake-like substrates for protection, mounting, or transportation. Containers for storing flake-like substrates of electronic components related products or semiconductor manufacturing process-related components must take excellent substrate container protection measures to prevent damage to the substrates stored inside.

[0003] For example, when a non-circular substrate is loaded into an existing substrate container, it is always equipped with a gate, and the gate is equipped with a limiter to limit substrate displacement. When a non-circular substrate is loaded into the substrate container's loading space, the distance from the non-circular substrate to the opening of the substrate container is longer than the distance from a circular substrate to the opening of the substrate container. Therefore, the limiter must be designed to protrude from the inner surface of the gate to support the non-circular substrate up to its side edges, thereby securing the substrate in the container. This securement prevents the substrate from vibrating or shaking during the transport process. However, when the substrate container is transported to a load port and the gate needs to be opened to remove or release the substrate, the protruding limiter on the inner surface of the gate can interfere with the mechanical arm removing the gate and placing it back into the load port, resulting in operational abnormalities.

[0004] In addition, in conventional substrate containers, support members are provided, and multiple trays are mounted on the support members to load substrates, e.g., non-circular substrates, and the stacked trays are used to repeatedly load and transport substrates. However, because the overall weight of the substrate container with the trays and substrates loaded is much heavier than that of a substrate container without a tray, the support members are subjected to the loaded weight and downward force during transport, which can cause gaps at the joints between the support members and the substrate container, leading to dust contamination due to friction and the possibility that the support members will fall out of the substrate container and damage the substrates.

[0005] In addition to dust contamination due to mechanical interference and friction, damage to substrates and loss of functionality caused by electrostatic interference is also of great concern. Existing substrate containers used to mount trays and substrates do not provide any solution to the problem of electrostatic damage.

[0006] Therefore, how to solve problems related to substrates, such as wear damage and dust contamination of substrates caused by vibration and friction, and destruction of microstructures and loss of functionality caused by electrostatic interference, is a difficult problem that the industry needs to overcome. Summary of the Invention [Problem to be solved by the invention]

[0007] The main purpose of the present invention is to improve the structural design of the restrictor, which solves the problem of conventional substrate containers in that the restrictor used to support and fix the substrate protrudes from the inner surface of the gate body, causing interference and malfunction during the process of transferring and storing the gate body by the automated system.

[0008] Another object of the present invention is to improve the structural design of the support member, which can solve the risk of substrate damage caused by dust particles generated by vibration and friction on the substrate.

[0009] Another object of the present invention is to provide a novel anti-static member, which can solve the problem of electrostatic damage to substrates in a substrate container.

[0010] One aspect of the present invention provides a substrate container protection device for use in a substrate container, the substrate container comprising a container body and a container gate, the container gate being adapted to close against the container body, the container body being provided with a storage section for storing at least a support member and a substrate, the container gate being provided with a recess. The substrate container protection device includes a limiter provided in the recess of the container gate, the limiter including a base provided on the container gate and at least one movable piece pivotally attached to the base, the movable piece having a pivot side and a free side, the pivot side supporting the support member of the container body, the free side expanding outward to support the substrate in response to the supporting force of the pivot side, or the free side contracting inward, so that the height of the top surface of the storage section is lower than the height of the inner surface of the container gate by the limiter.

[0011] In one embodiment, the limiter further includes an elastic member provided between the base and the movable piece, and the elastic member provides an elastic deformation amount in a movable state that expands outward from or contracts inward from the free side based on the supporting force of the pivot side.

[0012] In one embodiment, when the number of movable pieces is two, the pivot sides of the two movable pieces are offset from each other, and the pivot sides support the support member located on the container body.

[0013] In one embodiment, the container further includes a locking member provided in a recess of the container gate, the locking member removably mounting the restrictor.

[0014] In one embodiment, the container further includes a position limiting member provided in a recess of the container gate, the position limiting member being used to fix the restrictor.

[0015] One aspect of the present invention provides a substrate container protection device for a substrate container, the substrate container including a container body and a container gate, the container gate being adapted to close against the container body, the container body having a plurality of locking grooves. The substrate container protection device also includes the restrictor of the above aspect and a plurality of support members for supporting substrates, each support member including a protrusion located on a top surface of the support member and received in a corresponding one of the plurality of locking grooves, and a reinforcing support member provided on the protrusion, the resilient support member including a rigid connecting member and an elastic connecting member, the elastic connecting member including an extension portion and a joint portion, one end of the extension portion being connected to the rigid connecting member and the other end of the extension portion being connected to the joint portion, the joint portion being joined to the locking groove of the container body, and the rigid connecting member having a hardness greater than that of the elastic connecting member.

[0016] In one embodiment, the rigid connecting member is embedded within the protrusion.

[0017] One aspect of the present invention provides a substrate container protection device for use in a substrate container, the substrate container comprising a container body, a base, and at least one support member, the base being located at the bottom of the container body, the support member being located within the container body's storage section, and the base and the support member being made of static electricity dissipating materials. The substrate container protection device includes the above-mentioned restrictor and at least one anti-static member located between the bottom of the container body and the base, the anti-static member including a fixing part located at the bottom of the container body and connected to the support member, and an elastic connecting member having one end connected to the fixing part and the other end elastically supporting the inner surface of the base, the support member, the anti-static member, and the base forming an electrostatic dissipation path.

[0018] In one embodiment, the bottom of the container body and the base form an interference elimination structure, the interior of the interference elimination structure is located at the bottom of the container body below the support member, and the anti-static member is provided within the interference elimination structure.

[0019] In one embodiment, when there are a plurality of anti-static members and a plurality of support members, a plurality of anti-static members are disposed corresponding to the positions of the support members.

[0020] In one embodiment, the anti-static member further includes a conductive connecting member, and the fixing portion of the conductive connecting member is connected to the support member through the bottom of the container body.

[0021] In one embodiment, the height of the top surface of the conductive connecting member is lower than the height of the top surface of the fixing part facing the base.

[0022] In one embodiment, the conductive connecting member is a metal screw, and the fixing part is locked to the bottom of the support member through the bottom of the container body.

[0023] In one embodiment, the fixing portion is fixed to the conductive connecting member, so that the anti-static member is connected to the support portion through the bottom of the container body.

[0024] In one embodiment, the fixing part has a screw hole, and a metal screw is locked into the corresponding screw hole, thereby connecting the anti-static member to the support part through the bottom of the container body.

[0025] The substrate container protection device of the present invention clamps and fixes substrates by limiters when they are stored and loaded in the substrate container, preventing displacement and vibration. The installation of limiters also prevents unwanted interference between mechanisms and components, providing efficient substrate protection and protection from static electricity, among other functions. This not only protects the substrates in the container, but also improves safety when loading and transporting substrates in the container. [Brief explanation of the drawings]

[0026] [Figure 1A] 1 is a perspective view showing a container body in which a substrate container protection device according to an embodiment of the present invention is used; [Figure 1B] 1 is a perspective view showing a container gate body of a substrate container protection device according to an embodiment of the present invention; [Figure 2] 1 is an exploded view showing a restrictor of a substrate container protection device according to an embodiment of the present invention; [Figure 3]1 is a perspective view showing a restrictor of a substrate container protection device according to an embodiment of the present invention; [Figure 4] 1 is a front view of a substrate container used in a substrate container protection device according to an embodiment of the present invention; [Figure 5A] 5 is a cross-sectional view of the operation of a restrictor in the substrate container protection device according to one embodiment of the present invention, taken along line AA″ in FIG. 4. FIG. [Figure 5B] 5 is a cross-sectional view of the operation of a restrictor in the substrate container protection device according to one embodiment of the present invention, taken along line AA″ in FIG. 4. FIG. [Figure 5C] 5 is a cross-sectional view of the operation of a restrictor in the substrate container protection device according to one embodiment of the present invention, taken along line AA″ in FIG. 4. FIG. [Figure 6A] 1 is a schematic diagram showing a restrictor of a substrate container protection device according to an embodiment of the present invention before being attached to a container gate body. FIG. [Figure 6B] 1 is a schematic diagram showing a restrictor of a substrate container protection device according to an embodiment of the present invention after being attached to a container gate body. FIG. [Figure 7A] FIG. 1B is a cross-sectional top view taken along line BB″ in FIG. 1A. [Figure 7B] FIG. 7B is a partial enlarged view of the support member of FIG. 7A. [Figure 7C] FIG. 7B is a partially enlarged perspective view of the support member of FIG. 7A. [Figure 8A] 1 is a perspective view showing a support member of a substrate container protection device according to an embodiment of the present invention; [Figure 8B] 1 is a perspective view showing an elastic connecting member of a substrate container protection device according to an embodiment of the present invention; [Figure 8C] 1 is a perspective view showing an elastic connecting member of a substrate container protection device according to an embodiment of the present invention, the elastic connecting member being connected to a rigid connecting member; [Figure 9] 1 is a perspective view showing a substrate container used in a substrate container protection device according to an embodiment of the present invention; [Figure 10] 1 is an exploded view showing a substrate container used in a substrate container protection device according to an embodiment of the present invention; [Figure 11]1 is an exemplary enlarged view showing the location where the anti-static member, the support member, and the base are electrically connected together, the anti-static member being used in the substrate container protection device according to one embodiment of the present invention; [Figure 12] 1 is an exemplary enlarged view showing the location where the anti-static member, the support member, and the base are electrically connected together, the anti-static member being used in the substrate container protection device according to one embodiment of the present invention; [Figure 13] 1 is an exploded view showing a substrate container used in a substrate container protection device according to an embodiment of the present invention; DETAILED DESCRIPTION OF THE INVENTION

[0027] In order to explain the technical contents of the present invention in detail, the following description will be given in conjunction with the drawings together with the embodiments. In addition, the terms "first," "second," "third," etc. in the present description are used to distinguish between the respective components, and do not limit the components themselves or indicate a specific order of the components. In addition, in the present description, unless a specific quantity is specified, "one" refers to one component or more than one component.

[0028] In order to fully understand the objects, features, and effects of the present invention, specific embodiments will be described in detail below in conjunction with the drawings.

[0029] Please refer to Figures 1A to 4 at the same time. Figure 1A is a perspective view showing a container body 100 used in a substrate container protection device according to one embodiment of the present invention. Figure 1B is a perspective view showing a container gate body 200 of a substrate container protection device according to one embodiment of the present invention. Figure 2 is an exploded view showing a restrictor of a substrate container protection device according to one embodiment of the present invention. Figure 3 is a perspective view showing a restrictor of a substrate container protection device according to one embodiment of the present invention. Figure 4 is a front view of a substrate container 10 used in a substrate container protection device according to one embodiment of the present invention.

[0030] The substrate container 10 includes a container body 100, which is provided with at least one support member 110 and a storage section 150 for storing substrates 600. In this embodiment, the substrates 600 are non-circular slugs, such as wafers or circuit boards mounted on trays. In this embodiment, multiple substrates 600 can be stacked and stored, so multiple support members 110 are arranged to meet the needs of storing the substrates 600. In the example of storing two sets of stacked substrates 600, three support members 110 are provided in the container body 100 at intervals to provide sufficient substrate support capacity, and are located adjacent to the two sets of stacked substrates 600.

[0031] The substrate container 10 includes a container gate 200, which is used to close the container main body 100. The container gate 200 has an inner surface 201 facing the storage compartment 150, which is provided with a recess 210. The substrate container protection device includes a restrictor 300 provided in the recess 210 of the container gate 200. The detailed structure of the restrictor 300 will be further described. The restrictor 300 includes a base 310 and at least one movable piece 320. The base 310 is provided in the recess 210 of the container gate 200 and is spaced apart from the inner surface 201 of the container gate 200. In this example, there are two movable pieces 320, which support two stacked sets of substrates 600. The movable piece 320 includes a first portion, a pivoting side 321, and a second portion, a free side 322, which is connected to the pivoting side 321. The movable pieces 320 are pivotally attached to the base 310 via a pivot 330, and the pivoting sides 321 of the two movable pieces 320 are offset from each other.

[0032] The restrictor 300 further includes an elastic member 340 provided between the base 310 and the movable piece 320. The elastic member 340 prevents the free side 322 from expanding outward based on the supporting force of the pivoting side 321. orThe movable piece 320 provides an elastic change in its movable state, which is contraction inward. The elastic member 340 is a spring, a torsion spring, or other component capable of storing or releasing elastic displacement energy. The pivot side 321 is used to support the support member 110 of the container body 100, where the pivot side 321 supports the support member 110 located at the center of the storage section 150, and the free side 322 corresponds to the positions of two sets of stacked substrates 600. For example, the pivot side 321 and the free side 322 of the movable piece 320 operate like a seesaw with the pivot 330 as a fulcrum, so that when the pivot side 321 bends upward, the free side 322 bends downward, and vice versa. When the pivoting side 321 abuts against the support member 110, the free side 322 correspondingly expands outward and supports the base plate 600 based on the supporting force of the pivoting side 321, or the free side 322 contracts inward, so that the height of the top surface of the restrictor 300 facing the receiving section 150 is lower than the height of the inner surface 201 of the container gate body 200. That is, when the free side 322 contracts inward, the entire restrictor 300 is located within the recessed portion 210 and does not exceed the height of the plane of the inner surface 201 of the container gate body 200.

[0033] Next, a method for solving a problem encountered in conventional substrate containers, in which the limiter used to support and secure the substrate protrudes from the inner surface of the gate, causing interference and malfunction during the automated system's transfer and storage of the gate, will be described. In one embodiment of the present invention, the elastic member 340 maintains the first portion, or pivot side 321, of the movable piece 320 at a position that protrudes more than the second portion, or free side 322. Herein, the state in which the pivot side 321 protrudes more than the free side 322 is defined as a first state position. Furthermore, when the first portion, or pivot side 321, of the movable piece 320 is pressed downward by a force, the second portion, or free side 322, of the movable piece 320 is bent upward to a position that protrudes more than the first portion, or pivot side 321. Herein, the state in which the second portion, or free side 322, protrudes more than the first portion, or pivot side 321 is defined as a second state position.

[0034] 5A to 5C are cross-sectional views of the substrate container protection device according to one embodiment of the present invention, taken along line AA" in FIG. 4. FIG. 5A shows a state in which the support member 110 is not in contact with the movable piece 320 of the limiter 300, i.e., the movable piece 320 is in the first state position. FIG. 5B shows a state in which the support member 110 has just come into contact with the pivot side 321, which is the first portion of the movable piece 320 of the limiter 300, i.e., the movable piece 320 has just started to change from the first state position to the second state position. FIG. 5C shows a state in which the support member 110 has come into contact with the pivot side 321, which is the first portion of the movable piece 320 of the limiter 300, and 1 shows a state in which the pivot side 321 is pressed, i.e., a state in which the movable piece 320 is in the second state position. When the movable piece 320 is in the first state position, the pivot side 321, which is the first portion of the movable piece 320, is the point furthest from the base 310 of the limiter 300 and the entire movable piece 320, i.e., the pivot side 321, which is the first portion of the movable piece 320, is the highest point of the entire movable piece 320. This allows the pivot side 321, which is the first portion, to come into contact with another corresponding part (for example, the support member 110 abuts and contacts, in one embodiment, the support member 110 located in the center abuts and contacts).

[0035] In one embodiment of the present invention, support members 110 are provided on both inner sides and at the center of the container body 100, respectively, and are located on both sides and at the center of the container body 100. Two receiving sections, a first mounting section 151 and a second mounting section 152, for mounting the substrate 600 are defined between adjacent support members 110. As shown in FIG. 5A , when the container gate 200 is removed from the container body 100, the pivot side 321 is not subjected to a supporting force, and the elastic member 340 is in an elastically released state. At this time, the movable piece 320 is in the first state position, the pivot side 321 is the highest part (i.e., the most protruding part) of the entire restrictor 300, and the height H of the top surface of the pivot side 321 does not exceed the height of the inner surface 201 of the container gate 200. Since the entire restrictor 300 is located within the recess 210, when the mechanical arm removes the container gate 200 and stores it in the load port, the container gate 200 can be stored smoothly without being interfered with by the restrictor 300. This overcomes the problem of system malfunction caused by interference with the conventional restrictor.

[0036] As shown in FIGS. 5B and 5C, when the container gate body 200 approaches the container body 100, the pivot side 321, which is the first part of the movable piece 320, first comes into contact with the support member 110 located in the center. As the container gate body 200 approaches the storage section of the container body 100, the force acting on the pivot side 321, which is the first part of the support member 110, increases, and at this time, the elastic member 340 stores elastic energy through elastic compression. At the same time, the elastic member 340 rotates the pivot 330 on the base 310, and the free side 322, which is the second part, moves away from the base 310 of the restrictor 300 and expands outward, approaching the first mounting part 151 and the second mounting part 152. When the container gate body 200 and the container body 100 are completely closed, the movable piece 320 is in the second state position, that is, the width of the free side 322 extending toward the storage part is just enough to abut against the base plate 600 of the first mounting part 151 and the second mounting part 152 and fix them. When the container gate body 200 is released from the closed state and reopened, the support member 110 releases the force exerted on the pivot side 321 (first part), causing the elastic member 340 to release the elastic potential energy, so that the movable piece 320 returns to the state shown in FIG. 5A, i.e., the first state position. At the same time, the pivot 330 on the base 310 rotates, and the free side 322 (second part) also returns to its original position.

[0037] 6A and 6B are schematic diagrams showing a restrictor of a substrate container protection device according to an embodiment of the present invention before and after it is attached to a container gate. In one embodiment of the present invention, the substrate container protection device further includes a locking member 220 disposed in a recess 210 of the container gate 200. The restrictor 300 is fitted into the locking member 220 and attached to the recess 210 of the container gate 200 in a locking manner, for example, along an attachment direction ID, thereby allowing the restrictor 300 to be flexibly attached and detached as needed. The substrate container protection device further includes a positioning member 230 disposed in the recess 210 of the container gate 200. As shown by the arrow in FIG. 6B, the positioning member 230 provides a positioning position L for the restrictor 300, thereby preventing the restrictor 300 from accidentally slipping off or falling off due to vibration or other reasons.

[0038] The present invention further solves the problem of conventional support parts, in which gaps, vibrations, and friction between the substrate container and the support part cause dust contamination and substrate damage due to unstable support. In this embodiment, the same component structures, same component numbers, and same functions used in the substrate container and restrictor described above will not be described again, and only the differences will be described. Please refer to Figures 7A to 8C. Figure 7A is a sectional top view taken along line BB" in Figure 1A. Figure 7B is a partially enlarged view of the support member of Figure 7A. Figure 7C is a partially enlarged perspective view of the support member of Figure 7A. Figure 8A is a perspective view showing the support member of a substrate container protection device according to an embodiment of the present invention. Figure 8B is a perspective view showing the elastic connecting member of a substrate container protection device according to an embodiment of the present invention. Figure 8C is a perspective view showing the elastic connecting member connected to a rigid connecting member of a substrate container protection device according to an embodiment of the present invention.

[0039] The container body 100 has a plurality of locking grooves 101, and the substrate container protection device includes a plurality of support members 110 for supporting the substrates 600. Each support member 110 includes a protrusion 111 and a reinforcing support portion 112. The protrusion 111 is located on the top surface of the support member 110 so as to correspond to and be received in the locking grooves 101 of the container body 100, thereby fixing the support member 110 within the container body 100 via the locking grooves 101. The reinforcing support portion 112 is installed on the protrusion 111, and includes a rigid connecting member 120 and an elastic connecting member 130. The elastic connecting member 130 includes an extension 131 and a joint 135. One end of the extension 131 is connected to the rigid connecting member 120, and the other end of the extension 131 is connected to the joint 135, which is coupled to the locking groove 101 of the container body 100. As shown in FIGS. 7B and 7C , the extension 131 extends outside the locking groove 101, and the joint 135 is joined to the outer side of the locking groove 101. This provides a gripping effect that stably fixes the support member 110 within the container body 100. For clearer explanation, the locking groove 101 in FIG. 7C is shown in perspective to visualize the extension 131 of the elastic connecting member 130. The hardness of the material of the rigid connecting member 120 is greater than the hardness of the material of the elastic connecting member 130. The rigid connecting member 120 can be embedded in the protrusion 111 for stable fixation. The rigid connecting member 120 and the support member 110 may be made of the same material. The rigid connecting member 120 and the support member 110 may be integrally formed, but are not limited to this.

[0040] Specifically, when attaching support member 110 to container body 100, the entire support member 110 is slid parallel to the opening of container body 100 and stored in storage section 150, and when protrusion 111 is inserted into locking groove 101, joint 135 of elastic connecting member 130 extends to protrude from the side surface of protrusion 111, so that when joint 135 receives a force, elastic connecting member 130 elastically deforms, and when support member 110 and container body 100 are completely engaged, elastic connecting member 130 releases its elastic deformation and joint 135 joins to the outer part of locking groove 101. This prevents support member 110 from falling off container body 100. The elastic connecting member 130 functions as a connecting and cushioning component between the rigid connecting member 120 and the locking groove 101, and not only has the effect of connecting and fixing them but also absorbs the impact and frictional forces between them, so that the entire support member 110 stably engages with the container body 100. This prevents the generation of dust due to friction, prevents cracks and deterioration of parts due to impact, and ensures that the support member 110 will not fall off the container body 100 even if it is dropped or shaken.

[0041] In one embodiment of the present invention, the extension 131 of the elastic connecting member 130 has holes 132 to improve the elasticity of the extension 131 and increase durability when the elastic material is deformed.

[0042] In one embodiment of the present invention, the rigid connecting member 120 may be made of a mixture of polycarbonate (PC), carbon fiber, and APWA material, and has better rigidity than the elastic connecting member 130 .

[0043] In one embodiment of the present invention, the material of the elastic connecting member 130 may be a combination of polycarbonate and nanocarbon tube material, which has better elasticity than the elastic connecting member 130 and is less likely to generate dust due to friction with the container body 100. However, the present invention is not limited to this, and the materials of the rigid connecting member 120 and the elastic connecting member 130 can be adjusted or changed as needed. However, the hardness of the material of the rigid connecting member 120 needs to be greater than that of the elastic connecting member 130 to prevent the reinforcing support part 112 from breaking off from the protrusion 111.

[0044] In this way, the substrate container protection device of the present invention can properly support the load and be stably fixed to the container body using a support member that combines an elastic connecting member and a rigid connecting member, thereby preventing problems such as dust contamination and damage caused by gaps, vibration, and friction.

[0045] One aspect of the present invention further provides a substrate container protection device capable of preventing static electricity from being applied to a substrate container. This embodiment uses the substrate container, restrictor, and support member described above. The same component structures, component reference numbers, and functions will not be described again, and only differences will be described. Please refer to Figures 9 to 13. Figure 9 is a perspective view of a substrate container 10 used in a substrate container protection device according to an embodiment of the present invention. Figure 10 is an exploded view of a substrate container used in a substrate container protection device according to an embodiment of the present invention. Figure 11 is an exemplary enlarged view showing the electrical connection points between the anti-static member, support member, and base used in a substrate container protection device according to an embodiment of the present invention. Figure 12 is an exemplary enlarged view showing the electrical connection points between the anti-static member, support member, and base used in a substrate container protection device according to an embodiment of the present invention. Figure 13 is an exploded view of a substrate container used in a substrate container protection device according to an embodiment of the present invention. The substrate container 10 includes a container body 100, a base 400, and a support member 110. The base 400 is mounted on the bottom 102 of the container body 100, and the support member 110 is mounted in the storage section 150 of the container body 100. The base 400 and the support member 110 are made of static dissipative material. The substrate container protection device includes an anti-static member 500 mounted between the bottom 102 of the container body 100 and the base 400. The support member 110 is electrically connected to the base 400 via the anti-static member 500. The support member 110 and the anti-static member 500 form an electrostatic dissipation path between the support member 110 and the base 400, allowing electric charges to be electrically conducted and removed via the base 400, preventing electric charges from accumulating on the substrate 600 on which the support member 110 is mounted, thereby achieving an anti-static function.

[0046] In one embodiment of the present invention, a plurality of anti-static members 500 are provided to electrically connect the support member 110 and the base 400, thereby eliminating static charges at different locations.

[0047] See Figures 10 and 13. In one embodiment of the present invention, the base 400 has three positioning grooves corresponding to three positioning pins (KC pins) on the machine base in a standard structural design, allowing the substrate container to be positioned on the machine base. Therefore, the present invention designs a novel interference exclusion structure 410 to mount the anti-static member 500 without the standard structural requirements. The interference exclusion structure 410 is provided between the base 400 and the bottom 102 of the container body 100. In this way, the anti-static member 500 can be accommodated in the standard structure of the base 400 and the container body 100 without interference, thereby providing a novel function of providing a static dissipation path. The interference exclusion structure 410 is a flat portion without a protruding interference structure or has a convex conductive contact portion. The interference exclusion structure 410 is defined and formed to correspond to the lower portion of one or more support members 110 of the container body 100. Thus, the anti-static member 500 can be provided in the interference elimination structure 410 corresponding to the position of the support member 110 .

[0048] In one embodiment of the present invention, as shown in FIG. 10 , when there are a plurality of anti-static members 500 and a plurality of support members 110, the anti-static members 500 are provided corresponding to the positions of the respective support members 110. In this embodiment, referring to FIGS. 10 and 13 simultaneously, three support members 110 spaced apart are provided within the container body 100 and are located adjacent to two sets of stacked substrates 600. Below the support members 110 located on both inner sides of the container body 100, the corresponding interference elimination structures 410 between the bottom 102 of the container body 100 and the inner surface 401 of the base 400 may be flat. Below the support member 110 located at the center of the container body 100, the corresponding interference elimination structure 410 between the bottom 102 of the container body 100 and the inner surface 401 of the base 400 may have a protruding conductive contact portion. For example, a first conductive contact 103 is provided in a protruding manner on the bottom 102 of the container body 100, and a second conductive contact 402 is provided in a protruding manner on the inner surface 401 of the base 400, and the first conductive contact 103 and the second conductive contact 402 are docked and coupled together, forming a space capable of accommodating the anti-static member 500, and the support member 110 can be connected to the base 400 under structural conditions that do not interfere with the container body 100 and the base 400. This eliminates static electricity charges and provides a static electricity dissipation path.

[0049] 11 , the anti-static member 500 includes a fixing part 510 and an elastic connecting member 520. The fixing part 510 is directly mounted on the bottom 102 of the container body 100 and is connected to the support member 110. One end of the elastic connecting member 520 is connected to the fixing part 510, and the other end flexibly supports the structure on the inner surface 401 of the base 400. A gap exists between the bottom 102 of the container body 100 and the inner surface 401 of the base 400, and the height of this gap is sufficient to accommodate the anti-static member 500. To maintain continuous static dissipation, the elastic connecting member 520 has an elastic length and an elastic curvature. One end of the elastic connecting member 520 away from the fixing portion 510 is in supporting contact with and electrically connected to the inner surface 401 of the base 400, and a sufficient elastic interference distance is formed between the extended elastic length of the elastic connecting member 520 and the inner surface 401 of the base 400. The elastic curvature of the elastic connecting member 520 is away from the fixing portion 510, and the elastic curvature supports and flexibly interferes with the inner surface 401 of the base 400, dissipating accumulated static electricity while reducing contact friction and improving supporting smoothness. The elastic bending may be an upper engagement structure 521, which helps to increase the contact area for electrical connection between the elastic connecting member 520 of the anti-static member 500 and the base 400.

[0050] 12 , the anti-static member 500 further includes a conductive connecting member 420, which is used to connect the fixing portion 510 to the support member 110 via the bottom 102 of the container body 100. The fixing portion 510 is fixed to the conductive connecting member 420, and an electrical connection EC is maintained between the fixing portion 510 and the support member 110. The conductive connecting member 420 is, for example, a metal screw, and the fixing portion 510 has a screw hole (not shown). The metal screw can be locked into the screw hole to connect the anti-static member 500 to the support member 110 via the bottom 102 of the container body 100. The height of the top surface of the conductive connecting member 420 is lower than the height of the top surface of the inner surface 401 of the fixing portion 510 facing the base 400. The conductive connecting member 420 can prevent static electricity from building up on the support member 110 without contacting the inner surface 401 of the base 400 and without being directly subjected to interference. The conductive connecting member 420 of the present invention is directly connected to the support member 110 via the bottom 102 of the container body 100, and therefore does not affect the combination of the base 400 and the container body 100. Therefore, the present invention can solve the conventional problems that arise when using screws to lock the base 400 to the support member via the bottom of the container body, such as changes in the height and detailed dimensions of the support member, or abnormalities and reduced product quality due to structural interference such as deformation or displacement of the support member, caused by the strength of the screw tightening force.

[0051] The anti-static member 500 may have different structures and assembly methods. For example, the fixing portion of the anti-static member 500 is provided by covering the conductive connecting member 420, so that the fixing portion 510 can slide up and down while maintaining electrical connection. In one embodiment, one end of the conductive connecting member 420 is connected to the support member 110, and the other end of the conductive connecting member 420 is embedded in the container body 100, so that the fixing portion 510 of the anti-static member 500 is embedded in the container body 100 and electrically connected to the conductive connecting member 420. In another embodiment, the fixing portion 510 of the anti-static member 500 is drilled in the container body 100 and directly fixed to and electrically connected to the support member 110. Regardless of the structure or assembly method of the anti-static member 500, as long as the anti-static member 500 is provided between the base and the container body and the problem of electrostatic damage to the substrates in the substrate container is solved, it falls within the technical scope of the present invention.

[0052] In one embodiment of the present invention, the material of the anti-static member 500 is an anti-static plastic containing carbon nanotubes, such as anti-static PC.

[0053] In summary, the substrate container protection device of the present invention, by improving the structural design of the limiter, solves the problem of conventional substrate containers, where the limiter used to support and secure the substrates protrudes from the inner surface of the gate, resulting in interference and malfunction during the automated system's transfer and storage of the gate. Furthermore, the present invention not only clamps and secures the substrates when they are stored and loaded into the substrate container by the limiter, preventing displacement and vibration, but also prevents unexpected interference between mechanisms and components. Furthermore, the support member, which combines elastic and rigid connecting members, can adequately support the load and be stably fixed to the container body, thereby eliminating various contamination and damage problems, such as the generation of dust particles due to gaps, vibration, and friction. Furthermore, the present invention utilizes the interference between the anti-static member and base of the substrate container protection device of the present invention as an electrostatic discharge (ESD) prevention connection, allowing the elastic anti-static member to serve as a bridge for the anti-static connection between the support member of the substrate container and the base. This not only achieves the purpose of protecting the substrates in the container, but also improves the safety of the substrates when they are loaded and transported inside the container.

[0054] Although the present invention has been disclosed above as a more preferred embodiment, those skilled in the art should understand that the embodiment is merely for illustrating the present invention and should not be construed as limiting the scope of the present invention. It should be noted that the above-mentioned embodiments and equivalent modifications and replacements of the above-mentioned embodiments are all set to be included within the scope of the present invention. Therefore, the scope of protection of the present invention is defined by the claims, and the scope of the invention set forth in the appended claims should be interpreted in the broadest sense so as to include all amendments, similar arrangements and flows therein. [Explanation of symbols]

[0055] 10 Substrate container 100 container body 101 Locking groove 102 Bottom 103 First conductive contact 110 Support member 111 protrusion 112 Reinforcement support part 120 Rigid connecting member 130 Elastic connecting member 131 Stretching section 132 holes 135 Joint 150 storage area 151 First loading section 152 Second loading section 200 Container gate body 201 Inner surface 210 Depression 220 Locking member 230 Position-limited components 300 Limiter 310 Pedestal 320 Movable piece 321 Pivot Side 322 Free Side 330 Axis 340 Elastic Members 400 Kiza 401 Inner surface 402 Second conductive contact 410 Interference Elimination Structure 420 Conductive connecting member 500 Anti-static materials 510 Fixed part 520 Elastic connecting member 521 Upper engagement structure 600 boards EC Electrical Connection H Height of top surface ID installation direction L position limited position

Claims

1. Used in substrate containers, a substrate container protection device, the substrate container including a container body and a container gate body, the container gate body being adapted to close the container body, the container body being provided with a storage section for storing at least a support member and a substrate, and the container gate body being provided with a recessed portion, a restrictor provided in the recess of the container gate; The restrictor is a base provided on the container gate body, and at least one movable piece pivotally attached to the base, the movable piece includes a pivot side and a free side; The pivoting side supports the support member of the container body, The substrate container protection device is characterized in that the free side expands outward to support the substrate in response to the supporting force of the pivot side, or the free side contracts inward, thereby causing the limiter to make the height of the top surface of the storage section lower than the height of the inner surface of the container gate body.

2. 2. The substrate container protection device of claim 1, wherein the limiter further includes an elastic member arranged between the base and the movable piece, and the elastic member provides an elastic deformation amount in a movable state that expands outward or contracts inward on the free side based on the supporting force of the pivot side.

3. The substrate container protection device of claim 1, characterized in that when the number of movable pieces is two, the pivot sides of the two movable pieces are arranged offset from each other, and the pivot sides support the support member located in the container body.

4. 2. The substrate container protection device according to claim 1, further comprising a locking member provided in the recess of the container gate, the locking member detachably mounting the restrictor.

5. 2. The substrate container protection device according to claim 1, further comprising a position limiting member provided in the recess of the container gate, the position limiting member being used to fix the restrictor.

6. Used in substrate containers, The substrate container includes a container body and a container gate, the container gate is used to close the container body, and the container body has a plurality of locking grooves. A restrictor according to any one of claims 1 to 5; a plurality of support members for supporting the substrate; Each of the support members comprises: protrusions located on the top surface of the support member and correspondingly received in the plurality of locking grooves; a reinforcing support portion provided on the protrusion, the reinforcing support portion including a rigid connecting member and an elastic connecting member; the elastic connecting member includes an extension portion and a joint portion, one end of the extension portion is connected to the rigid connecting member, the other end of the extension portion is connected to the joint portion, and the joint portion and the locking groove of the container body are joined to each other; The substrate container protection device, wherein the rigid connecting member has a hardness greater than that of the elastic connecting member.

7. 7. The substrate container protection device according to claim 6, wherein the rigid connecting member is embedded in the protrusion.

8. Used in substrate containers, The substrate container protection device includes a container body, a base, and at least one support member, the base being provided at a bottom of the container body, the support member being provided in a storage portion of the container body, and the base and the support member being made of an electrostatic dissipative material; A restrictor according to any one of claims 1 to 5; at least one anti-static member provided between the bottom of the container body and the base; The antistatic member is a fixing portion provided on the bottom of the container body and connected to the support member; an elastic connecting member having one end connected to the fixed portion and the other end elastically supporting the inner surface of the base, The substrate container protection device, wherein the support member, the anti-static member and the base form a static electricity dissipation path.

9. 9. The substrate container protection device according to claim 8, wherein the bottom of the container body and the base form an interference-eliminating structure, and the anti-static member is provided within the interference-eliminating structure.

10. 9. The substrate container protection device of claim 8, wherein when the number of the anti-static members and the support members is plural, the plural anti-static members are disposed corresponding to the positions of the support members.

11. 9. The substrate container protection device of claim 8, wherein the anti-static member further comprises a conductive connecting member, the fixing portion of the conductive connecting member being connected to the support member through the bottom of the container body.

12. 12. The substrate container protection device according to claim 11, wherein the height of the top surface of the conductive connecting member is lower than the height of the top surface of the fixing portion facing the base.

13. 12. The substrate container protection device of claim 11, wherein the conductive connecting member is a metal screw, the fixing portion has a screw hole, and the metal screw is locked into the corresponding screw hole, thereby connecting the anti-static member to the support member through the bottom of the container body.

14. The substrate container protection device according to claim 11 , wherein the fixing portion is fixed to the conductive connecting member.

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