Variable cycle and time RF activation method for film thickness matching in a multi-station deposition system

Abstract

To provide methods and apparatuses for depositing substantially equal thicknesses of a material on at least two substrates concurrently processed in separate stations of a multi-station deposition apparatus.SOLUTION: A method comprises: providing the substrates in the stations of the multi-station deposition apparatus; concurrently depositing the material on the first substrate in the first station and on the second substrate in the second station; making one or more adjustments of deposition conditions in the first station to slow or stop depositing the material on the first substrate while continuing to deposit the material on the second substrate in the second station; and completing the deposition on the first substrate in the first station and on the second substrate in the second station such that the total thickness of the material deposited on the first substrate and the total thickness of the material deposited on the second substrate are substantially equal.SELECTED DRAWING: Figure 3

Description

[Background technology]

[0001] Some semiconductor manufacturing processes deposit one or more layers of material onto a semiconductor substrate or wafer. Integrated circuit fabricators and equipment designers use a variety of processes and equipment to create integrated circuits with consistent quality and high throughput. Material deposition systems, such as chemical vapor deposition chambers, operate in various modes, including those that emphasize high throughput and those that emphasize uniformity. Determining the operating mode that optimizes both throughput and uniformity remains a challenge. Summary of the Invention

[0002] In one embodiment, a method is provided for depositing approximately equal thicknesses of material on at least two substrates that are processed in parallel in separate stations of a multi-station deposition apparatus. The method may include: (a) providing a first substrate in a first station and a second substrate in a second station of a multi-station deposition apparatus; (b) depositing material in parallel on the first substrate in the first station and on the second substrate in the second station, wherein the deposition conditions in the first station and the deposition conditions in the second station are substantially the same, but forming a thicker layer on the first substrate in the first station than on the second substrate in the second station; (c) continuing to deposit material on the second substrate in the second station under the conditions in (b), while adjusting the deposition conditions in the first station to slow or stop deposition of material on the first substrate; and (d) completing deposition on the first substrate in the first station and deposition on the second substrate in the second station such that the total thickness of the material deposited on the first substrate and the material deposited on the second substrate are substantially equal.

[0003] In one such embodiment, the deposition conditions may include exposing the first substrate and the second substrate to a precursor of the material.

[0004] In such further embodiments, adjusting the deposition conditions may include reducing or stopping the flow of precursor to the first station.

[0005] In another embodiment, the deposition conditions may include exposing the first substrate and the second substrate to a plasma.

[0006] In such further embodiments, adjusting the deposition conditions may include reducing or ceasing exposure of the first substrate to the plasma.

[0007] In some embodiments, the first wafer may not move from the first station during (b) and (c).

[0008] In one such embodiment, (b) may include cyclically repeating (i) administering a precursor onto the first substrate and the second substrate to cause the precursor to be absorbed onto the first substrate and the second substrate, and (ii) exposing the first substrate and the second substrate to a plasma to cause the precursor to react and form the material.

[0009] In further such embodiments, (c) may include continuing the cycling for the second substrate in the second station under the conditions in (b) while ceasing the delivery of precursor and / or exposure to plasma in the first station, thereby reducing the thickness of material deposited during the cycling.

[0010] In other such further embodiments, (c) may include continuing the cycling for the second substrate in the second station under the conditions in (b), while adjusting the duration or power of the plasma in the first station, thereby reducing the thickness of the material deposited during the cycling.

[0011] In another embodiment, the method may further include analyzing measurement information regarding the relative deposition rates among the first and second stations before or during (b) and using the measurement information to determine how to adjust the deposition conditions in (c).

[0012] In such further embodiments, the measurement information may be obtained during (b).

[0013] In some embodiments, the method may further include analyzing measurement information regarding physical properties of the first substrate and the second substrate before or during (b) and using the measurement information to determine how to adjust deposition conditions in (c).

[0014] In one embodiment, a method of semiconductor deposition for forming approximately equal thicknesses of material on at least two substrates processed in parallel in separate stations of a multi-station deposition apparatus may be provided. The method includes: (a) providing a first substrate in a first station and a second substrate in a second station of the multi-station deposition apparatus; (b) simultaneously exposing the first substrate in the first station and the second substrate in the second station to precursors of the material; (c) simultaneously activating a reaction of the precursor on the first substrate in the first station and a reaction of the precursor on the second substrate in the second station; and (d) performing (b) and (c) for N1 cycles, each N1 cycle depositing a thin film of material of substantially equal thickness t1 on the first substrate and a thin film of material of substantially equal thickness t2 on the second substrate, wherein performing the N1 cycles forming a material on the substrate to a total deposition thickness T1, and also forming a material on a second substrate to a total deposition thickness T2A, where T1 is greater than T2A; (e) exposing the second substrate in the second station to precursors and activating a reaction of the precursors on the second substrate in the second station for N2 cycles, each N2 cycle including depositing a thin film of material of substantially equal thickness t2 on the second substrate, each N2 cycle including slowing or stopping deposition of the layer of material on the first substrate while the first substrate remains in the first station; and performing the N1 and N2 cycles to form a material on the second substrate to a total deposition thickness T2 substantially equal to T1.

[0015] In one such embodiment, the activating in (c) may include independently providing plasma at a first plasma power for a first plasma time into each station, and the activating in (e) may include independently providing plasma into a second station.

[0016] In one such further embodiment, activating in (e) may include independently providing plasma in the second station for a second plasma time different from the first plasma time, and the thin films of substantially equal thickness t2 deposited in each N1 cycle may be different from the thin films of substantially equal thickness t2 deposited in each N2 cycle.

[0017] In another such further embodiment, activating in (e) may include independently providing a plasma in the second station at a second plasma power different from the first plasma power, and the thin films of substantially equal thickness t2 deposited in each N1 cycle may be different from the thin films of substantially equal thickness t2 deposited in each N2 cycle.

[0018] In some embodiments, the exposing in (c) may include flowing the precursor through a first station and a second station for a first exposure time, and the exposing in (e) may include flowing the precursor through a second station for a second exposure time, and the thin films of substantially equal thickness t2 deposited in each N1 cycle may be different from the thin films of substantially equal thickness t2 deposited in each N2 cycle.

[0019] In one embodiment, a multi-station deposition apparatus may be provided that may include a vacuum system, a gas delivery system, a processing chamber including at least two stations, each station sharing the vacuum system and the gas delivery system, and a controller for controlling the multi-station deposition apparatus to deposit substantially equal thicknesses of material on at least two substrates that are processed in parallel in separate stations. The controller may include control logic for: (a) providing a first substrate in a first station and providing a second substrate in a second station of a multi-station deposition apparatus; (b) depositing material in parallel on the first substrate in the first station and on the second substrate in the second station, wherein the deposition conditions in the first station and the second station are substantially the same, but forming a thicker layer of material on the first substrate in the first station than on the second substrate in the second station; (c) continuing to deposit material on the second substrate in the second station under the conditions in (b), while adjusting the deposition conditions in the first station to slow or stop deposition of material on the second substrate; and (d) completing deposition on the first substrate in the first station and deposition on the second substrate in the second station such that the total thicknesses of material deposited on the first substrate and the second substrate are substantially equal.

[0020] In one such embodiment, each station may include a showerhead for distributing precursors of the material onto the substrate in that station, and the gas delivery system may be configured to control the delivery of precursors of the material to each station.

[0021] In a further embodiment, the controller may further include control logic for independently controlling precursor delivery to each station, and adjusting the deposition conditions in (c) may include reducing or stopping the flow of precursor to the first station.

[0022] In another embodiment, the apparatus may further include a plasma source configured to independently form and maintain a plasma in each station, the controller may further include control logic for independently forming and maintaining a plasma in each station, and the deposition conditions in (b) may include exposing the first substrate and the second substrate to the plasma.

[0023] In a further embodiment, the controller may further include control logic for independently controlling plasma power levels in each station, and adjusting the deposition conditions in (c) may include reducing or ceasing exposure of the first substrate to the plasma.

[0024] In yet another embodiment, the controller may further include control logic for independently controlling plasma time in each station, and adjusting the deposition conditions in (c) may include reducing or ceasing exposure of the first substrate to the plasma. [Brief explanation of the drawings]

[0025] [Figure 1] FIG. 1 illustrates a substrate processing apparatus for depositing films on semiconductor substrates using any number of processes.

[0026] [Figure 2] FIG. 1 illustrates an implementation of a multi-station processing tool.

[0027] [Figure 3] 1 is a flow chart illustrating a first example technique for depositing approximately equal thicknesses of material onto at least two substrates that are processed in parallel in separate stations of a multi-station deposition apparatus.

[0028] [Figure 4]1 is a graph illustrating the general relationship between plasma exposure time and thickness of material formed by the plasma.

[0029] [Figure 5] 10 is a flow chart illustrating a second example technique for forming approximately equal thicknesses of material on at least two substrates processed in parallel in separate stations of a multi-station deposition apparatus.

[0030] [Figure 6] 10 is a table illustrating an example of an implementation using feedforward information.

[0031] [Figure 7] 1 is a graph showing thickness measurements in a four-station deposition apparatus for two different deposition processes.

[0032] [Figure 8] 1 is a flowchart illustrating an example series of operations for forming a film of material on a substrate through an atomic layer deposition process. DETAILED DESCRIPTION OF THE INVENTION

[0033] In the following description, numerous specific details are specified to provide a thorough understanding of the presented concepts. The presented concepts may be practiced without some or all of these specific details. Additionally, well-known process operations are not described in detail so as not to unnecessarily obscure the described concepts. Although some concepts are described in connection with specific implementations, these implementations are not intended to be limiting.

[0034] Many concepts and implementations are described and illustrated herein. While specific features, attributes, and advantages of the implementations discussed herein are described and illustrated, it should be understood that many other, different, and / or similar implementations, features, attributes, and advantages of the present invention will be apparent from these descriptions and illustrations. As such, the following implementations are merely a few possible examples of the present disclosure. They are not intended to be exhaustive, i.e., to limit the disclosure to the precise forms, techniques, materials, and / or configurations disclosed. Many modifications and variations are possible in light of this disclosure. It will be understood that other implementation uses and operational changes may be made without departing from the scope of the present disclosure. As such, the descriptions of the above implementations are presented for purposes of illustration and description, and the scope of the present disclosure is not limited solely to the following descriptions.

[0035] Importantly, the present disclosure is not limited to any one aspect or implementation, or to any one combination and / or permutation of such aspects and / or implementations. Moreover, each aspect of the present disclosure and / or each implementation thereof may be used alone or in combination with one or more of the other aspects and / or implementations thereof. For the sake of brevity, many of these permutations and combinations will not be individually discussed and / or illustrated herein.

[0036] Some semiconductor processes are used to deposit one or more layers of material on a substrate, such as a wafer. As used herein, the term "wafer" can be interpreted to generally include other forms of "substrate," such as large-format display substrates. Examples of such deposition processes include chemical vapor deposition ("CVD"), plasma-assisted CVD ("PECVD"), atomic layer deposition ("ALD"), low-pressure CVD, ultra-high-pressure CVD, physical vapor deposition ("PVD"), and conformal film deposition ("CFD").

[0037] For example, some CVD processes may deposit a film on a wafer surface by flowing one or more gaseous reactants into a reactor that form film precursors and by-products. The precursors are transported to the wafer surface, where they are adsorbed by the wafer, diffuse into the wafer, and are deposited on the wafer by chemical reaction. The chemical reaction also produces by-products, which are removed from the wafer surface and the reactor.

[0038] As another example, some deposition processes involve multiple film deposition cycles, each of which builds up a "distinct" film thickness. ALD is one such film deposition method, but any technique used in a repeated, sequential manner to lay down thin film layers could be considered to involve multiple deposition cycles.

[0039] With the continued shrinking of device and feature sizes in the semiconductor industry, and with the increasing prevalence of 3D device structures in integrated circuit (IC) design, the ability to deposit thin, conformal films (films of material having a uniform thickness relative to the shape of the underlying structure, even if the underlying structure is non-planar) is becoming increasingly important. ALD is well suited to depositing conformal films due to the fact that a single cycle deposits only a thin layer of material, the thickness of which is limited by the amount of one or more film precursor reactants that can adsorb onto the substrate surface (i.e., form an adsorption-limiting layer) prior to the film-forming chemical reaction itself. Multiple "ALD cycles" can then be used to build up a film of desired thickness; because each layer is thin and conformal, the resulting film substantially conforms to the shape of the underlying device structure. In certain embodiments, each ALD cycle comprises the following steps: 1. Exposure of the Substrate Surface to the First Precursor 2. Purging the reaction chamber in which the substrate is placed 3. Activation of reactions on the substrate surface, usually by plasma and / or a second precursor 4. Purging the reaction chamber in which the substrate is placed

[0040] The duration of each ALD cycle may typically be less than 25 seconds, or less than 10 seconds, or less than 5 seconds. One or more plasma exposure steps of an ALD cycle may have a short duration, such as 1 second or less. FIG. 8 is a flowchart illustrating an example series of operations for forming a material film on a substrate through an ALD process. As can be seen from FIG. 8, item 1 above corresponds to block 858, item 2 above corresponds to block 860, item 3 above corresponds to block 862, and item 4 above corresponds to block 864; these four blocks are performed for N cycles, after which the process is stopped.

[0041] FIG. 1 illustrates a substrate processing apparatus for depositing films on semiconductor substrates using any number of processes. The apparatus 100 of FIG. 1 includes a process chamber 102 with a substrate holder 108 (e.g., a pedestal) within an interior space that can be maintained under vacuum by a vacuum pump 118. A gas delivery system 101 and a showerhead 106 are also fluidly coupled to the chamber for delivery of (e.g.,) film precursors, carrier and / or purge and / or process gases, secondary reactants, etc. Equipment for generating a plasma within the process chamber is also illustrated in FIG. 1. The apparatus illustrated in FIG. 1 is typically intended for performing ALD, but may also be adapted for performing other film deposition operations, such as conventional CVD, e.g., plasma-assisted CVD.

[0042] For simplicity, the processing apparatus 100 is shown as a stand-alone process station having a process chamber body 102 for maintaining a low-pressure environment. However, as described herein, it is understood that multiple process stations may be included within a common process tool environment, such as within a common reaction chamber. For example, FIG. 2 illustrates one implementation of a multi-station processing tool, which is discussed in more detail below. It is further understood that in some implementations, one or more hardware parameters of the processing apparatus 100, including those discussed in more detail herein, may be programmably adjusted by one or more system controllers.

[0043] The process station 100 is in fluid communication with a gas delivery system 101 for delivering process gases, which may include liquids and / or gases, to a distribution showerhead 106. The gas delivery system 101 includes a mixing vessel 104 for mixing and / or conditioning the process gases for delivery to the showerhead 106. One or more mixing vessel inlet valves 120 may control the introduction of process gases into the mixing vessel 104.

[0044] Some reactants may be stored in liquid form prior to vaporization and subsequent delivery to the process chamber 102. The implementation of FIG. 1 includes a vaporization point 103 for vaporizing the liquid reactants provided to the mixing vessel 104. In some implementations, the vaporization point 103 may be a heated liquid injection module. In some other implementations, the vaporization point 103 may be a heated vaporizer. In still other implementations, the vaporization point 103 may be eliminated from the process station.

[0045] In some implementations, a liquid flow controller (LFC) may be provided upstream of the vaporization point 103 to control the mass flow of liquid for vaporization and delivery to the processing chamber 102 .

[0046] The showerhead 106 delivers process gases and / or reactants (e.g., film precursors) to the substrate 112 at the process stations, the flow of which is controlled by one or more valves (e.g., valves 120, 120A, 105) upstream of the showerhead. In the implementation shown in FIG. 1 , the substrate 112 is shown positioned below the showerhead 106 and resting on a pedestal 108. The showerhead 106 may have any shape and may have any suitable number and arrangement of ports for delivering process gases to the substrate 112. In some implementations with two or more stations, the gas delivery system 101 includes valves or other flow control structures upstream of the showerhead that can independently control the flow of process gases and / or reactants to each station, such that gases may flow to one station but not to another station. Additionally, the gas delivery system 101 may be configured to independently control the process gases and / or reactants delivered to each station in a multi-station apparatus, e.g., to provide different gas compositions, such as different partial pressures of gas components, between stations at the same time.

[0047] The space 107 is located below the showerhead 106. In some implementations, the pedestal 108 may be raised or lowered to expose the substrate 112 to the space 107 and / or to vary the volume of the space 107. Optionally, the pedestal 108 may be lowered and / or raised during the deposition process to vary the process pressure, reactant concentration, etc. within the space 107.

[0048] 1 , the showerhead 106 and pedestal 108 are electrically connected to an RF power supply 114 and a matching network 116 for powering the plasma. In some implementations, the plasma energy may be controlled (e.g., through a system controller having appropriate machine-readable instructions and / or control logic) by controlling one or more of the process station pressure, gas concentration, RF source power, RF source frequency, and plasma power pulse timing. For example, the RF power supply 114 and the matching network 116 may be operated at any suitable power to form a plasma having a desired composition of radical species. Similarly, the RF power supply 114 may provide RF power of any suitable frequency and power.

[0049] In some implementations involving two or more stations, the apparatus is configured such that the RF power supply 114 and associated components independently induce and maintain a plasma in each station. For example, the apparatus may be configured to maintain a plasma in one station while simultaneously not forming a plasma in another station. Furthermore, the apparatus may be configured to maintain a plasma in two stations with different plasma characteristics, such as plasma power, density, composition, duration, etc.

[0050] In some implementations, plasma initiation and maintenance conditions are controlled by appropriate hardware and / or appropriate machine-readable instructions in a system controller, which may provide the control instructions through a series of input / output control (IOC) instructions. In one example, instructions for setting plasma conditions for initiating or maintaining a plasma are provided in the form of a plasma activation recipe of a process recipe. In some cases, a process recipe may be sequentially arranged so that all instructions for a process are executed in parallel to its process steps. In some implementations, instructions for setting one or more plasma parameters may be included in a recipe preceding a plasma process. For example, a first recipe may include instructions for setting flow rates of an inert (e.g., helium) gas and / or a reactant gas, instructions for setting a plasma generator to a power setting, and a time delay instruction for the first recipe. A subsequent second recipe may include instructions for enabling the plasma generator and a time delay instruction for the second recipe. A third recipe may include instructions for disabling the plasma generator and a time delay instruction for the third recipe. It will be appreciated that these recipes may be further subdivided and / or repeated in any suitable manner within the scope of the present disclosure.

[0051] In some deposition processes, plasma power lasts on the order of a few seconds or more. In certain implementations described herein, much shorter periods of plasma power may be applied during a processing cycle. These may be on the order of less than 50 milliseconds, with 25 milliseconds being one specific example.

[0052] As described above, a multi-station substrate processing tool may include one or more process stations. FIG. 2 illustrates an example of a multi-station substrate processing apparatus. Through the use of a multi-station processing apparatus such as that illustrated in FIG. 2, various efficiencies may be realized in terms of increased throughput as well as equipment and operating costs. For example, a single vacuum pump may be used for all four process stations to evacuate consumed process gases and other waste to create a single high-vacuum environment. In some implementations, each process station may have its own dedicated showerhead for gas delivery, but may share the same gas delivery system. Similarly, certain components of the plasma-generating equipment (e.g., power supplies) may be shared between process stations, although in some implementations (e.g., when a showerhead is used to apply the plasma-generating potential), certain components may be unique to each process station. Again, it is understood that such efficiencies may be realized to a greater or lesser extent by using a greater or lesser number of process stations per processing chamber, such as 2, 3, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, or 16 or more per reaction chamber.

[0053] The substrate processing apparatus 200 of Figure 2 employs a single substrate processing chamber 214 containing multiple substrate processing stations, each of which may be used to perform a processing operation on a substrate held in that process station on a wafer holder, such as a pedestal. In this particular implementation, the multi-station substrate processing apparatus 200 is shown as having four process stations 201, 202, 203, and 204. Other similar multi-station processing apparatuses may have more or fewer processing stations depending on the implementation and, for example, the desired level of parallel wafer processing, size / space constraints, cost constraints, etc. Also shown in Figure 2 is a handling robot 226 and a controller 250.

[0054] As shown in FIG. 2, the multi-station processing tool 200 has a substrate loading port 220 and a robot 226 configured to move substrates from a cassette loaded via a pod 228 through the atmospheric port 220 into the processing chamber 214 and to any one of four stations 201, 202, 203, or 204.

[0055] The processing chamber 214 shown in FIG. 2 provides four process stations 201, 202, 203, and 204. RF power is generated in an RF power system 213 and distributed to each of the stations 201, 202, 203, and 204. The RF power system may include one or more RF power sources, such as a high-frequency (HFRF) source and a low-frequency (LFRF) source, an impedance matching module, and a filter. In certain implementations, the power source may be limited to only high-frequency or low-frequency sources. The distribution system of the RF power system may be symmetrical about the reactor and have a high impedance. This symmetry and impedance result in approximately equal amounts of power being delivered to each station. As noted above, in some implementations, the RF power system may be configured to deliver power to each station independently. For example, RF power may be delivered to stations 201 and 202 simultaneously, while not being delivered to stations 203 and 204, such that plasma is formed and maintained only at stations 201 and 202 simultaneously.

[0056] 2 also illustrates one implementation of a system controller 250 utilized to control process conditions and hardware states of the process tool 200. The system controller 250 may include one or more memory devices 256, one or more mass storage devices 254, and one or more processors 252. The processor 252 may include a CPU, an ASIC, general purpose computer(s) and / or special purpose computer(s), one or more analog and / or digital input / output connections, one or more stepper motor control boards, etc.

[0057] In some implementations, the system controller 250 controls some or all of the operation of the process tool 200, including the operation of its individual process stations. The system controller 250 may execute machine-readable system control instructions 258 on the processor 252, which are retrieved from the mass storage device 254 into the memory device 256. The system control instructions 258 may include instructions for controlling the timing, mixing of gaseous reactants and liquid mixtures, chamber and / or station pressure, chamber and / or station temperature, wafer temperature, target power levels, RF power levels, RF exposure time, substrate pedestal, chuck, and / or susceptor position, plasma formation at each station (which may include independent plasma formation at one or more stations, as described above), flow of gaseous reactants and liquid reactants (which may include independent flow to one or more stations, as described above), and other parameters of a particular process performed by the process tool 200. These processes may include various types of processes, including, but not limited to, processes related to the deposition of films on substrates. The system control instructions 258 may be configured in any suitable form. For example, various process tool component subroutines or control objects may be written to control the operation of the process tool components. The system control instructions 258 may be coded in any suitable computer-readable programming language. In some implementations, the system control instructions 258 may be implemented as software, while in other implementations the instructions may be implemented as hardware, for example, hard-coded as logic in an ASIC (application-specific integrated circuit), or in other implementations, a combination of software and hardware.

[0058] In some implementations, the system control software 258 may include input / output control (IOC) instructions for controlling the various parameters described above. For example, each step of one or more deposition processes may include one or more instructions for execution by the system controller 250. A corresponding deposition recipe may include, for example, instructions for setting process conditions for a primary film deposition process, as well as instructions for a film cap deposition. In some implementations, the recipes may be arranged sequentially such that all instructions for a process are executed in parallel with that process.

[0059] Some implementations may use other computer readable instructions and / or programs stored on the mass storage device 254 and / or memory device 256 associated with the system controller 250. Examples of programs or program sections include a substrate positioning program, a process gas control program, a pressure control program, a heater control program, and a plasma control program.

[0060] In some implementations, the system controller 250 may have associated therewith a user interface, such as a display screen, a graphical software display of equipment and / or process conditions, and user input devices such as a pointing device, keyboard, touch screen, microphone, etc.

[0061] In some implementations, the parameters adjusted by the system controller 250 relate to process conditions. Non-limiting examples include process gas composition and flow rates, temperature, pressure, plasma conditions (RF bias power level, frequency, exposure time), etc. The controller may also be configured to independently control conditions within the process stations, e.g., the controller provides instructions for inducing plasma in some but not all stations. These parameters may be provided to the user in the form of a recipe, which may be entered using a user interface.

[0062] Signals for monitoring the process may be provided by analog and / or digital input connections of the system controller 250 from various process tool sensors. Signals for controlling the process may be output on analog and / or digital output connections of the process tool 200. Non-limiting examples of process tool sensors include mass flow controllers (MFCs), pressure sensors (e.g., pressure gauges), thermocouples, load sensors, OES sensors, instrumentation for in-situ measurement of physical properties of the wafer, etc. In conjunction with data from these sensors, appropriately programmed feedback and control algorithms may be used to maintain process conditions.

[0063] The system controller 250 may provide machine-readable instructions for implementing the deposition process. These instructions may control a wide variety of process parameters, such as DC power levels, RF bias power levels, station-to-station variations such as RF power parameter variations, frequency fine-tuning parameters, pressure, temperature, etc. The instructions may control the parameters for operating the in-situ deposition of film stacks according to various implementations described herein.

[0064] The system controller typically includes one or more memory devices and one or more processors configured to execute machine-readable instructions to cause the apparatus to perform operations according to the processes disclosed herein. The system controller may be coupled to a non-transitory machine-readable medium containing instructions for controlling operations according to the substrate doping processes disclosed herein.

[0065] As described above, processing multiple substrates at multiple process stations within a common substrate processing chamber may increase throughput by allowing film deposition to occur simultaneously on multiple substrates in parallel while using common processing equipment between each station. For example, in a four-station process chamber, four substrates placed in four separate stations may be processed simultaneously. It should be noted that some multi-station substrate processing tools may be used to simultaneously process wafers for an equal number of cycles (e.g., for some ALD processes). Given this configuration of process stations and substrate loading and transport equipment, a variety of process sequences are possible that allow film deposition to occur in parallel (e.g., simultaneously) across multiple substrates, such as N cycles of film deposition for an ALD process or equal exposure durations for a CVD process.

[0066] One approach to achieving consistent film deposition across different substrates involves sequentially passing the substrates through multiple process stations within a processing chamber during the deposition process. That is, for each substrate, a portion of its film is deposited in one station, and another portion of its film is deposited in one or more other processing stations. This will result in averaging out any systematic deposition differences that occur between different stations. Again, this processing mode may be used for any type of deposition process, including CVD and ALD. For example, in an ALD process in which a total of N cycles are performed for four wafers in a four-station processing chamber, N / 4 cycles may be performed for each wafer within each station, with each wafer being transferred to a different station after the completion of each N / 4 cycle. However, some other implementations of this approach may not require an equal number of cycles for each wafer. As another example, in an ALD process in which a total of N cycles are performed for four wafers in a four-station processing chamber, N×2 / 5 cycles may be performed for each wafer in the station where each wafer is first placed, followed by N / 5 cycles for each wafer in the remaining three stations. Illustratively, a total of 500 deposition cycles may be performed for wafers 1, 2, 3, and 4, which are first placed in stations 201, 202, 203, and 204, respectively. 200 cycles may be performed for wafer 1 in station 201, after which wafer 1 is transferred to stations 202, 203, and 204, where 100 cycles are performed in each of these stations, for a total of 500 cycles. The same approach applies to wafers 2, 3, and 4.

[0067] This type of “sequential mode” processing, or “sequential processing,” is beneficial in the sense that each wafer enters a different station, thereby averaging out some of the systematic deposition differences that occur between different stations. However, other characteristics make this mode of operation less attractive. For example, some sequential mode implementations involve many substrate loads / unloads and opening / closing of the processing chamber port 220. In some operating modes, for a substrate to undergo its assigned N depositions across four stations, the processing chamber must be opened and closed four times for load / unload operations, each time restoring the environment inside the chamber to environmental conditions suitable for deposition (e.g., temperature, pressure, flow rate, etc.). A “static mode,” using only one station for load operations, may involve the same number of sequential passes using 90-degree transfer rotations of the cassette in which the wafers are located within the process chamber to bring the four wafers into position for deposition; however, in static mode, the chamber only needs to be opened and closed once because no depositions are performed between the transfer rotations. Therefore, it is possible to load all four wafers (one at a time) into the multi-station chamber prior to deposition. Even if the chamber remains closed and the internal pressure remains relatively constant, the sequential transfer of wafers from one station to the next slows down the process.

[0068] Another process procedure, referred to herein as "fixed mode," does not involve sequential feed. Using the example of FIG. 2 , in fixed mode, the chamber is opened through port 220, wafers are loaded into all four stations, the chamber is closed, N deposition cycles are performed in parallel and simultaneously for all four wafers, the deposition cycles are completed, the chamber is opened, and the four wafers are removed. In other words, each substrate undergoes all of its film deposition (all N cycles) in one of the four processing stations. This fixed mode process may be used for any type of deposition process, such as CVD and ALD. Fixed mode processing does not have the delays associated with sequential feed in other modes, and therefore has higher deposition throughput. However, this mode may not always achieve consistent film deposition across different substrates due to process inconsistencies between different stations. For example, the process conditions in one station may not exactly match the process conditions in another station, such as different RF frequencies between the stations, resulting in wafers processed in one station having different properties than wafers processed in another station, including, for example, differences in average film thickness, uniformity across the surface of the wafer, physical properties, chemical properties, and optical properties.

[0069] Techniques for improving station-to-station wafer consistency in multi-station process chambers, i.e., for achieving more consistent film deposition across different substrates, include designing semiconductor processing equipment to minimize differences in process conditions between stations. For example, as noted above, consistency in thickness between stations is a challenge in multi-station process chambers, and thickness between stations may vary due to differences in numerous process conditions between stations, such as gas and / or chemical delivery, RF power supplied to each station, temperature at each station, pumping within the chamber and / or each station, hardware settings (e.g., station hardware installation and function), and the physical environment within the chamber. Embodiments of multi-station process chambers may be designed and / or constructed to minimize these differences in process conditions between each station (e.g., ensuring the same temperature profile at each station), however, such designs are complex and it is nearly impossible to completely eliminate the differences.

[0070] Another technique for improving wafer consistency between stations in a multi-station process chamber involves adjusting one or more process conditions in one or more stations. However, most process conditions during a deposition process are typically interdependent, and if process condition A is adjusted to compensate for a difference in process condition B, such an adjustment may unintentionally affect the effect of process condition C. For example, the temperature in one or more stations may be adjusted to improve thickness consistency between stations, however, this temperature change may also affect film stress. Therefore, adjusting one or more process conditions in one or more stations is a highly complex optimization problem with highly intercorrelated variables.

[0071] As noted above, thickness consistency between stations can be a challenge in a multi-station process chamber operated in a fixed mode. The inventors have determined that thickness consistency between stations (and other aspects of uniformity) may be improved by operating one or more stations normally to deposit a layer of material on a wafer in one station while simultaneously slowing or stopping normal operation in one or more other stations of the multi-station process chamber to slow or stop deposition of a layer on another wafer in the other stations. As described below, instead of slowing or stopping normal operation in one or more stations, the process may simply adjust deposition conditions in those stations while maintaining normal conditions in the other stations. Examples of deposition conditions that can be adjusted to provide different conditions in different stations include plasma strike timing, plasma power, plasma duration, process gas (e.g., reactant and / or precursor) flow, and process gas partial pressure, among others. The apparatus and techniques in this disclosure may be applied to any deposition process, including those mentioned above, such as CVD, PECVD, ALD, and ECD.

[0072] FIG. 3 is a flow chart illustrating a first example technique for depositing approximately equal thicknesses of material on at least two substrates processed in parallel in separate stations of a multi-station deposition apparatus. Such deposition may be performed, for example, by CVD or ALD. While this first example illustrates a technique involving two stations, such a technique may also be applied to multi-station deposition apparatuses with three or more stations, such as those described above with reference to FIGS. 1 and 2. In block 340 of FIG. 3, substrates are provided into stations of the multi-station deposition apparatus. A first substrate may be provided into the first station, and a second substrate may be provided into the second station. As described above with reference to FIG. 2, the substrates may be placed into the stations by a substrate handling robot.

[0073] In block 342 of FIG. 3 , material is deposited in parallel on a first substrate in a first station and on a second substrate in a second station. As noted above, this deposition occurs in parallel, i.e., simultaneously or in parallel, in these stations, such that deposition occurs on the first substrate in the first station at the same time as deposition on the second substrate in the second station. The parallel deposition in block 342 may be a single CVD deposition process, a deposition cycle in a cyclic deposition process such as ALD, or the entire deposition process of a cyclic process. In such parallel depositions, the deposition conditions in the first and second stations may be substantially the same; for example, a control system sets parameters intended to produce identical (or nearly identical) conditions in the stations. For certain process parameters (e.g., plasma power and process gas flow rates), the parameters in different stations may be within a few percent of each other, e.g., within ±5% of each other. As noted above, while attempts may be made to create identical process conditions in each station, in many cases, one or more process conditions will not closely match between stations. These deposition conditions may include, for example, the temperature of the pedestal in each station, the partial pressure of the gas flowed into each station, the local gas flow conditions, the pressure in the chamber, the plasma power in each station, the plasma frequency, and (for depositions involving plasma) the duration of plasma formation in each station, as described above. As a result, parallel depositions may produce a thicker layer on a first substrate in a first station than on a second substrate in a second station, despite efforts to produce equal material layers on each substrate. For example, in an ALD process, the thicker material layer may be the total thickness of material deposited on a substrate after performing N cycles, or it may be the thickness of material after one cycle.

[0074] The fact that two or more stations in a chamber deposit material at different thicknesses may be determined by various techniques, which may be inferred from device performance or measured directly. As one skilled in the art will appreciate, measuring the difference in material layer thickness between two substrates can be performed by any number of techniques, including any known metrology technique, such as reflectance measurements or various types of microscopy. Because the deposited thicknesses formed in each station typically do not change between deposition processes until a certain period of time or number of deposition cycles has elapsed, these measured thicknesses may be considered to be thicknesses consistently formed by each station in each process and may be stored in memory and / or used for subsequent steps of the same technique, as described below. In another example, the thickness of the material layer on each substrate may be measured in situ, i.e., while the wafer is in the station and / or chamber, before, during, and / or after the deposition process.

[0075] In block 344, one or more adjustments are made to the deposition conditions in the first station to slow or stop deposition of material on the first substrate, while the apparatus continues to deposit material on the second substrate in the second station under the conditions in block 342. The adjustments to each deposition condition will depend on several factors, such as the thickness of material deposited in each station, as well as the deposition process being used. The adjustments may include, for example, reducing or stopping the flow of reactants, such as precursors, into the first station. For example, in a CVD process in which deposition on two substrates was initiated using a particular set of substantially identical initial deposition conditions, the adjustment may be to stop the flow of reactants to the first station to stop and / or slow deposition in the first station, while the deposition conditions in the second station continue at the initial deposition conditions. In another example, an adjustment in a cyclic deposition process, such as ALD, following substantially identical initial deposition conditions may be to stop the flow of precursor to a first station for the adsorption phase of a cycle of the process so that no material is deposited on a first substrate during that cycle, but flow precursor to a second station according to the initial deposition conditions so that deposition occurs in that second station during that same cycle.

[0076] As noted above, in some embodiments, the adjustment may be a change in deposition conditions in the first station to change the properties of the layer formed by that deposition process, which may be considered as stopping or slowing down the deposition process.

[0077] For deposition processes using plasma exposure in the first and second stations, adjustments may be made to the plasma conditions in the first station. For example, similar to the precursor flow, the adjustment in block 344 may be to reduce or stop the exposure of the first substrate to the plasma, which in turn slows or stops the deposition process for the first substrate. This adjustment may be achieved by, among other things, stopping the formation of the plasma in the first station, changing the plasma frequency, changing the power level of the plasma in the first station, and / or changing the time the plasma is formed in the first station. In an ALD process, adjustments may be made from one cycle to the next. For example, a plasma may be struck in each of 100 cycles, and then not struck in any of 13 cycles. In other processes that are not cyclic in nature, adjustments may be made at specific points during the deposition process without considering defined process transitions. For example, in a PECVD process, plasma exposure in a first station may be stopped after a defined duration while plasma exposure in a second station continues under initial deposition conditions. As an alternative to simply turning off the power, other plasma conditions may be adjusted to fine-tune the deposition rate. For example, the plasma power level in the first station may be reduced to slow down the deposition process in the first station, while the plasma power level in the second station may continue under initial deposition conditions.

[0078] With respect to adjusting the time during which the plasma is formed in the first station, such adjustment may be an increase or decrease in that time, which in turn increases or decreases the thickness of the material layer. FIG. 4 is a graph illustrating a general relationship between plasma exposure time and the thickness of the material formed by the plasma. As can be seen from this graph, the layer thickness initially increases with increasing plasma exposure time, then reaches a maximum thickness, but as plasma exposure continues after reaching that maximum thickness, the layer becomes densified and therefore decreases in thickness. Therefore, this relationship between plasma exposure time and layer thickness may be used to adjust deposition conditions to vary the deposition of wafers in the first station, for example, such that the deposition rate of the layer in the first station can be "decreased," i.e., the thickness of the layer decreases, with increasing exposure time to the plasma.

[0079] Returning to FIG. 3 , in some implementations, block 342 may include cyclical cycling of (i) administering precursors to absorb the precursors onto the first substrate and the second substrate, and (ii) exposing the first substrate and the second substrate to a plasma to react the precursors and form a material. Such cyclical cycling may be the ALD process described herein and illustrated, for example, in FIG. 8 . In some such implementations, as described above for block 342, after a certain number of cyclical depositions, the total thickness of the layer of material on the first wafer may be greater than the total thickness of the layer of material on the second wafer. Accordingly, in block 344, adjustments may be made to the deposition conditions of one or more cycles in the first station. In some implementations, these adjustments may include continuing the cyclical cycling for the second substrate in the second station under the conditions in block 342, while stopping the precursor administration and / or plasma exposure in the first station to reduce the thickness of the material deposited during the cyclical cycling. As used herein, "reducing" may mean that the thickness of a layer is reduced or decreased, or that the layer has no thickness, i.e., that no layer is formed during the cycle in which the adjustment is made. In some other implementations, these adjustments may include continuing the cycling for the second substrate in the second station under the conditions in block 342, while changing the duration of plasma exposure or the power of the plasma in the first station to reduce the thickness of the material deposited during the cycling. As above, this reduction may include reducing the thickness of the layer, or may include that no layer is formed during the cycle in which the adjustment is made.

[0080] In some implementations, the first wafer does not move from the first station during blocks 342 and 344. Thus, the first wafer remains in the first station while deposition continues in the second station under deposition conditions. For example, these implementations may be considered a "stationary mode."

[0081] In block 346, deposition may be completed on the first substrate in the first station and on the second substrate in the second station such that the total thickness of material deposited on the first substrate and the total thickness of material deposited on the second substrate are substantially equal for purposes of performance of the resulting integrated circuit or other fabricated device. The adjustment(s) in block 344 allow for increased deposition of the material layer on the second substrate in the second station while deposition on the first wafer is stopped, slowed, or otherwise altered so that the thickness of the material layer on the second substrate is substantially equal to the thickness of the material layer on the first substrate at the end of the entire deposition process.

[0082] It should be noted that adjustments to deposition conditions may occur at any point during the technique, such as at the beginning, middle, end, or throughout the deposition process. For example, in an ALD process including 500 parallel deposition cycles in a first and second station, the adjustment in block 344 may be made after 500 cycles such that no deposition occurs on the first wafer for the N deposition cycles after all 500 cycles, but deposition of a material layer occurs on the second wafer in the second station for the N cycles.

[0083] FIG. 5 is a flowchart illustrating a second example technique for creating approximately equal thicknesses of material on at least two substrates processed in parallel in separate stations of a multi-station deposition apparatus. The second example technique described herein may be used in a cyclic deposition process, such as ALD, or as shown in FIG. 8 . Block 548 may be the same as block 340 of FIG. 3 as described above, providing a first substrate in a first station and a second substrate in a second station of the deposition apparatus. As described above with respect to FIG. 3 , the second example technique may be applied to a multi-station deposition apparatus having two or more stations and using an apparatus such as those described above with respect to FIGS. 1 and 2 . In block 550, the first substrate and the second substrate are simultaneously (or substantially simultaneously) exposed to precursors of the material. This block may be considered a “dosing” phase of a cyclic deposition process, such as block 858 of FIG. 8 for an ALD process. This exposure, or dispensing, occurs simultaneously within each station, such that precursors flow into each station at substantially the same time for substantially the same duration, e.g., identical to within about ±5% of each other. Although not shown in Figure 5, in some implementations, a purge step may occur after block 550 and before block 552, as described above in connection with the ALD process and as shown in block 860 of Figure 8.

[0084] In block 552, a precursor reaction on the first substrate in the first station and a precursor reaction on the second substrate in the second station are activated. In some implementations, this activation is performed thermally upon contact with a reactant, such as a reactant gas, and in other implementations, it is performed by exposure to a plasma. As in block 550, the activation in each station occurs simultaneously or substantially simultaneously (e.g., within about ±5% of each other). For example, if activation is by plasma, the activation in block 552 is performed by generating the plasma substantially simultaneously for substantially the same duration in each station. Also, the deposition conditions for such activation may be substantially equal in each station. The activation of the precursor reaction causes, at least in part, the formation of a material layer on each substrate.

[0085] Block 554 causes blocks 550 and 552 to be performed for N1 cycles. In each of the N1 cycles, a thin film of material of substantially equal thickness t1 may be deposited on the first substrate, and a thin film of material of substantially equal thickness t2 may be deposited on the second substrate. Performing the N1 cycles may also form a total deposition thickness T1 of material on the first substrate and a total deposition thickness T2A of material on the second substrate. In some implementations, T1 is greater than T2A, similar to the first technique in FIG. 3 .

[0086] Block 556 includes exposing a second substrate in the second station to precursors and activating a reaction of the precursors on the second substrate in the second station for N2 cycles. Each N2 cycle may include depositing a thin material film of substantially equal thickness t2 on the second substrate. During each N2 cycle, the first substrate remains in the first station, and deposition of the material layer on the first substrate may be stopped or slowed. Performing the N2 cycle may form a total deposition thickness T2B, and performing the N1 and N2 cycles on the second substrate forms a total deposition thickness T2 (e.g., T2A + T2B) such that T2 is substantially equal to T1. In some implementations, T2B may be substantially equal to t2, which may occur when the N2 cycle is one cycle. For example, in an ALD process using plasma to activate reactions, each N cycle in block 556 may include exposing a second substrate in a second station to precursors and generating a plasma in the second station to activate a reaction of the precursors on the second substrate, while not generating a plasma in the first station so that deposition of a material layer cannot occur on the first substrate. In some implementations, block 556 may include exposing a first substrate in a first station to precursors, but not activating a reaction of the precursors on the first substrate.

[0087] 5 includes block 556 at the end of the figure, block 556 may be performed at any time throughout the entire deposition process. For example, block 556 may be performed before blocks 550, 552, and 554. In another example, the N2 cycles of block 556 may be separated and performed at various times throughout the N1 cycles. For example, for a deposition process with 500 N1 cycles and 100 N2 cycles, the order of the cycles may be 100 N1 cycles, then 50 N2 cycles, then 200 N1 cycles, then 50 N2 cycles, then 200 N1 cycles.

[0088] In some implementations, as described later in this document, adjustments may be made to the deposition conditions of the first and / or second stations during each cycle of the N2 cycle. For example, in some implementations of the second example technique for creating approximately equal thicknesses of material on at least two substrates processed in parallel in separate stations of a multi-station deposition apparatus shown in FIG. 5, activation of the precursor reaction may be performed by plasma. In such implementations, plasma may be provided independently in each station, e.g., induced and controlled, such that plasma may form in one station while not simultaneously forming in another station. In block 552, activation may include independently providing plasma to each station at a first plasma power for a first plasma time. The first plasma time, i.e., the duration for which plasma is formed in that station, may vary depending on the deposition process involved but may be one second or less. The first plasma power may be the power at which plasma is generated and may be related to the RF power and / or RF frequency supplied to each station.

[0089] In block 556, activating a reaction of the precursors in the second station may include independently initiating and / or controlling a plasma in the second station, while plasma may not be provided in the first station, or plasma may be provided in the first station in a manner that slows deposition of the material layer on the first substrate.

[0090] In some implementations, the activation in block 556 may include providing a plasma in the second station for a second plasma time that is different from the first plasma time. As described above with reference to FIG. 4 , the duration for which the plasma is formed in each N2 cycle may result in a thickness of the material layer deposited on the second wafer that is thinner or thicker than the thickness of the material layer deposited in each N1 cycle of block 554. Thus, a film of equal thickness t2 deposited in each N1 cycle of block 554 may be different, e.g., thinner or thicker, than a film of equal thickness t2 deposited in each N2 cycle. The ability to form films of two thicknesses that vary by cycle and by station enhances the ability to match thicknesses between stations.

[0091] In some implementations, activating in block 556 may include providing a plasma in the second station at a second plasma power different from the first plasma power. Similar to above, different power levels in each N2 cycle may result in a thinner or thicker material layer deposited on the second wafer than the thickness of the material layer deposited in each N1 cycle of block 554. Thus, a thin film of equal thickness t2 deposited in each N1 cycle of block 554 may be thicker or thinner than a thin film of equal thickness t2 deposited in each N2 cycle.

[0092] In some implementations, the exposing in block 550 may include flowing the precursor through the first station and the second station for a first exposure time. The exposing in block 556 may also include flowing the precursor through the second station for a second exposure time. Similar to the different plasma powers and durations, exposing the second substrate to the precursor for a second exposure time may result in the deposition of a material layer in each N2 cycle that is thicker or thinner than the material layer deposited in each N1 cycle. For example, the first exposure time may be a time that allows for maximum adsorption of the precursor, and the second exposure time may be 25% shorter than the first exposure time, which may result in a layer thickness that is thicker than the layer thickness that is deposited as a result of the first exposure time.

[0093] In some implementations, the exposing in block 550 can include flowing the precursor to the first station and the second station at a first partial pressure, and the exposing in block 556 can include flowing the precursor to the second station at a second partial pressure. Similar to the different plasma powers and plasma durations, exposing the second substrate to the precursor at the second partial pressure will deposit a material layer in each N2 cycle that has a thickness that is greater or less than the thickness of the material layer deposited in each N1 cycle.

[0094] Thus, an acceptable implementation of the first and / or second example techniques discussed herein for forming material of approximately equal thickness on at least two substrates processed in parallel using a cyclic deposition process in separate stations of a multi-station deposition apparatus may increase the total thickness of the material layer deposited on the second substrate by at least (i) depositing additional material thin films of substantially equal thickness t2 on the second substrate over N2 cycles according to deposition conditions for the N1 cycle, such that the thickness t2 of the thin film deposited in each N1 cycle is substantially equal to the thickness t2 of the thin film deposited in each N2 cycle; and / or (ii) depositing additional material thin films of substantially equal thickness t2 on the second substrate over N2 cycles according to deposition conditions different from the deposition conditions for the N1 cycle, such as a different plasma power or a different plasma duration, such that the thickness t2 of the thin film deposited in each N1 cycle is different from the thickness t2 of the thin film deposited in each N2 cycle.

[0095] In some implementations of the first and / or second example techniques discussed herein for forming approximately equal thicknesses of material on at least two substrates processed in parallel in separate stations of a multi-station deposition apparatus, information such as measurement data regarding physical properties present on wafers in the multi-station deposition apparatus for deposition and / or regarding relative deposition rates in the first and second stations may be analyzed and / or used to determine optical adjustments or adjustments to deposition conditions in the second station. In some such implementations, for example, such measurement information may be “feed-forward” measurement information; in some other such implementations, for example, such information may be “feed-back” measurement information; and in some implementations, such measurement information includes both “feed-forward” and “feed-back” measurement information.

[0096] In some implementations using “feedforward” measurement information, information, such as measurement data regarding physical properties present on a wafer in a multi-station deposition apparatus for deposition and / or relative deposition rates in the first and second stations, may be obtained and / or known by the time deposition occurs on the wafer, such as before the wafer is placed in the multi-station deposition apparatus for deposition or after the wafer is placed in the multi-station deposition apparatus but before deposition occurs. For example, the “feedforward” measurement information may be measurement data for each wafer obtained, for example, in situ or inline (before or after) by a metrology instrument, which may be obtained before and / or after the wafer is placed in the multi-station deposition apparatus. This “feedforward” measurement information may be sent directly to a multi-station deposition apparatus controller that includes control logic for determining appropriate adjustments for each N deposition cycle. The “feedforward” measurement information may be provided to a user, who will then input the appropriate adjustments into the multi-station deposition apparatus, such as by entering them into the controller through a user interface. Such adjustments may be those discussed herein, including plasma power, plasma duration, and number of N2 cycles.

[0097] For example, wafers may be loaded into a multi-station deposition tool after being processed in some other manner, such as a prior etching process. In such an example, known data from the prior etching process regarding the physical properties of the wafers being loaded into and processed in the multi-station deposition tool (e.g., measurement data obtained in situ, inline, or from prior measurements as described above) may be fed forward to determine optimal deposition conditions for properly depositing material and thus matching the individual features on the wafer in the second station. FIG. 6 is a table illustrating an example implementation using feedforward information. This example implementation is for a multi-station deposition tool with stations 1-4 and wafers 1-4 placed in these stations, respectively. The four wafers have been pre-etched, and therefore the critical dimension (“CD”) for each wafer, i.e., the distance between each gap formed by the etching process, is known prior to the deposition process, and the incoming pre-deposition CD for each wafer varies, as can be seen from the table. Here, an ALD process is desired to deposit material into the etched gaps so that the final CD is less than the as-etched CD. However, due to CD variations after the etch process, uniform ALD deposition can leave variations after the ALD deposition. For example, a uniform deposition of 100 Å on wafers 1, 2, 3, and 4 would produce output CDs of 220 Å, 222 Å, 224 Å, and 226 Å.

[0098] Using the "feed-forward" measurement information, the deposition conditions in one or more of the four stations may be adjusted so that each station deposits a layer with a desired final CD of 220 Å. In Figure 6, for example, the deposition conditions in station 2 may be adjusted so that the final thickness deposited on wafer 2 is 101 Å. Such adjustments may be, for example, additional cycles or cycles at different plasma power such that a layer with a total thickness of 101 Å is deposited on wafer 2. As can be seen from Figure 6, similar adjustments may be made to all four wafers so that each has the desired final CD of 220 Å.

[0099] In some implementations using “feedback” measurement information, information, such as measurement data regarding physical properties present on a wafer in a multi-station deposition apparatus for deposition and / or regarding relative deposition rates in first and second stations, may be obtained and / or known during and / or after at least some deposition is occurring on the wafer. In such implementations, the multi-station deposition apparatus is configured to obtain such information, which may include the use of in-situ metrology equipment as described herein. For example, this “feedback” information may be obtained during and / or after the parallel deposition on a first substrate in a first station and a second substrate in a second station of the first technique of block 342 of FIG. 3 . Also, during this block 342, “feedback” measurement information regarding the relative deposition rates in the first and second stations may be obtained, analyzed, and used to determine how to adjust deposition conditions, as discussed herein. As above, this "feedback" measurement information may be sent directly to a multi-station deposition apparatus controller that contains control logic to analyze it and determine appropriate adjustments to the deposition conditions or to the user.

[0100] Some implementations of the present disclosure include a multi-station deposition apparatus. Such an apparatus may include some or all of the parts of the apparatus previously described, such as with respect to FIGS. 1 and 2. In some such embodiments, the multi-station apparatus may include a vacuum system (which may include vacuum pump 118 of FIG. 1), a precursor delivery system (which may be configured similarly to gas delivery system 101, for example), and a processing chamber (similar to process chamber 102) that includes at least two stations, each of which may share a vacuum system and a precursor system. The apparatus may also include a controller for controlling the multi-station deposition apparatus, such as the controller described above with respect to controller 250 of FIG. 2.

[0101] In some embodiments, the controller may control a multi-station deposition apparatus to deposit approximately equal thicknesses of material on at least two substrates that are processed in parallel in separate stations, and the controller may include control logic for implementing at least some of the techniques described herein with respect to FIGS. 3 and 5 . For example, the controller may include control logic to: (a) provide a first substrate in a first station and a second substrate in a second station of a deposition apparatus; (b) deposit material in parallel on the first substrate in the first station and on the second substrate in the second station, wherein the deposition conditions in the first station and the second station are substantially the same, but form a thicker layer of material on the first substrate in the first station than on the second substrate in the second station; (c) continue to deposit material on the second substrate in the second station under the conditions in (b), while adjusting the deposition conditions in the first station to slow or stop deposition of material on the second substrate; and (d) complete deposition on the first substrate in the first station and deposition on the second substrate in the second station such that the total thickness of material deposited on the first substrate and the total thickness of material deposited on the second substrate are substantially equal.

[0102] In some embodiments, each station of the apparatus may include a showerhead (such as showerhead 106) for distributing precursors of the material onto the substrate in that station, and the precursor delivery system is configured to control delivery of precursors of the material to each station. In some such embodiments, the controller may further include control logic for independently controlling precursor delivery to each station, and adjusting the deposition conditions in (c) above may include reducing or stopping the flow of precursor to the first station.

[0103] In some embodiments, the apparatus may include a plasma source configured to independently form and maintain a plasma in each station (as described with respect to FIGS. 1 and 2). In some such embodiments, the controller may further include control logic for independently forming and maintaining a plasma in each station, and the deposition conditions in (b) may include exposing the first substrate and the second substrate to the plasma. In some such embodiments, the controller may further include control logic for independently controlling a plasma power level in each station, and adjusting the deposition conditions in (c) may include reducing or stopping exposure of the first substrate to the plasma. In some other such embodiments, the controller may also include control logic for independently controlling a plasma time in each station, and adjusting the deposition conditions in (c) may include reducing or stopping exposure of the first substrate to the plasma.

[0104] The inventors have used the techniques and apparatus disclosed herein to improve thickness consistency between stations in a multi-station deposition system, as shown in FIG. 7. FIG. 7 is a graph showing thickness measurements in a four-station deposition system, which may be similar to the systems discussed previously, for two different deposition processes. The y-axis represents thickness in angstroms (Å), and the x-axis represents processed wafers in each of the four stations. Each circle represents the total wafer thickness deposited after the number of cycles indicated above or below the circle. For the first deposition process, whose data is shown by the dashed-dotted line, the inventors performed a cyclic deposition process in parallel for 579 cycles in each of the four stations, which deposited a layer of material on each substrate, and the total thickness on each substrate did not match the total thickness of the other substrates. As can be seen from the graph, the total thickness of material on the wafers in station 1 is approximately 787 Å, the total thickness of material on the wafers in station 2 is slightly over 788 Å, the total thickness of material on the wafers in station 3 is between 791 Å and 792 Å, and the total thickness of material on the wafers in station 4 is approximately 787 Å. This is a total deviation of approximately 4.6 Å.

[0105] For the second deposition process, the data is shown as a solid line, in which the inventors performed a cyclic deposition process using the techniques and apparatus disclosed herein to achieve more consistent thickness matching between stations. Here, the inventors started by performing parallel cyclic depositions for 579 cycles among all four stations. However, while all four wafers remained in their respective stations, the inventors performed additional independent deposition cycles on wafers in the other stations to achieve thicknesses of approximately 791 Å within each station. As can be seen from the graph, Station 1 underwent four additional deposition cycles, resulting in a total of 583 cycles and a thickness of approximately 791 Å; Station 2 underwent two additional cycles, resulting in a total of 581 cycles and a thickness of approximately 791 Å; Station 3 underwent no additional cycles and was approximately 791 Å thick; and Station 4 underwent three additional cycles, resulting in a total of 582 cycles and a thickness of approximately 791 Å.

[0106] To maximize throughput while minimizing cost and material utilization by performing these additional deposition cycles, the inventors performed the first 579 cycles in all four stations, then performed two additional deposition cycles in stations 1, 2, and 4 in parallel while wafers in station 3 remained in that station and were not subjected to an additional deposition cycle therein, thereby bringing the total number of cycles in each of these stations to 581. Then, one additional deposition cycle was performed in stations 1 and 4 in parallel while wafers in stations 2 and 3 remained in their respective stations and were not subjected to an additional deposition cycle therein, thereby bringing the total number of cycles in each of these stations to 582. Finally, one additional deposition cycle was performed in station 1 in parallel while wafers in stations 2, 3, and 4 remained in their respective stations and were not subjected to an additional deposition cycle therein, thereby bringing the total number of cycles in each of these stations to 583. Note that the same deposition conditions were used for each deposition cycle in FIG. 7 . 6 is reduced from approximately 4.6 Å in the first data set to approximately 0.4 Å in the second set, a reduction of approximately 10 times. As noted above, in other embodiments, these additional cycles at each station may be performed at any point throughout the deposition process, such as at the beginning of the process.

[0107] Unless otherwise clearly required by the context of this disclosure, terms like "comprises," "comprising," and the like are considered throughout the description and claims in the inclusive sense, i.e., "including but not limited to," rather than in the exclusive or exclusive sense. Terms using the singular or plural generally also include the plural or singular, respectively. When the term "or" is used in reference to a list of two or more items, the term covers all interpretations of any one item in the list, all items in the list, or any combination of multiple items in the list. The term "implementation" refers to implementations of the technologies and methods described herein, as well as physical objects that embody the structures described herein and / or incorporate the technologies and / or methods described herein. The present disclosure may be realized in the following forms. [Form 1] 1. A method for depositing material of approximately equal thickness on at least two substrates processed in parallel in separate stations of a multi-station deposition apparatus, comprising: (a) providing a first substrate in a first station and a second substrate in a second station in the multi-station deposition apparatus; (b) depositing the material in parallel on the first substrate in the first station and on the second substrate in the second station, wherein deposition conditions in the first station and deposition conditions in the second station are substantially the same, forming a thicker layer on the first substrate in the first station than on the second substrate in the second station; (c) continuing to deposit the material on the second substrate in the second station under the conditions in (b) while adjusting the deposition conditions in the first station to slow or stop deposition of the material on the first substrate; (d) completing deposition on the first substrate in the first station and deposition on the second substrate in the second station such that a total thickness of the material deposited on the first substrate and a total thickness of the material deposited on the second substrate are substantially equal; How to prepare for this. [Form 2] 2. The method of claim 1, The method, wherein the deposition conditions include exposing the first substrate and the second substrate to a precursor of the material. [Form 3] 3. The method of claim 2, further comprising: The method, wherein adjusting the deposition conditions includes reducing or stopping the flow of the precursor to the first station. [Form 4] 2. The method of claim 1, The method, wherein the deposition conditions include exposing the first substrate and the second substrate to a plasma. [Form 5] 5. The method of claim 4, The method, wherein adjusting the deposition conditions includes reducing or ceasing the exposure of the first substrate to the plasma. [Form 6] 2. The method of claim 1, wherein (b) comprises cyclically repeating (i) administering a precursor to absorb the precursor onto the first substrate and the second substrate, and (ii) exposing the first substrate and the second substrate to a plasma to cause the precursor to react and form the material. [Form 7] 7. The method of claim 6, further comprising: (c) includes reducing the thickness of the material deposited during the cyclic cycling by stopping the administration of the precursor and / or the exposure to the plasma in the first station while continuing the cyclic cycling for the second substrate in the second station under the conditions in (b). [Form 8] 7. The method of claim 6, further comprising: (c) comprises continuing the cyclical repetition for the second substrate in the second station under the conditions in (b), while adjusting the duration or power of the plasma in the first station to reduce the thickness of the material deposited during the cyclical repetition. [Form 9] 9. The method of any one of aspects 1 to 8, comprising: The method, wherein the first substrate does not move from the first station during (b) and (c). [Form 10] The method of any one of the preceding aspects, further comprising: analyzing measurement information regarding the relative deposition rates at the first station and the second station before or during (b), and using the measurement information to determine how to adjust the deposition conditions in (c). [Form 11] 11. The method of claim 10, further comprising: The method, wherein the measurement information is obtained during (b). [Form 12] The method of any one of the preceding aspects, further comprising: analyzing measurement information regarding physical properties of the first substrate and the second substrate before or during (b), and using the measurement information to determine how to adjust the deposition conditions in (c). [Form 13] 1. A method of semiconductor deposition for forming approximately equal thicknesses of material on at least two substrates processed simultaneously in separate stations of a multi-station deposition apparatus, comprising: (a) providing a first substrate in a first station and a second substrate in a second station of the multi-station deposition apparatus; (b) simultaneously exposing the first substrate in the first station and the second substrate in the second station to a precursor of the material; (c) simultaneously activating a reaction of the precursor on the first substrate in the first station and a reaction of the precursor on the second substrate in the second station; (d) performing (b) and (c) for N1 cycles; each of the N1 cycles includes depositing a thin film of the material of substantially equal thickness t1 on the first substrate and depositing a thin film of the material of substantially equal thickness t2 on the second substrate; performing the N1 cycles forms the material to a total deposition thickness T1 on the first substrate and forms the material to a total deposition thickness T2A on the second substrate, the total deposition thickness T1 being greater than the total deposition thickness T2A; (e) exposing the second substrate in the second station to the precursor and activating a reaction of the precursor on the second substrate in the second station over an N cycle; each N2 cycle includes depositing a thin film of the material of substantially equal thickness t2 on the second substrate; each cycle of the N2 cycle includes slowing or stopping the deposition of the layer of material on the first substrate while the first substrate remains in the first station; performing the N1 cycle and the N2 cycle forms a total deposition thickness T2 of the material on the second substrate that is substantially equal to the total deposition thickness T1; How to prepare for this. [Form 14] 14. The method of claim 13, the activating in (c) includes independently providing a plasma at a first plasma power for a first plasma time in each station; The method, wherein activating in (e) includes independently providing a plasma in the second station. [Form 15] 15. The method of claim 14, the activating in (e) includes independently providing a plasma in the second station for a second plasma time different from the first plasma time; The method, wherein the thin films of substantially equal thickness t2 deposited in each N1 cycle are different from the thin films of substantially equal thickness t2 deposited in each N2 cycle. [Form 16] 15. The method of claim 14, the activating in (e) includes independently providing a plasma in the second station at a second plasma power different from the first plasma power; The method, wherein the thin films of substantially equal thickness t2 deposited in each N1 cycle are different from the thin films of substantially equal thickness t2 deposited in each N2 cycle. [Form 17] 17. The method of any one of aspects 13 to 16, comprising: the exposing in (c) includes flowing the precursor through the first station and the second station for a first exposure time; the exposing in (e) includes flowing the precursor through the second station for a second exposure time; The method, wherein the thin films of substantially equal thickness t2 deposited in each N1 cycle are different from the thin films of substantially equal thickness t2 deposited in each N2 cycle. [Form 18] 1. A multi-station deposition apparatus, comprising: A vacuum system; a gas distribution system; a processing chamber including at least two stations, each station sharing the vacuum system and the gas delivery system; a controller for controlling the multi-station deposition apparatus to deposit material of substantially equal thicknesses on at least two substrates processed in parallel in separate stations, the controller comprising: (a) providing a first substrate in a first station and a second substrate in a second station in the multi-station deposition apparatus; (b) depositing the material on the first substrate in the first station and on the second substrate in the second station in parallel, wherein deposition conditions in the first station and deposition conditions in the second station are substantially the same, to form a layer of the material on the first substrate in the first station that is thicker than the layer of the material on the second substrate in the second station; (c) continuing to deposit the material on the second substrate in the second station under the conditions in (b) while adjusting the deposition conditions in the first station to slow or stop deposition of the material on the first substrate; (d) completing deposition on the first substrate in the first station and deposition on the second substrate in the second station such that a total thickness of the material deposited on the first substrate and a total thickness of the material deposited on the second substrate are substantially equal; a controller including control logic for A multi-station deposition apparatus comprising: [Form 19] 19. The multi-station deposition apparatus according to claim 18, each station including a showerhead for distributing precursors of the material onto the substrate therein; A multi-station deposition apparatus, wherein the gas delivery system is configured to control delivery of the precursors of the material to each station. [Form 20] 20. The multi-station deposition apparatus according to claim 19, the controller further includes control logic for independently controlling precursor delivery to each station; The multi-station deposition apparatus, wherein adjusting the deposition conditions in (c) includes reducing or stopping the flow of the precursor to the first station. [Form 21] 21. The multi-station deposition apparatus of any one of claims 18 to 20, further comprising: a plasma source configured to independently form and maintain a plasma within each station; the controller further includes control logic for independently forming and maintaining a plasma in each station; The deposition conditions in (b) include exposing the first substrate and the second substrate to a plasma. [Form 22] 22. The multi-station deposition apparatus according to claim 21, the controller further includes control logic for independently controlling the plasma power level in each station; The multi-station deposition apparatus, wherein adjusting the deposition conditions in (c) includes reducing or ceasing the exposure of the first substrate to the plasma. [Form 23] 22. The multi-station deposition apparatus according to claim 21, the controller further includes control logic for independently controlling plasma time in each station; The multi-station deposition apparatus, wherein adjusting the deposition conditions in (c) includes reducing or ceasing the exposure of the first substrate to the plasma.

Claims

1. 1. A method of depositing material onto at least two substrates processed in parallel in separate stations of a multi-station deposition apparatus, comprising: depositing the material onto a first substrate in a first station of the deposition apparatus under first deposition conditions and concurrently depositing the material onto a second substrate in a second station of the deposition apparatus under the first deposition conditions; depositing the material onto the second substrate in the second station under the first deposition conditions while the deposition of the material on the first substrate in the first station is reduced or stopped such that a total thickness of the material deposited on the first substrate is substantially equal to a total thickness of the material deposited on the second substrate; A method comprising:

2. 10. The method of claim 1, The method, wherein the first deposition conditions include exposing the first substrate and the second substrate to a precursor and a plasma.

3. 3. The method of claim 2, further comprising: adjusting the first deposition conditions to second deposition conditions in the first station.

4. 4. The method of claim 3, The method, wherein the second deposition conditions in the first station include exposing the first substrate to the precursor.

5. 4. The method of claim 3, The method, wherein the second deposition conditions in the first station include not exposing the first substrate to the precursor.

6. 4. The method of claim 3, The method, wherein the second deposition conditions include providing substantially the same flow of one or more gases to the first substrate as under the first deposition conditions.

7. 10. The method of claim 1, The method of claim 1, wherein the reducing the deposition of the material on the first substrate comprises slowing, but not stopping, the deposition of the material on the first substrate during the deposition of the material on the second substrate in the second station under the first deposition conditions.

8. 10. The method of claim 1, The method of claim 1, wherein the deposition of the material on the first substrate in the first station is stopped during the deposition of the material on the second substrate in the second station under the first deposition conditions.

9. 9. The method of any one of claims 4, 5 and 8, comprising: The method of claim 1, wherein the deposition of the material on the first substrate in the first station is stopped by not exposing the first substrate to a plasma while the second substrate in the second station is exposed to a plasma.

10. 10. The method of claim 1, The method, wherein the first deposition conditions include cyclically repeating (i) administering a precursor onto the first substrate and the second substrate to cause the precursor to be absorbed onto the first substrate and the second substrate, and (ii) exposing the first substrate and the second substrate to a plasma to cause the precursor to react and form the material.

11. 10. The method of claim 1, The method, wherein the first substrate remains in the first station during the parallel deposition of the material on the first substrate and the second substrate and while the deposition on the first substrate is reduced or stopped.

12. 1. A multi-station deposition apparatus, comprising: a processing chamber including at least a first station and a second station separate from one another; a controller for controlling the multi-station deposition apparatus to deposit material onto at least a first substrate and a second substrate that are processed in parallel in at least the first station and the second station, the controller including: depositing the material onto the first substrate in the first station under first deposition conditions and concurrently depositing the material onto the second substrate in the second station under the first deposition conditions; a controller configured to reduce or stop the deposition of the material on the first substrate in the first station while depositing the material on the second substrate in the second station under the first deposition conditions such that a total thickness of the material deposited on the first substrate is substantially equal to a total thickness of the material deposited on the second substrate; A multi-station deposition apparatus comprising:

13. 13. The apparatus of claim 12, each of the first station and the second station including a showerhead for distributing a precursor of the material onto the first substrate in the first station and onto the second substrate in the second station; The apparatus further comprises a gas delivery system configured to control delivery of the precursor to each of the first station and the second station.

14. 14. The apparatus of claim 13, the controller is further configured to cause the multi-station deposition apparatus to flow the precursor in parallel to the first station and the second station during the deposition on the second substrate while reducing or stopping the deposition on the first substrate.

15. 14. The apparatus of claim 13, The controller is further configured to cause the multi-station deposition apparatus to flow the precursor in parallel to the first station and the second station during the parallel deposition.

16. 15. The apparatus of claim 14, the controller is further configured to reduce or stop the deposition on the first substrate while causing the multi-station deposition apparatus to flow the precursor to the second station but not the first station during the deposition on the second substrate.

17. 17. The apparatus of claim 16, The controller is further configured to cause the multi-station deposition apparatus to adjust the first deposition conditions to second deposition conditions within the first station.

18. 18. The apparatus of claim 17, The apparatus, wherein the second deposition conditions in the first station include exposing the first substrate to the precursor.

19. 18. The apparatus of claim 17, The apparatus, wherein the second deposition conditions in the first station include not exposing the first substrate to the precursor.

20. 18. The apparatus of claim 17, The apparatus, wherein the second deposition conditions include providing substantially the same flow of one or more gases onto the first substrate as under the first deposition conditions.

21. 13. The apparatus of claim 12, and wherein reducing the deposition of the material on the first substrate includes slowing, but not stopping, the deposition of the material on the first substrate during the deposition of the material on the second substrate in the second station under the first deposition conditions.

22. 13. The apparatus of claim 12, The apparatus, wherein the deposition of the material on the first substrate in the first station is stopped during the deposition of the material on the second substrate in the second station under the first deposition conditions.

23. 23. An apparatus according to claim 14 or claim 22, comprising: the deposition of the material on the first substrate in the first station is stopped by not exposing the first substrate to a plasma while the second substrate in the second station is exposed to a plasma.

24. 13. The apparatus of claim 12, the first deposition conditions include cyclically repeating (i) administering a precursor to absorb the precursor onto the first substrate and the second substrate, and (ii) exposing the first substrate and the second substrate to a plasma to cause the precursor to react and form the material.

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