Carrier ring design to control deposition on wafer bevel / edge

Abstract

Various carrier ring designs and configurations are provided to control the amount of deposition on the front surface and bevel edge of the wafer. The carrier ring design can control the amount of deposition at various locations on the wafer, where deposition occurs on the back surface of the wafer and deposition is not desired on the front surface of the wafer. These locations include the front surface, edge, and back surface of the bevel, as well as the front and back surfaces of the wafer. The edge profile of the carrier ring is designed to control process gas flow, front purge gas flow, and plasma effects. In some designs, through holes are added to the carrier ring to control gas flow. The edge profile and added features can reduce or eliminate deposition on the front surface and bevel edge of the wafer.

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims the benefit of U.S. Provisional Application No. 62 / 975,146, filed February 11, 2020. The entire disclosures of the above-referenced applications are incorporated herein by reference.

[0002] The present disclosure relates generally to substrate processing systems, and more particularly to carrier ring designs for controlling deposition on wafer bevel / edge. [Background technology]

[0003] The background description provided herein is intended to present the contents of the present disclosure generally. Work by the presently named inventors within the scope of what is described in this Background section, as well as aspects of the description that may not otherwise be considered prior art at the time of filing, are not admitted, expressly or impliedly, as prior art against the present disclosure.

[0004] A substrate processing system typically includes multiple processing chambers (also called process modules) that perform deposition, etching, and other processes on substrates, such as semiconductor wafers. Examples of processes that can be performed on a substrate include, but are not limited to, plasma-enhanced chemical vapor deposition (PECVD) processes, chemically enhanced plasma vapor deposition (CEPVD) processes, and sputtering physical vapor deposition (PVD) processes. Additional examples of processes that can be performed on a substrate include, but are not limited to, etching (e.g., chemical etching, plasma etching, reactive ion etching, etc.) and cleaning processes.

[0005] During processing, a substrate is placed on a substrate support, such as a pedestal, in a processing chamber of a substrate processing system. During deposition, a gas mixture containing one or more precursors is introduced into the processing chamber, and a plasma is struck to activate a chemical reaction. A computer-controlled robot typically transfers the substrates from one processing chamber to another in the order in which the substrates are processed. Summary of the Invention

[0006] A ring-shaped structure surrounding a semiconductor substrate in a processing chamber includes an inner portion of the ring-shaped structure having an inner diameter and an outer portion of the ring-shaped structure having an outer diameter, the inner portion including a first portion descending from a top surface of the ring-shaped structure, a second portion extending horizontally from a bottom end of the first portion toward the semiconductor substrate, a third portion descending vertically from a distal end of the second portion, a fourth portion extending horizontally from the bottom end of the third portion toward the outer diameter, a fifth portion descending from the distal end of the fourth portion toward the outer diameter at an acute angle relative to the second portion, and a sixth portion extending horizontally from the bottom end of the fifth portion toward the outer portion.

[0007] In other features, the top surface of the ring-shaped structure is flush with the top surface of the semiconductor substrate, and the first portion descends vertically from the top surface of the ring-shaped structure by a distance on the order of the thickness of the semiconductor substrate.

[0008] In another feature, the first portion is spaced a predetermined distance from an outer edge of the semiconductor substrate.

[0009] In another feature, the distal end of the second portion extends below an outer edge of the semiconductor substrate.

[0010] In another feature, the first end of the third portion forms a right angle with the distal end of the second portion.

[0011] In another feature, the ring-shaped structure further comprises a plurality of through holes extending from the top surface of the ring-shaped structure through the fourth portion of the ring-shaped structure.

[0012] In another feature, the through-hole has a predetermined diameter and is positioned a predetermined radial distance from the first portion of the ring-shaped structure.

[0013] In another feature, the through-hole descends into the fourth portion of the ring-shaped structure at an angle other than 90 degrees from the top surface of the ring-shaped structure.

[0014] In another feature, the through-hole descends vertically from the top surface of the ring-shaped structure into a fourth portion of the ring-shaped structure.

[0015] In another feature, the through-holes descend from the top surface of the ring-shaped structure into a fourth portion of the ring-shaped structure at a 45 degree angle relative to a first portion that descends vertically from the top surface of the ring-shaped structure.

[0016] In another feature, the ring-shaped structure further comprises a plurality of tubs that support the semiconductor substrate.

[0017] In still other features, a ring-shaped structure surrounding a semiconductor substrate in a processing chamber comprises an inner portion of the ring-shaped structure having an inner diameter and an outer portion of the ring-shaped structure having an outer diameter, the inner portion including a first portion descending from a top surface of the ring-shaped structure, a second portion extending horizontally from a bottom end of the first portion toward the semiconductor substrate, a third portion descending vertically from a distal end of the second portion, a fourth portion descending from the bottom end of the third portion toward the outer portion at a first acute angle relative to the second portion, a fifth portion extending horizontally from the bottom end of the fourth portion toward the outer diameter, a sixth portion descending from the distal end of the fifth portion toward the outer diameter at a second acute angle relative to the second portion, and a seventh portion extending horizontally from the bottom end of the sixth portion toward the outer portion.

[0018] In other features, the top surface of the ring-shaped structure is flush with the top surface of the semiconductor substrate, and the first portion descends vertically from the top surface of the ring-shaped structure by a distance on the order of the thickness of the semiconductor substrate.

[0019] In another feature, the first portion is spaced a predetermined distance from an outer edge of the semiconductor substrate.

[0020] In another feature, the distal end of the second portion extends below an outer edge of the semiconductor substrate.

[0021] In another feature, the first end of the third portion forms a right angle with the distal end of the second portion.

[0022] In another feature, the fourth portion descends at a 30 degree angle relative to the second portion.

[0023] In another feature, the ring-shaped structure further comprises a plurality of through holes extending from the top surface of the ring-shaped structure through the fifth portion of the ring-shaped structure.

[0024] In another feature, the through-hole has a predetermined diameter and is positioned a predetermined radial distance from the first portion of the ring-shaped structure.

[0025] In another feature, the through-hole descends into the fifth portion of the ring-shaped structure at an angle other than 90 degrees from the top surface of the ring-shaped structure.

[0026] In another feature, the through-hole descends vertically from the top surface of the ring-shaped structure into a fourth portion of the ring-shaped structure.

[0027] In another feature, the through-hole descends from the top surface of the ring-shaped structure into a fifth portion of the ring-shaped structure at a 45 degree angle relative to a first portion that descends vertically from the top surface of the ring-shaped structure.

[0028] In another feature, the ring-shaped structure further comprises a plurality of tubs that support the semiconductor substrate.

[0029] In still other features, a ring-shaped structure surrounding a semiconductor substrate in a processing chamber comprises an inner portion of the ring-shaped structure having an inner diameter and an outer portion of the ring-shaped structure having an outer diameter, the inner portion including a first portion descending from a top surface of the ring-shaped structure, a second portion extending initially upward and then horizontally outward from a bottom end of the first portion toward the semiconductor substrate, a third portion descending vertically from a distal end of the second portion, a fourth portion descending from the bottom end of the third portion toward the outer portion at a first acute angle relative to the top surface of the ring-shaped structure, a fifth portion extending horizontally from the bottom end of the fourth portion toward the outer diameter, a sixth portion descending from the distal end of the fifth portion toward the outer diameter at a second acute angle relative to the top surface of the ring-shaped structure, and a seventh portion extending horizontally from the bottom end of the sixth portion toward the outer portion.

[0030] In other features, the top surface of the ring-shaped structure is flush with the top surface of the semiconductor substrate, and the first portion descends vertically from the top surface of the ring-shaped structure by a distance on the order of the thickness of the semiconductor substrate.

[0031] In another feature, the first portion is spaced a predetermined distance from an outer edge of the semiconductor substrate.

[0032] In other features, the horizontal portion of the second portion is vertically spaced a first predetermined distance from the bottom surface of the semiconductor substrate, and the third portion is horizontally spaced a second predetermined distance from the outer edge of the semiconductor substrate.

[0033] In another feature, the ring-shaped structure further comprises a plurality of through holes extending from the top surface of the ring-shaped structure through the fifth portion of the ring-shaped structure.

[0034] In another feature, the through-hole has a predetermined diameter and is positioned a predetermined radial distance from the first portion of the ring-shaped structure.

[0035] In another feature, the through-hole descends into the fifth portion of the ring-shaped structure at an angle other than 90 degrees from the top surface of the ring-shaped structure.

[0036] In another feature, the through-hole descends vertically from the top surface of the ring-shaped structure into a fourth portion of the ring-shaped structure.

[0037] In another feature, the through-hole descends from the top surface of the ring-shaped structure into a fifth portion of the ring-shaped structure at a 45 degree angle relative to a first portion that descends vertically from the top surface of the ring-shaped structure.

[0038] In another feature, the ring-shaped structure further comprises a plurality of tubs that support the semiconductor substrate.

[0039] In still other features, a ring-shaped structure surrounding a semiconductor substrate in a processing chamber comprises an inner portion of the ring-shaped structure having an inner diameter and an outer portion of the ring-shaped structure having an outer diameter, the inner portion including a first portion descending from a top surface of the ring-shaped structure, a second portion extending horizontally from a bottom end of the first portion toward the outer diameter of the ring-shaped structure, a third portion descending from a distal end of the second portion toward the outer diameter at an acute angle relative to the second portion, and a fourth portion extending horizontally from the bottom end of the third portion toward the outer portion.

[0040] In other features, the top surface of the ring-shaped structure is flush with the top surface of the semiconductor substrate, and the first portion descends vertically from the top surface of the ring-shaped structure by a distance on the order of the thickness of the semiconductor substrate.

[0041] In another feature, the first portion is spaced a predetermined distance from an outer edge of the semiconductor substrate.

[0042] In another feature, the ring-shaped structure further comprises a plurality of through holes extending from the top surface of the ring-shaped structure through the second portion of the ring-shaped structure.

[0043] In another feature, the through-hole has a predetermined diameter and is positioned a predetermined radial distance from the first portion of the ring-shaped structure.

[0044] In another feature, the through-hole is closer to the distal end of the second portion of the ring-shaped structure than the first portion.

[0045] In another feature, the through-holes descend vertically from the top surface of the ring-shaped structure into a second portion of the ring-shaped structure.

[0046] In another feature, the ring-shaped structure further comprises a plurality of tubs that support the semiconductor substrate.

[0047] Further areas of applicability of the present disclosure will become apparent from the detailed description, claims, and drawings. The detailed description and specific examples are for purposes of illustration only and are not intended to limit the scope of the present disclosure. [Brief explanation of the drawings]

[0048] The present disclosure will become more fully understood from the detailed description and the accompanying drawings, wherein:

[0049] [Figure 1] FIG. 1 is a diagram illustrating an example of a substrate processing system including a processing chamber.

[0050] [Figure 2] FIG. 2 is a diagram of a portion of a semiconductor wafer showing areas where deposition is undesirable and areas where deposition is prevented or minimized by the carrier ring of the present disclosure.

[0051] [Figure 3A] FIG. 3A illustrates an example of a carrier ring without through holes according to the present disclosure. [Figure 3B] FIG. 3B illustrates an example of a carrier ring without through holes according to the present disclosure. [Figure 3C] FIG. 3C illustrates an example of a carrier ring having through holes according to the present disclosure. [Figure 3D] FIG. 3D illustrates an example of a carrier ring having through holes according to the present disclosure.

[0052] [Figure 4A] FIG. 4A illustrates an example of a first carrier ring design without through holes according to the present disclosure. [Figure 4B] FIG. 4B illustrates an example of a first carrier ring design with through holes according to the present disclosure. [Figure 4C] FIG. 4C illustrates examples of a first carrier ring design with and without through holes according to the present disclosure.

[0053] [Figure 5A] FIG. 5A illustrates an example of a second carrier ring design without through holes according to the present disclosure. [Figure 5B] FIG. 5B illustrates an example of a second carrier ring design with through holes according to the present disclosure. [Figure 5C] FIG. 5C illustrates examples of a second carrier ring design with and without through holes according to the present disclosure.

[0054] [Figure 6A] FIG. 6A illustrates an example of a third carrier ring design without through holes according to the present disclosure. [Figure 6B] FIG. 6B illustrates an example of a third carrier ring design with through holes according to the present disclosure. [Figure 6C] FIG. 6C illustrates an example of a third carrier ring design with and without through holes according to the present disclosure.

[0055] [Figure 7A] FIG. 7A illustrates an example of a fourth carrier ring design without through holes according to the present disclosure. [Figure 7B] FIG. 7B illustrates a fourth carrier ring design example with through holes according to the present disclosure.

[0056] In the drawings, reference numbers may be reused to refer to similar and / or identical elements. DETAILED DESCRIPTION OF THE INVENTION

[0057] During the deposition process, material intended to be deposited only on the bottom surface of a semiconductor wafer (hereinafter "wafer") can also deposit on the front surface, edge, and bevel of the wafer. Current carrier ring designs allow unacceptable amounts of deposition on the front and bevel edges of the wafer. In some carrier ring designs, deposition on the back surface of the wafer (i.e., the surface opposite the underside or top surface) is uniformly depleted at the carrier ring transition.

[0058] The present disclosure provides various carrier ring designs and configurations to control the amount of deposition on the front and bevel edges of the wafer. The carrier ring designs can control the amount of deposition on all three locations on the wafer: the front of the bevel, the edge and back of the bevel, and the front and back of the wafer (where deposition is not desired on the front). Specifically, the edge profile of the carrier ring is designed to control the flow of process gases, the flow of front purge gas, and plasma effects. In some designs, through-holes are added to the carrier ring to control gas flow. The edge profile and added features can reduce or eliminate deposition on the front and bevel edges of the wafer. These and other features of the carrier ring designs and configurations according to the present disclosure are now described in detail below.

[0059] This disclosure is organized as follows: First, an example of a processing chamber is shown and described with reference to Figure 1. Then, the problem solved by the carrier ring design of the present disclosure is shown and described with reference to Figure 2. Subsequently, various design and structural details of the carrier ring according to the present disclosure are shown and described with reference to Figures 3A-7B.

[0060] FIG. 1 illustrates an example of a substrate processing system 10 including a processing chamber 12 that surrounds other components of the substrate processing system 10 and contains an RF plasma (if used). The processing chamber 12 includes a showerhead 14 and a substrate support assembly 16. A substrate 18 is positioned on the substrate support assembly 16. As described below, a carrier ring of the present disclosure is used with the substrate support assembly 16 and includes multiple tabs that support the substrate 18 during processing. Process gases and vaporized chemicals are introduced through the substrate support assembly 16 to deposit materials on the backside (bottom) of the substrate 18. The showerhead 14 introduces a purge gas to prevent deposition on the front side (top) of the substrate 18.

[0061] If a plasma is used, the plasma can be direct or remote. In this example, an RF generating system 30 generates and outputs an RF voltage to the showerhead 14. The substrate support assembly 16 is grounded (which in turn is DC grounded, AC grounded, or floating). By way of example only, the RF generating system 30 can include an RF voltage generator 32 that generates an RF voltage supplied to the showerhead 14 by a matching network 34. Alternatively, the plasma can be delivered by a remote plasma source (not shown).

[0062] The gas delivery system 40 includes one or more gas sources 42-1, ..., 42-(N-1), and 42-N (collectively, gas sources 42), where N is a positive integer. The gas sources 42 supply one or more process gases, precursor gases, cleaning gases, purge gases, etc. to the processing chamber 12. The gas sources 42 are connected to a manifold 48 by valves 44-1, ..., 44-(N-1), and 44-N (collectively, valves 44) and mass flow controllers 46-1, ..., 46-(N-1), and 46-N (collectively, mass flow controllers 46). The output of the manifold 48 is supplied to the substrate support assembly 16. Vaporized precursors can also be used. For some vaporized precursors, an MFC is not used. The gas delivery system 40 delivers a purge gas to the showerhead 14.

[0063] A heater controller 50 may be connected to heater elements (not shown) disposed in the substrate support assembly 16 and the showerhead 14. The heater controller 50 may be used to control the temperature of the showerhead 14, the substrate support assembly 16, and the substrate 18. Valves 60 and pumps 62 may be used to evacuate reactants from the processing chamber 12. A controller 70 may be used to control components of the substrate processing system 10. By way of example only, the controller 70 may be used to control the flow of process and purge gases, monitor process parameters such as temperature, pressure, power, etc., ignite and extinguish plasma, remove reactants, etc.

[0064] 2 shows a portion of a wafer having its bevel edge. As shown, deposition on the front surface and bevel edge of the wafer is undesirable. The carrier ring design according to the present disclosure can prevent or minimize deposition on the front surface and bevel edge of the wafer (specifically, on the portion of the bevel edge of the wafer above the horizontal dashed line).

[0065] Below are various designs of carrier rings that are positioned around the wafer in the processing chamber. A complete ring diagram is shown only for the first carrier ring design. Complete ring diagrams are omitted for the second, third, and fourth carrier ring designs. However, geometric and structural details are shown and described for all four carrier ring designs.

[0066] 3A to 3D show an example of a carrier ring according to a first design of the present disclosure. Figures 3A and 3B show a carrier ring 200 according to the first design that does not have through holes. Figure 3A shows a top view of the carrier ring 200 according to the first design that does not have through holes. Figure 3B shows a bottom view of the carrier ring 200 according to the first design that does not have through holes.

[0067] As shown, the carrier ring 200 according to the first design (and all other carrier ring designs described below, with or without through holes) is annular and has an inner diameter (ID) and an outer diameter (OD). The inner diameter (ID) generally surrounds the wafer (element 202 shown in FIGS. 4A-7B) in the processing chamber. The carrier ring 200 according to the first design (and all other carrier ring designs described below, with or without through holes) includes multiple tabs 201 (e.g., six tabs are shown in the example) that support the wafer 202 during processing. The top surface of the carrier ring 200 is generally coplanar with the top surface of the wafer 202. The geometric and structural profile or shape of the inner edge of the carrier ring 200, indicated by the dotted oval, is shown and described in detail below with reference to FIGS. 4A-4C. The geometric and structural profile or shape (i.e., the surface profile design) of the inner edge of each of the four carrier ring designs is different, as described in detail below with reference to FIGS. 4A-7B.

[0068] 3C and 3D show an example of carrier ring 250 having through holes according to a first design. The only difference between carrier ring 200 and 250 is that carrier ring 200 does not have through holes, while carrier ring 250 does. Carrier rings 200 and 250 are identical in all other respects. FIG. 3C shows a top view of carrier ring 250 having through holes according to a first design. FIG. 3D shows a bottom view of carrier ring 250 having through holes according to a first design. The geometric and structural profile or shape of the inner edge of carrier ring 250, indicated by the dotted oval, is shown and described in detail below with reference to FIGS. 4A-4C. As described in detail below, the geometry and arrangement of the through holes differ for each of the four carrier ring designs.

[0069] 4A-4C show details of a first design (i.e., a first design of the surface profile) of carrier rings 200 and 250 according to the present disclosure. Carrier rings 200 and 250 have annular or ring-like structures to surround a semiconductor substrate (e.g., wafer 202) in a processing chamber. FIG. 4A shows carrier ring 200 without through holes. FIG. 4B shows carrier ring 250 with through holes. FIG. 4C shows structural details of the inner portions of the same carrier rings 200 and 250. The structural details of carrier rings 200 and 250 are described below with reference to carrier ring 250. It should be understood that, except for the through holes, the description of carrier ring 250 is the same as that of carrier ring 200.

[0070] The carrier ring 250 has an inner portion having an inner diameter (ID) and an outer portion having an outer diameter (OD). The inner portion of the carrier ring 250 includes a first portion 252 that descends from a top surface 254 of the carrier ring 250. A second portion 256 of the carrier ring 250 extends horizontally (i.e., parallel to the top surface 254 of the carrier ring 250) from a bottom end of the first portion 252 of the carrier ring 250 toward the wafer 202. A third portion 258 of the carrier ring 250 descends vertically (i.e., perpendicular to the top surface 254 of the carrier ring 250) from a distal end of the second portion 256 of the carrier ring 250. A fourth portion 260 of the carrier ring 250 extends horizontally (i.e., parallel to the top surface 254 of the carrier ring 250) from a bottom end of the third portion 258 of the carrier ring 250 toward the outer diameter (OD) of the carrier ring 250.

[0071] Fifth portion 262 of carrier ring 250 descends from the distal end of fourth portion 260 of carrier ring 250 toward the outer diameter (OD) or outer portion of carrier ring 250 at an acute angle relative to second portion 256 and top surface 254 of carrier ring 250. Sixth portion 264 of carrier ring 250 extends horizontally (i.e., parallel to top surface 254 of carrier ring 250) from the bottom end of fifth portion 262 of carrier ring 250 toward the outer portion or outer diameter (OD) of carrier ring 250.

[0072] A top surface 254 of the carrier ring 250 is flush with the top surface of the wafer 202. A first portion 252 of the carrier ring 250 descends vertically (i.e., at a right angle) from the top surface 254 of the carrier ring 250 a distance approximately equal to the thickness of the wafer 202. The first portion 252 of the carrier ring 250 is spaced a predetermined distance from the outer edge (e.g., OD) of the wafer 202. A distal end of a second portion 256 of the carrier ring 250 extends below the outer edge of the wafer 202. A first end of a third portion 258 of the carrier ring 250 forms a right angle (i.e., a sharp corner) with the distal end of the second portion 256 of the carrier ring 250.

[0073] Carrier ring 250 (not carrier ring 200) includes a plurality of through holes 270 extending from a top surface 254 of carrier ring 250 through a fourth portion 260 of carrier ring 250. Through holes 270 of carrier ring 250 have a predetermined diameter and are disposed a predetermined radial distance from first portion 252 of carrier ring 250. Through holes 270 of carrier ring 250 descend from top surface 254 of carrier ring 250 into fourth portion 260 of carrier ring 250 at an angle other than 90 degrees. For example, through holes 270 of carrier ring 250 descend from top surface 254 of carrier ring 250 into fourth portion 260 of carrier ring 250 at a 45 degree angle relative to first portion 252, which descend perpendicularly (i.e., at a right angle) from top surface 254 of carrier ring 250. In other words, the through holes 270 of the carrier ring 250 descend from the top surface 254 of the carrier ring 250 to the fourth portion 260 of the carrier ring 250 at a 45 degree angle relative to the top surface 254 of the carrier ring 250 .

[0074] 5A-5C show details of a second design (i.e., a second design of surface profile) of carrier rings 300 and 350 according to the present disclosure. Carrier rings 300 and 350 have annular or ring-like structures to surround a semiconductor substrate (e.g., wafer 202) in a processing chamber. FIG. 5A shows carrier ring 300 without through-holes. FIG. 5B shows carrier ring 350 with through-holes. FIG. 5C shows structural details of the inner portions of the same carrier rings 300 and 350. The structural details of carrier rings 300 and 350 are described below with reference to carrier ring 350. It should be understood that, except for the through-holes, the description of carrier ring 350 is identical to that of carrier ring 300.

[0075] The carrier ring 350 comprises an inner portion having an inner diameter (ID) and an outer portion having an outer diameter (OD). The inner portion of the carrier ring 350 includes a first portion 352 that descends from a top surface 354 of the carrier ring 350. A second portion 356 of the carrier ring 350 extends horizontally (i.e., parallel to the top surface 354 of the carrier ring 350) from a bottom end of the first portion 352 toward the wafer 202. A third portion 358 of the carrier ring 350 descends vertically (i.e., perpendicular to the top surface 354 of the carrier ring 350) from a distal end of the second portion 356 of the carrier ring 350. A fourth portion 360 of the carrier ring 350 descends from the bottom end of the third portion 358 of the carrier ring 350 toward the outer diameter (OD) or outer portion of the carrier ring 350 at a first acute angle relative to the second portion 356 or top surface 354 of the carrier ring 350.

[0076] A fifth portion 362 of the carrier ring 350 extends horizontally (i.e., parallel to the top surface 354 of the carrier ring 350) from a bottom end of the fourth portion 360 of the carrier ring 350 toward the outer diameter (OD) or outer portion of the carrier ring 350. A sixth portion 364 of the carrier ring 350 descends from a distal end of the fifth portion 362 of the carrier ring 350 toward the outer diameter (OD) or outer portion of the carrier ring 350 at a second acute angle relative to the second portion 356 or top surface 354 of the carrier ring 350. A seventh portion 366 of the carrier ring 350 extends horizontally (i.e., parallel to the top surface 354 of the carrier ring 350) from a bottom end of the sixth portion 364 of the carrier ring 350 toward the outer portion or outer diameter (OD) of the carrier ring 350.

[0077] The top surface 354 of the carrier ring 350 is flush with the top surface of the wafer 202. The first portion 352 of the carrier ring 350 descends vertically (i.e., at a right angle) from the top surface 354 of the carrier ring 350 a distance approximately equal to the thickness of the wafer 202. The first portion 352 of the carrier ring 350 is spaced a predetermined distance from the outer edge (e.g., OD) of the wafer 202. The distal end of the second portion 356 of the carrier ring 350 extends below the outer edge of the wafer 202. The first end of the third portion 358 of the carrier ring 350 forms a right angle (i.e., a sharp corner) with the distal end of the second portion 356 of the carrier ring 350. The fourth portion 360 of the carrier ring 350 descends at a 30-degree angle relative to the second portion 356 and top surface 354 of the carrier ring 350.

[0078] Carrier ring 350 (not carrier ring 300) includes a plurality of through holes 370 extending from a top surface 354 of carrier ring 350 through a fifth portion 362 of carrier ring 350. Through holes 370 in carrier ring 350 have a predetermined diameter and are disposed a predetermined radial distance from first portion 352 of carrier ring 350. Through holes 370 in carrier ring 350 descend from top surface 354 of carrier ring 350 into fifth portion 362 of carrier ring 350 at an angle other than 90 degrees. For example, through holes 370 descend from top surface 354 of carrier ring 350 into fifth portion 362 of carrier ring 350 at a 45 degree angle relative to first portion 352 of carrier ring 350 descending perpendicularly (i.e., at a right angle) from top surface 354 of carrier ring 350. In other words, the through holes 370 of the carrier ring 350 descend from the top surface 354 of the carrier ring 350 to the fifth portion 362 of the carrier ring 350 at a 45 degree angle relative to the top surface 354 of the carrier ring 350 .

[0079] 6A-6C show details of a third design (i.e., a third design of surface profile) of carrier rings 400 and 450 according to the present disclosure. The carrier rings 400 and 450 have annular or ring-like structures to surround a semiconductor substrate (e.g., wafer 202) in a processing chamber. FIG. 6A shows the carrier ring 400 without through-holes. FIG. 6B shows the carrier ring 450 with through-holes. FIG. 6C shows structural details of the inner portions of the same carrier rings 400 and 450. The structural details of the carrier rings 400 and 450 are described below with reference to the carrier ring 450. It should be understood that, except for the through-holes, the description of the carrier ring 450 is the same as that of the carrier ring 400.

[0080] The carrier ring 450 comprises an inner portion having an inner diameter (ID) and an outer portion having an outer diameter (OD). The inner portion of the carrier ring 450 includes a first portion 452 that descends from a top surface 454 of the carrier ring 450. From a bottom end of the first portion 452 of the carrier ring 450, a second portion 456 of the carrier ring 450 initially extends slightly upward and then extends horizontally (i.e., parallel to the top surface 454 of the carrier ring 450) outward toward the wafer 202. A third portion 458 of the carrier ring 450 descends vertically (i.e., perpendicular to the top surface 454 of the carrier ring 450) from a distal end of the second portion 456 of the carrier ring 450. The fourth portion 460 of the carrier ring 450 descends from the bottom end of the third portion 458 of the carrier ring 450 toward the outer portion or outer diameter (OD) of the carrier ring 450 at a first acute angle relative to the top surface 454 of the carrier ring 450 .

[0081] A fifth portion 462 of the carrier ring 450 extends horizontally (i.e., parallel to the top surface 454 of the carrier ring 450) from a bottom end of the fourth portion 460 of the carrier ring 450 toward the outer diameter (OD) or outer portion of the carrier ring 450. A sixth portion 464 of the carrier ring 450 descends from a distal end of the fifth portion 462 of the carrier ring 450 toward the outer diameter (OD) or outer portion of the carrier ring 450 at a second acute angle relative to the top surface 454 of the carrier ring 450. A seventh portion 466 of the carrier ring 450 extends horizontally (i.e., parallel to the top surface 454 of the carrier ring 450) from a bottom end of the sixth portion 464 of the carrier ring 450 toward the outer portion or outer diameter (OD) of the carrier ring 450.

[0082] The top surface 454 of the carrier ring 450 is flush with the top surface of the wafer 202. The first portion 452 descends vertically (i.e., perpendicularly) from the top surface 454 of the carrier ring 450 a distance greater than the thickness of the wafer 202. The first portion 452 of the carrier ring 450 is spaced a predetermined distance from the outer edge (e.g., OD) of the wafer 202. The horizontal portion of the second portion 456 of the carrier ring 450 is vertically spaced a first predetermined distance from the bottom surface of the wafer 202. The third portion 458 of the carrier ring 450 is horizontally spaced a second predetermined distance from the outer edge (e.g., OD) of the wafer 202. The first and second predetermined distances may be equal.

[0083] Carrier ring 450 (not carrier ring 400) further comprises a plurality of through holes 470 extending from a top surface 454 of carrier ring 450 through a fifth portion 462 of carrier ring 450. Through holes 470 of carrier ring 450 have a predetermined diameter and are disposed a predetermined radial distance from first portion 452 of carrier ring 450. Through holes 470 of carrier ring 450 descend from top surface 454 of carrier ring 450 into fifth portion 462 of carrier ring 450 at an angle other than 90 degrees. For example, through holes 470 of carrier ring 450 descend from top surface 454 of carrier ring 450 into fifth portion 462 of carrier ring 450 at a 45 degree angle relative to first portion 452, which descends perpendicularly (i.e., at a right angle) from top surface 454 of carrier ring 450. In other words, the through holes 470 of the carrier ring 450 descend from the top surface 454 of the carrier ring 450 to the fifth portion 462 of the carrier ring 450 at a 45 degree angle relative to the top surface 454 of the carrier ring 450 .

[0084] 7A and 7B show details of fourth designs (i.e., fourth designs of surface profiles) of carrier rings 500 and 550 according to the present disclosure. The carrier rings 500 and 550 have annular or ring-like structures to surround a semiconductor substrate (e.g., wafer 202) in a processing chamber. FIG. 7A shows carrier ring 500 without through holes. FIG. 7B shows carrier ring 550 with through holes. The structural details of carrier rings 500 and 550 are identical except that carrier ring 500 does not have through holes and carrier ring 550 has through holes. Therefore, the structural details of carrier rings 500 and 550 will be described below with reference to carrier ring 550. It should be understood that, except for the through holes, the description of carrier ring 550 is identical to that of carrier ring 500.

[0085] The carrier ring 550 comprises an inner portion having an inner diameter (ID) and an outer portion having an outer diameter (OD). The inner portion of the carrier ring 550 includes a first portion 552 that descends from a top surface 554 of the carrier ring 550. A second portion 556 of the carrier ring 550 extends horizontally (i.e., parallel to the top surface 554 of the carrier ring 550) from a bottom end of the first portion 552 of the carrier ring 550 toward the outer diameter (OD) or outer portion of the carrier ring 550. A third portion 558 of the carrier ring 550 descends from a distal end of the second portion 556 of the carrier ring 550 toward the outer diameter (OD) or outer portion of the carrier ring 550 at an acute angle relative to the second portion 556 or top surface 554 of the carrier ring 550. The fourth portion 560 of the carrier ring 550 extends horizontally (i.e., parallel to the top surface 554 of the carrier ring 550) from the bottom end of the third portion 558 of the carrier ring 550 toward the outer portion or outer diameter (OD) of the carrier ring 550.

[0086] A top surface 554 of the carrier ring 550 is flush with the top surface of the wafer 202. A first portion 552 of the carrier ring 550 descends vertically (i.e., at a right angle) from the top surface 554 of the carrier ring 550 a distance approximately equal to the thickness of the wafer 202. The first portion 552 of the carrier ring 550 is spaced a predetermined distance from the outer edge (e.g., OD) of the wafer 202.

[0087] The carrier ring 550 is 5 54 through the second portion 556 of the carrier ring 550. The through holes 570 in the carrier ring 550 have a predetermined diameter and are disposed a predetermined radial distance from the first portion 552 of the carrier ring 550. The through holes 570 in the carrier ring 550 are closer to the distal end of the second portion 556 of the carrier ring 550 than to the first portion 552 of the carrier ring 550. The through holes 570 in the carrier ring 550 descend vertically (i.e., at a right angle) from the top surface 554 of the carrier ring 550 to the second portion 556 of the carrier ring 550.

[0088] The following description is common to the above carrier ring designs: All joints between various portions of the interior portion of the carrier ring (e.g., between the top surface and the first portion, between the first portion and the second portion, etc.) are rounded or curved, except where the joint between two portions is specifically described as being or forming a sharp corner.

[0089] The inner diameter (ID) of the carrier ring determines the gap between the wafer edge and the carrier ring ID. The smaller the gap, the greater the reduction in the concentration of deposited material on the front side of the wafer. However, changing (i.e., increasing or decreasing) the carrier ring ID beyond the optimal ID affects the concentration of deposited material on the front side of the wafer. For example, increasing the ID beyond the optimal ID increases deposition on the front side and bevel / edge of the wafer. Further decreasing the ID beyond the optimal ID may increase the concentration of deposited material on the front side of the wafer.

[0090] The profile angle (i.e., the acute angle of the portion) of the inner portion of the carrier ring shown in Figures 5A-6C can be 15 to 45 degrees, preferably 30 degrees. Changing the bottom profile of the inner portion of the carrier ring can have some effect on the concentration of deposition material at the backside and bevel edge of the wafer. A 30-degree angle will affect deposition across the entire backside of the wafer (i.e., affect the uniformity of film deposition).

[0091] The through-holes are radially positioned on the carrier ring. The through-holes are equidistant from one another. The total number of through-holes can be approximately 120. The radial location of the through-holes is such that they are closer to the ID of the carrier ring than the OD. Moving the through-holes toward the OD of the carrier ring only minimally increases the concentration of deposition material on the front and bevel / edge of the wafer and does not affect the deposition of material on the backside of the wafer.

[0092] The diameter of the through-holes can be around 1 mm. Smaller diameters can reduce the concentration of deposited material on the front and bevel / edge of the wafer, without affecting material deposition on the backside of the wafer. Increasing the through-hole size beyond the optimal diameter increases deposition on the front and bevel / edge. The diameter of the through-hole has a greater effect on the concentration of deposited material on the bevel / edge and backside of the wafer than the radial location of the through-hole.

[0093] The addition of through-holes allows for improved control in preventing deposition on the bevel / edge and front surface of the wafer without adversely affecting the uniformity of the film on the back surface of the wafer. The through-holes can be perpendicular or angled relative to the top surface of the carrier ring. The angle of the through-holes can be 30 degrees to 90 degrees (i.e., perpendicular) relative to the top surface of the carrier ring. A 45-degree angle is preferred to minimize purge gas flow loss and minimize deposition on the bevel / edge and front surface of the wafer. A 90-degree angle is easier to machine (i.e., fabricate).

[0094] The foregoing description is merely exemplary in nature and is not intended to limit the disclosure, its application, or uses in any way. The broad teachings of the present disclosure can be embodied in a variety of forms. Accordingly, while the present disclosure includes specific examples, the true scope of the disclosure should not be limited to such examples, as other modifications will become apparent upon review of the drawings, the specification, and the following claims. It should be understood that one or more steps in a method may be performed in a different order (or simultaneously) without altering the principles of the disclosure. Furthermore, although each embodiment is described above as having specific features, any one or more of these features described with respect to any embodiment of the present disclosure may be implemented in other embodiments and / or combined with any features of the other embodiments (even if such combination is not explicitly described). In other words, the described embodiments are not mutually exclusive, and substituting one or more embodiments for one another is within the scope of the present disclosure.

[0095] Spatial and functional relationships between elements (e.g., modules, circuit elements, semiconductor layers, etc.) are described using various terms such as "connected," "engaged," "coupled," "adjacent," "next to," "on," "above," "below," and "disposed." Also, when a relationship between a first element and a second element is described in the above disclosure, unless expressly described as "direct," the relationship may be a direct relationship where no other intervening elements exist between the first element and the second element, or an indirect relationship where one or more intervening elements (spatial or functional) exist between the first element and the second element. As used herein, the phrase "at least one of A, B, and C" should be interpreted in the sense of a logical (A or B or C) using a non-exclusive logical OR, and not in the sense of "at least one of A, at least one of B, and at least one of C."

[0096] In some embodiments, the controller is part of a system, and such a system may be part of the examples described above. Such systems may include semiconductor processing equipment, including one or more processing tools, one or more chambers, one or more processing platforms, and / or specific processing components (e.g., wafer pedestals, gas flow systems, etc.). These systems may be integrated with electronics for controlling system operation before, during, and after semiconductor wafer or substrate processing. Such electronics may be referred to as a "controller" and may control various components or subcomponents of one or more systems. The controller may be programmed to control any of the processes disclosed herein, depending on the processing requirements and / or type of system. Such processes may include process gas delivery, temperature settings (e.g., heating and / or cooling), pressure settings, vacuum settings, power settings, radio frequency (RF) generator settings, RF matching circuit settings, frequency settings, flow rate settings, fluid delivery settings, position and motion settings, wafer transfer to and from the tool, and wafer transfer to and from other transfer tools and / or load locks connected or interfaced with the particular system.

[0097] Broadly, a controller may be defined as an electronic device having various integrated circuits, logic, memory, and / or software that receive instructions, issue instructions, control operations, enable cleaning operations, enable endpoint measurements, etc. Integrated circuits may include chips in the form of firmware that store program instructions, digital signal processors (DSPs), chips defined as application-specific integrated circuits (ASICs), and / or one or more microprocessors, i.e., microcontrollers, that execute program instructions (e.g., software). Program instructions may be instructions communicated to the controller in the form of various individual settings (or program files) that define operational parameters for performing a particular process on or for a semiconductor wafer or for a system. The operational parameters, in some embodiments, may be part of a recipe defined by a process engineer to implement one or more processing steps in the fabrication of one or more layers, materials, metals, oxides, silicon, silicon dioxide, surfaces, circuits, and / or wafer dies.

[0098] The controller, in some embodiments, may be part of, coupled to, or a combination of a computer that is integrated with, coupled to, or otherwise networked to the system. For example, the controller may be in the "cloud" or all or part of a fab host computer system, allowing remote access of wafer processing. The computer may provide remote access to the system to monitor the current progress of a fabrication operation, review the history of past fabrication operations, review trends or performance criteria from multiple fabrication operations, modify parameters of a current process, set up processing steps following the current process, or initiate a new process.

[0099] In some examples, a remote computer (e.g., a server) can provide a process recipe to the system over a network. Such a network may include a local network or the Internet. The remote computer may include a user interface that allows entry or programming of parameters and / or settings, which are then communicated from the remote computer to the system. In some examples, the controller receives instructions in the form of data. Such data identifies parameters for each processing step to be performed during one or more operations. It should be understood that the parameters may be specific to the type of process being performed and the type of tool the controller is configured to interface with or control.

[0100] Thus, as discussed above, the controller may be distributed, for example, by having one or more individual controllers networked together and cooperating toward a common purpose (such as the processes and controls described herein). An example of a distributed controller for such a purpose would include one or more integrated circuits on the chamber that communicate with one or more integrated circuits located remotely (e.g., at the platform level or as part of a remote computer) and coupled to control the processes in the chamber.

[0101] Exemplary systems may include, but are not limited to, a plasma etch chamber or module, a deposition chamber or module, a spin rinse chamber or module, a metal plating chamber or module, a cleaning chamber or module, a bevel edge etch chamber or module, a physical vapor deposition (PVD) chamber or module, a chemical vapor deposition (CVD) chamber or module, an atomic layer deposition (ALD) chamber or module, an atomic layer etch (ALE) chamber or module, an ion implantation chamber or module, a tracking chamber or module, and any other semiconductor processing system that may be associated with or used in the fabrication and / or manufacturing of semiconductor wafers.

[0102] As described above, depending on the process step or steps being performed by the tool, the controller may communicate with one or more other tool circuits or modules, other tool components, cluster tools, other tool interfaces, adjacent tools, nearby tools, tools located throughout the factory, a main computer, another controller, or tools used in material transport to and from tool locations and / or load ports in a semiconductor fabrication factory. The present disclosure may be realized in the following forms. [Form 1] A ring-shaped structure surrounding a semiconductor substrate in a processing chamber, comprising: an inner portion of the ring-shaped structure having an inner diameter; an outer portion of the ring-shaped structure having an outer diameter; Equipped with The inner portion is a first portion descending from an upper surface of the ring-shaped structure; a second portion extending horizontally from a bottom end of the first portion toward the outer diameter of the ring-shaped structure; a third section that descends from the distal end of the second section at an acute angle relative to the second section toward the outer diameter; a fourth portion extending horizontally from a bottom end of the third portion toward the outer portion; and Including, Ring-shaped structure. [Form 2] The ring-shaped structure according to embodiment 1, the top surface of the ring-shaped structure is coplanar with the top surface of the semiconductor substrate; the first portion vertically descends from the top surface of the ring-shaped structure by a distance approximately equal to the thickness of the semiconductor substrate; Ring-shaped structure. [Form 3] The ring-shaped structure according to embodiment 1, The first portion is a ring-shaped structure spaced a predetermined distance from an outer edge of the semiconductor substrate. [Form 4] The ring-shaped structure according to embodiment 1, The ring-shaped structure further comprising a plurality of through holes extending from the top surface of the ring-shaped structure through the second portion of the ring-shaped structure. [Form 5] The ring-shaped structure according to embodiment 4, A ring-shaped structure, wherein the through-hole has a predetermined diameter and is positioned a predetermined radial distance from the first portion of the ring-shaped structure. [Form 6] The ring-shaped structure according to aspect 5, A ring-shaped structure, wherein the through-hole is closer to the distal end of the second portion than to the first portion of the ring-shaped structure. [Form 7] The ring-shaped structure according to aspect 5, A ring-shaped structure, wherein the through-hole descends vertically from the top surface of the ring-shaped structure to the second portion of the ring-shaped structure. [Form 8] The ring-shaped structure according to embodiment 1, The ring-shaped structure further comprises a plurality of tabs supporting the semiconductor substrate. [Form 9] A ring-shaped structure surrounding a semiconductor substrate in a processing chamber, comprising: an inner portion of the ring-shaped structure having an inner diameter; an outer portion of the ring-shaped structure having an outer diameter; Equipped with The inner portion is a first portion descending from an upper surface of the ring-shaped structure; a second portion extending horizontally from a bottom end of the first portion toward the semiconductor substrate; a third section that descends vertically from the distal end of the second section; and a fourth portion extending horizontally from a bottom end of the third portion toward the outer diameter; a fifth section that descends from the distal end of the fourth section toward the outer diameter at an acute angle relative to the second section; a sixth portion extending horizontally from a bottom end of the fifth portion toward the outer portion; and Including, Ring-shaped structure. [Form 10] The ring-shaped structure according to aspect 9, the top surface of the ring-shaped structure is coplanar with the top surface of the semiconductor substrate; the first portion vertically descends from the top surface of the ring-shaped structure by a distance approximately equal to the thickness of the semiconductor substrate; Ring-shaped structure. [Form 11] The ring-shaped structure according to aspect 9, The first portion is a ring-shaped structure spaced a predetermined distance from an outer edge of the semiconductor substrate. [Form 12] The ring-shaped structure according to aspect 9, A ring-shaped structure, wherein the distal end of the second portion extends below an outer edge of the semiconductor substrate. [Form 13] The ring-shaped structure according to aspect 9, A ring-like structure wherein a first end of the third portion forms a right angle with the distal end of the second portion. [Form 14] The ring-shaped structure according to aspect 9, The ring-shaped structure further comprising a plurality of through holes extending from the top surface of the ring-shaped structure through the fourth portion of the ring-shaped structure. [Form 15] The ring structure according to embodiment 14, A ring-shaped structure, wherein the through-hole has a predetermined diameter and is positioned a predetermined radial distance from the first portion of the ring-shaped structure. [Form 16] The ring structure according to aspect 14, A ring-shaped structure, wherein the through-hole descends into the fourth portion of the ring-shaped structure at an angle other than 90 degrees from the top surface of the ring-shaped structure. [Form 17] The ring structure according to embodiment 14, A ring-shaped structure, wherein the through-hole descends vertically from the top surface of the ring-shaped structure to the fourth portion of the ring-shaped structure. [Form 18] The ring structure according to aspect 14, A ring-shaped structure, wherein the through-hole descends from the top surface of the ring-shaped structure to the fourth portion of the ring-shaped structure at a 45 degree angle relative to the first portion descending vertically from the top surface of the ring-shaped structure. [Form 19] The ring-shaped structure according to aspect 9, The ring-shaped structure further comprises a plurality of tabs supporting the semiconductor substrate.

Claims

1. A ring-shaped structure surrounding a semiconductor substrate in a processing chamber, comprising: an inner portion of the ring-shaped structure having an inner diameter; an outer portion of the ring-shaped structure having an outer diameter; Equipped with The inner portion is a first portion descending from an upper surface of the ring-shaped structure; a second portion extending horizontally from a bottom end of the first portion toward the outer diameter of the ring-shaped structure; a third section that descends from the distal end of the second section at an acute angle relative to the second section toward the outer diameter; a fourth portion extending horizontally from a bottom end of the third portion toward the outer portion; and Including, the top surface of the ring-shaped structure is coplanar with the top surface of the semiconductor substrate; the first portion vertically descends from the top surface of the ring-shaped structure by a distance approximately equal to the thickness of the semiconductor substrate; Ring-shaped structure.

2. A ring-shaped structure surrounding a semiconductor substrate in a processing chamber, comprising: an inner portion of the ring-shaped structure having an inner diameter; an outer portion of the ring-shaped structure having an outer diameter; Equipped with The inner portion is a first portion descending from an upper surface of the ring-shaped structure; a second portion extending horizontally from a bottom end of the first portion toward the outer diameter of the ring-shaped structure; a third section that descends from the distal end of the second section at an acute angle relative to the second section toward the outer diameter; a fourth portion extending horizontally from a bottom end of the third portion toward the outer portion; and Including, the ring-shaped structure further comprising a plurality of through holes extending from the top surface of the ring-shaped structure through the second portion of the ring-shaped structure; Ring-shaped structure.

3. A ring-shaped structure surrounding a semiconductor substrate in a processing chamber, comprising: an inner portion of the ring-shaped structure having an inner diameter; an outer portion of the ring-shaped structure having an outer diameter; a plurality of tabs for supporting the semiconductor substrate; Equipped with The inner portion is a first portion descending from an upper surface of the ring-shaped structure; a second portion extending horizontally from a bottom end of the first portion toward the outer diameter of the ring-shaped structure; a third section that descends from the distal end of the second section at an acute angle relative to the second section toward the outer diameter; a fourth portion extending horizontally from a bottom end of the third portion toward the outer portion; and Including, Ring-shaped structure.

4. 4. The ring-shaped structure according to claim 2 or claim 3, the top surface of the ring-shaped structure is coplanar with the top surface of the semiconductor substrate; the first portion vertically descends from the top surface of the ring-shaped structure by a distance approximately equal to the thickness of the semiconductor substrate; Ring-shaped structure.

5. 4. The ring-shaped structure according to claim 1, wherein: A ring-shaped structure, wherein the first portion is spaced a predetermined distance from an outer edge of the semiconductor substrate.

6. The ring-shaped structure according to claim 1 or claim 3, The ring-shaped structure further comprising a plurality of through holes extending from the top surface of the ring-shaped structure through the second portion of the ring-shaped structure.

7. 7. The ring-shaped structure of claim 6, A ring-shaped structure, wherein the through-hole has a predetermined diameter and is positioned a predetermined radial distance from the first portion of the ring-shaped structure.

8. 8. The ring-shaped structure of claim 7, A ring-shaped structure, wherein the through-hole is closer to the distal end of the second portion than to the first portion of the ring-shaped structure.

9. 8. The ring-shaped structure of claim 7, A ring-shaped structure, wherein the through-hole descends vertically from the top surface of the ring-shaped structure to the second portion of the ring-shaped structure.

10. 3. The ring-shaped structure according to claim 1 or claim 2, The ring-shaped structure further comprises a plurality of tabs supporting the semiconductor substrate.

11. A ring-shaped structure surrounding a semiconductor substrate in a processing chamber, comprising: an inner portion of the ring-shaped structure having an inner diameter; an outer portion of the ring-shaped structure having an outer diameter; Equipped with The inner portion is a first portion descending from an upper surface of the ring-shaped structure; a second portion extending horizontally from a bottom end of the first portion toward the semiconductor substrate; a third portion that descends vertically from the distal end of the second portion; and a fourth portion extending horizontally from a bottom end of the third portion toward the outer diameter; a fifth section that descends from the distal end of the fourth section toward the outer diameter at an acute angle relative to the second section; a sixth portion extending horizontally from a bottom end of the fifth portion toward the outer portion; Including, the ring-shaped structure further comprising a plurality of through holes extending from the top surface of the ring-shaped structure through the fourth portion of the ring-shaped structure. Ring-shaped structure.

12. The ring-shaped structure of claim 11, the top surface of the ring-shaped structure is coplanar with the top surface of the semiconductor substrate; the first portion vertically descends from the top surface of the ring-shaped structure by a distance approximately equal to the thickness of the semiconductor substrate; Ring-shaped structure.

13. A ring-shaped structure surrounding a semiconductor substrate in a processing chamber, comprising: an inner portion of the ring-shaped structure having an inner diameter; an outer portion of the ring-shaped structure having an outer diameter; a plurality of tabs for supporting the semiconductor substrate; Equipped with The inner portion is a first portion descending from an upper surface of the ring-shaped structure; a second portion extending horizontally from a bottom end of the first portion toward the semiconductor substrate; a third portion that descends vertically from the distal end of the second portion; and a fourth portion extending horizontally from a bottom end of the third portion toward the outer diameter; a fifth section that descends from the distal end of the fourth section toward the outer diameter at an acute angle relative to the second section; a sixth portion extending horizontally from a bottom end of the fifth portion toward the outer portion; Including, Ring-shaped structure.

14. 14. The ring-shaped structure of claim 13, the top surface of the ring-shaped structure is coplanar with the top surface of the semiconductor substrate; the first portion vertically descends from the top surface of the ring-shaped structure by a distance approximately equal to the thickness of the semiconductor substrate; Ring-shaped structure.

15. 14. The ring-shaped structure according to claim 11, claim 12 or claim 13, A ring-shaped structure, wherein the first portion is spaced a predetermined distance from an outer edge of the semiconductor substrate.

16. 14. The ring-shaped structure according to claim 11, claim 12 or claim 13, A ring-shaped structure, wherein the distal end of the second portion extends below an outer edge of the semiconductor substrate.

17. 14. The ring-shaped structure according to claim 11, claim 12 or claim 13, A ring-like structure wherein a first end of the third portion forms a right angle with the distal end of the second portion.

18. 15. The ring-shaped structure of claim 14, The ring-shaped structure further comprising a plurality of through holes extending from the top surface of the ring-shaped structure through the fourth portion of the ring-shaped structure.

19. 19. The ring-shaped structure of claim 11, claim 12 or claim 18, A ring-shaped structure, wherein the through-hole has a predetermined diameter and is positioned a predetermined radial distance from the first portion of the ring-shaped structure.

20. 19. The ring structure of claim 11, claim 12 or claim 18, wherein the through-hole descends into the fourth portion of the ring structure at an angle other than 90 degrees from the top surface of the ring structure.

21. 19. The ring-shaped structure of claim 11, claim 12 or claim 18, A ring-shaped structure, wherein the through-hole descends vertically from the top surface of the ring-shaped structure to the fourth portion of the ring-shaped structure.

22. 19. The ring-shaped structure of claim 11, claim 12 or claim 18, A ring-shaped structure, wherein the through-hole descends from the top surface of the ring-shaped structure to the fourth portion of the ring-shaped structure at a 45 degree angle relative to the first portion descending vertically from the top surface of the ring-shaped structure.

23. 13. The ring-shaped structure according to claim 11 or claim 12, The ring-shaped structure further comprises a plurality of tabs supporting the semiconductor substrate.

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