Analysis system and particle analysis method

Abstract

The present invention provides an analysis system and a particle analysis method with which it is possible to measure the heights of particles with high accuracy. Accordingly, this analysis system has: an SEM device 10 that captures an image of particles included in a specimen as an SEM image and observes the two-dimensional shapes of the particles included in the SEM image; a CSI device 20 that captures an image of the particles included in the specimen as a CSI image and measures the heights of the particles included in the CSI image; and a controller that controls the SEM device and the CSI device. The controller uses the SEM device 10 to capture the SEM images, classifies the particles included in the SEM images into predetermined sizes on the basis of the image capturing magnification of the CSI device 20, and uses the CSI device 20 to capture the CSI image of particles included in a particle group for each classified particle group.

Description

[Technical Field]

[0001] The present invention relates to an analysis system and a particle analysis method, and relates to, for example, a combined analysis technique for microparticles using a scanning white light interference microscope, i.e., CSI (Coherence Scanning Interferometry), and an electron microscope, i.e., SEM (Scanning Electron Microscope), and a position coordinate linkage technique between the CSI and SEM. [Background technology]

[0002] During the manufacturing process of lithium-ion batteries and fuel cells, the inclusion of foreign particles such as metals reduces the reliability of the battery. For example, the sharp edges of the contaminated particles can pierce the separator and cause an internal short circuit. To ensure the quality of batteries, not only two-dimensional shape observation and elemental analysis of the foreign particles are required, but also three-dimensional combined analysis including height measurement.

[0003] In the composite analysis of particles, a method using a compound microscope device that combines a confocal microscope and an SEM, as disclosed in Patent Document 1, is known. When using the technology in Patent Document 1, the confocal microscope and the SEM share a common coordinate system, allowing the fields of view of each to be accurately aligned. Therefore, by combining the two-dimensional color information and sample surface height information acquired by the confocal microscope with the high-resolution two-dimensional shape information acquired by the SEM, three-dimensional composite analysis of particles becomes possible.

[0004] Another known method is to equip an SEM with a four-segment backscattered electron detector. Using this method, particle height can be measured by calculating four SEM images and converting them into three dimensions. Because the four SEM images are detected at the same time, there is no need to tilt the specimen or align the field of view, and three-dimensional information, including particle height, can be easily obtained. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2010-80144 Summary of the Invention [Problem to be solved by the invention]

[0006] The combined particle analysis described in Patent Document 1 above is advantageous in that the confocal microscope and SEM share a common coordinate system, allowing for accurate alignment of their respective fields of view. However, the resolution of a confocal microscope in the height direction is typically around 10 nm. This can result in insufficient height measurement accuracy. Furthermore, when measuring a sample such as a microparticle with abruptly changing unevenness, scattering of reflected light can occur, further reducing the height measurement accuracy.

[0007] For these reasons, the technology of Patent Document 1 may have difficulty in measuring particle heights with high accuracy. Furthermore, when measuring heights using the aforementioned four-segment backscattered electron detector, limitations on the detector's capture angle may make it difficult to capture backscattered electrons generated from the inclined portion in samples such as particles with steep inclinations. For this reason, even when a four-segment backscattered electron detector is used, it may have difficulty in measuring particle heights with high accuracy.

[0008] The present invention has been made in view of the above, and one of its objects is to provide an analysis system and a particle analysis method that are capable of measuring particle heights with high accuracy.

[0009] The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings. [Means for solving the problem]

[0010] A brief summary of a representative embodiment of the invention disclosed in this application will be given below.

[0011] An analysis system according to a representative embodiment includes an SEM device that captures SEM images of particles contained in a sample and observes the two-dimensional shape of each particle contained in the SEM images, a CSI device that captures CSI images of particles contained in the sample and measures the height of each particle contained in the CSI images, and a controller that controls the SEM and CSI devices. The controller captures SEM images using the SEM device, classifies each particle contained in the SEM images by size determined based on the imaging magnification of the CSI device, and, for each classified particle group, captures CSI images of each particle contained in the particle group using the CSI device. [Effects of the Invention]

[0012] To briefly explain the effect obtained by a representative embodiment of the invention disclosed in this application, it becomes possible to measure particle heights with high accuracy. [Brief explanation of the drawings]

[0013] [Figure 1] 1 is a schematic diagram illustrating a configuration example of an analysis system according to a first embodiment. [Figure 2] FIG. 2 is a schematic diagram showing an example of the configuration of the SEM apparatus in FIG. [Figure 3] FIG. 2 is a schematic diagram illustrating an example configuration of the CSI device in FIG. 1. [Figure 4A] 2 is a flowchart showing an example of an analysis method using the analysis system in FIG. 1. [Figure 4B] 4B is a flowchart continuing from FIG. 4A. [Figure 5] FIG. 3 is a plan view showing an example of the structure of the sample stage on which the sample is placed in FIG. 2. [Figure 6] FIG. 4B is a schematic diagram showing an example of the configuration of a group setting table used for classifying particles into groups in FIG. 4A. [Figure 7] FIG. 4A is a diagram showing an example of information about each particle obtained from an SEM device and the results of classification into particle groups. [Figure 8]FIG. 4B is a diagram showing an example of how a CSI image is captured using a CSI device. [Figure 9] FIG. 2 is a schematic diagram showing an example of the configuration of an analysis system that is a modified example of the system shown in FIG. [Figure 10] FIG. 10 is a flowchart showing an example of a method for verifying the identity of particles in a CSI image and an SEM image in the analysis system according to the second embodiment. [Figure 11A] FIG. 11 is a schematic diagram illustrating an example of specific processing content in step S302 in FIG. [Figure 11B] FIG. 11 is a schematic diagram illustrating an example of specific processing content in steps S303 and S304 in FIG. [Figure 11C] FIG. 11 is a schematic diagram illustrating another example of the specific processing content in steps S303 and S304 in FIG. [Figure 12] FIG. 11 is a flow diagram showing an example of a method for verifying the identity of particles in a CSI image and an SEM image in the analysis system according to the third embodiment. [Figure 13A] FIG. 13 is a schematic diagram illustrating an example of specific processing content in steps S402 and S403 in FIG. 12. [Figure 13B] FIG. 13 is a schematic diagram illustrating an example of specific processing content in steps S404 and S405 in FIG. 12. DETAILED DESCRIPTION OF THE INVENTION

[0014] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In all drawings for explaining the embodiments, the same components are generally designated by the same reference numerals, and repeated description thereof will be omitted.

[0015] (Embodiment 1) <Analysis system configuration> FIG. 1 is a schematic diagram showing an example configuration of an analysis system according to a first embodiment. The analysis system shown in FIG. 1 includes an electron microscope (SEM device) 10, a scanning white light interferometer (CSI device) 20, and a communication network 30 connecting these devices. The communication network 30 establishes a wired or wireless communication path between the SEM device 10 and the CSI device 20. The communication network 30 is mainly used for transferring data between the devices. Therefore, the analysis system may also use a method for transferring data via, for example, a removable external storage medium instead of the communication network 30.

[0016] 2 is a schematic diagram showing an example configuration of the SEM apparatus 10 in FIG. 1. The SEM apparatus 10 has an apparatus main body 104 and a controller 100. The apparatus main body 104 is configured by integrating an electron tube 102 and a sample chamber 103. The apparatus main body 104 functions as an imaging unit that captures an SEM image of a measurement target, such as a sample 105, such as a filter that collects particles. The controller 100 has a data calculation unit 121, an optical system control unit 122, a stage control unit 123, and a display device 124, and controls the entire SEM apparatus 10.

[0017] The electron column 102 has an electron gun 107 and an electron optical system 108. The electron gun 107 emits an electron beam 106. The electron optical system 108 controls the trajectory of the electron beam 106. The electron optical system 108 has a condenser lens 109, a deflector 110, and an objective lens 111. The condenser lens 109 focuses the electron beam 106 emitted from the electron gun 107. The deflector 110 scans the electron beam 106. The objective lens 111 focuses the electron beam 106 so that it is focused on the surface of the sample 105.

[0018] When the electron beam 106 is irradiated onto the sample 105, a signal 113 such as secondary electrons, backscattered electrons, characteristic X-rays, etc. is generated from the sample 105. The signal detector 114 is disposed at an appropriate position inside the electron column 102 or the sample chamber 103, and detects the signal 113. More specifically, the signal detector 114 includes an electron detector that detects the secondary electrons and backscattered electrons, and an X-ray detector that detects the characteristic X-rays, such as an EDX (Energy Dispersive X-ray spectrometry) detector.

[0019] The sample chamber 103 has a structure in which a sample stage 112 is housed via an openable / closeable inlet / outlet port (not shown). The sample 105 is placed on the sample stage 112. The sample chamber 103 further includes a sample stage 115 on which the sample stage 112 is placed. The sample stage 115 includes a stage control device 116. The stage control device 116 moves and rotates the sample 105 within the sample chamber 103, for example, in a horizontal plane and in a direction perpendicular to the plane, thereby changing the position and orientation of the sample 105 within the sample chamber 103.

[0020] The stage control unit 123 controls the stage control device 116, and the optical system control unit 122 controls the electro-optical system 108. The stage control unit 123 and the optical system control unit 122 are realized by hardware circuits such as an ASIC (Application Specific Integrated Circuit) or an FPGA (Field Programmable Gate Array). The SEM apparatus 10 irradiates an electron beam 106 at a desired position on the sample 105 by moving the sample stage 115 and controlling the deflector 110. The SEM apparatus 10 then detects a signal 113 from the sample 105 using a signal detector 114, thereby enabling the sample 105 to be observed at a desired position and magnification.

[0021] The data calculation unit 121 is configured by, for example, an information processing device such as a computer. The data calculation unit 121 has an image acquisition unit 117, an instruction input unit 118, a data storage unit 119, and a signal processing unit 120. The data storage unit 119 is configured by, for example, a combination of a volatile memory and a non-volatile memory. The image acquisition unit 117, the instruction input unit 118, and the signal processing unit 120 are realized, for example, by a processor executing a program stored in the data storage unit 119 or the like.

[0022] The instruction input unit 118 accepts various instructions from a user via a keyboard, a mouse, or the communication network 30. The image acquisition unit 117 converts the signal 113 detected by the signal detector 114, such as secondary electrons and backscattered electrons, into SEM image data. The signal processing unit 120, for example, identifies the position of each particle included in the SEM image and observes the two-dimensional shape of each particle based on the SEM image data converted by the image acquisition unit 117. The signal processing unit 120 also performs elemental analysis of each particle based on the detection results of the signal detector 114, specifically the X-ray detector.

[0023] Furthermore, the data calculation unit 121 performs various calculations required for controlling the apparatus main body 104 based on the instruction information input to the instruction input unit 118, the information stored in the data storage unit 119, etc. The stage control unit 123 and the optical system control unit 122 control the stage control device 116 and the electro-optical system 108, respectively, based on the calculation results by the data calculation unit 121. The display device 124 is a screen display device such as a display device, and displays the SEM image of the sample 105 acquired by the image acquisition unit 117, etc.

[0024] FIG. 3 is a schematic diagram showing an example configuration of the CSI device 20 in FIG. 1. The CSI device 20 shown in FIG. 3 includes a device main body 201, a sample stage 208 on which a sample 210 to be measured is placed, and a controller 212. The controller 212 controls the entire CSI device 20, and, as part of its functions, processes the obtained CSI image data. The sample 210 is, for example, a filter that collects particles. The device main body 201 includes a white light source 202, a filter 203, a beam splitter 204, a revolver-type two-beam interference objective lens unit 205 with variable magnification, a camera 206, and a piezoelectric actuator 207 or electric motor 211 that moves the two-beam interference objective lens unit 205 in the Z-axis direction.

[0025] The controller 212 has an image acquisition unit 213, an instruction input unit 214, a data storage unit 215, a data calculation unit 216, and a stage control unit 217. The image acquisition unit 213, the instruction input unit 214, the data storage unit 215, and the data calculation unit 216 are configured, for example, by an information processing device such as a computer. The data storage unit 215 is configured, for example, by a combination of a volatile memory and a non-volatile memory. The image acquisition unit 213, the instruction input unit 214, and the data calculation unit 216 are realized, for example, by a processor executing a program stored in the data storage unit 215 or the like. The stage control unit 217 is realized, for example, by a hardware circuit such as an ASIC or FPGA.

[0026] The instruction input unit 214 accepts various instructions from a user via a keyboard, a mouse, or the communication network 30. The image acquisition unit 213 acquires CSI image data captured by the camera 206. The data calculation unit 216 calculates the three-dimensional shape of the sample 210 using the information input to the instruction input unit 214 and the CSI image data acquired by the image acquisition unit 213, and stores the calculation results in the data storage unit 215. The stage control unit 217 controls the position of the sample stage 208. The display device 209 is, for example, a screen display device, and displays, for example, a CSI image of the sample 210 obtained by the data calculation unit 216, such as the three-dimensional shape, on the screen.

[0027] As shown by arrow A, light (white light) emitted from a white light source 202 passes through a filter (e.g., a wavelength filter, a polarizing filter, etc.) 203, and is then guided by a beam splitter 204 to a two-beam interference objective lens unit 205 (arrow B). An internal beam splitter (not shown) within the two-beam interference objective lens unit 205 splits the light into two beams: a first beam directed toward the measurement object, including the sample 210 itself and the substances therein, and a second beam directed toward a reference mirror (not shown).

[0028] When the optical distance from the internal beam splitter in the two-beam interference objective lens unit 205, which is arranged opposite the measurement object, to the measurement object becomes equal to the optical distance from the internal beam splitter to the reference mirror, the measurement signal can be observed in the form of an interference signal of two beams. The camera 206 captures this interference signal, i.e., interference fringes (interference pattern), as a CSI image, and the image acquisition unit 213 acquires the CSI image data. Furthermore, the data calculation unit 216 converts the CSI image data including the interference signal into three-dimensional shape information and stores it in the data storage unit 215.

[0029] 3, the distance between the internal beam splitter and the measurement object is changed by sweeping the height position of the two-beam interference objective lens unit 205 using a piezo actuator 207 (movement of arrow C) while keeping the distance from the internal beam splitter to a reference mirror (not shown). If the height position of the two-beam interference objective lens unit 205 needs to be changed over a long distance depending on the shape of the measurement object, the electric motor 211 can also be used to change the distance from the measurement object (movement of arrow D). Because the CSI device 20 uses a white light source with a short coherence length (coherence length: 1 μm or less), the height position at which the interference signal is obtained corresponds to the Z position (depth position) at which the measurement object exists.

[0030] <Analysis system operation> Fig. 4A is a flowchart showing an example of an analysis method using the analysis system in Fig. 1. Fig. 4B is a flowchart following Fig. 4A. In Fig. 4A, first, a user or a transfer device places a sample 105, such as a filter that collects particles, on the sample stage 112 of the SEM device 10, and then places the sample stage 112 on the sample stage 115 (step S101).

[0031] Next, the controller 100 uses the SEM device 10 to capture an image of, for example, the sample stage 112 on which the sample 105 is placed. Then, the controller 100, more specifically the data calculation unit 121, calculates the coordinates of two or more alignment marks provided on the sample stage 112 as coordinates of a reference position, and registers the coordinates of the reference position as reference coordinates in the data storage unit 119 (step S102). Note that the reference coordinates are not limited to the coordinates of the alignment marks, and may be, for example, the coordinates of a feature point or the like defined on the sample 105.

[0032] Next, in step S103, the controller 100 uses the SEM device 10 to capture an SEM image of each particle contained in the sample 105. Specifically, the SEM device 10 irradiates the sample 105 with an electron beam 106 and captures an image of the sample 105 in a predetermined field of view to be observed. Here, the controller 100, specifically the data calculation unit 121, regards, for example, an area in the SEM image where the contrast is different from the surrounding area by a predetermined threshold or more as a particle, and observes the two-dimensional shape of each particle and performs elemental analysis of each particle. By observing the shape of each particle, the size of each particle, specifically the length, width, area, perimeter, etc., is measured. Note that the processing of step S103 may be performed before the processing of step S102.

[0033] Next, in step S104, the controller 100, specifically the data calculation unit 121, classifies each particle into a particle group by size based on the results of the particle shape observation in step S103. For example, the data calculation unit 121 classifies each particle classified into a first size range into a first particle group and each particle classified into a second size range into a second particle group. Here, the size range used as the basis for classification is determined based on the imaging magnification of the CSI device 20. Furthermore, the data calculation unit 121 may classify each particle by element in addition to size based on the results of the elemental analysis of the particles in step S103. That is, for example, the data calculation unit 121 may classify each particle included in the first particle group into further particle groups based on the element.

[0034] Next, the controller 100, specifically the data calculation unit 121, selects a particle group to be measured by the CSI device 20 from the particle groups classified in step S104 based on user settings, etc. (step S105). Then, the data calculation unit 121 stores the coordinates, two-dimensional shape information, element information, etc. of each particle included in the selected particle group in the data storage unit 119 as data for the CSI device 20 (step S106). The coordinates of each particle are relative coordinates of each particle, for example, with a reference position, here the alignment mark, as the reference coordinates.

[0035] 4B, the user or the carrier device removes the sample stage 112 carrying the sample 105 from the SEM device 10 and places it on the sample stage 208 of the CSI device 20 (step S201). As a result, the sample stage 112 is placed at the location of the sample 210 shown in FIG. 3. Next, the controller 212, more specifically, the data calculation unit 216, reads the data for the CSI device 20 stored in step S106 in FIG. 4A into the data storage unit 215 (step S202). That is, the relative coordinates with respect to the reference coordinates, two-dimensional shape information, element information, etc., of each particle included in the particle group selected as the measurement target are read.

[0036] Next, the controller 212 sets, for the two-beam interference objective lens unit 205, an objective lens with an optimal imaging magnification according to the size of the particle to be measured (step S203). For example, when each particle included in the first particle group described above is to be measured, an objective lens uniquely determined for the first particle group is set. Next, the controller 212 aligns the SEM coordinate axis and the CSI coordinate axis based on the coordinates of the alignment mark (step S204). Specifically, the controller 212 detects the alignment mark from the image acquired by the camera 206 and, like the SEM apparatus 10, registers the coordinates of the alignment mark as reference coordinates.

[0037] Next, in step S205, the controller 212 identifies the position of the particle to be measured based on the coordinates of each particle read in step S202, i.e., the relative coordinates with the reference coordinates, and moves the sample stage 208 so that the particle is located at the center of the image. In this state, the controller 212 captures a CSI image using the camera 206 and performs height measurement of the particle located at the center of the CSI image, i.e., three-dimensional shape measurement. Furthermore, for example, if the selected first particle group includes multiple particles, the controller 212 sequentially moves each particle to the center of the CSI image and performs three-dimensional shape measurement of each particle.

[0038] Next, controller 212 determines whether or not there are other particle groups to be measured (step S206). If there are other particle groups to be measured (step S206: Yes), controller 212 returns to step S203 and repeats the processes of steps S203 to S205 until there are no more particle groups to be measured. For example, if a second particle group is to be measured following the first particle group described above, an objective lens that is uniquely defined for the second particle group is set in step S203.

[0039] On the other hand, if there are no other particle groups to be measured (step S206: No), the controller 212, more specifically the data calculation unit 216, integrates the two-dimensional shape information, element information, and three-dimensional shape information of each particle and creates an analysis result report (step S207). The controller 212 then stores the created analysis result report in the data storage unit 215 and displays it on the display device 209 or the like. The two-dimensional shape information and element information of each particle are acquired from the SEM device 10 in step S202, and the two-dimensional shape information includes length, width, area, perimeter, etc. The three-dimensional shape information of each particle is acquired by the CSI device 20 in step S205, and the three-dimensional shape information includes height, volume, etc.

[0040] As described above, when particle groups are determined based on the imaging magnification of the CSI device 20, in FIG. 4B , the controller 212 first uses the CSI device 20 to image each particle included in a first particle group classified according to a first size range at a first imaging magnification and measure the height of each imaged particle. Then, the controller 212 images each particle included in a second particle group classified according to a second size range at a second imaging magnification and measures the height of each imaged particle. This procedure enables efficient analysis and highly accurate height measurement.

[0041] As a comparative example, assume that a first particle group includes particles [1] and [2], a second particle group includes particles [3] and [4], and height measurements are performed in the order of particle [1], particle [3], particle [4], and particle [2]. In this case, it may be necessary to switch the objective lens in the two-beam interference objective lens unit 205 when measuring particle [3] and when measuring particle [2].

[0042] When the objective lens is switched, the alignment must be redone in step S204, i.e., the coordinates of the alignment mark must be re-registered. As a result, the analysis efficiency may decrease. Furthermore, when the alignment is redone, even if the same objective lens is used, for example, when measuring particle [1] and particle [2], positional misalignment during alignment may cause variations in particle detection accuracy. Furthermore, if the objective lens is not switched, i.e., if height measurement is performed at an inappropriate magnification, the accuracy of the height measurement, for example, resolution, may decrease.

[0043] On the other hand, when measurements are performed for each particle group according to size, as shown in FIG. 4B, while particles belonging to the same particle group are being measured sequentially, the height of each particle can be measured using the optimal magnification without performing the process of step S204, i.e., alignment. As a result, analysis efficiency can be improved and the accuracy of height measurement can be increased. Furthermore, for example, particles that are too small to achieve sufficient measurement accuracy with the CSI device 20 or particles that are too large to fit within the field of view of the CSI device 20 can be excluded in advance from the measurement targets of the CSI device 20 on a particle group basis. This also makes it possible to improve analysis efficiency.

[0044] FIG. 5 is a plan view showing an example of the structure of the sample stage 112 on which the sample 105 is placed in FIG. 2. One or more samples 105 can be placed on the sample stage 112, and each sample 105 has a large number of particles attached thereto. In this example, multiple alignment marks 301 (three in this example) are provided around each sample 105 on the sample stage 112. In FIG. 5, three alignment marks 301 are provided for each individual sample 105, but there may be cases where only three are provided on the sample stage 112. The controller 100 can select any alignment mark in step S102 in FIG. 4A. Narrowing the distance between the alignment marks can also improve the alignment accuracy of the sample 105 placed inside the selected alignment marks.

[0045] Fig. 6 is a schematic diagram showing an example of the configuration of a group setting table used for classifying particles into groups in Fig. 4A. The group setting table 305 shown in Fig. 6 is stored in, for example, the data storage unit 119. In step S104 in Fig. 4A, the data calculation unit 121 classifies particles into groups based on the group setting table 305. The user can arbitrarily set the setting contents of the group setting table 305 via the instruction input unit 118.

[0046] In the example shown in Fig. 6, if the area of ​​a particle is in the range of 1200 to 2000, the particle is classified into particle group A. If the area of ​​a particle is in the range of G1min to G1max and the mass of copper (Cu) obtained from elemental analysis is in the range of G2min to G2max, the particle is classified into particle group G. Note that in this example, the size used as the basis for classification is area, but this is not limited to this and may be any of length, width, aspect ratio (= length / width), and perimeter, or a combination of two or more of area, length, width, aspect ratio, and perimeter, for example, an AND condition.

[0047] Furthermore, it is not necessary to explicitly classify all particles into particle groups. That is, particles that do not meet the conditions set in the group setting table 305 may be essentially treated as a mishit particle group. For example, particles with sizes that are difficult to measure with the CSI device 20 can be classified into a mishit particle group.

[0048] FIG. 7 shows an example of particle information obtained from the SEM apparatus in FIG. 4A and the results of particle group classification. Each particle is identified by an automatically assigned number #1, #2, ..., #7, .... Each particle is associated with its location coordinates, i.e., X and Y coordinates; two-dimensional shape information such as area, perimeter, length, width, and aspect ratio; and element information such as Cu mass. The SEM apparatus 10 generates the information shown in FIG. 7 as a result of processing step S103 in FIG. 4A. In the example shown in FIG. 7, the particles are classified into three particle groups A, B, and C according to their area by the processing of step S104 in FIG. 4A.

[0049] 8 is a diagram showing an example of how a CSI image is captured using the CSI device in FIG. 4B. FIG. 8 shows an example of the content displayed on the display device 209 during CSI image capture. For example, in step S205 in FIG. 4B, as shown in FIG. 8, the sample stage 208 is moved so that the particle 315 to be measured is positioned at the center of the CSI image 313, and then the CSI image 313 and the height of the particle 315 are measured. The amount of movement of the sample stage 208 is determined based on the coordinates of each particle acquired in step S202.

[0050] 8, if particle 315 and particle 316 belong to the same particle group, the sample stage 208 is moved so that particle 316 is positioned at the center of the CSI image 313, and then the height of particle 316 is measured. Note that in the example shown in FIG. 8, manual operation based on a user command is also possible. For example, a user can select particle 315 numbered #1 in particle group A and press the CSI movement button 320 to move particle 315 to the center of the CSI image 313. In this state, the user can also perform height measurement of particle 315 by pressing the CSI measurement button 321. Furthermore, for a certain particle 315, the SEM image 312 and the CSI image 313 can be displayed on the display device 209, allowing the user to compare the two images.

[0051] <Modifications of the analysis system> Fig. 9 is a schematic diagram showing an example configuration of an analysis system that is a variation of Fig. 1. The analysis system shown in Fig. 9 includes an external controller 40 in addition to the SEM apparatus 10 and CSI apparatus 20 shown in Fig. 1. The external controller 40 is also connected to the communication network 30. The external controller 40 is configured by an information processing device such as a computer that includes, for example, a processor, memory, a user interface, a communication interface, etc.

[0052] The external controller 40, for example, associates the SEM device 10 with the CSI device 20, in other words, executes various processes associated with combined analysis. Specifically, the external controller 40 executes, for example, the processes of steps S104 to S106 in Fig. 4A and the processes of steps S202 and S207 in Fig. 4B based on a program stored in memory via communication with the SEM device 10 and communication with the CSI device 20.

[0053] Such a program may be stored in a non-transitory, tangible, computer-readable recording medium and then supplied to a computer. Examples of such a recording medium include magnetic recording media such as hard disk drives, optical recording media such as DVDs (Digital Versatile Discs) and Blu-ray Discs, and semiconductor memories such as flash memories.

[0054] <Major Effects of the First Embodiment> As described above, by using the method of the first embodiment, it is possible to perform a combined analysis of the same particle by combining the SEM device 10 and the CSI device 20, i.e., a three-dimensional analysis, and to measure the particle height with high accuracy. Specifically, by using the CSI device 20, it is possible to measure the height with a high resolution of 0.1 nm or the like. Furthermore, by classifying each particle imaged by the SEM device 10 by size determined based on the imaging magnification of the CSI device 20, it is possible to improve the efficiency of the analysis and increase the accuracy of the height measurement.

[0055] (Embodiment 2) <Analysis system operation> 10 is a flow diagram showing an example of a method for verifying particle identity between a CSI image and an SEM image in the analysis system according to the second embodiment. First, as a premise problem, in practice, misalignment may occur between the SEM device 10 and the CSI device 20 due to factors such as the precision with which the sample stages 115 and 208 are moved. Furthermore, the imaging magnifications of the SEM device 10 and the CSI device 20 may differ, with the SEM device 10 typically having a high magnification and the CSI device 20 having a low magnification.

[0056] For this reason, particle misrecognition may occur, particularly when imaging a sample 105 in which particles are densely packed, using the CSI device 20. As a specific example, in Figure 8, the CSI device 20 may erroneously capture CSI image 313 centered on particle 316, which is located near particle 315, when it should capture CSI image 313 centered on particle 315. In other words, particle 315 in SEM image 312 may be misrecognized as corresponding to particle 316 in CSI image 313.

[0057] In such a case, the CSI device 20 verifies the identity of each particle included in the CSI image and each particle included in the SEM image by additionally executing the flow shown in Fig. 10 in step S205 in Fig. 4B. In Fig. 10, the controller 212, more specifically, the data calculation unit 216, first reads from the data storage unit 215 the CSI image captured in step S205 in Fig. 4B with a certain particle as the measurement target (step S301).

[0058] Next, the data calculation unit 216 classifies the particle as a true particle or a false particle by comparing the height measured in step S205 with a preset height threshold (step S302). That is, in the SEM device 10, whether or not a particle is a particle is determined based on two-dimensional shape information, so a particle with a low height that is essentially a non-particle may be considered a particle. Therefore, by performing the processing of step S302, particles higher than the threshold can be distinguished as true particles, and particles lower than the threshold can be distinguished as false particles. The user can set the height threshold in advance via the instruction input unit 214.

[0059] Next, the data calculation unit 216 uses one of multiple preset search ranges to analyze the two-dimensional shape of the particle included in the search range in the CSI image read in step S301 (step S303). For example, a first search range is set to an area slightly larger than the target particle. In addition, multiple search ranges such as a second and third search ranges are set in consideration of the case where the target particle is not present within the first search range.

[0060] For example, the second search range may be one size larger than the first search range, or may be a range shifted a certain distance from the first search range. The third search range is a range different from the first search range and the second search range. The user can specify how to define the second search range, the third search range, etc. as appropriate.

[0061] Using these multiple search ranges, the data calculation unit 216 first analyzes the two-dimensional shape of the true particle included in the first search range using the first search range (step S303). Then, the data calculation unit 216 determines whether the two-dimensional shape of the true particle obtained by the analysis substantially matches the two-dimensional shape information from the SEM device 10 associated with the particle (step S304). Specifically, the data calculation unit 216 determines whether the difference between the two-dimensional shape of the true particle obtained by the analysis and the two-dimensional shape based on the two-dimensional shape information from the SEM device 10 is within a predetermined error range.

[0062] If the two-dimensional shapes match (step S304: Yes), the data calculation unit 216 associates the target particle with the height information measured in step S205 (step S305). On the other hand, if the two-dimensional shapes do not match (step S304: No), the data calculation unit 216 returns to step S303 via step S306, changes the search range from the first search range to the second search range, and performs the same processing. Here, if a particle with a matching two-dimensional shape is detected in the second search range, for example, the data calculation unit 216 may extract the height information of the particle from the CSI image and associate the particle with the matching two-dimensional shape and its height information.

[0063] In step S306, the data calculation unit 216 determines whether the number of searches has reached a preset number (N), and if not (step S306: No), the process returns to step S303. As a result, if the two-dimensional shapes do not match in step S304, the data calculation unit 216 searches for a true particle with a matching two-dimensional shape by sequentially changing the search range from first to second, third, ... until the number of searches reaches the preset number (N).

[0064] On the other hand, if the number of searches reaches a preset number (N) (step S306: Yes), the data calculation unit 216 displays an error message (step S307) and prompts the user to decide whether to continue the analysis by resetting the height threshold value, for example (step S308). If reanalysis is to be performed (step S308: Yes), the data calculation unit 216 returns to step S302 using the newly set height threshold value and repeats the same process. By repeating this flow for all particles to be measured, correct height information can be associated with all particles to be measured in addition to the two-dimensional shape information and element information shown in FIG. 7.

[0065] Fig. 11A is a schematic diagram illustrating an example of the specific processing content in step S302 in Fig. 10. In Fig. 11A, the CSI image 401 loaded in step S301 may include true particles 402 and false particles 403. The data calculation unit 216 distinguishes between particles by classifying particles having a height equal to or greater than a threshold set by the user as true particles 402 and particles having a height less than the threshold as false particles 403.

[0066] 11B is a schematic diagram illustrating an example of the specific processing content in steps S303 and S304 in Fig. 10. The data calculation unit 216 sets a first search range 404 within the CSI image 401 and analyzes the two-dimensional shape of the true particle contained within the first search range 404. The first search range 404 is set in advance so that its center is equal to the center of the CSI image 401 and its size is slightly wider than the target particle.

[0067] In this example, the two-dimensional shape of the true particle contained within the first search range 404 matches the two-dimensional shape information from the SEM device 10 corresponding to that particle. This situation corresponds to a situation in which no positional deviation occurs when the CSI device 20 moves the sample stage 208 based on the coordinates of the particle from the SEM device 10. When the identity of the particles is confirmed in this way, the data calculation unit 216 associates the two-dimensional shape information from the SEM device 10 with the true particle 405 whose two-dimensional shape matches.

[0068] Figure 11C is a schematic diagram illustrating another example of the specific processing content in steps S303 and S304 in Figure 10. In the example shown in Figure 11C, unlike the case in Figure 11B, no true particle is present within the first search range 404. This situation corresponds to a situation in which, for example, when the CSI device 20 moves the sample stage 208 based on the coordinates of the particle from the SEM device 10, a positional deviation, such as a certain offset, occurs.

[0069] In this case, the data calculation unit 216 changes the search range and analyzes the two-dimensional shapes of the true particles included in the second search range 406. In this example, the two-dimensional shape of the true particle that is not included in the first search range 404 but is included in the second search range 406 matches the two-dimensional shape information from the SEM device 10. When the identity of the particles is confirmed in this way, the data calculation unit 216 associates the two-dimensional shape information from the SEM device 10 with the true particle 405 whose two-dimensional shape matches.

[0070] Although the case where a positional shift occurs has been taken as an example here, even if a particle is identified as a false particle, a situation may arise in which the true particle does not exist within the first search range 404. In this case, even if the search range is changed to the second search range 406, the identity of the particle will not be confirmed. In this case, the data calculation unit 216 may, for example, return to step S302 in FIG. 10 and change the height threshold, or may skip the particle currently being verified and execute the flow shown in FIG. 10 with the next particle being verified.

[0071] In the explanation so far, the data calculation unit 216 in the CSI device 20 has been described as executing the flow shown in Fig. 10. However, this is not limiting, and the external controller 40 shown in Fig. 9 may execute the flow shown in Fig. 10. That is, the external controller 40 can execute the flow shown in Fig. 10 by acquiring two-dimensional shape information for each particle from the SEM device 10 and CSI images and height information for each particle from the CSI device 20.

[0072] <Major Effects of the Second Embodiment> As described above, the method of the second embodiment can also achieve the same effects as those described in the first embodiment. Furthermore, by distinguishing whether each particle is a true particle or a false particle based on its height information, it becomes possible to obtain analysis results limited to true particles, i.e., the analysis result report in step S207 in FIG. 4B. Furthermore, by comparing the two-dimensional shape of each particle contained in the CSI image with the two-dimensional shape information acquired from the SEM image to verify the identity of each particle, it becomes possible to prevent misidentification of particles due to misalignment during alignment, etc.

[0073] (Embodiment 3) <Analysis system operation> Fig. 12 is a flow diagram showing an example of a method for verifying particle identity between a CSI image and an SEM image in the analysis system according to embodiment 3. In particular, when many particles are densely packed together or when there are many very similar particles in the two-dimensional shape information, the flow shown in Fig. 10 may not be able to sufficiently verify particle identity.

[0074] Therefore, it is also possible to verify the identity of a target particle based on the positional relationship between the target particle and each particle existing around the target particle by using the flow shown in Fig. 12 instead of the flow shown in Fig. 10. The flow shown in Fig. 12 is additionally executed, for example, at step S205 in Fig. 4B.

[0075] 12, the controller 212, more specifically, the data calculation unit 216, first captures a CSI image of a target particle as a measurement target (step S401). Furthermore, the data calculation unit 216 reads from the data storage unit 119 the SEM image, here a medium-magnification image, captured in step S103 of FIG. 4A with the target particle as a measurement target (step S402). The medium-magnification image is, for example, an SEM image acquired with a field of view wider than the size of the target particle.

[0076] Next, the data calculation unit 216 performs pattern matching between the CSI image and the medium-magnification image (step S403). For example, the data calculation unit 216 uses the medium-magnification image as a template image, calculates the degree of match with the CSI image, and extracts the part of the CSI image that has the highest degree of match. Then, based on the result of pattern matching between the CSI image and the medium-magnification image, the data calculation unit 216 narrows the detection range of the target particle from the entire range of the CSI image to the search range.

[0077] Next, the data calculation unit 216 reads, as a high-magnification image, an image obtained by cutting out only the region of the target particle from the medium-magnification image, which is an SEM image, or the SEM image captured at high magnification in step S103 (step S404). Subsequently, the data calculation unit 216 performs pattern matching within the search range between the CSI image and the high-magnification image, and detects particles with a high degree of match as target particles (step S405). Then, the data calculation unit 216 extracts height information of the detected target particles (step S406).

[0078] 13A is a schematic diagram illustrating an example of the specific processing content in steps S402 and S403 in FIG. 12. FIG. 13A shows an example of a display screen 501 displayed on the display device 209 of the CSI device 20. In this example, a user can display a CSI image 502 on the display screen 501 by operating a CSI image load button 510. Similarly, a user can display an SEM image, here a medium-magnification image 503, on the display screen 501 by operating an SEM image load button 511. Then, when the user operates an execute button 512, pattern matching is performed.

[0079] The data calculation unit 216 reads a CSI image 502 captured in step S401 with the target particle as the measurement target, and an SEM image captured in step S103 in Fig. 4A with the target particle as the measurement target, here a medium-magnification image 503. Then, in Fig. 13A, the data calculation unit 216 performs pattern matching between the CSI image 502 and the medium-magnification image 503. Furthermore, when the medium-magnification image 503 is used as a template image, the data calculation unit 216 extracts the region in the CSI image 502 that has the highest degree of match, and narrows the detection range for the target particle from the entire range of the CSI image 502 to a search range 504.

[0080] Fig. 13B is a schematic diagram illustrating an example of specific processing contents in steps S404 and S405 in Fig. 12. Fig. 13B also shows a display screen 501 similar to that in Fig. 13A. The data calculation unit 216 reads, as a high-magnification image 505, an image obtained by cutting out only the region of the target particle from the medium-magnification image, or an SEM image captured at high magnification in step S103.

[0081] The data calculation unit 216 then performs pattern matching on the search range 504 within the CSI image 502 using the high-magnification image 505 as a template image, and detects particles 506 that match highly as target particles. The data calculation unit 216 extracts the height of the detected target particles from the data measured using the CSI device 20, and associates the two-dimensional shape information from the SEM device 10 with the target particles.

[0082] In the explanation so far, the case where the data calculation unit 216 in the CSI device 20 executes the flow shown in Fig. 12 has been taken as an example. However, this is not limiting, and the external controller 40 shown in Fig. 9 may execute the flow shown in Fig. 12. In other words, the external controller 40 can execute the flow shown in Fig. 12 by acquiring SEM images of each particle from the SEM device 10 and CSI images of each particle from the CSI device 20.

[0083] <Major Effects of the Third Embodiment> As described above, the method of embodiment 3 can also provide the same effects as those described in embodiment 2. Furthermore, even in situations where it is difficult to verify the identity of particles using the method of embodiment 2, the method of embodiment 3 may be able to sufficiently verify the identity of particles.

[0084] The invention made by the inventor has been specifically described above based on the embodiments, but the present invention is not limited to the above embodiments and can be modified in various ways without departing from the spirit of the invention. For example, the above-described embodiments have been described in detail to clearly explain the present invention, and the present invention is not necessarily limited to those including all of the described configurations. Furthermore, it is possible to replace part of the configuration of one embodiment with the configuration of another embodiment, or to add the configuration of another embodiment to the configuration of one embodiment. Furthermore, it is possible to add, delete, or replace part of the configuration of each embodiment with other configurations. [Explanation of symbols]

[0085] 10: electron microscope (SEM device), 100: controller, 102: lens barrel, 103: sample chamber, 104: device body, 105: sample, 106: electron beam, 107: electron gun, 108: electron optical system, 109: condenser lens, 110: deflector, 111: objective lens, 112: sample stage, 113: signal, 114: signal detector, 115: sample stage, 116: stage control device, 117: image acquisition unit, 118: instruction input unit, 119: data storage unit, 120: signal processing unit, 121: data calculation unit, 122: optical system control unit, 123: stage control unit, 124: display device, 20: scanning white light interference microscope (CSI device), 201: device body, 202: white Color light source (light source), 203: filter, 204: beam splitter, 205: two-beam interference objective lens unit, 206: camera, 207: piezoelectric actuator, 208: sample stage, 209: display device, 210: sample, 211: electric motor, 212: controller, 213: image acquisition unit, 214: instruction input unit, 215: data storage unit, 216: data calculation unit, 217: stage control unit, 30: communication network, 301: alignment mark, 305: group setting table, 312: SEM image, 313: CSI image, 315, 316: particles, 40: external controller, 401: CSI image, 402: true particles, 403: false particles

Claims

1. an SEM (Scanning Electron Microscope) device that captures an image of each particle contained in a sample and observes the two-dimensional shape of each particle contained in the SEM image; a CSI (Coherence Scanning Interferometry) device that captures an image of each particle contained in the sample as a CSI image and measures the height of each particle contained in the CSI image; a controller for controlling the SEM device and the CSI device; and the controller takes the SEM image using the SEM device, classifies each particle included in the SEM image into a size determined based on the imaging magnification of the CSI device, and takes the CSI image of each particle included in each classified particle group using the CSI device; Analysis system.

2. 2. The analysis system according to claim 1, The controller uses the CSI device to: capturing an image of each particle included in a first particle group classified according to a size in a first range at a first imaging magnification, and measuring the height of each captured particle; Then, each particle included in the second particle group classified according to the size in the second range is imaged at a second imaging magnification, and the height of each imaged particle is measured. Analysis system.

3. 2. The analysis system according to claim 1, the controller uses the SEM device to calculate relative coordinates of each particle included in the SEM image, with a reference position provided on the sample or a sample stage on which the sample is placed as a reference coordinate, and captures the CSI image using the CSI device based on the calculated relative coordinates; Analysis system.

4. 4. The analysis system according to claim 3, the controller acquires two-dimensional shape information of each particle included in the SEM image, and compares the two-dimensional shape of each particle included in the CSI image with the two-dimensional shape information acquired from the SEM image, thereby verifying the identity of each particle included in the CSI image and each particle included in the SEM image; Analysis system.

5. 4. The analysis system according to claim 3, the controller verifies the identity of each particle included in the CSI image and each particle included in the SEM image by pattern matching the CSI image and the SEM image; Analysis system.

6. 2. The analysis system according to claim 1, The SEM device further analyzes the elements of each particle included in the SEM image, the controller classifies each particle included in the SEM image by element in addition to size; Analysis system.

7. 6. The analysis system according to claim 1, 4, or 5, The controller compares the height of each particle measured by the CSI device with a preset height threshold to distinguish each particle as a true particle or a false particle. Analysis system.

8. an SEM (Scanning Electron Microscope) device that captures an image of each particle contained in a sample and observes the two-dimensional shape of each particle contained in the SEM image; a CSI (Coherence Scanning Interferometry) device that captures an image of each particle contained in the sample as a CSI image and measures the height of each particle contained in the CSI image; A particle analysis method using The SEM image is taken using the SEM device, and each particle included in the SEM image is classified into a size determined based on the imaging magnification of the CSI device, and for each classified particle group, the CSI image of each particle included in the particle group is taken using the CSI device. How to analyze particles.

9. The particle analysis method according to claim 8, Using the CSI device, capturing an image of each particle included in a first particle group classified according to a size in a first range at a first imaging magnification, and measuring the height of each captured particle; Then, each particle included in the second particle group classified according to the size in the second range is imaged at a second imaging magnification, and the height of each imaged particle is measured. How to analyze particles.

10. The particle analysis method according to claim 8, using the SEM device, calculate relative coordinates of each particle included in the SEM image with a reference position provided on the sample or a sample stage on which the sample is placed as a reference coordinate, and capture the CSI image using the CSI device based on the calculated relative coordinates; How to analyze particles.

11. The particle analysis method according to claim 10, acquiring two-dimensional shape information of each particle included in the SEM image, and comparing the two-dimensional shape of each particle included in the CSI image with the two-dimensional shape information acquired from the SEM image, thereby verifying the identity of each particle included in the CSI image and each particle included in the SEM image; How to analyze particles.

12. The particle analysis method according to claim 10, verifying the identity of each particle included in the CSI image with each particle included in the SEM image by pattern matching the CSI image with the SEM image; How to analyze particles.

13. The particle analysis method according to claim 8, The SEM device further analyzes the elements of each particle included in the SEM image, classifying each particle in the SEM image by element in addition to size; How to analyze particles.

14. The particle analysis method according to any one of claims 8, 11 and 12, The height of each particle measured by the CSI device is compared with a preset height threshold value to distinguish each particle as a real particle or a false particle. How to analyze particles.

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