Flatness measuring device for surface polishing equipment

Abstract

To provide a stool flatness measuring device for flat surface polishing device, capable of measuring by once measurement, flatness of a stool of the flat surface polishing device.SOLUTION: A stool flatness measuring device is configured so that, a first dial gage fixing part 46 to which a first dial gage 42 is fixed, and a second dial gage fixing part 48 to which a second dial gage 44 is fixed, form a space between end parts of the dial gage fixing parts, the end parts being proximate, and the dial gage fixing parts are mutually coupled by a curved connection part 50. Therefore, without interferring to an upper stool drive cylinder body 20 driving an upper stool 16 being provided on a center of a lower stool 14, and a sun gear 24 for driving a carrier 22, flatness of the lower stool 14 can be measured, for measuring flatness of the lower stool 14 by once operation.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to a lower surface plate span gauge for measuring the flatness of a surface plate of a surface polishing machine used to mirror-polish one surface of a workpiece such as a semiconductor substrate. [Background technology]

[0002] When the workpiece is a semiconductor substrate such as a single crystal wafer of silicon, silicon carbide, gallium arsenide, InP (indium phosphide), etc., it is desirable to have one surface mirror-polished to a high degree of flatness using a surface polishing device.

[0003] For example, the double-sided polishing machine described in Patent Document 1 is an example of the above-mentioned surface polishing machine. This double-sided polishing machine includes a lower polishing platen and an upper polishing platen that is disposed opposite the lower polishing platen at a predetermined distance. In order to polish a workpiece with high flatness, it is necessary to measure and manage the flatness of the lower polishing platen, the upper polishing platen, or the polishing pads attached to their polishing surfaces. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 7218830 Summary of the Invention [Problem to be solved by the invention]

[0005] Incidentally, when measuring the flatness of the lower platen of a double-side polishing machine such as that described in Patent Document 1 or the polishing pad attached to its polishing surface, the upper platen is lifted to a high position to greatly expand the space between the lower platen and the upper platen, thereby exposing the lower platen. In this case, the cylinder for driving the upper platen and the sun gear for driving the carrier, which are located at the center of the polishing machine, are located at the center of the lower platen. Therefore, when measuring the flatness of the lower platen along a diameter passing through the center of rotation of the lower platen, the cylinder for driving the upper platen and the sun gear for driving the carrier get in the way. For this reason, three measurements are required: two measurements along a pair of radii located in the radial direction of the lower platen using a small span gauge, and then a measurement in a direction parallel to the pair of radii is made by shifting the center of the lower platen using a large span gauge, resulting in a problem of time-consuming measurement of the flatness of the lower platen. Even in a surface polishing apparatus that has only one surface plate and polishes one side of a workpiece to be polished, if a measurement obstacle such as a drive roller that obstructs flatness measurement is protruded from the center of the surface plate, the same problem as described above occurs when measuring the flatness of that surface plate.

[0006] The present invention has been made in light of the above circumstances, and its object is to provide a surface polishing machine surface plate flatness measuring device that enables the flatness of the lower surface plate of a double-side polishing machine to be measured in a single operation. [Means for solving the problem]

[0007] The gist of the present invention is (a) a surface polishing apparatus for polishing the underside of a workpiece using a surface polishing apparatus having a protruding measurement obstacle at the center, and for measuring the flatness of the surface polishing apparatus, the surface polishing apparatus comprising: (b) a first dial gauge fixing portion for fixing a plurality of first dial gauges at positions spaced apart by a predetermined interval along a first straight line; (c) a second dial gauge fixing portion for fixing a plurality of second dial gauges at positions spaced apart by a predetermined interval along a second straight line connected to the first straight line; and (d) a fixing portion for fixing the first dial gauge fixing portion and the second dial gauge fixing portion between their ends that are close to each other. The measurement obstacle can be accommodated(e) a first support pillar erected at an end of the first dial gauge fixing part remote from the second dial gauge fixing part and abutting against the upper surface of the surface plate during measurement; and (f) a second support pillar and a third support pillar erected at two locations spaced apart in the circumferential direction of the surface plate at an end of the second dial gauge fixing part remote from the first dial gauge fixing part and abutting against the upper surface of the surface plate during measurement. [Effects of the Invention]

[0008] According to the surface polishing apparatus of the present invention, the first dial gauge fixing portion and the second dial gauge fixing portion are provided with a flatness measuring device between their respective ends which are close to each other. The measurement obstacle can be accommodated The curved connecting parts form a space between the lower surface plate and the measuring obstacle protruding from the center of the lower surface plate. To things Since the flatness of the upper surface of the surface plate can be measured without interference, it is possible to measure the flatness of the surface plate of the surface polishing apparatus in a single operation.

[0009] Preferably, the surface polishing apparatus comprises: The upper surface plate driving cylinder constituting the measurement obstacle is provided at the center thereof. A lower surface plate and a lower surface plate are provided facing each other at a predetermined distance. , and is rotated in the opposite direction to the lower surface plate via the upper surface plate driving cylinder. Equipped with an upper surface plate The lower and upper surfaces of the member to be polished are polished. The double-side polishing machine is a polishing machine having a polishing platen flatness measuring device for measuring the flatness of the upper surface of the lower polishing platen. This allows the flatness of the lower polishing platen to be measured without interfering with the cylinder for driving the upper polishing platen and the sun gear for driving the carrier, which are measurement obstacles protruding from the center of the lower polishing platen, and therefore makes it possible to measure the flatness of the lower polishing platen in a single operation.

[0010] Preferably, the second dial gauge fixing portion is WideThe device is provided with a second dial gauge fixing portion main body configured in a fan shape with increasing dimensions, and the second and third supports are fixed to the second dial gauge fixing portion main body at the ends of the second dial gauge fixing portion main body in the circumferential direction of the lower surface plate. As a result, the connecting portion protrudes toward the measurement operator, so that the second dial gauge fixing portion can be placed parallel to the lower surface plate, allowing the flatness of the lower surface plate to be measured. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 5 is a schematic diagram conceptually showing the basic configuration of a double-side polishing machine to which the lower platen flatness measuring device of FIG. 4 is applied. [Figure 2] 2 is a diagram showing a carrier provided in the double-side polishing apparatus of FIG. 1. FIG. [Figure 3] 2 is a view illustrating a state in which an upper platen is lifted upward when measuring the flatness of a lower platen of the double-side polishing machine of FIG. 1. FIG. [Figure 4] FIG. 1 is a front view illustrating a lower surface plate flatness measuring device according to an embodiment of the present invention. [Figure 5] 3 is a plan view illustrating a lower surface plate flatness measuring instrument. DETAILED DESCRIPTION OF THE INVENTION

[0012] An application example of the present invention will be described in detail below with reference to the drawings. [Example]

[0013] FIG. 1 conceptually illustrates the main components of a double-sided polishing machine 12 to which a lower surface plate flatness measuring device 40, an example of a surface plate flatness measuring device according to the present invention, is applied. In FIG. 1, the double-sided polishing machine 10 includes a lower surface plate 14 and an upper surface plate 16, which are rotatably supported about a vertical rotation center line C1 and are arranged facing each other at a predetermined distance. A sheet-like polishing pad 14a is attached to the upper surface of the lower surface plate 14, and a sheet-like polishing pad 16a is attached to the lower surface of the upper surface plate 16. The polishing pad 14a attached to the upper surface of the lower surface plate 14 and the polishing pad 16a attached to the lower surface of the upper surface plate 16 function as planarized polishing surfaces for polishing both surfaces of a workpiece 28.

[0014] A surface plate driving device 18 is provided below the lower surface plate 14. The surface plate driving device 18 drives the lower surface plate 14 to rotate about the rotation center line C1, while driving the upper surface plate 16 to rotate about the rotation center line C1 in the opposite direction to the lower surface plate 14 via an upper surface plate driving cylinder 20. The upper surface plate driving cylinder 20 protrudes from the lower surface plate 14 and is fitted into a central hole 16b of the upper surface plate 16 so as to be unable to rotate relative to the lower surface plate 14. A sun gear 24 that meshes with the outer teeth of the carrier 22 is formed on the upper surface plate driving cylinder 20. The upper surface plate driving cylinder 20 and the sun gear 24 are erected in the center of the upper surface of the lower surface plate 14 and constitute a measurement obstacle when measuring the flatness of the upper surface of the lower surface plate 14.

[0015] A ring gear 26, which is an annular member having internal teeth 26a formed thereon, is fixed concentrically to the outer periphery of the lower surface plate 14.

[0016] The carrier 22 is interposed between the polishing pad 14a on the lower surface plate 14 and the polishing pad 16a on the upper surface plate 16. The carrier 22 is a disc-shaped plate material with outer peripheral teeth 32a formed thereon, as shown in FIG. 2, and includes a through hole 30 into which a workpiece 28 such as a semiconductor substrate is fitted, and the outer peripheral teeth 22a. The outer peripheral teeth 22a of the carrier 22 are meshed with the inner peripheral teeth 26a of the sun gear 24 and the ring gear 26. As a result, while the carrier 22 rotates and revolves on the lower surface plate 14 in conjunction with the rotation of the sun gear 24, the lower surface of the workpiece 28 fitted in the through hole 30 of the carrier 22, which contacts the lower surface plate 14, and the upper surface of the workpiece 28, which contacts the upper surface plate 16, are simultaneously polished. The workpiece 28 has a thickness greater than that of the carrier 22.

[0017] 3 shows a state in which the upper surface plate 16 is lifted upward by a suspension device (not shown) when measuring the flatness of the upper surface of the lower surface plate 14. With the lower surface plate 14 and the upper surface plate 16 thus separated, a lower surface plate flatness measuring instrument 40 is used to measure the flatness of the upper surface of the lower surface plate 14.

[0018] Fig. 4 shows a front view of the lower surface plate flatness measuring instrument 40, and Fig. 5 shows a plan view of the lower surface plate flatness measuring instrument 40. The lower surface plate flatness measuring instrument 40 in Fig. 5 has multiple, in this embodiment three, first dial gauges 42 and multiple, in this embodiment three, second dial gauges 44 removed.

[0019] When the lower surface plate flatness measuring device 40 is placed on the upper surface of the lower surface plate 14 so that the rotation center line C1 of the upper surface of the lower surface plate 14 and the center of the arc-shaped connecting portion 50 are concentric, the lower surface plate flatness measuring device 40 has three first dial gauges 42 fixed at equal intervals along a first straight line L1 passing through the rotation center line C1 of the upper surface of the lower surface plate 14, with the contacts 42a of the first dial gauges 42 fixed in one direction, i.e., parallel to each other, toward the upper surface of the lower surface plate 14, as well as a first dial gauge fixing portion 46, and three second dial gauges 44 fixed at equal intervals along a second straight line L2 connected to the first straight line L1, with the contacts 44a of the second dial gauges 44 fixed in one direction, i.e., parallel to each other, toward the upper surface of the lower surface plate 14. The second dial gauge fixing portion 48, the first dial gauge fixing portion 46 and the second dial gauge fixing portion 48 are integrally provided with a curved, arc-shaped connecting portion 50 which interconnects the two adjacent ends of the first dial gauge fixing portion 46 and the second dial gauge fixing portion 48, forming a space between the ends capable of accommodating the upper surface plate driving cylinder 20 and connecting these ends so as not to interfere with the upper surface plate driving cylinder 20, a first support pillar 52 which is erected at one of the two ends of the first dial gauge fixing portion 46 which is remote from the second dial gauge fixing portion 48 and which abuts against the lower surface plate 14 during measurement, and a second support pillar 54 and a third support pillar 56 which are erected at two locations spaced apart circumferentially of the lower surface plate 14 at one of the two ends of the second dial gauge fixing portion 48 which is remote from the first dial gauge fixing portion 46 and which abut against the lower surface plate 14 during measurement.

[0020] The first line L1 and the second line L2 are located on a common diameter that passes through the rotation center line C1 on the upper surface of the lower surface plate 14. The first dial gauge fixing portion 46 has a first dial gauge fixing portion main body 60 whose width dimension gradually increases toward the rotation center line C1 of the lower surface plate 14. The first dial gauge fixing portion main body 60 has a short arc-shaped connecting protrusion 58 that protrudes circumferentially from the end on the rotation center line C1 side. The connecting protrusion 58 is fastened to one end of the arc-shaped connecting portion 50 by a first connecting screw 61, thereby integrally connecting the first dial gauge fixing portion main body 60 to the connecting portion 50. A first dial gauge fixing member 64, to which three first dial gauges 42 are fixed, is stacked and fixed to the first dial gauge fixing portion main body 60 by a first screw 62.

[0021] The first dial gauge fixing member 64 is provided with a plurality of gauge fixing holes 68 along the first straight line L1, into which three first dial gauges 42 are inserted and fixed with set screws 66. The gauge fixing holes 68 are formed at intervals shorter than the spacing between the first dial gauges 42, and the number of the gauge fixing holes 68 is greater than the number of the first dial gauges 42.

[0022] The second dial gauge fixing portion 48 has a second dial gauge fixing portion main body 72 formed in a fan shape whose width increases the further away from the rotation center line C1 of the lower surface plate 14. The second dial gauge fixing portion main body 72 has an arc-shaped inner peripheral edge portion 70, and the inner peripheral edge portion 70 is fastened to the other end of the arc-shaped connecting portion 50 with a second connecting screw 73, thereby integrally connecting the second dial gauge fixing portion main body 72 to the connecting portion 50. A second dial gauge fixing member 76, to which three second dial gauges 44 are fixed, is stacked and fixed to the second dial gauge fixing portion main body 72 with a second screw 74.

[0023] The second dial gauge fixing member 76 is provided with a plurality of gauge fixing holes 80 along the first straight line L1, into which three second dial gauges 44 are inserted and fixed with set screws 78, similar to the first dial gauge fixing member 64. The gauge fixing holes 80 are formed at intervals shorter than the spacing between the second dial gauges 44, and in a number greater than the number of second dial gauges 44.

[0024] A first support pillar 52 that abuts against the lower surface plate 14 during measurement is provided upright at the end of the first dial gauge fixing portion 46 remote from the second dial gauge fixing portion 48. Furthermore, a second support pillar 54 and a third support pillar 56 are provided upright at the end of the second dial gauge fixing portion 48 remote from the first dial gauge fixing portion 46. These support pillars are provided at two circumferentially spaced locations on the lower surface plate 14 and abut against the lower surface plate 14 during measurement. The first support pillar 52 is threadedly engaged with the first dial gauge fixing portion main body 60 and secured by a lock nut 52a. Similarly, the second support pillar 54 and the third support pillar 56 are threadedly engaged with the second dial gauge fixing portion main body 72 and secured by lock nuts 54a and 56a.

[0025] The second dial gauge fixing portion main body 72 is configured in a fan shape with the width dimension increasing on the connecting portion side 50 toward the outer periphery of the lower surface plate 14, and the second support column 54 and the third support column 56 are each fixed to the circumferential end of the lower surface plate 14. As a result, when measuring the flatness of the lower surface plate 14, the lower surface plate flatness measuring device 40 is supported on the lower surface plate 14 by the first support column 52, the second support column 54, and the third support column 56.

[0026] The lower surface plate flatness measuring device 40 configured as described above measures the flatness of the lower surface plate 14 by adjusting the protruding height of the first support pillar 52, the second support pillar 54, and the third support pillar 56 on a highly flat reference surface plate, for example made of granite, so that the first dial gauge fixing portion 46 and the second dial gauge fixing portion 48 are parallel to the reference surface plate, and then setting the indications of each of the first dial gauges 42 and each of the second dial gauges 44 to zero in advance.The lower surface plate 14 is then placed on the lower surface plate 14 so that the rotation center line C1 of the upper surface of the lower surface plate 14 is concentric with the center of the arc-shaped connecting portion 50, and reading the indications of each of the first dial gauges 42 and each of the second dial gauges 44.

[0027] As described above, according to the lower surface plate flatness measuring device 40 of the double-side polishing apparatus 12 of this embodiment, the first dial gauge fixing portion 46 to which the first dial gauge 42 is fixed and the second dial gauge fixing portion 48 to which the second dial gauge 44 is fixed form a space between their adjacent ends and are connected to each other by the curved connecting portion 50. This allows the lower surface plate flatness measuring device 40 to measure the flatness of the lower surface plate 14 without interfering with the upper surface plate driving cylinder 20 that drives the upper surface plate 16 and the sun gear 24 that drives the carrier 22, both of which are erected in the center of the lower surface plate 14, and therefore makes it possible to measure the flatness of the lower surface plate 14 in a single operation.

[0028] Furthermore, according to the lower surface plate flatness measuring instrument 40 of this embodiment, the second dial gauge fixing portion 48 is provided with a second dial gauge fixing portion main body 72 configured in a fan shape whose width dimension increases toward the connecting portion 50 side toward the outer periphery of the lower surface plate 14, and the second support column 54 and the third support column 56 are each fixed to the circumferential end of the second dial gauge fixing portion main body 72 of the lower surface plate 14. As a result, the connecting portion 50 protrudes toward the measurement operator, so the second dial gauge fixing portion 48 can be placed in a state parallel to the lower surface plate 14, and the flatness of the lower surface plate 14 can be measured.

[0029] Although one embodiment of the present invention has been described above, the present invention can also be applied in other aspects.

[0030] For example, the lower surface plate flatness measuring device 40 in the above-mentioned embodiment was equipped with three first dial gauges 42 and three second dial gauges 44, but it may also be equipped with four or more first dial gauges 42 and four or more second dial gauges 44.

[0031] Furthermore, the first dial gauge 42 and each second dial gauge 44 provided on the lower surface plate flatness measuring device 40 may be of a mechanical type or an electronic type.

[0032] Furthermore, although the first dial gauge fixing portion 46 of the lower surface plate flatness measuring instrument 40 in the above-described embodiment was composed of the first dial gauge fixing portion main body 60 and the first dial gauge fixing member 64 fixed thereto, the first dial gauge fixing portion main body 60 and the first dial gauge fixing member 64 may be composed of an integral member. Similarly, the second dial gauge fixing portion 48 was composed of the second dial gauge fixing portion main body 72 and the second dial gauge fixing member 76 fixed thereto, but the second dial gauge fixing portion main body 72 and the second dial gauge fixing member 76 may be composed of an integral member.

[0033] Furthermore, in the above-described embodiment, the flatness of the upper surface of the lower platen 14 of the double-side polishing apparatus 12 was measured by the lower platen flatness measuring instrument 40. However, in a surface polishing apparatus that has only one platen and polishes one (lower) surface of the workpiece 28, the flatness of the platen may be measured by the lower platen flatness measuring instrument 40. When measuring the flatness of a platen of this surface polishing apparatus in which a measurement obstacle such as a drive roller that obstructs flatness measurement is protruded from the center of the platen, the lower platen flatness measuring instrument 40 can measure the flatness of the platen without interfering with the measurement obstacle such as a drive roller that obstructs flatness measurement and is erected in the center of the platen, so that the flatness of the platen can be measured in a single operation.

[0034] Although not specifically exemplified, the present invention can be used with various modifications within the scope of the invention. [Explanation of symbols]

[0035] 12: Double-sided polishing machine (flat surface polishing machine) 14: Lower surface plate (surface plate) 14a: Polishing pad 16: Upper surface plate 16a: Polishing pad 18: Surface plate driving device 20: Upper surface plate driving cylinder (measurement obstacle) 22: Carrier 22a: Peripheral teeth 24: Sun gear (measurement obstacle) 26: Ring gear 26a: Inner teeth 28: Part to be polished 30:Through hole 40: Lower surface plate flatness measuring device 42: First dial gauge 44: Second dial gauge 46: First dial gauge fixing part 48: Second dial gauge fixing part 50:Connection part 52:1st pillar 52a: Lock nut 54:Second pillar 54a: Lock nut 56: 3rd pillar 56a: Lock nut 58: Connecting protrusion 60: First dial gauge fixing part body 61: First connecting screw 62: First screw 64: First dial gauge fixing member 66: Push screw 68: Gauge fixing hole 70: Connecting protrusion 72: Second dial gauge fixing part body 73: Second connecting screw 74: Second screw 76: Second dial gauge fixing member 78: Push screw 80: Gauge fixing hole C1: Center line of rotation

Claims

1. A surface polishing apparatus for polishing the lower surface of a workpiece using a surface polishing plate having a measuring obstacle protruding from the center thereof, the surface polishing apparatus measuring the flatness of the surface polishing plate, a first dial gauge fixing unit that fixes a plurality of first dial gauges at positions spaced apart by a predetermined interval along a first straight line; a second dial gauge fixing portion that fixes a plurality of second dial gauges at positions spaced apart by a predetermined interval along a second straight line that is continuous with the first straight line; a curved connecting portion that connects the first dial gauge fixing portion and the second dial gauge fixing portion to each other, forming a space between the ends that are close to each other and that can accommodate the measurement obstacle; a first support pillar that is erected at an end of the first dial gauge fixing portion that is distant from the second dial gauge fixing portion and that abuts against an upper surface of the surface plate during measurement; a second support column and a third support column which are erected at two locations spaced apart in the circumferential direction of the surface plate at an end of the second dial gauge fixing section away from the first dial gauge fixing section and which come into contact with the upper surface of the surface plate during measurement; A surface polishing machine surface plate flatness measuring instrument characterized by the above.

2. The surface polishing apparatus is a double-sided polishing apparatus that includes a lower surface plate having an upper surface plate driving cylinder that constitutes the measurement obstacle and that projects from the center, and an upper surface plate that is disposed opposite the lower surface plate at a predetermined interval and is driven to rotate in the opposite direction to the lower surface plate via the upper surface plate driving cylinder, and that polishes the lower and upper surfaces of the workpiece, The surface plate flatness measuring instrument measures the flatness of the upper surface of the lower surface plate.

2. The apparatus for measuring the flatness of a surface plate of a surface polishing apparatus according to claim 1.

3. the second dial gauge fixing portion includes a second dial gauge fixing portion main body configured in a fan shape whose width increases toward the outer periphery of the lower surface plate, The second support column and the third support column are fixed to the circumferential ends of the second dial gauge fixing portion body of the lower surface plate.

3. The apparatus for measuring the flatness of a surface plate of a surface polishing apparatus according to claim 2.

Images