Optical coupling in high density photonic integrated circuits

Abstract

An optical interconnect device (2) for use in transmitting light between a photonic integrated circuit (4) and a plurality of optical fibers (6) comprises a plurality of primary optical beam management elements (40), a plurality of secondary optical beam management elements (50), and a plurality of optical fiber alignment structures (60). Each optical fiber alignment structure (60) is configured to receive a corresponding optical fiber (6) such that an end of the corresponding optical fiber (6) is aligned with but separated from a corresponding one of the secondary optical beam management elements (50), and the optical interconnect device (2) defines a plurality of optical paths, each optical path extending from a surface of the optical interconnect device through a corresponding one of the primary optical beam management elements and a corresponding one of the secondary optical beam management elements to an end of a corresponding one of the optical fiber alignment structures (60). An optical system comprising the optical interconnect device (2), the photonic integrated circuit (4), and a plurality of optical fibers (6) is also disclosed.

Description

[Technical Field]

[0001] The present disclosure relates to components and assemblies useful in high density optical coupling to and / or from photonic integrated circuits (PICs), such as silicon photonic (SiPh) devices. [Background technology]

[0002] There is a significant demand for high channel count optical input / output (I / O) ports in silicon photonic integrated circuit (PIC) applications. This is driven by the need for tight integration between electronics and optics in co-packaged optical applications (CPO), where the transition from electronic I / O to optical I / O can offer significant advantages and high bandwidth scalability.

[0003] Achieving high channel counts using conventional fiber optic attachment processes can use an undesirable amount of space on the silicon chip, which has significant cost and practical implications.

[0004] Conventional optical fiber arrays can achieve channel pitches on the order of 100 pm, limited by the diameter of the optical fiber used in such arrays. Common pitches are 250 pm or 127 pm; however, smaller pitches are also available by using smaller diameter optical fibers, such as those with an 80 pm diameter. However, using such optical fibers in a one-dimensional array in a conventional V-groove array places significant limitations on the achievable channel density.

[0005] Optical I / O couplers on PICs can be produced with significantly smaller pitches between adjacent couplers, such as 25 pm, and thus can provide a substantial increase in channel density. However, optical interposer devices are then required to provide the optical coupling between these structures and the optical fibers used to carry the signals to the receivers.

[0006] Edge-coupled optical interposer devices are commonly used on silicon photonic platforms to provide wide spectral bandwidth and low coupling loss to silicon photonic waveguides. However, due to the edge geometry, known edge-coupled optical interposer devices are limited to 1D arrays, where reducing the channel-to-channel pitch is the only available route to increasing I / O density.

[0007] Alternatively, optical interposer devices using grating couplers to vertically couple light into and out of a silicon photonics platform can be used. Grating couplers can enable 2D arrangements of couplers to provide more efficient use of die real estate for I / O. However, alignment of known optical interposer devices using grating couplers with a silicon photonics platform can be complex and / or require a high degree of precision. Summary of the Invention

[0008] It should be understood that any one or more of the features of any one of the following aspects of the present disclosure may be combined with any one or more of the features of any of the other aforementioned aspects of the present disclosure.

[0009] According to an aspect of the present disclosure, there is provided an optical interconnect device used to transmit light between a photonic integrated circuit and a plurality of optical fibers, the optical interconnect device comprising: a plurality of primary light beam management elements, each primary light beam management element configured to collimate light received from or focus light onto a corresponding optical element of the photonic integrated circuit; a plurality of secondary light beam management elements, each secondary light beam management element configured to focus light onto or collimate light received from an end of a corresponding one of the optical fibers; a plurality of optical fiber alignment structures, each optical fiber alignment structure configured to receive a corresponding optical fiber such that an end of the corresponding optical fiber is aligned with, but separated from, a corresponding one of the secondary light beam management elements; and the optical interconnect device defines a plurality of optical paths, each optical path extending from a surface of the optical interconnect device through a corresponding one of the primary light beam management elements and a corresponding one of the secondary light beam management elements to an end of a corresponding one of the optical fiber alignment structures.

[0010] Optionally, one or more of said primary light beam management elements comprise a light beam collimating element or a light beam focusing element.

[0011] Optionally, one or more of said secondary light beam management elements comprise a light beam collimating element or a light beam focusing element.Optionally, one or more of said primary light beam management elements comprise a microlens.

[0012] Optionally, one or more of said secondary light beam management elements comprise a microlens.

[0013] Optionally, one or more of said primary optical beam management elements comprise a waveguide structure, such as a segmented waveguide or a tapered waveguide.

[0014] Optionally, one or more of said secondary optical beam management elements comprise a waveguide structure, such as a segmented waveguide or a tapered waveguide.

[0015] Optionally, one or more of the primary light beam management elements comprise a gradient index (GRIN) lens, such as a GRIN lens formed by laser modification of the refractive index of a monolithic block of material such as glass, or by insertion of a GRIN rod into a hole laser etched into a monolithic block of material.

[0016] Optionally, one or more of the secondary optical beam management elements comprise a gradient index (GRIN) lens, such as a GRIN lens formed by laser modification of the refractive index of a monolithic block of material such as glass, or by insertion of a GRIN rod into a hole laser etched into a monolithic block of material.

[0017] Optionally, one or more of said primary optical beam management elements comprise 2D curved micromirrors, such as 2D curved total internal reflection (TIR) ​​micromirrors.

[0018] Optionally, one or more of said secondary optical beam management elements comprise 2D curved micromirrors, such as 2D curved total internal reflection (TIR) ​​micromirrors.

[0019] Optionally, said primary light beam management elements are arranged in a 1D array, such as a regular 1D array.

[0020] Optionally, said primary light beam management elements have a staggered arrangement. The use of a staggered arrangement of primary light beam management elements may enable optical coupling to photonic integrated circuits at higher densities than prior art optical coupling solutions.

[0021] Optionally, the primary optical beam management elements are arranged in a 2D array, such as a regular 2D array. The use of a 2D array of primary optical beam management elements may enable optical coupling to photonic integrated circuits at higher densities than prior art optical coupling solutions.

[0022] Optionally, the optical fiber alignment structures are arranged in a 1D array, such as a regular 1D array.

[0023] Optionally, the optical fiber alignment structures have a staggered arrangement. The use of a staggered arrangement of optical fiber alignment structures may enable optical coupling to photonic integrated circuits at higher densities than prior art optical coupling solutions.

[0024] Optionally, the optical fiber alignment structures are arranged in a 2D array, such as a regular 2D array. The use of a 2D array of optical fiber alignment structures may enable optical coupling to photonic integrated circuits at higher densities than prior art optical coupling solutions.

[0025] Optionally, the plurality of primary light beam management elements and the plurality of secondary light beam management elements have a matching or corresponding spatial arrangement.

[0026] Optionally, two or more of the primary optical beam management elements and the corresponding two or more optical fiber alignment structures are disposed in the same plane. Such an optical interconnect device may define two or more optical paths, each optical path extending from or through a corresponding primary optical beam management element to a corresponding optical fiber alignment structure, said two or more optical paths extending in the same plane.

[0027] Optionally, adjacent primary light beam management elements are configured to direct light along parallel optical paths.

[0028] Optionally, the adjacent primary light beam management elements are configured to direct light along non-parallel optical paths.

[0029] Optionally, every other primary light beam management element is configured to direct light along parallel optical paths.

[0030] Optionally, two or more of the primary light beam managing elements and the corresponding two or more optical fiber alignment structures are disposed in different planes. For example, two or more of the primary light beam managing elements may be disposed in a first plane and the corresponding two or more optical fiber alignment structures may be disposed in a second plane orthogonal to said first plane. Such an optical interconnect device may define two or more optical paths, each optical path extending from or through a corresponding primary light beam managing element to a corresponding optical fiber alignment structure, said two or more optical paths extending in different planes.

[0031] Two or more of the primary optical beam management elements may be arranged in a 1D array, such as a regular 1D array extending along a first axis, and the corresponding two or more optical fiber alignment structures may be arranged in a 1D array, such as a regular 1D array extending along a second axis orthogonal to the first axis. Such an optical interconnect device may define two or more optical paths, each optical path extending from or through a corresponding primary optical beam management element to a corresponding optical fiber alignment structure, and the two or more optical paths extending in different planes.

[0032] Optionally, each optical path changes direction at least once.

[0033] Optionally, each optical path changes direction at least once at an angle of 90° or at an angle within the range of 90°, for example at an angle between 60° and 120°, at an angle between 85° and 95°, or at an angle between 88° and 92°.

[0034] Optionally, each optical path changes direction at a corresponding one of said primary optical beam management elements.

[0035] Optionally, each optical path changes direction at a corresponding one of said secondary optical beam management elements.

[0036] Optionally, each primary light beam management element defines an angle at which said corresponding light path changes direction.

[0037] Optionally, each secondary light beam management element defines an angle at which said corresponding light path changes direction.

[0038] Optionally, said optical interconnect device comprises a reflector, and each optical path changes direction at said reflector.

[0039] Optionally, said reflectors define an angle at which each of said optical paths changes direction.

[0040] Optionally, said reflector is configured to reflect light passing between said plurality of primary light beam management elements and said plurality of secondary light beam management elements.

[0041] The photonic integrated circuit may comprise a plurality of integrated optical waveguides.

[0042] Optionally, each optical element of the photonic integrated circuit comprises a surface coupler element for directing light to or from a corresponding one of the integrated optical waveguides through a surface of the photonic integrated circuit, such as an upper or lower surface of the corresponding one of the integrated optical waveguides. Optionally, each of the primary optical beam management elements is configured to focus light onto the corresponding one of the surface coupler elements of the photonic integrated circuit or to collimate light received from the corresponding one of the surface coupler elements of the photonic integrated circuit. Such an optical interconnection device may simplify the coupling of light between each integrated optical waveguide of a photonic integrated circuit and a corresponding optical fiber of a plurality of optical fibers via a surface of the photonic integrated circuit above or below the plurality of integrated optical waveguides.

[0043] Optionally, said surface coupler elements are arranged in a 1D array, such as a regular 1D array.

[0044] Optionally, the surface coupler elements have a staggered arrangement. The use of a staggered arrangement of surface coupler elements may enable optical coupling to the photonic integrated circuit at a higher density than prior art optical coupling solutions.

[0045] Optionally, the surface coupler elements are arranged in a 2D array, such as a regular 2D array. The use of a 2D array of surface coupler elements may enable optical coupling to the photonic integrated circuit at a higher density than prior art optical coupling solutions.

[0046] Optionally, said photonic integrated circuit comprises a step formed at an edge of said photonic integrated circuit, said step having a ledge and a facet.

[0047] Optionally, each integrated optical waveguide of said photonic integrated circuit terminates at said facet of said photonic integrated circuit so as to define a corresponding optical port at said facet of said photonic integrated circuit.

[0048] Optionally, each optical element of said photonic integrated circuit comprises a corresponding one of said optical ports.

[0049] Optionally, each of the primary light beam management elements is configured to focus light onto a corresponding one of the light ports or to collimate light received from a corresponding one of the light ports.

[0050] Optionally, the optical interconnect device comprises a step formed at an edge of the optical interconnect device, the step having a ledge and a facet, In use, the facet may be located between the optical port of the photonic integrated circuit and the plurality of primary optical beam management elements.

[0051] Optionally, the step formed at the edge of the optical interconnect device is complementary to the step formed at the edge of the photonic integrated circuit.

[0052] Optionally, the plurality of primary optical beam management elements and the ledge of the optical interconnect device are separated in a dimension by a predetermined distance that corresponds to a predetermined distance by which the plurality of optical ports of the photonic integrated circuit and a reference surface of the photonic integrated circuit are separated in the same dimension. Optionally, the step of the optical interconnect device is configured to allow engagement between the ledge of the optical interconnect device and the reference surface of the photonic integrated circuit without the ledge of the photonic integrated circuit engaging the optical interconnect device. Consequently, engagement between the ledge of the optical interconnect device and the reference surface of the photonic integrated circuit results in alignment of the plurality of primary optical beam management elements of the optical interconnect device with the plurality of optical ports of the photonic integrated circuit in a dimension.

[0053] Optionally, the optical interconnect device comprises one or more reference markers mounted on the ledge of the optical interconnect device, each of the one or more reference markers configured for alignment with one or more corresponding reference markers mounted on the reference surface of the photonic integrated circuit for alignment of the optical interconnect device with the photonic integrated circuit.

[0054] Optionally, the plurality of primary optical beam management elements of the optical interconnect device and the reference surface of the optical interconnect device are separated in a dimension by a predetermined distance that corresponds to a predetermined distance by which the plurality of optical ports of the photonic integrated circuit and the ledge of the photonic integrated circuit are separated in the same dimension. Optionally, the step of the optical interconnect device is configured to allow engagement between the reference surface of the optical interconnect device and the ledge of the photonic integrated circuit without the ledge of the optical interconnect device engaging the photonic integrated circuit. Consequently, engagement between the reference surface of the optical interconnect device and the ledge of the photonic integrated circuit results in alignment of the plurality of primary optical beam management elements of the optical interconnect device with the optical ports of the photonic integrated circuit in a dimension.

[0055] Optionally, the optical interconnect device comprises one or more reference markers located on the reference surface of the optical interconnect device, each of the one or more reference markers configured for alignment with one or more corresponding reference markers located on the ledge of the photonic integrated circuit for alignment of the optical interconnect device and the photonic integrated circuit.

[0056] Optionally, said facet of said optical interconnect device is formed by etching.Optionally, said ledge of said optical interconnect device is formed by etching.

[0057] Optionally, said facets of said photonic integrated circuit are formed by etching.

[0058] Optionally, said ledge of said photonic integrated circuit is formed by etching.

[0059] Optionally, any two or more of the plurality of primary light beam management elements, the reflector, the plurality of secondary light beam management elements, and the plurality of optical fiber alignment structures are integrally formed in a monolithic block of material, such as a monolithic block of glass, for example a monolithic block of fused silica.

[0060] Optionally, any two or more of the plurality of primary light beam management elements, the reflector, the plurality of secondary light beam management elements, and the plurality of optical fiber alignment structures are formed separately and then brought into engagement and / or attachment with one another.

[0061] Optionally, the optical interconnect device comprises an optical interconnect component having a monolithic block of material such as glass, e.g., a monolithic block of fused silica, wherein the plurality of primary light beam management elements, the plurality of secondary light beam management elements, and the plurality of optical fiber alignment structures are integrally formed in the monolithic block of material.

[0062] Optionally, the optical interconnect component comprises one or more alignment features, each alignment feature integrally formed in said monolithic block of material, each alignment feature configured to engage with a corresponding complementary alignment feature of said photonic integrated circuit for passive alignment of said optical interconnect component and said photonic integrated circuit.

[0063] Optionally, the step in the optical interconnect device is formed at an edge of the optical interconnect component.Optionally, the step in the optical interconnect device is formed at an edge of the monolithic block of material of the optical interconnect component.

[0064] Optionally, the optical interconnect device comprises a primary light beam management element array component; and an optical fiber connector ferrule, wherein the primary light beam management element array component comprises a first monolithic block of material such as glass, e.g., a first monolithic block of fused silica, and the plurality of primary light beam management elements are integrally formed in the first monolithic block of material; and the optical fiber connector ferrule comprises a second monolithic block of material such as glass, e.g., a second monolithic block of fused silica, and the plurality of secondary light beam management elements and the plurality of optical fiber alignment structures are integrally formed in the second monolithic block of material.

[0065] Optionally, said primary optical beam management element array component is configured to be attached, for example bonded to, said photonic integrated circuit.

[0066] Optionally, the fiber optic connector ferrule is configured to align with the primary light beam management element array component so as to align each secondary light beam management element of the fiber optic connector ferrule with a corresponding primary light beam management element of the primary light beam management element array component for the transmission of light between each primary light beam management element of the primary light beam management element array component and a corresponding secondary light beam management element of the fiber optic connector ferrule.

[0067] Optionally, said fiber optic connector ferrule and said primary light beam management element array component are configured to be detachable or connectable.

[0068] Optionally, said fiber optic connector ferrule and said primary light beam management element array component are configured to be removably attached.

[0069] Optionally, the primary light beam management element array component and the fiber optic connector ferrule have one or more complementary inter-engaging alignment features for passive alignment of the primary light beam management element array component and the fiber optic connector ferrule.

[0070] Optionally, the primary light beam management element array component comprises one or more alignment features for aligning the primary light beam management element array component with the optical fiber connector ferrule, each alignment feature of the primary light beam management element array component being integrally formed in the first monolithic block of material.

[0071] Optionally, the fiber optic connector ferrule comprises one or more alignment features for aligning the fiber optic connector ferrule with the primary light beam management element array component, each alignment feature of the fiber optic connector ferrule being integrally formed in the second monolithic block of material.

[0072] Optionally, the one or more complementary inter-engaging alignment features of the primary light beam management element array component and the fiber optic connector ferrule comprise one or more alignment pins or protrusions and one or more complementary alignment holes. One or more of the alignment pins or protrusions may be integrally formed in the first monolithic block of material or may be integrally formed in the second monolithic block of material. One or more of the alignment pins or protrusions may be separately formed from the first monolithic block of material and separately formed from the second monolithic block of material.

[0073] Optionally, the optical interconnect device comprises a reflective primary light beam management element array component; and an optical fiber connector ferrule, wherein the reflective primary light beam management element array component has a first monolithic block of material such as glass, e.g., a first monolithic block of fused silica, the first monolithic block of material defining the plurality of primary light beam management elements and a reflector, each optical path changing direction at the reflector, and the optical fiber connector ferrule has a second monolithic block of material such as glass, e.g., a second monolithic block of fused silica, the plurality of secondary light beam management elements and the plurality of optical fiber alignment structures being integrally formed in the second monolithic block of material.

[0074] Optionally, the reflective primary light beam management element array component comprises one or more alignment features, each alignment feature integrally formed in the first monolithic block of material, and configured to engage with a corresponding complementary alignment feature of the photonic integrated circuit for passive alignment of the reflective primary light beam management element array component and the photonic integrated circuit.

[0075] Optionally, the optical fiber connector ferrule is configured to engage with the reflective primary light beam management element array component to align each secondary light beam management element of the optical fiber connector ferrule with a corresponding primary light beam management element of the reflective primary light beam management element array component for transmission of light through a reflector between each primary light beam management element of the reflective primary light beam management element array component and a corresponding secondary light beam management element of the optical fiber connector ferrule.

[0076] Optionally, said fiber optic connector ferrule and said reflective primary light beam management element array component are configured to be detachable or connectable.

[0077] Optionally, the fiber optic connector ferrule and the reflective primary light beam management element array component are configured for removably attachment. Optionally, the reflective primary light beam management element array component and the fiber optic connector ferrule have one or more complementary inter-engaging alignment features for passive alignment of the reflective primary light beam management element array component and the fiber optic connector ferrule.

[0078] Optionally, the reflective primary light beam management element array component comprises one or more alignment features for aligning the reflective primary light beam management element array component and the optical fiber connector ferrule, each alignment feature of said reflective primary light beam management element array component being integrally formed in said first monolithic block of material.

[0079] Optionally, the fiber optic connector ferrule comprises one or more alignment features for alignment of said fiber optic connector ferrule with said reflective primary light beam management element array component, each alignment feature of said fiber optic connector ferrule being integrally formed in said second monolithic block of material.

[0080] Optionally, the one or more complementary inter-engaging alignment features of the reflective primary light beam management element array component and the fiber optic connector ferrule comprise one or more alignment pins or protrusions and one or more complementary alignment holes. One or more of the alignment pins or protrusions may be integrally formed in the first monolithic block of material or may be integrally formed in the second monolithic block of material. One or more of the alignment pins or protrusions may be separately formed from the first monolithic block of material and separately formed from the second monolithic block of material.

[0081] Optionally, the step of the optical interconnect device is formed at an edge of the reflective primary light beam management element array component.Optionally, the step of the optical interconnect device is formed at an edge of the first monolithic block of material of the reflective primary light beam management element array component.

[0082] Optionally, the optical interconnect device comprises: a primary light beam management element array component; a reflector component defining a reflector, each optical path changing direction at the reflector; and a fiber optic connector ferrule, wherein the primary light beam management element array component comprises a first monolithic block of material such as glass, e.g., a first monolithic block of fused silica, and the plurality of primary light beam management elements are integrally formed in the first monolithic block of material; the fiber optic connector ferrule comprises a second monolithic block of material such as glass, e.g., a second monolithic block of fused silica, and the plurality of secondary light beam management elements and the plurality of optical fiber alignment structures are integrally formed in the second monolithic block of material; and the reflector component comprises a third monolithic block of material such as glass, e.g., a third monolithic block of fused silica, and the reflector is integrally formed in the third monolithic block of material.

[0083] Optionally, the primary light beam managing element array component is configured for engagement with a reflector component and the fiber optic connector ferrule is configured for engagement with the reflector component to align each secondary light beam managing element of the fiber optic connector ferrule with a corresponding primary light beam managing element of the primary light beam managing element array component for transmission of light between each primary light beam managing element of the primary light beam managing element array component and a corresponding secondary light beam managing element of the fiber optic connector ferrule through the reflector of the reflector component.

[0084] Optionally, said reflector component and said primary light beam management element array component are configured to be detachable or connectable.

[0085] Optionally, said reflector component and said primary light beam management element array component are configured to be removably attached.

[0086] Optionally, said fiber optic connector ferrule and said reflector component are configured to be detachable or connectable.

[0087] Optionally, said fiber optic connector ferrule and said reflector component are configured to be removably attached.

[0088] Optionally, the primary light beam management element array component and the reflector component have one or more complementary inter-engaging alignment features for passive alignment of the primary light beam management element array component and the reflector component.

[0089] Optionally, the primary light beam management element array component comprises one or more alignment features for aligning the primary light beam management element array component with the reflector component, each alignment feature of the primary light beam management element array component being integrally formed in a first monolithic block of material.

[0090] Optionally, the reflector component comprises one or more alignment features for aligning the reflector component with the primary light beam management element array component, each alignment feature of the reflector component being integrally formed in the third monolithic block of material.

[0091] Optionally, the one or more complementary inter-engaging alignment features of the primary light beam management element array component and the reflector component comprise one or more alignment pins or protrusions and one or more complementary alignment holes. One or more of the alignment pins or protrusions may be integrally formed in the first monolithic block of material or may be integrally formed in the third monolithic block of material. One or more of the alignment pins or protrusions may be separately formed from the first monolithic block of material or may be separately formed from the third monolithic block of material.

[0092] Optionally, the secondary light beam management element array component and the reflector component have one or more complementary inter-engaging alignment features for passive alignment of the secondary light beam management element array component and the reflector component.

[0093] Optionally, the secondary light beam management element array component comprises one or more alignment features for aligning the secondary light beam management element array component with a reflector component, each alignment feature of the secondary light beam management element array component being integrally formed in the second monolithic block of material.

[0094] Optionally, the reflector component comprises one or more alignment features for aligning the reflector component with the secondary light beam management element array component, each alignment feature of the reflector component being integrally formed in the third monolithic block of material.

[0095] Optionally, the one or more complementary inter-engaging alignment features of the secondary light beam management element array component and the reflector component comprise one or more alignment pins or protrusions and one or more complementary alignment holes. One or more of the alignment pins or protrusions may be integrally formed in the second monolithic block of material or may be integrally formed with the third monolithic block of material. One or more of the alignment pins or protrusions may be separately formed from the second monolithic block of material or may be separately formed from the third monolithic block of material.

[0096] Optionally, each optical fiber comprises a plurality of optical fiber cores, and each optical fiber alignment structure is configured to engage with a corresponding optical fiber such that an end of each optical fiber core of the corresponding optical fiber is aligned with, but separated from, a corresponding one of the secondary optical beam management elements.

[0097] Optionally, forming any one or more of the plurality of primary optical beam management elements, the reflector, the plurality of secondary optical beam management elements, and the plurality of optical fiber alignment structures comprises inscribing one or more monolithic blocks of material in one or more regions using a laser, such as an ultrafast laser or a femtosecond laser, to modify the material of each monolithic block in the one or more regions.

[0098] Optionally, forming any one or more of the plurality of primary optical beam management elements, the reflector, the plurality of secondary optical beam management elements, and the plurality of optical fiber alignment structures comprises inscribing one or more monolithic blocks of material in one or more regions using a laser, such as an ultrafast laser or a femtosecond laser, to modify the refractive index of the material of each monolithic block in said one or more regions.

[0099] Optionally, forming any one or more of the plurality of primary light beam management elements, the reflector, the plurality of secondary light beam management elements, and the plurality of optical fiber alignment structures comprises using the laser to inscribe one or more monolithic blocks of material in one or more regions to modify the chemical etchability of the material of each monolithic block in the one or more regions, and subsequently removing the modifications of each monolithic block from the one or more regions, e.g., by chemical etching.

[0100] Optionally, forming any one or more of the plurality of primary light beam management elements, the reflector, the plurality of secondary light beam management elements, and the plurality of optical fiber alignment structures comprises using the laser to score one or more monolithic blocks of material in one or more regions to remove material of each monolithic block in the one or more regions.

[0101] Optionally, each monolithic block of material comprises a monolithic block of glass, such as a monolithic block of fused silica.

[0102] According to an aspect of the present disclosure, there is provided an optical system comprising the optical interconnect device described above, a photonic integrated circuit, and a plurality of optical fibers, wherein the photonic integrated circuit and the optical interconnect device are attached, for example, by being coupled, to corresponding optical fiber alignment structures of the optical interconnect device, and each optical fiber is attached, for example, by being coupled, to a corresponding optical fiber alignment structure of the optical interconnect device.

[0103] Optionally, the photonic integrated circuit comprises a plurality of integrated optical waveguides.

[0104] Optionally, each optical element of each photonic integrated circuit comprises a surface coupler element for directing light into or out of a corresponding one of said integrated optical waveguides through a surface of the photonic integrated circuit, such as an upper or lower surface of the corresponding one of said integrated optical waveguides.

[0105] Optionally, each of the primary optical beam management elements is configured to focus light onto a corresponding one of the surface coupler elements of the photonic integrated circuit or to collimate light received from a corresponding one of the surface coupler elements of the photonic integrated circuit. Such an optical interconnection device may simplify coupling of light between each integrated optical waveguide of a photonic integrated circuit and a corresponding optical fiber of a plurality of optical fibers via a surface of the photonic integrated circuit above or below the plurality of integrated optical waveguides.

[0106] Optionally, said surface coupler elements are arranged in a 1D array, such as a regular 1D array.

[0107] Optionally, the surface coupler elements have a staggered arrangement. The use of a staggered arrangement of surface coupler elements may enable optical coupling to the photonic integrated circuit at a higher density than prior art optical coupling solutions.

[0108] Optionally, the surface coupler elements are arranged in a 2D array, such as a regular 2D array. The use of a 2D array of surface coupler elements may enable optical coupling to photonic integrated circuits at higher densities than prior art optical coupling solutions.

[0109] Optionally, each surface coupler element of said photonic integrated circuit comprises a grating coupler element.

[0110] Optionally, each surface coupler element of the photonic integrated circuit comprises a 2D curved micromirror, such as a 2D curved TIR micromirror.

[0111] Optionally, the plurality of optical fibers comprises a 1D array of optical fibers, such as a regular 1D array of optical fibers. The regular 1D array of optical fibers may have a pitch of 80 μm or greater. Optionally, the plurality of optical fibers comprises a staggered arrangement of optical fibers. The use of a staggered arrangement of optical fibers may enable optical coupling to the photonic integrated circuit at a higher density than prior art optical coupling solutions.

[0112] Optionally, the plurality of optical fibers comprises a 2D array of optical fibers, such as a regular 2D array of optical fibers. The use of a 2D array of optical fibers may enable optical coupling to the photonic integrated circuit at a higher density than prior art optical coupling solutions.

[0113] Optionally, said photonic integrated circuit comprises a step formed at an edge of said photonic integrated circuit, said step having a ledge and a facet.

[0114] Optionally, each integrated optical waveguide of said photonic integrated circuit terminates at said facet of said photonic integrated circuit so as to define a corresponding optical port at said facet of said photonic integrated circuit.

[0115] Optionally, each optical element of said photonic integrated circuit comprises a corresponding one of said optical ports.

[0116] Optionally, each of the primary light beam management elements is configured to focus light onto a corresponding one of the light ports or to collimate light received from a corresponding one of the light ports.

[0117] Optionally, said optical interconnect device comprises a step formed at an edge of said optical interconnect device, said step having a ledge and a facet.

[0118] Optionally, said facet is located between said optical port of said photonic integrated circuit and said plurality of primary optical beam management elements.

[0119] Optionally, the step formed at the edge of the optical interconnect device is complementary to the step formed at the edge of the photonic integrated circuit.

[0120] Optionally, the plurality of primary optical beam management elements and the ledge of the optical interconnect device are separated in a dimension by a predetermined distance that corresponds to the predetermined distance by which the plurality of optical ports of the photonic integrated circuit and a reference surface of the photonic integrated circuit are separated in the same dimension. Optionally, the ledge of the optical interconnect device and the reference surface of the photonic integrated circuit are engaged, but the ledge of the photonic integrated circuit and the optical interconnect device are not engaged. Consequently, engagement between the ledge of the optical interconnect device and the reference surface of the photonic integrated circuit results in alignment of the plurality of primary optical beam management elements of the optical interconnect device with the plurality of optical ports of the photonic integrated circuit in a dimension.

[0121] Optionally, the optical interconnect device comprises one or more reference markers mounted on the ledge of the optical interconnect device, each of the one or more reference markers configured for alignment with one or more corresponding reference markers mounted on the reference surface of the photonic integrated circuit for alignment of the optical interconnect device with the photonic integrated circuit.

[0122] Optionally, the plurality of primary optical beam management elements of the optical interconnect device and a reference surface of the optical interconnect device are separated in a dimension by a predetermined distance that corresponds to a predetermined distance by which the plurality of optical ports of the photonic integrated circuit and the ledge of the photonic integrated circuit are separated in the same dimension. Optionally, the reference surface of the optical interconnect device and the ledge of the photonic integrated circuit are engaged, but the ledge of the optical interconnect device and the photonic integrated circuit are not engaged. Consequently, engagement between the reference surface of the optical interconnect device and the ledge of the photonic integrated circuit results in alignment of the plurality of primary optical beam management elements of the optical interconnect device with the optical ports of the photonic integrated circuit in a dimension.

[0123] Optionally, the optical interconnect device comprises one or more reference markers located on the reference surface of the optical interconnect device, each of the one or more reference markers configured for alignment with one or more corresponding reference markers located on the ledge of the photonic integrated circuit for alignment of the optical interconnect device and the photonic integrated circuit.

[0124] Optionally, said facets of said optical interconnect device are formed by etching.

[0125] Optionally, said ledge of said optical interconnect device is formed by etching.

[0126] Optionally, said facets of said photonic integrated circuit are formed by etching.

[0127] Optionally, said ledge of said photonic integrated circuit is formed by etching.

[0128] Optionally, said photonic integrated circuit comprises or is formed from silicon, for example said photonic integrated circuit is a silicon photonic integrated circuit.

[0129] Optionally, each optical fiber comprises a plurality of optical fiber cores, and the optical fiber alignment structure is configured to engage with a corresponding optical fiber such that an end of each optical fiber core of the corresponding optical fiber is aligned with, but separated from, a corresponding one of the secondary optical beam management elements. [Brief explanation of the drawings]

[0130] An optical interconnection device and optical system will now be described, by way of non-limiting example only, with reference to the accompanying drawings, in which: [Figure 1A] 1 is a schematic side view of a first optical interconnect device for use in transmitting light between a photonic integrated circuit and a plurality of optical fibers attached to the first optical interconnect device. [Figure 1B] 1B is a schematic side view of the first optical interconnect device of FIG. 1A. [Figure 2] 1 is a schematic side view of a photonic integrated circuit mounted on a second optical interconnect device and the second optical interconnect device for use in transmitting light between a plurality of optical fibers. [Figure 3] 1 is a schematic side view of a third optical interconnect device for use in transmitting light between a photonic integrated circuit attached to the third optical interconnect device and a plurality of optical fibers. [Figure 4] 1 is a schematic side view of a fourth optical interconnect device for use in transmitting light between a photonic integrated circuit attached to the fourth optical interconnect device and a plurality of optical fibers; [Figure 5] 10 is a schematic side view of a fifth optical interconnect device for use in transmitting light between a photonic integrated circuit attached to the fifth optical interconnect device and a plurality of optical fibers. [Figure 6] 10 is a schematic side view of a sixth optical interconnection device for use in transmitting light between a photonic integrated circuit attached to the sixth optical interconnection device and a plurality of optical fibers. [Figure 7] FIG. 1 is a schematic plan view of an optical fiber connector ferrule. DETAILED DESCRIPTION OF THE INVENTION

[0131] 1A , there is shown a schematic side view of a first optical interconnection device in the form of an optical interconnection component, generally designated 2, for transmitting light between a photonic integrated circuit, such as a silicon photonic integrated circuit 4, and a plurality of optical fibers 6. As will be described in more detail below, the optical interconnection component 2 is attached to the photonic integrated circuit 4, and the plurality of optical fibers 6 are attached to the optical interconnection component 2.

[0132] 1A, the photonic integrated circuit 4 has a plurality of optical elements in the form of a plurality of integrated optical waveguides 26 and a plurality of grating coupler elements 27 arranged in a staggered or uniform 2D array. Each integrated optical waveguide 26 of the photonic integrated circuit 4 terminates in a corresponding one of the grating coupler elements 27. Each grating coupler element 27 is configured to couple light vertically upward from the corresponding integrated optical waveguide 26 through a top surface 69 of the photonic integrated circuit 4 to the optical interconnect device 2, or to couple light vertically downward from the optical interconnect device 2 to the corresponding integrated optical waveguide 26 through the top surface 69 of the photonic integrated circuit 4.

[0133] 1A and 1B, the optical interconnect component 2 is formed in a monolithic block of material, such as a monolithic block of fused silica 3. The optical interconnect component 2 has a plurality of primary optical beam management elements in the form of a plurality of microlenses 40 formed on a bottom surface 42 of the monolithic block of fused silica 3 and arranged in a staggered or uniform 2D array having a spatial arrangement that matches the spatial arrangement of the grating coupler elements 27 of the photonic integrated circuit 4. Although not explicitly shown in FIGS. 1A or 1B, the monolithic block of fused silica 3 may define one or more epoxy dams or recessed structures on the bottom surface 42 of the monolithic block of fused silica 3, the epoxy dams or recessed structures configured to prevent adhesive or epoxy from flowing onto the microlenses 40 during attachment of the optical interconnect component 2 to the photonic integrated circuit 4.

[0134] The optical interconnection component 2 further has a plurality of secondary optical beam management elements in the form of a plurality of 2D curved TIR micromirrors 50 formed on the inclined surface of the monolithic block of fused silica 3 and arranged in a staggered or uniform 2D array having a spatial arrangement that matches the spatial arrangement of the plurality of microlenses 40.

[0135] The optical interconnect component 2 further includes a plurality of optical fiber alignment structures in the form of a plurality of optical fiber alignment holes 60 integrally formed in the monolithic block of fused silica 3, each configured to engage a corresponding optical fiber 6 such that an end 7 of the corresponding optical fiber 6 is aligned with, but separated from, a corresponding one of the 2D curved TIR micromirrors 50. Also, although not shown in FIGS. 1A or 1B , the optical interconnect component 2 includes one or more passages or channels extending between a surface of the optical interconnect device 2 and each optical fiber alignment hole 60 to facilitate the flow of an adhesive fluid, such as epoxy, for attachment of each optical fiber 6 in the corresponding optical fiber alignment hole 60.

[0136] The optical interconnect component 2 defines a plurality of optical paths 64, each extending from the lower surface 42 of the monolithic block of fused silica 3, through a corresponding one of the microlenses 40 and a corresponding one of the 2D curved TIR micromirrors 50, to the end 7 of one of the optical fiber alignment holes 60. As can be seen from FIG. 1A , each optical path 64 changes direction at the corresponding 2D curved TIR micromirror 50 at an angle of 90° or within the range of 90°.

[0137] The optical interconnect component 2 also has one or more alignment features in the form of one or more protrusions or projections 67 integrally formed on the lower surface 42 of the monolithic block of fused silica 3, each protrusion or projection 67 configured to engage with a corresponding complementary alignment feature in the form of a corresponding recess 68 formed in the upper surface 69 of the photonic integrated circuit 4 for passive alignment of the optical interconnect component 2 and the photonic integrated circuit 4.

[0138] Specifically, one or more recesses 68 of the photonic integrated circuit 4 are positioned relative to the grating coupler elements 27 of the photonic integrated circuit 4, and one or more protrusions or protrusions 67 are positioned relative to the microlenses 40 of the optical interconnect component 2, ensuring that the grating coupler elements 27 of the photonic integrated circuit 4 and the microlenses 40 of the optical interconnect component 2 are passively aligned when the one or more protrusions or protrusions 67 of the optical interconnect component 2 are inserted into the one or more recesses 68 of the photonic integrated circuit 4. In use, when the one or more protrusions or protrusions 67 of the optical interconnect component 2 are inserted into the one or more recesses 68 of the photonic integrated circuit 4, light is transmitted between the integrated optical waveguides 26 of the photonic integrated circuit 4 and the optical fibers 6 through the optical interconnect component 2. As can be seen from FIG. 1A , the reflection of light from each 2D curved TIR micromirror 50 redirects the light through a 90° angle or through an angle within the 90° range.

[0139] From the foregoing, it will be appreciated that the optical interconnection component 2 functions to optically couple a uniform 2D array of optical fibers 6 and a plurality of integrated optical waveguides 26 of a photonic integrated circuit 4 in a simpler manner than prior art optical interconnection devices, thereby enabling high density photonic integrated circuit optical I / O to be more easily achieved compared to prior art optical interconnection devices.

[0140] 2, there is shown a schematic side view of a second optical interconnect device, generally designated 102, for transmitting light between a photonic integrated circuit, such as a silicon photonic integrated circuit 104, and a plurality of optical fibers 106. The optical interconnect device 102 comprises a primary optical beam management element array component 190 and a separately formed optical fiber connector ferrule 192. As will be described in further detail below, the primary optical beam management element array component 190 is attached to the photonic integrated circuit 104, and the plurality of optical fibers 106 are attached to the optical fiber connector ferrule 192.

[0141] 2, the photonic integrated circuit 104 has a plurality of integrated optical waveguides 126 and a plurality of optical elements in the form of a plurality of grating coupler elements 127 arranged in a staggered or uniform 2D array. Each integrated optical waveguide 126 of the photonic integrated circuit 104 terminates in a corresponding one of the grating coupler elements 127. Each grating coupler element 127 is configured to couple light vertically upward from the corresponding integrated optical waveguide 126 through the top surface 169 of the photonic integrated circuit 104 to the primary optical beam management element array component 190, or to couple light vertically downward from the primary optical beam management element array component 190 to the corresponding integrated optical waveguide 126 through the top surface 169 of the photonic integrated circuit 104.

[0142] The primary optical beam management element array component 190 includes a first monolithic block of material, such as a first monolithic block of fused silica 103a, and a plurality of primary optical beam management elements in the form of a plurality of microlenses 140 integrally formed on a top surface 143 of the first monolithic block of fused silica 103a. The plurality of microlenses 140 are arranged in a staggered or uniform 2D array having a spatial arrangement that matches the spatial arrangement of the grating coupler elements 127 of the photonic integrated circuit 104.

[0143] The primary light beam management element array component 190 also has one or more alignment features in the form of one or more alignment holes 146 integrally formed in the first monolithic block of fused silica 103a for use in aligning the primary light beam management element array component 190 and the optical fiber connector ferrule 192.

[0144] The fiber optic connector ferrule 192 has a second monolithic block of material, such as a second monolithic block of fused silica 103b, and a plurality of secondary optical beam management elements in the form of a plurality of 2D curved TIR micromirrors 150 integrally formed on an angled surface of the second monolithic block of fused silica 103b. The plurality of 2D curved TIR micromirrors 150 are arranged in a staggered or uniform 2D array having a spatial arrangement that matches the spatial arrangement of the plurality of microlenses 140.

[0145] The fiber optic connector ferrule 192 further includes a plurality of optical fiber alignment structures in the form of a plurality of optical fiber alignment holes 160 integrally formed in the second monolithic block of fused silica 103b, each configured to engage a corresponding optical fiber 106 such that the end 107 of the corresponding optical fiber 106 is aligned with, but separated from, a corresponding one of the 2D curved TIR micromirrors 150. Also, although not shown in FIG. 2 , the fiber optic connector ferrule 192 includes one or more passages or channels extending between a surface of the fiber optic connector ferrule 192 and each optical fiber alignment hole 160 to facilitate the flow of an adhesive fluid, such as epoxy, for the attachment of each optical fiber 106 in the corresponding optical fiber alignment hole 160.

[0146] The fiber optic connector ferrule 192 further has one or more pins 170, each configured to be received in a corresponding one of the holes 146 of the primary light beam management element array component 190 for passive alignment of the primary light beam management element array component 190 and the fiber optic connector ferrule 192. Specifically, the alignment holes 146 of the primary light beam management element array component 190 are positioned relative to the microlenses 140 of the primary light beam management element array component 190, and the pins 170 of the fiber optic connector ferrule 192 are positioned relative to the 2D curved TIR micromirrors 150 of the fiber optic connector ferrule 192, ensuring that the microlenses 140 of the primary light beam management element array component 190 and the 2D curved TIR micromirrors 150 of the fiber optic connector ferrule 192 are passively aligned when the pins 170 of the fiber optic connector ferrule 192 are inserted into the alignment holes 146 of the primary light beam management element array component 190. Pins 170 may be integrally formed in the second monolithic block of fused silica 103b. Alternatively, the second monolithic block of fused silica 103b may define a plurality of holes, each hole configured to receive a corresponding one of pins 170.

[0147] The primary optical beam management element array component 190 is aligned with the photonic integrated circuit 104 so as to align each of the microlenses 140 of the primary optical beam management element array component 190 in the X and Y directions with a corresponding grating coupler element 127 of the photonic integrated circuit 104, and the bottom surface 142 of the primary optical beam management element array component 190 is attached, for example by being bonded, to the top surface 169 of the photonic integrated circuit 104.

[0148] An optical fiber 106 of the plurality of optical fibers is attached, for example by being bonded, to a corresponding one of the optical fiber alignment holes 160 so that the end 107 of the corresponding optical fiber 106 is aligned with, but separated from, a corresponding one of the 2D curved TIR micromirrors 150.

[0149] One or more pins 170 of the optical fiber connector ferrule 192 are then inserted into one or more alignment holes 146 of the primary light beam management element array component 190 to passively align the microlenses 140 of the primary light beam management element array component 190 and the microlenses 150 of the optical fiber connector ferrule 192.

[0150] The optical interconnect device 102 then defines a plurality of optical paths 164, each extending from the lower surface 142 of the primary optical beam management element array component 190, through a corresponding one of the microlenses 140 and a corresponding one of the 2D curved TIR micromirrors 150, to the end 107 of one of the optical fiber alignment holes 160. As can be seen from FIG. 2 , each optical path 164 changes direction at a corresponding 2D curved TIR micromirror 150 at an angle of 90° or within the range of 90°.

[0151] In use, light then transmits between the integrated optical waveguide 126 of the photonic integrated circuit 104 and the optical fiber 106 via the primary optical beam management element array component 190 and the optical fiber connector ferrule 192. As can be seen from Figure 2, the reflection of light from each 2D curved TIR micromirror 150 redirects the light through a 90° angle or through an angle within a 90° region.

[0152] From the foregoing, it will be appreciated that the optical interconnect device 102 functions to optically couple a staggered or uniform 2D array of integrated optical waveguides 126 and optical fibers 106 of a photonic integrated circuit 104 in a simpler manner than prior art optical interconnect devices, thereby allowing high density photonic integrated circuit optical I / O to be more easily achieved compared to prior art optical interconnect devices. Furthermore, as a result of the one or more pins 170 of the fiber optic connector ferrule 192 and the one or more alignment holes 146 of the primary optical beam management element array component 190, one skilled in the art will appreciate that the fiber optic connector ferrule 192 and the primary optical beam management element array component 190 are configured to be detachable or connectable. The primary light beam management element array component 190 and the fiber optic connector ferrule 192 may also have one or more mechanical mechanisms (not shown) for removably attaching the primary light beam management element array component 190 and the fiber optic connector ferrule 192, such as one or more arms, clips, or clamps, for example, for connecting, latching, or holding the primary light beam management element array component 190 and the fiber optic connector ferrule 192 together.

[0153] 3, there is shown a schematic side view of a third optical interconnection device, generally designated 202, for transmitting light between a photonic integrated circuit, such as a silicon photonic integrated circuit 204, and a plurality of optical fibers 206. The optical interconnection device 202 comprises a primary optical beam management element array component 290 and a separately formed optical fiber connector ferrule 292. As will be described in more detail below, the primary optical beam management element array component 290 is attached to the photonic integrated circuit 204, and the plurality of optical fibers 206 are attached to the optical fiber connector ferrule 292.

[0154] As shown in Figure 3, the photonic integrated circuit 204 includes a plurality of optical elements in the form of a plurality of grating coupler elements 227 arranged in a staggered or uniform 2D array. Although not shown in Figure 3, it should be understood that the photonic integrated circuit 204 also includes a plurality of integrated optical waveguides, each terminating in a corresponding one of the grating coupler elements 227. Each grating coupler element 227 is configured to couple light out of a corresponding integrated optical waveguide upward through the top surface 269 of the photonic integrated circuit 204 to the primary optical beam management element array component 290 along a direction that defines an acute angle with respect to the vertical, or each grating coupler element 227 is configured to couple light from the primary optical beam management element array component 290 downward through the top surface 269 of the photonic integrated circuit 204 to a corresponding integrated optical waveguide along a direction that defines an acute angle with respect to the vertical. The photonic integrated circuit 204 further has one or more recesses 268 formed in the top surface 269 for passively aligning the primary optical beam management element array component 290 with the photonic integrated circuit 204 .

[0155] The primary light beam management element array component 290 includes a first monolithic block of material, such as a first monolithic block of fused silica 203a, and a plurality of primary light beam management elements in the form of a plurality of primary microlenses 240 integrally formed on a bottom surface 242 of the first monolithic block of fused silica 203a. The plurality of primary microlenses 240 are arranged in a staggered or uniform 2D array having a spatial arrangement that matches the spatial arrangement of the grating coupler elements 227 of the photonic integrated circuit 204.

[0156] The primary light beam management element array component 290 also has a reflector in the form of a reflective surface 295 of a first monolithic block of fused silica 203a that is tilted at an acute angle, such as an acute angle in the region of 45°, relative to the horizontal.

[0157] The primary light beam management element array component 290 further has one or more alignment features in the form of one or more protrusions or projections 267, each protrusion or projection 267 integrally formed in the first monolithic block of material 203a, and each protrusion or projection 267 configured to engage a corresponding one of the recesses 268 in the photonic integrated circuit 204 for passive alignment of the primary light beam management element array component 290 and the photonic integrated circuit 204.

[0158] The primary light beam management element array component 290 also has one or more alignment features in the form of one or more alignment holes 246 integrally formed in the first monolithic block of fused silica 203 a for use in aligning the primary light beam management element array component 290 and the optical fiber connector ferrule 292.

[0159] The fiber optic connector ferrule 292 has a second monolithic block of material, such as a second monolithic block of fused silica 203b, and a plurality of secondary optical beam management elements in the form of a plurality of secondary microlenses 250 integrally formed on a surface 252 of the second monolithic block of fused silica 203b. The secondary microlenses 250 are arranged in a staggered or uniform 2D array having a spatial arrangement that matches the spatial arrangement of the plurality of primary microlenses 240.

[0160] Fiber optic connector ferrule 292 further includes a plurality of optical fiber alignment structures in the form of a plurality of optical fiber alignment holes 260 integrally formed in the second monolithic block of fused silica 203b, each optical fiber alignment hole 260 configured to engage a corresponding optical fiber 206 such that an end 207 of the corresponding optical fiber 206 is aligned with, but separated from, a corresponding one of secondary microlenses 250. Also, although not shown in FIG. 3 , fiber optic connector ferrule 292 includes one or more passages or channels extending between a surface of fiber optic connector ferrule 292 and each optical fiber alignment hole 260 to facilitate the flow of an adhesive fluid, such as epoxy, for attachment to each optical fiber 206 in the corresponding optical fiber alignment hole 260.

[0161] The fiber optic connector ferrule 292 further has one or more pins 270, each pin 270 configured to be received in a corresponding one of the holes 246 of the primary light beam management element array component 290 for passive alignment of the primary light beam management element array component 290 and the fiber optic connector ferrule 292. Specifically, the alignment holes 246 of the primary light beam management element array component 290 are positioned relative to the primary microlenses 240 of the primary light beam management element array component 290, and the pins 270 of the fiber optic connector ferrule 292 are positioned relative to the secondary microlenses 250 of the fiber optic connector ferrule 292, ensuring that the primary microlenses 240 of the primary light beam management element array component 290 and the secondary microlenses 250 of the fiber optic connector ferrule 292 are passively aligned when the pins 270 of the fiber optic connector ferrule 292 are inserted into the alignment holes 246 of the primary light beam management element array component 290. Pins 270 may be integrally formed in the second monolithic block of fused silica 203b. Alternatively, the second monolithic block of fused silica 203b may define a plurality of holes, each hole configured to receive a corresponding one of pins 270.

[0162] To align each of the primary microlenses 240 of the primary light beam management element array component 290 with a corresponding grating coupler element 227 of the photonic integrated circuit 204 in the X and Y directions, each protrusion or projection 267 of the primary light beam management element array component 290 is brought into engagement with a corresponding one of the recesses 268 of the photonic integrated circuit 204 for passive alignment of the primary light beam management element array component 290 and the photonic integrated circuit 204, and the bottom surface 242 of the primary light beam management element array component 290 is attached, for example by being bonded, to the top surface 269 of the photonic integrated circuit 204.

[0163] An optical fiber 206 of the plurality of optical fibers is attached, for example by being bonded, to a corresponding one of the optical fiber alignment holes 260 such that an end 207 of the corresponding optical fiber 206 is aligned with, but separated from, a corresponding one of the secondary microlenses 250.

[0164] One or more pins 270 of the optical fiber connector ferrule 292 are then inserted into one or more alignment holes 246 of the primary light beam management element array component 290, and a surface 252 of the optical fiber connector ferrule 292 is brought into engagement with a surface 253 of the primary light beam management element array component 290 to passively align the primary microlenses 240 of the primary light beam management element array component 290 and the secondary microlenses 250 of the optical fiber connector ferrule 292.

[0165] The optical interconnect device 202 then defines a plurality of optical paths 264, each extending from the lower surface 242 of the primary light beam management element array component 290, through a corresponding one of the primary microlenses 240 and a corresponding one of the secondary microlenses 250, to the end 207 of one of the optical fiber alignment holes 260. As can be seen in FIG. 3 , each optical path 264 changes direction at a reflective surface 295 of the first monolithic block of fused silica 203 a by an angle greater than 90°.

[0166] In use, light then transmits between the integrated optical waveguides 226 of the photonic integrated circuit 204 and the optical fibers 206 via the primary light beam management element array component 290 and the optical fiber connector ferrule 292. As can be seen in FIG. 3 , reflection of the light from the reflective surface 295 of the first monolithic block of fused silica 203 a redirects the light through an angle greater than 90°, for example, an angle of about 120°. The use of the primary microlenses 240 and secondary microlenses 250 functions to form a staggered or 2D array of expanded and collimated light beams that transmit horizontally between the primary light beam management element array component 290 and the optical fiber connector ferrule 292, thereby relaxing the alignment tolerance required between the primary light beam management element array component 290 and the optical fiber connector ferrule 292 for a given optical coupling efficiency.

[0167] From the foregoing, it will be appreciated that the optical interconnect device 202 functions to optically couple a staggered or uniform 2D array of integrated optical waveguides 226 and optical fibers 206 of a photonic integrated circuit 204 in a simpler manner than prior art optical interconnect devices, thereby allowing high density photonic integrated circuit optical I / O to be more easily achieved compared to prior art optical interconnect devices. Furthermore, as a result of the one or more pins 270 of the fiber optic connector ferrule 292 and the one or more alignment holes 246 of the primary optical beam management element array component 290, one skilled in the art will appreciate that the fiber optic connector ferrule 292 and the primary optical beam management element array component 290 are configured to be detachable or connectable. The primary light beam management element array component 290 and the fiber optic connector ferrule 292 may also have one or more mechanical mechanisms (not shown), such as one or more arms, clips, or clamps, for removably attaching the primary light beam management element array component 290 and the fiber optic connector ferrule 292, for example, for connecting, latching, or holding the primary light beam management element array component 290 and the fiber optic connector ferrule 292 together.

[0168] Referring to FIG. 4 , there is shown a schematic side view of a fourth optical interconnection device, generally designated 302, for transmitting light between a photonic integrated circuit, such as a silicon photonic integrated circuit 304, and a plurality of optical fibers 306. The optical interconnection device 302 includes a primary optical beam management element array component 390, a separately formed optical fiber connector ferrule 392, and a separately formed reflector component 394. As described in further detail below, the primary optical beam management element array component 390 is attached to the photonic integrated circuit 304, and the plurality of optical fibers 306 are attached to the optical fiber connector ferrule 392. As shown in FIG. 4 , the photonic integrated circuit 304 includes a plurality of optical elements in the form of a plurality of grating coupler elements 327 arranged in a staggered or uniform 2D array. Although not shown in FIG. 4 , it should be understood that the photonic integrated circuit 304 also includes a plurality of integrated optical waveguides, each terminating in a corresponding one of the grating coupler elements 327. Each grating coupler element 327 is configured to couple light vertically upward from a corresponding integrated optical waveguide through the top surface 369 of the photonic integrated circuit 304 to the primary optical beam management element array component 390, or to couple light vertically downward from the primary optical beam management element array component 390 through the top surface 369 of the photonic integrated circuit 304 to a corresponding integrated optical waveguide of the photonic integrated circuit 304.

[0169] The primary light beam management element array component 390 includes a first monolithic block of material, such as a first monolithic block of fused silica 303a, and a plurality of primary light beam management elements in the form of a plurality of primary microlenses 340 integrally formed on a top surface of the first monolithic block of fused silica 303a. The plurality of primary microlenses 340 are arranged in a staggered or uniform 2D array having a spatial arrangement that matches the spatial arrangement of the grating coupler elements 327 of the photonic integrated circuit 304.

[0170] The primary light beam management element array component 390 also has alignment features in the form of one or more alignment pins 347 for use in aligning the primary light beam management element array component 390 and the reflector component 394. The one or more alignment pins 347 may be integrally formed in the first monolithic block of fused silica 303a. Alternatively, the first monolithic block of fused silica 303a may define a plurality of holes, each hole configured to receive a corresponding one of the alignment pins 347.

[0171] The fiber optic connector ferrule 392 includes a second monolithic block of material, such as a second monolithic block of fused silica 303b, and a plurality of secondary optical beam management elements in the form of a plurality of secondary microlenses 350 integrally formed on a surface 352 of the second monolithic block of fused silica 303b. The secondary microlenses 350 are arranged in a staggered or uniform 2D array having a spatial arrangement that matches the spatial arrangement of the plurality of primary microlenses 340. The fiber optic connector ferrule 392 further includes a plurality of optical fiber alignment structures in the form of a plurality of optical fiber alignment holes 360 integrally formed in the second monolithic block of fused silica 303b, each optical fiber alignment hole 360 ​​configured to engage a corresponding optical fiber 306 such that the end 307 of the corresponding optical fiber 306 is aligned with, but separated from, a corresponding one of the secondary microlenses 350. Also, although not shown in FIG. 4 , the optical fiber connector ferrule 392 has one or more passages or channels extending between the surface of the optical fiber connector ferrule 392 and each optical fiber alignment hole 360 ​​to facilitate the flow of an adhesive fluid, such as epoxy, for the attachment of each optical fiber 306 in the corresponding optical fiber alignment hole 360.

[0172] The fiber optic connector ferrule 392 further has alignment pins 370 for use in aligning the fiber optic connector ferrule 392 and the reflector component 394. One or more alignment pins 370 may be integrally formed in the second monolithic block of fused silica 303b. Alternatively, the second monolithic block of fused silica 303b may define a plurality of holes, each hole configured to receive a corresponding one of the alignment pins 370.

[0173] The reflector component 394 includes a third monolithic block of material, such as a third monolithic block of fused silica 303c, and a reflector in the form of a reflective surface 395 of the third monolithic block of fused silica 303c, the reflective surface 395 being tilted at an angle within the range of 45° from horizontal. The reflector component 394 further includes an alignment hole 396 integrally formed in the third monolithic block of fused silica 303c for use in receiving an alignment pin 347 of the primary light beam management element array component 390 for passive alignment of the reflector component 394 with the primary light beam management element array component 390. Similarly, the reflector component 394 further includes an alignment hole 398 integrally formed in the third monolithic block of fused silica 303c for use in receiving an alignment pin 370 of the fiber optic connector ferrule 392 for passive alignment of the reflector component 394 with the fiber optic connector ferrule 392.

[0174] The primary light beam management element array 390 component is aligned with the photonic integrated circuit 304, and a bottom surface 342 of the primary light beam management element array component 390 is attached, for example bonded, to a top surface 369 of the photonic integrated circuit 304 so as to align each of the primary microlenses 340 of the primary light beam management element array component 390 in the X and Y directions with a corresponding grating coupler element 327 of the photonic integrated circuit 304.

[0175] Each optical fiber 306 of the plurality of optical fibers is attached, for example by being bonded, to a corresponding one of the optical fiber alignment holes 360 so that the end 307 of the corresponding optical fiber 306 is aligned with, but separated from, a corresponding one of the secondary microlenses 350.

[0176] The alignment pins 347 of the primary light beam management element array component 390 are positioned relative to the primary microlenses 340 of the primary light beam management element array component 390, the alignment holes 396 and 398 of the reflector component 394 are positioned relative to the reflective surface 395 of the reflector component 394, and the alignment pins 370 of the fiber optic connector ferrule 392 are positioned relative to the secondary microlenses 350 of the fiber optic connector ferrule 392, ensuring that the primary microlenses 340 of the primary light beam management element array component 390 and the secondary microlenses 350 of the fiber optic connector ferrule 392 are passively aligned when the alignment pins 347 of the primary light beam management element array component 390 are inserted into the alignment holes 396 of the reflector component 394 and the alignment pins 370 of the fiber optic connector ferrule 392 are inserted into the alignment holes 398 of the reflector component 394. The top surface of the primary light beam management element array component 390 and the bottom surface of the reflector component 394 are brought into engagement. Similarly, surface 352 of fiber optic connector ferrule 392 is brought into engagement with surface 353 of reflector component 394 .

[0177] The optical interconnect device 302 then defines a plurality of optical paths 364, each extending from the lower surface 342 of the primary light beam management element array component 390, through a corresponding one of the primary microlenses 340 and a corresponding one of the secondary microlenses 350, to the end 307 of one of the optical fiber alignment holes 360. As can be seen in FIG. 4 , each optical path 364 changes direction at a reflective surface 395 of the reflector component 394 at an angle of 90° or within the range of 90°.

[0178] In use, light then transmits between the integrated optical waveguides of the photonic integrated circuit 304 and the optical fibers 306 via the primary light beam management element array component 390, the reflector component 394, and the optical fiber connector ferrule 392. As can be seen in FIG. 4 , reflection of the light from the reflective surface 395 of the reflector component 394 redirects the light through a 90° angle or through an angle within the 90° region. The use of the primary microlenses 340 and secondary microlenses 350 functions to form a staggered or 2D array of expanded and collimated light beams that transmit between the primary light beam management element array component 390 and the optical fiber connector ferrule 392, thereby relaxing the alignment tolerance required between the primary light beam management element array component 390 and the optical fiber connector ferrule 392 for a given optical coupling efficiency.

[0179] From the foregoing, it will be appreciated that the optical interconnect device 302 functions to optically couple a staggered or uniform 2D array of optical fibers 306 and a plurality of integrated optical waveguides of a photonic integrated circuit 304 in a simpler manner than prior art optical interconnect devices, thereby allowing high density photonic integrated circuit optical I / O to be more easily achieved compared to prior art optical interconnect devices. Furthermore, as a result of the pin 347 of the primary optical beam management element array component 390, the pin 370 of the fiber optic connector ferrule 392, and the alignment holes 396, 398 of the reflector component 394, one skilled in the art will appreciate that the fiber optic connector ferrule 392, the reflector component 394, and the primary optical beam management element array component 390 are configured to be detachable or connectable. The primary light beam management element array component 390, the reflector component 394, and the fiber optic connector ferrule 392 may also have one or more mechanical mechanisms (not shown), such as one or more arms, clips, or clamps, for removably attaching the primary light beam management element array component 390, the reflector component 394, and the fiber optic connector ferrule 392, for example, for connecting, latching, or holding the primary light beam management element array component 390, the reflector component 394, and the fiber optic connector ferrule 392 together.

[0180] Referring to FIG. 5 , there is shown a schematic side view of a fifth optical interconnection device, generally designated 402, for transmitting light between a photonic integrated circuit, such as a silicon photonic integrated circuit 404, and a plurality of optical fibers 406. The optical interconnection device 402 includes a primary optical beam management element array component 490 and a separately formed optical fiber connector ferrule 492. As described in further detail below, the primary optical beam management element array component 490 is attached to the photonic integrated circuit 404, and the plurality of optical fibers 406 are attached to the optical fiber connector ferrule 492. As shown in FIG. 5 , the photonic integrated circuit 404 has a plurality of optical elements in the form of a plurality of grating coupler elements 427 arranged in a uniform 1D array along a direction parallel to the Y direction. The photonic integrated circuit 404 also has a plurality of integrated optical waveguides 426, each terminating in a corresponding one of the grating coupler elements 427. Each grating coupler element 427 is configured to couple light upward from a corresponding integrated optical waveguide 426 through the top surface 469 of the photonic integrated circuit 404 to the primary optical beam management element array component 490 along a direction that defines an acute angle with respect to the vertical, or each grating coupler element 427 is configured to couple light downward from the primary optical beam management element array component 490 through the top surface 469 of the photonic integrated circuit 404 to a corresponding integrated optical waveguide 426 along a direction that defines an acute angle with respect to the vertical.

[0181] The primary optical beam management element array component 490 includes a first monolithic block of material, such as a first monolithic block of fused silica 403a, and a plurality of primary optical beam management elements in the form of a plurality of primary microlenses 440 integrally formed on a bottom surface 442 of the first monolithic block of fused silica 403a. The plurality of primary microlenses 440 are arranged in a uniform 1D array having a spatial arrangement that matches the spatial arrangement of the grating coupler elements 427 of the photonic integrated circuit 404.

[0182] The primary light beam management element array component 490 also has reflectors in the form of a first flat reflective surface 495a of a first monolithic block of fused silica 403a and a second flat reflective surface 495b of the first monolithic block of fused silica 403a.

[0183] The primary light beam management element array component 490 also has one or more alignment features in the form of one or more alignment holes 446 integrally formed in the first monolithic block of fused silica 403 a for use in aligning the primary light beam management element array component 490 and the optical fiber connector ferrule 492.

[0184] The fiber optic connector ferrule 492 includes a second monolithic block of material, such as a second monolithic block of fused silica 403b, and a plurality of secondary optical beam management elements in the form of a plurality of secondary microlenses 450 integrally formed on a surface 452 of the second monolithic block of fused silica 403b. The secondary microlenses 450 are arranged in a uniform 2D array. The fiber optic connector ferrule 492 further includes a plurality of optical fiber alignment structures in the form of a plurality of optical fiber alignment holes 460 integrally formed in the second monolithic block of fused silica 403b, each optical fiber alignment hole 460 configured to engage a corresponding optical fiber 406 such that the end 407 of the corresponding optical fiber 406 is aligned with, but separated from, a corresponding one of the secondary microlenses 450. Also, although not shown in FIG. 5 , the optical fiber connector ferrule 492 has one or more passages or channels extending between the surface of the optical fiber connector ferrule 492 and each optical fiber alignment hole 460 to facilitate the flow of an adhesive fluid, such as epoxy, for the attachment of each optical fiber 406 in the corresponding optical fiber alignment hole 460.

[0185] The fiber optic connector ferrule 492 further has one or more pins 470, each configured to be received in a corresponding one of the holes 446 of the primary light beam management element array component 490 for passive alignment of the primary light beam management element array component 490 and the fiber optic connector ferrule 492. Specifically, the alignment holes 446 of the primary light beam management element array component 490 are positioned relative to the primary microlenses 440 of the primary light beam management element array component 490, and the pins 470 of the fiber optic connector ferrule 492 are positioned relative to the secondary microlenses 450 of the fiber optic connector ferrule 492, ensuring that the primary microlenses 440 of the primary light beam management element array component 490 and the secondary microlenses 450 of the fiber optic connector ferrule 492 are passively aligned when the pins 470 of the fiber optic connector ferrule 492 are inserted into the alignment holes 446 of the primary light beam management element array component 490. Pins 470 may be integrally formed in the second monolithic block of fused silica 403b. Alternatively, the second monolithic block of fused silica 403b may define a plurality of holes, each hole configured to receive a corresponding one of pins 470.

[0186] Each of the primary microlenses 440 of the primary optical beam management element array component 490 is aligned in the X and Y directions with a corresponding grating coupler element 427 of the photonic integrated circuit 404, and the bottom surface 442 of the primary optical beam management element array component 490 is attached, for example by being bonded, to the top surface 469 of the photonic integrated circuit 404.

[0187] Each optical fiber 406 of the plurality of optical fibers is attached, for example by being bonded, to a corresponding one of the optical fiber alignment holes 460 so that the end 407 of the corresponding optical fiber 406 is aligned with, but separated from, a corresponding one of the secondary microlenses 450.

[0188] One or more pins 470 of the optical fiber connector ferrule 492 are then inserted into one or more alignment holes 446 of the primary light beam management element array component 490, and a surface 452 of the optical fiber connector ferrule 492 is brought into engagement with a surface 453 of the primary light beam management element array component 490 to passively align the primary microlenses 440 of the primary light beam management element array component 490 and the secondary microlenses 450 of the optical fiber connector ferrule 492.

[0189] It should be understood that adjacent primary microlenses 440 are configured differently to direct light along non-parallel optical paths 464 a, 464 b, while every other primary microlens 440 is configured similarly to direct light along parallel optical paths. Each optical path 464 a extends in a plane parallel to the XZ plane from the bottom surface 442 of the primary light beam management element array component 490, through a corresponding one of the primary microlenses 440, the first reflective surface 495 a, and a corresponding one of the secondary microlenses 450, to one end 407 a of the optical fiber alignment hole 460. In contrast, each optical path 464b extends from the lower surface 442 of the primary light beam management element array component 490, through a corresponding one of the primary microlenses 440, the second reflective surface 495b, and a corresponding one of the secondary microlenses 450, to one end 407b of one of the optical fiber alignment holes 460, with the ends 407a, 407b of the optical fiber alignment holes 460 aligned in a plane parallel to the XZ plane. As can be seen from FIG. 5 , each optical path 464a changes direction at the first reflective surface 495a of the first monolithic block of fused silica 403a, and each optical path 464b changes direction at the second reflective surface 495b of the first monolithic block of fused silica 403a. Additionally, as a result of the configuration of the primary microlenses 440, light can be coupled between the 1D array of grating coupler elements 427 and the 2D array of optical fibers 406, which are arranged along a direction parallel to the Y direction.

[0190] As can be seen from FIG. 5, the use of primary microlenses 440 and secondary microlenses 450 functions to form a 2D array of expanded and collimated light beams that transmit horizontally between primary light beam management element array component 490 and optical fiber connector ferrule 492, thereby relaxing the alignment tolerance required between primary light beam management element array component 490 and optical fiber connector ferrule 492 for a given optical coupling efficiency.

[0191] Each of the primary microlenses 440 may be defined independently of each of the other primary microlenses 440. This may allow each of the primary microlenses 440 to have a slightly different structure, for example, being at a different position (offset) relative to the corresponding optical path 464 a, 464 b, or having a different angle, curvature, etc. Similarly, each of the secondary microlenses 450 may be defined independently of each of the other secondary microlenses 450. This may allow each of the secondary microlenses 450 to have a slightly different structure, for example, being at a different position (offset) relative to the corresponding optical path 464 a, 464 b, or having a different angle, curvature, etc. Specifically, the configuration of the primary microlenses 440 and the secondary microlenses 450 may be selected to form a 2D array of collimated beams with the same or similar beam radii and orientations between the primary light beam management element array component 490 and the optical fiber connector ferrule 492.

[0192] From the foregoing, it will be appreciated that the optical interconnect device 402 functions to optically couple a 1D array of integrated optical waveguides 426 of a photonic integrated circuit 404 and a 2D array of optical fibers 406 in a manner more streamlined than prior art optical interconnect devices, thereby allowing high density photonic integrated circuit optical I / O to be more easily achieved compared to prior art optical interconnect devices. Furthermore, as a result of the one or more pins 470 of the fiber optic connector ferrule 492 and the one or more alignment holes 446 of the primary optical beam management element array component 490, one skilled in the art will appreciate that the fiber optic connector ferrule 492 and the primary optical beam management element array component 490 are configured to be detachable or connectable. The primary light beam management element array component 490 and the fiber optic connector ferrule 492 may also have one or more mechanical features (not shown), such as one or more arms, clips, or clamps, for removably attaching the primary light beam management element array component 490 and the fiber optic connector ferrule 492, for example, for connecting, latching, or holding the primary light beam management element array component 490 and the fiber optic connector ferrule 492 together.

[0193] 6, there is shown a schematic side view of a sixth optical interconnect apparatus, generally designated 502, for transmitting light between a photonic integrated circuit, such as a silicon photonic integrated circuit 504, and a plurality of optical fibers 506. The optical interconnect apparatus 502 comprises a primary optical beam management element array component 590 and a separately formed optical fiber connector ferrule 592. As will be described in more detail below, the primary optical beam management element array component 590 is attached to the photonic integrated circuit 504, and the plurality of optical fibers 506 are attached to the optical fiber connector ferrule 592.

[0194] 6, the photonic integrated circuit 504 has a step 505 formed at an edge of the photonic integrated circuit 504, the step 505 having a ledge 505a and a facet 505b. The photonic integrated circuit 504 further has a plurality of integrated optical waveguides 526 that terminate at the facet 505b of the photonic integrated circuit 504, thereby defining a plurality of optical elements in the form of a plurality of optical ports 527 arranged in a 1D array along the Y direction at the facet 505b of the photonic integrated circuit 504. The plurality of optical ports 527 of the photonic integrated circuit 504 are separated by a predetermined distance from an upper reference surface 569 of the photonic integrated circuit 504. The ledge 505a and / or facet 505b of the photonic integrated circuit 504 may be formed by etching.

[0195] The primary light beam management element array component 590 has a first monolithic block of material, such as a first monolithic block of fused silica 503a, that defines a step formed at an edge of the primary light beam management element array component 590, the step having a ledge 541a and a facet 541b. The ledge 541a and / or facet 541b of the primary light beam management element array component 590 may be formed by etching.

[0196] The primary optical beam management element array component 590 has a plurality of primary optical beam management elements in the form of a plurality of primary 2D curved TIR micromirrors 540 integrally formed in a first monolithic block of fused silica 503 a. The plurality of primary 2D curved TIR micromirrors 540 are arranged in a uniform 1D array and have a spatial arrangement that matches the spatial arrangement of the optical ports 527 of the photonic integrated circuit 504.

[0197] The plurality of primary 2D curved TIR micromirrors 540 and ledge 541 a of the primary light beam management element array component 590 are separated in the Z direction by a predetermined distance that corresponds to the predetermined distance that the plurality of optical ports 527 of the photonic integrated circuit 504 and the upper reference surface 569 of the photonic integrated circuit 504 are separated in the Z direction. Additionally, the step of the primary light beam management element array component 590 is configured to allow engagement between the ledge 541 a of the primary light beam management element array component 590 and the upper reference surface 569 of the photonic integrated circuit 504 without the ledge 505 a of the photonic integrated circuit 504 engaging the lower surface 542 of the primary light beam management element array component 590. As a result, engagement between the ledge 541a of the primary light beam management element array component 590 and the upper reference surface 569 of the photonic integrated circuit 504 results in alignment in the Z direction of the multiple primary 2D curved TIR micromirrors 540 of the primary light beam management element array component 590 with the ends or optical ports 527 of the photonic integrated circuit 504.

[0198] The primary light beam management element array component 590 also includes one or more fiducial markers (not shown) mounted on the ledge 541 a of the primary light beam management element array component 590, each of which is configured for alignment with one or more corresponding fiducial markers (not shown) mounted on the upper reference surface 569 of the photonic integrated circuit 504 for X and Y alignment of the primary light beam management element array component 590 and the photonic integrated circuit 504.

[0199] The primary light beam management element array component 590 also has reflectors in the form of a first flat reflective surface 595a of a first monolithic block of fused silica 503a and a second flat reflective surface 595b of the first monolithic block of fused silica 503a.

[0200] The primary light beam management element array component 590 also has one or more alignment features in the form of one or more alignment holes 546 integrally formed in the first monolithic block of fused silica 503 a for use in aligning the primary light beam management element array component 590 and the optical fiber connector ferrule 592.

[0201] Fiber optic connector ferrule 592 has a second monolithic block of material, such as a second monolithic block of fused silica 503b, and a plurality of secondary optical beam management elements in the form of a plurality of secondary microlenses 550 integrally formed on a surface 552 of second monolithic block of fused silica 503b. Secondary microlenses 550 are arranged in a uniform 2D array.

[0202] Fiber optic connector ferrule 592 further includes a plurality of optical fiber alignment structures in the form of a plurality of optical fiber alignment holes 560 integrally formed in second monolithic block of fused silica 503b, each optical fiber alignment hole 560 configured to engage a corresponding optical fiber 506 such that an end 507 of the corresponding optical fiber 506 is aligned with, but separated from, a corresponding one of secondary microlenses 550. Also, although not shown in FIG. 6 , fiber optic connector ferrule 592 includes one or more passages or channels extending between a surface of fiber optic connector ferrule 592 and each optical fiber alignment hole 560 to facilitate the flow of an adhesive fluid, such as epoxy, for attachment of each optical fiber 506 in the corresponding optical fiber alignment hole 560.

[0203] The fiber optic connector ferrule 592 further has one or more pins 570, each configured to be received in a corresponding one of the holes 546 of the primary light beam management element array component 590 for passive alignment of the primary light beam management element array component 590 and the fiber optic connector ferrule 592. Specifically, the alignment holes 546 of the primary light beam management element array component 590 are positioned relative to the primary 2D curved TIR micro mirror 540 of the primary light beam management element array component 590, such that the pins 570 of the fiber optic connector ferrule 592 are positioned relative to the secondary micro lenses 550 of the fiber optic connector ferrule 592, ensuring that the primary 2D curved TIR micro mirror 540 of the primary light beam management element array component 590 and the secondary micro lenses 550 of the fiber optic connector ferrule 592 are passively aligned when the pins 570 of the fiber optic connector ferrule 592 are inserted into the alignment holes 546 of the primary light beam management element array component 590. Pins 570 may be integrally formed in the second monolithic block of fused silica 503b. Alternatively, second monolithic block of fused silica 503b may define a plurality of holes, each hole configured to receive a corresponding one of pins 570.

[0204] During assembly, the ledge 541 a of the primary light beam management element array component 590 is brought into engagement with the upper reference surface 569 of the photonic integrated circuit 504 for Z-direction alignment of the multiple primary 2D curved TIR micromirrors 540 of the primary light beam management element array component 590 with the ends of the optical ports 527 of the photonic integrated circuit 504.

[0205] Additionally, one or more fiducial markers (not shown) of the primary light beam management element array component 590 are aligned with one or more corresponding fiducial markers (not shown) located on the upper reference surface 569 of the photonic integrated circuit 504 for alignment of the primary light beam management element array component 590 and the photonic integrated circuit 504 in X and Y, such that each of the primary 2D curved TIR micromirrors 540 of the primary light beam management element array component 590 is aligned in the X and Y directions with an end or optical port 527 of a corresponding one of the integrated optical waveguides 526 of the photonic integrated circuit 504. Facet 541b of the primary light beam management element array component 590 is then attached, e.g., bonded, to facet 505b of the photonic integrated circuit 504.

[0206] Each optical fiber 506 of the plurality of optical fibers is attached, for example by being bonded, to a corresponding one of the optical fiber alignment holes 560 so that the end 507 of the corresponding optical fiber 506 is aligned with, but separated from, a corresponding one of the secondary microlenses 550.

[0207] One or more pins 570 of the optical fiber connector ferrule 592 are then inserted into one or more alignment holes 546 of the primary light beam management element array component 590, and a surface 552 of the optical fiber connector ferrule 592 is brought into engagement with a surface 553 of the primary light beam management element array component 590 to passively align the primary microlenses 540 of the primary light beam management element array component 490 and the secondary microlenses 550 of the optical fiber connector ferrule 592.

[0208] It should be understood that adjacent primary 2D curved TIR micromirrors 540 are configured differently to direct light along non-parallel optical paths 564 a, 564 b, while every other primary 2D curved TIR micromirror 540 is similarly configured to direct light along parallel optical paths. Each optical path 564 a extends in a plane parallel to the XZ plane from a facet 541 b of the primary light beam management element array component 590, through a corresponding one of the primary 2D curved TIR micromirrors 540, a first reflective surface 595 a, and a corresponding one of the secondary microlenses 550, to an end 507 a of one of the optical fiber alignment holes 560. In contrast, each optical path 564b extends from facet 541b of primary light beam management element array component 590, through a corresponding one of primary 2D curved TIR micromirrors 540, second reflective surface 595b, and a corresponding one of secondary microlenses 550, to one end 507b of optical fiber alignment hole 560, with ends 507a, 507b of optical fiber alignment hole 560 aligned in a plane parallel to the XZ plane. As can be seen from Figure 6, each optical path 564a changes direction at first reflective surface 595a of first monolithic block of fused silica 503a, and each optical path 564b changes direction at second reflective surface 595b of first monolithic block of fused silica 503a. Additionally, as a result of the configuration of the primary 2D curved TIR micromirrors 540, light can be coupled between a 1D array of integrated optical waveguide ends or ports 527 arranged along a direction parallel to the Y direction and a 2D array of optical fibers 506.

[0209] As can be seen from FIG. 6, the use of the primary 2D curved TIR micromirror 540 and secondary microlens 550 functions to form a 2D array of expanded and collimated light beams that transmit horizontally between the primary light beam management element array component 590 and the optical fiber connector ferrule 592, thereby relaxing the alignment tolerance required between the primary light beam management element array component 590 and the optical fiber connector ferrule 592 for a given optical coupling efficiency.

[0210] Each of the primary 2D curved TIR micromirrors 540 may be defined independently of each of the other primary 2D curved TIR micromirrors 540. This may allow each of the primary 2D curved TIR micromirrors 540 to have a slightly different structure, for example, being at a different position (offset) relative to the corresponding optical path 564 a, 564 b, or having a different angle, curvature, etc. Similarly, each of the secondary microlenses 550 may be defined independently of each of the other secondary microlenses 550. This may allow each of the secondary microlenses 550 to have a slightly different structure, for example, being at a different position (offset) relative to the corresponding optical path 564 a, 564 b, or having a different angle, curvature, etc. Specifically, the configuration of the primary 2D curved TIR micromirror 540 and secondary microlens 550 can be selected to form a 2D array of collimated beams with the same or similar beam radii and orientations between the primary optical beam management element array component 590 and the optical fiber connector ferrule 592.

[0211] From the foregoing, it will be appreciated that the optical interconnect device 502 functions to optically couple a 1D array of integrated optical waveguides 526 of a photonic integrated circuit 504 and a 2D array of optical fibers 506 in a simpler manner than prior art optical interconnect devices, thereby allowing high density photonic integrated circuit optical I / O to be more easily achieved compared to prior art optical interconnect devices. Furthermore, as a result of the one or more pins 570 of the fiber optic connector ferrule 592 and the one or more alignment holes 546 of the primary optical beam management element array component 590, one skilled in the art will appreciate that the fiber optic connector ferrule 592 and the primary optical beam management element array component 590 are configured to be detachable or connectable. The primary light beam management element array component 590 and the fiber optic connector ferrule 592 may also have one or more mechanical features (not shown), such as one or more arms, clips, or clamps, for removably attaching the primary light beam management element array component 590 and the fiber optic connector ferrule 592, for example, for connecting, latching, or holding the primary light beam management element array component 590 and the fiber optic connector ferrule 592 together.

[0212] 7, there is shown an optical fiber connector ferrule 692 for use in place of any of the optical fiber connector ferrules 292, 392, 492, 592 and for use with a plurality of optical fibers 606, each having a plurality of optical fiber cores 606a. The optical fiber connector ferrule 692 has a second monolithic block of material, such as a second monolithic block of fused silica 603b, and a plurality of secondary optical beam management elements in the form of a plurality of secondary microlenses 650 integrally formed on a surface 652 of the second monolithic block of fused silica 603b. The secondary microlenses 650 may be arranged in a staggered or uniform 2D array. The optical fiber connector ferrule 692 further has a plurality of optical fiber alignment structures in the form of a plurality of alignment holes 660 integrally formed in the second monolithic block of fused silica 603b, each fiber alignment hole 660 configured to receive an end section of a corresponding one of the optical fibers 606 such that each optical fiber core 606a at the end 607 of the corresponding optical fiber 606 is aligned with, but separated from, a corresponding one of the secondary microlenses 650.

[0213] The fiber optic connector ferrule 692 further includes alignment pins 670 for aligning the fiber optic connector ferrule 692 with the alignment holes 246, 446, 546 of the primary light beam management element array component 290, 490, 590 or with the alignment holes 398 of the reflector component 394. It should be understood that the fiber optic connector ferrule 692 is otherwise similar to the fiber optic connector ferrules 292, 392, 492, 592. The alignment pins 670 may be integrally formed in the second monolithic block of fused silica 603b. Alternatively, the second monolithic block of fused silica 603b defines a plurality of holes, each configured to receive a corresponding one of the alignment pins 670.

[0214] It should be understood that the formation of any one or more of the plurality of primary light beam management elements 40, 140, 240, 340, 440, 540, reflective surfaces 295, 395, 495a, 495b, 595a, 595b, plurality of secondary light beam management elements 50, 150, 250, 350, 450, 550, 650, and plurality of optical fiber alignment structures 60, 160, 260, 360, 460, 560, 660 may comprise the use of a laser, such as an ultrafast laser or a femtosecond laser, to inscribe a monolithic block of material in multiple regions to modify the material of the monolithic block in multiple regions. For example, the formation of any one or more of the plurality of primary light beam management elements 40, 140, 240, 340, 440, 540, the reflective surfaces 295, 395, 495a, 495b, 595a, 595b, the plurality of secondary light beam management elements 50, 150, 250, 350, 450, 550, 650, and the plurality of optical fiber alignment structures 60, 160, 260, 360, 460, 560, 660 may comprise the use of a laser, such as an ultrafast laser or a femtosecond laser, to inscribe a monolithic block of material in multiple regions to modify the refractive index of the material of the monolithic block in the multiple regions. Formation of any one or more of the plurality of primary light beam management elements 40, 140, 240, 340, 440, 540, reflective surfaces 295, 395, 495a, 495b, 595a, 595b, plurality of secondary light beam management elements 50, 150, 250, 350, 450, 550, 650, and plurality of optical fiber alignment structures 60, 160, 260, 360, 460, 560, 660 may comprise use of a laser to score the monolithic block of material in a plurality of regions to modify the chemical etchability of the material of the monolithic block in a plurality of regions and subsequently remove the modified monolithic block from the plurality of regions, for example by chemical etching.Formation of any one or more of the plurality of primary light beam management elements 40, 140, 240, 340, 440, 540, reflective surface 295, 395, 495a, 495b, 595a, 595b, plurality of secondary light beam management elements 50, 150, 250, 350, 450, 550, 650, and plurality of optical fiber alignment structures 60, 160, 260, 360, 460, 560, 660 may comprise use of a laser to score a monolithic block of material in multiple regions to remove material of the monolithic block in multiple regions, and the monolithic block of material may comprise a monolithic block of glass, such as a monolithic block of fused silica.

[0215] Those skilled in the art will appreciate that various modifications may be made to the above-described embodiments of the present disclosure without departing from the scope of the present invention, as defined by the appended claims. For example, while the fiber optic connector ferrule 192 of FIG. 2 includes a plurality of 2D curved TIR micromirrors 150, in an alternative embodiment of the fiber optic connector ferrule 192 of FIG. 2, the curved TIR micromirrors 150 may be replaced with 2D curved micromirrors formed on the lower surface 153 of a monolithic block of fused silica 103b. Although each of the photonic integrated circuits 4, 104, 204, 304, 404 has been described above as comprising a plurality of grating coupler elements 27, 127, 227, 327, 427 for coupling light to / from a plurality of integrated optical waveguides of the photonic integrated circuit 4, 104, 204, 304, 404 through the top surface 69, 169, 269, 369, 469 of the photonic integrated circuit 4, 104, 204, 304, other types of surface coupler elements may be used to couple light to / from a plurality of integrated optical waveguides of the photonic integrated circuit 4, 104, 204, 304, 404 through the top surface 69, 169, 269, 369, 469 of the photonic integrated circuit 4, 104, 204, 304, 404. For example, a 2D curved micromirror, such as a 2D TIR curved micromirror, may be used to couple light to / from multiple integrated optical waveguides of the photonic integrated circuit 4, 104, 204, 304, 404 through the top surface 69, 169, 269, 369, 469 of the photonic integrated circuit 4, 104, 204, 304, 404.

[0216] Although the plurality of primary light beam management elements 40, 140, 240, 340, the plurality of secondary light beam management elements 50, 150, 250, 350, 650, and the plurality of optical fiber alignment structures 60, 160, 260, 360, 660 have all been described above as being arranged in a staggered or 2D array, the plurality of primary light beam management elements 40, 140, 240, 340, the plurality of secondary light beam management elements 50, 150, 250, 350, 650 and the plurality of optical fiber alignment structures 60, 160, 260, 360, 660 may be arranged in a uniform 1D array in which the pitch of the primary light beam management elements 40, 140, 240, 340 is smaller than the pitch of the secondary light beam management elements 50, 150, 250, 350, 650 and the pitch of the plurality of optical fiber alignment structures 60, 160, 260, 360, 660. For example, in the embodiment of Figure 3, the slope of the reflective surface 295 and the orientation of the surface 253 of the primary light beam management element array component 290 may be selected accordingly. Similarly, in the embodiment of Figure 4, the slope of the reflective surface 395 and the orientation of the surface 353 of the reflector component 394 may be selected accordingly.

[0217] While the grating couplers 227 and primary microlenses 240 in the embodiment of Figure 3 are configured such that the optical path 264 is aligned at an acute angle to the vertical between the corresponding grating couplers 227 and reflecting surfaces 295, and such that the optical path 264 changes direction by approximately 120° at the reflecting surfaces 295, in a variation of the embodiment of Figure 3, the grating couplers 227 and primary microlenses 240 may be configured such that the optical path 264 is aligned vertically or nearly vertically between the corresponding grating couplers 227 and reflecting surfaces 295, and such that the optical path 264 may change direction at the reflecting surfaces 295 by an angle within the range of 90°.

[0218] In the embodiments of Figures 1A and 1B and Figure 2, the grating couplers 27, 127 and primary microlenses 40, 140 are configured so that the optical paths 64, 164 are aligned vertically between the grating couplers 27, 127 and the 2D curved TIR micromirrors 50, 150, and so that the optical paths 64, 164 change direction by approximately 90° at the 2D curved TIR micromirrors 50, 150; however, in variations of the embodiments of Figures 1A and 1B and Figure 2, the grating couplers 27, 127 and primary microlenses 40, 140 can be configured so that the optical paths 64, 164 are aligned at an acute angle to the vertical between the corresponding grating couplers 27, 127 and the 2D curved TIR micromirrors 50, 150, and so that the optical paths 64, 164 can change direction by an angle greater than 90° at the 2D curved TIR micromirrors 50, 150. Similarly, while the grating coupler 327 and primary microlens 340 in the embodiment of Figure 4 are configured such that the optical path 364 changes direction by approximately 90° at the reflecting surface 395 between the grating coupler 327 and the reflecting surface 395 so that the optical path 364 is aligned vertically, in a variation of the embodiment of Figure 3, the grating coupler 327 and primary microlens 340 may be configured such that the optical path 364 is aligned at an acute angle to the vertical between the corresponding grating coupler 327 and the reflecting surface 395 and may change direction by an angle greater than 90° at the reflecting surface 395.

[0219] 6 being separated by a predetermined distance from an upper reference surface 569 of the photonic integrated circuit 504, the multiple optical ports 527 of the photonic integrated circuit 504 may be separated by a predetermined distance from a ledge 505a of the photonic integrated circuit 504. Also, instead of the multiple primary 2D curved TIR micro mirrors 540 and ledge 542a of the primary optical beam management element array component 590 being separated in the Z direction by a predetermined distance that matches the predetermined distance by which the multiple optical ports 527 of the photonic integrated circuit 504 and the upper reference surface 569 of the photonic integrated circuit 504 are separated in the Z direction, the multiple primary 2D curved TIR micro mirrors 540 and the lower reference surface of the primary optical beam management element array component 590 may be separated in the Z direction by a predetermined distance that matches the predetermined distance by which the multiple optical ports 527 of the photonic integrated circuit 504 and the ledge 505a of the photonic integrated circuit 504 are separated in the Z direction. Additionally, the step of the primary light beam management element array component 590 may be configured to allow engagement between the ledge 505a of the photonic integrated circuit 504 and the lower reference surface of the primary light beam management element array component 590 without the ledge 542a of the primary light beam management element array component 590 engaging the photonic integrated circuit 504. Consequently, engagement between the ledge 505a of the photonic integrated circuit 504 and the lower reference surface of the primary light beam management element array component 590 results in alignment of the plurality of primary 2D curved TIR micromirrors 540 of the primary light beam management element array component 590 with the end or optical port 527 of the photonic integrated circuit 504 in the Z direction.

[0220] Each feature disclosed or illustrated herein may be incorporated into any embodiment alone or in any suitable combination with any other feature disclosed or illustrated herein. In particular, those skilled in the art will understand that one or more of the features of the embodiments of the present disclosure described above with reference to the drawings may produce effects or provide advantages when used apart from one or more of the other features of the embodiments of the present disclosure, and that different combinations of features are possible apart from the specific combinations of features of the embodiments of the present disclosure described above.

[0221] Those skilled in the art will understand that in the preceding description and in the appended claims, terms of location such as "above," "along," "side," and the like refer to conceptual illustrations such as those shown in the accompanying drawings. These terms are used for ease of reference and are not intended to be limiting in nature. Thus, these terms should be understood to refer to objects when oriented as shown in the accompanying drawings.

[0222] The use of the term "comprising" when used in reference to a feature of an embodiment of the present disclosure does not exclude other features or steps. The use of the terms "a" or "an" when used in reference to a feature of an embodiment of the present disclosure does not exclude the possibility that the embodiment may have more than one such feature.

[0223] The use of any reference signs in the claims should not be construed as limiting the scope of the claims. (Other possible items) (Item 1) 1. An optical interconnect device used to transmit light between a photonic integrated circuit and a plurality of optical fibers, the optical interconnect device comprising: a plurality of primary light beam management elements, each of the primary light beam management elements configured to collimate light received from or focus light onto a corresponding optical element of the photonic integrated circuit; a plurality of secondary light beam management elements, each of the secondary light beam management elements configured to focus light onto or collimate light received from an end of a corresponding one of the plurality of optical fibers; a plurality of optical fiber alignment structures, each optical fiber alignment structure configured to receive a corresponding optical fiber such that the end of the corresponding optical fiber is aligned with, but separated from, a corresponding one of the secondary light beam management elements; and the optical interconnect device defining a plurality of optical paths, each optical path extending from a surface of the optical interconnect device through a corresponding one of the primary light beam management elements and a corresponding one of the secondary light beam management elements to an end of a corresponding one of the optical fiber alignment structures. (Item 2) Item 1, wherein one or more of the primary optical beam management elements and / or the secondary optical beam management elements comprise a microlens; a waveguide structure such as a segmented waveguide or a tapered waveguide; a gradient index (GRIN) lens; or a 2D curved micromirror such as a 2D curved total internal reflection (TIR) ​​micromirror. (Item 3) 3. The optical interconnect device of claim 1 or 2, wherein the primary optical beam management elements are arranged in a 1D array, such as a regular 1D array; the primary optical beam management elements have a staggered arrangement; or the primary optical beam management elements are arranged in a 2D array, such as a regular 2D array. (Item 4) 4. The optical interconnection device of any one of items 1 to 3, wherein the optical fiber alignment structures are arranged in a 1D array, such as a regular 1D array; the optical fiber alignment structures have a staggered arrangement; or the optical fiber alignment structures are arranged in a 2D array, such as a regular 2D array. (Item 5) 5. The optical interconnect device of any one of items 1 to 4, wherein two or more of the primary optical beam management elements and the corresponding two or more of the optical fiber alignment structures are arranged in the same plane. (Item 6) Item 6. The optical interconnect device of any one of items 1 to 5, wherein adjacent primary optical beam management elements are configured to direct light along parallel optical paths. (Item 7) 5. The optical interconnection device of any one of items 1 to 4, wherein adjacent primary light beam management elements are configured to direct light along non-parallel optical paths and / or every other primary light beam management element is configured to direct light along parallel optical paths. (Item 8) Item 8. The optical interconnect device of item 7, wherein two or more of the primary optical beam management elements and the corresponding two or more of the optical fiber alignment structures are arranged in different planes, for example, two or more of the primary optical beam management elements are arranged in a first plane and the corresponding two or more of the optical fiber alignment structures are arranged in a second plane orthogonal to the first plane. (Item 9) 9. The optical interconnection device of claim 7 or 8, wherein two or more of the primary optical beam management elements are arranged in a 1D array, such as a regular 1D array extending along a first axis, and the corresponding two or more optical fiber alignment structures are arranged in a 1D array, such as a regular 1D array extending along a second axis orthogonal to the first axis. (Item 10) 10. The optical interconnection device of any one of items 1 to 9, wherein the photonic integrated circuit comprises a plurality of integrated optical waveguides, each optical element of the photonic integrated circuit comprises a surface coupler element, such as a grating coupler element, or a 2D curved TIR micromirror, for directing light to or from a corresponding one of the plurality of integrated optical waveguides through a surface of the photonic integrated circuit, and each of the primary optical beam management elements is configured to focus light onto a corresponding one of the surface coupler elements of the photonic integrated circuit or to collimate light received from a corresponding one of the surface coupler elements of the photonic integrated circuit. (Item 11) Item 10. The optical interconnect device of any one of items 1 to 9, wherein the photonic integrated circuit comprises a step formed at an edge of the photonic integrated circuit, the step having a ledge and a facet, each integrated optical waveguide of the photonic integrated circuit terminating at a facet of the photonic integrated circuit to define a corresponding optical port at the facet of the photonic integrated circuit, each optical element of the photonic integrated circuit comprising a corresponding one of the optical ports, the optical interconnect device comprising a step formed at an edge of the optical interconnect device, the step having a ledge and a facet, the facet of the optical interconnect device configured to be located between the optical port of the photonic integrated circuit and the plurality of primary optical beam management elements, each of the primary optical beam management elements configured to focus light onto a corresponding one of the optical ports or collimate light received from a corresponding one of the optical ports. (Item 12) Item 12. The optical interconnect device of item 11, wherein the facet of the photonic integrated circuit is formed by etching; the facet of the optical interconnect device is formed by etching; the ledge of the photonic integrated circuit is formed by etching; and the ledge of the optical interconnect device is formed by etching. (Item 13) Item 13. The optical interconnect device of item 11 or 12, wherein the plurality of primary optical beam management elements and the ledge of the optical interconnect device are separated in a dimension by a predetermined distance that corresponds to the predetermined distance by which the plurality of optical ports of the photonic integrated circuit and a reference surface of the photonic integrated circuit are separated in the same dimension, and the step of the optical interconnect device is configured to allow engagement between the ledge of the optical interconnect device and the reference surface of the photonic integrated circuit without the ledge of the photonic integrated circuit engaging the optical interconnect device. (Item 14) 13. The optical interconnect device of items 11 to 12, wherein the plurality of primary optical beam management elements of the optical interconnect device and the reference surface of the optical interconnect device are separated in a dimension by a predetermined distance that corresponds to the predetermined distance by which the plurality of optical ports of the photonic integrated circuit and the ledge of the photonic integrated circuit are separated in the same dimension, and the step of the optical interconnect device is configured to allow engagement between the reference surface of the optical interconnect device and the ledge of the photonic integrated circuit without the ledge of the optical interconnect device engaging the photonic integrated circuit. (Item 15) 15. The optical interconnect device of any one of items 1 to 14, wherein the optical interconnect device comprises an optical interconnect component having a monolithic block of material such as glass, e.g., a monolithic block of fused silica, wherein the plurality of primary optical beam management elements, the plurality of secondary optical beam management elements, and the plurality of optical fiber alignment structures are integrally formed in the monolithic block of material, and optionally the optical interconnect device comprises one or more alignment features, each alignment feature integrally formed in the monolithic block of material, and each alignment feature configured to engage a corresponding complementary alignment feature of the photonic integrated circuit for passive alignment of the optical interconnect component and the photonic integrated circuit. (Item 16) 15. The optical interconnection device of any one of claims 1 to 14, comprising: a primary light beam management element array component; and an optical fiber connector ferrule, wherein the primary light beam management element array component comprises a first monolithic block of material such as glass, e.g., a first monolithic block of fused silica, and the plurality of primary light beam management elements are integrally formed in the first monolithic block of material; the optical fiber connector ferrule comprises a second monolithic block of material such as glass, e.g., a second monolithic block of fused silica, and the plurality of secondary light beam management elements and the plurality of optical fiber alignment structures are integrally formed in the second monolithic block of material; and optionally the primary light beam management element array component and the optical fiber connector ferrule have one or more complementary inter-engaging alignment features for passive alignment of the primary light beam management element array component and the optical fiber connector ferrule. (Item 17) 15. The optical interconnect device of any one of claims 1 to 14, comprising: a reflective primary light beam management element array component; and an optical fiber connector ferrule, wherein the reflective primary light beam management element array component has a first monolithic block of material such as glass, e.g., a first monolithic block of fused silica, the first monolithic block of material defining the plurality of primary light beam management elements and a reflector, each optical path changing direction at the reflector; and the optical fiber connector ferrule has a second monolithic block of material such as glass, e.g., a second monolithic block of fused silica, the plurality of secondary light beam management elements and the plurality of optical fiber alignment structures being integrally formed in the second monolithic block of material. (Item 18) Item 18. The optical interconnect device of item 17, wherein the reflective primary light beam management element array component comprises one or more alignment features, each alignment feature of the reflective primary light beam management element array component being integrally formed in the first monolithic block of material, and each alignment feature configured to engage with a corresponding complementary alignment feature of the photonic integrated circuit for passive alignment of the reflective primary light beam management element array component and the photonic integrated circuit. (Item 19) Item 19. The optical interconnect device of item 17 or 18, wherein the reflective primary light beam management element array component and the optical fiber connector ferrule have one or more complementary inter-engaging alignment features for passive alignment of the reflective primary light beam management element array component and the optical fiber connector ferrule. (Item 20) Item 15. The optical interconnect device of any one of items 1 to 14, comprising: a primary light beam management element array component; a reflector component defining a reflector, each optical path changing direction at the reflector; and an optical fiber connector ferrule, wherein the primary light beam management element array component comprises a first monolithic block of material such as glass, e.g., a first monolithic block of fused silica, and the plurality of primary light beam management elements are integrally formed in the first monolithic block of material; the optical fiber connector ferrule comprises a second monolithic block of material such as glass, e.g., a second monolithic block of fused silica, and the plurality of secondary light beam management elements and the plurality of optical fiber alignment structures are integrally formed in the second monolithic block of material; and the reflector component comprises a third monolithic block of material such as glass, e.g., a third monolithic block of fused silica, and the reflector is integrally formed in the third monolithic block of material. (Item 21) 21. The optical interconnect device of claim 20, wherein the primary light beam management element array component and the reflector component have one or more complementary inter-engaging alignment features for passive alignment of the primary light beam management element array component and the reflector component. (Item 22) 22. The optical interconnect device of claim 20 or 21, wherein the secondary light beam management element array component and the reflector component have one or more complementary inter-engaging alignment features for passive alignment of the secondary light beam management element array component and the reflector component. (Item 23) 23. An optical system comprising the optical interconnect device of any one of items 1 to 22, a photonic integrated circuit, and a plurality of optical fibers, wherein the photonic integrated circuit and the optical interconnect device are attached, for example, by being coupled, to corresponding optical fiber alignment structures of the optical interconnect device, and each optical fiber is attached, for example, by being coupled, to a corresponding optical fiber alignment structure of the optical interconnect device. (Item 24) Item 24. The optical system of item 23, wherein the plurality of optical fibers comprises a 1D array of optical fibers, such as a regular 1D array of optical fibers, for example a regular 1D array of optical fibers having a pitch of 80 μm or greater; a staggered arrangement of optical fibers; or a 2D array of optical fibers, such as a regular 2D array of optical fibers. (Item 25) 25. The optical system of claim 23 or 24, wherein each optical fiber comprises a plurality of optical fiber cores, and each optical fiber alignment structure is configured to engage with a corresponding optical fiber such that an end of each optical fiber core of the corresponding optical fiber is aligned with, but separated from, a corresponding one of the secondary optical beam management elements.

Claims

1. An optical interconnection device, the optical interconnection device comprising: a plurality of primary light beam management elements, each of the plurality of primary light beam management elements configured to collimate light received from or focus light onto a corresponding optical element of a plurality of optical elements of a photonic integrated circuit; a plurality of secondary light beam management elements, each of the plurality of secondary light beam management elements configured to focus light onto an end of a corresponding one of a plurality of optical fibers or to collimate light received from an end of a corresponding one of the plurality of optical fibers; a plurality of optical fiber alignment structures, each of the plurality of optical fiber alignment structures configured to receive a corresponding optical fiber such that an end of the corresponding optical fiber is aligned with, but separated from, a corresponding one of the plurality of secondary optical beam management elements, the optical interconnect device defining a plurality of optical paths, each of the plurality of optical paths extending from a surface of the optical interconnect device through a corresponding one of the plurality of primary optical beam management elements and a corresponding one of the plurality of secondary optical beam management elements to an end of a corresponding one of the plurality of optical fiber alignment structures; Equipped with the optical interconnect device comprises an optical interconnect component including a monolithic block, the monolithic block including the plurality of primary light beam management elements, the plurality of secondary light beam management elements, and the plurality of optical fiber alignment structures; The plurality of secondary optical beam management elements comprise 2D curved micromirrors formed on the inclined surfaces of the monolithic block. Optical interconnection device.

2. An optical interconnection device, comprising: a plurality of primary light beam management elements, each of the plurality of primary light beam management elements configured to collimate light received from or focus light onto a corresponding optical element of a plurality of optical elements of a photonic integrated circuit; a plurality of secondary light beam management elements, each of the plurality of secondary light beam management elements configured to focus light onto an end of a corresponding one of a plurality of optical fibers or to collimate light received from an end of a corresponding one of the plurality of optical fibers; a plurality of optical fiber alignment structures, each of the plurality of optical fiber alignment structures configured to receive a corresponding optical fiber such that an end of the corresponding optical fiber is aligned with but separated from a corresponding one of the plurality of secondary optical beam management elements, the optical interconnect device defining a plurality of optical paths, each of the plurality of optical paths extending from a surface of the optical interconnect device through a corresponding one of the plurality of primary optical beam management elements and a corresponding one of the plurality of secondary optical beam management elements to an end of a corresponding one of the plurality of optical fiber alignment structures; a primary light beam management element array component, the primary light beam management element array component comprising a first monolithic block, the first monolithic block comprising the plurality of primary light beam management elements; and an optical fiber connector ferrule, the optical fiber connector ferrule including a second monolithic block, the second monolithic block including the plurality of secondary optical beam management elements and the plurality of optical fiber alignment structures; Equipped with The plurality of secondary optical beam management elements include 2D curved micromirrors formed on the inclined surfaces of the second monolithic block. Optical interconnection device.

3. 3. The optical interconnect device of claim 1, further comprising a photonic integrated circuit including a plurality of integrated optical waveguides, wherein each of the plurality of optical elements of the photonic integrated circuit comprises a surface coupler element for directing light to or from a corresponding one of the plurality of integrated optical waveguides through a surface of the photonic integrated circuit, and wherein each of the plurality of primary optical beam management elements is configured to focus light onto a corresponding one of the plurality of surface coupler elements or to collimate light received from a corresponding one of the plurality of surface coupler elements.

4. one or more of the plurality of primary light beam management elements Microlenses, a gradient index (GRIN) lens, or 2D curved micromirror, 3. The optical interconnection device of claim 1.

5. 3. The optical interconnect device of claim 1, wherein one or more of the plurality of primary optical beam management elements or one or more of the plurality of secondary optical beam management elements comprises a waveguide.

6. 3. The optical interconnect device of claim 1, wherein the plurality of primary optical beam management elements are arranged in one of a 1D array, a staggered array, or a 2D array.

7. 3. The optical interconnect device of claim 1, wherein the plurality of optical fiber alignment structures are arranged in one of a 1D array, a staggered array, or a 2D array.

8. 3. The optical interconnect device of claim 1, wherein two or more of the plurality of primary optical beam management elements are arranged in a plane, and two or more of the corresponding plurality of optical fiber alignment structures are arranged in the plane.

9. 3. The optical interconnect device of claim 1 or 2, wherein adjacent primary optical beam management elements direct light along parallel optical paths.

10. 3. The optical interconnect device of claim 1, wherein two or more of the plurality of primary optical beam management elements are arranged in a 1D array and two or more of the corresponding plurality of optical fiber alignment structures are arranged in a 1D array.

11. An optical interconnection device as described in claim 1, wherein the optical interconnection component has one or more protrusions or projections on the underside of the monolithic block configured to engage with recesses formed in the upper surface of the photonic integrated circuit.

12. The optical interconnection device of claim 2, wherein the optical fiber connector ferrule has one or more pins received in holes in the primary optical beam management element array component.

13. 3. An optical system comprising the optical interconnect device of claim 1 or 2, a photonic integrated circuit, and a plurality of optical fibers, wherein the photonic integrated circuit is attached to the optical interconnect device, and each of the plurality of optical fibers is attached to a corresponding optical fiber alignment structure of the optical interconnect device.

14. The plurality of optical fibers 1D array of optical fibers, Staggered optical fiber arrangement, or 2D array of optical fibers 14. The optical system of claim 13.

15. 14. The optical system of claim 13, wherein each of the plurality of optical fibers comprises a plurality of optical fiber cores, and each of the plurality of optical fiber alignment structures is for engaging a corresponding optical fiber such that an end of each of the plurality of optical fiber cores of the corresponding optical fiber is aligned with but separated from a corresponding one of the plurality of secondary optical beam management elements.

Images