Gas diffusion plate detection method, electronic equipment and gas diffusion plate detection device

Abstract

To provide a gas diffusion plate detecting method that accurately predicts the use life of a gas diffusion plate, reduces production costs, and improves production efficiency and electronic equipment therefor, and a gas diffusion plate detection device.SOLUTION: A gas diffusion plate detection method includes: acquiring image data and contour data on a gas diffusion plate to be detected; detecting the hole diameter and surface flatness of the gas diffusion plate to be detected; and estimating the use life of the gas diffusion plate to be detected based thereupon.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present application relates to the field of semiconductor manufacturing, and more particularly to a gas diffusion plate detection method and an electronic device and gas diffusion plate detection device thereof. [Background technology]

[0002] Gas dispersion plates (GDPs) are used in plasma etching recipes to disperse gases, and although post-etch by-products are removed using a vacuum system, some of the by-products still deposit on the GDP, causing changes in the hole morphology and surface flatness of the GDP and ultimately affecting the etching uniformity of the wafer. To address this issue, a purge operation is performed during the recipe, introducing argon gas and a corrosive fluorine-containing gas to remove the by-products adhering to the GDP surface.

[0003] However, the gas used in the purging process also reacts with aluminum, the main component of GDPs, to form aluminum fluoride, which accumulates around the holes in the GDPs. Therefore, to ensure production quality, GDPs must be replaced periodically. Currently, the industry standard for GDP replacement is to replace GDPs when they reach a predetermined number of uses or a predetermined usage time. This type of GDP replacement method, based on fixed criteria, cannot flexibly accommodate different manufacturing process requirements and manufacturing needs, leading to increased manufacturing costs. Summary of the Invention [Problem to be solved by the invention]

[0004] In view of the above-mentioned drawbacks of the prior art, the present application provides a gas diffusion plate detection method, electronic equipment and gas diffusion plate detection device that can accurately predict the service life of a gas diffusion plate, reduce production costs and improve production efficiency. [Means for solving the problem]

[0005] According to a first aspect of an embodiment of the present application, there is provided a gas diffusion plate detection method, comprising: acquiring image data and contour data of a gas diffusion plate to be detected, the gas diffusion plate having a plurality of holes; detecting the image data to obtain a diameter of each hole of the gas diffusion plate to be detected, and detecting the contour data to obtain a surface flatness of the gas diffusion plate to be detected; and obtaining a detection result of a service life of the gas diffusion plate to be detected based on the diameter of each hole and the surface flatness.

[0006] Alternatively, the image data of the gas diffusion plate to be detected may be obtained by defining a plurality of target areas on the gas diffusion plate to be detected, using an image scanning device to capture each area image data of each target area on the gas diffusion plate to be detected, stitching together each area image data corresponding to each target area to obtain full image data of the gas diffusion plate to be detected, and detecting the full image data to obtain the image data of the gas diffusion plate to be detected.

[0007] Optionally, detecting the image data and obtaining the diameter of each hole in the gas diffusion plate to be detected includes binarizing the image data of the gas diffusion plate to be detected to obtain binarized image data of the gas diffusion plate to be detected, and recognizing each pixel value of each pixel point in the binarized image data to obtain the diameter of each hole in the gas diffusion plate to be detected.

[0008] Optionally, recognizing each pixel value of each pixel point in the binary image data to obtain the diameter of each hole of the gas diffusion plate to be detected includes recognizing the pixel value of each pixel point in the binary image data to determine each hole of the gas diffusion plate to be detected and the number of pixel points included in each hole, and obtaining the hole diameter of each hole of the gas diffusion plate to be detected according to the lens magnification of the camera of the image scanning device, the pixel width of each pixel point in the binary image data, and the number of pixel points included in each hole.

[0009] Optionally, obtaining a hole diameter of each hole of the gas diffusion plate to be detected according to the lens magnification of the camera of the image scanning device, the pixel width of each pixel point in the binary image data, and the number of pixel points included in each hole includes determining a hole area of ​​each hole according to the lens magnification of the camera of the image scanning device, the pixel width of each pixel point in the binary image data, and the number of pixel points included in each hole, and obtaining a hole diameter of each hole of the gas diffusion plate to be detected according to the hole area of ​​each hole and the number of pixel points included in each hole.

[0010] Optionally, obtaining a detection result of the service life of the gas diffusion plate to be detected based on the diameter of each hole described above includes defining a hole diameter threshold and a defective hole rate threshold, and determining each hole whose hole diameter is smaller than the hole diameter threshold as a defective hole according to the hole diameter of each hole and the hole diameter threshold; obtaining an actual defective hole rate of the gas diffusion plate to be detected according to the total number of holes in the gas diffusion plate to be detected and the total number of defective holes; and obtaining a detection result that the gas diffusion plate to be detected needs to be replaced if the actual defective hole rate of the gas diffusion plate to be detected exceeds the defective hole rate threshold.

[0011] Alternatively, the contour data of the gas diffusion plate to be detected may be obtained by using a probe to contact each surface of the gas diffusion plate to be detected to obtain the contour data of the gas diffusion plate to be detected, where the contour data includes three-dimensional contour data.

[0012] Optionally, detecting the contour data and obtaining the surface flatness of the gas diffusion plate to be detected includes determining a plurality of detection areas on the gas diffusion plate to be detected, the detection areas being arranged concentrically, obtaining a region height corresponding to each detection area on the gas diffusion plate to be detected based on the contour data, and obtaining the surface flatness of the gas diffusion plate to be detected according to the region height corresponding to each detection area on the gas diffusion plate to be detected.

[0013] Optionally, obtaining a detection result of the service life of the gas diffusion plate to be detected based on the above-mentioned surface flatness includes determining one detection area closest to the outer edge of the gas diffusion plate to be detected as a reference detection area, and determining each detection area that has not been determined as the reference detection area as a target detection area; comparing the area height of each target detection area with the area height of the reference detection area to obtain a difference in actual height of each target detection area from the reference detection area; and obtaining a detection result that the gas diffusion plate to be detected needs to be replaced or does not need to be replaced based on the difference in actual height of each target detection area from the reference detection area.

[0014] According to a second aspect of an embodiment of the present application, there is provided a gas diffusion plate detection device, including: an acquisition module for acquiring image data and contour data of the gas diffusion plate to be detected; a detection module for detecting the image data to obtain the diameter of each hole of the gas diffusion plate to be detected and detecting the contour data to obtain the surface flatness of the gas diffusion plate to be detected; and an analysis module for obtaining a detection result of the service life of the gas diffusion plate to be detected based on the diameter of each hole and the surface flatness.

[0015] According to a third aspect of an embodiment of the present application, there is provided an electronic device including a processor and a memory for storing a program, the program including instructions that, when executed by the processor, cause the processor to perform a method according to the first aspect.

[0016] According to a fourth aspect of an embodiment of the present application, there is provided a non-transitory computer-readable storage medium having stored thereon computer instructions for causing a computer to perform the gas diffusion plate detection method according to the first aspect. [Effects of the Invention]

[0017] Compared with the prior art, the gas diffusion plate detection mode in each embodiment of the present application obtains image data and contour data of the gas diffusion plate to detect the hole diameter and surface flatness of the gas diffusion plate, and based on this, the service life of the gas diffusion plate can be predicted, allowing personnel to plan maintenance and replacement strategies for the gas diffusion plate in advance, thereby effectively improving production efficiency and reducing production costs. [Brief explanation of the drawings]

[0018] The drawings of the present application, together with the description of the embodiments below, will make the features and other advantages of the present application more clearly understood.

[0019] [Figure 1] FIG. 1 is a process flowchart of a gas diffusion plate detection method according to an embodiment of the present invention. [Figure 2A-2B] 2A and 2B are schematic structural diagrams of an image scanning device for acquiring detection data of a gas diffusion plate to be detected. [Figure 2C] FIG. 2C is a schematic diagram showing how image data of each target area on the gas diffusion plate to be detected is acquired by an image scanning device. [Figure 3] FIG. 3 is a schematic diagram showing the distribution of each detection area on the gas diffusion plate to be detected. [Figure 4]FIG. 4 is a structural schematic diagram of a gas diffusion plate detection device according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0020] The following description will explain the technical content of the present application through specific examples with reference to the drawings. Those skilled in the art will easily understand other advantages and effects of the present application from the content disclosed in this specification. The present application can also be implemented or applied through other different specific examples. Various modifications and changes can be made to the details in this specification based on different perspectives and applications without departing from the spirit of the present application. In particular, the proportional relationships and relative positions of the elements in the drawings are for illustrative purposes only and do not represent the actual implementation of the present application.

[0021] Hereinafter, specific embodiments of the present application will be described in detail in conjunction with the drawings.

[0022] Gas diffusion plate detection method 1 is a process flow diagram of a gas diffusion plate detection method according to an embodiment of the present invention. As shown in the figure, this embodiment mainly includes steps 102, 104, and 106.

[0023] Step 102 is to obtain image data and contour data of the gas diffusion plate to be detected.

[0024] In some embodiments, an image scanning device 200 (such as that shown in FIGS. 2A-2B) may be used to acquire image data and contour data of the gas diffusion plate 202 to be detected.

[0025] Exemplarily, image data of the gas diffusion plate to be detected may be acquired in the following manner.

[0026] That is, the camera 204 of the image scanning device 200 may be driven to move along the movement axes 206a and 206b relative to the gas diffusion plate 202 to be detected, capture area image data of each target area (see target areas 202a to 202i in FIG. 2C) of the gas diffusion plate 202 to be detected, and the area image data of each target area may be stitched together to obtain full image data of the gas diffusion plate 202 to be detected, and the image data of the gas diffusion plate 202 to be detected can be obtained by detecting the full image data.

[0027] In some embodiments, the contour data of the gas diffusion plate to be detected may be obtained by using a probe to contact each surface of the gas diffusion plate 202 to be detected, thereby obtaining the contour data of the gas diffusion plate 202 to be detected.

[0028] In some embodiments, the contour data of the gas diffuser plate to be detected may include three-dimensional contour data.

[0029] Step 104 is to detect the image data to obtain the diameter of each hole of the gas diffusion plate to be detected, and detect the contour data to obtain the surface flatness of the gas diffusion plate to be detected.

[0030] In some embodiments, image data of the gas diffusion plate to be detected may be binarized to obtain binarized image data of the gas diffusion plate to be detected, and each pixel value of each pixel point in the binarized image data may be recognized to obtain the diameter of each hole in the gas diffusion plate to be detected.

[0031] Generally, the image data of the gas diffusion plate to be detected may be binarized to convert the color image into a black and white image, in which the hole portion of the gas diffusion plate to be detected is white, while the main portion of the gas diffusion plate to be detected is black, thereby recognizing each hole in the gas diffusion plate to be detected.

[0032] In some embodiments, the pixel value of each pixel point in the binary image data may be recognized to determine each hole of the gas diffusion plate to be detected and the number of pixel points contained in each hole, and the hole diameter of each hole of the gas diffusion plate to be detected may be obtained according to the lens magnification of the camera 204 of the image scanning device 200, the pixel width of each pixel point in the binary image data, and the number of pixel points contained in each hole.

[0033] For example, a formula within the program may be used to convert the true pixel width of each pixel according to a given lens magnification of the camera 204 .

[0034] In some embodiments, the hole area of ​​each hole may be determined according to the lens magnification of the camera 204 of the image scanning device 200, the pixel width of each pixel point in the binary image data, and the number of pixel points contained in each hole, and the hole diameter of each hole of the gas diffusion plate 202 to be detected may be determined according to the hole area of ​​each hole and the number of pixel points contained in each hole.

[0035] In some embodiments, a plurality of detection areas (see 302A to 302D in FIG. 3) on the gas diffusion plate 202 to be detected may be defined, the detection areas being arranged in a concentric pattern.

[0036] Based on the contour data, the area height of each detection area of ​​the gas diffusion plate 202 to be detected may be obtained, and the surface flatness of the gas diffusion plate to be detected may be obtained according to the area height of each detection area of ​​the gas diffusion plate 202 to be detected.

[0037] Step 106 is to obtain the detection result of the service life of the gas diffusion plate to be detected based on the diameter of each hole and the surface flatness.

[0038] In some embodiments, according to the hole diameter of each hole and the hole diameter threshold, each hole whose hole diameter is smaller than the hole diameter threshold is determined as a defective hole, and according to the total number of holes in the gas diffusion plate to be detected and the total number of defective holes, the actual defective hole rate of the gas diffusion plate to be detected can be obtained. Among them, if the actual defective hole rate of the gas diffusion plate to be detected exceeds the defective hole rate threshold, a service life detection result can be obtained that the gas diffusion plate to be detected needs to be replaced.

[0039] In some embodiments, one detection area closest to the outer edge of the gas diffusion plate 202 to be detected may be determined as a reference detection area, and each detection area not determined as a reference detection area may be determined as a target detection area. For example, in FIG. 3, detection area 302A may be determined as the reference detection area, and detection areas 302B, 302C, and 302D may be determined as target detection areas. The height of each target detection area may be compared with the height of the reference detection area to obtain the difference in actual height of each target area relative to the reference detection area. Based on the difference in actual height of each target area relative to the reference detection area, a service life detection result may be obtained, indicating whether the gas diffusion plate 202 to be detected needs to be replaced or not.

[0040] In summary, the gas diffusion plate detection method according to the embodiment of the present application captures image data and contour data of the gas diffusion plate to detect the hole diameter and surface flatness of the gas diffusion plate, and based on this, the service life of the gas diffusion plate can be predicted, allowing personnel to plan maintenance and replacement strategies for the gas diffusion plate in advance, thereby effectively improving production efficiency and reducing production costs.

[0041] Gas diffusion plate detection device 4 is a structural block diagram of a gas diffusion plate detection device according to an embodiment of the present invention. As shown in the figure, the gas diffusion plate detection device 400 according to this embodiment includes an acquisition module 402, a detection module 404, and an analysis module 406.

[0042] The acquisition module 402 is for acquiring image data and contour data of the gas diffusion plate to be detected.

[0043] The detection module 404 is for detecting the image data to obtain the diameter of each hole of the gas diffusion plate to be detected, and for detecting the contour data to obtain the surface flatness of the gas diffusion plate to be detected.

[0044] The analysis module 406 is for obtaining a detection result of the service life of the gas diffusion plate to be detected based on the diameter of each hole and the surface flatness.

[0045] The gas diffusion plate detection device 400 of this embodiment may be used to realize each corresponding step in the above gas diffusion plate detection method, but for detailed descriptions, please refer to the embodiments of the above method, and they will not be repeated here.

[0046] electronic equipment An embodiment of the present application further provides an electronic device including a processor and a memory for storing a program, the program including instructions that, when executed by the processor, cause the processor to perform each execution step in the embodiment of the gas diffusion plate detection method described above.

[0047] storage medium An embodiment of the present application further provides a non-transitory computer-readable storage medium having stored thereon computer instructions for causing a computer to perform each of the execution steps of the above-described method embodiment. The above "non-transitory" may also be referred to as non-transitory.

[0048] The above embodiments are merely illustrative of the principles and effects of the present application, and are not intended to limit the present application. Those skilled in the art may make modifications and variations to the above embodiments without departing from the spirit and scope of the present application. Therefore, the scope of protection of the present application should be governed by the claims of the present application.

Claims

1. 1. A gas diffusion plate detection method, comprising: acquiring image data and contour data of a gas diffusion plate to be detected, the gas diffusion plate having a plurality of holes; Detecting the image data to obtain a diameter of each hole of the gas diffusion plate to be detected, and detecting the contour data to obtain a surface flatness of the gas diffusion plate to be detected; obtaining a detection result of the service life of the gas diffusion plate to be detected based on the diameter of each hole and the surface flatness; A gas diffusion plate detection method comprising:

2. The image data of the gas diffusion plate to be detected is defining a plurality of target areas on the gas diffusion plate to be detected; utilizing an image scanning device to capture area image data of each target area of ​​the gas diffusion plate to be detected; stitching together the image data of each target area of ​​the gas diffusion plate to be detected to obtain full image data of the gas diffusion plate to be detected; detecting the full image data to obtain image data of the gas diffusion plate to be detected; The gas diffusion plate detection method according to claim 1 , wherein the signal is acquired in the following manner.

3. Detecting the image data to obtain the diameter of each hole of the gas diffusion plate to be detected includes: binarizing the image data of the gas diffusion plate to be detected to obtain binarized image data of the gas diffusion plate to be detected; Recognizing each pixel value of each pixel point in the binary image data to obtain the diameter of each hole of the gas diffusion plate to be detected; 3. The gas diffusion plate detection method of claim 2, comprising:

4. Recognizing each pixel value of each pixel point in the binarized image data and obtaining the diameter of each hole in the gas diffusion plate to be detected includes: Recognizing the pixel value of each pixel point in the binary image data to determine each hole of the gas diffusion plate to be detected and the number of pixel points included in each hole; obtaining a hole diameter of each hole of the gas diffusion plate to be detected according to the lens magnification of the camera of the image scanning device, the pixel width of each pixel point in the binarized image data, and the number of pixel points included in each hole; 4. The gas diffusion plate detection method of claim 3, comprising:

5. Obtaining a hole diameter of each hole of the gas diffusion plate to be detected according to the lens magnification of the camera of the image scanning device, the pixel width of each pixel point in the binarized image data, and the number of pixel points included in each hole, determining a hole area of ​​each hole according to the lens magnification of the camera of the image scanning device, the pixel width of each pixel point in the binarized image data, and the number of pixel points included in each hole; Obtaining a hole diameter of each hole of the gas diffusion plate to be detected according to the hole area of ​​each hole and the number of pixel points included in each hole; 5. The gas diffusion plate detection method of claim 4, comprising:

6. Obtaining a detection result of the service life of the gas diffusion plate to be detected based on the diameter of each hole as described above: Define a hole diameter threshold and a defective hole rate threshold, and determine each hole whose diameter is smaller than the hole diameter threshold as a defective hole according to the hole diameter of each hole and the hole diameter threshold; Obtaining an actual defective hole rate of the gas diffusion plate to be detected according to the total number of holes and the total number of defective holes in the gas diffusion plate to be detected; If the actual defective hole rate of the gas diffusion plate to be detected exceeds the defective hole rate threshold, a service life detection result is obtained that the gas diffusion plate to be detected needs to be replaced.

6. The gas diffusion plate detection method of claim 5, comprising:

7. The contour data of the gas diffusion plate to be detected is The method is to use a probe to contact each surface of the gas diffusion plate to be detected, thereby obtaining contour data of the gas diffusion plate to be detected; 2. The gas diffusion plate detection method according to claim 1, wherein the contour data includes three-dimensional contour data.

8. Detecting the contour data and obtaining the surface flatness of the gas diffusion plate to be detected includes: determining a plurality of concentrically arranged detection areas on the gas diffusion plate to be detected; acquiring a region height of each detection region of the gas diffusion plate to be detected based on the contour data; obtaining a surface flatness of the gas diffusion plate to be detected according to an area height corresponding to each detection area of ​​the gas diffusion plate to be detected; 10. The gas diffusion plate detection method of claim 1, comprising:

9. Obtaining a detection result of the service life of the gas diffusion plate to be detected based on the surface flatness described above includes: determining one detection area closest to the outer edge of the gas diffusion plate to be detected as a reference detection area, and determining each detection area that has not been determined as the reference detection area as a target detection area; comparing a region height of each target detection region with a region height of the reference detection region to obtain a difference in actual height of each target detection region relative to the reference detection region; and obtaining a service life detection result indicating whether the gas diffusion plate to be detected needs to be replaced or not based on the actual height difference of each target detection area relative to the reference detection area.

9. The gas diffusion plate detection method of claim 8, comprising:

10. A gas diffusion plate detection device, comprising: an acquisition module for acquiring image data and contour data of the gas diffusion plate to be detected; a detection module for detecting the image data to obtain a diameter of each hole of the gas diffusion plate to be detected, and detecting the contour data to obtain a surface flatness of the gas diffusion plate to be detected; an analysis module for obtaining a detection result of the service life of the gas diffusion plate to be detected based on the diameter of each hole and the surface flatness; 1. A gas diffusion plate detection device comprising:

11. a processor; and a memory for storing a program, The program includes instructions that, when executed by the processor, cause the processor to perform the gas diffusion plate detection method of claim 1 .

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