Substrate processing method

Abstract

To provide a substrate processing method that can appropriately process a substrate.SOLUTION: A substrate processing method processes a substrate W on which a pattern P is formed. The pattern P includes a plurality of convex portions A and a plurality of concave portions B. The substrate processing method includes a first coating step, a first curing step, and a first thermal decomposition step. In the first coating step, a first drying auxiliary liquid F1 is applied to the substrate W. The first drying auxiliary liquid F1 includes a thermosetting material and a solvent. In the first curing step, the first drying auxiliary liquid F1 on the substrate W is heated. In the first curing step, a first solidified film H1 is formed on the substrate W. In the first thermal decomposition step, the first solidified film H1 is thermally decomposed by heating the first solidified film H1. In the first thermal decomposition step, the substrate W is dried.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to a substrate processing method, and the substrate may be, for example, a semiconductor wafer, a liquid crystal display substrate, an organic EL (electroluminescence) substrate, an FPD (flat panel display) substrate, an optical display substrate, a magnetic disk substrate, an optical disk substrate, a magneto-optical disk substrate, a photomask substrate, or a solar cell substrate. [Background technology]

[0002] Patent Document 1 discloses a substrate processing method for processing a substrate. The substrate processing method of Patent Document 1 includes a processing step, a substitution step, and a removal step. The processing step supplies a rinse liquid to the substrate. The substitution step replaces the rinse liquid on the substrate with an organic solvent. The removal step removes the organic solvent from the substrate. The removal step dries the substrate. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2012-156561 A Summary of the Invention [Problem to be solved by the invention]

[0004] Even with conventional substrate processing methods, there are cases where a substrate cannot be processed appropriately. For example, when a substrate has a pattern, even with conventional substrate processing methods, the pattern may collapse. For example, when the pattern is fine, even with conventional substrate processing methods, there are cases where the collapse of the pattern cannot be sufficiently suppressed.

[0005] The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a substrate processing method that can process a substrate appropriately. [Means for solving the problem]

[0006] To achieve the above object, the present invention has the following configuration: That is, the present invention is a substrate processing method for processing a substrate on which a pattern including a plurality of convex portions and a plurality of concave portions is formed, the method comprising: a first applying step of applying a first drying auxiliary liquid containing a thermosetting material and a solvent to the substrate; a first curing step of heating the first drying auxiliary liquid on the substrate to form a first solidified film on the substrate; and a first pyrolysis step of heating the first solidified film to pyrolyze the first solidified film and dry the substrate, wherein in the first curing step, at least a portion of the first solidified film is formed above the pattern, the first solidified film is in contact with upper ends of the convex portions, and the entire first solidified film is located above bottoms of the concave portions.

[0007] The substrate processing method is for processing a substrate on which a pattern is formed. The pattern includes a plurality of convex portions and a plurality of concave portions. The substrate processing method includes a first application step and a first curing step. In the first application step, a first drying auxiliary liquid is applied to the substrate. The first drying auxiliary liquid includes a thermosetting material and a solvent. In the first curing step, the first drying auxiliary liquid on the substrate is heated. In the first curing step, a first solidified film is formed on the substrate. Therefore, the first solidified film is suitably formed on the substrate.

[0008] In the first curing step, at least a portion of the first solidified film is formed above the pattern. In the first curing step, the first solidified film is in contact with the upper ends of the convex portions. Therefore, the first solidified film can suitably support the convex portions.

[0009] In the first hardening step, the entire first solidified film is located above the bottom of the recess. Therefore, part of the protrusion is not in contact with the first solidified film. Therefore, in the first hardening step, the protrusion is less susceptible to the volume change of the first solidified film.

[0010] The substrate processing method includes a first pyrolysis step. In the first pyrolysis step, the first solidified film is heated to pyrolyze the first solidified film. In the first pyrolysis step, the substrate is dried. Therefore, the first solidified film is pyrolyzed suitably. Furthermore, in the first pyrolysis step, the protruding portions are less susceptible to the volume change of the first solidified film. Therefore, the first solidified film is suitably removed from the substrate. Therefore, the substrate is dried while the collapse of the protruding portions is suppressed. In other words, the substrate is dried while the pattern is protected.

[0011] As described above, according to the substrate processing method, the substrate is processed appropriately.

[0012] In the above-described substrate processing method, the width of the recess is preferably 10 nm or less. In the first curing step, it is very easy to position the entire first solidified film above the bottom of the recess. Therefore, it is even easier to process the substrate appropriately.

[0013] In the above-described substrate processing method, it is preferable that in the first curing step, the first solidified film bridges the upper ends of the convex portions, so that the first solidified film more suitably supports the convex portions.

[0014] In the above-described substrate processing method, in the first curing step, it is preferable that the entire first solidified film is located at a position equal to or higher than the upper end of the convex portion. The entire first solidified film is located above the concave portion. The first solidified film does not substantially have a portion located in the concave portion. Therefore, the convex portion is not substantially affected by the volume change of the first solidified film.

[0015] In the above-described substrate processing method, in the first curing step, the first solidified film preferably has a lower surface, the lower surface of the first solidified film contacting the upper ends of the convex portions and curving upwardly convexly between the adjacent convex portions. The shape of the lower surface of the first solidified film preferably prevents the first solidified film from entering the concave portions. Therefore, the convex portions are preferably protected from volumetric changes of the first solidified film. The convex portions are substantially not affected by volumetric changes of the first solidified film.

[0016] In the above-described substrate processing method, it is preferable that in the first curing step, the thermosetting material becomes a polymer, the first solidified film contains the polymer, and the polymer has a length greater than the width of the recess. The recess is too narrow for the thermosetting material to polymerize. Therefore, the thermosetting material is unlikely to polymerize in the recess. Therefore, it is difficult to form the first solidified film in the recess. Therefore, it is easier to position the entire first solidified film above the bottom of the recess in the first curing step. The entire first solidified film is preferably positioned above the bottom of the recess.

[0017] In the above-described substrate processing method, the heating temperature of the first drying assistant liquid is preferably adjusted based on the width of the recess in the first curing step. Regardless of the width of the recess, it is easier to position the entire first solidified film above the bottom of the recess in the first curing step. Regardless of the width of the recess, the entire first solidified film is preferably positioned above the bottom of the recess.

[0018] In the above-described substrate processing method, it is preferable that the first curing step heats the first drying assistant liquid at a first low temperature, and the first thermal decomposition step heats the first solidified film at a first high temperature higher than the first low temperature. The first low temperature is lower than the first high temperature. Therefore, thermal decomposition of the first solidified film is suitably prevented in the first curing step. Therefore, the first solidified film is suitably formed in the first curing step. Therefore, the first solidified film suitably supports the convex portion in the first curing step. The first high temperature is higher than the first low temperature. Therefore, the first solidified film is suitably thermally decomposed in the first thermal decomposition step.

[0019] In the above-described substrate processing method, it is preferable that the solvent in the first drying auxiliary liquid evaporates in the first curing step. Therefore, at the end of the first curing step, no solvent is present on the substrate. That is, no solvent is present on the substrate in the first pyrolysis step. Therefore, it is even easier to protect the convex portions in the first pyrolysis step.

[0020] In the above-described substrate processing method, it is preferable that in the first curing step, the first drying auxiliary liquid contains an unreacted portion that does not change into the first solidified film, and that in the first curing step, the unreacted portion of the first drying auxiliary liquid is removed from the substrate. Therefore, at the end of the first curing step, no first drying auxiliary liquid is present on the substrate. That is, in the first pyrolysis step, no first drying auxiliary liquid is present on the substrate. Therefore, it is even easier to protect the convex portions in the first pyrolysis step.

[0021] In the above-described substrate processing method, it is preferable that the substrate processing method further comprises a first processing liquid supplying step of supplying a processing liquid to the substrate before the first coating step, whereby the substrate is processed more appropriately.

[0022] In the above-described substrate processing method, it is preferable that the processing liquid is removed from the substrate in the first application step. Therefore, the processing liquid is not present on the substrate in the first curing step and the first pyrolysis step. Therefore, it is easier to protect the convex portions in the first curing step and the first pyrolysis step.

[0023] The present invention is a substrate processing method for processing a substrate on which a pattern including a plurality of convex portions and a plurality of concave portions is formed, the method comprising: a second application step of applying a second drying auxiliary liquid containing an ultraviolet-curable material to the substrate; a second curing step of irradiating the second drying auxiliary liquid on the substrate with ultraviolet light to form a second solidified film on the substrate; and a second pyrolysis step of heating the second solidified film to pyrolyze it and dry the substrate, wherein in the second curing step, at least a portion of the second solidified film is formed above the pattern, the second solidified film is in contact with the upper ends of the convex portions, and the entire second solidified film is located above the bottoms of the concave portions.

[0024] The substrate processing method is for processing a substrate on which a pattern is formed. The pattern includes a plurality of convex portions and a plurality of concave portions. The substrate processing method includes a second applying step and a second curing step. In the second applying step, a second drying auxiliary liquid is applied to the substrate. The second drying auxiliary liquid includes an ultraviolet-curable material. In the second curing step, ultraviolet light is irradiated onto the second drying auxiliary liquid on the substrate. In the second curing step, a second solidified film is formed on the substrate. Therefore, the second solidified film is suitably formed on the substrate.

[0025] In the second curing step, at least a portion of the second solidified film is formed above the pattern. In the second curing step, the second solidified film is in contact with the upper ends of the convex portions. Therefore, the second solidified film effectively supports the convex portions.

[0026] In the second curing step, the entire second solidified film is located above the bottom of the recess. Therefore, at least a portion of the protrusion is not in contact with the second solidified film. Therefore, in the second curing step, the protrusion is less susceptible to the volume change of the second solidified film.

[0027] The substrate processing method includes a second pyrolysis step. In the second pyrolysis step, the second solidified film is heated, thereby pyrolyzing the second solidified film. In the second pyrolysis step, the substrate is dried. Therefore, the second solidified film is pyrolyzed suitably. Furthermore, in the second pyrolysis step, the protruding portions are less susceptible to the volume change of the second solidified film. Therefore, the second solidified film is suitably removed from the substrate. Therefore, the substrate is dried while preventing the protruding portions from collapsing. In other words, the substrate is dried while the pattern is protected.

[0028] As described above, according to the substrate processing method, the substrate is processed appropriately.

[0029] In the above-described substrate processing method, the width of the recess is preferably 10 nm or less. In the second curing step, it is very easy to position the entire second solidified film above the bottom of the recess. Therefore, it is even easier to process the substrate appropriately.

[0030] In the above-described substrate processing method, it is preferable that in the second curing step, the second solidified film bridges the upper ends of the convex portions, so that the second solidified film more suitably supports the convex portions.

[0031] In the above-described substrate processing method, in the second curing step, the entire second solidified film is preferably located at a position equal to or higher than the upper end of the convex portion. The entire second solidified film is located above the concave portion. The second solidified film does not substantially have a portion located in the concave portion. Therefore, the convex portion is not substantially affected by the volume change of the second solidified film.

[0032] In the above-described substrate processing method, in the second curing step, the second solidified film preferably has a lower surface, the lower surface of the second solidified film contacting the upper ends of the convex portions and curving upwardly convexly between the adjacent convex portions. The shape of the lower surface of the second solidified film preferably prevents the second solidified film from entering the concave portions. Therefore, the convex portions are preferably protected from volumetric changes of the second solidified film. The convex portions are substantially not affected by volumetric changes of the second solidified film.

[0033] In the above-described substrate processing method, it is preferable that in the second curing step, the ultraviolet curable material is polymerized, the second solidified film contains the polymer, and the polymer has a length greater than the width of the recess. The recess is too narrow for the ultraviolet curable material to polymerize. Therefore, the ultraviolet curable material is unlikely to polymerize in the recess. Therefore, it is difficult to form the second solidified film in the recess. Therefore, it is easier to position the entire second solidified film above the bottom of the recess in the second curing step. The entire second solidified film is preferably positioned above the bottom of the recess.

[0034] In the above-described substrate processing method, it is preferable that at the end of the second curing step, a portion of the second drying auxiliary liquid remains on the substrate, and the second pyrolysis step further evaporates the second drying auxiliary liquid remaining on the substrate. In the second pyrolysis step, the second drying auxiliary liquid remaining on the substrate is suitably removed from the substrate, thereby properly drying the substrate.

[0035] In the above-described substrate processing method, in the second pyrolysis step, the second drying auxiliary liquid remaining on the substrate preferably evaporates before the second solidified film is pyrolyzed. In the second pyrolysis step, the second drying auxiliary liquid remaining on the substrate evaporates, and then the second solidified film is pyrolyzed. In the second pyrolysis step, the second solidified film is not substantially pyrolyzed until the second drying auxiliary liquid remaining on the substrate evaporates. Therefore, in the second pyrolysis step, the second solidified film supports the convex portions until the second drying auxiliary liquid remaining on the substrate evaporates. That is, in the second pyrolysis step, the second solidified film suitably protects the convex portions from the second drying auxiliary liquid. Furthermore, when the second solidified film is pyrolyzed, the second drying auxiliary liquid is not present on the substrate. Therefore, it is even easier to protect the convex portions when the second solidified film is pyrolyzed. Therefore, the substrate is properly dried.

[0036] In the above-described substrate processing method, it is preferable that in the second curing step, the second drying auxiliary liquid contains an unreacted portion that does not change into the second solidified film, and that in the second pyrolysis step, the unreacted portion of the second drying auxiliary liquid is removed from the substrate. The unreacted portion of the second drying auxiliary liquid is suitably removed from the substrate in the second pyrolysis step. Thus, the substrate is suitably dried.

[0037] In the above-described substrate processing method, in the second pyrolysis step, the unreacted portion of the second drying auxiliary liquid is preferably removed from the substrate before the second solidified film is pyrolyzed. In the second pyrolysis step, the second solidified film is not substantially pyrolyzed until the unreacted portion of the second drying auxiliary liquid is removed from the substrate. Therefore, in the second pyrolysis step, the second solidified film supports the convex portions until the unreacted portion of the second drying auxiliary liquid is removed from the substrate. That is, in the second pyrolysis step, the second solidified film preferably protects the convex portions from the second drying auxiliary liquid. Furthermore, when the second solidified film is pyrolyzed, the second drying auxiliary liquid is not present on the substrate. Therefore, it is even easier to protect the convex portions when the second solidified film is pyrolyzed.

[0038] In the above-described substrate processing method, the second thermal decomposition step preferably includes a low-temperature heating step in which the unreacted portion of the second drying auxiliary liquid is heated at a second low temperature to evaporate the unreacted portion of the second drying auxiliary liquid, and a high-temperature heating step in which, after the first low-temperature heating step, the second solidified film is heated at a second high temperature higher than the second low temperature to thermally decompose the second solidified film. In the low-temperature heating step, the unreacted portion of the second drying auxiliary liquid is suitably removed from the substrate. As a result, the second drying auxiliary liquid is not present on the substrate at the end of the low-temperature heating step. The high-temperature heating step is performed after the low-temperature heating step. In the high-temperature heating step, the second drying auxiliary liquid is not present on the substrate. Therefore, it is easier to protect the convex portions in the high-temperature heating step. The second low temperature is lower than the second high temperature. Therefore, the thermal decomposition of the second solidified film is suitably prevented in the low-temperature heating step. Therefore, in the low-temperature heating step, the convex portions are suitably supported by the second solidified film. Therefore, in the low-temperature heating step, the convex portions are suitably protected by the second solidified film. On the other hand, in the second high-temperature heating step, the second solidified film is thermally decomposed. The second high temperature is higher than the second low temperature. Therefore, in the high-temperature heating step, the second solidified film is suitably thermally decomposed.

[0039] In the above-described substrate processing method, it is preferable that the substrate processing method further comprises a second processing liquid supplying step of supplying a processing liquid to the substrate before the second coating step, thereby enabling the substrate to be processed more appropriately.

[0040] In the above-described substrate processing method, it is preferable that the processing liquid is removed from the substrate in the second application step. Therefore, the processing liquid is not present on the substrate in the second curing step and the second pyrolysis step. Therefore, it is easier to protect the convex portions in the second curing step and the second pyrolysis step. [Effects of the Invention]

[0041] According to the substrate processing method of the present invention, the substrate is properly processed. [Brief explanation of the drawings]

[0042] [Figure 1]FIG. 2 is a diagram schematically illustrating a part of a substrate. [Figure 2] FIG. 2 is a plan view showing the inside of the substrate processing apparatus according to the first embodiment. [Figure 3] FIG. 2 is a control block diagram of the substrate processing apparatus. [Figure 4] FIG. 2 is a diagram illustrating a configuration of a processing unit according to the first embodiment. [Figure 5] 3 is a flowchart showing the procedure of a substrate processing method according to the first embodiment. [Figure 6] FIG. 3 is a diagram schematically illustrating a substrate in a first coating step. [Figure 7] FIG. 2 is a diagram schematically illustrating a substrate in a first curing step. [Figure 8] FIG. 3 is an enlarged view schematically showing the substrate in a first curing step. [Figure 9] FIG. 3 is an enlarged view schematically showing the substrate in a first curing step. [Figure 10] FIG. 3 is an enlarged view schematically showing the substrate in a first curing step. [Figure 11] FIG. 3 is an enlarged view schematically showing the substrate in a first pyrolysis step. [Figure 12] FIG. 3 is an enlarged view schematically showing the substrate in a first pyrolysis step. [Figure 13] FIG. 10 is a diagram illustrating the configuration of a processing unit according to a second embodiment. [Figure 14] 10 is a flowchart showing the procedure of a substrate processing method according to a second embodiment. [Figure 15] FIG. 10 is a diagram schematically illustrating the substrate in a second coating step. [Figure 16] FIG. 4 is a diagram schematically illustrating the substrate in a second curing step. [Figure 17] FIG. 4 is an enlarged view schematically showing the substrate in a second curing step. [Figure 18] FIG. 4 is an enlarged view schematically showing the substrate in a second pyrolysis step. [Figure 19] FIG. 4 is an enlarged view schematically showing the substrate in a second pyrolysis step. [Figure 20] FIG. 4 is an enlarged view schematically showing the substrate in a second pyrolysis step. [Figure 21] FIG. 4 is an enlarged view schematically showing the substrate in a second pyrolysis step. [Figure 22] 10 is a flowchart showing the procedure of a second pyrolysis step in a modified embodiment. [Figure 23] FIG. 10 is a diagram illustrating a configuration of a processing unit according to a modified embodiment. [Figure 24] FIG. 10 is a left side view showing the configuration of the left part of the substrate processing apparatus according to a modified embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0043] The substrate processing method of the present invention will be described below with reference to the drawings.

[0044] First Embodiment <1-1. Circuit board> The substrate W is, for example, a semiconductor wafer, a liquid crystal display substrate, an organic EL (Electroluminescence) substrate, an FPD (Flat Panel Display) substrate, an optical display substrate, a magnetic disk substrate, an optical disk substrate, a magneto-optical disk substrate, a photomask substrate, or a solar cell substrate. The substrate W has a thin, flat plate shape. The substrate W has a substantially circular shape in a plan view.

[0045] 1 is a diagram schematically showing a part of a substrate W. The substrate W has a pattern P. The pattern P is formed on a surface WS of the substrate W. The pattern P has, for example, an uneven shape.

[0046] The pattern P has a plurality of protrusions A. Each protrusion A is a part of the substrate W. Each protrusion A is a structure. Each protrusion A is made of, for example, at least one of a single crystal silicon film, a silicon oxide film (SiO2), a silicon nitride film (SiN), and a polysilicon film. Each protrusion A protrudes from the surface WS. The plurality of protrusions A are separated from one another.

[0047] Each protrusion A has a base end A1, a tip A2, and a side A3. The base end A1 is connected to the surface WS. The side A3 extends from the base end A1 to the tip A2.

[0048] The protrusion A has a height AH. The height AH corresponds to the length of the side A3. The height AH corresponds to the length between the base end A1 and the tip end A2.

[0049] The pattern P has a plurality of recesses B. Each recess B is a space. The plurality of recesses B may, for example, be connected to one another. Alternatively, the plurality of recesses B may be isolated from one another. The recesses B are located on the sides of the protrusions A. The recesses B are located around the protrusions A. The recesses B are located between two or more adjacent protrusions A. The recesses B are in contact with two or more sides A3.

[0050] The recess B has a bottom B1. The bottom B1 is located between adjacent base ends A1. The bottom B1 corresponds to the portion of the surface WS located between adjacent base ends A1. The bottom B1 extends between adjacent sides A3. The recess B is surrounded by the sides A3 and the bottom B1.

[0051] The recessed portion B has a width BW. The width BW corresponds to the separation distance between two adjacent protruding portions A. The width BW corresponds to the separation distance between two adjacent sides A3.

[0052] <1-2. Overview of the substrate processing apparatus 1> 2 is a plan view showing the inside of the substrate processing apparatus 1 of the first embodiment. The substrate processing apparatus 1 performs processing on the substrate W. The processing in the substrate processing apparatus 1 includes a drying process.

[0053] The substrate processing apparatus 1 includes an indexer unit 3 and a processing block 7. The processing block 7 is connected to the indexer unit 3. The indexer unit 3 supplies substrates W to the processing block 7. The processing block 7 processes the substrates W. The indexer unit 3 retrieves the substrates W from the processing block 7.

[0054] For convenience, in this specification, the direction in which the indexer unit 3 and the processing block 7 are aligned is referred to as the "front-rear direction X." The front-rear direction X is horizontal. Within the front-rear direction X, the direction from the processing block 7 toward the indexer unit 3 is referred to as the "front." The direction opposite to the front is referred to as the "rear." The direction perpendicular to the front-rear direction X is referred to as the "width direction Y." The width direction Y is horizontal. One direction in the "width direction Y" is referred to as the "right" as appropriate. The direction opposite to the right is referred to as the "left." When the front-rear direction X and the width direction Y are not distinguished, they are simply referred to as the "horizontal direction." The direction perpendicular to the horizontal direction is referred to as the "vertical direction Z." For reference, in each figure, front, back, right, left, top, and bottom are indicated as appropriate.

[0055] The indexer unit 3 includes a plurality of (for example, four) carrier placement units 4. Each carrier placement unit 4 places one carrier C thereon. The carrier C accommodates a plurality of substrates W. The carrier C is, for example, a FOUP (Front Opening Unified Pod), a SMIF (Standard Mechanical Interface), or an OC (Open Cassette).

[0056] The indexer unit 3 includes a transport mechanism 5. The transport mechanism 5 is disposed behind the carrier platform 4. The transport mechanism 5 transports substrates W. The transport mechanism 5 is configured to access the carriers C placed on the carrier platform 4.

[0057] The transport mechanism 5 includes a hand 5a and a hand driver 5b. The hand 5a supports the substrate W. The hand driver 5b is connected to the hand 5a. The hand driver 5b moves the hand 5a. The hand driver 5b moves the hand 5a, for example, in the front-rear direction X, the width direction Y, and the vertical direction Z. The hand driver 5b rotates the hand 5a, for example, in a horizontal plane.

[0058] The processing block 7 includes a transport mechanism 8. The transport mechanism 8 transports the substrate W. The transport mechanism 8 is configured to receive the substrate W from the transport mechanism 5 and to hand over the substrate W to the transport mechanism 5.

[0059] The transport mechanism 8 includes a hand 8a and a hand driver 8b. The hand 8a supports the substrate W. The hand driver 8b is connected to the hand 8a. The hand driver 8b moves the hand 8a. The hand driver 8b moves the hand 8a, for example, in the front-rear direction X, the width direction Y, and the vertical direction Z. The hand driver 8b rotates the hand 8a, for example, in a horizontal plane.

[0060] The processing block 7 includes a plurality of processing units 11. The processing units 11 are arranged on the sides of the transport mechanism 8. Each processing unit 11 performs processing on the substrate W.

[0061] Each processing unit 11 includes a substrate holder 13. The substrate holder 13 holds a substrate W.

[0062] The transport mechanism 8 is configured to access each processing unit 11. The transport mechanism 8 is configured to deliver a substrate W to the substrate holder 13 and to take a substrate W from the substrate holder 13.

[0063] 3 is a control block diagram of the substrate processing apparatus 1. The substrate processing apparatus 1 includes a control unit 10. The control unit 10 is communicatively connected to the transport mechanisms 5 and 8 and the processing unit 11. The control unit 10 controls the transport mechanisms 5 and 8 and the processing unit 11.

[0064] The control unit 10 is realized by a central processing unit (CPU) that executes various processes, a random-access memory (RAM) that serves as a work area for the processes, a storage medium such as a fixed disk, etc. The control unit 10 has various types of information pre-stored in the storage medium. The information held by the control unit 10 includes, for example, transport condition information and processing condition information. The transport condition information defines conditions related to the operation of the transport mechanisms 5 and 8. The processing condition information defines conditions related to the operation of the processing unit 11. The processing condition information is also called a processing recipe.

[0065] An example of the operation of the substrate processing apparatus 1 will now be briefly described.

[0066] The indexer unit 3 supplies the substrate W to the processing block 7. Specifically, the transport mechanism 5 transfers the substrate W from the carrier C to the transport mechanism 8 of the processing block 7.

[0067] The transport mechanism 8 distributes the substrates W to the processing units 11. Specifically, the transport mechanism 8 transports the substrates W from the transport mechanism 5 to the substrate holders 13 of the processing units 11.

[0068] The processing unit 11 processes the substrate W held by the substrate holder 13. The processing unit 11 performs drying processing on the substrate W, for example.

[0069] After the processing units 11 have processed the substrates W, the transport mechanism 8 collects the substrates W from each processing unit 11. Specifically, the transport mechanism 8 takes the substrates W from each substrate holder 13. Then, the transport mechanism 8 hands the substrates W over to the transport mechanism 5.

[0070] The indexer unit 3 retrieves the substrate W from the processing block 7. Specifically, the transport mechanism 5 transports the substrate W from the transport mechanism 8 to the carrier C.

[0071] <1-3. Configuration of processing unit 11> 4 is a diagram showing the configuration of the processing units 11 of the first embodiment. Each processing unit 11 has the same structure. The processing units 11 are classified as single-wafer processing units. That is, each processing unit 11 processes only one substrate W at a time.

[0072] The processing unit 11 includes a housing 12. The housing 12 has a substantially box shape. The substrate W is processed inside the housing 12.

[0073] The interior of the housing 12 is maintained at, for example, atmospheric pressure. Therefore, the substrate W is processed, for example, in an atmospheric pressure environment. Here, atmospheric pressure includes standard atmospheric pressure (1 atmosphere, 101,325 Pa). Normal pressure is, for example, an atmospheric pressure in the range of 0.7 atmospheres or more and 1.3 atmospheres or less. In this specification, pressure is indicated as absolute pressure based on absolute vacuum.

[0074] The above-described substrate holding unit 13 is installed inside the housing 12. The substrate holding unit 13 holds one substrate W. The substrate holding unit 13 holds the substrate W in a substantially horizontal position.

[0075] The substrate holding part 13 is positioned below the substrate W that it holds. The substrate holding part 13 contacts at least one of the lower surface WS2 of the substrate W and the peripheral edge of the substrate W. The substrate holding part 13 does not contact the upper surface WS1 of the substrate W. Here, the upper surface WS1 faces upward. The lower surface WS2 faces downward. The upper surface WS1 is a part of the front surface WS. The lower surface WS2 is another part of the front surface WS.

[0076] An example configuration of the substrate holding unit 13 will be described. The substrate holding unit 13 includes a support member 14. The support member 14 has a plate shape. The support member 14 extends horizontally. Although not shown, the support member 14 has approximately the same size as the substrate W in a planar view. The support member 14 has a circular ring shape in a planar view. The support member 14 forms an opening. The opening is located at the center of the support member 14 in a planar view.

[0077] The substrate holder 13 includes a plurality of holding pins 15. Each holding pin 15 is supported by a support member 14. Each holding pin 15 is arranged on the periphery of the support member 14. Each holding pin 15 extends upward from the support member 14. Each holding pin 15 holds a substrate W. When the substrate W is held by the holding pins 15, the substrate W is positioned above the support member 14.

[0078] The processing unit 11 includes a rotational drive unit 17. At least a portion of the rotational drive unit 17 is installed inside the housing 12. The rotational drive unit 17 is connected to the substrate holding unit 13. The rotational drive unit 17 rotates the substrate holding unit 13. The substrate W held by the substrate holding unit 13 rotates integrally with the substrate holding unit 13. The substrate W held by the substrate holding unit 13 rotates, for example, around a rotational axis D. The rotational axis D passes through the center of the substrate W, for example. The rotational axis D extends, for example, in the vertical direction Z.

[0079] An example configuration of the rotation drive unit 17 will be described. The rotation drive unit 17 includes a shaft portion 18 and a motor 19. The shaft portion 18 is connected to the support member 14. The shaft portion 18 extends downward from the support member 14. The shaft portion 18 extends on the rotation axis D. The shaft portion 18 is a so-called hollow shaft. The shaft portion 18 has a cylindrical shape. The shaft portion 18 forms a hollow portion. The hollow portion is located inside the shaft portion 18. The motor 19 is connected to the shaft portion 18. The motor 19 rotates the shaft portion 18 around the rotation axis D.

[0080] The processing unit 11 includes supply units 21a and 21b. Each of the supply units 21a and 21b supplies a liquid to the substrate W held by the substrate holding unit 13. Each of the supply units 21a and 21b supplies a liquid to the upper surface WS1 of the substrate W held by the substrate holding unit 13.

[0081] The supply unit 21a supplies a processing liquid L. The processing liquid L is used to process the substrate W. The processing liquid L is used, for example, to clean the substrate W. The processing liquid L is, for example, a cleaning liquid. The processing liquid L is, for example, a rinse liquid.

[0082] The processing liquid L is, for example, an organic solvent. The processing liquid L is, for example, alcohol. The processing liquid L is, for example, isopropyl alcohol (IPA).

[0083] The processing liquid L is, for example, deionized water. The processing liquid L is, for example, SC1. SC1 is a mixture of ammonia, hydrogen peroxide, and deionized water.

[0084] The supply unit 21b supplies a first drying auxiliary liquid F1. The first drying auxiliary liquid F1 is used to dry the substrate W. The first drying auxiliary liquid F1 has a function of assisting in drying the substrate W. The first drying auxiliary liquid F1 is a liquid. The first drying auxiliary liquid F1 is a liquid at room temperature.

[0085] The first drying aid liquid F1 contains a thermosetting material. The thermosetting material has thermosetting properties. The thermosetting material has not yet been hardened by heat. The thermosetting material has the property of being polymerized by heat. The thermosetting material has the property of becoming a polymer by heat. The thermosetting material has the property of being hardened by heat.

[0086] A thermosetting material includes at least one of a monomer and an oligomer. At least one of the monomer and the oligomer in a thermosetting material has the property of being polymerized by heat. A thermosetting material does not include a polymer. A thermosetting material does not include a macromolecule. A thermosetting material does not include a polymer compound.

[0087] The thermosetting material includes, for example, a phenol. The thermosetting material includes, for example, a phenol monomer. The thermosetting material includes, for example, a phenol-derived oligomer. The thermosetting material includes, for example, a novolac. The thermosetting material includes, for example, a novolac-type phenolic resin. Novolac is an example of a phenol-derived oligomer. Novolac-type phenolic resin is an example of a phenol-derived oligomer.

[0088] The first drying aid liquid F1 contains a solvent. The solvent is liquid. The solvent is liquid at room temperature. The solvent is volatile. The solvent evaporates easily. The solvent dissolves the thermosetting material. Therefore, the thermosetting material in the first drying aid liquid F1 is dissolved in the solvent. That is, the first drying aid liquid F1 contains the solvent and the thermosetting material dissolved in the solvent. The thermosetting material corresponds to the solute of the first drying aid liquid F1.

[0089] The solvent is, for example, an organic solvent. The solvent is, for example, an alcohol. The solvent includes, for example, at least one of isopropyl alcohol (IPA), methanol, ethanol, 1-propanol, isobutanol, propylene glycol monomethyl ether acetate (PGMEA), 1-ethoxy-2-propanol (PGEE), acetone, and 1-butanol.

[0090] For example, the first drying aid liquid F1 consists of only a thermosetting material and a solvent.

[0091] The supply unit 21a includes a nozzle 22a. The nozzle 22a ejects the processing liquid L. The supply unit 21b includes a nozzle 22b. The nozzle 22b ejects the first drying auxiliary liquid F1.

[0092] Nozzles 22a and 22b are each installed inside housing 12. Nozzles 22a and 22b are each movable between a standby position and a processing position. FIG. 4 shows nozzles 22a and 22b positioned at the standby position using solid lines. FIG. 4 shows nozzles 22a and 22b positioned at the processing position using dashed lines. The standby position is, for example, a position that is not above the substrate W held by substrate holder 13. The processing position is, for example, a position above the substrate W held by substrate holder 13.

[0093] The first drying auxiliary liquid F1 is used inside the housing 12. As described above, the inside of the housing 12 is maintained at, for example, atmospheric pressure. Therefore, the first drying auxiliary liquid F1 is used, for example, in an environment of atmospheric pressure. The processing liquid L is also used, for example, in an environment of atmospheric pressure.

[0094] The supply unit 21a includes a pipe 23a and a valve 24a. The pipe 23a is connected to a nozzle 22a. The valve 24a is provided on the pipe 23a. When the valve 24a is open, the nozzle 22a ejects the processing liquid L. When the valve 24a is closed, the nozzle 22a does not eject the processing liquid L. Similarly, the supply unit 21b includes a pipe 23b and a valve 24b. The pipe 23b is connected to the nozzle 22b. The valve 24b is provided on the pipe 23b. The valve 24b controls the ejection of the first drying assistant liquid F1.

[0095] The supply unit 21a is connected to a supply source 25a. The supply source 25a is connected to, for example, a pipe 23a. The supply source 25a supplies the processing liquid L to the supply unit 21a. Similarly, the supply unit 21b is connected to a supply source 25b. The supply source 25b is connected to, for example, a pipe 23b. The supply source 25b supplies the first drying auxiliary liquid F1 to the supply unit 21b.

[0096] At least a portion of pipe 23a may be provided outside of housing 12. Pipe 23b may also be arranged in the same manner as pipe 23a. Valve 24a may be provided outside of housing 12. Valve 24b may also be arranged in the same manner as valve 24a. Supply source 25a may be provided outside of housing 12. Supply source 25b may also be arranged in the same manner as supply source 25a.

[0097] The supply source 25a may supply the processing liquid L to a plurality of processing units 11. Alternatively, the supply source 25a may supply the processing liquid L to only one processing unit 11. The same applies to the supply source 25b.

[0098] The supply source 25a may be a component of the substrate processing apparatus 1. For example, the supply source 25a may be installed inside the substrate processing apparatus 1. Alternatively, the supply source 25a may not be a component of the substrate processing apparatus 1. For example, the supply source 25a may be installed outside the substrate processing apparatus 1. Similarly, the supply source 25b may be a component of the substrate processing apparatus 1. Alternatively, the supply source 25b may not be a component of the substrate processing apparatus 1.

[0099] The supply unit 21a may be called a "processing liquid supply unit." The supply unit 21b may be called a "drying auxiliary liquid supply unit."

[0100] The processing unit 11 includes a heating section 31. The heating section 31 heats the substrate W held by the substrate holder 13.

[0101] An example configuration of the heating unit 31 will be described. The heating unit 31 includes a heater 32. The heater 32 generates heat. The heater 32 is, for example, a resistance heater. The heater 32 is, for example, an electric heater. The heater 32 includes, for example, a heating wire. The heater 32 is disposed below the substrate W held by the substrate holding unit 13. The heater 32 faces the lower surface WS2 of the substrate W held by the substrate holding unit 13. The heater 32 extends in the horizontal direction. The heating range of the heater 32 covers the entire substrate W. The heater 32 heats the entire substrate W uniformly.

[0102] The heating unit 31 includes a support member 33 and a shaft portion 34. The support member 33 supports the heater 32. The support member 33 has a plate shape. The support member 33 extends horizontally. The support member 33 is located below the substrate W held by the substrate holding unit 13. The support member 33 is located above the support member 14. Although not shown, the support member 14 has approximately the same size as the substrate W in a planar view. The shaft portion 34 is connected to the support member 33. The shaft portion 34 extends downward from the support member 33. The shaft portion 34 extends on the rotation axis D. The shaft portion 34 passes through an opening in the support member 14. The shaft portion 34 is inserted into the hollow portion of the shaft portion 18. Even when the shaft portion 18 rotates, the shaft portion 34 does not rotate. Therefore, the heater 32 and the support member 33 do not rotate either. The shaft portion 34 is fixed to the housing 12, for example.

[0103] The heating unit 31 includes a power supply 35. The power supply 35 is electrically connected to the heater 32. The power supply 35 supplies power to the heater 32. The power supply 35 controls the heater 32. For example, the power supply 35 switches the heater 32 between heating and non-heating. For example, the power supply 35 adjusts the output of the heater 32. For example, the power supply 35 adjusts the heating temperature by the heater 32. For example, the power supply 35 adjusts the heating time by the heater 32.

[0104] The processing unit 11 may further include a cup (not shown). The cup is installed inside the housing 12. The cup is disposed to the side of the substrate holding part 13. The cup surrounds the outside of the substrate holding part 13. The cup catches liquid splashed from the substrate W held by the substrate holding part 13.

[0105] 3, the control unit 10 controls the rotary drive unit 17. The control unit 10 controls the supply units 21a and 21b. The control unit 10 controls the valves 24a and 24b. The control unit 10 controls the heating unit 31. The control unit 10 controls the power source 35.

[0106] <1-4. Example of operation of processing unit 11> Please refer to Figures 4 and 5. Figure 5 is a flowchart showing the procedure of the substrate processing method of the first embodiment. The substrate processing method is for processing a substrate W on which a pattern P is formed. The substrate processing method includes steps S1 to S4. Steps S1 to S4 are performed in this order. Steps S1 to S4 are performed by the processing unit 11. The processing unit 11 operates under the control of the control unit 10.

[0107] Step S1: First processing liquid supply step A processing liquid L is supplied to the substrate W.

[0108] The substrate holding unit 13 holds the substrate W. The rotation drive unit 17 rotates the substrate holding unit 13. The supply unit 21a supplies the processing liquid L to the substrate W held by the substrate holding unit 13. The heating unit 31 does not heat the substrate W.

[0109] The substrate W is held in a substantially horizontal position. The substrate W rotates integrally with the substrate holder 13. The processing liquid L is supplied to the upper surface WS1 of the substrate W. Because the substrate W is rotating, the processing liquid L spreads smoothly over the entire upper surface WS1. For example, the processing liquid L cleans the substrate W.

[0110] Then, the supply unit 21a stops supplying the processing liquid L to the substrate W.

[0111] In the first processing liquid supply step, the inside of the housing 12 is maintained at, for example, room temperature. Therefore, in the first processing liquid supply step, the substrate W is processed in, for example, a room temperature environment. The processing liquid L is used in a room temperature environment. Here, room temperature includes room temperature. Room temperature is, for example, a temperature in the range of 5°C or higher and 35°C or lower. Room temperature is, for example, a temperature in the range of 10°C or higher and 30°C or lower. Room temperature is, for example, a temperature in the range of 15°C or higher and 25°C or lower.

[0112] At the end of the first processing liquid supply step, the processing liquid L is present on the substrate W. The substrate W is in a wet state. The substrate W is not in a dried state.

[0113] Step S2: First application process A first drying aid liquid F1 is applied to the substrate W.

[0114] The substrate holding unit 13 holds the substrate W. The rotation drive unit 17 rotates the substrate holding unit 13 and the substrate W. The supply unit 21b supplies the first drying assistant liquid F1 to the substrate W held by the substrate holding unit 13. The heating unit 31 does not heat the substrate W.

[0115] The first drying auxiliary liquid F1 is supplied to the upper surface WS1 of the substrate W. Because the substrate W is rotating, the first drying auxiliary liquid F1 spreads smoothly over the entire upper surface WS1. The first drying auxiliary liquid F1 is applied to the upper surface WS1. The upper surface WS1 is coated with the first drying auxiliary liquid F1. The first drying auxiliary liquid F1 removes the processing liquid L from the substrate W. The processing liquid L on the substrate W is replaced with the first drying auxiliary liquid F1.

[0116] Then, the supply unit 21b stops supplying the first drying auxiliary liquid F1 to the substrate W. The rotation driver 17 stops the rotation of the substrate holder 13 and the substrate W. The substrate W comes to a standstill.

[0117] In the first coating step, the inside of the housing 12 is kept at, for example, room temperature. Therefore, in the first coating step, the substrate W is processed in, for example, a room temperature environment. The first drying assistant liquid F1 is applied to the substrate W in, for example, a room temperature environment.

[0118] 6 is a diagram schematically showing the substrate W in the first coating step. The substrate W is oriented with the pattern P facing upward. The pattern P is located on the upper surface WS1 of the substrate W. The pattern P faces upward.

[0119] The positions and shapes of the convex portions A and concave portions B when the pattern P faces upward are explained below. Each convex portion A protrudes upward. Multiple convex portions A are arranged horizontally. Concave portions B are concave downward. Concave portions B are open upward. The base end A1 corresponds to the lower end of convex portion A. The tip end A2 corresponds to the upper end of convex portion A. The bottom portion B1 corresponds to the lower end of concave portion B. The bottom portion B1 is located at approximately the same height as the base end A1. The bottom portion B1 is located at a lower position than the tip end A2.

[0120] Hereinafter, the leading end A2 of the pattern P when it faces upward will be referred to as the "upper end A2" as appropriate.

[0121] The first drying auxiliary liquid F1 is present on the substrate W. The first drying auxiliary liquid F1 is present on the upper surface WS1.

[0122] The first drying aid liquid F1 is applied to the pattern P. The pattern P is coated with the first drying aid liquid F1. The pattern P comes into contact with the first drying aid liquid F1. The protrusions A come into contact with the first drying aid liquid F1.

[0123] The processing liquid L has already been removed from the substrate W by the first drying auxiliary liquid F1. Therefore, the processing liquid L does not exist on the substrate W. The processing liquid L does not remain in the recess B.

[0124] The first drying auxiliary liquid F1 on the substrate W forms a first liquid film G1. The first liquid film G1 is located on the substrate W. The first liquid film G1 is located on the upper surface WS1. The first liquid film G1 covers the upper surface WS1. The first liquid film G1 covers the pattern P.

[0125] In the first coating step, the thickness of the first liquid film G1 may further be adjusted. For example, the thickness of the first liquid film G1 may be adjusted while the supply unit 21b is supplying the first drying auxiliary liquid F1 to the substrate W. For example, the thickness of the first liquid film G1 may be adjusted after the supply unit 21b stops supplying the first drying auxiliary liquid F1. For example, the thickness of the first liquid film G1 may be adjusted by adjusting the rotation speed of the substrate W. For example, the thickness of the first liquid film G1 may be adjusted by adjusting the rotation time of the substrate W.

[0126] The thickness of the first liquid film G1 is, for example, sufficiently larger than the height AH of the convex portion A. The thickness of the first liquid film G1 is, for example, at least twice the height AH. The thickness of the first liquid film G1 is, for example, at least several tens of times the height AH. The thickness of the first liquid film G1 is, for example, at least several tens of μm.

[0127] The thickness of the first liquid film G1 is not excessively large, for example, a few hundred μm or less.

[0128] The entire pattern P is immersed in the first liquid film G1, and the entire protrusion A is immersed in the first liquid film G1.

[0129] The protrusions A do not come into contact with the gas. The protrusions A do not come into contact with the gas-liquid interface. Therefore, capillary force does not act on the protrusions A. The capillary force is, for example, the surface tension of the first drying assistant liquid F1.

[0130] The recess B is filled with the first liquid film G1. The entire recess B is filled with only the first liquid film G1.

[0131] Step S3: First curing process The first drying assistant liquid F1 on the substrate W is heated, and a first solidified film H1 is formed on the substrate W.

[0132] The substrate holder 13 holds the substrate W. The heating unit 31 heats the substrate W held by the substrate holder 13. The rotation driver 17 does not rotate the substrate holder 13 or the substrate W.

[0133] 7 is a diagram schematically illustrating the substrate W in the first curing step. The substrate W is oriented with the pattern P facing upward. The pattern P is located on the upper surface WS1 of the substrate W. The pattern P faces upward.

[0134] The first drying assistant liquid F1 is heated through the substrate W held by the substrate holder 13.

[0135] In the first curing step, the first drying auxiliary liquid F1 on the substrate W is heated to a first low temperature T1L. The first low temperature T1L is higher than room temperature. For example, the temperature of the first drying auxiliary liquid F1 rises from room temperature. The temperature of the first drying auxiliary liquid F1 rises to the first low temperature T1L. The first low temperature T1L corresponds to the heating temperature of the first drying auxiliary liquid F1.

[0136] The thermosetting material in the first drying auxiliary liquid F1 on the substrate W starts to polymerize. As the polymerization reaction of the thermosetting material progresses, the degree of polymerization of the thermosetting material increases. The fluidity of the first drying auxiliary liquid F1 on the substrate W decreases. The first drying auxiliary liquid F1 on the substrate W hardens. The first drying auxiliary liquid F1 on the substrate W hardens.

[0137] Eventually, thermosetting materials become polymers. A polymer of a thermosetting material corresponds to a cured product of the thermosetting material. A polymer of a thermosetting material corresponds to a polymer. A polymer of a thermosetting material corresponds to a polymer compound.

[0138] The polymer of the thermosetting material constitutes the first solidified film H1. The first solidified film H1 includes a polymer of the thermosetting material.

[0139] In other words, due to the polymerization reaction of the thermosetting material, part of the first drying auxiliary liquid F1 changes into the first solidified film H1, and part of the first liquid film G1 changes into the first solidified film H1. As a result, the first drying auxiliary liquid F1 decreases, and the first liquid film G1 becomes thinner.

[0140] The first solidified film H1 is formed on the substrate W. The first solidified film H1 is formed on the upper surface WS1. The first solidified film H1 is formed on the pattern P.

[0141] The first solidified film H1 covers the upper surface WS1. The first solidified film H1 covers the pattern P.

[0142] Here, the length of the polymer of the thermosetting material is greater than the width BW of the recess B. The size of the polymer of the thermosetting material is greater than the size of the recess B. Therefore, the thermosetting material cannot change into a polymer in the recess B. On the other hand, the thermosetting material can change into a polymer at a position above the recess B. Therefore, the thermosetting material located above the recess B becomes a polymer. The thermosetting material located in the recess B moves to a position above the recess B and then becomes a polymer at the position above the recess B.

[0143] Therefore, at least a portion of the first solidified film H1 is located above the recessed portion B. In other words, at least a portion of the first solidified film H1 is located above the pattern P. At least a portion of the first solidified film H1 is located at a position equal to or higher than the upper end A2 of the protruding portion A.

[0144] The entire first solidified film H1 is located above the bottom B1 of the recess B. The entire first solidified film H1 is located at a position higher than the bottom B1. The first solidified film H1 is separated from the bottom B1. The first solidified film H1 does not contact the bottom B1. The first solidified film H1 does not have a portion that contacts the bottom B1. At least a portion of the recess B is not filled with the first solidified film H1. At least a portion of the recess B is a gap formed between the first solidified film H1 and the bottom B1. The gap is located below the first solidified film H1 and above the bottom B1.

[0145] The first solidified film H1 does not contact at least a portion of each convex portion A. Specifically, the first solidified film H1 does not contact at least a portion of each side A3. The first solidified film H1 is separated from at least a portion of the side A3. Therefore, even if the volume of the first solidified film H1 changes, the first solidified film H1 is unlikely to exert a significant force on the side A3. "The volume of the first solidified film H1 changes" means, for example, that the first solidified film H1 expands. "The volume of the first solidified film H1 changes" means, for example, that the first solidified film H1 contracts. The force acting on the side A3 means, for example, a force pushing the side A3 laterally. The force acting on the side A3 means, for example, a force pulling the side A3 laterally. "Significant force" means a force large enough to collapse the convex portion A.

[0146] For example, the entire first solidified film H1 is located above the recessed portion B. For example, the first solidified film H1 does not have a portion located in the recessed portion B. For example, the entire first solidified film H1 is located at a position equal to or higher than the upper end A2 of the protrusion A. For example, the entire first solidified film H1 is located above the pattern P. For example, the first solidified film H1 is separated from the entire side A3. For example, the first solidified film H1 does not have a portion in contact with the side A3. In this case, even if the volume of the first solidified film H1 changes, the first solidified film H1 does not exert a force on the side A3.

[0147] The first drying auxiliary liquid F1 contains unreacted portions in addition to the portion that turns into the first solidified film H1. The unreacted portions of the first drying auxiliary liquid F1 do not turn into the first solidified film H1 and remain on the substrate W. The unreacted portions of the first drying auxiliary liquid F1 are located in the recesses B. The first drying auxiliary liquid F1 in the recesses B corresponds to the unreacted portions of the first drying auxiliary liquid F1.

[0148] The first drying aid liquid F1 in the recessed portion B comes into contact with a part of the protruding portion A. The first drying aid liquid F1 in the recessed portion B comes into contact with at least a part of the side A3 of the protruding portion A.

[0149] As described above, the thermosetting material in the recessed portion B moves upward in the recessed portion B. Therefore, the first drying aid liquid F1 in the recessed portion B does not substantially contain the thermosetting material. The first drying aid liquid F1 in the recessed portion B consists essentially of the solvent. The unreacted portion of the first drying aid liquid F1 consists essentially of the solvent.

[0150] Furthermore, the first solidified film H1 is in contact with the upper end A2 of the protrusion A. The first solidified film H1 is connected to the upper end A2. The first solidified film H1 is linked to the upper end A2. The first solidified film H1 is, for example, adhered to the upper end A2. Therefore, the first solidified film H1 preferably supports the protrusion A. The first solidified film H1 preferably prevents the protrusion A from collapsing. For example, the first solidified film H1 prevents the upper end A2 from moving sideways. For example, the first solidified film H1 prevents the protrusion A from tilting sideways.

[0151] The first solidified film H1 bridges the upper ends A2. The first solidified film H1 corresponds to a bridge connecting the upper ends A2. Two or more upper ends A2 are connected to each other by the first solidified film H1. Therefore, the first solidified film H1 more effectively supports the protrusion A. The first solidified film H1 more effectively prevents the protrusion A from collapsing.

[0152] The first solidified film H1 has a thickness. The thickness of the first solidified film H1 is sufficiently larger than the height AH of the protrusion A. The thickness of the first solidified film H1 is, for example, at least twice the height AH. The thickness of the first solidified film H1 is, for example, at least several tens of times the height AH.

[0153] The thickness of the first solidified film H1 is not excessively large, for example, a few hundred μm or less.

[0154] 8 is an enlarged view schematically showing the substrate W in the first curing step. The first solidified film H1 will be described in more detail. The first solidified film H1 has a lower surface H1b. The lower surface H1b is in contact with the upper end A2 of the protrusion A. With the lower surface H1b in contact with the upper end A2, the first solidified film H1 is formed above the pattern P.

[0155] The entire lower surface H1b is located at a position higher than the bottom B1 of the recess B. The lower surface H1b is spaced apart from the bottom B1. The lower surface H1b does not contact the bottom B1.

[0156] For example, the lower surface H1b is curved convexly upward between adjacent convex portions A. For example, the lower surface H1b is curved convexly upward above a recessed portion B. For example, the portion of the lower surface H1b between adjacent convex portions A is located at a higher position than the upper end A2. For example, the portion of the lower surface H1b above the recessed portion B is located at a higher position than the upper end A2.

[0157] The first solidified film H1 is a solid. The first solidified film H1 may be called a "hardened film." The first solidified film H1 may be called a "polymer film."

[0158] For example, the first solidified film H1 does not have substantial elasticity, for example, the first solidified film H1 does not substantially deform, or alternatively, the first solidified film H1 may have elasticity.

[0159] The first solidified film H1 is thermally decomposable.

[0160] The first solidified film H1 has a thermal decomposition temperature Tp1. The thermal decomposition temperature Tp1 is higher than room temperature. The thermal decomposition temperature Tp1 is, for example, 100 degrees or higher. The thermal decomposition temperature Tp1 is, for example, 200 degrees or higher. The thermal decomposition temperature Tp1 is, for example, 400 degrees or higher. The thermal decomposition temperature Tp1 is, for example, 700 degrees or higher.

[0161] The first low temperature T1L is lower than the thermal decomposition temperature Tp1. That is, in the first curing step, the first drying assistant liquid F1 is heated at a temperature lower than the thermal decomposition temperature Tp1. Therefore, in the first curing step, the first solidified film H1 is not thermally decomposed.

[0162] The heating temperature of the first drying auxiliary liquid F1 is one of the factors that determine the length of the polymer in the thermosetting material. As described above, the first low temperature T1L corresponds to the heating temperature of the first drying auxiliary liquid F1. Therefore, it is preferable to adjust the first low temperature T1L based on the width BW of the recessed portion B. It is preferable to change the first low temperature T1L based on the width BW of the recessed portion B.

[0163] For example, the first low temperature T1L is adjusted so that the length of the polymer of the thermosetting material is greater than the width BW. For example, when the width BW is large, the first low temperature T1L is adjusted so that the length of the polymer of the thermosetting material increases.

[0164] 9 is an enlarged view schematically showing the substrate W in the first curing step. The solvent in the first drying auxiliary liquid F1 evaporates. The solvent evaporates from the first drying auxiliary liquid F1 on the substrate W.

[0165] The solvent evaporates easily. For example, the solvent evaporates at a temperature lower than the thermal decomposition temperature Tp1. For example, the solvent evaporates at a first low temperature T1L. For example, the solvent evaporates at room temperature. For example, the solvent may start to evaporate after the first curing step begins. Alternatively, the solvent may start to evaporate before the first curing step begins.

[0166] For example, the first low temperature T1L may be equal to or higher than the boiling point of the solvent. In this case, the solvent evaporates quickly. Alternatively, the first low temperature T1L may be lower than the boiling point of the solvent. In this case, the solvent evaporates smoothly.

[0167] The boiling point of the solvent is, for example, higher than room temperature and lower than the thermal decomposition temperature Tp1.

[0168] As described above, the first drying auxiliary liquid F1 remaining in the recesses B is substantially composed of the solvent. Therefore, as the solvent evaporates, the first drying auxiliary liquid F1 in the recesses B decreases. The first drying auxiliary liquid F1 in the recesses B is removed from the substrate W without changing into the first solidified film H1. In other words, the unreacted portion of the first drying auxiliary liquid F1 is removed from the substrate W without changing into the first solidified film H1.

[0169] The gas J in the housing 12 enters the recessed portion B. The first drying auxiliary liquid F1 and the gas J come into contact at the recessed portion B. The first drying auxiliary liquid F1 and the gas J form a gas-liquid interface K1. The gas-liquid interface K1 is located at the recessed portion B. The gas-liquid interface K1 comes into contact with the convex portion A. The gas-liquid interface K1 comes into contact with the side A3 of the convex portion A. The capillary force of the first drying auxiliary liquid F1 acts on the convex portion A. However, the convex portion A is supported by the first solidified film H1. Therefore, even if the capillary force acts on the convex portion A, the convex portion A does not collapse.

[0170] 10 is an enlarged view schematically showing the substrate W in the first curing step. Eventually, all of the solvent on the substrate W evaporates. All of the solvent on the substrate W is removed from the substrate W.

[0171] As a result, all of the first drying auxiliary liquid F1 in the recesses B is removed from the substrate W. All of the unreacted first drying auxiliary liquid F1 is removed from the substrate W. As described above, the remaining first drying auxiliary liquid F1 other than the unreacted portion turns into the first solidified film H1. Therefore, all of the first drying auxiliary liquid F1 disappears from the substrate W.

[0172] The protrusions A are still supported by the first solidified film H1. The first solidified film H1 supports the protrusions A until all of the unreacted first drying assistant liquid F1 is removed from the substrate W.

[0173] After all of the unreacted first drying auxiliary liquid F1 has been removed from the substrate W, no liquid is present on the substrate W. No liquid is present in the recessed portion B. No liquid comes into contact with the protruding portion A.

[0174] Step S4: First pyrolysis step The first solidified film H1 on the substrate W is heated. The first solidified film H1 is thermally decomposed. The substrate W is dried.

[0175] The substrate holder 13 holds the substrate W. The heating unit 31 heats the substrate W held by the substrate holder 13. The rotation driver 17 does not rotate the substrate holder 13 or the substrate W.

[0176] 11 is an enlarged view schematically showing the substrate W in the first pyrolysis step. The substrate W is oriented with the pattern P facing upward. The pattern P is located on the upper surface WS1 of the substrate W. The pattern P faces upward.

[0177] The first solidified film H1 is heated through the substrate W held by the substrate holder 13.

[0178] In the first pyrolysis step, the first solidified film H1 is heated to a first high temperature T1H. The first high temperature T1H is higher than the first low temperature T1L. The first high temperature T1H is higher than room temperature. The first high temperature T1H is higher than the boiling point of the solvent. The temperature of the first solidified film H1 rises from the first low temperature T1L. The temperature of the first solidified film H1 rises to the first high temperature T1H. The first high temperature T1H corresponds to the heating temperature of the first solidified film H1.

[0179] The first high temperature T1H is equal to or higher than the thermal decomposition temperature Tp1. That is, the first solidified film H1 is heated to a temperature equal to or higher than the thermal decomposition temperature Tp1. For example, the first high temperature T1H is equal to or higher than 100 degrees. For example, the first high temperature T1H is equal to or higher than 200 degrees. For example, the first high temperature T1H is equal to or higher than 400 degrees. For example, the first high temperature T1H is equal to or higher than 700 degrees.

[0180] The first solidified film H1 is removed by being thermally decomposed. Specifically, the first solidified film H1 is reduced. The first solidified film H1 becomes thinner.

[0181] The polymer of the thermosetting material in the first solidified film H1 is thermally decomposed, the polymer of the thermosetting material is depolymerized, and the molecular weight of the polymer of the thermosetting material is reduced.

[0182] For example, the first solidified film H1 gasifies, for example, a polymer of a thermosetting material gasifies.

[0183] For example, the first solidified film H1 is decomposed into a plurality of particles. For example, a polymer of a thermosetting material is decomposed into a plurality of particles. The plurality of particles floats away from the substrate W. The floating particles form, for example, smoke.

[0184] For example, the first solidified film H1 is removed from the substrate W without being melted. For example, a polymer of a thermosetting material is removed from the substrate W without being melted.

[0185] When the first solidified film H1 is thermally decomposed, the first solidified film H1 does not exert a significant force on the protrusion A. When the first solidified film H1 is thermally decomposed, the force acting on the protrusion A is low.

[0186] 12 is an enlarged view schematically showing the substrate W in the first pyrolysis step. Eventually, the entire first solidified film H1 is removed from the substrate W. The upper surface WS1 of the substrate W is exposed to the gas J. The entire pattern P is exposed to the gas J. The entire protrusion A is exposed to the gas J. The entire recess B is filled only with the gas J. No liquid is present on the substrate W. The substrate W is dried.

[0187] <1-5. Technical Significance of the Substrate Processing Method of the First Embodiment> Example 1 will be used to explain the technical significance of the substrate processing method of the first embodiment.

[0188] The conditions for Example 1 will be explained.

[0189] A substrate W is prepared on which a pattern P is formed. The pattern P includes a plurality of convex portions A and a plurality of concave portions B. The width BW of the concave portions B is 10 nm.

[0190] In the first embodiment, the substrate W is subjected to a series of processes including a first processing liquid supplying step, a first applying step, a first curing step, and a first pyrolysis step.

[0191] In the first treatment liquid supplying step, the treatment liquid L is isopropyl alcohol.

[0192] In the first application step, the first drying aid F1 is composed of THMR-ip5720 (manufactured by Tokyo Ohka Kogyo Co., Ltd.) and isopropyl alcohol. THMR-ip5720 corresponds to the thermosetting material. Isopropyl alcohol corresponds to the solvent.

[0193] In the first hardening step, the substrate W and the first solidified film H1 are heated to 100 degrees.

[0194] In the first pyrolysis step, the substrate W and the first solidified film H1 are heated to 700 degrees.

[0195] The substrate W treated in Example 1 was evaluated by the local collapse rates E1, E2, E3 and the average collapse rate EA.

[0196] The local collapse rates E1-E3 and the average collapse rate EA are calculated as follows. Each local collapse rate Ei is the collapse rate in a local area Mi. Here, i is 1, 2, or 3. Each local area Mi is a minute region of the substrate W. Each local area Mi is magnified 50,000 times using a scanning electron microscope, for example. An observer observes each protrusion A in each local area Mi one by one. The observer classifies each protrusion A into either a collapsed protrusion A or an uncollapsed protrusion A. Here, the number of protrusions A observed in the local area Mi is defined as NAi. The number NBi is defined as the number NAi or less. The local collapse rate Ei is the ratio of the number NBi to the number NAi. The local collapse rate Ei is defined, for example, by the following equation: Ei=NBi / NAi*100 (%) The average collapse rate EA is the average value of the local collapse rates E1-E3.

[0197] The local collapse rate E1 of Example 1 was 0%. Similarly, the local collapse rates E2 and E3 of Example 1 were also 0%. The average collapse rate EA of Example 1 was 0%.

[0198] The following can be seen from Example 1. In Example 1, each convex portion A did not collapse. No collapsed convex portion A occurred. In Example 1, collapse of convex portion A was completely prevented. In Example 1, the substrate W was dried with the pattern P well protected.

[0199] <1-6. Effects of the First Embodiment> The substrate processing method of the first embodiment is for processing a substrate W on which a pattern P is formed. The pattern P includes a plurality of convex portions A and a plurality of concave portions B. The substrate processing method includes a first applying step and a first curing step. In the first applying step, a first drying auxiliary liquid F1 is applied to the substrate W. The first drying auxiliary liquid F1 contains a thermosetting material and a solvent. In the first curing step, the first drying auxiliary liquid F1 on the substrate W is heated. In the first curing step, a first solidified film H1 is formed on the substrate W. Therefore, the first solidified film H1 is suitably formed on the substrate W.

[0200] In the first hardening step, at least a portion of the first solidified film H1 is formed above the pattern P. In the first hardening step, the first solidified film H1 is in contact with the upper end A2 of the protrusion A. Therefore, the first solidified film H1 supports the protrusion A appropriately.

[0201] In the first curing step, the entire first solidified film H1 is located above the bottom B1 of the recess B. Therefore, a portion of the protrusion A is not in contact with the first solidified film H1. Specifically, at least a portion of the side A3 of the protrusion A is not in contact with the first solidified film H1. Therefore, in the first curing step, the protrusion A is less susceptible to the influence of the volume change of the first solidified film H1. That is, in the first curing step, the influence of the volume change of the first solidified film H1 on the protrusion A is small.

[0202] Specifically, even if the volume of the first solidified film H1 changes, the force that the first solidified film H1 exerts on the side A3 is small. For example, even if the first solidified film H1 expands, it is difficult for the first solidified film H1 to push the side A3 with significant force. Therefore, even if the first solidified film H1 expands, the convex portion A is unlikely to fall over. For example, even if the first solidified film H1 contracts, it is difficult for the first solidified film H1 to pull the side A3 with significant force. Therefore, even if the first solidified film H1 contracts, the convex portion A is unlikely to fall over.

[0203] The substrate processing method includes a first thermal decomposition step. In the first thermal decomposition step, the first solidified film H1 is heated, thereby thermally decomposing the first solidified film H1. In the first thermal decomposition step, the substrate W is dried. Therefore, the first solidified film H1 is suitably thermally decomposed. Furthermore, in the first thermal decomposition step, the protrusions A are less susceptible to the volume change of the first solidified film H1. Therefore, the first solidified film H1 is suitably removed from the substrate W. Therefore, the substrate W is dried while preventing the protrusions A from collapsing. In other words, the substrate W is dried while the pattern P is protected.

[0204] As described above, according to the substrate processing method of the first embodiment, the substrate W is processed appropriately.

[0205] The finer the pattern P of the substrate W, the smaller the width BW of the recess B. Even when the width BW is small, it is easy to position the entire first solidified film H1 above the bottom B1 of the recess B in the first curing step. In fact, the smaller the width BW of the recess B, the easier it is to position the entire first solidified film H1 above the bottom B1 of the recess B in the first curing step. Therefore, the finer the pattern P of the substrate W, the smaller the effect that the volume change of the first solidified film H1 has on the protrusion A. Therefore, the finer the pattern P of the substrate W, the easier it is to properly process the substrate W.

[0206] The width BW of the recess B is 10 nm or less. Therefore, it is very easy to position the entire first solidified film H1 above the bottom B1 of the recess B in the first curing step. Therefore, the effect of the volume change of the first solidified film H1 on the protrusion A is sufficiently small. Therefore, it is even easier to process the substrate W appropriately.

[0207] In the first curing step, the first solidified film H1 bridges the upper ends A2 of the protrusions A. Therefore, the first solidified film H1 supports the protrusions A more favorably.

[0208] In the first curing step, the entire first solidified film H1 is located at a position equal to or higher than the upper end A2 of the protrusion A. Therefore, the entire first solidified film H1 is located above the recess B. The entire first solidified film H1 is located at a position higher than the recess B. The first solidified film H1 does not substantially have a portion located in the recess B. Therefore, the entire side A3 of the protrusion A is separated from the first solidified film H1. Therefore, the first solidified film H1 does not substantially exert a force on the side A3. The protrusion A is not substantially affected by the volume change of the first solidified film H1.

[0209] Even if the width BW of the recessed portion B is small, it is easy to position the entire first solidified film H1 in the first hardening step at a position equal to or higher than the upper end A2 of the protruding portion A. In fact, the smaller the width BW of the recessed portion B, the easier it is to position the entire first solidified film H1 in the first hardening step at a position equal to or higher than the upper end A2 of the protruding portion A. Therefore, the finer the pattern P of the substrate W, the easier it is to process the substrate W appropriately.

[0210] In the first curing step, the entire first solidified film H1 is located above the recessed portion B. Therefore, at the end of the first pyrolysis step, no residue of the first solidified film H1 remains in the recessed portion B. Therefore, a clean substrate W is obtained in the first pyrolysis step.

[0211] In the first curing process, the first solidified film H1 has a lower surface H1b. In the first curing process, the lower surface H1b contacts the upper end A2 of the protrusion A. In the first curing process, the lower surface H1b curves upward in a convex shape between adjacent protrusions A. Therefore, the shape of the lower surface H1b effectively prevents the first solidified film H1 from entering the recess B. Therefore, the lower surface H1b effectively separates the first solidified film H1 from the side A3. Therefore, the protrusion A is effectively protected from a volume change of the first solidified film H1. The protrusion A is substantially not affected by the volume change of the first solidified film H1.

[0212] In the first curing step, the thermosetting material becomes a polymer. The first solidified film H1 contains a polymer of the thermosetting material. The polymer of the thermosetting material has a length greater than the width BW of the recess B. The recess B is too narrow for the polymer of the thermosetting material. For this reason, the thermosetting material does not easily become a polymer in the recess B. Therefore, it is difficult to form the first solidified film H1 in the recess B. Therefore, it is easier to position the entire first solidified film H1 above the bottom B1 of the recess B in the first curing step. The entire first solidified film H1 is preferably positioned above the bottom BW of the recess B.

[0213] In the first curing step, the heating temperature of the first drying assistant liquid F1 is adjusted based on the width BW of the recessed portion B. Therefore, it is easier to position the entire first solidified film H1 above the bottom B1 of the recessed portion B in the first curing step, regardless of the width BW of the recessed portion B. The entire first solidified film H1 is preferably positioned above the bottom B1 of the recessed portion B, regardless of the width BW of the recessed portion B.

[0214] In the first curing step, the first drying assistant liquid F1 is heated to a first low temperature T1L. The first low temperature T1L is lower than the first high temperature T1H. Therefore, in the first curing step, thermal decomposition of the first solidified film H1 is effectively prevented. Therefore, in the first curing step, the first solidified film H1 is effectively formed. Therefore, in the first curing step, the first solidified film H1 effectively supports the protrusions A.

[0215] The first low temperature T1L is lower than the thermal decomposition temperature Tp1. Therefore, the first solidified film H1 is not thermally decomposed in the first hardening step. Therefore, the first solidified film H1 effectively supports the protrusion A in the first hardening step. Therefore, the protrusion A is effectively prevented from collapsing in the first hardening step.

[0216] In the first curing step, the solvent in the first drying auxiliary liquid F1 also evaporates. Therefore, at the end of the first curing step, no solvent is present on the substrate W. That is, in the first pyrolysis step, no solvent is present on the substrate W. Therefore, in the first pyrolysis step, the capillary force of the solvent does not act on the protrusions A. Therefore, it is even easier to protect the protrusions A in the first pyrolysis step.

[0217] The solvent evaporates at a temperature lower than the thermal decomposition temperature Tp1. Therefore, all of the solvent on the substrate W is preferably evaporated before the first solidified film H1 is thermally decomposed. Therefore, the first solidified film H1 supports the protrusions A until all of the solvent on the substrate W is evaporated. Therefore, the protrusions A are preferably prevented from collapsing until all of the solvent on the substrate W is evaporated.

[0218] The boiling point of the solvent is lower than the thermal decomposition temperature Tp1, so the solvent evaporates suitably at a temperature lower than the thermal decomposition temperature Tp1.

[0219] The first low temperature T1L is higher than the boiling point of the solvent, so that the solvent evaporates quickly in the first curing step.

[0220] In the first curing step, the first drying auxiliary liquid F1 contains an unreacted portion that does not change into the first solidified film H1. In the first curing step, the unreacted portion of the first drying auxiliary liquid F1 is removed from the substrate W. Therefore, at the end of the first curing step, the first drying auxiliary liquid F1 is not present on the substrate W. That is, in the first pyrolysis step, the first drying auxiliary liquid F1 is not present on the substrate W. Therefore, in the first pyrolysis step, the capillary force of the first drying auxiliary liquid F1 does not act on the protrusions A. This makes it even easier to protect the protrusions A in the first pyrolysis step.

[0221] In the first thermal decomposition step, the first solidified film H1 is heated to a first high temperature T1H, which is higher than the first low temperature T1L. Therefore, in the first thermal decomposition step, the first solidified film H1 is suitably thermally decomposed.

[0222] The first solidified film H1 has thermal decomposition properties, and therefore, in the first thermal decomposition step, the first solidified film H1 is suitably thermally decomposed.

[0223] In the first thermal decomposition step, the first solidified film H1 is heated to a temperature equal to or higher than the thermal decomposition temperature Tp1, so that the first solidified film H1 is thermally decomposed more effectively in the first thermal decomposition step.

[0224] In the first thermal decomposition step, the first solidified film H1 is heated to a temperature of 700° C. or higher. Therefore, it is easy to set the heating temperature of the first solidified film H1 to the thermal decomposition temperature Tp1 or higher.

[0225] In the first pyrolysis step, the first solidified film H1 is thermally decomposed, thereby removing the first solidified film H1 from the substrate W. Therefore, after the first pyrolysis step, the first solidified film H1 does not remain on the substrate W. After the first pyrolysis step, no residue of the first solidified film H1 also remains on the substrate W. Therefore, a clean substrate W is obtained after the first pyrolysis step.

[0226] In the first pyrolysis step, the first solidified film H1 is gasified, and therefore, the first solidified film H1 is suitably removed from the substrate W.

[0227] In the first pyrolysis step, the first solidified film H1 is decomposed into a plurality of particles. In the first pyrolysis step, the particles float away from the substrate W. Therefore, in the first pyrolysis step, the first solidified film H1 is suitably removed from the substrate W.

[0228] In the first thermal decomposition step, the first solidified film H1 is removed from the substrate W without being melted. Therefore, when the first solidified film H1 is thermally decomposed, the force acting on the protrusions A is even weaker. Therefore, even when the first solidified film H1 is thermally decomposed, the protrusions A are suitably protected.

[0229] In the first curing step, the thermosetting material becomes a polymer. The first solidified film H1 contains the polymer of the thermosetting material. Therefore, the first solidified film H1 is suitably formed in the first curing step.

[0230] In the first pyrolysis step, the polymer of the thermosetting material is pyrolyzed, and therefore, in the first pyrolysis step, the first solidified film H1 is suitably pyrolyzed.

[0231] The thickness of the first solidified film H1 is not excessively large. For example, the thickness of the first solidified film H1 is several hundred μm or less. Therefore, in the first thermal decomposition step, the first solidified film H1 is thermally decomposed quickly. The time for the first thermal decomposition step is suitably shortened.

[0232] In the first applying step, the thickness of the first liquid film G1 is adjusted. In the first curing step, a part of the first liquid film G1 is transformed into a first solidified film H1. Therefore, the thickness of the first solidified film H1 is suitably adjusted.

[0233] In the first coating step, the first drying auxiliary liquid F1 on the substrate W forms a first liquid film G1. The first liquid film G1 has a thickness that is sufficiently greater than the height AH of the convex portions A. The convex portions A are entirely immersed in the first liquid film G1. Therefore, in the first coating step, the convex portions A do not come into contact with the air-liquid interface. Therefore, in the first coating step, the capillary force of the first drying auxiliary liquid F1 does not act on the convex portions A. Therefore, in the first coating step as well, the convex portions A are suitably protected. In the first coating step as well, the convex portions A are suitably prevented from collapsing.

[0234] The substrate processing method of the first embodiment further includes a first processing liquid supplying step. The first processing liquid supplying step is performed before the first coating step. In the first processing liquid supplying step, the processing liquid L is supplied to the substrate W. Therefore, the substrate W is processed more appropriately.

[0235] In the first application step, the processing liquid L is removed from the substrate W. Therefore, in the first curing step and the first pyrolysis step, the processing liquid L is not present on the substrate W. Therefore, it is even easier to protect the convex portion A in the first curing step and the first pyrolysis step.

[0236] Second Embodiment The second embodiment will be described with reference to the drawings. Note that the same components as those in the first embodiment are designated by the same reference numerals and detailed description thereof will be omitted.

[0237] The substrate W and the substrate processing apparatus 1 of the second embodiment are generally the same as those of the first embodiment.

[0238] <2-1. Configuration of processing unit 11> 13 is a diagram showing the configuration of a processing unit 11 according to the second embodiment. In the second embodiment, the supply unit 21b supplies a second drying auxiliary liquid F2. In the second embodiment, the supply unit 21b does not supply the first drying auxiliary liquid F1. The second drying auxiliary liquid F2 is used to dry the substrate W. The second drying auxiliary liquid F2 has a function of assisting in drying the substrate W. The second drying auxiliary liquid F2 is a liquid. The second drying auxiliary liquid F2 is a liquid at room temperature.

[0239] The second drying aid liquid F2 contains an ultraviolet curable material. The ultraviolet curable material has ultraviolet curing properties. The ultraviolet curable material has not yet been cured by ultraviolet rays. The ultraviolet curable material has the property of being polymerized by ultraviolet rays. The ultraviolet curable material has the property of becoming a polymer by ultraviolet rays. The ultraviolet curable material has the property of being cured by ultraviolet rays.

[0240] The ultraviolet curable material includes at least one of a monomer and an oligomer. At least one of the monomer and the oligomer in the ultraviolet curable material has the property of being polymerized by ultraviolet light. The ultraviolet curable material does not include a polymer. The ultraviolet curable material does not include a macromolecule. The ultraviolet curable material does not include a polymer compound.

[0241] The ultraviolet curable material is a liquid. The ultraviolet curable material is a liquid at room temperature.

[0242] The ultraviolet curable material is, for example, isobornyl acrylate. The ultraviolet curable material is, for example, isobornyl acrylate monomer.

[0243] The second drying auxiliary liquid F2 contains a polymerization initiator. The polymerization initiator may also be called a “photopolymerization initiator.” The polymerization initiator initiates polymerization of the ultraviolet-curable material.

[0244] The polymerization initiator is, for example, a solid. The polymerization initiator is, for example, a solid at room temperature. The polymerization initiator is, for example, a powder. The polymerization initiator in the second drying auxiliary liquid F2 is, for example, dissolved in the ultraviolet-curable material. The concentration of the polymerization initiator in the second drying auxiliary liquid F2 is, for example, 1 wt % or more. The concentration of the polymerization initiator in the second drying auxiliary liquid F2 is, for example, 10 wt % or less.

[0245] The polymerization initiator is, for example, 1-hydroxycyclohexyl phenyl ketone.

[0246] The second drying aid liquid F2 does not contain a solvent. The solvent is, for example, at least one of an organic solvent and deionized water. As described above, the UV-curable material is a liquid. Therefore, it is not necessary to dissolve the UV-curable material in a solvent to produce the second drying aid liquid F2. As described above, the polymerization initiator is dissolved in the UV-curable material. Therefore, it is not necessary to dissolve the polymerization initiator in a solvent to produce the second drying aid liquid F2.

[0247] For example, the second drying aid liquid F2 consists of only an ultraviolet curable material and a polymerization initiator.

[0248] The nozzle 22b dispenses the second drying aid liquid F2. The valve 24b controls the dispensing of the second drying aid liquid F2. The supply source 25b sends the second drying aid liquid F2 to the supply unit 21b.

[0249] The second drying aid liquid F2 is used inside the housing 12. Therefore, the second drying aid liquid F2 is used, for example, under an environment of normal pressure.

[0250] The processing unit 11 includes an irradiation section 41. The irradiation section 41 irradiates the substrate W held by the substrate holding section 13 with ultraviolet light. Specifically, the irradiation section 41 irradiates the upper surface WS1 of the substrate W held by the substrate holding section 13 with ultraviolet light.

[0251] 13, ultraviolet rays are schematically shown by two-dot chain lines. The irradiation unit 41 irradiates ultraviolet rays downward. The irradiation area of ​​ultraviolet rays by the irradiation unit 41 is equal to or larger than the upper surface WS1 of the substrate W. The irradiation area of ​​ultraviolet rays by the irradiation unit 41 covers the entire upper surface WS1 of the substrate W. The entire upper surface WS1 of the substrate W is simultaneously exposed to ultraviolet rays from the irradiation unit 41.

[0252] An example configuration of the irradiation unit 41 will be described. The irradiation unit 41 includes a light-emitting unit 42. The light-emitting unit 42 is provided above the substrate holding unit 13. The light-emitting unit 42 is provided above the substrate W held by the substrate holding unit 13. The light-emitting unit 42 is installed inside the housing 12, for example.

[0253] For example, the light-emitting unit 42 does not move in the horizontal direction relative to the substrate W held by the substrate holding unit 13. For example, the light-emitting unit 42 does not move in the vertical direction Z relative to the substrate W held by the substrate holding unit 13. For example, the light-emitting unit 42 is fixed to the housing 12.

[0254] The light-emitting unit 42 includes one or more light sources 43. The light source 43 generates ultraviolet light. The light source 43 is, for example, a lamp. The lamp is, for example, a xenon lamp. The light source 43 is, for example, a light-emitting diode (LED).

[0255] The light emitting unit 42 includes a housing 44. The housing 44 supports the light source 43. The housing 44 has a substantially box shape. The housing 44 accommodates the light source 43.

[0256] The light-emitting unit 42 has an exit surface 45. The exit surface 45 emits ultraviolet light from the light source 43. The exit surface 45 emits the ultraviolet light downward. The exit surface 45 allows the ultraviolet light to pass through. The exit surface 45 is made of, for example, quartz glass. The exit surface 45 is disposed, for example, at the bottom of the housing 44. The exit surface 45 is disposed above the substrate W held by the substrate holding unit 13. The exit surface 45 extends horizontally. In a plan view, the exit surface 45 overlaps the entire substrate W held by the substrate holding unit 13.

[0257] The irradiation unit 41 includes a power supply 46. The power supply 46 is electrically connected to the light-emitting unit 42 (specifically, the light source 43). The power supply 46 supplies power to the light-emitting unit 42. The power supply 46 controls the light-emitting unit 42. For example, the power supply 46 switches the light-emitting unit 42 between irradiating and not irradiating ultraviolet light. For example, the power supply 46 adjusts the intensity of the ultraviolet light. For example, the power supply 46 adjusts the irradiation time of the ultraviolet light.

[0258] Although not shown in the figure, the control unit 10 further controls the irradiation unit 41. The control unit 10 controls the power source 46.

[0259] <2-2. Example of operation of processing unit 11> 13 and 14 are referenced. FIG. 14 is a flowchart showing the procedure of a substrate processing method according to a second embodiment. The substrate processing method is for processing a substrate W on which a pattern P is formed. The pattern P includes a plurality of convex portions A and a plurality of concave portions B. The substrate processing method includes steps S11 to S14. Steps S11 to S14 are performed in this order. Steps S11 to S14 are performed by a processing unit 11.

[0260] Step S11: Second processing liquid supply step A processing liquid L is supplied to the substrate W.

[0261] The operation of the second treatment liquid supplying step is substantially the same as the operation of the first treatment liquid supplying step in the first embodiment. The first treatment liquid supplying step is performed before the first application step, whereas the second treatment liquid supplying step is performed before the second application step.

[0262] Step S12: Second application step The second drying aid liquid F2 is applied to the substrate W.

[0263] The operation of the second coating step is similar to that of the first coating step. The second coating step corresponds to the first coating step, except that the first drying auxiliary liquid F1 is replaced with the second drying auxiliary liquid F2. Just to be sure, the second coating step will be briefly described.

[0264] The substrate holding unit 13 holds the substrate W. The rotation drive unit 17 rotates the substrate holding unit 13 and the substrate W. The supply unit 21b supplies the second drying assistant liquid F2 to the substrate W held by the substrate holding unit 13. The heating unit 31 does not heat the substrate W. The irradiation unit 41 does not irradiate ultraviolet light.

[0265] The inside of the housing 12 is kept at, for example, room temperature. In the second coating step, the substrate W is processed in, for example, a room temperature environment. The second drying assistant liquid F2 is applied to the substrate W in, for example, a room temperature environment.

[0266] FIG. 15 is a diagram schematically showing the substrate W in the second coating step. The substrate W is in an orientation with the pattern P facing upward. The pattern P is located on the upper surface WS1 of the substrate W. The pattern P faces upward. The second drying auxiliary liquid F2 is applied to the upper surface WS1. The upper surface WS1 is coated with the second drying auxiliary liquid F2. The second drying auxiliary liquid F2 is applied to the pattern P. The pattern P is coated with the second drying auxiliary liquid F2. The pattern P comes into contact with the second drying auxiliary liquid F2. The convex portion A comes into contact with the second drying auxiliary liquid F2. The second drying auxiliary liquid F2 removes the processing liquid L from the substrate W. The processing liquid L on the substrate W is replaced with the second drying auxiliary liquid F2.

[0267] The second drying auxiliary liquid F2 on the substrate W forms a second liquid film G2. The second liquid film G2 is located on the substrate W. The second liquid film G2 is located on the upper surface WS1. The second liquid film G2 covers the upper surface WS1. The second liquid film G2 covers the pattern P. In the second coating step, the thickness of the second liquid film G2 may further be adjusted.

[0268] The thickness of the second liquid film G2 is, for example, sufficiently larger than the height AH of the convex portion A. The thickness of the second liquid film G2 is, for example, at least twice the height AH. The thickness of the second liquid film G2 is, for example, at least several tens of times the height AH. The thickness of the second liquid film G2 is, for example, at least several tens of μm.

[0269] The thickness of the second liquid film G2 is not excessively large, for example, a few hundred μm or less.

[0270] The entire pattern P is immersed in the second liquid film G2, and the entire protrusion A is immersed in the second liquid film G2.

[0271] Convex portion A does not come into contact with the gas-liquid interface, so no capillary force acts on convex portion A.

[0272] The recess B is filled with the second liquid film G2. The entire recess B is filled only with the second liquid film G2.

[0273] Step S13: Second curing step The second drying auxiliary liquid F2 on the substrate W is irradiated with ultraviolet light, and a second solidified film is formed on the substrate W.

[0274] The substrate holding unit 13 holds the substrate W. The irradiation unit 41 irradiates the substrate W held by the substrate holding unit 13 with ultraviolet light. The rotation drive unit 17 does not rotate the substrate holding unit 13 or the substrate W. The heating unit 31 does not heat the substrate W.

[0275] In the second curing step, the inside of the housing 12 is maintained at, for example, room temperature. Therefore, in the second curing step, the substrate W is processed in, for example, a room temperature environment. The second solidified film is formed in, for example, a room temperature environment.

[0276] 16 is a diagram schematically showing the substrate W in the second curing step. The substrate W is in a position where the pattern P faces upward. The pattern P is located on the upper surface WS1 of the substrate W. The pattern P faces upward.

[0277] The upper surface WS1 of the substrate W is exposed to ultraviolet light. The second drying auxiliary liquid F2 on the substrate W is exposed to ultraviolet light. The polymerization initiator in the second drying auxiliary liquid F2 generates active species. The active species are, for example, radicals. The active species initiate a polymerization reaction of the ultraviolet-curable material in the second drying auxiliary liquid F2. As the polymerization reaction of the ultraviolet-curable material progresses, the degree of polymerization of the ultraviolet-curable material increases. The fluidity of the second drying auxiliary liquid F2 on the substrate W decreases. The second drying auxiliary liquid F2 on the substrate W hardens. The second drying auxiliary liquid F2 on the substrate W hardens.

[0278] Eventually, the ultraviolet curable material becomes a polymer. A polymer of an ultraviolet curable material corresponds to a cured product of the ultraviolet curable material. A polymer of an ultraviolet curable material corresponds to a polymer. A polymer of an ultraviolet curable material corresponds to a polymer compound.

[0279] The polymer of the ultraviolet curable material constitutes the second solidified film H2. The second solidified film H2 contains a polymer of the ultraviolet curable material.

[0280] In other words, due to the polymerization reaction of the UV-curable material, part of the second drying auxiliary liquid F2 changes into the second solidified film H2, and part of the second liquid film G2 changes into the second solidified film H2. As a result, the second drying auxiliary liquid F2 decreases, and the second liquid film G2 becomes thinner.

[0281] The second solidified film H2 is formed on the substrate W. The second solidified film H2 is formed on the upper surface WS1. The second solidified film H2 is formed on the pattern P.

[0282] The second solidified film H2 covers the upper surface WS1. The second solidified film H2 covers the pattern P.

[0283] Here, the length of the polymer of the ultraviolet curable material is greater than the width BW of the recess B. The size of the polymer of the ultraviolet curable material is greater than the size of the recess B. Therefore, the ultraviolet curable material cannot change into a polymer in the recess B. On the other hand, the ultraviolet curable material can change into a polymer at a position above the recess B. Therefore, the ultraviolet curable material located above the recess B becomes a polymer. The ultraviolet curable material located inside the recess B does not become a polymer.

[0284] Therefore, at least a portion of the second solidified film H2 is located above the recessed portion B. In other words, at least a portion of the second solidified film H2 is located above the pattern P. At least a portion of the second solidified film H2 is located at a position equal to or higher than the upper end A2 of the protruding portion A.

[0285] The entire second solidified film H2 is located above the bottom B1 of the recess B. The entire second solidified film H2 is located at a position higher than the bottom B1. The second solidified film H2 is separated from the bottom B1. The second solidified film H2 does not contact the bottom B1. The second solidified film H2 does not have a portion that contacts the bottom B1. At least a portion of the recess B is not filled with the second solidified film H2. At least a portion of the recess B is a gap formed between the second solidified film H2 and the bottom B2. The gap is located below the second solidified film H2 and above the bottom B2.

[0286] The second solidified film H2 does not contact at least a portion of each protrusion A. Specifically, the second solidified film H2 does not contact at least a portion of each side A3. The second solidified film H2 is separated from at least a portion of the side A3. Therefore, even if the volume of the second solidified film H2 changes, the second solidified film H2 is unlikely to exert a significant force on the side A3.

[0287] For example, the entire second solidified film H2 is located above the recessed portion B. For example, no portion of the second solidified film H2 is located in the recessed portion B. For example, the entire second solidified film H2 is located at a position equal to or higher than the upper end A2 of the protrusion A. For example, the entire second solidified film H2 is located above the pattern P. For example, the second solidified film H2 is separated from the entire side A3 of the protrusion A. For example, no portion of the second solidified film H2 contacts the side A3. In this case, even if the volume of the second solidified film H2 changes, the second solidified film H2 does not exert a force on the side A3.

[0288] The second drying auxiliary liquid F2 contains unreacted portions in addition to the portion that changes into the second solidified film H2. The unreacted portions of the second drying auxiliary liquid F2 do not change into the second solidified film H2 and remain on the substrate W. The unreacted portions of the second drying auxiliary liquid F2 are located in the recesses B. The second drying auxiliary liquid F2 in the recesses B corresponds to the unreacted portions of the second drying auxiliary liquid F2.

[0289] The second drying aid liquid F2 in the recessed portion B comes into contact with a part of the protruding portion A. The second drying aid liquid F2 in the recessed portion B comes into contact with at least a part of the side A3 of the protruding portion A.

[0290] The second drying auxiliary liquid F2 in the recessed portion B contains an ultraviolet curable material. The unreacted portion of the second drying auxiliary liquid F2 contains an ultraviolet curable material.

[0291] Furthermore, the second solidified film H2 is in contact with the upper end A2 of the protrusion A. The second solidified film H2 is connected to the upper end A2. The second solidified film H2 is linked to the upper end A2. The second solidified film H2 is, for example, adhered to the upper end A2. Therefore, the second solidified film H2 preferably supports the protrusion A. The second solidified film H2 preferably prevents the protrusion A from collapsing. For example, the second solidified film H2 prevents the upper end A2 from moving sideways. For example, the second solidified film H2 prevents the protrusion A from tilting sideways.

[0292] The second solidified film H2 bridges the upper ends A2. The second solidified film H2 corresponds to a bridge connecting the upper ends A2. Two or more upper ends A2 are connected to each other by the second solidified film H2. Therefore, the second solidified film H2 more effectively supports the protrusion A. The second solidified film H2 more effectively prevents the protrusion A from collapsing.

[0293] The second solidified film H2 has a thickness. The thickness of the second solidified film H2 is sufficiently larger than the height AH of the protrusion A. The thickness of the second solidified film H2 is, for example, at least twice the height AH. The thickness of the second solidified film H2 is, for example, at least several tens of times the height AH.

[0294] The thickness of the second solidified film H2 is not excessively large, for example, several hundred μm or less.

[0295] 17 is an enlarged view schematically showing the substrate W in the second curing step. The second solidified film H2 will be described in more detail. The second solidified film H2 has a lower surface H2b. The lower surface H2b is in contact with the upper end A2 of the protrusion A. With the lower surface H2b in contact with the upper end A2, the second solidified film H2 is formed above the pattern P.

[0296] The entire lower surface H2b is located at a position higher than the bottom B1 of the recess B. The lower surface H2b is spaced apart from the bottom B1. The lower surface H2b does not contact the bottom B1.

[0297] For example, the lower surface H2b curves convexly upward between adjacent convex portions A. For example, the lower surface H2b curves convexly upward above the concave portion B. For example, the portion of the lower surface H2b between adjacent convex portions A is located at a higher position than the upper end A2. For example, the portion of the lower surface H2b above the concave portion B is located at a higher position than the upper end A2.

[0298] The second solidified film H2 is a solid. The second solidified film H2 is a solid at room temperature. The second solidified film H2 may be called a "hardened film." The second solidified film H2 may be called a "polymer film."

[0299] For example, the second solidified film H2 does not have substantially elasticity. For example, the second solidified film H2 does not substantially deform. Alternatively, the second solidified film H2 may have elasticity.

[0300] The second solidified film H2 is thermally decomposable.

[0301] The second solidified film H2 has a thermal decomposition temperature Tp2. The thermal decomposition temperature Tp2 is higher than room temperature. The thermal decomposition temperature Tp2 is, for example, 100 degrees or higher. The thermal decomposition temperature Tp2 is, for example, 200 degrees or higher. The thermal decomposition temperature Tp2 is, for example, 400 degrees or higher. The thermal decomposition temperature Tp2 is, for example, 700 degrees or higher.

[0302] The second drying auxiliary liquid F2 does not substantially evaporate at room temperature. The ultraviolet curable material does not substantially evaporate at room temperature. The boiling point of the second drying auxiliary liquid F2 is, for example, higher than room temperature. The boiling point of the ultraviolet curable material is, for example, higher than room temperature.

[0303] For this reason, in the second curing step, the unreacted second drying auxiliary liquid F2 is not removed from the substrate W. Even at the end of the second curing step, the unreacted second drying auxiliary liquid F2 remains on the substrate W. Even at the end of the second curing step, the unreacted second drying auxiliary liquid F2 remains in the recesses B.

[0304] Step S14: Second pyrolysis step The second solidified film H2 on the substrate W is heated. The second solidified film H2 is thermally decomposed. The substrate W is dried.

[0305] The substrate holding unit 13 holds the substrate W. The heating unit 31 heats the substrate W held by the substrate holding unit 13. The rotation drive unit 17 does not rotate the substrate holding unit 13 or the substrate W. The irradiation unit 41 does not irradiate ultraviolet light.

[0306] 18 is an enlarged view schematically showing the substrate W in the second pyrolysis step. The substrate W is oriented with the pattern P facing upward. The pattern P is located on the upper surface WS1 of the substrate W. The pattern P faces upward.

[0307] The second solidified film H2 is heated through the substrate W held by the substrate holder 13.

[0308] In the second pyrolysis step, the second solidified film H2 is heated to a second temperature T2. The second temperature T2 is higher than room temperature. For example, the temperature of the second solidified film H2 rises from room temperature. The temperature of the second solidified film H2 rises to the second temperature T2. The second high temperature T2H corresponds to the heating temperature of the second solidified film H2.

[0309] The second temperature T2 is equal to or higher than the thermal decomposition temperature Tp2. That is, the second solidified film H2 is heated to a temperature equal to or higher than the thermal decomposition temperature Tp2. For example, the second temperature T2 is equal to or higher than 100 degrees. For example, the second temperature T2 is equal to or higher than 200 degrees. For example, the second temperature T2 is equal to or higher than 400 degrees. For example, the second temperature T2 is equal to or higher than 700 degrees.

[0310] The second temperature T2 is higher than the boiling point of the second drying aid liquid F2 and the boiling point of the ultraviolet curable material.

[0311] As described above, at the end of the second curing step, a portion of the second drying auxiliary liquid F2 remains on the substrate W. In the second pyrolysis step, the second drying auxiliary liquid F2 remaining on the substrate W is also heated via the substrate W held by the substrate holder 13. In the second pyrolysis step, the second drying auxiliary liquid F2 remaining on the substrate W evaporates. In other words, in the second pyrolysis step, the unreacted portion of the second drying auxiliary liquid F2 is heated. In the second pyrolysis step, the unreacted portion of the second drying auxiliary liquid F2 evaporates. Specifically, in the second pyrolysis step, the second drying auxiliary liquid F2 in the recess B evaporates.

[0312] The second drying auxiliary liquid F2 evaporates at a temperature lower than the thermal decomposition temperature Tp2. The ultraviolet curable material evaporates at a temperature lower than the thermal decomposition temperature Tp2. For example, the boiling point of the second drying auxiliary liquid F2 is lower than the thermal decomposition temperature Tp2. For example, the boiling point of the ultraviolet curable material is lower than the thermal decomposition temperature Tp2.

[0313] Therefore, in the second pyrolysis step, before the second solidified film H2 is pyrolyzed, the second drying assistant liquid F2 remaining on the substrate W evaporates. In the second pyrolysis step, before the second solidified film H2 is pyrolyzed, the unreacted second drying assistant liquid F2 evaporates.

[0314] When the second drying auxiliary liquid F2 evaporates, the second solidified film H2 is not substantially thermally decomposed. When the second drying auxiliary liquid F2 evaporates, the second solidified film H2 supports the protrusions A.

[0315] As the second drying auxiliary liquid F2 evaporates, the second drying auxiliary liquid F2 in the recesses B decreases. The second drying auxiliary liquid F2 in the recesses B does not change into the second solidified film H2 and is removed from the substrate W. The unreacted second drying auxiliary liquid F2 is removed from the substrate W without changing into the second solidified film H2.

[0316] The gas J in the housing 12 enters the recessed portion B. The second drying auxiliary liquid F2 and the gas J come into contact with each other in the recessed portion B. The second drying auxiliary liquid F2 and the gas J form a gas-liquid interface K2. The gas-liquid interface K2 is located in the recessed portion B. The gas-liquid interface K2 comes into contact with the protruding portion A. The gas-liquid interface K2 comes into contact with the side A3 of the protruding portion A. The capillary force of the second drying auxiliary liquid F2 acts on the protruding portion A. However, the protruding portion A is supported by the second solidified film H2. Therefore, even if the capillary force acts on the protruding portion A, the protruding portion A does not collapse.

[0317] 19 is an enlarged view schematically showing the substrate W in the second pyrolysis step. Eventually, all of the second drying auxiliary liquid F2 in the recesses B evaporates. All of the second drying auxiliary liquid F2 in the recesses B is removed from the substrate W. All of the unreacted second drying auxiliary liquid F2 is removed from the substrate W. As described above, the second drying auxiliary liquid F2 other than the unreacted portion changes into a second solidified film H2. Therefore, all of the second drying auxiliary liquid F2 on the substrate W disappears from the substrate W.

[0318] The protrusions A are still supported by the second solidified film H2. The second solidified film H2 supports the protrusions A until all of the unreacted second drying assistant liquid F2 is removed from the substrate W.

[0319] After all of the unreacted second drying auxiliary liquid F2 has been removed from the substrate W, no liquid is present on the substrate W. No liquid is present in the recessed portion B. No liquid comes into contact with the protruding portion A.

[0320] 20 is a diagram schematically illustrating the substrate W in the second pyrolysis step. After the unreacted portion of the second drying assistant liquid F2 is removed from the substrate W, the second solidified film H2 is pyrolyzed. The pyrolysis of the second solidified film H2 removes the second solidified film H2. Specifically, the second solidified film H2 decreases. The second solidified film H2 becomes thinner.

[0321] The polymer of the ultraviolet curable material in the second solidified film H2 is thermally decomposed, the polymer of the ultraviolet curable material is depolymerized, and the molecular weight of the polymer of the ultraviolet curable material is reduced.

[0322] For example, the second solidified film H2 is gasified, for example, the polymer of the ultraviolet curable material is gasified.

[0323] For example, the second solidified film H2 is decomposed into a plurality of particles. For example, the polymer of the ultraviolet curable material is decomposed into a plurality of particles. The plurality of particles floats from the substrate W. The floating particles form, for example, smoke.

[0324] For example, the second solidified film H2 is removed from the substrate W without melting. For example, the polymer of the ultraviolet curable material is removed from the substrate W without melting.

[0325] When the second solidified film H2 is thermally decomposed, the second solidified film H2 does not exert a significant force on the protrusion A. When the second solidified film H2 is thermally decomposed, the force acting on the protrusion A is low.

[0326] 21 is a diagram schematically showing the substrate W in the second pyrolysis step. Finally, the entire second solidified film H2 is removed from the substrate W. The upper surface WS1 of the substrate W is exposed to the gas J. The entire pattern P is exposed to the gas J. The entire protrusion A is exposed to the gas J. The entire recess B is filled only with the gas J. No liquid is present on the substrate W. The substrate W is dried.

[0327] <2-3. Technical Significance of the Substrate Processing Method of the Second Embodiment> Example 2 will be used to explain the technical significance of the drying treatment method of the second embodiment.

[0328] The conditions for Example 2 will be explained.

[0329] A substrate W is prepared on which a pattern P is formed. The pattern P includes a plurality of convex portions A and a plurality of concave portions B. The width BW of the concave portions B is 10 nm.

[0330] In the second embodiment, the substrate W is subjected to a series of processes including a second processing liquid supplying step, a second applying step, a second curing step, and a second pyrolysis step.

[0331] In the second treatment liquid supplying step, the treatment liquid L is isopropyl alcohol.

[0332] In the second coating step, the second drying aid F2 consists of only isobornyl acrylate monomer and 1-hydroxycyclohexyl phenyl ketone. The isobornyl acrylate monomer corresponds to the ultraviolet curable material. The 1-hydroxycyclohexyl phenyl ketone corresponds to the polymerization initiator.

[0333] In the second curing step, the ultraviolet light has a wavelength of 365 nm. The ultraviolet light has a power of 342 mW / cm 2 The second drying aid liquid F2 on the substrate W is irradiated with the ultraviolet light for 10 minutes.

[0334] In the second pyrolysis step, the substrate W and the second solidified film H2 are heated to 700° C. The substrate W and the second solidified film H2 are heated for one hour.

[0335] The substrate W treated in Example 2 was evaluated by the local collapse rates E1, E2, E3 and the average collapse rate EA.

[0336] The local collapse rates E1, E2, and E3 of Example 2 were 0%, 0%, and 12%, respectively. The average collapse rate EA of Example 2 was 4%.

[0337] The following can be seen from Example 2: In Example 2, most of the protrusions A did not collapse. In Example 2, collapse of the protrusions A was sufficiently prevented. In Example 2, the substrate W was dried with the pattern P well protected.

[0338] <2-4. Effects of the Second Embodiment> The substrate processing method of the second embodiment is for processing a substrate W on which a pattern P is formed. The pattern P includes a plurality of convex portions A and a plurality of concave portions B. The substrate processing method includes a second applying step, a second curing step, and a second pyrolysis step. In the second applying step, a second drying auxiliary liquid F2 is applied to the substrate W. The second drying auxiliary liquid F2 includes an ultraviolet-curable material. In the second curing step, ultraviolet light is irradiated onto the second drying auxiliary liquid F2 on the substrate W. In the second curing step, a second solidified film H2 is formed on the substrate W. Therefore, the second solidified film H2 is suitably formed on the substrate W.

[0339] In the second curing step, at least a portion of the second solidified film H2 is formed above the pattern P. In the second curing step, the second solidified film H2 is in contact with the upper ends A2 of the protrusions A. Therefore, the second solidified film H2 supports the protrusions A appropriately.

[0340] In the second curing process, the entire second solidified film H2 is located above the bottom B1 of the recess B. Therefore, at least a portion of the protrusion A is not in contact with the second solidified film H2. Specifically, at least a portion of the side A3 of the protrusion A is not in contact with the second solidified film H2. Therefore, in the second curing process, the protrusion A is less susceptible to the influence of the volume change of the second solidified film H2. In other words, in the second curing process, the influence of the volume change of the second solidified film H2 on the protrusion A is small.

[0341] Specifically, even if the volume of the second solidified film H2 changes, the force that the second solidified film H2 exerts on the side A3 is small. For example, even if the second solidified film H2 expands, it is difficult for the second solidified film H2 to push the side A3 with significant force. Therefore, even if the second solidified film H2 expands, the convex portion A is unlikely to fall over. For example, even if the second solidified film H2 contracts, it is difficult for the second solidified film H2 to pull the side A3 with significant force. Therefore, even if the second solidified film H2 contracts, the convex portion A is unlikely to fall over.

[0342] The substrate processing method includes a second pyrolysis step. In the second pyrolysis step, the second solidified film H2 is heated, thereby pyrolyzing the second solidified film H2. In the second pyrolysis step, the substrate W is dried. Therefore, the second solidified film H2 is suitably pyrolyzed. Furthermore, in the second pyrolysis step, the protrusions A are less susceptible to the volume change of the second solidified film H2. Therefore, the second solidified film H2 is suitably removed from the substrate W. Therefore, the substrate W is dried while preventing the protrusions A from collapsing. That is, the substrate W is dried while the pattern P is protected.

[0343] As described above, according to the substrate processing method of the second embodiment, the substrate W is processed appropriately.

[0344] The finer the pattern P of the substrate W, the smaller the width BW of the recess B. Even when the width BW is small, it is easy to position the entire second solidified film H2 above the bottom B1 of the recess B in the second curing step. In fact, the smaller the width BW of the recess B, the easier it is to position the entire second solidified film H2 above the bottom B1 of the recess B in the second curing step. Therefore, the finer the pattern P of the substrate W, the smaller the effect that the volume change of the second solidified film H2 has on the protrusion A. Therefore, the finer the pattern P of the substrate W, the easier it is to properly process the substrate W.

[0345] The width BW of the recess B is 10 nm or less. Therefore, it is very easy to position the entire second solidified film H2 above the bottom B1 of the recess B in the second curing step. Therefore, the effect of the volume change of the second solidified film H2 on the protrusion A is sufficiently small. Therefore, it is even easier to process the substrate W appropriately.

[0346] In the second curing step, the second solidified film H2 bridges the upper ends A2 of the protrusions A. Therefore, the second solidified film H2 supports the protrusions A more favorably.

[0347] In the second curing step, the entire second solidified film H2 is located at a position equal to or higher than the upper end A2 of the protrusion A. Therefore, the entire second solidified film H2 is located above the recess B. The entire second solidified film H2 is located at a position higher than the recess B. The second solidified film H2 does not substantially have a portion located in the recess B. Therefore, the entire side A3 of the protrusion A is separated from the second solidified film H2. Therefore, the second solidified film H2 does not substantially exert a force on the side A3. The protrusion A is not substantially affected by the volume change of the second solidified film H2.

[0348] Even if the width BW of the recess B is small, it is easy to position the entire second solidified film H2 in the second curing step at a position equal to or higher than the upper ends A2 of the protrusions A. In fact, the smaller the width BW of the recess B, the easier it is to position the entire second solidified film H2 in the second curing step at a position equal to or higher than the upper ends A2 of the protrusions A. Therefore, the finer the pattern P on the substrate W, the easier it is to process the substrate W appropriately.

[0349] In the second curing step, the entire second solidified film H2 is located above the recessed portion B. Therefore, at the end of the second pyrolysis step, no residue of the second solidified film H2 remains in the recessed portion B. Therefore, a clean substrate W is obtained in the second pyrolysis step.

[0350] In the second curing process, the second solidified film H2 has a lower surface H2b. In the second curing process, the lower surface H2b contacts the upper end A2 of the protrusion A. In the second curing process, the lower surface H2b curves upward in a convex shape between adjacent protrusions A. Therefore, the shape of the lower surface H2b effectively prevents the second solidified film H2 from entering the recess B. Therefore, the lower surface H2b effectively separates the second solidified film H2 from the side A3. Therefore, the protrusion A is effectively protected from a volume change of the second solidified film H2. The protrusion A is substantially not affected by the volume change of the second solidified film H2.

[0351] In the second curing step, the ultraviolet curable material becomes a polymer. The second solidified film H2 contains a polymer of the ultraviolet curable material. The polymer of the ultraviolet curable material has a length greater than the width BW of the recess B. The recess B is too narrow for the polymer of the ultraviolet curable material. For this reason, the ultraviolet curable material does not easily become a polymer in the recess B. Therefore, it is difficult to form the second solidified film H2 in the recess B. Therefore, it is easier to position the entire second solidified film H2 above the bottom B1 of the recess B in the second curing step. The entire second solidified film H2 is preferably positioned above the bottom B1 of the recess B.

[0352] At the end of the second curing step, a portion of the second drying auxiliary liquid F2 remains on the substrate W. In the second pyrolysis step, the second drying auxiliary liquid F2 remaining on the substrate W is further evaporated. Therefore, the second drying auxiliary liquid F2 remaining on the substrate W is suitably removed from the substrate W in the second pyrolysis step. Therefore, the substrate W is suitably dried.

[0353] In the second pyrolysis step, the second drying auxiliary liquid F2 remaining on the substrate W evaporates before the second solidified film H2 is pyrolyzed. In the second pyrolysis step, the second drying auxiliary liquid F2 remaining on the substrate W evaporates, and then the second solidified film H2 is pyrolyzed. In the second pyrolysis step, the second solidified film H2 is not substantially pyrolyzed until the second drying auxiliary liquid F2 remaining on the substrate W evaporates. Therefore, in the second pyrolysis step, the second solidified film H2 supports the protrusions A until the second drying auxiliary liquid F2 remaining on the substrate W evaporates. That is, in the second pyrolysis step, the second solidified film H2 suitably protects the protrusions A from the second drying auxiliary liquid F2. Furthermore, when the second solidified film H2 is pyrolyzed, the second drying auxiliary liquid F2 is not present on the substrate W. Therefore, it is even easier to protect the protrusions A when the second solidified film H2 is pyrolyzed. Therefore, the substrate W is properly dried.

[0354] In the second curing step, the second drying auxiliary liquid F2 contains an unreacted portion that does not change into the second solidified film H2. In the second pyrolysis step, the unreacted portion of the second drying auxiliary liquid F2 is removed from the substrate W. Therefore, the unreacted portion of the second drying auxiliary liquid F2 is suitably removed from the substrate W in the second pyrolysis step. As a result, the substrate W is suitably dried.

[0355] In the second pyrolysis step, the unreacted portion of the second drying auxiliary liquid F2 is removed from the substrate W before the second solidified film H2 is pyrolyzed. Therefore, in the second pyrolysis step, the second solidified film H2 is not substantially pyrolyzed until the unreacted portion of the second drying auxiliary liquid F2 is removed from the substrate W. Therefore, in the second pyrolysis step, the second solidified film H2 supports the protrusions A until the unreacted portion of the second drying auxiliary liquid F2 is removed from the substrate W. That is, in the second pyrolysis step, the second solidified film H2 effectively protects the protrusions A from the second drying auxiliary liquid F2. Furthermore, when the second solidified film H2 is pyrolyzed, the second drying auxiliary liquid F2 is not present on the substrate W. Therefore, it is even easier to protect the protrusions A when the second solidified film H2 is pyrolyzed.

[0356] The second drying auxiliary liquid F2 evaporates at a temperature lower than the thermal decomposition temperature Tp2. Therefore, in the second thermal decomposition step, the second drying auxiliary liquid F2 remaining on the substrate W is suitably evaporated before the second solidified film H2 is thermally decomposed. In the second thermal decomposition step, the unreacted second drying auxiliary liquid F2 is suitably removed from the substrate W before the second solidified film H2 is thermally decomposed.

[0357] The boiling point of the second drying aid liquid F2 is lower than the thermal decomposition temperature Tp2, so the second drying aid liquid F2 evaporates suitably at a temperature lower than the thermal decomposition temperature Tp2.

[0358] The ultraviolet curable material evaporates at a temperature lower than the thermal decomposition temperature Tp2, and therefore the second drying assistant liquid F2 evaporates suitably at a temperature lower than the thermal decomposition temperature Tp2.

[0359] The boiling point of the ultraviolet curable material is lower than the thermal decomposition temperature Tp2, so the ultraviolet curable material evaporates suitably at a temperature lower than the thermal decomposition temperature Tp2.

[0360] The second solidified film H2 has thermal decomposition properties, and therefore, in the second thermal decomposition step, the second solidified film H2 is suitably thermally decomposed.

[0361] In the second thermal decomposition step, the second solidified film H2 is heated to a temperature equal to or higher than the thermal decomposition temperature Tp2, so that the second solidified film H2 is more suitably thermally decomposed in the second thermal decomposition step.

[0362] In the second thermal decomposition step, the second solidified film H2 is heated to a temperature of 700° C. or higher. Therefore, it is easy to set the heating temperature of the second solidified film H2 to the thermal decomposition temperature Tp2 or higher.

[0363] In the second pyrolysis step, the second solidified film H2 is thermally decomposed, thereby removing the second solidified film H2 from the substrate W. Therefore, after the second pyrolysis step, the second solidified film H2 does not remain on the substrate W. After the second pyrolysis step, no residue of the second solidified film H2 also remains on the substrate W. Therefore, a clean substrate W is obtained after the second pyrolysis step.

[0364] In the second pyrolysis step, the second solidified film H2 is gasified, and therefore, the second solidified film H2 is suitably removed from the substrate W.

[0365] In the second pyrolysis step, the second solidified film H2 is decomposed into a plurality of particles. In the second pyrolysis step, the particles float away from the substrate W. Therefore, in the second pyrolysis step, the second solidified film H2 is suitably removed from the substrate W.

[0366] In the second thermal decomposition step, the second solidified film H2 is removed from the substrate W without being melted. Therefore, when the second solidified film H2 is thermally decomposed, the force acting on the protrusions A is even weaker. Therefore, even when the second solidified film H2 is thermally decomposed, the protrusions A are suitably protected.

[0367] In the second curing step, the ultraviolet curable material becomes a polymer. The second solidified film H2 contains the polymer of the ultraviolet curable material. Therefore, in the second curing step, the second solidified film H2 is suitably formed.

[0368] In the second thermal decomposition step, the polymer of the ultraviolet curable material is thermally decomposed, and therefore, in the second thermal decomposition step, the second solidified film H2 is suitably thermally decomposed.

[0369] The UV-curable material is a liquid. Therefore, it is easy to obtain the second drying aid liquid F2 from the UV-curable material. For example, it is not necessary to use a solvent to obtain the second drying aid liquid F2. For example, the second drying aid liquid F2 can be obtained without using a solvent.

[0370] The UV curable material does not contain polymers, so it is easy to obtain a liquid UV curable material.

[0371] The ultraviolet curable material is isobornyl acrylate. As explained in Example 2, when the ultraviolet curable material is isobornyl acrylate, the pattern P is more effectively protected. Therefore, the substrate W is more appropriately dried.

[0372] The UV curable material is an isobornyl acrylate monomer, which allows the substrate W to be dried more appropriately, and it is easier to obtain a liquid form of the UV curable material.

[0373] The second drying auxiliary liquid F2 does not contain a solvent. Therefore, in the second coating step, no solvent is applied to the substrate W. In the second curing step and the second pyrolysis step, no solvent is present on the substrate W. Therefore, in the second curing step and the second pyrolysis step, the capillary force of the solvent does not act on the protrusions A. That is, in the second curing step and the second pyrolysis step, the force acting on the protrusions A is further reduced. Therefore, it is easier to protect the protrusions A in the second curing step and the second pyrolysis step.

[0374] The second drying auxiliary liquid F2 further contains a polymerization initiator, which accelerates the polymerization of the ultraviolet curable material, so that the second solidified film H2 is formed quickly in the second curing step.

[0375] The thickness of the second solidified film H2 is not excessively large. For example, the thickness of the second solidified film H2 is several hundred μm or less. Therefore, in the second pyrolysis step, the second solidified film H2 is quickly pyrolyzed. The time for the second pyrolysis step is suitably shortened.

[0376] In the second applying step, the thickness of the second liquid film G2 is adjusted. In the second curing step, a part of the second liquid film G2 is transformed into the second solidified film H2. Therefore, the thickness of the second solidified film H2 is suitably adjusted.

[0377] The irradiation area of ​​the irradiation unit 41 covers the entire substrate W. Therefore, ultraviolet rays can be uniformly irradiated over the entire second drying auxiliary liquid F2 on the substrate W. Therefore, the second solidified film H2 is formed uniformly over the entire substrate W. The second solidified film H2 is formed uniformly over the entire upper surface WS1. Furthermore, the entire second drying auxiliary liquid F2 on the substrate W is simultaneously exposed to ultraviolet rays. Therefore, in the second curing step, the second solidified film H2 is formed quickly. Therefore, the time for the second curing step is suitably shortened.

[0378] In the second coating step, the second drying auxiliary liquid F2 on the substrate W forms a second liquid film G2. The second liquid film G2 has a thickness that is sufficiently greater than the height AH of the protrusions A. The entire protrusions A are immersed in the second liquid film G2. Therefore, in the second coating step, the protrusions A do not come into contact with the air-liquid interface. Therefore, in the second coating step, the capillary force of the second drying auxiliary liquid F2 does not act on the protrusions A. Therefore, in the second coating step, the protrusions A are also suitably protected. In the second coating step, the protrusions A are also suitably prevented from collapsing.

[0379] The substrate processing method of the second embodiment further includes a second processing liquid supplying step. The second processing liquid supplying step is performed before the second coating step. In the second processing liquid supplying step, the processing liquid L is supplied to the substrate W. Therefore, the substrate is processed more appropriately.

[0380] In the second application step, the processing liquid L is removed from the substrate W. Therefore, in the second curing step and the second pyrolysis step, the processing liquid L is not present on the substrate W. Therefore, it is even easier to protect the convex portion A in the second curing step and the second pyrolysis step.

[0381] <3. Modified embodiment> The present invention is not limited to the first and second embodiments, and can be modified as follows.

[0382] (1) In the first curing step of the first embodiment described above, the entire first solidified film H1 is located at a position equal to or higher than the upper end A2 of the protrusion A. In the first curing step, the first solidified film H1 does not have a portion in contact with the side A3. However, this is not limited to this. For example, in the first curing step, the first solidified film H1 may include a portion that is located lower than the upper end A2 of the protrusion A. In the first curing step, the first solidified film H1 may have a portion in contact with the side A3.

[0383] Similarly, in the second curing step of the second embodiment described above, the entire second solidified film H2 is located at a position equal to or higher than the upper end A2 of the protrusion A. In the second curing step, the second solidified film H2 does not have a portion in contact with the side A3. However, this is not limited to this. For example, in the second curing step, the second solidified film H2 may include a portion that is located lower than the upper end A2 of the protrusion A. In the second curing step, the second solidified film H2 may have a portion in contact with the side A3.

[0384] (2) In the first embodiment described above, the thermosetting material contained in the first drying aid liquid F1 may be appropriately selected or changed depending on the width BW of the recess B. For example, the substrate processing method may include a first selection step of selecting, from a plurality of thermosetting materials, a thermosetting material that will become a polymer having a length greater than the width BW of the recess B. In the first application step, the first drying aid liquid F1 contains the thermosetting material selected in the first selection step.

[0385] Similarly, in the second embodiment described above, the UV-curable material contained in the second drying auxiliary liquid F2 may be appropriately selected or changed depending on the width BW of the recess B. For example, the substrate processing method may include a second selecting step of selecting, from a plurality of UV-curable materials, a UV-curable material that will become a polymer having a length greater than the width BW of the recess B. In the second applying step, the second drying auxiliary liquid F2 contains the UV-curable material selected in the second selecting step.

[0386] (3) In the first curing step of the first embodiment described above, the temperature rise curve of the first drying auxiliary liquid F1 may be selected or changed as appropriate. For example, in the first curing step, the temperature of the first drying auxiliary liquid F1 rises continuously from room temperature to the first low temperature T1L. Alternatively, in the first curing step, the temperature of the first drying auxiliary liquid F1 rises stepwise from room temperature to the first low temperature T1L.

[0387] (4) In the first thermal decomposition step of the first embodiment described above, the temperature rise curve of the first solidified film H1 may be appropriately selected or changed. For example, in the first thermal decomposition step, the temperature of the first solidified film H1 rises continuously from the first low temperature T1L to the first high temperature T1H. Alternatively, in the first thermal decomposition step, the temperature of the first solidified film H1 rises stepwise from the first low temperature T1L to the first high temperature T1H.

[0388] (5) In the second pyrolysis step of the second embodiment described above, the temperature rise curve of the second solidified film H2 may be selected or changed as appropriate. Two modified embodiments will be described below.

[0389] (5-1) In the second pyrolysis step, the temperature of the second solidified film H2 is continuously increased from room temperature to the second temperature T2. According to this modified embodiment, it is easy to rapidly increase the temperature of the second solidified film H2. Therefore, the second solidified film H2 is rapidly pyrolyzed. Therefore, the time for the second pyrolysis step is effectively shortened. Therefore, the substrate W is efficiently processed.

[0390] (5-2) In the second pyrolysis step, the temperature of the second solidified film H2 is increased stepwise.

[0391] 22 is a flowchart showing the procedure of the second pyrolysis step in a modified embodiment. Specifically, the second pyrolysis step includes a low-temperature heating step (step S21) and a high-temperature heating step (step S22). The low-temperature heating step is performed after the second curing step. As described above, at the end of the second curing step, a portion of the second drying auxiliary liquid F2 remains on the substrate W. The second drying auxiliary liquid F2 remaining on the substrate W corresponds to the unreacted portion of the second drying auxiliary liquid F2. The low-temperature heating step and the high-temperature heating step will now be described.

[0392] Step S21: Low-temperature heating process The unreacted second drying aid liquid F2 on the substrate W is evaporated.

[0393] The heating unit 31 heats the substrate W held by the substrate holder 13. The unreacted portion of the second drying auxiliary liquid F2 is heated through the substrate W. The unreacted portion of the second drying auxiliary liquid F2 evaporates. The unreacted portion of the second drying auxiliary liquid F2 is removed from the substrate W without changing into a second solidified film H2.

[0394] In the low-temperature heating step, the unreacted portion of the second drying auxiliary liquid F2 is heated to a second low temperature T2L. The second low temperature T2L is higher than room temperature. For example, the temperature of the unreacted portion of the second drying auxiliary liquid F2 rises from room temperature. The temperature of the unreacted portion of the second drying auxiliary liquid F2 rises to the second low temperature T2L. The second low temperature T2L corresponds to the heating temperature of the unreacted portion of the second drying auxiliary liquid F2.

[0395] The second low temperature T2L is equal to or higher than the boiling point of the second drying auxiliary liquid F2, so that unreacted second drying auxiliary liquid F2 is effectively removed from the substrate W in the low-temperature heating step.

[0396] The second low temperature T2L is equal to or higher than the boiling point of the ultraviolet-curable material, so that the unreacted second drying assistant liquid F2 is more effectively removed from the substrate W in the low-temperature heating step.

[0397] The second low temperature T2L is lower than the thermal decomposition temperature Tp2. Therefore, thermal decomposition of the second solidified film H2 is effectively prevented during the low-temperature heating process. Therefore, during the low-temperature heating process, the second solidified film H2 supports the protrusions A. Therefore, even if capillary force acts on the protrusions A, the protrusions A do not collapse. In other words, the protrusions A are effectively protected by the second solidified film H2.

[0398] At the end of the low-temperature heating step, all of the unreacted second drying auxiliary liquid F2 is removed from the substrate W. At the end of the low-temperature heating step, the second drying auxiliary liquid F2 disappears from the substrate W. At the end of the low-temperature heating step, the second drying auxiliary liquid F2 is no longer present on the substrate W.

[0399] In the low-temperature heating step, for example, the temperature of the second solidified film H2 also rises from room temperature to the second low temperature T2L.

[0400] Step S22: High-temperature heating process The high-temperature heating step is performed after the low-temperature heating step. During the high-temperature heating step, the second drying assistant liquid F2 is not present on the substrate W. This makes it easier to protect the convex portions A during the high-temperature heating step.

[0401] In the high-temperature heating step, the second solidified film H2 is thermally decomposed.

[0402] The heating unit 31 heats the substrate W held by the substrate holder 13. The second solidified film H2 is heated through the substrate W. As a result, the second solidified film H2 is thermally decomposed.

[0403] In the high-temperature heating process, the second solidified film H2 is heated to a second high temperature T2H. The second high temperature T2H is higher than the second low temperature T2L. For example, the temperature of the second solidified film H2 rises from the second low temperature T2L. The temperature of the second solidified film H2 rises to a second high temperature T2H. The second high temperature T2H corresponds to the heating temperature of the second solidified film H2.

[0404] The second high temperature T2H is equal to or higher than the thermal decomposition temperature Tp2, so that the second solidified film H2 is suitably thermally decomposed in the high-temperature heating step.

[0405] (6) In the second embodiment, the irradiation area of ​​the irradiation unit 41 is wider than the upper surface WS1 of the substrate W. The irradiation unit 41 in the second embodiment does not move in the horizontal direction relative to the substrate W held by the substrate holding unit 13. The irradiation unit 41 in the second embodiment does not move in the vertical direction Z relative to the substrate W held by the substrate holding unit 13. However, this is not limited to this. For example, the irradiation area of ​​the irradiation unit 41 may be smaller than the upper surface WS1 of the substrate W. For example, the irradiation unit 41 may move in the horizontal direction relative to the substrate W held by the substrate holding unit 13. For example, the irradiation unit 41 may move in the vertical direction Z relative to the substrate W held by the substrate holding unit 13.

[0406] 23 is a diagram showing the configuration of a processing unit of a modified embodiment. Note that the same components as those of the first and second embodiments are given the same reference numerals and detailed description thereof will be omitted. The irradiation section 41 includes a light-emitting section 52. The light-emitting section 52 irradiates ultraviolet light. The irradiation area of ​​the ultraviolet light by the light-emitting section 52 is smaller than the upper surface WS1 of the substrate W. The light-emitting section 52 is smaller than the light-emitting section 42 of the second embodiment. The light-emitting section 52 is electrically connected to a power supply 46 (not shown).

[0407] The irradiation unit 41 includes a moving mechanism 53. The moving mechanism 53 moves the light-emitting unit 52. The moving mechanism 53 moves the light-emitting unit 52, for example, to a first position Q1, a second position Q2, and a third position Q3. The first position Q1 is above a first side portion of the substrate W held by the substrate holding unit 13 in a side view. The second position Q2 is above a second side portion of the substrate W held by the substrate holding unit 13 in a side view. The second position Q2 is at the same height as the first position Q1. The third position Q3 is higher than the first position Q1 and the second position Q2.

[0408] The movement mechanism 53 includes, for example, a horizontal movement mechanism 54 and a vertical movement mechanism 55. The horizontal movement mechanism 54 supports the light-emitting unit 52. The horizontal movement mechanism 54 moves the light-emitting unit 52 in the horizontal direction. The vertical movement mechanism 55 supports the horizontal movement mechanism 54. The vertical movement mechanism 55 moves the horizontal movement mechanism 54 in the vertical direction Z.

[0409] An example of movement of the light-emitting unit 52 will be described. In the second processing liquid supplying step and the second applying step, the light-emitting unit 52 is located at the third position Q3. Therefore, when the nozzles 22a, 22b move to the processing positions, the nozzles 22a, 22b do not interfere with the light-emitting unit 52. In the second curing step, the light-emitting unit 52 moves from the third position Q3 to the first position Q1. Then, while the light-emitting unit 52 irradiates ultraviolet light, the light-emitting unit 52 moves from the first position Q1 to the second position Q2. The ultraviolet light irradiation area moves on the substrate W. As a result, the ultraviolet light is irradiated onto the entire upper surface WS1 of the substrate W. The ultraviolet light is irradiated onto the entire second drying auxiliary liquid F2 on the substrate W.

[0410] According to this modified embodiment, the light emitting section 52 is relatively small, so that the processing unit 11 can be easily miniaturized.

[0411] (7) In the first embodiment, the heating unit 31 heats the first drying auxiliary liquid F1 through the substrate W. However, this is not limiting. For example, the heating unit 31 may directly heat the first drying auxiliary liquid F1. For example, the heating unit 31 may transfer heat to the first drying auxiliary liquid F1 without passing through the substrate W.

[0412] In the first embodiment, the heating unit 31 heats the first solidified film H1 through the substrate W. However, this is not limited to this. For example, the heating unit 31 may directly heat the first solidified film H1. For example, the heating unit 31 may transfer heat to the first solidified film H1 without passing through the substrate W.

[0413] In the second embodiment, the heating unit 31 heats the second solidified film H2 through the substrate W. However, this is not limited to this. For example, the heating unit 31 may directly heat the second solidified film H2. For example, the heating unit 31 may transfer heat to the second solidified film H2 without passing through the substrate W.

[0414] (8) In the first and second embodiments, the heating unit 31 faces the lower surface WS2 of the substrate W. However, this is not limiting. The heating unit 31 may face the upper surface WS1 of the substrate W. According to this modified embodiment, the heating unit 31 directly heats at least one of the first drying auxiliary liquid F1, the second drying auxiliary liquid F2, the first solidified film H1, and the second solidified film H2. The heating unit 31 transfers heat to at least one of the first drying auxiliary liquid F1, the second drying auxiliary liquid F2, the first solidified film H1, and the second solidified film H2 without passing through the substrate W.

[0415] (9) In the first embodiment, the first coating step, the first curing step, and the first pyrolysis step are performed in the same processing unit 11. However, this is not limited to this. For example, the processing unit that performs the first coating step may be different from the processing unit that performs the first curing step. For example, the processing unit that performs the first coating step may be different from the processing unit that performs the first pyrolysis step. For example, the processing unit that performs the first curing step may be different from the processing unit that performs the first pyrolysis step. For example, one first pyrolysis step may be performed using two processing units.

[0416] The second embodiment may be modified in a similar manner.

[0417] 24 is a left side view showing the configuration of the left part of the substrate processing apparatus 1 of the modified embodiment. Note that the same components as those in the first and second embodiments are denoted by the same reference numerals, and detailed description thereof will be omitted.

[0418] The processing block 7 includes processing units 11a, 11b, 11c, and 11d.

[0419] The processing unit 11a includes a substrate holder 13, a rotation driver 17, and supply units 21a and 21b.

[0420] The processing unit 11b includes a substrate holder 13 and an irradiation unit 41.

[0421] The processing unit 11c includes a heating section 61. The heating section 61 heats the substrate W. The heating section 61 includes a hot plate 62 and a heater 63. The hot plate 62 extends horizontally. In a plan view, the hot plate 62 has approximately the same size as the substrate W. The substrate W is placed on the hot plate 62. The hot plate 62 supports the substrate W in a horizontal position. The heater 63 is attached to the hot plate 62. The heater 63 heats the substrate W on the hot plate 62.

[0422] The processing unit 11d includes a substrate container 71, a substrate support part 72, and a heating part 73. The substrate W is contained inside the substrate container 71. The substrate container 71 has, for example, a cylindrical shape. The substrate container 71 has, for example, a tubular shape. The substrate container 71 allows ultraviolet light to pass through. The substrate container 71 is made of, for example, quartz glass. The substrate support part 72 is installed inside the substrate container 71. The substrate support part 72 is supported by, for example, the substrate container 71. The substrate support part 72 supports the substrate W in a horizontal position. The heating part 73 is installed outside the substrate container 71. The heating part 73 is arranged around the substrate container 71. The heating part 73 irradiates, for example, infrared light. The infrared light passes through the substrate container 71. The heating part 73 irradiates, for example, infrared light onto the entire substrate W. The heating unit 73 irradiates, for example, infrared rays onto at least one of the first drying liquid F1 and the second drying assistant liquid F2 on the substrate W. The heating unit 73 irradiates, for example, infrared rays onto at least one of the first solidified film H1 and the second solidified film H2 on the substrate W. The heating unit 73 is, for example, a lamp heater.

[0423] Although not shown, the transport mechanism 8 is configured to access the processing units 11a, 11b, 11c, and 11d.

[0424] When performing the substrate processing method of the first embodiment, the substrate processing apparatus 1 operates as follows.

[0425] First, the transport mechanism 8 transports the substrate W to the processing unit 11a. The transport mechanism 8 hands the substrate W over to the substrate holder 13 of the processing unit 11a. The processing unit 11a performs a first processing liquid supply step and a second coating step on the substrate W. The supply unit 21a supplies the processing liquid L to the substrate W. Thereafter, the supply unit 21b applies a first drying auxiliary liquid F1 to the substrate W.

[0426] Next, the transport mechanism 8 transports the substrate W from the processing unit 11a to the processing unit 11c. The transport mechanism 8 takes the substrate W from the substrate holder 13 of the processing unit 11a. The transport mechanism 8 places the substrate W on the hot plate 62 of the processing unit 11c. The processing unit 11b performs a first curing step on the substrate W. The heating section 61 (specifically, the heater 63) heats the first drying assistant liquid F1 on the substrate W. A first solidified film H1 is formed on the substrate W.

[0427] Next, the transport mechanism 8 transports the substrate W from the processing unit 11c to the processing unit 11d. The transport mechanism 8 takes the substrate W from the hot plate 62 of the processing unit 11c. The transport mechanism 8 delivers the substrate W to the substrate support part 72 of the processing unit 11d. The processing unit 11d performs a first pyrolysis step on the substrate W. The heating part 73 heats the first solidified film H1 on the substrate W. The first solidified film H1 is pyrolyzed. The substrate W is dried.

[0428] When performing the substrate processing method of the second embodiment, the substrate processing apparatus 1 operates as follows.

[0429] First, the transport mechanism 8 transports the substrate W to the processing unit 11a. The processing unit 11a performs a second processing liquid supplying step and a second coating step on the substrate W. The supply unit 21a supplies the processing liquid L to the substrate W. Thereafter, the supply unit 21b coats the substrate W with a second drying auxiliary liquid F2.

[0430] Next, the transport mechanism 8 transports the substrate W from the processing unit 11a to the processing unit 11b. The transport mechanism 8 takes the substrate W from the substrate holding part 13 of the processing unit 11a. The transport mechanism 8 delivers the substrate W to the substrate holding part 13 of the processing unit 11b. The processing unit 11b performs a second curing step on the substrate W. The irradiation part 41 irradiates the second drying auxiliary liquid F2 on the substrate W with ultraviolet light. A second solidified film H2 is formed on the substrate W.

[0431] Next, the transport mechanism 8 transports the substrate W from the processing unit 11b to the processing unit 11c. The transport mechanism 8 takes the substrate W from the substrate holder 13 of the processing unit 11b. The transport mechanism 8 places the substrate W on the hot plate 62 of the processing unit 11c. The processing unit 11c performs a second pyrolysis step on the substrate W. For example, the processing unit 11c performs a low-temperature heating step. The heating section 61 (specifically, the heater 63) heats the substrate W at a second low temperature T2L. Unreacted portions of the second drying assistant liquid F2 are removed from the substrate W.

[0432] Next, the transport mechanism 8 transports the substrate W from the processing unit 11c to the processing unit 11d. The transport mechanism 8 takes the substrate W from the hot plate 62 of the processing unit 11c. The transport mechanism 8 delivers the substrate W to the substrate support part 72 of the processing unit 11d. The processing unit 11d performs a second pyrolysis step on the substrate W. For example, the processing unit 11d performs a high-temperature heating step on the substrate W. The heating part 73 heats the second solidified film H2 on the substrate W to a second high temperature T2H. The second solidified film H2 is pyrolyzed. The substrate W is dried.

[0433] (10) In the first curing step of the first embodiment, the substrate W was not rotated. However, this is not limited to this. In the first curing step, the substrate W may be rotated. In the first curing step, the first drying assistant liquid F1 on the substrate W may be heated while the substrate W is being rotated.

[0434] In the second curing step of the second embodiment, the substrate W was not rotated. However, this is not limiting. In the second curing step, the substrate W may be rotated. In the second curing step, the second drying auxiliary liquid F2 on the substrate W may be irradiated with ultraviolet light while the substrate W is being rotated.

[0435] (11) In the first pyrolysis step of the first embodiment, the substrate W was not rotated. However, this is not limited to this. In the first pyrolysis step, the substrate W may be rotated. In the first pyrolysis step, the first solidified film H1 on the substrate W may be pyrolyzed while the substrate W is rotated.

[0436] In the second pyrolysis step of the second embodiment, the substrate W was not rotated. However, this is not limiting. In the second pyrolysis step, the substrate W may be rotated. In the second pyrolysis step, the second solidified film H2 on the substrate W may be pyrolyzed while the substrate W is rotated.

[0437] (12) In the first and second embodiments, an example of the processing liquid L has been described. However, this is not limited to this. For example, the processing liquid L may be a chemical liquid. For example, the processing liquid L may be an etching liquid.

[0438] (13) In the first processing liquid supply step of the first embodiment, one processing liquid L is supplied to the substrate W. However, this is not limited to this. In the first processing liquid supply step, multiple processing liquids may be supplied to the substrate W. For example, in the first processing liquid supply step, a first processing liquid may be supplied to the substrate W, and then a second processing liquid may be supplied to the substrate W.

[0439] The second processing liquid supplying step of the second embodiment may also be modified in a similar manner.

[0440] (14) The substrate processing method of the first embodiment includes the first processing liquid supplying step. However, this is not limited to this. For example, the first processing liquid supplying step may be omitted. For example, the first processing liquid supplying step does not have to be performed before the first coating step.

[0441] The substrate processing method of the second embodiment includes the second processing liquid supplying step. However, this is not limiting. For example, the second processing liquid supplying step may be omitted. For example, the second processing liquid supplying step does not have to be performed before the second coating step.

[0442] (15) In the first embodiment, when the first coating step was performed, a liquid (e.g., processing liquid L) was present on the substrate W. That is, in the first coating step, the first drying auxiliary liquid F1 was applied to the wet substrate W. However, this is not limited to this. For example, when the first coating step was performed, a liquid (e.g., processing liquid L) may not be present on the substrate W. For example, in the first coating step, the first drying auxiliary liquid F1 may be applied to the dried substrate W.

[0443] The second application step of the second embodiment may also be modified in a similar manner.

[0444] (16) In the first and second embodiments, the pattern P on the substrate W may be formed on the substrate W, for example, before the substrate processing method is performed. Alternatively, the pattern P may be formed on the substrate W, for example, in at least one of the first processing liquid supply step and the second processing liquid supply step.

[0445] (17) The embodiment and each of the modified embodiments described above in (1) to (16) may be further modified as appropriate by replacing or combining each configuration with the configuration of another modified embodiment. [Explanation of symbols]

[0446] 1... Substrate processing equipment 10...Control section 11, 11a, 11b, 11c, 11d ... Processing units 13... Board holding part 21a... Supply section (processing liquid supply section) 21b... Supply section (drying auxiliary liquid supply section) 31, 61, 73 … heating section 41... Irradiation unit F1 … 1st drying auxiliary liquid F2…Second drying auxiliary liquid G1: First liquid film G2…Second liquid film H1 … 1st solidified film H1b: Lower surface of the first solidified film H2…Second solidified membrane H2b: Lower surface of the second solidified film L: Processing liquid W: Substrate WS: Surface of the substrate WS1: Top surface of the board P... Pattern A... Convex part A2: Tip of the convex part (top of the convex part) A3: Side of the convex part AH: Height of the convex part B ... recess B1: Bottom of the recess BW … Recess width T1L … 1st low temperature T1H … 1st high temperature T2…Second temperature T2L … 2nd low temperature T2H…Second high temperature

Claims

1. A substrate processing method for processing a substrate on which a pattern including a plurality of convex portions and a plurality of concave portions is formed, comprising: a first application step of applying a first drying auxiliary liquid containing a thermosetting material and a solvent to the substrate; a first curing step of heating the first drying assistant liquid on the substrate to form a first solidified film on the substrate; a first pyrolysis step of heating the first solidified film to pyrolyze the first solidified film and dry the substrate; Equipped with In the first curing step, At least a portion of the first solidified film is formed above the pattern; the first solidified film is in contact with the upper end of the protrusion, and The entire first solidified film is located above the bottom of the recess. Substrate processing method.

2. 2. The substrate processing method according to claim 1, In the first curing step, the first solidified film bridges the upper ends of the protrusions. Substrate processing method.

3. 3. The substrate processing method according to claim 1, In the first curing step, the entire first solidified film is positioned at a position equal to or higher than the upper end of the convex portion. Substrate processing method.

4. 4. The substrate processing method according to claim 1, In the first curing step, the first solidified film has a lower surface; The lower surface of the first solidified film contacts the upper ends of the protrusions and curves upwardly convexly between the adjacent protrusions. Substrate processing method.

5. 5. The substrate processing method according to claim 1, In the first curing step, the thermosetting material becomes a polymer; the first solidified film includes the polymer, The polymer has a length greater than the width of the recess. Substrate processing method.

6. 6. The substrate processing method according to claim 1, In the first curing step, the heating temperature of the first drying assistant liquid is adjusted based on the width of the recess. Substrate processing method.

7. 7. The substrate processing method according to claim 1, In the first curing step, the first drying aid liquid is heated at a first low temperature; In the first pyrolysis step, the first solidified film is heated at a first high temperature that is higher than the first low temperature. Substrate processing method.

8. 8. The substrate processing method according to claim 1, In the first curing step, the solvent in the first drying aid liquid is evaporated. Substrate processing method.

9. A substrate processing method for processing a substrate on which a pattern including a plurality of convex portions and a plurality of concave portions is formed, comprising: a second coating step of coating the substrate with a second drying auxiliary liquid containing an ultraviolet curable material; a second curing step of irradiating the second drying auxiliary liquid on the substrate with ultraviolet light to form a second solidified film on the substrate; a second pyrolysis step of heating the second solidified film to pyrolyze the second solidified film and dry the substrate; Equipped with In the second curing step, At least a portion of the second solidified film is formed above the pattern; the second solidified film is in contact with the upper end of the protrusion, and The entire second solidified film is located above the bottom of the recess. Substrate processing method.

10. 10. The substrate processing method according to claim 9, In the second curing step, the second solidified film bridges the upper ends of the protrusions. Substrate processing method.

11. 11. The substrate processing method according to claim 9, In the second curing step, the entire second solidified film is positioned at a position equal to or higher than the upper end of the convex portion. Substrate processing method.

12. 12. The substrate processing method according to claim 9, In the second curing step, the second solidified film has a lower surface; The lower surface of the second solidified film contacts the upper ends of the protrusions and curves upwardly convexly between the adjacent protrusions. Substrate processing method.

13. 13. The substrate processing method according to claim 9, In the second curing step, the ultraviolet curable material becomes a polymer, the second solidified film includes the polymer, The polymer has a length greater than the width of the recess. Substrate processing method.

14. 14. The substrate processing method according to claim 9, At the end of the second curing step, a portion of the second drying aid liquid remains on the substrate; In the second pyrolysis step, the second drying assistant liquid remaining on the substrate is further evaporated. Substrate processing method.

15. 15. The substrate processing method according to claim 14, In the second thermal decomposition step, the second drying assistant liquid remaining on the substrate evaporates before the second solidified film is thermally decomposed. Substrate processing method.

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