Panel storage container

Abstract

To provide a panel storage container capable of suppressing electrostatic discharge between a lid body and a panel.SOLUTION: A panel storage container includes a container body having an opening and storing a plurality of panels P arranged in the vertical direction, and a lid for closing the opening, and the lid includes a lid body 31 having a back surface 31b facing the plurality of panels P in the front-rear direction and a front surface 31a opposite to the back surface 31b in a state where the lid closes the opening, a retainer 34 provided on the back surface 31b and regulating the movement of the plurality of panels P in the front-rear direction, and a conductive portion 35 that is provided on the front surface 31a and is used to electrically connect an opening / closing device that opens and closes the lid and the lid body 31.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present disclosure relates to a panel enclosure. [Background technology]

[0002] In manufacturing processes that handle panels such as glass substrates for liquid crystal panels, panel storage containers that store multiple panels are used when transferring rectangular panels from one manufacturing device to another manufacturing device and when temporarily storing the panels. For example, Patent Document 1 describes a panel storage container that includes a container body that stores the panels and a lid that can be opened and closed to cover an opening provided in the container body. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-127272 Summary of the Invention [Problem to be solved by the invention]

[0004] In the panel storage container described in Patent Document 1, a retainer is provided on the inner surface of the lid of the panel storage container to prevent damage to the panel due to movement of the panel in the forward and backward directions caused by vibration, etc. For example, if the retainer is made of a conductive material, there is a risk of electrostatic discharge occurring between the lid and the panel when the lid is opened or closed.

[0005] The present disclosure describes a panel enclosure that can reduce electrostatic discharge between a lid and a panel. [Means for solving the problem]

[0006] A panel storage container according to one aspect of the present disclosure includes a container body having an opening for storing a plurality of panels arranged in a first direction, and a lid for closing the opening. The lid includes the lid body having a first surface facing the plurality of panels in a second direction intersecting the first direction when the lid body closes the opening, and a second surface opposite the first surface, a retainer provided on the first surface for restricting movement of the plurality of panels in the second direction, and a conductive part provided on the second surface for electrically connecting the lid body to an opening / closing device that opens and closes the lid body.

[0007] In this panel storage container, a conductive portion for electrically connecting the opening / closing device and the lid body is provided on the second surface of the lid body. Therefore, when the lid body is opened or closed, the opening / closing device and the lid body are electrically connected via the conductive portion. Because the opening / closing device is electrically connected to a ground potential (earth), a current flows from the lid body to the ground potential through the conductive portion and the opening / closing device, thereby discharging the lid body. As a result, it is possible to suppress the occurrence of electrostatic discharge between the lid body and the panel.

[0008] In some embodiments, the lid may be provided with a keyhole for locking the lid. The conductive portion may include a first conductive mechanism provided in the keyhole. The first conductive mechanism may electrically connect the lid body to a key of the opening and closing device inserted into the keyhole. In this configuration, the opening and closing device opens and closes the lid by inserting a key into the keyhole, so that the key of the opening and closing device and the lid body are electrically connected when the lid is opened or closed. Therefore, a current flows from the lid to ground potential through the first conductive mechanism and the opening and closing device, and the lid is neutralized. As a result, it is possible to suppress electrostatic discharge between the lid and the panel.

[0009] In some embodiments, the first conduction mechanism may include a first elastic member that is expandable and contractible in the second direction, and a first contactor attached to the first elastic member so as to be pressed by the key toward the lid body in the second direction when the opening and closing device inserts the key into the keyhole. In this case, when the opening and closing device inserts the key into the keyhole, the key presses the first contactor toward the lid body in the second direction. This compresses the first elastic member, allowing the elastic force of the first elastic member to more reliably bring the key and the first contactor into contact.

[0010] In some embodiments, the lid may be provided with a positioning hole for positioning the opening / closing device. The conductive portion may include a second conductive mechanism provided in the positioning hole. The second conductive mechanism may electrically connect a positioning pin of the opening / closing device inserted into the positioning hole to the lid body. In this configuration, the opening / closing device positions the opening / closing device relative to the lid by inserting the positioning pin into the positioning hole, and opens and closes the lid. Therefore, when the lid is opened or closed, the positioning pin of the opening / closing device is electrically connected to the lid body. Therefore, a current flows from the lid to the ground potential through the second conductive mechanism and the opening / closing device, and the lid is neutralized. As a result, it is possible to suppress electrostatic discharge between the lid and the panel.

[0011] In some embodiments, the second conduction mechanism may include a second elastic member that is expandable and contractible in the second direction, and a second contactor attached to the second elastic member so as to be pressed by the positioning pin toward the lid body in the second direction when the opening and closing device inserts the positioning pin into the positioning hole. In this case, when the opening and closing device inserts the positioning pin into the positioning hole, the positioning pin presses the second contactor toward the lid body in the second direction. This compresses the second elastic member, allowing the elastic force of the second elastic member to more reliably bring the positioning pin and the second contactor into contact with each other. [Effects of the Invention]

[0012] According to the present disclosure, electrostatic discharge between the lid and the panel can be suppressed. [Brief explanation of the drawings]

[0013] [Figure 1] FIG. 1 is an exploded perspective view of a panel storage container according to one embodiment. [Figure 2] FIG. 2 is a cross-sectional view taken along line II-II in FIG. [Figure 3] 3 is a perspective view of the cover shown in FIG. 1 as seen from the rear side. [Figure 4] FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. [Figure 5] FIG. 5 is a cross-sectional view taken along line VV in FIG. [Figure 6] FIG. 6 is a cross-sectional view showing a state in which a key is inserted into a keyhole. [Figure 7] FIG. 7 is a cross-sectional view showing a state in which the positioning pin is inserted into the positioning hole. DETAILED DESCRIPTION OF THE INVENTION

[0014] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. In the description of the drawings, the same elements are given the same reference numerals, and duplicated explanations will be omitted. Each drawing shows an XYZ coordinate system. The Y-axis direction (second direction) is a direction that intersects (here, is perpendicular to) the X-axis direction and the Z-axis direction (first direction). The Z-axis direction is a direction that intersects (here, is perpendicular to) the X-axis direction and the Y-axis direction. As an example, the X-axis direction is the left-right direction (width direction), the Y-axis direction is the front-back direction (depth direction), and the Z-axis direction is the up-down direction (height direction). For convenience of explanation, the terms "front," "rear," "up," "down," "left," and "right" are used, but are not limited to these directions.

[0015] A panel storage container according to one embodiment will be described with reference to FIG. 1. FIG. 1 is an exploded perspective view of a panel storage container according to one embodiment. The panel storage container 1 shown in FIG. 1 is a container for storing a plurality of panels. The panel storage container 1 is configured with reference to, for example, SEMI (Semiconductor Equipment and Materials International) standards. Examples of panels include glass substrates for liquid crystal panels and panels equipped with electronic components. The panels have a rectangular shape. Examples of panel sizes include 510 mm x 515 mm and 600 mm x 600 mm. The number of panels that can be stored in the panel storage container 1 is determined arbitrarily and may be, for example, 6, 12, 16, or 24.

[0016] The panel storage container 1 is used, for example, in a manufacturing device for manufacturing electronic component assemblies. Electronic component assemblies are manufactured through a process of mounting a large number of electronic components on a large carrier panel such as a glass plate or a stainless steel plate, sealing these electronic components with epoxy resin or the like, peeling the sealed electronic components from the carrier panel in panel form, and cutting out the panel-shaped electronic components individually. The panel storage container 1 is used to transport panels between these processes.

[0017] The panel storage container 1 includes a container body 2 and a lid body 3.

[0018] The container body 2 is a rectangular parallelepiped container with an open front (front face). In other words, the container body 2 is a front-open box-type container with an opening 2a on the front face. The container body 2 stores a plurality of panels. Specifically, the container body 2 stores a plurality of panels arranged in a vertical direction. The panels are inserted into and removed from the container body 2 via the opening 2a. Details of the container body 2 will be described later.

[0019] The lid 3 is a member for closing the opening 2a of the container body 2. The lid 3 is detachably attached to a flange 25 that defines the opening 2a. Details of the lid 3 will be described later.

[0020] The container body 2 and the lid 3 are formed by combining multiple parts molded from metal or resin materials. Examples of resins contained in the molding material of the resin material include thermoplastic resins. Examples of thermoplastic resins include polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, liquid crystal polymer, acrylic resins such as polymethyl methacrylate, and acrylonitrile butadiene styrene copolymer. Alloys of these resins may also be used as the resin contained in the molding material of the resin material.

[0021] Conductive materials and various antistatic agents may be added to these resins. Examples of conductive materials include carbon fibers, carbon powder, carbon nanotubes, and conductive polymers. Examples of antistatic agents that can be used include anionic, cationic, and nonionic antistatic agents. Benzotriazole-based, salicylate-based, cyanoacrylate-based, oxalic acid anilide-based, and hindered amine-based ultraviolet absorbers may also be added. Glass fibers or carbon fibers, which improve rigidity, may also be added selectively.

[0022] Next, a detailed description will be given of the container body 2. The container body 2 includes a top plate 21, a bottom plate 22, a pair of side walls 23, a rear wall 24, a flange 25, a frame 26, a base portion 27, and a side plate 28.

[0023] The top plate 21, the bottom plate 22, the side walls 23, and the rear wall 24 are generally rectangular plate materials. The top plate 21 and the bottom plate 22 face each other in the up-down direction and are disposed generally parallel to each other. The pair of side walls 23 face each other in the left-right direction and are disposed generally parallel to each other. The rear wall 24 connects the rear end of the top plate 21 to the rear end of the bottom plate 22, and also connects the rear ends of the pair of side walls 23. The top plate 21, the bottom plate 22, the pair of side walls 23, and the rear wall 24 define the storage space 20.

[0024] The top plate 21, the bottom plate 22, and the side walls 23 are made of, for example, a metal material such as aluminum or stainless steel. The rear wall 24 is made of, for example, a transparent resin material that allows the storage space 20 to be seen from the outside of the container body 2. A portion of the rear wall 24 may be made of a transparent resin material. Examples of transparent resin materials include acrylic resin, polycarbonate, vinyl chloride resin, and cycloolefin polymer.

[0025] The flange 25 is a rectangular frame body that is provided across the front end of the top plate 21, the front end of the bottom plate 22, and the front ends of the pair of side walls 23. The flange 25 defines the opening 2a. The flange 25 is made of, for example, the above-mentioned resin material or a metal material such as aluminum or stainless steel. Two locking holes 25h are provided in each of the upper and lower frame portions of the flange 25, and are spaced apart in the left-right direction. The locking holes 25h in the upper frame portion and the locking holes 25h in the lower frame portion are provided in positions that face each other in the up-down direction.

[0026] The frame body 26 is used to secure the top plate 21, the bottom plate 22, the pair of side walls 23, and the rear wall 24. The frame body 26 is made of a metal material such as aluminum or stainless steel. The frame body 26 is provided on the front surface of the rear wall 24. The frame body 26 has a frame portion 26a (see FIG. 2), a support column 26b (see FIG. 2), and a pair of support columns 26c (see FIG. 2). The frame portion 26a is a rectangular member and is provided along the periphery of the rear wall 24.

[0027] The support pillar 26b and the pair of support pillars 26c are columnar members extending in the up-down direction. One support pillar 26c, support pillar 26b, and the other support pillar 26c are arranged in that order in the left-right direction and are disposed approximately parallel to each other. The support pillar 26b and the pair of support pillars 26c extend from the upper frame portion to the lower frame portion of the frame portion 26a. The support pillar 26b is provided in the center of the frame body 26 in the left-right direction, and the pair of support pillars 26c are provided near both ends of the frame body 26 in the left-right direction. The support pillar 26b has a plurality of fitting holes for attaching a shaft 61a (described later). The support pillar 26c has a plurality of fitting holes for attaching a shaft 62a (described later).

[0028] The pedestal portion 27 is a portion that serves as the base of the container body 2. The pedestal portion 27 is made of a metal material such as aluminum or stainless steel. The pedestal portion 27 is provided on the lower surface of the bottom plate 22. The pedestal portion 27 is made by combining a plurality of columnar support members.

[0029] The side plates 28 are members for attaching the support body 65 described below. The side plates 28 are plate-shaped members extending in the vertical direction. The side plates 28 are made of a metal material such as aluminum or stainless steel. The side plates 28 are provided on the outer surfaces of the side walls 23. In the present embodiment, two side plates 28 are provided on each side wall 23. The two side plates 28 are aligned in the front-to-rear direction and disposed substantially parallel to each other. One side plate 28 is provided near the center of the side wall 23 in the front-to-rear direction, and the other side plate 28 is provided near the front end of the side wall 23 in the front-to-rear direction.

[0030] At the corners of the container body 2, cover members are provided to prevent particles from entering the accommodation space 20.

[0031] Next, the configuration inside the storage space 20 will be described with reference to Figure 2. Figure 2 is a cross-sectional view taken along line II-II in Figure 1. As shown in Figure 2, the panel storage container 1 further includes a panel support portion 60. The panel support portion 60 is a portion for supporting a plurality of panels. The panel support portion 60 is provided inside the container body 2 (storage space 20). The panel support portion 60 includes a plurality of support portions 61, a plurality of support portions 62, and a plurality of stoppers 64.

[0032] The numbers of support portions 61, support portions 62, and stoppers 64 vary depending on the number of panels that can be stored in the panel storage container 1. In this embodiment, the panel support portion 60 includes one support portion 61, two support portions 62, and two stoppers 64 per panel. In other words, one support portion 61, two support portions 62, and two stoppers 64 form a storage stage that stores one panel.

[0033] The support portion 61 is a portion for supporting the center portion of the panel in the left-right direction. The support portion 61 has a shaft 61a and a plurality of elastic bodies 61b. The shaft 61a is a columnar (for example, cylindrical) member extending in the front-rear direction. The shaft 61a is used to support one panel. The rear end of the shaft 61a is fitted into a fitting hole in the support column 26b and fixed to the support column 26b with a screw. The shaft 61a is made of, for example, a material with high bending rigidity. Examples of materials that can be used to make the shaft 61a include metals such as stainless steel and aluminum, and carbon fiber reinforced plastic.

[0034] The elastic body 61b is an annular (for example, circular) member provided on the outer circumferential surface of the shaft 61a. The elastic body 61b is provided to prevent the panel from slipping and improve the positioning accuracy of the panel. From the viewpoint of preventing the panel from slipping, the elastic body 61b may have a higher frictional force than the shaft 61a. From the viewpoint of preventing damage to the panel, the elastic body 61b may have a higher elasticity (cushioning property) than the shaft 61a. The elastic body 61b is made of, for example, a rubber material. Examples of rubber materials include EPDM (ethylene propylene diene rubber), silicone rubber, and fluororubber. The elastic body 61b is, for example, an O-ring. The multiple elastic bodies 61b are arranged at regular intervals in the extension direction of the shaft 61a.

[0035] The support portion 62 is a portion for supporting both left and right ends of the panel. The support portion 62 has a shaft 62a, multiple elastic bodies 62b, and multiple supports 65. The shaft 62a is a columnar (e.g., cylindrical) member extending in the front-rear direction. The shaft 62a is used to support one panel. The rear end of the shaft 62a is fitted into a fitting hole in the support column 26c and fixed to the support column 26c with a screw. The shaft 62a is made of, for example, a material with high bending rigidity. Examples of materials for the shaft 62a include metals such as stainless steel and aluminum, and carbon fiber reinforced plastic.

[0036] The length of the shaft 62a in the front-rear direction is slightly longer than the length of the panel in the front-rear direction and longer than the length of the shaft 61a in the front-rear direction. The shaft 61a and the pair of shafts 62a are arranged in the left-right direction. The shaft 61a is disposed between the pair of shafts 62a.

[0037] The elastic body 62b is an annular (e.g., circular) member provided on the outer circumferential surface of the shaft 62a. The elastic body 62b is provided to prevent the panel from slipping and improve the positioning accuracy of the panel. The constituent material and arrangement of the elastic body 62b are the same as those of the elastic body 61b, so a detailed description thereof will be omitted.

[0038] The support body 65 is a member that holds (supports) the shaft 62a and supports the left-right end of the panel. An insertion hole that penetrates the support body 65 in the front-rear direction is provided at the tip of the support body 65, and the shaft 62a is inserted through the insertion hole.

[0039] The base end portion of the support 65 abuts against the inner surface of the side wall 23, and the side plate 28, side wall 23, and support 65 are positioned by a knock pin (not shown). In this state, a screw is inserted from the outside of the side plate 28 into an insertion hole provided in the side plate 28, and the screw is screwed into a screw hole provided in the base end portion of the support 65. As a result, the support 65 is fixed to the side plate 28 with the side wall 23 sandwiched between the support 65 and the side plate 28.

[0040] The stopper 64 is a member for determining the position of the rear end of the panel. The stopper 64 is made of, for example, the resin material described above. The stopper 64 is provided at the rear end of the shaft 62a. The stopper 64 has a block shape. The stopper 64 is provided with an insertion hole for inserting the shaft 62a in the front-rear direction. With the shaft 62a inserted through the insertion hole of the stopper 64, the rear surface of the stopper 64 abuts against the front surface of the support column 26c, and the stopper 64 is fixed to the support column 26c with a screw.

[0041] Next, the lid 3 will be described in detail with reference to Figures 1 and 3 to 5. Figure 3 is a perspective view of the lid shown in Figure 1 as seen from the back. Figure 4 is a cross-sectional view taken along line IV-IV in Figure 1. Figure 5 is a cross-sectional view taken along line VV in Figure 1. As shown in Figures 1 and 3, the lid 3 includes a lid main body 31, a cover member 32, a locking mechanism 33, and a retainer 34.

[0042] The lid body 31 is the main body of the lid body 3. The lid body 31 is a rectangular plate material. The lid body 31 is made of a metal material (conductive material) such as aluminum or a magnesium alloy. The lid body 31 has a front surface 31a (second surface) and a back surface 31b (first surface). The back surface 31b is the surface that faces the multiple panels in the front-to-rear direction when the lid body 3 closes the opening 2a. The front surface 31a is the surface opposite the back surface 31b in the front-to-rear direction.

[0043] The cover member 32 is a member that covers the front surface 31a of the lid body 31. The cover member 32 is a rectangular plate material. The cover member 32 is made of a resin material (non-conductive material) such as polycarbonate. The cover member 32 is provided with a keyhole 32a and a positioning hole 32b. The keyhole 32a is a hole for locking the lid body 3. A key 71 of an opening and closing device 70, which will be described later, is inserted into the keyhole 32a (see FIG. 6). The opening and closing device 70 is a device that opens and closes the lid body 3, and is also called a load port. The positioning hole 32b is a hole for positioning the opening and closing device 70. A positioning pin 72 of the opening and closing device 70, which will be described later, is inserted into the positioning hole 32b (see FIG. 7).

[0044] In this embodiment, two keyholes 32a and two positioning holes 32b are provided. One positioning hole 32b, one keyhole 32a, the other keyhole 32a, and the other positioning hole 32b are arranged in that order in the left-right direction along the center line of the cover member 32 in the up-down direction. The two positioning holes 32b are located near both the left and right ends of the cover member 32. The two keyholes 32a are located between the two positioning holes 32b in the left-right direction.

[0045] The locking mechanism 33 locks or unlocks the lid 3 by operating a key 71 inserted into the keyhole 32a. The locking mechanism 33 is made of a resin material (non-conductive material) such as polyacetal or polybutylene terephthalate. The locking mechanism 33 is provided between the lid main body 31 and the cover member 32. The locking mechanism 33 includes a latch 33a and a member 33b. When the lid 3 is attached to the flange 25, the latch 33a is inserted into a locking hole 25h provided in the flange 25 by operating the key 71, thereby locking the lid 3. When the lid 3 is locked, the latch 33a is pulled out of the locking hole 25h by operating the key 71, thereby unlocking the lid 3. The member 33b functions as a rotation axis and is provided to facilitate sliding.

[0046] The retainer 34 is a member that restricts movement of the multiple panels housed in the container body 2 in the front-rear direction (movement toward the lid body 3). The retainer 34 is provided on the back surface 31b. The retainer 34 extends in the up-down direction so as to cover the front ends of all of the panels housed in the container body 2. In this embodiment, the retainer 34 is provided at both ends in the left-right direction of the back surface 31b. The retainer 34 is a plate-shaped elastic member having a uniform cross-sectional shape. The retainer 34 is made of, for example, a conductive resin material. Such a resin material contains a conductive substance such as carbon. Specific examples of materials that can be used to construct the retainer include a combination of polycarbonate and carbon nanotubes, and conductive fluororubber.

[0047] As shown in Figures 4 and 5, the lid body 3 further includes a conductive portion 35. The conductive portion 35 is a portion for electrically connecting the opening / closing device 70 (see Figures 6 and 7) and the lid main body 31. The conductive portion 35 is provided on the front surface 31a of the lid main body 31. The conductive portion 35 includes a conductive mechanism 51 (first conductive mechanism) and a conductive mechanism 52 (second conductive mechanism).

[0048] As shown in FIG. 4, the conduction mechanism 51 is provided in the keyhole 32a. The conduction mechanism 51 electrically connects the key 71 (see FIG. 6) inserted into the keyhole 32a to the lid main body 31. The conduction mechanism 51 includes an elastic member 53 (first elastic member) and a contact 54 (first contact). The elastic member 53 is provided so as to be able to expand and contract in the front-rear direction. The elastic member 53 is made of a metal material (conductive material) such as stainless steel. In this embodiment, the elastic member 53 is a coil spring and is housed in a housing portion 31c provided on the front surface 31a. The elastic member 53 is arranged so as to be sandwiched between the bottom surface of the housing portion 31c and a locking piece 54b (described later).

[0049] The contactor 54 is a member that is provided so as to be able to advance and retreat in the front-rear direction in response to the insertion and removal of the key 71. The contactor 54 is made of a metal material (conductive material) such as stainless steel. The contactor 54 is attached to the elastic member 53 so that when the opening and closing device 70 has the key 71 inserted into the keyhole 32a, the contactor 54 is pressed in the front-rear direction by the key 71 toward the lid main body 31. The contactor 54 includes a columnar portion 54a and a locking piece 54b.

[0050] The pillar portion 54a is a pillar-shaped (cylindrical in this embodiment) portion extending in the front-rear direction. The pillar portion 54a passes through a member 33b provided in the keyhole 32a. The pillar portion 54a extends forward to a position where the tip (front end) of the pillar portion 54a can come into contact with the tip of the key 71.

[0051] The locking piece 54b is a portion that prevents the contactor 54 from jumping out forward. The locking piece 54b has an annular (circular ring shape in this embodiment) shape and is provided at the rear end of the columnar portion 54a around the axis of the columnar portion 54a. The locking piece 54b abuts against the member 33b, thereby restricting the contactor 54 from moving forward. As described above, the elastic member 53 is disposed so as to be sandwiched between the bottom surface of the accommodating portion 31c and the locking piece 54b. Therefore, when the contactor 54 moves toward the lid main body 31, the elastic member 53 is compressed by the locking piece 54b.

[0052] As shown in FIG. 5, the conduction mechanism 52 is provided in the positioning hole 32b. The conduction mechanism 52 electrically connects a positioning pin 72 (see FIG. 7) inserted into the positioning hole 32b to the lid main body 31. The conduction mechanism 52 includes an elastic member 55 (second elastic member) and a contact 56 (second contact). The elastic member 55 is provided so as to be able to expand and contract in the front-rear direction. The elastic member 55 is made of a metal material (conductive material) such as stainless steel. In this embodiment, the elastic member 55 is a coil spring and is housed in a housing portion 31d provided on the front surface 31a. The elastic member 55 is arranged so as to be sandwiched between the bottom surface of the housing portion 31d and a locking piece 56b (described later).

[0053] The contactor 56 is a member provided so as to be able to advance and retreat in the front-rear direction in response to the insertion and removal of the positioning pin 72. The contactor 56 is made of a metal material (conductive material) such as stainless steel. The contactor 56 is attached to the elastic member 55 so as to be pressed in the front-rear direction by the positioning pin 72 toward the lid main body 31 when the opening and closing device 70 inserts the positioning pin 72 into the positioning hole 32b. The contactor 56 includes a columnar portion 56a and a locking piece 56b.

[0054] The columnar portion 56a is a columnar (cylindrical in this embodiment) portion extending in the front-rear direction. The columnar portion 56a penetrates the bottom plate portion that defines the positioning hole 32b. The columnar portion 56a extends forward to a position where the tip (front end) of the columnar portion 56a can come into contact with the tip of the positioning pin 72.

[0055] The locking piece 56b is a portion that prevents the contactor 56 from jumping out forward. The locking piece 56b has an annular (circular ring shape in this embodiment) shape and is provided at the rear end of the columnar portion 56a around the axis of the columnar portion 56a. The locking piece 56b abuts against the bottom plate portion that defines the positioning hole 32b, thereby restricting the contactor 56 from moving forward. As described above, the elastic member 55 is disposed so as to be sandwiched between the bottom surface of the accommodation portion 31d and the locking piece 56b. Therefore, when the contactor 56 moves toward the lid main body 31, the elastic member 55 is compressed by the locking piece 56b.

[0056] The operation of the conduction mechanisms 51 and 52 will be described with reference to Figures 4 to 7. Figure 6 is a cross-sectional view showing a state in which a key is inserted into a keyhole. Figure 7 is a cross-sectional view showing a state in which a positioning pin is inserted into a positioning hole.

[0057] As shown in FIG. 4, when the key 71 is not inserted into the keyhole 32a, the contact 54 is forced forward by the elastic force of the elastic member 53, and the locking piece 54b abuts against the member 33b. At this time, the front end of the columnar portion 54a is located in the space in the keyhole 32a where the key 71 is accommodated. As shown in FIG. 6, when the key 71 is inserted into the keyhole 32a, the key 71 abuts against the front end of the columnar portion 54a, and the contact 54 is pushed backward by the key 71. At this time, the elastic member 53 is compressed by the locking piece 54b, so that an additional elastic force is generated in the elastic member 53, and the contact 54 is subjected to an additional force toward the key 71. As a result, the key 71 and the contact 54 can be reliably connected to the ground potential (earth) of the opening and closing device 70 via the elastic member 53, the contact 54, and the key 71.

[0058] As shown in FIG. 5, when the positioning pin 72 is not inserted into the positioning hole 32b, the elastic force of the elastic member 55 applies a forward force to the contact 56, and the locking piece 56b abuts against the bottom plate portion that defines the positioning hole 32b. At this time, the front end of the columnar portion 56a is located in the space within the positioning hole 32b that accommodates the positioning pin 72. As shown in FIG. 7, when the positioning pin 72 is inserted into the positioning hole 32b, the tip of the positioning pin 72 abuts against the front end of the columnar portion 56a, and the positioning pin 72 pushes the contact 56 rearward. At this time, the elastic member 55 is compressed by the locking piece 56b, which generates an additional elastic force in the elastic member 55, and the contact 56 receives an additional force toward the positioning pin 72. As a result, the positioning pin 72 and the contact 56 can be reliably contacted. Therefore, the lid body 31 is electrically connected to the ground potential (earth) of the opening and closing device 70 via the elastic member 55, the contact 56, and the positioning pin 72.

[0059] 4 to 7, when the lid 3 closes the opening 2a, the front end of the panel P may come into contact with the retainer 34. For example, if the panel storage container 1 does not have the conductive portion 35, and the lid 3 is electrically charged, there is a risk of electrostatic discharge (spark) occurring between the lid 3 and the panel P when the lid 3 is opened.

[0060] In contrast, in the panel storage container 1, a conductive part 35 for electrically connecting the opening and closing device 70 and the lid main body 31 is provided on the front surface 31a of the lid main body 31. Therefore, when the lid 3 is opened or closed, the opening and closing device 70 and the lid 3 (lid main body 31) are electrically connected via the conductive part 35. Because the opening and closing device 70 is electrically connected to the ground potential, a current flows from the lid 3 to the ground potential through the conductive part 35 and the opening and closing device 70, and the lid 3 is neutralized. As a result, it is possible to suppress the occurrence of electrostatic discharge between the lid 3 and the panel P.

[0061] The conduction mechanism 51 is provided in the keyhole 32a and electrically connects the key 71 of the opening and closing device 70 inserted into the keyhole 32a to the lid body 31. The opening and closing device 70 opens and closes the lid body 3 by inserting the key 71 into the keyhole 32a, so that when the lid body 3 is opened or closed, the key 71 of the opening and closing device 70 is electrically connected to the lid body 31. Therefore, a current flows from the lid body 3 to the ground potential through the conduction mechanism 51 and the opening and closing device 70, and the lid body 3 is neutralized. As a result, it is possible to suppress the occurrence of electrostatic discharge between the lid body 3 and the panel P.

[0062] In the conduction mechanism 51, when the opening / closing device 70 inserts the key 71 into the keyhole 32a, the key 71 presses the contact 54 in the front-to-rear direction toward the lid body 31. This compresses the elastic member 53, and the elastic force of the elastic member 53 allows the key 71 and the contact 54 to come into contact with each other more reliably.

[0063] The conduction mechanism 52 is provided in the positioning hole 32b and electrically connects the positioning pin 72 of the opening and closing device 70 inserted into the positioning hole 32b to the lid body 31. The opening and closing device 70 positions the opening and closing device 70 with respect to the lid body 3 by inserting the positioning pin 72 into the positioning hole 32b, and opens and closes the lid body 3. Therefore, when the lid body 3 is opened or closed, the positioning pin 72 of the opening and closing device 70 is electrically connected to the lid body 31. Therefore, a current flows from the lid body 3 to the ground potential through the conduction mechanism 52 and the opening and closing device 70, and the lid body 3 is neutralized. As a result, it is possible to suppress the occurrence of electrostatic discharge between the lid body 3 and the panel P.

[0064] In the conduction mechanism 52, when the opening / closing device 70 inserts the positioning pin 72 into the positioning hole 32b, the positioning pin 72 presses the contactor 56 in the front-to-rear direction toward the lid body 31. This causes the elastic member 55 to be compressed, so that the elastic force of the elastic member 55 can more reliably bring the positioning pin 72 and the contactor 56 into contact with each other.

[0065] The panel storage container according to the present disclosure is not limited to the above embodiment.

[0066] The method of connecting the components of the container body 2 may be different from that in the above embodiment. In the above embodiment, the container body 2 is formed by combining multiple parts, but it may also be an integrally molded product.

[0067] In the above embodiment, the cover 3 is provided with two keyholes 32a and two positioning holes 32b, but the numbers of the keyholes 32a and the positioning holes 32b are not limited to two. The cover 3 may be provided with one keyhole 32a or three or more keyholes 32a. The cover 3 may be provided with one positioning hole 32b or three or more positioning holes 32b. The number of keyholes 32a and the number of positioning holes 32b may be different from each other. In either case, it is sufficient that a conduction mechanism is provided in at least one of the keyholes 32a and the positioning holes 32b provided in the cover 3. In other words, the conduction portion 35 does not have to include either the conduction mechanism 51 or the conduction mechanism 52.

[0068] The conduction mechanism 51 is not limited to the configuration of the above embodiment as long as it can electrically connect the key 71 and the lid body 31. The conduction mechanism 52 is not limited to the configuration of the above embodiment as long as it can electrically connect the positioning pin 72 and the lid body 31. [Explanation of symbols]

[0069] 1...panel storage container, 2...container body, 2a...opening, 3...lid body, 31...lid body, 31a...front surface (second surface), 31b...back surface (first surface), 32...cover member, 32a...keyhole, 32b...positioning hole, 33...locking mechanism, 34...retainer, 35...conductive portion, 51...conductive mechanism (first conductive mechanism), 52...conductive mechanism (second conductive mechanism), 53...elastic member (first elastic member), 54...contact (first contact), 55...elastic member (second elastic member), 56...contact (second contact), 70...opening / closing device, 71...key, 72...positioning pin, P...panel.

Claims

1. a container body having an opening for storing a plurality of panels arranged in a first direction; a lid for closing the opening; Equipped with The lid body is a lid body having a first surface facing the plurality of panels in a second direction intersecting the first direction when the lid body closes the opening, and a second surface opposite to the first surface; a locking mechanism made of a non-conductive material that locks or unlocks the lid; a retainer provided on the first surface and configured to restrict movement of the plurality of panels in the second direction; a conductive portion provided on the second surface for electrically connecting the lid body to an opening / closing device that opens and closes the lid body; Equipped with The lid is provided with a keyhole for locking the lid, the conductive portion includes a first conductive mechanism provided in the keyhole, the first conduction mechanism electrically connects the key of the opening and closing device inserted into the keyhole to the lid body; The first conduction mechanism includes: a first elastic member that is stretchable in the second direction; a first contactor that penetrates the locking mechanism in the second direction, the first contactor being attached to the first elastic member so as to be pressed toward the lid body in the second direction by the key when the opening and closing device inserts the key into the keyhole; A panel storage container comprising:

2. The cover is provided with a positioning hole for positioning the opening and closing device, the conductive portion includes a second conductive mechanism provided in the positioning hole, The panel storage container according to claim 1 , wherein the second conduction mechanism electrically connects a positioning pin of the opening and closing device inserted into the positioning hole to the lid body.

3. The second conducting mechanism is a second elastic member that is stretchable in the second direction; a second contact attached to the second elastic member so as to be pressed toward the lid body in the second direction by the positioning pin when the opening and closing device inserts the positioning pin into the positioning hole; The panel enclosure of claim 2 , comprising:

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