Ultrasonic vibrator, ultrasonic vibrator manufacturing method, and ultrasonic probe

Abstract

To provide an ultrasonic transducer that prevents an electrode on a side surface of a piezoelectric element from being damaged.SOLUTION: In an ultrasonic probe 10, an ultrasonic transducer 100 includes a piezoelectric element layer 101 and a reinforcing member 107. The piezoelectric element layer 101 has a piezoelectric element 1011, a first electrode 1012, and a second electrode 1013. The piezoelectric element 1011 generates ultrasonic waves. The first electrode 1012 is continuously provided on each of first and second surfaces of the surface of the piezoelectric element 1011 that are located on opposite sides of the thickness direction of the piezoelectric element 1011, and on a third surface adjacent to the first and second surfaces, respectively. The second electrode 1013 is provided on the second surface and is electrically insulated from the first electrode 1012. The reinforcing member 107 is arranged on the surface provided on the third surface of the first electrode 1012.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to an ultrasonic transducer, a method for manufacturing an ultrasonic transducer, and an ultrasonic probe. [Background technology]

[0002] BACKGROUND ART Conventionally, ultrasonic vibrators have been known that include a piezoelectric element layer in which electrodes are formed on the surfaces of piezoelectric elements (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2002-359897 Summary of the Invention [Problem to be solved by the invention]

[0004] The piezoelectric element layer is laminated with an acoustic matching layer, a dematching layer, etc., but the side surfaces are exposed to the outside, which poses a problem in that the electrodes formed on the side surfaces of the piezoelectric element are easily damaged by external impact.

[0005] The present invention has been made in view of the above, and aims to provide an ultrasonic vibrator, a method for manufacturing an ultrasonic vibrator, and an ultrasonic probe that prevent damage to the electrodes on the side surfaces of the piezoelectric element. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the object, an ultrasonic vibrator according to one embodiment of the present invention comprises a piezoelectric element that generates ultrasonic waves, a piezoelectric element layer having first electrodes continuously provided on each of the surfaces of the piezoelectric element, namely, a first surface and a second surface located on opposite sides of the thickness direction of the piezoelectric element, and a third surface adjacent to the first surface and the second surface, and a second electrode provided on the second surface and electrically insulated from the first electrode, and a reinforcing member arranged on the surface of the first electrode that is provided on the third surface.

[0007] Furthermore, an ultrasonic vibrator according to one embodiment of the present invention further includes a first acoustic member laminated on the first surface side of the piezoelectric element layer, and the reinforcing member is disposed on the surface of the first acoustic member that is in contact with the first surface side of the piezoelectric element layer.

[0008] Furthermore, an ultrasonic vibrator according to one embodiment of the present invention further includes a second acoustic member laminated on the second surface side of the piezoelectric element layer, and the reinforcing member is arranged in an area surrounded by a surface of the first electrode provided on the third surface, the first acoustic member, and the second acoustic member.

[0009] In an ultrasonic transducer according to one aspect of the present invention, the first acoustic member and the second acoustic member have widths in a direction perpendicular to the thickness direction of the piezoelectric element that are larger than the piezoelectric element.

[0010] In an ultrasonic vibrator according to an aspect of the present invention, the reinforcing member covers a surface of the first electrode that is provided on the third surface of the piezoelectric element.

[0011] In an ultrasonic vibrator according to an aspect of the present invention, the first acoustic member is laminated to the piezoelectric element with an adhesive, and the reinforcing member is made of the adhesive.

[0012] In the ultrasonic vibrator according to one aspect of the present invention, the reinforcing member is made of epoxy resin.

[0013] In the ultrasonic vibrator according to one aspect of the present invention, the reinforcing member is electrically conductive.

[0014] In addition, in an ultrasonic vibrator according to one aspect of the present invention, the reinforcing member has a surface that is exposed to the outside and has a thickness direction length that is greater than the thickness direction length of the surface that is in contact with the first electrode.

[0015] In an ultrasonic vibrator according to one aspect of the present invention, the reinforcing member has a step portion formed between a surface exposed to the outside and a surface in contact with the first electrode.

[0016] In an ultrasonic transducer according to an aspect of the present invention, the first acoustic member is an acoustic matching layer having an acoustic impedance smaller than that of the piezoelectric element.

[0017] In an ultrasonic transducer according to an aspect of the present invention, the second acoustic member is a dematching layer having a higher acoustic impedance than the piezoelectric element.

[0018] Furthermore, a method for manufacturing an ultrasonic vibrator according to one embodiment of the present invention is a method for manufacturing an ultrasonic vibrator including a piezoelectric element layer having a piezoelectric element that generates ultrasonic waves and first electrodes that are continuously provided on each of the surfaces of the piezoelectric element, including a first surface and a second surface that are located on opposite sides of the thickness direction of the piezoelectric element, and a third surface that is adjacent to the first surface and the second surface, respectively, and a reinforcing member is formed on the surface of the first electrode that is provided on the third surface.

[0019] In addition, in a method for manufacturing an ultrasonic vibrator according to one aspect of the present invention, the piezoelectric element layer has a second electrode provided on the second surface and electrically insulated from the first electrode, a first acoustic member is laminated on the first surface side of the piezoelectric element layer, and the reinforcing member is formed on the surface of the first acoustic member that is in contact with the first surface side of the piezoelectric element layer.

[0020] In addition, a method for manufacturing an ultrasonic vibrator according to one aspect of the present invention includes stacking a second acoustic member on the second surface side of the piezoelectric element layer, and forming the reinforcing member in an area surrounded by the surface of the first electrode provided on the third surface, the first acoustic member, and the second acoustic member.

[0021] In addition, a method of manufacturing an ultrasonic vibrator according to one aspect of the present invention includes laminating the first acoustic member on the first surface side of the piezoelectric element layer with an adhesive, laminating the second acoustic member on the second surface side of the piezoelectric element layer with the adhesive, and forming the reinforcing member by filling the adhesive into an area surrounded by the surface of the first electrode provided on the third surface and the first acoustic member and the second acoustic member.

[0022] In addition, a method for manufacturing an ultrasonic vibrator according to one embodiment of the present invention includes inserting the reinforcing member into an area surrounded by a surface of the first electrode provided on the third surface, the first acoustic member, and the second acoustic member.

[0023] Furthermore, an ultrasonic probe according to one aspect of the present invention is an ultrasonic probe including a plurality of ultrasonic vibrators whose longitudinal ends are aligned along the lateral direction, and the ultrasonic vibrators include a piezoelectric element that generates ultrasonic waves, a piezoelectric element layer having first electrodes continuously provided on each of the surfaces of the piezoelectric element, namely, a first surface and a second surface located on opposite sides of the thickness direction of the piezoelectric element, and a third surface adjacent to the first surface and the second surface, and a second electrode provided on the second surface and electrically insulated from the first electrode, and a reinforcing member arranged on the surface of the first electrode provided on the third surface. [Effects of the Invention]

[0024] According to the present invention, it is possible to realize an ultrasonic vibrator, a method for manufacturing an ultrasonic vibrator, and an ultrasonic probe in which damage to the electrodes on the side surfaces of the piezoelectric element is prevented. [Brief explanation of the drawings]

[0025] [Figure 1]FIG. 1 is a schematic diagram showing an endoscope system including an ultrasound transducer according to the first embodiment. [Figure 2] FIG. 2 is a side view of the ultrasonic probe shown in FIG. [Figure 3] FIG. 3 is a top view of the ultrasonic probe shown in FIG. [Figure 4] FIG. 4 is a cross-sectional view taken along line AA' in FIG. [Figure 5] FIG. 5 is a flowchart showing a method for manufacturing the ultrasonic vibrator according to the first embodiment. [Figure 6] FIG. 6 is a diagram showing how the laminate is diced. [Figure 7] FIG. 7 is a cross-sectional view of an ultrasonic transducer according to the first modification. [Figure 8] FIG. 8 is a diagram showing how the laminate is diced. [Figure 9] FIG. 9 is a cross-sectional view of an ultrasonic transducer according to the second modification. [Figure 10] FIG. 10 is a diagram showing how the laminate is diced. [Figure 11] FIG. 11 is a cross-sectional view of an ultrasonic transducer according to the third modification. [Figure 12] FIG. 12 is a cross-sectional view of an ultrasonic transducer according to the fourth modification. [Figure 13] FIG. 13 is a cross-sectional view of an ultrasonic transducer according to the fifth modification. [Figure 14] FIG. 14 is a cross-sectional view of an ultrasonic transducer according to the sixth modification. [Figure 15] FIG. 15 is a cross-sectional view of an ultrasonic transducer according to the seventh modification. [Figure 16] FIG. 16 is a flowchart showing a method for manufacturing an ultrasonic vibrator according to the second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0026] Hereinafter, embodiments of an ultrasonic transducer, a method for manufacturing an ultrasonic transducer, and an ultrasonic probe according to the present invention will be described with reference to the drawings. Note that the present invention is not limited to these embodiments. In the following embodiments, an ultrasonic transducer used in an ultrasonic endoscope will be described as an example, but the present invention can be applied to ultrasonic transducers in general, including ultrasonic transducers used in extracorporeal endoscopes.

[0027] In addition, in the drawings, the same or corresponding elements are appropriately designated by the same reference numerals. It should be noted that the drawings are schematic, and the dimensional relationships and ratios of each element may differ from the actual situation. The dimensional relationships and ratios may also differ between the drawings.

[0028] (Embodiment 1) [Overall configuration of endoscope system] Fig. 1 is a schematic diagram showing an endoscopic system including an ultrasound transducer according to embodiment 1. The endoscopic system 1 is a system that performs ultrasound diagnosis and treatment inside a subject such as a human using an ultrasound endoscope. As shown in Fig. 1, the endoscopic system 1 includes an ultrasound endoscope 2, an ultrasound observation device 3, an endoscopic observation device 4, and a display device 5.

[0029] The ultrasonic endoscope 2 is partially insertable into the subject, and has the functions of transmitting ultrasonic pulses (acoustic pulses) toward the body wall of the subject, receiving ultrasonic echoes reflected by the subject and outputting echo signals, and capturing images of the inside of the subject and outputting image signals. The detailed configuration of the ultrasonic endoscope 2 will be described later.

[0030] The ultrasound observation device 3 is electrically connected to the ultrasound endoscope 2 via an ultrasound cable 31, and outputs pulse signals to the ultrasound endoscope 2 via the ultrasound cable 31, while inputting echo signals from the ultrasound endoscope 2. The ultrasound observation device 3 then performs predetermined processing on the echo signals to generate an ultrasound image.

[0031] An endoscope connector 9 (described later) of the ultrasonic endoscope 2 is detachably connected to the endoscopic observation device 4. The endoscopic observation device 4 includes a video processor 41 and a light source device .

[0032] The video processor 41 receives an image signal from the ultrasonic endoscope 2 via the endoscope connector 9. The video processor 41 then performs predetermined processing on the image signal to generate an endoscopic image.

[0033] The light source device 42 supplies the ultrasonic endoscope 2 with illumination light that illuminates the inside of the subject via the endoscope connector 9.

[0034] The display device 5 is configured using a liquid crystal, an organic EL (Electro Luminescence), a CRT (Cathode Ray Tube), or a projector, and displays ultrasound images generated by the ultrasound observation device 3, endoscopic images generated by the endoscopic observation device 4, etc.

[0035] [Configuration of the ultrasonic endoscope] Next, we will explain the configuration of the ultrasonic endoscope 2. The ultrasonic endoscope 2 includes an insertion section 6, an operation section 7, a universal cord 8, and an endoscope connector 9.

[0036] The insertion section 6 is a portion that is inserted into the subject and includes an ultrasonic probe 10 provided at the tip side, a rigid member 61 connected to the base end side of the ultrasonic probe 10, a bending section 62 connected to the base end side of the rigid member 61 and capable of bending, and a flexible tube 63 connected to the base end side of the bending section 62 and having flexibility.

[0037] The operation section 7 is connected to the proximal end side of the insertion section 6 and is a section that receives various operations from a doctor or the like. The operation section 7 includes a bending knob 71 for bending the bending section 62 and a plurality of operation members 72 for performing various operations. The operation section 7 also includes a treatment tool insertion port 73 for inserting a treatment tool.

[0038] The universal cord 8 extends from the operation unit 7 and is a cord on which a light guide, a transducer cable, a signal cable, and a tube that constitutes part of a conduit are arranged.

[0039] The endoscope connector 9 is provided at the end of the universal cord 8. The endoscope connector 9 is connected to the ultrasound cable 31, and is also inserted into the endoscopic observation device 4 to be connected to the video processor 41 and the light source device 42.

[0040] [Configuration of Ultrasound Probe] Next, a description will be given of the configuration of the ultrasonic probe 10. Fig. 2 is a side view of the ultrasonic probe shown in Fig. 1. Fig. 3 is a top view of the ultrasonic probe shown in Fig. 1.

[0041] 2 and 3, the ultrasonic probe 10 includes a plurality of ultrasonic transducers 100 arranged with both ends of the longitudinal direction (vertical direction in FIG. 3) aligned along the lateral direction (horizontal direction in FIG. 3). The ultrasonic probe 10 may be of any of a convex type, a linear type, and a radial type.

[0042] [Configuration of ultrasonic vibrator] Next, the configuration of the ultrasonic vibrator 100 will be described. Fig. 4 is a cross-sectional view corresponding to the line A-A' shown in Fig. 2. As shown in Fig. 4, the ultrasonic vibrator 100 has a piezoelectric element layer 101, a first acoustic matching layer 102 as a first acoustic member, a second acoustic matching layer 103, a dematching layer 104 as a second acoustic member, connection pads 105, an FPC layer 106, a reinforcing member 107, and an insulating portion 108.

[0043] The piezoelectric element layer 101 includes a piezoelectric element 1011 , a first electrode 1012 , and a second electrode 1013 .

[0044] The piezoelectric element 1011 generates ultrasonic waves. The piezoelectric element 1011 is formed using a piezoelectric material such as a PMN-PT single crystal, a PMN-PZT single crystal, a PZN-PT single crystal, a PIN-PZN-PT single crystal, or a relaxor material. Note that PMN-PT single crystal is an abbreviation for a solid solution of magnesium-lead niobate and lead titanate. PMN-PZT single crystal is an abbreviation for a solid solution of magnesium-lead niobate and lead zirconate titanate. PZN-PT single crystal is an abbreviation for a solid solution of zinc-lead niobate and lead titanate. PIN-PZN-PT single crystal is an abbreviation for a solid solution of indium-lead niobate, zinc-lead niobate, and lead titanate. Relaxor materials are a general term for ternary piezoelectric materials in which lead zirconate titanate (PZT) is doped with a lead-based complex perovskite relaxor material to increase the piezoelectric constant and dielectric constant. Lead-based composite perovskites are represented by Pb(B1,B2)O3, where B1 is magnesium, zinc, indium, or scandium, and B2 is niobium, tantalum, or tungsten. These piezoelectric materials have excellent piezoelectric effects. Therefore, even when miniaturized, the electrical impedance can be kept low, which is preferable from the perspective of impedance matching with electrodes.

[0045] The first electrode 1012 and the second electrode 1013 are provided on the surface of the piezoelectric element 1011 by plating or the like.

[0046] The first electrode 1012 is provided continuously on each of the surfaces of the piezoelectric element 1011, namely, a first surface (upper surface) and a second surface (lower surface) located on opposite sides in the thickness direction of the piezoelectric element 1011 (the vertical direction in FIG. 4), and a third surface (side surface) adjacent to the first and second surfaces. In other words, the first electrode 1012 is a folded electrode formed continuously from the upper surface of the piezoelectric element 1011, via the side surfaces, to the lower surface. By forming the first electrode 1012 as a folded electrode in this way, electrical wiring can be connected to the lower surface side of the first electrode 1012, thereby realizing miniaturization of the ultrasonic vibrator 100, simplification of wiring work, etc.

[0047] The second electrode 1013 is provided on the second surface and is electrically insulated from the first electrode 1012 by an insulating portion 108. Since the first electrode 1012 and the second electrode 1013 are insulated from each other, it becomes possible to apply a ground and a signal separately.

[0048] The first acoustic matching layer 102 is laminated with an adhesive on the first surface side of the piezoelectric element layer 101. The second acoustic matching layer 103 is laminated with an adhesive on the side of the first acoustic matching layer 102 opposite the piezoelectric element layer 101. The first acoustic matching layer 102 has a width in a direction perpendicular to the thickness direction of the piezoelectric element 1011 (the left-right direction in FIG. 4 ) that is larger than that of the piezoelectric element 1011. The first acoustic matching layer 102 and the second acoustic matching layer 103 are made of different materials that have lower acoustic impedance than the piezoelectric element 1011, and transmit ultrasonic waves generated by the piezoelectric element 1011. The first acoustic matching layer 102 and the second acoustic matching layer 103 match the acoustic impedances of the piezoelectric element 1011 and the observation target to efficiently transmit sound (ultrasound waves) between the piezoelectric element 1011 and the observation target. In the first embodiment, the ultrasonic transducer 100 is described as having two acoustic matching layers (first acoustic matching layer 102 and second acoustic matching layer 103), but may have one layer or three or more layers depending on the characteristics of the piezoelectric element 1011 and the object to be observed. Furthermore, the ultrasonic transducer 100 may not have an acoustic matching layer. In this case, instead of the first acoustic matching layer 102, an acoustic lens made of a material that transmits ultrasonic waves and that converges and diverges ultrasonic waves may be used as the first acoustic member.

[0049] The dematching layer 104 is laminated with an adhesive on the second surface side of the piezoelectric element layer 101. The width of the dematching layer 104 in a direction perpendicular to the thickness direction of the piezoelectric element 1011 (the left-right direction in FIG. 4) is larger than that of the piezoelectric element 1011. The dematching layer 104 is made of a material with a higher acoustic impedance than the piezoelectric element 1011, and reflects ultrasonic waves generated by the piezoelectric element 1011.

[0050] The connection pads 105 electrically connect the piezoelectric elements 1011 and the FPC layer 106 .

[0051] The FPC layer 106 is a flexible substrate having a conductive layer 1061 electrically connected to the piezoelectric element 1011 and an insulating layer 1062 having insulating properties.

[0052] Reinforcing member 107 is disposed in a region surrounded by the surface of first electrode 1012 that is provided on the third surface, first acoustic matching layer 102, and dematching layer 104. Reinforcing member 107 covers the surface of first electrode 1012 that is provided on the third surface of piezoelectric element 1011. Reinforcing member 107 is made of, for example, an adhesive that has fluidity when applied and hardens thereafter, but may also be made of epoxy resin or elastomer.

[0053] The insulating portion 108 insulates the first electrode 1012 from the second electrode 1013 .

[0054] Furthermore, the ultrasonic vibrator 100 may include a backing layer instead of the dematching layer 104, or may include only the connection pads 105 and the FPC layer 106 as the second acoustic member without including the dematching layer 104. The ultrasonic vibrator 100 may also include a backing layer on the side of the FPC layer 106 opposite the connection pads 105. The backing layer is formed of a backing material that absorbs and attenuates unnecessary ultrasonic waves generated by the operation of the piezoelectric element 1011 so that the unnecessary ultrasonic waves do not return to the piezoelectric element 1011. Specifically, the backing layer is formed using a material with a high attenuation rate, such as an epoxy resin in which a filler such as alumina or zirconia is dispersed, or rubber in which these fillers are dispersed.

[0055] [Method for manufacturing ultrasonic vibrator] Next, a method for manufacturing the ultrasonic vibrator 100 will be described. Fig. 5 is a flowchart showing a method for manufacturing the ultrasonic vibrator according to the first embodiment. First, a laminate is formed by laminating the layers that make up the ultrasonic vibrator 100 (step S1). Fig. 6 is a diagram showing how the laminate is diced. As shown in Fig. 6, a first acoustic matching layer 102 and a second acoustic matching layer 103 are laminated in this order on a first surface of the piezoelectric element layer 101 with an adhesive, and a dematching layer 104, a connection pad 105, and an FPC layer 106 are laminated in this order on a second surface of the piezoelectric element layer 101 with an adhesive, thereby forming a laminate 110.

[0056] Next, the laminate 110 is pressed in the stacking direction (the vertical direction in FIG. 6) (step S2). At this time, the adhesive used in forming the laminate 110 is filled into the area surrounded by the surface of the first electrode 1012 provided on the third surface, the first acoustic matching layer 102, and the dematching layer 104.

[0057] Thereafter, the laminate 110 is diced along the dashed lines L1 (step S3), thereby forming the ultrasonic transducer 100.

[0058] According to the above-described embodiment 1, the surface (side surface) of the first electrode 1012 provided on the third surface is covered by the reinforcing member 107, thereby preventing the first electrode 1012 from being damaged by external impact.

[0059] Furthermore, when power is applied between the first electrode 1012 and the second electrode 1013, the piezoelectric element 1011 expands and contracts in the thickness direction (the vertical direction in FIG. 4), vibrating and generating ultrasonic waves. This vibration may cause breakage of the surface (side surface) of the first electrode 1012 provided on the third surface. According to the first embodiment, the reinforcing member 107 reinforces the side surface of the first electrode 1012, and therefore breakage of the side surface of the first electrode 1012 due to the vibration of the piezoelectric element 1011 can also be prevented.

[0060] Furthermore, by dicing the ultrasonic transducer 100 manufactured by steps S1 to S3 into strips along the left-right direction in FIG. 6, an ultrasonic probe 10 including a plurality of ultrasonic transducers 100 can be manufactured. During this dicing, the surface (side surface) of the first electrode 1012 provided on the third surface may be broken. According to the first embodiment, the reinforcing member 107 reinforces the side surface of the first electrode 1012, and therefore, breaking of the side surface of the first electrode 1012 during dicing can also be prevented. Furthermore, according to this manufacturing method, breaking of the side surface of the first electrode 1012 is prevented, and therefore, the yield when manufacturing the ultrasonic probe 10 can be improved.

[0061] (Variation 1) Fig. 7 is a cross-sectional view of an ultrasonic vibrator according to Modification 1. As shown in Fig. 7, in an ultrasonic vibrator 100A of an ultrasonic probe 10A according to Modification 1, a first acoustic matching layer 102A has an inclined portion 102Aa formed therein, and a dematching layer 104A has an inclined portion 104Aa formed therein. The length of the surface of the reinforcing member 107A exposed to the outside in the thickness direction is greater than the length of the surface in contact with the first electrode 1012 in the thickness direction.

[0062] Next, a method for manufacturing an ultrasonic vibrator 100A according to Modification 1 will be described. FIG. 8 is a diagram showing the state of dicing the laminate. In the laminate 110A before dicing, a recess 110Aa is formed in the first acoustic matching layer 102A, and a recess 110Ab is formed in the dematching layer 104A. As a result, the adhesive applied between the layers when forming the laminate 110A tends to accumulate in the spaces between the recesses 110Aa and 110Ab. Then, the laminate 110A is diced along the dashed line L2. As a result, the ultrasonic vibrator 100A is formed.

[0063] (Variation 2) 9 is a cross-sectional view of an ultrasonic vibrator according to Modification 2. As shown in FIG. 9, in an ultrasonic vibrator 100B of an ultrasonic probe 10B according to Modification 2, a step portion 102Ba is formed in the first acoustic matching layer 102B, and a step portion 104Ba is formed in the dematching layer 104B. In other words, the reinforcing member 107B has a step portion formed between the surface exposed to the outside and the surface in contact with the first electrode 1012. Therefore, the length in the thickness direction of the surface exposed to the outside of the reinforcing member 107B is greater than the length in the thickness direction of the surface in contact with the first electrode 1012.

[0064] Next, a method for manufacturing an ultrasonic vibrator 100B according to Modification 2 will be described. FIG. 10 is a diagram showing the state of dicing the laminate. In the laminate 110B before dicing, a groove 110Ba is formed in the first acoustic matching layer 102B, and a groove 110Bb is formed in the dematching layer 104B. As a result, the adhesive applied between the layers when forming the laminate 110B tends to accumulate in the space between the groove 110Ba and the groove 110Bb. Then, the laminate 110B is diced along the dashed line L3. As a result, the ultrasonic vibrator 100B is formed.

[0065] (Variation 3) Fig. 11 is a cross-sectional view of an ultrasonic vibrator according to Modification 3. As shown in Fig. 11, in an ultrasonic vibrator 100C of an ultrasonic probe 10C according to Modification 3, a first acoustic matching layer 102C has an inclined portion 102Ca formed therein, and a dematching layer 104C has an inclined portion 104Ca formed therein. Furthermore, the length in the thickness direction of the surface of the reinforcing member 107C that is exposed to the outside is smaller than the length in the thickness direction of the surface that contacts the first electrode 1012. As a result, the adhesive applied between the layers when forming the laminate tends to accumulate in the space between the inclined portion 102Ca and the inclined portion 104Ca.

[0066] (Variation 4) 12 is a cross-sectional view of an ultrasonic vibrator according to Modification 4. As shown in FIG. 12, in an ultrasonic vibrator 100D of an ultrasonic probe 10D according to Modification 4, a step portion 102Da is formed in a first acoustic matching layer 102D, and a step portion 104Da is formed in a dematching layer 104D. In other words, a reinforcing member 107D has a step portion formed between a surface exposed to the outside and a surface in contact with the first electrode 1012. Therefore, the length of the surface exposed to the outside in the thickness direction of the reinforcing member 107D is smaller than the length of the surface in contact with the first electrode 1012 in the thickness direction. As a result, the adhesive applied between the layers when forming the laminate tends to accumulate in the space between the step portion 102Da and the step portion 104Da.

[0067] (Variation 5) Fig. 13 is a cross-sectional view of an ultrasonic vibrator according to Modification 5. As shown in Fig. 13, in an ultrasonic vibrator 100E of an ultrasonic probe 10E according to Modification 5, a reinforcing member 107E is formed across the piezoelectric element layer 101 and the dematching layer 104E. As a result, the surface (side surface) of the first electrode 1012 provided on the third surface is covered by the reinforcing member 107E, which prevents the first electrode 1012 from being damaged by an external impact.

[0068] Furthermore, in this configuration, the reinforcing member 107E is formed along a direction intersecting the direction in which the piezoelectric element layer 101 and the dematching layer 104E peel off (the vertical direction in Figure 13), thereby preventing the piezoelectric element layer 101 and the dematching layer 104E from peeling off.

[0069] (Variation 6) Fig. 14 is a cross-sectional view of an ultrasonic vibrator according to Modification 6. As shown in Fig. 14, in an ultrasonic vibrator 100F of an ultrasonic probe 10F according to Modification 6, a reinforcing member 107F is formed across the piezoelectric element layer 101, the first acoustic matching layer 102F, the second acoustic matching layer 103F, and the dematching layer 104F. As a result, the surface (side surface) of the first electrode 1012 provided on the third surface is covered by the reinforcing member 107F, thereby preventing the first electrode 1012 from being damaged by an external impact.

[0070] Furthermore, in this configuration, the reinforcing member 107F is formed along a direction intersecting the direction in which the piezoelectric element layer 101, the first acoustic matching layer 102F, the second acoustic matching layer 103F, and the dematching layer 104F each peel off (the up-and-down direction in Figure 14), thereby preventing the piezoelectric element layer 101, the first acoustic matching layer 102F, the second acoustic matching layer 103F, and the dematching layer 104F from peeling off.

[0071] (Variation 7) Fig. 15 is a cross-sectional view of an ultrasonic vibrator according to Modification 7. As shown in Fig. 15, in an ultrasonic vibrator 100G of an ultrasonic probe 10G according to Modification 7, a reinforcing member 107G is formed across the piezoelectric element layer 101, the first acoustic matching layer 102G, and the dematching layer 104G. As a result, the surface (side surface) of the first electrode 1012 provided on the third surface is covered by the reinforcing member 107G, which prevents the first electrode 1012 from being damaged by an external impact.

[0072] Furthermore, in this configuration, the reinforcing member 107G is formed along a direction intersecting the direction in which the piezoelectric element layer 101, the first acoustic matching layer 102G, and the dematching layer 104G each peel off (the up-and-down direction in Figure 15), thereby preventing the piezoelectric element layer 101, the first acoustic matching layer 102G, and the dematching layer 104G from peeling off.

[0073] (Embodiment 2) 13 is a flowchart showing a method for manufacturing an ultrasonic vibrator according to embodiment 2. First, as in embodiment 1, a laminate is formed by laminating the layers that make up ultrasonic vibrator 100 (step S1), and then pressure is applied to laminate 110 in the lamination direction (step S2).

[0074] Next, reinforcing member 107 is inserted into the region surrounded by the surface provided on the third surface of first electrode 1012, first acoustic matching layer 102, and dematching layer 104 (step S11). Specifically, reinforcing member 107 may be formed by rubbing adhesive or resin into this region, or by bonding or brazing a linear or plate-like member.

[0075] Thereafter, the laminate 110 is diced (step S3), thereby forming the ultrasonic vibrator 100.

[0076] According to the second embodiment described above, the surface (side surface) of the first electrode 1012 provided on the third surface is covered by the reinforcing member 107, thereby preventing the first electrode 1012 from being damaged by external impact.

[0077] Furthermore, in the second embodiment, the reinforcing member 107 is inserted after step S2, but the reinforcing member 107 may be inserted after step S3.

[0078] In the above-described embodiment, the reinforcing member 107 is made of adhesive or resin, but the present invention is not limited to this. For example, the reinforcing member 107 may be made of conductive resin. In this case, since the reinforcing member 107 is conductive, the reinforcing member 107 serves as a path for current to flow even if the side surface of the first electrode 1012 is broken.

[0079] Further advantages and modifications will readily occur to those skilled in the art. Thus, the invention in its broader aspects is not limited to the specific details and representative embodiments shown and described above. Accordingly, various modifications may be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents. [Explanation of symbols]

[0080] 1. Endoscopy system 2. Ultrasound endoscope 3. Ultrasonic observation equipment 4 Endoscopic observation device 5 Display device 6 Insertion section 7 Control section 8 Universal Code 9 Endoscope connector 10, 10A, 10B, 10C, 10D, 10E, 10F, 10G Ultrasound Probes 31 Ultrasonic Cable 41 Video Processor 42 Light source device 61 Rigid parts 62 Curved section 63 Flexible tube 71 Curved Knob 72 Operating member 73 Treatment tool insertion port 100, 100A, 100B, 100C, 100D, 100E, 100F, 100G ultrasonic transducer 101 Piezoelectric element layer 102, 102A, 102B, 102C, 102D, 102F, 102G 1st acoustic matching layer 102Aa, 102Ca, 104Aa, 104Ca Slope 102Ba, 102Da, 104Ba, 104Da Stepped section 103, 103F 2nd acoustic matching layer 104, 104A, 104B, 104C, 104D, 104E, 104F, 104G Dematching layer 105 connection pad 106 FPC layers 107, 107A, 107B, 107C, 107D, 107E, 107F, 107G Reinforcing members 108 Insulation 110, 110A, 110B laminate 110Aa, 110Ab recess 110Ba, 110Bb Groove 1011 Piezoelectric element 1012 1st electrode 1013 2nd electrode 1061 Conductive layer 1062 Insulation layer

Claims

1. a piezoelectric element that generates ultrasonic waves; a first electrode provided continuously on each of the surfaces of the piezoelectric element, including a first surface and a second surface located on opposite sides in a thickness direction of the piezoelectric element, and a third surface adjacent to the first surface and the second surface, respectively; a second electrode provided on the second surface and electrically insulated from the first electrode; a piezoelectric element layer having a reinforcing member disposed on a surface of the first electrode that is provided on the third surface; Equipped with The reinforcing member is an ultrasonic vibrator having electrical conductivity.

2. a first acoustic member laminated on the first surface side of the piezoelectric element layer; The ultrasonic transducer according to claim 1 , wherein the reinforcing member is disposed on a surface of the first acoustic member that is in contact with the first surface side of the piezoelectric element layer.

3. a second acoustic member laminated on the second surface side of the piezoelectric element layer, The ultrasonic transducer according to claim 2 , wherein the reinforcing member is disposed in an area surrounded by a surface of the first electrode provided on the third surface, the first acoustic member, and the second acoustic member.

4. The ultrasonic transducer according to claim 3 , wherein the width of the first acoustic member and the second acoustic member in a direction perpendicular to the thickness direction of the piezoelectric element is greater than that of the piezoelectric element.

5. The ultrasonic transducer according to claim 1 , wherein the reinforcing member covers a surface of the first electrode that is provided on the third surface of the piezoelectric element.

6. the first acoustic member is laminated to the piezoelectric element with an adhesive; The ultrasonic vibrator according to claim 2 , wherein the reinforcing member is made of the adhesive.

7. 3. The ultrasonic vibrator according to claim 2, wherein the reinforcing member is made of epoxy resin.

8. The ultrasonic vibrator according to claim 3 , wherein the length in the thickness direction of the surface of the reinforcing member that is exposed to the outside is greater than the length in the thickness direction of the surface that is in contact with the first electrode.

9. The ultrasonic vibrator according to claim 8 , wherein the reinforcing member has a step portion formed between a surface exposed to the outside and a surface in contact with the first electrode.

10. 3. The ultrasonic transducer according to claim 2, wherein the first acoustic member is an acoustic matching layer having an acoustic impedance smaller than that of the piezoelectric element.

11. The ultrasonic transducer according to claim 3 , wherein the second acoustic member is a dematching layer having a higher acoustic impedance than the piezoelectric element.

12. a piezoelectric element that generates ultrasonic waves; a first electrode provided continuously on each of the surfaces of the piezoelectric element, including a first surface and a second surface located on opposite sides in a thickness direction of the piezoelectric element, and a third surface adjacent to the first surface and the second surface, respectively; a second electrode provided on the second surface and electrically insulated from the first electrode; a piezoelectric element layer having a reinforcing member disposed on a surface of the first electrode that is provided on the third surface; Equipped with The reinforcing member has a step portion formed between a surface exposed to the outside and a surface in contact with the first electrode.

13. a piezoelectric element that generates ultrasonic waves; a first electrode provided continuously on each of the surfaces of the piezoelectric element, including a first surface and a second surface located on opposite sides in a thickness direction of the piezoelectric element, and a third surface adjacent to the first surface and the second surface, respectively; A method for manufacturing an ultrasonic transducer having a piezoelectric element layer having A method for manufacturing an ultrasonic transducer, comprising forming a conductive reinforcing member on a surface of the first electrode that is provided on the third surface.

14. the piezoelectric element layer has a second electrode provided on the second surface and electrically insulated from the first electrode; a first acoustic member is laminated on the first surface side of the piezoelectric element layer; The method for manufacturing an ultrasonic vibrator according to claim 13 , wherein the reinforcing member is formed on a surface of the first acoustic member that is in contact with the first surface side of the piezoelectric element layer.

15. a second acoustic member is laminated on the second surface side of the piezoelectric element layer; The method for manufacturing an ultrasonic transducer according to claim 14 , wherein the reinforcing member is formed in an area surrounded by a surface of the first electrode provided on the third surface, the first acoustic member, and the second acoustic member.

16. the first acoustic member is laminated on the first surface side of the piezoelectric element layer with an adhesive; the second acoustic member is laminated on the second surface side of the piezoelectric element layer using the adhesive; 16. The method for manufacturing an ultrasonic vibrator according to claim 15, wherein the reinforcing member is formed by filling the adhesive into an area surrounded by a surface of the first electrode provided on the third surface, the first acoustic member, and the second acoustic member.

17. The method for manufacturing an ultrasonic transducer according to claim 15 , wherein the reinforcing member is inserted into a region surrounded by a surface of the first electrode provided on the third surface, the first acoustic member, and the second acoustic member.

18. An ultrasonic probe including a plurality of ultrasonic transducers whose longitudinal ends are aligned along the lateral direction, The ultrasonic vibrator is a piezoelectric element that generates ultrasonic waves; a first electrode provided continuously on each of the surfaces of the piezoelectric element, including a first surface and a second surface located on opposite sides in a thickness direction of the piezoelectric element, and a third surface adjacent to the first surface and the second surface, respectively; a second electrode provided on the second surface and electrically insulated from the first electrode; a piezoelectric element layer having a reinforcing member disposed on a surface of the first electrode that is provided on the third surface; Equipped with The reinforcing member is an ultrasonic probe having electrical conductivity.

Images