Method and device for high and low resistance conductor layers that reduce skin depth loss

Abstract

Methods and devices are contemplated that incorporate both a high resistance conductive material (HRCM) and a conductor. The HRCM is deposited on the conductor such that the interface between the HRCM and the conductor is relatively smooth. A dielectric material is then deposited on the exposed surface of the HRCM. The surface of the HRCM that contacts the dielectric material is roughened or otherwise imposed to have a Ra of at least 5 μm. The resistivity ratio between the HRCM and the conductor is at least 50:1 or 100:1, and the conductivity ratio between the conductive material and the resistive material is at least 9:1, 19:1, or 99:1.

Description

[Technical Field]

[0001] The field of the invention relates to methods and systems for manufacturing conductive layers. [Background technology]

[0002] The following description includes information that may be useful in understanding the present invention. It is not an admission that any of the information provided herein is prior art or relevant to the presently claimed invention, or that any publication specifically or implicitly referenced is prior art.

[0003] All publications identified herein are incorporated by reference to the same extent as if each individual publication or patent application was specifically and individually indicated to be incorporated by reference. In the event that a definition or use of a term in an incorporated reference is inconsistent with or contradicts the definition of that term provided herein, the definition of that term provided herein applies and the definition of that term in the reference does not apply.

[0004] There is a need for improved methods, systems, and devices for reducing skin depth losses in conductors in circuits. Summary of the Invention

[0005] The present subject matter provides systems, methods, and devices related to reducing skin depth loss of conductors in a circuit. A resistive and conductive material (e.g., a high resistance conductive material (HRCM)) is disposed on a surface of a substrate, e.g., a dielectric. The conductive material is disposed on the surface of the HRCM, typically in a pattern of a circuit or portion thereof. The conductive material has a lower resistance (preferably much lower resistance) and a higher conductivity (preferably much higher conductivity) than the resistive material. For example, the resistivity ratio between the HRCM and the conductive material is typically greater than 50:1 or 100:1 (e.g., the HRCM is much more resistive than the conductive material). Viewed from another perspective, the conductivity ratio between the conductive material and the HRCM is at least 9:1, 19:1, or 99:1 (e.g., the conductive material is much more conductive than the HRCM). Contemplated resistive materials (e.g., HRCM) include at least one of metals (e.g., bismuth, tin, lead), alloys thereof, conductive organic materials (e.g., epoxy with nanometal (silver, copper) particles), or combinations thereof.

[0006] The surface of the substrate in contact with the resistive material is typically rougher than the surface of the resistive material in contact with the conductive material. For example, the surface of the substrate (and thus the surface of the resistive material in contact with the substrate) has an arithmetic mean roughness (Ra) of at least 1 μm or 5 μm. The Ra of the surface of the resistive material in contact with the conductive material (and therefore the surface of the conductive material) is at least smaller than the Ra of the surface of the substrate in contact with the resistive material, typically less than half or a quarter of that. The Ra of the surface of the resistive material is less than 2.5 μm, preferably less than 1 μm, less than 0.5 μm, less than 0.1 μm, or less than 0.01 μm.

[0007] In some embodiments, the resistive material includes a first material disposed on the surface of the substrate and a second material disposed on the first material, such that the ratio of resistivities between the second material and the first material is at least 50: 1 or 100: 1. The first material is typically electrically conductive (e.g., copper), and the thickness of the first material is no greater than 2 μm, 1 μm, or 0.5 μm.

[0008] A method for forming a conductive layer is also contemplated. A resistive material (e.g., HRCM, conductive, etc.) is deposited on the surface of a substrate. A conductive material is further deposited on the surface of the resistive material, typically forming part of a circuit. The resistive material is typically much less conductive than the conductive material; for example, the conductivity ratio between the conductive material and the resistive material is at least 9:1, 19:1, or 99:1. From another perspective, the resistivity ratio between the resistive material and the conductive material is typically greater than 50:1 or 100:1. The Ra of the surface of the resistive material (the surface in contact with the conductive material) is at least half the Ra of the surface of the substrate (the surface in contact with the resistive material).

[0009] In some embodiments, depositing a resistive material on a substrate includes one of CVD (chemical vapor deposition) or PVD (physical vapor deposition) of the resistive material on the substrate, or depositing a catalyst on the surface of the substrate and then depositing the resistive material on the catalyst. Depositing a catalyst on a substrate can also include depositing a catalyst by CVD or PVD, or coating the substrate with a catalyst precursor (e.g., a solvent that supports the catalyst precursor) and then activating the catalyst precursor. Depositing a resistive material on a substrate can also include depositing a conductor on the substrate (e.g., to a thickness of 2 μm, 1 μm, or 0.5 μm or less, e.g., via CVD, PVD, electroless deposition on a catalyst, etc.), e.g., by electrolytic deposition.

[0010] A method of forming a circuit is also contemplated. A resistive material is deposited on the surface of a conductive layer. The resistive material is conductive, but much less conductive than the conductive layer. The surface of the conductive layer has an Ra that is less than or equal to half the Ra of the exposed surface of the resistive material or the surface of the substrate. The exposed surface of the resistive material is laminated to a substrate. Portions of the conductive layer are removed to form the circuit or a portion thereof. Depositing the resistive material on the conductive layer typically involves CVD, PVD, or electrolytic deposition.

[0011] Various objects, features, aspects and advantages of the present subject matter will become more apparent from the following detailed description of preferred embodiments, taken in conjunction with the accompanying drawings in which like numerals represent like elements. [Brief explanation of the drawings]

[0012] [Figure 1] FIG. 1 shows a flow chart for forming a conductive layer. [Figure 2] FIG. 2 shows another flow chart for forming a circuit. [Figure 3] FIG. 3 shows the electrical circuit of the subject of the present invention. [Figure 4] FIG. 4 shows another electrical circuit according to the subject matter of the present invention. [Figure 5] FIG. 5 shows yet another electrical circuit according to the subject matter of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0013] The present subject matter provides systems, methods, and devices related to mitigating skin depth losses in conductors in circuits. 1 shows a flowchart 100 for forming a conductive layer. Flowchart 100 includes steps 110 and 120, as well as optional steps 111-117 associated with step 110, and optional steps 121 and 122 associated with step 120.

[0014] 2 shows a flowchart 200 for forming a circuit. Flowchart 200 includes steps 210, 220, and 230, as well as optional steps 211-216 related to step 210, and optional step 221 related to step 220.

[0015] FIG. 3 shows a circuit having a conductor 310 (e.g., copper) laminated on a high-resistivity conductive material (HRCM) 320, which is deposited on a dielectric substrate 330. The conductor 310 has a lower resistance and a higher conductivity than the HRCM 320. For example, the resistivity ratio between the HRCM 320 and the conductor 310 is typically greater than 50:1 or 100:1. Similarly, the conductivity ratio between the conductor 310 and the HRCM 320 is at least 9:1, 19:1, or 99:1. Contemplated resistive materials (e.g., HRCM 320) include at least one of metals (e.g., bismuth, tin, lead), alloys thereof, conductive organic materials (e.g., epoxies with nanometal (copper, silver) particles), or combinations thereof.

[0016] The surface of the substrate 330 in contact with the HRCM 320 is typically rougher than the surface of the HRCM 320 in contact with the conductor 310. For example, the surface of the substrate 330 (and thus the surface of the HRCM 320 in contact with the substrate) has an Ra of at least 1 μm or 5 μm. The Ra of the surface of the HRCM 320 in contact with the conductor 310 (and thus the surface of the conductor 310) is at least less than the Ra of the surface of the substrate in contact with the HRCM, typically less than half, a quarter, or 10%. The Ra of the surface of the HRCM 320 is less than 2.5 μm, preferably less than 1 μm, less than 0.5 μm, less than 0.1 μm, or less than 0.01 μm.

[0017] FIG. 4 illustrates a circuit 400 having a conductor 410 (e.g., copper) laminated on a high-resistivity conductive material (HRCM) 420, which is deposited on a conductor 430 along the surface of a dielectric substrate 440. In this embodiment, the resistive material 420 can be viewed as having a first material (e.g., conductor 410) disposed on the surface of the substrate and a second material (e.g., HRCM 420) disposed on the first material, such that the resistivity ratio between the second material and the first material is at least 50:1 or 100:1. The first material is typically conductive (e.g., copper), and has a thickness of 20 μm, 10 μm, or 5 μm or less. The conductor 430 is preferably deposited as a thin layer, e.g., less than 2 μm, 1 μm, 0.5 μm, or 0.1 μm thick, and is typically copper. In some embodiments, the thickness of the conductor 430 is less than half or less than a quarter of the Ra of the surface of the dielectric 440 in contact with the conductor 430 (or the surface of the HRCM 420 in contact with the conductor 430).

[0018] 5 shows a flowchart 500 for forming a circuit. In step 500A, HRCM 520 is deposited on a surface of a conductive layer 510 (e.g., copper). While HRCM 520 is conductive, its conductivity is much lower than that of conductive layer 510 and its resistivity is much higher than that of conductive layer 510. In some embodiments, the exposed surface of HRCM 520 is roughened (e.g., after or during step 500A) (see surface 521) or otherwise has an Ra at least twice the Ra of the surface of conductive layer 510 in contact with HRCM 520.

[0019] In step 500B, the combined conductor 510 and HRCM 520 structure is laminated to a substrate 530 (e.g., a dielectric material) as shown. In some embodiments, the roughened surface 521 of the HRCM 520 (e.g., an Ra at least twice that of the surface of the conductor layer 510) is pressed against the surface of the substrate 530. However, it is also contemplated that the surface of the substrate 530 has an Ra at least twice that of the surface of the conductor layer 510 that contacts the HRCM 520 (e.g., surface 521). In either case, the interface between the HRCM 520 and the substrate 530 has an Ra at least twice that of the interface between the HRCM 520 and the conductor layer 510.

[0020] In step 500C, one or more portions of conductor layer 510 are removed (or additional portions of conductor are added, or a combination thereof) to form a conductive pattern of a circuit comprising conductor portions 512 and 514.

[0021] The following description provides many exemplary embodiments of the inventive subject matter. While each embodiment represents a single combination of inventive elements, it is contemplated that the inventive subject matter includes all possible combinations of the disclosed elements. Thus, if one embodiment includes elements A, B, and C and a second embodiment includes elements B and D, it is contemplated that the inventive subject matter also includes any other remaining combination of A, B, C, or D, even if not explicitly disclosed.

[0022] As used herein, unless the context dictates otherwise, the term "coupled to" is intended to include both direct coupling (where the two elements coupled to each other contact each other) and indirect coupling (where at least one additional element is positioned between the two elements). Thus, the terms "coupled to" and "coupled with" are used interchangeably.

[0023] In some embodiments, numbers expressing properties such as amounts and concentrations of ingredients, reaction conditions, and the like, used to describe and claim particular embodiments of the present invention should be understood to be modified in some instances by the term "about." Accordingly, in some embodiments, the numerical parameters set forth in the specification and appended claims are approximations that may vary depending on the desired properties sought to be obtained by a particular embodiment. In some embodiments, the numerical parameters should be construed in light of the number of reported significant digits and by applying ordinary rounding techniques. Notwithstanding that the numerical ranges and parameters setting forth the broad scope of some embodiments of the present invention are approximations, the numerical values ​​set forth in the specific examples are reported as precisely as practicable. The numerical values ​​presented in some embodiments of the present invention may contain certain errors necessarily resulting from the standard deviation found in their respective testing measurements.

[0024] Unless the context dictates otherwise, all ranges set forth herein should be construed as inclusive of their endpoints, and open-ended ranges should be construed as including only commercially practical values. Similarly, all lists of values ​​should be considered to include intermediate values ​​unless the context dictates otherwise.

[0025] As used throughout this description and the claims that follow, the meanings of "a," "an," and "the" include plural references unless the context clearly dictates otherwise. Also, as used in this description, the meaning of "in" includes "in" and "on" unless the context clearly dictates otherwise.

[0026] All methods described herein can be performed in any suitable order unless otherwise indicated herein or clearly contradicted by context. Any and all examples provided with respect to specific embodiments herein, or the use of exemplary language (e.g., "etc."), are intended merely to better illustrate the invention and do not impose limitations on the scope of the invention as otherwise claimed. No language in the specification should be construed as indicating any non-claimed element essential to the practice of the invention.

[0027] Groupings of alternative elements or embodiments of the invention disclosed herein should not be construed as limiting. Each group member may be referred to and claimed individually or in any combination with other members of the group or other elements found herein. One or more members of a group may be included in, or deleted from, a group for reasons of convenience and / or patentability. When any such inclusion or deletion occurs, the specification is deemed to include the group as modified herein, and thus fulfills the written description of all Markush groups used in the appended claims.

[0028] It will be apparent to those skilled in the art that many more modifications beyond those already described are possible without departing from the inventive concepts herein. Accordingly, the present subject matter is not to be limited except by the spirit of the appended claims. Moreover, in interpreting both the specification and the claims, all terms should be interpreted in the broadest possible manner consistent with the context. In particular, the terms "comprises" and "comprising" should be interpreted as referring non-exclusively to elements, components, or steps, indicating that a referenced element, component, or step may be present, utilized, or combined with other elements, components, or steps not expressly referenced. When a claim herein refers to at least one selected from the group consisting of A, B, C, ..., and N, the text should be interpreted as requiring only one element from the group, not A+N, or B+N, I.

Claims

1. A substrate, a resistive material disposed on a surface of the substrate, the resistive material being electrically conductive; a conductive material disposed on a surface of the resistive material, the conductive material having a lower resistance than the resistive material; wherein the resistive material comprises a first material disposed on a surface of the substrate and a second material disposed on the first material, and a resistivity ratio between the second material and the first material is at least 50:1 or 100:

1.

2. The substrate of claim 1 , wherein the surface of the substrate has an arithmetic mean roughness (Ra) of at least 5 μm.

3. 3. The substrate of claim 1, wherein the Ra of the surface of the resistive material is at least less than, or less than half the Ra of the surface of the substrate.

4. The substrate of any one of claims 1 to 3, wherein the surface of the resistive material has an Ra of less than 2.5 μm, 1 μm, or 0.1 μm.

5. The substrate of any one of claims 1 to 4, wherein the resistive material comprises one of a metal, an alloy, or a conductive organic material.

6. A substrate according to any one of claims 1 to 5, wherein the resistivity ratio between the resistive material and the conductive material is at least 50:1 or 100:

1.

7. The substrate of any one of claims 1 to 6, wherein the ratio of conductivity between the conductive material and the resistive material is at least 9:1, 19:1, or 99:

1.

8. The substrate of claim 1 , wherein the first material is electrically conductive and the thickness of the first material is 1 μm or less.

9. 1. A method of forming a conductive layer, comprising: depositing a resistive material on a surface of a substrate, the resistive material being electrically conductive; depositing a conductive material on the surface of said resistive material; wherein the Ra of a surface of the resistive material is at least half of the Ra of a surface of the substrate, the resistive material comprising a first material disposed on the surface of the substrate and a second material disposed on the first material, and a resistivity ratio between the second material and the first material is at least 50:1 or 100:

1.

10. The method of claim 9 , wherein the conductive material forms part of a circuit.

11. 11. The method of claim 9 or 10, wherein depositing the resistive material on the substrate comprises (i) CVD (chemical vapor deposition) or PVD (physical vapor deposition) of the resistive material on the substrate, or (ii) depositing a catalyst on a surface of the substrate and depositing the resistive material on the catalyst.

12. 12. The method of claim 11 , wherein depositing the catalyst on the substrate comprises (i) depositing the catalyst by CVD or PVD, or (ii) coating the substrate with a catalyst precursor and activating the catalyst precursor.

13. The method of any one of claims 9 to 12, wherein depositing the resistive material on the substrate comprises depositing a conductor on the substrate and depositing the resistive material on the conductor.

14. The method described in claim 13, wherein the thickness of the conductor is 1 μm or less.

15. 15. The method of any one of claims 9 to 14, wherein the ratio of conductivity between the conductive material and the resistive material is at least 9:1, 19:1, or 99:1.

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