Automatic Sample Handling Device

Abstract

This automates the handling of grids loaded with TEM samples. [Solution] The automated grid handling device 100 includes a transport module 125 having a multi-stage shuttle, the multi-stage shuttle including a first shuttle stage and a second shuttle stage, an end effector 101 connected to at least one of the first and second shuttle stages holding a grid carrier and configured to transport it to and from the electron microscope through a transport interface communicatively connected to a multi-axis positioning stage port 150 of the electron microscope, an automated loading module connected to the frame and communicatively connected to the transport module 125 includes a loading port module, and grids are loaded into the automated loading module and the transport module 125 through the loading port module.

Description

[Technical Field]

[0001] [CROSS-REFERENCE TO RELATED APPLICATIONS] This non-provisional patent application claims priority to and benefit of U.S. Provisional Patent Application No. 62 / 504,835, filed May 11, 2017, the disclosure of which is incorporated herein by reference in its entirety.

[0002] [Technical field] FIELD OF THE INVENTION Exemplary embodiments relate generally to automated grid handling systems, and more particularly to automated grid handling systems for automated inspection or imaging systems. [Background technology]

[0003] Typically, grids are loaded into an electron microscope, such as a transmission electron microscope (TEM), one at a time for inspection or imaging. The process of loading a single grid is tedious and time-consuming. The operator prepares the sample on the grid and carefully places the grid into the grid holder device. The operator then prepares the TEM to accept the grid holder device by venting the TEM's multi-axis positioning port. Next, the operator inserts the grid holder device into the TEM's multi-axis positioning port and initiates a vacuum process. The vacuum process continues until the TEM's multi-axis positioning port reaches a vacuum level substantially similar to that in the TEM column. Once the vacuum level is achieved, the operator positions the grid holder in the operating position. The operator may then perform manual or automated imaging tasks on the single grid. Once the imaging task is complete, the operator vents the TEM's multi-axis positioning port and removes the grid holder. The final step is to remove the grid from the grid holder and load a new grid, if necessary.

[0004] Recently, attempts have been made to automate grid handling for TEMs. One such attempt involved providing a grid loading and positioning system attached to the TEM's auxiliary port. Imaging was achieved by positioning an end effector that directly clamped the grid into the electron beam path through the auxiliary port. All positioning was controlled by the grid loading and positioning system, and the entire control system was external to the TEM. Only the end effector that directly clamped the grid entered the TEM column 275 through the auxiliary port. The grid loading and positioning system was a stand-alone system that required its own equipment, including pneumatic, electrical, and vacuum sources. This approach was very complex and costly and did not utilize the TEM's internal equipment and systems. Summary of the Invention

[0005] It would be advantageous to have an automated grid handling system that handles a set of grids and takes advantage of the internal equipment and systems of the electron microscope.

[0006] The above aspects and other features of the disclosed embodiments are explained in the following description taken in conjunction with the accompanying drawings. [Brief explanation of the drawings]

[0007] [Figure 1A] FIG. 1 is a schematic illustration of an automated grid handling system in accordance with aspects of the disclosed embodiment; [Figure 1B] FIG. 1 is a schematic illustration of an automated grid handling system at a pick-up position in accordance with aspects of the disclosed embodiment; [Figure 1C] FIG. 1 is a schematic illustration of an automated grid handling system in an inspection position in accordance with aspects of the disclosed embodiment; [Figure 1D] FIG. 1 is a perspective view of an automated grid handling system in an inspection position in accordance with aspects of the disclosed embodiment; [Figure 2A] FIG. 10 is a perspective view of a grid carrier magazine in accordance with aspects of the disclosed embodiment; [Figure 2B] FIG. 10 is a perspective view of a grid carrier magazine supporting grid carriers on shelves in accordance with aspects of the disclosed embodiment; [Figure 2C] FIG. 10 is a schematic illustration of a grid carrier in a locked position in accordance with aspects of the disclosed embodiment; [Figure 2D] FIG. 10 is a schematic illustration of a grid carrier in an unlocked position in accordance with aspects of the disclosed embodiment; [Figure 2E] FIG. 10 is a perspective view of a grid carrier holding a grid in a locked position in accordance with aspects of the disclosed embodiment; [Figure 2F] FIG. 10 is a perspective view of a grid carrier holding a grid in a locked position in accordance with aspects of the disclosed embodiment; [Figure 3A] 1 is a schematic illustration of a grid in accordance with aspects of the disclosed embodiment; [Figure 3B] 1 is a schematic illustration of a grid in accordance with aspects of the disclosed embodiment; [Figure 4A] FIG. 10 is a schematic illustration of a gripper end effector in accordance with aspects of the disclosed embodiment; [Figure 4B] FIG. 10 is a perspective view of a gripper end effector clamping (closing) a grid carrier in accordance with aspects of the disclosed embodiment; [Figure 4C] FIG. 10 is a perspective view of a gripper end effector unclamping (opening) a grid carrier in accordance with aspects of the disclosed embodiment; [Figure 5] 1 is a flow diagram in accordance with aspects of the disclosed embodiment; DETAILED DESCRIPTION OF THE INVENTION

[0008] 1A-1D are schematic and perspective views of an automated grid handling system 100 in accordance with aspects of the disclosed embodiment. While aspects of the disclosed embodiment are described with reference to the drawings, it should be understood that aspects of the disclosed embodiment can be embodied in many forms. Furthermore, any suitable size, shape, or type of elements or materials can be used. It should be noted that while reference is made to X, Y, and Z axes, the reference to these axes is exemplary only, and in other aspects, the axes may have any suitable directional designators.

[0009] Although aspects of the disclosed embodiments are described herein with respect to a transmission electron microscope (TEM), it should also be understood that aspects of the disclosed embodiments may be applied to any suitable grid (including specimen) inspection or imaging equipment in which a grid is supported on a grid carrier during inspection or imaging of the grid (including specimen). For example, aspects of the disclosed embodiments may be employed in any suitable equipment in which a grid is held in a grid carrier by an end effector of the disclosed embodiments during inspection or imaging. In alternative embodiments, an end effector of a grid handling system may hold the grid directly during inspection or imaging.

[0010] In one embodiment, in connection with a TEM, the automated grid handling system 100 can load and store approximately 25 grids (including samples) in a single exchange (e.g., loading a set of grids including samples), while in other embodiments related to a TEM or other suitable inspection equipment (such as those described above), a greater or lesser number of grids (including samples) can be loaded and stored. The automated grid handling system 100 may be connected, for example, to a conventional multi-axis positioning stage 150 used in TEMs, which provides substantially all the necessary degrees of freedom of motion for positioning grids within the TEM during inspection. A suitable example of a TEM multi-axis positioning stage 150 is the CompuStage™ manufactured by FEI. Alternatively, other suitable multi-axis positioning stages 150 are manufactured by JEOL and Hitachi High-Technologies Corporation. In other embodiments, the automated grid handling system 100 may be connected, for example, to any suitable loading system of any suitable imaging or inspection equipment. The automated grid handling system 100 in combination with a conventional multi-axis positioning stage can provide high-resolution, high-speed, and high-stability positional control of the grid during imaging or inspection. As described below, in accordance with aspects of the disclosed embodiment, grid handling and storage operations as well as positioning of the grid (including the sample) within the TEM column 275 can be effected, for example, by a combination of a conventional multi-axis TEM positioning stage 150 and the automated grid handling system 100.

[0011] As described below, the automated grid handling system 100 may include a transport module 125 having an end effector 101 configured to substantially directly handle any suitable grid carrier 200, which may support several different grid types 300 / 301, such as several different sample grids 300 / 301. A gripper 400 as part of the end effector 101 may be operated by coordinated movement of two or more axes of motion that, when combined, act to open and close the gripper 400 to grip the grid carrier 200. In other embodiments, the gripper 400 of the end effector may be operated in any suitable manner, such as with a dedicated drive that drives the gripper to an open or closed position. In yet another embodiment, the gripper 400 of the end effector 101 may be operated with a spring-loaded flexure and a dedicated drive, where the drive can drive the gripper to an open position and the spring can drive the gripper to a closed position. The end effector 101 may be configured to manipulate the grid carrier 200 holding the grid in a high vacuum environment or any other suitable environment, such as a non-vacuum or low vacuum environment. The end effector 101 may be configured to grip an individual grid carrier 200 during extraction from any suitable grid carrier magazine 102 / 230 having grid carrier shelves 231. The end effector 101 (and the grid positioning unit 104 of which it is a part) may be configured to provide a precise and rigid interface for supporting the grid carrier holding the grid (including the specimen), allowing for fast positioning movements (e.g., about 8 to about 24 microns or any other suitable distance) and rapid lowering (e.g., less than 5 nanometers) in less than about 100 ms without substantially introducing undesirable vibration modes into the grid during inspection or imaging.In other embodiments, the end effector 101 (and the grid positioning unit 104 of which the end effector is a part) may be configured to perform fast position movements (e.g., about 8 to about 24 microns or any other suitable distance) and rapid lowering (e.g., less than 4 nanometers) in less than about 25 ms to about 35 ms without substantially introducing undesirable vibration modes into the grid during inspection or imaging.

[0012] In one embodiment, the grids 300 / 301 may be held within a grid carrier 200. The grid carrier may support several different grid types 300 / 301, which may support several different sample types (e.g., samples resulting from life science, material science, semiconductor, and any other suitable operations). The grid carrier may have pockets 210 that support and restrain several different grid types 300 / 301. In one embodiment, there may be a different pocket 210 for each of several different grid types 300 / 301, or in other embodiments, there may be a single pocket 210 that supports and restrains two or more of several different grid types 300 / 301. The grid carrier 200 may have a top 201 and a bottom 202, where the top is closed onto the bottom. The top and bottom may be connected by a hinge 205. The hinge 205 may be capable of connecting the top to the bottom and allowing the top to be closed onto the bottom. In other embodiments, any suitable connection mechanism can be used to connect the top portion 201 and the bottom portion 202. The grid carrier has a locking device 206 that locks the top portion to the bottom portion while the grid carrier is closed. The locking device 206 can be unlocked to open the grid carrier. One of several different grid types 300 / 301 can be loaded into the grid carrier when open, and the grid can be restrained and supported while the grid carrier is closed and locked. The top portion 201 and the bottom portion 202 are configured to allow a sample on the grid to be exposed to the TEM beam 250 during imaging or inspection. The grid carrier can have gripping regions 204L and 204R, and a gripper 400 as part of the end effector 101 can grip or restrain the grid carrier for transport. The gripping regions 204L and 204R can be located in any suitable location on the grid carrier 200. The grid carrier 200 may have alignment features 203 that may align with alignment features 232 on a grid carrier shelf 231 of the grid carrier magazine 102 / 230.Alignment feature 203 can be located in any suitable location on grid carrier 200, and alignment feature 232 can be located in any suitable location on grid carrier shelf 231 of grid carrier magazine 102 / 230. Grids may be loaded into the grid carrier in a specific orientation as needed during imaging or inspection, aligning alignment feature 203 with alignment feature 232. In other aspects, grid carrier 200 may have a bottom 202, pockets 210 that support and restrain several different grid types 300 / 301, and hold-down fingers 212 that restrain the grid in pocket 210.

[0013] In one embodiment, the grid carriers may be held within a grid carrier magazine 102 / 230, configured for insertion into the automated grid handling system 100, as described below. The grid carrier magazine 102 / 230 and the grid carriers 200 therein may be configured to provide for automatic or manual loading, inspection, and removal of grids supported within the grid carrier magazine 102 / 230. For example, the grid carrier magazine 102 / 230 may include kinematic features 233 that enable substantially direct handling of the grid carrier magazine 102 / 230 by magazine handling systems internal and external to the automated grid handling system 100. The kinematic features 233 may be located in any suitable location on the grid carrier magazine 102 / 230. In one embodiment, the grid carrier magazine 102 / 230 supporting the grid carriers 200 may be configured for use in a vacuum environment, while in other embodiments, the grid carrier magazine 102 / 230 supporting the grid carriers 200 may be configured for use in a non-vacuum environment. In another embodiment, the grid carrier magazine 102 / 230 allows for the loading and unloading of grid carriers outside of the grid handling system 100 by a human or any other suitable loading device.

[0014] 1A-1D , automated grid handling system 100 includes a frame 140F, a transport module 125 connected to frame 140F, a loading module 140 connected to frame 140F, a grid carrier magazine load lock 120, a pneumatic module 130 (which may be connected to the frame) communicatively coupled to loading module 140 and transport module 125, a vacuum module 172 (which may be connected to the frame) communicatively coupled to loading module 140 and transport module 125, and any other suitable computer control system having a suitable processor and memory, as well as any other equipment, such as a power distribution system. Pneumatic module 130 may include an air source 130S and any suitable valves for operation, e.g., the valves and closures of loading module 140 and / or vacuum module 172 described herein. The vacuum module 172 may include any suitable vacuum pumps for drawing and maintaining the interior chambers of the loading module 140 and the transfer module 125 at any suitable vacuum pressure, for example, for interfacing with a TEM. The vacuum module 172 may also include any suitable valves, for example, for selectively isolating the vacuum pumps from each other and / or from the chamber of the loading module 140. In one embodiment, the vacuum module 172 may include any suitable vacuum pumps for drawing and maintaining the grid carrier magazine load lock 120 at any suitable vacuum pressure, for example, for interfacing with a TEM. In one embodiment, the vacuum pressure in the interior chambers of the loading module 140 and the transfer module 125 is maintained and controlled by a vacuum pump included with the TEM, and the vacuum pressure in the carrier magazine load lock 120 may be maintained and controlled by the vacuum module 172.

[0015] In one embodiment, the frame 140F may form at least a portion of the loading module 140 or may be integral with at least a portion of the loading module 140 (e.g., a one-piece, unitary structure). In other embodiments, the loading module 140 may be connected to the frame 140F in any suitable manner. In one embodiment, the loading module 140 may include a sealable grid carrier magazine load lock chamber 120. The grid carrier magazine load lock chamber 120 may be selectively fluidly connected to the transport module 125 via a closable opening or port 120P. The loading module 140 may include any suitable isolation device configured to selectively seal the port 120P to seal or isolate the atmosphere of the grid carrier magazine load lock chamber 120 from the atmosphere of the transport module 125 and the TEM column 275. The grid carrier magazine load lock chamber 120 may include any suitable door 120D configured to seal a load / unload opening of the grid carrier magazine load lock chamber 120. In one embodiment, the door may be hingedly connected to the grid carrier magazine load lock chamber 120, while in other embodiments, the door 120D may be removable from the grid carrier magazine load lock chamber 120 to allow access to the grid carrier magazine load lock chamber 120. In one embodiment, the door 120D may have a manual closure, while in other embodiments, the door 120D may have an automated closure. The loading opening may be configured to allow entry and exit of the grid carrier magazine 102 / 230 into and out of the grid carrier magazine load lock chamber 120. In one embodiment, the grids may be TEM grids held by grid carriers 200, which are in turn held within the grid carrier magazine 102 / 230, as described further below.In one embodiment, the grid carrier magazine 102 / 230 and the grid carrier magazine load lock chamber 120 may be configured for manual insertion and removal of the grid carrier magazine 102 / 230 into and from the grid carrier magazine load lock chamber 120. In other embodiments, the grid carrier magazine 102 / 230 and the grid carrier magazine load lock chamber 120 may be configured for automatic insertion and removal of the grid carrier magazine 102 / 230 into and from the grid carrier magazine load lock chamber 120. In one embodiment, the grid carrier magazine load lock chamber 120 may have a pressure indicator that warns when the door 120D is opened. In another embodiment, the door may have a locking mechanism that locks and unlocks the door 120D based on the pressure indicator. The door 120D may be locked when there is a pressure differential between the pressure in the grid carrier magazine load lock chamber 120 and the external atmosphere. The door 120D can be unlocked when the pressure in the grid carrier magazine load lock chamber 120 is substantially the same as the outside atmosphere.

[0016] The transfer module 125 may include a transfer module interface 125I configured to couple and uncouple the grid handling system 100 to a corresponding interface, such as an interface or port 180P, of a TEM so that the grid handling system 100 can be installed in or removed from the TEM as a unit. The transfer module interface 125I fluidly connects the transfer module 125 and the loading module 140 to the interior of the TEM via port 180P. The transfer module interface 125I can connect the grid handling system 100 to a conventional multi-axis positioning stage 150 used in a TEM, for example, to position the grid carrier 200 or grid 300 / 301 within the TEM during inspection. In one embodiment, the grid handling system 100 can be loaded with a grid carrier 200 holding a grid and can position the grid carrier in the X direction using high-resolution, high-speed, and high-stability position control, while the conventional multi-axis positioning stage 150 can position the grid carrier 200 in the Y, Z, and θ directions using conventional means during imaging or inspection. In another embodiment, the grid handling system 100 can be loaded with a grid carrier and the conventional multi-axis positioning stage 150 can position the grid carrier in the X, Y, Z, and θ directions using conventional means during imaging or inspection. In one embodiment, the grid handling system 100 driven by the conventional multi-axis positioning stage 150 can move in the X, Y, Z, and θ directions. In another embodiment, the grid handling system 100 driven by the conventional multi-axis positioning stage 150 can move only in the Y and Z directions. Referring now to FIG. 1D, grid handling system 100 may include transport module interface bearing 125B1, transport module interface seal 125S, transport module rear bearing 125B2, and grid handling system fastener 125F.In one embodiment, a conventional multi-axis positioning stage 150 can move the grid carrier 200 in the direction of arrow 702 (θ or roll). The frame 140F can be fastened directly to the TEM using one or more grid handling system fasteners 125F, which prevent the frame from moving in the direction of arrow 702 (θ or roll). In one embodiment, the one or more grid handling system fasteners 125F can allow the frame 140F to move in the X, Y, and Z axes. The transport module 125 can include a transport module interface bearing 125B1, a transport module interface seal 125S, and a transport module rear bearing 121B2, allowing the transport module 125, including the transport interface 125I, the end effector 101, and the multi-stage 104, to move in the direction of arrow 702 (θ or roll). Referring again to FIG. 1D , the transport module 125 and magazine shuttle chamber 126 can be at substantially the same pressure as the TEM column 275, which can be maintained and controlled by a vacuum pump included with the TEM. In one embodiment, the conventional multi-axis positioning stage 150 can move + / - 75° in the direction of arrow 702 (θ or roll). In one embodiment, the grid handling system 100 can move + / - 75° in the direction of arrow 702 (θ or roll), and in other embodiments, the frame 140F and loading module 140 remain stationary while a portion of the transfer module moves + / - 75° in the direction of arrow 702 (θ or roll). In one embodiment, the seal can be a ferrofluidic seal, and in other embodiments, the seal can be any suitable seal configured to maintain a tight seal (an isolation barrier between the transfer module and the atmosphere) while a portion of the transfer module moves in the direction of arrow 702 (θ or roll).

[0017] The loading module 140 may include a grid carrier magazine shuttle chamber 126 communicatively connected to the transport module 125. The grid carrier magazine shuttle chamber 126 may include a grid carrier magazine shuttle 126S that may be driven along any suitable axis by a grid carrier magazine shuttle positioner 126P. The grid carrier magazine shuttle positioner 126P may include any suitable drive or motor 126D and / or guides that enable movement of the grid carrier magazine shuttle along at least the Z axis. In one embodiment, the motor 126D may be any suitable motor having any suitable position resolution, such as an ultrasonic piezoelectric motor, a stepper motor, a brushless motor, a brush motor, or the like. The grid carrier magazine shuttle 126S may be a linear stage configured to move the grid carrier magazine 102 / 230 (e.g., through port 120P) (via the grid shuttle positioner 126P) to a position for picking / removing the grid carrier magazine 102 / 230 from the grid carrier magazine load lock 120 and placing / inserting the grid carrier magazine 102 / 230 into the grid carrier magazine load lock 120. In one aspect, the grid carrier magazine 102 / 230 includes kinematic features 233 that allow the grid carrier magazine 102 / 230 to be manually and automatically loaded through the door 120D and into the grid carrier magazine shuttle load lock 120. The grid carrier magazine shuttle 126S may also be configured to move the grid carrier magazine 102 / 230 along at least the Z-axis to a predetermined pick / place position 126PP or a grid carrier magazine retract position 126R. With the grid carrier magazine 102 / 230 in the pick / place position 126PP, the end effector 101 of the grid positioning unit 104 is enabled to remove and / or insert grid carriers from and / or into the grid carrier magazine 102 / 230.The grid shuttle 126S may also be configured to move the grid carrier magazine 102 / 230 to a predetermined retracted position (as described below) to allow the grid positioning unit 104 to move along the X-axis to transport the grid carrier to the TEM. In one aspect, the positioning unit 104 moves the grid carrier into the TEM column 275 via the transport module interface 125I for inspection or imaging.

[0018] 1A-1D, the transfer module 125 may include a grid carrier positioning unit (multi-stage shuttle) configured to pick up / place grid carriers from / to the grid carrier magazine 102 / 230, transfer the grid carriers (holding the grids and samples) to the TEM column 275 through the transfer module interface 125I, and support the grid carriers during inspection or imaging within the TEM column 275. The grid positioning unit 104 (multi-stage shuttle) may include a first shuttle stage 104S1 (general positioning stage) having a single degree of freedom of movement and configured to move the end effector 101 along the X-axis. The grid positioning unit 104 may also include a second shuttle stage 104S2 (fine positioning stage) carried by the first stage but separate and distinct from the first stage during its operation. The second shuttle stage 104S2 has a single degree of freedom of movement, independent of the first shuttle stage 104S1, and is configured to move the end effector 101 along the X-axis. The combined movement of the first shuttle stage 104S1 and the second shuttle stage 104S2 may provide the end effector 101 with a range of motion extending from a retracted position 101R of the grid positioning unit 104 outside the TEM to an inspection or imaging position 177 inside the TEM for positioning a grid carrier at the inspection or imaging position 177, such that the end effector 101 defines at least a portion of the inspection or imaging stage of the TEM.

[0019] The first shuttle stage 104S1 and the second shuttle stage 104S2 may include X-axis drives or motors A1L and A2L, respectively. It should be noted that drives A1L and A2L (as well as other drives described herein) may include any suitable encoders 248 and 249, respectively, which may be, for example, optical encoders, laser interferometric encoders, capacitive or inductive encoders, or any other suitable encoder or combination thereof. In one embodiment, the encoders described herein may have a picometer position resolution; in other embodiments, the encoders may have a suitable position resolution that may match the positioning resolution of the axis of the respective drive motor along which the encoder provides position data. In still other embodiments, the encoders described herein may have a positioning resolution that is greater than or less than the position resolution of the respective drive motor. In other embodiments, the drives described herein may employ any suitable integrated position sensing capability of the drive. It should be noted that any appropriate portions of the drives A1L and A2L may be sealed from the atmosphere of the transport module 125 and the loading module 140 to isolate components such as motors, thereby enabling operation of the stages in a vacuum environment. In one embodiment, sealing or isolation can be achieved by using vacuum bellows 160 and 161 on the first shuttle stage 104S1 and the second shuttle stage 104S2, respectively. In other embodiments, the drives A1L and A2L can be configured to operate in a vacuum environment in any suitable manner, while in still other embodiments, the drives can be configured to operate in an atmospheric environment. The X-axis drives A1L and A2L may include any suitable motors and linear stages with any suitable mechanical and / or solid-state electromagnetic (and / or permanent magnet) guides 290 and 291 for translating the end effector 101 along the X-axis.In one embodiment, the motor may be an ultrasonic piezoelectric motor with a positioning resolution of less than about 1 μm, while in other embodiments, the motor may be any suitable motor with any suitable positioning resolution, such as a stepper motor, a brushless motor, a brush motor, etc. Drives A1L and A2L may be configured to move end effector 101 toward and away from grid carrier magazine 102 / 230 to pick up grid carriers from grid carrier magazine 102 / 230, place grid carriers in grid carrier magazine 102 / 230, and transport the grid carriers an appropriate desired distance along the X-axis. Drives A1L and A2L may also be configured to move end effector 101 through transport interface 125I to the TEM for inspection or imaging of grids held in grid carriers by end effector 101.

[0020] The Y, Z, and θ (roll) axis motion may be monitored and controlled by a conventional multi-axis positioning stage 150 in the TEM. In one embodiment, the conventional multi-axis positioning stage may include any number of additional axes of motion. The grid handling system 100 can provide motion along only the X axis (gross positioning 104S1) and (fine positioning 104S2) using a first shuttle stage 104S1 and a second shuttle stage 104S2. All other axes of stage motion may be monitored and controlled by the conventional multi-axis positioning stage 150 in the TEM. In one embodiment, the grid positioning unit 104 may include only the first shuttle stage 104S1. The second shuttle stage 104S2 is fixed (no monitoring or position control), and the conventional multi-axis positioning stage 150 in the TEM may monitor and control the X, Y, Z, and θ (roll) axes of the end effector 101 during imaging or inspection.

[0021] 4A-4C, in one embodiment, the end effector 101 may be coupled to the drive portion A3L in any suitable manner, such as by a connection or driven member 260 supported within the housing 104H in any suitable manner. In another embodiment, the connection or driven member 260 may be supported outside the housing 104H in any suitable manner. In one embodiment, the connection or driven member 260 may be connected to a gripper 101g having a gripper flexure 101GF and a gripper grid support surface 101GS. In one embodiment, the gripper grid support surface 101GS may include one or more alignment features 211 disposed adjacent the gripper grid support surface 101GS. The alignment features 211 may have any suitable shape for interfacing with, for example, a side edge of the grid carrier 200 and positioning the grid carrier relative to the grid support surface 101GS (e.g., via substantial contact between the side edge of the grid carrier and the alignment feature 211). In another embodiment, alignment feature 211 may interface with top 201 or bottom 202 of grid carrier 200, or any other suitable gripping surface of grid carrier 200. In yet another embodiment, alignment feature 211 may interface with bottom 202 of grid carrier 200, or any other suitable gripping surface of grid carrier 200.

[0022] Drives A3L and A1L may be configured to operate along the X-axis to actuate gripper 101G of end effector 101, as described below. Movement of drives A3L and A1L may cause relative movement between end effector 101 and housing 104H of first shuttle stage 104S1 (e.g., while maintaining end effector 101 in position) such that gripper flexures 101GF and gripper support surfaces 101GS open and close. In one embodiment, gripper 101G opens to allow gripper flexures 101GF and gripper support surfaces 101GS to move adjacent gripping areas 204L and 204R, and in another embodiment, gripper 101G closes to allow gripper flexures 101GF and gripper support surfaces 101GS to restrain grid carrier 200 at gripping areas 204L and 204R for transporting and positioning grid carrier 200. In alternative embodiments, the gripper 101G may be opened and closed by any suitable drive mechanism configured to restrain the grid carrier 200 in any suitable position during transport and positioning.

[0023] A grid carrier detection sensor 280 may be mechanically attached to the end effector 101 adjacent the grid gripper 101G to detect the grid carrier 200 before, after, and / or during grid handling. In one embodiment, the grid carrier detection sensor 280 may include any suitable sensor capable of detecting the presence or absence of a grid carrier. In other embodiments, the end effector 101 may not have the sensor 280. In still other embodiments, the position of the grid carrier 200 relative to the grid gripper 101GS may be capable of determining the presence or absence of the grid carrier 200.

[0024] 1A-1D and 5, an exemplary operation of the automated grid handling system 100 will be described in accordance with aspects of the disclosed embodiment. The transport module 125 and the loading module 140 may be evacuated to a pressure substantially equal to the pressure in the TEM column 275 using a TEM vacuum system (or, in another aspect, using the vacuum module 172). A grid carrier magazine 102 / 230 holding one or more grid carriers 200 may be inserted into the grid carrier magazine load lock chamber 120 (FIG. 5, block 500). For example, the door 120D may be opened, the grid carrier magazine 102 / 230 may be kinematically positioned on the grid carrier magazine shuttle 126S, and the door 120D may be closed to seal or isolate the grid carrier magazine load lock chamber 120. The grid carrier magazine load lock chamber 120 may be evacuated to a pressure compatible with or substantially equal to the pressure in the transport module 125, the loading module 140, and the TEM column 275. The grid carrier magazine shuttle 126S moves in the direction of arrow 701 to open port 120P and can move the grid carrier magazine 102 / 230 so that a given grid carrier is positioned in a pre-pickup position and within the operating range of the grid positioning unit 104 (FIG. 5, block 510). The grid positioning unit 104 moves in the X direction to position the end effector at pick position 101PP (FIG. 5, block 520), the grid carrier magazine shuttle moves in the direction of arrow 701 to pick position 126PP, and the end effector gripper 400 captures the grid carrier and picks up the grid carrier (holding the grid) from the grid carrier magazine 102 / 230 (FIG. 5, block 530). The grid positioning unit 104 retracts to retract position 101R, and the grid carrier magazine shuttle 126S moves further in the direction of arrow 701 to move the grid carrier magazine to retract position 126R (FIG. 5, block 540).The grid positioning unit 104 may move in the X direction ( FIG. 5 , block 550) to position the grid carrier (holding the grid) in the TEM column 275 via the transport interface 125I, and in combination with a conventional multi-axis positioning stage 150, for inspection or imaging while held by the end effector 101. The grid positioning unit 104 may be retracted from the TEM to a retracted position 101R. The grid carrier magazine shuttle 126S moves in the direction of arrow 700 to a pre-placement position, the grid positioning unit 104 moves to a placement position 101PP, the grid carrier magazine shuttle 126S moves in the direction of arrow 701 to the placement position 126PP, the gripper releases the grid holder and places it on the grid carrier magazine 102 / 230, the grid positioning unit 104 retracts to the retracted position 101R, and the grid positioning unit 104 may return the grid carrier 200 to the position in the grid carrier magazine 102 / 230 from which the grid was removed ( FIG. 5 , block 560). As can be appreciated, in one aspect, additional grid carriers held by the grid carrier magazine 102 / 230 (holding grids) may be replaced before the grid carrier magazine 102 / 230 is returned to the load lock 120 for removal ( FIG. 5 , block 570).

[0025] In accordance with one or more aspects of the disclosed embodiments, an automated grid handling apparatus for an electron microscope is provided, the automated grid handling apparatus including: a frame configured to removably couple to a multi-axis positioning stage port of the electron microscope; a transfer module connected to the frame, the transfer module including a multi-stage shuttle having a first shuttle stage with a single degree of freedom of movement and a second shuttle stage with a single degree of freedom of movement independent of the first shuttle stage; and an end effector connected to at least one of the first shuttle stage and the second shuttle stage, the end effector holding a grid carrier and transferring the grid carrier holding the grid to and from the electron microscope through the transfer interface and the multi-axis positioning stage port. an end effector configured for transport from the microscope, the end effector having a range of motion defined by a combination of the degrees of freedom of motion of the first and second shuttle stages and a multi-axis positioning stage inside the electron microscope, the range of motion extending from a grid holding position outside the electron microscope to an inspection position inside the electron microscope for positioning a grid carrier holding a grid at the inspection position such that the end effector partially defines an inspection stage of the electron microscope; and an automatic loading module connected to the frame and communicatively connected to the transport module, the automatic loading module including a load port module through which grids are loaded into the automatic loading module and the transport module.

[0026] In accordance with one or more aspects of the disclosed embodiment, a single degree of freedom of movement of each of the first and second shuttle stages shares a common direction.

[0027] In accordance with one or more aspects of the disclosed embodiment, a single degree of freedom of movement of the first shuttle stage and a single degree of freedom of movement of the second shuttle stage are configured for global and precision movement along a common direction.

[0028] In accordance with one or more aspects of the disclosed embodiments, the automated grid handling apparatus includes a carrier magazine shuttle that is separate and distinct from the multi-stage shuttle, the carrier magazine shuttle configured to transport grid carriers that hold grids between a loading module of the automated grid handling apparatus and the multi-stage shuttle.

[0029] In accordance with one or more aspects of the disclosed embodiment, a carrier magazine shuttle is configured to transport a grid carrier magazine configured to hold one or more grid carriers, the grid carriers configured to hold grids.

[0030] In accordance with one or more aspects of the disclosed embodiment the multi-stage shuttle is configured to operate in a vacuum environment.

[0031] In accordance with one or more aspects of the disclosed embodiment, a portion of the multi-stage shuttle is configured to operate in an atmospheric environment.

[0032] In accordance with one or more aspects of the disclosed embodiment the multi-stage shuttle has a motion resolution of 0.5 microns.

[0033] In accordance with one or more aspects of the disclosed embodiment the end effector includes an integrated sensor configured to determine the presence or absence of a grid.

[0034] In accordance with one or more aspects of the disclosed embodiment the grid comprises a sample grid.

[0035] In accordance with one or more aspects of the disclosed embodiment the grid carrier is configured to support multiple grid types.

[0036] In accordance with one or more aspects of the disclosed embodiment the grid carrier is configured to support multiple grid types.

[0037] In accordance with one or more aspects of the disclosed embodiment the grid carrier is configured to align and restrain the grid in a predetermined orientation.

[0038] In accordance with one or more aspects of the disclosed embodiment the grid carrier magazine is configured to align and restrain grid carriers on the grid carrier magazine shelves.

[0039] In accordance with one or more aspects of the disclosed embodiment, the frame, the transfer module, and the automatic loading module are configured to move in the Y, Z, and θ axes when the transfer module is driven by the multi-axis positioning stage.

[0040] In accordance with one or more aspects of the disclosed embodiment, the frame, the transfer module, and the automatic loading module are configured to move in X, Y, Z, and θ-axis directions when the transfer module is driven by the multi-axis positioning stage.

[0041] In accordance with one or more aspects of the disclosed embodiment, an end effector is configured to directly hold the grid and transport the grid to and from the electron microscope via the transport interface.

[0042] In accordance with one or more aspects of the disclosed embodiment the grid carrier magazine is configured to directly hold one or more grids.

[0043] In accordance with one or more aspects of the disclosed embodiments, an automated grid handling apparatus for an electron microscope is provided, the automated grid handling apparatus including: a frame configured to removably couple to a multi-axis positioning stage port of the electron microscope; a transfer module connected to the frame, the transfer module configured to transport a grid carrier holding a grid in combination with a multi-axis positioning stage inside the electron microscope, the transfer module having a rotational bearing and a seal and configured to move in a θ-axis direction when driven by the multi-axis positioning stage; an end effector connected to the transfer module, the end effector configured to hold the grid carrier and transport the grid carrier to and from the electron microscope through a transfer interface communicatively connected to the multi-axis positioning stage port, the end effector partially defining an inspection or imaging stage of the electron microscope; and an automated loading module connected to the frame and communicatively connected to the transfer module, the automated loading module including a load port module through which grids are loaded into the automated loading module and the transfer module.

[0044] In accordance with one or more aspects of the disclosed embodiment the theta axis direction range is + / -75 degrees.

[0045] In accordance with one or more aspects of the disclosed embodiment, the frame is fastened to the electron microscope using fasteners, and the frame and automatic loading module are configured not to move in the θ-axis direction when the transport module is driven by the multi-axis positioning stage.

[0046] According to one or more aspects of the disclosed embodiment, the fasteners are configured to prevent movement of the frame and automatic loading module in the theta axis direction when the transport module is driven by the multi-axis positioning stage, and to allow movement of the frame, transport module, and automatic loading module in the x, y, and z axes directions.

[0047] In accordance with one or more aspects of the disclosed embodiment, the transport module includes a multi-stage shuttle having a first shuttle stage having a single degree of freedom of movement and a second shuttle stage having a single degree of freedom of movement independent of the first shuttle stage, the single degree of freedom of movement of the first shuttle stage and the single degree of freedom of movement of the second shuttle stage being configured for global movement and precision movement, respectively, along a common direction.

[0048] It should be understood that the foregoing description is merely illustrative of aspects of the disclosed embodiments. Various alternatives and modifications may be devised by those skilled in the art without departing from the aspects of the disclosed embodiments. Accordingly, aspects of the disclosed embodiments are intended to embrace all such alternatives, modifications, and variations that fall within the scope of the appended claims. Furthermore, the mere fact that different features are recited in mutually different dependent or independent claims does not indicate that a combination of these features cannot be advantageously used, and such combinations are within the scope of the present invention.

Claims

1. An automated specimen handling apparatus for an electron microscope, the electron microscope having at least one vacuum source configured to generate an internal vacuum pressure, the automated specimen handling apparatus comprising: a frame configured to removably couple to a multi-axis positioning stage port of the electron microscope; a transport module connected to the frame, the transport module including at least one shuttle, the at least one shuttle having a single degree of freedom of movement; an end effector connected to the at least one shuttle, the end effector configured to hold a sample and transport the sample to and from the electron microscope through a transfer interface communicatively connected to a multi-axis positioning stage within the multi-axis positioning stage port of the electron microscope, the end effector having a range of motion defined by a combination of the at least one shuttle and the multi-axis positioning stage within the multi-axis positioning stage port of the electron microscope, the range of motion extending from a sample retraction position outside the electron microscope to an inspection position within the electron microscope for positioning the sample at an inspection position such that the end effector partially defines an inspection stage of the electron microscope; an autoloading module connected to the frame and communicatively connected to the transfer module, the autoloading module including a load port module through which a sample is loaded into the autoloading module and the transfer module, and the at least one vacuum source suctions, maintains, and controls vacuum pressure within the transfer module and the autoloading module to a pressure substantially equal to the internal vacuum pressure of the electron microscope; An automated sample handling device comprising:

2. The automated specimen handling apparatus of claim 1 , wherein the electron microscope comprises a transmission electron microscope.

3. The automated specimen handling device of claim 1 , wherein the end effector is configured to be communicatively connected to the transfer interface to form a rigid interface that reduces vibrational modes within the end effector during inspection or imaging.

4. 10. The automated sample handling apparatus of claim 1, further comprising a carrier magazine shuttle that is separate and distinct from the at least one shuttle, the carrier magazine shuttle configured to transport samples between the load port module and the at least one shuttle.

5. The automated sample handling device of claim 4 , wherein the carrier magazine shuttle is configured to transport a sample magazine configured to hold one or more samples.

6. The automated specimen handling device of claim 1 , wherein the at least one shuttle is configured to operate in a vacuum environment.

7. 10. The automated specimen handling device of claim 1, wherein a portion of the at least one shuttle is configured to operate in an atmospheric environment and another portion of the at least one shuttle is configured to operate in a vacuum environment.

8. The automated specimen handling device of claim 1 , wherein the end effector includes an integral sensor configured to determine the presence or absence of the specimen.

9. The automated specimen handling device of claim 1 further comprising a grid, said grid configured to hold said specimen.

10. 10. The automated specimen handling apparatus of claim 9, further comprising a grid carrier, the grid carrier configured to support a plurality of grid types.

11. 11. The automated specimen handling device of claim 10, wherein the grid carrier is configured to align and restrain the grid in a predetermined orientation.

12. 6. The automated sample handling device of claim 5, wherein the sample magazine is configured to align and restrain grid carriers on the sample magazine shelves.

13. 2. The automated sample handling apparatus of claim 1, wherein the frame, the transfer module, and the automatic loading module are configured to move in X, Y, Z, and θ axes when the transfer interface is driven by the multi-axis positioning stage.

14. 11. The automated specimen handling device of claim 10, wherein the end effector is configured to directly hold the grid carrier or the grid and to transport the specimen to and from the electron microscope via a transport interface.

15. 6. The automated sample handling device of claim 5, wherein the sample magazine is configured to directly hold one or more of the grid carriers or grids.

16. 14. The automated sample handling device of claim 13, wherein the range in the theta axis direction is at least + / - 75 degrees.

17. 16. The automated sample handling device of claim 15, wherein the sample magazine is configured to directly store grid carriers or grids inside or outside the automated sample handling device for extended periods of time.

18. 10. A method for batch processing samples in an automated sample handling device according to claim 1, said method comprising: mounting the automated specimen handling device to the multi-axis positioning stage within the multi-axis positioning stage port of the electron microscope; inserting a grid carrier magazine having a plurality of grid carriers, each having at least one sample, into an autoloading module and aspirating the autoloading module; initiating a batch processing sequence, the batch processing sequence comprising: positioning the grid carrier magazine in a pick position; positioning a grid positioning unit at said pick position; picking up the grid carrier from the grid carrier magazine, firmly securing the grid carrier onto the grid positioning unit, and retracting the grid positioning unit; retracting the grid carrier magazine; transporting the sample to an inspection position and imaging the sample using the electron microscope; and Returning the grid carrier to the grid carrier magazine. initiating a batch processing sequence, including: repeating the batch processing sequence for each selected sample; returning the grid carrier magazine to the autoload module, venting the autoload module, and removing the grid carrier magazine; A method comprising:

19. The method of claim 18 , wherein the electron microscope comprises a transmission electron microscope.

20. The method of claim 18 , wherein the batch processing sequence is initiated automatically.

21. The method of claim 18 , wherein the batch processing sequence is initiated manually.

22. 20. The method of claim 18, further comprising pumping the automated sample handling device to a pressure approximately equal to the pressure of the electron microscope.

23. The method of claim 18 , further comprising verifying the presence of a grid carrier on the grid positioning unit.

24. 20. The method of claim 18, wherein the grid carrier magazine is inserted into the autoloading module manually or by an autoloading system.

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