Substrate drying method and substrate processing method

Abstract

To provide a substrate drying method that can appropriately dry a substrate, and a substrate processing method that can appropriately process a substrate.SOLUTION: There are provided a substrate drying method and a substrate processing method according to the present invention. The substrate drying method dries a substrate W on which a pattern P is formed. The substrate drying method includes a coating step, a curing step, and a thermal decomposition step. In the coating step, a drying auxiliary liquid F is applied to the substrate W. The drying auxiliary liquid F contains an ultraviolet curable material. In the curing step, the drying auxiliary liquid F on the substrate W is irradiated with ultraviolet rays. In the curing step, a solidified film H is formed on the substrate W. In the thermal decomposition step, the solidified film H is thermally decomposed by heating the solidified film H. In the thermal decomposition step, the substrate W is dried.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] The present invention relates to a substrate drying method and a substrate processing method. The substrate is, for example, a semiconductor wafer, a substrate for a liquid crystal display, a substrate for an organic EL (Electroluminescence), a substrate for an FPD (Flat Panel Display), a substrate for an optical display, a substrate for a magnetic disk, a substrate for an optical disk, a substrate for a magneto-optical disk, a substrate for a photomask, or a substrate for a solar cell.

Background Art

[0002] Patent Document 1 discloses a substrate processing method for processing a substrate. The substrate processing method of Patent Document 1 includes a processing step, a replacement step, and a removal step. The processing step supplies a rinse liquid to the substrate. The replacement step replaces the rinse liquid on the substrate with an organic solvent. The removal step removes the organic solvent from the substrate. By the removal step, the substrate is dried.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Even with conventional substrate processing methods, there are cases where the substrate cannot be properly processed. For example, when the substrate has a pattern, the pattern may collapse even with conventional substrate processing methods. For example, when the pattern is fine, there are cases where the collapse of the pattern cannot be sufficiently suppressed even with conventional substrate processing methods.

[0005] In view of such circumstances, the present invention aims to provide a substrate drying method capable of properly drying a substrate and a substrate processing method capable of properly processing a substrate.

Means for Solving the Problems

[0006] To achieve this objective, the present invention has the following configuration. That is, the present invention is a substrate drying method for drying a substrate on which a pattern has been formed, comprising: a coating step of applying a drying auxiliary liquid containing an ultraviolet-curable material to the substrate; a curing step of irradiating the drying auxiliary liquid on the substrate with ultraviolet light to form a solidified film on the substrate; and a thermal decomposition step of heating the solidified film to thermally decompose the solidified film and dry the substrate.

[0007] The substrate drying method is for drying a substrate on which a pattern has been formed. The substrate drying method comprises a coating step, a curing step, and a thermal decomposition step. In the coating step, a drying aid liquid is applied to the substrate. The drying aid liquid contains an ultraviolet-curable material. In the curing step, ultraviolet light is irradiated onto the drying aid liquid on the substrate. In the curing step, a solidified film is formed on the substrate. In the thermal decomposition step, the solidified film on the substrate is heated and thermally decomposed. In the thermal decomposition step, the substrate is dried.

[0008] As described above, the substrate drying method comprises a coating step and a curing step. Therefore, a solidified film is suitably formed on the substrate. Furthermore, the solidified film suitably supports the substrate pattern. The substrate drying method further comprises a thermal decomposition step. Therefore, the solidified film is suitably thermally decomposed. Thus, the solidified film is suitably removed from the substrate. Consequently, the substrate is dried with the pattern protected.

[0009] As described above, the substrate is properly dried according to the substrate drying method.

[0010] In the substrate drying method described above, it is preferable that the solidified film is thermally decomposable. In the thermal decomposition step, the solidified film is suitably thermally decomposed. Therefore, the substrate is dried more appropriately.

[0011] In the substrate drying method described above, it is preferable that the solidified film is heated at a temperature higher than the thermal decomposition temperature of the solidified film during the thermal decomposition step. During the thermal decomposition step, the solidified film is more effectively thermally decomposed. Therefore, the substrate is dried more appropriately.

[0012] In the substrate drying method described above, it is preferable that the solidified film is heated to a temperature of 700 degrees Celsius or higher in the thermal decomposition step. It is easy to set the heating temperature of the solidified film to be above the thermal decomposition temperature of the solidified film.

[0013] In the substrate drying method described above, it is preferable that the solidified film is removed from the substrate by thermal decomposition in the thermal decomposition step. After the thermal decomposition step, no solidified film remains on the substrate. Therefore, a clean substrate is obtained after the thermal decomposition step. Consequently, the substrate is dried more effectively.

[0014] In the substrate drying method described above, it is preferable that the solidified film be gasified in the thermal decomposition step. In the thermal decomposition step, the solidified film is suitably removed from the substrate.

[0015] In the substrate drying method described above, it is preferable that in the thermal decomposition step, the solidified film is decomposed into a plurality of particles, and these particles float away from the substrate. In the thermal decomposition step, the solidified film is suitably removed from the substrate.

[0016] In the substrate drying method described above, it is preferable that the solidified film is removed from the substrate without melting during the thermal decomposition step. When the solidified film is thermally decomposed, the force acting on the pattern is even lower. Therefore, the pattern is adequately protected even when the solidified film is thermally decomposed.

[0017] In the substrate drying method described above, it is preferable that in the curing step, the ultraviolet-curable material becomes a polymer, the solidified film contains the polymer, and in the thermal decomposition step, the polymer is thermally decomposed. In the curing step, the ultraviolet-curable material becomes a polymer. The solidified film contains the polymer of the ultraviolet-curable material. Therefore, a solidified film is suitably formed in the curing step. In the thermal decomposition step, the polymer of the ultraviolet-curable material is thermally decomposed. Therefore, in the thermal decomposition step, the solidified film is suitably thermally decomposed.

[0018] In the substrate drying method described above, the UV-curable material is preferably a liquid. It is easy to obtain a drying aid from the UV-curable material.

[0019] In the substrate drying method described above, it is preferable that the UV-curable material does not contain polymers. It is easy to obtain a liquid UV-curable material.

[0020] In the substrate drying method described above, the UV-curable material is preferably isobornyl acrylate. When the UV-curable material is isobornyl acrylate, the pattern is more favorably protected. Therefore, the substrate is dried more effectively.

[0021] In the substrate drying method described above, the UV-curable material is preferably an isobornyl acrylate monomer. The substrate is dried more effectively. Furthermore, it is easier to obtain the liquid UV-curable material.

[0022] In the substrate drying method described above, it is preferable that the drying aid does not contain a solvent. Therefore, no solvent is present on the substrate during the curing and thermal decomposition steps. Consequently, it is easier to protect the pattern during the curing and thermal decomposition steps.

[0023] In the above-described substrate drying method, it is preferable that the drying aid solution further contains a polymerization initiator. In the curing step, the polymerization initiator promotes the polymerization of the ultraviolet curable material. Therefore, in the curing step, a solidified film is formed rapidly.

[0024] In the above-described substrate drying method, at the end of the curing step, a part of the drying aid solution remains on the substrate, and in the thermal decomposition step, it is preferable to further evaporate the drying aid solution remaining on the substrate at the end of the curing step. Even when a part of the drying aid solution remains on the substrate at the end of the curing step, the substrate is appropriately dried in the thermal decomposition step.

[0025] In the above-described substrate drying method, it is preferable that the boiling point of the drying aid solution is lower than the thermal decomposition temperature of the solidified film. In the thermal decomposition step, the drying aid solution evaporates, and then the solidified film is thermally decomposed. In other words, in the thermal decomposition step, the solidified film is not substantially thermally decomposed until the drying aid solution evaporates. Therefore, in the thermal decomposition step, the pattern is protected by the solidified film until the drying aid solution evaporates. Thus, the substrate is appropriately dried.

[0026] In the above-described substrate drying method, it is preferable that the boiling point of the ultraviolet curable material is lower than the thermal decomposition temperature of the solidified film. In the thermal decomposition step, the drying aid solution evaporates preferably before the solidified film is thermally decomposed.

[0027] In the above-described substrate drying method, it is preferable that all of the drying aid solution disappears from the substrate at the end of the curing step. For example, at the end of the curing step, it is preferable that all of the drying aid solution changes into a solidified film. For this reason, there is no drying aid solution on the substrate in the thermal decomposition step. Therefore, it is easier to protect the pattern in the thermal decomposition step.

[0028] In the substrate drying method described above, the thermal decomposition step preferably comprises a first step of heating the substrate at a first temperature and a second step of heating the solidified film at a second temperature higher than the first temperature. In the first step, the substrate is heated. Therefore, in the first step, the drying aid liquid is reliably evaporated from the substrate. In the first step, the drying aid liquid is reliably removed from the substrate. Even if some of the drying aid liquid remains on the substrate at the end of the curing step, all of the drying aid liquid remaining on the substrate is removed from the substrate in the first step. All of the drying aid liquid remaining on the substrate at the end of the curing step is removed from the substrate without changing into a solidified film. Therefore, in the second step, there is no drying aid liquid on the substrate. Consequently, it is even easier to protect the pattern in the second step. In the first step, the substrate is heated at a first temperature. In the second step, the solidified film is heated at a second temperature. The first temperature is lower than the second temperature. Therefore, thermal decomposition of the solidified film is suitably prevented in the first step. Therefore, in the first step, the pattern is suitably protected by a solidified film. On the other hand, the second temperature is higher than the first temperature. Therefore, in the second step, the solidified film is suitably thermally decomposed.

[0029] In the substrate drying method described above, it is preferable that the first temperature is below the thermal decomposition temperature of the solidified film. In the first step, thermal decomposition of the solidified film is prevented more reliably.

[0030] In the substrate drying method described above, the first temperature is preferably above the boiling point of the drying aid. In the first step, the drying aid is removed from the substrate more reliably.

[0031] In the substrate drying method described above, the first temperature is preferably above the boiling point of the ultraviolet-curable material. In the first step, the drying aid liquid is removed from the substrate more reliably.

[0032] In the substrate drying method described above, the second temperature is preferably above the thermal decomposition temperature of the solidified film. In the second step, the solidified film is more preferably thermally decomposed.

[0033] The present invention is a substrate processing method for processing a substrate on which a pattern has been formed, comprising a processing liquid supply step of supplying a processing liquid to the substrate, and a drying step of performing the substrate drying method described in any one of claims 1 to 14.

[0034] The substrate processing method is for processing a substrate on which a pattern has been formed. The substrate processing method comprises a processing liquid supply step and a drying step. In the processing liquid supply step, a processing liquid is supplied to the substrate. In the drying step, the substrate drying method described above is performed. Specifically, the drying step comprises a coating step, a curing step, and a thermal decomposition step. Thus, the substrate is dried while the pattern is protected.

[0035] As described above, the substrate is properly processed according to the substrate processing method.

[0036] In the substrate processing method described above, it is preferable to remove the processing liquid from the substrate in the coating step. Therefore, the processing liquid is not present on the substrate during the curing step and the thermal decomposition step. Thus, it is even easier to protect the pattern during the curing step and the thermal decomposition step. [Effects of the Invention]

[0037] According to the substrate drying method of the present invention, the substrate is properly dried. According to the substrate processing method of the present invention, the substrate is properly processed. [Brief explanation of the drawing]

[0038] [Figure 1] This is a schematic diagram showing a portion of the circuit board. [Figure 2] This is a plan view showing the inside of the substrate processing apparatus of the embodiment. [Figure 3] This is a control block diagram of a substrate processing unit. [Figure 4] This is a diagram showing the configuration of the processing unit. [Figure 5] This is a flowchart showing the procedure for the substrate processing method of the embodiment. [Figure 6]This diagram schematically shows the substrate during the coating process. [Figure 7] This diagram schematically shows the substrate during the curing process. [Figure 8] This diagram schematically shows the substrate during the curing process. [Figure 9] This diagram schematically shows the substrate during the pyrolysis process. [Figure 10] This diagram schematically shows the substrate during the pyrolysis process. [Figure 11] This diagram schematically shows the substrate during the pyrolysis process. [Figure 12] This diagram schematically shows the substrate during the pyrolysis process. [Figure 13] This graph shows the evaluation of each substrate treated according to the examples and comparative examples. [Figure 14] This flowchart shows the procedure for the thermal decomposition process of the modified embodiment. [Figure 15] This figure shows the configuration of the processing unit in a modified embodiment. [Figure 16] This is a left side view showing the configuration of the left side of the substrate processing apparatus in a modified embodiment. [Modes for carrying out the invention]

[0039] The substrate drying method and substrate processing method of the present invention will be described below with reference to the drawings.

[0040] <1. Substrate> The substrate W is, for example, a semiconductor wafer, a substrate for liquid crystal displays, an organic electroluminescence (EL) substrate, a flat panel display (FPD) substrate, an optical display substrate, a magnetic disk substrate, an optical disk substrate, a magneto-optical disk substrate, a photomask substrate, or a solar cell substrate. The substrate W has a thin, flat shape. The substrate W has a roughly circular shape in plan view.

[0041] Figure 1 is a schematic diagram showing a part of the substrate W. The substrate W has a pattern P. The pattern P is formed on the surface WS of the substrate W. The pattern P has, for example, an uneven shape.

[0042] Pattern P has, for example, a plurality of protrusions A. Each protrusion A is part of the substrate W. Each protrusion A is a structure. Each protrusion A is composed of, for example, at least one of a single-crystal silicon film, a silicon oxide film (SiO2), a silicon nitride film (SiN), and a polysilicon film. Each protrusion A rises from the surface WS. The plurality of protrusions A are spaced apart from each other.

[0043] Each protrusion A has a base end A1 and a tip end A2. The base end A1 is connected to the surface WS. Each protrusion A extends from the base end A1 to the tip end A2.

[0044] The protrusion A has a height AH. The height AH is the length from the base end A1 to the tip end A2.

[0045] Pattern P has a plurality of recesses B. Each recess B is a space. The plurality of recesses B may, for example, be in communication with each other. Alternatively, the plurality of recesses B may be separated from each other. The recesses B are demarcated by protrusions A. The recesses B are located around the protrusions A. The recesses B are located between two or more adjacent protrusions A.

[0046] When pattern P is facing upward, each protrusion A extends upward. When pattern P is facing upward, each protrusion A is arranged laterally. When pattern P is facing upward, the base end A1 corresponds to the lower end of the protrusion A. When pattern P is facing upward, the tip A2 corresponds to the upper end of the protrusion A. When pattern P is facing upward, the recess B is open upward.

[0047] The base portion A1 may be called the "base portion of pattern P". The tip portion A2 may be called the "tip portion of pattern P". The height AH may be called the "height of pattern P".

[0048] <2. Overview of the substrate processing apparatus 1> Figure 2 is a plan view showing the interior of the substrate processing apparatus 1 of the embodiment. The substrate processing apparatus 1 processes the substrate W. The processing in the substrate processing apparatus 1 includes a drying process.

[0049] The substrate processing apparatus 1 comprises an indexer unit 3 and a processing block 7. The processing block 7 is connected to the indexer unit 3. The indexer unit 3 supplies the substrate W to the processing block 7. The processing block 7 performs processing on the substrate W. The indexer unit 3 retrieves the substrate W from the processing block 7.

[0050] In this specification, for convenience, the direction in which the indexer unit 3 and the processing block 7 are aligned is called the "front-to-back direction X". The front-to-back direction X is horizontal. Of the front-to-back direction X, the direction from the processing block 7 toward the indexer unit 3 is called the "front". The direction opposite to the front is called the "rear". The direction perpendicular to the front-to-back direction X is called the "width direction Y". The width direction Y is horizontal. One direction of the "width direction Y" is appropriately called the "right". The direction opposite to the right is called the "left". When the front-to-back direction X and the width direction Y are not distinguished, they are simply called the "horizontal direction". The direction perpendicular to the horizontal direction is called the "vertical direction Z". In each figure, front, rear, right, left, up, and down are shown as appropriate for reference.

[0051] The indexer unit 3 comprises a plurality (for example, four) of carrier mounting units 4. Each carrier mounting unit 4 mounts one carrier C. The carrier C accommodates multiple substrates W. The carrier C is, for example, a FOUP (Front Opening Unified Pod), SMIF (Standard Mechanical Interface), or OC (Open Cassette).

[0052] The indexer unit 3 includes a transport mechanism 5. The transport mechanism 5 is located behind the carrier mounting unit 4. The transport mechanism 5 transports the substrate W. The transport mechanism 5 is configured to access the carrier C placed on the carrier mounting unit 4.

[0053] The transport mechanism 5 comprises a hand 5a and a hand drive unit 5b. The hand 5a supports the substrate W. The hand drive unit 5b is connected to the hand 5a. The hand drive unit 5b moves the hand 5a. The hand drive unit 5b moves the hand 5a, for example, in the forward / backward direction X, the width direction Y, and the vertical direction Z. The hand drive unit 5b rotates the hand 5a, for example, in a horizontal plane.

[0054] The processing block 7 includes a transport mechanism 8. The transport mechanism 8 transports the substrate W. The transport mechanism 8 is configured to receive the substrate W from the transport mechanism 5 and to pass the substrate W back to the transport mechanism 5.

[0055] The transport mechanism 8 comprises a hand 8a and a hand drive unit 8b. The hand 8a supports the substrate W. The hand drive unit 8b is connected to the hand 8a. The hand drive unit 8b moves the hand 8a. The hand drive unit 8b moves the hand 8a, for example, in the forward / backward direction X, the width direction Y, and the vertical direction Z. The hand drive unit 8b rotates the hand 8a, for example, in a horizontal plane.

[0056] The processing block 7 comprises a plurality of processing units 11. The processing units 11 are arranged to the side of the transport mechanism 8. Each processing unit 11 performs processing on the substrate W.

[0057] Each processing unit 11 includes a substrate holding section 13. The substrate holding section 13 holds the substrate W.

[0058] The transport mechanism 8 is configured to access each processing unit 11. The transport mechanism 8 is configured to transfer the substrate W to the substrate holding unit 13 and to take the substrate W from the substrate holding unit 13.

[0059] Figure 3 is a control block diagram of the substrate processing apparatus 1. The substrate processing apparatus 1 includes a control unit 10. The control unit 10 is communicated to the transport mechanisms 5 and 8 and the processing unit 11. The control unit 10 controls the transport mechanisms 5 and 8 and the processing unit 11.

[0060] The control unit 10 is implemented by a central processing unit (CPU) that executes various processes, RAM (Random-Access Memory) which serves as a workspace for calculations, and a storage medium such as a fixed disk. The control unit 10 has various types of information that are pre-stored in the storage medium. The information held by the control unit 10 includes, for example, transport condition information and processing condition information. The transport condition information defines the conditions related to the operation of the transport mechanisms 5 and 8. The processing condition information defines the conditions related to the operation of the processing unit 11. The processing condition information is also called a processing recipe.

[0061] A brief explanation of the operation of the substrate processing device 1 will be given.

[0062] The indexer unit 3 supplies the substrate W to the processing block 7. Specifically, the transport mechanism 5 transfers the substrate W from the carrier C to the transport mechanism 8 of the processing block 7.

[0063] The transport mechanism 8 distributes the substrates W to the processing units 11. Specifically, the transport mechanism 8 transports the substrates W from the transport mechanism 5 to the substrate holding section 13 of each processing unit 11.

[0064] The processing unit 11 processes the substrate W held by the substrate holding unit 13. For example, the processing unit 11 performs a drying process on the substrate W.

[0065] After the processing unit 11 has processed the substrate W, the transport mechanism 8 collects the substrate W from each processing unit 11. Specifically, the transport mechanism 8 takes the substrate W from each substrate holding unit 13. Then, the transport mechanism 8 passes the substrate W to the transport mechanism 5.

[0066] The indexer unit 3 retrieves the substrate W from the processing block 7. Specifically, the transport mechanism 5 transports the substrate W from the transport mechanism 8 to the carrier C.

[0067] <3. Configuration of Processing Unit 11> Figure 4 shows the configuration of the processing unit 11. Each processing unit 11 has the same structure. The processing units 11 are classified as single-wafer type. That is, each processing unit 11 processes only one substrate W at a time.

[0068] The processing unit 11 includes a housing 12. The housing 12 has a roughly box-like shape. The substrate W is processed inside the housing 12.

[0069] The inside of the housing 12 is maintained at, for example, atmospheric pressure. Therefore, the substrate W is processed under, for example, atmospheric pressure. Here, atmospheric pressure includes standard atmospheric pressure (1 atmosphere, 101325 Pa). Atmospheric pressure is, for example, a pressure within the range of 0.7 atmospheres or more and 1.3 atmospheres or less. In this specification, pressure is expressed as absolute pressure relative to absolute vacuum.

[0070] The aforementioned substrate holder 13 is installed inside the housing 12. The substrate holder 13 holds one substrate W. The substrate holder 13 holds the substrate W in a substantially horizontal position.

[0071] The substrate holder 13 is located below the substrate W that it holds. The substrate holder 13 is in contact with at least one of the lower surface WS2 of the substrate W and the peripheral edge of the substrate W. The substrate holder 13 is not in contact with the upper surface WS1 of the substrate W. Here, the upper surface WS1 faces upward. The lower surface WS2 faces downward. The upper surface WS1 is part of the surface WS. The lower surface WS2 is another part of the surface WS.

[0072] An example of the configuration of the substrate holding portion 13 will be described. The substrate holding portion 13 includes a support member 14. The support member 14 has a plate shape. The support member 14 extends in the horizontal direction. Although not shown in the figures, the support member 14 has approximately the same size as the substrate W in a plan view. The support member 14 has an annular shape in a plan view. The support member 14 forms an opening. The opening is located in the center of the support member 14 in a plan view.

[0073] The substrate holding section 13 includes a plurality of retaining pins 15. Each retaining pin 15 is supported by a support member 14. Each retaining pin 15 is positioned on the periphery of the support member 14. Each retaining pin 15 extends upward from the support member 14. Each retaining pin 15 holds the substrate W. When the substrate W is held by the retaining pins 15, the substrate W is positioned above the support member 14.

[0074] The processing unit 11 includes a rotary drive unit 17. At least a portion of the rotary drive unit 17 is installed inside the housing 12. The rotary drive unit 17 is connected to the substrate holder 13. The rotary drive unit 17 rotates the substrate holder 13. The substrate W held by the substrate holder 13 rotates together with the substrate holder 13. The substrate W held by the substrate holder 13 rotates, for example, around a rotation axis D. The rotation axis D passes through, for example, the center of the substrate W. The rotation axis D extends, for example, in the vertical direction Z.

[0075] An example of the configuration of the rotary drive unit 17 will be described. The rotary drive unit 17 comprises a shaft 18 and a motor 19. The shaft 18 is connected to a support member 14. The shaft 18 extends downward from the support member 14. The shaft 18 extends along the axis of rotation D. The shaft 18 is a so-called hollow shaft. The shaft 18 has a cylindrical shape. The shaft 18 forms a hollow section. The hollow section is located inside the shaft 18. The motor 19 is connected to the shaft 18. The motor 19 rotates the shaft 18 around the axis of rotation D.

[0076] The processing unit 11 includes supply units 21a and 21b. Each of the supply units 21a and 21b supplies liquid to the substrate W held by the substrate holding unit 13. Each of the supply units 21a and 21b supplies liquid to the upper surface WS1 of the substrate W held by the substrate holding unit 13.

[0077] The supply unit 21a supplies the processing liquid L. The processing liquid L is used to process the substrate W. The processing liquid L is used, for example, to clean the substrate W. The processing liquid L is, for example, a cleaning solution. The processing liquid L is, for example, a rinsing solution.

[0078] The treatment solution L is, for example, an organic solvent. The treatment solution L is, for example, an alcohol. The treatment solution L is, for example, isopropyl alcohol (IPA).

[0079] The treatment solution L is, for example, deionized water. The treatment solution L is, for example, SC1. SC1 is a mixture of ammonia, hydrogen peroxide, and deionized water.

[0080] The supply unit 21b supplies the drying aid liquid F. The drying aid liquid F is used to dry the substrate W. The drying aid liquid F has the function of assisting in the drying of the substrate W. The drying aid liquid F is a liquid. The drying aid liquid F is a liquid at room temperature.

[0081] Drying aid liquid F contains an ultraviolet-curable material. The ultraviolet-curable material has ultraviolet curing properties. The ultraviolet-curable material has not yet been cured by ultraviolet light. The ultraviolet-curable material has the property of polymerizing when exposed to ultraviolet light. The ultraviolet-curable material has the property of hardening when exposed to ultraviolet light. The ultraviolet-curable material has the property of becoming resinous when exposed to ultraviolet light.

[0082] UV-curable materials contain at least one monomer and / or oligomer. At least one of the monomers and / or oligomers in the UV-curable material has the property of polymerizing under ultraviolet light. UV-curable materials do not contain polymers. UV-curable materials do not contain macromolecules. UV-curable materials do not contain macromolecular compounds.

[0083] UV-curable materials are liquids. UV-curable materials are liquids at room temperature.

[0084] UV-curable materials include, for example, isobornyl acrylate. UV-curable materials also include, for example, isobornyl acrylate monomers.

[0085] The drying aid F contains a polymerization initiator. The polymerization initiator may also be called a "photopolymerization initiator." The polymerization initiator initiates the polymerization of the UV-curable material.

[0086] The polymerization initiator is, for example, a solid. The polymerization initiator is, for example, a solid at room temperature. The polymerization initiator is, for example, a powder. The polymerization initiator in the drying aid F is, for example, dissolved in an ultraviolet-curable material. The concentration of the polymerization initiator in the drying aid F is, for example, 1 wt% or more. The concentration of the polymerization initiator in the drying aid F is, for example, 10 wt% or less.

[0087] A polymerization initiator is, for example, 1-hydroxycyclohexyl phenyl ketone.

[0088] The drying aid F does not contain a solvent. The solvent is, for example, at least one of an organic solvent and deionized water. As mentioned above, the UV-curable material is a liquid. Therefore, it is not necessary to dissolve the UV-curable material in a solvent in order to produce the drying aid F. As mentioned above, the polymerization initiator dissolves in the UV-curable material. Therefore, it is not necessary to dissolve the polymerization initiator in a solvent in order to produce the drying aid F.

[0089] For example, drying aid liquid F consists only of an ultraviolet-curable material and a polymerization initiator.

[0090] The supply unit 21a is equipped with a nozzle 22a. The nozzle 22a discharges the processing liquid L. The supply unit 21b is equipped with a nozzle 22b. The nozzle 22b discharges the drying auxiliary liquid F.

[0091] Nozzles 22a and 22b are installed inside the housing 12. Nozzles 22a and 22b are movable to a standby position and a processing position, respectively. Figure 4 shows nozzles 22a and 22b in the standby position with solid lines. Figure 4 shows nozzles 22a and 22b in the processing position with dashed lines. The standby position is, for example, a position away from above the substrate W held by the substrate holder 13. The processing position is, for example, a position above the substrate W held by the substrate holder 13.

[0092] The drying aid liquid F is used inside the housing 12. As described above, the inside of the housing 12 is maintained at, for example, atmospheric pressure. Therefore, the drying aid liquid F is used, for example, in an environment of atmospheric pressure. The processing liquid L is also used, for example, in an environment of atmospheric pressure.

[0093] The supply unit 21a includes a pipe 23a and a valve 24a. The pipe 23a is connected to the nozzle 22a. The valve 24a is provided on the pipe 23a. When the valve 24a is open, the nozzle 22a discharges the processing liquid L. When the valve 24a is closed, the nozzle 22a does not discharge the processing liquid L. Similarly, the supply unit 21b includes a pipe 23b and a valve 24b. The pipe 23b is connected to the nozzle 22b. The valve 24b is provided on the pipe 23b. The valve 24b controls the discharge of the drying auxiliary liquid F.

[0094] The supply unit 21a is connected to the supply source 25a. The supply source 25a is connected to, for example, piping 23a. The supply source 25a supplies the processing liquid L to the supply unit 21a. Similarly, the supply unit 21b is connected to the supply source 25b. The supply source 25b is connected to, for example, piping 23b. The supply source 25b supplies the drying auxiliary liquid F to the supply unit 21b.

[0095] At least a portion of the piping 23a may be provided outside the housing 12. The piping 23b may be arranged in the same manner as the piping 23a. The valve 24a may be provided outside the housing 12. The valve 24b may be arranged in the same manner as the valve 24a. The supply source 25a may be provided outside the housing 12. The supply source 25b may be arranged in the same manner as the supply source 25a.

[0096] The supply source 25a may supply the processing liquid L to multiple processing units 11. Alternatively, the supply source 25a may supply the processing liquid L to only one processing unit 11. The same applies to the supply source 25b.

[0097] The supply source 25a may be an element of the substrate processing apparatus 1. For example, the supply source 25a may be installed inside the substrate processing apparatus 1. Alternatively, the supply source 25a may not be an element of the substrate processing apparatus 1. For example, the supply source 25a may be installed outside the substrate processing apparatus 1. Similarly, the supply source 25b may be an element of the substrate processing apparatus 1. Alternatively, the supply source 25b may not be an element of the substrate processing apparatus 1.

[0098] The supply unit 21a may also be called the "processing liquid supply unit." The supply unit 21b may also be called the "drying auxiliary liquid supply unit."

[0099] The processing unit 11 includes an irradiation unit 31. The irradiation unit 31 irradiates ultraviolet light onto the substrate W held by the substrate holding unit 13. Specifically, the irradiation unit 31 irradiates ultraviolet light onto the upper surface WS1 of the substrate W held by the substrate holding unit 13.

[0100] Figure 4 schematically shows ultraviolet light with a dashed line. The irradiation unit 31 irradiates ultraviolet light downwards. The irradiation area of ​​the irradiation unit 31 is equal to or larger than the upper surface WS1 of the substrate W. The irradiation area of ​​the irradiation unit 31 extends over the entire upper surface WS1 of the substrate W. The entire upper surface WS1 of the substrate W is simultaneously exposed to ultraviolet light from the irradiation unit 31.

[0101] An example configuration of the irradiation unit 31 will be described. The irradiation unit 31 includes a light-emitting unit 32. The light-emitting unit 32 is provided above the substrate holding unit 13. The light-emitting unit 32 is provided above the substrate W held by the substrate holding unit 13. The light-emitting unit 32 is installed, for example, inside the housing 12.

[0102] For example, the light-emitting unit 32 does not move horizontally relative to the substrate W held by the substrate holding unit 13. For example, the light-emitting unit 32 does not move vertically Z relative to the substrate W held by the substrate holding unit 13. For example, the light-emitting unit 32 is fixed to the housing 12.

[0103] The light-emitting unit 32 includes one or more light sources 33. The light sources 33 generate ultraviolet light. The light sources 33 are, for example, lamps. The lamps are, for example, xenon lamps. The light sources 33 are, for example, light-emitting diodes (LEDs).

[0104] The light-emitting unit 32 includes a housing 34. The housing 34 supports the light source 33. The housing 34 has a substantially box shape. The housing 34 houses the light source 33.

[0105] The light-emitting section 32 includes an emission surface 35. The emission surface 35 emits ultraviolet light from the light source 33. The emission surface 35 emits ultraviolet light downwards. The emission surface 35 allows ultraviolet light to pass through. The emission surface 35 is made of, for example, quartz glass. The emission surface 35 is located, for example, at the bottom of the housing 34. The emission surface 35 is located above the substrate W held by the substrate holding section 13. The emission surface 35 extends horizontally. In a plan view, the emission surface 35 overlaps with the entire substrate W held by the substrate holding section 13.

[0106] The irradiation unit 31 is equipped with a power supply 36. The power supply 36 is electrically connected to the light-emitting unit 32 (specifically, the light source 33). The power supply 36 supplies power to the light-emitting unit 32. The power supply 36 controls the light-emitting unit 32. For example, the power supply 36 switches the light-emitting unit 32 between irradiation with ultraviolet light and non-irradiation. For example, the power supply 36 adjusts the intensity of ultraviolet light. For example, the power supply 36 adjusts the irradiation time of ultraviolet light.

[0107] The processing unit 11 includes a heating unit 41. The heating unit 41 heats the substrate W, which is held by the substrate holding unit 13.

[0108] An example of the configuration of the heating section 41 will be described. The heating section 41 includes a heater 42. The heater 42 generates heat. The heater 42 is, for example, a resistance heater. The heater 42 is, for example, an electric heater. The heater 42 includes, for example, a heating wire. The heater 42 is positioned below the substrate W held by the substrate holding section 13. The heater 42 faces the lower surface WS2 of the substrate W held by the substrate holding section 13. The heater 42 extends horizontally. The heating range heated by the heater 42 extends over the entire substrate W. The heater 42 heats the entire substrate W uniformly.

[0109] The heating section 41 comprises a support member 43 and a shaft portion 44. The support member 43 supports the heater 42. The support member 43 has a plate shape. The support member 43 extends horizontally. The support member 43 is located below the substrate W held by the substrate holding portion 13. The support member 43 is located above the support member 14. Although not shown in the figures, the support member 14 has approximately the same size as the substrate W in a plan view. The shaft portion 44 is connected to the support member 43. The shaft portion 44 extends downward from the support member 43. The shaft portion 44 extends along the axis of rotation D. The shaft portion 44 passes through the opening of the support member 14. The shaft portion 44 is inserted into the hollow portion of the shaft portion 18. Even when the shaft portion 18 rotates, the shaft portion 44 does not rotate. Therefore, the heater 42 and the support member 43 also do not rotate. The shaft portion 44 is fixed to the housing 12, for example.

[0110] The heating unit 41 includes a power supply 45. The power supply 45 is electrically connected to the heater 42. The power supply 45 supplies power to the heater 42. The power supply 45 controls the heater 42. For example, the power supply 45 switches the heater 42 between heating and non-heating. For example, the power supply 45 adjusts the output of the heater 42. For example, the power supply 45 adjusts the heating temperature by the heater 42. For example, the power supply 45 adjusts the heating time by the heater 42.

[0111] The processing unit 11 may further include a cup (not shown). The cup is installed inside the housing 12. The cup is positioned to the side of the substrate holder 13. The cup surrounds the outside of the substrate holder 13. The cup catches any liquid splashed from the substrate W held by the substrate holder 13.

[0112] Refer to Figure 3. The control unit 10 controls the rotary drive unit 17. The control unit 10 controls the supply units 21a and 21b. The control unit 10 controls the valves 24a and 24b. The control unit 10 controls the irradiation unit 31. The control unit 10 controls the power supply 36. The control unit 10 controls the heating unit 41. The control unit 10 controls the power supply 45.

[0113] <4. Example of operation of processing unit 11> Refer to Figures 4 and 5. Figure 5 is a flowchart showing the procedure of the substrate processing method according to the embodiment. The substrate processing method comprises a processing liquid supply step and a drying step. The drying step is performed after the processing liquid supply step. The drying step corresponds to the substrate drying method in the present invention. The processing liquid supply step and the drying step are performed by the processing unit 11. The processing unit 11 operates according to the control of the control unit 10.

[0114] Step S1: Processing liquid supply process The processing solution L is supplied to the substrate W.

[0115] The substrate holding unit 13 holds the substrate W. The rotation drive unit 17 rotates the substrate holding unit 13. The supply unit 21a supplies the processing liquid L to the substrate W held by the substrate holding unit 13. The irradiation unit 31 does not irradiate with ultraviolet light. The heating unit 41 does not heat the substrate W.

[0116] The substrate W is held in a nearly horizontal position. The substrate W rotates integrally with the substrate holder 13. The processing liquid L is supplied to the upper surface WS1 of the substrate W. Because the substrate W is rotating, the processing liquid L spreads smoothly over the entire upper surface WS1. For example, the processing liquid L cleans the substrate W.

[0117] Then, the supply unit 21a stops supplying the processing liquid L to the substrate W.

[0118] In the processing liquid supply process, the inside of the housing 12 is kept at, for example, room temperature. Therefore, in the processing liquid supply process, the substrate W is processed in, for example, a room temperature environment. The processing liquid L is used in a room temperature environment. Here, room temperature includes ambient temperature. Room temperature is, for example, a temperature in the range of 5°C or higher and 35°C or lower. Room temperature is, for example, a temperature in the range of 10°C or higher and 30°C or lower. Room temperature is, for example, a temperature in the range of 15°C or higher and 25°C or lower.

[0119] At the end of the processing liquid supply process, the processing liquid L is present on the substrate W. The substrate W is wet. The substrate W is not dry.

[0120] Step S2: Drying process The wet substrate W is dried. The drying process includes a coating process, a curing process, and a thermal decomposition process.

[0121] Step S11: Coating process A drying aid liquid F is applied to the substrate W.

[0122] The substrate holding unit 13 holds the substrate W. The rotation drive unit 17 rotates the substrate holding unit 13 and the substrate W. The supply unit 21b supplies drying aid liquid F to the substrate W held by the substrate holding unit 13. The irradiation unit 31 does not irradiate with ultraviolet light. The heating unit 41 does not heat the substrate W.

[0123] The drying aid liquid F is supplied to the upper surface WS1 of the substrate W. As the substrate W rotates, the drying aid liquid F spreads smoothly over the entire upper surface WS1. The drying aid liquid F removes the processing liquid L from the substrate W. The processing liquid L on the substrate W is replaced by the drying aid liquid F.

[0124] Then, the supply unit 21b stops supplying the drying aid liquid F to the substrate W. The rotation drive unit 17 stops rotating the substrate holding unit 13 and the substrate W. The substrate W comes to a standstill.

[0125] During the coating process, the inside of the housing 12 is kept at, for example, room temperature. Therefore, during the coating process, the substrate W is processed in, for example, a room temperature environment. The drying aid liquid F is applied to the substrate W in, for example, a room temperature environment.

[0126] Figure 6 is a schematic diagram showing the substrate W during the coating process. When the substrate W is held by the substrate holder 13, the pattern P is located on the upper surface WS1 of the substrate W. When the substrate W is held by the substrate holder 13, the pattern P faces upward.

[0127] The drying aid liquid F is present on the substrate W. The pattern P is in contact with the drying aid liquid F. The protrusion A is in contact with the drying aid liquid F.

[0128] Furthermore, the processing liquid L has already been removed from the substrate W by the drying aid liquid F. Therefore, the processing liquid L is not present on the substrate W. The processing liquid L does not remain in the recess B.

[0129] The drying aid liquid F on the substrate W forms a liquid film G. The liquid film G is located on the substrate W. The liquid film G is located on the upper surface WS1. The liquid film G covers the upper surface WS1.

[0130] In the coating process, the thickness of the liquid film G may be further adjusted. The thickness of the liquid film G may be adjusted to a range of, for example, several hundred μm or less. The thickness of the liquid film G may be adjusted to a range of, for example, several tens of μm or more. For example, the thickness of the liquid film G may be adjusted while the supply unit 21b supplies the drying auxiliary liquid F to the substrate W. For example, the thickness of the liquid film G may be adjusted after the supply unit 21b stops supplying the drying auxiliary liquid F. For example, the thickness of the liquid film G may be adjusted by adjusting the rotation speed of the substrate W. For example, the thickness of the liquid film G may be adjusted by adjusting the rotation time of the substrate W.

[0131] The thickness of the liquid film G is, for example, sufficiently greater than the height of the pattern P (specifically, the height AH of the protrusion A). The thickness of the liquid film G is, for example, several tens of times or more the height of the pattern P.

[0132] The entire pattern P is immersed in the liquid film G. The entire protrusion A is immersed in the liquid film G.

[0133] Pattern P does not come into contact with the gas. Pattern P does not come into contact with the gas-liquid interface. Therefore, capillary forces do not act on pattern P. Capillary forces are, for example, the surface tension of the drying aid liquid F.

[0134] The protrusion A does not come into contact with the gas. The protrusion A does not come into contact with the gas-liquid interface. Therefore, capillary force does not act on the protrusion A.

[0135] The recess B is filled with the liquid film G. The entire recess B is filled with only the liquid film G.

[0136] Step S12: Curing process Ultraviolet light is irradiated onto the drying aid liquid F on the substrate W. A solidified film is formed on the substrate W.

[0137] The substrate holding unit 13 holds the substrate W. The irradiation unit 31 irradiates ultraviolet light onto the substrate W held by the substrate holding unit 13. The rotation drive unit 17 does not rotate the substrate holding unit 13 or the substrate W. The heating unit 41 does not heat the substrate W.

[0138] During the curing process, the inside of the housing 12 is kept at, for example, room temperature. Therefore, during the curing process, the substrate W is processed in, for example, a room temperature environment. The solidified film is formed in, for example, a room temperature environment.

[0139] Figure 7 is a schematic diagram of the substrate W during the curing process. The top surface WS1 of the substrate W is exposed to ultraviolet light. The drying aid F on the substrate W is exposed to ultraviolet light. The polymerization initiator in the drying aid F generates active species. The active species are, for example, radicals. The active species initiate the polymerization reaction of the UV-curable material in the drying aid F. As the polymerization reaction of the UV-curable material progresses, the degree of polymerization of the UV-curable material increases. The fluidity of the drying aid F on the substrate W decreases. The drying aid F on the substrate W hardens. The drying aid F on the substrate W hardens.

[0140] Eventually, UV-curable materials become polymers. Polymers of UV-curable materials are equivalent to cured products of UV-curable materials. Polymers of UV-curable materials are equivalent to polymers. Polymers of UV-curable materials are equivalent to polymer compounds.

[0141] The polymer of the UV-curable material constitutes the solidified film H. The solidified film H contains the polymer of the UV-curable material.

[0142] In other words, the polymerization reaction of the UV-curable material transforms the drying aid F into a solidified film H. The polymerization reaction transforms the liquid film G into a solidified film H. The polymerization reaction reduces the amount of drying aid F. The polymerization reaction thins the liquid film G.

[0143] The solidified film H is a solid. The solidified film H is a solid at room temperature. The solidified film H may also be called a "cured film". The solidified film H may also be called a "resin film".

[0144] The solidified film H is thermally decomposable. The solidified film H has a thermal decomposition temperature higher than room temperature. The thermal decomposition temperature of the solidified film H is higher than the boiling point of the drying aid F. The boiling point of the drying aid F is higher than room temperature. The thermal decomposition temperature of the solidified film H is higher than the boiling point of the UV-curable material. The boiling point of the UV-curable material is higher than room temperature. The thermal decomposition temperature of the solidified film H is, for example, 100 degrees or higher. The thermal decomposition temperature of the solidified film H is, for example, 200 degrees or higher. The thermal decomposition temperature of the solidified film H is, for example, 400 degrees or higher. The thermal decomposition temperature of the solidified film H is, for example, 700 degrees or higher.

[0145] For example, the solidified film H may be substantially inelastic. For example, the solidified film H may be substantially indeformable. Alternatively, the solidified film H may be elastic.

[0146] The solidified film H is formed on the substrate W. The solidified film H is formed on the upper surface WS1. The solidified film H covers the upper surface WS1.

[0147] The solidified film H is formed above pattern P. The solidified film H covers pattern P. The drying aid liquid F remains in the recess B.

[0148] The solidified film H has thickness. The thickness of the solidified film H is sufficiently greater than the height of the pattern P (specifically, the height AH of the protrusion A). For example, the thickness of the solidified film H is several tens of times or more the height of the pattern P.

[0149] The thickness of the solidified film H is not excessively large. For example, the thickness of the solidified film H is several hundred micrometers or less.

[0150] The tip of pattern P (specifically, the tip A2 of protrusion A) is in contact with the solidified film H. The tip of pattern P is connected to the solidified film H. The tip of pattern P is, for example, adhered to the solidified film H. The tip of pattern P is, for example, linked to the solidified film H. The solidified film H bridges multiple tips of pattern P. The solidified film H acts as a bridge connecting the tips of pattern P. Therefore, pattern P (specifically, protrusion A) is suitably supported by the solidified film H.

[0151] The base end of pattern P (specifically, the base end A1 of the protrusion A) is in contact with the drying aid liquid F. The base end of pattern P is not in contact with the solidification film H. Even if the base end of pattern P is not in contact with the solidification film H, pattern P is adequately supported by the solidification film H.

[0152] For example, at the end of the curing process, some of the drying aid liquid F may remain on the substrate W. Alternatively, at the end of the curing process, all of the drying aid liquid F may disappear from the substrate W.

[0153] Case 1 refers to the case where some of the drying aid liquid F remains on the substrate W at the end of the curing process. Case 2 refers to the case where all of the drying aid liquid F disappears from the substrate W at the end of the curing process.

[0154] Case 1 will be explained. Figure 7 corresponds to a schematic diagram of the substrate W at the end of the curing process in Case 1. In Case 1, only a portion of the pattern P is in contact with the solidified film H. In Case 1, only a portion of the protrusion A is in contact with the solidified film H.

[0155] Case 2 will be explained. Figure 8 is a schematic diagram of the substrate W during the curing process. Figure 8 corresponds to a schematic diagram of the substrate W at the end of the curing process in Case 2. The solidified film H continues to grow on the substrate W. The solidified film H extends downward, for example, in the recess B. The drying aid liquid F on the substrate W decreases further. The liquid film G becomes even thinner.

[0156] Eventually, all of the drying aid liquid F disappears from the substrate W. All of the drying aid liquid F transforms into, for example, a solidified film H. All of the liquid film G disappears from the substrate W. No liquid remains on the substrate W. The pattern P does not come into contact with the liquid. The protrusions A do not come into contact with the liquid.

[0157] The recess B is filled with the solidified film H. The entire recess B is filled with only the solidified film H.

[0158] The entire pattern P is in contact with the solidified film H. The entire pattern P is connected to the solidified film H. The entire pattern P is, for example, adhered to the solidified film H. The entire pattern P is, for example, linked to the solidified film H. Therefore, the pattern P is more favorably supported by the solidified film H.

[0159] The entire protrusion A is in contact with the solidified film H. The entire protrusion A is connected to the solidified film H. The entire protrusion A is, for example, bonded to the solidified film H. The entire protrusion A is, for example, linked to the solidified film H. Therefore, the protrusion A is more favorably supported by the solidified film H.

[0160] Step S13: Pyrolysis process The solidified film H on the substrate W is heated. The solidified film H is thermally decomposed. The substrate W is dried.

[0161] The substrate holding unit 13 holds the substrate W. The heating unit 41 heats the substrate W held by the substrate holding unit 13. The rotation drive unit 17 does not rotate the substrate holding unit 13 or the substrate W. The irradiation unit 31 does not irradiate with ultraviolet light.

[0162] The solidified film H is heated via the substrate W held by the substrate holding section 13. The temperature of the solidified film H rises, for example, from room temperature. The temperature of the solidified film H rises, for example, to a temperature above the thermal decomposition temperature of the solidified film H.

[0163] The solidified film H is heated to a temperature above its thermal decomposition temperature. For example, the solidified film H is heated to a temperature of 100 degrees or higher. For example, the solidified film H is heated to a temperature of 200 degrees or higher. For example, the solidified film H is heated to a temperature of 400 degrees or higher. For example, the solidified film H is heated to a temperature of 700 degrees or higher.

[0164] The thermal decomposition process in Case 1 will be explained in detail. In Case 1, as shown in Figure 7, at the end of the curing process, a portion of the drying aid liquid F remains on the substrate W.

[0165] Figure 9 is a schematic diagram showing the substrate W during the thermal decomposition process. The boiling point of the drying aid F is lower than the thermal decomposition temperature of the solidified film H. Therefore, the drying aid F evaporates before the thermal decomposition of the solidified film H. The drying aid F remaining on the substrate W at the end of the curing process evaporates without changing into the solidified film H.

[0166] When the drying aid F evaporates, the solidified film H does not substantially decompose thermally. When the drying aid F evaporates, the solidified film H supports the pattern P. When the drying aid F evaporates, the solidified film H supports the protrusion A. That is, when the drying aid F evaporates, the pattern P is protected by the solidified film H. When the drying aid F evaporates, the protrusion A is protected by the solidified film H. Therefore, when the drying aid F evaporates, the pattern P does not collapse. When the drying aid F evaporates, the protrusion A does not collapse.

[0167] During the thermal decomposition process, when the drying aid F evaporates, pattern P may come into contact with the gas-liquid interface between the drying aid F and the gas. When pattern P comes into contact with the gas-liquid interface, capillary forces from the drying aid F act on pattern P. However, during the thermal decomposition process, when the drying aid F evaporates, pattern P is supported by the solidification film H. Therefore, even if capillary forces act on pattern P during the thermal decomposition process, the solidification film H prevents pattern P from collapsing. Thus, even if capillary forces act on pattern P during the thermal decomposition process, pattern P will not collapse.

[0168] Eventually, the drying aid liquid F is removed from the substrate W. The drying aid liquid F is removed from the substrate W without changing into a solidified film H. The drying aid liquid F disappears from the substrate W. The gas J inside the housing 12 enters the recess B. The solidified film H protects the pattern P until all of the drying aid liquid F has disappeared from the substrate W. The solidified film H protects the protrusion A until all of the drying aid liquid F has disappeared from the substrate W.

[0169] Figure 10 is a schematic diagram showing the substrate W during the thermal decomposition process. After the drying aid liquid F is removed from the substrate W, the solidified film H is thermally decomposed. The solidified film H gradually decreases. The solidified film H gradually becomes thinner. The solidified film H is gradually removed from the substrate W. The solidified film H gradually disappears from the substrate W.

[0170] Specifically, the polymer of the UV-curable material in the solidified film H is thermally decomposed. The polymer of the UV-curable material is depolymerized. The molecular weight of the polymer of the UV-curable material decreases.

[0171] For example, solidified film H gasifies. For example, polymers of UV-curable materials gasify.

[0172] For example, the solidified film H is broken down into multiple particles. For example, the polymer of an ultraviolet-curable material is broken down into multiple particles. The multiple particles float from the substrate W. The floating particles form smoke, for example.

[0173] For example, the solidified film H is removed from the substrate W without melting. For example, the polymer of the UV-curable material is removed from the substrate W without melting.

[0174] When the solidified film H is thermally decomposed, the solidified film H does not exert a significant force on pattern P. When the solidified film H is thermally decomposed, the force acting on pattern P is low. When the solidified film H is thermally decomposed, the solidified film H does not exert a significant force on protrusion A. When the solidified film H is thermally decomposed, the force acting on protrusion A is low.

[0175] Figure 11 is a schematic diagram of the substrate W during the pyrolysis process. Finally, the entire solidified film H is removed from the substrate W. The upper surface WS1 of the substrate W is exposed to the gas J. The entire pattern P is exposed to the gas J. The entire protrusion A is exposed to the gas J. The entire recess B is filled with gas J only. No liquid is present on the substrate W. The substrate W is dried. The drying process is completed.

[0176] The thermal decomposition process in Case 2 will be explained. In Case 2, as shown in Figure 8, at the end of the curing process, all of the drying aid liquid F disappears from the substrate W.

[0177] Figure 12 is a schematic diagram showing the substrate W during the thermal decomposition process. The solidified film H is thermally decomposed. The solidified film H gradually decreases. The solidified film H gradually becomes thinner. The solidified film H is gradually removed from the substrate W. The solidified film H gradually disappears from the substrate W.

[0178] For convenience, refer to Figure 11. Finally, the entire solidified film H is removed from the substrate W. The substrate W is dried. The drying process is complete.

[0179] <5. Technical significance of the drying method> The technical significance of the drying treatment method of the embodiment will be explained by the examples and comparative examples 1-3.

[0180] The conditions for the example are described below. In this example, a series of processes including a coating step, a curing step, and a thermal decomposition step are performed on the substrate W.

[0181] In the coating process, the drying aid liquid F consists only of isobornyl acrylate monomer and 1-hydroxycyclohexyl phenyl ketone. The isobornyl acrylate monomer corresponds to the UV-curable material. The 1-hydroxycyclohexyl phenyl ketone corresponds to the polymerization initiator. The mass ratio of the polymerization initiator to the UV-curable material is as follows: Polymerization initiator: UV-curable material = 4:100 (mass ratio)

[0182] In the curing process, the ultraviolet light has a wavelength of 365 nm. The ultraviolet light is 342 mW / cm². 2 It has the intensity of ultraviolet light. The drying aid liquid F on the substrate W is irradiated with ultraviolet light for 10 minutes.

[0183] In the pyrolysis process, the substrate W and the solidified film H are heated to 700 degrees Celsius. The substrate W and the solidified film H are heated for 1 hour.

[0184] The conditions for Comparative Example 1 are described below. In Comparative Example 1, a series of processes including a first liquid supply step and a spin drying step are performed on the substrate W. In the first liquid supply step, deionized water is supplied to the substrate W. In the spin drying step, the substrate W is rotated to shake off the deionized water on the substrate W and dry the substrate W.

[0185] The conditions for Comparative Example 2 are described below. In Comparative Example 2, a series of processes including a second liquid supply step and a spin drying step are performed on the substrate W. In the second liquid supply step, isopropyl alcohol is supplied to the substrate W. In the spin drying step, the substrate W is rotated to shake off the isopropyl alcohol on the substrate W and dry the substrate W.

[0186] The conditions for Comparative Example 3 are described below. In Comparative Example 3, a series of processes including a third liquid supply step, a solidification step, and a sublimation step are performed on the substrate W. In the third liquid supply step, liquid tert-butanol is supplied to the substrate W. Note that the liquid tert-butanol consists only of tert-butanol. The liquid tert-butanol does not contain any substances other than tert-butanol (e.g., solvents). In the solidification step, the substrate W is cooled. In the solidification step, the tert-butanol solidifies on the substrate W. In the solidification step, a solid of tert-butanol is formed on the substrate W. In the sublimation step, the chamber containing the substrate W is evacuated. In the sublimation step, the pressure in the chamber becomes lower than atmospheric pressure. In the sublimation step, the solid of tert-butanol on the substrate W sublimes. In the sublimation step, tert-butanol changes from a solid to a gas without passing through a liquid stage. The substrate W is dried by the sublimation of tert-butanol.

[0187] Each substrate W treated in the examples and comparative examples 1-3 was evaluated by its collapse rate E.

[0188] The collapse rate E is determined as follows: The observer observes the pattern P in one or more localized areas. The localized area is a minute region of the substrate W. The localized area is magnified 50,000 times, for example, by a scanning electron microscope. The observer observes each protrusion A in the localized area one by one. The observer classifies each protrusion A into either a collapsed protrusion A or a non-collapsed protrusion A. Let NA be the number of observed protrusions A. Let NB be the number of collapsed protrusions A. The number NB is less than or equal to the number NA. The collapse rate E is the ratio of the number NB to the number NA. The collapse rate E is defined, for example, by the following formula. E = NB / NA * 100 (%)

[0189] Figure 13 is a graph showing the evaluation of each substrate W treated according to the example and comparative examples 1-3. Specifically, Figure 13 shows the collapse rate E in the example and comparative examples 1-3.

[0190] The collapse rate E of the example was less than 10%. The collapse rate E of the example was a few percent. The collapse rate E of Comparative Example 1 was 100%. The collapse rates E of Comparative Examples 2 and 3 were also 100% each.

[0191] The following can be observed from Figure 13: In the example, the collapse of pattern P is suitably suppressed. In the example, pattern P is suitably protected compared to Comparative Examples 1-3. In the example, the substrate W is dried with the pattern suitably protected.

[0192] In Comparative Example 1, the entire pattern P collapsed. This is presumed to be because the capillary force of the deionized water acted on pattern P during the spin drying process.

[0193] In Comparative Example 2, the entire pattern P collapsed. This is presumed to be because the capillary force of isopropyl alcohol acted on pattern P during the spin-drying process.

[0194] In Comparative Example 3, no liquid is present on the substrate W during the sublimation process. Therefore, no capillary forces act on the pattern P during the sublimation process. However, in Comparative Example 3, the entire pattern P collapsed. Comparative Example 3 demonstrates that the pattern P may collapse even when no liquid is present on the substrate W during the sublimation process. Comparative Example 3 also demonstrates that the pattern P may collapse even when no capillary forces act on the pattern P when the solid is removed from the substrate W.

[0195] <6. Effects of the Embodiment> The substrate drying method is for drying a substrate W on which a pattern P is formed. The substrate drying method comprises a coating step, a curing step, and a thermal decomposition step. In the coating step, a drying aid liquid F is applied to the substrate W. The drying aid liquid F contains an ultraviolet-curable material. In the curing step, ultraviolet light is irradiated onto the drying aid liquid F on the substrate W. In the curing step, a solidified film H is formed on the substrate W. In the thermal decomposition step, the solidified film H on the substrate W is heated and thermally decomposed. In the thermal decomposition step, the substrate W is dried.

[0196] As described above, the substrate drying method comprises a coating step and a curing step. Therefore, the solidified film H is suitably formed on the substrate W. Furthermore, the solidified film H suitably supports the pattern P on the substrate W. The substrate drying method further comprises a thermal decomposition step. Therefore, the solidified film H is suitably thermally decomposed. Thus, the solidified film H is suitably removed from the substrate W. Specifically, the solidified film H is removed from the substrate W without applying significant force to the pattern P. Therefore, the substrate W is dried with the pattern P protected.

[0197] As described above, according to the substrate drying method, the substrate W is properly dried.

[0198] The solidified film H is thermally decomposable. Therefore, in the thermal decomposition process, the solidified film H is suitably thermally decomposed. As a result, the substrate W is dried more effectively.

[0199] In the thermal decomposition process, the solidified film H is heated to a temperature above its thermal decomposition temperature. Therefore, in the thermal decomposition process, the solidified film H is more effectively thermally decomposed. Consequently, the substrate W is dried more appropriately.

[0200] In the thermal decomposition process, the solidified film H is heated to a temperature of 700 degrees Celsius or higher. Therefore, it is easy to set the heating temperature of the solidified film H to be above its thermal decomposition temperature.

[0201] In the thermal decomposition process, the solidified film H is removed from the substrate W by thermal decomposition. Therefore, after the thermal decomposition process, the solidified film H does not remain on the substrate W. After the thermal decomposition process, no residue of the solidified film H remains on the substrate W. Thus, a clean substrate W is obtained after the thermal decomposition process. Consequently, the substrate W is dried more effectively.

[0202] In the thermal decomposition process, the solidified film H is vaporized. Therefore, in the thermal decomposition process, the solidified film H is suitably removed from the substrate W.

[0203] In the thermal decomposition process, the solidified film H is broken down into multiple particles. In the thermal decomposition process, the particles float away from the substrate W. Therefore, in the thermal decomposition process, the solidified film H is suitably removed from the substrate W.

[0204] In the thermal decomposition process, the solidified film H is removed from the substrate W without melting. Therefore, the force acting on the pattern P when the solidified film H is thermally decomposed is even lower. Thus, the pattern P is adequately protected even when the solidified film H is thermally decomposed.

[0205] During the curing process, the UV-curable material becomes a polymer. The solidified film H contains the polymer of the UV-curable material. Therefore, the solidified film H is suitably formed during the curing process.

[0206] In the thermal decomposition process, the polymer of the UV-curable material is thermally decomposed. In other words, in the thermal decomposition process, the polymer of the UV-curable material is depolymerized. In the thermal decomposition process, the molecular weight of the polymer of the UV-curable material decreases. Therefore, in the thermal decomposition process, the solidified film H is suitably thermally decomposed.

[0207] UV-curable materials are liquids. Therefore, it is easy to obtain a drying aid F from UV-curable materials. For example, it is not necessary to use a solvent to obtain the drying aid F. For instance, the drying aid F can be obtained without using a solvent.

[0208] UV-curable materials do not contain polymers. Therefore, it is easy to obtain liquid UV-curable materials.

[0209] The UV-curable material is isobornyl acrylate. As described in the examples, when the UV-curable material is isobornyl acrylate, the pattern P is more favorably protected. Therefore, the substrate W is dried more appropriately.

[0210] The UV-curable material is an isobornyl acrylate monomer. Therefore, the substrate W is dried more effectively. Furthermore, obtaining the liquid UV-curable material becomes easier.

[0211] The drying aid liquid F does not contain a solvent. Therefore, no solvent is applied to the substrate W during the coating process. During the curing and thermal decomposition processes, the solvent is not present on the substrate W. Consequently, during the curing and thermal decomposition processes, the capillary forces of the solvent do not act on the pattern P. In other words, the forces acting on the pattern P are further reduced during the curing and thermal decomposition processes. Therefore, protecting the pattern P during the curing and thermal decomposition processes is easier.

[0212] The drying aid liquid F further contains a polymerization initiator. The polymerization initiator promotes the polymerization of the UV-curable material. Therefore, the solidified film H is rapidly formed during the curing process.

[0213] At the end of the curing process in Case 1, a portion of the drying aid liquid F remains on the substrate W. In the thermal decomposition process, the drying aid liquid F remaining on the substrate W at the end of the curing process is evaporated. Therefore, even if a portion of the drying aid liquid F remains on the substrate W during the curing process, the substrate W is properly dried during the thermal decomposition process.

[0214] The boiling point of the drying aid F is lower than the thermal decomposition temperature of the solidified film H. Therefore, in the thermal decomposition process of Case 1, the drying aid F evaporates, and then the solidified film H is thermally decomposed. In other words, in the thermal decomposition process of Case 1, the solidified film H is not substantially thermally decomposed until the drying aid F evaporates. Thus, in the thermal decomposition process of Case 1, the pattern P is protected by the solidified film H until the drying aid F evaporates. Specifically, in the thermal decomposition process of Case 1, the pattern P is supported by the solidified film H until the drying aid F evaporates. Therefore, even in the case of Case 1, the substrate W is properly dried.

[0215] The boiling point of the UV-curable material is lower than the thermal decomposition temperature of the solidified film H. Therefore, in the thermal decomposition process, the drying aid liquid F evaporates suitably before the solidified film H is thermally decomposed.

[0216] At the end of the curing process in Case 2, all of the drying aid liquid F disappears from the substrate W. For example, at the end of the curing process in Case 2, all of the drying aid liquid F transforms into a solidified film H. Therefore, in the thermal decomposition process of Case 2, there is no drying aid liquid F on the substrate W. Thus, in the thermal decomposition process of Case 2, the capillary force of the drying aid liquid F does not act on the pattern P. In other words, in the thermal decomposition process of Case 2, the force acting on the pattern P is further reduced. Therefore, it is easier to protect the pattern P in the thermal decomposition process of Case 2.

[0217] The irradiation area of ​​the irradiation unit 31 extends over the entire substrate W. Therefore, ultraviolet light can be uniformly irradiated over the entire drying aid liquid F on the substrate W. As a result, the solidified film H is formed uniformly over the entire substrate W. The solidified film H is formed uniformly over the entire upper surface WS1. Furthermore, the entire drying aid liquid F on the substrate W is simultaneously exposed to ultraviolet light. As a result, the solidified film H is formed quickly during the curing process. Therefore, the curing process time is suitably shortened.

[0218] During the coating process, the drying aid liquid F on the substrate W forms a liquid film G. The liquid film G has a thickness sufficiently greater than the height of the pattern P. The entire pattern P is immersed in the liquid film G. Therefore, during the coating process, the pattern P does not come into contact with the gas-liquid interface. Consequently, during the coating process, the capillary force of the drying aid liquid F does not act on the pattern P. Therefore, the pattern P is adequately protected even during the coating process. Collapse of the pattern P is adequately prevented even during the coating process.

[0219] The thickness of the solidified film H is not excessively large. For example, the thickness of the solidified film H is several hundred μm or less. Therefore, in the thermal decomposition process, the solidified film H is rapidly decomposed. The time of the thermal decomposition process is suitably shortened.

[0220] In the coating process, the thickness of the liquid film G is adjusted. In the curing process, at least a portion of the liquid film G transforms into a solidified film H. Therefore, the thickness of the solidified film H is adjusted to a suitable degree.

[0221] The substrate processing method is for processing a substrate W on which a pattern P has been formed. The substrate processing method comprises a processing liquid supply step and a drying step. In the processing liquid supply step, a processing liquid L is supplied to the substrate W. In the drying step, the substrate drying method described above is performed. Specifically, the drying step comprises a coating step, a curing step and a thermal decomposition step. Thus, the substrate W is dried while the pattern P is protected.

[0222] As described above, according to the substrate processing method, the substrate W is processed appropriately.

[0223] In the coating process, the treatment liquid L is removed from the substrate W. Therefore, in the curing and thermal decomposition processes, the treatment liquid L is not present on the substrate W. Thus, it is easier to protect the pattern P during the curing and thermal decomposition processes.

[0224] <7. Modified Embodiments> The present invention is not limited to the embodiments described below and can be modified and implemented as follows.

[0225] (1) In the embodiments described above, the drying aid F contains a polymerization initiator. However, it is not limited to this. For example, the drying aid F does not have to contain a polymerization initiator. For example, if the UV-curable material starts polymerization without a polymerization initiator, the drying aid F does not need to contain a polymerization initiator. For example, the drying aid F consists only of the UV-curable material.

[0226] (2) In the thermal decomposition step of the above-described embodiment, the temperature rise curve of the solidified film H may be selected and changed as appropriate. Two modified embodiments will be described below.

[0227] (2-1) In the thermal decomposition process, the temperature of the solidified film H rises continuously. According to this modified embodiment, it is easy to rapidly increase the temperature of the solidified film H. Therefore, the solidified film H is thermally decomposed even more quickly. Thus, the time of the thermal decomposition process is effectively shortened. Consequently, the substrate W is dried efficiently.

[0228] (2-2) In the pyrolysis process, the temperature of the solidified film H increases in stages.

[0229] Figure 14 is a flowchart showing the procedure of the thermal decomposition process in the modified embodiment. Specifically, the thermal decomposition process includes a first step (step S21) and a second step (step S22).

[0230] In the first step, the substrate W is heated to a first temperature. In the first step, for example, the temperature of the substrate W rises from room temperature to the first temperature. In the first step, for example, the temperature of the solidified film H also rises from room temperature to the first temperature. The first temperature is lower than the thermal decomposition temperature of the solidified film H. The first temperature is above the boiling point of the drying aid liquid F. The first temperature is above the boiling point of the UV-curable material.

[0231] The second step is performed after the first step. In the second step, the solidified film H is heated to a second temperature. The second temperature is higher than the first temperature. The second temperature is above the thermal decomposition temperature of the solidified film H. In the second step, for example, the temperature of the solidified film H rises from the first temperature to the second temperature.

[0232] In this modified embodiment, in the first step, the drying aid liquid F is reliably evaporated from the substrate W. In the first step, the drying aid liquid F is reliably removed from the substrate. Even if some of the drying aid liquid F remains on the substrate W at the end of the curing step, all of the drying aid liquid F remaining on the substrate W is removed from the substrate W in the first step. All of the drying aid liquid F remaining on the substrate W at the end of the curing step is removed from the substrate W without changing into a solidified film H. Therefore, in the second step, there is no drying aid liquid F on the substrate W. Consequently, it is even easier to protect the pattern P in the second step.

[0233] The first temperature is lower than the second temperature. Therefore, in the first step, thermal decomposition of the solidified film H is suitably prevented. Consequently, in the first step, pattern P is suitably protected by the solidified film H.

[0234] The first temperature is below the thermal decomposition temperature of the solidified film H. Therefore, thermal decomposition of the solidified film H is more reliably prevented in the first step.

[0235] The first temperature is above the boiling point of the drying aid F. Therefore, in the first step, the drying aid F is removed more reliably.

[0236] The first temperature is above the boiling point of the UV-curable material. Therefore, the drying aid liquid F is removed more reliably in the first step.

[0237] The second temperature is higher than the first temperature. Therefore, in the second step, the solidified film H is suitably thermally decomposed.

[0238] The second temperature is above the thermal decomposition temperature of the solidified film H. Therefore, in the second step, the solidified film H is thermally decomposed more favorably.

[0239] (3) In this embodiment, the irradiation area of ​​the irradiation unit 31 is wider than the upper surface WS1 of the substrate W. The irradiation unit 31 in this embodiment does not move horizontally with respect to the substrate W held by the substrate holding unit 13. The irradiation unit 31 in this embodiment does not move vertically in the Z direction with respect to the substrate W held by the substrate holding unit 13. However, it is not limited to this. For example, the irradiation area of ​​the irradiation unit 31 may be smaller than the upper surface WS1 of the substrate W. For example, the irradiation unit 31 may move horizontally with respect to the substrate W held by the substrate holding unit 13. For example, the irradiation unit 31 may move vertically in the Z direction with respect to the substrate W held by the substrate holding unit 13.

[0240] Figure 15 shows the configuration of the processing unit in a modified embodiment. Note that components identical to those in the embodiment are denoted by the same reference numerals, and detailed explanations are omitted. The irradiation unit 31 includes a light-emitting unit 52. The light-emitting unit 52 emits ultraviolet light. The ultraviolet irradiation area by the light-emitting unit 52 is smaller than the upper surface WS1 of the substrate W. The light-emitting unit 52 is smaller than the light-emitting unit 32 of the embodiment. The light-emitting unit 52 is electrically connected to a power supply 36 (not shown).

[0241] The illumination unit 31 includes a moving mechanism 53. The moving mechanism 53 moves the light-emitting unit 52. The moving mechanism 53 moves the light-emitting unit 52 to, for example, a first position Q1, a second position Q2, and a third position Q3. The first position Q1 is, in a side view, above the first side of the substrate W held by the substrate holding unit 13. The second position Q2 is, in a side view, above the second side of the substrate W held by the substrate holding unit 13. The second position Q2 is at the same height as the first position Q1. The third position Q3 is higher than the first position Q1 and the second position Q2.

[0242] The moving mechanism 53 includes, for example, a horizontal moving mechanism 54 and a vertical moving mechanism 55. The horizontal moving mechanism 54 supports the light-emitting unit 52. The horizontal moving mechanism 54 moves the light-emitting unit 52 in the horizontal direction. The vertical moving mechanism 55 supports the horizontal moving mechanism 54. The vertical moving mechanism 55 moves the horizontal moving mechanism 54 in the vertical direction Z.

[0243] An example of the movement of the light-emitting unit 52 will be described. In the processing liquid supply process and the coating process, the light-emitting unit 52 is located at the third position Q3. Therefore, when the nozzles 22a and 22b move to the processing position, the nozzles 22a and 22b do not interfere with the light-emitting unit 52. In the curing process, the light-emitting unit 52 moves from the third position Q3 to the first position Q1. Then, while the light-emitting unit 52 irradiates ultraviolet light, the light-emitting unit 52 moves from the first position Q1 to the second position Q2. The ultraviolet irradiation area moves across the substrate W. As a result, the ultraviolet light irradiates the entire upper surface WS1 of the substrate W. The ultraviolet light irradiates the entire drying auxiliary liquid F on the substrate W.

[0244] According to this modified embodiment, the light-emitting unit 52 is relatively small. Therefore, it is easy to miniaturize the processing unit 11.

[0245] (4) In this embodiment, the heating unit 41 heats the solidified film H via the substrate W. However, it is not limited to this. For example, the heating unit 41 may heat the solidified film H directly. For example, the heating unit 41 may transfer heat to the solidified film H without going through the substrate W.

[0246] (5) In this embodiment, the heating unit 41 faces the lower surface WS2 of the substrate W. However, it is not limited to this. The heating unit 41 may face the upper surface WS1 of the substrate W. According to this modified embodiment, the heating unit 41 directly heats at least one of the drying aid liquid F and the solidified film H. The heating unit 41 transfers heat to at least one of the drying aid liquid F and the solidified film H without going through the substrate W.

[0247] (6) In this embodiment, the coating step, the curing step, and the thermal decomposition step were performed in the same processing unit 11. However, this is not limited to this. For example, the processing unit that performs the coating step may be different from the processing unit that performs the curing step. For example, the processing unit that performs the coating step may be different from the processing unit that performs the thermal decomposition step. For example, the processing unit that performs the curing step may be different from the processing unit that performs the thermal decomposition step. For example, one thermal decomposition step may be performed using two processing units.

[0248] Figure 16 is a left side view showing the configuration of the left side of the substrate processing apparatus 1 of the modified embodiment. Note that components identical to those in the embodiment are denoted by the same reference numerals, and detailed explanations are omitted.

[0249] The processing block 7 comprises processing units 11a, 11b, 11c, and 11d.

[0250] The processing unit 11a includes a substrate holding unit 13, a rotary drive unit 17, and supply units 21a and 21b. The processing unit 11a performs a processing liquid supply process and a coating process.

[0251] The processing unit 11b includes a substrate holding section 13 and an irradiation section 31. The processing unit 11b performs a curing process.

[0252] The processing unit 11c includes a heating section 61. The heating section 61 heats the substrate W. The heating section 61 includes a hot plate 62 and a heater 63. The hot plate 62 extends horizontally. In plan view, the hot plate 62 is approximately the same size as the substrate W. The substrate W is placed on the hot plate 62. The hot plate 62 supports the substrate W in a horizontal position. The heater 63 is attached to the hot plate 62. The heater 63 heats the substrate W on the hot plate 62. The processing unit 11c performs a thermal decomposition process. More specifically, the processing unit 11c performs a first step.

[0253] The processing unit 11d comprises a substrate housing 71, a substrate support section 72, and a heating section 73. The substrate W is housed inside the substrate housing 71. The substrate housing 71 has, for example, a cylindrical shape. The substrate housing 71 has, for example, a tube shape. The substrate housing 71 allows ultraviolet light to pass through. The substrate housing 71 is made of, for example, quartz glass. The substrate support section 72 is installed inside the substrate housing 71. The substrate support section 72 is, for example, supported by the substrate housing 71. The substrate support section 72 supports the substrate W in a horizontal position. The heating section 73 is installed outside the substrate housing 71. The heating section 73 is arranged around the substrate housing 71. The heating section 73 irradiates, for example, infrared light. The infrared light passes through the substrate housing 71. The heating section 73 irradiates, for example, the entire substrate W with infrared light. The heating unit 73 irradiates, for example, the drying auxiliary liquid F on the substrate W with infrared rays. The heating unit 73 irradiates, for example, the solidified film H on the substrate W with infrared rays. The heating unit 73 is, for example, a lamp heater. In the processing unit 11d, a thermal decomposition process is performed. More specifically, in the processing unit 11d, a second process is performed.

[0254] Although not shown in the diagram, the transport mechanism 8 is configured to access processing units 11a, 11b, 11c, and 11d.

[0255] An example of the operation of the substrate processing apparatus 1 will be described. First, the transport mechanism 8 transports the substrate W to the processing unit 11a. The transport mechanism 8 then passes the substrate W to the substrate holding section 13 of the processing unit 11a. The processing unit 11a performs a processing liquid supply process and a coating process on the substrate W. The supply section 21a supplies the processing liquid L to the substrate W. After that, the supply section 21b applies the drying auxiliary liquid F to the substrate W.

[0256] Next, the transport mechanism 8 transports the substrate W from the processing unit 11a to the processing unit 11b. The transport mechanism 8 takes the substrate W from the substrate holding section 13 of the processing unit 11a. The transport mechanism 8 passes the substrate W to the substrate holding section 13 of the processing unit 11b. The processing unit 11b performs a curing process on the substrate W. The irradiation section 31 irradiates ultraviolet light onto the drying aid liquid F on the substrate W. A solidified film H is formed on the substrate W.

[0257] Next, the transport mechanism 8 transports the substrate W from the processing unit 11b to the processing unit 11c. The transport mechanism 8 takes the substrate W from the substrate holding section 13 of the processing unit 11b. The transport mechanism 8 places the substrate W on the hot plate 62 of the processing unit 11c. The processing unit 11c performs a thermal decomposition process on the substrate W. For example, the processing unit 11c performs the first step on the substrate W. The heating section 61 (specifically, the heater 63) heats the substrate W to a first temperature. The drying aid liquid F remaining on the substrate W is removed from the substrate W.

[0258] Next, the transport mechanism 8 transports the substrate W from the processing unit 11c to the processing unit 11d. The transport mechanism 8 takes the substrate W from the hot plate 62 of the processing unit 11c. The transport mechanism 8 passes the substrate W to the substrate support section 72 of the processing unit 11d. The processing unit 11d performs a thermal decomposition process on the substrate W. For example, the processing unit 11d performs a second process on the substrate W. The heating section 73 heats the substrate W to a second temperature. The solidified film H on the substrate W is heated. The solidified film H on the substrate W is thermally decomposed. The substrate W is dried.

[0259] (7) In the curing process of the embodiment, the substrate W was not rotated. However, it is not limited to this. The substrate W may be rotated in the curing process. In the curing process, ultraviolet light may be irradiated onto the drying aid liquid F on the substrate W while the substrate W is being rotated.

[0260] (8) In the thermal decomposition step of the embodiment, the substrate W was not rotated. However, it is not limited to this. In the thermal decomposition step, the substrate W may be rotated. In the thermal decomposition step, the solidified film H on the substrate W may be thermally decomposed while the substrate W is rotated.

[0261] (9) Examples of processing solution L have been described in the embodiments, but are not limited thereto. For example, processing solution L may be a chemical solution. For example, processing solution L may be an etching solution.

[0262] (10) In the processing liquid supply step of the embodiment, one processing liquid L was supplied to the substrate W. However, it is not limited to this. Multiple processing liquids may be supplied to the substrate W in the processing liquid supply step. For example, in the processing liquid supply step, a first processing liquid may be supplied to the substrate W, and then a second processing liquid may be supplied to the substrate W.

[0263] (11) In this embodiment, the treatment liquid supply step was performed before the drying step. However, it is not limited to this. For example, the treatment liquid supply step does not have to be performed before the drying step. For example, the treatment liquid supply step may be omitted.

[0264] (12) In the embodiment, when the drying process is performed, a liquid (e.g., processing liquid L) is present on the substrate W. That is, in the coating process, a drying auxiliary liquid F is supplied to the wet substrate W. However, this is not limited to this. For example, when the drying process is performed, the liquid (e.g., processing liquid L) does not have to be present on the substrate W. For example, in the coating process, a drying auxiliary liquid F may be supplied to the dried substrate W.

[0265] (13) In the embodiment, the pattern P on the substrate W may be formed on the substrate W before the substrate processing method is performed, for example. Alternatively, the pattern P may be formed on the substrate W in the processing liquid supply step, for example.

[0266] (14) The embodiments and each modified embodiment described in (1) to (13) above may be further modified as appropriate by substituting or combining each component with the components of other modified embodiments. [Explanation of Symbols]

[0267] 1 ... Substrate processing equipment 10 ... Control Unit 11, 11a, 11b, 11c, 11d ... Processing units 13... Board holding part 21a… Supply unit (processing liquid supply unit) 21b... Supply section (drying auxiliary liquid supply section) 31... Irradiation area 41, 61, 73 … heating section F … Drying auxiliary liquid G…Liquid film H…solidified film L... Processing liquid W… Circuit board WS… Surface of the substrate WS1 ... Top surface of the circuit board P... Pattern A... protruding part

Claims

1. A substrate drying method for drying a substrate on which a pattern has been formed, A coating step of applying a drying aid solution containing an ultraviolet-curable material to the substrate, A curing step in which ultraviolet light is irradiated onto the drying aid liquid on the substrate to form a solidified film on the substrate, A thermal decomposition step is performed by heating the solidified film to thermally decompose the solidified film and dry the substrate. Equipped with, The boiling point of the drying aid is lower than the thermal decomposition temperature of the solidified film. Substrate drying method.

2. A substrate drying method for drying a substrate on which a pattern has been formed, A coating step of applying a drying aid solution containing an ultraviolet-curable material to the substrate, A curing step in which ultraviolet light is irradiated onto the drying aid liquid on the substrate to form a solidified film on the substrate, A thermal decomposition step is performed by heating the solidified film to thermally decompose the solidified film and dry the substrate. Equipped with, The boiling point of the UV-curable material is lower than the thermal decomposition temperature of the solidified film. Substrate drying method.

3. A substrate drying method for drying a substrate on which a pattern has been formed, A coating step of applying a drying aid solution containing an ultraviolet-curable material to the substrate, A curing step in which ultraviolet light is irradiated onto the drying aid liquid on the substrate to form a solidified film on the substrate, A thermal decomposition step is performed by heating the solidified film to thermally decompose the solidified film and dry the substrate. Equipped with, The thermal decomposition process comprises a first step of heating the substrate at a first temperature and a second step of heating the solidified film at a second temperature higher than the first temperature. Substrate drying method.

4. In the substrate drying method according to Claim 3, The first temperature is below the thermal decomposition temperature of the solidified film. Substrate drying method.

5. In the substrate drying method according to claim 3 or 4, The first temperature is above the boiling point of the drying aid. Substrate drying method.

6. In the substrate drying method according to any one of claims 3 to 5, The first temperature is above the boiling point of the UV-curable material. Substrate drying method.

7. In the substrate drying method according to any one of claims 3 to 6, The second temperature is equal to or greater than the thermal decomposition temperature of the solidified film. Substrate drying method.

8. In the substrate drying method according to any one of claims 3 to 7, The boiling point of the drying aid is lower than the thermal decomposition temperature of the solidified film. Substrate drying method.

9. In the substrate drying method according to any one of claims 1 and 3 to 8, The boiling point of the UV-curable material is lower than the thermal decomposition temperature of the solidified film. Substrate drying method.

10. In the substrate drying method according to any one of claims 1 to 9, The solidified film is a thermal decomposition method for drying substrates.

11. In the substrate drying method according to any one of claims 1 to 10, In the thermal decomposition step, the solidified film is heated at a temperature equal to or greater than the thermal decomposition temperature of the solidified film in this substrate drying method.

12. In the substrate drying method according to any one of claims 1 to 11, In the thermal decomposition step, the solidified film is thermally decomposed, thereby removing the solidified film from the substrate in a substrate drying method.

13. In the substrate drying method according to any one of claims 1 to 12, In the thermal decomposition step, the solidified film is gasified.

14. In the substrate drying method according to any one of claims 1 to 13, In the thermal decomposition step, the solidified film is broken down into a plurality of particles, and the particles float away from the substrate in a substrate drying method.

15. In the substrate drying method according to any one of claims 1 to 14, In the thermal decomposition step, the solidified film is removed from the substrate without melting in the substrate drying method.

16. In the substrate drying method according to any one of claims 1 to 15, In the curing process, the UV-curable material becomes a polymer. The solidified film comprises the polymer, A substrate drying method in which the polymer is thermally decomposed in the thermal decomposition step.

17. In the substrate drying method according to any one of claims 1 to 16, The UV-curable material is a liquid substrate drying method.

18. In the substrate drying method according to any one of claims 1 to 17, The UV-curable material is a substrate drying method that does not contain polymers.

19. In the substrate drying method according to any one of claims 1 to 18, The aforementioned UV-curable material is isobornyl acrylate, and the substrate drying method is described above.

20. In the substrate drying method according to any one of claims 1 to 19, The UV-curable material is an isobornyl acrylate monomer, and the substrate drying method is described above.

21. In the substrate drying method according to any one of claims 1 to 20, The aforementioned drying aid is a substrate drying method that does not contain a solvent.

22. In the substrate drying method according to any one of claims 1 to 21, The drying aid solution is a substrate drying method further containing a polymerization initiator.

23. A substrate processing method for processing a substrate on which a pattern has been formed, A process liquid supply step of supplying a processing liquid to the substrate, A drying step of carrying out the substrate drying method according to any one of claims 1 to 22, A substrate processing method comprising the following:

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