Apparatus using reactive oxygen species and method of treatment using reactive oxygen species

Abstract

To provide a treatment device by active oxygen and a treatment method by active oxygen, capable of more efficiently treating a surface of a treatment target by active oxygen.SOLUTION: A treatment device by active oxygen and a treatment method by active oxygen include: an active oxygen feed device including, inside a housing having at least one an opening, a plasma actuator and an ozone degradation device; and conveyance means for a treatment target. The plasma actuator includes first and second electrodes interposing a dielectric body and is configured to apply voltage between the electrodes to generate an induced flow containing ozone. The plasma actuator and the ozone degradation device are arranged so that the induced flow containing active oxygen flows out from the opening, and is arranged so that the induced flow containing the active oxygen is supplied onto a surface of the treatment target conveyed in a direction A by the conveyance means. A flow-out direction vector of the induced flow containing the active oxygen flowing out from the opening to the outside of the housing has a vector component in a direction parallel to a direction B opposite to the direction A.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] This disclosure relates to an apparatus for using reactive oxygen species and a method for treating an object using reactive oxygen species. [Background technology]

[0002] Patent Document 1 discloses a surface treatment apparatus capable of increasing the treatment effect of ultraviolet light and ozone. The surface treatment apparatus is described as having an ultraviolet light generating lamp inside a box-shaped apparatus body, a plate with good ultraviolet light transmittance provided on the corresponding surface of the ultraviolet light lamp, the inside of the apparatus body configured to have an atmosphere with good ultraviolet light transmittance, and an ozone treatment space provided on the underside of the plate. Furthermore, it is described that when the ultraviolet light generating lamp is lit and nitrogen gas or an inert gas is supplied into the apparatus body, or when the apparatus body is evacuated to create an atmosphere with good ultraviolet light transmittance, and ozone is supplied from an ozone supply port, for example, when a sample being transported on a conveyor belt is treated, ultraviolet light of 185 nm and 254 nm generated by the ultraviolet light generating lamp efficiently penetrates the plate, and the sample is treated with ultraviolet light and also with ozone in the ozone treatment space. Furthermore, it is stated that the surface treatment device has an ozone treatment space on the underside of the plate, and that within this ozone treatment space, ozone is oxidized and decomposed by ultraviolet light that has passed through the plate, effectively sterilizing the surface of the sample and preventing unnecessary oxidative decomposition of ozone. [Prior art documents] [Patent Documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 01-025866 [Non-patent literature]

[0004] [Non-Patent Document 1] "Magnetic Field Effect on Photocatalytic Reactions by Semiconductor Titanium Oxide Thin Films" (Journal of the Photographic Society of Japan, 2006, 69, 4, 271-275) [Overview of the project] [Problems that the invention aims to solve]

[0005] When the present inventors examined the surface treatment apparatus described in Patent Document 1, they found that the apparatus had a certain effect on treating the surface of the workpiece. However, when the workpiece was an object such as a cloth or nonwoven fabric, the treatment effect on the internal space in the thickness direction was limited. One aspect of this disclosure aims to provide an apparatus and a method for treating with reactive oxygen species that can exert a sufficient treatment effect not only on the surface but also inside. [Means for solving the problem]

[0006] According to at least one aspect of this disclosure, a treatment apparatus using reactive oxygen species, The system comprises an active oxygen supply device and a conveying means capable of conveying the object to be treated by the active oxygen in at least direction A, The active oxygen supply device comprises a plasma actuator and an ozone decomposition device inside a housing having at least one opening. The plasma actuator is constructed by stacking a first electrode, a dielectric, and a second electrode in that order. The first electrode is an exposed electrode provided on the first surface, which is one of the surfaces of the dielectric. The plasma actuator applies a voltage between the first electrode and the second electrode. This generates a dielectric barrier discharge from the first electrode toward the second electrode, and blows out an induced flow containing ozone from the first electrode in a first direction, which is one direction along the surface of the dielectric. The ozone decomposition device generates reactive oxygen species in the induced flow by decomposing the ozone contained in the induced flow, and the induced flow becomes an induced flow containing reactive oxygen species. The plasma actuator and the ozone decomposition apparatus are arranged such that the induced flow containing the active oxygen flows out of the housing through the opening. The outflow direction vector of the induced flow containing the active oxygen flowing out of the opening to the outside of the housing has a vector component x that is parallel to and in the same direction as direction B, which is opposite to direction A. An active oxygen treatment apparatus is provided, wherein the active oxygen supply device and the conveying means are arranged such that the induced flow containing the active oxygen flowing out of the housing through the opening is supplied to the surface of the object to be treated which is conveyed by the conveying means.

[0007] Furthermore, according to at least one aspect of this disclosure, there is a treatment method for treating an object with reactive oxygen species, The process includes a step of providing an active oxygen supply device and a conveying means capable of conveying the object to be treated by the active oxygen in at least direction A, The active oxygen supply device comprises a plasma actuator and an ozone decomposition device inside a housing having at least one opening. The plasma actuator is constructed by stacking a first electrode, a dielectric, and a second electrode in that order. The first electrode is an exposed electrode provided on the first surface, which is one of the surfaces of the dielectric. The plasma actuator generates a dielectric barrier discharge from the first electrode to the second electrode by applying a voltage between the first electrode and the second electrode, and blows out an induced flow containing ozone from the first electrode in a first direction, which is one direction along the surface of the dielectric. The ozone decomposition device generates reactive oxygen species in the induced flow by decomposing the ozone contained in the induced flow, and the induced flow becomes an induced flow containing reactive oxygen species. The plasma actuator and the ozone decomposition apparatus are arranged such that the induced flow containing the active oxygen flows out of the housing through the opening. The processing method further comprises the step of discharging the induced flow containing the active oxygen from the opening and supplying the induced flow containing the active oxygen to the object to be processed, which is moved in direction A. There is provided a treatment method in which the outflow direction vector of the induced flow containing the active oxygen flowing out from the opening has a vector component x that is parallel to the direction B opposite to the direction A and is directed in the same direction as the direction B.

Advantages of the Invention

[0008] According to one aspect of the present disclosure, an active oxygen treatment apparatus capable of exerting a treatment effect not only on the surface but also reaching the inside can be obtained. Further, according to another aspect of the present disclosure, an active oxygen treatment method capable of exerting a treatment effect not only on the surface but also reaching the inside can be obtained.

Brief Description of the Drawings

[0009] [Figure 1] Schematic cross-sectional view showing the configuration of an active oxygen treatment apparatus according to one aspect of the present disclosure [Figure 2] Schematic cross-sectional view showing the configuration of a plasma actuator according to one aspect of the present disclosure [Figure 3] Explanatory diagram of a plasma actuator according to one aspect of the present disclosure [Figure 4] Dimension explanatory diagram of an active oxygen supply apparatus according to one aspect of the present disclosure [Figure 5] Explanatory diagram of the relative positions of the first electrode and the second electrode [Figure 6] Schematic diagram showing the relationship between the outflow direction vector of the induced flow and the direction A

Embodiments for Carrying Out the Invention

[0010] In the present disclosure, the description of "XX or more and YY or less" or "XX to YY" representing a numerical range means a numerical range including the lower limit and the upper limit which are the endpoints, unless otherwise specified. When the numerical ranges are described stepwise, the upper and lower limits of each numerical range can be arbitrarily combined. In the present disclosure, the "treatment" of the object to be treated by active oxygen includes all treatments achievable by active oxygen, such as surface modification (hydrophilic treatment) of the surface of the object to be treated by active oxygen, sterilization, deodorization, and bleaching. Furthermore, the term "bacteria" as the target of "disinfection" in this disclosure refers to microorganisms, which include fungi, bacteria, single-celled algae, viruses, protozoa, etc., as well as animal or plant cells (including stem cells, dedifferentiated cells, and differentiated cells), tissue cultures, fusion cells obtained by genetic engineering (including hybridomas), dedifferentiated cells, and transformants (microorganisms). Examples of viruses include norovirus, rotavirus, influenza virus, adenovirus, coronavirus, measles virus, rubella virus, hepatitis virus, herpesvirus, and HIV virus. Examples of bacteria include staphylococcus, Escherichia coli, Salmonella, Pseudomonas aeruginosa, Vibrio cholerae, Shigella, Anthrax, Mycobacterium tuberculosis, Clostridium botulinum, Clostridium tetani, and Streptococcus. Examples of fungi include dermatophytes, Aspergillus, and Candida. Therefore, in this disclosure, "disinfection" also includes the inactivation of viruses.

[0011] The following examples illustrate embodiments for implementing this disclosure with reference to the drawings. However, the dimensions, materials, shapes, and relative arrangements of the components described in these embodiments should be appropriately modified depending on the configuration of the member to which the disclosure applies and various conditions. In other words, this disclosure is not intended to limit its scope to the embodiments described below. Furthermore, in the following description, components having the same function may be given the same number in the drawings, and their descriptions may be omitted.

[0012] The inventors speculate that the reason why the treatment effect on the internal space of the workpiece was limited in the surface treatment apparatus described in Patent Document 1 is as follows. In the ozone treatment space of the surface treatment apparatus described in Patent Document 1, it is believed that the ozone present in the ozone treatment space is decomposed by ultraviolet light, generating reactive oxygen species. Here, reactive oxygen species are superoxide anion radicals (·O2). -), a general term for highly reactive oxygen species such as hydroxyl radicals (·OH), can instantly oxidize and decompose bacteria and viruses due to their high reactivity. The sample is then transported on a conveyor belt through an ozone-treated space where reactive oxygen species are generated. In this process, the surface of the sample is treated in a manner similar to sterilization. However, reactive oxygen species are very unstable, and ·OH - The half-life is 10 -6 The half-life of OH is 10 seconds. -9 The reaction time is extremely short, lasting only a few seconds, and the reactive oxygen species are rapidly converted into stable oxygen and water. Therefore, although the reactive oxygen species come into contact with the outer surface of the object being treated, and a certain treatment effect is obtained, it is thought that it is difficult for the reactive oxygen species to penetrate into the interior of the object while maintaining their activity. Based on the above considerations, we recognized that in order to reliably deliver the treatment effect of reactive oxygen species, which have a short lifespan, to the inside of the object to be treated, it is necessary to supply the reactive oxygen species to the object to be treated more actively. Based on this understanding, the inventors conducted investigations and found that, according to the various embodiments of the treatment apparatus described below, it is possible to deliver reactive oxygen species to the inside of the object to be treated while maintaining their treatment capacity. As a result, we found that it is possible to treat the inside of the object to be treated with reactive oxygen species.

[0013] Hereinafter, an apparatus 100 according to one aspect of the present disclosure will be described using Figure 1(a). The apparatus 100 comprises an active oxygen supply device 101 and a device that supplies the object to be processed 104 in the direction of arrow 108 (direction It is equipped with a transport means 109 that can transport to A).

[0014] An active oxygen supply device 101 according to one aspect of the present disclosure comprises an ozone decomposition device 102, an ultraviolet light source 102, and a plasma actuator 103 inside a housing 107 having at least one opening 106. The ultraviolet light source 102, which is an ozone decomposition device, irradiates the induced flow 105 with ultraviolet light, generating reactive oxygen species in the induced flow 105.

[0015] Figure 2 also shows a cross-sectional structure of one embodiment of the plasma actuator 103. This plasma actuator is a so-called dielectric barrier discharge (DBD) plasma actuator (hereinafter sometimes simply referred to as "DBD-PA") in which an exposed electrode (hereinafter also referred to as the "first electrode") 203 with its end face exposed is provided on one surface of the dielectric 201 (hereinafter also referred to as the "first surface"), and a second electrode 205 is provided on the surface opposite to the first surface (hereinafter also referred to as the "second surface"). In Figure 2, 2a, reference numeral 206 is a dielectric substrate for embedding the second electrode 205 within the thickness direction of the plasma actuator so as not to generate induced flow from the end face of the second electrode. The active oxygen supply device 101 also includes a power supply 207 for applying a voltage between the first electrode and the second electrode of the plasma actuator 103.

[0016] In the plasma actuator 103, the first electrode 203 and the second electrode 205, which are electrically insulated by the dielectric 201, are positioned diagonally opposite each other across the dielectric 201 when viewed, for example, in a cross-section in the thickness direction. By applying a voltage from the power supply 207 between these electrodes (between both electrodes), a dielectric barrier discharge is generated from the first electrode 203 to the second electrode 205. Then, plasma 202 is generated from the edge 204 of the first electrode 203 in the direction in which the second electrode extends (arrow 208 in Figure 2), along the exposed portion (the part not covered by the first electrode) 201-1 of the first surface of the dielectric 201. Furthermore, an air intake flow is generated from the space inside the container toward the electrodes. Electrons in the surface plasma 202 collide with oxygen molecules in the air, dissociating them and producing oxygen atoms. The resulting oxygen atoms collide with undissociated oxygen molecules, generating ozone. Therefore, due to the interaction of the jet-like flow from the surface plasma 202 and the air intake flow, an induced flow 105 containing ozone is generated, which flows from the edge 204 of the first electrode 203 along the surface of the dielectric 201 toward the edge 205-1 of the second electrode 205, that is, toward the first direction indicated by arrow 208. The plasma actuator 103 and the ozone decomposition device 102 are arranged so that the induced flow 105 flows out of the housing 107 through the opening 106 and is supplied to the processing surface 104-1 of the workpiece 104.

[0017] In other words, the plasma actuator is constructed by stacking a first electrode 203, a dielectric 201, and a second electrode 205 in that order, with the first electrode 203 being an exposed electrode provided on the first surface of the dielectric 201. The plasma actuator generates a dielectric barrier discharge from the first electrode 203 to the second electrode 205 by applying a voltage between the first electrode 203 and the second electrode 205, thereby blowing out an induced flow from the first electrode 203 in a first direction (the direction of arrow 208 in Figure 2), which is one direction along the first surface of the dielectric 201. More specifically, a dielectric barrier discharge is generated from one edge 204 of the first electrode 203 toward the second electrode 205, and an induced flow 105, which is a unidirectional jet, is ejected from one edge 204 of the first electrode 203 in a first direction (direction of arrow 208 in Figure 2) along the first surface of the dielectric 201. Furthermore, in one cross-section in the thickness direction of the plasma actuator, the second electrode 205 extends in the direction of the induced flow's outflow (first direction). As a result, the first direction of the induced flow 105 This allows for greater directional accuracy.

[0018] More specifically, for example, the plasma actuator has a dielectric 201, and when viewing a cross-section of the plasma actuator in the thickness direction, a first electrode 203 and a second electrode 205 are arranged diagonally opposite each other in the thickness direction of the plasma actuator via the dielectric 201. The first electrode 203 is provided so as to cover a portion of the first surface of the dielectric 201, and the first surface of the dielectric has an exposed portion 201-1 that is not covered by the first electrode 203. Figure 2b shows the plasma actuator viewed through one surface of the dielectric. At least a portion of the exposed portion 201-1 overlaps with the second electrode 205, which is shown by the dashed line. Therefore, the overlap is the region formed by the upper, lower, and right edges of the dashed line showing electrode 205 and the edge portion 204 in Figure 2b. Then, by applying a voltage between the first electrode and the second electrode, an induced flow containing ozone is generated from the edge 204 on the first direction side of the first electrode 203 in the cross-section in the thickness direction (2a in Figure 2), along the exposed portion of the dielectric that overlaps with the second electrode 205.

[0019] The induced flow becomes, for example, a wall jet along the exposed portion 201-1, making it easy to supply high-concentration ozone to a specific location. The length of the induced flow in the direction of the exposed portion 201-1 of the dielectric 201 (i.e., the length from the edge 204 on the first direction side of the first electrode to the edge 205-1 of the second electrode on the first surface of the dielectric) is not particularly limited, but is preferably 0.1 to 50 mm, more preferably 0.5 to 20 mm, and even more preferably 1 to 10 mm. The longer the length of the exposed portion 201-1 in the direction of the induced flow, the longer the plasma 202 extends, and the further the induced flow reaches. On the other hand, if the length of the exposed portion 201-1 in the direction of the induced flow is too long, the distance to the opening 106 becomes longer. Therefore, the above range is preferred.

[0020] As an ozone decomposition device 102, the ultraviolet light source 102 irradiates the induced flow 105 with ultraviolet light, decomposing the ozone in the induced flow 105 and generating reactive oxygen species (hereinafter also referred to as "ROS," where ROS is an abbreviation for Reactive Oxygen Species) in the induced flow. The plasma actuator 103 and the ultraviolet light source 102 are arranged as shown in Figures 1a and 1b, such that the induced flow 105 containing reactive oxygen species flows out of the housing 107 through the opening 106 and is supplied to the treated surface 104-1 of the workpiece 104.

[0021] In Figure 1, 1a, ultraviolet light from the ultraviolet light source 102 also irradiates the surface of the workpiece 104. In this case, even if the ozone in the induced flow 105 is not completely decomposed into reactive oxygen species within the reactive oxygen species supply device, the ozone that reaches the surface of the workpiece 104 is decomposed in situ by the ultraviolet light to become reactive oxygen species, thus improving the processing efficiency.

[0022] However, in the active oxygen supply device according to this disclosure, it is not essential that ultraviolet light from an ultraviolet light source irradiates the workpiece. For example, a plasma actuator configured such that the ultraviolet light source 102 cannot be directly seen from the opening 106, as shown in Figure 1, 1b, is also within the scope of this disclosure. In the plasma actuator according to Figure 1, 1b, as a result of ozone decomposition by ultraviolet light from the ultraviolet light source 102, an induced flow 105 containing active oxygen flows out from the opening 106 and is supplied to the treatment surface 104-1 of the workpiece 104.

[0023] In other words, in an apparatus according to one aspect of the present disclosure, ozone in the induced flow 105 containing ozone from the plasma actuator (plasma generator) 103 of the active oxygen supply device 101 is decomposed by the ozone decomposition device 102. Specifically, for example, by irradiating the induced flow 105 with ultraviolet light from the ultraviolet light source 102, the induced flow 105 contains active oxygen and As a result, the induced flow 105 containing reactive oxygen species flows out of the housing 107 through the opening 106 and is supplied to the treated surface 104-1 of the workpiece 104. As a result, reactive oxygen species can be actively supplied to the region near the treated surface 104-1 of the workpiece 104, specifically to a spatial region (hereinafter also referred to as the "surface region") up to a height of approximately 1 mm from the treated surface 104-1. Furthermore, if the workpiece has internal space, such as fibers, cloth, or foam, reactive oxygen species can also be actively supplied to a spatial boundary region (hereinafter also referred to as the "internal region") approximately 1 mm inward from the treated surface 104-1. Therefore, the generated reactive oxygen species can be supplied to the surface of the object to be treated before they are converted into oxygen and water. As a result, the treated surface 104-1 of the object to be treated 104 is treated more reliably by the reactive oxygen species.

[0024] Figure 5(a) shows a plan view observed from the side of the first electrode 203, assuming that the dielectric 201 of the plasma actuator 103 is transparent. In Figure 5(a), the X-axis is parallel to the direction of the induced flow 105 from the plasma actuator 103 (first direction), and the first direction is the +X direction. The Y-axis is perpendicular to the X-axis, with the direction toward the right in Figure 5(a) being the +Y direction and the direction toward the left being the -Y direction. The first electrode 203 is provided on the first surface of the dielectric 201, covering a portion of the surface of the dielectric 201.

[0025] Furthermore, the plasma actuator may be a so-called three-electrode plasma actuator, wherein a third electrode is provided downstream of the induced flow from the first electrode and on the first surface of the dielectric 201. In this case, for example, an AC voltage can be applied to the first electrode as an AC electrode, and a DC voltage can be applied to the third electrode as a DC electrode. A sliding discharge can also be generated by applying a negative DC voltage to the DC electrode.

[0026] Figure 5b is a perspective view of the plasma actuator 103 from the side of the first electrode 203. As shown in Figure 5b, the -X-direction edge 205-1 of the second electrode 205, which is embedded in the thickness direction of the plasma actuator 103, is located on the -X-direction side than the most +X-direction side of the +X-direction edge 204 of the first electrode 203. In other words, the first electrode 203 and the second electrode 205 overlap by a length of 301 in the X-axis direction.

[0027] The edge 204 on the first direction side of the first electrode is designated as edge A, and the edge 205-1 on the second direction side (-X direction side), which is opposite to the first direction, of the second electrode is designated as edge B. The overlap length 301 between the outermost part of edge A on the first direction side (+X direction side) and edge B may hereafter be referred to as the "overlap amount".

[0028] Plasma is more easily generated when the shortest distance between the first electrode and the second electrode is short. Therefore, it is preferable that the thickness of the dielectric portion of the dielectric 201 that exists between the first electrode 203 and the second electrode 205 is thin enough so as not to cause dielectric breakdown when a voltage is applied to both electrodes. Specifically, for example, when the applied voltage is AC from 100V to 10000V, the thickness of the dielectric portion can be 10μm to 1000μm, preferably 10μm to 200μm. Furthermore, it is preferable that the shortest distance between the first electrode and the second electrode is 200μm or less.

[0029] Preferably, the edge 205-2 of the second electrode 205 on the +X side is located further in the +X direction than the edge 204 of the first electrode 203 on the +X side. By having the second electrode extend further in the +X direction than the edge 204 of the first electrode 203, the directivity of the induced flow 105 in the +X direction can be further enhanced. As shown in Figures 5a and 5b, the second electrode 205 is connected to the first electrode. The electrodes are provided overlapping each other with a dielectric in between, and extend in the +X direction. By applying a voltage between the first electrode 203 and the second electrode 205, a stronger induced flow 105 in the +X direction can be generated from the edge 204 of the first electrode of the plasma actuator 103.

[0030] Furthermore, by irradiating such an induced flow with ultraviolet light from an ultraviolet light source, the ozone in the induced flow is decomposed into reactive oxygen species, and the induced flow contains reactive oxygen species.According to the inventors' studies, the reactive oxygen species contained in such an induced flow have a lifespan that is generally considered to be that of reactive oxygen species (·O2 - Half-life: 10 -6Half-life of OH: 10 seconds -9 It is thought that the reactive oxygen species can maintain their active state for a longer period than a few seconds. This is because the reactive oxygen species in the induced flow are protected within the well-organized flow of the induced flow, and collisions with other reactive species and other molecules in the atmosphere are suppressed, making them less likely to be deactivated.

[0031] As a result, the reactive oxygen species supply device according to this disclosure can more reliably deliver reactive oxygen species to the object being treated. In other words, it can supply reactive oxygen species to the object being treated more actively.

[0032] Furthermore, the conveying means 109 is capable of conveying the workpiece in at least direction A, and conveys the workpiece 104 in the direction of arrow 108 so that an induced flow 105 containing active oxygen, which flows out of the housing 107 from the opening 106, is supplied to the processing surface 104-1 of the workpiece. In other words, the active oxygen supply device 101 and the conveying means 109 are arranged so that the induced flow 105 containing active oxygen, which flows out of the housing 107 from the opening 106, is supplied to the processing surface 104-1 of the workpiece being conveyed by the conveying means 109 in the direction of arrow 108. Furthermore, in the processing apparatus 100, as shown in Figure 6, the outflow direction vector 105a of the induced flow 105 containing active oxygen that flows out of the housing 107 from the opening 106 has a vector component 105x (hereinafter also referred to as vector component x) in a direction parallel to direction B (direction of arrow 108-1), which is opposite to the direction of arrow 108, which is the transport direction A of the object to be processed 104. By setting the outflow direction from the opening of the induced flow 105 and the transport direction of the object to be treated 104 to the above-described relationship, and arranging the active oxygen supply device 101 and the transport means 109 as described above, the treatment effect of active oxygen can be extended to the interior of the object to be treated. The inventors speculate the reason for this as follows: As described above, in the well-ordered flow of the induced flow 105 supplied from the reactive oxygen supply device according to this disclosure, reactive oxygen can maintain an active state for a longer period of time. When such an airflow is blown opposite to the object to be treated, turbulence is generated on the surface of the object to be treated. At this time, it is thought that some of the reactive oxygen will be deactivated. However, since more reactive oxygen is supplied to the surface 104-1 of the object to be treated by the induced flow 105, it is thought that a certain amount of reactive oxygen will enter the interior of the object to be treated by the turbulence while maintaining its active state. As a result, it is thought that the treatment effect inside the object to be treated by reactive oxygen is improved.

[0033] The outflow direction vector is the vector of the induced flow containing active oxygen that flows out of the opening to the outside of the housing, directed from the first electrode 204 toward the dielectric surface 201-1. Typically, the outflow direction vector is the same direction as the first direction. The induced flow containing active oxygen that flows out of the opening to the outside of the housing mainly flows in the first direction and is supplied to the workpiece being transported in direction A by the transport means. The outflow direction vector is determined by the installation angle of the plasma actuator 103.

[0034] The outflow direction vector 105a may be a vector consisting only of the vector component x. Furthermore, when the outflow direction vector 105a is decomposed, the outflow direction vector 105a has a vector component perpendicular to direction A, from the opening 106 to the treated surface 104-1 of the workpiece. It may further include a vector component 105y (hereinafter also referred to as vector component y) in the direction toward x. The ratio of the magnitude of vector component y to vector component x (vector component y / vector component x) is preferably 0.00 to 2.75, and more preferably 0.58 to 2.75. Furthermore, when the outflow direction vector 105a is decomposed, the outflow direction vector 105a further includes a vector component z which is a vector component perpendicular to the vector components x and y. In some cases, this may not be the case. The ratio of the magnitude of vector component z to vector component x (vector component z / vector component x) is preferably 0.00 to 2.75, more preferably 0.00 to 0.58, and even more preferably 0.00. Vector component z, which is a vector component perpendicular to vector components x and y, is either a vector component directed in the depth direction of Figure 6, or a vector component directed in the vertical direction of the paper in Figure 6. When the ratio of the magnitudes of vector components y and z to vector component x is within the above range, the induced flow 105 containing reactive oxygen species can be supplied more efficiently to the surface of the workpiece.

[0035] In order for the outflow direction vector 105a to include the vector component 105x, the angle α between the outflow direction vector and direction A is preferably 0° or more and less than 90°, preferably between 0° and 70°, preferably greater than 0° and 70° or less, and more preferably between 30° and 70°. In particular, by making α greater than 0°, turbulence can be generated more efficiently on the surface of the workpiece by the induced flow and the movement of the workpiece in direction A. In Figure 6, the angle α when the outflow direction vector consists of vector components x and y is represented as the angle between the outflow direction vector and the vector component 105x, which is parallel to the direction of arrow 108-1, which is the opposite direction to the direction of arrow 108, which is the transport direction A of the material to be processed 104. The angle α of the outflow direction vector 105a can be measured as follows. As shown in Figure 2, the induced flow 105 containing ozone is generated from the edge of the first electrode 203 toward the electrode 205 positioned diagonally opposite across the dielectric 201. Since the induced flow 105 propagates along the dielectric 201, the outflow direction vector 105a is in the same direction as the vector from the first electrode 204 toward the surface 201-1 of the dielectric. Therefore, the angle α of the outflow direction vector 105a can be measured by taking a photograph of the installation angle of the plasma actuator 103 from the z direction (not shown) using a dimensional measuring device such as a 3D measuring machine or an image capturing device such as a digital camera, CCD camera, or high-speed camera, and measuring the angle that the dielectric surface 201-1 of the plasma actuator 103 makes with respect to the x-axis, or by directly measuring it with a protractor or digital angle meter.

[0036] Direction of outflow of the induced flow 105 containing reactive oxygen species that flows out of the housing 107 from the opening 106. The outflow velocity to vector 105a is preferably 1 m / s to 100 m / s, and more preferably The speed is 10 m / s to 100 m / s. Furthermore, the material to be processed is transported by the transport means 109. The speed at which an object moves in direction A is preferably 0.001 m / s to 5.000 m / s. Preferably, the speed is between 0.001 m / s and 1.000 m / s. Furthermore, the ratio of the moving speed to the outflow speed is preferably 0.001 to 1.00 It is 0, and more preferably 0.001 to 0.100. When the outflow velocity and the movement speed are within the above range, or when the outflow velocity is within the above range When the ratio of the moving speeds is within the above range, the induced flow supplied from the reactive oxygen species supply device is being treated. Depending on the object, the impact can be forceful, allowing for a more efficient supply of reactive oxygen species to the object being treated. The aforementioned outflow velocity is, for example, in the direction of the induced flow 105 containing ozone (first direction) , the discharge velocity of the induced flow 105 from the plasma actuator 103 (hereinafter referred to as the flow of the induced flow) It can be adjusted by (also called speed).

[0037] The materials constituting the first and second electrodes are not particularly limited, as long as they are highly conductive. For example, metals such as copper, aluminum, stainless steel, gold, silver, and platinum, as well as those plated or vapor-deposited, conductive carbon materials such as carbon black, graphite, and carbon nanotubes, and composite materials obtained by mixing these with resins can be used. The materials constituting the first electrode and the materials constituting the second electrode may be the same or different.

[0038] Among these, from the viewpoint of avoiding electrode corrosion and ensuring uniform discharge, the material constituting the first electrode is preferably aluminum, stainless steel, or silver. For the same reason, the material constituting the second electrode is also preferably aluminum, stainless steel, or silver. Furthermore, the shapes of the first electrode and the second electrode can be flat, wire-shaped, needle-shaped, etc., without any particular limitations. Preferably, the shape of the first electrode is flat. Also preferably, the shape of the second electrode is flat. When at least one of the first electrode and the second electrode is flat, it is preferable that the aspect ratio (length of the long side / length of the short side) of the flat plate is 2 or more.

[0039] In a preferred embodiment, at least one of the first and second electrodes may have a vertex angle of 45° or less, excluding the vertex angle including the edge 204 on the first direction side of the first electrode (i.e., the electrode is pointed), but is not limited to this. In the drawings, the case where the vertex angles of both the first and second electrodes, excluding the vertex angle including the edge 204, are both 90°, but embodiments in which the vertex angles excluding the vertex angle including the edge 204 exceed 45° are also included in this disclosure.

[0040] The dielectric material is not particularly limited as long as it has high electrical insulation properties. For example, resins such as polyimide, polyester, fluororesin, silicone resin, acrylic resin, and phenolic resin, glass, ceramics, and composite materials made by mixing these with resins can be used. Among these, ceramics or glass are preferred as the dielectric material because they are less likely to cause fire spread even if current leaks.

[0041] The overlap between the edge A of the first electrode and the edge B of the second electrode is preferably -100 μm to +1000 μm in the X-axis direction when viewed from the top of the cross-sectional view, with the overlap length being considered positive, and more preferably 0 μm to +200 μm, and even more preferably 0 μm (Figure 3). That is, if the case where edge B is located on the opposite side of the induced flow blowout direction from edge A is considered positive, the distance between edge A and edge B in the direction along the dielectric surface (X-axis direction) is preferably -100 μm to +1000 μm, more preferably 0 μm to +200 μm, and even more preferably 0 μm.

[0042] There are no particular limitations on the thickness of the electrodes for both the first and second electrodes, but they can be between 10 μm and 1000 μm. If the thickness is 10 μm or more, the resistance decreases and plasma generation becomes easier. If the thickness is 1000 μm or less, electric field concentration becomes more likely, which also makes plasma generation easier. The width of the electrodes is not particularly limited for both the first and second electrodes, but it can be 1000 μm or more.

[0043] Furthermore, if the edge of the second electrode is exposed, plasma may be generated from the edge of the second electrode, potentially creating an induced flow in the opposite direction to the induced flow 105 originating from the first electrode. In the active oxygen supply device according to this embodiment, it is preferable to keep the ozone concentration in the internal space of the active oxygen supply device, other than the surface region of the workpiece, as low as possible. It is also preferable not to generate gas flow in the container that would disturb the flow of the induced flow 105. Therefore, it is preferable not to generate an induced flow originating from the second electrode. Accordingly, it is preferable to cover the second electrode 205 with a dielectric such as the dielectric substrate 206 or embed it in the dielectric 201, as shown in Figures 2(a) and 5, to prevent the generation of plasma from the edge of the second electrode.

[0044] The second electrode only needs to be embedded to the extent that it prevents the generation of plasma from its edges. For example, a portion of the surface of the second electrode may be exposed, and the exposed surface of the second electrode and the dielectric substrate 206 or dielectric 201 may form the same plane. Preferably, the edges of the second electrode are covered with the dielectric substrate 206 or dielectric 201. Therefore, for example, the plasma actuator is preferably an SDBD (single dielectric barrier discharge) plasma actuator.

[0045] The induced flow 105 containing high-concentration ozone flows in a jet-like direction due to surface plasma from the edge 204 of the first electrode 203 along the exposed portion 201-1 of the first surface of the dielectric 201, that is, in the direction from the edge 204 of the first electrode 203 along the exposed portion 201-1 of the first surface of the dielectric. This induced flow is a gas flow containing high-concentration ozone with a velocity of several m / s to several tens of m / s. The voltage applied between the first electrode 203 and the second electrode 205 of the plasma actuator is not particularly limited as long as it can generate plasma in the plasma actuator. It may be a DC voltage or an AC voltage, but an AC voltage is preferred. Furthermore, it is also preferred that the voltage be a pulse voltage.

[0046] Furthermore, the amplitude and frequency of the voltage can be appropriately set to adjust the flow velocity of the induced flow and the ozone concentration in the induced flow. In this case, it is preferable to appropriately select the settings from the viewpoint of generating an ozone concentration in the induced flow that is necessary to produce an effective reactive oxygen concentration or amount of effective reactive oxygen according to the purpose of treatment, and supplying the generated reactive oxygen to the surface area of ​​the object to be treated while maintaining an effective reactive oxygen concentration or amount of effective reactive oxygen according to the purpose of treatment. For example, the amplitude of the voltage can be 1kV to 100kV. Furthermore, the frequency of the voltage can preferably be 1kHz or higher, and more preferably 10kHz to 100kHz.

[0047] When the voltage is an AC voltage, the waveform of the AC voltage is not particularly limited, and a sine wave, square wave, triangular wave, etc., can be used, but a square wave is preferable from the viewpoint of the speed of the voltage rise. The duty cycle of the voltage can also be appropriately selected, but a fast voltage rise is preferred. Preferably, the voltage is applied such that the voltage rise from the bottom to the peak of the wavelength amplitude is 400,000 V / sec or more. Furthermore, it is preferable that the value obtained by dividing the amplitude of the voltage applied between the first electrode 203 and the second electrode 205 by the thickness of the dielectric 201 (voltage / thickness) be 10kV / mm or more.

[0048] <Ozone decomposition device> The reactive oxygen species supply device includes an ozone decomposition device 102. The ozone decomposition device decomposes the ozone contained in the induced flow, generating reactive oxygen species in the induced flow. An example of an ozone decomposition device is one that acts on the ozone contained in the induced flow and decomposes it. Preferably, the ozone decomposition device is one that can decompose ozone without disturbing the flow of the induced flow. An ozone decomposition device uses ultraviolet light to irradiate an induced flow, generating reactive oxygen species within the flow. The ozone decomposition device is preferably at least one device selected from the group consisting of a light source, a heating device that heats the induced flow and generates active oxygen in the induced flow, and a humidifying device that humidifies the induced flow and generates active oxygen in the induced flow. The ozone decomposition device may be a combination of these. For example, it may be a device that heats the induced flow while irradiating it with ultraviolet light, or a device that humidifies the inside of the housing while irradiating the induced flow with ultraviolet light and heating the induced flow. The ozone decomposition device is more preferably an ultraviolet light source. Each device is described below.

[0049] <Ultraviolet light source and ultraviolet light> The ultraviolet light source is not particularly limited as long as it can irradiate ultraviolet light capable of exciting ozone and generating reactive oxygen species. Furthermore, the ultraviolet light source is not particularly limited as long as it has the wavelength and intensity of ultraviolet light necessary to excite ozone and obtain the effective reactive oxygen species concentration or amount of effective reactive oxygen species according to the purpose of the treatment. For example, since the peak value of the light absorption spectrum of ozone is 260 nm, the peak wavelength of the ultraviolet light is preferably 220 nm to 310 nm, more preferably 253 nm to 285 nm, and even more preferably 253 nm to 266 nm. Specific ultraviolet light sources that can be used include low-pressure mercury lamps, which consist of mercury sealed in quartz glass along with an inert gas such as argon or neon, cold cathode ultraviolet lamps (UV-CCL), and ultraviolet LEDs. For low-pressure mercury lamps and cold cathode ultraviolet lamps, the wavelength should be selected from around 254 nm. On the other hand, for ultraviolet LEDs, the wavelength should be selected from around 265 nm, 275 nm, or 280 nm from the standpoint of output performance.

[0050] <Heating device> The heating device 102 is not particularly limited as long as it can provide thermal energy capable of exciting the ozone in the induced flow and generating reactive oxygen species. Since the thermal decomposition of ozone begins at around 100°C, a device capable of heating the induced flow to 120°C is preferred. On the other hand, temperatures above 120°C may cause thermal degradation such as melting or decomposition of the material being treated, so temperatures below 200°C are preferred.

[0051] The heating device is not particularly limited; for example, ceramic heaters, cartridge heaters, sheathed heaters, electric heaters, oil heaters, etc., can be used. In the case of a device that includes a metal heating element, the heating element is preferably made of a material with excellent oxidation resistance, such as a nichrome alloy or tungsten. A cartridge heater is preferred.

[0052] <humidifier> The humidifier 102 is not particularly limited as long as it humidifies the inside of the enclosure, contains water in the induced flow, and generates reactive oxygen species in the induced flow by decomposing ozone in the induced flow with water. Here, humidification means supplying moisture to the object, and the form of the moisture is not particularly limited and may be at least one selected from the group consisting of gas, liquid and solid. Furthermore, any known water can be used as the water supplied, and it may also contain substances other than water.

[0053] There are no particular limitations on the type of humidifier; for example, evaporative humidifiers and mist humidifiers can be used. To avoid increasing humidity near the plasma actuator, it is preferable that the humidifier has directionality (hereinafter also simply referred to as directionality) in terms of the direction in which moisture is supplied. By having directionality, the humidifier can efficiently humidify the area near the induced flow and the surface of the workpiece without increasing humidity near the plasma actuator. To give a humidifier directionality, known methods can be suitably used. For example, a method of generating airflow by installing a fan and transferring moisture in the direction of the airflow, or a method of applying appropriate pressure to moisture with an air pump or the like and ejecting the moisture in the desired direction. These are some examples. It is preferable to direct the induced flow in the same direction as the induced flow (first direction) so as not to disturb the flow.

[0054] <Plasma actuator, ozone decomposition device, transport means, and arrangement of the object to be processed> In the active oxygen supply device 101, the position of the plasma actuator 103 that generates an induced flow containing ozone is not particularly limited, as long as it is positioned so that the induced flow 105, irradiated by ultraviolet light from the ultraviolet light source 102, which is an ozone decomposition device, flows out of the housing through an opening and is supplied to the surface of the object to be treated, while maintaining an effective active oxygen concentration or amount according to the purpose of treatment. The same applies when the ozone decomposition device is a heating device or a humidifying device. For example, the plasma actuator and the ozone decomposition device should be arranged so that the induced flow 105 containing the generated reactive oxygen species is supplied to the surface of the object to be treated via the shortest possible route.

[0055] Furthermore, for example, the plasma actuator may be positioned such that the treated surface 104-1 of the workpiece is included on an extension line extending from the edge of the first electrode 203 on the first direction side of the plasma actuator along the first surface (exposed portion 201-1) of the dielectric. For example, it is preferable that this extension line is in contact with the treated surface 104-1. Furthermore, it is preferable that the extension line from the edge of the first electrode 203 of the plasma actuator on the first direction side, along the first surface of the dielectric (same as the +X direction), is directed toward the opening. This makes it easier for the induced flow to flow out of the housing through the opening.

[0056] Furthermore, when the opening of the active oxygen supply device is oriented vertically downward, the narrow angle between the extension line 201-1-1 extending from the edge of the first electrode of the plasma actuator along the exposed portion 201-1 of the first surface of the dielectric and the horizontal plane (a plane perpendicular to the vertical direction) is defined as α (hereinafter also referred to as the plasma actuator incidence angle or PA incidence angle; see Figure 4). The narrow angle α is not particularly limited as long as it is an angle at which induced flow can be actively supplied to the surface region of the object to be treated while maintaining the amount of active oxygen or effective active oxygen according to the purpose of the treatment, or an angle at which treatment can be performed by active oxygen. However, it is preferably greater than 0° and less than or equal to 90°, and more preferably between 30° and 70°. By arranging the plasma actuator and the ozone decomposition device as described above, an induced flow containing active oxygen with a certain flow velocity can be locally supplied to a region near the surface of the object to be treated, or the object can be treated with active oxygen. Furthermore, the induced flow that flows out from the opening flows along the surface of the object to be treated, and the portion of the surface of the object to be treated other than the portion opposite the opening is also exposed to the induced flow containing active oxygen. As a result, a wider area of ​​the surface 104-1 to be treated can be treated with active oxygen.

[0057] Furthermore, the plasma actuator is located on the extension of the first direction (the direction in which the induced flow is blown out). It is preferable to arrange the equipment so that the treated surface 104-1 of the workpiece is included.

[0058] The ozone decomposition apparatus is not particularly limited as long as it generates active oxygen in the induced flow and is arranged in such a way that it can perform treatment on the surface of the object to be treated while maintaining an effective active oxygen concentration or amount appropriate to the purpose of treatment. As described above, an induced flow containing ozone is actively supplied to the region near the surface of the object being treated. Furthermore, if the ozone decomposition device is an ultraviolet light source, reactive oxygen species can be generated in the induced flow by irradiating it with ultraviolet light. Therefore, by irradiating the induced flow with ultraviolet light, ozone is excited, and an induced flow containing reactive oxygen species can be actively supplied to the surface of the object being treated, and the concentration or amount of reactive oxygen species on the surface of the object being treated can be significantly increased. The relative positions of the ozone decomposition device and the plasma actuator are not particularly limited, as long as they are positioned such that reactive oxygen species are generated in the induced flow and that the surface of the object to be treated can be processed while maintaining an effective reactive oxygen species concentration or amount appropriate to the purpose of the treatment.

[0059] Furthermore, the distance between the ozone decomposition device and the plasma actuator varies depending on the purpose of the treatment, so it cannot be specified in general terms. For example, it is preferable that the distance between the dielectric of the plasma actuator and the surface facing the ozone decomposition device be 10 mm or less, and more preferably 4 mm or less. However, it is not necessary to place the plasma actuator within approximately 10 mm of the ozone decomposition device, and as long as the reactive oxygen species in the induced flow can be brought to an effective concentration according to the purpose of the treatment in relation to the elements that can decompose ozone, such as the irradiance and wavelength of ultraviolet light described later, the distance between the ozone decomposition device and the plasma actuator is not particularly limited. Furthermore, it is also preferable to provide a means of movement to at least one of the ozone decomposition device and the plasma actuator, so that at least one of the ozone decomposition device and the plasma actuator can be moved to ensure a uniform degree of ozone decomposition.

[0060] The relative positions of the reactive oxygen supply device and the conveying means should be such that at least one of them is positioned so that reactive oxygen is generated in the induced flow, and the surface of the object to be treated, conveyed by the conveying means, is exposed to the induced flow, which maintains an effective reactive oxygen concentration or amount of effective reactive oxygen according to the purpose of treatment.

[0061] Furthermore, if the ozone decomposition device is an ultraviolet light source, the ultraviolet light source may be positioned so that ultraviolet rays can irradiate the surface of the object to be treated, or it may be positioned so that ultraviolet rays cannot irradiate the surface of the object to be treated. Even if ultraviolet rays from the ultraviolet light source cannot irradiate the surface of the object to be treated, with the treatment device using active oxygen according to this embodiment, treatment is possible by exposing the surface to be treated to active oxygen in the induced flow. Similarly, if the ozone decomposition device is a heating device, the heating device may be positioned to heat the surface of the object to be processed, or it may be positioned to not heat the surface of the object to be processed. Furthermore, in sterilization treatment using ultraviolet light, only the surface irradiated with ultraviolet light is sterilized. However, in sterilization treatment using the reactive oxygen species supply device according to this disclosure, bacteria present in positions that can be reached by reactive oxygen species can be sterilized. Therefore, for example, even bacteria present between fibers, which are difficult to sterilize with external ultraviolet irradiation, can be sterilized.

[0062] On the other hand, if ultraviolet light from an ultraviolet light source is positioned to irradiate the surface of the object to be treated, which is placed outside the enclosure, through an opening, undecomposed ozone present in the induced flow can be decomposed in situ on the surface to be treated, generating reactive oxygen species on the surface. As a result, the degree and efficiency of the treatment can be further improved. In this case, the irradiance of ultraviolet light on the surface of the object to be treated or the irradiance of ultraviolet light at the opening is not particularly limited, but for example, even on the surface of the object to be treated or at the opening, induced flow It is preferable to set the ultraviolet irradiance to a level that can decompose the ozone contained in the irradiance, generate reactive oxygen species in the induced flow, and produce an effective reactive oxygen species concentration or amount according to the purpose of the treatment. Specifically, for example, as a concrete example of the ultraviolet irradiance on the surface of the object to be treated or the ultraviolet irradiance at the opening, it is preferably 40 μW / cm2 or more, more preferably 100 μW / cm2 or more, even more preferably 400 μW / cm2 or more, and particularly preferably 1000 μW / cm2 or more. The upper limit of the irradiance is not particularly limited, but for example it can be 10000 μW / cm2 or less. That is, a preferred range is, for example, 40 μW / cm2 or more and 10000 μW / cm2 or less.

[0063] Furthermore, the distance between the ozone decomposition device and the surface of the object to be treated varies depending on the purpose of the treatment, so it cannot be specified in general terms. However, it is preferable to set the distance to 10 mm or less, and it is even more preferable to arrange the ozone decomposition device and the transport means so that the distance is 4 mm or less. However, it is not necessary to place the object to be treated so that the surface of the object to be treated is within about 10 mm of the ozone decomposition device. As long as the amount of active oxygen in the induced stream can be set to an effective concentration according to the purpose of the treatment in relation to elements that can decompose ozone, such as the intensity of ultraviolet light, the distance between the ozone decomposition device and the object to be treated is not particularly limited. Furthermore, in the plasma actuator, the amount of ozone generated per unit time when the ozone in the induced flow is not decomposed by an ozone decomposition device is preferably, for example, 8 μg / min or more. More preferably, it is 15 μg / min or more. There is no particular upper limit to the amount of ozone generated, but for example, it is 1000 μg / min or less. That is, a preferred range is 8 μg / min or more and 1000 μg / min or less. The induced flow velocity should be such that it can actively supply the generated reactive oxygen species to the surface region of the object being treated while maintaining an effective reactive oxygen species concentration or amount appropriate to the purpose of the treatment. For example, as mentioned above, it should be around 0.01 m / s to 100 m / s. As described above, the ozone concentration in the induced flow generated by the plasma actuator, as well as the flow velocity of the induced flow, can be controlled by the thickness and material of the electrodes and dielectric, the type of voltage applied, its amplitude, and frequency.

[0064] <Enclosure and opening> The reactive oxygen species supply device comprises a housing 107 having at least one opening 106, and inside the housing It is equipped with an ozone decomposition device 102 and a plasma actuator 103 located in the section. The opening allows the induced flow 105 generated from the plasma actuator 103 to exit the housing 107. There are no particular restrictions as long as it is in a manner that allows it to be released. The size of the opening, the position of the opening, The relative position between the opening and the conveying means is such that, for example, the generated reactive oxygen species are processed according to the purpose of the treatment. The material to be processed is transported by a transport means while maintaining the effective reactive oxygen species concentration or amount of effective reactive oxygen species. It can be appropriately selected to allow for active supply to the surface region.

[0065] Furthermore, to more effectively utilize the reactive oxygen species in the induced flow for the intended processing, it is preferable that the plasma actuator be close to the workpiece. Therefore, the plasma actuator should be positioned closer to the opening. This is preferable. On the other hand, to protect the plasma actuator, it is also preferable to position it set back from the opening. For example, it is preferable to position the plasma actuator on the inner wall of the housing such that the edge of the plasma actuator closest to the opening is located 0.5 mm to 1.5 mm from the edge of the opening on the inner wall of the housing.

[0066] <Conveying means> The processing apparatus 100 of this disclosure includes a transport means 109 capable of transporting a workpiece 104 in at least the direction of arrow 108 (direction A). The transport means 109 is not particularly limited as long as it can transport the workpiece 104 and an induced flow 105 containing active oxygen that flows out of the housing 107 is supplied to the processing surface 104-1 of the workpiece. The shape of the transport means, the transport distance over which the transport means transports the workpiece, and the speed at which the workpiece is moved in direction A can be appropriately selected, for example, so that the generated active oxygen can be actively supplied to the surface area of ​​the workpiece while maintaining an effective active oxygen concentration or amount of active active oxygen according to the purpose of processing. Specific transport means include, for example, a conveyor, air transport, magnetic transport, and an articulated robot.

[0067] The conveying means may be capable of conveying the material to be processed in a direction other than direction A before and / or after the material is processed by an induced flow containing active oxygen. The distance over which the material to be processed is transported in direction A by the transport means can be appropriately selected depending on the application, and is not particularly limited as long as an induced flow containing active oxygen is supplied to the material to be processed being transported in direction A.

[0068] <Object to be processed> The shape, material, size, etc., of the object to be treated can be appropriately selected according to the application. Preferably, the object to be treated has fine irregularities on its surface; for example, it is preferable that at least a part of the surface of the object to be treated is made of fibers, cloth, foam, etc. When the induced flow containing active oxygen collides with the surface of the object to be treated as it is transported by the transport means, the active oxygen penetrates the fine irregularities on the surface of the object to be treated, allowing the surface of the object to be treated more thoroughly. The objects to be processed by the conveying means may be one or more, and if there are multiple objects to be processed, the multiple objects may be transported continuously by the conveying means.

[0069] The active oxygen supply device disclosed herein can be used not only for disinfecting objects to be treated, but also for a wide range of applications that involve supplying active oxygen to objects to be treated. For example, the active oxygen supply device disclosed herein can be used for deodorizing objects, bleaching objects, and hydrophilizing surfaces of objects to be treated. Furthermore, the treatment apparatus using active oxygen described herein can be used not only for disinfecting objects to be treated, but also for other purposes such as deodorizing objects, bleaching objects, and surface treatments to make objects hydrophilic.

[0070] Furthermore, this disclosure is, A treatment method for treating an object with reactive oxygen species, The process includes a step of providing an active oxygen supply device and a conveying means capable of conveying the object to be treated by the active oxygen in at least direction A, The active oxygen supply device comprises a plasma actuator and an ozone decomposition device inside a housing having at least one opening. The plasma actuator is constructed by stacking a first electrode, a dielectric, and a second electrode in that order. The first electrode is an exposed electrode provided on the first surface, which is one of the surfaces of the dielectric. The plasma actuator applies a voltage between the first electrode and the second electrode. This generates a dielectric barrier discharge from the first electrode toward the second electrode, and blows out an induced flow containing ozone from the first electrode in a first direction, which is one direction along the surface of the dielectric. The ozone decomposition device generates reactive oxygen species in the induced flow by decomposing the ozone contained in the induced flow, and the induced flow becomes an induced flow containing reactive oxygen species. The plasma actuator and the ozone decomposition apparatus are arranged such that the induced flow containing the active oxygen flows out of the housing through the opening. The processing method further includes the step of supplying the induced flow containing the active oxygen to the surface of the workpiece moving in direction A by discharging the induced flow containing the active oxygen from the opening, The present invention provides a processing method characterized in that the outflow direction vector of the induced flow containing the reactive oxygen released from the opening has a vector component x in a direction parallel to direction B, which is opposite to direction A.

[0071] In this disclosure, "effective reactive oxygen concentration or amount of effective reactive oxygen" refers to the amount of reactive oxygen necessary to achieve a specific purpose for the object to be treated, such as sterilization, deodorization, bleaching, or hydrophilization. This can be appropriately adjusted according to the purpose, using the electrodes constituting the plasma actuator, the thickness and material of the dielectric, the type, amplitude and frequency of the applied voltage, the degree of ozone decomposition by the ozone decomposition device (ultraviolet intensity and irradiation time, heating temperature and heating time, and humidification moisture content and humidification time), PA incidence angle, etc. [Examples]

[0072] The present disclosure will be described in more detail below using examples, but the embodiments of the present disclosure are not limited thereto.

[0073] <Example 1> 1. Fabrication of a reactive oxygen species supply device A first electrode was formed by attaching an aluminum foil measuring 2.5 mm in length, 15 mm in width, and 100 μm in thickness to the first surface of a glass plate (5 mm in length, 18 mm in width (in the paper depth direction in 2a of Figure 2), using adhesive tape. A second electrode was also formed by attaching an aluminum foil measuring 3 mm in length, 15 mm in width, and 100 μm in thickness to the second surface of the glass plate using adhesive tape, so as to be diagonally opposite to the aluminum foil attached to the first surface. Furthermore, the second surface, including the second electrode, was covered with polyimide tape. In this way, a plasma actuator was fabricated in which the first and second electrodes overlapped by a width of 0.5 mm across the dielectric (glass plate).

[0074] Next, as the housing 107 for the active oxygen supply device 101, a case made of ABS resin was prepared, with a height of 25 mm, a width of 20 mm, a length of 170 mm, and a thickness of 2 mm, and a roughly trapezoidal cross-sectional shape as shown in 1a of Figure 1. The case had an opening 106 on one side with a width of 7 mm and a length of 166 mm. Then, the plasma actuator that had been previously fabricated was fixed to the inner wall of the slanted side portion of the housing 107. Specifically, the plasma actuator 103 was positioned such that the angle α (the same as the PA incidence angle described above) between the extension line 201-1-1 in the direction along the exposed portion 201-1 of the first surface of the dielectric 201 and the intersection point of the treated surface 104-1 of the workpiece was 45°. Furthermore, an ultraviolet lamp 102 (cold cathode ultraviolet lamp, product name: UW / 9F89 / 9, manufactured by Stanley Electric Co., Ltd., cylindrical with a diameter of 9 mm, peak wavelength = 254 nm) was placed inside the housing. The shortest distance (reference numeral 403 in Figure 4) between the ultraviolet lamp 102 and the exposed portion 201-1 of the first surface of the dielectric 201 of the plasma actuator was 2 mm, and the distance (reference numeral 401 in Figure 4) between the ultraviolet light source and the side of the flat plate facing the ultraviolet light source when the flat plate was brought into contact with the opening 106 of the housing 107 was 3 mm. In this way, the activated hydrogen supply device (treatment device using activated oxygen) according to this embodiment was fabricated.

[0075] An illuminance meter (product name: USR-45D spectroradiometer, manufactured by Ushio Inc.) was placed at the opening 106, which serves as the supply port for reactive oxygen species in the reactive oxygen species supply device 101, and the ultraviolet irradiance was measured. From the integral value of the spectrum, the value was 1370 μW / cm². 2 In this case, the plasma actuator was not powered on to avoid being affected by the shielding of ultraviolet rays by ozone generated from the plasma actuator. Since the object to be processed is placed, for example, at the position of the opening 106, the ultraviolet irradiance measured under these conditions was considered to be the ultraviolet irradiance on the surface of the object to be processed.

[0076] Next, in order to calculate the amount of ozone generated from the plasma actuator 103, the active oxygen supply device 101 was placed in a sealed container (not shown) with a volume of 1 liter. The sealed container was provided with a hole that could be sealed with a rubber stopper, allowing the gas inside to be drawn out with a syringe through this hole. A voltage with a sine wave waveform of 2.4 kVpp and a frequency of 80 kHz was applied to the plasma actuator 103, and after 1 minute, 100 ml of gas was collected from the sealed container. The collected gas was drawn into an ozone detection tube (product name: 182SB, manufactured by Komei Rikagaku Kogyo Co., Ltd.), and the measured ozone concentration (PPM) contained in the induced flow from the plasma actuator 103 was measured. Using the measured ozone concentration value, the amount of ozone generated per unit time was calculated using the following formula.

[0077]

number

[0078] As a result, the ozone generation rate per unit time was 39 μg / min. At this time, the UV light source was not powered on to avoid the decomposition of ozone by ultraviolet radiation. Finally, the ozone generation amount when both the plasma actuator 103 and the ultraviolet lamp 102 were operating was measured. The operating conditions of the plasma actuator 103 were the conditions that generated 19 μg / min of ozone when only the plasma actuator 103 was operating. Also, the operating conditions of the ultraviolet lamp 102 were the conditions that achieved an illuminance of 1370 μW / cm 2 at the time when only the ultraviolet lamp 102 was operating. As a result, the ozone generation amount when both the plasma actuator 103 and the ultraviolet lamp 102 were operating was 4 μg / min. It is considered that 15 μg / min, which is the decrease from 19 μg / min, is the amount of ozone that has changed into active oxygen.

[0079] 2-1. Detection test of active oxygen (absorbance of methylene blue) The active oxygen supply device prepared in 1 above was operated, and the presence or absence of active oxygen in the induced flow flowing out from the opening of the housing was confirmed by using the decolorization reaction of methylene blue. Specifically, methylene blue (manufactured by Kanto Chemical Co., Inc., special grade) and distilled water were mixed to prepare a 0.01% methylene blue aqueous solution. 15 ml of the methylene blue aqueous solution was placed in a petri dish (AB4000 manufactured by Eiken Chemical Co., Ltd., cylindrical with a diameter of 88 mm). Then, regarding the liquid surface of the methylene blue aqueous solution in the petri dish as the treated surface 104-1 of the object to be treated, the active oxygen supply device was placed on the petri dish so that the distance 405 in FIG. 4 was 1.4 mm. Next, an AC voltage having a sine wave form of 2.4 kVpp and a frequency of 80 kHz was applied between both electrodes of the plasma actuator, and at the same time, the ultraviolet lamp was lit, and the induced flow flowing out from the opening was supplied to the liquid surface for 30 minutes. The ultraviolet lamp was adjusted so that the illuminance at the position of the liquid surface was 1370 μW / cm when the power was not supplied to the plasma actuator. 2 After the induced flow irradiation, the methylene blue aqueous solution was transferred to a cell, and a spectrophotometer (manufactured by Jasco ​The change in light absorption of methylene blue was measured using V-570. Since methylene blue has strong absorption at a wavelength of 664 nm, the degree of decolorization of methylene blue can be calculated from the change in absorbance at this wavelength. In this test, first, distilled water alone was placed in the reference cell, and a 0.01% methylene blue aqueous solution before irradiation with an induced flow was placed in the sample cell and measured. The absorbance was 2.32 Abs. On the other hand, the absorbance of the methylene blue aqueous solution after irradiation with an induced flow was 0.27 Abs. Therefore, the rate of decrease in absorbance was 88.4% ((2.32 - 0.2 7) / 2.32)×100) was the result.

[0080] 2-2. Treatment (disinfection) test A sterilization test for E. coli was conducted using the reactive oxygen species supply device 101 according to the following procedure. All instruments used in this sterilization test were sterilized using autoclave-assisted high-pressure steam sterilization. The sterilization test was also conducted in a clean bench. First, E. coli (product name "KWIK-STIK (Escherichia coli ATCC8739)", Microbiologics) was placed in an Erlenmeyer flask containing LB medium (a mixture of 2g tryptone (product name "Bacto Tryptone", Life Technologies Japan), 1g yeast extract (product name "Yeast Extract", Life Technologies Japan), and 1g sodium chloride (product name "Special Grade Sodium Chloride", Kishida Chemical Co., Ltd.) with 200mL of distilled water). Next, the Erlenmeyer flask was cultured at 37°C for 48 hours at 80rpm using a shaking incubator (Takasaki Scientific Instruments Co., Ltd. TA-25R-3F) to obtain an E. coli solution. The number of viable cells in the obtained E. coli solution was 9.2 × 10⁶. 9 The concentration was (CFU / mL). Sample No. 1 was prepared by dropping 0.010 ml of the cultured bacterial suspension onto only one side of a piece of gauze (product name: Hakujuji Gauze, manufactured by Hakujuji Co., Ltd.) cut to a size of 3 cm in length and 1 cm in width, using a micropipette. Sample No. 2 was prepared in the same manner.

[0081] Next, sample No. 1 was immersed for 1 hour in a test tube containing 10 ml of buffer solution (product name: Gibco PBS; Thermo Fisher Scientific). To prevent the bacterial solution on the gauze from drying out, the time between dropping the bacterial solution onto the gauze and immersion in the buffer solution was set to 60 seconds.

[0082] Next, 1 ml of the buffer solution (hereinafter also referred to as "1 / 1 solution") after immersing sample No. 1 was placed in a test tube containing 9 ml of buffer solution to prepare a diluent (hereinafter referred to as "1 / 10 diluent"). Diluents of 1 / 100, 1 / 1000, and 1 / 10000 were prepared in the same manner, except that the dilution ratio with buffer solution was changed.

[0083] Next, 0.050 ml was taken from the 1 / 1 solution and spread onto a stamp medium (Petan Check 25PT1025, manufactured by Eiken Kasei Co., Ltd.). This procedure was repeated to create two stamp mediums spread with the 1 / 1 solution. The two stamp mediums were placed in a constant temperature bath (product name: IS600; manufactured by Yamato Kagaku Co., Ltd.) and incubated at 37°C for 24 hours. The number of colonies that grew on the two stamp mediums was counted, and the average value was calculated. To 1 / 10 diluted solution, 1 / 100 diluted solution, 1 / 1000 diluted solution and 1 / 10000 diluted solution Similarly, two smeared stamp media were prepared for each dilution, and cultured. Then, the number of colonies generated for each stamp medium in each dilution was counted, and the average value was calculated. The results are shown in Table 1.

[0084] [Table 1]

[0085] From the results in Table 1 above, the number of colonies when the 1 / 100 dilution was cultured was 54. Therefore, the number of bacteria present in 0.050 ml of the 1 / 1 solution for sample No. 1 is 54 × 10 2 It was found that the value is 5400 (CFU).

[0086] Next, the following procedure was performed on sample No. 2. Sample No. 2 was designated as the object to be treated 104, and it was positioned so that the distance 404 in Figure 4 between the surface of the gauze coated with the bacterial solution and the active oxygen supply device 101 was 1 mm.

[0087] Next, an AC voltage with a sine wave of 2.4 kVpp and a frequency of 80 kHz was applied between both electrodes of the reactive oxygen species supply device, and an ultraviolet lamp was turned on to supply an induced current. The illuminance measured on the exposed surface of the plasma actuator facing the ultraviolet lamp was 1370 μW / cm² without power being supplied to the plasma actuator. 2 I adjusted it so that it would be as follows. With the active oxygen supply device activated, the gauze to be processed was transported at a speed of 0.050 m / s while being processed. The gauze was transported by a conveyor belt (EC200-1000L, manufactured by Shinsei Sangyo Co., Ltd.). The processing was performed in a total of 10 passes, with one pass defined as the state in which the gauze to be processed had finished passing through the opening 106 in 1a of Figure 1. Furthermore, in the processing process using the reactive oxygen species supply device, the time from dropping the bacterial solution onto the gauze to immersion in the buffer solution was set to 60 seconds to prevent the gauze from drying out.

[0088] After processing, sample No. 2 is placed in 10 ml of buffer solution along with the gauze placed at the bottom of the recess. The sample was immersed in a test tube containing Gibco PBS (manufactured by Thermo Fisher Scientific) for 1 hour. Next, 1 ml of the immersed buffer (hereinafter referred to as "1 / 1 solution") was placed in a test tube containing 9 ml of buffer to prepare a dilution (1 / 10 dilution). Dilutions of 1 / 100, 1 / 1000, and 1 / 10000 were prepared in the same manner, except that the dilution ratio with buffer was changed. Next, 0.050 ml was taken from the 1 / 1 solution and spread onto a stamp medium (product name: Petan Check 25 PT1025, manufactured by Eiken Kasei Co., Ltd.). This procedure was repeated to create two stamp media spread with the 1 / 1 solution. The two stamp media were placed in a constant temperature bath (product name: IS600, manufactured by Yamato Kagaku Co., Ltd.) and incubated at 37°C for 24 hours. The number of colonies that developed in each stamp medium containing the 1 / 1 solution was counted, and the average value was calculated. The same procedure was followed for the 1 / 10 dilution, 1 / 100 dilution, 1 / 1000 dilution, and 1 / 10000 dilution. Two smeared stamp media were prepared for each dilution, and cultures were carried out. The number of colonies that grew on each stamp media for each dilution was counted, and the average value was calculated. The results are shown in Table 2 below.

[0089] [Table 2]

[0090] As shown in Table 2, the bacterial count in 0.050 ml of 1 / 1 solution for sample No. 1, which was not treated with the reactive oxygen species supply device, was 5400 (CFU), whereas the bacterial count in the treated sample... The bacterial count in 0.050 ml of 1 / 1 solution No. 2 was 64 (CFU). From this, it was found that a 2-second treatment using the reactive oxygen supply device according to this embodiment achieved a sterilization rate of 98.81% ((5400-64 / 5400)×100). [Explanation of symbols]

[0091] 101: Active oxygen supply device (treatment device using active oxygen), 102: Ultraviolet light source (ultraviolet lamp), 103: Plasma generator (plasma actuator), 104: Workpiece, 104-1: Treatment surface of workpiece, 105: Induced flow, 106: Opening, 107: Housing, 108: Direction of transport of workpiece, 109: Transport means

Claims

1. A treatment device using reactive oxygen species, The system comprises an active oxygen supply device and a conveying means capable of conveying the object to be treated by the active oxygen in at least direction A, The active oxygen supply device comprises a plasma actuator and an ozone decomposition device inside a housing having at least one opening. The plasma actuator is constructed by stacking a first electrode, a dielectric, and a second electrode in this order. The first electrode is an exposed electrode provided on the first surface, which is one of the surfaces of the dielectric. The plasma actuator generates a dielectric barrier discharge from the first electrode to the second electrode by applying a voltage between the first electrode and the second electrode, and blows out an induced flow containing ozone from the first electrode in a first direction, which is one direction along the surface of the dielectric. The ozone decomposition device generates reactive oxygen species in the induced flow by decomposing the ozone contained in the induced flow, and the induced flow becomes an induced flow containing reactive oxygen species. The plasma actuator and the ozone decomposition apparatus are arranged such that the induced flow containing the active oxygen flows out of the housing through the opening. The outflow direction vector of the induced flow containing the active oxygen flowing out of the opening to the outside of the housing has a vector component x that is parallel to and in the same direction as direction B, which is opposite to direction A. An apparatus for processing using reactive oxygen species, characterized in that the reactive oxygen supply device and the conveying means are arranged such that the induced flow containing the reactive oxygen species flowing out of the housing from the opening is supplied to the surface of the object to be processed which is conveyed by the conveying means.

2. When viewing a cross-section in the thickness direction of the plasma actuator, The first electrode and the second electrode are arranged obliquely opposite each other in the thickness direction of the plasma actuator, with the dielectric material in between. The first electrode is provided so as to cover a part of the first surface of the dielectric, The first surface has an exposed portion that is not covered by the first electrode, When the plasma actuator is viewed through from the first electrode side, at least a portion of the exposed part and the second electrode overlap. The treatment apparatus using active oxygen according to claim 1, wherein the induced flow is blown out from the edge of the first electrode on the first direction side in the cross-section in the thickness direction, along the exposed portion of the dielectric that overlaps with the second electrode.

3. The apparatus for using reactive oxygen species according to claim 1 or 2, wherein the outflow direction vector is a vector in the same direction as the first direction.

4. The treatment apparatus using reactive oxygen species according to any one of claims 1 to 3, wherein the angle α between the outflow direction vector and direction A is greater than 0° and 70° or less.

5. The outflow velocity of the induced flow containing the reactive oxygen species in the outflow direction vector is 1 m / s to 100 m / s. The treatment apparatus using active oxygen according to any one of claims 1 to 4, wherein the movement speed of the object to be treated in direction A, conveyed by the conveying means, is 0.001 m / s to 5.000 m / s.

6. The outflow direction vector of the induced flow containing the active oxygen that flows out of the housing from the opening. The treatment apparatus using reactive oxygen species according to claim 5, wherein the ratio of the transfer speed to the outflow rate into the tubing is 0.001 to 1.

000.

7. A treatment method for treating an object with reactive oxygen species, The process includes a step of providing an active oxygen supply device and a conveying means capable of conveying the object to be treated by the active oxygen in at least direction A, The active oxygen supply device comprises a plasma actuator and an ozone decomposition device inside a housing having at least one opening. The plasma actuator is constructed by stacking a first electrode, a dielectric, and a second electrode in this order. The first electrode is an exposed electrode provided on the first surface, which is one of the surfaces of the dielectric. The plasma actuator generates a dielectric barrier discharge from the first electrode to the second electrode by applying a voltage between the first electrode and the second electrode, and blows out an induced flow containing ozone from the first electrode in a first direction, which is one direction along the surface of the dielectric. The ozone decomposition device generates reactive oxygen species in the induced flow by decomposing the ozone contained in the induced flow, and the induced flow becomes an induced flow containing reactive oxygen species. The plasma actuator and the ozone decomposition apparatus are arranged such that the induced flow containing the active oxygen flows out of the housing through the opening. The processing method further includes the step of discharging the induced flow containing the active oxygen from the opening and supplying the induced flow containing the active oxygen to the object to be processed, which is moved in direction A. A processing method characterized in that the outflow direction vector of the induced flow containing the reactive oxygen released from the opening has a vector component x that is parallel to and in the same direction as direction B, which is opposite to direction A.

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