Container storage apparatus

Abstract

[Problem] To provide a container storage apparatus which has a simpler configuration than the conventional container storage apparatuses and can suck a gas that is leaked from a lid of a container. [Solution] Provided is a container storage apparatus 100 provided with a mounting table 20 on which a container 1 having a lid 1c on the side surface thereof is mounted, a purge device 10 for supplying a purge gas into the container 1, and a suction device 30 for sucking a gas leaked from the container 1, in which the mounting table 20 is provided with a bottom surface part 21 on which the container 1 is mounted and a side wall part 23 which extends upward from the bottom surface part and is positioned opposite to the lid of the container mounted on the bottom surface part, the suction device 30 sucks a gas leaked from a side surface having the lid 1c of the container 1 placed thereon through a first opening 50 arranged on the bottom surface part 21 or the side wall part 23, and an upper end 23a of the side wall part 23 is lower than an upper end 1h of the lid 1c of the container 1 mounted on the bottom surface part 21.

Description

container storage device

[0001] The present invention relates to a container storage device.

[0002] Semiconductor manufacturing plants and the like may be provided with a container storage device for temporarily storing containers containing items such as semiconductor wafers (see, for example, Patent Document 1). For example, the container storage device includes a purge device that supplies a purge gas, such as nitrogen gas, into the container. The container has a lid on the side for opening and closing an opening for loading and unloading items, and the purge gas may leak from around the lid. Therefore, the container storage device described in Patent Document 1 includes a suction device that sucks gas leaking from the lid while the purge device is supplying purge gas into the container.

[0003] Patent No. 6607314

[0004] The suction device described in Patent Document 1 is provided facing the lid of each container and has an opening larger than the lid to suck gas leaked from the lid. This not only increases the size of the suction device, but also may complicate the configuration of the container storage device. Therefore, there is a need for a device that can suck gas leaked from the lid with a simpler configuration than conventional devices.

[0005] An object of the present invention is to provide a container storage device that has a simple configuration and is capable of sucking gas leaking from a container lid.

[0006] A container storage device according to one aspect of the present invention is a container storage device comprising: a mounting table on which a container having a lid on its side is placed; a purge device that supplies purge gas to the container; and a suction device that sucks gas leaked from the container, wherein the mounting table comprises a bottom surface on which the container is placed and a side wall portion that extends upward from the bottom surface and faces the lid of the container placed on the bottom surface; the suction device sucks gas that has leaked from the side surface where the lid of the container is located through a first opening provided in the bottom surface or the side wall portion, and the upper end of the side wall portion is lower than the upper end of the lid of the container placed on the bottom surface.

[0007] The container storage device according to the above aspect can be made smaller than conventional suction devices that have openings larger than the container lids. Also, the device can suck gas leaking from around the container lids with a simpler configuration than conventional devices.

[0008] The mounting table may be capable of mounting multiple containers, the bottom surface and the sidewalls may be formed continuously across the multiple containers, and the number of first openings may be fewer than the number of containers that can be mounted on the mounting table. With this configuration, the number of first openings may be fewer than the number of containers that can be mounted on the mounting table. Therefore, the number of components, such as covers covering the first openings and piping connected to the first openings, is reduced, further simplifying the configuration. The sidewalls may be provided to surround all four sides of the multiple containers mounted on the bottom surface. With this configuration, the sidewalls surround the multiple containers collectively, reducing the number of components and further simplifying the configuration. The height of the upper end of the sidewalls may be set in the range of 80 mm to 120 mm from the bottom surface or the bottom of the container. With this configuration, gas leaking from the container can be suctioned while keeping the height of the sidewalls low. The height of the upper end of the sidewalls may be set in the range of one-quarter to one-third of the height of the containers mounted on the bottom surface. With this configuration, even if the container is tilted, the container will hit the side wall portion, preventing the container from falling.

[0009] The first opening may be provided in the bottom portion between the sidewall portion and the container placed on the bottom portion. With this configuration, the first opening is positioned below the lid of the container, allowing gas leaking from around the lid of the container to be efficiently sucked through the first opening. The sidewall portion may be provided to surround the container placed on the bottom portion on all four sides. With this configuration, gas leaking from the container accumulates inside the sidewall portion, preventing the gas from diffusing downward from the container storage device.

[0010] The suction device may have a second opening provided in the bottom portion and a nozzle that discharges gas flowing out from an exhaust port formed in the bottom portion of the container through the second opening above the bottom portion, and the gas discharged from the nozzle may be suctioned through the first opening. With this configuration, the suction device 30 does not suction the inside of the container, thereby preventing negative pressure from building up inside the container. The nozzle may also be located near the first opening. With this configuration, gas leaking from around the container lid and gas discharged from the nozzle inside the container can be suctioned together through the first opening. The mounting table may also include a cover that covers the nozzle and the first opening and guides gas discharged from the nozzle toward the first opening. The cover may have a third opening formed on its upper surface and guide gas flowing in from the third opening toward the first opening. With this configuration, gas discharged from the nozzle can be suctioned from the container through the third opening to the first opening while preventing diffusion of the gas discharged from the nozzle by the cover.

[0011] FIG. 1 is a diagram showing an example of the schematic configuration of a container storage device according to an embodiment; FIG. 2 is a side view of a portion of a container stored in the container storage device; FIG. 3 is a diagram showing a state in which a container is transported to the container storage device; FIG. 4 is a diagram showing an example of a suction device; FIG. 5 is a diagram showing a flow of purge gas showing an example of a cover; FIG. 6 is a flowchart showing an example of a container storage method according to an embodiment; FIG. 7 is a diagram showing a first modified example of a suction device; FIG. 8 is a diagram showing a second modified example of a suction device; FIG. 9 is a diagram showing a schematic representation of the state of gas around the lid of a container in a container storage device according to a comparative example; FIG. 10 is a diagram showing a schematic representation of the state of gas around the lid of a container in the container storage device according to the present embodiment.

[0012] The present invention will be described below through embodiments, but the following embodiments do not limit the scope of the invention according to the claims. Furthermore, not all of the combinations of features described in the embodiments are necessarily essential to the solution of the invention. In the drawings, identical or similar parts may be designated by the same reference numerals, and redundant description may be omitted. The shapes and sizes of elements in the drawings may be exaggerated for clarity, and may differ in size and shape from the actual product. In the following figures, directions in the figures are explained using an XYZ coordinate system. In this XYZ coordinate system, the plane parallel to the horizontal plane is the XY plane. The direction perpendicular to the XY plane is referred to as the Z direction. The X, Y, and Z directions are explained by assuming that the direction indicated by the arrow in the figure is the + direction and the direction opposite to the arrow is the - direction.

[0013] The container storage device 100 is capable of transferring the container 1 from, for example, an overhead transport vehicle 2 that transports the container 1, and is arranged near the ceiling C. The container storage device 100 is fixed in a state in which it is suspended from the ceiling C, for example, by a hanging bracket, and is arranged near the ceiling C. The container storage device 100 is arranged, for example, in a position shifted to the side from directly below the traveling rail (ceiling track) R (see Figure 3) of the overhead transport vehicle 2. The container storage device 100 is, for example, a buffer that temporarily stores the container 1 transported by the overhead transport vehicle 2. The container storage device 100 may also be arranged directly below the traveling rail R.

[0014] FIG. 1 is a diagram illustrating an example of a schematic configuration of a container storage device 100 according to an embodiment. FIG. 2 is a side view of a portion of a container 1 stored in the container storage device 100. FIG. 3 is a diagram illustrating a state in which a container 1 is transported to the container storage device 100. As illustrated in FIG. 1 , the container storage device 100 can store multiple containers 1. The container 1 contains, for example, an article such as a wafer or a reticle used in the manufacture of a semiconductor device. The container 1 is, for example, a front opening unified pod (FOUP), a SMIF pod, or a reticle pod, the interior of which can be purged with a purge gas. Note that the container 1 may be in another form that can be transported by an overhead transport vehicle 2.

[0015] As shown in FIGS. 2 and 3 , the container 1 includes a main body 1a, an opening 1b, a lid 1c, and a flange 1g. The main body 1a includes a positioning recess 1d on the bottom side. The main body 1a also includes a gas inlet 1e and a gas outlet 1f on the bottom side. As an example, the inlet 1e and the outlet 1f are each located near the end of the bottom side of the main body 1a in the X direction. The inlet 1e and the outlet 1f communicate with the inside and outside of the main body 1a, respectively. The inlet 1e is used to introduce a purge gas into the main body 1a. The outlet 1f is used to exhaust gas, including the purge gas, from the main body 1a. The inlet 1e and the outlet 1f may each be provided with a check valve (not shown) to prevent backflow.

[0016] The opening 1b is provided so as to face the horizontal direction (+Y direction). An article such as a wafer is placed inside the container 1 through the opening 1b. For example, the lid 1c is provided to open and close the opening 1b and is detachably attached to the container 1. Even if the lid 1c is attached tightly to the main body 1a, a gap is generated between the main body 1a and the lid 1c, and there is a possibility that purge gas or the like may leak from this gap.

[0017] A flange 1g, for example, is provided on the top of the container 1. When the container 1 is transported by the ceiling transport vehicle 2, the flange 1g is gripped by the ceiling transport vehicle 2 during transport. The container 1 is transported by the ceiling transport vehicle 2 from the container storage device 100 to a processing device (not shown), and then from the processing device to the container storage device 100. This processing device is, for example, a film forming device, a coater / developer, an exposure device, an etching device, etc., and performs various processes during the process of manufacturing a device (e.g., a semiconductor device). The container storage device 100 is, for example, disposed on a transport path along which the container 1 is transported, and is used to temporarily store the container 1.

[0018] As shown in FIG. 3 , the ceiling transport vehicle 2 travels along a traveling rail R by the driving force of a traveling unit 4. The traveling rail R is suspended from a ceiling C of, for example, a clean room or the like by a hanging bracket Ra and is provided near the ceiling C, extending in the X direction. The ceiling transport vehicle 2 includes a main body 3 and a traveling unit 4. The traveling unit 4 includes wheels 4 a, a driving source (not shown) such as an electric rotary motor or a linear motor that drives the wheels 4 a, and an encoder (not shown). The wheels 4 a are disposed so as to roll on a rail surface provided on the inside of the traveling rail R. The encoder detects the number of rotations of the wheels 4 a and outputs the detection result to a control unit (not shown) provided in the main body 3, for example. The control unit controls the driving source based on the detection result of the encoder, thereby controlling the speed of the ceiling transport vehicle 2.

[0019] The upper part of the main body 3 is attached to a connecting part 3a extending downward from the running part 4. The main body 3 is suspended from the running part 4 via the connecting part 3a. The main body 3 is capable of housing a container 1 inside. The main body 3 includes a lateral discharge mechanism 5, a lifting part 6, and a gripping part 7. The lateral discharge mechanism 5 is provided at the upper part of the main body 3. The lateral discharge mechanism 5 switches between a state in which the container 1 is housed within the main body 3 and a state in which the container 1 is discharged to the side. The lateral discharge mechanism 5 includes a base 5a and a lateral discharge part 5b. A rotating part may be provided on the base 5a. This rotating part has an electric motor or the like and is rotatable around the Z direction (vertical direction) as a rotation axis. Rotation of the rotating part rotates the lateral discharge mechanism 5, thereby changing the direction of lateral discharge by the lateral discharge mechanism 5.

[0020] The lateral extension portions 5b are attached to the underside of the base portion 5a. The lateral extension portions 5b are, for example, multiple movable plates arranged in a stack in the Z direction. The multiple lateral extension portions 5b are movable in the +Y direction or the -Y direction (a direction perpendicular to the traveling direction of the traveling portion 4) along guides (not shown) by the driving force of a power unit (not shown) such as an electric motor. A lifting unit 6 is attached to the lowest lateral extension portion 5b. The lateral extension mechanism 5 moves the lateral extension portions 5b, which are movable plates, using the driving unit, and can slide the lifting unit 6 and the gripping unit 7 attached to the lowest lateral extension portion 5b in a direction perpendicular to the traveling direction.

[0021] The lifting unit 6 is controlled by the control unit to raise and lower the gripping unit 7 at a predetermined speed. The lifting unit 6 is also controlled by the control unit to maintain the gripping unit 7 at a target height. The gripping unit 7 suspends and holds the container 1 by gripping the flange 1g of the container 1. The gripping unit 7 is, for example, a chuck with claws that can move horizontally. In this way, the ceiling transport vehicle 2 can perform lateral transfer to deliver the container 1 to the destination position of the container storage device 100 by sliding the lateral extension unit 5b to extend the lifting unit 6 and lowering the gripping unit 7 using the lifting unit 6. The ceiling transport vehicle 2 can also deliver the container 1 by lowering the gripping unit 7 using the lifting unit 6 without sliding the lateral extension unit 5b.

[0022] The container storage device 100 includes a purging device 10, a mounting table 20, and a suction device 30. The purging device 10 supplies purge gas to the containers 1 stored in the container storage device 100. The purging device 10 is provided on the mounting table 20. Note that in FIG. 1 , a purging device 10 is provided for each container 1 stored in the container storage device 100, but this is not limiting. The purging device 10 may be provided for some of the containers 1 stored in the container storage device 100.

[0023] The purge device 10 includes, for example, a purge nozzle 10a and a flow rate control device (not shown), such as a mass flow controller, that controls the flow rate of the purge gas. The purge nozzle 10a is provided in a state where it protrudes upward from the mounting table 20. The purge nozzle 10a is positioned so as to connect to the inlet 1e of the container 1 when the container 1 is placed on the mounting table 20. The purge nozzle 10a is connected to a purge gas supply unit 11 (see FIG. 6) via a pipe 12 (see FIG. 6), which will be described later. The purge gas is a gas that is inert to the items stored in the container 1, such as nitrogen gas. The purge device 10 supplies the purge gas from the supply unit 11 via the pipe 12 and into the container 1 from the inlet 1e, thereby purging the interior of the container 1 with the purge gas.

[0024] The loading platform 20 is disposed at a position offset to the side from directly below the track of the ceiling transport vehicle 2. The container 1 is placed on the loading platform 20 from the front side of the container storage device 100 by lateral transfer using the ceiling transport vehicle 2. The front side of the container storage device 100 is the side facing the ceiling transport vehicle 2. The number of loading platforms 20 disposed in the container storage device 100 is two in FIG. 1 , and they are arranged side by side in the X direction, but this is not limited to this configuration, and the number of loading platforms 20 may be one, or three or more.

[0025] In this embodiment, one mounting table 20 is capable of mounting a plurality of containers 1, but instead of this configuration, one mounting table 20 may be capable of mounting a single container 1. Fig. 1 shows a state in which four containers 1 are mounted on one mounting table 20, and a state in which no container 1 is mounted on the other mounting table 20. Note that the mounting tables 20 may be arranged in parallel instead of being arranged in series in the X direction.

[0026] The mounting table 20 includes a bottom surface 21, sidewalls 22, supports 26, and a frame member 27. The container 1 is placed on the bottom surface 21. The bottom surface 21 is provided with a plurality of pins (kinematic pins) 17 for positioning the container 1. The pins 17 are arranged corresponding to the positions of recesses 1d provided in the bottom of the container 1, and can fit into the recesses 1d. When the container 1 is placed on the bottom surface 21, the pins 17 fit into the recesses 1d of the container 1, thereby positioning the container 1. The shape and number of the recesses 1d and the pins 17 are arbitrary.

[0027] The sidewall portion 22 is provided to surround all four sides of one or more containers 1 placed on the bottom surface portion 21. The sidewall portion 22 is provided to extend vertically upward from the bottom surface portion 21. The sidewall portion 22 is, for example, a plate-shaped member that surrounds the periphery of the container 1. The sidewall portion 22 includes a first sidewall portion 23, a second sidewall portion 24, and a pair of third sidewall portions 25. The first sidewall portion 23 extends upward from the bottom surface portion 21 and faces the lid 1c of the container 1 placed on the bottom surface portion 21. The first sidewall portion 23 is provided on the front side of the container storage device 100. Note that, if the mounting table 20 is capable of storing multiple containers 1, the first sidewall portion 23 may be formed continuously over an area corresponding to the multiple containers 1. However, this is not limited to this form, and a first sidewall portion 23 may be provided for each container 1.

[0028] The upper end 23a of the first side wall 23 is lower than the upper end 1h of the lid 1c of the container 1 placed on the bottom surface 21. The height H2 of the upper end 23a of the first side wall 23 is lower than the height H1 of the upper end 1h of the lid 1c. Note that the heights H1 and H2 may be heights from the bottom surface of the container 1 or may be heights from the bottom surface 21, as shown in FIG. 2 . The upper end 23a of the first side wall 23 is set in the range of 80 mm to 120 mm from the bottom surface or bottom surface 21 of the container 1.

[0029] Furthermore, the upper end 23a of the first side wall 23 may be set to a value in the range of one-quarter to one-third of the height of the container 1 placed on the bottom surface 21. By setting the height of the first side wall 23 in this manner, gas leaking from the container 1 is prevented from falling downward from the bottom surface 21, and even if the container 1 is tilted, the lid 1c is engaged with the upper end 23a of the first side wall 23, the upper end 24a of the second side wall 24, or the upper end 25a of the third side wall 25, thereby preventing the container 1 placed on the bottom surface 21 from falling off the bottom surface 21. Furthermore, even if the lid 1c is accidentally removed from the stored container 1, the lid 1c is engaged with the upper end 23a of the first side wall 23, etc., preventing the lid 1c from falling off.

[0030] The second side wall portion 24 is provided on the rear side, which is the surface opposite to the front side of the container storage device 100. In other words, the second side wall portion 24 is provided on the surface opposite to the surface facing the ceiling transport vehicle 2 when the front side is defined as the surface facing the ceiling transport vehicle 2. The height of the upper end 24a of the second side wall portion 24 may be approximately the same as the height of the container 1 placed on the bottom surface portion 21, or may be a different height. The height of the upper end 24a of the second side wall portion 24 may be the same as the upper end 23a of the first side wall portion 23. The second side wall portion 24 has the function of preventing gas leaking from the container 1 from flowing around to the rear side and falling downward from the bottom surface portion 21, while also preventing the container 1 placed on the bottom surface portion 21 from falling from the bottom surface portion 21.

[0031] The third sidewalls 25 are provided on the left and right sides of the container storage device 100, i.e., on both ends of the container storage device 100 in the X direction. The third sidewalls 25, together with supporting columns 26 (described later), are provided on the +X and -X sides of the container 1. The third sidewalls 25 are provided so as to connect the ends of the first sidewalls 23 and the second sidewalls 24. As a result, the ends of the first sidewalls 23, the second sidewalls 24, and the pair of third sidewalls 25 surround multiple containers 1. By surrounding the containers 1 with the sidewalls 22, gas leaking from around the lids 1c of the containers 1 can be accumulated inside the sidewalls 22 and prevented from diffusing downward.

[0032] Furthermore, the end of the first side wall portion 23, the second side wall portion 24, and the pair of third side wall portions 25 are arranged to coincide with the outer edge of the mounting table 20 in a plan view. The height of the upper end 25a of the third side wall portion 25 may be approximately the same as the height of the container 1 placed on the bottom surface portion 21, or may be a different height. The height of the upper end 25a of the third side wall portion 25 may be the same height as the upper end 23a of the first side wall portion 23.

[0033] The support columns 26 are provided on the +X side and the -X side of the mounting table 20 and support the mounting table 20. The support columns 26 are connected to the bottom surface portion 21, and as described above, a portion of the support columns 26 is used as a portion of the third side wall portion 25. A frame member 27 is provided at the upper ends of the support columns 26 so as to connect the two support columns 26. The frame member 27 is disposed above the bottom surface portion 21 and extends in the X direction. The frame member 27 is suspended from the ceiling C via a hanging bracket (not shown). The height position of the frame member 27 (container storage device 100) can be adjusted by adjusting the hanging bracket.

[0034] The suction device 30 sucks purge gas leaking from around the lid 1c of the container 1. Here, the purge gas purged into the container 1 may leak from the attachment portion of the lid 1c of the container 1, etc. Depending on the type or concentration of the gas, the purge gas may affect the human body. When the container 1 is stored in an open environment, the purge gas leaking from the container 1 may deteriorate the surrounding environment. In particular, when workers work near the container 1, the atmosphere near the container 1 may have a high concentration of purge gas leaking from the container 1. Furthermore, in clean rooms, a so-called downflow, in which clean air flows downward from a fan filter unit located at the top of the building, may be formed. When the container 1 is stored in an open environment, the downflow may cause the purge gas to flow toward the ground, resulting in a high concentration of purge gas near the ground. The suction device 30 according to this embodiment sucks and collects the purge gas leaking from the container 1, preventing the purge gas from diffusing around the container storage device 100 or near the ground.

[0035] The suction device 30 sucks gas (including purge gas) leaking from around the lid 1c of the container 1. Furthermore, the suction device 30 sucks gas released from inside the container 1 through the exhaust nozzle 40. The exhaust nozzle 40 will be described later. The suction device 30 discharges the sucked gas from the container storage device 100. FIG. 4 is a diagram showing an example of the suction device 30. As shown in FIG. 4, the suction device 30 includes a suction unit 31, a pipe 32, and a pipe 33. The suction unit 31 includes an exhaust nozzle 40, a pipe 41, a flow rate measuring device 42, a first nozzle 50, a second nozzle 60, and a cover 70. In the example shown in FIG. 1, a suction unit 31 is provided for each container 1. However, this configuration is not limited thereto, and a suction unit 31 may be provided for each of a plurality of containers 1.

[0036] When purge gas is supplied from the purge nozzle 10a into the container 1 via the inlet 1e of the container 1 by the purging device 10, the gas inside the container 1 flows out through the exhaust port 1f (see FIG. 6) of the container 1. The exhaust nozzle 40 is provided on the bottom surface 21 so as to connect to the exhaust port 1f of the container 1 when the container 1 is placed on the mounting table 20. The gas inside the container 1 flows out of the container 1 through the exhaust nozzle 40 and is sucked in by the suction device 30. The exhaust nozzle 40 is an example of a second opening.

[0037] The pipe 41 is provided, for example, on the back surface of the bottom surface portion 21. One end of the pipe 41 is connected to the exhaust nozzle 40, and the other end is connected to the second nozzle 60. The flow rate measuring device 42 is provided, for example, on the back surface of the bottom surface portion 21. The flow rate measuring device 42 is provided midway along the pipe 41, and measures the flow rate of gas discharged from the exhaust nozzle 40 and flowing through the pipe 41. The flow rate measuring device 42 may be, for example, a mass flow controller.

[0038] The first nozzle 50 is provided, for example, on the bottom surface portion 21 or inside the bottom surface portion 21. The first nozzle 50 is provided on the bottom surface portion 21 between the first side wall portion 23 and the container 1 placed on the bottom surface portion 21. The first nozzle 50 is arranged inside a cover 70 attached to the bottom surface portion 21. The first nozzle 50 sends gas inside the cover 70 to the piping 32 via a connection portion 51 such as a joint member. The connection portion 51 connects the first nozzle 50 to the piping 32. The first nozzle 50 protrudes upward from the upper surface of the bottom surface portion 21 inside the cover 70. The first nozzle 50 may be provided with a check valve to prevent backflow of gas. The first nozzle 50 is an example of a first opening.

[0039] The second nozzle 60 is provided on the bottom surface portion 21. The second nozzle 60 is provided on the bottom surface portion 21 between the first side wall portion 23 and the container 1 placed on the bottom surface portion 21. The second nozzle 60 protrudes upward from the upper surface of the bottom surface portion 21 within the cover 70. The second nozzle 60 is arranged near the first nozzle 50. For example, the first nozzle 50 and the second nozzle 60 are arranged side by side in the X direction. The second nozzle 60 may be provided with a check valve to prevent backflow of gas. The second nozzle 60 discharges gas flowing out from the exhaust port 1f on the bottom surface of the container 1 above the bottom surface portion 21 via the exhaust nozzle 40.

[0040] The second nozzle 60 communicates with the pipe 41 and discharges the gas flowing through the pipe 41 into the cover 70. The cover 70 is provided on the bottom surface 21 between the first side wall portion 23 and the container 1 placed on the bottom surface 21. The cover 70 is provided to cover the first nozzle 50 and the second nozzle 60. The cover 70 guides the gas discharged from the second nozzle 60 to flow into the pipe 32 via the first nozzle 50. In other words, the cover 70 guides the gas discharged from the second nozzle 60 toward the first nozzle 50.

[0041] FIG. 5 is a diagram illustrating an example of a cover 70. As illustrated in FIG. 5, the cover 70 includes, for example, a third opening 71, a first space 72, a second space 73, and a third space 74. The third opening 71 is formed on the upper surface of the cover 70. The third opening 71 is a circular hole, but its shape is not particularly limited. The third opening 71 is a hole for introducing gas G3 leaking from around the lid 1c of the container 1 into the cover 70. The upper surface of the cover 70 is lower than the upper end 23a of the first side wall 23. In other words, the third opening 71 is located at a position lower than the upper end 23a of the first side wall 23. The gas G3 leaking from around the lid 1c of the container 1 is introduced into the cover 70 through the third opening 71 and is sucked by the first nozzle 50.

[0042] The first space 72 is a space within the cover 70, and the gas G2 from the second nozzle 60 is released therethrough. The first space 72 is in communication with the pipe 41 via the second nozzle 60. The first space 72 is, for example, a cylindrical space. The second space 73 connects the first space 72 to the third space 74. The second space 73 guides the gas G2 in the first space 72 to the third space 74. The third space 74 connects the third opening 71 to the first nozzle 50 (first opening). The third space 74 is, for example, a cylindrical space. The third space 74 guides the gas G3 flowing in from the third opening 71 to the first nozzle 50. The third space 74 is also connected to the first space 72 via the second space 73. Therefore, the third space 74 guides the gas G2 that has flowed from the first space 72 into the second space 73 to the first nozzle 50.

[0043] In this way, the cover 70 has the function of guiding the gas G2 released from the second nozzle 60 toward the first nozzle 50, and the function of guiding the gas G3 leaking from around the lid 1c of the container 1 toward the first nozzle 50 from the third opening 71.

[0044] The pipe 32 communicates with the first nozzle 50 via a connection portion 51. Furthermore, as shown in FIG. 1 , the pipe 32 is connected to a pipe 33. Note that FIG. 1 shows a configuration in which one first nozzle 50 is connected to the pipe 32, and does not illustrate connections between other first nozzles 50 and the pipe 32. The gases G2 and G3 sucked through the first nozzle 50 are sent to the pipe 33 via the pipe 32. The pipe 32 includes a portion extending in the X direction along the bottom surface of the bottom portion 21 and a portion extending in the Z direction along the support 26. The pipe 32 is connected to the pipe 33. The pipe 33 is attached to the frame member 27. The pipe 33 extends in the X direction along the frame member 27. The gases G2 and G3 are sent from the pipe 32 to the pipe 33 and discharged from the pipe 33 to the outside.

[0045] The suction device 30 is connected to the piping 33 and includes a suction force generator that generates a suction force for sucking the gases G2 and G3. However, this is not limited to this configuration, and the suction device 30 may be configured, for example, such that the piping 33 is connected to a suction force generator (line) already installed in a factory or the like. In the container storage device 100, the timing of sucking the gases G2 and G3 is not particularly limited, and may be operated in conjunction with the operation of the purging device 10, for example. For example, the suction by the suction device 30 may begin when the container 1 is placed on the bottom surface 21 and the purging device 10 starts supplying purge gas to the container 1. Furthermore, the suction by the suction device 30 may be performed continuously without being linked to the purging device 10, or may be performed when an operator or the like operates the suction.

[0046] Next, a method for suctioning gases G2 and G3 using the suction device 30 will be described with reference to FIGS. 6 and 7 . FIG. 6 is a diagram schematically illustrating the flow of purge gases G2 and G3 sucked in by the suction device 30. FIG. 7 is a flowchart illustrating an example of a container storage method according to an embodiment. As shown in FIG. 7 , the ceiling transport vehicle 2 places the container 1 at a target position on the bottom surface 21 by lateral transfer (step S101). In step S101, the ceiling transport vehicle 2 first moves to the container storage device 100 and stops to the side of the target position where the container 1 will be placed. Next, the ceiling transport vehicle 2 uses the lateral transfer mechanism 5 to laterally transfer the container 1 to directly above the platform 20. Next, the ceiling transport vehicle 2 lowers the gripper 7 using the lifting unit 6 to place the container 1 at the target position on the bottom surface 21. Next, the gripper 7 releases the grip on the container 1, so that the container 1 is placed on the bottom surface 21.

[0047] The operation of the ceiling transport vehicle 2 is controlled by a control unit (not shown) provided in the ceiling transport vehicle 2. This control unit acquires information regarding the storage location (destination position) of the container 1 from a higher-level control device or the like, and controls the ceiling transport vehicle 2 to place the container 1 in this storage location. Furthermore, when the container 1 is placed on the bottom surface portion 21, as described above, the pin 17 provided on the bottom surface portion 21 fits into the recess 1d provided on the bottom surface of the container 1, thereby positioning the container 1 on the placement table 20.

[0048] Next, the supply of purge gas G1 to the container 1 placed on the bottom surface portion 21 is started (step S102). In step S102, when the container 1 is placed on the bottom surface portion 21, the inlet 1e provided on the bottom surface of the container 1 and the purge nozzle 10a provided on the bottom surface portion 21 are connected. In this state, the purge device 10 supplies the purge gas G1 sent from the supply unit 11 into the container 1 via the piping 12 and the purge nozzle 10a, as shown in Fig. 6. The supply amount of the purge gas G1 is controlled by a control unit (not shown) provided in the purge device 10, for example, based on the flow rate of the purge gas G1 flowing through the piping 12.

[0049] When the supply of purge gas G1 by the purge device 10 begins, the suction device 30 begins suctioning the gas (step S103). When the container 1 is placed on the bottom surface 21, the exhaust port 1f on the bottom surface of the container 1 and the exhaust nozzle 40 on the bottom surface 21 are connected. When the purge gas G1 is supplied into the container 1 in step S102, the internal pressure of the container 1 increases. Due to the increase in the internal pressure of the container 1, the gas G2 in the container 1 is exhausted from the exhaust port 1f and is released into the cover 70 from the second nozzle 60 via the exhaust nozzle 40 and the piping 41. In step S103, the gas G2 released into the cover 70 is sucked in through the first nozzle 50.

[0050] Furthermore, when the internal pressure of the container 1 increases due to the supply of purge gas to the container 1, gas G3 may leak from around the lid 1c of the container 1. The gas G3 accumulates inside the sidewall 22 surrounding the container 1 and is sucked by the first nozzle 50 through the third opening 71 of the cover 70. The gases G2 and G3 sucked by the first nozzle 50 are discharged outside the container storage device 100 (or outside the building adjacent to the factory) via pipes 32 and 33. The suction of the gases G2 and G3 by the suction device 30 may be performed while the purge gas is being supplied to the container 1, or may be performed continuously while the container 1 is being stored. Furthermore, while the container 1 is being stored in the container storage device 100, the suction device 30 may be operated at predetermined time intervals based on the output of a timer (not shown) or the like. The process is completed through the above-described series of operations.

[0051] As described above, according to this embodiment, the suction device 30 does not have an opening larger than the lid 1c of the container 1, so the suction device 30 can be made smaller and can suction gases G2 and G3 leaked from the container 1 with a simple configuration. Furthermore, because the upper end 23a of the first sidewall portion 23 is lower than the upper end of the lid 1c of the container 1 placed on the bottom surface portion 21, the amount of lifting and lowering of the gripper 7 when the container 1 is transferred laterally by the ceiling-mounted transport vehicle 2 can be reduced. The container 1 is transferred between the container storage device 100 by the lateral transfer of the ceiling-mounted transport vehicle 2, as described above. Therefore, if a suction device whose upper end is higher than the lid 1c of the container 1 is disposed, the gripper 7 and the container 1 must be moved laterally to avoid the suction device when the lateral transfer is performed by the ceiling-mounted transport vehicle 2, and the lifting and lowering unit 6 must raise and lower them with a long stroke. In this embodiment, the upper end 23a of the first side wall portion 23 is lower than the upper end 1h of the lid 1c of the container 1 placed on the bottom surface portion 21, so the amount of lifting and lowering of the gripping portion 7 when transferring sideways can be reduced, and the container 1 can be transferred efficiently.

[0052] Furthermore, because the sidewall 22 is provided to surround the container 1, gas G3 leaking from around the lid 1c of the container 1 accumulates inside the sidewall 22 and is sucked in by the first nozzle 50, thereby preventing gases G2 and G3 from diffusing into the worker's activity area below the mounting table 20. Furthermore, because the first nozzle 50 (third opening 71 of the cover 70) is provided on the bottom surface 21 between the side surface of the container 1 on the lid 1c side and the first sidewall 23, the first nozzle 50 is closer to the lid 1c of the container 1, and gas G3 leaking from around the lid 1c of the container 1 can be efficiently sucked in by the first nozzle 50. Furthermore, when purge gas G1 is supplied to the container 1, the gas G2 discharged from the exhaust port 1f is sucked in by the first nozzle 50 together with the gas G3 leaking from around the lid 1c of the container 1, so that a gas recovery device or the like for recovering the gas G2 discharged from the exhaust port 1f is not required, thereby reducing the manufacturing cost of the container storage device 100.

[0053] Furthermore, the container storage device 100 is usually installed in a clean room where a downflow is formed. Therefore, due to this downflow, the gas G3 leaking from around the lid 1c of the container 1 is more efficiently accumulated inside the side wall portion 22 and sucked through the first nozzle 50.

[0054] (First Modification) In the above embodiment, a first nozzle 50 (first opening) is provided for each container 1 placed on the bottom surface portion 21. However, this is not limiting. FIG. 8 is a diagram illustrating a first modification of the suction device 30. Note that in FIG. 8, the same components as those in the above embodiment are denoted by the same reference numerals, and their description will be omitted or simplified. As shown in FIG. 8, the number of first nozzles 50 may be fewer than the number of containers 1 placed on the bottom surface portion 21. For example, one first nozzle 50 may be provided on the bottom surface portion 21 for multiple containers 1. In this case, a sidewall portion 22 is provided to surround the multiple containers 1, and one first nozzle 50 is provided inside the sidewall portion 22. Therefore, gas G3 leaking from around the lids 1c of the multiple containers 1 is collected and stored in the sidewall portion 22. Furthermore, one cover 70 is provided inside the sidewall portion 22, corresponding to each first nozzle 50.

[0055] In addition, when one first nozzle 50 is provided for multiple containers 1, for example, pipes 41 are connected from the exhaust nozzles 40 of each of the multiple containers 1 to one second nozzle 60, and the gas G2 from the multiple containers 1 is sent collectively to the one second nozzle 60 and then released into the cover 70. The one first nozzle 50 sucks in the gas G3 accumulated in the side wall portion 22 and the gas G2 released into the cover 70 and discharges them to the outside.

[0056] As such, according to the first variant, the same effect as the above-mentioned embodiment is obtained, and since gas G2 and gas G3 from multiple containers 1 are sucked in by first nozzles 50 that are fewer than the number of containers 1, the number of first nozzles 50 and pipes 32, etc. can be reduced compared to the above-mentioned embodiment, and the manufacturing cost of the container storage device 100 can be reduced.

[0057] (Second Modification) In the above embodiment, the first nozzles 50 serving as the first openings are provided on the bottom surface 21. However, the present invention is not limited to this. FIG. 9 is a diagram showing a second modification of the suction device 30. Note that in FIG. 9, the same components as those in the above embodiment are denoted by the same reference numerals, and their description will be omitted or simplified. As shown in FIG. 9, the first nozzles 50 (first openings) may be provided on the first sidewall 23 instead of the bottom surface 21. The first nozzles 50 are preferably provided on a lower portion of the first sidewall 23 near the bottom surface 21. Note that the number of first nozzles 50 in the second modification may be fewer than the number of containers 1 placed on the mounting table 20, as in the first modification described above.

[0058] Furthermore, the second nozzle 60 is provided on the bottom surface 21 so as to emit the gas G2, for example, upward. A cover member or the like that blocks the flow of the gas G2 may be provided above the second nozzle 60. The gas G2 sent from the exhaust nozzle 40 is emitted from the second nozzle 60 onto the bottom surface 21 and accumulated inside the side wall 22. Similarly, the gas G3 that leaks from around the lid 1c of the container 1 is also accumulated inside the side wall 22. The first nozzle 50 sucks in the gases G2 and G3 accumulated inside the side wall 22 and discharges them to the outside.

[0059] In this way, the second modification has the same effects as the above-described embodiment. Furthermore, since the first nozzle 50 is provided on the side wall portion 22, even if there is no space on the bottom surface portion 21 to place the first nozzle 50, the gases G2 and G3 that accumulate inside the side wall portion 22 can be reliably sucked in.

[0060] Next, the suction of gas G3 by the suction device 30 will be described with reference to Figures 10 and 11. Figure 10 is a diagram schematically showing the state of gas G3 around the lid 1c of a container 1 stored in a container storage device 100A according to a comparative example. Figure 11 is a diagram schematically showing the state of gas G3 around the lid 1c of a container 1 stored in the container storage device 100 according to the embodiment. Figures 10 and 11 show the state of gas G3 in an environment where a downflow is formed.

[0061] 10, the container storage device 100A according to the comparative example does not have a configuration equivalent to the suction device 30. Therefore, as shown in Fig. 10, gas G3 leaking from around the lid 1c of the container 1 diffuses along the bottom of the mounting table 20A on which the container 1 is placed. On the other hand, since the container storage device 100 according to the present embodiment is provided with the side wall 22, gas G3 leaking from around the lid 1c of the container 1 is guided between the lid 1c and the first side wall 23 and accumulates inside the side wall 22.

[0062] The gas G3 accumulated inside the side wall portion 22 is sucked in through the first nozzle 50. Note that the first nozzle 50 is not shown in Figure 11. Therefore, the gas G3 diffusing downward from the side wall portion 22 is drawn into the inside of the side wall portion 22, thereby preventing it from diffusing below the bottom surface portion 21. As a result, according to this embodiment, it is confirmed that the diffusion of the gas G3 downward in the container storage device 100 is suppressed.

[0063] Although the embodiments have been described above, the technical scope of the present invention is not limited to the above-described embodiments. Furthermore, it will be apparent to those skilled in the art that various modifications and improvements can be made to the above-described embodiments. It is clear from the claims that such modifications and improvements can also be included within the technical scope of the present invention. Furthermore, one or more of the requirements described in the above-described embodiments may be omitted. Furthermore, the requirements described in the above-described embodiments may be combined as appropriate. Furthermore, the execution order of each procedure shown in the embodiments can be realized in any order as long as the results of a previous procedure are not used in a subsequent procedure. Furthermore, even if the operations in the above-described embodiments are described using terms such as "first," "next," and "continuously" for convenience, this order is not required. Furthermore, to the extent permitted by law, the disclosures of Japanese Patent Application No. 2022-083746 and all documents cited in the above-described embodiments are incorporated herein by reference.

[0064] C: Ceiling R: Rail 1: Container 2: Ceiling transport vehicle 10: Purge device 20: Placement table 30: Suction device 21: Bottom surface 22: Side wall 40: Exhaust nozzle (second opening) 50: First nozzle (first opening) 60: Second nozzle (nozzle) 70: Cover 71: Third opening 100: Container storage device

Claims

1. A container storage device comprising: a mounting table on which a container with a lid on its side is placed; a purge device that supplies purge gas to the container; and a suction device that sucks gas leaked from the container, wherein the mounting table comprises a bottom surface on which the container is placed and a side wall portion that extends upward from the bottom surface and faces the lid of the container placed on the bottom surface; the suction device sucks gas that has leaked from the side of the container where the lid is located through a first opening provided in the bottom surface or the side wall portion; and the upper end of the side wall portion is lower than the upper end of the lid of the container placed on the bottom surface.

2. A container storage device as described in claim 1, wherein the mounting table is capable of mounting a plurality of the containers, the bottom surface portion and the side wall portion are formed continuously across the plurality of the containers, and the number of the first openings is less than the number of the containers that can be mounted on the mounting table.

3. The container storage device according to claim 2, wherein the side wall portion is provided so as to surround all four sides of the plurality of containers placed on the bottom portion.

4. A container storage device as described in claim 1, wherein the height of the upper end of the side wall portion is set in the range of 80 mm to 120 mm from the bottom portion or the bottom surface of the container.

5. A container storage device as described in claim 1, wherein the height of the upper end of the side wall portion is set in the range of one-fourth to one-third of the height of the container placed on the bottom portion.

6. A container storage device as described in claim 1, wherein the first opening is provided in the bottom surface portion between the side wall portion and the container placed on the bottom surface portion.

7. The container storage device according to claim 1, wherein the side wall portion is provided so as to surround all four sides of the container placed on the bottom portion.

8. The container storage device described in claim 1, wherein the suction device has a second opening provided in the bottom portion and a nozzle that discharges gas flowing out from an exhaust port formed in the bottom surface of the container above the bottom portion through the second opening, and the gas discharged from the nozzle is sucked in through the first opening.

9. The container storage device according to claim 8, wherein the nozzle is disposed near the first opening.

10. A container storage device as described in claim 9, wherein the mounting table is provided with a cover that covers the nozzle and the first opening and guides the gas emitted from the nozzle toward the first opening, and the cover has a third opening formed on the upper surface of the cover and guides the gas flowing in from the third opening toward the first opening.

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