Substrate storage container and lid-body-side substrate support part

Abstract

The present invention provides a substrate storage container which is provided with: a lid-body-side substrate support part 73 that is capable of supporting edges of a plurality of substrates in a state where the opening of a container main body is closed by means of a lid body; and a back-side substrate support part which supports the plurality of substrates together with the lid-body-side substrate support part 73 in such a manner that the edges of the plurality of substrates are arranged in parallel to each other in a state where the opening of the container main body is closed by means of the lid body. With respect to this substrate storage container, the lid-body-side substrate support part 73 has flat support surfaces 731 which support the plurality of substrates by coming into contact with the circumferential surfaces of the respective edges of the substrates; and flat support surfaces 731 which are in contact with the circumferential surfaces of the respective edges of substrates that are adjacent to each other among the plurality of substrates have overlapping parts 733 that face each other in a direction that is parallel to the upper surfaces of the substrates.

Description

Substrate storage container and lid-side substrate support portion

[0001] The present invention relates to a substrate storage container and a lid-side substrate support portion used when storing, preserving, transporting, and shipping substrates such as semiconductor wafers.

[0002] Conventionally, substrate storage containers for storing substrates made of semiconductor wafers and transporting them during processes within a factory have been known that have a configuration comprising a container body and a lid (see, for example, Patent Documents 1 and 2).

[0003] One end of the container body has an opening periphery where a container body opening is formed. The other end of the container body has a closed cylindrical wall. A substrate storage space is formed within the container body. The substrate storage space is surrounded by the wall and is capable of storing substrates. The lid is detachable from the opening periphery and is capable of closing the container body opening. The side substrate support portions are provided on the wall portions in pairs within the substrate storage space. When the container body opening is not closed by the lid, the side substrate support portions are capable of supporting the edges of adjacent substrates in a state where they are arranged side by side and spaced a predetermined distance apart.

[0004] A front retainer is provided on a portion of the lid that faces the substrate storage space when the container body opening is closed. The front retainer is capable of supporting the edge of the substrate when the container body opening is closed by the lid. A rear-side substrate support portion is provided on the wall portion so as to form a pair with the front retainer. The rear-side substrate support portion is capable of supporting the edge of the substrate. When the container body opening is closed by the lid, the rear-side substrate support portion cooperates with the front retainer to support the substrate, thereby holding the substrates in a state where adjacent substrates are spaced apart and aligned in parallel at a predetermined distance.

[0005] Patent No. 6375577 Patent No. 6258069

[0006] In semiconductor manufacturing processes, substrates thinned by polishing or other processes may be stored in a substrate storage container and transported. In such cases, the substrates may bend due to their own weight or due to vibrations or slight impacts during transport, leading to breakage or damage. To prevent this, a configuration has been considered in which the supports supporting multiple substrates in a substrate storage container are arranged with a wide pitch to prevent such breakage or damage while transporting the substrates. However, due to the bending that occurs, cross slots or the like may occur, making it impossible for the supports to cooperate with the front retainer to support the substrates when the container body opening is closed by the lid.

[0007] An object of the present invention is to provide a substrate storage container and a lid-side substrate support portion that can hold thin substrates without breaking or damaging them when the substrates are bent by their own weight or by an impact.

[0008] The present invention provides a container body having a cylindrical wall portion with a container body opening formed at one end and a closed other end, wherein a substrate storage space capable of storing a plurality of substrates and communicating with the container body opening is formed by the inner surface of the wall portion; a lid body that is detachable from the container body opening and capable of closing the container body opening; a lid body-side substrate support portion that is a part of the lid body and is arranged in a portion that faces the substrate storage space when the container body opening is closed by the lid body, and that is capable of supporting edges of the plurality of substrates when the container body opening is closed by the lid body; and a rear-side substrate support portion that is arranged to form a pair with the rear-side substrate support portion and is capable of supporting the edges of the plurality of substrates, and that cooperates with the lid-side substrate support portion to support the plurality of substrates with the edges of the plurality of substrates aligned side by side when the container body opening is closed by the lid, wherein the lid-side substrate support portion has a flat support surface that abuts against the peripheral surface of the edge of each of the plurality of substrates to support the substrate, and the flat support surfaces that abut against the peripheral surface of the edge of each of adjacent substrates among the plurality of substrates have overlapping portions that face each other in a direction parallel to the upper surfaces of the substrates.

[0009] It is also preferable that a plurality of the flat support surfaces are provided, one for each peripheral edge surface of the plurality of substrates. It is also preferable that the flat support surface is located at the free end of a cantilever spring. It is also preferable that the flat support surface abuts against one of the substrates at one point on the peripheral edge surface of the front part of the substrate. It is also preferable that the plurality of substrates are stored in parallel in the substrate storage space, and that the length of the flat support surface in the parallel direction of the plurality of substrates is 5 mm or more. It is also preferable that the area of ​​the flat support surface is 50 mm or more. ２ It is preferable that this is equal to or greater than this.

[0010] The present invention also provides a container body having a cylindrical wall portion with a container body opening formed at one end and a closed other end, wherein an inner surface of the wall portion defines a substrate storage space capable of storing a plurality of substrates and communicating with the container body opening; a lid body that is detachable from the container body opening and capable of closing the container body opening; a lid body-side substrate support portion that is a part of the lid body and is arranged in a portion that faces the substrate storage space when the container body opening is closed by the lid body, and that is capable of supporting edges of the plurality of substrates when the container body opening is closed by the lid body; a rear-side substrate support portion that is arranged to form a pair with the support portion, is capable of supporting the edges of the plurality of substrates, and cooperates with the lid-side substrate support portion to support the plurality of substrates with the edges of the plurality of substrates aligned side by side when the container body opening is closed by the lid; and a lid-side substrate support portion for a substrate storage container, the rear-side substrate support portion having a flat support surface that abuts against the peripheral surface of the edge of each of the plurality of substrates to support the substrate, and the flat support surface that abuts against the peripheral surface of the edge of each of adjacent substrates among the plurality of substrates has an overlap portion that faces in a direction parallel to the upper surface of the substrate.

[0011] It is also preferable that a plurality of the flat support surfaces are provided, one for each peripheral edge surface of the plurality of substrates. It is also preferable that the flat support surface is located at the free end of a cantilever spring. It is also preferable that the flat support surface abuts against one of the substrates at one point on the peripheral edge surface of the front part of the substrate. It is also preferable that the plurality of substrates are stored in parallel in the substrate storage space, and that the length of the flat support surface in the parallel direction of the plurality of substrates is 5 mm or more. It is also preferable that the area of ​​the flat support surface is 50 mm or more. ２ It is preferable that this is equal to or greater than this.

[0012] According to the present invention, it is possible to provide a substrate storage container and a lid-side substrate support portion that can hold thin substrates without breaking or damaging them when the substrates are bent by their own weight or by an impact.

[0013] FIG. 1 is an exploded perspective view showing a state in which a plurality of substrates are stored in a substrate storing container according to an embodiment of the present invention. FIG. 2 is a perspective view showing a container body of a substrate storing container according to an embodiment of the present invention. FIG. 3 is a perspective view showing a lid of a substrate storing container according to an embodiment of the present invention. FIG. 4 is a perspective view showing a front retainer of a substrate storing container according to an embodiment of the present invention. FIG. 5 is a front view showing a front retainer of a substrate storing container according to an embodiment of the present invention. FIG. 6 is an enlarged front view showing a front retainer of a substrate storing container according to an embodiment of the present invention. FIG. 7 is a cross-sectional view showing the positional relationship between the substrates stored in a substrate storing container according to an embodiment of the present invention and the front retainer.

[0014] The substrate storage container 1 and the lid-side substrate support portion 73 according to this embodiment will be described below with reference to the drawings. For ease of explanation, the direction from the container body 2 (described below) toward the lid 3 (the direction from the upper right to the lower left in FIG. 1 ) is defined as the forward direction D11, and the opposite direction is defined as the rearward direction D12. These directions are collectively defined as the front-to-rear direction D1. Furthermore, the direction from the lower wall 24 (described below) toward the upper wall 23 (the upward direction in FIG. 1 ) is defined as the upward direction D21, and the opposite direction is defined as the downward direction D22. These directions are collectively defined as the up-down direction D2. Furthermore, the direction from the second side wall 26 (described below) toward the first side wall 25 (the direction from the lower right to the upper left in FIG. 1 ) is defined as the leftward direction D31, and the opposite direction is defined as the rightward direction D32. These directions are collectively defined as the left-to-right direction D3. Arrows indicating these directions are shown in the main drawings.

[0015] The substrates W (see FIG. 1) stored in the substrate storage container 1 are disc-shaped silicon wafers, glass wafers, sapphire wafers, etc. that have been thinned by polishing or the like and are thin wafers used in industry. In this embodiment, the substrates W are silicon wafers with a diameter of 300 mm.

[0016] 1 and 2, the substrate storage container 1 is used to store substrates W made of silicon wafers as described above and transport them in processes within a factory, or as a shipping container for transporting the substrates W by land, air, sea, or other transportation means, and is composed of a container body 2 and a lid 3. The container body 2 includes substrate support plate-like portions 5 as side substrate support portions, and a rear substrate support portion 6. The lid 3 includes a front retainer 7 (see FIGS. 4 to 6) having a lid-side substrate support portion 73.

[0017] As shown in Fig. 1 etc., the container body 2 has a cylindrical wall portion 20 with a container body opening 21 formed at one end and a closed other end. A substrate storage space 27 is formed within the container body 2. The substrate storage space 27 is surrounded by the wall portion 20. As shown in Fig. 2, a substrate support plate-shaped portion 5 is disposed in the portion of the wall portion 20 that forms the substrate storage space 27. As shown in Fig. 1, the substrate storage space 27 is capable of storing a plurality of substrates W.

[0018] The substrate support plate portions 5 are provided on the wall portion 20 in pairs within the substrate storage space 27. When the container body opening 21 is not closed by the lid 3 (when the lid is open), the substrate support plate portions 5 abut against the edges of the substrates W, thereby supporting the edges of the substrates W while arranging adjacent substrates W in parallel and spaced apart at a predetermined interval. A rear substrate support portion 6 is provided behind the substrate support plate portions 5.

[0019] The rear substrate support portion 6 (see FIG. 2, etc.) is provided on the wall portion 20 so as to form a pair with a front retainer 7 (see FIG. 3, etc.) described later within the substrate storage space 27. When the container body opening 21 is closed by the lid body 3 (when the lid is in a closed state), the rear substrate support portion 6 abuts against the edges of the substrates W, thereby being able to support the rear portions of the edges of the substrates W.

[0020] The lid 3 is detachable from an opening rim 28 (see FIG. 1, etc.) that forms the container body opening 21, and is capable of closing the container body opening 21. The front retainer 7 is provided on the lid 3 at a portion that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3. The front retainer 7 is disposed inside the substrate storage space 27 so as to form a pair with the rear substrate support portion 6.

[0021] When the container body opening 21 is closed by the lid 3, the front retainer 7 can support the front portions of the edges of the substrates W by abutting against the edges of the substrates W. When the container body opening 21 is closed by the lid 3, the front retainer 7 supports the substrates W in cooperation with the rear substrate support portion 6, thereby holding adjacent substrates W in a parallel arrangement with a predetermined distance between them.

[0022] The substrate storage container 1 is made of a resin such as a plastic material, and examples of the resin material include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polybutylene terephthalate, polyetheretherketone, and liquid crystal polymer, as well as alloys of these. To impart conductivity to these molding material resins, conductive materials such as carbon fiber, carbon powder, carbon nanotubes, and conductive polymers are selectively added. Glass fiber, carbon fiber, and the like can also be added to increase rigidity.

[0023] Each part will be described in detail below. As shown in Fig. 1, the wall 20 of the container body 2 has a rear wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The rear wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of the above-mentioned materials and are integrally molded.

[0024] The first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the rear wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 are positioned opposite the rear wall 22 and constitute an opening periphery 28 that forms the container body opening 21, which has a substantially rectangular shape.

[0025] The opening periphery 28 is provided at one end of the container body 2, and the rear wall 22 is located at the other end of the container body 2. The container body 2 has a box-like outer shape formed by the outer surfaces of the walls 20. The inner surfaces of the walls 20, i.e., the inner surfaces of the rear wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26, form a substrate storage space 27 surrounded by these. The container body opening 21 formed in the opening periphery 28 is surrounded by the walls 20 and communicates with the substrate storage space 27 formed inside the container body 2. A maximum of 13 substrates W can be stored in the substrate storage space 27. In this embodiment, the substrate storage structure is capable of storing 13 substrates W, but the substrate support plate-shaped portion 5 can be removed and a substrate support plate-shaped portion (not shown) capable of storing 25 substrates W can be fixed to the container body 2, resulting in a substrate storage container structure capable of storing 25 substrates W.

[0026] 1, latch engagement recesses 231A, 231B, 241A, and 241B recessed outward from the board storage space 27 are formed in the upper wall 23 and the lower wall 24 near the opening periphery 28. A total of four latch engagement recesses 231A, 231B, 241A, and 241B are formed, one near each of the left and right ends of the upper wall 23 and the lower wall 24.

[0027] 1, a top flange 236 is fixed to the center of upper wall 23. Top flange 236 is a member that is hung on and suspended from substrate storage container 1 when substrate storage container 1 is suspended in an AMHS (automated wafer handling system), PGV (wafer substrate transport vehicle), or the like.

[0028] The board support plate portions 5 are provided on the first side wall 25 and the second side wall 26, respectively, and are arranged in pairs in the left-right direction D3 within the board storage space 27. The board support plate portions 5 may be integrally formed with the first side wall 25 and the second side wall 26.

[0029] The substrate support plate-like portions 5 have a generally arc-shaped plate shape. 26 substrate support plate-like portions 5 are provided, 13 on each side of the first side wall 25 and the second side wall 26, in the vertical direction D2. Adjacent substrate support plate-like portions 5 are arranged in a parallel positional relationship and spaced apart from each other by 10 mm to 30 mm in the vertical direction D2. Above the topmost substrate support plate-like portion 5, another plate-like member is arranged parallel to the substrate support plate-like portion 5. This member, located at the top, serves as a guide for the substrate W being inserted into the substrate storage space 27.

[0030] The thirteen substrate support plate-like members 5 arranged on the first side wall 25 and the thirteen substrate support plate-like members 5 arranged on the second side wall 26 are positioned opposite each other in the left-right direction D3. The thirteen substrate support plate-like members 5 and the plate-like members acting as guides parallel to the substrate support plate-like members 5 are positioned parallel to the inner surface of the bottom wall 24. As shown in Figure 2 and other figures, convex portions are provided on the upper surfaces of the substrate support plate-like members 5. The substrate W supported by the substrate support plate-like members 5 contacts only the protruding ends of the convex portions and does not contact the substrate support plate-like members 5 in a planar manner.

[0031] The substrate support plate portion 5 is capable of supporting the edges of a plurality of substrates W while keeping adjacent substrates W among the plurality of substrates W spaced apart at a predetermined interval and parallel to each other.

[0032] 2, the rear-side substrate support portion 6 has a rear-side edge support portion 60. The rear-side edge support portion 60 is integrally molded with the rear end portion of the plate-shaped substrate support portion 5. The rear-side substrate support portion 6 may be integrally molded with the first side wall 25, the second side wall 26, and the rear wall 22.

[0033] The number of rear edge support portions 60 provided is 13, specifically, the number corresponding to each substrate W that can be stored in the substrate storage space 27. The rear edge support portions 60 arranged on the first side wall 25 side and the second side wall 26 side are positioned in a positional relationship in the front-to-rear direction D1 so as to form pairs with the front retainers 7, which will be described later. When a substrate W is stored in the substrate storage space 27 and the lid 3 is closed, the rear edge support portions 60 clamp and support the edge of the substrate W.

[0034] Next, the lid 3 and the front retainer 7 will be described in detail. As shown in FIG. 1 and other figures, the lid 3 has a generally rectangular shape that generally matches the shape of the opening periphery 28 of the container body 2. The lid 3 is detachable from the opening periphery 28 of the container body 2, and by attaching the lid 3 to the opening periphery 28, the lid 3 can close the container body opening 21. An annular sealing member 4 is attached to the inner surface of the lid 3 (the back surface of the lid 3 shown in FIG. 1). The sealing member 4 is made of various thermoplastic elastomers, such as elastically deformable polyesters and polyolefins, fluororubber, silicone rubber, or the like. The sealing member 4 is arranged so as to surround the outer periphery of the lid 3.

[0035] When the lid 3 is attached to the opening periphery 28, the seal member 4 is sandwiched between the opening periphery 28 and the inner surface of the lid 3 and elastically deforms, and the lid 3 hermetically closes the container body opening 21. When the lid 3 is removed from the opening periphery 28, the substrates W can be taken in and out of the substrate storage space 27 inside the container body 2.

[0036] The lid 3 has a lid main body that forms the outer shape of the lid 3, and the lid main body is provided with a latch mechanism. The latch mechanism is provided near both left and right ends of the lid main body, and as shown in Fig. 1, includes two upper latch portions 32A that can protrude in an upward direction D21 from the upper edge of the lid main body, and two lower latch portions 32B that can protrude in a downward direction D22 from the lower edge of the lid main body. The two upper latch portions 32A are located near both left and right ends of the upper edge of the lid main body, and the two lower latch portions 32B are located near both left and right ends of the lower edge of the lid main body.

[0037] An operating portion 33 is provided on the outer surface of the lid body. By operating the operating portion 33 from the front side of the lid body, the upper latch portion 32A and the lower latch portion 32B can be made to protrude from the upper and lower edges of the lid body, or can be made not to protrude from the upper and lower edges. The upper latch portion 32A protrudes in the upward direction D21 from the upper edge of the lid body and engages with the latch engagement recesses 231A and 231B of the container body 2, and the lower latch portion 32B protrudes in the downward direction D22 from the lower edge of the lid body and engages with the latch engagement recesses 241A and 241B of the container body 2, thereby fixing the lid 3 to the opening peripheral portion 28 of the container body 2.

[0038] 3, a recess 34 recessed outward (in the forward direction D11) from the board storage space 27 is formed inside the lid body constituting the lid 3. The front retainer 7 is fixed to the portion of the lid body inside the recess 34.

[0039] As shown in FIGS. 4 to 6 , the front retainer 7 has a cover-side board support portion 73, legs 72, and a vertical frame 71. Twenty-five cover-side board support portions 73 are provided in the vertical direction D2, and each is supported by an elastically deformable leg 72. The legs 72 extend in the right direction D32 so as to be away from the cover-side board support portion 73. As shown in FIGS. 4 to 6 , the vertical frame 71 extending in the vertical direction D2 is integrally molded with the legs 72 at the ends of the legs 72. As a result, the cover-side board support portion 73 is located at the free end of a cantilever spring that configures the legs 72 as a cantilever beam. When a substrate W is stored in the substrate storage space 27 and the lid body 3 is closed, the lid body side substrate support portion 73 clamps and supports the front end edge of the edge of the substrate W while urging it toward the center of the substrate storage space 27 due to the elastic force of the leg portion 72.

[0040] The rear surface of the lid-side substrate support portion 73 has a flat supporting surface 731 that abuts against the substrates W at one point on the peripheral surface of the edge of each of the substrates W to support the substrates W. A plurality of flat supporting surfaces 731 are provided in one-to-one correspondence with the peripheral surfaces of the edge of each of the substrates W, and are composed of vertical planes. The flat supporting surfaces 731 abut against the edge of the front surface (top surface) of the substrates W when the container body opening 21 is closed by the lid 3. When the container body opening 21 is closed by the lid 3, the lid-side substrate support portion 73 is elastically displaceable in a direction from the other end toward one end of the container body 2 (forward direction D11).

[0041] 4 to 6 , the lid-side substrate support portion 73 has a shape in which, at its center in the left-right direction D3, the distal rectangular half is shifted downward in the direction D22 from the rectangular half connected to the leg portion 72. Therefore, the left lower end portion of the flat supporting surface 731 of one lid-side substrate support portion 73 and the right upper end portion of the flat supporting surface 731 of the lid-side substrate support portion 73 below form an overlapping portion 733 that faces each other in the left-right direction D3, which is a direction parallel to the top surface of the substrate W. In this way, because the flat supporting surfaces 731 have overlapping portions 733 that face each other in the left-right direction D3, the formation of a linear gap between adjacent flat supporting surfaces 731 in the up-down direction D2 is avoided in the same direction, and a crank-shaped gap is formed.

[0042] The length H1 of the free end of the flat support surface 731 of the cover-side substrate support portion 73 in the direction in which the substrates W are arranged side by side in the substrate storage space 27, i.e., in the vertical direction D2, is 5 mm or more and 9 mm or less. The area S1 of the flat support surface 731 is 50 mm or less. ２ Over 71.5mm ２ The following is the result.

[0043] Since the length H1 of the edge on the free end side of the flat support surface 731 of the lid-side substrate support portion 73 in the up-down direction D2 is 5 mm or more, the area S1 that abuts on the peripheral surface of the edge of the substrate W is set to 50 mm ２or more, so that even if the thin substrate W is warped, force is less likely to be applied to the substrate W itself, making it possible to make the substrate W less likely to crack. As a result, it is possible to make the substrate W less likely to be damaged. Furthermore, it is more preferable that the length H1 of the edge on the free end side of the flat support surface 731 of the lid body side substrate support part 73 in the up-down direction D2 is 7 mm or more, which makes it possible to make the substrate W even less likely to crack.

[0044] Furthermore, the length H1 of the edge on the free end side of the flat support surface 731 of the lid-side substrate support portion 73 in the up-down direction D2 is 9 mm or less, so the area that abuts on the peripheral surface of the edge of the substrate W is set to 71.5 mm ２ It is possible to keep the number of boards W that can be stored in the substrate storage container 1 at a level not less than the number that can be stored in a normal substrate storage container. It is more preferable that the length H1 of the edge on the free end side of the flat support surface 731 of the lid-side substrate support portion 73 in the up-down direction D2 is 8.4 mm or less, which reliably prevents the number of boards W that can be stored from being less than the number that can be stored in a normal substrate storage container.

[0045] The substrate storage container 1 according to the first embodiment having the above-described configuration can provide the following advantages: The lid-side substrate support portions 73 have flat supporting surfaces 731 that abut against the peripheral edges of each of the plurality of substrates W to support the substrates W, and the flat supporting surfaces 731 that abut against the peripheral edges of adjacent substrates W among the plurality of substrates W have overlapping portions 733 that face each other in a direction parallel to the top surfaces of the substrates W. This configuration makes it possible to provide a substrate storage container 1 that can hold thin substrates W without breakage or damage when the substrates W are bent due to their own weight or an impact.

[0046] Furthermore, a plurality of flat supporting surfaces 731 are provided in one-to-one correspondence with the peripheral surfaces of the edge portions of the plurality of substrates W. With this configuration, one flat supporting surface 731 abuts against the peripheral surface of the edge portion of one substrate W, making it possible to support one substrate W by one flat supporting surface 731.

[0047] Furthermore, the flat supporting surface 731 is located at the free end of the cantilever spring. This configuration allows the flat supporting surface 731 to be supported by the cantilever spring. As a result, the substrate W can be supported by the flat supporting surface 731 with an appropriate biasing force.

[0048] Furthermore, the length H1 of the flat supporting surface 731 in the direction in which the plurality of substrates W are arranged is 5 mm or more. ２ As a result, the substrate W can be supported by the wide-area flat supporting surface 731, and therefore, even if the thin substrate W is bent, force is less likely to be applied to the substrate W itself, making it possible to make the substrate W less likely to crack. As a result, it is possible to make the substrate W less likely to be damaged.

[0049] The present invention is not limited to the above-described embodiments, and modifications are possible within the technical scope defined in the claims.

[0050] For example, the shapes of the container body and the lid, and the number and dimensions of the substrates W that can be stored in the container body are not limited to those of the container body 2 and the lid 3 in this embodiment. That is, the configurations of the side substrate support portions (plate-shaped substrate support portions 5), the lid body-side substrate support portion 73, and the rear-side substrate support portion 6 are not limited to those in the embodiment. Furthermore, although the substrate W in this embodiment is a silicon wafer with a diameter of 300 mm, the diameter is not limited to this value.

[0051] REFERENCE SIGNS LIST 1 substrate storage container 2 container body 3 lid 5 substrate support plate-shaped portion (side substrate support portion) 6 rear substrate support portion 20 wall portion 21 container body opening 27 substrate storage space 28 opening periphery 73 lid-side substrate support portion 731 support flat surface 733 overlap portion H1 length W substrate

Claims

1. a container body including a cylindrical wall portion having a container body opening at one end and a closed other end, the inner surface of the wall portion defining a substrate storage space capable of storing a plurality of substrates and communicating with the container body opening; A lid body that is detachable from the container body opening and can close the container body opening; a lid-side substrate support portion that is disposed in a portion of the lid that faces the substrate accommodating space when the container body opening is closed by the lid, and that is capable of supporting edges of the plurality of substrates when the container body opening is closed by the lid; a rear-side substrate support portion that is disposed in the substrate storage space so as to form a pair with the lid-side substrate support portion, is capable of supporting edge portions of the plurality of substrates, and cooperates with the lid-side substrate support portion to support the plurality of substrates with their edge portions aligned in parallel when the container body opening is closed by the lid, the lid body side substrate support portion has a flat support surface that abuts against a peripheral surface of an edge portion of each of the plurality of substrates to support the substrates, The adjacent flat support surfaces are in a parallel positional relationship, A substrate storage container in which the vertical center of the supporting flat surface that abuts the peripheral surface of each edge of adjacent substrates among the plurality of substrates does not face the top surface of the substrate in a direction parallel to the top surface of the substrate, and at least one of the upper and lower ends of the supporting flat surface in the vertical direction has an overlapping portion that faces the top surface of the substrate in a direction parallel to the top surface of the substrate.

2. The substrate storage container according to claim 1 , wherein the flat supporting surface is provided in a plurality of positions, one for each peripheral surface of the edge of the plurality of substrates.

3. 3. The substrate storage container of claim 2, wherein the flat support surface is located at a free end of a cantilever spring.

4. 4. The substrate storage container according to claim 1, wherein the flat supporting surface abuts against one of the substrates at one point on a peripheral surface of an edge portion of a front part of the substrate.

5. The plurality of substrates are stored in parallel in the substrate storage space, The substrate storage container according to claim 4 , wherein a length of the flat supporting surface in a direction in which the plurality of substrates are arranged side by side is 5 mm or more.

6. The area of ​​the supporting flat surface is 50 mm ２ The substrate storage container according to claim 4 .

7. a container body including a cylindrical wall portion having a container body opening at one end and a closed other end, the inner surface of the wall portion defining a substrate storage space capable of storing a plurality of substrates and communicating with the container body opening; A lid body that is detachable from the container body opening and can close the container body opening; a lid-side substrate support portion that is disposed in a portion of the lid that faces the substrate accommodating space when the container body opening is closed by the lid, and that is capable of supporting edges of the plurality of substrates when the container body opening is closed by the lid; a rear-side substrate support portion that is disposed in the substrate storage space so as to form a pair with the lid-side substrate support portion, is capable of supporting edge portions of the plurality of substrates, and cooperates with the lid-side substrate support portion to support the plurality of substrates with their edge portions aligned in parallel when the container body opening is closed by the lid; A lid-side substrate support portion of a substrate storage container comprising: a flat support surface that abuts against a peripheral surface of an edge of each of the plurality of substrates to support the substrate; The adjacent flat support surfaces are in a parallel positional relationship, A lid-side substrate support portion in which the vertical center of the supporting flat surface that abuts against the peripheral surface of each edge of adjacent substrates among the plurality of substrates does not face the upper surface of the substrate in a direction parallel to the upper surface of the substrate, and at least one of the upper and lower ends of the supporting flat surface in the vertical direction has an overlap portion that faces the upper surface of the substrate in a direction parallel to the upper surface of the substrate.

8. The cover-side substrate support portion according to claim 7 , wherein the flat support surface is provided in a plurality of positions, one for each peripheral surface of the edge of the plurality of substrates.

9. The cover-side substrate support portion according to claim 8 , wherein the flat support surface is located at a free end of a cantilever spring.

10. 10. The lid body side substrate support portion according to claim 7, wherein the flat support surface abuts against the one substrate at one point on a peripheral surface of an edge portion of a front part of the one substrate.

11. The plurality of substrates are stored in parallel in the substrate storage space, The lid body side substrate support portion according to claim 10 , wherein the length of the flat supporting surface in the direction in which the plurality of substrates are arranged side by side is 5 mm or more.

12. The area of ​​the supporting flat surface is 50 mm ２ The cover body side substrate supporting portion according to claim 10 .