Detection device

Abstract

In order to detect a subject without having a lens, this detection device comprises: a light guide part that has a light incidence port and an emission port having an opening smaller than that of the incidence port, and emits light incident from the incidence port from the emission port; and a detection part that detects the light emitted from the emission port.

Description

Detection device Incorporation by Reference

[0001] This application claims priority from Japanese Patent Application No. 2022-131239, filed on August 19, 2022, the contents of which are incorporated herein by reference.

[0002] The present invention relates to a detection device.

[0003] Imaging devices incorporating technology for detecting a subject based on a signal from an imaging element are known, and there has long been a demand for improved accuracy in subject detection.

[0004] Japanese Patent Application Laid-Open No. 2006-197192

[0005] A detection device that is one aspect of the disclosed technology has a light entrance and an exit opening that is smaller than the entrance opening, and has a light guide unit that emits light incident from the entrance opening out of the exit opening, and a detection unit that detects light emitted from the exit opening.

[0006] FIG. 1 is an explanatory diagram showing an example of a detection device according to a first embodiment. FIG. 2A is an explanatory diagram showing Example 1 of the incidence angle dependency of light directly incident on the detection device. FIG. 2B is an explanatory diagram showing Example 2 of the incidence angle dependency of light directly incident on the detection device. FIG. 2C is an explanatory diagram showing Example 3 of the incidence angle dependency of light directly incident on the detection device. FIG. 3 is an explanatory diagram showing the incidence angle dependency of light directly incident and reflected incident on the detection device. FIG. 4 is an explanatory diagram showing another example of the internal configuration of a frustum portion. FIG. 5A is a partial side cross-sectional view of a detection device according to a second embodiment. FIG. 5B is an external view showing two adjacent light guiding units. FIG. 6 is a partial plan view of a detection device according to the second embodiment. FIG. 7 is an explanatory diagram showing Example 1 of the arrangement interval between multiple light guiding units. FIG. 8 is a graph showing MTF characteristics with respect to the arrangement angle and the incidence angle of incident light. FIG. 9 is an explanatory diagram showing Example 2 of the arrangement interval between multiple light guiding units. FIG. 10 is an explanatory diagram showing Example 3 of the arrangement interval between multiple light guiding units. FIG. 11 is a partial plan view of a detection device according to a fourth embodiment. FIG. 12 is a perspective view of a detection device according to a fifth embodiment. FIG. 13 is a side view of the detection device according to the fifth embodiment. FIG. 14 is a plan view and an AB cross-sectional view of a first holding plate. FIG. 15 is a plan view and a CD cross-sectional view of a second holding plate. FIG. 16 is an explanatory diagram showing an example of a manufacturing system for a light-guiding component according to a sixth embodiment. FIG. 17 is a perspective view showing an example of a light-guiding component produced by the manufacturing system. FIG. 18 is an explanatory diagram showing an example of connections between light-guiding components. FIG. 19 is an explanatory diagram showing an example of another processing target. FIG. 20 is a front view and a plan view showing another example of a light-guiding component produced by the manufacturing system. FIG. 21 is a front view and a bottom view showing another example of a light-guiding component produced by the manufacturing system. FIG. 22 is an explanatory diagram showing an example of connections between light-guiding components. FIG. 23 is a perspective view showing an example of a structure according to a seventh embodiment. FIG. 24 is a first cross-sectional view of the structure according to the seventh embodiment. FIG. 25 is a second cross-sectional view of the structure according to the seventh embodiment. FIG. 26 is another first cross-sectional view of the structure according to the seventh embodiment.

[0007] 1 is an explanatory diagram showing an example of a detection device according to a first embodiment. The detection device 100 has a light guide unit 101 and a detection unit 110. The light guide unit 101 passes incident light from a subject through its interior and outputs the light to the detection unit 110. The detection unit 110 has a photodiode, receives the light output from the light guide unit 101, and performs photoelectric conversion. The light guide unit 101 and the detection unit 110 will be described in detail.

[0008] The light-guiding section 101 has a frustum section 102 and a transmission section 103. The frustum section 102 and the transmission section 103 may be connected to each other or may be integrally formed. The frustum section 102 has an incident section 121 at one end and an exit section 122 at the other end.

[0009] The incident portion 121 has an incident opening 121a and an edge 121b. The incident opening 121a is an opening through which light is incident, with its center O1 and a diameter r1, which is the distance from the center O1 to the edge 121b. The edge 121b is the outline of the incident opening 121a. The incident light from the incident opening 121a is incident inside the frustum portion 102. The surface (opening surface) of the incident opening 121a and the area of ​​the opening surface are denoted as S1.

[0010] The output section 122 has an opening 122a communicating with one end of the transmission section 103 and an edge 122b. The center of the opening 122a is O2, and the diameter, which is the distance from the center O2 to the edge 122b, is r2 (<r1). The edge 122b is the outline of the opening 122a. The light emitted from the opening 122a is incident on the inside of the transmission section 103. The surface (aperture surface) and area of ​​the aperture surface of the opening 122a are denoted as S2. The opening 122a has the same shape as the input port 121a.

[0011] The inner peripheral surface of the frustum portion 102 may be an absorptive surface that absorbs incident light or a reflective surface that reflects incident light. The inner surface of the frustum portion 102 may be hollow or filled with a transparent body that allows light to pass through.

[0012] Here, the frustum portion 102 has a three-dimensional shape obtained by removing the part of a cone having the vertex O and the bottom surface as the opening 122a of the emission portion 122 from a cone having the vertex O and the bottom surface as the entrance 121a of the incidence portion 121. In other words, the frustum portion 102 has a through-hole 123 that penetrates from the entrance 121a to the opening 122a. The vertex O does not necessarily exist on the surface 111 of the detection portion 110, but in FIG. 1 , the vertex O is placed at the center of the surface 111 for convenience.

[0013] Let L be the line segment connecting points O, O1, and O2. Let M be the generatrix of the cone whose vertex is point O and whose base is the entrance 121a of the incident portion 121. Let θ be the angle of incidence of the incident light with respect to line segment L. Let φ be the angle between line segment L and generatrix M. Generatrix M is the line segment connecting point O and the edge 121b of the incident portion 121.

[0014] The transmission unit 103 is a hollow columnar body, i.e., a cylinder. One end 131 of the transmission unit 103 communicates with the emission unit 122. The other end 132 of the transmission unit 103 has an emission port 132a that emits incident light to the detection unit 110 and is connected to the detection unit 110. The openings at the one end 131 and the other end 132 of the transmission unit 103 have the same shape and size. The inner surface of the transmission unit 103 repeatedly undergoes total reflection and internal reflection to efficiently transmit the incident light to the emission unit 122. The through hole from the one end 131 to the other end 132 of the transmission unit 103 is called the transmission path 133.

[0015] The detecting unit 110 has a flat plate shape. A surface 111 of the detecting unit 110 is connected to the other end 132 of the transmitting unit 103. The inner surface of the surface 111 surrounded by the edge of the other end 132 serves as a light receiving surface 112 that receives light transmitted through the transmitting unit 103. A photoelectric conversion unit is provided inside the light receiving surface 112.

[0016] The detection unit 110 photoelectrically converts the light received by the light receiving surface 112 using a photodiode and outputs an electrical signal. This photodiode is made of, for example, silicon or indium gallium arsenide. The electrical signal is output to an image processing unit (not shown). The image processing unit performs image processing based on the electrical signal and displays the subject image on a display unit (not shown). The image processing unit and the display unit may be provided within the detection device 100, or may be provided in a computer outside the detection device 100 that can communicate with the detection device 100. The detection unit 110 may have a function to amplify light.

[0017] Since the transmission section 103 is a cylindrical body, the light receiving surface 112 is substantially flush with and has the same area as the opening 122a of the emission section 122. For this reason, S2 may be referred to as the light receiving area for convenience. The relationship between the opening area S1 and the light receiving area S2 is shown in the following formula (1).

[0018] D=S2 / S1 (1) D is the light receiving surface ratio.

[0019] 2A to 2C are explanatory diagrams showing examples 1 to 3 of the incidence angle dependency of light directly incident on the detection device 100. In FIGS. 2A to 2C (as well as FIGS. 3 and 4), the frustum portion 102 is shown in a cross section perpendicular to the circumferential direction of the entrance 121a and the opening 122a. A and B are points on the edge 121b, and the notation AB indicates the area S1 or its surface. In FIGS. 2A to 2C, 200a to 200c are light beams. When 200a to 200c are not distinguished, they are referred to as light beam 200. 201a to 201c, 202a, and 202b are light rays that define the edge of the light beam 200. When 201a to 201c are not distinguished, they are referred to as light beam 201. When 202a and 202b are not distinguished, they are referred to as light beam 202.

[0020] A ０ is the intersection point between the ray 201 of the direct incident light from the subject and the opening surface S1 of the entrance 121a, and B ０ is the intersection point between the ray 202 of the direct incident light from the subject and the opening surface S1 of the entrance 121a, and A ０ B ０ When written as above, the direct incident light A ０ ~B ０A' and B' are points on the edge 122b, and when written as A'B', it indicates the area S2 or its surface.

[0021] In addition, A ０ , B ０ The subscript 0 is A ０ , B ０ In general, the number of reflections of light passing through the frustum 102 is represented by i and j (i and j are non-negative integers), and A ｉ , B ｊ It is written as follows.

[0022] (a) shows the incidence angle dependence when θ≦φ, (b) shows the incidence angle dependence when θ>φ, and (c) shows the incidence angle dependence when θ>>φ. In (a), the area A ０ B ０ The light beam 200a reaches the opening 122a without being reflected inside the frustum portion 102. That is, in (a), the area A ０ B ０ = S2. Therefore, the light receiving angle characteristic I ０ (θ) is expressed by the following equation (2).

[0023] I ０ (θ) = A ０ B ０ / AB=A'B' / AB...(2)

[0024] In the case of Figure 2B, the light beam 200a of Figure 2A cannot be entirely incident on the entrance 121a, and a missing light beam 200b is incident on the entrance 121a. Therefore, when the light ray 202b is incident on the opening 122a, vignetting occurs at B. Area A ０ B ０ The light beam 200b reaches the opening 122a without being reflected inside the frustum portion 102. That is, in FIG. ０ B ０ <S2.

[0025] 2C, not all of the light beam 200 in FIG. 2A can enter the entrance 121a, and only a light ray 201c enters the entrance 121a. If θ>>φ, the light beam 200 will no longer enter the opening 122a.

[0026] 3 is an explanatory diagram showing the incidence angle dependency of direct incident light and reflected incident light on the detection device 100. Reflected light beams 300a-1u and 300a-1d (reflected incident light 300a-1 when not distinguished) are reflected incident light that enters through the entrance 121a, is reflected once inside the frustum portion 102, and reaches the opening 122a. Reflected light beam 300a-2 is reflected incident light that enters through the entrance 121a, is reflected twice inside the frustum portion 102, and reaches the opening 122a.

[0027] The reflected light beam 300a-1u is incident on the surface A. ０ A １ The reflected light beam 300a-1d passes through the surface B. ０ B １ The reflected light beam 300a-2 passes through the surface A. １ A ２ Pass through.

[0028] The light receiving angle characteristic taking reflected light into consideration is expressed by the following formula (3).

[0029]

[0030] In the above formula (3), R ｉ is the reflectance at the i-th reflection inside the frustum portion 102. ｊ is the reflectance at the j-th reflection inside the frustum portion 102. As the number of reflections i and j increases, the reflectance R ｉ , R ｊ decreases.

[0031] 4 is an explanatory diagram showing another example of the internal configuration of the frustum portion 102. A light-reception preventing member 402 is provided on at least a portion of the inner circumferential surface 401 of the frustum portion 102. The light-reception preventing member 402 reflects incident light 400 and causes the incident light 400 to exit from the incident opening 121a of the incident portion 121. Each of the light-reception preventing members 402 is an annular or arc-shaped member extending in the circumferential direction of the incident opening 121a and the opening 122a. The shape of a cross section of the light-reception preventing member 402 perpendicular to the circumferential direction is, for example, similar to the shape of a cross section of the frustum portion 102 perpendicular to the circumferential direction.

[0032] 4, the light-reception preventing member 402 has a first surface 421 and a second surface 422. The first surface 421 faces the light entrance 121a and reflects incident light to emit it from the light entrance 121a. The second surface 422 reflects the incident light to emit it to the first surface 421 of another light-reception preventing member 402 on the opening 122a side.

[0033] In this way, according to the first embodiment, clear subject detection can be achieved without using a lens. Furthermore, according to the first embodiment, subject detection with high directionality, that is, with a deep depth of field and no concept of focus, can be achieved.

[0034] In the first embodiment, the shapes of the entrance 121 a and the opening 122 a are circular, but they may be polygonal. In this case, the cross-sectional shapes of the frustum portion 102 and the transmission portion 103 that are perpendicular to the line segment L also have the same polygonal shape.

[0035] Furthermore, in the first embodiment, a transparent member may be provided at the light entrance 121 a. By sealing the light entrance 121 a with a transparent plastic member as an example of the transparent member, it is possible to improve the dustproofness of the inside of the frustum portion 102 and the transmission portion 103 while ensuring subject detection. By sealing the light entrance 121 a with a lens as an example of the transparent member, it is possible to improve the light-collecting ability of the incident light and improve the dustproofness of the inside of the light-guiding portion 101 while ensuring subject detection.

[0036] [Embodiment 2] Next, embodiment 2 will be described. In embodiment 1, an example in which one light-guiding section 101 is provided will be described, but in embodiment 2, an example in which a plurality of light-guiding sections 101 are provided will be described. The same components as in embodiment 1 will be assigned the same reference numerals, and descriptions thereof will be omitted.

[0037] 5A is a partial side cross-sectional view of a detection device according to embodiment 2. The detection device 500 has a hemispherical housing 501. The housing 501 has a hemispherical surface 502 and a bottom surface 503. The bottom surface 503 is a circular plate that seals the opening of the hemispherical surface 502. Inside the housing 501, a detection processing unit 510 is provided at the center of the bottom surface 503.

[0038] The detection processing unit 510 is a collection of detection units 110 connected to each of the multiple light guide units 101. The areas on the surface of the detection processing unit 510 connected to each transmission unit 103 constitute photodiodes, which are detection units 110 that become pixels. These photodiodes are arranged two-dimensionally. The other end 132 of each transmission unit 103 is configured so that the end face of the other end 132 is parallel to the surface of the detection processing unit 510.

[0039] The light guiding units 101 are arranged radially from the detection processing unit 510 toward the hemispherical surface 502. For ease of explanation, five light guiding units 101 are arranged radially in FIG. 5 . Adjacent frustum portions 102 are spaced apart. The incident port 121a is located on the hemispherical surface 502. An opening may be formed in the hemispherical surface 502 at the position of the incident port 121a. The hemispherical surface 502 may also have a structure in which the incident port 121a is sealed with a transparent member. The area of ​​the hemispherical surface 502 other than the incident port 121a may be formed of a light-blocking member.

[0040] Fig. 5B is an external view showing two adjacent light guiding units 101. In Fig. 5B, one of the two adjacent light guiding units 101 is light guiding unit 101A, and the other is light guiding unit 101B. The adjacent generatrixes M between light guiding units 101A and 101B are generatrixes MA and MB, respectively. The angle formed by the generatrixes MA and MB is the arrangement angle between light guiding units 101A and 101B, which is the arrangement angle δ.

[0041] When a lens is added to the light entrance 121a, the direction (limitation) of the incident light can be narrowed by the lens, and the arrangement angle δ can be made smaller than when no lens is provided. Therefore, compared to when no lens is provided, more light guide units 101 can be arranged, and high-resolution images can be obtained.

[0042] 6 is a partial plan view of the detection device 500 according to the second embodiment. The edges 121b and 122b are both circles centered at points O1 and O2. The distance from point O1 to the first incident end, which is located on the edge 121b, is a radius r1 of the edge 121b, and the distance from point O1 to the second incident end (a position different from the first incident end) located on the edge 121b is also a radius r1 of the edge 121b. Similarly, the distance from point O2 to the first exit end, which is located on the edge 122b, is a radius r2 of the edge 122b, and the distance from point O2 to the first exit end (a position different from the first exit end) located on the edge 122b is also a radius r2 of the edge 122b.

[0043] 7 is an explanatory diagram showing Example 1 of the arrangement intervals of the plurality of light guiding sections 101. The plurality of light guiding sections 101 are arranged radially from a surface 700 of the detection processing section 510. The other end 132 of each transmission section 103 is connected to the surface 700 of the detection processing section 510.

[0044] 8 is a graph showing MTF characteristics with respect to the arrangement angle δ and the incident angle θ of incident light. In graph 800, the horizontal axis represents the incident angle θ of incident light, and the vertical axis represents MFT (Modulation Transfer Function). Waveforms 801 to 803 represent the MTF characteristics of each light-guiding section 101. The light-guiding section 101 of waveform 801 is adjacent to the light-guiding section 101 of waveform 802, and the light-guiding section 101 of waveform 801 is adjacent to the light-guiding section 101 of waveform 803. Waveforms 801 to 803 are formed with a period of 2φ+δ. 2φ is the opening angle of the frustum section 102.

[0045] The MTF is calculated by the following formula (4).

[0046] MTF=inside response of the opening angle (2φ) of the light guide unit 101 / (inside response of the opening angle (2φ) of the light guide unit 101+outside response from the adjacent light guide unit 101) (4)

[0047] For example, the range of incidence angles θ of peak 802p of waveform 802 includes incidence angles θ of skirt 801hR of waveform 801 (out-of-angle response from adjacent light-guiding unit 101), but does not include incidence angles θ of peak 801p of waveform 801. Similarly, the range of incidence angles θ of peak 803p of waveform 803 includes incidence angles θ of skirt 801hL of waveform 801 (out-of-angle response from adjacent light-guiding unit 101), but does not include incidence angles θ of peak 801p of waveform 801.

[0048] That is, at each of peaks 801p to 803p, MTF=100%, and therefore incident light in light-guiding section 101 of waveform 801 does not leak into each of light-guiding sections 101 of adjacent waveforms 802 and 803. Therefore, by manufacturing detection device 500 with φ and δ set so as to obtain waveforms 801 to 803 of graph 800, it is possible to improve the accuracy of subject detection.

[0049] [Embodiment 3] Next, embodiment 3 will be described. In embodiment 2, the longitudinal length of the transmission section 103 is the same for each light-guiding section 101, but in embodiment 3, the length of each light-guiding section 101 varies depending on the arrangement position. The same components as in embodiments 1 and 2 are denoted by the same reference numerals, and their description will be omitted.

[0050] FIG. 9 is an explanatory diagram showing Example 2 of the arrangement spacing of multiple light guide sections 101. In FIG. 9 , each transmission section 103 is longer the closer it is to the center (the center of the detection processing section 510) within the detection device 500, and shorter the closer it is to the outside. Each transmission section 103 is connected perpendicularly to the surface 700 of the detection processing section 510. In this case, although there are light guide sections 101 in which the line segment L bends at point O2, incident light is reflected within the transmission section 103 and guided to the light receiving surface 112. As a result, by configuring as shown in FIG. 9 , the density of the transmission sections 103 is reduced compared to embodiment 2, and it is possible to reduce the intrusion of incident light leaking from nearby light guide sections 101.

[0051] FIG. 10 is an explanatory diagram showing Example 3 of the arrangement spacing of the plurality of light guide units 101. In FIG. 10, some of the light guide units 101 are configured without the transmission unit 103, and the emission units 122 of the light guide units 101 are directly connected to the surface 700 of the detection processing unit 510. In FIG. 10, these light guide units 101 are designated as light guide units 101L and 101R. An edge 122bL of the emission unit 122 of the light guide unit 101L is directly connected to the surface 700. Similarly, an edge 122bR of the emission unit 122 of the light guide unit 101R is also directly connected to the surface 700.

[0052] That is, light guiding units 101L and 101R are determined so that light emitted from all light guiding units 101 can be received by flat surface 700. The configuration as shown in Fig. 10 makes it possible to reduce the number of parts and the size of detection device 500. Note that the configuration of light guiding units 101L and 101R in Fig. 10 can also be applied to embodiment 1.

[0053] [Embodiment 4] Next, embodiment 4 will be described. In embodiments 1 to 3, the edges 121b and 122b have a circular shape, but in example 5, the edges 121b and 122b have a polygonal shape. The same components as in embodiments 1 to 3 are designated by the same reference numerals, and their description will be omitted.

[0054] Fig. 11 is a partial plan view of a detection device 500 according to the fourth embodiment. In Fig. 11, the shape of the edge 121b is a regular hexagon, not a circle.

[0055] Both edges 121b and 122b are regular hexagons with points O1 and O2 at their centers. In the sixth embodiment, the distance from point O1 to the first incident end, which is a vertex on edge 121b, is defined as r1, and the distance from point O1 to the second incident end, which is a side on edge 121b, is defined as s1 (<r1). Similarly, the distance from point O2 to the first exit end, which is a vertex on edge 122b, is defined as r2, and the distance from point O2 to the second exit end, which is a side on edge 122b, is defined as s2 (<r2).

[0056] 11, the edges 121b and 122b are each a regular hexagon, but may be a polygon other than a regular hexagon as long as s1<r1 and s2<r2 are satisfied. In addition, in the fifth embodiment, the edges 121b and 122b are each a polygon in the second to fourth embodiments, but the edges 121b and 122b in the first embodiment may also be a polygon.

[0057] Although the transmission unit 103 is a hollow cylinder, the inner surface of the cylinder may be metal-plated to reflect light. The transmission unit 103 may also be a cylinder having an optical fiber inside.

[0058] As described above, according to the first to fourth embodiments, one light guiding unit 101 is associated with one detection unit 110 as an ommatidium, and the detection unit 110 detects the intensity of incident light from the light guiding unit 101. Each light guiding unit 101 is optically isolated, and one light guiding unit 101 receives incident light from one direction (the direction of line segment L), so that the plurality of light guiding units 101 as a whole can capture a wide range of images, and the closer the units are to each other, the higher the resolution and the more detailed the image can be captured.

[0059] [Embodiment 5] Next, embodiment 5 will be described. In embodiment 5, a configuration for holding the plurality of light guiding sections 101 shown in embodiments 1 to 4 will be described. The same components as those in embodiments 1 to 4 will be assigned the same reference numerals, and descriptions thereof will be omitted.

[0060] Fig. 12 is a perspective view of a detection device according to a fifth embodiment. Fig. 13 is a side view of a detection device according to the fifth embodiment. In Fig. 13, the light guiding unit 101 on the depth side is omitted. Fig. 14 is a plan view and an AB cross-sectional view of a first holding plate. Fig. 15 is a plan view and a CD cross-sectional view of a second holding plate.

[0061] The detection device 1200 has a plurality of light guiding sections 101 (frustum sections 102 and transmission sections 103), a detection processing section 510, a first holding plate 1201, and a second holding plate 1202 (the second holding plate 1202 is omitted in FIG. 12 for convenience). The plurality of light guiding sections 101 are arranged in a matrix so that the respective incident sections 121 are located on the same curved surface. The other end 132 of each transmission section 103 is connected to the detection processing section 510.

[0062] The first holding plate 1201 and the second holding plate 1202 each hold a plurality of light guide units 101. The first holding plate 1201 and the second holding plate 1202 are plate-shaped members. While the first holding plate 1201 and the second holding plate 1202 are rectangular in shape, they may also be polygonal or circular. Furthermore, the first surface 1201 a and the second surface 1202 a and the first back surface 1201 b and the second back surface 1202 b of the first holding plate 1201 and the second holding plate 1202 may be flat or curved.

[0063] First holding plate 1201 and second holding plate 1202 are each arranged to intersect with the longitudinal direction of light guiding section 101. Specifically, for example, first holding plate 1201 is provided with first through-hole 1301 at a position intersecting with frustum section 102, through which frustum section 102 can be inserted. Furthermore, second holding plate 1202 is provided with second through-hole 1302 at a position intersecting with transmission section 103, through which transmission section 103 can be inserted.

[0064] The detection device 1200 has at least one of a first holding plate 1201 and a second holding plate 1202 .

[0065] The first holding plate 1201 has a plurality of first through holes 1301. The plurality of first through holes 1301 are provided at positions corresponding to the insertion positions of the plurality of frustum portions 102 arranged in a matrix. The first through holes 1301 have a first upper edge 1301a and a first lower edge 1301b.

[0066] The first through-hole 1301 is a hole that penetrates between a first upper edge 1301a and a first lower edge 1301b. The first upper edge 1301a is provided on the first front surface 1201a, and the first lower edge 1301b is provided on the first back surface 1201b. The opening diameter of the first upper edge 1301a is larger than the opening diameter of the first lower edge 1301b.

[0067] Therefore, the emission portion 122 of the frustum portion 102 is inserted from the first upper edge 1301a and protrudes from the first lower edge 1301b, and the frustum portion 102 is held in the first through-hole 1301. Thereafter, the frustum portion 102 held by the first holding plate 1201 through the first through-hole 1301 is connected to the transmission portion 103.

[0068] The second holding plate 1202 has a plurality of second through holes 1302. The plurality of first through holes 1301 are provided at positions corresponding to the insertion positions of the plurality of transmission sections 103 arranged in a matrix. The second through holes 1302 have a second upper edge 1302a and a second lower edge 1302b.

[0069] The second through-hole 1302 is a hole that penetrates between the second upper edge 1302 a and the second lower edge 1302 b. The second upper edge 1302 a is provided on the second front surface 1202 a, and the second lower edge 1302 b is provided on the second rear surface 1202 b. The opening diameter of the second upper edge 1302 a is the same as the opening diameter of the second lower edge 1302 b.

[0070] Therefore, before being connected to the frustum portion 102 and the detection processing unit 510, the transmission portion 103 may be inserted from the second upper edge 1302a and protrude from the second lower edge 1302b, or may be inserted from the second lower edge 1302b and protrude from the second upper edge 1302a.

[0071] Furthermore, the transmission unit 103 is inserted from the second upper edge 1302a and protrudes from the second lower edge 1302b before connection with the frustum portion 102 and after connection with the detection processing unit 510. Furthermore, the transmission unit 103 is inserted from the second upper edge 1302a and protrudes from the second lower edge 1302b before connection with the detection processing unit 510 and after connection with the frustum portion 102.

[0072] The first holding plate 1201 and the second holding plate 1202 are held inside a housing (not shown) of the detection device 1200 .

[0073] In the detection device 1200, the light-guiding unit 101 is configured by the frustum unit 102 and the transmission unit 103, but the light-guiding unit 101 may be configured by only the frustum unit 102. In this case, the detection processing unit 510 is connected to the emission unit 122.

[0074] The frustum portion 102 is configured so that the opening diameter of the entrance 121a is larger than the opening diameter of the exit portion 122, but the opening diameter of the entrance 121a may be the same as the opening diameter of the exit portion 122. This gives the frustum portion 102 a cylindrical shape.

[0075] As described above, according to the fifth embodiment, the structure in which the plurality of light guiding units 101 are held by at least one of the first holding plate 1201 and the second holding plate 1202 improves the positioning accuracy of the plurality of light guiding units 101. This makes it easier to manufacture the detection device 1200.

[0076] Sixth Embodiment Next, a sixth embodiment will be described. In the sixth embodiment, a method for manufacturing a light guide section will be described. The same components as those in the first to fifth embodiments are given the same reference numerals, and the description thereof will be omitted.

[0077] Fig. 16 is an explanatory diagram showing an example of a manufacturing system for a light-guiding component according to embodiment 6. The manufacturing system 1600 includes a laser processing machine 1601, an XY stage 1602, and a control device 1603. In Fig. 16, the X-axis, the Y-axis, and the Z-axis are orthogonal to one another.

[0078] The laser processing machine 1601 irradiates a laser beam onto a processing object 1610. The laser processing machine 1601 forms a groove by irradiating the processing object 1610 with laser beam having a predetermined pulse width (for example, femtosecond pulse) in the Z-axis direction and processing the processing object 1610 into a desired shape.

[0079] The XY stage 1602 is a positioning table that is movable along the X axis and the Y axis that is perpendicular to the X axis. An object to be processed 1610 is fixedly placed on a placement surface 1620 of the XY stage 1602. The placement surface 1620 is parallel to a plane defined by the X axis and the Y axis.

[0080] The control device 1603 controls the irradiation time of the laser beam from the laser processing machine 1601 and the movement of the XY stage 1602. For example, the control device 1603 adjusts the depth of a groove formed in the Z-axis direction by increasing or decreasing the irradiation time of the laser beam from the laser processing machine 1601. Furthermore, for example, the control device 1603 can form a groove long in the Y direction in the processing object 1610 with the laser beam from the laser processing machine 1601 by moving the XY stage 1602 in the Y direction, and can adjust the width of the groove long in the Y direction with the laser beam from the laser processing machine 1601 by moving the XY stage 1602 in the X direction.

[0081] The size of the groove can be controlled by the power of the laser light (irradiation diameter), the number of pulses (time) to be irradiated, and the positional movement of the XY stage 1602 .

[0082] The irradiation time length and timing of the change caused by the irradiation time control of the laser beam from the laser processing machine 1601, and the movement amount and timing caused by the movement control of the XY stage 1602 are set in advance in the control device 1603.

[0083] The processing object 1610 is a workpiece made of metal, glass, or ceramics. The shape of the processing object 1610 is, for example, a plate-like workpiece having a trapezoidal cross section in the YZ plane direction. A front surface 1611 and a back surface 1612, which are inclined surfaces of the processing object 1610, are irradiated with laser light from the laser processing machine 1601. For example, after the front surface 1611 is irradiated, the back surface 1612 is fixed and placed so as to face the laser processing machine 1601 by a person or a mechanism (not shown).

[0084] The thickness of the processing object 1610 in the Z-axis direction varies depending on the position in the Y-axis direction. Therefore, the control device 1603 controls the laser processing machine 1601 so that the output is higher in the portion of the processing object 1610 that is thicker in the Z-axis direction, and controls the movement of the XY stage 1602 so that the width of the groove in the X-axis direction increases.

[0085] 17 is a perspective view showing an example of a light-guiding component produced by manufacturing system 1600. Light-guiding component 1700 is produced by manufacturing system 1600 processing object 1610. That is, first grooves 1711 and 1712 are formed on front surface 1611 of light-guiding component 1700, and second grooves 1721 to 1723 are formed on back surface 1612.

[0086] The first grooves 1711, 1712 and the second grooves 1721 to 1723 are, for example, generally trapezoidal in shape and are machined so that their shapes become smaller from the front end face 1701 toward the rear end face 1702. The first grooves 1711, 1712 and the second grooves 1721 to 1723 may also be semicircular in shape.

[0087] Fig. 18 is an explanatory diagram showing an example of connections of light guide components 1700. Fig. 18 shows a structure 1800 in which six light guide components 1700 are stacked in the Z axis direction. Specifically, for example, the front surfaces 1611 or the back surfaces 1612 of two light guide components 1700 adjacent to each other in the Z axis direction are connected to each other, thereby stacking the six light guide components 1700 in the Z axis direction.

[0088] When the surfaces 1611 of two light-guiding components 1700 adjacent to each other in the Z-axis direction are connected to each other, the first grooves 1711 and 1712 of the light-guiding components 1700 face each other, thereby forming a first through hole 1801. Similarly, when the back surfaces 1612 of two light-guiding components 1700 adjacent to each other in the Z-axis direction are connected to each other, the second grooves 1721 to 1723 of the light-guiding components 1700 face each other, thereby forming a second through hole 1802. The structure 1800 is a structure in which the first through hole 1801 and the second through hole 1802 are the light-guiding portion 101 or the frustum portion 102.

[0089] Two adjacent light guide components 1700 are connected by, for example, screwing or crimping. In the case of screwing, a screw hole is formed that penetrates all six light guide components 1700. Note that the shorter the pulse width of the laser light, the more effectively burrs that are generated on the front surface 1611 and the back surface 1612 of the workpiece 1610 during processing are suppressed, and the more effectively gaps between two adjacent light guide components 1700 are suppressed.

[0090] In the structure 1800, the front end surface 1701 of each light-guiding component 1700 is a light incident surface, and the rear end surface 1702 of each light-guiding component 1700 is a light exit surface. Hereinafter, the connected plurality of front end surfaces 1701 will be referred to as the incident surface 1701, and the connected plurality of rear end surfaces 1702 will be referred to as the exit surface 1702.

[0091] Light enters through the openings of the first through-hole 1801 and the second through-hole 1802 formed in the incident surface 1701 and exits through the openings of the first through-hole 1801 and the second through-hole 1802 formed in the exit surface 1702.

[0092] The structure 1800 is applied to the detection device 100 as a plurality of light guide sections 101 as shown in the above-described first to fourth embodiments. Specifically, for example, the emission surface 1702 of the structure 1800 is connected to the detection processing section 510. More specifically, the detection section 110 is connected to each of the openings of the first through hole 1801 and the second through hole 1802 on the emission surface 1702 side. This makes it possible to receive light that has passed through the first through hole 1801 and the second through hole 1802.

[0093] Furthermore, the structure 1800 may be applied to the detection device 100 as a plurality of frustum portions 102 as shown in the above-described first to fourth embodiments. In this case, one end 131 of the transmission portion 103 is connected to each of the openings of the first through hole 1801 and the second through hole 1802 on the side of the emission surface 1702, and the detection portion 110 is connected to each of the other ends 132 of the transmission portion 103. This makes it possible to receive light that has passed through the first through hole 1801, the second through hole 1802, and the transmission portion 103.

[0094] 19 is an explanatory diagram showing an example of another processing object. Processing object 1910 has a rectangular parallelepiped shape and is different in shape from processing object 1610. A front surface 1911 and a back surface 1912 of processing object 1910 are irradiated with laser light from laser processing machine 1601. For example, after front surface 1911 is irradiated, back surface 1912 is fixed and placed facing laser processing machine 1601 by a person or a mechanism (not shown).

[0095] Fig. 20 is a front view and a plan view showing another example of a light-guiding component produced by the manufacturing system 1600. Fig. 21 is a front view and a bottom view showing another example of a light-guiding component produced by the manufacturing system 1600.

[0096] Light-guiding component 2000 is produced by manufacturing system 1600 processing object 1910. That is, first grooves 2011 to 2013 are formed in front surface 1911 of light-guiding component 1900, and second grooves 2021 to 2023 are formed in rear surface 1912.

[0097] The first grooves 2011 to 2013 and the second grooves 2021 to 2023 are, for example, substantially trapezoidal in shape, and are machined so that the shape becomes smaller from the front end face 2001 toward the rear end face 2002 .

[0098] Approximately U-shaped fitting grooves 2031 and 2032 are machined on both side edges along the Y-axis direction of front surface 1911 of light guiding component 2000. Approximately U-shaped fitting ridges 2041 and 2042 are machined on both side edges along the Y-axis direction of back surface 1912 of light guiding component 2000.

[0099] Fig. 22 is an explanatory diagram showing an example of connection of light-guiding components 2000. Fig. 22 shows a structure 2200 in which six light-guiding components 2000 are stacked in the Z-axis direction. Specifically, for example, the front surface 1911 and the back surface 1912 of two light-guiding components 2000 adjacent in the Z-axis direction are connected to each other, thereby stacking the six light-guiding components 2000 in the Z-axis direction. The structure 2200 is a structure in which the through-hole 2201 serves as the light-guiding portion 101 or the frustum portion 102.

[0100] By connecting the front surface 1911 and the back surface 1912 of two light guiding components 2000 adjacent to each other in the Z axis direction, the first grooves 2011 to 2013 and the second grooves 2021 to 2023 of each light guiding component 2000 face each other, thereby forming a through hole 2201. At this time, fitting protrusions 2041 and 2042 provided on the back surface 1912 of the upper light guiding component 2000 of the two light guiding components 2000 adjacent to each other in the Z axis direction fit into fitting grooves 2031 and 2032 provided on the front surface 1911 of the lower light guiding component 2000. This restricts misalignment of the light guiding components 2000 in the X axis direction and the Y axis direction, improving the positioning accuracy of the through hole 2201.

[0101] Two adjacent light-guiding components 2000 are connected by, for example, screwing or crimping. In the case of screwing, a screw hole is formed so as to penetrate all six light-guiding components 2000. Note that, as the pulse width of the laser light becomes shorter, burrs generated on the front surface 1911 and the back surface 1912 of the workpiece 1910 during processing can be more effectively suppressed, and gaps between two adjacent light-guiding components 2000 can be more effectively suppressed.

[0102] In the structure 2200, the front end surface 2001 of each light-guiding component 2000 serves as a light incident surface, and the rear end surface 2002 of each light-guiding component 2000 serves as a light exit surface. Hereinafter, the connected plurality of front end surfaces 2001 will be referred to as the incident surface 2001, and the connected plurality of rear end surfaces 2002 will be referred to as the exit surface 2002.

[0103] Light enters through the opening of the through-hole 2201 formed in the incident surface 2001 and exits through the opening of the through-hole 2201 formed in the exit surface 2002 .

[0104] The structure 2200 is applied to the detection device 100 as a plurality of light guide sections 101 as shown in the above-described first to fourth embodiments. Specifically, for example, the emission surface 2202 of the structure 2200 is connected to the detection processing section 510. More specifically, the detection section 110 is connected to each of the openings of the through-holes 2201 on the emission surface 2202 side. This makes it possible to receive light that has passed through the through-holes 2201.

[0105] [Embodiment 7] Next, embodiment 7 will be described. Embodiment 7 shows a manufacturing method for manufacturing a light guide section by stacking, in the thickness direction, plate-like members each having a plurality of through holes in the thickness direction. The same components as those in embodiments 1 to 4 are given the same reference numerals, and their description will be omitted.

[0106] Fig. 23 is a perspective view showing an example of a structure 2300 according to the seventh embodiment. Fig. 24 is a first cross-sectional view of the structure 2300 according to the seventh embodiment. The cross-sectional view shown in Fig. 24 shows a cross-section of the structure 2300 taken along cross-section 2340 in Fig. 23. Fig. 25 is a second cross-sectional view of the structure 2300 according to the seventh embodiment. The cross-sectional view shown in Fig. 25 shows a cross-section of the structure 2300 taken along cross-section 2350 in Fig. 23.

[0107] The structure 2300 is generated by stacking a first plate-shaped member 2301 and a second plate-shaped member 2302. The stacking direction of the first plate-shaped member 2301 and the second plate-shaped member 2302 is defined as z. Two axes perpendicular to z are defined as x and y. x and y are assumed to be perpendicular to each other.

[0108] In the examples of Figures 23 to 25, there are seven first plate-shaped members 2301, but this is not limited to seven. There are six second plate-shaped members 2302, but this is not limited to six. Furthermore, the thickness of the first plate-shaped members 2301 is arbitrary, and different first plate-shaped members 2301 may have different thicknesses. Similarly, the thickness of the second plate-shaped members 2302 is arbitrary, and different second plate-shaped members 2302 may have different thicknesses. Furthermore, the thickness of the first plate-shaped members 2301 and the thickness of the second plate-shaped members 2302 may be different.

[0109] First, the first plate-shaped members 2301 will be described. Each of the first plate-shaped members 2301 has a plurality of first through holes 2311 penetrating substantially in the z direction. Each of the first plate-shaped members 2301 also has third through holes 2313 for positioning that penetrate in the z direction at its four corners. In each of the first plate-shaped members 2301, 81 first through holes 2311 are provided in a matrix. Note that the number of first through holes 2311 is not limited to 81, but the number of first through holes 2311 in multiple first plate-shaped members 2301 will be the same.

[0110] The higher the first plate-like member 2301 is positioned in the z direction, the wider the opening diameter of the first through hole 2311, and the lower the first plate-like member 2301 is positioned, the smaller the opening diameter of the first through hole 2311. Furthermore, as the opening diameter becomes smaller, the interval between adjacent first through holes 2311 also becomes narrower.

[0111] The bottom surface 2412 of one first plate-shaped member 2301 adjacent in the z direction comes into contact with the top surface 2411 of the other first plate-shaped member 2301 disposed below it. This causes the first through holes 2311 of the one first plate-shaped member 2301 to communicate with the first through holes 2311 of the other first plate-shaped member 2301. This forms first light guide paths 2331. The number of first light guide paths 2331 formed is the same as the number of first through holes 2311 provided in one first plate-shaped member 2301 (81 in this example).

[0112] 23 and 24 , the first light guide path 2331 is formed so as to extend from the uppermost first plate member 2301 in the z direction toward the center of the lowermost first plate member 2301. The first plate members 2301 are formed so that the opening diameter thereof becomes shorter as it extends from the uppermost first plate member 2301 in the z direction toward the center of the lowermost first plate member 2301.

[0113] Therefore, the first light guide path 2331 has a structure similar to the space inside the frustum portion 102 shown in the first to fourth embodiments.

[0114] The third through holes 2313 are provided with the same opening diameter and at the same position in the first plate-shaped member 2301. A thread groove is formed on the inner circumferential surface of the third through holes 2313. By stacking the first plate-shaped members 2301 in the z direction, the multiple third through holes 2313 in the z direction are connected to each other, thereby forming first screw holes 2501.

[0115] Next, the second plate-shaped members 2302 will be described. Each of the second plate-shaped members 2302 has a plurality of second through holes 2322 penetrating in the z direction. Each of the second plate-shaped members 2302 also has fourth positioning through holes 2324 penetrating in the z direction at its four corners. In each of the second plate-shaped members 2302, 81 second through holes 2322 are provided in a matrix. Note that the number of second through holes 2322 is not limited to 81, but the number of second through holes 2322 in multiple second plate-shaped members 2302 will be the same.

[0116] The second through holes 2322 are provided with the same opening diameter and at the same positions in the multiple second plate-shaped members 2302. The bottom surface 2422 of one second plate-shaped member 2302 adjacent in the z direction comes into contact with the top surface 2421 of the other second plate-shaped member 2302 disposed below it. This allows the second through holes 2322 of the one second plate-shaped member 2302 to communicate with the second through holes 2322 of the other second plate-shaped member 2302 in the z direction. This forms second light guide paths 2332. The number of second light guide paths 2332 is the same as the number of second through holes 2322 provided in one second plate-shaped member 2302 (81 in this example).

[0117] In this way, the second light guide path 2332 has a structure similar to the cylindrical space inside the transmission section 103 shown in the first to fourth embodiments.

[0118] Furthermore, the fourth through holes 2324 are provided in the second plate-like member 2302 with the same opening diameter and at the same position. The fourth through holes 2324 have the same shape and size as the third through holes 2313, and, like the third through holes 2313, are provided in the four corners of the second plate-like member 2302. A thread groove is formed on the inner circumferential surface of the fourth through holes 2324. By stacking the second plate-like members 2302 in the z direction, the multiple fourth through holes 2324 in the z direction are connected to each other, thereby forming second screw holes 2502.

[0119] Next, the boundary between the first plate-shaped member 2301 and the second plate-shaped member 2302 will be described. The first plate-shaped member 2301 in the lowest layer among the plurality of first plate-shaped members 2301 is connected to the second plate-shaped member 2302 in the highest layer among the plurality of second plate-shaped members 2302. Specifically, for example, the bottom surface 2412 of the first plate-shaped member 2301 in the lowest layer comes into contact with the top surface 2421 of the second plate-shaped member 2302 in the highest layer.

[0120] Furthermore, the opening diameter of the first through hole 2311 on the bottom surface 2412 side of the first plate-shaped member 2301 in the lowest layer is the same as the opening diameter of the second through hole 2322. The first through hole 2311 in the first plate-shaped member 2301 in the lowest layer is provided at a position that communicates with the second through hole 2322 when the second plate-shaped member 2302 in the uppermost layer comes into contact with the first plate-shaped member 2301 in the lowest layer. Therefore, by stacking a plurality of first plate-shaped members 2301 and a plurality of second plate-shaped members 2302, the first light guide path 2331 and the second light guide path 2332 communicate with each other. This forms the through hole 2330.

[0121] Furthermore, the third through hole 2313 of the first plate-shaped member 2301 in the lowest layer is positioned so as to communicate with the fourth through hole 2324 when the second plate-shaped member 2302 in the uppermost layer comes into contact with the first plate-shaped member 2301 in the lowest layer. Therefore, by stacking the plurality of first plate-shaped members 2301 and the plurality of second plate-shaped members 2302, the first screw hole 2501 and the second screw hole 2502 communicate with each other. This forms the fourth through hole 2314. Then, by threading screws (not shown) into each of the four fourth through holes 2314, the plurality of first plate-shaped members 2301 and the plurality of second plate-shaped members 2302 are fixed together.

[0122] In addition to connection by screws, the structure 2300 may also be generated by crimping between first plate-shaped members 2301 adjacent in the z direction, between second plate-shaped members 2302 adjacent in the z direction, or between the first plate-shaped member 2301 and the second plate-shaped member 2302 adjacent in the z direction.

[0123] The first plate-shaped member 2301 is placed on the XY stage 1602 of the manufacturing system 1600 of the sixth embodiment, and is irradiated with laser light from the laser processing machine 1601, thereby forming the first through-hole 2311 and the third through-hole 2313. In this case, the XY stage 1602 may be tilted from the Z-axis direction, or the irradiation direction of the laser light from the laser processing machine 1601 may be tilted from the Z-axis direction, so that the first plate-shaped member 2301 is inclined with respect to the Z-axis direction.

[0124] Furthermore, the second plate-shaped member 2302 is placed on the XY stage 1602 of the manufacturing system 1600 and irradiated with laser light from the laser processing machine 1601, thereby forming the second through-hole 2322 and the fourth through-hole 2324.

[0125] The structure 2300 is applied to the detection device 100 as a plurality of light guide sections 101 as shown in the above-described first to fourth embodiments. Specifically, for example, the bottom surface 2422 of the second plate-shaped member 2302 in the lowest layer of the structure 2300 is connected to the detection processing section 510. More specifically, the detection section 110 is connected to each of the openings of the second through holes 2322 on the bottom surface 2422 side of the second plate-shaped member 2302 in the lowest layer. This makes it possible to receive light that has passed through the first light guide path 2331 and the second light guide path 2332.

[0126] Furthermore, the structure 2300 may be configured with a plurality of first plate-shaped members 2301 without using a plurality of second plate-shaped members 2302. In this case, the bottom surface 2412 of the first plate-shaped member 2301 in the lowest layer of the structure 2300 is connected to the detection processing unit 510. More specifically, the detection unit 110 is connected to each of the openings of the first through-holes 2321 on the bottom surface 2412 side of the first plate-shaped member 2301 in the lowest layer. This makes it possible to receive light that has passed through the first light guide path 2331.

[0127] Furthermore, in the structure 2300, the first light guide paths 2331 are configured to be inclined toward the central first light guide path 2331 as they are positioned further outward, but the inner circumferential surface of the first light guide path 2331 may be formed to be parallel to the z-axis. This will be described in detail below.

[0128] Fig. 26 is another first cross-sectional view of the structure 2300 according to embodiment 7. The cross-sectional view shown in Fig. 26 shows a cross-section of the structure 2300 cut at cross-section 2340 in Fig. 23. The description of Fig. 26 will focus on differences from Fig. 24.

[0129] First, the first plate-shaped members 2301 will be described. Each of the first plate-shaped members 2301 has a plurality of first through holes 2611 that penetrate substantially in the z direction. In each of the first plate-shaped members 2301, 81 first through holes 2611 are provided in a matrix. Note that the number of first through holes 2611 is not limited to 81, but the number of first through holes 2611 in the multiple first plate-shaped members 2301 is the same.

[0130] The higher the first plate-shaped member 2301 is positioned in the z direction, the wider the opening diameter of the first through hole 2311, and the lower the first plate-shaped member 2301 is positioned, the smaller the opening diameter of the first through hole 2311. However, unlike in Figures 23 and 24 , in each of the first plate-shaped members 2301, the central first through hole 2611 has a larger opening diameter than the other first through holes 2611.

[0131] Here, the first light guide path 2631 formed by the first through hole 2611 at the center of each of the plurality of first plate-shaped members 2301 is referred to as a first light guide path 2631A, and the other first light guide paths 2631 are referred to as first light guide paths 2631B.

[0132] In the first cross section, the generatrix of the inner circumferential surface of the first through hole 2611 on both sides in the y direction of the first light guide path 2631A is stepped.

[0133] In first light guide path 2631B, the generatrix of the inner circumferential surface of first through hole 2611 on the side away from first light guide path 2631A in the first cross section is stepped, similar to first light guide path 2631A. In contrast, the generatrix of the inner circumferential surface of first through hole 2611 on the side closer to first light guide path 2631A is straight.

[0134] In this way, the first light guide paths 2631A and 2631B have steps, and therefore have the same function as the light reception preventing member 402 of embodiment 1. Therefore, like the light reception preventing member 402, incident light can be reflected.

[0135] A first plate-shaped member 2301 is placed on the XY stage 1602 of the manufacturing system 1600 of the sixth embodiment, and a laser beam from the laser processing machine 1601 is irradiated onto the first plate-shaped member 2301, thereby forming a first through-hole 2611 and a third through-hole 2313. Similarly, a second plate-shaped member 2302 is placed on the XY stage 1602 of the manufacturing system 1600, and a laser beam from the laser processing machine 1601 is irradiated onto the second plate-shaped member 2302, thereby forming a second through-hole 2622 and a fourth through-hole 2324.

[0136] As a result, the first through-hole 2611 penetrates in a direction (z direction) perpendicular to the top surface 2411 of the first plate-shaped member 2301. Therefore, in the manufacturing system 1600, the laser beam from the laser processing machine 1601 can be irradiated perpendicularly onto the top surface 2411, which makes it easier to control processing in the manufacturing system 1600.

[0137] In addition to processing with laser light, the first through-hole 2611 and the third through-hole 2313 may be formed by drilling the first plate-shaped member 2301. Similarly, the second through-hole 2612 and the fourth through-hole 2314 may be formed by drilling the second plate-shaped member 2302.

[0138] The present embodiment is not limited to the above-described contents, and may be any combination thereof. In addition, other aspects that can be conceived within the scope of the technical idea of ​​the present embodiment are also included in the scope of the present embodiment.

[0139] 100 Detecting device, 101 Light guiding section, 102 Frustum section, 103 Transmission section, 110 Detecting section, 112 Light receiving surface, 121 Incident section, 121a Incident port, 123 Through hole, 132a Outlet, 133 Transmission path, 401 Inner peripheral surface, 402 Light reception prevention member, 500 Detecting device, 510 Detecting section

Claims

1. A detection device comprising: a light guide section having a light entrance and an exit opening smaller than the entrance opening, which emits light incident from the entrance opening out of the exit opening; and a detection section which detects the light emitted from the exit opening.

2. The detection device according to claim 1, wherein the light guide section has a truncated cone-shaped through hole having the entrance and the exit, and the light incident from the entrance passes through the through hole and exits from the exit.

3. A detection device as described in claim 1, wherein the edge of the entrance has an entrance end located a first distance from the center of the entrance opening and another entrance end other than the entrance end located at the first distance from the center of the entrance opening, and the edge of the exit opening has an exit end located a second distance from the center of the exit opening that is shorter than the first distance, and another exit end other than the exit end located at the second distance from the center of the exit opening.

4. The detection device according to claim 3, wherein the entrance and exit apertures are circular in shape.

5. A detection device as described in claim 1, wherein the edge of the entrance has an entrance end located a third distance from the center of the entrance opening and another entrance end other than the entrance end located a fourth distance from the center of the entrance opening that is shorter than the third distance, and the edge of the exit opening has an exit end located a fifth distance from the center of the exit opening that is shorter than the third distance and another exit end other than the exit end located a sixth distance from the center of the exit opening that is shorter than the fifth distance.

6. The detection device according to claim 5, wherein the entrance and exit are polygonal in shape.

7. The detection device according to claim 6, wherein the polygon is a hexagon.

8. The detection device according to claim 1, wherein the inner peripheral surface of the light guide portion is a reflective surface that reflects light.

9. The detection device according to claim 1, wherein the inner circumferential surface of the light guide portion has a member that reflects light in the direction of the entrance.

10. The detection device according to claim 9, wherein the detection unit is provided at the exit port.

11. The detection device according to claim 1, wherein the entrance has a member for focusing light in the direction of the exit.

12. The detection device according to claim 1, wherein the light guide portion has a transmission portion that transmits light.

13. The detection device according to claim 12, wherein the transmission section has one end to which light from the entrance is incident and another end from which the light incident at the one end is emitted.

14. The detection device according to claim 13, wherein the opening at one end of the transmission section and the opening at the other end are approximately equal in size.

15. The detection device according to claim 1, wherein the detection section is made of indium gallium arsenide.

16. The detection device according to claim 1, wherein the light-guiding sections are arranged such that the entrances thereof are spaced apart from one another.

17. The detection device according to claim 15, wherein the plurality of light guide sections are arranged radially from the light exit port toward the light entrance port.

18. The detection device according to claim 16, wherein the detection unit has photodiodes, and the photodiodes are arranged two-dimensionally.

19. The detection device described in claim 16, wherein the light-guiding section has a transmission section including one end into which light from the entrance port is incident and the other end from which light incident at the one end is emitted, and among the plurality of light-guiding sections, the light-guiding sections that are located outside the light-guiding section located at the center of the detection section have a shorter transmission section that transmits light from one end to the other end between the entrance port and the exit port.

20. The detection device described in claim 17, wherein the light-guiding section has a transmission section including one end into which light from the entrance is incident and the other end from which light incident at the one end is emitted, and among the plurality of light-guiding sections, light-guiding sections that are outside the light-guiding section located at the center of the detection section do not have the transmission section.

21. The detection device according to claim 16, wherein the plurality of light guides are arranged in a substantially hemispherical shape.