Emitter
The emitter's innovative terminal design with precise fixing surfaces stabilizes resonance and suppresses vibrations, ensuring a stable electron beam supply and improved performance in electron microscopes by controlling filament fixation and resonance characteristics.
WO2024262270A1PCT designated stage expired Publication Date: 2024-12-26DENKA CO LTD
Patent Information
- Application Number
- PCT/JP2024/019740
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2023-06-22
- Filing Date
- 2024-05-29
- Publication Date
- 2024-12-26
Smart Images
Figure JP2024019740_26122024_PF_FP_ABST
Abstract
This emitter comprises: an insulator; a pair of terminals extending along a predetermined direction and fixed to the insulator so as to be separated from each other; a filament fixed to the pair of terminals; and a chip part formed of an electron emission material and fixed to the filament. Each of the pair of terminals has a fixed surface, and the fixed surface protrudes or is recessed in a direction perpendicular to a predetermined direction at the terminal with respect to a surface located on the insulator side of the fixed surface in the predetermined direction. The filament is fixed to the pair of terminals on the fixed surface. When the protruding height from the pair of terminals of the filament in the predetermined direction is designated as H and the length of the fixed surface in the predetermined direction is designated as L, L / H is 0.4 or less.
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Citation Information
Patent Citations
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