Non-transparent thin film element measuring system, and measuring method

Abstract

The present invention belongs to the technical field of optical analysis instruments. Disclosed are a non-transparent thin film element measuring system, and a measuring method, solving the problems in the prior art that the thickness measurement precision of non-transparent thin films is insufficient and non-transparent thin films are prone to damage. The non-transparent thin film element measuring system comprises a light-emitting assembly, optical fibers, an optical fiber collimator, a measuring mechanism, a fiber optic spectrometer and a terminal device; the light-emitting assembly and the fiber optic spectrometer are connected to the optical fiber collimator by means of the optical fibers; during use, a light source emitted by the light-emitting assembly is transmitted to the optical fiber collimator by means of an optical fiber, the optical fiber collimator forms parallel light that illuminates the measuring mechanism on which a non-transparent thin film is placed, a Fabry-Perot chamber having a light interference function is formed in the measuring mechanism and reflects the light to the optical fiber collimator, the optical fiber collimator transmits same to the fiber optic spectrometer by means of the optical fibers, and the terminal device completes measurement of the thickness of the non-transparent thin film through calculation. The present invention does not damage non-transparent thin films, and can satisfy the thickness measurement precision.

Description

Non-transparent thin film element measurement system and measurement method Technical Field

[0001] The present invention belongs to the technical field of optical analysis instruments, and in particular relates to a non-transparent thin film element measurement system and a measurement method. Background Art

[0002] With the development of science and technology, non-transparent film materials have gradually been widely used, especially soft non-transparent films, such as the insulating ion exchange membranes used in new energy batteries and non-woven fabrics in medical masks. The thickness of non-transparent films needs to be measured.

[0003] Currently, conventional technologies for measuring the thickness of micron-level transparent films include spectral confocal method, white light interferometry and ellipsometry. For non-transparent films, these conventional methods that use light beams to pass through transparent materials cannot be used. If a mechanical probe is used to measure the thickness of a non-transparent film, the measurement limit of the mechanical probe is a few microns, which is not accurate enough for measuring non-transparent films. In addition, it is easy to damage the non-transparent film. The industry also uses a double-sided spectral confocal method to measure the thickness of non-transparent films, that is, a spectral confocal displacement sensor is used on each side of the non-transparent film to simultaneously measure the distance between the two sides of the non-transparent film. The difference in the distance between the two sides is then calculated with reference to the same reference, which is the thickness of the non-transparent film. The disadvantage of this method is that it is difficult to achieve an accuracy of tens of nanometers. Especially for soft non-transparent films, because they are prone to wrinkling during measurement, there will be greater errors. Technical issues

[0004] The object of the present invention is to provide a non-transparent film element measurement system and measurement method, which solves the problem of insufficient accuracy and easy damage to the non-transparent film in the prior art thickness measurement of the non-transparent film. Technical Solutions

[0005] In order to achieve the above-mentioned purpose, the technical solution of the present invention is implemented as follows: a non-transparent thin film element measurement system includes a light-emitting component, an optical fiber, a fiber collimator, a measuring mechanism and a fiber optic spectrometer, the light-emitting component and the fiber optic spectrometer are connected to the fiber optic collimator through the optical fiber. When in use, the light source emitted by the light-emitting component is transmitted to the fiber optic collimator through the optical fiber. The fiber optic collimator forms parallel light and then irradiates the measuring mechanism on which the non-transparent film is placed. A Fabry-Perot cavity with an optical interference function is formed in the measuring mechanism, and the light is reflected to the fiber optic collimator. The fiber optic collimator transmits the light to the fiber optic spectrometer through the optical fiber, and the fiber optic spectrometer completes the detection of the thickness of the non-transparent film.

[0006] In some embodiments, the measuring mechanism includes a first optical plate and a second optical plate, and at least two non-transparent films are placed between the first optical plate and the second optical plate.

[0007] In some embodiments, the measuring mechanism further includes at least two spheres disposed between the first optical plate and the second optical plate, and at least two non-transparent films are placed between the spheres and the second optical plate.

[0008] In some embodiments, the measuring mechanism further includes two brackets, the two brackets are disposed between the first optical plate and the second optical plate, and the non-transparent film is placed between the two brackets.

[0009] In some embodiments, the first optical plate and the second optical plate are arranged in parallel, and the first optical plate and the second optical plate are equidistant from each other.

[0010] In some embodiments, the at least two spheres are evenly distributed at both ends of the first optical plate.

[0011] In some embodiments, the non-transparent film has the same shape as the first optical plate and the second optical plate.

[0012] In some embodiments, the stent is a ring-shaped metal stent.

[0013] In some embodiments, the first optical plate and the second optical plate are positioned parallel to a horizontal plane.

[0014] In some embodiments, the optical fiber is a Y-shaped optical fiber, the light-emitting component emits light and transmits it to the optical fiber collimator through one side of the Y-shaped optical fiber. The optical fiber collimator forms parallel light and then projects it onto the measuring mechanism to form interference light. The Fabry-Perot cavity with light interference function inside then reflects the interference light to the optical fiber collimator and then transmits it to the optical fiber spectrometer through the other side of the Y-shaped optical fiber.

[0015] In some embodiments, the non-transparent thin film element measurement system further includes a terminal device, and the fiber optic spectrometer is connected to the terminal device.

[0016] Another technical solution of the present invention is: a non-transparent thin film component measurement method, using a non-transparent thin film component measurement system, the method comprising the following steps:

[0017] Step 1: placing the non-transparent film to be measured in thickness in the measuring mechanism;

[0018] Step 2: The light source emitted by the light-emitting component is transmitted to the fiber collimator through the optical fiber. The fiber collimator forms parallel light and then irradiates the measuring mechanism. A Fabry-Perot cavity with an optical interference function is formed in the measuring mechanism, and the light is reflected to the fiber collimator. The fiber collimator transmits the light to the fiber spectrometer through the optical fiber. The detector calculates the thickness of the Fabry-Perot cavity when the non-transparent film is placed based on the reflected light with interference fringes formed by the fiber spectrometer.

[0019] Step 3: When the non-transparent film element measurement system is unloaded, the detector calculates the thickness of the Fabry-Perot cavity when no non-transparent film is placed based on the reflected light with interference fringes formed by the fiber optic spectrometer;

[0020] Step 4: Subtract the thickness of the system with the non-transparent film placed obtained in step 2 from the thickness of the non-transparent film element measurement system without load obtained in step 3 to obtain the thickness of the non-transparent film. Beneficial effects

[0021] Compared with the prior art, the light emitting component in the non-transparent film element measurement system of the present invention emits a light source which passes through an optical fiber, an optical fiber collimator, a measuring mechanism, an optical fiber and an optical fiber spectrometer in sequence. When in use, the non-transparent film is placed in the measuring mechanism, and the measuring mechanism forms a Fabry-Perot cavity with an optical interference function. The optical fiber spectrometer performs light splitting to form reflected light with interference fringes. The detector calculates the interval of the Fabry-Perot cavity based on the reflected light with interference fringes to obtain the thickness of the non-transparent film. The present invention can measure non-transparent films without causing damage to the non-transparent film and can also meet the requirements of thickness measurement accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] FIG1 is a schematic structural diagram of a non-transparent thin film element measurement system provided in Example 1 of the present invention;

[0023] FIG2 is a schematic structural diagram of a non-transparent thin film element measurement system provided in Example 2 of the present invention;

[0024] FIG3 is a schematic diagram of the unloaded structure of a non-transparent thin film element measurement system provided in Example 2 of the present invention;

[0025] FIG4 is a schematic structural diagram of a non-transparent thin film element measurement system provided in Example 3 of the present invention;

[0026] FIG5 is a schematic diagram of the unloaded structure of a non-transparent thin film element measurement system provided in Example 3 of the present invention;

[0027] FIG6 is a diagram of thin film light interference fringes measured by the non-transparent thin film element measurement system of the present invention.

[0028] In the figure, 1. light-emitting component, 2. optical fiber, 3. optical fiber collimator, 4. measuring mechanism, 41. first optical plate, 42. second optical plate, 43. sphere, 44. bracket, 5. optical fiber spectrometer, 6. terminal device. Best Mode for Carrying Out the Invention

[0029] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0030] In the description of the present invention, it should be clarified that the terms "vertical", "transverse", "longitudinal", "front", "rear", "left", "right", "up", "down", "horizontal", etc. indicating orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not mean that the device or element referred to must have a specific orientation or position, and therefore cannot be understood as a limitation on the present invention. In the description of the present invention, it should be noted that, unless otherwise clearly stipulated and limited, the terms "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. Example 1

[0031] The non-transparent thin film element measurement system provided in Example 1 of the present invention is shown in Figure 1 and includes a light-emitting component 1, an optical fiber 2, a fiber collimator 3, a measuring mechanism 4 and a fiber spectrometer 5. The light-emitting component 1 and the fiber spectrometer 5 are connected to the fiber collimator 3 through the optical fiber 2. When in use, the light source emitted by the light-emitting component 1 is transmitted to the fiber collimator 3 through the optical fiber 2. The fiber collimator 3 forms parallel light and then irradiates the measuring mechanism 4 on which the non-transparent film is placed. A Fabry-Perot cavity with an optical interference function is formed in the measuring mechanism 4, and the light is reflected to the fiber collimator 3. The fiber collimator 3 transmits the light to the fiber spectrometer 5 through the optical fiber 2, and the fiber spectrometer 5 completes the detection of the thickness of the non-transparent film.

[0032] When using the above solution, the light-emitting assembly 1 emits a broad-spectrum measurement light. A non-transparent film is placed within the measuring mechanism 4, which forms a Fabry-Perot cavity with optical interference. The fiber optic spectrometer 5 performs light separation to form reflected light with interference fringes. The tester calculates the spacing of the Fabry-Perot cavity based on the reflected light with interference fringes, thereby obtaining the thickness of the non-transparent film. This method can measure non-transparent films without damaging them while still achieving satisfactory thickness measurement accuracy. Non-transparent films include films made of metals and non-metallic materials.

[0033] In the specific implementation process of this embodiment, as shown in FIG1 , the measuring mechanism 4 includes a first optical plate 41 and a second optical plate 42 , and at least two non-transparent films are placed between the first optical plate 41 and the second optical plate 42 .

[0034] In a specific implementation process of this embodiment, as shown in FIG1 , the first optical plate 41 and the second optical plate 42 are arranged in parallel.

[0035] In a specific implementation process of this embodiment, as shown in FIG1 , the first optical plate 41 and the second optical plate 42 are placed parallel to a horizontal plane.

[0036] More specifically, the first optical plate 41 and the second optical plate 42 can be arranged parallel to the horizontal plane or perpendicular to the horizontal plane. Two non-transparent films are placed at both ends of the first optical plate 41 so that there is a certain distance between the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42, that is, a Fabry-Perot cavity with optical interference function corresponding to the non-transparent film is formed.

[0037] Furthermore, the first optical plate 41 and the second optical plate 42 can be made of optical materials such as optical glass or quartz. When selecting these optical plate materials, their thickness must be significantly greater than the thickness of the non-transparent film being measured. In practice, any combination of two planes can form a Fabry-Perot interferometer cavity. Therefore, the reflected light with interference fringes detected by the fiber spectrometer 5 includes all interference fringes generated by any combination of two planes, namely, all interference fringes between the upper and lower surfaces of the first optical plate 41, between the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42, between the upper and lower surfaces of the second optical plate 42, and between the upper surface of the first optical plate 42 and the lower surface of the second optical plate 42. According to the principle of interference, the smaller the spacing of the Fabry-Perot interferometer cavity, the lower the corresponding interference fringes, and vice versa. Because the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42 have the smallest spacing, the interference fringe density corresponding to the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42 is the lowest. Therefore, Fourier transform is used to process the raw data of the Fabry-Perot interferometer fringes formed between the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42 to obtain low-density interference fringes, namely, interference fringes corresponding to the non-transparent film.

[0038] In the specific implementation process of this embodiment, as shown in Figure 1, the optical fiber 2 is a Y-shaped optical fiber, the light-emitting component 1 emits a light source and transmits it to the optical fiber collimator 3 through one side of the Y-shaped optical fiber. The optical fiber collimator 3 forms parallel light and then emits it to the measuring mechanism 4. The measuring mechanism 4 reflects the reflected light to the optical fiber collimator 3 and then transmits it to the optical fiber spectrometer 5 through the other side of the Y-shaped optical fiber.

[0039] More specifically, the optical fiber 2 is a Y-shaped optical fiber, comprising at least two optical fibers, namely at least one optical fiber connected to the light emitting assembly 1 and at least one optical fiber connected to the optical fiber spectrometer 5. The optical fiber 2 is neater and easier to remove or install.

[0040] In the specific implementation process of this embodiment, as shown in FIG1 , the non-transparent thin film element measurement system further includes a terminal device 6 , and the optical fiber spectrometer 5 is connected to the terminal device 6 .

[0041] More specifically, the terminal device 6 in this embodiment can be a computer, a mobile phone, or a tablet, etc. The terminal device 6 is used to control the light-emitting component 1 and the fiber spectrometer 5 to complete the measurement of the thickness of the Fabry-Perot cavity formed by the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42, that is, the thickness of the non-transparent film.

[0042] According to the optical interference theory of the Fabry-Perot cavity, two adjacent peak wavelengths λ1 and trough wavelengths λ2 are taken from this reflection spectrum. The relationship between the two adjacent peak wavelengths λ1 and trough wavelengths λ2 and the spacing d of the Fabry-Perot cavity is:

[0043]

[0044] The thickness of the non-transparent film is calculated using the above formula; where n is the refractive index of the air within the Fabry-Perot cavity, which is 1. Since wavelength λ2 is greater than wavelength λ1, the spacing of the corresponding Fabry-Perot cavity can be calculated by taking two adjacent peak wavelengths λ1 and trough wavelengths λ2 from the reflection spectrum obtained by fiber optic spectrometer 5.

[0045] In the actual calculation process, in order to reduce the measurement error, the wavelengths corresponding to multiple pairs of peaks and troughs can be taken from the corresponding reflection spectrum, and multiple values ​​of the thickness of the non-transparent film can be calculated. The average value is then calculated as the actual value of the thickness of the non-transparent insulating film.

[0046] The non-transparent thin film element measurement system of Example 1 measured the thickness of the non-transparent insulating film of the new energy battery with a nominal value of 17 μm to be 17.7 μm. FIG6 shows the interference fringe pattern of the non-transparent insulating film measured in this example.

[0047] The workflow provided by Example 1 of the present invention is as follows: the light-emitting component 1 emits a wide-spectrum measurement light, which is transmitted to the fiber collimator 3 through one side of the Y-shaped optical fiber. The fiber collimator 3 forms parallel light and then emits it to the measuring mechanism 4. The light reflected by the Fabry-Perot cavity in the measuring mechanism 4 forms interference light. This interference light enters the fiber collimator 3 and is guided to the other side of the Y-shaped optical fiber, and then output to the fiber spectrometer 5. After being split by the fiber spectrometer 5, it forms reflected light with interference fringes. The terminal device 6 uses the principle of optical interference to measure the thickness of the Fabry-Perot cavity formed by the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42. Example 2

[0048] The difference between this embodiment 2 and embodiment 1 is that, as shown in FIG2 , the measuring mechanism 4 further includes at least two spheres 43 , which are arranged between the first optical plate 41 and the second optical plate 42 , and at least two non-transparent films are placed between the spheres 43 and the second optical plate 42 .

[0049] More specifically, at least two spheres 43 are evenly distributed at both ends of the lower surface of the first optical plate 41, dividing the non-transparent film into at least two pieces, which are placed on the upper surface of the second optical plate 42 and pressed down by at least two spheres 43 at both ends. In this way, due to the spacing of the spheres 43, the lower surface of the first optical plate 41 and the non-transparent film are equidistant from each other, that is, the lower surface of the first optical plate 41 and the non-transparent film form a Fabry-Perot cavity with optical interference function, namely d1 in Figure 2.

[0050] In a specific implementation process of this embodiment, as shown in FIG. 2 , at least two spheres 43 are evenly distributed at both ends of the first optical plate 41 .

[0051] More specifically, to ensure parallelism and stability between the first optical plate 41 and the second optical plate 42, at least two spheres 43 are fixed to the two ends of the first optical plate 41. At least two spheres 43 are fixed to the two ends of the first optical plate 41 in an evenly divided number. When a non-transparent film is placed on the non-transparent film element measurement system, at least two spheres 43 are in contact with the non-transparent film, and the non-transparent film is in contact with the second optical plate 42. In this way, equal distances are formed between the lower surface of the first optical plate 41 and the non-transparent film and the upper surface of the second optical plate 42.

[0052] When the non-transparent thin film element measurement system in this embodiment is unloaded, that is, no non-transparent film is placed, as shown in FIG3 , the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42 are equidistant from each other, separated by the spheres 43. That is, the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42 form a Fabry-Perot cavity with optical interference function, namely d2 in FIG3 .

[0053] The original data of the reflection spectrum with light interference fringes measured twice by the fiber spectrometer 5 are processed by Fourier transform on the interference fringes of the Fabry-Perot interferometer cavity to obtain low-density interference fringes of the two measurements. d1 and d2 can be calculated respectively. The thickness of the non-transparent film can be obtained by subtracting d1 from d2.

[0054] The workflow provided by Example 2 of the present invention is as follows: When the non-transparent thin film element measurement system is unloaded, the light-emitting component 1 emits a broad-spectrum measurement light, which is transmitted to the fiber collimator 3 through one side of the Y-shaped optical fiber. The fiber collimator 3 forms parallel light and then emits it toward the measurement mechanism 4. The light reflected by the Fabry-Perot cavity in the measurement mechanism 4 forms interference light. This interference light enters the fiber collimator 3 and is guided to the other side of the Y-shaped optical fiber, and then output to the fiber spectrometer 5. After being split by the fiber spectrometer 5, it forms reflected light with interference fringes. The terminal device 6 uses the principle of optical interference to measure the thickness d2 of the Fabry-Perot cavity formed by the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42. When the non-transparent thin film is placed in the non-transparent thin film element measurement system, the equal spacing d1 between the lower surface of the first optical plate 41 and the upper surface of the non-transparent film and the second optical plate 42 is measured. The thickness of the non-transparent film can be obtained by subtracting d1 from d2. Example 3

[0055] The difference between this embodiment 3 and embodiment 1 is that, as shown in FIG4 , in the non-transparent thin film element measurement system, the measuring mechanism 4 further includes two brackets 44 , which are arranged between the first optical plate 41 and the second optical plate 42 , and the non-transparent film is placed between the two brackets 44 .

[0056] More specifically, when a non-transparent film is placed on the non-transparent film element measurement system, the non-transparent film is placed on one of the brackets 44, the first optical plate 41 and the other bracket 44 are placed on the non-transparent film in sequence, and then the second optical plate 42 is placed under one bracket 44. In this way, the first optical plate 41 and the second optical plate 42 are equally spaced between each other between the brackets 44 and the non-transparent film. That is, a Fabry-Perot cavity having an optical interference function corresponding to the non-transparent film is formed on the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42.

[0057] In a specific implementation process of this embodiment, as shown in FIG. 4 , the non-transparent film has the same shape as the first optical flat plate 41 and the second optical flat plate 42 .

[0058] More specifically, the shape of the bracket 44 is a ring or a rectangular frame, or other shapes. When the bracket 44 is a ring, the corresponding non-transparent film, the first optical plate 41, and the second optical plate 42 are circular. When the bracket 44 is a rectangular frame, the corresponding non-transparent film, the first optical plate 41, and the second optical plate 42 are rectangular. The size of the first optical plate 41 and the second optical plate 42 is larger than that of the non-transparent film to ensure that the non-transparent film can pass smoothly when incident and reflected light.

[0059] In the specific implementation process of this embodiment, as shown in FIG4 , the bracket 44 is an annular metal bracket.

[0060] More specifically, the bracket 44 is an annular metal bracket, and the material used for the annular metal bracket can be heat-stable Invar; the non-transparent film is made into a ring, and the corresponding first optical plate 41 and second optical plate 42 are circular in shape. The first optical plate 41 and second optical plate 42 are sleeved on the annular metal bracket. In this way, due to the spacing between the bracket 44 and the non-transparent film, an equal distance is formed between the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42, that is, the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42 form a Fabry-Perot cavity with light interference function corresponding to the non-transparent film, namely d3 in Figure 4.

[0061] When the non-transparent thin film element measurement system in this embodiment is unloaded, that is, no non-transparent film is placed, as shown in FIG5 , the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42 are equidistant from each other due to the spacing of the bracket 44 . That is, the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42 form a Fabry-Perot cavity with optical interference function, namely d4 in FIG5 .

[0062] The original data of the reflection spectrum with light interference fringes measured twice by the fiber spectrometer 5 are processed by Fourier transform on the interference fringes of the Fabry-Perot interferometer cavity to obtain low-density interference fringes of the two measurements. d3 and d4 can be calculated respectively. The thickness of the non-transparent film can be obtained by subtracting d3 from d4.

[0063] The workflow provided by Example 3 of the present invention is as follows: When the non-transparent thin film element measurement system is unloaded, the light-emitting component 1 emits a broad-spectrum measurement light, which is transmitted to the fiber collimator 3 through one side of the Y-shaped optical fiber. The fiber collimator 3 forms parallel light and then emits it toward the measurement mechanism 4. The light reflected by the Fabry-Perot cavity in the measurement mechanism 4 forms interference light. This interference light enters the fiber collimator 3 and is guided to the other side of the Y-shaped optical fiber, and then output to the fiber spectrometer 5. After being split by the fiber spectrometer 5, it forms reflected light with interference fringes. The terminal device 6 uses the principle of optical interference to measure the thickness d4 of the Fabry-Perot cavity formed by the lower surface of the first optical plate 41 and the upper surface of the second optical plate 42. When the non-transparent thin film is placed in the non-transparent thin film element measurement system, the distance d3 formed between the lower surface of the first optical plate 41 and the upper surface of the non-transparent film and the second optical plate 42 is measured to be equal. The thickness of the non-transparent film can be obtained by subtracting d3 from d4. Example 4

[0064] A non-transparent thin film component measurement method provided in Example 4 of the present invention is applied to any non-transparent thin film component measurement system of Examples 1-3. The method comprises the following steps:

[0065] Step 1: Place the non-transparent film to be measured in thickness in the measuring mechanism 4;

[0066] Step 2: The light source emitted by the light-emitting component 1 is transmitted to the fiber collimator 3 through the optical fiber 2. The fiber collimator 3 forms parallel light and then irradiates the measuring mechanism 4. A Fabry-Perot cavity with an optical interference function is formed in the measuring mechanism 4, and the light is reflected to the fiber collimator 3. The fiber collimator 3 transmits the light to the fiber spectrometer 5 through the optical fiber 2. The detector calculates the thickness of the Fabry-Perot cavity when the non-transparent film is placed based on the reflected light with interference fringes formed by the fiber spectrometer 5.

[0067] Step 3: When the non-transparent film element measurement system is unloaded, the detector calculates the thickness of the Fabry-Perot cavity without the non-transparent film based on the reflected light with interference fringes formed by the fiber optic spectrometer 5;

[0068] Step 4: Subtract the thickness of the system with the non-transparent film placed obtained in step 2 from the thickness of the non-transparent film element measurement system without load obtained in step 3 to obtain the thickness of the non-transparent film.

[0069] In summary, in the process of measuring the thickness of the non-transparent film using the measurement method provided in Example 4 of the present invention, the light source emitted by the light-emitting component 1 is transmitted to the fiber collimator 3 through the optical fiber 2. The fiber collimator 3 forms parallel light and then irradiates the light onto the measuring mechanism 4 on which the non-transparent film is placed. A Fabry-Perot cavity with an optical interference function is formed in the measuring mechanism 4, and the light is reflected to the fiber collimator 3. The fiber collimator 3 transmits the light to the fiber spectrometer 5 through the optical fiber 2. The fiber spectrometer 5 performs light splitting to form reflected light with interference fringes. The detector calculates the interval of the Fabry-Perot cavity based on the reflected light with interference fringes to obtain the thickness of the non-transparent film. In addition, the measurement method of this embodiment will not cause damage to the non-transparent film and can also meet the thickness measurement accuracy.

[0070] The above description is merely a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included in the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A non-transparent thin film element measurement system, characterized in that: The invention comprises a light-emitting component (1), an optical fiber (2), an optical fiber collimator (3), a measuring mechanism (4) and an optical fiber spectrometer (5). The light-emitting component (1) and the optical fiber spectrometer (5) are connected to the optical fiber collimator (3) via the optical fiber (2). When in use, the light source emitted by the light-emitting component (1) is transmitted to the optical fiber collimator (3) via the optical fiber (2). After the optical fiber collimator (3) forms parallel light, it is irradiated onto the measuring mechanism (4) on which a non-transparent film is placed. A Fabry-Perot cavity with an optical interference function is formed in the measuring mechanism (4), and the light is reflected to the optical fiber collimator (3). The optical fiber collimator (3) transmits the light to the optical fiber spectrometer (5) via the optical fiber (2). The optical fiber spectrometer (5) detects the thickness of the non-transparent film.

2. The non-transparent thin film element measurement system according to claim 1, characterized in that: The measuring mechanism (4) comprises a first optical plate (41) and a second optical plate (42), and at least two non-transparent films are placed between the first optical plate (41) and the second optical plate (42).

3. The non-transparent thin film element measurement system according to claim 2, characterized in that: The measuring mechanism (4) further comprises at least two spheres (43), the spheres (43) being arranged between the first optical plate (41) and the second optical plate (42), and at least two non-transparent films being placed between the spheres (43) and the second optical plate (42).

4. The non-transparent thin film element measurement system according to claim 2, characterized in that: The measuring mechanism (4) further comprises two brackets (44), the two brackets (44) being arranged between the first optical plate (41) and the second optical plate (42), and the non-transparent film being placed between the two brackets (44).

5. The non-transparent thin film element measurement system according to any one of claims 2 to 4, characterized in that: The first optical flat plate (41) and the second optical flat plate (42) are arranged in parallel, and the first optical flat plate (41) and the second optical flat plate (42) are equidistant from each other.

6. The non-transparent thin film element measurement system according to claim 3, characterized in that: The at least two spheres (43) are evenly arranged at two ends of the first optical plate (41).

7. The non-transparent thin film element measurement system according to claim 4, characterized in that: The non-transparent film has the same shape as the first optical plate (41) and the second optical plate (42).

8. The non-transparent thin film element measurement system according to claim 7, characterized in that: The stent (44) is an annular metal stent.

9. The non-transparent thin film element measurement system according to any one of claims 2 to 4, characterized in that: The first optical plate (41) and the second optical plate (42) are placed parallel to a horizontal plane.

10. The non-transparent thin film element measurement system according to any one of claims 2-4, 6-8, characterized in that: The optical fiber (2) is a Y-shaped optical fiber. The light emitting component (1) emits light and transmits it to the optical fiber collimator (3) through one side of the Y-shaped optical fiber. The optical fiber collimator (3) forms parallel light and then projects it onto the measuring mechanism (4) to form interference light. The Fabry-Perot cavity with light interference function inside reflects the interference light to the optical fiber collimator (3) and then transmits it to the optical fiber spectrometer (5) through the other side of the Y-shaped optical fiber.

11. The non-transparent thin film element measurement system according to any one of claims 2-4, 6-8, characterized in that: The non-transparent thin film element measurement system also includes a terminal device (6), and the optical fiber spectrometer (5) is connected to the terminal device (6).

12. A non-transparent thin film element measurement method, using the non-transparent thin film element measurement system according to any one of claims 1 to 11, characterized in that: The method comprises the following steps: Step 1: placing a non-transparent film whose thickness is to be measured in the measuring mechanism (4); Step 2: The light source emitted by the light emitting component (1) is transmitted to the fiber collimator (3) through the optical fiber (2); the fiber collimator (3) forms parallel light and then irradiates the parallel light onto the measuring mechanism (4); a Fabry-Perot cavity with a light interference function is formed in the measuring mechanism (4), and the light is reflected to the fiber collimator (3); the fiber collimator (3) transmits the light to the fiber spectrometer (5) through the optical fiber (2); the detector calculates the thickness of the Fabry-Perot cavity when the non-transparent film is placed according to the reflected light with interference fringes formed by the fiber spectrometer (5); Step 3: When the non-transparent film element measurement system is unloaded, the detector calculates the thickness of the Fabry-Perot cavity when no non-transparent film is placed based on the reflected light with interference fringes formed by the optical fiber spectrometer (5); Step 4: Subtract the thickness of the non-transparent film obtained in step 2 from the thickness of the non-transparent film element measurement system without load from step 3 to obtain the thickness of the non-transparent film.

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