Furnace body of single crystal furnace, and single crystal furnace provided with furnace body

Abstract

Provided in the present application is a furnace body of a single crystal furnace. The furnace body comprises a cylindrical body, wherein connecting flanges are arranged at two ends of the cylindrical body; the cylindrical body comprises an outer wall and an inner wall; and a vacuum cavity is provided between the outer wall and the inner wall. The present application has the beneficial effects of ensuring the thermal insulation of the furnace body, making the temperature of a thermal field more stable, being more favorable to crystal formation, reducing requirements of the furnace body for cooling water, reducing the amount of generated and emitted waste heat, reducing the loss of heat within a furnace, and saving on production costs.

Description

Single crystal furnace body and single crystal furnace equipped with the same

[0001] This application claims priority to the Chinese patent application filed with the China Patent Office on August 31, 2023, with application number 202322365749.3 and application name “A single crystal furnace body and a single crystal furnace equipped with the same”, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present application belongs to the technical field of single crystal furnaces, and in particular relates to a single crystal furnace body and a single crystal furnace provided with the furnace body. Background Art

[0003] A single crystal furnace primarily consists of an auxiliary chamber, an isolation chamber, a furnace cover, and a main chamber. The main chamber houses a crucible, heater, and other components to facilitate single crystal pulling. During the single crystal pulling process, the furnace temperature must remain stable and controllable, reaching temperatures exceeding thousands of degrees Celsius. This places high demands on the furnace's heat resistance and insulation capabilities.

[0004] In one technology, the single crystal furnace body is often a double-layer metal structure. The interior is hollow, with partitions forming a spiral water channel. The upper and lower flanges are connected from bottom to top, and cooling water is passed through the water channel to achieve the purpose of thermal insulation. This method requires a large amount of cooling water and supporting circulating refrigeration equipment. Water has the highest specific heat of all liquid and solid substances. During the circulation process, the cooling water continuously removes heat from the furnace through heat conduction and heat convection, thereby increasing the power consumption of the furnace. This heat is discharged as waste heat through the cooling water circulation system and the refrigeration system. This increases production costs and causes energy waste. Application Contents

[0005] The embodiment of the present application provides a single crystal furnace body and a single crystal furnace equipped with the furnace body, which effectively solves the problem that the single crystal furnace body uses cooling water circulation for thermal insulation, which has high production costs and causes energy waste, and overcomes the shortcomings of the existing technology.

[0006] The technical solution adopted in this application is: a single crystal furnace body, including a cylindrical body, with connecting flanges at both ends of the cylindrical body, the cylindrical body including an outer wall and an inner wall, and a vacuum cavity is provided between the outer wall and the inner wall.

[0007] Optionally, a vacuum extraction interface is provided on the outer wall, which is configured to vacuum the vacuum cavity.

[0008] Optionally, a stop valve is provided on the vacuum extraction interface.

[0009] Optionally, a three-way joint is provided at one end of the vacuum interface away from the outer wall, the stop valve is provided at one end of the three-way joint not connected to the outer wall, and a vacuum gauge is provided at the other end.

[0010] Optionally, the three-way joint is provided with an opening, and the opening is connected to a vacuum gauge.

[0011] Optionally, a groove is provided on a side of the connecting flange away from the cylindrical body, and the groove is configured to accommodate a sealing ring.

[0012] Optionally, a cooling water channel is provided in the connecting flange, configured to cool the sealing ring.

[0013] Optionally, the cooling water channel is arranged along the circumference of the connecting flange.

[0014] Optionally, a water inlet and a water outlet are provided on the connecting flange, and the water inlet and the water outlet are connected to the cooling water channel.

[0015] An embodiment of the present application further provides a single crystal furnace, which is provided with the single crystal furnace body as described above. Beneficial effects

[0016] The embodiment of the present application adopts the above-mentioned technical solution to ensure the thermal insulation of the furnace body, make the thermal field temperature more stable, more conducive to crystallization, reduce the furnace body's demand for cooling water, reduce the generation and emission of waste heat, reduce heat loss in the furnace, and save production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] FIG1 is a schematic structural diagram of a single crystal furnace body according to an embodiment of the present application.

[0018] FIG2 is a schematic structural diagram of a single crystal furnace body according to an embodiment of the present application.

[0019] Figure markings: 1-connecting flange; 2-outer wall; 3-inner wall; 4-annular cover plate; 5-vacuum chamber; 6-vacuum extraction interface; 7-stop valve; 8-tee joint; 9-vacuum gauge; 10-measuring pipeline; 11-clamp joint; 12-vacuum gauge; 13-groove; 14-cooling water channel; 15-water inlet; 16-water outlet. Implementation Methods of the Application

[0020] The embodiments of the present application provide a single crystal furnace body and a single crystal furnace provided with the furnace body. The embodiments of the present application are described below with reference to the accompanying drawings.

[0021] In the description of the embodiments of the present application, it should be understood that the orientation or positional relationship indicated by the terms "top", "bottom", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In the description of the present application, it should be noted that, unless otherwise clearly stipulated and limited, the terms "setting" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be a communication between the internal parts of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood based on specific circumstances.

[0022] As shown in Figures 1 and 2, a single crystal furnace body according to an embodiment of the present application includes a cylindrical body with connecting flanges 1 provided at both ends. The upper connecting flange 1 is configured to connect to the furnace cover, and the lower connecting flange 1 is configured to connect to the lower furnace body. The cylindrical body includes an outer wall 2 and an inner wall 3. Annular cover plates 4 are fixed to the upper and lower portions of the cylindrical body, forming a vacuum cavity 5 between the outer wall 2 and the inner wall 3. The vacuum cavity 5 can prevent heat loss within the furnace, thereby providing thermal insulation.

[0023] In order to facilitate the vacuuming of the vacuum chamber 5 , a through hole is opened on one side of the outer wall 2 , and a pipeline is connected to the through hole to serve as a vacuuming interface 6 .

[0024] The vacuum pump is connected to the vacuum port 6 to evacuate the vacuum chamber 5. When the vacuum degree reaches the use requirement, a stop valve 7 is provided on the vacuum port 6 in order to be able to cut off the connection with the vacuum pump in time.

[0025] In some embodiments, the end of the vacuum interface 6 away from the outer wall 2 is connected to a three-way joint 8, the end of the three-way joint 8 not connected to the outer wall 2 is connected to a stop valve 7, and the other end is connected to a vacuum meter 9 configured to monitor the vacuum degree in the vacuum chamber 5, thereby ensuring the thermal insulation effect of the vacuum chamber 5.

[0026] As shown in Figure 2 , to more accurately measure the vacuum level within vacuum chamber 5 , a through-hole is provided in the body of tee joint 8 , from which a measuring line 10 is led via a welded joint. Measuring line 10 is connected to a vacuum gauge 12 via a clamp joint 11 . This allows for more accurate detection and monitoring of the vacuum level within vacuum chamber 5 . The clamp joint 11 is conventional technology, and its specific structure and connection method are not described in detail here.

[0027] A groove 13 is provided on one side of the connecting flange 1 away from the cylindrical body, for accommodating a sealing ring. The groove 13 is annular and is circumferentially arranged on the outside of the connecting flange 1 along the end surface of the connecting flange 1 .

[0028] In order to prevent the sealing ring from aging under high temperature and failing to seal, thus affecting normal use, a cooling water channel 14 is provided inside the connecting flange 1 body, which is configured to circulate cooling water to cool the sealing ring.

[0029] To ensure uniform cooling of the sealing ring, the cooling water channel 14 is arranged along the circumference of the connecting flange 1. The cross-sectional shape of the cooling water channel 14 is not limited. In certain embodiments, an annular groove is defined on the side of the connecting flange 1 proximal to the cylindrical body. The connecting flange 1 is welded to the annular cover plate 4, and the annular groove and the annular cover plate 4 form a closed cooling water channel 14.

[0030] A water inlet 15 and a water outlet 16 are provided on the side of the connecting flange 1. The water inlet 15 and the water outlet 16 are connected to the cooling water channel 14. The water inlet 15 and the water outlet 16 are connected to an external cooling pipeline. In some embodiments, the water inlet 15 and the water outlet 16 are symmetrically arranged on both sides of the connecting flange 1.

[0031] A single crystal furnace is composed of an auxiliary furnace chamber, an isolation chamber, a furnace cover and a main furnace chamber. The main furnace chamber is provided with the single crystal furnace body as described above.

[0032] Example 1: As shown in Figure 1, a single crystal furnace body comprises a cylindrical body with connecting flanges 1 at both ends. The cylindrical body comprises an outer wall 2 and an inner wall 3. Annular cover plates 4 are welded to the upper and lower portions of the cylindrical body, forming a vacuum chamber 5 between the outer wall 2 and the inner wall 3. A through hole is formed on one side of the outer wall 2, to which a pipeline is connected, serving as a vacuum port 6. A tee joint 8 is connected to the end of the vacuum port 6 away from the outer wall 2. The end of the tee joint 8 not connected to the outer wall 2 is connected to a shut-off valve 7, and the other end is connected to a vacuum gauge 9. An annular groove 13 is formed on the side of the connecting flange 1 away from the cylindrical body. The annular groove 13 is arranged on the outer side of the connecting flange 1 along the circumference of the connecting flange 1 and is configured to accommodate a sealing ring. An annular groove is formed on the side of the connecting flange 1 close to the cylindrical body. The connecting flange 1 is welded to the annular cover plate 4. The annular groove and the annular cover plate 4 form a closed cooling water channel 14. The cross-section of the annular cooling water channel 14 is quadrilateral. A water inlet 15 and a water outlet 16 are symmetrically provided on the outer side of the connecting flange 1 and connected to the cooling water channel 14 .

[0033] Embodiment 2: As shown in FIG2 , a single crystal furnace body comprises a cylindrical body, with connecting flanges 1 provided at both ends of the cylindrical body, the cylindrical body comprising an outer wall 2 and an inner wall 3, an annular cover plate 4 welded to the upper and lower parts of the cylindrical body, and a vacuum cavity 5 formed between the outer wall 2 and the inner wall 3. A through hole is provided on one side of the outer wall 2, and a pipeline is connected to the through hole, serving as a vacuum interface 6. A tee joint 8 is connected to the end of the vacuum interface 6 away from the outer wall 2. A stop valve 7 is connected to the end of the tee joint 8 not connected to the outer wall 2, and a vacuum gauge 9 is connected to the other end. A through hole is provided on the body of the tee joint 8, and a measuring pipeline 10 is led out through a welded joint. The measuring pipeline 10 is connected to a vacuum gauge 12 using a clamp joint 11. An annular groove 13 is provided on the side of the connecting flange 1 away from the cylindrical body. The annular groove 13 is arranged on the outside along the circumference of the connecting flange 1 and is configured to place a sealing ring. An annular groove is formed on the side of the connecting flange 1 near the cylindrical body. The connecting flange 1 is welded to the annular cover plate 4. The annular groove and the annular cover plate 4 form a closed cooling water channel 14 with a quadrilateral cross section. A water inlet 15 and a water outlet 16 are symmetrically formed on the outside of the connecting flange 1 and connected to the cooling water channel 14.

[0034] The advantages and positive effects of this application are:

[0035] 1. The cooling water channel of the furnace body interlayer is changed to a vacuum cavity, which reduces the cooling water flow required by the single crystal furnace, reduces the investment and operation and maintenance costs of the cooling water supporting equipment, and reduces the production cost.

[0036] 2. The heat-conducting medium between the high-temperature inner wall and the low-temperature outer wall of the furnace is eliminated, and heat insulation is performed through the vacuum cavity, which reduces the heat conduction efficiency between the furnace and the outside world, reduces the heat loss in the furnace, and reduces the power consumption of the single crystal furnace.

[0037] 3. It avoids the temperature fluctuation in the furnace caused by the flow, pressure and water temperature fluctuation in the cooling water circulation system, making the temperature in the furnace more stable and more conducive to crystal formation.

[0038] The embodiments of the present application are described in detail above, but the contents are only optional embodiments of the present application and cannot be considered to limit the scope of implementation of the present application. All equivalent changes and improvements made within the scope of the present application should still fall within the scope of the patent coverage of the present application.

Claims

1. A single crystal furnace body, comprising a cylindrical body, two ends of the cylindrical body are provided with connecting flanges, the cylindrical body comprises an outer wall and an inner wall, and a vacuum cavity is provided between the outer wall and the inner wall.

2. A single crystal furnace body according to claim 1, wherein: A vacuuming interface is provided on the outer wall, which is configured to evacuate the vacuum cavity.

3. A single crystal furnace body according to claim 2, wherein: A stop valve is provided on the vacuum extraction interface.

4. A single crystal furnace body according to claim 3, wherein: A three-way joint is provided at one end of the vacuum port away from the outer wall, the stop valve is provided at one end of the three-way joint not connected to the outer wall, and a vacuum gauge is provided at the other end.

5. A single crystal furnace body according to claim 4, wherein: The three-way joint is provided with an opening, and the opening is connected with a vacuum gauge.

6. A single crystal furnace body according to any one of claims 1 to 5, wherein: A groove is provided on a side of the connecting flange away from the cylindrical body, and the groove is configured to accommodate a sealing ring.

7. A single crystal furnace body according to claim 6, wherein: A cooling water channel is provided in the connecting flange, which is configured to cool the sealing ring.

8. A single crystal furnace body according to claim 7, wherein: The cooling water channel is arranged along the circumference of the connecting flange.

9. A single crystal furnace body according to claim 7 or 8, wherein: The connecting flange is provided with a water inlet and a water outlet, and the water inlet and the water outlet are connected to the cooling water channel.

10. A single crystal furnace, wherein: The single crystal furnace is provided with a single crystal furnace body as claimed in any one of claims 1 to 9.

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