Detection device and detection method

Abstract

The present application provides a detection device, which is applied to the field of detection, for example, the field of spectral detection. The detection device comprises an optical coupler, a scattering component, a detector, and a processor. The optical coupler is configured to receive a light beam to be detected and couple the light beam to be detected to the scattering component. The scattering component is configured to scatter the light beam to be detected, and output a plurality of scattered light beams to be detected to the detector at different angles in a time-division mode. The plurality of scattered light beams to be detected are in one-to-one correspondence with a plurality of angles. The detector is configured to detect a plurality of different regions in the plurality of scattered light beams to be detected, to obtain a plurality of electric signals. The detector is further configured to transmit the plurality of electric signals to the processor. The processor is configured to calculate the plurality of electric signals, to obtain related information of the light beam to be detected. In the technical solution provided in the present application, by adjusting the output direction of the light beam to be detected, the related information of the light beam to be detected can be obtained by means of the detector in a time-division mode, so that the cost of the detection device is reduced.

Description

Testing equipment and testing methods

[0001] This application claims priority to the Chinese patent application filed with the State Intellectual Property Office on August 30, 2023, with application number 202311127450.2 and application name “Detection Equipment and Detection Method”, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present invention relates to the field of detection, and in particular to detection equipment and detection methods. Background Art

[0003] A spectrometer is used to obtain spectral information from the light beam to be detected. It comprises a scattering medium and a multi-channel detector. The scattering medium is used to scatter the light beam to be detected, producing a characteristic scattering distribution pattern. The scattering medium is compressed from particles with a small average particle size, resulting in a low production cost. The small average particle size ensures that light of different wavelengths travels different optical path lengths when passing through the scattering medium, thereby producing speckle patterns with different distributions. The multi-channel detector is used to obtain multiple electrical signals corresponding to different regions in the speckle pattern. By calculating these multiple electrical signals, the spectral information of the light beam to be detected can be obtained. However, the high cost of the detector leads to a high cost of the spectrometer.

[0004] Summary of the Invention

[0005] The present application provides a detection device and a detection method, which can obtain relevant information of the light beam to be detected in a time-division manner through a detector by adjusting the output direction of the light beam to be detected, thereby reducing the cost of the detection device.

[0006] In a first aspect, the present application provides a detection device. The detection device includes an optical coupler, a scattering component, a detector, and a processor. The optical coupler is used to receive a light beam to be detected and couple the light beam to be detected to the scattering component. The scattering component is used to scatter the light beam to be detected and output multiple scattered light beams to be detected to the detector at different angles in a time-division manner. The multiple scattered light beams to be detected correspond one-to-one to the multiple angles. For example, at a first moment, the scattering component is used to output a first scattered light beam to be detected to the detector at a first angle; at a second moment, the scattering component is used to output a second scattered light beam to be detected to the detector at a second angle. The detector is used to detect multiple different regions in the multiple scattered light beams to be detected and obtain multiple electrical signals. The multiple regions correspond one-to-one to the multiple electrical signals. The multiple regions correspond one-to-one to the multiple scattered light beams to be detected. The detector is also used to transmit the multiple electrical signals to the processor. The processor is used to calculate the multiple electrical signals to obtain relevant information about the light beams to be detected.

[0007] In one optional embodiment of the first aspect, the scattering assembly includes a scattering medium and an optical modulator. The scattering medium is configured to receive a light beam to be detected from an optical coupler, scatter the light beam to be detected, and then direct the scattered light beam to be detected into the optical modulator. The optical modulator is configured to output multiple scattered light beams to be detected at different angles to a detector. The multiple scattered light beams to be detected correspond to the multiple angles in a one-to-one manner. In this application, the relative state between the light beam to be detected and the scattering medium remains unchanged, resulting in enhanced system stability.

[0008] In an optional form of the first aspect, the scattering assembly includes a light modulator and a scattering medium. The light modulator is configured to receive a light beam to be detected from an optical coupler and output multiple light beams to be detected at different angles to the scattering medium. The multiple light beams to be detected correspond one-to-one with the multiple angles. The scattering medium is configured to scatter the multiple light beams to be detected to obtain multiple scattered light beams to be detected. The multiple light beams to be detected correspond one-to-one with the multiple scattered light beams to be detected. The scattering medium is also configured to direct the multiple scattered light beams to be detected into a detector. In this application, the positions of the scattering medium and the detector are relatively fixed. Therefore, multiple regions correspond to the same scattering region of the scattering medium. Therefore, this application can reduce the area of ​​the scattering medium, thereby reducing the hardware cost of the detection equipment. In an optional form of the first aspect, the detector is a linear array detector. The light modulator is a one-dimensional light modulator. The photosensitive surface of the detector is located in a first plane. The light modulator is configured to change the output direction of the scattered light beams to be detected or the output direction of the scattered light beams to be detected so that the light spot illuminated by the scattered light beams to be detected on the first plane moves along a first direction. For example, at a first moment, the first light spot illuminated by the first scattered light beam to be detected on the first plane is located at a first position. The output direction of the scattered light beam to be detected is changed, and at the second moment, the second light spot of the second scattered light beam to be detected on the first plane is located at a second position. In this application, by using a one-dimensional light modulator, the hardware cost of the detection equipment can be reduced.

[0009] In an optional embodiment of the first aspect, the difference between a first width of a light spot of the scattered light beam to be detected irradiated on the first plane and a second width of the photosensitive surface of the detector is less than or equal to 50 percent of the first width. The direction of the first width and the direction of the second width are perpendicular to the first direction. When the difference between the first width and the second width is too large, a large amount of energy of the light beam to be detected is wasted, resulting in a lower light beam energy used to obtain relevant information. The lower the light beam energy used to obtain relevant information, the lower the reliability of the relevant information. Therefore, the present application can improve the reliability of the relevant information obtained.

[0010] In an optional embodiment of the first aspect, the multiple areas include a first area and a second area, and the first area and the second area include an overlapping area. When the optical modulator is in the first state, the detector is used to detect the first area of ​​the light beam to be detected; when the optical modulator is in the second state, the detector is used to detect the second area of ​​the light beam to be detected. When there is no overlapping area between the first area and the second area, the change between the first state and the second state is large. When there is an overlapping area between the first area and the second area, the change between the first state and the second state is small. For example, the optical modulator is a reflector, the first state is the first angle of the reflector, and the second state is the second angle of the reflector. When there is an overlapping area between the first area and the second area, the change between the first angle and the second angle is small. The smaller the state change, the lower the hardware cost of the optical modulator. Therefore, the present application can reduce the hardware cost of the detection equipment.

[0011] In an optional embodiment of the first aspect, the area of ​​the overlapping region is less than or equal to 90 percent of the area of ​​the first region. When the area of ​​the overlapping region accounts for too large a proportion, the reliability of the relevant information obtained may be affected. Therefore, the present application can improve the reliability of the relevant information obtained.

[0012] In an optional manner of the first aspect, the detection device also includes a focuser. The focuser is located on the optical transmission path between the scattering component and the detector. The focuser is used to change the focal length of the scattered light beam to be detected. Assume that the multi-channel electrical signal is equal to the h-channel electrical signal. In practical applications, the value of h can be changed according to the accuracy requirements of the measurement. Changing the focal length by the value of h can improve the utilization rate of the light beam to be detected, that is, it can increase the proportion of light beam energy used to obtain relevant information. The utilization rate of the light beam to be detected affects the reliability of the relevant information. Therefore, the present application can improve the reliability of the relevant information obtained.

[0013] In an optional manner of the first aspect, the focusing range of the focus adjuster is between 1 mm and 5 mm.

[0014] In an optional embodiment of the first aspect, the detection device further includes a mask. The mask is located in the light transmission path between the scattering component and the detector. The mask can be used to replace some of the computational functions implemented by the software. Therefore, by adding the mask, the efficiency of obtaining relevant information can be improved.

[0015] In an optional manner of the first aspect, the photosensitive surface of the detector is located on the first plane, and the ratio of the size of the light spot of the light beam to be detected irradiating the first plane to the size of the photosensitive surface is between 1000 and 1000000.

[0016] In an optional embodiment of the first aspect, the detection device further includes a temperature controller. The temperature controller is configured to maintain the temperature of the scattering medium within a target range. The temperature of the scattering medium affects the weight matrix of the scattering medium. When temperature changes cause the weight matrix to change, but the processor obtains relevant information based on the original weight matrix, this can affect the reliability of the relevant information. Therefore, by adding a temperature controller, the reliability of the obtained relevant information can be improved.

[0017] In an optional embodiment of the first aspect, the detection device further includes a first seismic isolator and a second seismic isolator. The first seismic isolator is used to reduce vibration of the scattering medium. The second seismic isolator is used to reduce vibration of the optical modulator. Vibration of both the optical modulator and the scattering medium can affect the reliability of the relevant information. Therefore, by adding the seismic isolator, the reliability of the acquired relevant information can be improved.

[0018] In an optional embodiment of the first aspect, the processor includes a collector, a memory, and a controller. The collector is configured to receive multiple electrical signals from the detector and transmit the multiple electrical signals to the memory. The memory is configured to store the multiple electrical signals. The controller is configured to retrieve the multiple electrical signals from the memory, perform calculations on the multiple electrical signals, and obtain information related to the light beam to be detected.

[0019] In an optional manner of the first aspect, the processor is further configured to generate a control signal after obtaining each of the multiple electrical signals, and the optical modulator is configured to adjust the output angle of the scattered light beam to be detected according to the control signal.

[0020] In an optional embodiment of the first aspect, the detection device further comprises a light source. The light source is configured to irradiate the target light beam onto the object to be detected. The light beam to be detected is the reflected light or the transmitted light of the target light beam.

[0021] The second aspect of the present application provides a detection method. The detection method is applied to a detection device. The detection method includes the following steps: the detection device scatters a light beam to be detected to obtain a scattered light beam to be detected; the detection device detects a first area of ​​the scattered light beam to be detected through a detector to obtain a first electrical signal; the detection device changes the output direction of the scattered light beam to be detected so that the light spot of the scattered light beam to be detected moves relative to the photosensitive surface of the detector; the detection device detects a second area of ​​the scattered light beam to be detected through the detector to obtain a second electrical signal; the detection device obtains relevant information about the light beam to be detected based on the first electrical signal and the second electrical signal.

[0022] In an optional embodiment of the second aspect, the first area and the second area include an overlapping area. The detection device obtains relevant information about the light beam to be detected based on h electrical signals. The h electrical signals include the first electrical signal and the second electrical signal, where h is an integer greater than or equal to 2. The detection method further includes the following steps: the detection device adjusts the size of the overlapping area based on the value of h. In practical applications, the size of the overlapping area can affect the accuracy of the relevant information. In the present application, adjusting the size of the overlapping area can improve the accuracy of the obtained relevant information.

[0023] In an optional embodiment of the second aspect, the detection device obtains relevant information about the light beam to be detected based on h electrical signals. The h electrical signals include a first electrical signal and a second electrical signal, where h is an integer greater than or equal to 2. The detection method further includes the following steps: the detection device adjusts the size of the light spot of the light beam to be detected based on the value of h. In practical applications, the size of the light spot affects the utilization rate of the light beam to be detected. The utilization rate of the light beam to be detected affects the accuracy of the relevant information. In the present application, adjusting the size of the light spot based on the value of h can improve the accuracy of the obtained relevant information.

[0024] It should be understood that there are similarities between the description of the detection method and the inspection device described in the aforementioned first aspect or any one of the optional embodiments of the first aspect. Therefore, the description of the detection method can refer to the inspection device described in the aforementioned first aspect or any one of the optional embodiments of the first aspect. For example, the scattering component includes a scattering medium and an optical modulator. The detection device scatters the light beam to be detected through the scattering medium. The detection device changes the output direction of the scattered light beam to be detected through the optical modulator. For another example, the detection device includes a focuser. The detection device adjusts the focuser according to the value of h to adjust the size of the light spot of the scattered light beam to be detected. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] FIG1 is a first structural diagram of a detection device provided in an embodiment of the present application;

[0026] FIG2a is a schematic diagram of a first structure of a light spot and a photosensitive surface provided in an embodiment of the present application;

[0027] FIG2 b is a second structural diagram of a light spot and a photosensitive surface provided in an embodiment of the present application;

[0028] FIG3 is a third structural diagram of a light spot and a photosensitive surface provided in an embodiment of the present application;

[0029] FIG4 a is a second structural diagram of the detection device provided in an embodiment of the present application;

[0030] FIG4 b is a third structural diagram of the detection device provided in the embodiment of the present application;

[0031] FIG5 is a fourth structural schematic diagram of a light spot and a photosensitive surface provided in an embodiment of the present application;

[0032] FIG6 is a fifth structural diagram of a light spot and a photosensitive surface provided in an embodiment of the present application;

[0033] FIG7 is a fourth structural diagram of the detection device provided in an embodiment of the present application;

[0034] FIG8 is a schematic structural diagram of a mask provided in an embodiment of the present application;

[0035] FIG9 is a schematic diagram of the working process of the detection device provided in an embodiment of the present application;

[0036] FIG10 is a flow chart of the detection method provided in an embodiment of the present application. DETAILED DESCRIPTION

[0037] The present application provides a detection device and a detection method. By adjusting the output direction of the light beam to be detected, the detector can obtain relevant information of the light beam to be detected in a time-division manner, thereby reducing the cost of the detection device. It should be understood that the terms "first", "second", etc. used in this application are only used for the purpose of distinguishing descriptions and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying an order. In addition, for the sake of simplicity and clarity, reference numbers and / or letters are repeated in multiple figures of this application. Repetition does not indicate a strict limit relationship between various embodiments and / or configurations.

[0038] The detection device provided in this application is applicable to detection fields, such as spectral detection. In this field, a spectrometer can be used to obtain spectral information of a light beam to be detected. Specifically, the spectrometer comprises a scattering medium and a multi-path detector. The light beam to be detected passing through the scattering medium forms a speckle pattern. Each detector is used to detect information from a different region in the speckle pattern, generating multiple electrical signals. By calculating these multiple electrical signals, the spectral information of the light beam to be detected can be obtained. However, the detectors are relatively expensive, which in turn leads to a higher cost for the spectrometer.

[0039] To this end, the present application provides a detection device. FIG1 is a first structural schematic diagram of the detection device provided in an embodiment of the present application. As shown in FIG1 , the detection device 100 includes an optical coupler 101, a scattering component 102, a detector 103, and a processor 104. The various structures in the detection device 100 are described below.

[0040] Optical coupler 101 is also known as a coupler or coupling module. It includes, but is not limited to, a lens assembly, an optical fiber array, and a reflector assembly. Optical coupler 101 is used to collect the light beam to be detected and guide it into scattering assembly 102. A stable space or optical fiber path is defined between optical coupler 101 and scattering assembly 102 for transmitting the light beam to be detected. The stable space can be air, a special gas, or a vacuum.

[0041] The scattering component 102 is used to receive the light beam to be detected from the optical coupler 101, scatter the light beam to be detected, and obtain a scattered light beam to be detected. The scattering component 102 is also used to output multiple scattered light beams to be detected to the detector 103 at different angles and time divisions. The multiple scattered light beams to be detected correspond one to one to the multiple angles. For example, in the example of Figure 1, at the first moment, the scattering component 102 is used to output the first scattered light beam to be detected to the detector 103 at a first angle, and the first scattered light beam to be detected is also called light beam 1; at the second moment, the scattering component 102 is used to output the second scattered light beam to be detected to the detector 103 at a second angle, and the second scattered light beam to be detected is also called light beam 2. The solid lines with arrows in the figure represent light beam 1 and light beam 2. Light beam 1 and light beam 2 are irradiated onto the first plane to form a light spot. The position of the arrow of the solid line represents the center position of the light spot.

[0042] The photosensitive surface of detector 103 is located in a first plane. The area of ​​the scattered light beam to be detected is larger than the area of ​​the photosensitive surface. Therefore, at different times, detector 103 can detect different regions of the scattered light beam to be detected. Detector 103, also known as a photodetector, is used to convert optical signals into electrical signals. In this embodiment of the present application, detector 103 is used to detect different regions of multiple scattered light beams to be detected in a time-division manner, generating multiple electrical signals. The multiple regions correspond one-to-one with the multiple electrical signals. The multiple regions also correspond one-to-one with the multiple scattered light beams to be detected. For example, at a first moment, detector 103 detects a first region of light beam 1, generating a first electrical signal; at a second moment, detector 103 detects a second region of light beam 2, generating a second electrical signal. In this embodiment of the present application, because the scattered light beams to be detected are measured in a time-division manner, detector 103 can include fewer pixels, thereby reducing the cost of detector 103. For example, detector 103 can be a single-pixel or linear array detector. A single-pixel detector is one that includes only one pixel. A linear array detector is one that includes only one column of pixels. The detector 103 is also used to transmit multiple electrical signals to the processor 104 .

[0043] The processor 104 can be a central processing unit (CPU), a network processor (NP), or a combination of a CPU and an NP. The processor 104 can further include a hardware chip or other general-purpose processor. The above-mentioned hardware chip can be an application specific integrated circuit (ASIC), a programmable logic device (PLD), or a combination thereof. The processor 104 is used to calculate multiple electrical signals to obtain relevant information about the light beam to be detected. The processor 104 can also be used to output a clock signal. The scattering component 102 is used to adjust the output angle of the scattered light beam to be detected according to the clock signal.

[0044] According to the description of Figure 1, the scattered light beam to be detected forms a light spot on the first plane. Figure 2a is a first structural schematic diagram of the light spot and the photosensitive surface provided in an embodiment of the present application. As shown in Figure 2a, at the first moment, the light beam 1 is irradiated to the first plane to form a light spot 201. The area of ​​the photosensitive surface 202 of the detector 103 is smaller than the area of ​​the light spot 201. In practical applications, in order to ensure measurement accuracy and provide a certain adjustment margin, the size ratio of the light spot 201 and the photosensitive surface 202 can be between 1000 and 1000000. The photosensitive surface 202 is within the range of the light spot 201. Figure 2b is a second structural schematic diagram of the light spot and the photosensitive surface provided in an embodiment of the present application. As shown in Figure 2b, at the second moment, the light beam 2 is irradiated to the first plane to form a light spot 203. Since the center position of the light spot of the light beam 1 and the center position of the light spot of the light beam 2 are different, the position of the photosensitive surface 202 moves relative to the position of the light spot. In the examples of Figures 2a and 2b, light spot 203 can be understood as light spot 201 shifted in the negative direction of the X-axis. Changes in the shape and area of ​​the light spot due to the angular variations of the scattered light beam to be detected are ignored, assuming that light spot 203 has the same area and shape as light spot 201. In the examples of Figures 2b and 2a, the photosensitive surface 202 in Figure 2b can be understood as light spot 202 in Figure 2a shifted in the positive direction of the X-axis relative to light spot 201.

[0045] FIG3 is a third structural schematic diagram of the light spot and the photosensitive surface provided in an embodiment of the present application. As shown in FIG3 , due to the movement of the light spot 201, the relative position of the photosensitive surface 202 will change. For example, in the example of FIG3 , at the first moment, the photosensitive surface 202 is at position 1. Driven by the clock signal, the scattering component 102 changes the output angle of the light beam so that the light spot 201 moves in the negative direction of the X-axis. At the second moment, the photosensitive surface 202 is at position 2. The above process is repeated until the fifth moment, when the photosensitive surface 202 is at position 5. The scattering component 102 changes the position of the light spot 201 again, so that the light spot 201 moves in the positive direction of the X-axis and the positive direction of the Y-axis. At the sixth moment, the photosensitive surface 202 is at position 6. The above process is repeated so that the photosensitive surface 202 is located in multiple different areas of the light spot 201. In each area, the detector 103 obtains one electrical signal through the photosensitive surface 202 to obtain multiple electrical signals.

[0046] As can be seen from the description of Figure 1, the scattering component 102 is used to realize the function of scattering and changing the output direction of the light beam. The scattering component 102 can include a scattering medium and a light modulator. The scattering medium is used to realize the function of scattering. The scattering medium is also called a scattering module. The scattering medium can be a nanoparticle tablet, a multimode optical fiber or a diffraction optical array structure, etc. The light modulator is used to realize the function of changing the output direction of the light beam. The light modulator is also called a scattered light modulation module. The light modulator can be a transmissive liquid crystal spatial light modulator, a reflective liquid crystal spatial light modulator, a digital micromirror based on micro-electro-mechanical system (MEMS) technology and its array, a magneto-optical spatial light modulator, a rotating mirror system or an electro-optical microcavity array, etc. In actual applications, the scattering medium and the light modulator can be at different positions in the detection device 100, which will be described below.

[0047] Figure 4a is a second structural schematic diagram of the detection device provided in an embodiment of the present application. As shown in Figure 4a, based on Figure 1, the scattering component 102 includes a scattering medium 401 and an optical modulator 402. The scattering medium 401 is used to receive the light beam to be detected from the optical coupler 101, scatter the light beam to be detected, and obtain a scattered light beam to be detected. The scattering medium 401 is also used to irradiate the scattered light beam to be detected to the optical modulator 402. The optical modulator 402 is used to output multiple scattered light beams to be detected to the detector 103 at different angles. In the example of Figure 4a, the output angle of the light beam can be changed by changing the angle of the optical modulator 402.

[0048] Figure 4b is a third schematic structural diagram of the detection device provided in an embodiment of the present application. As shown in Figure 4b, based on Figure 1, the scattering assembly 102 includes a scattering medium 401 and an optical modulator 402. The optical modulator 402 is used to receive the light beam to be detected from the optical coupler 101. The optical modulator 402 is also used to output multiple light beams to be detected at different angles and in a time-division manner to the scattering medium 401. For example, at a first moment, the optical modulator 402 is used to transmit a first light beam to be detected at a first angle to the scattering medium 401; at a second moment, the optical modulator 402 is used to transmit a second light beam to be detected at a second angle to the scattering medium 401. In the example of Figure 4b, by changing the angle of the optical modulator 402, the output angle of the light beams can be changed. The scattering medium 401 is used to receive multiple light beams to be detected in a time-division manner and scatter the multiple light beams to be detected to obtain multiple scattered light beams to be detected. The multiple scattered light beams to be detected correspond to the multiple light beams to be detected. The scattering medium 401 is also used to output the multiple scattered light beams to be detected at different angles and in a time-division manner to the detector 103.

[0049] 1 , the processor 104 is used to obtain information about the light beam to be detected based on the multiple electrical signals. In practical applications, the processor 104 can be used to obtain information about the light beam to be detected based on the weight matrix of the scattering medium 401 and the multiple electrical signals.

[0050] Among them, the weight matrix 1 of the scattering medium 401 includes m rows and n columns. Therefore, the weight matrix 1 includes m×n values. m and n are integers greater than 0. The scattering medium 401 includes m scattering areas. Each of the m scattering areas corresponds to a row of values ​​in the weight matrix 1. The value corresponding to each scattering area depends on the physical properties of the scattering medium in the scattering area. The weight matrix can be obtained by measurement. The embodiment of the present application does not limit the manner in which the processor 104 obtains the weight matrix 1. In the detection devices of Figures 4a and 4b, the processor 104 can obtain relevant information of the light beam to be detected in a similar manner. This is described below.

[0051] In the detection device of Figure 4a, the areas detected by detector 103 at different times correspond to different scattering regions in scattering medium 401. For example, position 1 in Figure 3 is the first area of ​​light spot 201 detected by detector 103 at the first moment. The first area of ​​light spot 201 is obtained by passing through the first scattering region of scattering medium 401; position 2 in Figure 3 is the second area of ​​light spot 201 detected by detector 103 at the second moment. The second area of ​​light spot 201 is obtained by passing through the second scattering region of scattering medium 401. Therefore, the multiple areas detected by detector 103 correspond one-to-one to the multiple different scattering regions in scattering medium 401. Processor 104 can obtain relevant information about the light beam to be detected according to the following formula.

[0052] Among them, the processor 104 obtains h electrical signals from the detector 103. The h electrical signals are K1, k2, ..., Kh. Formula set 1 includes h formulas. The h formulas correspond one-to-one to the h electrical signals. h is an integer less than or equal to m. The value of h is greater than or equal to the value of n. Through the above h formulas, the processor 104 can obtain n values ​​of λ. The n values ​​of λ are λ1, λ2, ..., λn. Among them, the value of λ1 can be used to characterize the energy intensity of the light beam to be detected at wavelength λ1. The processor 104 can also be used to establish a correspondence between n values ​​of λ and n wavelengths. The correspondence is the spectral information of the light beam to be detected. In an embodiment of the present application, the relevant information of the light beam to be detected can be n values ​​of λ or a correspondence.

[0053] In the detection device of Figure 4b, the areas detected by the detector 103 at different times correspond to the same scattering area in the scattering medium 401. However, since the angles of the light beam to be detected incident on the same scattering area at different times are different, the light beam to be detected at different incident angles will also produce different weight values. Therefore, in the detection device of Figure 4b, the processor 104 can obtain a weight matrix 2 similar to the weight matrix 1. The weight matrix 2 can be obtained by measurement. The embodiment of the present application does not limit the manner in which the processor 104 obtains the weight matrix 2. The processor 104 can obtain relevant information of the light beam to be detected through a set of formulas similar to the above-mentioned set of formulas 1.

[0054] As shown in Figures 4a and 4b, the detection device 100 can change the output angle of the scattered light beam to be detected using the optical modulator 402. In the example of Figure 4a, the optical modulator 402 is used to directly change the output angle of the scattered light beam to be detected. In the example of Figure 4b, the optical modulator 402 is used to change the output angle of the scattered light beam to be detected by changing the output angle of the light beam to be detected. Generally, the greater the change in the output angle of the scattered light beam to be detected, the longer the adjustment time required for the optical modulator 402, or the higher the hardware cost of the optical modulator 402. To reduce the adjustment time or hardware cost, the multiple areas detected by the detector 103 can include overlapping areas. Figure 5 is a fourth structural schematic diagram of the light spot and photosensitive surface provided in an embodiment of the present application. As shown in Figure 5, at a first moment, light beam 1 impinges on a first plane, forming light spot 201. The photosensitive surface 202 of the detector 103 is in position 1 relative to the light spot 201. At a second moment, the photosensitive surface 202 is in position 2 relative to the light spot 201. Position 1 can also be referred to as the first region of light spot 201 or the first region of light beam 1. Position 2 can also be referred to as the second region of light spot 201 or the first region of light beam 2. As shown in Figure 5, the solid box represents the first region, and the dashed box represents the second region. There is an overlap between the first region and the second region. In practical applications, if the area of ​​the overlapping region is too large, it will affect the reliability of the information obtained about the light beam to be detected. Therefore, the area of ​​the overlapping region should be less than or equal to 90 percent of the area of ​​the first region.

[0055] As described above, processor 104 can be configured to obtain information about the light beam to be detected based on the h-circuit electrical signal. In practical applications, the value of h can be varied based on the required measurement accuracy. When there is an overlap between the first and second regions, processor 104 can also be configured to adjust the size of the overlap based on the value of h. For example, when the value of h decreases, processor 104 can be configured to reduce the area of ​​the overlap; when the value of h increases, processor 104 can be configured to increase the area of ​​the overlap.

[0056] As shown in the description of FIG1 , the detector 103 can be a single-pixel or linear array detector. When the detector 103 is a single-pixel detector, in order to measure the primary area of ​​the light spot 201 as closely as possible, the light modulator 402 needs to be a two-dimensional light modulator. A two-dimensional light modulator can move the light spot 201 in two dimensions. For example, in the example of FIG3 , the light modulator 402 can move the light spot 201 in both the X-axis and the Y-axis directions. In embodiments of the present application, when the detector 103 is a linear array detector, the light modulator 402 can be a one-dimensional light modulator. A one-dimensional light modulator can only move the light spot 201 in one dimension. FIG6 is a fifth schematic diagram of the light spot and photosensitive surface provided in embodiments of the present application. As shown in FIG6 , the photosensitive surface 202 of the detector 103 is rectangular. The detector 103 has multiple pixels distributed along the Y-axis. By adjusting the light modulator 402, the light spot 201 can be moved in the negative direction of the X-axis. The negative direction of the X-axis is also referred to as the first direction. For example, in the example of FIG6 , at the first moment, the photosensitive surface 202 is located at position 1. By adjusting the light modulator 402, the light spot 201 moves in the negative direction of the X-axis. At the second moment, the photosensitive surface 202 is located at position 2. The above process is repeated so that the photosensitive surface 202 is located in multiple different areas of the light spot 201. In actual applications, the hardware cost of a two-dimensional light modulator is generally higher than that of a one-dimensional light modulator. Therefore, the embodiment of the present application can reduce the hardware cost of the detection device 100. In addition, by using a linear array detector, the detection efficiency can be improved.

[0057] In practical applications, the energy of the light beam used to obtain relevant information is related to the reliability of the relevant information obtained. The lower the energy of the light beam used to obtain relevant information, the lower the reliability of the relevant information. Therefore, the embodiment of the present application can improve the reliability of relevant information by increasing the energy of the light beam used to obtain relevant information. For example, as shown in Figure 6, the first width of the light spot 201 of the scattered light beam to be detected irradiated on the first plane is d2. The second width of the photosensitive surface 202 of the detector 103 is d1. The direction of the second width is perpendicular to the direction of the first width. The difference between d2 and d1 is less than or equal to 50 percent of d2.

[0058] According to the previous description, the value of h can be changed according to the accuracy requirements of the measurement. When the value of h becomes smaller, the energy of the light beam used to obtain relevant information will decrease, thereby affecting the reliability of the relevant information. Therefore, the detection device 100 can also include a focuser. The focuser is used to change the size of the light spot on the first plane illuminated by the scattered light beam to be detected. Figure 7 is a fourth structural schematic diagram of the detection device provided by an embodiment of the present application. As shown in Figure 7, on the basis of Figure 4a, the detection device 100 also includes a focuser 703. The focuser 703 is located on the light transmission path between the scattering component 102 and the detector 103. The focusing range of the focuser 703 can be between 1 mm and 5 mm. When the detection device 100 also includes a focuser 703, the processor 104 can also be used to adjust the focuser 703 according to the value of h, so that the size of the light spot 201 changes. For example, when the h value becomes smaller, the processor 104 is used to adjust the focuser 703 so that the area of ​​the light spot 201 becomes smaller; when the h value becomes larger, the processor 104 is used to adjust the focuser 703 so that the area of ​​the light spot 201 becomes larger.

[0059] As shown in Figure 7, the detection device 100 also includes a mask 704. The mask 704 is located on the optical transmission path between the scattering component 102 and the detector 103. The mask 704 can be used to replace some of the computing functions implemented by software. Figure 8 is a structural schematic diagram of the mask provided in an embodiment of the present application. As shown in Figure 8, the mask 704 includes different areas alternately distributed in black and white. For example, area 1 and area 4 of the mask 704 are black areas. The black area blocks the scattered light beam to be detected. Area 2 and area 3 of the mask 704 are white areas. The white area allows the scattered light beam to be detected to pass through. When the four areas (area 1, area 2, area 3 and area 4) correspond to the first area of ​​the light spot 201, the mask 704 is equivalent to performing frequency domain filtering on the first electrical signal. Therefore, by adding a mask, the embodiment of the present application can improve the efficiency of obtaining relevant information.

[0060] In practical applications, the detection device 100 may also include a light source. For example, when the detection device 100 is an absorption coefficient measurement device, the detection device 100 is used to detect the ratio of light absorption by the object to be detected. As shown in Figure 7, the light source 701 is used to output a target light beam. The target light beam is irradiated onto the object to be detected 702. The object to be detected 702 is used to reflect or transmit the target light beam. The light beam to be detected obtained by the optical coupler 101 is the reflected light or the transmitted light of the target light beam.

[0061] In practical applications, the temperature of the scattering medium 401 will affect the weight matrix of the scattering medium 401. When the temperature change causes the weight matrix to change, but when the processor obtains relevant information based on the original weight matrix, it will affect the reliability of the relevant information. Therefore, the detection device 100 can also include a temperature controller. The temperature controller is used to keep the temperature of the scattering medium 401 within the target range. Similarly, the vibration of the optical modulator 402 and the scattering medium 401 will also cause the weight matrix to change. When the processor 104 is used to obtain relevant information based on the original weight matrix, it will affect the reliability of the obtained relevant information. Therefore, the detection device 100 can also include a first isolator and a second isolator. The isolator can be a spring or a gasket, etc. The first isolator is used to reduce the vibration of the scattering medium 401. The second isolator is used to reduce the vibration of the optical modulator 402.

[0062] FIG9 is a schematic diagram of the workflow of the detection device provided in an embodiment of the present application. As shown in FIG9 , the detector 103 is used to receive an operating instruction and detect a first area of ​​the scattered light beam to be detected according to the operating instruction to obtain a first electrical signal. The detector 103 is also used to output the first electrical signal to the processor 104. After obtaining the first electrical signal, the processor 104 is used to output a clock signal. The clock signal can also be called a control signal. The optical modulator 402 is used to adjust the output angle of the scattered light beam to be detected according to the clock signal. After adjusting the output angle, the detector 103 is used to detect a second area of ​​the scattered light beam to be detected to obtain a second electrical signal. The detector 103 is also used to output a second electrical signal to the processor 104. After obtaining the second electrical signal, the processor 104 is used to output a clock signal again. The above process is repeated until the processor 104 obtains an h-way electrical signal. The processor 104 is used to obtain relevant information about the light beam to be detected based on the h-way electrical signal.

[0063] In practical applications, the processor 104 may include a collector, a memory, and a controller. The collector is used to receive multiple electrical signals from the detector 103 and transmit the multiple electrical signals to the memory. The memory may be a volatile memory or a non-volatile memory, or may include both volatile and non-volatile memories. The non-volatile memory may be a read-only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), or a flash memory. The volatile memory may be a random access memory (RAM). The memory is used to store multiple electrical signals. The controller is used to obtain the multiple electrical signals from the memory, calculate the multiple electrical signals, and obtain relevant information of the light beam to be detected.

[0064] It should be understood that the aforementioned Figures 1 to 8 are only a few examples of the detection equipment provided in the embodiments of the present application. In actual applications, those skilled in the art will be able to make adaptive modifications to the detection equipment as needed. For example, in Figure 1, the detection device 100 also includes a filter or an attenuation plate between the detector 103 and the scattering component 102. The filter is used to isolate stray light. The attenuation plate is used to control the amount of incoming light to prevent the detector 103 from saturating. For another example, in Figure 3, when the photosensitive surface 202 is at position 5, the scattering component 102 moves the light spot 201 in the positive direction of the Y axis, so that position 6 of the photosensitive surface 202 is directly below position 5. At this time, the time for the scattering component 102 to adjust the light spot position can be reduced.

[0065] The detection device provided in this application is described above. The detection method provided in this application is described below. Figure 10 is a flow chart of the detection method provided in an embodiment of this application. As shown in Figure 10, the detection method includes the following steps.

[0066] In step 1001, a detection device scatters a light beam to be detected to obtain a scattered light beam to be detected.

[0067] The detection device includes a scattering medium, also known as a scattering module. The scattering medium can be a nanoparticle pellet, a multimode optical fiber, or a diffraction optical array structure. The detection device scatters the light beam to be detected through the scattering medium, generating a scattered light beam to be detected.

[0068] In step 1002, the detection device detects a first area of ​​the scattered light beam to be detected through a detector to obtain a first electrical signal.

[0069] The detection device includes a detector, also known as a photodetector. The detector's photosensitive surface is located on a first plane. The size of the scattered light spot of the light beam to be detected on the first plane is larger than the size of the photosensitive surface. The photosensitive surface is located within the light spot. The area where the photosensitive surface is located corresponds to the first area of ​​the light spot and also corresponds to the first area of ​​the scattered light beam to be detected. The detection device detects the first area of ​​the scattered light beam to be detected via the detector and obtains a first electrical signal.

[0070] In step 1003, the detection device changes the output direction of the scattered light beam to be detected, so that the light spot of the scattered light beam to be detected moves relative to the photosensitive surface of the detector.

[0071] The detection device includes a light modulator. This light modulator can be a transmissive liquid crystal spatial light modulator, a reflective liquid crystal spatial light modulator, a MEMS-based digital micromirror and its array, a magneto-optical spatial light modulator, a rotating mirror system, or an electro-optical microcavity array. The detection device uses the light modulator to change the output direction of the scattered light beam to be detected, causing the light spot of the scattered light beam to be detected to move relative to the detector's photosensitive surface. For example, at the first moment, the photosensitive surface is at light spot position 1; at the second moment, the photosensitive surface is at light spot position 2.

[0072] In step 1004, the detection device detects the second area of ​​the scattered light beam to be detected through a detector to obtain a second electrical signal.

[0073] After the light spot moves relative to the detector's photosensitive surface, the area of ​​the photosensitive surface corresponds to the second area of ​​the light spot and also corresponds to the second area of ​​the scattered light beam to be detected. The detection device detects the second area of ​​the scattered light beam to be detected through the detector and obtains a second electrical signal.

[0074] In step 1005, the detection device obtains relevant information of the light beam to be detected based on the first electrical signal and the second electrical signal.

[0075] The detection device can obtain relevant information of the light beam to be detected based on the weight matrix of the scattering medium and the multi-channel electrical signal. For example, the weight matrix includes m rows and n columns. The weight matrix includes m×n values. m and n are integers greater than 0. The scattering medium includes m scattering areas. Each of the m scattering areas corresponds to a row of values ​​in the weight matrix. The value corresponding to each scattering area depends on the physical properties of the scattering medium in the scattering area. Alternatively, the target scattering area of ​​the scattering medium corresponds to m different incident angles. Each of the m different incident angles corresponds to a row of values ​​in the weight matrix. The value corresponding to each incident angle depends on the physical properties of the target scattering area. The weight matrix can be obtained by measurement. The embodiment of the present application does not limit the way in which the detection device obtains the weight matrix. The relevant information of the light beam to be detected is the n energy intensities of the light beam to be detected at n wavelengths. The n energy intensities correspond one-to-one to the n wavelengths. Alternatively, the relevant information of the light beam to be detected is the correspondence between n energy intensities and n wavelengths.

[0076] It should be understood that the detection method in FIG10 shares similarities with the description of the detection device in any of the aforementioned FIG1 to FIG9 . Therefore, the description of the detection method in FIG10 can be referenced with the description of the detection device in any of the aforementioned FIG1 to FIG9 . For example, the first region and the second region include an overlapping area. The detection method further includes the following steps: the detection device adjusts the size of the overlapping area based on the value of h. For another example, the detection device adjusts the focuser based on the value of h to change the size of the scattered light spot of the light beam to be detected.

[0077] The above is only a specific implementation method of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with this technical field can easily think of changes or replacements within the technical scope disclosed in this application, which should be covered by the protection scope of the present application.

Claims

1. A detection device, characterized in that: The invention comprises an optical coupler, a scattering element, a detector and a processor, wherein: The optical coupler is used to receive the light beam to be detected and couple the light beam to be detected to the scattering component; The scattering component is used to scatter the light beam to be detected, and output a plurality of scattered light beams to be detected to the detector at different angles, wherein the plurality of scattered light beams to be detected correspond to the plurality of angles one by one; The detector is used to detect multiple different regions in the multiple scattered light beams to be detected, obtain multiple electrical signals, and transmit the multiple electrical signals to the processor, wherein the multiple regions correspond to the multiple electrical signals one by one, and the multiple regions correspond to the multiple scattered light beams to be detected one by one; The processor is used to calculate the multiple electrical signals to obtain relevant information of the light beam to be detected.

2. The detection device according to claim 1, characterized in that: The scattering component comprises a scattering medium and a light modulator, wherein: The scattering medium is used to receive the light beam to be detected from the optical coupler, scatter the light beam to be detected, and make the scattered light beam to be detected incident on the optical modulator; The light modulator is used to output a plurality of scattered light beams to be detected to the detector at different angles.

3. The detection device according to claim 1, characterized in that: The scattering component comprises a light modulator and a scattering medium, wherein: The optical modulator is used to receive the light beam to be detected from the optical coupler, and output a plurality of light beams to be detected to the scattering medium at different angles; The scattering medium is used to scatter the multiple light beams to be detected to obtain multiple scattered light beams to be detected, and the multiple scattered light beams to be detected are incident on the detector, and the multiple light beams to be detected and the multiple scattered light beams to be detected correspond one to one.

4. The detection device according to any one of claims 1 to 3, characterized in that: The detector is a linear array detector, and the light modulator is a one-dimensional light modulator.

5. The detection device according to claim 4, characterized in that: The photosensitive surface of the detector is located on a first plane, and a difference between a first width of a light spot of the scattered light beam to be detected irradiated on the first plane and a second width of the photosensitive surface is less than or equal to 50 percent of the first width.

6. The detection device according to any one of claims 1 to 5, characterized in that: The plurality of regions include a first region and a second region, and the first region and the second region include an overlapping region.

7. The detection device according to claim 6, characterized in that: The area of ​​the overlapping region is less than or equal to 90 percent of the area of ​​the first region.

8. The detection device according to any one of claims 1 to 7, characterized in that: The detection device further comprises a focuser, which is located on the light transmission path between the scattering component and the detector, wherein: The focus adjuster is used to change the focal length of the scattered light beam to be detected.

9. The detection device according to any one of claims 1 to 8, characterized in that: The detection device further comprises a mask, which is located on the light transmission path between the scattering component and the detector.

10. The detection device according to any one of claims 1 to 4 and 6 to 9, characterized in that: The photosensitive surface of the detector is located in a first plane, and the ratio of the size of the light spot of the scattered light beam to be detected irradiating the first plane to the size of the photosensitive surface is between 1000 and 1000000.

11. The detection device according to any one of claims 1 to 10, characterized in that: The detection device also includes a temperature controller, wherein: The temperature controller is used to maintain the temperature of the scattering medium within a target range.

12. The detection device according to any one of claims 1 to 11, characterized in that: The detection device further comprises a first seismic isolator and a second seismic isolator, wherein: The first seismic isolator is used to reduce the vibration of the scattering medium; The second seismic isolator is used to reduce the vibration of the optical modulator.

13. A detection method, characterized in that: include: Scattering the light beam to be detected to obtain the scattered light beam to be detected; Detecting the first area of ​​the light beam to be detected after scattering by a detector to obtain a first electrical signal; Changing the output direction of the scattered light beam to be detected so that the light spot of the scattered light beam to be detected moves relative to the photosensitive surface of the detector; Detecting a second area of ​​the light beam to be detected after scattering by the detector to obtain a second electrical signal; The relevant information of the light beam to be detected is obtained according to the first electrical signal and the second electrical signal.

14. The detection method according to claim 13, characterized in that: The first region and the second region include an overlapping region; The obtaining the relevant information of the light beam to be detected according to the first electrical signal and the second electrical signal comprises: obtaining the relevant information of the light beam to be detected according to h electrical signals, wherein the h electrical signals include the first electrical signal and the second electrical signal, and h is an integer greater than or equal to 2; The method further comprises: The size of the overlapping region is adjusted according to the value of h.

15. The detection method according to claim 13 or 14, characterized in that: The obtaining the relevant information of the light beam to be detected according to the first electrical signal and the second electrical signal comprises: obtaining the relevant information of the light beam to be detected according to h electrical signals, wherein the h electrical signals include the first electrical signal and the second electrical signal, and h is an integer greater than or equal to 2; The method further comprises: The size of the light spot of the light beam to be detected after scattering is adjusted according to the value of h.

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