An electro-optical device for a sensing device, an arrangement for a sensing device, as well as a sensing device

Abstract

The invention relates to an electrooptical device (3, 5) for a sensing device (2), comprising at least one substrate (9) and at least a first electrode (10) on the substrate (9), characterized in that, a second electrode (11) on the substrate (9) is provided, wherein the first electrode (10) and the second electrode (11) are non-uniform electrodes, and wherein the first electrode (10) and the second electrode (11) are arranged such, that the first electrode (10) and the second electrode (11) are essentially arranged in parallel to each other on the substrate (9). Furthermore the invention relates to an arrangement (8), as well as to a sensing device (2).

Description

[0001] Description

[0002] An Electro-Optical Device For A Sensing Device, An Arrangement For A Sensing Device, As Well As A Sensing Device

[0003] The present invention relates to an electro-optical device for a sensing device, comprising at least one substrate and at least a first electrode on the substrate according to the pending claim 1. Furthermore, the present invention relates to a corresponding arrangement for a sensing device comprising at least an electro-optical device and at least one electrical field generation device and / or an electrical field receiving device. Furthermore, the invention relates to a corresponding sensing device comprising at least an arrangement according to the preceding aspect.

[0004] Radar sensors are integrated behind plastic covers in motor vehicles, such as the brand emblem or the bumpers. The radars emitted radiation is reflected at the surface of these parts, relating to an attenuation of the transmitted radiation which causes false detection and a decrease of the achievable maximum range and resolution.

[0005] According to the state of the art, automated driving of, for example an SAE level 4 and 5, requires the safe and environmental perception. In general, the motor vehicles environment is detected using different sensors modalities, such as radars, Lidars and cameras. Often, the sensor systems aim for a 360 degree environmental perception and / or detect all static and dynamic objects around the motor vehicle. Lidars are frequently used for precise distance measurements and can also be used for classification purposes. Current approaches for 360 3-dimensional perception require either a multitude of single sensors which are combined or larger sensors which provide a 360 degree detection of the environment. Moreover, Lidar systems can be prone to adversarial weather conditions such as rain, fog or direct light sources. Radar sensors are well established within the automotive industry and provide reliable and robust environmental data. Even in poor visual conditions, such as rain, fog, snow and dust.

[0006] However, a state of the art radom covering the radar sensor from environmental influences or hiding for design reasons the radar, have huge losses to the transmitted radiation in the order larger than 2.5 decibel (db) due to reflection and absorption of the radiation in gigahertz spectral domain.

[0007] US 10,084,239 B discloses a spectral modulator for RF beams, and a sub-millimeter wave using dynamical-writable highly-reflective regions, with sub-wave lengths diffractive patterns spatial definition that is finer than a wavelength of the incident RF beam.

[0008] US 2013 / 0050602 A1 discloses a liquid crystal (LC) cell structure comprising transparent terahertz windows, alignment layers, protective layers, in-plain electrodes, out-of-plain electrodes, and a LC layer. The in-plain-electrodes generate mostly in-plain-electric fields that are parallel to the LC layer (or to substrates forming the cell that contains the LC layer) and the out-of-plain electrodes generate out-of-plain electric fields that are perpendicular to the LC layer. The in-plain and out-off-plain electrodes have wire-grid patterns to increase terahertz wave transmission efficiency. The wire-grid patterned electrodes are transparent to terahertz waves that have plural polarization compared to a grading vector of the wire-grid pattern and are opaque to terahertz waves of perpendicular polarization. These electrodes are controlled independently to tune the optical properties of the LC and improve the operating speed of terahertz LC devices.

[0009] US 2022 / 0084709 A1 discloses an ultra-high-vacuum cell including an integrated guide stack (IGS) as part of a boundary between an internal vacuum and an external ambient. The IGS is formed by bonding together plural integrated guide components (IGCs). Each IGC includes electrical and / or electro-magnetic (EM) guides defined within a bulk material such as glass or silicon. The electrical guides can be, for example, conductive paths or wires, while EM guides can include microwave or other RF guides, optical fibers and / or paths along which an index of refraction has been modified along a desired optical path. EM and electrical connections between IGCs can be formed after the IGCs are bonded together to form the IGS. Use of an IGS as a vacuum boundary can provide substantial functionality for manipulating an interrogating quantum particles. The functionality may include, for example, the ability to regulate fuels within the UHV cell.

[0010] It is an object of the present invention to provide an electro-optical device, an arrangement, as well as a sensing device, by which reflection and / or absorption losses may be reduced.

[0011] This object is solved by an electro-optical device, an arrangement, as well as a sensing device according to the independent claims. Advantageous embodiments are presented in the dependent claims. One aspect of the invention relates to an electro-optical device for a sensing device, comprising at least one substrate and at least a first electrode on the substrate.

[0012] According to an embodiment a second electrode on the substrate is provided, wherein the first electrode and the second electrode are non-uniform electrodes, and wherein the first electrode and the second electrode are arranged such, that the first electrode and the second electrode are essentially arranged parallel to each other on the substrate.

[0013] Therefore, an electrode structure is provided that can be used for the fabrication of various electro-optic devices, including phase shifters, diffractive gratings, meta structures, polarization modulators and heathers for millimeter range applications, in particular in the gigahertz to terahertz spectrum.

[0014] The advantage of the electro-optical device is, that the transmitted radiation through, for example, a radom is increased. Furthermore, less power is needed and no degradation of resolution as well as no degradation of range is provided.

[0015] Therefore, a significant design freedom for various electro-optical devices is provided.

[0016] According to an embodiment, the first electrode comprises a first electrode finger and a second electrode finger, and the second electrode comprises a third electrode finger and a fourth electrode finger, and the fingers are arranged essentially in parallel, wherein the first finger is faced to the third finger and the second finger is faced to the fourth finger. Therefore a grid like structure is provided, wherein the fingers are arranged such, that fingers from each electrode are interlocking each other. In particular a special distribution pattern is provided which may reduce a transmission loss through the substrate.

[0017] In another embodiment, at least a third electrode and a fourth electrode are arranged on the substrate, and wherein the third electrode and the fourth electrode are arranged essentially in parallel to each other. In particular, a structure arrangement is provided with two different, interleaving electrode structures. In particular, more electrodes are fabricated on the same substrate, for the total of N, with the same orientation, for example along a Y-axis, but with possibly different spacings and with individual controls. According to the embodiment, such a substrate may be assembled with another similar electrode that may allow generating periodic refractive index modulations with a grating wave vector that is parallel with the x- axis. According to another embodiment, the first electrode and the second electrode are operated depending on a first operation signal and the third electrode and the fourth electrode are operated depending on a second operation signal, which is different to the first operation signal. Therefore, the generation of an electric field perpendicular to the substrate may be enabled. Furthermore, the generation of an electric field parallel to the substrate or tilted with respective substrate may be provided by using the different operation signals with specific amplitudes and phase relations. The electric field that is parallel to the substrates may be used, among others, to align LC molecules parallel to the substrates, while the electric field that is perpendicular to substrates may reorient these molecules at different degrees with respect to cell substrates.

[0018] In an another embodiment the substrate is a transparent substrate. For example, the transparent substrate may be a glass, plastic or a composite substrate. Therefore, different types of substrate may be provided, wherein the electro-optical device is high flexible to be arranged or used.

[0019] In another embodiment at least the first electrode and / or the second electrode are comprising a layer of indium tin oxide (ITO) and / or copper and / or gold and / or silver and / or carbon nanotubes and / or silver nanowires and / or conductive polymer. This examples are not exhaustive. In particular, one of the frequently used electrode materials for visible electrooptic applications is the thin film of ITO. With appropriate choice of the deposition conditions and the physical parameters of the film, it can provide rather low sheet resistance (Rs), for example, as low as 10 Ohm / Sqaure. From the other hand, with appropriate index matching layers, ITO films, in particular deposited on the substrate, can also provide very low optical or radiative losses, mostly due to the absorption and reflection, for example at the order of 0.2%. According to an advantageous form it may be used at the gigahertz or terahertz frequency spectrum, but unfortunately, their absorption may be very high, such as at the order of 10 db. The losses can be dramatically reduced with the specific choice of the ITO material, in particular the range of the Rs, and its spatial distribution pattern. In particular, the ITO shows excellent transmission when its lines / fingers are along Y-axis, that is, perpendicular to the polarization of the radiation, in particular along X-axis. The loss, in particular introduced by the ITO pattern, is at the order of a fraction of 1 db . Therefore, this gives a significant design freedom for various electro-optic applications.

[0020] In another embodiment at least the first electrode and / or the second electrode is arranged meander shaped on the substrate. In particular, the finger electrodes may be split into a serpentine / meander form to allow flowing current. This, in addition, may be used to heat the electro-optical device or any substrate on which such electrodes are deposited, for example, if the device must operate at low environmental temperatures.

[0021] Another aspect of the invention relates to an arrangement for a sensing device comprising at least an electro-optical device according to the preceding aspect and at least one electrical field generating device and / or an electrical field receiving device. Therefore, the arrangement may be configured as a sending device and / or a receiving device, for example for a radar sensor.

[0022] According to an advantageous embodiment of the arrangement, the first electrode and the second electrode are arranged essentially perpendicular to the generated and / or received electrical field. In particular, according to this embodiment, the transmission loss is reduced dramatically.

[0023] According to another embodiment, the arrangement comprises a further electro-optical device according to the preceding aspect, wherein the electro-optical device and the further electro-optical device are facing each other. Therefore, for example an electro-optical cell may be fabricated with facing to each other. Two substrates may be spaced at a desired distance, both having finger electrodes, facing each other on the internal side of the cell. Therefore, a sandwich like structure of that two electro-optical devices is provided.

[0024] According to another embodiment, the electro-optical device and the further electro-optical device are arranged in a predefined distance to each other. Therefore, the arrangement can be used in different gigahertz to terahertz applications, in particular, for example for a radar sensor device.

[0025] In another embodiment the arrangement is configured for generating and / or receiving an electrical field in at least a gigahertz-spectrum or higher. Therefore, the arrangement can be used, for example, for radars in order to capture surroundings of, for example, a motor vehicle.

[0026] In another embodiment, the arrangement comprises a plurality of electro-optical devices according to the preceding aspect, wherein the electro-optical devices are stacked. For example, two or more “sandwiches” may be assembled one after another, like a stack, with a possible relative shift, to enhance the diffraction properties of the arrangement. A still further aspect of the invention relates to a sensing device, comprising at least an arrangement according to the preceding aspect.

[0027] According to an advantageous embodiment of the sensing device, the sensing device is configured as a radar sensor.

[0028] A still further aspect of the invention relates to a motor vehicle comprising at least the sensing device according to the preceding aspect.

[0029] Advantageous forms of the electro-optical device are to be regarded as advantageous forms of the arrangement, the sensing device, as well as the motor vehicle.

[0030] In particular an electronic computing device / computing unit may be provided, for example for generating the operation signals.

[0031] A computing unit may in particular be understood as a data processing device, which comprises processing circuitry. The computing unit can therefore in particular process data to perform computing operations. This may also include operations to perform indexed accesses to a data structure, for example a look-up table, LUT.

[0032] In particular, the computing unit may include one or more computers, one or more microcontrollers, and / or one or more integrated circuits, for example, one or more application-specific integrated circuits, ASIC, one or more field-programmable gate arrays, FPGA, and / or one or more systems on a chip, SoC. The computing unit may also include one or more processors, for example one or more microprocessors, one or more central processing units, CPU, one or more graphics processing units, GPU, and / or one or more signal processors, in particular one or more digital signal processors, DSP. The computing unit may also include a physical or a virtual cluster of computers or other of said units.

[0033] In various embodiments, the computing unit includes one or more hardware and / or software interfaces and / or one or more memory units.

[0034] A memory unit may be implemented as a volatile data memory, for example a dynamic random access memory, DRAM, or a static random access memory, SRAM, or as a nonvolatile data memory, for example a read-only memory, ROM, a programmable read-only memory, PROM, an erasable programmable read-only memory, EPROM, an electrically erasable programmable read-only memory, EEPROM, a flash memory or flash EEPROM, a ferroelectric random access memory, FRAM, a magnetoresistive random access memory, MRAM, or a phase-change random access memory, PCRAM.

[0035] The sensing device may be used in an electronic vehicle guidance system. An electronic vehicle guidance system may be understood as an electronic system, configured to guide a vehicle in a fully automated or a fully autonomous manner and, in particular, without a manual intervention or control by a driver or user of the vehicle being necessary. The vehicle carries out all required functions, such as steering maneuvers, deceleration maneuvers and / or acceleration maneuvers as well as monitoring and recording the road traffic and corresponding reactions automatically. In particular, the electronic vehicle guidance system may implement a fully automatic or fully autonomous driving mode according to level 5 of the SAE J3016 classification. An electronic vehicle guidance system may also be implemented as an advanced driver assistance system, ADAS, assisting a driver for partially automatic or partially autonomous driving. In particular, the electronic vehicle guidance system may implement a partly automatic or partly autonomous driving mode according to levels 1 to 4 of the SAE J3016 classification. Here and in the following, SAE J3016 refers to the respective standard dated April 2021.

[0036] Guiding the vehicle at least in part automatically may therefore comprise guiding the vehicle according to a fully automatic or fully autonomous driving mode according to level 5 of the SAE J3016 classification. Guiding the vehicle at least in part automatically may also comprise guiding the vehicle according to a partly automatic or partly autonomous driving mode according to levels 1 to 4 of the SAE J3016 classification.

[0037] The sensing device may be configured as environmental sensing system. For example, an environmental sensor system can be understood as a sensor system, which is able to generate sensor data or sensor signals, which depict, represent or image an environment of the environmental sensor system. In particular, the ability to capture or detect electromagnetic or other signals from the environment, cannot be considered a sufficient condition for qualifying a sensor system as an environmental sensor system. For example, cameras, lidar systems, radar systems or ultrasonic sensor systems may be considered as environmental sensor systems.

[0038] Further features of the invention are apparent from the claims, the figures and the figure description. The features and combinations of features mentioned above in the description as well as the features and combinations of features mentioned below in the description of figures and / or shown in the figures may be comprised by the invention not only in the respective combination stated, but also in other combinations. In particular, embodiments and combinations of features, which do not have all the features of an originally formulated claim, may also be comprised by the invention. Moreover, embodiments and combinations of features, which go beyond or deviate from the combinations of features set forth in the recitations of the claims may be comprised by the invention.

[0039] In the following, the invention will be explained in detail with reference to specific exemplary implementations and respective schematic drawings. In the drawings, identical or functionally identical elements may be denoted by the same reference signs. The description of identical or functionally identical elements is not necessarily repeated with respect to different figures.

[0040] Therefore, the drawings show in:

[0041] Fig. 1 a schematic top view according to an embodiment of a motor vehicle comprising an embodiment of a sensing device;

[0042] Fig. 2 a schematic view according to an embodiment of an electro-optical device;

[0043] Fig. 3 a schematic perspective view according to an embodiment of an arrangement:

[0044] Fig. 4 a schematic perspective view according to an embodiment of an arrangement;

[0045] Fig. 5 another schematic perspective view according to an embodiment of an electro-optical device; and

[0046] Fig. 6 another schematic top view according to an embodiment of an electro-optical device.

[0047] In the figures elements having the same function are indicated by the same reference signs.

[0048] Fig. 1 shows a schematic top view according to an embodiment of a motor vehicle 1. The motor vehicle 1 may be configured as an at least in part assisted motor vehicle 1 or a fully assisted motor vehicle 1. For that purpose the motor vehicle 1 comprises at least one sensing device 2. The sensing device 2 may be configured as for example a radar sensor. Therefore, the sensing device 2 may comprise an electro-optical device 3, for example for sending a signal into surroundings 4 of the motor vehicle 1. Furthermore, the sensing device 2 may comprise an another electro-optical device 5, which may be configured for receiving a signal from the surroundings 4. Furthermore, the sensing device 2 may comprise one electrical field generating device 6 and / or an electrical field receiving device 7. Furthermore, the sensing device 2 may comprise an electronic computing device 8.

[0049] Fig. 2 shows a top view according to an embodiment of an electro-optical device 3, 5. The electro-optical device 3, 5 according to Fig. 2 comprises at least one substrate 9 as well as a first electrode 10. Furthermore, the electro-optical device 3, 5 may comprise a second electrode 11 on the substrate 9, wherein the first electrode 10 and the second electrode 11 are non-uniform electrodes, and wherein the first electrode 10 and the second electrode 11 are arranged such, that the first electrode 10 and the second electrode 11 are essentially arranged in parallel to each other on the substrate 9.

[0050] In particular, Fig. 2 shows that the first electrode 10 may comprise a first electrode finger 12 and a second electrode finger 13, and the second electrode 11 may comprise a third electrode finger 14 and a fourth electrode finger 15, and the fingers 12, 13, 14, 15 are arranged essentially in parallel, wherein the first finger 12 is faced to the third finger 14 and the second finger 13 is faced to the fourth finger 15. According to the embodiment, the first electrode 10 comprises a further finger 16 and the second electrode 11 comprises a still further finger 17.

[0051] The first substrate 9 may be, for example, transparent, for example a glass, plastic or composite substrate.

[0052] Fig. 2 shows that the fingers 12 may comprise a length I, a width H. Furthermore, Fig. 2 shows that the fingers 12, 13, 14, 15, 16, 17 may have a gap G to each other. The values of G and H may be predetermined or may change in space.

[0053] According to the embodiment at least the first electrode 10 and / or the second electrode 11 are comprising a layer of indium tin oxide (ITO) and / or copper and / or gold, and / or silver and / or carbon nanotubes and / or silver nanowires and / or a conductive polymer. In particular, one of the best transparent electrode materials for visible electro-optic applications is the thin film ITO. With the appropriate choice of the deposition conditions and physical parameters of the film, it may provide rather low sheet resistance (Rs), for example, as low as 10 Ohm / square. From the other hand, with appropriate index matching lighters, ITO films, in particular deposited on glass substrate 9, may also provide very low optical or radiative losses, mostly due to absorption and reflection, for example, at the order of 0.2% percent (for the visible or near infrared spectral range). They are widely used in the industry and their production is very well mastered. This is now used in the gigahertz or terahertz frequency spectrum, in order to provide, for example, a radar sensor device. According to the shown embodiment, the losses can be dramatically reduced with a specific choice of the ITO material and its spatial distribution pattern, as shown in Fig. 2.

[0054] Fig. 3 shows a schematic perspective view according to the embodiment of Fig. 2. In particular, the Fig. 3 shows a schematic experimental arrangement 18 with mutual orientations of the radar antenna 6, 7 and the proposed basic electrode 10, 11 and substrate 9.

[0055] In particular, as shown in Fig. 3, the fingers 12, 13, 14, 15, 16, 17 are perpendicular to the electric field of the radiation. In particular, the arrangement 18 according to the shown embodiment, shows excellent transmission when its fingers are along Y-axis, that is, perpendicular to the polarization of the radiation, in particular the X-axis. The loss, introduced by the, for example, ITO pattern as shown, which is at the order of 0.1 db. This may give significant design freedom for various electro-optic applications.

[0056] Fig. 4 shows another embodiment according to an arrangement 18. In particular, Fig. 4 shows two substrates set-up comprising, for example, a first electro-optical device 3 as well as a further electro-optical device 3’. In particular, a so-called sandwich electro-optical device 3, 3’ is shown. Between the two electro-optical substrates a distance d is provided, which must be carefully chosen taking into account the operation wavelength, parameters G and W of electrodes, as well as the desired electro-optical functions, such as phase shifts, etc.

[0057] In particular Fig. 4 shows the arrangement 18 comprising the electro-optical device 3 and the further electro-optical device 3’, wherein, the electro-optical device 3 and the further electro- optical device 3’ are arranged in the predefined distance d to each other. In particular, the arrangement 18 may be configured for generating and / or receiving an electrical field in at least a gigahertz spectrum or higher. The electro-optical device 3 as well as the further electro-optical device 3’ may comprise the same features, for example the same substrates 9, the first electrode 10 as well as the second electrode 11.

[0058] In particular Fig. 4 shows the two substrates 9 with a desired distance d, both having the finger patterned electrodes, facing each other in the internal side of an electrical cell 14 that may contain electro responsive material, such as LC. The two devices 3 and 3’ may operate in phase or with shifted phases or with master-slave relations. The electro-optical material inside may be used for a relative phase shift or a phase shift of radiation passing through the assembly 14.

[0059] According to still another embodiment, two or more such sandwiches may be assembled one after the other, in particular like a stack, with possible relative shift, to enhance the phase shifting or diffraction properties of the system. Such gratings can, among others, generate various diffraction orders, either symmetric or asymmetric allowing a better, dynamically variable, field of view and detection.

[0060] Fig. 5 shows another schematic perspective view according to an embodiment of the electro- optical device 3. In particular, Fig. 5 shows that at least a third electrode 21 and a fourth electrode 22 are arranged on the substrate 9, and wherein the third electrode 21 and the fourth electrode 22 are arranged essentially in parallel to each other.

[0061] Therefore, it might be provided, that the first electrode 10 and the second electrode 11 are operated depending on a first operation signal 19 and the third electrode 21 and the fourth electrode 22 are operated depending on a second operation signal 20, which is different to the first operation signal 19. Therefore, more electrodes 10, 11, 21 , 22 are fabricated on the same substrate 9, for example in total of N. They may comprise the same orientation, in particular along the Y-axis, but with possible different spacing and with individual controls, in particular control signals 19, 20.

[0062] According to the embodiment, such a substrate 9 may be assembled with another similar electrode that may now allow generating a periodic refractive index modulation with a grating wave vector that is parallel with the X-axis. Alternatively, in another embodiment, such a substrate 9 may be assembled with another substrate 9 without electrodes that will allow reducing losses. In this case, in-plan-switch approach may be used to generate periodical reoriented molecular pattern for the ground state homeotropic alignment, wherein alpha is 90 degrees.

[0063] Fig. 6 shows another schematic top view according to embodiment of an electro-optical device 3, 5. In particular, Fig. 6 shows that at least the first electrode 11 and / or the second electrode 11 are arranged meander shaped on the substrate 9. In particular, the described finger electrodes may be split into a serpentine form to allow flowing current. This, in addition, may be used to heat for example the electro-optical device 3, 5 or a substrate 9 on which each electrode 10, 11 may be deposited. List of Reference Signs

[0064] 1 Motor vehicle

[0065] Sensing device

[0066] 3 Electro-optical device surroundings

[0067] 5 electro-optical device

[0068] 6 electrical field generating device

[0069] 7 electrical field receiving device

[0070] 8 electronic computing device

[0071] 9 substrate

[0072] 10 first electrode

[0073] 11 second electrode

[0074] 12 first finger

[0075] 13 second finger

[0076] 14 third finger

[0077] 15 fourth finger

[0078] 16 further finger

[0079] 17 still further finger

[0080] 18 arrangement

[0081] 19 first operation signal

[0082] 20 second operation signal

[0083] 21 third electrode

[0084] 22 fourth electrode

[0085] I length

[0086] H width

[0087] G gap d distance

Claims

Claims1. An electrooptical device (3, 5) for a sensing device (2), comprising at least one substrate (9) and at least a first electrode (10) on the substrate (9), characterized in that, a second electrode (11) on the substrate (9) is provided, wherein the first electrode (10) and the second electrode (11) are non-uniform electrodes, and wherein the first electrode (10) and the second electrode (11) are arranged such, that the first electrode (10) and the second electrode (11) are essentially arranged in parallel to each other on the substrate (9).

2. An electrooptical device (3, 5) according to claim 1, characterized in that the first electrode (10) comprises a first electrode finger (12) and a second electrode finger (13), and the second electrode (11) comprises a third electrode finger (14) and a fourth electrode finger (15), and the fingers (12, 13, 14, 15) are arranged essentially in parallel, wherein the first finger (12) is faced to the third finger (14) and the second finger (13) is faced to the fourth finger (15).

3. An electrooptical device (3, 5) according to claim 1 or 2, characterized in that at least a third electrode (21) and a fourth electrode (22) are arranged on the substrate (9), and wherein the third electrode (21) and the fourth electrode (22) are arranged essentially in parallel to each other.

4. An electrooptical device (3, 5) according to claim 3, characterized in that the first electrode (10) and the second electrode (11) are operated depending on a first operation signal (19) and the third electrode (21) and the fourth electrode (22) are operated depending on second operation signal (20), which is different to the first operation signal (19).

5. An electrooptical device (3, 5) according to any of claims 1 to 4, characterized in thatthe substrate (9) is a transparent substrate.

6. An electrooptical device (3, 5) according to any of claims 1 to 5, characterized in that at least the first electrode (10) and / or the second electrode (11) are comprising a layer of Indium Tin Oxide and / or copper and / or gold and / or silver and / or carbon nano tubes and / or silver nano wires and / or a conductive polymer.

7. An electrooptical device (3, 5) according to any of claims 1 to 6, characterized in that at least the first electrode (10) and / or the second electrode (11) is arranged meander shaped on the substrate (9).

8. Arrangement (18) for a sensing device (2) comprising at least an electrooptical device (3) according to any of claims 1 to 7 and at least one electrical field generating device (6) and / or an electrical field receiving device (7).

9. Arrangement (18) according to claim 8, characterized in that the first electrode (10) and the second electrode (11) are arranged essentially perpendicular to the generated and / or received electrical field.

10. Arrangement (18) according to claim 8 or 9, characterized in that the arrangement (18) comprises a further electrooptical device (3') according to any of claims 1 to 7, wherein the electrooptical device (3) and the further electrooptical device (3') are facing each other.

11. Arrangement (18) according to claim 10, characterized in that the electrooptical device (3) and the further electrooptical device (3') are arranged in a predefined distance to each other.

12. Arrangement (18) according to claim 8 or 11, characterized in that the arrangement (18) is configured for generating and / or receiving an electrical field in at least a GHz-Spectrum or higher.

13. Arrangement (18) according to claim 8 or 12, characterized in that the arrangement (18) comprises a plurality of electrooptical devices (3, 5) according to any of claims 1 to 7, wherein the electrooptical devices (3, 5) are stacked.

14. A sensing device (2), comprising at least an arrangement (18) according to any of claims 8 to 13.

15. A sensing device (2) according to claim 14, characterized in that the sensing device (2) is configured as a radar sensor.

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